Deprecated: The each() function is deprecated. This message will be suppressed on further calls in /home/zhenxiangba/zhenxiangba.com/public_html/phproxy-improved-master/index.php on line 456
JP5018391B2 - Paste applicator - Google Patents
[go: Go Back, main page]

JP5018391B2 - Paste applicator - Google Patents

Paste applicator Download PDF

Info

Publication number
JP5018391B2
JP5018391B2 JP2007266710A JP2007266710A JP5018391B2 JP 5018391 B2 JP5018391 B2 JP 5018391B2 JP 2007266710 A JP2007266710 A JP 2007266710A JP 2007266710 A JP2007266710 A JP 2007266710A JP 5018391 B2 JP5018391 B2 JP 5018391B2
Authority
JP
Japan
Prior art keywords
light
optical
mirror
signals
optical space
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
JP2007266710A
Other languages
Japanese (ja)
Other versions
JP2009100027A (en
Inventor
茂雄 渡辺
洋平 川口
弓人 近藤
章 西内
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Plant Technologies Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Plant Technologies Ltd filed Critical Hitachi Plant Technologies Ltd
Priority to JP2007266710A priority Critical patent/JP5018391B2/en
Publication of JP2009100027A publication Critical patent/JP2009100027A/en
Application granted granted Critical
Publication of JP5018391B2 publication Critical patent/JP5018391B2/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Landscapes

  • Coating Apparatus (AREA)
  • Optical Communication System (AREA)

Abstract

<P>PROBLEM TO BE SOLVED: To solve the problem that a plurality reflection mirrors has to be installed to bend the directions of lights between a plurality of movable objects, especially, when a transmission direction is different from a reception direction, while a signal line is not required by using an optospatial device in transmitting and receiving different signals for the plurality of movable objects. <P>SOLUTION: An optical communication device has a structure in which slits are provided on each reflection mirror so that signals are exchanged with a plurality of moving objects using one reflection mirror when a transmission direction is different from a reception direction. With this configuration, signals can be stably transmitted between each of transmitters and receivers without causing crosstalk. <P>COPYRIGHT: (C)2009,JPO&amp;INPIT

Description

本発明は、動部位が複数存在し、高速な情報通信を必要とする装置の制御系に関する。 The present invention is variable dynamic site there is a plurality, a control system of the apparatus which requires high-speed information communications.

従来の情報通信装置の相互間通信において、配線数を削減し省配線を行うため、光通信を用いて情報通信を行う光空間通信の手法が開発された。前記手法を装置内で使用する際に、装置構成が複雑になるに従い、光通信の光束の光軸の向きを途中で変える必要が生じ、一般的にミラー等を利用している。例えば特許文献1に示すように、可動体に信号を伝達する場合、ミラーを用いて光の伝達するようにしている。   In order to reduce the number of wirings and reduce wiring in communication between conventional information communication apparatuses, an optical space communication method for performing information communication using optical communication has been developed. When the method is used in an apparatus, it becomes necessary to change the direction of the optical axis of a light beam for optical communication as the apparatus configuration becomes complicated, and a mirror or the like is generally used. For example, as shown in Patent Document 1, when a signal is transmitted to a movable body, light is transmitted using a mirror.

特開平7−115398号公報Japanese Unexamined Patent Publication No. 7-115398

上記のようにミラーから反射された光束は、相手側光空間通信装置の距離により拡散して、必要とされる光信号の他に外部より反射された光が混在してしまうため、安定した通信品質が得られない可能性がある。   As described above, the light beam reflected from the mirror is diffused depending on the distance of the counterpart optical space communication device, and the light reflected from the outside is mixed in addition to the required optical signal. Quality may not be obtained.

