JP4875900B2 - Multi-head microscope apparatus and control method of multi-head microscope apparatus - Google Patents

Description

The present invention relates to a multi-head microscope apparatus that inspects a pattern on a substrate using a plurality of microscope heads, and a control method for the multi-head microscope apparatus .

  In a manufacturing process of a liquid crystal panel or the like, it is known that a substrate such as a color filter substrate (CF) or an electrode substrate (TFT) is manufactured from one large glass substrate. When manufacturing a plurality of color filter substrates from a single large glass substrate, a plurality of identical patterns are drawn on the large glass substrate at regular intervals in a regular positional relationship and divided into products in subsequent steps. Is done. A multi-head microscope including a plurality of microscope heads can be used for appearance inspection of such a large glass substrate (see, for example, Patent Document 1).

In a conventional multi-head microscope, a stage for holding a large glass substrate is configured to be movable in two axial directions in a plane, and two microscope heads are arranged side by side in a portal frame that straddles the stage, and adjacent to each other. Some are configured so that the same part of two patterns can be observed simultaneously. Therefore, the stroke amount of the stage in the moving direction of the microscope head is 1 / the number of microscope heads as compared with the case of one microscope head.
Japanese Patent Laid-Open No. 8-171057

However, since conventional microscope heads are arranged so that the same pattern formed in parallel on one large glass substrate can be observed simultaneously, the range in which each microscope head can move is the pattern However, it is not possible to flexibly cope with various inspection points on a large glass substrate as in the case where the inspection points are biased.
The present invention has been made in view of such circumstances, and its main object is to enable efficient and reliable inspection using a plurality of microscope heads.

The present invention for solving the aforementioned problem, a stage in which the glass substrate is placed, a supporting member disposed so as to straddle the stage like a bridge, so that the moving ranges overlap along the installing portion of the front Symbol support member A plurality of optical heads that are movably provided, a drive unit that independently moves the plurality of optical heads along the erection unit, and an inspection point on the glass substrate assigned to each optical head , possess control means for each of said optical head to the inspection points assigned to each of which controls the drive unit to so that move, and whether the control means, between two of the optical head adjacent collide Is determined during the operation of the drive unit, and when it is determined that there is a collision, one optical head is moved to a position where it does not collide with the other optical head, and the other optical head is assigned. Was was more heads microscope apparatus according to claim Rukoto is moved to the coordinates of the test points.
The present invention is also a control method for a multi-head microscope apparatus that is movably provided so that the movement range overlaps the inspection area on the glass substrate, wherein the inspection points on the glass substrate are assigned to the optical An assigning process step assigned to the head and an operation step of moving the optical heads to the inspection points assigned to the heads. Whether the two adjacent optical heads collide with each other. A determination step for determining whether or not each optical head is operating, and in the determination step, if it is determined that no collision occurs, each optical head is assigned to the coordinates of the inspection point respectively assigned in the assignment processing step. When it is judged that the head is moved and collides, one optical head is moved to a position where it does not collide with the other optical head, and the other optical head is assigned. A step of moving the coordinates of the serial test point, and a method of controlling a plurality of heads microscope apparatus characterized in that it comprises a.

In this multi-head microscope apparatus, a plurality of optical heads can independently move along the supporting portion of the support member and each optical head can inspect an arbitrary inspection point on the glass substrate. When it is determined that the two adjacent optical heads collide with each other, one optical head is moved to a position where it does not collide with the other optical head to avoid the collision.

  According to the present invention, since the ranges in which the plurality of microscope heads can be moved are partially overlapped, it is possible to flexibly cope with an arbitrary inspection point on the substrate. Therefore, inspection efficiency can be improved. Further, it is possible to inspect a place close to the intermediate position of the microscope head in the other axis direction.

(First embodiment)
A first embodiment of the present invention will be described in detail with reference to the drawings.
As shown in FIGS. 1 and 2, the multi-head microscope apparatus 1 has a base 2, and a pair of guide rails 3 are laid in parallel on the base 2 in a uniaxial direction (hereinafter referred to as X direction). . Between these guide rails 3, a shaft 5 for transmitting the power of the motor 4 is arranged in parallel. A stage 6 is connected to the shaft 5, and when the motor 4 is driven, the stage 6 moves along the guide rail 3 in the X direction. Positioning pins 9 for positioning and placing a large glass substrate W as a specimen on the upper surface of the stage 6 serving as a substrate transporting unit, and a pressing pin 10 movable so as to press the glass substrate W against the positioning pins 9 Each has a plurality of protrusions. The positioning pins 9 and the pressing pins 10 are arranged so that the line segment connecting the centers of the patterns on the glass substrate W is parallel to the X direction or the Y direction (other axis direction) orthogonal to the X direction. Yes. In addition, lift pins 11 are provided at one end of the stage 6 so as to protrude and retract at predetermined intervals. These lift pins 11 constitute a lifter that lifts the glass substrate W when carrying it in and out.

