JP4893116B2 - Paste applicator - Google Patents

Description

  The present invention relates to a paste applicator for applying a paste pattern of a desired shape on a substrate in a manufacturing process of a flat panel, a printed circuit board, and a semiconductor assembly.

  As a conventional technique, as shown in Patent Document 1, a glass substrate is placed on a fixed table, and the YZ axis direction is attached to a portal frame that is movable in the X axis direction with respect to the main surface of the glass substrate. The nozzle discharge port of the application head that can be moved is arranged so as to face each other, and the relative positional relationship between the substrate and the nozzle is changed while discharging the paste filled in the paste storage cylinder onto the substrate from the discharge port. Thus, a paste pattern having a desired shape is applied on the substrate. In Patent Document 1, the glass substrate size is increasing, the coating range of the coating head is expanded, and a plurality of coating heads are provided. As a result, electric wiring such as power lines and signal lines connected from the fixed external control panel to the portal frame and pneumatic piping are increased, and the number of cables following the portal frame is also increased.

  In addition, as shown in Patent Document 2, when the power receiving coil is moved in a non-contact manner to divide the power feeding section into a plurality of parts in order to move the transportation vehicle without contact, and the connecting coil mounted on the transportation vehicle is transferred, It is disclosed that the feeding phases of adjacent feeding sections are fed with the same phase.

JP 2002-346252 A JP 2001-211501 A

  With the increase in size of the substrate as in the above-mentioned conventional patent document 1, electric wiring such as power lines and signal lines connected from the fixed external control panel to the gate-type frame and pneumatic piping are increased, and the gate-type frame is increased. Since the number of cables to follow increases, it is not suitable for use in a clean environment due to dust generation due to cable wear and cable rubbing.

  Moreover, even if the non-contact power feeding method is applied as in Patent Document 2, another movable body that moves on the movable body is provided on the movable body, and power is supplied to the movable body, and There is no description about sending a control signal from a fixed part to a plurality of movable bodies such as a movable body and a coating head.

  An object of the present invention is to reduce the number of coating heads by reducing the number of coating heads as much as possible by increasing the number of coating heads, an external power source, an external control unit and a movable frame, and a plurality of coatings moving on the portal frame. It is an object of the present invention to provide a paste applicator configured to reduce the wear caused by the friction between the cables and the rubbing between cables and to transmit and receive control signals without error by applying an optical communication technique to the drive units of a plurality of application heads.

  In order to achieve the above object, the present invention provides a portal frame that can reciprocate in one direction on a gantry, a plurality of coating heads that can move in the longitudinal direction of the portal frame, and the coating head is provided. Relative positional relationship between the substrate and the nozzle while placing the substrate on a table provided so as to face the discharge port of the nozzle and discharging the paste filled in the paste storage cylinder onto the substrate from the discharge port In the paste applicator for applying a paste pattern of a desired shape on the substrate, the standing plates provided at both ends in the moving direction of the frame on the gantry side in order to supply power to the moving portal frame Two linear support members are fixed between them, power supply lines are arranged along the support members, and the power supply lines are fixed to the support members with fixing strings at a plurality of positions, and a gate-type frame is attached. The support member and the feed line supported thereto the through hole provided in the power receiving core is positioned so as not to contact the.

  According to the present invention, it is possible to eliminate the power wiring and signal wiring from the fixed part to the movable part, from the movable part to the movable part, and when moving the portal frame when applying and drawing the paste pattern on the main surface of the substrate. The power supply line is not in contact with the power receiving core fixed to the portal frame, and the winding provided on the power receiving core can be provided at an arbitrary position, improving the power receiving efficiency and improving the primary excitation inductance and mutual inductance. Stability can also be achieved.

  In the present invention, a motor driver is installed on the gantry in order to reduce the power supply and signal wiring connected to the portal frame for power supply to the motor that drives the coating head section and sensor signals. The power supply method to the driver is a non-contact power supply method consisting of a power supply line laid in the portal movement direction and a power receiving pickup attached to the portal frame, and a signal line from the main control unit to the driver is an optical wireless communication system In the following embodiment, a method for reducing the number of movable cables following the portal frame, realizing low dust generation, and reducing the number of wiring work steps will be described in detail.

