JP4874727B2 - Mobile unit support device - Google Patents

Description

  The present invention relates to a moving unit support device, and more particularly to a moving unit support device capable of adjusting a preload amount when a moving unit is sandwiched between balls.

  Conventionally, by providing a moving unit support device that moves an image blur correction lens or an image sensor on a plane perpendicular to the optical axis in accordance with the amount of camera shake generated during imaging in an imaging device such as a camera, There has been proposed an image blur correction device that suppresses image blur in the camera.

Patent Document 1 discloses an image blur correction device that holds a moving unit having an image blur correction lens or an image sensor via a ball.
JP-A-2005-352113

  However, the apparatus of Patent Document 1 is difficult to adjust to hold the moving unit with a certain amount of preload via the ball.

  Accordingly, an object of the present invention is to provide a moving unit support device capable of accurately adjusting the amount of preload for holding the moving unit via a ball.

  The moving unit support device according to the present invention includes first to third balls, first to third preload probes for applying a preload to the first to third balls in a predetermined direction, and first to third preload probes. A first fixing portion having first to third retainers that hold the first to third balls, and a second fixing portion having ball-shaped first to third adjustment members, In a state where it can move on a plane perpendicular to a predetermined direction, it is sandwiched between the first and second fixing portions while preload is applied via the first to third balls and the first to third adjusting members. The first to third retainers fixed to the first fixing portion and the inner peripheral surface and the outer peripheral surface of the first to third fixed retainers. The first to third movable retainers that are screwed on the outer peripheral surface and the inner peripheral surface of the first to third preload probes, hold the first to third balls, and are movable in a predetermined direction. Having.

  Preferably, the second fixing portion is attached to the first to third ball receiving holes through which the first to third adjusting members can pass and the first fixing portion of the first to third ball receiving holes opposite to the first fixing portion. It has the 1st-3rd receiving plate which receives the 1st-3rd adjustment member, and the 1st-3rd receiving plate is removable.

  More preferably, when the first to third ball receiving holes are removed, the first to third ball receiving holes can contact a preload measuring unit for measuring the amount of preload.

  Preferably, the first to third ball receiving holes are formed on the first to third adjusting members based on the movement of the first to third movable retainers in a predetermined direction when the first to third receiving plates are removed. 2 A displacement measuring unit for measuring displacement with respect to the fixed unit can be contacted.

  Preferably, the moving unit temporarily adjusts the position between the first and second fixed units based on the movement of the first to third movable retainers in a predetermined direction, and the first to third preload probes perform the first adjustment. Based on the preloads of the first to third balls, the final position of the moving unit and the preload amount are adjusted.

  More preferably, after the temporary adjustment, the first to third movable retainers are fixed so as not to move in a predetermined direction, and after the main adjustment, the first to third preload probes cannot be preloaded. Fixed.

  Preferably, in the temporary adjustment, the first to third movable retainers come into contact with the moving unit, and after the main adjustment, the first to third movable retainers are moved by the preload of the first to third balls. And a certain distance away.

  Preferably, the first to third retainers include first to third backlash removing springs that adjust a shift in a predetermined direction due to backlash of the first to third movable retainers.

  A moving unit support device according to the present invention includes a sphere, a preload probe that applies a preload to the sphere in a predetermined direction, and a retainer that is screwed at an outer peripheral surface of the preload probe and holds the sphere. And a second fixing portion having a ball-shaped adjusting member, and a first and second fixing member that are movable on a plane perpendicular to a predetermined direction and in which a preload is applied via the ball and the adjusting member. The retainer is fixed to the first fixed portion, and the retainer is screwed between the inner peripheral surface and the outer peripheral surface of the fixed retainer, and the outer peripheral surface and the inner peripheral surface of the preload probe. And a movable retainer that holds the ball and is movable in a predetermined direction.

  As described above, according to the present invention, it is possible to provide a moving unit support device capable of accurately adjusting the amount of preload for holding the moving unit via the ball.

  Hereinafter, the present embodiment will be described with reference to the drawings. The camera body 1 will be described as a digital camera. In order to explain the direction, in the camera body 1, the horizontal direction orthogonal to the optical axis O of the photographing lens (not shown) accommodated in the lens barrel 2 is orthogonal to the first direction x and the optical axis O. In the following description, the vertical direction is defined as the second direction y, and the horizontal direction parallel to the optical axis O is defined as the third direction z.

