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JP4766516B2 - Method for hydrophilizing microchannels - Google Patents
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JP4766516B2 - Method for hydrophilizing microchannels - Google Patents

Method for hydrophilizing microchannels Download PDF

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JP4766516B2
JP4766516B2 JP2006074048A JP2006074048A JP4766516B2 JP 4766516 B2 JP4766516 B2 JP 4766516B2 JP 2006074048 A JP2006074048 A JP 2006074048A JP 2006074048 A JP2006074048 A JP 2006074048A JP 4766516 B2 JP4766516 B2 JP 4766516B2
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hydrophilizing
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智司 福崎
和宏 高橋
令子 高澤
健 海老原
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Nippon Light Metal Co Ltd
Okayama Prefectural Government
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この発明は、医学、薬学、生物学、工学等の多くの分野で進められているマイクロ化学等において流体の移動手段として用いられる、例えばマイクロリアクター、バイオセンサー、分析用具、キャピラリーカラム、ろ過フィルター等の微細流路の親水化処理方法に関する。   The present invention is used as a fluid transfer means in microchemistry and the like that are being promoted in many fields such as medicine, pharmacy, biology, and engineering, such as microreactors, biosensors, analytical tools, capillary columns, and filtration filters. The present invention relates to a method for hydrophilizing a fine channel.

近年、微細加工技術の進展に伴って様々な研究分野でダウンサイジングやナノテクノロジー等のマイクロ化学の研究が行われており、例えば、マイクロ化学プラントの分野では抽出、分離、濃縮、混合・反応、加熱等の単位操作の集積化やワンチップ化等の研究が、環境保全の分野では排ガス処理や微粒子の除去、脱臭等の研究が、エネルギーの分野では燃料電池用改質器の開発や石油精製の研究が盛んに進められている。そして、このようなマイクロ化学の世界では、微細流路は単に単位操作間の物質移動の手段に止まらず、流体を高精度に扱いながら高速・高効率に反応を行わせるためには不可欠な微小空間であり、この微細流路の流体制御のためにその流路内壁面に親水化処理や疎水化処理を施すことも行われている。   In recent years, with progress in microfabrication technology, research on microchemistry such as downsizing and nanotechnology has been conducted in various research fields. For example, in the field of microchemical plants, extraction, separation, concentration, mixing and reaction, Research on integration of unit operations such as heating and one-chip research, research on exhaust gas treatment, removal of fine particles, deodorization, etc. in the field of environmental conservation, development of reformers for fuel cells and oil refining in the field of energy Research is actively promoted. In such a microchemical world, the micro-channel is not just a means of mass transfer between unit operations, but a micro-channel that is indispensable for reacting fluids with high accuracy and at high speed and with high efficiency. In order to control the fluid in the fine channel, the inner wall surface of the channel is subjected to a hydrophilic treatment or a hydrophobic treatment.

例えば、特開2003-272,654号公報には、燃料電池セパレータのガス流路、特にそのUターン部に水だまりが発生するのを抑制するために、ガス流路の流路内壁面に親水性の高いカーボン粒子を含んだ液滴や界面活性剤を塗布して親水化させる方法が提案されている。しかしながら、この方法においては、界面活性剤等を塗布するだけなので、一時的には効果があってもこの界面活性剤等が流失するとその効果が発現しなくなり、長期間に亘って親水化効果を持続させるのが難しいという問題がある。   For example, in Japanese Patent Laid-Open No. 2003-272,654, in order to suppress the formation of a puddle in the gas flow path of the fuel cell separator, particularly the U-turn portion, hydrophilicity is formed on the inner wall surface of the gas flow path. There has been proposed a method of hydrophilizing by applying droplets or surfactants containing high carbon particles. However, in this method, since only a surfactant or the like is applied, even if it is temporarily effective, if this surfactant or the like is washed away, the effect does not appear, and a hydrophilic effect is obtained over a long period of time. There is a problem that it is difficult to sustain.

また、特開2004-117,179号公報には、凹部を有する高分子材料製の基板とこの基板の凹部を覆う高分子材料製のカバーとで形成された試料液移動用の微細流路を備えた分析用具において、凹部内面にフッ素ガス及び酸素ガスからなる改質ガスを接触させた後、この凹部内面に水又は水蒸気を接触させて凹部内面を親水化し、凹部内面の水に対する接触角を0〜80°とする親水処理の方法が開示されている。この親水処理は、凹部内面にフッ素ガス及び酸素ガスと水又は水蒸気とを接触させることにより、凹部内面の高分子鎖に親水基であるカルボキシル基を導入して親水化するものであるため、金属、ガラス、金属酸化物、メッキ皮膜等の無機材料等には適用できない。   Japanese Patent Application Laid-Open No. 2004-117,179 is provided with a microfluidic channel for moving a sample solution formed of a polymer material substrate having a recess and a polymer material cover covering the recess of the substrate. In the analysis tool, after the reformed gas comprising fluorine gas and oxygen gas is brought into contact with the inner surface of the concave portion, water or water vapor is brought into contact with the inner surface of the concave portion to hydrophilize the inner surface of the concave portion, and the contact angle of the inner surface of the concave portion with respect to water is set to 0 A hydrophilic treatment method of 80 ° is disclosed. In this hydrophilic treatment, the fluorine gas and oxygen gas and water or water vapor are brought into contact with the inner surface of the concave portion to introduce a carboxyl group, which is a hydrophilic group, into the polymer chain on the inner surface of the concave portion. It cannot be applied to inorganic materials such as glass, metal oxides, and plating films.