Embodiments of the present invention will be described below with reference to the drawings.
FIG. 1 is a perspective view of a paste applicator to which the present invention is applied. The direction perpendicular to the extending direction of the portal frame is defined as the X axis, the extending direction of the portal frame is defined as the Y axis, and the vertical direction is defined as the Z axis. The portal frame basically reciprocates linearly in the X-axis direction, and the coating head reciprocates in the Y-axis direction. On the gantry 1, two portal frames 2A and 2B are provided. In the drawing, the same numbers in the right-side portal frame 2A and the left-side portal frame 2B represent the same parts , so that the description may be omitted.

  The two portal frames 2A and 2B are movable in the X-axis direction by driving an X-axis linear motor (not shown). Covers 3A and 3B covering the portal frame are provided above the portal frames 2A and 2B. Primary power receiving cores 6A and 6B having two through-holes are provided on the leg portions on one side of the portal frames 2A and 2B, and the primary feed line 5 is provided so as not to contact the core in the through-holes provided in the cores. Is laid along the gantry 1 in the X-axis direction. As the primary power supply line 5, a wire in which coated fine wires are combined to flow a high-frequency current is used. The primary power supply line 5 is connected to a high frequency power supply 4 installed on the ground side, and a high frequency voltage is supplied from this power supply. The primary power receiving cores 6A and 6B are respectively provided with secondary power supply lines 7A and 7B that also serve as secondary side windings and power supply lines to the portal frame. The secondary power supply line 7A is wound around the primary power receiving core 6A, is laid in the Y-axis direction on the cover 3A of the gate-type frame 2A, and supplies power to devices attached to the gate-type frame 2A. The secondary power supply line 7B is wound around the primary power receiving core 6B, is laid in a straight line in the Y-axis direction on the cover 3B of the gate-type frame 2B, and supplies power to devices attached to the gate-type frame. It has become.

  Four coating heads 8A to 8D are supported on the portal frame 2A, and four coating heads 8E to 8H are also supported on the portal frame 2B. As will be described in detail later, each coating head moves in the Y-axis direction by driving a Y-axis linear motor. Further, a part including a paste storage cylinder such as a coating nozzle provided in the coating head is moved in the Z-axis direction by a Z-axis motor.

Each of the coating heads 8A to 8H is provided with a secondary power receiving core 9A to 9H, and a Z-axis motor, a gap sensor, and the like are received by a voltage received by a power supply wire wound around the secondary power receiving cores 9A to 9H. Drive. The secondary power receiving cores 9A to 9H include the secondary feeding lines 7A,
7B is laid in the Y-axis direction so as to penetrate each core (secondary power receiving cores 9A to 9D have secondary power supply line 7A and secondary power receiving cores 9E to 9H have secondary power supply line 7B). Next power receiving core 9A
The high-frequency voltage is received by a wound power supply line provided in 9H.

  The main control unit 10 performs position control of each of the portal frames 2A and 2B and the coating heads 8A to 8H, processing of various sensor signals and image signals, and power ON / OFF control. Although not shown, the main control unit 10 includes a microcomputer and a RAM.

