JP4867972B2 - Appearance inspection device - Google Patents

Description

  The present invention relates to an appearance inspection apparatus.

  2. Description of the Related Art Conventionally, an appearance inspection apparatus that inspects the appearance of a substantially rectangular parallelepiped electronic component such as a chip capacitor or a chip inductor is known (for example, see Patent Document 1 below). This appearance inspection apparatus includes a transparent table, upper and lower imaging blocks, side imaging blocks, and end imaging blocks.

  The upper and lower imaging blocks have a pair of first imaging means (camera and illumination unit) arranged so that the transparent table is placed between them, and simultaneously image the upper and lower surfaces of the electronic components on the transparent table. The side imaging block has a pair of second imaging means (camera and illumination unit) and two prisms, and the optical axes of the two cameras are opposed to each other by the two prisms, on the transparent table. Simultaneously image both sides of the electronic component. The end surface imaging block has a pair of cameras, and the pair of cameras are arranged at a predetermined angle with respect to the transparent table so as to face each end surface of the electronic component. Simultaneously image both end faces of the part.

In this appearance inspection apparatus, since the electronic component is conveyed by the transparent table, the electronic component can be viewed from any direction toward the outer surface of the electronic component, and it is necessary to change the electronic component when imaging the electronic component. Absent. Therefore, the appearance inspection of electronic parts can be performed efficiently at high speed.
JP 2003-139516 A

  However, in the conventional visual inspection apparatus as described in Patent Document 1 above, since the upper and lower surfaces and both side surfaces of the electronic component are simultaneously imaged, the light from the illumination unit of one imaging means is captured by the other imaging device. It sometimes entered the camera of the means. Therefore, the light from the illumination unit of one imaging unit and the light reflected by the electronic component of the illumination unit of the other imaging unit enter the camera of the other imaging unit at the same time, and the respective lights interfere with each other. As a result, there is a possibility that the defect is erroneously recognized. In addition, the illumination unit of the pair of imaging means illuminates the imaging surface simultaneously with a narrow light projection angle from the opposite direction across the imaging surface of the electronic component. Defect detection accuracy may be reduced.

  In view of the above, an object of the present invention is to provide an appearance inspection apparatus capable of significantly suppressing the influence of light interference and performing an appearance inspection of an inspection object with extremely high accuracy.

  The appearance inspection apparatus according to the present invention has a first side surface, a second side surface, a third side surface, a fourth side surface, a fifth side surface, and a sixth side surface. The first side surface and the third side surface are the second side surface and the second side surface. Connecting the four side surfaces and connecting the fifth side surface and the sixth side surface and facing each other, the second side surface and the fourth side surface connecting the first side surface and the third side surface and the fifth side surface The sixth side surface is coupled to and opposed to each other, and the fifth side surface and the sixth side surface are coupled to the first side surface and the third side surface, and are coupled to the second side surface and the fourth side surface and are opposed to each other. An appearance inspection apparatus for inspecting an appearance of an inspection object having a substantially rectangular parallelepiped shape, a transparent table having a substantially circular shape that can rotate in a fixed direction about its own central axis, and a third side surface being transparent Place the inspection object on the transparent table so that the fourth side faces the center axis and abuts the table. An arrangement means arranged at the peripheral edge of the surface, a first imaging means for imaging the first side surface from above the transparent table, a second imaging means for imaging the second side surface from the outside in the radial direction of the transparent table, and transparent The third imaging means for imaging the third side through the table, the fourth imaging means for imaging the fourth side from the inside in the radial direction of the transparent table, and the fifth side from the front side in the rotation direction of the transparent table A fifth imaging unit; and a sixth imaging unit configured to image the sixth side surface from the rear side in the rotation direction of the transparent table. The first imaging unit includes a first imaging unit configured to perform imaging of the first side surface; A first illuminating unit that illuminates the side surface, the first illuminating unit being provided with a pair of openings, and a concave curved surface that is recessed from one of the pair of openings toward the other opening. And the first imaging unit A first holding member that includes an inner wall surface that surrounds the imaging axis, and an inner wall surface of the first holding member that surrounds the imaging axis of the first imaging unit, and emits light toward one opening side of the first holding member. An inspection including a plurality of first light projecting members to be irradiated, closer to the inspection object positioned on the transparent table than the first imaging unit, and one opening of the first holding member positioned on the transparent table The second imaging means is arranged to face the first side surface of the object, and the second imaging unit has a second imaging unit that images the second side surface and a pair of second illumination units that illuminate the second side surface, The pair of second illumination parts has a semi-cylindrical shape, and includes a second holding member including a curved inner wall surface whose diameter is increased from the proximal end side toward the distal end side, and an inner wall surface of the second holding member. A plurality of second light projecting members that are held and irradiate light toward the distal end side of the second holding member; Each of which is disposed closer to the inspection object positioned on the transparent table than the second imaging unit, and the tip of the second holding member faces the second side surface of the inspection object positioned on the transparent table, Each of the inner wall faces each other and is arranged so as to interpose a virtual plane including the surface of the transparent table along the central axis, and the third imaging unit includes a third imaging unit that performs imaging of the third side surface, A third illuminating unit that illuminates the third side surface, and the third illuminating unit is provided with a pair of openings, and is recessed from one of the pair of openings toward the other opening. A third holding member including a concave curved surface and including an inner wall surface surrounding the imaging axis of the third imaging unit; and a third holding member held on the inner wall surface of the third holding member so as to surround the imaging axis of the third imaging unit; A plurality of first light beams that irradiate light toward one opening side of the holding member A third side surface of the inspection object that is closer to the inspection object positioned on the transparent table than the third imaging unit and has one opening of the third holding member positioned on the transparent table. The fourth imaging means has a fourth imaging unit that images the fourth side surface and a pair of fourth illumination units that illuminate the fourth side surface, and a pair of fourth illumination units Has a semi-cylindrical shape, and is held on the inner wall surface of the fourth holding member, the fourth holding member including the curved inner wall surface whose diameter is increased from the proximal end side toward the distal end side, and the fourth holding member A plurality of fourth light projecting members that irradiate light toward the front end side of the member, are arranged closer to the inspection object located on the transparent table than the fourth imaging unit, and are held fourth. The tip of the member faces the fourth side of the inspection object located on the transparent table The fifth imaging means includes a fifth imaging unit that performs imaging of the fifth side surface, and illumination of the fifth side surface, the inner wall surfaces thereof facing each other and a transparent table is disposed along the central axis. A pair of fifth illumination parts, and the pair of fifth illumination parts has a semi-cylindrical shape and includes a curved inner wall whose diameter is increased from the proximal end side toward the distal end side. 5 holding members and a plurality of fifth light projecting members that are held on the inner wall surface of the fifth holding member and irradiate light toward the distal end side of the fifth holding member, and are more transparent than the fifth imaging unit. The tip of the fifth holding member is arranged close to the inspection object positioned above and toward the fifth side surface of the inspection object positioned on the transparent table, and the inner wall surfaces thereof face each other. The imaging means includes a sixth imaging unit that performs imaging of the sixth side surface, and illumination of the sixth side surface. A pair of sixth illumination units that perform light, the pair of sixth illumination units has a semi-cylindrical shape, and includes a curved inner wall surface that is expanded in diameter from the proximal side toward the distal side. Each including a sixth holding member and a plurality of sixth light projecting members that are held on the inner wall surface of the sixth holding member and irradiate light toward the distal end side of the sixth holding member, and are more transparent than the sixth imaging unit The tip of the sixth holding member is disposed close to the inspection object located on the table and faces the sixth side surface of the inspection object located on the transparent table, and the inner wall faces each other and the central axis The first imaging means, the second imaging means, the third imaging means, the fourth imaging means, the fifth imaging means, and the sixth imaging means are arranged so as to interpose the transparent table therebetween. Along the periphery of the transparent table so that the positions are different from each other. Wherein the Te are arranged side by side.

  In the appearance inspection apparatus according to the present invention, the inspection object is arranged on the peripheral portion of the transparent table so that the third side surface is in contact with the transparent table by the arrangement means, and the inspection object is conveyed by the transparent table. . Therefore, since the inspection object can be visually recognized from any direction toward the six side surfaces of the inspection object, it is not necessary to change the inspection object when imaging each side surface of the inspection object by each imaging means. As a result, the appearance inspection of the inspection object can be performed efficiently at high speed.

  Incidentally, in recent years, electronic components and the like that are inspection objects are required to be further downsized. However, as the inspection object becomes smaller, the proportion of the shadow caused by the unevenness of the surface of the inspection object becomes relatively larger, and it tends to be difficult to identify the shadow caused by the defect. However, in the appearance inspection apparatus according to the present invention, each of the illumination units included in the first imaging unit and the third imaging unit has a concave curved surface shape that is recessed from one opening to the other of the pair of openings (so-called so-called A holding member including an inner wall surface that surrounds the imaging axis, and a plurality of members that are held on the inner wall surface of the holding member so as to surround the imaging axis and irradiate light toward one opening side of the holding member And a light projecting member. In addition, the pair of illumination units included in each of the second imaging unit, the fourth imaging unit, the fifth imaging unit, and the sixth imaging unit has a semi-cylindrical shape, and the diameter is increased from the proximal end side toward the distal end side. Each holding member including a curved inner wall surface and a plurality of light projecting members that are held on the inner wall surface of the holding member and irradiate light toward the distal end side of the holding member, and the distal end of the holding member is a transparent table It is arranged so that the inner wall faces each other while facing the side surface of the inspection object located above. Therefore, each side surface of the inspection object is irradiated with light from the light projecting member from various directions (angles). As a result, the influence of shading caused by the unevenness of the surface of the inspection object is reduced, so that the appearance inspection of the inspection object can be performed with extremely high accuracy.

  In the appearance inspection apparatus according to the present invention, the first imaging means, the second imaging means, the third imaging means, the fourth imaging means, the fifth imaging means, and the sixth imaging means are located at different positions. Are arranged side by side along the periphery of the transparent table. For this reason, as in the conventional appearance inspection apparatus described in Patent Document 1, a plurality of imaging means provided for imaging different surfaces of the electronic component are provided for the inspection object on the transparent table. The pair of opposing side surfaces are not imaged simultaneously. As a result, it is possible to greatly suppress the influence of light interference and perform an appearance inspection of an inspection object with extremely high accuracy.