その対策として、レンズなどにより光束を集中させる手法もあるが、光空間通信装置が移動する場合には焦点距離の調整が必要であり、複雑化した制御機構が必要不可欠である。また、一つの光空間通信装置に専用のミラーを設置していた。複数台の光空間通信装置を設置した際に、複数のミラーを設置する必要があった。   As a countermeasure, there is a method of concentrating the luminous flux with a lens or the like. However, when the optical space communication device moves, the focal length needs to be adjusted, and a complicated control mechanism is indispensable. In addition, a dedicated mirror was installed in one optical space communication device. When installing a plurality of optical space communication devices, it was necessary to install a plurality of mirrors.

また、この手法では各ミラーの調整が必要であり、設置スペースが多く必要である。また複数のミラーがあるため外部の光源が反射し、光信号のノイズとなる可能性がる。   In addition, this method requires adjustment of each mirror and requires a large installation space. Moreover, since there are a plurality of mirrors, an external light source may be reflected, resulting in optical signal noise.

さらに、1枚のミラーで複数台の光空間通信装置を使用した際、通信装置の配置やミラーとの距離が異なる場合に、隣接又は近傍のミラーに対応する光空間通信装置の光束が光空間通信装置に入光し干渉することにより互いの光源の影響で安定した通信品質が得られない。   Furthermore, when a plurality of optical space communication devices are used with a single mirror, the light flux of the optical space communication device corresponding to the adjacent or adjacent mirror is changed to the optical space when the arrangement of the communication devices and the distance from the mirror are different. By entering and interfering with the communication device, stable communication quality cannot be obtained due to the influence of the light sources of each other.

そこで、本発明の目的は、複数の発信源からの光信号を、方向の異なる複数の受信機に伝達するために、発信源と受信機との間反射ミラーを設けても信号を混信することなく、安定に伝達することのできる光空間通信装置を提供することにある。   Therefore, an object of the present invention is to transmit signals even if a reflection mirror is provided between the transmission source and the receiver in order to transmit optical signals from a plurality of transmission sources to a plurality of receivers having different directions. It is to provide an optical space communication device that can transmit stably.

上記目的を達成するために、本発明では、架台上に基板を載置するテーブルを設けるとともに、可動式の門型フレームに複数の塗布ヘッドを前記門型フレームの長手方向に移動可能に設け、前記架台側に設けた送受信機と前記複数の塗布ヘッドの各々側に設けた送受信機間で信号のやり取りを行う光空間通信装置を有するペースト塗布機において、前記架台側の送受信機と前記複数の塗布ヘッド側の送受信機間に、1つの前記門型フレームに反射鏡を1つ設け、前記反射鏡でほぼ直角方向に光の伝送方向を曲げるとともに、送信側の複数の送受信機からの光信号が混信しないように前記反射鏡に切り抜き穴で複数のスリットを形成して前記送信側の複数の送受信機からの光信号用に複数の反射部を形成した。 In order to achieve the above object, in the present invention, a table for placing a substrate on a gantry is provided, and a plurality of application heads are provided on a movable portal frame so as to be movable in the longitudinal direction of the portal frame, In a paste applicator having an optical space communication device for exchanging signals between a transmitter / receiver provided on the gantry side and a transmitter / receiver provided on each side of the plurality of coating heads, Between the transmitter and receiver on the coating head side, one reflecting mirror is provided on one of the portal frames, and the light transmission direction is bent by the reflecting mirror in a substantially right angle direction, and optical signals from a plurality of transmitters on the transmitting side are transmitted. In order to prevent interference , a plurality of slits are formed in the reflecting mirror by cutout holes, and a plurality of reflecting portions are formed for optical signals from the plurality of transmitters / receivers on the transmitting side .

本発明では、任意の位置に移動可能で複数の光空間通信装置を有する機構においてミラーに光通信制御系を設けることにより、光空間通信装置の設置間距離を最小化、且つ、各光空間通信装置において安定した通信品質の確保が可能である。   In the present invention, the optical communication control system is provided in the mirror in the mechanism that can move to an arbitrary position and has a plurality of optical space communication devices, thereby minimizing the distance between the optical space communication devices and each space optical communication. It is possible to ensure stable communication quality in the device.