  The camera body 1 includes a lens barrel 2 and a vibration isolation unit 10 (see FIG. 1).

  The subject image is picked up as an optical image through a photographing lens by an image pickup device IS such as a CCD, subjected to image processing after A / D conversion, and the picked-up image is displayed. An image signal obtained by imaging is recorded by a storage unit such as a memory card.

  The image stabilization unit 10 is caused by camera shake by moving the moving unit 15a including the imaging element IS on a plane perpendicular to the optical axis O (hereinafter referred to as xy plane) corresponding to the amount of camera shake. This is a device that corrects image blur by eliminating the deviation of the optical axis O on the imaging plane of the subject image and keeping the subject image and the imaging plane position constant.

  The anti-vibration unit 10 includes a moving unit 15a and a fixed unit 15b (see FIGS. 2 to 10). The moving unit 15a is sandwiched between fixed units 15b (first and second yokes YA, YB) fixed to the camera body 1 via balls (first to third substrate support portions 32A to 32C). It can move on the xy plane. The moving unit 15a includes a low-pass filter LF, an imaging element IS, an imaging plate substrate 45, first and second horizontal driving coils CXA and CXB, and first and second vertical driving coils CYA and CYB. The fixed unit 15b includes first and second yokes YA and YB, first to fifth support columns 31A to 31E, a substrate support portion 32, first and second horizontal driving magnets MXA and MXB, and first and second. It has vertical driving magnets MYA and MYB.

  The first and second horizontal driving coils CXA and CXB and the first and second vertical driving coils CYA and CYB are mounted on the imaging plate substrate 45.

  The first and second yokes YA and YB are plate-like magnetic metal members and are arranged perpendicular to the third direction z. The first to fifth struts 31A to 31E are attached between the first and second yokes YA and YB in parallel with the third direction z.

  One end of the first to fifth support columns 31A to 31E is attached to the first to fifth attachment portions 33A1 to 33E1 of the first yoke YA, and the other end is the sixth to tenth attachment portions 33A2 to the second yoke YB. It is attached to 33E2. A constant distance is maintained between the first yoke YA and the second yoke YB.

  The 1st-3rd support | pillar 31A-31C passes the 1st-3rd movement unit control part 34A-34C provided in the image pick-up board board | substrate 45. As shown in FIG. When the moving unit 15a is within the moving range of the moving unit 15a for image blur correction, the first to third moving unit restricting portions 34A to 34C are arranged so that the first to third support columns 31A to 31C are the imaging plate substrate 45. It is a space that is set in a size and positional relationship that does not contact (any one of the first to third moving unit restricting portions 34A to 34C). When the moving unit 15a moves beyond the moving range of the moving unit 15a for image blur correction, such as when the camera body 1 is shaken, at least one of the first to third support columns 31A to 31C is an imaging plate. It contacts the substrate 45 (any one of the first to third movement unit restricting portions 34A to 34C), and the movement of the moving unit 15a is restricted.

  When the camera body 1 is turned off, the moving unit 15a by the first vertical driving coil CYA or the like is not moved or fixed to a specific location on the xy plane, and the moving unit 15a moves according to gravity. It is moved on a plane and is held in a state where at least one of the first to third support columns 31 </ b> A to 31 </ b> C is in contact with the imaging plate substrate 45.

  The fourth and fifth support columns 31D and 31E pass through the fourth and fifth moving unit restriction notches 34D and 34E provided on the imaging plate substrate 45. The fourth and fifth moving unit restriction notches 34D and 34E are set to have a size and a positional relationship that the fourth and fifth support columns 31D and 31E do not contact when the moving unit 15a moves on the xy plane.

  The imaging plate substrate 45 is narrow in a slidable state on the xy plane by the first and second yokes YA and YB, the first to third support columns 31A to 31C, and the first to third substrate support portions 32A to 32C. Be held.

  The first to third substrate support portions 32A to 32C constituting the substrate support portion 32 are respectively first to third retainers 32A1 to 32C1, first to third preload probes 32A2 to 32C2, and first to third balls 32A3. 32C3, first to third adjustment members 32A4 to 32C4, and first to third receiving plates 32A5 to 32C5 (see FIGS. 3 to 5). In the present embodiment, a mode in which three pairs of retainers, a preload probe, a sphere, and three pairs of adjusting members and a receiving plate are provided will be described.