On the other leg of each of the portal frames 2A and 2B, there are optical communication means 11A to 11J on the gantry side (fixed side) and the gate for transmitting and receiving control signals and the like between the gantry frame and the gantry 1. Optical communication means 12A and 12B on the mold frame side (12B provided in the portal frame 2B is not shown in the figure) and optical communication means 14A to 14H (in the figure, the portal frame 2B in each figure) Side optical communication means 14E to 14H are not shown). FIG. 5 shows an enlarged view corresponding to one coating head 8A of the optical communication means. The fixed-side optical communication means 11I, 11J and the optical communication means 12A, 12B on each movable side frame are configured to transmit and receive light in the X-axis direction (the transmitted light of the half mirrors 13A, 13B is received). Used). Further, the optical communication means 14A to 14H of each coating head uses the reflected light of the half mirrors 13A and 13B provided between the ground side optical communication means 11A to 11H in order to transmit and receive light in the Y-axis direction. It is said. That is, the optical communication means 11A, 11J provided on the gantry side and the optical communication means 12A, 12B provided on the portal frame side, and the optical communication means 11A to 11A provided on the gantry side.
11H communicates with the optical communication means 14A to 14H on each coating head side. Further, as shown in FIG. 1, the optical communication means is arranged vertically so that the optical communication means 11E to 11H and 11J on the gantry side are located below and the optical communication means 11A to 11D and 11I are located above. . That is, the optical communication means on the portal frame 2B side is arranged on the lower side and the optical communication means on the portal frame 2A side is arranged on the upper side so that the light is not blocked even if arranged in the same direction. It is. Also, the modulation frequency is changed for each group so that interference does not occur. In the drawing, four sets of communication devices are shown to communicate with each other in the same direction, but the base side optical communication means 11A to 11D are divided into those installed on the front side of the base and those installed on the back side of the base. If the optical communication means on the application head side is also installed so as to communicate with the front side and the back side, two sets of optical communication means can be installed on the same straight line, and the mounting space can be saved. In addition, as described above, there is a halfway between the optical communication means 11A to 11J provided on the gantry side, the optical communication means 12A and 12B provided on the portal frame side, and the optical communication means 14A to 14H on each coating head side. Mirrors 13A and 13B are provided. Of this signal light of the fixed-side optical communication means 11A to 11J, the optical communication means 11I and 11J cause the straight light (transmitted light) to enter and receive the light-receiving elements of the optical communication means 12A and 12B. Of the emitted light from the optical communication means 11A to 11H, the reflected light from the half mirror is made incident on the optical communication means 14A to 14H provided for each coating head. Conversely, the light emitted from the optical communication means 12A and 12B provided in the portal frame enters the fixed-side optical communication means 11I and 11J as the light traveling straight through the half mirrors 13A and 13B is provided in each coating head. The emitted light from the optical communication means 14A to 14H is reflected by the half mirrors 13A and 13B and transmitted to the fixed-side optical communication means 11A to 11H.

In order to surely avoid interference between the optical communication means 11A to 11D, 11I and 11E to 11H, 11J and the optical communication means 12A, 14A to 14D and 12B, 14E to 14H, the optical communication means 11A to 11D, 11I. , The optical communication means 11E to 11H, 11J are provided at the opposite end of the frame, and the optical communication means 12B provided on the portal frame 2B is opposite to the optical communication means 12A of the portal frame 2A. It may be arranged and transmitted to the optical communication means 14A to 14H of the coating head provided in the respective portal frames 2A and 2B via the half mirrors 13A and 13B.

  That is, in this embodiment, a non-contact power feeding method is adopted in two stages for power feeding between the gantry and the gate frame, and between the gate frame and the coating head, and signal exchange also takes place between the ground side optical communication means and the half mirror. A method of directly transmitting data to and from the optical communication means arranged at each part is adopted. That is, half mirrors 13A and 13B are provided between the fixed-side optical communication means 11A to 11J, the portal frame-side optical communication means 12A and 12B, and the head-side optical communication means 14A to 14H. With this configuration, it is not necessary to provide the optical communication means for the fixed side and the optical communication means for the head side on the portal frame side, and the size of the apparatus can be reduced.

  The substrate 16 is configured to be sucked and held by a substrate holding mechanism 15 provided on a moving table (not shown) provided on the gantry 1. The substrate holding mechanism 15 has a structure capable of correcting the inclination in the X and Y planes by rotationally driving a θ-axis servo motor (not shown). Although a movable table (not shown) is provided for loading the substrate 16 onto the substrate holding mechanism 15, the loading direction may be the X-axis direction or the Y-axis direction.

  FIG. 2 is a view showing a portion of the coating head in FIG. FIG. 2A is a side view seen from the Y-axis direction, and FIG. 2B is an internal system diagram of the coating head. In order to avoid complications, the cable between the devices is not shown in FIG. FIG. 2 shows one coating head 8A of the portal frame 2A as a representative example, but the other coating heads have the same configuration.