1枚のミラーで複数の異なる距離に配置された光空間通信装置の光源を反射させるためには、各光源の光束を正確に相手側光空間通信装置に反射させる必要がある。   In order to reflect the light source of the optical space communication device arranged at a plurality of different distances with one mirror, it is necessary to accurately reflect the light flux of each light source to the counterpart optical space communication device.

光空間通信装置の概念図を図3に示す。光通信を行うための送信側1より光信号S1が発せられ、受信側2へ送られる。光空間通信を利用する製造装置では殆どの場合、送信側1と受信側2が同軸上に配置することができない。そこで反射鏡(以下ミラーと称する場合もある)3の反射面4で光信号S1を受信側2の方向へ反射させ、反射光S2が受信側2で受信される。   A conceptual diagram of the optical space communication apparatus is shown in FIG. An optical signal S1 is emitted from the transmission side 1 for performing optical communication and sent to the reception side 2. In almost all manufacturing apparatuses using optical space communication, the transmission side 1 and the reception side 2 cannot be arranged on the same axis. Therefore, the optical signal S1 is reflected in the direction of the receiving side 2 by the reflecting surface 4 of the reflecting mirror (hereinafter sometimes referred to as a mirror) 3 and the reflected light S2 is received by the receiving side 2.

このとき送信側1から発せられる光信号S1はミラー3で反射するまでに光の拡散により、送信側1より発せられた直後の光束の径よりもミラー3に到達した光束の径(S1a)が大きくなってしまう。また、反射した反射光S2は反射した直後より受信側2に到達した時光束の径(S2a)が大きくなってしまう。光空間通信装置が隣接している場合には、干渉等の影響により通信品質が劣化する可能性が大きい。なお、光空間通信装置が1組のみの使用の場合に影響ない。   At this time, the light signal S1 emitted from the transmission side 1 has a diameter (S1a) of the light beam reaching the mirror 3 due to the diffusion of light before being reflected by the mirror 3, rather than the diameter of the light beam immediately after being emitted from the transmission side 1. It gets bigger. Further, the reflected light S2 reflected has a larger diameter (S2a) of the luminous flux when it reaches the receiving side 2 immediately after being reflected. When optical space communication devices are adjacent to each other, there is a high possibility that the communication quality is deteriorated due to interference or the like. Note that there is no effect when only one set of optical space communication device is used.

上記に対して、複数の光空間通信装置を使用する場合には、双方の光空間通信装置の設置距離により通信品質に大きく影響する場合がある。また送信側1、受信側2の双方の位置が固定の場合は、光束の拡散する量を考慮し、互いの通信装置の配置を決めることで通信品質の劣化を防止することが可能である。しかし、送信側1又は受信側2が光軸方向Aに任意に移動可能で且つ複数の光空間通信装置する場合、任意の位置での光束の拡散量を計算し、光空間通信装置の間隔距離Lを決める必要があり、送信側1と受信側2の最大距離での光束の拡散径に準じた光空間通信装置間距離Lを設定する必要がある。   On the other hand, when a plurality of optical space communication devices are used, the communication quality may be greatly affected by the installation distance of both space optical communication devices. Further, when the positions of both the transmission side 1 and the reception side 2 are fixed, it is possible to prevent deterioration of communication quality by determining the arrangement of the communication devices in consideration of the amount of diffusion of the light beam. However, when the transmitting side 1 or the receiving side 2 is arbitrarily movable in the optical axis direction A and a plurality of optical space communication devices are used, the amount of light flux diffusion at an arbitrary position is calculated and the distance between the optical space communication devices is calculated. It is necessary to determine L, and it is necessary to set the distance L between the optical space communication devices according to the diffusion diameter of the light flux at the maximum distance between the transmission side 1 and the reception side 2.

こうした場合には、光空間通信装置間距離Lは大きくなり、設置スペースが大きくなってしまう。   In such a case, the distance L between the optical space communication devices becomes large and the installation space becomes large.