  The first to third retainers 32A1 to 32C1 are ball receivers of the first to third balls 32A3 to 32C3, and are attached to the first yoke YA. The first to third preload probes 32A2 to 32C2 apply a preload (load) to the first to third balls 32A3 to 32C3 in the third direction z and from the first yoke YA toward the imaging plate substrate 45. The devices to be added are screwed onto the inner peripheral surfaces of the first to third retainers 32A1 to 32C1, respectively, and can be moved back and forth in the third direction z by being rotated by a jig (not shown). ing. The preload amount (load) applied to the first to third balls 32A3 to 32C3 is adjusted by the movement of the first to third preload probes 32A2 to 32C2 in the third direction z. The first to third balls 32A3 to 32C3 urge the imaging plate substrate 45 in the third direction z by the preload by the first to third preload probes 32A2 to 32C2 in a rotatable state. The imaging board substrate 45 urged in the third direction z (received preload) preloads the first to third adjustment members 32A4 to 32C4.

  The first sphere 32A3 and the first adjustment member 32A4 are arranged in the third direction z. The second sphere 32B3 and the second adjustment member 32B4 are arranged in the third direction z. The third sphere 32C3 and the third adjustment member 32C4 are arranged in the third direction z.

  Details of the first to third retainers 32A1 to 32C1 will be described (see FIGS. 5 and 11 to 13). The first to third retainers 32A1 to 32C1 include first to third fixed retainers 32A11 to 32C11, first to third gap adjustment (movable) retainers 32A12 to 32C12, and first to third backlash removing springs 32A13 to 32C13. Have FIGS. 5 and 11 to 13 show the configuration of the third fixed retainer 32C11, the third gap adjusting retainer 32C12, and the third backlash removing spring 32C13 as details of the third retainer 32C1. Although detailed configuration diagrams of the first and second retainers 32A1 and 32B1 are omitted, they are the same as the detailed configuration of the third retainer 32C1.

  The third fixed retainer 32C11 constitutes an outer portion of the third retainer 32C1, and is fixed to the first yoke YA. The inner peripheral surface of the third fixed retainer 32C11 is threaded, and the third gap adjusting retainer 32C12 is screwed and attached.

  The third gap adjusting retainer 32C12 constitutes an inner portion of the third retainer 32C1, the outer peripheral surface is screwed with the third fixed retainer 32C11, and the inner peripheral surface is screwed with the third preload probe 32C2. The third gap adjustment retainer 32C12 holds the third sphere 32C3 and is movable in the third direction z. As the third gap adjusting retainer 32C12 moves in the third direction z, the third preload probe 32C2 and the third ball 32C3 do not move in the third direction z.

  The end of the third gap adjustment retainer 32C12 on the imaging plate substrate 45 side is in contact with the imaging plate substrate 45 during temporary adjustment to be described later. Distance).

  In order to adjust the deviation in the third direction z due to the backlash of the screw of the third gap adjusting retainer 32C12, the third backlash removing spring 32C13 is attached at a position that urges the third gap adjusting retainer 32C12 in the third direction z. .

  The third gap adjustment retainer 32C12 is fixed in a state in which it cannot move in the third direction z by a screw lock such as an adhesive after temporary adjustment described later.

  The third preload probe 32C2 is fixed in a state in which preload cannot be performed (a state in which the third preload probe 32C2 cannot move in the third direction z) by a screw lock such as an adhesive after the adjustment described later.

  The first to third spheres 32A3 to 32C3 are arranged on the first yoke YA so as to constitute the apex of the triangle. The first to third adjustment members 32A4 to 32C4 are arranged so as to constitute the apex of the triangle on the second yoke YB.

  The first to third receiving plates 32A5 to 32C5 and the first to third ball receiving holes 32A6 to 32C6 provided in the second yoke YA can freely rotate the ball-shaped first to third adjusting members 32A4 to 32C4. Plays the role of holding the ball. The first to third ball receiving holes 32A6 to 32C6 pass through holes that are slightly larger than the ball diameters of the first to third adjusting members 32A4 to 32C4.

