JP4868017B2 - Appearance inspection device - Google Patents

Description

  The present invention relates to an appearance inspection apparatus.

  2. Description of the Related Art As a conventional appearance inspection apparatus, an apparatus that inspects an appearance by irradiating an electronic part with light by a light projecting mechanism and taking an image with a 1 CCD camera is known (see, for example, Patent Document 1). . In this appearance inspection apparatus, the light projecting mechanism includes a plurality of light emitting diodes that emit red light, a plurality of light emitting diodes that emit green light, and a plurality of light emitting diodes that emit blue light so as to surround the imaging axis. .

JP 2007-064801 A

  However, when the light projecting mechanism as described above is used to inspect all surfaces of the electronic component that is the inspection object by irradiating light of different colors, for example, a chip capacitor or a chip inductor is used. When the appearance inspection of the electronic component whose end face is covered with the external electrode is performed, there is a problem that the defect of the face whose entire face is covered with the external electrode cannot be detected well.

  The present invention has been made to solve such problems, and an object of the present invention is to provide an appearance inspection apparatus capable of accurately inspecting all surfaces of an electronic component that is an inspection object.

  Here, as a result of intensive studies, the present inventors have found that the surface whose entire surface is covered with the external electrode is preferably inspected by irradiating white light with a white light emitting element for the following reason. It was.

  That is, the purpose of the defect inspection of the surface covered with the external electrode is to detect a defect on the surface of the thin metal film, so that illuminating the surface uniformly and uniformly leads to improvement of inspection accuracy. In the inspection of the chip body surface with RGB three-color illumination consisting of red light emitting element, green light emitting element and blue light emitting element, blue light is effective for detecting defects on the surface, and it is also basic for detecting defects on the surface of the external electrode In general, blue light is considered to work effectively, but blue light with a short wavelength (in the visible light region) has relatively high directivity. If it comprises, it will become easy to generate | occur | produce uneven illumination. In particular, illuminance unevenness occurs even more in the external electrode region on the metal surface with high reflection efficiency. On the other hand, in the white light emitting element, a part of blue light emitted from the light emitting diode chip is transmitted through the phosphor layer, and the rest hits the phosphor to become yellow light, and the two colors of light are mixed. It produces white light (for human vision). The light of the white light emitting element is also blue light, but the directivity of the LED light is weakened by passing through the phosphor layer and becomes a wide angle, so the uneven illuminance depending on the directivity is suppressed, and the external electrode is made uniform As a result, the surface defect detection accuracy is improved. On the other hand, in RGB three-color illumination, the most effective blue light emitting element is provided only in a specific angle region, and the original high directivity remains. It has been found that the defect detection accuracy is lower than when a white light emitting element is used. On the other hand, the external electrode region in the portion that protrudes to the outer surface side of the element body has a relatively flat shape as compared with the portion that is entirely covered with the external electrode, so that the blue light emitting element LE3 in RGB three-color illumination is sufficient. It has also been found that accurate defect detection can be performed.

  Accordingly, the appearance inspection apparatus according to the present invention is configured by covering the mutually opposing surfaces of a substantially rectangular parallelepiped element body with external electrodes, respectively, and includes a first side surface, a second side surface, a third side surface, a fourth side surface, The first side surface and the third side surface connect the second side surface and the fourth side surface, connect the fifth side surface and the sixth side surface, and face each other. The second side surface and the fourth side surface connect the first side surface and the third side surface and connect the fifth side surface and the sixth side surface and face each other. The fifth side surface and the sixth side surface are opposite to each other. An appearance inspection apparatus for performing an appearance inspection of inspection objects that are outer surfaces, connect the first side surface and the third side surface, connect the second side surface and the fourth side surface, and face each other. Inspection object holding means for holding an object, a first side surface, a second side surface, a third side surface, and A first imaging unit that images at least one side surface of the fourth side surface; and a second imaging unit that images at least one side surface of the fifth side surface and the sixth side surface. A first imaging unit that performs imaging of a target side surface and a first illumination unit that performs illumination of an imaging target surface of the first imaging unit, and the first illumination unit includes a pair of openings. A concave curved surface that is recessed from one opening to the other opening of the pair of openings, and includes an inner wall surface that surrounds the imaging axis of the first imaging unit, the inner wall surface of the first imaging unit One of the first holding members is held on the inner wall surface of the first holding member so as to surround the imaging axis of the first imaging unit and the first holding member that is divided or integrally formed around the imaging axis. A first light projecting member that irradiates light toward the opening side of the first imaging unit. While being closer to the inspection object located on the inspection object holding means, one opening of the first holding member is directed toward the imaging object surface of the first imaging unit in the inspection object located on the inspection object holding means. The second imaging means includes a second imaging unit that performs imaging of one side surface that is an imaging target, and a second illumination unit that performs illumination of the imaging target surface of the second imaging unit. The illuminating unit is provided with a pair of openings, and has an inner wall surface surrounding the imaging axis of the second imaging unit and having a concave curved surface that is recessed from one of the pair of openings toward the other opening. The inner wall surface is divided around the imaging axis of the second imaging unit, or is integrated with the second holding member and the second holding member so as to surround the imaging axis of the second imaging unit. Light is emitted toward one opening side of the second holding member held on the wall surface A second light projecting member that is closer to the inspection object positioned on the inspection object holding means than the second imaging unit, and one opening of the second holding member is positioned on the inspection object holding means The first imaging unit and the second imaging unit spectrally divide incident light and image each color, and the first light projecting member is arranged so as to face the imaging target surface of the second imaging unit in the inspection target. It is composed of a red light emitting element, a green light emitting element, and a blue light emitting element, and the second light projecting member is composed of a white light emitting element.

  In this appearance inspection apparatus, the first side surface, the second side surface, the third side surface, the first side surface, and the third side surface of the electronic component constituted by a part of the outer surface of the outer electrode and the outer surface of the external electrode protruding from the fifth and sixth side surfaces. The first light projecting member of the first imaging means that images each of the four side surfaces includes a red light emitting element, a green light emitting element, and a blue light emitting element. Moreover, the 2nd light projection member of the 2nd imaging means which each images the 5th side surface and 6th side surface of the electronic component comprised from the outer surface of an external electrode is comprised from the white light emitting element. By adopting such a configuration, it is possible to inspect with the RGB three-color illumination for the first to fourth side surfaces that are preferably inspected with the RGB three-color illumination, and inspect by irradiating the white light emitting element. It is possible to inspect the fifth and sixth side surfaces that are preferably performed by irradiating with a white light emitting element. As a result, all six surfaces of the electronic component can be accurately inspected. In particular, the defect detection accuracy of the fifth and sixth side surfaces covered with the external electrodes can be improved as compared with the case where all six surfaces are inspected with RGB three-color illumination.

  In the appearance inspection apparatus according to the present invention, a plurality of first light projecting members are arranged on one opening side of the first holding member so that the red light emitting elements surround the imaging axis of the first imaging unit. A plurality of blue light emitting elements are disposed on the other opening side of the holding member so as to surround the imaging axis of the first imaging unit, and the green light emitting elements are between the plurality of red light emitting elements and the plurality of blue light emitting elements. It is preferable that a plurality of images are arranged so as to surround the imaging axis of the imaging unit. According to this, about the 1st light projection member, it is blue light, green light, red light with respect to the 1st-4th side surface of the electronic component which consists of the outer surface of an element | base_body, and the outer surface of an external electrode. It becomes the structure which can illuminate from a big angle in this order. As a result, for example, chip capacitors and ceramic inductors where the element body is made of a dielectric and the contrast difference between the outer surface of the element body and the outer surface of the external electrode is reduced. Can be improved.

  In the appearance inspection apparatus according to the present invention, a plurality of first light projecting members are arranged on one opening side of the first holding member so that the blue light emitting element surrounds the imaging axis of the first imaging unit. A plurality of red light emitting elements are disposed on the other opening side of the holding member so as to surround the imaging axis of the first imaging unit, and the green light emitting elements are between the plurality of red light emitting elements and the plurality of blue light emitting elements. It is preferable that a plurality of images are arranged so as to surround the imaging axis of the imaging unit. According to this, about the 1st light projection member, red light, green light, and blue light with respect to the 1st-4th side surface of the electronic component which consists of the outer surface of an element | base_body, and the outer surface of an external electrode It becomes the structure which can illuminate from a big angle in this order. As a result, for example, for a ferrite inductor in which the element body is made of ferrite and the contrast difference between the outer surface of the element body and the outer surface of the external electrode is large, a suitable illumination angle is obtained, and inspection accuracy can be improved. it can.

  ADVANTAGE OF THE INVENTION According to this invention, all the surfaces of the electronic component which is a test object can be test | inspected accurately.

FIG. 1 is a top view showing the entire appearance inspection apparatus according to the present embodiment. FIG. 2 is a block diagram showing an appearance inspection apparatus according to the present embodiment. FIG. 3 is a perspective view showing the element supply unit. FIG. 4 is a perspective view showing the first posture correction unit. FIG. 5 is a perspective view showing the second posture correction unit. FIG. 6 is a diagram showing the first imaging unit in a partially broken view. FIG. 7 is a view of the dome-shaped illumination of the first imaging unit as viewed from below. FIG. 8 is a diagram illustrating a partially broken second imaging unit. FIG. 9 is a diagram showing the third imaging unit in a partially broken view. FIG. 10 is a diagram showing the fourth imaging unit in a partially broken view. FIG. 11 is a partially broken view showing the fifth imaging unit. FIG. 12 is a diagram showing the sixth imaging unit in a partially broken view. FIG. 13 is a diagram showing a non-defective product collection box or a defective product collection box partially broken. FIG. 14 is a perspective view showing an electronic component that is an inspection object of the appearance inspection apparatus according to the present embodiment. FIG. 15 is a diagram illustrating an example in which the outer surface of the element body is observed by the appearance inspection apparatus according to the present embodiment. FIG. 16 is a diagram showing an example in which the outer surface of only the external electrode is observed by the appearance inspection apparatus according to the present embodiment. FIG. 17 is a top view showing the whole of another example of the appearance inspection apparatus according to the present embodiment.

  A preferred embodiment of an appearance inspection apparatus 10 according to the present invention will be described with reference to the drawings. The appearance inspection apparatus 10 detects the presence or absence of defects on the surface of the electronic component 1 such as a chip capacitor or a chip inductor. In the description, the same reference numerals are used for the same elements or elements having the same function, and a duplicate description is omitted.

[Element structure]
First, the electronic component (inspection object) 1 will be described with reference to FIG. As the electronic component 1, various electronic components such as a substantially rectangular parallelepiped capacitor, a ceramic inductor, and a ferrite inductor are applied. The electronic component 1 is configured by forming external electrodes 3 and 4 so as to cover a pair of side surfaces facing each other in the longitudinal direction in the substantially rectangular parallelepiped element body 2. The element body 2 is formed by laminating and pressing a plurality of ceramic green sheets or the like on which an electrode pattern serving as an internal electrode of a capacitor or a conductor pattern serving as an internal conductor for functioning as an inductor is formed and firing at a predetermined temperature for a predetermined time. Then, it is constituted by barrel polishing.

  The external electrode 3 is formed so as to cover one end surface in the longitudinal direction of the element body 2 and to cover a part of the end of the side surface adjacent to the one end surface. The external electrode 4 is formed so as to cover the other end surface in the longitudinal direction of the element body 2 and to cover a part of the end of the side surface adjacent to the other end surface. The external electrodes 3 and 4 are formed by transferring an electrode paste containing Cu or the like as a main component to the element body 2, baking it at a predetermined temperature, and further performing electroplating such as Ni / Su.

