JP4920227B2

JP4920227B2 - Firing jig

Info

Publication number: JP4920227B2
Application number: JP2005282316A
Authority: JP
Inventors: 克也鶴田
Original assignee: Molex LLC
Current assignee: Molex LLC
Priority date: 2005-09-28
Filing date: 2005-09-28
Publication date: 2012-04-18
Anticipated expiration: 2025-09-28
Also published as: JP2007093093A

Description

本発明は、セラミックコンデンサ等の電子部品である被焼成物を焼成する際に使用される焼成用治具に関する。 The present invention relates to a firing jig used when firing an object to be fired, which is an electronic component such as a ceramic capacitor.

例えば、積層セラミックコンデンサなどの電子部品の製造工程においては、２００〜５００℃の低温で被焼成物中（電子部品）に含有している有機物（バインダ）を放散させるための脱バインダ工程と、この脱バインダ工程の後に８００℃以上の高温で被焼成物（電子部品）を焼成するための焼成工程とがある。 For example, in a manufacturing process of an electronic component such as a multilayer ceramic capacitor, a binder removal process for diffusing an organic substance (binder) contained in an object to be fired (electronic component) at a low temperature of 200 to 500 ° C., and this There is a firing step for firing the object to be fired (electronic component) at a high temperature of 800 ° C. or higher after the binder removal step.

このような工程では、電子部品（被焼成物）を焼成用治具に載置したうえで、バッチ炉や連続炉に入れている。焼成用治具は、使用条件に応じた機械的強度と耐熱性を備えていなければならないのは勿論のこと、被焼成物である電子部品と反応しないという特性が要求される。
このような焼成用治具の一例として特許文献１に記載のものが知られている。この特許文献１に記載されている焼成用治具は、セラミック長繊維の織物と、該織物の外周縁部を固定したセラミックの枠体とからなるものであり、織物の外周縁部と枠体とは、耐熱性無機接着剤で固定されている。
このような焼成用治具は、織物であり通気性が良好であるため、この焼成用治具に載置された電子部品（被焼成物）は焼成時に所定の雰囲気ガスで覆われ、均一に焼成される。
特開２０００−３０４４５９号公報 In such a process, an electronic component (a material to be fired) is placed on a firing jig and then placed in a batch furnace or a continuous furnace. The firing jig is required not only to have mechanical strength and heat resistance according to the use conditions, but also to have a characteristic that it does not react with the electronic parts that are the objects to be fired.
The thing of patent document 1 is known as an example of such a jig for baking. The firing jig described in Patent Document 1 is composed of a ceramic long fiber fabric and a ceramic frame to which the outer peripheral edge of the fabric is fixed. Is fixed with a heat-resistant inorganic adhesive.
Since such a firing jig is a woven fabric and has good air permeability, the electronic component (substance to be fired) placed on the firing jig is covered with a predetermined atmosphere gas during firing, and is uniformly Baked.
JP 2000-304559 A

しかしながら、前記従来の焼成用治具は織物であるため、使用回数が多くなると次第に変形（反り等）していき、この変形が大きくなると、被焼成物の載置を良好に行えなくなり、焼成用治具として使用不能なものとなる。
また、焼成用治具はセラミック長繊維の織物であるため、金属繊維等の織物に比して靭性が低く、比較的大きな衝撃が作用すると亀裂や破壊が生じ易いという問題もある。 However, since the conventional firing jig is a woven fabric, it gradually deforms (warps, etc.) as the number of uses increases, and when this deformation increases, the object to be fired cannot be placed well, and the firing It becomes unusable as a jig.
Further, since the firing jig is a ceramic long fiber woven fabric, it has a low toughness as compared with a metal fiber woven fabric, and there is a problem that cracks and breakage are likely to occur when a relatively large impact is applied.

本発明は上記事情に鑑みてなされたもので、使用回数が多くなっても変形が生じ難く、かつ亀裂や破壊等が生じ難く、しかも被焼成物と反応しない焼成用治具を提供することを課題としている。 The present invention has been made in view of the above circumstances, and it is intended to provide a firing jig that does not easily deform even when the number of uses increases, and that does not easily crack or break, and that does not react with the object to be fired. It is an issue.

上記課題を解決するために、請求項１に記載の発明は、被焼成物を焼成する際に該被焼成物が載置される焼成用治具において、
鉄以上の機械的強度と耐熱性を有する金属製の薄板に、多数の小孔が形成された治具本体と、
この治具本体の少なくとも前記被焼成物が載置される載置面に形成されたセラミック被覆層とを備えたことを特徴とする。 In order to solve the above-mentioned problem, the invention according to claim 1 is a firing jig in which the firing object is placed when firing the firing object.
A jig body in which a large number of small holes are formed in a thin metal plate having mechanical strength and heat resistance higher than iron,
It is characterized by comprising at least a ceramic coating layer formed on a mounting surface on which the object to be fired is mounted.