  Here, since the refractive index in the atmosphere of the appearance inspection apparatus and the refractive index in the transparent table are generally different, the light passing through the inside of the transparent table and reaching the object to be inspected is the atmosphere of the appearance inspection apparatus and the transparent table. Refracts at the interface with For this reason, the illumination conditions between the light that passes through the transparent table and reaches the inspection object and the light that directly reaches the inspection object without passing through the transparent table may differ. However, in the appearance inspection apparatus according to the present invention, the second imaging unit, the fourth imaging unit, the fifth imaging unit, and the sixth imaging unit each have a pair of illumination units, and each pair of illumination units is The inner wall faces each other, and the transparent table or the virtual plane including the surface of the transparent table is disposed along the central axis. Therefore, by arranging the pair of illumination units while adjusting the angle or position of one or both of the pair of illumination units, the illumination condition of the inspection object is made closer to uniform while suppressing the influence of light interference. It becomes possible.

  Further, here, the second imaging means images the second side surface of the inspection object from the outside in the radial direction of the transparent table, and the tip of the second holding member is placed on the second side surface of the inspection object located on the transparent table. Since a pair of 2nd illumination part is arrange | positioned so that it may face, a pair of 2nd illumination part is located in the outer side in the radial direction of a transparent table. In the appearance inspection apparatus according to the present invention, the pair of second illumination units are arranged so as to place a virtual plane including the surface of the transparent table along the central axis. When maintaining the appearance inspection apparatus, the transparent table can be passed between the pair of second illumination units. Therefore, maintenance of the appearance inspection apparatus can be easily performed.

  Preferably, the fifth imaging unit and the sixth imaging unit are arranged side by side along the periphery of the transparent table in order of the rotation direction of the transparent table, and the fourth imaging unit is the fifth imaging unit or the sixth imaging unit. The first imaging means, the second imaging means, and the third imaging means are arranged on the periphery of the transparent table so as to be adjacent to the imaging means. The fifth imaging means and the sixth imaging means are different from the fourth imaging means. On the opposite side, the first image pickup means and the third image pickup means are arranged side by side along the periphery of the transparent table so that the second image pickup means is interposed therebetween and adjacent to each other. As described above, the fifth imaging unit and the sixth imaging unit are arranged at the periphery of the transparent table so that the fifth imaging unit and the sixth imaging unit are arranged adjacent to each other in the rotation direction of the transparent table. Back to back. Therefore, even if the fifth imaging unit and the sixth imaging unit are arranged side by side, the light from the illumination unit in one imaging unit of the fifth imaging unit and the sixth imaging unit is captured by the imaging unit in the other imaging unit. It is difficult to enter.

  In addition, the fourth imaging unit is disposed on the periphery of the transparent table so as to be adjacent to the fifth imaging unit or the sixth imaging unit. Therefore, the light from the fifth illumination unit or the sixth illumination unit is mainly directed in the tangential direction of the outer periphery of the transparent table and is difficult to enter the fourth imaging unit, and the light from the fourth illumination unit is mainly transparent table. It is difficult to enter into the 5th image pick-up part or the 6th image pick-up part.

  Further, on the opposite side of the fourth imaging means from the fifth imaging means and the sixth imaging means, the first imaging means and the third imaging means are placed adjacent to each other with the second imaging means in between. 1 imaging means, 2nd imaging means, and 3rd imaging means are arranged along with the perimeter of a transparent table. Therefore, the illumination direction of the illumination unit in one of the first imaging unit, the second imaging unit, the third imaging unit, and the fourth imaging unit and the illumination direction of the illumination unit in the imaging unit adjacent to the one imaging unit. Are spatially twisted relative to each other. Accordingly, light from the illumination unit in one of the first imaging unit, the second imaging unit, the third imaging unit, and the fourth imaging unit enters the imaging unit in the imaging unit adjacent to the one imaging unit. It has become difficult. As a result, it is possible to further eliminate light interference between the imaging means.

  Preferably, the first side surface, the second side surface, the third side surface, the fourth side surface, the second side surface, the first image capturing unit, the second image capturing unit, the third image capturing unit, the fourth image capturing unit, the fifth image capturing unit, and the sixth image capturing unit. The apparatus further includes a removing unit that blows ionized gas onto the inspection object after the imaging of the fifth side surface and the sixth side surface is performed, and removes the inspection object from the transparent table. Here, when non-ionized gas is sprayed on the transparent table, friction may be generated between the sprayed gas and the surface of the transparent table, and the surface of the transparent table may be charged. As described above, when the surface of the transparent table is charged, foreign matter such as dust in the atmosphere of the appearance inspection apparatus and fragments of the inspection object adhere to the surface of the transparent table, the transparent table is contaminated, or the inspection object There is a concern that it will adhere to the surface of the transparent table and it will be difficult to remove the inspection object from the transparent table. However, in the appearance inspection apparatus according to the present invention, the ionized gas is blown against the inspection object, so that the charge on the surface of the transparent table can be removed (static elimination), and the foreign table or the inspection object transparent table. It becomes possible to suppress adhesion to the surface and to prevent charging of the surface of the transparent table itself.

  ADVANTAGE OF THE INVENTION According to this invention, the external appearance inspection apparatus which can suppress the influence by light interference significantly and can perform the external appearance inspection of a test target object with very high precision can be provided.

  A preferred embodiment of an appearance inspection apparatus 10 according to the present invention will be described with reference to the drawings. The appearance inspection apparatus 10 detects the presence or absence of defects on the surface of an element body (inspection object) 1 constituting an electronic component such as a chip capacitor or a chip inductor. In the description, the same reference numerals are used for the same elements or elements having the same function, and a duplicate description is omitted.

[Element structure]
First, the element body 1 (inspection object) will be described with reference to FIG. The element body 1 includes an electrode pattern serving as an internal electrode for functioning as a capacitor when the element body 1 becomes an electronic component, and an internal conductor for functioning as an inductor when the element body 1 becomes an electronic component. A plurality of ceramic green sheets each having a conductor pattern formed thereon are stacked and pressure-bonded, fired at a predetermined temperature for a predetermined time, and then barrel-polished.

  The element body 1 has a substantially rectangular parallelepiped shape. The element body 1 includes a pair of side surfaces s1 (first side surface) and s3 (third side surface) facing the X-axis direction (hereinafter referred to as “height direction”) and a Y-axis direction (hereinafter referred to as “width direction”). ) Facing a pair of side surfaces s2 (second side surface), s4 (fourth side surface) and a pair of side surfaces s5 (fifth side surface), s6 ( 6th side). Therefore, the side surfaces s1, s2 and the side surfaces s3, s4 are positioned adjacent to each other, the side surfaces s1, s2, and the side surfaces s5, s6 are positioned adjacent to each other, and the side surfaces s3, s4 and the side surfaces s5, It is located adjacent to s6. The side surfaces s1 and s2 connect the side surface s3 and the side surface s4 and connect the side surface s5 and the side surface s6, and the side surfaces s3 and s4 connect the side surface s1 and the side surface s2 and connect the side surface s5 and the side surface s6. The side surfaces s5 and s6 connect the side surface s1 and the side surface s2 and connect the side surface s3 and the side surface s4.

  Here, it is preferable to set the size of the element body 1 so that the element body 1 has a size called 0402 or 0603 when the element body 1 becomes an electronic component. The width of the element body 1 can be set to, for example, about 0.2 mm to 0.5 mm, and the length of the element body 1 can be set to, for example, about 0.4 mm to 1 mm. Can be set to The ridge portion of the element body 1 is chamfered by a barrel polishing process when the element body 1 is formed, and is rounded.

[Configuration of visual inspection equipment]
Next, the configuration of the appearance inspection apparatus 10 will be described with reference to FIGS. 1 and 2. As shown in FIGS. 1 and 2, the appearance inspection apparatus 10 includes a transparent table T, an element body supply unit A10 (arrangement means), a first posture correction unit B10, a second posture correction unit C10, 1 imaging unit D10 (1st imaging means), 2nd imaging unit E10 (2nd imaging means), 3rd imaging unit F10 (3rd imaging means), 4th imaging unit G10 (4th imaging means) A fifth imaging unit H10 (fifth imaging means), a sixth imaging unit I10 (sixth imaging means), a non-defective product recovery unit J10 (removal means), a defective product recovery unit K10 (removal means), and a control unit 12.

  The transparent table T is made of, for example, glass or synthetic resin. As shown in FIG. 1, the transparent table T has a substantially circular shape when viewed from above, and the diameter thereof can be set to, for example, about 40 cm to 50 cm.

  On the lower surface side of the transparent table T, for example, a servo motor (not shown) is disposed. The transparent table T is driven by this servo motor and rotates (spins) in the direction of arrow R in FIG.

  In the vicinity of the periphery of the transparent table T, along the rotation direction (arrow R direction) of the transparent table T, the element supply unit A10, the first posture correcting unit B10, the second posture correcting unit C10, the first imaging unit D10, The second imaging unit E10, the third imaging unit F10, the fourth imaging unit G10, the fifth imaging unit H10, the sixth imaging unit I10, the non-defective product recovery unit J10, and the defective product recovery unit K10 are arranged in this order (FIG. 1). reference).

[Configuration of element supply unit]
Next, the configuration of the element body supply unit A10 will be described with reference to FIG. The element supply unit A10 includes a hopper A12, a first linear feeder A14, a ball feeder A16, and a second linear feeder A18.

  The hopper A12 has a funnel shape and stores a predetermined amount of the element body 1. The bottom of the hopper A12 can be opened and closed. When the bottom is opened, the stored element body 1 is supplied to the first linear feeder A14. Note that a large number of element bodies 1 are supplied to the hopper A12 by hand.

  The first linear feeder A14 includes a chute A14a and a drive unit A14b. The chute A14a has a U-shaped or V-shaped groove extending in the longitudinal direction thereof, and the element body 1 is conveyed toward the ball feeder 14c by guiding the element body 1 along the groove. . The drive unit A14b is an electromagnetic type having an electromagnet and a leaf spring (not shown), and vibrates by itself when the vibration of the electromagnet is amplified by the leaf spring. The drive unit A14b vibrates the chute A14a by vibrating itself, and pushes the element body 1 supplied from the hopper A12 along the groove formed in the chute A14a to the ball feeder A16.

  The ball feeder A16 includes a ball A16a and a drive unit A16b, and is a so-called rotary feeder. The ball A16a has a mortar-shaped inclined surface whose diameter decreases as the side surface in the circumferential direction of the ball moves downward, and a spiral groove is formed on the side surface in the circumferential direction. The drive unit A16b is an electromagnetic type having an electromagnet and a leaf spring (not shown), and vibrates by itself when the vibration of the electromagnet is amplified by the leaf spring. The drive unit A16b vibrates the ball A16a by vibrating itself and aligns the posture of the element body 1 while gradually raising the element body 1 along the spiral groove formed in the ball A16a. Is pushed out to the second linear feeder A18.