  The electronic component 1 has a substantially rectangular parallelepiped shape. The electronic component 1 includes a pair of side surfaces s1 (first side surface) and s3 (third side surface) facing the X-axis direction (hereinafter referred to as “height direction”) and a Y-axis direction (hereinafter referred to as “width direction”). ) Facing a pair of side surfaces s2 (second side surface), s4 (fourth side surface) and a pair of side surfaces s5 (fifth side surface), s6 ( 6th side). Therefore, the side surfaces s1, s2 and the side surfaces s3, s4 are positioned adjacent to each other, the side surfaces s1, s2, and the side surfaces s5, s6 are positioned adjacent to each other, and the side surfaces s3, s4 and the side surfaces s5, It is located adjacent to s6. The side surfaces s1 and s2 connect the side surface s3 and the side surface s4 and connect the side surface s5 and the side surface s6, and the side surfaces s3 and s4 connect the side surface s1 and the side surface s2 and connect the side surface s5 and the side surface s6. The side surfaces s5 and s6 connect the side surface s1 and the side surface s2 and connect the side surface s3 and the side surface s4. The side surface s1, the side surface s2, the side surface s3, and the side surface s4 are configured from the outer surface of the element body 2 and the outer surface of the protruding portion of the external electrodes 3 and 4, and the side surface s5 is configured only from the outer surface of the external electrode 3. Is composed only of the outer surface of the external electrode 4.

  Here, it is preferable to set the size of the element body 2 so that the element body 2 has a size called 0402 or 0603 when the element body 2 becomes an electronic component. The height of the element body 2 is, for example, 0.2 mm. The width of the element body 2 can be set to, for example, about 0.2 mm to 0.5 mm, and the length of the element body 2 can be set to, for example, about 0.4 mm to 1 mm. Can be set to Note that the ridges of the element body 2 are chamfered by a barrel polishing step when forming the element body 2 and are rounded.

[Configuration of visual inspection equipment]
Next, the configuration of the appearance inspection apparatus 10 will be described with reference to FIGS. 1 and 2. As shown in FIGS. 1 and 2, the appearance inspection apparatus 10 includes a transparent table (inspection object holding means) T, an element supply unit A10, a first posture correction unit B10, and a second posture correction unit C10. A first imaging unit D10 (first imaging means), a second imaging unit E10 (first imaging means), a third imaging unit F10 (first imaging means), and a fourth imaging unit G10 (first imaging means). Means), a fifth imaging unit H10 (second imaging means), a sixth imaging unit I10 (second imaging means), a non-defective product recovery unit J10, a defective product recovery unit K10, and a control unit 12.

  The transparent table T is made of, for example, glass or synthetic resin. As shown in FIG. 1, the transparent table T has a substantially circular shape when viewed from above, and the diameter thereof can be set to, for example, about 40 cm to 50 cm.

  On the lower surface side of the transparent table T, for example, a servo motor (not shown) is disposed. The transparent table T is driven by this servo motor and rotates (spins) in the direction of arrow R in FIG.

  In the vicinity of the periphery of the transparent table T, along the rotation direction (arrow R direction) of the transparent table T, the element supply unit A10, the first posture correcting unit B10, the second posture correcting unit C10, the first imaging unit D10, The second imaging unit E10, the third imaging unit F10, the fourth imaging unit G10, the fifth imaging unit H10, the sixth imaging unit I10, the non-defective product recovery unit J10, and the defective product recovery unit K10 are arranged in this order (FIG. 1). reference).

[Configuration of element supply unit]
Next, the configuration of the element body supply unit A10 will be described with reference to FIG. The element supply unit A10 includes a hopper A12, a first linear feeder A14, a ball feeder A16, and a second linear feeder A18.

  The hopper A12 has a funnel shape and stores a predetermined amount of the electronic component 1. The bottom of the hopper A12 can be opened and closed. When the bottom is opened, the stored electronic component 1 is supplied to the first linear feeder A14. The hopper A12 is supplied with a large number of electronic components 1 by hand.

  The first linear feeder A14 includes a chute A14a and a drive unit A14b. The chute A14a has a U-shaped or V-shaped groove extending in the longitudinal direction, and the electronic component 1 is conveyed toward the ball feeder A16 by guiding the electronic component 1 along the groove. . The drive unit A14b is an electromagnetic type having an electromagnet and a leaf spring (not shown), and vibrates by itself when the vibration of the electromagnet is amplified by the leaf spring. The drive unit A14b vibrates itself to vibrate the chute A14a and pushes the electronic component 1 supplied from the hopper A12 along the groove formed in the chute A14a to the ball feeder A16.

  The ball feeder A16 includes a ball A16a and a drive unit A16b, and is a so-called rotary feeder. The ball A16a has a mortar-shaped inclined surface whose diameter decreases as the side surface in the circumferential direction of the ball moves downward, and a spiral groove is formed on the side surface in the circumferential direction. The drive unit A16b is an electromagnetic type having an electromagnet and a leaf spring (not shown), and vibrates by itself when the vibration of the electromagnet is amplified by the leaf spring. The drive unit A16b vibrates the ball A16a by vibrating itself and aligns the posture of the electronic component 1 while gradually raising the electronic component 1 along the spiral groove formed in the ball A16a. Is pushed out to the second linear feeder A18.

  The second linear feeder A18 includes a chute A18a and a drive unit A18b. The chute A18a has a U-shaped or V-shaped groove extending in the longitudinal direction, and the electronic component 1 is conveyed toward the transparent table T by guiding the electronic component 1 along the groove. . The chute A18a extends along the tangential direction of the outer periphery of the transparent table T, and the tip thereof is located on the surface of the transparent table T. The drive unit A18b is an electromagnetic type having an electromagnet and a leaf spring (not shown), and vibrates by itself when the vibration of the electromagnet is amplified by the leaf spring. The drive unit A18b vibrates itself to vibrate the chute A18a and pushes the electronic component 1 supplied from the ball feeder A16 along the groove formed in the chute A18a onto the transparent table T. Thereby, the electronic component 1 will be supplied to the peripheral part in the surface of the transparent table T. FIG. In the present embodiment, the second electronic component 1 is placed so that the side surface s3 of the electronic component 1 contacts the surface of the transparent table T and the side surface s4 of the electronic component 1 faces the central axis A side of the transparent table T. It is supplied to the transparent table T by the linear feeder A18.

[Configuration of first posture correction unit]
Next, the configuration of the first posture correction unit B10 will be described with reference to FIG. The first posture correction unit B10 includes a pair of posture correction arms B12 and B14.

  As shown in FIG. 4, the posture correction arm B12 includes a base B12a, an arm B12b, and a protrusion B12c. The base B12a extends in the radial direction of the transparent table T from the outside of the transparent table T toward the transparent table T so as to be substantially parallel to the surface of the transparent table T. The arm B12b is connected to the tip of the base B12a and extends along the tangential direction of the outer periphery of the transparent table T so as to be substantially parallel to the surface of the transparent table T. The protrusion B12c is connected to the tip of the arm B12b, and protrudes downward (on the surface side of the transparent table T) from the tip of the arm B12b.

  Here, both the base B12a and the arm B12b are disposed on the transparent table T in a state of being separated from the surface of the transparent table T by a predetermined distance. The distance between the base part B12a and the arm part B12b and the surface of the transparent table T is such that when the electronic part 1 supplied on the transparent table T passes through the first posture correcting unit B10, the electronic part 1 has the base part B12a and the arm. It is set to such an extent that it does not come into contact with the portion B12b (in the present embodiment in which the side surface s1 of the electronic component 1 is in contact with the surface of the transparent table T, at least exceeds the height of the electronic component 1). On the other hand, the lower surface of the protrusion B12c (the surface facing the surface of the transparent table T) is slightly separated from the surface of the transparent table T.

  The posture correction arm B14 includes a base part B14a and an arm part B14b. The base B14a extends in the radial direction of the transparent table T from the outside of the transparent table T toward the transparent table T so as to be substantially parallel to the surface of the transparent table T. The arm portion B14b is connected to the tip of the base portion B14a and extends along the tangential direction of the outer periphery of the transparent table T so as to be substantially parallel to the surface of the transparent table T. The arm part B14b protrudes downward (surface side of the transparent table T) from the base part B14a.

  Here, the base B14a is arranged on the transparent table T in a state of being separated from the surface of the transparent table T by a predetermined distance. The distance between the base B14a and the surface of the transparent table T is such that the electronic component 1 supplied on the transparent table T does not contact the base B14a when passing through the first posture correcting unit B10 (electronic In the present embodiment in which the side surface s3 of the component 1 is in contact with the surface of the transparent table T, it is set at least to the extent that the height of the electronic component 1 is exceeded. On the other hand, the lower surface (the surface facing the surface of the transparent table T) of the arm portion B14b is slightly separated from the surface of the transparent table T.

  The tip of the posture correction arm B12 (the end of the protrusion B12c on the side facing the rotation direction of the transparent table T) B12d and the tip of the posture correction arm B14 (the side of the arm B14b facing the rotation direction of the transparent table T) B14c is directed to the tip of the chute A18a of the second linear feeder A18 and is slightly separated from the tip. The distance between the tip B12d (protrusion B12c) of the posture correction arm B12 and the tip B14c (arm B14b) of the posture correction arm B14 is such that the electronic component 1 can pass and the electronic component 1 that passes therethrough. It is set to such an extent that the posture is not greatly collapsed (in the present embodiment in which the side surface s4 of the electronic component 1 is directed toward the central axis A of the transparent table T, it is slightly wider than the width of the electronic component 1). .

  Since the posture correcting arms B12 and B14 are configured as described above, the projecting portion B12c and the arm portion B14b exhibit a function of guiding the electronic component 1, so that the electronic component 1 is moved from the chute A18a to the transparent table T. When the electronic component 1 passes through the step formed between the groove of the chute A 18a and the surface of the transparent table T when being supplied to the transparent table, the posture of the electronic component 1 is not destroyed by the step. The electronic component 1 is supplied to T. Further, since the base B12a is separated from the surface of the transparent table T by a predetermined distance, the electronic component 1 is obstructed by the base B12a of the posture correcting arm B12 after passing between the protrusion B12c and the arm B14b. The electronic component 1 is conveyed by the transparent table T without any change.

[Configuration of the second posture correction unit]
Next, the configuration of the second posture correction unit C10 will be described with reference to FIG. As shown in FIG. 5, the second posture correcting unit C10 includes a posture correcting member C12, a pair of arms C14 and 16, a laser emitter C18, and a laser receiver C20.

  The posture correction member C12 includes a base C12a having a substantially rectangular parallelepiped shape and a posture correction portion C12b provided at the tip of the base C12a. The posture correction member C12 is disposed on the periphery of the transparent table T so that the posture correction portion C12b is directed to the central axis A side of the transparent table T.