ここで、前記金属製の薄板としては、ＳＵＳ４３０等のステンレス製の薄板が好適に使用されるが、薄板の材料はこれに限るものではない。例えば、インコネル、ハステロイ等の耐熱性金属を使用してもよいし鉄を使用してもよい。耐熱温度としては１０００℃程度が望ましい。
また、薄板の厚さは、０．６ｍｍ程度に設定するのが好ましいが、これに限るものではない。厚さが厚いほど機械的強度は向上するが、その反面、重量増大となり、作業性が低下したり、熱容量が大きくなって、焼成効率が低下することを考慮すると、薄板の厚さは０．３ｍｍ〜１．０ｍｍ程度が望ましい。 Here, as the metal thin plate, a stainless steel thin plate such as SUS430 is preferably used, but the material of the thin plate is not limited thereto. For example, a heat resistant metal such as Inconel or Hastelloy may be used, or iron may be used. The heat resistant temperature is preferably about 1000 ° C.
Moreover, although it is preferable to set the thickness of a thin plate to about 0.6 mm, it is not restricted to this. The mechanical strength is improved as the thickness is increased, but on the other hand, the weight increases, the workability is lowered, the heat capacity is increased, and the firing efficiency is lowered. About 3 mm to 1.0 mm is desirable.

また、前記小孔の形状は、円形が好適であるが、これに限ることはない。例えば、楕円形、長円形、三角形、四角形、菱形、多角形等でもよい。また、小孔の直径は、載置する電子部品（被焼成物）の大きさによって適宜設定するが、載置する電子部品（被焼成物）より大きいと、電子部品（被焼成物）が小孔から落下したり、電子部品（被焼成物）とほぼ等しいか、若干大きいと、電子部品（被焼成物）が小孔に嵌り込んだりするので好ましくない。
さらに、セラミック被覆層は、例えばアルミナを溶射によって被覆形成するが、これ以外の方法で被覆形成してもよく、また、アルミナ以外のセラミック、例えばジルコニア等で被覆形成してもよい。
また、セラミック被覆層は、治具本体の少なくとも載置面に形成するが、治具本体の表面全体に形成するのが好ましい。 Further, the shape of the small hole is preferably a circular shape, but is not limited thereto. For example, an elliptical shape, an oval shape, a triangular shape, a quadrangular shape, a rhombus shape, a polygonal shape, and the like may be used. The diameter of the small hole is set as appropriate depending on the size of the electronic component (fired object) to be placed, but if it is larger than the electronic component (fired object) to be placed, the electronic component (fired object) is small. If it falls from the hole or is approximately equal to or slightly larger than the electronic component (sintered product), the electronic component (sintered product) fits into the small hole, which is not preferable.
Further, the ceramic coating layer is formed by spraying alumina, for example, but may be formed by other methods, or may be formed by a ceramic other than alumina, such as zirconia.
Further, the ceramic coating layer is formed on at least the mounting surface of the jig body, but is preferably formed on the entire surface of the jig body.

請求項１に記載の発明によれば、治具本体が鉄以上の機械的強度と耐熱性を有する金属製の薄板によって構成されているので、使用回数が多くなっても、織物に比して、変形が生じ難く、かつ、亀裂や破壊等も生じ難い。
また、治具本体の少なくとも被焼成物が載置される載置面にセラミック被覆層が形成されているので、治具本体に被焼成物が直接接触することがなく、よって、被焼成物と反応しないという特性を満たす。
さらに、治具本体に多数の小孔が形成されており、通気性が良好であるため、この治具本体に載置された被焼成物は焼成時に所定の雰囲気ガスで覆われ、かつバインダが放出し易いので、均一に焼成することができる。 According to invention of Claim 1, since the jig | tool main body is comprised with the metal thin plate which has mechanical strength and heat resistance more than iron, even if the frequency | count of use increases, compared with a textile fabric. Deformation hardly occurs, and cracks and breakage hardly occur.
In addition, since the ceramic coating layer is formed on the mounting surface of at least the object to be fired of the jig body, the object to be fired is not in direct contact with the jig body. Satisfies the property of not reacting.
Furthermore, since a large number of small holes are formed in the jig body and the air permeability is good, the object to be fired placed on the jig body is covered with a predetermined atmospheric gas during firing, and the binder is Since it is easy to discharge | release, it can bake uniformly.