  In FIG. 2A, a magnet 2a1 is provided on the upper surface of the portal frame 2A, and a linear scale 2a2 is provided on one side surface of the portal frame 2A. The portal frame 2A is provided with a Y-axis limit sensor 2a3. Further, the portal frame 2A is provided with a linear guide 2a4 in such a manner that the magnet 2a1 is sandwiched between one location on the other side and two locations on the top surface.

  The coating head 8A is provided with a lower surface base 8a8 and an upper surface base 8a9 so as to sandwich the cover 3A, and the upper surface base and the lower surface base are connected by a nozzle support member 8ab. A secondary power receiving core 9A is provided on the upper surface base 8a9. A secondary power supply line 7A is provided so as to penetrate the secondary power receiving core 9A, and a power supply line 9a1 is wound around the secondary power receiving core 9A. The power supply line 9a1 is connected to the power receiving unit 8a1.

A guide is provided on the surface of the lower surface base 8a8 facing the portal frame so as to be movable along the linear guide 2a4. Further, a Y-axis armature coil 8a4 is provided so as to face the magnet 2a1 provided on the upper surface of the portal frame of the lower surface base 8a8. In addition, a power receiving unit 8a1 that rectifies high-frequency power supplied from the secondary power receiving core 9A through the power supply line 9a1 of the coating head unit and performs voltage adjustment is provided on the lower surface base 8a8. Further, on the upper surface side of the lower surface base 8a8, a Y-axis motor driver 8a2 for controlling the movement in the Y-axis direction by controlling a voltage applied to the Y-axis armature coil 8a4, and a Z-axis motor for controlling the Z-axis motor 8a5 A driver 8a3 is provided. Furthermore, a Y-axis position detector 8a6 is provided on the lower surface side of the lower surface base 8a8 at a position facing the linear scale 2a2 provided on the portal frame side. Further, the optical communication means 14A on the head side is provided on the lower surface base 8a8 at a position where the signal light of the optical communication means 11A on the fixed side can be received.

  The nozzle support member 8ab is provided with a Z-axis guide 8a10. The Z-axis guide 8a10 is provided with a Z-axis table 8a11. The Z-axis motor 8a5 is driven to move the Z-axis table. The movement amount of the Z-axis table 8a11 is detected by the Z-axis position detector 8a7, and the detection result is used for control in the Z-axis motor driver 8a3. The Z-axis table 8a11 is provided with a paste storage cylinder 8a12 having a paste discharge nozzle 8a13, a distance meter 8a14 for measuring the distance between the substrate and the nozzle, and a position recognition camera 8a15 for detecting the position of the substrate. .

In FIG. 2B, the secondary side winding / coating head feeding wire 9a1 wound around the secondary receiving core 9A receives high frequency power from the secondary feeding wire 7A by the secondary receiving core 9A. The power is transmitted to the power receiving unit 8a1. The power receiving unit 8a1 is connected to a line for transmitting power to the Y-axis motor driver 8a2 via the Y-axis motor driver power line 9a2 and a Z-axis motor driver power line 9a3 for transmitting power to the Z-axis motor driver 8a3. The Y-axis motor driver 8a2 is provided with a Y-axis motor power line 9a4 connected to the Y-axis armature coil 8a4 and a Y-axis linear encoder signal line 14a5 for receiving a signal from the Y-axis position detector 8a6. A Z-axis motor power line 9a5 for supplying power to the Z-axis motor 8a5 and a Z-axis encoder signal line 14a6 for receiving a signal from an encoder provided in the Z-axis motor 8a5 are connected from the Z-axis motor driver 8a3. ing. The power receiving unit 8a1 is connected to a sensor driving power line 9a6 for supplying electric power to the distance meter 8a14 and the position recognition camera 8a15. The optical communication means 14A includes a Y-axis motor driver signal line 14a1, a Z-axis motor driver signal line 14a2, and a Y-axis position sensor. Signal line 14a3, Z-axis position sensor signal line 14a4, distance meter signal line 14a7, position recognition camera signal line 14a8, and the like are connected. By wiring in this way, the movable part of the connection line is reduced and dust generation due to rubbing of the wiring or the like is prevented. In addition, in the exchange of signals, the modulation frequency is changed for each corresponding device, so that information can be reliably transmitted without interference.

