JP4830769B2 - Fan filter unit - Google Patents

Description

  The present invention relates to a fan filter unit used in a manufacturing apparatus that requires a clean space, such as a semiconductor, a liquid crystal, and a plasma display panel.

  Conventionally, in this type of fan filter unit, a plurality of guide plates and diffusion plates are provided in the chamber as means for improving the wind speed distribution (see, for example, Patent Document 1).

Japanese Patent Laid-Open No. 9-94419 (paragraphs 0012 to 0018, FIG. 1)

  In the conventional fan filter unit, improvement means is provided for the purpose of equalizing the wind speed upstream of the filter, but since the wind speed after passing through the filter is not considered, the filter blowout surface is directly under the motor. In this part, the wind speed is not secured, and the wind speed distribution is uneven.

  The present invention solves such a conventional problem, and an object of the present invention is to provide a fan filter unit that improves the uniformity of the wind speed distribution after passing through the filter.

In order to achieve the above object, the fan filter unit of the present invention has a suction unit at the top of a box-shaped chamber, and a fan unit including a turbo-type fan and a motor inside the chamber. The fan filter unit provided with a filter on the outlet side of the fan includes at least one auxiliary blower fan between the fan and the filter, and the auxiliary blower fan is blown out in the circumferential direction of the turbo fan in the chamber. A part of the air is blown out from directly below the motor of the fan unit toward the filter .

  According to another aspect, the auxiliary blower fan is a cross flow fan.

  Another means is that the blowout side is fixed to the chamber by a bridge-shaped support that supports the motor, and one or more auxiliary blower fans are provided on the filter side of the support.

  Another means is that the blowout side is fixed to the chamber by a support, and one or a plurality of auxiliary blower fans are provided on the filter side of the support so that the auxiliary blower fan runs along the support and passes directly under the motor. It is.

  Another means is to fix the blowout side to the chamber with a support, and to the filter side of the support, pass one or more auxiliary blower fans in a direction perpendicular to the direction along which the auxiliary blower fan passes along the support. It is provided.

  Another means is provided with one or a plurality of air guides so that air blown from the auxiliary air fan is blown to the motor.

  Another means is a fan filter unit having a suction unit at the top of a box-shaped chamber, a fan unit comprising a fan and a motor inside the chamber, and a filer provided on the blow-out side of the fan unit. In the above, a mesh is provided that surrounds the auxiliary blower fan and is provided with a frame that serves as a reinforcing material.

  Another means is that the mesh roughness of the mesh is partially changed.

  In another means, the mesh mesh is set so that the portion facing the motor is coarse.

  By these means, a fan filter unit can be obtained in which the uniformity of the wind speed distribution after passing through the filter is improved.

  According to the present invention, by providing the auxiliary blower fan, it is possible to solve the shortage of the air volume directly under the motor, the air speed blown from the filter is made uniform, and the blown air speed distribution can be made uniform.

  Moreover, the effect that the motor is cooled by the auxiliary blower fan can be obtained.

1 is a schematic longitudinal sectional view of a fan filter unit according to Embodiment 1 of the present invention. Schematic longitudinal sectional view of the fan filter unit according to the second embodiment of the present invention. Schematic longitudinal sectional view of a fan filter unit according to Embodiment 3 of the present invention. Schematic longitudinal sectional view of a fan filter unit according to Embodiment 4 of the present invention. Schematic longitudinal sectional view of a fan filter unit according to a fifth embodiment of the present invention. Schematic longitudinal sectional view of a fan filter unit according to Embodiment 6 of the present invention.

The invention according to claim 1 of the present invention has a suction unit at the top of a box-shaped chamber, and has a fan unit including a turbo-type fan and a motor inside the chamber. In the fan filter unit provided with the filter, at least one auxiliary blower fan is provided between the fan and the filter, and the auxiliary blower fan is one of the air blown in the circumferential direction of the turbo type fan in the chamber. The fan unit
The air is blown out in the direction of the filter from directly below the motor , and has the effect of making the air flow distribution of the filter blown uniform by increasing and equalizing the wind speed at the lower part of the fan.

In addition, it is equipped with a cross flow fan as an auxiliary blower fan, and it blows out airflow directly under the motor and support, increasing the air speed directly under the motor and support, and making the filter blowout air speed distribution uniform. In addition, the air is blown to the motor side to cool the motor and promote the life of the motor.