  The second linear feeder A18 includes a chute A18a and a drive unit A18b. The chute A18a has a U-shaped or V-shaped groove extending in the longitudinal direction thereof, and the element body 1 is conveyed toward the transparent table T by guiding the element body 1 along the groove. . The chute A18a extends along the tangential direction of the outer periphery of the transparent table T, and the tip thereof is located on the surface of the transparent table T. The drive unit A18b is an electromagnetic type having an electromagnet and a leaf spring (not shown), and vibrates by itself when the vibration of the electromagnet is amplified by the leaf spring. The drive unit A18b vibrates itself to vibrate the chute A18a and pushes the element body 1 supplied from the ball feeder A16 along the groove formed in the chute A18a onto the transparent table T. Thereby, the element body 1 is supplied to the peripheral edge portion on the surface of the transparent table T. In the present embodiment, the element body 1 is secondly arranged so that the side surface s3 of the element body 1 contacts the surface of the transparent table T and the side surface s4 of the element body 1 faces the central axis A side of the transparent table T. It is supplied to the transparent table T by the linear feeder A18.

[Configuration of first posture correction unit]
Next, the configuration of the first posture correction unit B10 will be described with reference to FIG. The first posture correction unit B10 includes a pair of posture correction arms B12 and B14.

  As shown in FIG. 4, the posture correction arm B12 includes a base B12a, an arm B12b, and a protrusion B12c. The base B12a extends in the radial direction of the transparent table T from the outside of the transparent table T toward the transparent table T so as to be substantially parallel to the surface of the transparent table T. The arm B12b is connected to the tip of the base B12a and extends along the tangential direction of the outer periphery of the transparent table T so as to be substantially parallel to the surface of the transparent table T. The protrusion B12c is connected to the tip of the arm B12b, and protrudes downward (on the surface side of the transparent table T) from the tip of the arm B12b.

  Here, both the base B12a and the arm B12b are disposed on the transparent table T in a state of being separated from the surface of the transparent table T by a predetermined distance. The separation distance between the base B12a and the arm B12b and the surface of the transparent table T is such that when the element 1 supplied on the transparent table T passes through the first posture correcting unit B10, the element 1 becomes the base B12a and the arm. It is set to such an extent that it does not come into contact with the portion B12b (in the present embodiment in which the side surface s1 of the element body 1 is in contact with the surface of the transparent table T, at least exceeding the height of the element body 1). On the other hand, the lower surface of the protrusion B12c (the surface facing the surface of the transparent table T) is slightly separated from the surface of the transparent table T.

  The posture correction arm B14 includes a base part B14a and an arm part B14b. The base B14a extends in the radial direction of the transparent table T from the outside of the transparent table T toward the transparent table T so as to be substantially parallel to the surface of the transparent table T. The arm portion B14b is connected to the tip of the base portion B14a and extends along the tangential direction of the outer periphery of the transparent table T so as to be substantially parallel to the surface of the transparent table T. The arm part B14b protrudes downward (surface side of the transparent table T) from the base part B14a.

  Here, the base B14a is arranged on the transparent table T in a state of being separated from the surface of the transparent table T by a predetermined distance. The separation distance between the base B14a and the surface of the transparent table T is such that the base body 1 does not contact the base B14a when the base body 1 supplied on the transparent table T passes through the first posture correcting unit B10. In the present embodiment in which the side surface s3 of the body 1 is in contact with the surface of the transparent table T, it is set to be at least about the height of the element body 1). On the other hand, the lower surface (the surface facing the surface of the transparent table T) of the arm portion B14b is slightly separated from the surface of the transparent table T.

  The tip of the posture correction arm B12 (the end of the protrusion B12c on the side facing the rotation direction of the transparent table T) B12d and the tip of the posture correction arm B14 (the side of the arm B14b facing the rotation direction of the transparent table T) B14c is directed to the tip of the chute A18a of the second linear feeder A18 and is slightly separated from the tip. Further, the separation distance between the distal end B12d (protrusion B12c) of the posture correction arm B12 and the distal end B14c (arm B14b) of the posture correction arm B14 is such that the element body 1 can pass and the element body 1 that passes therethrough. It is set to such an extent that the posture is not greatly collapsed (in the present embodiment in which the side surface s4 of the element body 1 faces the central axis A side of the transparent table T, it is slightly wider than the width of the element body 1). .

  Since the posture correcting arms B12 and B14 are configured as described above, the projecting portion B12c and the arm portion B14b exhibit a function of guiding the element body 1, so that the element body 1 is moved from the chute A18a to the transparent table T. When the element body 1 passes through the step formed between the groove of the chute A 18a and the surface of the transparent table T when the element body 1 is supplied to the transparent table, the posture of the element body 1 is not destroyed by the step. Element body 1 is supplied to T. Further, since the base B12a is separated from the surface of the transparent table T by a predetermined distance, the base body 1 is inhibited by the base B12a of the posture correcting arm B12 after passing between the protrusion B12c and the arm B14b. The element body 1 is conveyed by the transparent table T without any change.

[Configuration of the second posture correction unit]
Next, the configuration of the second posture correction unit C10 will be described with reference to FIG. As shown in FIG. 5, the second posture correcting unit C10 includes a posture correcting member C12, a pair of arms C14 and 16, a laser emitter C18, and a laser receiver C20.

  The posture correction member C12 includes a base C12a having a substantially rectangular parallelepiped shape and a posture correction portion C12b provided at the tip of the base C12a. The posture correction member C12 is disposed on the periphery of the transparent table T so that the posture correction portion C12b is directed to the central axis A side of the transparent table T.

  The posture correction part C12b becomes thinner as it goes from the base end part connected to the base part C12a to the front end part on the central axis A side of the transparent table T. Therefore, the posture correction unit C12b has a triangular shape when viewed from the side. The tip C12c of the posture correction unit C12b has an arc shape that protrudes toward the central axis A side of the transparent table T (the direction from the base C12a toward the posture correction unit C12b). When the element body 1 is conveyed by the transparent table T while the side surface s2 of the element body 1 is in contact with the arcuate tip C12c, the inclination of the element body 1 is corrected. By correcting the posture of the element body 1 with the posture correction member C12, all the element bodies 1 passing through the posture correction member C12 have a desired posture (specifically, the width of the element body 1 with respect to the radial direction of the transparent table T). The inclination of the direction is within ± 5 °. Thereby, in any element body 1, it becomes possible to make imaging conditions substantially uniform.

  The arm C14 has an L-shape when viewed from the side, one end of which is connected to the upper surface side of the base C12a of the posture correcting member C12, and the other end of which is the central axis A side (posture from the base C12a) of the transparent table T. Extending in the direction toward the correction portion C12b). Therefore, the arm C14 is positioned on the surface side of the transparent table T. A laser emitter C18 is provided at the other end of the arm C14. The laser emitter C18 irradiates laser light L from the other end of the arm C14 toward the transparent table T and the laser receiver C20. The irradiation position of the laser beam L is slightly closer to the central axis A side of the transparent table T than the top of the tip C12c of the posture correction unit C12b, and the element body 1 is in contact with the top of the tip C12c of the posture correction unit C12b. In such a case, the position is such that the laser beam L strikes the element body 1.

  The arm C16 has an L shape when viewed from the side, and one end of the arm C16 is connected to the lower surface side of the base C12a of the posture correcting member C12, and the other end is the central axis A side (posture from the base C12a) of the transparent table T. Extending in the direction toward the correction portion C12b). Therefore, the arm C16 is positioned on the back side of the transparent table T. At the other end of the arm C16, a laser receiver C20 is provided. The laser receiver C20 detects whether or not the element body 1 has passed through the apex at the tip C12c of the posture correction unit C12b based on whether or not the laser light L from the laser emitter C18 is incident.

[Configuration of the first imaging unit]
Next, the configuration of the first imaging unit D10 will be described with reference to FIG. The first imaging unit D10 is for imaging the side surface s1 of the element body 1. Imaging of the side surface s1 of the element body 1 by the first imaging unit D10 is performed from above the transparent table T. As shown in FIG. 6, the first imaging unit D10 includes a camera D12 (first imaging unit) that performs imaging, a lens barrel D14 that accommodates a lens (not shown), and a dome-shaped illumination D16 (first illumination unit). The dome-shaped illumination D16 is disposed above the transparent table T so as to be positioned closer to the element body 1 located on the transparent table T than the camera D12 and the lens barrel D14.

  The dome-shaped illumination D16 includes a bowl-shaped member D16a (first holding member) and a plurality of light projecting members D16b (first light projecting members). The bowl-shaped member D16a includes a side wall portion D16d provided with an opening D16c (one opening) and a base portion D16f provided with an opening D16e (the other opening) communicating with the lens barrel D14 in the central portion. The side wall portion D16d has a concave curved surface shape (for example, a spherical surface shape or a parabolic surface shape) whose inner wall surface is recessed toward the side from the opening D16c toward the opening D16e. The base D16f has a flat plate shape and is disposed on the side opposite to the opening D16c.

  The dome-shaped illumination D16 is disposed above the transparent table T so that the opening D16c of the bowl-shaped member D16a faces the side surface s1 of the element body 1 located on the transparent table T. Therefore, the imaging axis DL of the camera D12 goes to the element body 1 through the lens barrel D14, the opening D16e of the base D16f, the side wall D16d, and the opening D16c. That is, the imaging axis DL of the camera D12 is surrounded by the inner wall surface of the side wall portion D16d.

  The light projecting member D16b is, for example, a light emitting LED (Light Emitting Diode). The light projecting member D16b is disposed over the entire inner wall surface of the side wall portion D16d and the entire inner wall surface of the base portion D16f. Therefore, the light projecting member D16b also surrounds the imaging axis DL of the camera D12, and the light emitting member D16b disposed on the inner wall surface of the base D16f from the direction along the vertical line of the side surface s1 of the base body 1 The side surface s1 of the element body 1 is illuminated, and by the light projecting member D16b disposed on the inner wall surface of the side wall portion D16d, the element body from a direction exceeding 0 ° and less than 90 ° with respect to the normal of the side surface s1 of the element body 1 The side surface s1 of the element body 1 is illuminated, the reflected light from the side surface s1 of the element body 1 is introduced into the lens barrel D14 and the camera D12, and the side surface s1 of the element body 1 is imaged.

  As described above, the side surface s1 of the element body 1 is illuminated from the direction along the perpendicular of the side surface s1 of the element body 1, so that scratches, irregularities, chips, etc. on the side surface s1 of the element body 1 can be clearly projected. . Further, the side surface s1 of the element body 1 is illuminated from a direction exceeding 0 ° and less than 90 ° with respect to the perpendicular to the side surface s1 of the element body 1, so that the side surface s1 of the element body 1 has various directions (angles). It is possible to clearly show defects that are illuminated from the side and connected from the side surface s1 of the element body 1 to the inside, such as cracks and chipping.

