JP4936099B2 - Moving coil type Z-axis linear motor - Google Patents

Description

The present invention relates to a small-sized and high-performance moving coil type Z-axis linear motor.
The present invention also provides a linear motor drive stage useful for mounting an inkjet head for forming a functional thin film such as an organic EL thin film or a color filter thin film, which is an electroluminescent element used for, for example, a display or a display body. And a functional thin film manufacturing apparatus using the same.

In recent years, with the development of electronic devices such as personal computers and portable information devices, the use of liquid crystal display devices, particularly color liquid crystal display devices, has increased. The liquid crystal display device usually uses a color filter for colorizing a display image. As one of the color filter manufacturing methods, an inkjet method is known in which R (red), G (green), and B (blue) inks are landed on a substrate in a predetermined pattern. .
The ink jet method is useful as a means for easily and finely patterning a functional thin film. However, when an ink using an organic solvent (a liquid for forming a functional thin film) is used, it is necessary to control the atmosphere such as exhaust around the inkjet head. Further, in this case, there is a problem that the nozzle surface is dried and the air current is disturbed, and the flying of the ink (droplet) ejected from the nozzle is caused.
In recent years, in a color filter manufacturing apparatus for a liquid crystal display such as a personal computer or a television, there is a strong demand for increasing the size of a transparent substrate (a glass substrate on which ink is landed). It is eagerly desired to reduce the manufacturing cost simultaneously with this increase in size. From such a technical orientation, it is desired to increase the relative movement speed between the inkjet head and the transparent substrate to improve industrial production efficiency and to increase the relative positioning accuracy between the two.
By the way, with a normal inkjet head positioned (stopped) at a predetermined position, the transparent substrate is moved to a predetermined position at a high speed and in a predetermined pattern, and ink is ejected onto the transparent substrate to form a functional thin film with high definition. Film. In this series of steps, the higher the moving speed of the transparent substrate is, the higher the working efficiency is, and the more the ink (droplet) is bent due to the influence of the air flow generated by the high-speed movement (running) of the transparent substrate. A new problem occurs, and countermeasures are required.

  The demand for higher performance of a linear motor drive stage equipped with a Z-axis linear motor has become increasingly severe. This requirement includes the need to reduce the size (space saving) of the mounted Z-axis linear motor while maintaining high performance.

  Furthermore, when a Z-axis linear motor is mounted on a linear motor drive stage, a functional thin film manufacturing apparatus, etc., it is practical to provide a mechanism for canceling gravity because the Z-axis (vertical drive) direction coincides with the direction of gravity. desired. However, as a conventional mechanism for canceling gravity, a method using an air cylinder and compressed air, or a method using a hydraulic mechanism is inevitably increased in size and manufacturing cost, and has a small and inexpensive Z-axis lock mechanism. Z-axis linear motors have been demanded.

  As shown in FIG. 8, Patent Document 1 discloses an inkjet head 101 that surrounds the periphery of a nozzle surface 102 and has a cover 103 protruding on the side from which ink is ejected (side facing the base material 105). Yes. The ink jet head 101 has the effect of preventing the nozzle surface 102 from drying even under exhaust, reducing clogging, and achieving stable ejection.

  Patent Document 2 discloses a color filter manufacturing apparatus shown in FIG. The color filter manufacturing apparatus 330 moves the substrate S held on the table 339 of the lower-axis linear motor drive stage in the Y-axis direction by the lower Y-axis linear motor 332 and moves the inkjet head 334 of the upper-axis linear motor drive stage. This is a method of moving in the X-axis direction by the X-axis linear motor and moving in the Z-axis direction by the rotary motor 343. This manufacturing apparatus has an effect of preventing discharge failure due to liquid loss and bubbles, and further eliminating the need for a complicated path switching mechanism.

Patent Document 3 discloses a Z-axis drive mechanism having a Z-axis 511 extending in the vertical direction and a Z-axis guide fixing portion 512 extending in the vertical direction along the Z-axis 511, as shown in FIG. ing. The support fixing portion 512 is a bottomed cylindrical body fixed on the base body 510. The Z-axis 511 is inserted into the cylindrical body of the fixed portion 512 from above, and a pressure chamber 513 is formed in the lower part of the cylindrical body. When compressed air is introduced into the pressure chamber 513 from the air pipe 514 through the bottom wall 512-1 of the cylindrical body of the fixed portion 512, the pressure chamber 513 causes the gravity of the movable part including the Z axis 511 and the table 515. Has the ability to cancel.
JP 2001-277490 (paragraphs 15 and 18, FIG. 1) JP 2003-260396 (paragraphs 19 to 24, FIG. 1) JP 2002-71860 (paragraphs 29 to 33, FIG. 1)