更に、特開2001-159,618号公報には、毛細管現象により血液等の液体試料を採取するキャビティを備え、試薬との反応により特定の成分を分析するバイオセンサーにおいて、キャビティに面するセンサ側壁を界面活性剤含有の樹脂材料で形成したり、センサ側壁を界面活性剤で表面被覆したフィルムで形成したり、あるいは、センサ側壁をプラズマ放電処理、カップリング反応処理、オゾン処理、紫外線処理等を施すことにより、親水化する方法が提案されている。ここで提案されているバイオセンサーは、その材質がポリエチレンテレフタレート、ポリカーボネート等の樹脂であり、無機材料等で形成された微細流路に適用することについては記載されていない。   Furthermore, Japanese Patent Laid-Open No. 2001-159,618 discloses a biosensor that includes a cavity for collecting a liquid sample such as blood by capillary action and analyzes a specific component by reaction with a reagent. Formed with a resin material containing an activator, formed with a film whose surface is coated with a surfactant on the sensor side wall, or subjected to plasma discharge treatment, coupling reaction treatment, ozone treatment, UV treatment, etc. on the sensor side wall Thus, a method of hydrophilizing has been proposed. The biosensor proposed here is made of a resin such as polyethylene terephthalate or polycarbonate, and is not described as being applied to a fine channel formed of an inorganic material or the like.

更にまた、特開平7-276,629号公報には、プラスチック製インク噴射容器を備えたインクジェット記録ヘッドのインク流路内壁面を親水性にするために、例えば数千から数万ppmオーダーの高濃度でオゾンを含む酸素・オゾンガスを発生させ、この高濃度オゾン含有の酸素・オゾンガスをインク流路に流通させる方法が提案されている。ここで提案されたインクジェット記録ヘッドの親水処理方法も、プラスチック製のインク流路に適用するものであり、無機材料等で形成された微細流路に適用することについては記載されていない。   Furthermore, Japanese Patent Application Laid-Open No. 7-276,629 discloses a high concentration of, for example, several thousand to several tens of thousands ppm in order to make the ink flow path inner wall surface of an ink jet recording head provided with a plastic ink jet container hydrophilic. There has been proposed a method of generating oxygen / ozone gas containing ozone and circulating this high-concentration ozone-containing oxygen / ozone gas through an ink flow path. The proposed hydrophilic treatment method for an ink jet recording head is also applied to a plastic ink flow path, and is not described as being applied to a fine flow path formed of an inorganic material or the like.

また、特開平8-108,535号公報には、インクジェット記録ヘッドのインク流路内壁面をインクの接触角10°以下の親水性にするために、界面活性剤含有のアルカリ性洗浄液を用いたアルカリ洗浄を行った後、更にオゾン処理を行うインクジェット記録ヘッドの親水処理方法が提案されている。ここで提案されたインクジェット記録ヘッドの親水処理方法についても、特開平7-276,629号公報の場合と同様に、プラスチック製のインク流路に適用するものであり、無機材料等で形成された微細流路に適用することについては記載されていない。   Japanese Patent Application Laid-Open No. 8-108,535 discloses an alkali cleaning using an alkaline cleaning liquid containing a surfactant in order to make the inner wall surface of the ink flow path of the ink jet recording head hydrophilic with an ink contact angle of 10 ° or less. There has been proposed a hydrophilic treatment method for an ink jet recording head which is further subjected to ozone treatment after the treatment. The proposed hydrophilic treatment method for an ink jet recording head is also applied to a plastic ink flow path, as in the case of Japanese Patent Application Laid-Open No. 7-276,629, and a fine flow formed of an inorganic material or the like. There is no mention of application to roads.

微細流路の被処理面を親水化処理する場合、界面活性剤や親水性塗料等の液体を塗布する従来の方法では、たとえこの微細流路の形状が上方開口した凹溝状であっても、微細流路内面の被処理面の隅々にまで液体を斑なく塗布することは困難であり、微細流路の形状が管状であったり孔状であったりすると、液体の導入や乾燥に時間がかかり、生産性が悪いという問題がある。   In the case of hydrophilizing the surface to be treated of the fine flow path, in the conventional method of applying a liquid such as a surfactant or a hydrophilic paint, even if the shape of the fine flow path is an open groove shape, In addition, it is difficult to apply the liquid to every corner of the surface to be processed on the inner surface of the fine channel. If the shape of the fine channel is tubular or hole-shaped, it takes time to introduce and dry the liquid. And there is a problem that productivity is poor.