FIG. 3A is a detailed view of one primary power receiving core 6B. FIG. 3B is a cross-sectional view showing the arrangement of the feeder and the receiving wire and the shape of the support member with respect to the core. The other primary power receiving core 6A has substantially the same configuration. The power supply line provided on the portal frame and the power receiving core provided for each head have the same configuration. The primary power supply line 5 is fixed to a support member 17 formed of an insulator and having a desired rigidity with fixing strings 18 at a plurality of locations. The support member 17 has a structure in which screws are fixed to standing plates 19 provided on both ends in the moving direction of the portal frames 2A and 2B on the gantry 1. The standing plate 19 is also made of an insulating material. In this way, by fixing the primary power supply line to the support member 17, even if the primary power reception core 6 </ b> B moves and some vibration is applied through the space in the window provided in the primary power reception core, the primary power supply line is provided. 5 is not in contact with the power receiving core 6B, and the primary power supply line is not in contact with the primary power receiving core and short-circuiting due to dielectric breakdown, so that stable power supply can be performed. As shown in FIG. 3B, the shape of the support member 17 is not a columnar shape but a quadrangle with a recess, and the feed line is stabilized by forming it so that the feed line can be accommodated in the recess. It is also possible to support it.

The primary power receiving core 6B has a shape in which two windows are opened in a rectangular parallelepiped, and the primary power supply line 5 passes through the window. The primary power supply line 5 is a reciprocating electric wire, passes from the high-frequency power source 4 through the first standing plate 19 provided at the end of the gantry, passes through the window on one side of the primary power receiving core 6B , and the second at the opposite end of the gantry . The first standing plate 19 is folded, passes through the other window of the primary power receiving core 6B , passes through the first standing plate 19 , and returns to the high-frequency power source. The secondary winding serving as the secondary feeder 7A is wound around the upper portion of the window of the primary power receiving core 6A. As shown in the figure, one side of the window is wound clockwise and the other window is wound counterclockwise and connected in series so that the voltage induced in the windings of both windows is transmitted to the secondary feeder without canceling. I can do it. Further, by fixing the primary power supply line 5 to the support member 17 as shown in FIG. 3 (b), it is possible to concentrate the winding on the side of the window so that the winding and the power supply line do not contact each other. And the power supply efficiency from the primary feed line 5 to the secondary feed line can be improved. The secondary power receiving cores 9A and 9B have the same shape as the primary power receiving cores 6A and 6B . In FIG. 3, when 7B is read as 9a1, the secondary power receiving core 9A is represented. The arrows in the figure indicate the direction of current flow.

  The operation of the paste applicator will be described. FIG. 4 shows an operation flowchart of the apparatus in the present embodiment. In FIG. 4, first, power is turned on (step 100). Next, initial setting of the coating machine is executed (step 200). In this initial setting step, in FIG. 1, the motor for moving each axis and the Z-axis motor are driven by commands from each motor driver, and the substrate holding mechanism 15 is moved in the θ direction to be positioned at a predetermined reference position. . Further, the nozzle 8a13 (FIG. 2) is set to a predetermined origin position so that the paste discharge port becomes a position where paste application starts (that is, paste application start point). Furthermore, paste pattern data, substrate position data, paste discharge end position data, and the like are set.

  Such data is input to the main control unit 10 (FIG. 1) from a keyboard (not shown), and is instructed to each motor driver by the main control unit. These data are input to the microcomputer in the main control unit 10. It is stored in the built-in RAM.

  When this initial setting step (step 200) is completed, the substrate 16 is then mounted and held on the substrate holding mechanism 15 (FIG. 1) that holds the substrate 16 by suction (step 300). Subsequently, substrate preliminary positioning processing (step 400) is performed. In this process, the positioning mark provided on the substrate mounted on the substrate holding mechanism 15 is photographed by the position recognition camera 8a15, the center of gravity position of the positioning mark is obtained by image processing, and the inclination of the substrate 16 in the θ direction is determined. According to this detection, a θ-axis servo motor (not shown) is driven in accordance with this, and the inclination in the θ direction is corrected. Thus, the substrate preliminary positioning process (step 400) is completed.