また、前記セラミック被覆層は、アルミナを前記治具本体に溶射することによって形成されていることを特徴とする。
The ceramic coating layer may be formed by spraying alumina on the jig body.

溶射方法としては、プラズマジェットやプラズマアークを熱源とするプラズマ式溶射法が好適に使用される。また、溶射するアルミナの粒子直径は、１０μｍ〜８０μｍ程度が望ましい。特に、アルミナの粒径が８０μｍ程度の大きなものであると、当該アルミナ粒子を溶射されてなるセラミック被覆層の表面の粗さが比較的粗くなって、この表面と被焼成物との間に隙間が形成されるので、さらに均一な焼成を行うことができる。 As the thermal spraying method, a plasma thermal spraying method using a plasma jet or a plasma arc as a heat source is preferably used. Moreover, the particle diameter of the alumina to be sprayed is desirably about 10 μm to 80 μm. In particular, if the alumina particle size is as large as about 80 μm, the surface of the ceramic coating layer formed by spraying the alumina particles becomes relatively rough, and there is a gap between the surface and the object to be fired. As a result, a more uniform firing can be performed.

請求項１に記載の発明によれば、アルミナを治具本体に溶射することによって、セラミック被覆層を容易に形成することができる。
According to the first aspect of the present invention, the ceramic coating layer can be easily formed by spraying alumina onto the jig body.

また、前記治具本体は、前記被焼成物が載置される平板状の載置板と、この載置板の周囲に設けられた立上り部とを備え、
前記立上り部にもアルミナが溶射されてなるセラミック被覆層が形成されていることを特徴とする。
また、前記治具本体は、展開された状態では、その外周縁部に切込みが形成されて、前記立上り部は治具本体の外周縁部を折り曲げて立て起こすことで形成されている。前記切込みによって、治具本体には耳部が形成され、この耳部が折り曲げられて前記立上り部に重ね合されていることを特徴とする。
In addition, the jig body includes a flat plate-like mounting plate on which the object to be fired is mounted, and a rising portion provided around the mounting plate,
A ceramic coating layer formed by thermally spraying alumina is also formed on the rising portion.
Further, when the jig body is unfolded, a cut is formed in the outer peripheral edge portion thereof, and the rising portion is formed by bending and raising the outer peripheral edge portion of the jig main body. An ear portion is formed in the jig main body by the cutting, and the ear portion is bent and overlapped with the rising portion.

ここで、前記平板状の載置板は、矩形状のものが好ましいが、これに限ることなく、例えば、円形、長円形、菱形、多角形等でもよい。
また、立上り部は、載置板の周囲に連続して設けられてもよく、所定間隔で設けられてもよい。また、立上り部の高さは、載置板に載置される被焼成物より高く設定するのが望ましい。
さらに、立上り部の横断面形状は矩形状が好ましい、つまり立上り部を壁状に形成するのが好ましいが、これに限ることはない。例えば、立上り部の横断面形状を半円形状、三角形状やその他の異形の断面形状としてもよい。
また、立上り部にセラミック被覆層を形成する場合、少なくとも載置板の内側を向く部位に形成するのが望ましい。 Here, the flat plate-like mounting plate is preferably rectangular, but is not limited thereto, and may be, for example, a circle, an oval, a rhombus, or a polygon.
Further, the rising portions may be provided continuously around the mounting plate, or may be provided at predetermined intervals. Moreover, it is desirable to set the height of the rising portion to be higher than the object to be fired placed on the placing plate.
Furthermore, the cross-sectional shape of the rising portion is preferably rectangular, that is, the rising portion is preferably formed in a wall shape, but is not limited thereto. For example, the cross-sectional shape of the rising portion may be a semicircular shape, a triangular shape, or other irregular cross-sectional shapes.
Moreover, when forming a ceramic coating layer in a rising part, it is desirable to form at least the site | part which faces the inner side of a mounting board.