  The posture correction part C12b becomes thinner as it goes from the base end part connected to the base part C12a to the front end part on the central axis A side of the transparent table T. Therefore, the posture correction unit C12b has a triangular shape when viewed from the side. The tip C12c of the posture correction unit C12b has an arc shape that protrudes toward the central axis A side of the transparent table T (the direction from the base C12a toward the posture correction unit C12b). The electronic component 1 is conveyed by the transparent table T while the side surface s2 of the electronic component 1 is in contact with the arcuate tip C12c, whereby the inclination of the electronic component 1 is corrected. By correcting the posture of the electronic component 1 with the posture correcting member C12, all the electronic components 1 passing through the posture correcting member C12 have a desired posture (specifically, the width of the electronic component 1 with respect to the radial direction of the transparent table T). The inclination of the direction is within ± 5 °. Thereby, it becomes possible to make imaging conditions substantially uniform in any electronic component 1.

  The arm C14 has an L-shape when viewed from the side, one end of which is connected to the upper surface side of the base C12a of the posture correcting member C12, and the other end of which is the central axis A side (posture from the base C12a) of the transparent table T. Extending in the direction toward the correction portion C12b). Therefore, the arm C14 is positioned on the surface side of the transparent table T. A laser emitter C18 is provided at the other end of the arm C14. The laser emitter C18 irradiates laser light L from the other end of the arm C14 toward the transparent table T and the laser receiver C20. The irradiation position of the laser beam L is slightly closer to the central axis A side of the transparent table T than the top of the tip C12c of the posture correction unit C12b, and the electronic component 1 is in contact with the top of the tip C12c of the posture correction unit C12b. In this case, the position is such that the laser beam L strikes the electronic component 1.

  The arm C16 has an L shape when viewed from the side, and one end of the arm C16 is connected to the lower surface side of the base C12a of the posture correcting member C12, and the other end is the central axis A side (posture from the base C12a) of the transparent table T. Extending in the direction toward the correction portion C12b). Therefore, the arm C16 is positioned on the back side of the transparent table T. At the other end of the arm C16, a laser receiver C20 is provided. The laser receiver C20 detects whether or not the electronic component 1 has passed through the top of the tip C12c of the posture correction unit C12b based on whether or not the laser light L from the laser emitter C18 is incident.

[Configuration of the first imaging unit]
Next, the configuration of the first imaging unit D10 will be described with reference to FIG. The first imaging unit D10 is for imaging the side surface s1 of the electronic component 1. Imaging of the side surface s1 of the electronic component 1 by the first imaging unit D10 is performed from above the transparent table T. As shown in FIG. 6, the first imaging unit D10 includes a camera D12 (first imaging unit) that performs imaging, a lens barrel D14 that accommodates a lens (not shown), and a dome-shaped illumination D16 (first illumination unit). The dome-shaped illumination D16 is disposed above the transparent table T so as to be located closer to the electronic component 1 located on the transparent table T than the camera D12 and the lens barrel D14.

  The camera D12 is composed of a camera that can split incident light and pick up an image for each color. Specifically, a 3CCD camera is used. In this 3CCD camera, incident light is split into red light, green light and blue light by a prism, and each light can be imaged by three independent CCD cameras. By using a 3CCD camera as the camera D12, it is possible to obtain a clearer image than when a CCD camera is used.

  The dome-shaped illumination D16 includes a flange-shaped member D16a (first holding member) and a light projecting member D16b (first light projecting member). The bowl-shaped member D16a includes a side wall portion D16d provided with an opening D16c (one opening) and a base portion D16f provided with an opening D16e (the other opening) communicating with the lens barrel D14 in the central portion. The side wall portion D16d has a concave curved surface shape (for example, a spherical surface shape or a parabolic surface shape) whose inner wall surface is recessed toward the side from the opening D16c toward the opening D16e. The base D16f has a flat plate shape and is disposed on the side opposite to the opening D16c.

  The dome-shaped illumination D16 is arranged above the transparent table T so that the opening D16c of the bowl-shaped member D16a faces the side surface s1 of the electronic component 1 located on the transparent table T. Therefore, the imaging axis DL of the camera D12 goes to the electronic component 1 through the lens barrel D14, the opening D16e of the base D16f, the side wall D16d, and the opening D16c. That is, the imaging axis DL of the camera D12 is surrounded by the inner wall surface of the side wall portion D16d.

  The light projecting member D16b is composed of, for example, a plurality of light emitting LEDs (Light Emitting Diodes). The light emitting LEDs constituting the light projecting member D16b are arranged over the entire inner wall surface of the side wall portion D16d and the entire inner wall surface of the base portion D16f. For this reason, the light projecting member D16b also surrounds the imaging axis DL of the camera D12, and the light projecting member D16b disposed on the inner wall surface of the base D16f causes the electronic component 1 from the direction along the perpendicular of the side surface s1 of the electronic component 1. The side surface s1 of the electronic component 1 is illuminated, and the electronic component from a direction exceeding 0 ° and less than 90 ° with respect to the perpendicular to the side surface s1 of the electronic component 1 by the light projecting member D16b disposed on the inner wall surface of the side wall portion D16d The side surface s1 of the electronic component 1 is illuminated, the reflected light from the side surface s1 of the electronic component 1 is introduced into the lens barrel D14 and the camera D12, and the side surface s1 of the electronic component 1 is imaged.

  As described above, the side surface s1 of the electronic component 1 is illuminated from the direction along the vertical line of the side surface s1 of the electronic component 1, so that scratches, irregularities, chips, etc. on the side surface s1 of the electronic component 1 can be clearly projected. . Further, the side surface s1 of the electronic component 1 is illuminated from a direction exceeding 0 ° and less than 90 ° with respect to the perpendicular to the side surface s1 of the electronic component 1, so that the side surface s1 of the electronic component 1 has various directions (angles). The defects connected to the inside from the side surface s1 of the electronic component 1 such as cracks and chipping can be clearly projected.

  In particular, in this embodiment, as shown in FIGS. 6 and 7, the light projecting member D16b emits blue light, a red light emitting element LE1 that emits red light, a green light emitting element LE2 that emits green light, and the like. It is composed of a blue light emitting element LE3. When the electronic component 1 is a capacitor or a ceramic inductor, a plurality of red light emitting elements LE1 are arranged on the inner wall surface side of the side wall portion D16d so as to surround the imaging axis DL all around the inner wall surface of the side wall portion D16d. A plurality of blue light-emitting elements LE3 are arranged on the opening D16e side and the inner wall surface of the base part D16f so as to surround the imaging axis DL over the entire circumference, and a plurality of red light-emitting elements LE1 and a plurality of blue light-emitting elements LE3 on the inner wall surface of the side wall part D16d In between, a plurality of green light emitting elements LE2 are arranged so as to surround the imaging axis DL over the entire circumference. By arranging in this way, the blue light, the green light, and the red light have a large angle with respect to the side surface s1 of the electronic component 1 including the outer surface of the element body 2 and the outer surfaces of the external electrodes 3 and 4 in this order. It becomes possible to illuminate from. Therefore, the red light of the red light emitting element LE1 is irradiated to the side surface s1 of the electronic component 1 at the shallowest light projection angle (the angle of the optical axis of the light emitting element with respect to the side surface s1) compared to the other light emitting elements. The blue light emitted from the blue light emitting element LE3 is emitted at the largest projection angle compared to the other light emitting elements, and the green light emitted from the green light emitting element LE2 is emitted at a projection angle larger than the red light and shallower than the blue light. . For example, red light emitting element LE1, green light emitting element LE2, and blue light emitting element LE3 are inspected when red light is irradiated at 10 to 30 °, green light is 35 to 50 °, and blue light is irradiated at 60 to 75 °. Are simultaneously irradiated.

  By irradiating the side surface s <b> 1 of the electronic component 1 with blue light, it is possible to easily highlight defective portions such as cracks, scratches, and peeling on the outer surfaces of the element body 2 and the external electrodes 3 and 4. Moreover, the defect part of side s1 can be more effectively made to stand out by enlarging the projection angle of blue light. On the other hand, by irradiating the side surface s <b> 1 of the electronic component 1 with red light, it is possible to make a defective portion existing inside the electronic component 1 such as the floating of the external electrodes 3 and 4 and the internal electrode easily stand out. In addition, by making the red light projection angle shallow, it is possible to effectively highlight defective portions existing inside, and to easily detect shape defects of the electronic component 1 such as chips. It becomes. In addition, by irradiating the side surface s1 of the electronic component 1 with green light, the discoloration such as a stain due to a chemical reaction (for example, a chemical reaction at the time of firing) on the outer surface of the element body 2 and the external electrodes 3 and 4 is made to stand out. be able to.

[Configuration of Second Imaging Unit]
Next, the configuration of the second imaging unit E10 will be described with reference to FIG. The second imaging unit E10 is for imaging the side surface s2 of the electronic component 1. Imaging of the side surface s2 of the electronic component 1 by the second imaging unit E10 is performed from the outside in the radial direction of the transparent table T. As shown in FIG. 8, the second imaging unit E10 includes a camera E12 (first imaging unit) that performs imaging, a lens barrel E14 that accommodates a lens (not shown), a prism adapter E16, and a pair of half-cylinders. It has illumination E18, E20 (first illumination part), and a pair of semi-cylindrical illuminations E18, E20 is located closer to the electronic component 1 located on the transparent table T than the camera E12, lens barrel E14, and prism adapter E16. In this way, the transparent table T is disposed outside the peripheral edge. The camera E12 is composed of a camera that can split incident light and pick up an image for each color. Specifically, a 3CCD camera is used.

  The prism adapter E16 is connected to the opening E16a into which the reflected light from the side surface s2 of the electronic component 1 is introduced, the right-angle prism E16b that reflects the reflected light introduced from the opening E16a, and the tip of the lens barrel E14. In addition, it includes an opening E16c that guides the reflected light reflected by the right-angle prism E16b toward the lens barrel E14 and the camera E12.

  The pair of semi-cylindrical lamps E18 and E20 are provided with a pair of openings, and are formed in a concave curved surface that is recessed from one opening toward the other opening, and the image of the camera E12 is captured. Of the semi-cylindrical members E18a and E20a (first holding member) configured by dividing the inner wall surface surrounding the axis EL around the imaging axis EL, and the semi-cylindrical members E18a and E20a so as to surround the imaging axis EL A plurality of light projecting members E18b and E20b (first light projecting members) that are held on the wall surface and irradiate light toward one opening side of the semi-cylindrical members E18a and E20a are configured. Specifically, the semi-cylindrical members E18a and E20a include side wall portions E18c and E20c and base portions E18d and E20d, respectively. The side wall portions E18c and E20c have curved surfaces (for example, spherical surfaces and parabolic surfaces) whose inner wall surfaces are enlarged in diameter from the base ends E18e and E20e of the semi-cylindrical members E18a and E20a toward the distal ends E18f and E20f. It is said that. The bases E18d and E20d have a flat plate shape and are arranged on the base ends E18e and E20e side of the semi-cylindrical members E18a and E20a. That is, the pair of semi-cylindrical lamps E18 and E20 are divided into two on a plane where the dome-shaped lamp D16 intersects both the opening D16c and the opening D16e. Therefore, the pair of semi-cylindrical illuminations E18 and E20 have division surfaces E18g and E20g, respectively. The “one opening” in the claims is constituted by the tip ends E18f and E20f of the semi-cylindrical members E18a and E20a, and the “other opening” in the claims is on the base end E18e and E20e side of the side wall portions E18c and E20c. Consists of ends.