  Next, paste pattern drawing processing (step 500) is performed. In this process, the discharge port of the nozzle 8a13 is moved to the substrate application start position, and the nozzle position is compared and adjusted. Next, the Z-axis motor 8a5 and the Z-axis table 8a11 are operated to set the height of the nozzle 8a13 to the paste pattern drawing height. The nozzle 8a13 is lowered by the initial moving distance based on the initial moving distance data of the nozzle. In the subsequent operation, the substrate surface height is measured by the distance meter 8a14, and it is confirmed whether or not the tip of the nozzle 8a13 is set to a height at which the paste pattern is drawn. If the drawing height cannot be set, the nozzle 8a13 is lowered by a minute distance, and the above-described substrate 16 surface measurement and the minute distance descent operation of the nozzle 8a13 are repeated to determine the height of the tip of the nozzle 8a13 as the paste. The pattern is set so as to be applied and drawn.

  When the above processing is completed, the X and Y axis linear motors are then driven based on the paste pattern data stored in the microcomputer RAM of the main control unit 10. As a result, the paste discharge port of the nozzle 8a13 moves in the X and Y directions according to the paste pattern data in a state where the paste discharge port faces the substrate 7. At the same time, the set atmospheric pressure is applied to the paste storage cylinder 8a12, and the discharge of the paste from the paste discharge port of the nozzle 8a13 is started. Thereby, application of the paste pattern to the substrate 16 is started.

  Then, as described above, the microcomputer of the main control unit 10 inputs the measured data of the distance between the paste discharge port of the nozzle 8a13 from the distance meter 8a14 and the surface of the substrate 16, and the undulation of the surface of the substrate 16 is input. Measurement is performed, and the Z-axis motor 8a5 is driven according to the measured value, and the set height of the nozzle 8a13 from the surface of the substrate 7 is kept constant. Thereby, a paste pattern can be apply | coated with a desired application amount.

  As described above, the drawing of the paste pattern proceeds. If it is determined that the paste discharge port of the nozzle 8a13 is the end of the drawing pattern determined by the paste pattern data on the substrate 16, if it is not the end, the process again. Return to the measurement process of the surface waviness of the substrate. Then, the coating drawing is repeated until the paste pattern formation reaches the end of the drawing pattern. When the end of the drawing pattern is reached, the Z-axis motor 8a5 is driven to raise the nozzle 8a13, and the paste pattern drawing step (step 500) is completed.

Next, the process proceeds to a substrate discharge process (step 600), the holding of the substrate 16 is released, and the substrate is discharged out of the apparatus. Then, it is determined whether or not to stop all the above processes (step 700). When the paste film is formed with the same pattern on a plurality of substrates, the process is repeated from the substrate mounting process (step 300). When such a series of processes for the substrate is completed, all the operations are completed (step 800).

Now, the operation of the power system using non-contact power feeding will be described. In FIG. 1 and FIG. 2, the high frequency current flowing through the primary power supply line 5 generates a high frequency magnetic field around the primary power supply line 5. The high-frequency magnetic field is concentrated on the high power permeability primary power receiving core 6A, and a magnetic flux is generated in the core. This magnetic flux is linked to the secondary power supply line 7A wound around the primary power receiving core 6A. By electromagnetic induction, a high frequency voltage is induced in the secondary power supply line 7A, and a high frequency current is generated in the secondary power supply line 7A. Similarly, in the secondary power receiving core 9A, a high-frequency magnetic flux is generated in the power receiving core, and a high-frequency voltage is induced in the power feeding line 9a1 of the coating head portion wound around the secondary power receiving core 9A by electromagnetic induction. A high frequency current is generated. The supplied high frequency power is rectified and converted into direct current by the power receiving unit 8a1 provided in the coating head 8A, and the voltage is adjusted to the rated voltage range of each motor driver. The power receiving unit 8a1 supplies necessary power to the Y-axis motor driver 8a2 and the Z-axis motor driver 8a3 through the Y-axis motor driver power line 9a2 and the Z-axis motor driver power line 9a3. Each motor driver supplies necessary power to the Y-axis armature coil 8a4 and the Z-axis motor 8a5 through the Y-axis motor power line 9a4 and the Z-axis motor power line 9a5. Further, since the power supplied to the position recognition camera 8a15 and the distance meter 8a14 has a low required voltage, the power receiving unit 8a1 further lowers the voltage from the motor driver voltage and supplies it through the sensor driving power line 9a6. In this way, the power cables in the movable part between the gantry and the gate type and between the gate type and the coating head can be reduced in wiring.