  Further, a gate-type frame 20 as a support member is fixed to the base 2 so as to straddle the stage 6 in a bridge shape in parallel with the Y direction. The portal frame 20 has a pair of leg portions 20A fixed to the base 2 and a bridge portion 20B extending in parallel with the stage 6 so as to connect the upper portions of the leg portions 20A. A pair of linear guides 21 (drive units) in which a slide block is slidably connected to a linear guide rail are laid in parallel to the Y axis on the upper surface of the erection unit 20B. A Y-axis stage 22 is slidably attached to these linear guides 21 at a predetermined distance. On each Y-axis stage 22, microscope heads 30 and 40, which are optical heads, are fixed one by one.

  The microscope heads 30 and 40 focus an image forming optical system that forms an image formed on the glass substrate W, an illumination optical system that illuminates the pattern, an observation system that observes the image, and the pattern. A semi-focusing device. The imaging optical system has a conversion function and a semi-focus function for converting the revolver 32 on which the plurality of objective lenses 31 are mounted. The illumination optical system has an epi-illumination function, and the observation system includes an observation device (for example, a CCD (Charge Coupled Devices)) 33 that visualizes an image. Further, the conversion / semifocusing of the objective lens 31 is motorized so that it can be controlled remotely. In addition, the illumination optical system's brightness stop (AS), field stop (FS), bright-field / dark-field optical system insertion / removal, differential interference prism, and optical elements such as analyzers are also inserted / removed as required. Remote control is possible by pneumatic operation.

  FIG. 3 shows a block diagram of a control system of the multi-head microscope apparatus 1. A loader control unit 51 is connected to the inspection control apparatus 50 that controls the entire multi-head microscope apparatus 1. The loader control unit 51 controls the transfer robot 52 including a robot arm. The transport robot 52 is controlled by the loader control unit 51, for example, by PLC (Programmable Logic Controller). In addition, control units 53A and 53B of the microscope heads 30 and 40 and an observation device 33 are also connected to adjust the optical system and capture an image acquired by the observation device 33. The inspection control device 50 is equipped with an image processing board (not shown), and the image data taken from the observation device 33 is displayed on the monitor 54 which is a display means. Further, a control unit 55 is connected to the inspection control device 50. The control unit 55 includes a lifter (lift pin 11), a motor driver 56 of the motor 4 that moves the stage 6, and motor drivers 57 and 58 of the pair of linear guides 21 that move the microscope heads 30 and 40 in the Y direction (drive unit). For example, PLC control is performed. When the inspection control device 50 is a general-purpose computer including a monitor 54 and input means such as a keyboard 59 and a mouse 60, the inspection control device 50 and the control unit 55 are, for example, Ethernet (registered trademark) connection. It is comprised so that communication is possible.

  Next, the operation of the present embodiment will be described. In the following description, the multi-head microscope apparatus 1 uses the same number of film types, resist coating, pattern baking, development, and the like as the line types in order to form several types of wiring on the glass substrate W in the photolithographic process in manufacturing the liquid crystal panel. The description will be made assuming that the etching is performed for each cycle. In addition, a case where two patterns are formed in the X direction on the glass substrate W will be described as an example. However, the arrangement and number of patterns, processes to be inspected, and the like are not limited to this and can be arbitrarily selected. it can.

  As shown in FIG. 4, the glass substrate W is first mounted on the stage 6 (step S101). When the transport robot 52 shown in FIG. 3 transports one glass substrate W above the stage 6, the control unit 55 drives the lifter. The lift pins 11 protrude from the upper surface of the stage 6 and contact the lower surface of the glass substrate W to support the glass substrate W from below. When the transfer robot 52 is moved backward and the glass substrate W is transferred from the transfer robot 52 to the lift pins 11, the lift pins 11 are lowered and the glass substrate W is placed on the stage 6. Next, the glass substrate W is positioned (step S102). The pressing pin 10 is moved, the side surface of the glass substrate W is pressed against the positioning pin 9, and the positioning is performed so that the glass substrate W is sandwiched between the positioning pin 9 and the pressing pin 10.

