Deprecated: The each() function is deprecated. This message will be suppressed on further calls in /home/zhenxiangba/zhenxiangba.com/public_html/phproxy-improved-master/index.php on line 456
JP4870830B2 - Double-sided transparent conductive film excellent in rust prevention and production method thereof - Google Patents
[go: Go Back, main page]

JP4870830B2 - Double-sided transparent conductive film excellent in rust prevention and production method thereof - Google Patents

Double-sided transparent conductive film excellent in rust prevention and production method thereof Download PDF

Info

Publication number
JP4870830B2
JP4870830B2 JP2010141329A JP2010141329A JP4870830B2 JP 4870830 B2 JP4870830 B2 JP 4870830B2 JP 2010141329 A JP2010141329 A JP 2010141329A JP 2010141329 A JP2010141329 A JP 2010141329A JP 4870830 B2 JP4870830 B2 JP 4870830B2
Authority
JP
Japan
Prior art keywords
conductive film
transparent conductive
light
double
sides
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
JP2010141329A
Other languages
Japanese (ja)
Other versions
JP2012008621A (en
Inventor
孝夫 橋本
博誉 滋野
孝明 寺脇
和臣 寺谷
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nissha Printing Co Ltd
Original Assignee
Nissha Printing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to JP2010141329A priority Critical patent/JP4870830B2/en
Application filed by Nissha Printing Co Ltd filed Critical Nissha Printing Co Ltd
Priority to US13/635,241 priority patent/US8723046B2/en
Priority to CN201180030695.2A priority patent/CN102947781B/en
Priority to EP11798105.0A priority patent/EP2587346B1/en
Priority to PCT/JP2011/064086 priority patent/WO2011162221A1/en
Priority to KR1020127033079A priority patent/KR101307296B1/en
Priority to TW100121590A priority patent/TWI425407B/en
Publication of JP2012008621A publication Critical patent/JP2012008621A/en
Application granted granted Critical
Publication of JP4870830B2 publication Critical patent/JP4870830B2/en
Priority to US14/243,849 priority patent/US9023592B2/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Description

本発明は、携帯電話やPDA、小型PCなどに使われる静電容量式タッチセンサーなどに適用できる両面透明導電膜シートに関するものであり、とくに防錆性に優れていることを特徴とする。   The present invention relates to a double-sided transparent conductive film sheet that can be applied to a capacitive touch sensor used in a mobile phone, a PDA, a small PC, etc., and is particularly characterized by excellent rust prevention.

従来、透明絶縁材より成る基板の表裏両面に透明電極パターンを形成することができる透明電極基板の製造方法の発明として特許文献1があった。上記特許文献1の発明は、両面に透明電極の材料を塗布した透明絶縁材よりなる基板を複数枚積層し、最上層の基板の一面側からレーザー光線を照射して、各基板の両面に塗布された上記透明電極材料を同時に除去すると共に、レーザー光線の照射位置を所定のパターンに沿って移動させることにより、各基板の両面に透明電極を同時に形成することを特徴とする発明である。   Conventionally, there has been Patent Document 1 as an invention of a manufacturing method of a transparent electrode substrate capable of forming a transparent electrode pattern on both front and back surfaces of a substrate made of a transparent insulating material. In the invention of Patent Document 1, a plurality of substrates made of a transparent insulating material coated with a transparent electrode material are laminated on both sides, and a laser beam is irradiated from one side of the uppermost substrate to be applied to both sides of each substrate. Further, the transparent electrode material is simultaneously removed, and at the same time, the transparent electrode is formed on both surfaces of each substrate by moving the irradiation position of the laser beam along a predetermined pattern.

しかし、特許文献1の発明は、同一パターンの透明電極を両面に形成する場合に限られる問題があった。従って、静電容量センサーのパターンのように、表裏のパターンが異なりしかも両者の位置合わせが必要な場合には適用ができない問題があった。   However, the invention of Patent Document 1 has a problem that is limited to the case where transparent electrodes having the same pattern are formed on both sides. Therefore, there is a problem that it cannot be applied when the patterns of the front and back sides are different and the positions of the two need to be aligned like the pattern of the capacitance sensor.

また、レーザー光線の照射位置を所定のパターンに沿って移動させるため、パターン化に時間がかかり生産性が低い問題もあった。   In addition, since the irradiation position of the laser beam is moved along a predetermined pattern, there is a problem that patterning takes time and productivity is low.

そこで、かかる問題を解消するために、基体シートの両面に、各々、透明導電膜、遮光性導電膜、第一レジスト層を順次形成した後、両面同時に第一レジスト層を露光し、現像してパターン化した後、露出した遮光性導電膜および透明導電膜を両面同時にエッチングすることにより、中央窓部に電極パターン、外枠縁部に細線引き回し回路パターンを得、次いでパターン化した第一レジスト層を剥離した後、両面同時に前記細線引き回し回路パターン上に第二レジスト層を被覆形成し、当該第二レジスト層が形成されていない遮光性導電膜のみを両面同時にエッチングすることにより、中央窓部に透明導電膜のみからなる電極パターンを露出形成する構成の両面透明導電膜シートの製造方法が、本出願人において先に提案されている(先願未公知のため公知文献を示すことはできない)。   Therefore, in order to solve this problem, after forming a transparent conductive film, a light-shielding conductive film, and a first resist layer in sequence on both sides of the base sheet, the first resist layer is exposed and developed simultaneously on both sides. After patterning, the exposed light-shielding conductive film and transparent conductive film are simultaneously etched on both sides to obtain an electrode pattern at the center window and a thin circuit around the outer frame edge to obtain a circuit pattern, and then the patterned first resist layer After peeling the film, a thin film is drawn simultaneously on both sides, a second resist layer is formed on the circuit pattern, and only the light-shielding conductive film on which the second resist layer is not formed is etched on both sides simultaneously. A method for manufacturing a double-sided transparent conductive film sheet having a configuration in which an electrode pattern composed only of a transparent conductive film is exposed and formed has been previously proposed by the present applicant (not previously filed). It can not show the known literature for knowledge).

特開平7−320637号公報JP 7-320637 A

しかし、先に提案した発明は、遮光性導電膜および透明導電膜を同時に効率よくエッチングする必要があるために、かなり濃度の高い塩化第2鉄水溶液等を使用する必要があり、細線引き回し回路パターン上に被覆形成された第二レジスト層がエッチング液で多少劣化したり膨潤したりして、長期間に渡る細線引き回し回路パターンの保護には不十分な場合もある。そのため、エッチング後の水洗洗浄が不十分であると、高温高湿などの環境試験下において引き回し回路の腐食が進み、電気特性が劣化する問題があった。従って、静電容量式タッチセンサーなどに適用される両面透明導電膜シートのように引き回し回路が細線でかつ長期間に渡って低抵抗を維持しなければならないという用途には、その状態のままでは適用できない問題があった。   However, since the previously proposed invention requires efficient etching of the light-shielding conductive film and the transparent conductive film simultaneously, it is necessary to use a ferric chloride aqueous solution or the like having a considerably high concentration. In some cases, the second resist layer coated thereon is slightly deteriorated or swelled by the etching solution, and is insufficient for protecting the thin line drawing circuit pattern over a long period of time. Therefore, if washing with water after etching is insufficient, there is a problem that the circuit is corroded under an environmental test such as high temperature and high humidity and the electrical characteristics are deteriorated. Therefore, for applications where the routing circuit must be thin and maintain low resistance over a long period of time, such as a double-sided transparent conductive film sheet applied to a capacitive touch sensor, etc. There was a problem that could not be applied.