請求項１に記載の発明によれば、被焼成物が載置される載置板の周囲には、立上り部が設けられているので、この立上り部によって被焼成物のこぼれ落ちを防止できる。
また、焼成用治具を上下に積み重ねた際に、上下に隣り合う載置板間に立上り部の高さの分だけの隙間を形成できるので、載置板に載置された被焼成物と、上方の載置板との間に通気層を形成できる。よって、被焼成物が所定の雰囲気ガスで覆われ、かつバインダが放出し易いので、均一に焼成することができる。
また請求項２の発明によれば、小孔が、立上がり部と耳部とに形成されている。
According to the first aspect of the present invention, since the rising portion is provided around the mounting plate on which the object to be fired is placed, the rising object can prevent the fired object from falling off.
In addition, when stacking the firing jig up and down, a gap corresponding to the height of the rising portion can be formed between the mounting plates adjacent to each other in the vertical direction, so that the object to be fired placed on the mounting plate and A ventilation layer can be formed between the upper mounting plate. Therefore, the object to be fired is covered with a predetermined atmospheric gas and the binder is easily released, so that it can be fired uniformly.
According to the invention of claim 2, the small holes are formed in the rising portion and the ear portion.

請求項３に記載の発明は、請求項２に記載の焼成用治具において、前記立上り部は壁状に形成されており、この立上り部と前記載置板とのなす角度が９０度以上であることを特徴とする。
The invention according to claim 3 is the firing jig according to claim 2 , wherein the rising portion is formed in a wall shape, and an angle formed by the rising portion and the mounting plate is 90 degrees or more. It is characterized by being.

請求項３に記載の発明によれば、立上り部と載置板とのなす角度が９０度以上であるので、立上り部の、載置板の内側を向く面にセラミック被覆層を容易に形成できる。すなわち、立上り部と載置板とのなす角度が９０度を超えると、立上り部の載置板の内側を向く面（内側面）が、斜め上方側にも向くので、この内側面に容易にアルミナを溶射できる。また、立上り部と載置板とのなす角度が９０度である場合は、９０度を超える場合よりアルミナの溶射を行い難いが、溶射ノズルを斜めに向けることによって、立上り部の内側面に容易にアルミナの溶射を行える。

According to the third aspect of the invention, since the angle formed by the rising portion and the mounting plate is 90 degrees or more, the ceramic coating layer can be easily formed on the surface of the rising portion facing the inner side of the mounting plate. . That is, when the angle formed by the rising portion and the mounting plate exceeds 90 degrees, the surface (inner side surface) facing the inner side of the mounting plate of the rising portion also faces obliquely upward, so that this inner surface can be easily Alumina can be sprayed. Also, when the angle between the rising part and the mounting plate is 90 degrees, it is difficult to spray alumina than when it exceeds 90 degrees, but it is easy to apply to the inner surface of the rising part by directing the spray nozzle at an angle. It is possible to spray alumina.

本発明によれば、治具本体が鉄以上の機械的強度と耐熱性を有する金属製の薄板によって構成されているので、使用回数が多くなっても、織物に比して、変形が生じ難く、かつ、亀裂や破壊等も生じ難い。また、治具本体の少なくとも載置面にセラミック被覆層が形成されているので、治具本体に被焼成物が直接接触することがなく、よって、被焼成物と反応しない。 According to the present invention, since the jig main body is made of a thin metal plate having mechanical strength and heat resistance equal to or higher than that of iron, deformation is less likely to occur compared to textiles even if the number of times of use increases. In addition, cracks and breakage are less likely to occur. In addition, since the ceramic coating layer is formed on at least the mounting surface of the jig body, the object to be fired does not directly contact the jig body, and therefore does not react with the object to be fired.

以下、図面を参照して本発明の実施の形態について説明する。
（第１の実施の形態）
図１〜図５は本発明に係る焼成用治具の第１の実施の形態を示すもので、図１は焼成用治具の斜視図、図２は焼成用治具の角部の斜視図、図３は焼成用治具の側面図、図４は焼成用治具の載置板の断面図、図５は治具本体の展開図である。
これらの図において、符号１は焼成用治具を示す。この焼成用治具１は、治具本体２と、この治具本体２の表面全体に形成されたセラミック被覆層３（図４参照）とを備えている。 Embodiments of the present invention will be described below with reference to the drawings.
(First embodiment)
1 to 5 show a first embodiment of a firing jig according to the present invention, FIG. 1 is a perspective view of the firing jig, and FIG. 2 is a perspective view of a corner portion of the firing jig. 3 is a side view of the firing jig, FIG. 4 is a cross-sectional view of the mounting plate of the firing jig, and FIG. 5 is a development view of the jig body.
In these drawings, reference numeral 1 denotes a firing jig. The firing jig 1 includes a jig body 2 and a ceramic coating layer 3 (see FIG. 4) formed on the entire surface of the jig body 2.