  The pair of semi-cylindrical lamps E18 and E20 are arranged such that the dividing surfaces E18g and E20g are substantially parallel to the surface of the transparent table T. Further, the pair of semi-cylindrical illuminations E18, E20 has semi-cylindrical members E18a, E20a with their tips E18f, E20f facing the side surface s2 of the electronic component 1 located on the transparent table T, and the inner wall surfaces thereof facing each other. The virtual plane V including the surface of the transparent table T is disposed along the central axis A of the transparent table T. Therefore, the direction of the imaging axis EL of the camera E12 is changed by the right angle prism E16b through the lens barrel E14 and the opening E16c of the prism adapter E16, and then the opening E16a of the prism adapter E16 and the semi-cylindrical illumination E18 and the half It goes to the electronic component 1 through the space between the cylindrical illumination E20.

  The light projecting members E18b and E20b are, for example, light emitting LEDs. The light projecting members E18b and E20b are disposed over the entire inner wall surface of the side wall portions E18c and E20c and the entire inner wall surface of the base portions E18d and E20d. Therefore, the light projecting members E18b and E20b arranged on the inner wall surfaces of the base parts E18d and E20d illuminate the side surface s2 of the electronic component 1 from the direction along the vertical line of the side surface s2 of the electronic component 1, and the side wall portion E18c. The side surface s2 of the electronic component 1 is illuminated from the direction exceeding 0 ° and less than 90 ° with respect to the perpendicular to the side surface s2 of the electronic component 1 by the light projecting members E18b, E20b arranged on the inner wall surface of the E20c, Reflected light from the side surface s2 of the electronic component 1 is introduced into the lens barrel E14 and the camera E12, and the side surface s2 of the electronic component 1 is imaged.

  As described above, the side surface s2 of the electronic component 1 is illuminated from the direction along the perpendicular of the side surface s2 of the electronic component 1, so that scratches, irregularities, chips, etc. on the side surface s2 of the electronic component 1 can be clearly projected. . Further, the side surface s2 of the electronic component 1 is illuminated from a direction exceeding 0 ° and less than 90 ° with respect to the perpendicular to the side surface s2 of the electronic component 1, so that the side surface s2 of the electronic component 1 has various directions (angles). The defect connected to the inside from the side surface s2 of the electronic component 1 such as a crack or chipping can be clearly projected.

  In particular, in the present embodiment, as shown in FIG. 8, the light projecting members E18b and E20b include a red light emitting element LE1 that emits red light, a green light emitting element LE2 that emits green light, and a blue light that emits blue light. The light-emitting element LE3. When the electronic component 1 is a capacitor or a ceramic inductor, a plurality of red light emitting elements LE1 are arranged on the inner wall tips E18f and E20f side of the side wall portions E18c and E20c so as to surround the imaging axis EL over substantially the entire circumference. A plurality of blue light-emitting elements LE3 are arranged on the base end E18e, E20e side of the inner wall surface of E18c, E20c and the inner wall surface of the base part E18d, E20d so as to surround the imaging axis EL over substantially the entire circumference, and A plurality of green light emitting elements LE2 are disposed between the plurality of red light emitting elements LE1 and the plurality of blue light emitting elements LE3 so as to surround the imaging axis EL over substantially the entire circumference. By arranging in this manner, the blue light, the green light, and the red light have a large angle in this order with respect to the side surface s2 of the electronic component 1 including the outer surface of the element body 2 and the outer surfaces of the external electrodes 3 and 4. It becomes possible to illuminate from. Therefore, the side surface s2 of the electronic component 1 is irradiated with the red light of the red light emitting element LE1 at the shallowest light projection angle (the angle of the optical axis of the light emitting element with respect to the side surface s2) compared to the other light emitting elements. The blue light emitted from the blue light emitting element LE3 is emitted at the largest projection angle compared to the other light emitting elements, and the green light emitted from the green light emitting element LE2 is emitted at a projection angle larger than the red light and shallower than the blue light. . For example, red light is irradiated at 10 to 30 °, green light is irradiated at 35 to 50 °, and blue light is irradiated at 60 to 75 °. In the inspection, the light emitted from the red light emitting element LE1, the green light emitting element LE2, and the blue light emitting element LE3 is simultaneously irradiated.

[Configuration of Third Imaging Unit]
Next, the configuration of the third imaging unit F10 will be described with reference to FIG. The third imaging unit F10 is for imaging the side surface s3 of the electronic component 1. Imaging of the side surface s3 of the electronic component 1 by the third imaging unit F10 is performed from below the transparent table T through the transparent table T. As shown in FIG. 9, the third imaging unit F10 includes a camera F12 (first imaging unit) that performs imaging, a lens barrel F14 that houses a lens (not shown), a prism adapter F16, and a dome-shaped illumination F18 ( The dome-shaped illumination F18 is disposed below the transparent table T so that the dome-shaped illumination F18 is located closer to the electronic component 1 located on the transparent table T than the camera F12, the lens barrel F14, and the prism adapter F16. Has been. The camera F12 is composed of a camera that can split incident light and pick up an image for each color. Specifically, a 3CCD camera is used.

  The prism adapter F16 is connected to the opening F16a into which the reflected light from the side surface s3 of the electronic component 1 is introduced, the right-angle prism F16b that reflects the reflected light introduced from the opening F16a, and the tip of the lens barrel F14. And an opening F16c that guides the reflected light reflected by the right-angle prism F16b toward the lens barrel F14 and the camera F12.

  The dome-shaped illumination F18 includes a flange-shaped member F18a (first holding member) and a plurality of light projecting members F18b (first light projecting members). The flange-shaped member F18a includes a side wall portion F18d provided with an opening F18c (one opening) and a base portion F18f provided with an opening F18e (the other opening) in the center portion. The side wall portion F18d has a concave curved surface shape (for example, a spherical surface shape or a parabolic surface shape) whose inner wall surface is recessed toward the side from the opening F18c toward the opening F18e. The base F18f has a flat plate shape and is disposed on the side opposite to the opening F18c.

  The dome-shaped illumination F18 is arranged below the transparent table T so that the opening F18c of the bowl-shaped member F18a faces the side surface s3 of the electronic component 1 located on the transparent table T. Therefore, the orientation of the imaging axis FL of the camera F12 is changed by the right angle prism F16b through the lens barrel F14 and the opening F16c of the prism adapter F16, and then the opening F16a of the prism adapter F16, the opening F18e of the base F18f, and the side wall. It will head for the electronic component 1 through the part F18d and the opening F18c. That is, the imaging axis FL of the camera F12 is surrounded by the inner wall surface of the side wall portion F18d.

  The light projecting member F18b is, for example, a light emitting LED. The light projecting member F18b is disposed over the entire inner wall surface of the side wall portion F18d and the entire inner wall surface of the base portion F18f. For this reason, the light projecting member F18b also surrounds the imaging axis FL of the camera F12, and the light projecting member F18b disposed on the inner wall surface of the base F16f causes the electronic component 1 from the direction along the perpendicular of the side surface s3 of the electronic component 1. The side surface s3 of the electronic component 1 is illuminated and the electronic component from a direction exceeding 0 ° and less than 90 ° with respect to the perpendicular to the side surface s3 of the electronic component 1 by the light projecting member F18b disposed on the inner wall surface of the side wall F18d The side surface s3 of the electronic component 1 is illuminated and the reflected light from the side surface s3 of the electronic component 1 is introduced into the lens barrel F14 and the camera F12 via the right-angle prism F16b, and the side surface s3 of the electronic component 1 is imaged. .

  As described above, the side surface s3 of the electronic component 1 is illuminated from the direction along the perpendicular of the side surface s3 of the electronic component 1, so that scratches, irregularities, chips, etc. on the side surface s3 of the electronic component 1 can be clearly projected. . Further, the side surface s3 of the electronic component 1 is illuminated from a direction exceeding 0 ° and less than 90 ° with respect to the perpendicular to the side surface s3 of the electronic component 1, whereby the side surface s3 of the electronic component 1 is in various directions (angles). The defect connected to the inside from the side surface s3 of the electronic component 1 such as cracks and chipping can be clearly projected.

  In particular, in the present embodiment, as shown in FIG. 9, the light projecting member F18b includes a red light emitting element LE1 that emits red light, a green light emitting element LE2 that emits green light, and a blue light emitting element that emits blue light. LE3. When the electronic component 1 is a capacitor or a ceramic inductor, a plurality of red light emitting elements LE1 are arranged on the inner wall surface side of the side wall portion F18d so as to surround the imaging axis FL all around the inner wall surface of the side wall portion F18d. A plurality of blue light emitting elements LE3 are disposed on the inner wall surface of the opening F18e side and the base F18f so as to surround the imaging axis FL over the entire circumference, and a plurality of red light emitting elements LE1 and a plurality of blue light emitting elements LE3 on the inner wall surface of the side wall F18d. In between, a plurality of green light emitting elements LE2 are arranged so as to surround the imaging axis FL over the entire circumference. By arranging in this manner, the blue light, the green light, and the red light have a large angle with respect to the side surface s3 of the electronic component 1 including the outer surface of the element body 2 and the outer surfaces of the external electrodes 3 and 4 in this order. It becomes possible to illuminate from. Accordingly, the side surface s3 of the electronic component 1 is irradiated with the red light of the red light emitting element LE1 at the shallowest light projection angle (the angle of the optical axis of the light emitting element with respect to the side surface s3) as compared with the other light emitting elements. The blue light emitted from the blue light emitting element LE3 is emitted at the largest projection angle compared to the other light emitting elements, and the green light emitted from the green light emitting element LE2 is emitted at a projection angle larger than the red light and shallower than the blue light. . For example, red light is irradiated at 10 to 30 °, green light is irradiated at 35 to 50 °, and blue light is irradiated at 60 to 75 °. In the inspection, the light emitted from the red light emitting element LE1, the green light emitting element LE2, and the blue light emitting element LE3 is simultaneously irradiated.

[Configuration of Fourth Imaging Unit]
Next, the configuration of the fourth imaging unit G10 will be described with reference to FIG. The fourth imaging unit G10 is for imaging the side surface s4 of the electronic component 1. Imaging of the side surface s4 of the electronic component 1 by the fourth imaging unit G10 is performed from the inside in the radial direction of the transparent table T. As shown in FIG. 9, the fourth imaging unit G10 includes a camera G12 (first imaging unit) that performs imaging, a lens barrel G14 that houses a lens (not shown), a prism adapter G16, and a pair of half-cylinders. It has illumination G18, G20 (first illumination part), and the pair of semi-cylindrical illuminations G18, G20 is located closer to the electronic component 1 located on the transparent table T than the camera G12, the lens barrel G14, and the prism adapter G16. The transparent table T is arranged near the periphery. The camera G12 is composed of a camera that can split incident light and pick up an image for each color. Specifically, a 3CCD camera is used.

  The prism adapter G16 is connected to the opening G16a into which the reflected light from the side surface s4 of the electronic component 1 is introduced, the right-angle prism G16b that reflects the reflected light introduced from the opening G16a, and the tip of the lens barrel G14. In addition, it includes an opening G16c that guides the reflected light reflected by the right-angle prism G16b toward the lens barrel G14 and the camera G12. Since the electronic component 1 is smaller than the prism adapter G16, the right-angle prism G16b is slightly tilted toward the surface of the transparent table T in the prism adapter G16 as shown in FIG. It has become.