したがって、本発明の目的は、前記課題を解決することにあって、防錆性に優れた両面透明導電膜シートとその製造方法を提供することにある。   Accordingly, an object of the present invention is to solve the above-mentioned problems, and to provide a double-sided transparent conductive film sheet excellent in rust prevention and a method for producing the same.

そこで、本発明者らは、前記課題を解決するために、以下のような発明をした。すなわち、本発明の防錆性に優れた両面透明導電膜シートは、透明な基体シートの両面に、中央窓部に透明導電膜の電極パターンが形成され、外枠縁部に当該電極パターンのための細線引き回し回路パターンが形成され、当該両面の電極パターンおよび細線引き回し回路パターンが異なる両面透明導電膜シートであって、片面又は両面において少なくとも細線引き回し回路パターン上に透光性の防錆用塗膜層が端子部は除いて被覆形成されている。   Therefore, the present inventors have made the following invention in order to solve the above problems. That is, the double-sided transparent conductive film having excellent rust prevention property of the present invention is formed by forming the electrode pattern of the transparent conductive film in the central window on both sides of the transparent base sheet and the electrode pattern on the outer frame edge. A thin-lined circuit pattern is formed on the double-sided transparent conductive film sheet having different electrode patterns and thin-lined circuit patterns on both sides, and a translucent anticorrosive coating film on at least the fine-lined circuit pattern on one or both sides. The layer is coated except for the terminal portion.

また、本発明の防錆性に優れた両面透明導電膜シートは、前記細線引き回し回路パターンが透明導電膜および遮光性導電膜が順次積層されているように構成してもよい。   Moreover, you may comprise the double-sided transparent conductive film excellent in the antirust property of this invention so that the said thin wire | line drawing circuit pattern may laminate | stack a transparent conductive film and a light-shielding conductive film sequentially.

また、本発明の防錆性に優れた両面透明導電膜シートは、前記電極パターン上にも前記透光性の防錆用塗膜層が被覆形成されているように構成してもよい。   Moreover, you may comprise the double-sided transparent conductive film sheet excellent in the antirust property of this invention so that the said translucent anticorrosion coating film layer may be coat-coated also on the said electrode pattern.

また、本発明の防錆性に優れた両面透明導電膜シートは、前記透光性の防錆用塗膜層が、熱硬化性樹脂又は光硬化性樹脂からなるように構成してもよい。   Moreover, you may comprise the double-sided transparent conductive film sheet excellent in the antirust property of this invention so that the said translucent anticorrosion coating film layer may consist of a thermosetting resin or a photocurable resin.

また、本発明の防錆性に優れた両面透明導電膜シートは、前記基体シートが二層構造からなるように構成してもよい。   Moreover, you may comprise the double-sided transparent conductive film sheet excellent in the antirust property of this invention so that the said base sheet may consist of a two-layer structure.

また、本発明の防錆性に優れた両面透明導電膜シートは、さらに前記細線引き回し回路パターンの端子部に接続されるICチップが搭載された外部回路を備えることにより、静電容量式タッチセンサーとして作動するように構成してもよい。   In addition, the double-sided transparent conductive film having excellent rust prevention property according to the present invention is further provided with an external circuit on which an IC chip connected to the terminal portion of the thin line drawing circuit pattern is mounted, thereby providing a capacitive touch sensor. It may be configured to operate as:

また、本発明の防錆性に優れた両面透明導電膜シートの製造方法は、透明な基体シートの両面に、各々、透明導電膜、遮光性導電膜、第一レジスト層を順次形成し、次いで両面とも第一レジスト層を露光し、現像してパターン化した後、露出した遮光性導電膜および透明導電膜を両面同時にエッチングすることにより、中央窓部に透明導電膜および遮光性導電膜の積層物からなる電極パターンを形成するとともに、外枠縁部に透明導電膜および遮光性導電膜の積層物からなる細線引き回し回路パターンを形成し、次いで第一レジスト層を剥離した後、両面とも前記細線引き回し回路パターン上に第二レジスト層を被覆形成し、当該第二レジスト層が形成されていない遮光性導電膜のみを両面同時にエッチングすることにより、中央窓部に透明導電膜の回路パターンを露出形成し、次いで第二レジスト層を剥離した後、片面又は両面において少なくとも細線引き回し回路パターン上に透光性の防錆用塗膜層を端子部は除いて被覆形成する。   Moreover, the method for producing a double-sided transparent conductive film having excellent rust prevention properties according to the present invention comprises forming a transparent conductive film, a light-shielding conductive film, and a first resist layer on both sides of the transparent base sheet, respectively, The first resist layer is exposed on both sides, developed and patterned, and then the exposed light-shielding conductive film and transparent conductive film are simultaneously etched on both sides, thereby laminating the transparent conductive film and light-shielding conductive film on the central window. In addition to forming an electrode pattern made of a material, and forming a thin wire routing circuit pattern made of a laminate of a transparent conductive film and a light-shielding conductive film on the outer frame edge, and then peeling off the first resist layer, Transparent coating on the central window by coating the second resist layer on the routing circuit pattern and etching both sides of the light-shielding conductive film without the second resist layer simultaneously. After exposing the circuit pattern of the electromembrane and then peeling off the second resist layer, at least fine lines are drawn on one side or both sides, and a light-transmitting anticorrosive coating layer is formed on the circuit pattern except for the terminal portion. .

また、本発明の防錆性に優れた両面透明導電膜シートの製造方法は、二枚の透明な基体シート上にそれぞれ透明導電膜、遮光性導電膜、第一レジスト層を順次形成し、当該基体シートの前記各層を形成していない面どうしを対向して積層し、次いで両面とも第一レジスト層を露光し、現像してパターン化した後、露出した遮光性導電膜および透明導電膜を両面同時にエッチングすることにより、中央窓部に透明導電膜および遮光性導電膜の積層物からなる電極パターンを形成するとともに、外枠縁部に透明導電膜および遮光性導電膜の積層物からなる細線引き回し回路パターンを形成し、次いで第一レジスト層を剥離した後、両面とも前記細線引き回し回路パターン上に第二レジスト層を被覆形成し、当該第二レジスト層が形成されていない遮光性導電膜のみを両面同時にエッチングすることにより、中央窓部に透明導電膜の回路パターンを露出形成し、次いで第二レジスト層を剥離した後、片面又は両面において少なくとも細線引き回し回路パターン上に透光性の防錆用塗膜層を端子部は除いて被覆形成するように構成してもよい。
Further, the method for producing a double-sided transparent conductive film having excellent rust prevention properties according to the present invention includes forming a transparent conductive film, a light-shielding conductive film, and a first resist layer on two transparent base sheets, respectively, The surfaces of the base sheet on which the respective layers are not formed are laminated facing each other , and then the first resist layer is exposed on both sides, developed and patterned, and then the exposed light-shielding conductive film and transparent conductive film are coated on both sides. By simultaneously etching, an electrode pattern made of a laminate of a transparent conductive film and a light-shielding conductive film is formed in the central window portion, and a thin line drawing made of a laminate of a transparent conductive film and a light-shielding conductive film is formed on the outer frame edge. After the circuit pattern is formed and then the first resist layer is peeled off, the thin film is drawn on both sides, and the second resist layer is formed on the circuit pattern, and the second resist layer is not formed. By etching only the photoconductive film on both sides at the same time, the circuit pattern of the transparent conductive film is exposed and formed in the central window, and then the second resist layer is peeled off. You may comprise so that coating may be formed except a terminal part for the coating layer for optical rust prevention.