そこで本発明では、任意に移動可能な送信側1又は受信側2で変化する可能性のある光束径に対応するため、光の反射を行うミラー3に光束の拡散を制御するための機構を設けることとした。   Therefore, in the present invention, a mechanism for controlling the diffusion of the light beam is provided in the mirror 3 that reflects light in order to cope with the light beam diameter that may change on the transmitting side 1 or the receiving side 2 that can be arbitrarily moved. It was decided.

図1に本発明の光空間通信装置の概略図を示す。この図では、送信側に情報を備えた光を発信する複数の発光部(又は送信機)1が設けられ、この送信機1は図の矢示方向A(光軸方向)に移動可能に構成されている。本発明は異なる情報を光に載せて送信する複数の送信機と、送信機の発信方向とは異なる向きの受信方向に設置された複数の受信機に信号を伝達するために、1つの反射鏡を用いて、それぞれの光の進行方向を変化させて、それぞれの受信機が対応する送信機の光を受信できるように構成したものである。例えば、図4に示すような複数の塗布ヘッドを備えた塗布装置において、ガントリ上に移動可能に設けられた複数の塗布ヘッドに信号を伝達するために、固定部(地上側)に設けられた複数の送信機から、反射鏡を介して信号を伝達する構成としている。   FIG. 1 shows a schematic diagram of an optical space communication apparatus of the present invention. In this figure, a plurality of light emitting sections (or transmitters) 1 for transmitting light having information are provided on the transmitting side, and this transmitter 1 is configured to be movable in the direction indicated by an arrow A (optical axis direction) in the figure. Has been. In order to transmit signals to a plurality of transmitters that transmit different information on light and a plurality of receivers installed in a receiving direction different from the transmitting direction of the transmitter, the present invention provides a single reflecting mirror. Is used to change the traveling direction of each light so that each receiver can receive the light of the corresponding transmitter. For example, in a coating apparatus having a plurality of coating heads as shown in FIG. 4, it is provided on a fixed part (on the ground side) in order to transmit signals to a plurality of coating heads movably provided on a gantry. A signal is transmitted from a plurality of transmitters via a reflecting mirror.

図3に示したように、送信機1から発せられた光信号S1は反射鏡であるミラー3に到達するまでに光束径S1aが発信直後よりも大きくなる。一方、ミラー3は反射部4とスリット5(又は、光反射抑制素材などの貼付け等により構成してもよい)を設けた構成としてある。このスリット5の部分は、光の反射を抑制するために設けたもので、光の反射を制御する制御部の役目を持つ。また、反射部4は相互に任意の反射方向に設定可能な構成としてある。この反射鏡3に光束が当ると、拡散した光束は反射部4とスリット5にぶつかる。そのうち、スリット5にぶつかった光は吸収され、反射部4にぶつかった光は反射光S2となり受信機2側へ向かう。   As shown in FIG. 3, the light signal S1 emitted from the transmitter 1 has a light beam diameter S1a larger than that immediately after transmission until it reaches the mirror 3 that is a reflecting mirror. On the other hand, the mirror 3 is provided with a reflecting portion 4 and a slit 5 (or may be configured by pasting a light reflection suppressing material or the like). The slit 5 is provided to suppress the reflection of light and serves as a control unit that controls the reflection of light. Moreover, the reflection part 4 is set as the structure which can be set to arbitrary reflection directions mutually. When a light beam strikes the reflecting mirror 3, the diffused light beam collides with the reflecting portion 4 and the slit 5. Among them, the light hitting the slit 5 is absorbed, and the light hitting the reflecting portion 4 becomes reflected light S2 and travels toward the receiver 2 side.