  When measuring the preload amount (load) using the preload amount measuring unit 50 and when measuring the dent amount using the dent amount measuring unit 60, the first to third receiving plates 32A5 to 32C5 are the second yoke YB. And the first to third adjustment members 32A4 to 32C4 are projected from the first to third ball receiving holes 32A6 to 32C6 in the third direction z and opposite to the imaging plate substrate 45 (see FIG. 11, see FIG.

  The preload measuring unit 50 is in contact with the first to third adjustment members 32A4 to 32C4 and measures the preload amount (load) of the first to third substrate support units 32A to 32C (push pull gauge). (See FIG. 11).

  The indentation amount measuring unit 60 contacts the first to third adjustment members 32A4 to 32C4 and measures the positional relationship (indentation amount, displacement) of the first to third substrate support portions 32A to 32C with respect to the second yoke YB. It is a digital gauge (see FIG. 13).

  In the present embodiment, when the moving unit 15a is pinched via a ball, the third position is determined at a plurality of positions (first to third substrate support portions 32A to 32C) so that the moving unit 15a is not displaced in the third direction z. A preload is applied in the direction z. Since this preload amount has a structure that can be measured using the preload amount measuring unit 50, it is possible to perform preload with higher accuracy than in a configuration in which the preload amount cannot be adjusted, and to suppress variations in vibration control. It becomes possible.

  When the first to third receiving plates 32A5 to 32C5 are attached to the second yoke YB, the first to third adjusting members 32A4 to 32C4 are rotatable, and the first to third receiving plates 32A5 to 32C5 The imaging plate substrate 45 is biased in the third direction z by a reaction force (a reaction force of preload by the first to third preload probes 32A2 to 32C2).

  The first and second horizontal driving magnets MXA and MXB and the first and second vertical driving magnets MYA and MYB are mounted on the first yoke YA (see FIG. 3).

  In the initial state before the moving unit 15a starts moving, the imaging plate substrate 45 has the optical axis O passing through the center of the effective imaging area of the imaging element IS, and the sides constituting the rectangle of the effective imaging area are in the first direction x. Or it is desirable to arrange | position in the positional relationship (movement center position) parallel to the 2nd direction y. The imaging element IS is disposed on the imaging plate substrate 45 and on the side facing the hole 35 of the first yoke YA.

  The first horizontal driving coil CXA is in a positional relationship facing the first horizontal driving magnet MXA in the third direction z. The second horizontal driving coil CXB is in a positional relationship facing the second horizontal driving magnet MXB in the third direction z.

  The first vertical driving coil CYA is in a positional relationship facing the first vertical driving magnet MYA in the third direction z. The second vertical driving coil CYB is in a positional relationship facing the second vertical driving magnet MYB in the third direction z.

  In the first and second horizontal driving magnets MXA and MXB, N poles and S poles are alternately arranged.

  In the first and second vertical driving magnets MYA and MYB, N poles and S poles are alternately arranged.

  The coil pattern of the first horizontal driving coil CXA is such that the moving unit 15a including the first horizontal driving coil CXA is formed by a current flowing through itself and an electromagnetic force generated from the magnetic field of the first horizontal driving magnet MXA. In order to generate a driving force for moving in the one direction x, a line segment parallel to the second direction y is provided. The coil pattern of the second horizontal driving coil CXB is the movement of the moving unit 15a including the second horizontal driving coil CXB by the current flowing through itself and the electromagnetic force generated from the magnetic field of the second horizontal driving magnet MXB. In order to generate a driving force for moving in the one direction x, a line segment parallel to the second direction y is provided.

  The coil pattern of the first vertical driving coil CYA uses the current flowing therethrough and the electromagnetic force generated from the magnetic field of the first vertical driving magnet MYA to move the moving unit 15a including the first vertical driving coil CYA to the first. In order to generate a driving force that moves in two directions y, a line segment parallel to the first direction x is provided. The coil pattern of the second vertical driving coil CYB is obtained by moving the moving unit 15a including the second vertical driving coil CYB to the first by the current flowing through itself and the electromagnetic force generated from the magnetic field of the second vertical driving magnet MYB. In order to generate a driving force that moves in two directions y, a line segment parallel to the first direction x is provided.