Next, a signal system using optical communication means will be described. First, a signal from the main controller 10 is sent to the optical communication means 11A to 11J on the gantry side via a control signal cable. Next, 11I,
11J converts the signal into an optical signal, modulates the light, and projects the light directly traveling (transmitted light) through the half mirrors 13A and 13B to the optical communication means 12A and 12B provided in the opposing gate-shaped frame. In the optical communication means 12A, 12B, the received optical signal is converted into an electrical signal and sent to a Y-axis motor driver or the like that drives the portal frame. Further, light reflected by the half mirrors 13A and 13B is sent from the main control unit 10 to the optical communication means 11A to 11H on the gantry side to the optical communication means 14A to 14D and 14E to 14H on the head side. The optical signals received by the head-side optical communication means 14A to 14H are demodulated, converted into electrical signals, and the Y-axis and Z-axis motor driver signal lines in the Y-axis and Z-axis motor drivers 8a2 and 8a3 in the coating head section. 14a1,
Communicate through 14a2. Motor ready signals from Y and Z axis motor drivers 8a2 and 8a3, control signals such as alarm signals, signals from Y axis position detector 8a6 and Z axis position detector 8a7, image signals from position recognition camera 8a15, distance meter 8a14 Is returned to the main control unit 10 through a path opposite to the above path. In this way, the signal cable in the communication part between the gantry and the gate type and between the gate type and the coating head can be reduced.

  As described above, since the movable part of the paste coating apparatus moves linearly in the X-axis direction or the Y-axis direction, the power supply core can be moved substantially linearly, and the power supply core can move there. The number of cables to be used can be reduced, and optical signals can be efficiently transmitted by arranging optical communication means on the fixed part side and movable part side via half mirrors instead of using signal lines, and a half mirror is arranged. Therefore, it is not necessary to dispose two optical communication means for the fixed part side and for the coating head side on the movable frame, and the apparatus can be reduced in size. For this reason, since power supply lines and signal lines can be significantly reduced, it is possible to prevent diffusion of dust generated by friction between cables and to prevent a decrease in position control accuracy due to the weight of the cable following the movable part. As a result, it is possible to realize highly accurate application without dust being mixed into the paste applied to the substrate surface. Furthermore, the present invention is characterized in that power can be fed and communicated in a plurality of movable parts in a non-contact manner, but it goes without saying that it can be applied to only one movable part in an apparatus having a plurality of movable parts.

  Furthermore, in the description so far, of the light from the ground side optical communication means, the transmitted light of the half mirror is transmitted to the optical communication means of the portal frame, and the reflected light is transmitted to the optical communication means of the coating head. Of course, by changing the arrangement of the optical communication means on the ground side, it is possible to transmit the transmitted light of the half mirror to the optical communication means on the coating head side and the reflected light to the optical communication means of the portal frame. .