  Further, recipe information including coordinate information and the like of all inspection points necessary for inspection is read (step S103), and inspection points on the glass substrate W are assigned to the microscope heads 30 and 40 (inspection point assignment processing). (Step S104). At this time, for example, as shown in FIG. 5, it is assumed that the glass substrate W is equally allocated to the inspection range R1 of the microscope head 30 and the inspection range R2 of the microscope head 40. Then, the inspection points in the inspection ranges R1 and R2 are stored in the inspection point groups G1 and G2 of the microscope heads 30 and 40 in the inspection ranges R1 and R2 including the inspection points, and all the inspection points are selected. Or to one microscope head 30, 40. The inspection point assignment process may be performed in advance before the glass substrate W is carried in and stored as recipe information. In this case, in the recipe information reading process shown in step S103, only the inspection point group is read for each of the microscope heads 30 and 40.

  In the example of FIG. 5, since the number and arrangement of inspection points on the glass substrate W are uniform in the Y direction, the two inspection ranges R1 and R2 are substantially the same size, but the inspection points are biased. In such a case, the inspection ranges R1 and R2 have different sizes.

  When the inspection point assignment is completed in step S104 of FIG. 4, each of the microscope heads 30 and 40 executes an inspection process. The inspection process is executed as a separate thread for each of the microscope heads 30 and 40, and the microscope heads 30 and 40 operate in parallel (asynchronously). For example, in the case of the microscope head 30, the process proceeds to step S105A and the operation process of the microscope head 30 is performed. The coordinates of the first inspection point are acquired from the inspection point group G1 distributed in the inspection point assignment process, and the inspection control device 50 issues a movement command to the microscope head 30. Details of the processing in step S105A will be described later. When the movement of the microscope head 30 is completed, the inspection process for each inspection point is executed (step S106A). Selection of the objective lens 31 of the microscope head 30 and focus adjustment are performed by the inspection control device, and an image captured from the observation device 33 is image-processed by the inspection control device 50 and displayed on the monitor 54. The operator observes the screen of the monitor 54 and confirms whether there is a defect or the like. The determination may be performed by image processing such as pattern matching.

  While there are uninspected points for the microscope head 30, the process returns from step S107A to step S105A, and the above-described processing is repeated. When all the inspections are completed (No in Step S107A), the state is shifted to the inspection end state (Step S108A). Similarly, the processing shown in step S105B, step S106B, and step S107B is performed on the microscope head 40 until all the inspection points are inspected, and when all inspections are completed, the process proceeds to the inspection end state (step S108B). The inspection control device 50 monitors whether or not all the microscope heads 30 and 40 are in the inspection end state while the microscope heads 30 and 40 are operating asynchronously (step S109). When the heads 30 and 40 are in an end state, monitoring is stopped and the inspection process for the glass substrate W is ended.

Here, details of the microscope head operation processing shown in step S105A will be described in detail with reference to FIG. Here, FIG. 6 is a flowchart for the microscope head 30. In the case of the flowchart for the microscope head 40, reference numerals 30 and 40 may be interchanged.
First, the microscope head 30 waits for a hold release (step S201). Since the hold is released in the initial state, the collision check is performed in the process after step S202 as it is. That is, in step S202, the current coordinates of the other microscope head 40 (hereinafter referred to as other head coordinates) are acquired (step S202). The acquired other head coordinates and the coordinates of the inspection point given to itself (hereinafter referred to as target coordinates) ) And considering the mechanical width of each microscope head 30, 40, it is determined whether or not the microscope heads 30, 40 collide with each other when moved. When it is determined that the microscope heads 30 and 40 do not collide when moved (No in step S203), the status is set to normal end (step S204). On the other hand, when it is determined that the microscope heads 30 and 40 collide with each other when moved (Yes in step S203), the status is set to the hold end (step S205).

  The case where the microscope heads 30 and 40 collide with each other when moved is, for example, a case where the microscope head 40 is moved toward the inspection point P2 while the inspection point P1 shown in FIG. In this case, the distance in the Y direction between the inspection points P1 and P2 is smaller than the mechanical width between the microscope heads 30 and 40.