[Configuration of Second Imaging Unit]
Next, the configuration of the second imaging unit E10 will be described with reference to FIG. The second imaging unit E10 is for imaging the side surface s2 of the element body 1. Imaging of the side surface s2 of the element body 1 by the second imaging unit E10 is performed from the outside in the radial direction of the transparent table T. As shown in FIG. 7, the second imaging unit E10 includes a camera E12 (second imaging unit) that performs imaging, a lens barrel E14 that accommodates a lens (not shown), a prism adapter E16, and a pair of half-cylinders. It has illumination E18, E20 (second illumination part), and a pair of semi-cylindrical illuminations E18, E20 is located closer to the element body 1 located on the transparent table T than the camera E12, the lens barrel E14, and the prism adapter E16. In this way, the transparent table T is disposed outside the peripheral edge.

  The prism adapter E16 is connected to an opening E16a into which reflected light from the side surface s2 of the element body 1 is introduced, a right-angle prism E16b that reflects the reflected light introduced from the opening E16a, and the tip of the lens barrel E14. In addition, it includes an opening E16c that guides the reflected light reflected by the right-angle prism E16b toward the lens barrel E14 and the camera E12.

  The pair of semi-cylindrical lamps E18 and E20 are respectively composed of semi-cylindrical members E18a and E20a (second holding member) and a plurality of light projecting members E18b and E20b (second light projecting member). The semi-cylindrical members E18a and E20a include side wall portions E18c and E20c and base portions E18d and E20d, respectively. The side wall portions E18c and E20c have curved surfaces (for example, spherical surfaces and parabolic surfaces) whose inner wall surfaces are enlarged in diameter from the base ends E18e and E20e of the semi-cylindrical members E18a and E20a toward the distal ends E18f and E20f. It is said that. The bases E18d and E20d have a flat plate shape and are arranged on the base ends E18e and E20e side of the semi-cylindrical members E18a and E20a. That is, the pair of semi-cylindrical lamps E18 and E20 are divided into two on a plane where the dome-shaped lamp D16 intersects both the opening D16c and the opening D16e. Therefore, the pair of semi-cylindrical illuminations E18 and E20 have division surfaces E18g and E20g, respectively.

  The pair of semi-cylindrical lamps E18 and E20 are arranged such that the dividing surfaces E18g and E20g are substantially parallel to the surface of the transparent table T. Further, the pair of semi-cylindrical illuminations E18, E20 are such that the tips E18f, E20f of the semi-cylindrical members E18a, E20a face the side surface s2 of the element body 1 located on the transparent table T, and the inner wall faces each other. The virtual plane V including the surface of the transparent table T is disposed along the central axis A of the transparent table T. Therefore, the direction of the imaging axis EL of the camera E12 is changed by the right angle prism E16b through the lens barrel E14 and the opening E16c of the prism adapter E16, and then the opening E16a of the prism adapter E16 and the semi-cylindrical illumination E18 and the half It goes to the element body 1 through the space between the cylindrical illumination E20.

  The light projecting members E18b and E20b are, for example, light emitting LEDs. The light projecting members E18b and E20b are disposed over the entire inner wall surface of the side wall portions E18c and E20c and the entire inner wall surface of the base portions E18d and E20d. Therefore, the light projecting members E18b and E20b arranged on the inner wall surfaces of the base portions E18d and E20d illuminate the side surface s2 of the element body 1 from the direction along the perpendicular to the side surface s2 of the element body 1, and the side wall portion E18c. The side surface s2 of the element body 1 is illuminated from the direction exceeding 0 ° and less than 90 ° with respect to the perpendicular to the side surface s2 of the element body 1 by the light projecting members E18b and E20b arranged on the inner wall surface of the E20c. Reflected light from the side surface s2 of the element body 1 is introduced into the lens barrel E14 and the camera E12, and the side surface s2 of the element body 1 is imaged.

  Thus, the side surface s2 of the element body 1 is illuminated from the direction along the perpendicular of the side surface s2 of the element body 1, so that scratches, irregularities, chips, etc. on the side surface s2 of the element body 1 can be clearly projected. . Further, the side surface s2 of the element body 1 is illuminated from a direction exceeding 0 ° and less than 90 ° with respect to the perpendicular to the side surface s2 of the element body 1, so that the side surface s2 of the element body 1 has various directions (angles). It is possible to clearly show a defect that is illuminated from the side and connected from the side surface s2 of the element body 1 to the inside, such as a crack or chipping.

[Configuration of Third Imaging Unit]
Next, the configuration of the third imaging unit F10 will be described with reference to FIG. The third imaging unit F10 is for imaging the side surface s3 of the element body 1. Imaging of the side surface s3 of the element body 1 by the third imaging unit F10 is performed from below the transparent table T through the transparent table T. As shown in FIG. 8, the third imaging unit F10 includes a camera F12 (third imaging unit) that performs imaging, a lens barrel F14 that houses a lens (not shown), a prism adapter F16, and a dome-shaped illumination F18 ( And the dome-shaped illumination F18 is disposed below the transparent table T so that the dome-shaped illumination F18 is located closer to the element body 1 located on the transparent table T than the camera F12, the lens barrel F14, and the prism adapter F16. Has been.

  The prism adapter F16 is connected to an opening F16a into which reflected light from the side surface s3 of the element body 1 is introduced, a right-angle prism F16b that reflects the reflected light introduced from the opening F16a, and the tip of the lens barrel F14. And an opening F16c that guides the reflected light reflected by the right-angle prism F16b toward the lens barrel F14 and the camera F12.

  The dome-shaped illumination F18 includes a flange-shaped member F18a (third holding member) and a plurality of light projecting members F18b (third light projecting members). The flange-shaped member F18a includes a side wall portion F18d provided with an opening F18c (one opening) and a base portion F18f provided with an opening F18e (the other opening) in the center portion. The side wall portion F18d has a concave curved surface shape (for example, a spherical surface shape or a parabolic surface shape) whose inner wall surface is recessed toward the side from the opening F18c toward the opening F18e. The base F18f has a flat plate shape and is disposed on the side opposite to the opening F18c.

  The dome-shaped illumination F18 is disposed below the transparent table T so that the opening F18c of the bowl-shaped member F18a faces the side surface s3 of the element body 1 located on the transparent table T. Therefore, the direction of the imaging axis FL of the camera F12 is changed by the right angle prism F16b through the lens barrel F14 and the opening F16c of the prism adapter F16, and then the opening F16a of the prism adapter F16, the opening F18e of the base F18f, and the side wall. It goes to the element body 1 through the part F18d and the opening F18c. That is, the imaging axis FL of the camera F12 is surrounded by the inner wall surface of the side wall portion F18d.

  The light projecting member F18b is, for example, a light emitting LED. The light projecting member F18b is disposed over the entire inner wall surface of the side wall portion F18d and the entire inner wall surface of the base portion F18f. For this reason, the light projecting member F18b also surrounds the imaging axis FL of the camera F12, and the light projecting member F16b disposed on the inner wall surface of the base F16f from the direction along the perpendicular of the side surface s3 of the base body 1 The side surface s3 of the element body 1 is illuminated, and by the light projecting member F18b disposed on the inner wall surface of the side wall portion F18d, the element body from a direction exceeding 0 ° and less than 90 ° with respect to the perpendicular of the side surface s3 of the element body 1 The side surface s3 of the element body 1 is illuminated, the reflected light from the side surface s3 of the element body 1 is introduced into the lens barrel F14 and the camera F12 via the right-angle prism F16b, and the side surface s3 of the element body 1 is imaged. .

  In this way, the side surface s3 of the element body 1 is illuminated from the direction along the perpendicular of the side surface s3 of the element body 1, so that scratches, irregularities, chips, etc. on the side surface s3 of the element body 1 can be clearly projected. . Further, the side surface s3 of the element body 1 is illuminated from a direction that exceeds 0 ° and less than 90 ° with respect to the perpendicular to the side surface s3 of the element body 1, so that the side surface s3 of the element body 1 has various directions (angles). It is possible to clearly show defects that are illuminated from the side and connected from the side surface s3 of the element body 1 to the inside, such as cracks and chipping.

[Configuration of Fourth Imaging Unit]
Next, the configuration of the fourth imaging unit G10 will be described with reference to FIG. The fourth imaging unit G10 is for imaging the side surface s4 of the element body 1. Imaging of the side surface s4 of the element body 1 by the fourth imaging unit G10 is performed from the inside in the radial direction of the transparent table T. As shown in FIG. 9, the fourth imaging unit G10 includes a camera G12 (fourth imaging unit) that performs imaging, a lens barrel G14 that houses a lens (not shown), a prism adapter G16, and a pair of half-cylinders. It has illumination G18, G20 (fourth illumination part), and a pair of semi-cylindrical illuminations G18, G20 is located closer to the element body 1 located on the transparent table T than the camera G12, the lens barrel G14, and the prism adapter G16. The transparent table T is arranged near the periphery.

  The prism adapter G16 is connected to the opening G16a into which the reflected light from the side surface s4 of the element body 1 is introduced, the right angle prism G16b that reflects the reflected light introduced from the opening G16a, and the tip of the lens barrel G14. In addition, it includes an opening G16c that guides the reflected light reflected by the right-angle prism G16b toward the lens barrel G14 and the camera G12. Since the element body 1 is smaller than the prism adapter G16, the right-angle prism G16b is slightly inclined toward the surface side of the transparent table T in the prism adapter G16, as shown in FIG. It has become.

  The pair of semi-cylindrical lights G18 and G20 are configured by semi-cylindrical members G18a and G20a (fourth holding member) and a plurality of light projecting members G18b and G20b (fourth light projecting member), respectively. The semi-cylindrical members G18a and G20a include side wall portions G18c and G20c and base portions G18d and G20d, respectively. The side wall portions G18c, G20c are curved surfaces (for example, spherical surfaces or parabolic surfaces) whose inner wall surfaces are expanded in diameter from the base ends G18e, G20e of the semi-cylindrical members G18a, G20a toward the distal ends G18f, G20f. It is said that. The bases G18d and G20d have a flat plate shape and are disposed on the base ends G18e and G20e side of the semi-cylindrical members G18a and G20a. That is, the pair of semi-cylindrical illuminations G18 and G20 is divided into two on a plane where the dome-shaped illumination D16 intersects both the opening D16c and the opening D16e. Therefore, the pair of semi-cylindrical lights G18 and G20 have division surfaces G18g and G20g, respectively.