また、スリット5に当った光は、反射光の方向とは別の方向に(又は反射抑制素材により)反射するように制御される。すなわち、反射部4に当った光量分だけが反射光S2となり、受信機2側へ向かう。これにより、受信機2側の光通信の光量及び光束径は送信部1の移動方向Aの位置に関係なく、定量化することが可能である。また、各光空間通信装置に対応した反射部を限定することにより、外部(又は隣接もしくは近傍の光空間通信装置)の光源による干渉光を低減し、安定した通信品質を保つことが可能である。   Further, the light hitting the slit 5 is controlled so as to be reflected in a direction different from the direction of the reflected light (or by a reflection suppressing material). That is, only the amount of light hitting the reflection unit 4 becomes the reflected light S2 and travels toward the receiver 2 side. Thereby, the light quantity and light beam diameter of the optical communication on the receiver 2 side can be quantified regardless of the position of the transmission unit 1 in the moving direction A. In addition, by limiting the reflection unit corresponding to each optical space communication device, it is possible to reduce the interference light caused by the light source of the outside (or adjacent or nearby optical space communication device) and maintain stable communication quality. .

反射鏡3に施すスリット5の例として、図2に示すように種々の幾何学的形状が考えられる。(a)は長方形型5aの切抜き穴であり、(b)は平行四辺形型5bの切抜き穴であり、図2(c)の十字形状5cの切抜き穴などが考えられる。切抜き穴を例としたが、穴を開ける代わりに光の反射を抑制する素材(光吸収部材)で反射部の周囲を形成か、又は、反射部周囲に反射を抑制する塗料を塗布することでも可能である。また、反射部4は平面反射面、局面を施した面などの形状が可能であり、反射鏡3に対して任意の反射角度設定が可能なものとする。   As an example of the slit 5 applied to the reflecting mirror 3, various geometric shapes are conceivable as shown in FIG. (A) is a cutout hole of the rectangular mold 5a, (b) is a cutout hole of the parallelogram mold 5b, and a cutout hole of the cross shape 5c in FIG. Although a cutout hole was taken as an example, instead of opening a hole, the periphery of the reflection part can be formed with a material that suppresses reflection of light (light absorbing member), or a coating that suppresses reflection can be applied around the reflection part. Is possible. Further, the reflecting section 4 can have a shape such as a plane reflecting surface or a surface with a curved surface, and an arbitrary reflection angle can be set with respect to the reflecting mirror 3.

反射鏡3は反射部4とスリット5の組み合わせにより、対応可能な光空間通信装置の数を増やすことができる。   The reflecting mirror 3 can increase the number of optical space communication devices that can be supported by the combination of the reflecting section 4 and the slit 5.

上記の発明をシール塗布装置に適用した場合の構成を図4に示す。図4に示したシール塗布装置は、架台50上に架台の長手方向に移動可能に、2つのガントリ(門型の移動機構)20A,20Bが基板16を載置するテーブルを跨ぐように設けてある。さらに、ガントリのフレーム30A,30B上には複数の塗布ヘッド8A〜8D、8E〜8Hがフレームの長手方向に移動可能に設けてある。各塗布ヘッドには塗布制御を行うために駆動系が設けてあるが、この駆動系への制御信号や、位置合わせのための信号等を送る必要がある。この際、装置全体を制御する主制御部10から各塗布ヘッド部の制御部に信号線で接続することも可能であるが、信号線が多くなり移動における抵抗となり位置合わせ精度が低下するという問題がある。そのため信号線による影響を低減すると共に、制御信号を確実に伝達するために光空間伝送を採用し、信号伝送に使用する部品点数を極力低減する構成とした。そこで、地上側の送受信機と塗布ヘッド側に設けた送受信機がほぼ直角方向を向いているため、光の方向を変更するための反射鏡が通常送信機又は受信機の数必要であるが、1つの反射鏡で複数の送信機と受信機間で信号の伝達を行えるようにしたものである。すなわち先に説明したスリット付きの反射鏡を用いて光の進む方向を変更する様にしたものである。   FIG. 4 shows a configuration when the above invention is applied to a seal coating apparatus. The seal coating apparatus shown in FIG. 4 is provided on the gantry 50 so that the two gantry (gate-type moving mechanisms) 20A and 20B straddle the table on which the substrate 16 is placed so as to be movable in the longitudinal direction of the gantry. is there. Further, a plurality of coating heads 8A to 8D and 8E to 8H are provided on the gantry frames 30A and 30B so as to be movable in the longitudinal direction of the frame. Each coating head is provided with a drive system for performing coating control, but it is necessary to send a control signal to the drive system, a signal for alignment, and the like. At this time, it is possible to connect the main control unit 10 that controls the entire apparatus to the control unit of each coating head unit by a signal line, but there is a problem in that the number of signal lines increases and resistance in movement reduces the alignment accuracy. There is. Therefore, in addition to reducing the influence of the signal line, optical space transmission is adopted to reliably transmit the control signal, and the number of parts used for signal transmission is reduced as much as possible. Therefore, since the transmitter / receiver provided on the ground side and the transmitter / receiver provided on the coating head side are oriented substantially at right angles, the number of reflectors for changing the direction of light is usually required for the number of transmitters or receivers. A single mirror can transmit signals between a plurality of transmitters and receivers. That is, the light traveling direction is changed by using the reflector with a slit described above.