本発明は、上記したように基体シートの両面に、中央窓部に透明導電膜の電極パターンが形成され、外枠縁部に当該電極パターンのための細線引き回し回路パターンが形成され、片面又は両面において少なくとも細線引き回し回路パターン上に透光性の防錆用塗膜層が端子部は除いて被覆形成されているような両面透明導電膜シートを提供するものである。したがって、非常に防錆性に優れているという効果がある。   In the present invention, as described above, the electrode pattern of the transparent conductive film is formed in the central window portion on both sides of the base sheet, and the thin line drawing circuit pattern for the electrode pattern is formed on the outer frame edge portion. The double-sided transparent conductive film sheet in which a light-transmitting rust-preventive coating layer is formed on the circuit pattern at least except for the terminal portion is provided on the circuit pattern. Therefore, there exists an effect that it is excellent in rust prevention property.

本発明に係る両面透明導電膜シートの一実施例を示す模式断面図である。It is a schematic cross section which shows one Example of the double-sided transparent conductive film sheet which concerns on this invention. 図1の両面透明導電膜シートを製造する工程を示す模式図である。It is a schematic diagram which shows the process of manufacturing the double-sided transparent conductive film sheet of FIG. 図1の両面透明導電膜シートを製造する工程を示す模式図である。It is a schematic diagram which shows the process of manufacturing the double-sided transparent conductive film sheet of FIG. 図1の両面透明導電膜シートを製造する工程を示す模式図である。It is a schematic diagram which shows the process of manufacturing the double-sided transparent conductive film sheet of FIG. 図1の両面透明導電膜シートを製造する工程を示す模式図である。It is a schematic diagram which shows the process of manufacturing the double-sided transparent conductive film sheet of FIG. 図1の両面透明導電膜シートを製造する工程を示す模式図である。It is a schematic diagram which shows the process of manufacturing the double-sided transparent conductive film sheet of FIG. 図1の両面透明導電膜シートを製造する工程を示す模式図である。It is a schematic diagram which shows the process of manufacturing the double-sided transparent conductive film sheet of FIG. 図1の両面透明導電膜シートを製造する工程を示す模式図である。It is a schematic diagram which shows the process of manufacturing the double-sided transparent conductive film sheet of FIG. 本発明に係る両面透明導電膜シートの別の一実施例を示す模式断面図である。It is a schematic cross section which shows another Example of the double-sided transparent conductive film sheet which concerns on this invention.

以下、本発明の最良の実施の形態について、図面を参照しながら説明する。   The best mode for carrying out the present invention will be described below with reference to the drawings.

図1に示す防錆性に優れた両面透明導電膜シート5は、透明な基体シート7の両面に、中央窓部24に透明導電膜3の電極パターン9が形成され、外枠縁部22に透明導電膜3および遮光性導電膜1が順次積層された細線引き回し回路パターン10が形成され、当該両面の電極パターン9および細線引き回し回路パターン10が異なる両面透明導電膜シートであって、両面において電極パターン9および細線引き回し回路パターン10上に透光性の防錆用塗膜層30が端子部は除いて被覆形成されている。   The double-sided transparent conductive film 5 having excellent rust prevention properties shown in FIG. 1 has electrode patterns 9 of the transparent conductive film 3 formed on the central window 24 on both sides of the transparent base sheet 7, and the outer frame edge 22. A thin-line drawn circuit pattern 10 in which the transparent conductive film 3 and the light-shielding conductive film 1 are sequentially laminated is formed, and the double-sided transparent conductive film sheet having different electrode patterns 9 and thin-line drawn circuit patterns 10 on both sides, A light-transmitting rust-preventing coating layer 30 is formed on the pattern 9 and the thin wire drawing circuit pattern 10 except for the terminal portions.

ここで、両面の電極パターン9および細線引き回し回路パターン10が異なるとは、静電容量式タッチセンサーの電極パターンの形状および配置が以下のようになるためである。すなわち、一方の面にはX電極x1,x2,x3,...と、他方の面にはY電極y1,y2,y3,...と前記電極パターン9が設けられている。X電極x1,x2,x3,...は平行に配され、その長手方向に、対向する2つの角が並ぶように多数の方形が配された構成をなしている。また、Y電極y1,y2,y3,...も同様に、平行に配され、その長手方向に、対向する2つの角が並ぶように多数の方形が配された構成をなしている。これにより、中央窓部24には、方形が僅かな隙間を残して入力面を埋めつくすように配される。   Here, the electrode patterns 9 on both sides and the thin line drawing circuit pattern 10 are different because the shape and arrangement of the electrode patterns of the capacitive touch sensor are as follows. In other words, X electrodes x1, x2, x3,... Are provided on one surface, and Y electrodes y1, y2, y3,. The X electrodes x1, x2, x3,... Are arranged in parallel, and in the longitudinal direction thereof, a large number of squares are arranged so that two opposing corners are arranged. Similarly, the Y electrodes y1, y2, y3,... Are arranged in parallel, and in the longitudinal direction thereof, a large number of squares are arranged so that two opposing corners are arranged. As a result, the square is arranged in the central window portion 24 so as to fill the input surface with a slight gap.

このような透明導電膜3の回路パターンおよび細線引き回し回路パターン10を両面に形成する両面透明導電膜シート5の製造方法は、まず基体シート7の表裏両面に、透明導電膜3、遮光性導電膜1、第一レジスト層16を順次全面形成した後、表裏それぞれ所望のパターンのマスク12を載せ、露光・現像して第一レジスト層16をパターン形成する(図2(a)参照)。あるいは厚みの薄い二枚の基体シート7を用いて、それぞれの片面に透明導電膜3、遮光性導電膜1、第一レジスト層16を順次全面形成した後、これらの二枚の基体シート7が対向するように積層し、当該積層された基体シートの表裏それぞれ所望のパターンのマスク12を載せ、露光・現像して第一レジスト層16をパターン形成した両面透明導電膜シート5としてもよい(図2(b)参照)。その際、遮光性導電膜1が反対側の面の露光光線14を遮断するので、両面で異なるマスクパターンで露光しても反対側の第一レジスト層16のパターンに影響を及ぼすこともない。なお、基体シート7の積層手段としては熱ラミネートや接着剤層を介したドライラミネートなどが挙げられる。   The manufacturing method of the double-sided transparent conductive film sheet 5 that forms the circuit pattern of the transparent conductive film 3 and the thin line drawing circuit pattern 10 on both sides is as follows. First, the transparent conductive film 3 and the light-shielding conductive film are formed on both the front and back sides of the base sheet 7. 1. After the first resist layer 16 is sequentially formed on the entire surface, a mask 12 having a desired pattern is placed on each of the front and back surfaces, and exposure and development are performed to form the first resist layer 16 (see FIG. 2A). Alternatively, using two thin base sheets 7, the transparent conductive film 3, the light-shielding conductive film 1, and the first resist layer 16 are sequentially formed on one side of each side, and then the two base sheets 7 are formed. It is good also as the double-sided transparent conductive film sheet 5 which laminated | stacked so that it might oppose, put the mask 12 of the desired pattern on each of the front and back of the laminated | stacked base sheet, and exposed and developed and patterned the 1st resist layer 16 (FIG. 2 (b)). At this time, since the light-shielding conductive film 1 blocks the exposure light beam 14 on the opposite side, even if exposure is performed with different mask patterns on both sides, the pattern of the first resist layer 16 on the opposite side is not affected. In addition, as a lamination | stacking means of the base sheet 7, a thermal lamination, the dry lamination via an adhesive bond layer, etc. are mentioned.