治具本体２は、鉄以上の機械的強度と耐熱性を有する金属製の薄板に、多数の小孔４・・・が形成されたものである。金属製の薄板の材質は、ＳＵＳ４３０のステンレスであり、その厚さは０．６mm程度である。
小孔４は平面視円形状に形成されており、その直径は０．５mm程度ある。また、小孔４・・・は、碁盤の目状に配置されており、縦横に隣り合う小孔４，４は、０．５mm程度の距離を隔てている。なお、多数の小孔４・・・は、前記薄板にエッチング加工を施すことによって形成されるが、これに限ることなく、薄板に小孔４・・・を機械的加工によって形成してもよい。なお、図４において、小孔４はストレート孔であるが、小孔４をエッチング加工によって形成する場合、実際はストレートではなく、孔の上下端部で直径が若干異なり、また、孔の上下中間部で小径部が形成される場合が多い。 The jig body 2 is formed by forming a large number of small holes 4 in a thin metal plate having mechanical strength and heat resistance equal to or higher than those of iron. The material of the metal thin plate is SUS430 stainless steel, and its thickness is about 0.6 mm.
The small hole 4 is formed in a circular shape in plan view, and its diameter is about 0.5 mm. The small holes 4 are arranged in a grid pattern, and the small holes 4 and 4 adjacent in the vertical and horizontal directions are separated by a distance of about 0.5 mm. The small holes 4 are formed by etching the thin plate, but the present invention is not limited to this, and the small holes 4 may be formed by mechanical processing in the thin plate. . In FIG. 4, the small hole 4 is a straight hole. However, when the small hole 4 is formed by etching, it is not actually straight, and the diameter is slightly different at the upper and lower ends of the hole. In many cases, a small-diameter portion is formed.

治具本体２は、長方形板状の載置板５と、この載置板５の周囲に設けられた立上り部６とを備えている。載置板５は長方形板状に形成されており、立上り部６は載置板５の周囲に連続して形成された壁状のものであり、以下のようにして形成されている。
すなわち、立上り部６は長方形薄板の外周縁部を所定の幅で折り曲げて立て起こすことで形成されている。図５に示すように、治具本体２は展開された状態では長方形薄板状に形成されており、その外周縁部には、溝８が矩形環状に形成されている。平面視において溝８の４つの角部には、それぞれ切込み９が長辺に向けて該長辺と直角に形成されている。また、溝８の４つの角部には、それぞれ溝１０が前記切込み９と直角にかつ前記溝８の延長線上に形成されている。
そして、図２および図３に示すように、長方形薄板の外周縁部を溝８から直角に折り曲げて立て起こすことによって、載置板５の周囲に壁状の立上り部６を形成し、さらに、短辺両側の耳部９ａを溝１０から長辺側に折り曲げて長辺側の立上り部６に重ね合わせ、スポット溶接によって接合することによって、載置板５の周囲に壁状の立上り部６が連続して形成された治具本体２が形成される。なお、載置板５と立上り部６とには、多数の小孔４・・・が形成されているが、該小孔４・・・は立上り部６を折り曲げる前に予め、長方形薄板全体に形成しておく。なお、前記耳部９ａとこの耳部９ａが重ね合わされる部位にも小孔４・・・が形成されている。 The jig main body 2 includes a rectangular plate-shaped mounting plate 5 and a rising portion 6 provided around the mounting plate 5. The mounting plate 5 is formed in a rectangular plate shape, and the rising portion 6 is a wall-like member continuously formed around the mounting plate 5 and is formed as follows.
That is, the rising portion 6 is formed by bending and raising the outer peripheral edge of the rectangular thin plate with a predetermined width. As shown in FIG. 5, the jig body 2 is formed in a rectangular thin plate shape in the unfolded state, and a groove 8 is formed in a rectangular ring shape on the outer peripheral edge thereof. In the four corners of the groove 8 in plan view, cuts 9 are formed at right angles to the long sides toward the long sides, respectively. Grooves 10 are formed at four corners of the groove 8 at right angles to the notches 9 and on the extended lines of the groove 8.
Then, as shown in FIGS. 2 and 3, the outer peripheral edge of the rectangular thin plate is bent at a right angle from the groove 8 to rise up, thereby forming a wall-like rising portion 6 around the mounting plate 5, The ears 9a on both sides of the short side are bent from the groove 10 to the long side, overlapped with the rising part 6 on the long side, and joined by spot welding, so that the wall-like rising part 6 is formed around the mounting plate 5. The jig body 2 formed continuously is formed. The mounting plate 5 and the rising portion 6 are formed with a large number of small holes 4... Before the bending of the rising portion 6. Form it. Note that small holes 4 are also formed in the portion where the ear portion 9a and the ear portion 9a are overlapped.