  When the collision check is performed by the above processing, the process proceeds to step S206 in FIG. If the result of the collision confirmation is normal end (Yes in Step S206), the movement is made to the target coordinates instructed as the movement destination (Step S207), and then the hold is released for the other microscope head 40 (Step S208). , Get out of here.

On the other hand, when the suspension is ended by the collision confirmation (No in step S206), the movement operation of the microscope head 30 is suspended (step S209). That is, the movement of the microscope head 30 is stopped and does not move to the target coordinates (hereinafter, this state is referred to as operation suspension). When the operation is suspended, it is confirmed whether or not the other microscope head 40 is suspended (step S210). When the other microscope head 40 is not suspended (No in step S210), the process proceeds to step S201. Return. At this time, since the microscope head 30 maintains the operation suspended state, the microscope head 30 moves to a position where the other microscope head 40 does not collide and waits in step S201 until the operation suspension of the microscope head 30 is released. If there is an instruction to cancel the hold (steps S208, S215) from another microscope head 40 during standby, the standby state is canceled.
On the other hand, when other microscope heads 40 are suspended (Yes in step S210), all the microscope heads 30 and 40 are in a state in which they cannot move. Are compared (step S211). The operation priority order determines the order of the microscope heads 30 and 40 to be operated with priority, and is assigned to each microscope head 30 and 40 in advance. Also, the operation priority order may be determined as a specification so that the priority is higher if the microscope heads 30 and 40 are not assigned to the microscope heads 30 and 40 and are reserved later.

When the operation priority of the microscope head 30 is higher than that of the other microscope heads 40 (Yes in step S211), the other microscope heads 30 are moved to a safe position (hereinafter referred to as a standby position) that does not collide (step S212). Thereafter, the holding of the microscope head 30 is released (step S213). In this case, the processing is performed after returning to step S201. Since normal termination is set in step S204, the process proceeds to step S207 to move to the target coordinate, and thereafter, the instruction to cancel the holding of the other microscope head 40 (step S208) is given and the process is terminated.
On the other hand, when the operation priority of the microscope head 30 is lower than that of the other microscope heads 40 (No in step S211), the microscope head 30 moves to the standby position (step S214), and then the other microscope heads 40 are released from the hold release. An instruction is given (step S215). In this case, the process returns to step S201 and waits until the instruction to hold the microscope head 30 is released by another microscope head 40.

  The same processing is performed in the microscope head operation process (step S105B in FIG. 4) for the microscope head 40. When the processing is performed on all the inspection points, the glass substrate W is unloaded by the transfer robot 52. A new glass substrate W is carried in instead, and the above-described inspection process is performed again.

According to this embodiment, since the two microscope heads 30 and 40 on the same axis can be independently moved and the movable ranges are partially overlapped, the inspection points on the glass substrate W are Flexible inspection is possible according to the number and arrangement. For example, when the number of inspection points belonging to one movable range is larger than the number of inspection points belonging to the other movable range, the microscope heads 30 and 40 having the larger inspection points are frequently moved. Inspection can be performed efficiently. Further, the inspection can be efficiently performed by changing the sizes of the inspection ranges R1 and R2 so that the number of inspection points becomes substantially equal.
Furthermore, each microscope head 30 and 40 is configured to prevent collision of each microscope head 30 and 40 by comparing the current coordinates with the target coordinates of the movement destination, so that the inspection range partially overlaps. In this case, the inspection can be performed safely and reliably.
The conventional multi-head microscope apparatus is provided with a plurality of microscope heads to reduce the stroke of the stage and has a limit to downsizing the apparatus because it is configured to move the substrate in the biaxial direction. In the present embodiment, since the microscope heads 30 and 40 are positively moved to move the glass substrate W only in the uniaxial direction, the apparatus can be miniaturized.

In the inspection point assignment process, the order in which the inspection point coordinates are stored in the inspection point group can be arbitrarily set. However, if the inspection point coordinates are stored in such an order that the two microscope heads 30 and 40 move in the same direction as indicated by arrows in FIG. 5, the frequency of operation suspension can be reduced, and the inspection throughput can be reduced. It can be improved.
Further, a thread different from the thread for performing the microscope head operation process shown in FIG. 6 may be constructed. The thread acquires the coordinates of the plurality of microscope heads 30 and 40 at any time and determines the possibility of collision. If it is determined that there is no possibility of a collision, the thread issues a hold release instruction to the hold release waiting process (step S201) in the flowcharts of the plurality of microscope heads 30 and 40. (Processing corresponding to steps S208, S213, and S215) is performed. By having such a thread, when another microscope head is out of the collision range, it becomes possible to immediately release the operation and operate, thereby improving the inspection throughput.