次いで、塩化第二鉄などのエッチング液で透明導電膜3および遮光性導電膜1を同時にエッチングし、細線パターンを形成する(図2(c)参照)。次いで、レジスト剥離液でもって第一レジスト層16を剥離し、遮光性導電膜1を露出させた後、露出した遮光性導電膜1のうち外枠縁部22の部分のみに第二レジスト層18を形成する(図2(d)参照)。次いで、酸性化した過酸化水素などの特殊エッチング液でエッチングすると、第二レジスト層18が形成されている外枠縁部22はそのまま残り、第二レジスト層18が形成されず遮光性導電膜1が露出されたままの中央窓部24は遮光性導電膜1がエッチング除去され、その下にある透明導電膜3が露出して電極パターン9となる(図2(e)参照)。中央窓部24は両面に透明の導電膜が形成されたディスプレイ部となり、外枠縁部22に形成された遮光性導電膜1およびその下に同一のパターンで形成された透明導電膜3は細線引き回し回路パターン10となる。   Next, the transparent conductive film 3 and the light-shielding conductive film 1 are simultaneously etched with an etchant such as ferric chloride to form a fine line pattern (see FIG. 2C). Next, the first resist layer 16 is stripped with a resist stripper to expose the light-shielding conductive film 1, and then the second resist layer 18 is formed only on the outer frame edge portion 22 of the exposed light-shielding conductive film 1. (See FIG. 2D). Next, when etched with a special etching solution such as acidified hydrogen peroxide, the outer frame edge 22 where the second resist layer 18 is formed remains as it is, and the second resist layer 18 is not formed and the light-shielding conductive film 1. The light-shielding conductive film 1 is removed by etching in the central window portion 24 where is exposed, and the transparent conductive film 3 underneath is exposed to form an electrode pattern 9 (see FIG. 2E). The central window portion 24 becomes a display portion in which a transparent conductive film is formed on both sides, and the light-shielding conductive film 1 formed on the outer frame edge portion 22 and the transparent conductive film 3 formed in the same pattern thereunder are thin lines. A routing circuit pattern 10 is obtained.

ただし、この状態では中央窓部に透明導電膜3の電極パターン9が露出しており、第二レジスト層18も特殊エッチング液で多少劣化したり膨潤したりして、長期間に渡る透明導電膜3および遮光性導電膜1の保護には不十分な場合もある。しかも、細線引き回し回路パターン10の端子部も第二レジスト層18で覆われてしまっている。そこで、本発明では、第二レジスト層を剥離した後、電極パターン9および細線引き回し回路パターン10を透光性の防錆用塗膜層30で端子部を除き被覆し透明導電膜3および遮光性導電膜1のさらなる保護を図っている(図2(f)参照)。   However, in this state, the electrode pattern 9 of the transparent conductive film 3 is exposed in the central window portion, and the second resist layer 18 is also slightly degraded or swollen by the special etching solution, so that the transparent conductive film for a long period of time is obtained. 3 and the light-shielding conductive film 1 may be insufficient for protection. In addition, the terminal portions of the thin line drawing circuit pattern 10 are also covered with the second resist layer 18. Therefore, in the present invention, after peeling off the second resist layer, the electrode pattern 9 and the fine wire routing circuit pattern 10 are covered with a light-transmitting rust-preventive coating layer 30 except for the terminal portion, and the transparent conductive film 3 and the light-shielding property are covered. The conductive film 1 is further protected (see FIG. 2F).

そして、以上の方法により得られた防錆性に優れた両面透明導電膜シート5の両面に形成された細線引き回し回路パターン10の端子部をFPC(Flexible Printed Circuits)などを介してICチップが搭載された外部回路28に接続すれば、基体シート7を挟んで透明導電膜3が両面に形成された静電容量式タッチセンサーが製造される(図2(g)参照)。   Then, the IC chip is mounted on the terminal portions of the thin wire-drawn circuit pattern 10 formed on both surfaces of the double-sided transparent conductive film sheet 5 excellent in rust prevention obtained by the above method via FPC (Flexible Printed Circuits) or the like. When connected to the external circuit 28, a capacitive touch sensor in which the transparent conductive film 3 is formed on both sides of the base sheet 7 is manufactured (see FIG. 2G).

次に、上記両面透明導電膜シート5を形成する各層について詳細に説明する。まず、透明な基体シート7は厚みが30〜2000μm程度の透明なシートからなり、材質としてはポリエステル系樹脂、ポリスチレン系樹脂、オレフィン系樹脂、ポリブチレンテレフタレート系樹脂、ポリカーボネート系樹脂、アクリル系樹脂などのプラスチックフィルムのほか、各種ガラスなどが挙げられる。   Next, each layer which forms the said double-sided transparent conductive film sheet 5 is demonstrated in detail. First, the transparent substrate sheet 7 is made of a transparent sheet having a thickness of about 30 to 2000 μm, and the material is polyester resin, polystyrene resin, olefin resin, polybutylene terephthalate resin, polycarbonate resin, acrylic resin, etc. In addition to these plastic films, there are various types of glass.

遮光性導電膜1としては、導電率が高くかつ遮光性の良い単一の金属膜やそれらの合金または化合物などからなる層が挙げられ、真空蒸着法、スパッタリング法、イオンプレーティング法、鍍金法などで形成するとよい。そして、透明導電膜ではエッチングされないが自身はエッチングされるというエッチャントが存在することも必要である。その好ましい金属の例としては、アルミニウム、ニッケル、銅、銀などが挙げられる。とくに銅箔からなる厚み30〜1000nmの金属膜は、導電性、遮光性に優れ、透明導電膜はエッチングされない酸性雰囲気下での過酸化水素水で容易にエッチングできるほか、外部回路との接続のしやすさも併せ持つため非常に好ましい。   Examples of the light-shielding conductive film 1 include a single metal film having high conductivity and good light-shielding property, and a layer made of an alloy or a compound thereof, such as a vacuum deposition method, a sputtering method, an ion plating method, and a plating method. It is good to form by. It is also necessary that an etchant exists that is not etched by the transparent conductive film but is etched by itself. Examples of the preferable metal include aluminum, nickel, copper, silver and the like. In particular, a metal film made of copper foil with a thickness of 30 to 1000 nm is excellent in conductivity and light shielding properties, and the transparent conductive film can be easily etched with hydrogen peroxide in an acidic atmosphere that is not etched. It is very preferable because it has ease of use.