主制御部10は制御信号を送受信機11A〜11Hに送信する。送受信機11A〜11Hからは電気信号を光信号に変換して、光信号をヘッド側に設けた送受信機13A〜13Hに送信する。これら送受信機のうち送受信機11A〜11Dは、フレーム30Aに設けられている塗布ヘッド8A〜8Dの送受信機13A〜13Dとの間で信号を伝送するためのものである。また、送受信機11E〜11Hはフレーム30Bに設けられている塗布ヘッド8E〜8Hに設けられている送受信機間で(図示せず)信号を伝送するためのものである。この場合送受信機11A〜11Hはフレーム30A,30Bの移動方向に向けて信号光を出射し、それぞれのフレームに設けたスリット付きの反射鏡で光をフレームの長手側に進むように反射させて、フレームに設けた各塗布ヘッドに光を伝達する構成となっている。   The main control unit 10 transmits control signals to the transceivers 11A to 11H. The transceivers 11A to 11H convert electrical signals into optical signals and transmit the optical signals to the transceivers 13A to 13H provided on the head side. Among these transceivers, the transceivers 11A to 11D are for transmitting signals with the transceivers 13A to 13D of the coating heads 8A to 8D provided in the frame 30A. The transceivers 11E to 11H are for transmitting signals (not shown) between the transceivers provided in the coating heads 8E to 8H provided in the frame 30B. In this case, the transceivers 11A to 11H emit signal light in the moving direction of the frames 30A and 30B, and reflect the light so as to travel to the longitudinal side of the frame by the reflecting mirrors with slits provided in the respective frames, Light is transmitted to each coating head provided on the frame.

また本図では、電力線も非接触給電が行えるように構成してある。すなわち、電源部54から架台上両端部に電線支持部材19が設けて有る。この電線支持部材19の間を移動するガントリ20A,20Bに設けた給電コア6A,6Bを貫通するように1次給電線17,18が配線されている。各コア6A,6Bにはそれぞれ2次給電線7A,7Bが巻きつけて設けられており、この2次給電線が各フレーム30A,30Bに設けた電線支持部材15を介して、同フレームに取り付けられている各塗布ヘッドに設けた給電コア9A〜9Hを貫通して配線されている。各ヘッドに設けた給電コアに設けた3次給電線を介して各ヘッドに電力が供給される構成としてある。   Further, in this figure, the power line is also configured to be able to perform non-contact power feeding. That is, the electric wire support member 19 is provided from the power source 54 to both ends on the gantry. The primary power supply lines 17 and 18 are wired so as to penetrate through the power supply cores 6A and 6B provided in the gantry 20A and 20B moving between the wire support members 19. Secondary power supply lines 7A and 7B are wound around the cores 6A and 6B, respectively. The secondary power supply lines are attached to the frames via the wire support members 15 provided in the frames 30A and 30B. The feed cores 9A to 9H provided in the respective coating heads are wired through. Electric power is supplied to each head through a tertiary power supply line provided in a power supply core provided in each head.