In addition, as an auxiliary blower fan, it has a cross flow fan, which blows out airflow directly under the motor and support, and increases and equalizes the wind speed directly under the motor and support, thereby making the airflow distribution even. In addition, the air is blown to the motor side to cool the motor and promote the life of the motor.

Also, by fixing the blowout side to the chamber with a support and providing one or a plurality of auxiliary air blow fans in the direction along the support on the filter side of the support, along with the motor directly below, the wind speed directly below the support, It can be compensated in a wide range, and has the effect of making the filter blowing wind speed distribution uniform by making the wind speed uniform.

Further, the blowout side is fixed to the chamber by a support, and one or a plurality of auxiliary blower fans are provided in the direction perpendicular to the direction along the support on the filter side of the support, directly below the motor. There is an effect of making the blowout wind speed distribution uniform by specializing in the wind speed directly under the motor to supplement the wind speed and making the wind speed uniform.

In addition, an auxiliary blower fan is installed directly under the motor, and a blower guide is provided on the support so that air blown from the auxiliary blower fan is blown to the motor, thereby cooling the motor and promoting the life of the motor. .

In the fan filter unit having a suction unit in the upper part of the box-shaped chamber, a fan unit including a fan and a motor inside the chamber, and a filer provided on the blowing side of the fan unit, the auxiliary unit It is equipped with a mesh that surrounds the blower fan and has a frame that serves as a reinforcing material around it. The air flow from the auxiliary blower fan passes through the mesh, preventing the wind speed from being biased in the chamber. It has the effect | action of equalizing and uniforming a blowing wind speed distribution.

In addition, the mesh coarseness has been partially changed, and the downstream side has a finer and uniform wind speed, and the upstream side has the effect of enhancing the motor cooling effect and further prolonging the motor life. Have.

In addition, the mesh mesh is set so that the part of the mesh facing the motor is rough, and the air velocity is made uniform on the downstream side, while more airflow flows on the upstream side to further increase the cooling effect of the motor. It has the effect of enhancing the life of the motor more.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.

(Embodiment 1)
As shown in FIG. 1, the fan filter unit of the first embodiment includes a fan unit 4 including a turbo fan 2 and a motor 3 in a box-shaped chamber 5, and the fan unit 4 has a bridge-shaped support. 7 is fixed to the chamber 5. A filter 6 is provided below the blower side of the fan unit 4, and an auxiliary blower fan 8 is attached to the chamber 5 between the fan 2 and the filter 6.

  In the above configuration, by operating the fan unit 4, air is sucked from the suction port 1 and sent into the chamber 5. (Air flow is indicated by an arrow) Further, when the auxiliary blower fan 8 is operated, an air flow is generated in the chamber 5. Since the turbo type fan 2 used in the fan unit 4 blows air in the circumferential direction of the fan body, the wind speed directly below the fan is reduced with respect to the edge of the chamber 5. On the other hand, the airflow generated by the auxiliary blower fan 8 flows directly under the motor 3 and the support 7 to compensate for the wind speed in this portion. By combining the airflow blown out from the fan unit 4 and the airflow blown out from the auxiliary blower fan 8, the air velocity blown out from the turbo-type fan 2 by the airflow blown from the turbo-type fan 2 can be obtained directly under the motor 3 and the support 7. Compensates and produces an air flow with uniform wind speed.

  In addition, the auxiliary blower fan 8 which is a cross flow fan is accompanied by blowing airflow to the filter 6 side and blowing airflow to the motor 3 side, and the generated airflow reaches the motor 3 to cool the motor 3, This has the effect of promoting a longer motor life.

(Embodiment 2)
As shown in FIG. 2, the fan filter unit according to the second embodiment attaches the auxiliary blower fan 8 to the support 7 so that the auxiliary blower fan 8 passes directly under the motor 3 and the auxiliary blower fan 8 extends along the support 7.

  In the above configuration, by attaching the auxiliary blower fan 8 directly below the motor 3 of the support 7, the wind speed is ensured just below the motor 3, which is conventionally weak, and also under the support 7, by securing the wind speed in a wide range, The wind speed can be made uniform.

  In addition, the motor 3 can be cooled by the airflow blown to the motor 3 by the auxiliary blower fan 8, and the life of the motor can be extended.

(Embodiment 3)
As shown in FIG. 3, the fan filter unit of the third embodiment attaches the auxiliary blower fan 8 so that the auxiliary blower fan 8 passes directly under the motor 3 of the support 7 and the auxiliary blower fan 8 is perpendicular to the direction along the support 7. .