また、フッ素ガス、酸素ガス、オゾン含有ガス等の気体を用いた従来の方法においては、いずれも微細流路の材質が樹脂等の有機高分子であって、高分子鎖の一部を酸化力の強い上記気体で分解し、反応させてカルボキシル基等の親水性極性基を導入するというものであり、無機材料等で形成された微細流路に適用することについては記載されていない。   In addition, in the conventional methods using gases such as fluorine gas, oxygen gas, and ozone-containing gas, the material of the fine channel is an organic polymer such as resin, and a part of the polymer chain is oxidized. It decomposes with the above strong gas and reacts to introduce a hydrophilic polar group such as a carboxyl group, and is not described for application to a fine channel formed of an inorganic material or the like.

ここで、無機材料製の微細流路では、しばしば気泡の巻き込みや流路内での残存気泡の発生が起きる。その結果、スラグフロー現象(水/気体/水の交互流)が発生したり、流路抵抗の増加や閉塞をもたらす等して、流体の移動を著しく妨げる状態に陥る。また、微細流路内で水と有機溶媒がお互いに混じり合わない多層流を形成させるためには、流路壁面に対する水の濡れ性(接触角が指標)を制御する必要がある。水は、大気中や液体、固体表面のあらゆる場所に存在していることから、多層流とは液/液混合のみならず、液/気、気/気混合流においても同様であることはいうまでもない。更に、無機材料製の微細流路が組み込まれた機器等は、ポリマー製の使い捨て製品とは異なり、洗浄による繰り返し使用が基本であるため、流路内での気泡発生の原因となるタンパク質や油滴等の付着残留物は完全に除去する必要があり、もとよりこれら残留物の付着親和性を低減させる表面改質が要求される。そして、このような課題を解決する方法として、微細流路の内面を、水滴の接触角10°以下となるように、親水化処理することは有効な手段であると考えられる。   Here, in a fine channel made of an inorganic material, bubbles are often entrained and residual bubbles are generated in the channel. As a result, a slag flow phenomenon (alternate flow of water / gas / water) occurs, or flow resistance is increased or blocked, resulting in a state that hinders fluid movement. In addition, in order to form a multilayer flow in which water and an organic solvent do not mix with each other in the fine channel, it is necessary to control water wettability (contact angle is an index) with respect to the channel wall surface. Since water exists everywhere in the atmosphere, liquid, and solid surfaces, multilayer flow is not only liquid / liquid mixing but also liquid / gas and gas / gas mixed flows. Not too long. In addition, devices that incorporate fine channels made of inorganic materials are fundamentally used repeatedly by washing, unlike polymer disposable products, so proteins and oils that cause bubbles in the flow channel are used. It is necessary to completely remove adhesion residues such as droplets, and surface modification that reduces the adhesion affinity of these residues is required. As a method for solving such a problem, it is considered to be an effective means to hydrophilize the inner surface of the fine channel so that the contact angle of water droplets is 10 ° or less.

ところで、オゾン含有乾燥酸素ガスを用いた無機材料の表面処理は従来から行われている。例えば、表面粗度が1μmとなるように研磨されたステンレス鋼を、オゾン濃度0.5〜10容量%、温度150〜300℃で1〜10時間処理して加熱酸化処理を行う方法が知られている(特開平5-287,496号公報)。   By the way, the surface treatment of the inorganic material using ozone-containing dry oxygen gas has been conventionally performed. For example, a method is known in which a stainless steel polished to have a surface roughness of 1 μm is subjected to a heat oxidation treatment by treating it at an ozone concentration of 0.5 to 10 vol% and a temperature of 150 to 300 ° C. for 1 to 10 hours. (Japanese Patent Laid-Open No. 5-287,496).

この方法は、緻密な酸化皮膜の形成が目的であって、部材からの不純物の溶出を抑制する効果を期待するものであるが、ステンレス鋼製の微細流路に適用すると、表面の過剰酸化が起こって鉄の表面濃縮とクロム酸化物の減少が起こり、タンパク質等が吸着し易い表面に変質されてしまう。更に、肉厚の薄い管状路、孔状路、連続空隙路等に適用した場合には、比界面積が大きいために、微細構造の熱歪みや表面荒れが起こる等、一般構造体では問題にならないような微小変化によっても致命的な影響を受ける。この表面の微小変化は、ステンレス鋼で構成される微細構造部材に限ることではなく、アルミニウム、ガラス、メッキ皮膜で形成される場合でも起こる現象である。   This method is intended to form a dense oxide film and is expected to suppress the elution of impurities from the member. However, when applied to a stainless steel microchannel, excessive oxidation of the surface may occur. It occurs, and iron surface concentration and chromium oxide decrease occur, and the surface is easily altered by the adsorption of proteins and the like. Furthermore, when applied to thin-walled tubular passages, hole-like passages, continuous void passages, etc., the large specific interface area causes problems such as thermal distortion of the fine structure and surface roughness, which is a problem in general structures. Even minor changes that are not possible are fatally affected. This minute change of the surface is not limited to a microstructure member made of stainless steel, but is a phenomenon that occurs even when formed of aluminum, glass, or a plating film.