前記セラミック被覆層３は、載置板５の周囲に壁状の立上り部６が連続して形成されてなる治具本体２に以下のようにして形成される。
すなわち、治具本体２をプラズマ溶射装置にセットし、治具本体２の表面全体にノズルからアルミナを溶射することによって、セラミック被覆層３を形成する。溶射するアルミナの粒径は１０μｍ〜８０μｍ程度であり、形成されたセラミック被覆層３の厚さは５０μｍ〜８０μｍ程度である。また、セラミック被覆層３は載置板５の上面と下面、立上り部６の外側面と内側面の他に、前記小孔４の内周面にも形成される。
なお、セラミック被覆層３は、治具本体２の表面全体にアルミナを溶射して形成したが、該セラミック被覆層３は、少なくとも治具本体２に載置される電子部品（被焼成物）が接触する部位に形成すればよい。具体的には、治具本体２の載置板５の上面、小孔４の入口近傍の内周面、立上り部６の内側面にアルミナを溶射して形成すればよい。 The ceramic coating layer 3 is formed in the following manner on the jig body 2 in which wall-like rising portions 6 are continuously formed around the mounting plate 5.
That is, the ceramic coating layer 3 is formed by setting the jig body 2 in a plasma spraying apparatus and spraying alumina from the nozzle on the entire surface of the jig body 2. The particle size of the sprayed alumina is about 10 μm to 80 μm, and the thickness of the formed ceramic coating layer 3 is about 50 μm to 80 μm. The ceramic coating layer 3 is also formed on the inner peripheral surface of the small hole 4 in addition to the upper and lower surfaces of the mounting plate 5 and the outer and inner surfaces of the rising portion 6.
The ceramic coating layer 3 is formed by spraying alumina on the entire surface of the jig body 2, but the ceramic coating layer 3 has at least an electronic component (a material to be fired) placed on the jig body 2. What is necessary is just to form in the site | part which contacts. Specifically, alumina may be sprayed on the upper surface of the mounting plate 5 of the jig body 2, the inner peripheral surface near the entrance of the small hole 4, and the inner surface of the rising portion 6.

上記のような焼成用治具１は、その載置板５の上面に、電子部品（被焼成物）を多数載置したうえで、焼成炉に入れられる。この場合、焼成用治具１は上下に複数段積み重ねられて焼成炉に入れられる。焼成炉にて焼成された電子部品（被焼成物）は焼成用治具１から取り除かれ、該焼成用治具１は、再び次の電子部品（被焼成物）が載置されて焼成炉に入れられる。つまり、焼成用治具１は繰り返し何回も使用される。 The firing jig 1 as described above is placed in a firing furnace after placing a large number of electronic components (fired objects) on the top surface of the mounting plate 5. In this case, the firing jig 1 is stacked in a plurality of stages up and down and placed in a firing furnace. The electronic component (fired object) fired in the firing furnace is removed from the firing jig 1, and the next electronic component (fired object) is again placed on the firing jig 1 in the firing furnace. Can be put. That is, the firing jig 1 is used many times repeatedly.

本実施の形態の発明によれば、治具本体２がＳＵＳ４３０のステンレス製であり、鉄以上の機械的強度と耐熱性を有するので、使用回数が多くなっても、従来の織物で形成されたものに比して、変形が生じ難く、かつ、亀裂や破壊等も生じ難い。
また、治具本体２の表面にセラミック被覆層３が形成されているので、治具本体２に電子部品（被焼成物）が直接接触することがなく、よって、電子部品（被焼成物）と反応しないという特性を満たす。
さらに、治具本体２に多数の小孔４・・・が形成されており、通気性が良好であるため、この治具本体２に載置された電子部品（被焼成物）は焼成時に所定の雰囲気ガスで覆われ、かつバインダが放出し易いので、均一に焼成することができる。 According to the invention of the present embodiment, the jig body 2 is made of stainless steel of SUS430 and has mechanical strength and heat resistance higher than that of iron. Compared to those, deformation is less likely to occur, and cracks and breakage are less likely to occur.
In addition, since the ceramic coating layer 3 is formed on the surface of the jig body 2, the electronic component (fired object) is not in direct contact with the jig body 2, so that the electronic component (fired object) and Satisfies the property of not reacting.
Further, since a large number of small holes 4... Are formed in the jig main body 2 and the air permeability is good, the electronic component (substance to be fired) placed on the jig main body 2 is predetermined during firing. Since it is covered with an atmospheric gas and the binder is easily released, it can be fired uniformly.