  In the above configuration, by attaching the auxiliary blower fan 8 directly below the motor 3 of the support 7, it is possible to specialize just below the motor 3 where the wind speed is conventionally low to ensure the wind speed and make the wind speed uniform.

  Further, the motor 3 can be cooled more efficiently by the airflow blown to the motor 3 by the auxiliary blower fan 8.

(Embodiment 4)
As shown in FIG. 4, the fan filter unit according to the fourth embodiment has a structure in which a blowing guide 9 is provided on the support 7 to direct the air blown downward or laterally toward the motor 3.

  In the above configuration, the airflow blown from the auxiliary blower fan 8 toward the motor 3 flows along the blower guide 9 and is blown to the motor 3.

  For this reason, the motor can have a more efficient cooling effect, and the life of the motor can be further promoted.

(Embodiment 5)
As shown in FIG. 5, the fan filter unit of the fifth embodiment has a structure in which a mesh 10 is attached to a support 7 and the periphery of the auxiliary blower fan 8 is surrounded.

  In the above configuration, the airflow blown from the auxiliary blower fan 8 is blown to the mesh 10. The mesh 10 is further rectified to further uniform the blown wind speed distribution.

  Moreover, by using synthetic fibers such as nylon and polyester as the material of the mesh 10, corrosion of the mesh 10 is suppressed in an atmosphere containing a chemical solution such as an organic solvent.

  In addition, by using a metal such as stainless steel as the material of the mesh 10, it is difficult to break and durability is improved. In addition, by using a metal material, a volatile component is not generated from the synthetic fiber, and a fan filter unit suitable for applications such as a clean room can be obtained.

(Embodiment 6)
In the fan filter unit of the sixth embodiment, as shown in FIG. 6, the motor 3 side of the mesh 10 attached to the support 7 has a larger hole diameter than the downstream side, and more airflow flows to the motor 3. With structure.

  In the above configuration, the airflow blown out from the auxiliary blower fan 8 is rectified through the mesh 10, and a large amount of airflow is allowed to flow through the motor 3 to enhance the cooling effect, thereby further promoting the extension of the motor life. it can.

  By ensuring high-precision uniformity of the wind speed distribution, it is possible to provide a uniform wind speed distribution in spaces that require clean spaces such as semiconductor factories and food factories, and at the same time, due to the cooling effect of the motor, the temperature distribution is also uniform. Distribution can be provided.

1 Suction Port 2 Fan 3 Motor 4 Fan Unit 5 Chamber 6 Filter 7 Support 8 Auxiliary Blower Fan 9 Blower Guide 10 Mesh

Claims (9)

A fan- type filter unit having a box-shaped chamber, a suction unit at the top of the chamber, a fan unit including a turbo-type fan and a motor inside the chamber, and a filter provided on the outlet side of the fan unit In
At least one auxiliary blower fan is provided between the fan and the filter ,
In the chamber, the auxiliary air blower fan blows out part of the air blown in the circumferential direction of the turbo type fan in the filter direction from directly below the motor of the fan unit. The fan filter unit according to claim 1, wherein the auxiliary blower fan is a cross flow fan. 3. The fan filter according to claim 2, wherein the fan unit has a blowing side fixed to the chamber by a bridge-shaped support that supports a motor, and one or a plurality of auxiliary blower fans are provided on the filter side of the support. unit. The fan unit is provided with one or a plurality of auxiliary air blowing fans in a direction in which the blower side is fixed to the chamber by a support, the filter side of the support is directly under the motor, and the auxiliary air fan is along the support. 4. The fan filter unit according to claim 3, wherein The fan unit includes one or a plurality of auxiliary air blowing fans that are fixed to the chamber with a support on the blow-out side, and that pass through the motor directly on the filter side of the support, with the auxiliary air blowing fan being perpendicular to the direction along the support. 4. The fan filter unit according to claim 3, wherein The fan unit, the auxiliary blowing fan mounted to the support so as to be located immediately below the motor, according to claim 4 or 5, wherein the fan filter unit and said one or more provided that the air guide support. The fan filter unit in any one of Claims 1-6 provided with the mesh which enclosed the said auxiliary | assistant ventilation fan, and provided the frame used as a reinforcing material in the circumference | surroundings. The fan filter unit according to claim 7, wherein the mesh coarseness of the mesh is partially changed. The fan filter unit according to claim 8, wherein the mesh has a coarseness in a portion facing the motor.

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