(Second Embodiment)
A second embodiment of the present invention will be described in detail with reference to the drawings. In addition, the same code | symbol is attached | subjected to the same component as the said embodiment. In addition, overlapping explanation is omitted.
As shown in FIG. 7, the microscope heads 30 and 40 are equipped with a distance measuring device 61 one by one. Each distance measuring device 61 is attached to the other microscope heads 30 and 40, and the two distance measuring devices 61 are attached at different positions. In FIG. 7, the distance measuring devices 61 are arranged differently in the height direction, but may be arranged at different positions in the X-axis direction (see FIG. 1). The distance measuring device 61 can measure the distance between the microscope heads 30 and 40 in units of several millimeters to several centimeters in a non-contact manner as in a known laser distance measuring device or ultrasonic distance measuring device. Use things. The distance measuring device 61 may be mounted on the Y-axis stage 22 (see FIG. 1) instead of being mounted on the microscope heads 30 and 40.

The operation of this embodiment will be described. Only the microscope head operation process, which is different from the first embodiment, will be described. In the following description, the processing for the microscope head 30 will be described, but the same processing is performed for the microscope head 40 as well.
As shown in FIG. 8, first, a standby position movement instruction confirmation process for the microscope head 30 is performed (step S301). In this process, when the standby position movement instruction is issued to the microscope head 30, the microscope head 30 is moved to the standby position. In the initial stage, no standby position movement instruction has been issued, and the process proceeds to the next process. Next, a collision confirmation process is performed in the process from step S302. That is, the inspection control device 50 acquires the value of the distance measuring device 61 (step S302). It is confirmed whether or not the acquired value is within the range of the instructed collision warning distance. If it is not within the collision warning distance (No in step S303), the status is set to normal end (step S304). On the other hand, if it is within the collision warning distance (Yes in step S303), the status is set to the end of hold (step S305).

  In step S306, it is determined whether or not the collision check has ended normally. If the test has been completed normally (Yes in step S306), the inspection control device 50 commands the start of movement to the target coordinates, and the microscope head 30 starts moving (step S307). In step S313, it is determined whether or not the movement of the microscope head 30 has been completed. If the movement has not ended (No in step S313), the process returns to step S301. When the movement is completed (Yes in step S313), the process exits this process and the process shown in FIG. 4 is executed.

  On the other hand, if the hold end is set in step S305, the process proceeds from step S306 to step S308. The inspection control device 50 suspends the movement to the target coordinates and issues a stop instruction to the microscope head 30. Furthermore, it is confirmed whether the operation of other microscope heads 40 is also pending (step S309). If the other microscope head 40 is not on hold (No in step S309), the process waits until the other microscope head 40 moves away from the collision warning distance. Specifically, the process returns from step S313 to step S301, and the same processing as described above is repeated until the positional relationship with the other microscope head 40 changes. On the other hand, if other microscope heads 40 are also pending operation (Yes in step S309), the operation priority order is compared (step S310). The comparison of the operation priorities is performed in the same manner as in the first embodiment.

  If the operation priority of the microscope head 30 is higher (Yes in step S310), a standby position movement instruction is issued to the other microscope head 40 (step S311), and the process proceeds to step S313. At this time, since the movement to the inspection point coordinates has not been completed, the process returns to step S301, and the above processing is repeated. Since the other microscope head 40 has moved to the standby position, the collision confirmation process of the microscope head 30 is normally completed (step S304). As a result, the microscope head 30 moves to the target coordinates earlier than the other microscope heads 40. When the movement is completed, the process here ends.

  On the other hand, when the operation priority of the other microscope heads 40 is high (No in step S310), a standby position movement instruction is issued to the microscope head 30 (step S312), and the other microscope heads 40 exceed the collision warning distance. Wait at the standby position until you leave. Specifically, the process returns from step S312 to step S301, and the above process is repeated. At this time, since the microscope head 30 has moved to the standby position, the collision confirmation of the other microscope heads 40 ends normally. As a result, the other microscope head 40 moves to the inspection point coordinates earlier than the microscope head 30, and the microscope head operation process in the other microscope head 40 is completed. Then, when the microscope head operation process of the other microscope head 40 is completed, the operation suspension of the microscope head 30 is released, and then the microscope head 30 moves to the target coordinates.