加えて、前記セラミック被覆層３は、アルミナを治具本体２に溶射することによって形成されているので、セラミック被覆層３を容易に形成することができる。
また、電子部品（被焼成物）が載置される載置板５の周囲には、立上り部６が設けられているので、この立上り部６によって電子部品（被焼成物）のこぼれ落ちを防止できる。
さらに、焼成用治具１を上下に積み重ねた際に、上下に隣り合う載置板５，５間に立上り部６の高さの分だけの隙間を形成できるので、載置板５に載置された電子部品（被焼成物）と、上方の載置板５との間に通気層を形成できる。よって、電子部品（被焼成物）が所定の雰囲気ガスで覆われ、かつバインダが放出し易いので、均一に焼成することができる。 In addition, since the ceramic coating layer 3 is formed by spraying alumina onto the jig body 2, the ceramic coating layer 3 can be easily formed.
In addition, since the rising portion 6 is provided around the mounting plate 5 on which the electronic component (fired object) is placed, the rising portion 6 can prevent the electronic component (fired material) from falling out. .
Further, when the firing jig 1 is stacked up and down, a gap corresponding to the height of the rising portion 6 can be formed between the mounting plates 5 and 5 adjacent to each other in the vertical direction. A ventilation layer can be formed between the formed electronic component (fired object) and the upper mounting plate 5. Therefore, the electronic component (substance to be fired) is covered with a predetermined atmospheric gas and the binder is easily released, so that it can be fired uniformly.

（第２の実施の形態）
図６〜図９は本発明に係る焼成用治具の第２の実施の形態を示すもので、図６は焼成用治具の斜視図、図７は焼成用治具の角部の拡大斜視図、図８は焼成用治具の側面図、図９は治具本体の展開図である。
これらの図に示す焼成用治具１１が、前記第１の実施の形態の焼成用治具１と異なる点は、載置板５と立上り部６とのなす角度が１２０度である点であり、その他の構成は焼成用治具１と共通しているので、共通構成には同一符号を付して、その説明を省略または簡略化する。 (Second Embodiment)
6 to 9 show a second embodiment of the firing jig according to the present invention, FIG. 6 is a perspective view of the firing jig, and FIG. 7 is an enlarged perspective view of a corner portion of the firing jig. 8 is a side view of the firing jig, and FIG. 9 is a development view of the jig body.
The firing jig 11 shown in these drawings is different from the firing jig 1 of the first embodiment in that the angle formed between the mounting plate 5 and the rising portion 6 is 120 degrees. Since the other configuration is common to the firing jig 1, the same configuration is denoted by the same reference numeral, and the description thereof is omitted or simplified.

図６〜図９に示すように、立上り部６は長方形薄板の外周縁部を所定の幅で折り曲げて立て起こすことで形成されている。図９に示すように、治具本体２は展開された状態では長方形薄板状に形成されており、その外周縁部には、溝８が矩形環状に形成されている。平面視において溝８の４つの角部には、それぞれ切込み１２が短辺に向けて該短辺と直角に形成されている。また、溝８の４つの角部には、それぞれ溝１３が前記切込み１２と所定の角度（６０度）をもって形成されている。さらに、前記長方形薄板の角部には傾斜辺１４が長辺に対して１２０度に傾斜して形成されている。
そして、図６〜図８に示すように、長方形薄板の外周縁部を溝８から６０度折り曲げて立て起こすことによって、載置板５の周囲に載置板５に対して１２０度傾斜する壁状の立上り部６を形成し、さらに、長辺両側の耳部９ｂを溝１４から短辺側に折り曲げて短辺側の立上り部６に重ね合わせ、スポット溶接によって接合することによって、載置板５の周囲に壁状の立上り部６が連続して形成された治具本体２が形成される。この場合、立上り部６と載置板５とのなす角度は１２０度となっており、９０度以上である。したがって、本実施の形態の焼成用治具１１は、立上り部６が外側に傾斜しており、この点が前記第１の実施の形態の焼成用治具１とは異なる。 As shown in FIGS. 6 to 9, the rising portion 6 is formed by bending and raising the outer peripheral edge of a rectangular thin plate with a predetermined width. As shown in FIG. 9, the jig main body 2 is formed in a rectangular thin plate shape in the unfolded state, and a groove 8 is formed in a rectangular ring shape on the outer peripheral edge portion thereof. The cuts 12 are formed at four corners of the groove 8 in a plan view, respectively, at right angles to the short sides toward the short sides. Grooves 13 are formed at the four corners of the groove 8 at a predetermined angle (60 degrees) with the notch 12 respectively. Further, the inclined side 14 is formed at an angle of 120 degrees with respect to the long side at the corner of the rectangular thin plate.
6 to 8, the outer peripheral edge of the rectangular thin plate is bent by 60 degrees from the groove 8 and is raised up, so that the wall is inclined 120 degrees with respect to the mounting plate 5 around the mounting plate 5. A plate-shaped rising portion 6, and further, the ears 9 b on both sides of the long side are bent from the groove 14 to the short side, overlapped with the rising portion 6 on the short side, and joined by spot welding, A jig body 2 in which wall-like rising portions 6 are continuously formed around 5 is formed. In this case, the angle formed by the rising portion 6 and the mounting plate 5 is 120 degrees, which is 90 degrees or more. Therefore, the firing jig 11 of the present embodiment has the rising portion 6 inclined outward, which is different from the firing jig 1 of the first embodiment.