また、ステンレス鋼の電荷特性の制御と表面汚れの分解による洗浄の促進を目的として、オゾン濃度0.025〜0.5容量%、温度5〜40℃で処理するオゾン処理方法が提案されている(特許第2,944,985号公報)。この方法では、接触角は40〜55°程度までしか低下せず、十分な親水化処理を行うことはできない。このように、これまで知られたオゾン処理によっては、微細流路の物理的、化学的、物理化学的変化を伴うことなく、水滴の接触角を10°以下にまで親水化処理することは困難である。   For the purpose of controlling the charge characteristics of stainless steel and promoting cleaning by decomposing surface dirt, an ozone treatment method has been proposed in which treatment is performed at an ozone concentration of 0.025 to 0.5% by volume and a temperature of 5 to 40 ° C. (Patent No. 2,944,985). In this method, the contact angle decreases only to about 40 to 55 °, and sufficient hydrophilic treatment cannot be performed. Thus, it is difficult to hydrophilize the contact angle of water droplets to 10 ° or less without any physical, chemical, or physicochemical changes in the fine flow path by the known ozone treatment. It is.

特開2003-272,654号公報Japanese Patent Laid-Open No. 2003-272,654 特開2004-117,179号公報JP 2004-117,179 A 特開2001-159,618号公報JP 2001-159,618 特開平7-276,629号公報Japanese Unexamined Patent Publication No. 7-276,629 特開平8-108,535号公報Japanese Patent Laid-Open No. 8-108,535 特開平5-287,496号公報Japanese Patent Laid-Open No. 5-287,496 特許第2,944,985号公報Japanese Patent No. 2,944,985

そこで、本発明者らは、このような問題を解決するために鋭意検討した結果、たとえ微細流路が無機材料で形成されていても、この微細流路の被処理面に所定のオゾン含有量の乾燥酸素ガスを用いて所定の処理条件で接触させることにより、微細流路の被処理面における水滴の接触角を10°以下にまで低下させることができることを見い出し、本発明を完成した。   Thus, as a result of intensive investigations to solve such problems, the present inventors have determined that a predetermined ozone content is present on the surface to be treated of the fine flow path even if the fine flow path is formed of an inorganic material. It was found that the contact angle of water droplets on the surface to be processed of the fine flow path can be reduced to 10 ° or less by contacting with dry oxygen gas under predetermined processing conditions, thereby completing the present invention.

従って、本発明の目的は、微細流路の被処理面に水滴の接触角10°以下の親水性を付与することができる微細流路の親水化処理方法を提供することにある。   Accordingly, an object of the present invention is to provide a method for hydrophilizing a microchannel that can impart hydrophilicity with a contact angle of water droplets of 10 ° or less to the surface to be treated of the microchannel.

すなわち、本発明は、管状路、孔状路又は溝状路であってその流路径(直径、深さ又は幅)が5〜600μmであり、流体が流通するための微細流路について、その被処理面を親水化処理する微細流路の親水化処理方法であって、微細流路の被処理面にオゾン含有量0.2〜30容量%の乾燥酸素ガスを処理温度100〜200℃及び処理時間5分以上60分未満の処理条件で接触させる微細流路の親水化処理方法である。 That is, the present invention provides a tubular channel, the channel diameter (diameter, depth or width) a hole shape path or groove-like passage is 5~600Myuemu, the fine flow path for fluid to flow, As a A method for hydrophilizing a fine channel for hydrophilizing a surface to be treated, wherein a dry oxygen gas having an ozone content of 0.2 to 30% by volume is treated at a treatment temperature of 100 to 200 ° C. This is a method for hydrophilizing a fine channel that is contacted under a treatment condition of a treatment time of 5 minutes or more and less than 60 minutes.

本発明において、親水化処理の対象となる微細流路の材質については特に制限されるものではないが、比較的高温での均一表面加熱処理が必要なので、微細流路は、好ましくは少なくともその被処理面が無機材料であるのがよく、更に耐食性・耐薬品性、洗浄性の観点から、より好ましくは少なくともその被処理面がアルミニウム、アルミニウム合金、ステンレス鋼、チタン等の金属や、ホウケイ酸ガラス、ソーダガラス等のガラスや、アルミナ、チタニア等の金属酸化物や、ニッケル合金めっき、ニッケル複合めっき等のメッキ皮膜等から選ばれた1種又は2種以上の材質で形成されているものであるのがよい。   In the present invention, the material of the fine channel to be hydrophilized is not particularly limited. However, since a uniform surface heating treatment at a relatively high temperature is necessary, the fine channel is preferably at least covered. The treated surface should be an inorganic material, and from the viewpoints of corrosion resistance, chemical resistance and cleanability, more preferably at least the treated surface is a metal such as aluminum, aluminum alloy, stainless steel, titanium, or borosilicate glass. It is formed of one or more materials selected from glass such as soda glass, metal oxides such as alumina and titania, and plating films such as nickel alloy plating and nickel composite plating. It is good.