  The pair of semi-cylindrical lamps G18 and G20 are provided with a pair of openings. The pair of openings has a concave curved shape that is recessed from one opening toward the other opening, and is imaged by the camera G12. Of the semi-cylindrical members G18a and G20a (first holding member) configured by dividing the inner wall surface surrounding the axis GL around the imaging axis GL, and the semi-cylindrical members G18a and G20a so as to surround the imaging axis GL. It is configured to include a plurality of light projecting members G18b and G20b (first light projecting members) that are held on the wall surface and irradiate light toward one opening side of the semi-cylindrical members G18a and G20a. Specifically, the semi-cylindrical members G18a and G20a include side wall portions G18c and G20c and base portions G18d and G20d, respectively. The side wall portions G18c, G20c are curved surfaces (for example, spherical surfaces or parabolic surfaces) whose inner wall surfaces are expanded in diameter from the base ends G18e, G20e of the semi-cylindrical members G18a, G20a toward the distal ends G18f, G20f. It is said that. The bases G18d and G20d have a flat plate shape and are disposed on the base ends G18e and G20e side of the semi-cylindrical members G18a and G20a. That is, the pair of semi-cylindrical illuminations G18 and G20 is divided into two on a plane where the dome-shaped illumination D16 intersects both the opening D16c and the opening D16e. Therefore, the pair of semi-cylindrical lights G18 and G20 have division surfaces G18g and G20g, respectively. The “one opening” in the claims is constituted by the tips G18f and G20f of the semi-cylindrical members G18a and G20a, and the “other opening” in the claims is on the side of the base ends G18e and G20e of the side wall portions G18c and G20c. Consists of ends.

  The pair of semi-cylindrical lights G18 and G20 are arranged such that the dividing surfaces G18g and G20g are substantially parallel to the surface of the transparent table T. In addition, the pair of semi-cylindrical lights G18 and G20 has semi-cylindrical members G18a and G20a with tips G18f and G20f facing the side surface s4 of the electronic component 1 positioned on the transparent table T, and their inner wall surfaces face each other. The transparent table T is disposed along the central axis A of the transparent table T. Therefore, the direction of the imaging axis GL of the camera G12 is changed by the right angle prism G16b through the lens barrel G14 and the opening G16c of the prism adapter G16, and then the opening G16a of the prism adapter G16 and the semi-cylindrical illumination G18 and the half It goes to the electronic component 1 through the space between the cylindrical illumination G20.

  The light projecting members G18b and G20b are, for example, light emitting LEDs. The light projecting members G18b and G20b are disposed over the entire inner wall surface of the side wall portions G18c and G20c and the entire inner wall surface of the base portions G18d and G20d. Therefore, the light projecting members G18b and G20b arranged on the inner wall surfaces of the base portions G18d and G20d illuminate the side surface s4 of the electronic component 1 from the direction along the vertical line of the side surface s4 of the electronic component 1, and the side wall portion G18c. The side surface s4 of the electronic component 1 is illuminated from the direction exceeding 0 ° and less than 90 ° with respect to the perpendicular to the side surface s4 of the electronic component 1 by the light projecting members G18b and G20b arranged on the inner wall surface of the G20c, Reflected light from the side surface s4 of the electronic component 1 is introduced into the lens barrel G14 and the camera G12 via the right-angle prism G16b, and the side surface s4 of the electronic component 1 is imaged.

  As described above, the side surface s4 of the electronic component 1 is illuminated from the direction along the vertical line of the side surface s4 of the electronic component 1, so that scratches, irregularities, chips, etc. on the side surface s4 of the electronic component 1 can be clearly projected. . Further, the side surface s4 of the electronic component 1 is illuminated from a direction exceeding 0 ° and less than 90 ° with respect to the perpendicular to the side surface s4 of the electronic component 1, whereby the side surface s4 of the electronic component 1 is in various directions (angles). The defect connected to the inside from the side surface s4 of the electronic component 1 such as cracks and chipping can be clearly projected.

  In particular, in the present embodiment, as shown in FIG. 10, the light projecting members G18b and G20b include a red light emitting element LE1 that emits red light, a green light emitting element LE2 that emits green light, and a blue light that emits blue light. The light-emitting element LE3. When the electronic component 1 is a capacitor or a ceramic inductor, a plurality of red light emitting elements LE1 are arranged on the inner wall tips G18f and G20f side of the side wall portions G18c and G20c so as to surround the imaging axis GL over substantially the entire circumference. A plurality of blue light emitting elements LE3 are disposed on the base wall G18e, G20e side of the inner wall surface of G18c, G20c and on the inner wall surface of the base part G18d, G20d so as to surround the imaging axis GL over substantially the entire circumference. A plurality of green light-emitting elements LE2 are arranged between the plurality of red light-emitting elements LE1 and the plurality of blue light-emitting elements LE3 so as to surround the imaging axis GL over substantially the entire circumference. By arranging in this manner, the blue light, the green light, and the red light have a large angle with respect to the side surface s4 of the electronic component 1 including the outer surface of the element body 2 and the outer surfaces of the external electrodes 3 and 4 in this order. It becomes possible to illuminate from. Accordingly, the side surface s4 of the electronic component 1 is irradiated with the red light of the red light emitting element LE1 at the shallowest light projection angle (the angle of the optical axis of the light emitting element with respect to the side surface s4) as compared with the other light emitting elements. The blue light emitted from the blue light emitting element LE3 is emitted at the largest projection angle compared to the other light emitting elements, and the green light emitted from the green light emitting element LE2 is emitted at a projection angle larger than the red light and shallower than the blue light. . For example, red light is irradiated at 10 to 30 °, green light is irradiated at 35 to 50 °, and blue light is irradiated at 60 to 75 °. In the inspection, the light emitted from the red light emitting element LE1, the green light emitting element LE2, and the blue light emitting element LE3 is simultaneously irradiated.

[Configuration of Fifth Imaging Unit]
Next, the configuration of the fifth imaging unit H10 will be described with reference to FIG. The fifth imaging unit H10 is for imaging the side surface s5 of the electronic component 1. Imaging of the side surface s5 of the electronic component 1 by the fifth imaging unit H10 is performed from the front side in the rotation direction R of the transparent table T. As shown in FIG. 11, the fifth imaging unit H10 includes a camera H12 (second imaging unit) that performs imaging, a lens barrel H14 that houses a lens (not shown), a prism adapter H16, and a pair of half-cylinders. It has illumination H18, H20 (second illumination part), and the pair of semi-cylindrical illuminations H18, H20 is located closer to the electronic component 1 located on the transparent table T than the camera H12, lens barrel H14, and prism adapter H16. The transparent table T is arranged near the periphery. The camera H12 is composed of a camera that can split incident light and pick up an image for each color. Specifically, a 3CCD camera is used.

  The prism adapter H16 is connected to the opening H16a into which the reflected light from the side surface s5 of the electronic component 1 is introduced, the right-angle prism H16b that reflects the reflected light introduced from the opening H16a, and the tip of the lens barrel H14. And an opening H16c that guides the reflected light reflected by the right-angle prism H16b toward the lens barrel H14 and the camera H12. Since the electronic component 1 is smaller than the prism adapter H16 and the imaging of the side surface s5 of the electronic component 1 is performed from the front side in the rotation direction R of the transparent table T, the camera H12, the lens barrel H14, and the prism adapter are performed. The prism adapter H16 located at the most transparent table T side among the camera H12, the lens barrel H14, and the prism adapter H16 is tilted slightly toward the surface side of the transparent table T. Is separated from the surface by a predetermined distance (specifically, a distance through which the electronic component 1 can pass between the prism adapter H16 and the surface of the transparent table T).

  The pair of semi-cylindrical lamps H18 and H20 are provided with a pair of openings. The pair of openings H18 and H20 has a concave curved shape that is recessed from one opening toward the other opening, and is imaged by the camera H12. Of the semi-cylindrical members H18a and H20a (second holding member) configured by dividing the inner wall surface surrounding the axis HL around the imaging axis HL, and the semi-cylindrical members H18a and H20a so as to surround the imaging axis HL. A plurality of light projecting members H18b and H20b (second light projecting members) that are held on the wall surface and irradiate light toward one opening side of the semi-cylindrical members H18a and H20a. Specifically, the semi-cylindrical members H18a and H20a include side wall portions H18c and H20c and base portions H18d and H20d, respectively. The side wall portions H18c, H20c are curved surfaces (for example, spherical surfaces or parabolic surfaces) whose inner wall surfaces are expanded in diameter from the base end H18e, H20e side of the semi-cylindrical members H18a, H20a toward the distal end H18f, H20f side. It is said that. The base portions H18d and H20d have a flat plate shape and are disposed on the base ends H18e and H20e side of the semi-cylindrical members H18a and H20a. That is, the pair of semi-cylindrical lamps H18 and H20 is divided into two on a plane where the dome-shaped lamp H16 intersects both the opening H16c and the opening H16e. Therefore, the pair of semi-cylindrical lights H18 and H20 have division surfaces H18g and H20g, respectively. The “one opening” in the claims is constituted by the distal ends H18f and H20f of the semi-cylindrical members H18a and H20a, and the “other opening” in the claims is on the base ends H18e and H20e side of the side wall portions H18c and H20c. Consists of ends.

  The pair of semi-cylindrical lamps H18, H20 is in a state in which the dividing surfaces H18g, H20g are inclined at a predetermined angle with respect to the surface of the transparent table T, specifically, the distal end H18f, H20f side is more proximal than the proximal end H18e, H20e side. Are also arranged so as to approach the transparent table T. The pair of semi-cylindrical lights H18, H20 has semi-cylindrical members H18a, H20a with tips H18f, H20f facing the side surface s5 of the electronic component 1 located on the transparent table T, and the inner wall surfaces thereof facing each other. The transparent table T is disposed along the central axis A of the transparent table T. Therefore, the direction of the imaging axis HL of the camera H12 is changed by the right-angle prism H16b through the opening H16c of the lens barrel H14 and the prism adapter H16, and then the opening H16a of the prism adapter H16 and the semi-cylindrical illumination H18. It goes to the electronic component 1 through the space between the cylindrical illumination H20.

  The light projecting members H18b and H20b are, for example, light emitting LEDs. The light projecting members H18b and H20b are disposed over the entire inner wall surface of the side wall portions H18c and H20c and the entire inner wall surface of the base portions H18d and H20d. Therefore, the light projecting members H18b and H20b arranged on the inner wall surfaces of the base portions H18d and H20d illuminate the side surface s5 of the electronic component 1 from the direction along the perpendicular to the side surface s5 of the electronic component 1, and the side wall portion H18c. The side surface s5 of the electronic component 1 is illuminated from a direction exceeding 0 ° and approximately 90 ° with respect to the perpendicular to the side surface s5 of the electronic component 1 by the light projecting members H18b and H20b arranged on the inner wall surface of the H20c, Reflected light from the side surface s5 of the electronic component 1 is introduced into the lens barrel H14 and the camera H12 via the right-angle prism H16b, and the side surface s5 of the electronic component 1 is imaged.

  In this way, the side surface s5 of the electronic component 1 is illuminated from the direction along the perpendicular line of the side surface s5 of the electronic component 1, so that scratches, irregularities, chips, etc. on the side surface s5 of the electronic component 1 can be clearly projected. . Further, the side surface s5 of the electronic component 1 is illuminated from a direction exceeding 0 ° and approximately 90 ° with respect to the perpendicular to the side surface s5 of the electronic component 1, whereby the side surface s5 of the electronic component 1 is in various directions (angles). The defect connected to the inside from the side surface s5 of the electronic component 1 such as cracks and chipping can be clearly projected.