Patent Document 1 does not describe a driving means that realizes a relative high-speed movement and high-precision positioning between a stage holding a substrate and an inkjet head. Furthermore, it has been found that the measure of providing a cover described in Patent Document 1 is not sufficient with respect to the problem of ink bending caused by high-speed movement of the stage. Moreover, there is no description about a movable coil type Z-axis linear motor.
The film forming apparatus described in Patent Document 2 is a system in which the inkjet head 334 is moved in the Z-axis direction only by the rotation motor 343. For this reason, it is difficult to position the substrate S and the inkjet head 334 relatively at high speed in the Z-axis direction and perform high-precision positioning. Furthermore, there is no consideration for measures against the flying bending of the ink generated by the high-speed movement of the substrate S. Moreover, there is no description about a movable coil type Z-axis linear motor.
The stage device described in Patent Document 3 is a mechanism that cancels the gravity of the Z-axis linear motor 520 using an air cylinder and compressed air, and the Z-axis drive mechanism is enlarged because it is necessary to secure an installation space for the pressure chamber 513. End up. The linear motor 520 is different from the moving coil type Z-axis linear motor of the present invention in that no Z-axis drive rail (linear guide) is laid. In addition, although there is description of a spring in the paragraph 12 of patent document 3, it is not described about use of a concrete spring.

Accordingly, an object of the present invention is to provide a small-sized and high-performance moving coil type Z-axis linear motor.
Another object of the present invention is to mechanically lock the Z-axis mover in the Z-axis direction when the multiphase coil constituting the Z-axis mover is not energized (when the Z-axis mover does not generate thrust). It is an object to provide a high-performance moving coil type Z-axis linear motor having a small, reliable and inexpensive Z-axis locking mechanism that can prevent the falling of the motor.
Another object of the present invention is to provide a low-power consumption, high-performance movable coil Z-axis linear motor capable of reliably canceling the weight of the Z-axis movable element with a simple structure.
It is another object of the present invention to provide a linear motor driving stage and a functional thin film manufacturing apparatus that have high performance and high practicality.

  In order to achieve the above object, a moving coil type Z-axis linear motor of the present invention includes a stator in which a magnetic circuit having a substantially U-shaped cross section is formed along a Z-axis by a permanent magnet and a yoke, and the magnetic circuit. And a multiphase coil that faces the magnetic pole of the stator via the magnetic gap and is configured to freely move in the Z-axis direction within the magnetic gap. A Z-axis traveling rail is laid on the outer surface of the yoke, and the mover travels along the rail. The movable coil type Z-axis linear motor of the present invention can be manufactured smaller than the conventional one while maintaining the thrust of the Z-axis movable element within a predetermined high range.

  In the movable coil type Z-axis linear motor of the present invention, when the permanent magnet is disposed on the back side (on the inner surface) of the yoke on which the Z-axis traveling rail is laid, When the profile is projected onto a plane perpendicular to the Z-axis, the space (maximum diameter) occupied by (the magnetic circuit including the Z-axis traveling rail + the multiphase coil and carriage of the Z-axis mover) on the projection plane is larger than before. Can also be made compact.

  In the movable coil type Z-axis linear motor of the present invention, the Z-axis mover is mechanically locked by the Z-axis lock mechanism to prevent the Z-axis mover from dropping in the Z-axis direction. There is no need to generate an electromagnetic locking force by energizing the multiphase coil of the mover to lock. Therefore, power consumption can be reduced.

  In the movable coil type Z-axis linear motor of the present invention, if the Z-axis movable element is supported by a spring, the support mechanism can be simplified and the thrust (power consumption) required for Z-axis driving can be reduced.

  As a Z-axis locking mechanism, it is practical to mechanically lock a constituent member of the Z-axis stator by a clamper provided on the Z-axis movable element.

  As a Z-axis locking mechanism, it is practical to mechanically lock the constituent members of the Z-axis mover by fixing them with a clamper provided on the Z-axis stator.

The linear motor drive stage of the present invention includes a lower-axis linear motor drive stage including at least a single-axis linear motor, and an upper-axis linear motor drive stage including at least a movable coil type Z-axis linear motor, and is a movable coil type. A Z-axis linear motor includes a stator in which a substantially U-shaped magnetic circuit is formed along a Z-axis by a permanent magnet and a yoke, a magnetic air gap formed along the magnetic circuit, and the magnetic air gap. And a mover configured to freely move in the Z-axis direction within the magnetic gap and having a multi-phase coil opposed to the magnetic pole of the stator via the Z-axis on the outer surface of the yoke are traveling rail laying, the mover is characterized that you travel along said rail.
The upper shaft and lower shaft linear motor drive stages constituting the linear motor drive stage of the present invention are practical because they can perform high-precision positioning and high-speed travel, respectively. In particular, it is a vertically separated drive type linear motor drive stage having a lower-axis linear motor drive stage and an upper-axis linear motor drive stage, and the mover of each linear motor mounted on the upper-axis and lower-axis linear motor drive stage. Practicality is high if the running directions are aligned and arranged in parallel.

  In the linear motor drive stage of the present invention, it is practical to mount an X-axis linear motor and a Y-axis linear motor on the lower-axis linear motor drive stage.

  In the linear motor drive stage of the present invention, it is practical to mount an X-axis linear motor and a θ motor on the lower-axis linear motor drive stage.