  The first yoke YA is disposed on the side close to the lens barrel 2 side with respect to the second yoke YB. The first yoke YA has a hole 35 in which a portion facing the imaging element IS is hollowed out so as not to block light incident on the effective imaging area of the imaging element IS. The hole 35 has such a size and positional relationship that the imaging element IS, the low-pass filter LF, and the like do not contact the portion of the first yoke YA where the hole 35 is located when the moving unit 15a moves. Specifically, even when the camera body 1 is shaken, at least one of the first to third support columns 31A to 31C moves in contact with the first to third movement unit restricting portions 34A to 34C. The movement of the unit 15a is restricted, and the moving unit 15a has such a size and positional relationship that the moving unit 15a does not come into contact with the portion having the hole 35 of the first yoke YA.

  The first and second yokes YA and YB prevent the magnetic fields of the first and second horizontal driving magnets MXA and MXB and the first and second vertical driving magnets MYA and MYB from leaking to the surroundings. The magnetic flux density between the first horizontal driving coil CXA and the first horizontal driving magnet MXA, the magnetic flux density between the second horizontal driving coil CXB and the second horizontal driving magnet MXB, The magnetic flux density between the first vertical driving coil CYA and the first vertical driving magnet MYA, and the magnetic flux density between the second vertical driving coil CYB and the second vertical driving magnet MYB. Play a role to enhance.

  A procedure for adjusting the preload amount in the present embodiment will be described. When adjusting the preload amount, the vibration isolation unit 10 is installed so that the second yoke YA is on the upper side in the vertical direction and the first yoke YA is on the lower side in the vertical direction. Further, the first to third receiving plates 32A5 to 32C5 are removed. Of the ball receiving holes 32A6 to 32C6, the hole where the amount of depression is measured is brought into contact with the digital gauge of the depression amount measuring unit 60 and the adjusting member (see FIG. 13). The depression amount measurement by the digital gauge may be performed simultaneously for three balls (first to third adjustment members 32A4 to 32C4) or one by one.

  First, as a first procedure, the first to third gap adjustment retainers 32A12 to 32C12 are moved in the third direction z. When the first to third gap adjustment retainers 32A12 to 32C12 are moved in the third direction z and closer to the imaging plate substrate 45, the first to third gap adjustment retainers 32A12 to 32C12 face the imaging plate substrate 45. The end portion (tip portion) on the side protrudes closer to the imaging plate substrate 45 than the first to third fixed retainers 32A11 to 32C11 (first state). The first to third gap adjustment retainers 32A12 to 32C12 come into contact with the image pickup plate substrate 45 by the protrusion of the tip portions of the first to third gap adjustment retainers 32A12 to 32C12 toward the image pickup plate substrate 45, and in the third direction z. In addition, a force is exerted in the direction approaching the second yoke YB and moved. When the imaging plate substrate 45 is moved in the third direction z and in the direction approaching the second yoke YB, the first to third adjustment members 32A4 to 32C4 are also moved in the same direction.

  By adjusting the amount of movement of the first to third gap adjustment retainers 32A12 to 32C12 (adjusting the amount of protrusion of the tip of the first to third gap adjustment retainers 32A12 to 32C12 toward the image pickup board substrate 45), the image pickup plate The distance (positional relationship) in the third direction z between the substrate 45 and the second yoke YB and the amount of depression from the first to third ball receiving holes 32A6 to 32C6 of the first to third adjustment members 32A4 to 32C4 are adjusted. The

  The amount of depression from the first to third ball receiving holes 32A6 to 32C6 of the first to third adjustment members 32A4 to 32C4 is adjusted by the depression amount measuring unit 60 (temporary adjustment, see FIG. 13). In the first procedure, the amount of depression from the first to third ball receiving holes 32A6 to 32C6 of the first to third adjustment members 32A4 to 32C4 is very small (the first to third adjustment members 32A4 to 32C4 are the second The yoke YB is indented by a minute amount from the end surface opposite to the imaging plate substrate 45). At this time, there is a minute gap between the first to third balls 32A3 to 32C3 and the imaging plate substrate 45, and no preload is performed.

  After the temporary adjustment, the first to third gap adjusting retainers 32A12 to 32C12 are screw-locked with an adhesive or the like so as not to move between the first to third fixed retainers 32A11 to 32C11.

  Next, as a second procedure, among the first to third ball receiving holes 32A6 to 32C6, the push-pull gauge of the preload measuring unit 50 and the adjustment member can be brought into contact with each other in the hole where the depression amount is measured. Is done. The preload amount measurement by the push-pull gauge may be performed simultaneously for three balls (first to third adjustment members 32A4 to 32C4) or one by one.