また、この微細流路の形状については、例えば、配管、射出ノズル、キャピラリーカラム等の管状路や、アルミニウム陽極酸化細孔、ろ過フィルター等の孔状路や、マイクロチャネル等の溝状路や、セラミックス粒子や焼結金属の圧密成形体、不織布、無機微粒子充填カラム等の連続空隙路等を例示することができ、このような微細流路を備えた製品としては、具体的には例えば、マイクロリアクター、バイオセンサー、分析用具、溶融紡糸製造装置、射出成型器、各種ろ過装置、高圧水カッター等を例示することができる。   As for the shape of the fine flow path, for example, tubular paths such as pipes, injection nozzles, capillary columns, hole paths such as aluminum anodized pores and filtration filters, groove paths such as microchannels, ceramics, etc. Examples of the compacted body of particles and sintered metal, non-woven fabric, and continuous void paths such as columns packed with inorganic fine particles can be given as examples of products having such fine channels. Examples include biosensors, analytical tools, melt spinning production apparatuses, injection molding machines, various filtration apparatuses, and high-pressure water cutters.

そして、本発明の親水化処理方法を適用する上で好適な微細流路の直径、深さ、幅等の大きさ又は寸法(以下、「流路径」という。)は、特に制限されるものではないが、表面積と体積の比率(比界面積)の観点から1μm以上1,000μm以下の微細流路の親水化処理が可能であるが、好ましくは5μm以上600μm以下、より好ましくは10μm以上100μm以下であるのがよく、5μmより小さいとオゾンガスの均一流通が困難になり、600μmより大きくなると比界面積が小さくなるため改質効果が見掛け上小さくなる虞がある。   And the size or dimension (hereinafter referred to as “channel diameter”) such as the diameter, depth, width, etc. of the fine channel suitable for applying the hydrophilization method of the present invention is not particularly limited. However, from the viewpoint of the surface area to volume ratio (specific interfacial area), it is possible to hydrophilize a fine channel of 1 μm or more and 1,000 μm or less, but preferably 5 μm or more and 600 μm or less, more preferably 10 μm or more and 100 μm or less. If it is smaller than 5 μm, it is difficult to uniformly distribute ozone gas, and if it exceeds 600 μm, the specific interface area becomes small, and the reforming effect may be apparently reduced.

このような微細流路の被処理面を親水化処理する際の処理条件については、オゾン含有量0.2容量%以上30容量%以下、好ましくは2容量%以上15容量%以下の乾燥酸素ガスを用い、処理温度が100℃以上200℃以下、好ましくは130℃以上180℃以下であって、処理時間が5分以上60分未満、好ましくは10分以上30分以下の条件である必要がある。乾燥酸素ガス中のオゾン含有量が0.2容量%より低いと酸化力が不足し、反対に、30容量%より高くなると過剰酸化の問題が生じ、また、処理温度が100℃より低いと表面水酸基の縮合脱水が不十分になり、反対に、200℃より高くなると過剰酸化の問題が生じ、更に、処理時間が5分より短いと被処理面が平衡状態に達しない場合があり、反対に、60分以上になると処理効果の向上が期待できないほか、過剰酸化による鉄の表面濃縮が起こってタンパク質等が吸着・残留し易い表面に変質する場合がある。   The treatment conditions for hydrophilizing the surface to be treated of such a fine flow path are dry oxygen gas having an ozone content of 0.2 volume% to 30 volume%, preferably 2 volume% to 15 volume%. The processing temperature must be 100 ° C. or higher and 200 ° C. or lower, preferably 130 ° C. or higher and 180 ° C. or lower, and the processing time should be 5 minutes or longer and less than 60 minutes, preferably 10 minutes or longer and 30 minutes or shorter. . When the ozone content in the dry oxygen gas is lower than 0.2% by volume, the oxidizing power is insufficient. On the other hand, when it is higher than 30% by volume, the problem of excessive oxidation occurs, and when the processing temperature is lower than 100 ° C., the surface Condensation and dehydration of the hydroxyl group becomes insufficient. On the other hand, when the temperature is higher than 200 ° C., the problem of excessive oxidation occurs. Further, if the treatment time is shorter than 5 minutes, the surface to be treated may not reach an equilibrium state. When the time is longer than 60 minutes, improvement of the treatment effect cannot be expected, and the surface of iron may be concentrated due to excessive oxidation, so that the surface may easily deteriorate due to protein adsorption or the like.