本実施例の光空間通信装置は、図のようにほぼ直角方向に光の伝送方向を曲げる必要があり、反射鏡14A、14Bをフレーム30A、30Bに配置してある。この反射鏡には先に説明したようにスリットが設けてあり、このスリットにより各送受信機が光信号を混信することなく伝達することが可能となっている。なお、本実施例では地上側(架台側)送受信機は固定されているが、ヘッド側の送受信機はフレーム30A,30Bに沿って移動する構成となっている。なお、移動するヘッド側の送信機は、地上側の受信機にヘッドの位置情報等を送信する構成となっている。 The optical space communication apparatus of the present embodiment needs to bend the light transmission direction substantially perpendicularly as shown in the figure, and the reflecting mirrors 14A and 14B are arranged in the frames 30A and 30B . As described above, the reflecting mirror is provided with a slit, which enables each transmitter / receiver to transmit an optical signal without interference. In the present embodiment, the ground side (mounting side) transceiver is fixed, but the head side transceiver is configured to move along the frames 30A and 30B. The moving head-side transmitter is configured to transmit head position information and the like to the ground-side receiver.

このように、本発明の反射鏡の構成を適用することで、送信機と受信機間に設ける反射鏡を1つで良くなり、装置構成を複雑にすることなく、確実に信号の送受信を行うことが可能となる。   Thus, by applying the configuration of the reflecting mirror of the present invention, only one reflecting mirror is required between the transmitter and the receiver, and signals can be reliably transmitted and received without complicating the device configuration. It becomes possible.

複数の光空間通信装置を有する通信構成の概念図である。It is a conceptual diagram of the communication structure which has several optical space communication apparatus. 反射鏡の光束の制御を行うための形態実施例の図である。It is a figure of the form Example for controlling the light beam of a reflective mirror. 光空間通信装置を有する通信構成の概念図である。It is a conceptual diagram of the communication structure which has an optical space communication apparatus. ペースト塗布装置に光空間通信を適用したときの構成図である。It is a block diagram when optical space communication is applied to a paste application device.

符号の説明Explanation of symbols

1…送信側、2…受信側、3…反射鏡(ミラー)、4…反射部、5…スリット、6A,6B…コア、8A〜8H…塗布ヘッド、9A〜9H…給電コア、10…主制御部、11A〜11H…送受信機、13A13H…送受信機、14A、14B反射鏡。 DESCRIPTION OF SYMBOLS 1 ... Transmission side, 2 ... Reception side, 3 ... Reflection mirror (mirror), 4 ... Reflection part, 5 ... Slit, 6A, 6B ... Core, 8A-8H ... Coating head, 9A-9H ... Feeding core, 10 ... Main controller, 11A to 11H ... transceivers, 13A ~ 13 H ... transceiver, 14A, 14B ... reflector.

Claims (1)

架台上に基板を載置するテーブルを設けるとともに、可動式の門型フレームに複数の塗布ヘッドを前記門型フレームの長手方向に移動可能に設け、前記架台側に設けた送受信機と前記複数の塗布ヘッドの各々側に設けた送受信機間で信号のやり取りを行う光空間通信装置を有するペースト塗布機において、
前記架台側の送受信機と前記複数の塗布ヘッド側の送受信機間に、1つの前記門型フレームに反射部を有する反射鏡を1つ設け、前記反射部でほぼ直角方向に光の伝送方向を曲げるとともに、送信側の複数の送受信機からの光信号が混信しないように前記反射鏡に切り抜き穴で複数のスリットを形成し、前記送信側の複数の送受信機からの光信号用に複数の反射部を形成したことを特徴とするペースト塗布機。
A table for placing the substrate on the gantry is provided, and a plurality of application heads are provided on a movable portal frame so as to be movable in the longitudinal direction of the portal frame. In a paste coating machine having an optical space communication device for exchanging signals between transceivers provided on each side of the coating head,
One reflector having a reflecting portion is provided on one gate-shaped frame between the transmitter / receiver on the gantry side and the transmitter / receiver on the plurality of coating heads, and the light transmitting direction is set substantially perpendicular to the reflecting portion. A plurality of slits are formed in the reflecting mirror with cutout holes so that optical signals from a plurality of transmitters / receivers on the transmission side do not interfere with each other, and a plurality of reflections for optical signals from the plurality of transmitters / receivers on the transmission side are formed. A paste applicator characterized by forming a part .
JP2007266710A 2007-10-12 2007-10-12 Paste applicator Expired - Fee Related JP5018391B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2007266710A JP5018391B2 (en) 2007-10-12 2007-10-12 Paste applicator