  The pair of semi-cylindrical lights G18 and G20 are arranged such that the dividing surfaces G18g and G20g are substantially parallel to the surface of the transparent table T. In addition, the pair of semi-cylindrical lights G18 and G20 are arranged such that the tips G18f and G20f of the semi-cylindrical members G18a and G20a face the side surface s4 of the element body 1 positioned on the transparent table T, and the inner wall faces each other. The transparent table T is disposed along the central axis A of the transparent table T. Therefore, the direction of the imaging axis GL of the camera G12 is changed by the right angle prism G16b through the lens barrel G14 and the opening G16c of the prism adapter G16, and then the opening G16a of the prism adapter G16 and the semi-cylindrical illumination G18 and the half It goes to the element body 1 through the space between the cylindrical illumination G20.

  The light projecting members G18b and G20b are, for example, light emitting LEDs. The light projecting members G18b and G20b are disposed over the entire inner wall surface of the side wall portions G18c and G20c and the entire inner wall surface of the base portions G18d and G20d. Therefore, the light projecting members G18b and G20b arranged on the inner wall surfaces of the base portions G18d and G20d illuminate the side surface s4 of the element body 1 from the direction along the perpendicular to the side surface s4 of the element body 1, and also the side wall portion G18c. The side surface s4 of the element body 1 is illuminated from the direction exceeding 0 ° and less than 90 ° with respect to the normal of the side surface s4 of the element body 1 by the light projecting members G18b and G20b arranged on the inner wall surface of the G20c. Reflected light from the side surface s4 of the element body 1 is introduced into the lens barrel G14 and the camera G12 via the right-angle prism G16b, and the side surface s4 of the element body 1 is imaged.

  In this way, the side surface s4 of the element body 1 is illuminated from the direction along the perpendicular of the side surface s4 of the element body 1, so that scratches, irregularities, chips, etc. on the side surface s4 of the element body 1 can be clearly projected. . Further, the side surface s4 of the element body 1 is illuminated from the direction exceeding 0 ° and less than 90 ° with respect to the perpendicular to the side surface s4 of the element body 1, so that the side surface s4 of the element body 1 has various directions (angles). The defect connected to the inside from the side surface s4 of the element body 1 such as cracks and chipping can be clearly projected.

[Configuration of Fifth Imaging Unit]
Next, the configuration of the fifth imaging unit H10 will be described with reference to FIG. The fifth imaging unit H10 is for imaging the side surface s5 of the element body 1. Imaging of the side surface s5 of the element body 1 by the fifth imaging unit H10 is performed from the front side in the rotation direction R of the transparent table T. As shown in FIG. 10, the fifth imaging unit H10 includes a camera H12 (fifth imaging unit) that performs imaging, a lens barrel H14 that houses a lens (not shown), a prism adapter H16, and a pair of half-cylinders. It has illumination H18, H20 (fifth illumination part), and the pair of semi-cylindrical illuminations H18, H20 is located closer to the element body 1 located on the transparent table T than the camera H12, the lens barrel H14 and the prism adapter H16. The transparent table T is arranged near the periphery.

  The prism adapter H16 is connected to the opening H16a into which the reflected light from the side surface s5 of the element body 1 is introduced, the right-angle prism H16b that reflects the reflected light introduced from the opening H16a, and the tip of the lens barrel H14. And an opening H16c that guides the reflected light reflected by the right-angle prism H16b toward the lens barrel H14 and the camera H12. Since the element body 1 is smaller than the prism adapter H16 and the imaging of the side surface s5 of the element body 1 is performed from the front side in the rotation direction R of the transparent table T, the camera H12, the lens barrel H14, and the prism adapter are performed. The prism adapter H16 located at the most transparent table T side among the camera H12, the lens barrel H14, and the prism adapter H16 is tilted slightly toward the surface side of the transparent table T. Is separated from the surface by a predetermined distance (specifically, a distance through which the element body 1 can pass between the prism adapter H16 and the surface of the transparent table T).

  The pair of semi-cylindrical lamps H18 and H20 are respectively composed of semi-cylindrical members H18a and H20a (fifth holding member) and a plurality of light projecting members H18b and H20b (fifth light projecting member). The semi-cylindrical members H18a and H20a include side wall portions H18c and H20c and base portions H18d and H20d, respectively. The side wall portions H18c, H20c are curved surfaces (for example, spherical surfaces or parabolic surfaces) whose inner wall surfaces are expanded in diameter from the base end H18e, H20e side of the semi-cylindrical members H18a, H20a toward the distal end H18f, H20f side. It is said that. The base portions H18d and H20d have a flat plate shape and are disposed on the base ends H18e and H20e side of the semi-cylindrical members H18a and H20a. That is, the pair of semi-cylindrical lamps H18 and H20 is divided into two on a plane where the dome-shaped lamp D16 intersects both the opening D16c and the opening D16e. Therefore, the pair of semi-cylindrical lights H18 and H20 have division surfaces H18g and H20g, respectively.

  The pair of semi-cylindrical lamps H18, H20 is in a state in which the dividing surfaces H18g, H20g are inclined at a predetermined angle with respect to the surface of the transparent table T, specifically, the distal end H18f, H20f side is more proximal than the proximal end H18e, H20e side. Are also arranged so as to approach the transparent table T. Further, the pair of semi-cylindrical illuminations H18, H20 are arranged such that the tips H18f, H20f of the semi-cylindrical members H18a, H20a face the side surface s5 of the element body 1 located on the transparent table T, and the inner wall faces each other. The transparent table T is disposed along the central axis A of the transparent table T. Therefore, the direction of the imaging axis HL of the camera H12 is changed by the right-angle prism H16b through the opening H16c of the lens barrel H14 and the prism adapter H16, and then the opening H16a of the prism adapter H16 and the semi-cylindrical illumination H18. It goes to the element body 1 through the space between the cylindrical illumination H20.

  The light projecting members H18b and H20b are, for example, light emitting LEDs. The light projecting members H18b and H20b are disposed over the entire inner wall surface of the side wall portions H18c and H20c and the entire inner wall surface of the base portions H18d and H20d. Therefore, the light projecting members H18b and H20b disposed on the inner wall surfaces of the base portions H18d and H20d illuminate the side surface s5 of the element body 1 from the direction along the perpendicular to the side surface s5 of the element body 1 and also the side wall portion H18c. The light projecting members H18b and H20b arranged on the inner wall surface of H20c illuminate the side surface s5 of the element body 1 from the direction of more than 0 ° and about 90 ° with respect to the perpendicular to the side surface s5 of the element body 1, Reflected light from the side surface s5 of the element body 1 is introduced into the lens barrel H14 and the camera H12 via the right-angle prism H16b, and the side surface s5 of the element body 1 is imaged.

  In this way, the side surface s5 of the element body 1 is illuminated from the direction along the perpendicular of the side surface s5 of the element body 1, so that scratches, irregularities, chips, etc. on the side surface s5 of the element body 1 can be clearly projected. . Further, the side surface s5 of the element body 1 is illuminated from a direction that exceeds 0 ° and about 90 ° with respect to the perpendicular to the side surface s5 of the element body 1, so that the side surface s5 of the element body 1 has various directions (angles). It is possible to clearly project defects that are illuminated from the side and connected from the side surface s5 of the element body 1 to the inside, such as cracks and chipping.

[Configuration of Sixth Imaging Unit]
Next, the configuration of the sixth imaging unit I10 will be described with reference to FIG. The sixth imaging unit I10 is for imaging the side surface s6 of the element body 1. Imaging of the side surface s6 of the element body 1 by the sixth imaging unit I10 is performed from the rear side in the rotation direction R of the transparent table T. As shown in FIG. 11, the sixth imaging unit I10 includes a camera I12 (sixth imaging unit) that performs imaging, a lens barrel I14 that accommodates a lens (not shown), a prism adapter I16, and a pair of half-cylinders. Illumination I18, I20 (sixth illumination section), and a pair of semi-cylindrical illuminations I18, I20 are located closer to the element body 1 located on the transparent table T than the camera I12, lens barrel I14, and prism adapter I16. The transparent table T is arranged near the periphery.

  The prism adapter I16 is connected to the opening I16a into which the reflected light from the side surface s6 of the element body 1 is introduced, the right angle prism I16b that reflects the reflected light introduced from the opening I16a, and the tip of the lens barrel I14. And an opening I16c that guides the reflected light reflected by the right-angle prism I16b toward the lens barrel I14 and the camera I12. Since the element body 1 is smaller than the prism adapter I16 and the side surface s6 of the element body 1 is imaged from the rear side in the rotation direction R of the transparent table T, the camera I12, lens barrel I14, and prism adapter are used. The prism adapter I16 located at the most transparent table T side among the camera I12, the lens barrel I14, and the prism adapter I16 is tilted so that I16 is slightly inclined toward the surface side of the transparent table T. Is separated from the surface by a predetermined distance (specifically, a distance through which the element body 1 can pass between the prism adapter I16 and the surface of the transparent table T).

  The pair of semi-cylindrical illuminations I18 and I20 are respectively composed of semi-cylindrical members I18a and I20a (sixth holding member) and a plurality of light projecting members I18b and I20b (sixth light projecting member). The semi-cylindrical members I18a and I20a include side wall portions I18c and I20c and base portions I18d and I20d, respectively. The side wall portions I18c and I20c have curved surfaces (for example, spherical surfaces and parabolic surfaces) whose inner wall surfaces are expanded in diameter from the base ends I18e and I20e of the semi-cylindrical members I18a and I20a toward the distal ends I18f and I20f. It is said that. The bases I18d and I20d have a flat plate shape and are arranged on the base ends I18e and I20e side of the semi-cylindrical members I18a and I20a. That is, the pair of semi-cylindrical lamps I18 and I20 is divided into two on a plane where the dome-shaped lamp D16 intersects both the opening D16c and the opening D16e. Therefore, the pair of semi-cylindrical illuminations I18 and I20 have division surfaces I18g and I20g, respectively.

  The pair of semi-cylindrical lamps I18 and I20 are in a state where the dividing surfaces I18g and I20g are inclined at a predetermined angle with respect to the surface of the transparent table T, specifically, the distal ends I18f and I20f are closer to the proximal ends I18e and I20e. Are also arranged so as to approach the transparent table T. Further, the pair of semi-cylindrical illuminations I18, I20 has the semi-cylindrical members I18a, I20a having their tips I18f, I20f facing the side surface s6 of the element body 1 positioned on the transparent table T, and the inner wall surfaces thereof facing each other. The transparent table T is disposed along the central axis A of the transparent table T. Therefore, the direction of the imaging axis IL of the camera I12 passes through the lens barrel I14 and the opening I16c of the prism adapter I16 and is changed by the right-angle prism I16b, and then the opening I16a and the semi-cylindrical illumination I18 of the prism adapter I16 and the half It goes to the element body 1 through the space between the cylindrical illumination I20.