本発明の親水化処理に用いるオゾン含有乾燥酸素ガスは、反応速度論的にもオゾン濃度が高い方が好ましい。ところで、一般に使用されている放電式オゾナイザーで得られるオゾン濃度は、5容量%程度であり、これを乾燥酸素ガスで希釈して使用してもよく、また、シリカゲル等の吸着剤に吸着させて濃縮して使用してもよい。前記オゾナイザーに供給される原料ガスとしては、高純度酸素ガスボンベを利用するのが一般的であり、反応速度論的には酸素濃度の高い原料ガスが好ましいといえるが、酸素容量が少なくとも99.999(5N)容量%以上、好ましくは99.9999(6N)容量%以上であるのがよい。このような高純度酸素ガスボンベを利用すれば、付加的な乾燥処理は必要ない。
また、親水化処理の際の加熱方法については、結果として微細流路(対象物)の被処理面の温度が所定の温度にまで加熱されればよいが、好ましくは微細流路の被処理面が均一に加熱される加熱チャンバー等を用いるのがよい。また、被処理面が管状路や孔状路のように内面だけを処理する場合には、処理物の外側からの部分加熱でも対応でき、加熱チャンバーを省略することもできる。
The ozone-containing dry oxygen gas used in the hydrophilization treatment of the present invention preferably has a higher ozone concentration in terms of reaction kinetics. By the way, the ozone concentration obtained with a discharge-type ozonizer generally used is about 5% by volume, and this may be used by diluting with dry oxygen gas, or adsorbed on an adsorbent such as silica gel. You may concentrate and use. As the raw material gas supplied to the ozonizer, a high purity oxygen gas cylinder is generally used, and it can be said that a raw material gas having a high oxygen concentration is preferable in terms of reaction kinetics, but the oxygen capacity is at least 99.999. (5N) volume% or more, preferably 99.9999 (6N) volume% or more. If such a high purity oxygen gas cylinder is used, no additional drying treatment is necessary.
As for the heating method during the hydrophilization treatment, the temperature of the surface to be processed of the fine channel (object) may be heated to a predetermined temperature as a result. It is preferable to use a heating chamber or the like that is uniformly heated. Further, in the case where only the inner surface is processed like a tubular path or a hole-like path, the surface to be processed can be handled by partial heating from the outside of the processed object, and the heating chamber can be omitted.

本発明の親水化処理方法を、例えばアルミニウム、ステンレス鋼、チタン等の金属材料で形成されて水性物質と油性物質とを交互に流す場合があるマイクロリアクターの微細流路に適用した場合を例にすると、流路内壁面の親水性を10°以下にすることによって、この流路内壁面に水分子が優先的に吸着し、これによって油滴の吸着を可及的に抑制することができ、また、吸着した油滴の濡れ広がりも抑制することができ、更には、微細流路に温水を流すだけでこの微細流路の流路内壁面に付着した油性物質を容易に除去することができるので、微細流路においてその流路抵抗の低下や液体導入の促進という効果も発現する。   For example, the hydrophilization treatment method of the present invention is applied to a microreactor of a microreactor that is formed of a metal material such as aluminum, stainless steel, titanium, or the like and may flow an aqueous substance and an oily substance alternately. Then, by setting the hydrophilicity of the inner wall surface of the flow channel to 10 ° or less, water molecules are preferentially adsorbed on the inner wall surface of the flow channel, thereby suppressing the adsorption of oil droplets as much as possible. Further, wetting and spreading of the adsorbed oil droplets can be suppressed, and furthermore, oily substances adhering to the inner wall surface of the fine channel can be easily removed simply by flowing warm water through the fine channel. Therefore, the effect of reducing the flow resistance and promoting the introduction of liquid in the fine flow path is also exhibited.

本発明の微細流路の親水化処理方法によれば、たとえ微細流路が無機材料で形成されていても、この微細流路の被処理面における水滴の接触角を容易に10°以下にまで低下させることができる。   According to the method for hydrophilizing a microchannel according to the present invention, even if the microchannel is formed of an inorganic material, the contact angle of water droplets on the surface to be treated of the microchannel can be easily reduced to 10 ° or less. Can be reduced.

以下、実施例及び比較例に基づいて、本発明の好適な実施の形態を具体的に説明する。   Hereinafter, preferred embodiments of the present invention will be described in detail based on examples and comparative examples.

[実施例1]
内径0.6mm×長さ120mmのガラス管を用い、このガラス管の内面(管状路からなる微細流路の被処理面)に高純度酸素ガス(6N容量%)を原料に放電式オゾナイザーで調製したオゾン含有量2容量%の乾燥酸素ガスを一方向にオーバーフローさせながら150℃の加熱下に30分間接触させ、親水化処理した。
[Example 1]
Using a glass tube with an inner diameter of 0.6 mm and a length of 120 mm, the inner surface of this glass tube (the surface to be treated of a fine channel consisting of tubular channels) is prepared with a discharge-type ozonizer using high-purity oxygen gas (6N volume%) as a raw material. The resulting dried oxygen gas having an ozone content of 2% by volume was contacted for 30 minutes under heating at 150 ° C. while overflowing in one direction, and subjected to a hydrophilic treatment.

親水化処理後のガラス管について、ガラス管の一部を破砕したのち水平に置き、その内面の親水性を調べた。結果は、水滴の接触角が5°以下であることが判明した。また、この親水化処理後のガラス管を垂直に立ててその下端を水面から深さ2mmの位置まで沈め、毛細管現象によりガラス管内を上昇する水の高さ(水の毛管上昇高さ)を測定した。結果は、水の毛管上昇高さが48mmであった。   About the glass tube after a hydrophilization process, after crushing a part of glass tube, it was set horizontally and the hydrophilic property of the inner surface was investigated. As a result, it was found that the contact angle of water droplets was 5 ° or less. In addition, the glass tube after this hydrophilization treatment is set up vertically and its lower end is submerged to a depth of 2 mm from the water surface, and the height of water rising in the glass tube due to capillary action (water capillary rising height) is measured. did. As a result, the capillary height of water was 48 mm.