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2007266710A JP5018391B2 (en) 2007-10-12 2007-10-12 Paste applicator

Publications (2)

Publication Number Publication Date
JP2009100027A JP2009100027A (en) 2009-05-07
JP5018391B2 true JP5018391B2 (en) 2012-09-05

Family

ID=40702654

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2007266710A Expired - Fee Related JP5018391B2 (en) 2007-10-12 2007-10-12 Paste applicator

Country Status (1)

Country Link
JP (1) JP5018391B2 (en)

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60160738A (en) * 1984-02-01 1985-08-22 Hitachi Ltd Signal transmitter of orthogonal type robot
JP3022711B2 (en) * 1993-10-18 2000-03-21 日立造船株式会社 Optical space communication device for 3D mobile machine
JP4815872B2 (en) * 2005-05-20 2011-11-16 株式会社日立プラントテクノロジー Paste applicator
JP4893116B2 (en) * 2006-06-09 2012-03-07 株式会社日立プラントテクノロジー Paste applicator
JP4893016B2 (en) * 2006-02-17 2012-03-07 株式会社日立プラントテクノロジー Paste applicator

Also Published As

Publication number Publication date
JP2009100027A (en) 2009-05-07

Similar Documents

Publication Publication Date Title
JP6169339B2 (en) Shape measuring method and apparatus
US9278454B2 (en) Production apparatus
JP5664549B2 (en) Capture device, capture method, and capture program
US8611758B2 (en) Arrays, system and method for bi-directional data transmission
US9389307B2 (en) Panoramic scan radar and panoramic laser scanning method
CN100592937C (en) Paste coating apparatus
US20200052451A1 (en) Welding System
CN207757070U (en) Laser-processing system
CN103909346A (en) Large format laser marking device
CN206411290U (en) A kind of change angle of divergence emitter of wireless light communication antenna
JP7827076B2 (en) Wireless communication system, management device therefor, relay device, communication control method, and communication control program
KR101937227B1 (en) Test system based on actuating antenna
JP5018391B2 (en) Paste applicator
EP3345030B1 (en) System, method, and apparatus for optical broadcast transmission in a circuit board
CN105759429A (en) Multiple-light-source concentrating equipment and sequencing-instrument optical system possessing the multiple-light-source concentrating equipment
KR101721926B1 (en) Device for measuring performance of antenna
CN106772809A (en) A kind of change angle of divergence emitter of wireless light communication antenna
JP3778874B2 (en) Non-contact power feeding device
WO2020183729A1 (en) Laser device and laser machining apparatus
US20140314404A1 (en) Optical communication apparatus
JP2016118418A (en) electronic balance
JP2018170647A (en) Spatial optical transmission device
JP4925239B2 (en) Synchrotron radiation angle measuring device
CN103612036B (en) Wire welding machine
JP2023116169A (en) Power supply device, power supply system, and power supply method

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20100729

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20111213

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20111220

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20120217

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20120306

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20120425

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20120515

A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20120528

R150 Certificate of patent or registration of utility model

Free format text: JAPANESE INTERMEDIATE CODE: R150

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20150622

Year of fee payment: 3

S111 Request for change of ownership or part of ownership

Free format text: JAPANESE INTERMEDIATE CODE: R313111

R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350

LAPS Cancellation because of no payment of annual fees