透明導電膜3は、インジウムスズ酸化物、亜鉛酸化物などの金属酸化物などからなる層が挙げられ、真空蒸着法、スパッタリング法、イオンプレーティング法、鍍金法などで形成するとよい。厚みは数十から数百nm程度で形成され、塩化第二鉄などの溶液では遮光性導電膜1とともに容易にエッチングされるが、酸性雰囲気下での過酸化水素水など遮光性導電膜1のエッチング液では容易にエッチングされないことが必要である。そして、80%以上の光線透過率、数mΩから数百Ωの表面抵抗値を示すことが好ましい。   The transparent conductive film 3 includes a layer made of a metal oxide such as indium tin oxide or zinc oxide, and may be formed by a vacuum evaporation method, a sputtering method, an ion plating method, a plating method, or the like. The film is formed with a thickness of about several tens to several hundreds of nanometers. A solution such as ferric chloride is easily etched together with the light-shielding conductive film 1, but the light-shielding conductive film 1 such as hydrogen peroxide solution in an acidic atmosphere is used. It must be not easily etched with an etchant. And it is preferable to show a light transmittance of 80% or more and a surface resistance value of several mΩ to several hundred Ω.

防錆用塗膜層30としては、エポキシ系、ウレタン系、アクリル系などの熱硬化性樹脂や、ウレタンアクリレート系、シアノアクリレート系などの紫外線硬化型樹脂が挙げられる。防錆用塗膜層30の形成方法は、グラビア、スクリーン、オフセットなどの汎用の印刷法のほか、各種コーターによる方法、塗装、ディッピングなどの方法により形成するとよい。また、本発明において、電極パターン9および細線引き回し回路パターン10を被覆形成するとは、電極パターン9および細線引き回し回路パターン10の上面のみではなく、側面をも覆うことを意味する。   Examples of the anticorrosive coating layer 30 include epoxy-based, urethane-based and acrylic-based thermosetting resins, and urethane acrylate-based and cyanoacrylate-based ultraviolet curable resins. The rust-proof coating layer 30 may be formed by a general printing method such as gravure, screen, or offset, as well as a method using various coaters, a method such as painting, and dipping. Further, in the present invention, covering the electrode pattern 9 and the fine line routing circuit pattern 10 means covering not only the upper surfaces of the electrode pattern 9 and the fine line routing circuit pattern 10 but also the side surfaces.

なお、図1に示す実施態様では電極パターン9および細線引き回し回路パターン10上に防錆用塗膜層30を設けているが、細線引き回し回路パターン10のみが前記防錆用塗膜層30で被覆形成されていてもよい(図3参照)。この場合でも、細線引き回し回路パターン10を長期間に亘って所定の電気抵抗範囲内に収めることができる。ただし、図1に示す実施態様の方が、透明電極も長期間に渡って所定の電気抵抗範囲内に収めることができるため、より好ましい。細線引き回し回路パターン10のみが前記防錆用塗膜層30で被覆形成されてするには、前段落の方法にて直接部分的に形成の後に硬化させてもよいし、全面的に形成した後に部分的に紫外線を照射して硬化させ、非硬化部分を除去するようにしてもよい。   In the embodiment shown in FIG. 1, the anticorrosion coating layer 30 is provided on the electrode pattern 9 and the fine wire routing circuit pattern 10, but only the thin wire routing circuit pattern 10 is covered with the anticorrosion coating layer 30. It may be formed (see FIG. 3). Even in this case, the thin line drawing circuit pattern 10 can be kept within a predetermined electric resistance range over a long period of time. However, the embodiment shown in FIG. 1 is more preferable because the transparent electrode can be within a predetermined electric resistance range for a long period of time. In order to coat only the thin wire routing circuit pattern 10 with the anticorrosive coating layer 30, it may be directly cured partially after formation by the method of the previous paragraph, or after it is formed entirely. It is also possible to cure by partially irradiating with ultraviolet rays and remove the non-cured portion.

また、図1に示す実施態様では両面透明導電膜シート5の両面において透光性の防錆用塗膜層30が形成されているが、両面透明導電膜シート5の片面においてのみ透光性の防錆用塗膜層30が形成されていてもよい。たとえば、両面透明導電膜シート5をガラス板や樹脂板に貼り付ける場合、両面透明導電膜シート5の貼付側の面はガラス板や樹脂板で保護されるので、貼付側の面とは反対面のみ防錆用塗膜層30で保護すれば済むからである。   Further, in the embodiment shown in FIG. 1, the translucent anticorrosive coating layer 30 is formed on both surfaces of the double-sided transparent conductive film sheet 5, but only on one side of the double-sided transparent conductive film sheet 5. An anticorrosive coating layer 30 may be formed. For example, in the case where the double-sided transparent conductive film sheet 5 is attached to a glass plate or a resin plate, the surface on the sticking side of the double-sided transparent conductive film sheet 5 is protected by the glass plate or the resin plate, so This is because only the anticorrosive coating layer 30 needs to be protected.

第一レジスト層16としては、レーザー光線やメタルハライドランプなどで露光しアルカリ溶液などで現像が可能なノボラック系樹脂やテトラメチルアンモニウムハイドロオキサイドなどのフォトレジスト材料で構成するのが好ましい。フォトレジスト材料による露光・現像により線幅の細い細線引き回し回路パターン10が確実性よく形成できるからである。また本発明では、前述したように遮光性導電膜1を形成するため、第一レジスト層16がフォトレジスト材料で構成されていると、表裏同時に露光・現像ができるため非常に生産性よく両面透明導電膜シート5を製造できるからである。第一レジスト層16の形成方法は、グラビア、スクリーン、オフセットなどの汎用の印刷法のほか、各種コーターによる方法、塗装、ディッピングなどの方法により形成するとよい。   The first resist layer 16 is preferably composed of a photoresist material such as a novolak resin or tetramethylammonium hydroxide that can be exposed with a laser beam or a metal halide lamp and developed with an alkaline solution. This is because the thin line drawing circuit pattern 10 having a narrow line width can be formed with high reliability by exposure and development with a photoresist material. In the present invention, as described above, the light-shielding conductive film 1 is formed. If the first resist layer 16 is made of a photoresist material, both the front and back surfaces can be exposed and developed simultaneously. This is because the conductive film sheet 5 can be manufactured. The first resist layer 16 may be formed by a general printing method such as gravure, screen, or offset, as well as by a method using various coaters, a method such as painting or dipping.

第二レジスト層18は、酸性雰囲気下での過酸化水素水など遮光性導電膜1のエッチング液に耐性をもつ材料であればとくに限定されない。形成方法や厚みは第一レジスト層18と同様で構わない。   The second resist layer 18 is not particularly limited as long as it is a material resistant to the etching solution of the light-shielding conductive film 1 such as hydrogen peroxide solution in an acidic atmosphere. The formation method and thickness may be the same as those of the first resist layer 18.

なお、フォトレジスト材料には感光した部分が溶解する「ポジ型」と、感光した部分が残る「ネガ型」がある。パターンの微細化にはポジ型の方が有利であるが、本発明では所望のパターンのレジストが得られるならばポジ型に限定されない。   Note that there are two types of photoresist materials: a “positive type” in which the exposed portion dissolves and a “negative type” in which the exposed portion remains. The positive type is more advantageous for pattern miniaturization, but the present invention is not limited to the positive type as long as a resist having a desired pattern can be obtained.