  The light projecting members I18b and I20b are, for example, light emitting LEDs. The light projecting members I18b and I20b are arranged over the entire inner wall surface of the side wall portions I18c and I20c and the entire inner wall surface of the base portions I18d and I20d. Therefore, the light projecting members I18b and I20b arranged on the inner wall surfaces of the base portions I18d and I20d illuminate the side surface s6 of the element body 1 from the direction along the perpendicular to the side surface s6 of the element body 1, and the side wall portion I18c. The side surface s6 of the element body 1 is illuminated from the direction of more than 0 ° and about 90 ° with respect to the perpendicular to the side surface s6 of the element body 1 by the light projecting members I18b and I20b arranged on the inner wall surface of the I20c, Reflected light from the side surface s6 of the element body 1 is introduced into the lens barrel I14 and the camera I12 via the right-angle prism I16b, and the side surface s6 of the element body 1 is imaged.

  In this way, the side surface s6 of the element body 1 is illuminated from the direction along the perpendicular of the side surface s6 of the element body 1, so that scratches, irregularities, chips, etc. on the side surface s6 of the element body 1 can be clearly projected. . Further, the side surface s6 of the element body 1 is illuminated from a direction exceeding 0 ° and approximately 90 ° with respect to the perpendicular to the side surface s6 of the element body 1, whereby the side surface s6 of the element body 1 has various directions (angles). The defects connected to the inside from the side surface s6 of the element body 1 such as cracks and chipping can be clearly projected.

[Configuration of good product collection unit and defective product collection unit]
Next, the configuration of the non-defective product recovery unit J10 and the defective product recovery unit K10 will be described with reference to FIG. The non-defective product recovery unit J10 is for recovering the element body 1 determined to be a non-defective product as a result of the visual inspection, and the defective product recovery unit K10 is determined to be a defective product as a result of the visual inspection. This is for collecting the element body 1. The good product recovery unit J10 and the defective product recovery unit K10 have ionizers J12 and K12 and recovery boxes J14 and K14, respectively.

  The ionizer J12 (K12) is a device that blows a gas for ionizing the atmosphere and neutralizing charges generated on the surface of the transparent table T. The ionizer J12 (K12) is disposed above the periphery of the transparent table T. The nozzle of the ionizer J12 (K12) is directed toward the collection box J14 (K14), and is slightly inclined toward the surface of the transparent table T. Therefore, when ionized gas is blown out from the nozzle of the ionizer J12 (K12), the gas is directed from the surface of the transparent table to the recovery box J14 (K14).

  The collection box J14 (K14) includes a housing J14a (K14a), a chute J14b (K14b) and a buffer sheet J14c (K14c) provided inside the housing J14a (K14a). The casing J14a (K14a) is a hollow member having a rectangular parallelepiped shape, and is formed of a conductive resin material. The casing J14a (K14a) has an opening J14d (K14d) formed by cutting out one ridge of the casing J14a (K14a). The housing J14a (K14a) is disposed outward from the periphery of the transparent table T so that the opening J14d (K14d) faces the periphery of the transparent table T. Note that the casing J14a (K14a) is grounded (grounded) so that electric charges can be released to the outside of the casing J14a (K14a).

  The chute J14b (K14b) has a triangular prism shape and is formed of a conductive resin material. The chute J14b (K14b) is inclined so as to go downward as it approaches the transparent table T in the housing J14a (K14a). Therefore, the element body 1 blown off in the housing J14a (K14a) by the ionizer J12 (K12) is collected near the transparent table T in the housing J14a (K14a) by the chute J14b (K14b). At this time, since the element body 1 slides down the slope of the chute J14b (K14b), the impact generated in the element body 1 is reduced by blowing the element body 1 into the housing J14a (K14a). It has become.

  The buffer sheet J14c (K14c) is formed in a sheet shape from a conductive flexible material. The buffer sheet J14c (K14c) is attached to the top plate of the casing J14a (K14a) so that one main surface thereof faces the wall portion near the transparent table T in the casing J14a (K14a). Therefore, the element body 1 blown off into the casing J14a (K14a) by the ionizer J12 (K12) first collides with the buffer sheet J14c (K14c), slides down the slope of the chute J14b (K14b), and then the casing J14a ( Recovered in K14a).

[Configuration of control unit]
Next, the configuration of the control unit 12 will be described with reference to FIG. As shown in FIG. 2, the control unit 12 includes a servo motor connected to the transparent table T, a first linear feeder A14, a ball feeder A16, a second linear feeder A18, a laser emitter C18, a laser receiver C20, The first imaging unit D10, the second imaging unit E10, the third imaging unit F10, the fourth imaging unit G10, the fifth imaging unit H10, the sixth imaging unit I10, and the ionizers J12 and K12 are connected.

  The control unit 12 outputs a signal to the servo motor of the transparent table T, and controls the rotation and stop of the transparent table T. The control unit 12 outputs signals to the first linear feeder A14, the ball feeder A16, and the second linear feeder A18, and controls driving and stopping of the first linear feeder A14, the ball feeder A16, and the second linear feeder A18.

  The control unit 12 outputs a signal to the laser light emitter C18 and irradiates the laser light receiver C20 with the laser light L. The laser receiver C20 outputs a signal to the control unit 12 when receiving the laser light L from the laser emitter C18 (when the element body 1 does not pass through the second posture correcting unit C10). When the laser beam L from the laser emitter C18 is not received (when the laser beam L is irradiated to the element body 1 as the element body 1 passes through the second posture correcting unit C10), control is performed. The signal output to the unit 12 is stopped. Here, the control unit 12 determines that the element body 1 has passed through the second posture correction unit C10, triggered by the stop of the signal output from the laser receiver C20, and the element body 1 Calculates how much the transparent table T needs to be rotated to reach each of the imaging units D10, E10, F10, G10, H10, I10 and each of the recovery units J10, K10.

  When the control unit 12 determines that the element body 1 has reached each of the imaging units D10, E10, F10, G10, H10, and I10 based on the calculated rotation amount of the transparent table T, each of the illuminations D16, Output signals to E18, E20, F16, G18, G20, H18, H20, I18, and I20 for illumination with strobe light, and output signals to each camera D12, E12, F12, G12, H12, and I12 Then, the side surfaces s1 to s6 of the element body 1 are imaged. And the control part 12 performs an image process based on the picked-up image data of the side surface s1-s6 of the element | base_body 1 imaged by each camera D12, E12, F12, G12, H12, I12, and the damage | wound etc. The presence or absence of defects is inspected to determine whether the element body 1 is defective.

  When the control unit 12 determines that the element body 1 is a non-defective product and reaches the non-defective product recovery unit J10 based on the calculated rotation amount of the transparent table T and the appearance inspection result, the controller 12 outputs a signal to the ionizer J12. The ionized gas is injected into the ionizer J12. Thereby, the non-defective element body 1 is blown off into the recovery box J14 by the ionized gas from the ionizer J12 and recovered in the recovery box J14. On the other hand, if the control unit 12 determines that the element body 1 is a defective product and has reached the defective product collection unit K10 based on the calculated rotation amount of the transparent table T and the appearance inspection result, a signal is sent to the ionizer K12. Then, the ionized gas is injected into the ionizer K12. As a result, the defective body 1 is blown off into the recovery box K14 by the ionized gas from the ionizer K12 and recovered in the recovery box K14.

  In the present embodiment as described above, the element body 1 is arranged on the periphery of the transparent table T so that the side surface s3 of the element body 1 abuts on the transparent table T by the element body supply unit A10. The element body 1 is conveyed. Therefore, since the element body 1 can be visually recognized from any direction toward the six side surfaces s1 to s6 of the element body 1, each of the side surfaces s1 to s1 of the element body 1 by the imaging units D10, E10, F10, G10, H10, and I10. It is no longer necessary to change the element body 1 for imaging of s6. As a result, the appearance inspection of the element body 1 can be performed efficiently at high speed.

  By the way, in recent years, the element body 1 as an electronic component is required to be further downsized. However, as the element body 1 becomes smaller, the proportion of shadows caused by the irregularities on the surface of the element body 1 increases relatively, and it becomes difficult to identify the shadows caused by defects. However, in the present embodiment, the dome-shaped illuminations D16 and F16 included in the first imaging unit D10 and the third imaging unit F10 are concave curved surfaces that are recessed from the openings D16c and F16c toward the openings D16e and F16e. And a plurality of light projecting members D16b and F16b that irradiate light toward the openings D16c and F16c of the flange-shaped members D16a and F16a. In addition, a pair of semi-cylindrical illuminations E18, E20, G18, G20, H18, H20, I18, and I20 included in the second imaging unit E10, the fourth imaging unit G10, the fifth imaging unit H10, and the sixth imaging unit I10, respectively. And a semi-cylindrical member E18a, E20a, G18a, G20a, H18a, H20a, I18a, I20a of the base end E18e, E20e, G18e, G20e, H18e, H20e, I18e, I20e from the end E18f , E20f, G18f, G20f, H18f, H20f, I18f, I20f, half-cylindrical members E18a, E20a, G18a, G20a, H18a, H20a, I18a, I20a including a curved inner wall that is enlarged toward the side, Semi-cylindrical members E18a, E20a, G18a, G20 , H18a, H20a, I18a, I20a tips E18f, E20f, G18f, G20f, H18f, H20f, I18f, I20f, a plurality of light projecting members E18b, E20b, G18b, G20b, H18b, H20b, I18b, I20b, and semi-cylindrical members E18a, E20a, G18a, G20a, H18a, H20a, I18a, I20a tips E18f, E20f, G18f, G20f, H18f, H20f, I18f, I20f on the transparent table T. The element body 1 is disposed so as to face the side surfaces s1 to s6 and the inner wall surfaces thereof face each other. Therefore, the side surfaces s1 to s6 of the element body 1 are irradiated with light from the light projecting members D16b, E18b, E20b, F16b, G18b, G20b, H18b, H20b, I18b, and I20b from various directions (angles). Become. As a result, the influence of shading caused by the unevenness of the surface of the element body 1 is reduced, so that the appearance inspection of the element body 1 can be performed with extremely high accuracy.

  In the present embodiment, the first imaging unit D10, the second imaging unit E10, the third imaging unit F10, the first imaging unit D10, the rotation direction of the transparent table T (in the direction of arrow R), The four imaging units G10, the fifth imaging unit H10, and the sixth imaging unit I10 are arranged in this order. Therefore, unlike the conventional appearance inspection apparatus described in Patent Document 1, a pair of opposing side surfaces of the element body 1 on the transparent table T is not imaged at the same time. As a result, the influence of light interference is greatly suppressed, and the appearance inspection of the element body 1 can be performed with extremely high accuracy.