  In particular, in the present embodiment, as shown in FIG. 11, the light projecting members H18b and H20b are composed of only a white light emitting element LE4 that emits white light. The white light emitting element LE4 is attached over the entire inner wall surface of the side wall portions H18c and H20c so as to surround the imaging axis HL over substantially the entire circumference. By arranging in this way, it is possible to illuminate the side surface s5 of the electronic component 1 made of the outer surface of the external electrode 3 with white light.

[Configuration of Sixth Imaging Unit]
Next, the configuration of the sixth imaging unit I10 will be described with reference to FIG. The sixth imaging unit I10 is for imaging the side surface s6 of the electronic component 1. The imaging of the side surface s6 of the electronic component 1 by the sixth imaging unit I10 is performed from the rear side in the rotation direction R of the transparent table T. As shown in FIG. 12, the sixth imaging unit I10 includes a camera I12 (second imaging unit) that performs imaging, a lens barrel I14 that houses a lens (not shown), a prism adapter I16, and a pair of half-cylinders. Illumination I18, I20 (second illumination part) and a pair of semi-cylindrical illuminations I18, I20 are located closer to the electronic component 1 located on the transparent table T than the camera I12, lens barrel I14, and prism adapter I16. The transparent table T is arranged near the periphery. The camera H12 is composed of a camera that can split incident light and pick up an image for each color. Specifically, a 3CCD camera is used.

  The prism adapter I16 is connected to the opening I16a into which the reflected light from the side surface s6 of the electronic component 1 is introduced, the right angle prism I16b that reflects the reflected light introduced from the opening I16a, and the tip of the lens barrel I14. And an opening I16c that guides the reflected light reflected by the right-angle prism I16b toward the lens barrel I14 and the camera I12. Since the electronic component 1 is smaller than the prism adapter I16, and the imaging of the side surface s6 of the electronic component 1 is performed from the rear side in the rotation direction R of the transparent table T, the camera I12, the lens barrel I14, and the prism adapter are performed. The prism adapter I16 located at the most transparent table T side among the camera I12, the lens barrel I14, and the prism adapter I16 is tilted so that I16 is slightly inclined toward the surface side of the transparent table T. Is separated from the surface by a predetermined distance (specifically, a distance by which the electronic component 1 can pass between the prism adapter I16 and the surface of the transparent table T).

  The pair of semi-cylindrical illuminations I18 and I20 are provided with a pair of openings, and are formed in a concave curved shape that is recessed from one opening toward the other opening, and the imaging of the camera I12. Of the semi-cylindrical members I18a and I20a (second holding member) configured by dividing the inner wall surface surrounding the axis IL around the imaging axis IL, and the semi-cylindrical members I18a and I20a so as to surround the imaging axis IL A plurality of light projecting members I18b and I20b (second light projecting members) that are held on the wall surface and irradiate light toward one opening side of the semi-cylindrical members I18a and I20a are configured. Specifically, the semi-cylindrical members I18a and I20a include side wall portions I18c and I20c and base portions I18d and I20d, respectively. The side wall portions I18c and I20c have curved surfaces (for example, spherical surfaces and parabolic surfaces) whose inner wall surfaces are expanded in diameter from the base ends I18e and I20e of the semi-cylindrical members I18a and I20a toward the distal ends I18f and I20f. It is said that. The bases I18d and I20d have a flat plate shape and are arranged on the base ends I18e and I20e side of the semi-cylindrical members I18a and I20a. That is, the pair of semi-cylindrical lamps I18 and I20 is divided into two on a plane where the dome-shaped lamp I16 intersects both the opening I16c and the opening I16e. Therefore, the pair of semi-cylindrical illuminations I18 and I20 have division surfaces I18g and I20g, respectively. The “one opening” in the claims is constituted by the distal ends I18f and I20f of the semi-cylindrical members I18a and I20a, and the “other opening” in the claims is on the base ends I18e and I20e side of the side wall portions I18c and I20c. Consists of ends.

  The pair of semi-cylindrical lamps I18 and I20 are in a state where the dividing surfaces I18g and I20g are inclined at a predetermined angle with respect to the surface of the transparent table T, specifically, the distal ends I18f and I20f are closer to the proximal ends I18e and I20e. Are also arranged so as to approach the transparent table T. Further, the pair of semi-cylindrical illuminations I18, I20 has the semi-cylindrical members I18a, I20a with their tips I18f, I20f facing the side surface s6 of the electronic component 1 located on the transparent table T, and the inner wall surfaces thereof facing each other. The transparent table T is disposed along the central axis A of the transparent table T. Therefore, the direction of the imaging axis IL of the camera I12 passes through the lens barrel I14 and the opening I16c of the prism adapter I16 and is changed by the right-angle prism I16b, and then the opening I16a and the semi-cylindrical illumination I18 of the prism adapter I16 and the half It goes to the electronic component 1 through the space between the cylindrical illumination I20.

  The light projecting members I18b and I20b are, for example, light emitting LEDs. The light projecting members I18b and I20b are arranged over the entire inner wall surface of the side wall portions I18c and I20c and the entire inner wall surface of the base portions I18d and I20d. Therefore, the light projecting members I18b and I20b arranged on the inner wall surfaces of the base portions I18d and I20d illuminate the side surface s6 of the electronic component 1 from the direction along the vertical line of the side surface s6 of the electronic component 1, and the side wall portion I18c. The side surface s6 of the electronic component 1 is illuminated from the direction of more than 0 ° and about 90 ° with respect to the perpendicular to the side surface s6 of the electronic component 1 by the light projecting members I18b and I20b arranged on the inner wall surface of the I20c, Reflected light from the side surface s6 of the electronic component 1 is introduced into the lens barrel I14 and the camera I12 via the right-angle prism I16b, and the side surface s6 of the electronic component 1 is imaged.

  As described above, the side surface s6 of the electronic component 1 is illuminated from the direction along the vertical line of the side surface s6 of the electronic component 1, so that scratches, irregularities, chips, etc. on the side surface s6 of the electronic component 1 can be clearly projected. . Further, the side surface s6 of the electronic component 1 is illuminated from a direction that exceeds 0 ° and about 90 ° with respect to the perpendicular to the side surface s6 of the electronic component 1, so that the side surface s6 of the electronic component 1 has various directions (angles). The defects connected to the inside from the side surface s6 of the electronic component 1 such as cracks and chipping can be clearly projected.

  In particular, in the present embodiment, as shown in FIG. 12, the light projecting members I18b and I20b are composed of only a white light emitting element LE4 that emits white light. The white light emitting element LE4 is attached over the entire inner wall surface of the side wall portions I18c and I20c so as to surround the imaging axis IL over substantially the entire circumference. By arranging in this way, it is possible to illuminate the side surface s6 of the electronic component 1 made of the outer surface of the external electrode 3 with white light.

[Configuration of good product collection unit and defective product collection unit]
Next, the configuration of the non-defective product recovery unit J10 and the defective product recovery unit K10 will be described with reference to FIG. The non-defective product recovery unit J10 is for recovering the electronic component 1 determined to be a non-defective product as a result of the visual inspection, and the defective product recovery unit K10 is determined to be a defective product as a result of the visual inspection. This is for collecting the electronic component 1. The good product recovery unit J10 and the defective product recovery unit K10 have ionizers J12 and K12 and recovery boxes J14 and K14, respectively.

  The ionizer J12 (K12) is a device that blows a gas for ionizing the atmosphere and neutralizing charges generated on the surface of the transparent table T. The ionizer J12 (K12) is disposed above the periphery of the transparent table T. The nozzle of the ionizer J12 (K12) is directed toward the collection box J14 (K14), and is slightly inclined toward the surface of the transparent table T. Therefore, when ionized gas is blown out from the nozzle of the ionizer J12 (K12), the gas is directed from the surface of the transparent table to the recovery box J14 (K14).

  The collection box J14 (K14) includes a housing J14a (K14a), a chute J14b (K14b) and a buffer sheet J14c (K14c) provided inside the housing J14a (K14a). The casing J14a (K14a) is a hollow member having a rectangular parallelepiped shape, and is formed of a conductive resin material. The casing J14a (K14a) has an opening J14d (K14d) formed by cutting out one ridge of the casing J14a (K14a). The housing J14a (K14a) is disposed outward from the periphery of the transparent table T so that the opening J14d (K14d) faces the periphery of the transparent table T. Note that the casing J14a (K14a) is grounded (grounded) so that electric charges can be released to the outside of the casing J14a (K14a).

  The chute J14b (K14b) has a triangular prism shape and is formed of a conductive resin material. The chute J14b (K14b) is inclined so as to go downward as it approaches the transparent table T in the housing J14a (K14a). For this reason, the electronic components 1 blown into the housing J14a (K14a) by the ionizer J12 (K12) are collected near the transparent table T in the housing J14a (K14a) by the chute J14b (K14b). At this time, the electronic component 1 slides down the slope of the chute J14b (K14b), so that the impact generated on the electronic component 1 when the electronic component 1 is blown into the housing J14a (K14a) is alleviated. It has become.

  The buffer sheet J14c (K14c) is formed in a sheet shape from a conductive flexible material. The buffer sheet J14c (K14c) is attached to the top plate of the casing J14a (K14a) so that one main surface thereof faces the wall portion near the transparent table T in the casing J14a (K14a). Therefore, the electronic component 1 blown into the housing J14a (K14a) by the ionizer J12 (K12) first collides with the buffer sheet J14c (K14c), slides down the slope of the chute J14b (K14b), and then the housing J14a ( Recovered in K14a).

[Configuration of control unit]
Next, the configuration of the control unit 12 will be described with reference to FIG. As shown in FIG. 2, the control unit 12 includes a servo motor connected to the transparent table T, a first linear feeder A14, a ball feeder A16, a second linear feeder A18, a laser emitter C18, a laser receiver C20, The first imaging unit D10, the second imaging unit E10, the third imaging unit F10, the fourth imaging unit G10, the fifth imaging unit H10, the sixth imaging unit I10, and the ionizers J12 and K12 are connected.

  The control unit 12 outputs a signal to the servo motor of the transparent table T, and controls the rotation and stop of the transparent table T. The control unit 12 outputs signals to the first linear feeder A14, the ball feeder A16, and the second linear feeder A18, and controls driving and stopping of the first linear feeder A14, the ball feeder A16, and the second linear feeder A18.

  The control unit 12 outputs a signal to the laser light emitter C18 and irradiates the laser light receiver C20 with the laser light L. The laser receiver C20 outputs a signal to the control unit 12 when receiving the laser light L from the laser emitter C18 (when the electronic component 1 does not pass through the second posture correcting unit C10). When the laser light L from the laser emitter C18 is not received (when the electronic component 1 is irradiated with the laser light L as the electronic component 1 passes through the second posture correcting unit C10), the control is performed. The signal output to the unit 12 is stopped. Here, the control unit 12 determines that the electronic component 1 has passed through the second posture correction unit C10, triggered by the stop of the signal output from the laser receiver C20, and the electronic component 1 Calculates how much the transparent table T needs to be rotated to reach each of the imaging units D10, E10, F10, G10, H10, I10 and each of the recovery units J10, K10.