なお、図1に示す実施態様では細線引き回し回路パターン10を透明導電膜3および遮光性導電膜30が順次積層されている構成としているが、細線引き回し回路パターン10を透明導電膜3のみで形成してもよい。ただし、銅箔などの遮光性導電膜30を積層している方が、透明導電膜3の導電性を補うためにより好ましい。   In the embodiment shown in FIG. 1, the thin line drawing circuit pattern 10 is formed by sequentially laminating the transparent conductive film 3 and the light-shielding conductive film 30, but the thin line drawing circuit pattern 10 is formed of only the transparent conductive film 3. May be. However, it is more preferable to laminate a light-shielding conductive film 30 such as a copper foil in order to supplement the conductivity of the transparent conductive film 3.

《実施例1》
基体シートとして厚さ100μmの無色透明ポリエステルフィルムを用い、その表裏両面に透明導電膜としてインジウムスズ酸化物からなるスパッタリング法で200nmの厚みで形成し、その上に遮光性導電膜として銅膜をスパッタリング法で300nmの厚みで形成し、その上に第一レジスト層としてノボラック樹脂をグラビアコートで形成し、表側にはX方向の電極パターンからなるマスクを載置し、裏側にはY方向の電極パターンからなるマスクを載置して、メタルハライドランプによって表裏両面同時に露光し、アルカリ溶液に浸して現像した。
Example 1
A colorless transparent polyester film having a thickness of 100 μm is used as a base sheet, and a 200 nm thick sputtering film made of indium tin oxide is formed as a transparent conductive film on both front and back surfaces, and a copper film is sputtered thereon as a light-shielding conductive film. In this method, a novolak resin is formed as a first resist layer by gravure coating, a mask made of an X-direction electrode pattern is placed on the front side, and a Y-direction electrode pattern is placed on the back side. Then, the front and back surfaces were exposed simultaneously by a metal halide lamp and developed by immersing in an alkaline solution.

次いで、塩化第二鉄のエッチング液でインジウムスズ酸化物膜および銅膜を同時にエッチングしたところ、中央窓部表面にはX方向の電極パターン、その裏側にはY方向の電極パターンが露出して形成され、その中央窓部を囲む外枠縁部には平均線幅20μmの細線引き回しパターンが表裏両面に露出して形成されていた。次いで、これらの細線引き回しパターンを覆うように第二レジスト層として熱硬化アクリル樹脂層をスクリーン印刷で10μmの厚みに形成した。次いで、酸性雰囲気下での過酸化水素水に浸すと露出していた中央窓部の露出していた銅膜がエッチング除去され、その下に形成されていたインジウムスズ酸化物膜のみが残った。   Next, when the indium tin oxide film and the copper film were simultaneously etched with a ferric chloride etchant, the electrode pattern in the X direction was exposed on the surface of the central window, and the electrode pattern in the Y direction was exposed on the back side. In addition, a thin line drawing pattern having an average line width of 20 μm was exposed on both the front and back surfaces at the outer frame edge surrounding the central window. Next, a thermosetting acrylic resin layer as a second resist layer was formed to a thickness of 10 μm by screen printing so as to cover these fine line drawing patterns. Next, the exposed copper film in the central window that was exposed when immersed in hydrogen peroxide in an acidic atmosphere was etched away, leaving only the indium tin oxide film formed therebelow.

次いで、両面に形成された中央窓部の透明電極パターンおよび外枠縁部の熱硬化アクリル樹脂層を覆うように防錆用塗膜層として熱硬化アクリル樹脂層をスクリーン印刷で10μmの厚みに形成した。以上の方法により、中央窓部には基体シートの両面にそれぞれX方向の電極パターン、Y方向の電極パターンのインジウムスズ酸化物膜のみが形成され、各々の外枠縁部にはインジウムスズ酸化物膜の上に同じパターンの銅膜が形成された細線引き回し回路が形成され、細線引き回し回路を覆うように熱硬化アクリル樹脂層が被覆され、各々の透明電極パターンおよび熱硬化アクリル樹脂層を覆うように透光性の防錆用塗膜層が被覆された両面透明導電膜シートが得られた。   Next, a thermosetting acrylic resin layer is formed by screen printing to a thickness of 10 μm as a rust-proof coating layer so as to cover the transparent electrode pattern of the central window formed on both sides and the thermosetting acrylic resin layer of the outer frame edge. did. By the above method, only the indium tin oxide film having the X-direction electrode pattern and the Y-direction electrode pattern is formed on both sides of the base sheet in the central window portion, and indium tin oxide is formed on each outer frame edge portion. A thin line routing circuit in which a copper film of the same pattern is formed on the film is formed, and a thermosetting acrylic resin layer is covered so as to cover the thin line routing circuit, so as to cover each transparent electrode pattern and the thermosetting acrylic resin layer A double-sided transparent conductive film sheet coated with a translucent anticorrosive coating layer was obtained.

この得られた両面透明導電膜シートに形成されている細線引き回し回路パターンの端部をICチップが搭載された外部回路に接続して、長期間、静電容量式タッチセンサーとして作動するか評価したところ、安定した電気特性が維持できる結果が得られた。   The end of the thin line drawing circuit pattern formed on the obtained double-sided transparent conductive film sheet was connected to an external circuit on which an IC chip was mounted, and it was evaluated whether it would operate as a capacitive touch sensor for a long period of time. However, it was possible to maintain stable electrical characteristics.

《実施例2》
二枚の基体シートとして厚さ100μmの無色透明ポリエステルフィルムを用い、各々の基体シート上にそれぞれ透明導電膜、遮光性導電膜、第一レジスト層を順次形成し、当該基体シートの前記各層を形成していない面どうしを対向して積層することにより積層された基体シートの両面に、各々、透明導電膜、遮光性導電膜、第一レジスト層を順次形成した他は実施例1と同様の方法によって両面透明導電膜シートを得た。この両面透明導電膜シートに形成された細線引き回し回路パターンの端部をICチップが搭載された外部回路に接続して、長期間、静電容量式タッチセンサーとして作動するか評価したところ、安定した電気特性が維持できる結果が得られた。
Example 2
A colorless transparent polyester film having a thickness of 100 μm is used as the two base sheets, and a transparent conductive film, a light-shielding conductive film, and a first resist layer are sequentially formed on each base sheet to form the layers of the base sheet. The same method as in Example 1 except that a transparent conductive film, a light-shielding conductive film, and a first resist layer were sequentially formed on both surfaces of the base sheet laminated by laminating the surfaces that were not facing each other. Thus, a double-sided transparent conductive film sheet was obtained. When the edge of the thin line drawing circuit pattern formed on this double-sided transparent conductive film sheet was connected to an external circuit on which an IC chip was mounted, it was evaluated whether it would operate as a capacitive touch sensor for a long time. The result that electric characteristics can be maintained was obtained.

《実施例3》
防錆用塗膜層を外枠縁部の熱硬化アクリル樹脂層のみを覆うように形成した他は実施例1と同様の方法によって両面透明導電膜シートを得た。この両面透明導電膜シートに形成された細線引き回し回路パターンの端部をICチップが搭載された外部回路に接続して、長期間、静電容量式タッチセンサーとして作動するか評価したところ、実施例1には多少劣るものの安定した電気特性が維持できる結果が得られた。
Example 3
A double-sided transparent conductive film sheet was obtained in the same manner as in Example 1 except that the coating layer for rust prevention was formed so as to cover only the thermosetting acrylic resin layer at the edge of the outer frame. When the end of the thin line drawing circuit pattern formed on this double-sided transparent conductive film sheet was connected to an external circuit on which an IC chip was mounted, it was evaluated whether it would operate as a capacitive touch sensor for a long time. Although it was somewhat inferior to 1, a result that stable electric characteristics could be maintained was obtained.