また、本実施の形態においても、第１の実施の形態と同様に、セラミック被覆層３は、載置板５の周囲に壁状の立上り部６が連続して形成されてなる治具本体２に、アルミナのプラズマ溶射によって形成される。
この場合、立上り部６と載置板５とのなす角度が１２０度であるので、立上り部５の、載置板５の内側を向く面にセラミック被覆層３を容易に形成できる。すなわち、立上り部６の載置板５の内側を向く面（内側面）が、斜め上方側にも向くので、この内側面に容易にアルミナを溶射できる。 Also in the present embodiment, as in the first embodiment, the ceramic coating layer 3 includes the jig body 2 in which the wall-like rising portions 6 are continuously formed around the mounting plate 5. Further, it is formed by plasma spraying of alumina.
In this case, since the angle formed by the rising portion 6 and the mounting plate 5 is 120 degrees, the ceramic coating layer 3 can be easily formed on the surface of the rising portion 5 facing the inner side of the mounting plate 5. That is, since the surface (inner surface) facing the inside of the mounting plate 5 of the rising portion 6 is also directed obliquely upward, alumina can be easily sprayed on the inner surface.

なお、本実施の形態においても、前記第１の実施の形態と同様の効果を得ることができるのは言うもでもないことである。 In this embodiment, it is needless to say that the same effect as that of the first embodiment can be obtained.

本発明に係る焼成用治具の第１の実施の形態を示すもので、焼成用治具の斜視図である。1 shows a first embodiment of a firing jig according to the present invention, and is a perspective view of the firing jig. FIG. 同、焼成用治具の角部の斜視図である。It is a perspective view of the corner | angular part of the jig | tool for baking same as the above. 同、焼成用治具の側面図である。It is a side view of the jig for baking same as the above. 同、焼成用治具の断面図である。It is sectional drawing of the jig for baking same as the above. 同、治具本体の展開図である。FIG. 2 is a development view of the jig body. 本発明に係る焼成用治具の第２の実施の形態を示すもので、焼成用治具の斜視図である。The 2nd Embodiment of the jig | tool for baking which concerns on this invention is shown, and it is a perspective view of the jig | tool for baking. 同、焼成用治具の角部の斜視図である。It is a perspective view of the corner | angular part of the jig | tool for baking same as the above. 同、焼成用治具の側面図である。It is a side view of the jig for baking same as the above. 同、治具本体の展開図である。FIG. 2 is a development view of the jig body.

Explanation of symbols

・１１焼成用治具
２治具本体
３セラミック被覆層
４小孔
５載置板
６立上り部・ 11 Firing jig 2 Jig body 3 Ceramic coating layer 4 Small hole 5 Mounting plate 6 Rising part

Claims

(A) In a firing jig on which the firing object is placed when the firing object is fired,
(B) a jig body in which a large number of small holes are formed in a metal thin plate having mechanical strength and heat resistance equal to or higher than iron;
(C) A firing jig provided with at least a ceramic coating layer formed on a placement surface on which the firing object is placed of the jig body ,
(D) The ceramic coating layer is formed by spraying alumina on the jig body,
(E) The jig body includes a flat plate-like plate on which the object to be fired is placed, and a rising portion provided around the plate,
(F) When the jig body is unfolded, a cut is formed in the outer peripheral edge thereof.
(G) The rising portion is formed by bending and raising the outer peripheral edge of the jig body,
(H) The ear portion of the jig body formed by the incision is folded and superimposed on the rising portion,
(I) A firing jig , wherein a wall-like rising portion is continuously formed around a mounting plate .

The firing jig according to claim 1, wherein the small hole is formed in the rising portion and the ear portion.

The firing jig according to claim 2 , wherein the rising portion is formed in a wall shape, and an angle formed by the rising portion and the mounting plate is 90 degrees or more.