  When the control unit 12 determines that the electronic component 1 has reached each of the imaging units D10, E10, F10, G10, H10, and I10 based on the calculated rotation amount of the transparent table T, the lighting unit D16, Output signals to E18, E20, F16, G18, G20, H18, H20, I18, and I20 for illumination with strobe light, and output signals to each camera D12, E12, F12, G12, H12, and I12 And each side surface s1-s6 of the electronic component 1 is imaged. And the control part 12 performs an image process based on the picked-up image data of the side surfaces s1-s6 of the electronic component 1 imaged by each camera D12, E12, F12, G12, H12, and I12, and scratches on the electronic component 1 etc. The presence or absence of defects is inspected to determine whether or not the electronic component 1 is defective.

  When the control unit 12 determines that the electronic component 1 is a non-defective product and reaches the non-defective product recovery unit J10 based on the calculated rotation amount of the transparent table T and the appearance inspection result, the control unit 12 outputs a signal to the ionizer J12. The ionized gas is injected into the ionizer J12. As a result, the non-defective electronic component 1 is blown off into the recovery box J14 by the ionized gas from the ionizer J12 and recovered in the recovery box J14. On the other hand, when the control unit 12 determines that the electronic component 1 is a defective product and has reached the defective product collection unit K10 based on the calculated rotation amount of the transparent table T and the appearance inspection result, a signal is sent to the ionizer K12. Then, the ionized gas is injected into the ionizer K12. Thereby, the defective electronic component 1 is blown off into the recovery box K14 by the ionized gas from the ionizer K12 and recovered in the recovery box K14.

  In the present embodiment as described above, the electronic component 1 is arranged on the peripheral portion of the transparent table T so that the side surface s3 of the electronic component 1 contacts the transparent table T by the element body supply unit A10. The electronic component 1 is being conveyed. Therefore, since the electronic component 1 can be visually recognized from any direction toward the six side surfaces s1 to s6 of the electronic component 1, each side surface s1 to s1 of the electronic component 1 by the imaging units D10, E10, F10, G10, H10, and I10. It is no longer necessary to change the electronic component 1 for the imaging of s6. As a result, the appearance inspection of the electronic component 1 can be performed efficiently at high speed.

  Next, the operation and effect of the appearance inspection apparatus 10 according to the embodiment of the present invention will be described.

  First, when all surfaces of an electronic component are inspected by irradiating RGB three-color illumination as in the past, for example, a part of the end surface is covered with external electrodes 3 and 4 such as a chip capacitor and a chip inductor. When the appearance inspection of the electronic component 1 is performed, there is a problem in that defects on the surface covered with the external electrodes 3 and 4 cannot be detected satisfactorily. Therefore, in order to solve such a problem, the present inventors have conducted intensive research. As a result, the surface whose entire surface is covered with the external electrodes 3 and 4 is white light-emitting element LE4 for the following reason. It was found that it is preferable to inspect by irradiation.

  That is, the defect inspection of the side surfaces s5 and s6 covered with the external electrodes 3 and 4 is intended to detect defects on the surface of the thinly formed metal film. It leads to improvement. In the inspection of the chip body surface with RGB three-color illumination comprising the red light emitting element LE1, the green light emitting element LE2, and the blue light emitting element LE3, blue light is effective for detecting defects on the surface, and detecting defects on the surface of the external electrode Basically, blue light is considered to work effectively, but blue light with a short wavelength (in the visible light region) has a relatively high directivity. If the blue light-emitting element LE3 is used, unevenness in illuminance is likely to occur. In particular, illuminance unevenness occurs even more in the external electrode region on the metal surface with high reflection efficiency. On the other hand, in the white light emitting element LE4, part of the blue light emitted from the light emitting diode chip passes through the phosphor layer, and the rest hits the phosphor to become yellow light, and the two colors of light are mixed. Generating white light (for human vision). Although the light of the white light emitting element LE4 is also based on blue light, the directivity of the LED light is weakened by passing through the phosphor layer and becomes a wide angle, so that uneven illuminance depending on the directivity is suppressed, and the external electrode is uniform. Therefore, the surface defect detection accuracy is improved. On the other hand, in the RGB three-color illumination, the most effective blue light-emitting element LE3 is provided only in a specific angle region, and the original high directivity remains. It has been found that the defect detection accuracy is lower than when the white light emitting element LE4 is used. On the other hand, the external electrode region that protrudes from the side surfaces s5 and s6 to the side surfaces s1 to s4 has a relatively flat shape as compared to the external electrode surfaces of the side surfaces s5 and s6, and thus the blue light emitting element LE3 in RGB three-color illumination. It has also been found that sufficient defect detection can be performed.

  As described above, in the appearance inspection apparatus 10 according to the embodiment of the present invention, the side surface s1, the side surface s2, and the side surface s3 of the electronic component 1 constituted by the outer surface of the element body 2 and a part of the outer surface of the external electrodes 3 and 4. The light projecting members D16b, E18b, E20b, F18b, G18b, and G20b of the imaging units D10, E10, F10, and G10 that respectively image the side surface s4 and the red light emitting element LE1 that emits red light and the green that emits green light. The light-emitting element LE2 and the blue light-emitting element LE3 that emits blue light are included. Further, the light projecting members H18b, H20b, I18b, and I20b of the imaging units H10 and I10 that respectively capture the side surface s5 and the side surface s6 of the electronic component 1 constituted by the outer surfaces of the external electrodes 3 and 4 emit white light. It is composed of a white light emitting element LE4. With this configuration, the side surfaces s1, s2, s3, and s4, which are preferably inspected with RGB three-color illumination, can be inspected with RGB three-color illumination, and a white light emitting element is irradiated. The side surfaces s5 and s6 that are preferably inspected can be inspected by irradiating the white light emitting element LE4. As a result, all six surfaces of the electronic component 1 can be inspected with high accuracy, and in particular, the side surface s5 that is covered with the external electrodes 3 and 4 as compared with the case where all six surfaces are inspected with RGB three-color illumination. , S6 defect detection accuracy can be improved.

  Further, since the inspection accuracy can be improved, the inspection processing speed can also be improved. In order to improve the inspection processing speed, it is possible to simultaneously irradiate light from the red light emitting element LE1, the green light emitting element LE2, and the blue light emitting element LE3 during the inspection by using a 3CCD camera for the cameras D12 to I12. Has contributed.

  In addition, since the cameras D12, E12, F12, G12, H12, and I12 are composed of 3CCD cameras that can divide incident light and pick up images for each color, the inspection accuracy of the electronic component 1 can be further improved. Can do.

  Moreover, in the visual inspection apparatus 10 according to the present embodiment, the electronic parts 1 including the outer surface of the element body 2 and the outer surfaces of the external electrodes 3 and 4 are provided for the light projecting members D16b, E18b, E20b, F18b, G18b, and G20b. The side surfaces s1, s2, s3, and s4 can be illuminated from a large angle in the order of blue light, green light, and red light. Thus, for example, for a chip capacitor or a ceramic inductor in which the element body 2 is made of a dielectric and the contrast difference between the outer surface of the element body 2 and the outer surfaces of the external electrodes 3 and 4 is reduced, a suitable illumination angle is used. Thus, the inspection accuracy can be improved.

  Next, an example when the electronic component 1 is observed with the appearance inspection apparatus 10 according to the embodiment of the present invention will be described. FIG. 15 is an example in which the outer surface of only the element body 2 on which no external electrode is formed is imaged. FIG. 15A is a red light image obtained by irradiating RGB three-color illumination and imaged by a 3CCD camera. ) Is a red light image when the RGB three-color illumination is irradiated and imaged with a 1 CCD camera, (c) is a green light image when the RGB three-color illumination is irradiated and imaged with a 3 CCD camera, and (d) is an RGB three-color image. Green light image when color illumination is applied and imaged with a 1 CCD camera, (e) is a blue light image when imaged with a 3 CCD camera by irradiating with RGB 3 color illumination, and (f) is irradiated with RGB 3 color illumination. And the blue light image when it images with 1 CCD camera is shown. The graphs shown in FIGS. 15A to 15F show the luminance at the bar B in the photograph of the element body 2, and the luminance difference shown in the drawing indicates the reference luminance value (for example, average luminance) and the defect in the inspection target area. The difference from the luminance value at the location is shown. As shown in FIGS. 15A and 15B, a crack CR heading inward of the element body 2 can be observed by irradiating RGB three-color illumination to obtain a red light image. When the image is taken with a 3CCD camera, the luminance difference is 131 at the crack CR portion, and the crack CR can be detected more satisfactorily. As shown in FIGS. 15C and 15D, a spot ST due to a chemical reaction on the surface of the element body 2 can be observed by irradiating RGB three-color illumination to obtain a green light image. Further, when the image is taken by the 3CCD camera, the brightness difference is 32 at the spot ST portion, and the spot ST can be detected more satisfactorily. As shown in FIGS. 15E and 15F, the chip CP on the surface of the element body 2 can be observed by irradiating RGB three-color illumination to obtain a blue light image. Further, when the image is taken by the 3CCD camera, the luminance difference is 28 at the missing CP portion, and it becomes possible to detect the missing CP better. In addition, about FIG.15 (e), (f), although the outer surface of the end surface of the longitudinal direction of the element | base_body 2 was observed as a surface which can observe the chip | tip of a surface easily, the same surface as (a)-(d) was used. Even if it observes, a chip | tip can be observed favorably similarly.

  FIGS. 16A and 16B show an example in which the outer surface of only the external electrode is imaged. FIG. 16A shows a red light image obtained by irradiating a white light emitting element and picking up an image with a 3CCD camera, and FIG. A green light image taken with a 3CCD camera, (c) a blue light image taken with a 3CCD camera illuminating with a white light emitting element, and (D) taken with a 3CCD camera illuminating with RGB three-color illumination. Red light image, (e) is a green light image when radiated with RGB three-color illumination and imaged with a 3CCD camera, (f) is a blue light when radiated with RGB three-color illumination and imaged with a 3CCD camera An image is shown. As shown in FIG. 16 (f), when observing by irradiating with RGB three-color illumination, the corner R portion of the outer peripheral edge becomes a shadow, and the entire outer surface of the external electrode is unevenly reflected and reflected uniformly. However, as shown in FIG. 16C, when the white light emitting element is irradiated for observation, the influence of the corner R portion of the outer peripheral edge is small, and the entire outer surface of the external electrode appears relatively uniformly.