[比較例1]
親水化処理前の実施例1のガラス管について、上記実施例1と同様にして水滴の接触角と水の毛管上昇高さとを調べた。結果は、水滴の接触角が25〜30°であって、水の毛管上昇高さが12mmであった。
[Comparative Example 1]
For the glass tube of Example 1 before the hydrophilization treatment, the contact angle of water droplets and the height of the water capillary were examined in the same manner as in Example 1 above. As a result, the contact angle of the water droplet was 25 to 30 °, and the capillary height of water was 12 mm.

[実施例2]
アルミニウム板の表面に深さ100μm×幅100μmの大きさの溝状路からなる微細流路を形成し、この微細流路の被処理面(溝状路の左右側壁面及び底面)に実施例1と同様にして調製したオゾン含有量2容量%の乾燥酸素ガスを実施例1と同様にして接触させ、親水化処理した。
[Example 2]
A fine flow path composed of a groove-like path having a depth of 100 μm × width of 100 μm is formed on the surface of the aluminum plate, and Example 1 is formed on the surface to be treated (the right and left side walls and the bottom face of the groove-like path). A dry oxygen gas having an ozone content of 2% by volume prepared in the same manner as described above was brought into contact in the same manner as in Example 1 and subjected to a hydrophilic treatment.

親水化処理後の微細流路の被処理面における水滴の接触角は、溝状路と同時に親水化処理された溝状路横の平面部において測定した。結果は、水滴の接触角が3〜8°であった。
また、この微細流路内にその上方から水滴(0.01cc)を滴下し、この水滴が微細流路内で流路長さ方向へ濡れ拡がる長さ(微細流路内で水滴の拡張長さ)を測定した。結果は、水滴の拡張長さが74mmであった。
The contact angle of water droplets on the treated surface of the microchannel after the hydrophilization treatment was measured at the flat portion beside the groove-like path subjected to the hydrophilic treatment simultaneously with the groove-like path. As a result, the contact angle of the water droplet was 3 to 8 °.
In addition, water droplets (0.01 cc) are dropped into the fine channel from above, and the length of the water droplet spreads in the length direction of the fine channel in the fine channel (the extended length of the water droplet in the fine channel) Was measured. As a result, the extended length of the water droplet was 74 mm.

[比較例2]
親水化処理前の実施例2と同じ微細流路について、実施例2と同様にしてその水滴の接触角と微細流路内での水滴の拡張長さとを調べた。結果は、水滴の接触角が68°であって、水滴の拡張長さが12mmであった。
[Comparative Example 2]
For the same fine channel as in Example 2 before the hydrophilization treatment, the contact angle of the water droplet and the extended length of the water droplet in the fine channel were examined in the same manner as in Example 2. As a result, the contact angle of the water droplet was 68 °, and the extended length of the water droplet was 12 mm.

[実施例3及び比較例3、4]
ステンレス鋼カラム(4mmφ×50mm)に、実施例1と同様にして調製したオゾン含有量2容量%の乾燥酸素ガスを150℃で10分間の条件で加熱オゾン処理して親水化処理した粒径87μmのステンレス鋼粒子(実施例3)、未処理の粒径87μmのステンレス鋼粒子(比較例3)、又は、150℃で5時間の条件で加熱オゾン処理した粒径87μmのステンレス鋼粒子(比較例4)を充填し、カラム中に連続空隙路からなる微細流路を形成した。
[Example 3 and Comparative Examples 3 and 4]
A stainless steel column (4 mmφ × 50 mm) having a particle size of 87 μm obtained by subjecting a dry oxygen gas having an ozone content of 2% by volume prepared in the same manner as in Example 1 to a heating ozone treatment at 150 ° C. for 10 minutes and a hydrophilization treatment. Stainless steel particles (Example 3), untreated stainless steel particles with a particle size of 87 μm (Comparative Example 3), or stainless steel particles with a particle size of 87 μm that were heated and ozone treated at 150 ° C. for 5 hours (Comparative Example) 4) was packed, and a fine channel composed of continuous void channels was formed in the column.

得られた実施例3、比較例3及び比較例4の各微細流路について、油成分としてサラダ油を乳化剤としてゼラチンを各々5重量%の割合で水中に分散させて得られた水中油(O/W)型エマルジョンを流速0.3ml/minの条件で通液し、上記各微細流路を形成するステンレス鋼粒子を汚染させ、次いで60℃の温水を流速0.3ml/minの条件で通液し、この温水中に脱離してくるエマルジョンを経時的に採取し、洗浄時間(分)−汚れ残存量(mg)の洗浄曲線を作成して温水によるステンレス鋼粒子の洗浄性を調べた。
結果を図1に示す。
For each of the obtained fine channels of Example 3, Comparative Example 3 and Comparative Example 4, oil-in-water (O / O) obtained by dispersing gelatin in an amount of 5% by weight each using salad oil as an emulsifier as an oil component. W) Type emulsion was passed at a flow rate of 0.3 ml / min to contaminate the stainless steel particles forming each of the fine channels, and then 60 ° C hot water was passed at a flow rate of 0.3 ml / min. The emulsion desorbed in the warm water was collected over time, and a washing curve of washing time (min) -residual residual amount (mg) was created to examine the detergency of stainless steel particles with warm water.
The results are shown in FIG.