  Specifically, the first to third preload probes 32A2 to 32C2 are moved in the third direction z. When the first to third preload probes 32A2 to 32C2 are moved in the third direction z and closer to the imaging plate substrate 45, the side of the first to third balls 32A3 to 32C3 facing the imaging plate substrate 45 is The first to third gap adjustment retainers 32A12 to 32C12 protrude toward the imaging plate substrate 45 side (second state). The first to third spheres 32A3 to 32C3 project toward the imaging plate substrate 45, so that the first to third spheres 32A3 to 32C3 come into contact with the imaging plate substrate 45 and approach the second yoke YB in the third direction z. In the direction, force is exerted and moved. When the imaging plate substrate 45 is moved in the third direction z and in the direction approaching the second yoke YB, the first to third adjustment members 32A4 to 32C4 are also moved in the same direction. When the first to third adjustment members 32A4 to 32C4 protrude from the end surface opposite to the imaging plate substrate 45 of the second yoke YB, they come into contact with the push-pull gauge of the preload measuring unit 50 and measure the preload amount. (See FIG. 11).

  In this state, by moving the first to third preload probes 32A2 to 32C2 in the third direction z, the imaging plate substrate by the first to third balls 32A3 to 32C3 and the first to third adjustment members 32A4 to 32C4 The amount of preload to 45 is adjusted (this adjustment). After this adjustment, the first to third gap adjustment retainers 32A12 to 32C12 and the imaging plate substrate 45 are brought into a state having a minute gap (first distance) that is substantially the same as the amount of depression described above.

  After this adjustment, the first to third preload probes 32A2 to 32C2 are screw-locked with an adhesive or the like so as not to move between the first to third gap adjustment retainers 32A12 to 32C12.

  In order to smoothly move the imaging plate substrate 45 on the xy plane, it is desirable that the preload amount in the third direction z is small. However, if the amount of preload is small, the imaging plate substrate 45 tends to shift in the third direction z. For example, if a force equal to or greater than the preload amount is applied in the direction opposite to the preload direction, the image pickup plate substrate 45 is moved in the third direction z. In the present embodiment, the distance between the first to third gap adjustment retainers 32A12 to 32C12 and the imaging plate substrate 45 is set to the first distance. Therefore, even if the imaging plate substrate 45 is moved in the third direction z and toward the first yoke YA by a force in the direction opposite to the preload direction, the first to third gap adjustment retainers 32A12 to 32C12 cause the imaging plate to move. Since the movement amount of the substrate 45 is suppressed to the same first distance as the gap, there is no possibility that a large focus shift will occur.

  In the present embodiment, the imaging plate substrate 45 including the imaging element IS is arranged on the moving unit 15a and moves on the xy plane. However, the imaging element IS is fixed, and an image blur correction lens (not shown). The same effect can be obtained in the form in which the movement unit 15a is arranged and moved.

  Further, the moving unit support device (anti-vibration unit 10) having the moving unit 15a and the fixed unit 15b is used as an image blur correction device, but is not limited to this, and is movable in the xy plane. It may be used for other devices having a moving unit 15a held in

It is a perspective view which shows the external appearance of the camera main body in this embodiment. It is the perspective view which looked at the vibration proof unit from the 1st yoke side. It is the perspective view which looked at the vibration isolator unit from the 2nd yoke side. It is a front view of a vibration isolator unit. It is sectional drawing which looked at the vibration proof unit from the 1st direction. It is a rear view of a vibration isolator unit. It is a front view of a movement unit. It is a rear view of a moving unit. It is a front view of the 1st yoke. It is a rear view of the 1st yoke. It is sectional drawing seen from the 1st direction which shows the state which a preload measuring part contacts the 3rd adjustment member of a vibration isolator unit. It is sectional drawing seen from the 1st direction which shows the detail of the 3rd retainer of a vibration isolator unit. It is sectional drawing seen from the 1st direction which shows the state which the hollow amount measurement part of the 3rd adjustment member of a vibration isolating unit contacts.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Camera main body 2 Lens barrel 10 Anti-vibration unit 15a, 15b Moving unit, fixed unit 31A-31E 1st-5th support | pillar 32 Substrate support part 32A-32C 1st-3rd board | substrate support part 32A1-32C1 1st-1st 3 retainers 32A11 to 32C11 1st to 3rd fixed retainers 32A12 to 32C12 1st to 3rd gap adjustment retainers 32A13 to 32C13 1st to 3rd backlash removing springs 32A2 to 32C2 1st to 3rd probes 32A3 to 32C3 1st to 3rd Third ball 32A4 to 32C4 First to third adjustment members 32A5 to 32C5 First to third receiving plates 32A6 to 32C6 First to third ball receiving holes 33A1 to 33E1 First to fifth mounting portions 33A2 to 33E2 Sixth to third 10th attachment part 34A-34C 1st-3rd movement unit control part 45 Imaging board board | substrate 50 Preload measurement unit 60 Depression measurement unit CXA, CXB First and second horizontal driving coils CYA, CYB First and second vertical driving coils IS Image sensor LF Low pass filter MXA, MXB First, second Horizontal driving magnets MYA, MYB First and second vertical driving magnets O Optical axis YA, YB First, second yoke