本発明は、添付図面を参照しながら好ましい実施形態に関連して充分に記載されているが、この技術の熟練した人々にとっては種々の変形や修正は明白である。そのような変形や修正は、添付した請求の範囲による本発明の範囲から外れない限りにおいて、その中に含まれると理解されるべきである。   Although the present invention has been fully described in connection with preferred embodiments with reference to the accompanying drawings, various variations and modifications will be apparent to those skilled in the art. Such changes and modifications are to be understood as being included therein, so long as they do not depart from the scope of the present invention according to the appended claims.

1 遮光性導電膜
3 透明導電膜
5 両面透明導電膜シート
7 基体シート
9 電極シート
10 細線引き回し回路パターン
12 マスク
14 露光光線
16 第一レジスト層
18 第二レジスト層
22 両面透明導電膜シート5の外枠縁部
24 両面透明導電膜シート5の中央窓部
28 外部回路
30 防錆用塗膜層
DESCRIPTION OF SYMBOLS 1 Light-shielding electrically conductive film 3 Transparent electrically conductive film 5 Double-sided transparent conductive film sheet 7 Base sheet 9 Electrode sheet 10 Fine wire drawing circuit pattern 12 Mask 14 Exposure light 16 1st resist layer 18 2nd resist layer 22 Outside the double-sided transparent electrically conductive film sheet 5 Frame edge portion 24 Central window portion of double-sided transparent conductive film sheet 28 External circuit 30 Anticorrosive coating layer

Claims (8)

透明な基体シートの両面に、中央窓部に透明導電膜の電極パターンが形成され、外枠縁部に当該電極パターンのための細線引き回し回路パターンが形成され、当該両面の電極パターンおよび細線引き回し回路パターンが異なる両面透明導電膜シートであって、片面又は両面において少なくとも細線引き回し回路パターン上に透光性の防錆用塗膜層が端子部は除いて被覆形成されていることを特徴とする防錆性に優れた両面透明導電膜シート。   A transparent conductive film electrode pattern is formed in the central window on both sides of the transparent base sheet, and a thin line drawing circuit pattern for the electrode pattern is formed on the outer frame edge, and the double-sided electrode pattern and thin line drawing circuit are formed. A double-sided transparent conductive film sheet having a different pattern, wherein a light-transmitting rust-preventive coating layer is formed on at least a thin-lined circuit pattern on one side or both sides except for a terminal portion. Double-sided transparent conductive film with excellent rusting properties. 前記細線引き回し回路パターンが透明導電膜および遮光性導電膜が順次積層されていることを特徴とする請求項1に記載の防錆性に優れた両面透明導電膜シート。   2. The double-sided transparent conductive film with excellent rust prevention properties according to claim 1, wherein the thin wire drawing circuit pattern is formed by sequentially laminating a transparent conductive film and a light-shielding conductive film. 前記電極パターン上にも前記透光性の防錆用塗膜層が被覆形成されていることを特徴とする請求項1または請求項2のいずれかに記載の防錆性に優れた両面透明導電膜シート。   The double-sided transparent conductive material with excellent rust prevention properties according to claim 1, wherein the translucent rust-proof coating layer is also formed on the electrode pattern. Membrane sheet. 前記透光性の防錆用塗膜層が、熱硬化性樹脂又は光硬化性樹脂からなる請求項1〜3のいずれかに記載の防錆性に優れた両面透明導電膜シート。   The double-sided transparent conductive film sheet excellent in rust prevention property according to any one of claims 1 to 3, wherein the translucent anticorrosion coating layer is made of a thermosetting resin or a photocurable resin. 前記基体シートが二層構造からなることを特徴とする請求項1〜4のいずれかに記載の防錆性に優れた両面透明導電膜シート。   The double-sided transparent conductive film having excellent rust prevention properties according to any one of claims 1 to 4, wherein the base sheet has a two-layer structure. さらに前記細線引き回し回路パターンの端子部に接続されるICチップが搭載された外部回路を備えることにより、静電容量式タッチセンサーとして作動することを特徴とする請求項1〜5のいずれかに記載の防錆性に優れた両面透明導電膜シート。   6. The device according to claim 1, further comprising an external circuit on which an IC chip connected to a terminal portion of the thin line drawing circuit pattern is mounted, thereby operating as a capacitive touch sensor. Double-sided transparent conductive film sheet with excellent rust resistance. 透明な基体シートの両面に、各々、透明導電膜、遮光性導電膜、第一レジスト層を順次形成し、
次いで両面とも第一レジスト層を露光し、現像してパターン化した後、露出した遮光性導電膜および透明導電膜を両面同時にエッチングすることにより、中央窓部に透明導電膜および遮光性導電膜の積層物からなる電極パターンを形成するとともに、外枠縁部に透明導電膜および遮光性導電膜の積層物からなる細線引き回し回路パターンを形成し、
次いで第一レジスト層を剥離した後、両面とも前記細線引き回し回路パターン上に第二レジスト層を被覆形成し、当該第二レジスト層が形成されていない遮光性導電膜のみを両面同時にエッチングすることにより、中央窓部に透明導電膜の回路パターンを露出形成し、
次いで第二レジスト層を剥離した後、片面又は両面において少なくとも細線引き回し回路パターン上に透光性の防錆用塗膜層を端子部は除いて被覆形成することを特徴とする防錆性に優れた両面透明導電膜シートの製造方法。
A transparent conductive film, a light-shielding conductive film, and a first resist layer are sequentially formed on both sides of the transparent base sheet,
Next, the first resist layer is exposed on both sides, developed and patterned, and then the exposed light-shielding conductive film and transparent conductive film are etched simultaneously on both sides, so that the transparent conductive film and the light-shielding conductive film are formed in the central window. While forming an electrode pattern made of a laminate, and forming a thin line drawing circuit pattern made of a laminate of a transparent conductive film and a light-shielding conductive film at the outer frame edge,
Next, after peeling off the first resist layer, both sides are coated with the second resist layer on the circuit pattern, and only the light-shielding conductive film without the second resist layer is etched simultaneously on both sides , Exposing the circuit pattern of the transparent conductive film in the central window,
Next, after peeling off the second resist layer, at least a thin line is drawn on one side or both sides, and a light-transmitting rust-preventive coating layer is formed on the circuit pattern except for the terminal portion, and is excellent in rust prevention. A method for producing a double-sided transparent conductive film sheet.
二枚の透明な基体シート上にそれぞれ透明導電膜、遮光性導電膜、第一レジスト層を順次形成し、当該基体シートの前記各層を形成していない面どうしを対向して積層し、
次いで両面とも第一レジスト層を露光し、現像してパターン化した後、露出した遮光性導電膜および透明導電膜を両面同時にエッチングすることにより、中央窓部に透明導電膜および遮光性導電膜の積層物からなる電極パターンを形成するとともに、外枠縁部に透明導電膜および遮光性導電膜の積層物からなる細線引き回し回路パターンを形成し、
次いで第一レジスト層を剥離した後、両面とも前記細線引き回し回路パターン上に第二レジスト層を被覆形成し、当該第二レジスト層が形成されていない遮光性導電膜のみを両面同時にエッチングすることにより、中央窓部に透明導電膜の回路パターンを露出形成し、
次いで第二レジスト層を剥離した後、片面又は両面において少なくとも細線引き回し回路パターン上に透光性の防錆用塗膜層を端子部は除いて被覆形成することを特徴とする防錆性に優れた両面透明導電膜シートの製造方法。
A transparent conductive film, a light-shielding conductive film, and a first resist layer are sequentially formed on the two transparent substrate sheets, and the surfaces of the substrate sheet on which the respective layers are not formed are opposed to each other ,
Next, the first resist layer is exposed on both sides, developed and patterned, and then the exposed light-shielding conductive film and transparent conductive film are etched simultaneously on both sides, so that the transparent conductive film and the light-shielding conductive film are formed in the central window. While forming an electrode pattern made of a laminate, and forming a thin line drawing circuit pattern made of a laminate of a transparent conductive film and a light-shielding conductive film at the outer frame edge,
Next, after peeling off the first resist layer, both sides are coated with the second resist layer on the circuit pattern, and only the light-shielding conductive film without the second resist layer is etched simultaneously on both sides , Exposing the circuit pattern of the transparent conductive film in the central window,
Next, after peeling off the second resist layer, at least a thin line is drawn on one side or both sides, and a light-transmitting rust-preventive coating layer is formed on the circuit pattern except for the terminal portion, and is excellent in rust prevention. A method for producing a double-sided transparent conductive film sheet.
JP2010141329A 2010-06-22 2010-06-22 Double-sided transparent conductive film excellent in rust prevention and production method thereof Active JP4870830B2 (en)