  According to this embodiment, since it is determined for each microscope head 30, 40 whether or not the operation is suspended according to the measurement result of the distance measuring device 61 mounted on each microscope head 30, 40. The movement control of 30, 40 can be more accurately performed, and the inspection throughput of the glass substrate W is improved. Compared with the first embodiment, in the first embodiment, in order to cancel the operation hold, it is necessary to wait until a fixed timing for performing the hold release. Since the movement hold can be canceled when the distance is out of the range of the collision warning distance, the inspection efficiency is improved.

(Third embodiment)
A third embodiment of the present invention will be described in detail with reference to the drawings. In addition, the same code | symbol is attached | subjected to the same component as the said embodiment. In addition, overlapping explanation is omitted.
FIG. 9 shows the processing performed in this embodiment. From step S101 to step S103, processing similar to that of the first embodiment is performed. In the inspection point assignment process in step S104A, inspection points are assigned in consideration of the collision risk area. As shown in FIG. 10, the collision risk area R3 is an area where two adjacent microscope heads 30 and 40 may collide with each other when the microscope heads 30 and 40 enter the area. Therefore, the width is substantially equal to the mechanical width of the microscope heads 30 and 40 themselves. When the mechanical width differs for each microscope head 30, 40, a predetermined value calculated from the width of each microscope head 30, 40 is adopted. When assigning inspection points, inspection point groups G1 of the microscope heads 30 and 40 corresponding to inspection points in regions other than the collision risk region R3 (inspection range R1 of the microscope head 30 and inspection range R2 of the microscope head 40) are assigned. Stored first as G2. The inspection points in the collision risk area R3 are stored separately as a collision risk area inspection point group G3. In FIG. 10, the areas R1 and R2 have substantially the same area. However, the areas may be different depending on the deviation of the inspection points, and the position of the collision risk area R3 may also be shifted from the center.

  Next, each of the microscope heads 30 and 40 performs a microscope head operation process (steps S105A and S105B) by parallel processing, and performs an inspection process for each inspection point (steps S106A and S106B). Through steps S107A, 107B, S108A, and S108B, the inspection points in the inspection ranges R1 and R2 are inspected in order as indicated by arrows in FIG. When all the microscope heads 30 and 40 are in the inspection end state (step S109), the inspection points in the collision risk area R3 are inspected (step S110). Specifically, one of the microscope heads 30 and 40 (in this case, the microscope heads 30 and 40 having the inspection ranges R1 and R2 adjacent to the collision risk region R3) that can move to the collision risk region R3. The inspection point coordinates of the collision risk region inspection point group G3 are sequentially given to one microscope head 30, 40, and the inspection is performed on each inspection point. Then, when the inspection for all inspection points is finished, the inspection for the glass substrate W is finished.

  According to this embodiment, the inspection points in the area where the microscope heads 30 and 40 may collide with each other are later inspected using one microscope head 30 and 40. Inspection can be performed without the heads 30 and 40 colliding with each other.

The present invention can be widely applied without being limited to the above-described embodiments.
The number of microscope heads that are optical heads may be three or more. For example, when there are three microscope heads, the movable ranges of all the microscope heads partially overlap, or the movable ranges of two adjacent microscope heads partially overlap, and the microscope heads at both ends move. The possible ranges may be configured so as not to overlap. In this case, parallel processing is performed for each microscope head, and microscope head operation processing (steps S105A and S105B) is performed between microscope heads having overlapping movable ranges.
The configuration of the microscope head is not limited to that shown in the embodiment. The specimen is not limited to the glass substrate W.
The substrate transport unit is not limited to the stage 6 that slides in the X direction. For example, an air levitation stage provided with a base portion that floats the glass substrate W by blowing out air along the X direction, and that is provided with a slider that holds the glass substrate W that is air levitated and moves along the X direction. There may be.

  A plurality of portal frames 20 may be arranged in parallel in the X-axis direction, and a plurality of microscope heads 30 and 40 may be arranged on each portal frame 20. Since the stroke amount in the X direction of the glass substrate W required for the inspection can be reduced, the apparatus can be downsized and the inspection throughput can be improved. The portal frame 20 may be configured to be movable in parallel with the X axis. In this case, the apparatus can be further downsized and the inspection throughput can be improved.