  Although the preferred embodiments of the present invention have been described in detail above, the present invention is not limited to the above-described embodiments. For example, in the present embodiment, for the light projecting members D16b, E18b, E20b, F18b, G18b, and G20b, the side surfaces s1, s2, and s3 of the electronic component 1 including the outer surface of the element body 2 and the outer surfaces of the external electrodes 3 and 4 are used. , S4, it is possible to illuminate from a large angle in the order of blue light, green light, and red light, but instead of this, red light, green light, blue light It is good also as a structure which can be illuminated from a big angle in order of light. Specifically, a plurality of blue light-emitting elements LE3 are disposed on the inner wall surface of the side wall portion D16d so as to surround the imaging axis DL over the entire circumference, and the inner wall surface of the side wall portion D16d has the opening D16e side and the base portion D16f. A plurality of red light emitting elements LE1 are disposed on the inner wall surface so as to surround the imaging axis DL over the entire circumference, and a green light emitting element is disposed between the plurality of red light emitting elements LE1 and the plurality of blue light emitting elements LE3 on the inner wall surface of the side wall portion D16d. A plurality of LEs 2 are arranged so as to surround the imaging axis DL over the entire circumference. Further, a plurality of blue light emitting elements LE3 are arranged on the inner wall front ends E18f, E20f side of the side wall portions E18c, E20c so as to surround the imaging axis EL over substantially the entire circumference, and a base end E18e of the inner wall surface of the side wall portions E18c, E20c. , E20e side and the inner wall surfaces of the bases E18d and E20d, a plurality of red light emitting elements LE1 are arranged so as to surround the imaging axis EL over substantially the entire circumference, and a plurality of red light emitting elements LE1 and a plurality of red light emitting elements LE1 on the inner wall surfaces of the side wall parts E18c and E20c Between the blue light emitting element LE3, a plurality of green light emitting elements LE2 are arranged so as to surround the imaging axis EL over substantially the entire circumference. Further, a plurality of blue light emitting elements LE3 are disposed on the inner wall surface of the side wall portion F18d so as to surround the imaging axis FL over the entire circumference, and on the opening F18e side of the inner wall surface of the side wall portion F18d and on the inner wall surface of the base portion F18f. A plurality of red light emitting elements LE1 are disposed so as to surround the imaging axis FL over the entire circumference, and the green light emitting element LE2 captures an image between the plurality of red light emitting elements LE1 and the plurality of blue light emitting elements LE3 on the inner wall surface of the side wall portion F18d. A plurality of axes are arranged so as to surround the entire axis line FL. A plurality of blue light-emitting elements LE3 are arranged on the front end G18f, G20f side of the inner wall surfaces of the side wall portions G18c, G20c so as to surround the imaging axis GL over substantially the entire circumference, and base ends G18e, G20e of the inner wall surfaces of the side wall portions G18c, G20c. A plurality of red light emitting elements LE1 are disposed on the inner wall surfaces of the side and base portions G18d and G20d so as to surround the imaging axis GL over substantially the entire circumference, and a plurality of red light emitting elements LE1 and a plurality of blue light emitting elements on the inner wall surfaces of the side wall portions G18c and G20c. Between the element LE3, a plurality of green light emitting elements LE2 are arranged so as to surround the imaging axis GL over substantially the entire circumference. As a result, for example, the ferrite body in which the element body 2 is made of ferrite and the contrast difference between the outer surface of the element body 2 and the outer surfaces of the external electrodes 3 and 4 becomes large has a suitable illumination angle and inspection accuracy. Can be improved.

  In the present embodiment, the side surface s3 of the electronic component 1 is in contact with the surface of the transparent table T, and the side surface s4 of the electronic component 1 is directed toward the central axis A of the transparent table T (the width direction of the electronic component 1 is The electronic component 1 was supplied to the transparent table T, so that the electronic component 1 was supplied to the transparent table T (along the radial direction of the transparent table T and the height direction of the electronic component 1 was perpendicular to the surface of the transparent table T). The posture of the electronic component 1 may be other than this. For example, the side surface s3 of the electronic component 1 contacts the surface of the transparent table T, and the side surface s6 of the electronic component 1 faces the central axis A side of the transparent table T (the width direction of the electronic component 1 is the radial direction of the transparent table T). And the length direction of the electronic component 1 may be along the perpendicular of the surface of the transparent table T), and the side surface s4 of the electronic component 1 abuts on the surface of the transparent table T and the side surface s1 of the electronic component 1 is transparent. It may be directed toward the center axis A of the table T (the height direction of the electronic component 1 is along the radial direction of the transparent table T and the width direction of the electronic component 1 is along the perpendicular of the surface of the transparent table T), The side surface s4 of the electronic component 1 abuts on the surface of the transparent table T, and the side surface s6 of the electronic component 1 faces the central axis A side of the transparent table T (the length direction of the electronic component 1 is the radial direction of the transparent table T). Along with the electronic part 1 and the side surface s6 of the electronic component 1 abuts on the surface of the transparent table T, and the side surface s1 of the electronic component 1 is the central axis A of the transparent table T. (The height direction of the electronic component 1 is along the radial direction of the transparent table T and the length direction of the electronic component 1 is along the perpendicular of the surface of the transparent table T). s6 contacts the surface of the transparent table T and the side surface s4 of the electronic component 1 faces the central axis A side of the transparent table T (the width direction of the electronic component 1 is along the radial direction of the transparent table T and the electronic component 1 The length direction may be along the perpendicular of the surface of the transparent table T).

  In the present embodiment, the first imaging unit D10, the second imaging unit E10, the third imaging unit F10, and the fourth imaging unit are arranged in the vicinity of the periphery of the transparent table T along the rotation direction (arrow R direction) of the transparent table T. The imaging unit G10, the fifth imaging unit H10, and the sixth imaging unit I10 are arranged in this order. For example, as shown in FIG. The fifth imaging unit H10, the sixth imaging unit I10, the fourth imaging unit G10, the first imaging unit D10, the second imaging unit E10, and the third imaging unit F10 are arranged in this order along the (R direction). Good. Moreover, you may arrange | position each imaging unit in the order shown except FIG.1 and FIG.17.

  The surface of the transparent table T may be covered with a transparent conductive film. If it does in this way, since it will become easy to move an electric charge in an electrically conductive film, it will become possible to suppress the charge of the surface in which the electronic component 1 is mounted. In addition, it is preferable to ground (ground) the transparent conductive film that covers the surface of the transparent table T because the charge can be released to the outside.

  Further, in the present embodiment, when imaging the side surfaces s1 to s6 of the electronic component 1, the control unit 12 uses strobe light for each illumination D16, E18, E20, F16, G18, G20, H18, H20, I18, I20. Although illumination is performed, each illumination D16, E18, E20, F16, G18, G20, H18, H20, I18, and I20 may be constantly lit. However, since a larger amount of light can be instantaneously obtained by using the strobe light, the side surfaces s1 to s6 of the electronic component 1 can be illuminated uniformly.

DESCRIPTION OF SYMBOLS 1 ... Electronic component (inspection object), 10 ... Appearance inspection apparatus, D10 ... 1st imaging unit (1st imaging means), D12 ... Camera (1st imaging part), D16 ... Domed illumination (1st illumination part) , D16a: a bowl-shaped member (first holding member), D16b: a light projecting member (first light projecting member), D16c: an aperture (one aperture), D16e: an aperture (other aperture), E10: a second imaging unit (First imaging means), E12 ... camera (first imaging unit), E18, E20 ... semi-cylindrical illumination (first illumination unit), E18a, E20a ... semi-cylindrical member (first holding member), E18b, E20b ... light projecting member (first light projecting member), F10 ... third imaging unit (first imaging means), F12 ... camera (first imaging unit), F18 ... dome-shaped illumination (first illumination unit), F18a ... 椀Shaped member (first holding member), F18b ... light projecting member (first projecting member) Members), F18c ... opening (one opening), F18e ... opening (the other opening), G10 ... fourth imaging unit (first image pickup means), G12 ... camera (the
1 imaging unit), G18, G20 ... semi-cylindrical illumination (first illumination unit), G18a, G20a ... semi-cylindrical member (first holding member), G18b, G20b ... light projecting member (first light projecting member), H10 ... fifth imaging unit (second imaging means), H12 ... camera (second imaging unit), H18, H20 ... semi-cylindrical illumination (second illumination unit), H18a, H20a ... semi-cylindrical member (second holding) Members), H18b, H20b ... light projecting member (second light projecting member), I10 ... sixth imaging unit (second imaging means), I12 ... camera (second imaging unit), I18, I20 ... semi-cylindrical illumination ( (Second illumination section), I18a, I20a ... semi-cylindrical member (second holding member), I18b, I20b ... light projecting member (second light projecting member), LE1 ... red light emitting element, LE2 ... green light emitting element, LE3 ... Blue light emitting element, LE4 ... white light emitting element, T ... transparent table (Inspection object holding means), s1... Side surface (first side surface), s2... Side surface (second side surface), s3... Side surface (third side surface), s4. Side surface), s6... Side surface (sixth side surface).

Claims (3)

The substantially rectangular parallelepiped element body is formed by covering the mutually facing surfaces with external electrodes, and has a first side surface, a second side surface, a third side surface, a fourth side surface, a fifth side surface, and a sixth side surface, The first side surface and the third side surface connect the second side surface and the fourth side surface and connect the fifth side surface and the sixth side surface and face each other. The fourth side surface connects the first side surface and the third side surface and connects the fifth side surface and the sixth side surface and faces each other, and the fifth side surface and the sixth side surface are An outer surface of the external electrode for connecting the first side surface and the third side surface, connecting the second side surface and the fourth side surface, and performing an appearance inspection of inspection objects facing each other. An appearance inspection device,
Inspection object holding means for holding the inspection object;
First imaging means for imaging at least one of the first side surface, the second side surface, the third side surface, and the fourth side surface;
Second imaging means for imaging at least one of the fifth side and the sixth side;
The first imaging means includes
A first imaging unit for imaging the one side surface to be imaged;
A first illumination unit that illuminates the imaging target surface of the first imaging unit,
The first illumination unit includes:
A pair of openings is provided, and includes an inner wall surface surrounding the imaging axis of the first imaging unit and being a concave curved surface that is recessed from one of the pair of openings toward the other opening. A first holding member configured by integrally or integrally forming the inner wall surface around the imaging axis of the first imaging unit;
A first light projecting member that is held on the inner wall surface of the first holding member so as to surround the imaging axis of the first imaging unit, and irradiates light toward the one opening side of the first holding member. ,
The inspection object which is closer to the inspection object positioned on the inspection object holding means than the first imaging unit and the one opening of the first holding member is positioned on the inspection object holding means Arranged to face the imaging target surface of the first imaging unit in the object,
The second imaging means includes
A second imaging unit for imaging the one side surface to be imaged;
A second illumination unit that illuminates the imaging target surface of the second imaging unit,
The second illumination unit includes:
A pair of openings is provided, and includes an inner wall surface surrounding the imaging axis of the second imaging unit, and having a concave curved surface that is recessed from one of the pair of openings toward the other opening. A second holding member configured by integrally or integrally dividing the inner wall surface around the imaging axis of the second imaging unit;
A second light projecting member that is held on the inner wall surface of the second holding member so as to surround the imaging axis of the second imaging unit, and irradiates light toward the one opening side of the second holding member. ,
The inspection object which is closer to the inspection object positioned on the inspection object holding means than the second imaging unit and the one opening of the second holding member is positioned on the inspection object holding means Arranged to face the imaging target surface of the second imaging unit in the object,
The first imaging unit and the second imaging unit spectrally divide incident light and image each color,
The first light projecting member includes a red light emitting element, a green light emitting element, and a blue light emitting element,
The visual inspection apparatus, wherein the second light projecting member is composed of a white light emitting element. The first light projecting member is:
A plurality of the red light emitting elements are disposed on the one opening side of the first holding member so as to surround the imaging axis of the first imaging unit,
A plurality of the blue light emitting elements are disposed on the other opening side of the first holding member so as to surround the imaging axis of the first imaging unit,
2. The plurality of green light emitting elements are arranged between a plurality of red light emitting elements and a plurality of blue light emitting elements so as to surround an imaging axis of the first imaging unit. Appearance inspection apparatus as described. The first light projecting member is:
A plurality of the blue light emitting elements are disposed on the one opening side of the first holding member so as to surround the imaging axis of the first imaging unit,
A plurality of the red light emitting elements are disposed on the other opening side of the first holding member so as to surround the imaging axis of the first imaging unit,
2. The plurality of green light emitting elements are arranged between a plurality of red light emitting elements and a plurality of blue light emitting elements so as to surround an imaging axis of the first imaging unit. Appearance inspection apparatus as described.