Priority Applications (8)

Application Number Priority Date Filing Date Title
JP2010141329A JP4870830B2 (en) 2010-06-22 2010-06-22 Double-sided transparent conductive film excellent in rust prevention and production method thereof
CN201180030695.2A CN102947781B (en) 2010-06-22 2011-06-20 There is narrow frame touch input thin slice and the manufacture method thereof of rust-preventing characteristic
EP11798105.0A EP2587346B1 (en) 2010-06-22 2011-06-20 Production method of a narrow-frame touch input sheet superior in anti-rusting property
PCT/JP2011/064086 WO2011162221A1 (en) 2010-06-22 2011-06-20 Narrow-frame touch input sheet superior in anti-rusting property and production method thereof
US13/635,241 US8723046B2 (en) 2010-06-22 2011-06-20 Narrow frame touch input sheet with good anticorrosion property and manufacturing method thereof
KR1020127033079A KR101307296B1 (en) 2010-06-22 2011-06-20 Narrow-frame touch input sheet superior in anti-rusting property and production method thereof
TW100121590A TWI425407B (en) 2010-06-22 2011-06-21 Narrow frame edge touch input sheet excellent in rust resistance and manufacturing method thereof
US14/243,849 US9023592B2 (en) 2010-06-22 2014-04-02 Narrow frame touch input sheet with good anticorrosion property and manufacturing method thereof

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2010141329A JP4870830B2 (en) 2010-06-22 2010-06-22 Double-sided transparent conductive film excellent in rust prevention and production method thereof

Publications (2)

Publication Number Publication Date
JP2012008621A JP2012008621A (en) 2012-01-12
JP4870830B2 true JP4870830B2 (en) 2012-02-08

Family

ID=45539125

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2010141329A Active JP4870830B2 (en) 2010-06-22 2010-06-22 Double-sided transparent conductive film excellent in rust prevention and production method thereof

Country Status (1)

Country Link
JP (1) JP4870830B2 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5663115B2 (en) * 2012-03-28 2015-02-04 日本写真印刷株式会社 Touch sensor and manufacturing method thereof, and transfer ribbon for manufacturing touch sensor
JP6003293B2 (en) * 2012-06-29 2016-10-05 凸版印刷株式会社 Method for manufacturing film-type capacitive touch panel
JP6576498B2 (en) * 2018-03-09 2019-09-18 Nissha株式会社 FPC integrated capacitance switch and method of manufacturing the same

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH05108264A (en) * 1991-10-11 1993-04-30 Fujitsu Ltd Electrode forming method for touch input device and touch input device
JP2008065748A (en) * 2006-09-11 2008-03-21 Sharp Corp Touch panel and display device using touch panel
JP2008083495A (en) * 2006-09-28 2008-04-10 Epson Imaging Devices Corp Manufacturing method for substrate
JP4667471B2 (en) * 2007-01-18 2011-04-13 日東電工株式会社 Transparent conductive film, method for producing the same, and touch panel provided with the same

Also Published As

Publication number Publication date
JP2012008621A (en) 2012-01-12

Similar Documents

Publication Publication Date Title
JP4601710B1 (en) Narrow frame touch input sheet and manufacturing method thereof
CN102947781B (en) There is narrow frame touch input thin slice and the manufacture method thereof of rust-preventing characteristic
CN105723817B (en) Flexible printed circuit board and method for manufacturing the same
TWI431517B (en) Sensor of cover glass of integrated type
JP5435556B2 (en) Conductive sheet, laminated conductive sheet and conductive pattern sheet, laminated conductive sheet manufacturing method, transparent antenna or transparent display or touch input sheet manufacturing method
US20120073947A1 (en) Narrow frame touch input sheet, manufacturing method of same, and conductive sheet used in narrow frame touch input sheet
JP4855536B1 (en) Manufacturing method of touch input sheet with excellent rust prevention
KR20160138139A (en) Transparent conductive laminated body and touch panel provided with transparent conductive laminated body
JP4870830B2 (en) Double-sided transparent conductive film excellent in rust prevention and production method thereof
JP2011129272A (en) Double-sided transparent conductive film sheet and method of manufacturing the same
WO2017010521A1 (en) Transparent electrode film, dimming element, and method for manufacturing transparent electrode film
JP6308211B2 (en) Touch panel
JP7694076B2 (en) Metal-clad laminate, wiring board, and manufacturing method thereof
JP2011065394A (en) Narrow frame touch input sheet with protection film, laminate narrow frame touch input sheet with protection film and method for manufacturing them
JP6722291B2 (en) Conductive film, touch panel, photomask, imprint template, conductive film forming laminate, conductive film manufacturing method, and electronic device manufacturing method
WO2011102168A1 (en) Transparent electrode film
JP2015184994A (en) Transparent conductive laminate and touch panel having transparent conductive laminate
JP4870836B1 (en) Narrow frame touch input sheet manufacturing method
KR20150093328A (en) Method for Etching Using Metal Layer as Etching Resist
JP4870835B1 (en) Narrow frame touch input sheet manufacturing method
JP2013190852A (en) Conductive laminate processing method
JP2014188730A (en) Transparent conductive laminate, and method of producing transparent conductive laminate

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20110926

A871 Explanation of circumstances concerning accelerated examination

Free format text: JAPANESE INTERMEDIATE CODE: A871

Effective date: 20110926

A975 Report on accelerated examination

Free format text: JAPANESE INTERMEDIATE CODE: A971005

Effective date: 20111005

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20111025

A521 Request for written amendment filed

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20111027

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20111115

A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20111117

R150 Certificate of patent or registration of utility model

Ref document number: 4870830

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

Free format text: JAPANESE INTERMEDIATE CODE: R150

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20141125

Year of fee payment: 3

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20141125

Year of fee payment: 3

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

S533 Written request for registration of change of name

Free format text: JAPANESE INTERMEDIATE CODE: R313533

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250