  In particular, since the fifth imaging unit H10 and the sixth imaging unit I10 are arranged side by side in the order of rotation of the transparent table T (arrow R direction), the semi-cylindrical illumination H18, H20 and semi-cylindrical illuminations I18, I20 are back to back. Therefore, even if the fifth imaging unit H10 and the sixth imaging unit I10 are arranged side by side, the light from the semi-cylindrical illumination in one of the fifth imaging unit H10 and the sixth imaging unit I10 is the other. It is difficult to enter the camera in the imaging unit.

  In addition, the fourth imaging unit G10 is disposed on the periphery of the transparent table T so as to be adjacent to the fifth imaging unit H10. Therefore, the light from the semi-cylindrical illuminations H18 and H20 is mainly directed in the tangential direction of the outer periphery of the transparent table T and is difficult to enter the camera G12, and the light from the semi-cylindrical illuminations G18 and G20 is mainly transparent table. It is difficult to enter the camera H12 in the radial direction of T.

  Further, on the side opposite to the fifth imaging unit H10 and the sixth imaging unit I10 with respect to the fourth imaging unit G10, the first imaging unit D10 and the third imaging unit F10 interpose the second imaging unit E10 and each other. The first imaging unit D10, the second imaging unit E10, and the third imaging unit F10 are arranged side by side along the periphery of the transparent table T so as to be adjacent to each other. Therefore, the illumination direction by the dome-shaped illumination or the semi-cylindrical illumination in one of the first imaging unit D10, the second imaging unit E10, the third imaging unit F10, and the fourth imaging unit G10, and the one imaging unit The illumination direction by the dome-shaped illumination or the semi-cylindrical illumination in the adjacent imaging units is spatially twisted. Therefore, the light from the dome-shaped illumination or the semi-cylindrical illumination in one of the first imaging unit D10, the second imaging unit E10, the third imaging unit F10, and the fourth imaging unit G10 is the one imaging unit. It is difficult to enter a camera in an adjacent imaging unit. As a result, it is possible to further eliminate light interference between the imaging units.

  Here, since the refractive index in the atmosphere of the appearance inspection apparatus 10 and the refractive index in the transparent table T are generally different, the light that passes through the inside of the transparent table T and reaches the element body 1 is generated by the appearance inspection apparatus 10. Refraction occurs at the interface between the atmosphere and the transparent table T. Therefore, the illumination conditions between the light that passes through the transparent table T and reaches the element body 1 and the light that does not pass through the transparent table T and directly reaches the element body 1 may be different. . However, in the present embodiment, the second imaging unit E10, the fourth imaging unit G10, the fifth imaging unit H10, and the sixth imaging unit I10 each have a pair of semi-cylindrical illuminations E18, E20, G18, G20, H18, H20. , I18, I20, and each pair of semi-cylindrical illuminations E18, E20, G18, G20, H18, H20, I18, I20, the inner wall faces each other and the transparent table T along the central axis A Or it arrange | positions so that the virtual plane V containing the surface of the transparent table T may be put in between. Therefore, the pair of semi-cylindrical illuminations E18, E20, G18, G20, H18, H20, I18, and I20 are adjusted while adjusting the angle, position, etc. of one or both of the pair of semi-cylindrical illuminations E18, E20, G18, G20. , H18, H20, I18, and I20 can make the illumination conditions of the element body 1 close to uniform while suppressing the influence of light interference.

  In addition, here, the second imaging unit E10 images the side surface s2 of the element body 1 from the outside in the radial direction of the transparent table T, and the element body 1 in which the tips of the semi-cylindrical members E18a and E20a are located on the transparent table T. Since the pair of semi-cylindrical illuminations E18 and E20 are arranged so as to face the side surface s2, the pair of semi-cylindrical illuminations E18 and E20 are located outward in the radial direction of the transparent table T. Become. In the present embodiment, the pair of semi-cylindrical lights E18 and E20 are arranged so as to place a virtual plain V including the surface of the transparent table T along the central axis A of the transparent table T. Therefore, when removing the transparent table T and maintaining the appearance inspection apparatus 10, the transparent table T can be passed between the pair of semi-cylindrical lights E18 and E20. Therefore, maintenance of the appearance inspection apparatus 10 can be easily performed.

  In the present embodiment, the non-defective product collecting unit J10 and the defective product collecting unit K10 have taken the images of the side surfaces s1 to s6 by the imaging units D10, E10, F10, G10, H10, and I10. The ionized gas is sprayed onto 1 to remove the element 1 from the transparent table T and collect it in the recovery boxes J14 and K14. Here, when non-ionized gas is sprayed on the transparent table T, friction may be generated between the sprayed gas and the surface of the transparent table T, and the surface of the transparent table T may be charged. In this way, when the surface of the transparent table T is charged, foreign matters such as dust in the atmosphere of the appearance inspection apparatus 10 and fragments of the element body 1 adhere to the surface of the transparent table T, and the transparent table T is contaminated. There is a concern that the element body 1 itself adheres to the surface of the transparent table T, making it difficult to remove the element body 1 from the transparent table T. However, in the present embodiment, since ionized gas is blown against the element body 1, the surface charge of the transparent table T can be removed (static elimination), and the foreign object or the element body 1 can be transferred to the transparent table T. Can be suppressed, and charging of the surface of the transparent table T itself can be prevented.

  Although the preferred embodiments of the present invention have been described in detail above, the present invention is not limited to the above-described embodiments. For example, in the present embodiment, the appearance of the element body 1 is inspected by the appearance inspection apparatus 10, but the present invention is also applied to various electronic components that are completed by further providing electrodes on the outer surface of the element body 1. be able to.

  Further, in the present embodiment, the side surface s3 of the element body 1 abuts on the surface of the transparent table T and the side surface s4 of the element body 1 faces the central axis A side of the transparent table T (the width direction of the element body 1 is The element body 1 was supplied to the transparent table T so that the element body 1 was along the radial direction of the transparent table T and the height direction of the element body 1 was along the perpendicular of the surface of the transparent table T). The orientation of the element body 1 may be other than this. For example, the side surface s3 of the element body 1 abuts on the surface of the transparent table T, and the side surface s6 of the element body 1 faces the central axis A side of the transparent table T (the width direction of the element body 1 is the radial direction of the transparent table T). And the length direction of the element body 1 may be along the perpendicular of the surface of the transparent table T), and the side surface s4 of the element body 1 abuts on the surface of the transparent table T and the side surface s1 of the element body 1 is transparent. It may be directed toward the center axis A of the table T (the height direction of the element body 1 is along the radial direction of the transparent table T and the width direction of the element body 1 is along the perpendicular of the surface of the transparent table T), The side surface s4 of the element body 1 abuts on the surface of the transparent table T, and the side surface s6 of the element body 1 faces the central axis A side of the transparent table T (the length direction of the element body 1 is the radial direction of the transparent table T). And the width direction of the element body 1 is along the perpendicular of the surface of the transparent table T. The side surface s6 of the element body 1 abuts on the surface of the transparent table T, and the side surface s1 of the element body 1 faces the central axis A side of the transparent table T (the height direction of the element body 1 is the transparent table T). And the length direction of the element body 1 may be along the perpendicular of the surface of the transparent table T), and the side surface s6 of the element body 1 abuts on the surface of the transparent table T and the side surface of the element body 1 s4 faces the central axis A side of the transparent table T (the width direction of the element body 1 is along the radial direction of the transparent table T, and the length direction of the element body 1 is along the perpendicular of the surface of the transparent table T). Also good.

  In the present embodiment, the first imaging unit D10, the second imaging unit E10, the third imaging unit F10, and the fourth imaging unit are arranged in the vicinity of the periphery of the transparent table T along the rotation direction (arrow R direction) of the transparent table T. The imaging unit G10, the fifth imaging unit H10, and the sixth imaging unit I10 are arranged in this order. However, as shown in FIG. 14, the rotation direction of the transparent table T (the direction of the arrow R) is near the periphery of the transparent table T. ), The fifth imaging unit H10, the sixth imaging unit I10, the fourth imaging unit G10, the first imaging unit D10, the second imaging unit E10, and the third imaging unit F10 may be arranged in this order. As shown in FIG. 1 and FIG. 14, the fifth imaging unit H <b> 10 and the sixth imaging unit I <b> 10 are arranged side by side in the order of the rotation direction of the transparent table T on the periphery of the transparent table T, The fourth imaging unit G10 is arranged on the periphery of the transparent table T so as to be adjacent to the fifth imaging unit H10 or the sixth imaging unit I10, and the first imaging unit D10, the second imaging unit E10, and the third imaging unit. On the side opposite to the fifth imaging unit H10 and the sixth imaging unit I10 with respect to the fourth imaging unit G10, the first imaging unit D10 and the third imaging unit F10 sandwich the second imaging unit E10 between the unit F10 and the fourth imaging unit G10. If the transparent table T is arranged next to each other so as to be adjacent to each other, light is dried between the imaging units. It is preferred since it is possible to further eliminate. However, the imaging units D10, E10, F10, G10, H10, and I10 may be arranged side by side along the periphery of the transparent table T so that they are at different positions.

  Further, in addition to eliminating light interference between the imaging units by the shape of the dome-shaped illuminations D16, F16 and the semi-cylindrical illuminations E18, E20, G18, G20, H18, H20, I18, I20, the adjacent imaging units A light-shielding plate or the like may be disposed between them to further eliminate light interference.

  In this embodiment, the dome-shaped illuminations D16 and F16 and the semi-cylindrical illuminations E18, E20, G18, G20, H18, H20, I18, and I20 all have a flat base, but the base is flat. It does not have to be in the shape.

  In addition, an adjustment mechanism for adjusting the positions and angles of the dome-shaped illuminations D16 and F16 and the semi-cylindrical illuminations E18, E20, G18, G20, H18, H20, I18, and I20 is provided so that the size of the element body 1 is increased. In addition, the position and angle may be changed. In particular, by adjusting the position and angle of the semi-cylindrical illuminations E18, E20, G18, G20, H18, H20, I18, and I20 by the adjusting mechanism, it occurs at the boundary surface between the atmosphere of the appearance inspection apparatus 10 and the transparent table T. It is possible to reduce the influence of light refraction.

  The surface of the transparent table T may be covered with a transparent conductive film. In this case, the charge easily moves in the conductive film, so that it is possible to suppress the charging of the surface on which the element body 1 is placed. In addition, it is preferable to ground (ground) the transparent conductive film that covers the surface of the transparent table T because the charge can be released to the outside.