図1に示す結果から明らかなように、比較例3(●)の未処理の場合に比べて、本発明に係る実施例3(○)の場合には顕著にその洗浄速度が向上しているのが分かる。また、処理時間が5時間の比較例4(△)の場合は、本発明の実施例3(○)とそのオゾン含有量及び加熱温度が同じであるにもかかわらず、長時間処理による過剰酸化の問題が発生し、比較例3(●)の未処理の場合よりもかえってその洗浄速度が低下している。   As is clear from the results shown in FIG. 1, in the case of Example 3 (◯) according to the present invention, the cleaning speed is remarkably improved as compared with the case of untreated in Comparative Example 3 (●). I understand. In addition, in the case of Comparative Example 4 (Δ) in which the treatment time was 5 hours, although the ozone content and the heating temperature were the same as Example 3 (◯) of the present invention, excessive oxidation due to long-time treatment was performed. This problem occurs, and the cleaning speed is lower than that of the untreated case of Comparative Example 3 (●).

本発明の微細流路の親水化処理方法によれば、たとえ微細流路が無機材料で形成されていても、この微細流路の被処理面に所定のオゾン含有量の乾燥酸素ガスを用いて所定の処理条件で接触させることにより、微細流路の被処理面における水滴の接触角を容易に10°以下にまで低下させることができるので、例えば、マイクロリアクター、バイオセンサー、分析用具、キャピラリーカラム、ろ過フィルター等の医学、薬学、生物学、工学等の多くの分野で進められているマイクロ化学等において、流体の移動手段として用いられる微細流路を親水化処理する方法として好適に適用することができる。   According to the method for hydrophilizing a fine channel of the present invention, even if the fine channel is formed of an inorganic material, a dry oxygen gas having a predetermined ozone content is used on the surface to be treated of the fine channel. By contacting under predetermined processing conditions, the contact angle of water droplets on the surface to be processed of the fine channel can be easily reduced to 10 ° or less. For example, a microreactor, biosensor, analytical tool, capillary column, It can be suitably applied as a method for hydrophilizing a microchannel used as a fluid moving means in microchemistry, etc., which is promoted in many fields such as medicine, pharmacy, biology, engineering, etc. such as filtration filters. it can.

図1は、実施例3、比較例3及び比較例4の各微細流路における洗浄性を調べた結果を示す洗浄時間(分)−汚れ残存量(mg)の洗浄曲線のグラフ図である。FIG. 1 is a graph of a cleaning curve of cleaning time (minutes) −residual residual amount (mg) showing the results of examining the cleaning performance in each fine channel of Example 3, Comparative Example 3 and Comparative Example 4.

Claims (4)

管状路、孔状路又は溝状路であってその流路径(直径、深さ又は幅)が5〜600μmであり、流体が流通するための微細流路について、その被処理面を親水化処理する微細流路の親水化処理方法であって、微細流路の被処理面にオゾン含有量0.2〜30容量%の乾燥酸素ガスを処理温度100〜200℃及び処理時間5分以上60分未満の処理条件で接触させることを特徴とする微細流路の親水化処理方法。 Tubular passage, the flow path diameter (diameter, depth or width) a hole shape path or groove-like path is that 5~600Myuemu, the fine flow path for fluid to flow, hydrophilic surface to be processed of their A method for hydrophilizing a fine channel to be treated, wherein a dry oxygen gas having an ozone content of 0.2 to 30% by volume is treated on a treatment surface of the fine channel at a treatment temperature of 100 to 200 ° C. and a treatment time of 5 minutes or more 60 A method for hydrophilizing a microchannel, wherein the contact is performed under a processing condition of less than a minute. 微細流路は、少なくともその被処理面が無機材料で形成されている請求項1に記載の微細流路の親水化処理方法。   The method for hydrophilizing a fine channel according to claim 1, wherein at least a surface to be treated of the fine channel is formed of an inorganic material. 微細流路の被処理面が、金属、ガラス、金属酸化物及びメッキ皮膜から選ばれた1種又は2種以上の材質で形成されている請求項2に記載の微細流路の親水化処理方法。   The method for hydrophilizing a microchannel according to claim 2, wherein a surface to be processed of the microchannel is formed of one or more materials selected from metal, glass, metal oxide, and plating film. . 親水化処理後の微細流路の被処理面における水滴の接触角が10°以下である請求項1〜に記載の微細流路の親水化処理方法。 The method for hydrophilizing a microchannel according to claims 1 to 3 , wherein the contact angle of water droplets on the surface to be treated of the microchannel after the hydrophilization treatment is 10 ° or less.
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