Claims (9)

The first to third spheres, the first to third spheres, the first to third preload probes that apply preload in a predetermined direction, and the outer peripheral surfaces of the first to third preload probes are screwed together, A first fixing portion having first to third retainers for holding the first to third balls;
A second fixing portion having ball-shaped first to third adjustment members;
The first and second fixings in a state where the preload is applied via the first to third balls and the first to third adjusting members while being movable on a plane perpendicular to the predetermined direction. A moving unit sandwiched between the parts,
The first to third retainers are screwed to the first to third fixed retainers fixed to the first fixing portion, and the inner and outer peripheral surfaces of the first to third fixed retainers, -It has 1st-3rd movable retainer screwed in the outer peripheral surface and inner peripheral surface of the 3rd preload probe, holding the 1st-3rd sphere, and movable in the predetermined direction. Mobile unit support device. The second fixing portion is attached to first to third ball receiving holes through which the first to third adjusting members can pass, and to the opposite side of the first fixing portion of the first to third ball receiving holes. Having first to third receiving plates for receiving the first to third adjusting members;
The moving unit support device according to claim 1, wherein the first to third receiving plates are removable.   The pre-load amount measuring unit for measuring the pre-load amount can contact the first to third ball receiving holes when the first to third receiving plates are removed. The moving unit support device according to 1.   The first to third ball receiving holes are formed on the first to third adjusting members based on the movement of the first to third movable retainers in the predetermined direction when the first to third receiving plates are removed. The moving unit support device according to claim 2, wherein a displacement amount measuring unit that measures a displacement with respect to the second fixed unit is contactable. The moving unit is temporarily adjusted between the first and second fixed units based on the movement of the first to third movable retainers in the predetermined direction.
2. The moving unit according to claim 1, wherein a final position of the moving unit and a preload amount are adjusted based on the preload of the first to third balls by the first to third preload probes. Support device. After the temporary adjustment, the first to third movable retainers are fixed so as not to move in the predetermined direction,
6. The moving unit support apparatus according to claim 5, wherein after the main adjustment, the first to third preload probes are fixed so that the amount of preload does not change . In the temporary adjustment, the first to third movable retainers are in contact with the moving unit,
6. The moving unit support device according to claim 5, wherein after the main adjustment, the first to third movable retainers are separated from the moving unit by a predetermined distance due to the preload of the first to third balls. .   The said 1st-3rd retainer has the 1st-3rd backlash removal spring which adjusts the shift | offset | difference of the said predetermined direction by the backlash of the said 1st-3rd movable retainer. Mobile unit support device. A first fixing portion having a sphere, a preload probe that applies a preload to the sphere in a predetermined direction, and a retainer that is screwed on an outer peripheral surface of the preload probe and holds the sphere;
A second fixing portion having a ball-shaped adjustment member;
A movable unit sandwiched between the first and second fixed portions in a state where the preload is applied via the ball and the adjustment member in a state where the movable member can move on a plane perpendicular to the predetermined direction. Prepared,
The retainer is fixed to the first fixing portion, and is screwed with an inner peripheral surface and an outer peripheral surface of the fixed retainer, and is screwed with an outer peripheral surface and an inner peripheral surface of the preload probe. A moving unit support apparatus comprising: a movable retainer that is held and movable in the predetermined direction.

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