It is a perspective view which shows one Embodiment of the paste applicator by this invention. It is the perspective view which shows the structure of the coating head in embodiment shown in FIG. 1, and the systematic diagram in a coating head. It is a detailed perspective view of a primary power receiving coil. It is a flowchart which shows the whole operation | movement in embodiment shown in FIG. It is an enlarged view of the structure of optical communication.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 ... Base, 2A, 2B ... Portal frame, 2a1 ... Magnet, 2a2 ... Linear scale, 2a3 ... Y-axis limit sensor, 2a4 ... Linear guide, 3A, 3B ... Cover, 4 ... High frequency power supply, 5 ... Primary power supply line, 6A, 6B ... primary power receiving core, 7A, 7B ... secondary feeder, 8A-8H ... coating head, 8a1 ... power receiving unit, 8a2 ... Y-axis motor driver, 8a3 ... Z-axis motor driver, 8a4 ... Y-axis armature coil 8a5 ... Z-axis motor, 8a6 ... Y-axis position detector, 8a7 ... Z-axis position detector, 8a8 ... Lower surface base, 8a9 ... Upper surface base, 8a10 ... Z-axis guide, 8a11 ... Z-axis table, 8a12 ... Paste Storage cylinder, 8a13 ... nozzle,
8a14 ... Distance meter, 8a15 ... Position recognition camera, 9A to 9H ... Secondary power receiving core, 9a1 ... Feed line, 9a2 ... Y-axis motor driver power line, 9a3 ... Z-axis motor driver power line, 9a4 ... Y-axis motor power line , 9a5 ... Z-axis motor power line, 9a6 ... sensor driving power line, 10 ... main control unit, 11A-11H, 12A-12H, 14A-14H ... optical communication means, 13A,
13B ... Half mirror, 14a1 ... Y-axis motor driver signal line, 14a2 ... Z-axis motor driver signal line, 14a3 ... Y-axis position sensor signal line, 14a4 ... Z-axis position sensor signal line,
14a5 ... Y-axis linear encoder signal line, 14a6 ... Z-axis encoder signal line, 14a7 ... Distance meter signal line, 14a8 ... Position recognition camera signal line, 15 ... Substrate holding mechanism, 16 ... Substrate.

Claims (7)

A portal frame that can reciprocate in one direction is provided on the gantry, and a plurality of coating heads that are movable in the longitudinal direction are provided on the portal frame so as to face the discharge port of the nozzle provided with the coating head. Relative positional relationship between the substrate and the nozzle while placing the substrate on a table provided on the substrate and discharging the paste filled in the paste storage cylinder provided on each of the coating heads onto the substrate from the discharge port In a paste applicator for applying a paste pattern of a desired shape on the substrate by changing
In order to supply power to the moving portal frame, the supporting member has two linear rigidity between the standing plates provided on both ends of the side along the moving direction of the portal frame on the gantry. were fixed, and a forward portion and a backward portion of the first feed line along the support member each is disposed, said support along the respectively a forward portion and a backward portion of the first feed line at a plurality of positions It was fixed with fixing straps to a member, the support member and contact the forward portion and the backward portion of the supported on it first feed line into a through hole provided in the power receiving core mounted on the gantry frame arranged so as to pass through without the second feeder line provided on the gantry frame is wound on the receiving core, the receiving core from said first feed line provided on said frame Through which the second power supply line is fed contactlessly Paste applying machine, characterized in that. In the paste applicator according to claim 1,
And a half mirror provided on the gantry frame, a second optical communication means provided with the light transmitted through the first inner the half mirror of the signal light from the optical communication means provided on the ground side to the gantry frame the third paste dispenser being characterized in that a structure to be input to the optical communication unit of the reflected light provided people in the plurality of coating heads each of said half mirror. In the paste applicator according to claim 2,
Paste applying machine, characterized in that said two movable portal frame provided was a structure in which a plurality each movable coating head to each of the gate-shaped on the frame. In the paste applicator according to claim 3,
Paste applying machine, characterized in that said two sets of said first optical communication means for said respective portal frame on the ground side, and arranged vertically to communicate to each of the gate-shaped frame. In the paste applicator according to claim 3,
Paste applying machine, characterized in that said two sets of said first optical communication means for said respective portal frame on the ground side, placed on the frame in a manner to sandwich the two said gate-shaped frame. In the paste applicator according to claim 3,
A paste applicator characterized in that mutual interference is prevented by providing a plurality of modulation frequencies of adjacent optical communication means . In the paste applicator according to claim 3,
The communication direction of the optical communication means on the coating head side is divided into two sets, the front side and the back side, and the mounting space can be effectively utilized by installing the ground side optical communication means on the front side and the back side. Paste applicator.

Images