  Moreover, in this embodiment, when imaging each side surface s1-s6 of the element | base_body 1, the control part 12 uses strobe light with respect to each illumination D16, E18, E20, F16, G18, G20, H18, H20, I18, I20. Although illumination is performed, each illumination D16, E18, E20, F16, G18, G20, H18, H20, I18, and I20 may be constantly lit. However, since a larger amount of light can be instantaneously obtained by using the strobe light, each side surface s1 to s6 of the element body 1 can be illuminated uniformly.

FIG. 1 is a top view showing the entire appearance inspection apparatus according to the present embodiment. FIG. 2 is a block diagram showing an appearance inspection apparatus according to the present embodiment. FIG. 3 is a perspective view showing the element supply unit. FIG. 4 is a perspective view showing the first posture correction unit. FIG. 5 is a perspective view showing the second posture correction unit. FIG. 6 is a diagram showing the first imaging unit in a partially broken view. FIG. 7 is a diagram illustrating a partially broken second imaging unit. FIG. 8 is a partially broken view showing the third imaging unit. FIG. 9 is a diagram illustrating a partially broken fourth imaging unit. FIG. 10 is a diagram showing the fifth imaging unit in a partially broken view. FIG. 11 is a partially broken view of the sixth imaging unit. FIG. 12 is a diagram showing a non-defective product collection box or a defective product collection box partially broken. FIG. 13 is a perspective view showing an element body that is an inspection object of the appearance inspection apparatus according to the present embodiment. FIG. 14 is a top view showing the whole of another example of the appearance inspection apparatus according to the present embodiment.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 1 ... Element (inspection object), 10 ... Appearance inspection apparatus, 12 ... Control part, s1 ... Side surface (1st side surface), s2 ... Side surface (2nd side surface), s3 ... Side surface (3rd side surface), s4 ... Side surface (fourth side surface), s5 ... side surface (fifth side surface), s6 ... side surface (sixth side surface), A ... central axis, A10 ... element body supply unit (placement means), D10 ... first imaging unit (first Imaging means), D12 ... camera (first imaging unit), D16 ... dome-shaped illumination (first illumination unit), D16a ... bowl-shaped member (first holding member), D16b ... projecting member (first projecting member) , D16c ... opening (one opening), D16e ... opening (the other opening), E10 ... second imaging unit (second imaging means), E12 ... transparent table T camera (second imaging unit), E18, E20 ... half Cylindrical illumination (second illumination part), E18a, E20a ... Semi-cylindrical member (second holding member) E18b, E20b ... light projecting member (second light projecting member), F10 ... third imaging unit (third imaging means), F12 ... camera (third imaging unit), F18 ... dome-shaped illumination (third illumination unit), F18a: bowl-shaped member (third holding member), F18b: light projecting member (third light projecting member), F18c: opening (one opening), F18e ... opening (other opening), G10: fourth imaging unit ( (Fourth imaging means), G12 ... camera (fourth imaging unit), G18, G20 ... semi-cylindrical illumination (fourth illumination unit), G18a, G20a ... semi-cylindrical member (fourth holding member), G18b, G20b ... Light projecting member (fourth light projecting member), H10 ... fifth imaging unit (fifth imaging means), H12 ... camera (fifth imaging unit), H18, H20 ... semi-cylindrical illumination (fifth illumination unit), H18a , H20a ... Semi-cylindrical member (fifth holding member), H18b H20b: Projecting member (fifth projecting member), I10: Sixth imaging unit (sixth imaging means), I12: Camera (sixth imaging unit), I18, I20: Semi-cylindrical illumination (sixth illumination unit) , I18a, I20a ... semi-cylindrical member (sixth holding member), I18b, I20b ... light projecting member (sixth light projecting member), J10 ... non-defective product recovery unit (removing means), K10 ... defective product recovery unit (removing means) ), T ... Transparent table.

Claims (3)

A first side surface, a second side surface, a third side surface, a fourth side surface, a fifth side surface, and a sixth side surface; the first side surface and the third side surface connect the second side surface and the fourth side surface; And the fifth side surface and the sixth side surface are connected to and opposed to each other, and the second side surface and the fourth side surface connect the first side surface and the third side surface and the fifth side surface. The side surface and the sixth side surface are connected and opposed to each other, and the fifth side surface and the sixth side surface connect the first side surface and the third side surface and the second side surface and the fourth side surface. An appearance inspection apparatus for performing an appearance inspection of an inspection object having a substantially rectangular parallelepiped shape, which connects the side surfaces and faces each other,
One substantially circular transparent table that can rotate in a certain direction around its own central axis;
Arrangement means for arranging the inspection object at a peripheral edge portion of the surface of the transparent table so that the third side surface abuts on the transparent table and the fourth side surface faces the central axis.
First imaging means for imaging the first side surface from above the transparent table;
Second imaging means for imaging the second side surface from the outside in the radial direction of the transparent table;
Third imaging means for imaging the third side surface through the transparent table;
A fourth imaging means for imaging the fourth side surface from the inside in the radial direction of the transparent table;
Fifth imaging means for imaging the fifth side surface from the front side in the rotation direction of the transparent table;
A sixth imaging means for imaging the sixth side surface from the rear side in the rotation direction of the transparent table;
The first imaging means includes
A first imaging unit for imaging the first side surface;
A first illumination unit that performs illumination of the first side surface,
The first illumination unit includes:
A pair of openings is provided, and a first curved surface that is recessed from one of the pair of openings toward the other opening and includes an inner wall surface that surrounds the imaging axis of the first imaging unit. 1 holding member;
A plurality of first light projecting members that are held on the inner wall surface of the first holding member so as to surround the imaging axis of the first imaging unit and irradiate light toward the one opening side of the first holding member; Including
The first side surface of the inspection object that is closer to the inspection object positioned on the transparent table than the first imaging unit and in which the one opening of the first holding member is positioned on the transparent table Arranged to head toward
The second imaging means includes
A second imaging unit for imaging the second side surface;
A pair of second illumination units that perform illumination of the second side surface,
The pair of second illumination units includes:
A second holding member that has a semi-cylindrical shape and includes a curved inner wall surface that is enlarged in diameter from the proximal end side toward the distal end side;
A plurality of second light projecting members that are held on the inner wall surface of the second holding member and irradiate light toward the tip side of the second holding member;
The second imaging member is disposed closer to the inspection object positioned on the transparent table than the second imaging unit, and the tip of the second holding member is the second of the inspection object positioned on the transparent table. Facing the side surface, the inner wall faces each other, and arranged so as to interpose a virtual plane including the surface of the transparent table along the central axis,
The third imaging means includes
A third imaging unit for imaging the third side surface;
A third illumination unit for illuminating the third side surface,
The third illumination unit includes
A pair of openings is provided, and a first curved surface that is recessed from one of the pair of openings toward the other opening and includes an inner wall surface that surrounds the imaging axis of the third imaging unit. 3 holding members;
A plurality of third light projecting members that are held on an inner wall surface of the third holding member so as to surround an imaging axis of the third imaging unit and irradiate light toward the one opening side of the third holding member; Including
The third side surface of the inspection object that is closer to the inspection object positioned on the transparent table than the third imaging unit and in which the one opening of the third holding member is positioned on the transparent table Arranged to head toward
The fourth imaging means includes
A fourth imaging unit for imaging the fourth side surface;
A pair of fourth illumination units for performing illumination of the fourth side surface,
The pair of fourth illumination units includes:
A fourth holding member that has a semi-cylindrical shape and includes a curved inner wall surface that is enlarged in diameter from the proximal end side toward the distal end side;
A plurality of fourth light projecting members that are held on the inner wall surface of the fourth holding member and irradiate light toward the front end side of the fourth holding member;
The fourth imaging unit is arranged closer to the inspection object positioned on the transparent table than the fourth imaging unit, and the tip of the fourth holding member is positioned on the transparent table. Facing the side, the inner wall faces each other and arranged so that the transparent table is placed along the central axis,
The fifth imaging means includes
A fifth imaging unit for imaging the fifth side;
A pair of fifth illumination units for illuminating the fifth side surface,
The pair of fifth illumination units includes:
A fifth holding member that has a semi-cylindrical shape and includes a curved inner wall surface that is enlarged in diameter from the proximal end side toward the distal end side;
A plurality of fifth light projecting members that are held on the inner wall surface of the fifth holding member and irradiate light toward the tip side of the fifth holding member;
The fifth imaging unit is arranged closer to the inspection object positioned on the transparent table than the fifth imaging unit, and the fifth holding member has the tip of the fifth holding member positioned on the transparent table. Facing the side, the inner wall faces each other and arranged so that the transparent table is placed along the central axis,
The sixth imaging means includes
A sixth imaging unit for imaging the sixth side;
A pair of sixth illumination units for performing illumination of the sixth side surface,
The pair of sixth illumination units includes:
A sixth holding member that has a semi-cylindrical shape and includes a curved inner wall surface that is enlarged in diameter from the proximal end side toward the distal end side;
A plurality of sixth light projecting members that are held on the inner wall surface of the sixth holding member and irradiate light toward the tip side of the sixth holding member,
The sixth imaging unit is arranged closer to the inspection object positioned on the transparent table than the sixth imaging unit, and the tip of the sixth holding member is the sixth of the inspection object positioned on the transparent table. Facing the side, the inner wall faces each other and arranged so that the transparent table is placed along the central axis,
The transparent table so that the first imaging means, the second imaging means, the third imaging means, the fourth imaging means, the fifth imaging means, and the sixth imaging means are at different positions. An appearance inspection apparatus characterized by being arranged side by side along the periphery of the. On the periphery of the transparent table, the fifth imaging unit and the sixth imaging unit are arranged side by side in the order of the rotation direction of the transparent table,
The fourth imaging means is arranged on the periphery of the transparent table so as to be adjacent to the fifth imaging means or the sixth imaging means,
The first imaging unit, the second imaging unit, and the third imaging unit are located on the opposite side of the fourth imaging unit from the fifth imaging unit and the sixth imaging unit, and 2. The appearance inspection apparatus according to claim 1, wherein the third imaging unit is arranged side by side along the periphery of the transparent table so as to be adjacent to each other with the second imaging unit interposed therebetween. . The first side surface, the second side surface, and the third side surface by the first imaging unit, the second imaging unit, the third imaging unit, the fourth imaging unit, the fifth imaging unit, and the sixth imaging unit. Removal means for removing the inspection object from the transparent table by blowing ionized gas onto the inspection object after the fourth side surface, the fifth side surface, and the sixth side surface are imaged. The visual inspection apparatus according to claim 1, further comprising:

Images