It is a top view which shows schematic structure of the multi-head microscope apparatus which concerns on embodiment of this invention. It is A arrow directional view of FIG. It is a figure which shows the control block of a multi-head microscope apparatus. It is a flowchart of the test | inspection in a multi-head microscope apparatus. It is a schematic diagram for demonstrating an example of a motion of a microscope head. It is a flowchart which shows the detail of a microscope head operation | movement process. It is the schematic at the time of providing the distance measuring machine in the microscope head. It is a flowchart which shows the detail of a microscope head operation | movement process. It is a flowchart of the test | inspection in a multi-head microscope apparatus. It is a schematic diagram for demonstrating an example of a motion of a microscope head.

Explanation of symbols

1 Multi-head microscope device 4 Motor (substrate transport unit)
5-axis (substrate transport section)
6 Stage (board transfer part)
20 Portal frame (support member)
30, 40 Microscope head 21 Linear guide (drive unit)
50 Inspection control device (head collision prevention control unit)
53A, 53B Motor driver (head collision prevention controller)
57,58 Motor driver (drive unit)
61 Distance measuring machine R3 Collision danger area W Glass substrate (substrate)

Claims (12)

A stage on which a glass substrate can be placed;
A support member arranged to bridge the stage in a bridge shape;
A plurality of optical head movement range is provided to be movable so as to overlap along the installing portion of the front Symbol support member,
A drive unit that independently moves the plurality of optical heads along the installation unit;
Assign the test points on the glass substrate with respect to each optical head, and a control means for each of said optical head to the inspection points assigned to each of which controls the drive unit to so that move,
I have a,
The control means determines whether or not two adjacent optical heads collide with each other during the operation of the driving unit, and does not collide one optical head with the other optical head when it is determined to collide. position is moved to, and more heads microscope apparatus according to claim Rukoto is moved to the coordinates of the other of said test points assigned an optical head.   The control means distributes inspection points on the glass substrate to the plurality of optical heads to set respective inspection ranges, and assigns operation priorities to the optical heads. 2. The plurality of heads according to claim 1, wherein when it is determined that the two collide with each other, the one optical head having a low operation priority is moved to a position where the other optical head does not collide with the other one having a high operation priority. Microscope device.   3. The multi-head microscope apparatus according to claim 2, wherein the control unit sets a collision risk area in which the two adjacent optical heads may collide with each other in addition to the respective inspection ranges. . The said control means gives the coordinate of a test | inspection point to any one of the said two said adjacent optical heads with respect to the said danger area of collision, and performs an inspection. Multi-head microscope device . 4. The multi-head microscope apparatus according to claim 2, wherein the control unit assigns and sets each inspection range equally to the plurality of optical heads. 5. The control means according to claim 2 or 3, characterized in that setting the size of the test range of each so that the number of inspection points on the glass substrate to the plurality of optical heads is almost equal The multi-head microscope apparatus described in 1. The control means sets a collision risk area where the two adjacent optical heads may collide with each other in addition to the respective inspection ranges, and the two adjacent optical heads The multi-head microscope apparatus according to claim 2, wherein the collision risk area is inspected after inspecting the respective inspection ranges.   The control means issues a standby position movement instruction to the one optical head having a low operation priority when it is determined that the distance is within a collision warning distance where the two adjacent optical heads collide. Item 3. The multi-head microscope apparatus according to Item 1 or 2.   The multi-head microscope apparatus according to claim 1, wherein the control unit moves the two adjacent optical heads in the same direction.   3. The multi-head microscope apparatus according to claim 1, wherein the control unit determines a possibility of collision from a distance between the two adjacent optical heads. 3. The multi-head microscope apparatus according to claim 1, wherein the control unit acquires the coordinates of the two adjacent optical heads and determines the possibility of a collision. 4. A method for controlling a multi-head microscope apparatus provided to be movable so that the movement range overlaps with respect to an inspection area on a glass substrate,
An allocation process step of assigning inspection points on the glass substrate to the optical heads;
An operation step of moving each optical head to an inspection point assigned to each;
Have
The operation process includes:
A determination step of determining whether or not two adjacent optical heads collide with each other during operation of each optical head;
If it is determined in the determination step that there is no collision, the optical heads are moved to the coordinates of the inspection points assigned in the assignment processing step, and if it is determined that there is a collision, one optical head Moving the second optical head to the coordinate of the inspection point assigned to the other optical head, and
A control method for a multi-head microscope apparatus.

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