  In the linear motor drive stage of the present invention, it is practical to mount a Y-axis linear motor and a θ motor on the lower-axis linear motor drive stage.

  In the linear motor drive stage of the present invention, it is practical to mount an X-axis linear motor, a Y-axis linear motor, and a θ motor on the lower-axis linear motor drive stage.

In the linear motor drive stage of the present invention, it is practical to mount a Y-axis linear motor and a movable coil type Z-axis linear motor on the upper-axis linear motor drive stage. When a plurality of movers are arranged on the same traveling path of the Y-axis linear motor, the total occupied length of the movers in the Y direction is small, which is suitable for downsizing and can significantly improve the work efficiency of a predetermined process. .

  In the linear motor drive stage of the present invention, it is practical to mount a Y-axis linear motor and a θ motor on the upper-axis linear motor drive stage.

  In the linear motor drive stage of the present invention, it is practical to mount a Y-axis linear motor, a Z-axis linear motor, and a θ motor on the upper-axis linear motor drive stage.

The functional thin film manufacturing apparatus of the present invention includes a lower shaft, a lower shaft linear motor drive stage including at least a uniaxial linear motor mounted on the lower base, and a support column erected on the lower base. , comprising: a base on which is placed on the said post, and a moving-coil Z-axis linear motor disposed on the upper base, and a jet unit disposed in the moving-coil Z-axis linear motor movable element The movable coil type Z-axis linear motor includes a stator in which a magnetic circuit having a substantially U-shaped cross section is formed along the Z-axis by a permanent magnet and a yoke, and the magnetic A magnetic air gap formed along the circuit, a multiphase coil facing the magnetic pole of the stator via the magnetic air gap, and configured to travel freely in the Z-axis direction in the magnetic air gap ; And a Doko, laid traveling rails of the Z-axis on the outer surface of said yoke, said armature along said rail, characterized in that travel.
The movable coil type Z-axis linear motor has a Z-axis locking mechanism that mechanically locks the Z-axis movable element to prevent the movable element from dropping in the Z-axis direction when the multiphase coil is not energized, And / or a structure in which the Z-axis movable element is supported by a spring is preferable.
The functional thin film manufacturing apparatus of the present invention holds a transparent substrate on a linear motor mover (table) mounted on a lower-axis linear motor drive stage, and is mounted on the transparent substrate and the upper-axis linear motor drive stage. Since the inkjet unit disposed on the movable element of the linear motor is moved relatively fast and can be positioned with high accuracy, it is highly practical.
In the functional thin film manufacturing apparatus of the present invention, an ink discharge port and an air discharge port are provided at the end of the ink jet unit as a countermeasure against the flying distortion of the ink due to the turbulence of the air flow generated by the high-speed movement of the transparent substrate. It is preferable that air is discharged from the air discharge port so as to suppress flying bending of ink discharged from the outlet.
In the functional thin film manufacturing apparatus of the present invention, a Y-axis linear motor and a movable coil type Z-axis linear motor are mounted on the upper-axis linear motor drive stage, and a plurality of movers are arranged on the same traveling path of the Y-axis linear motor. It is preferable to be provided.

(1) In the moving coil type Z-axis linear motor of the present invention, the Z-axis traveling rail is laid on the outer surface of the magnetic circuit of the Z-axis stator. Can be manufactured in a small size.
(2) The moving coil type Z-axis linear motor of the present invention has a Z-axis locking mechanism that mechanically locks the Z-axis moving element and / or supports the Z-axis moving element with a spring. Compared to the method (method using an air cylinder and compressed air, or hydraulic method), the Z-axis movable element can be manufactured in a small size, light weight and at a low cost, and the power consumption applied to the multiphase coil can be reduced. .
(3) The linear motor drive stage and the functional thin film manufacturing apparatus of the present invention are capable of high-precision positioning and high-speed travel of the movers of the upper shaft and lower shaft linear motor drive stages, and are highly practical. In particular, in the functional thin film manufacturing apparatus of the present invention, for example, when three or four color inks are landed in a predetermined pattern on the same transparent substrate, a plurality (for example, three or (4) movers can be arranged at a minimum interval necessary for practical use and at a higher density than in the prior art, so that the ink landing efficiency can be increased as compared with the prior art.

Hereinafter, the present invention will be described in detail with reference to the drawings.
FIG. 1 is a perspective view for explaining a magnetic circuit, a multiphase coil, a carriage, a rail and the like of a movable coil type Z-axis linear motor of the present invention.
FIG. 2 is a perspective view showing an embodiment of the functional thin film manufacturing apparatus (color filter manufacturing apparatus) of the present invention.
FIG. 3 is a main part front view showing the structures of the upper Y-axis linear motor, the θ motor, the movable coil type Z-axis linear motor, and the ink jet unit when viewed from the Y-axis direction.
FIG. 4 is a perspective view of essential parts for supplementarily explaining the structures of the upper Y-axis linear motor, the θ motor, the movable coil type Z-axis linear motor, and the ink jet unit.
FIG. 5 is a perspective view showing a structure of a lock mechanism attached to the moving coil type Z-axis linear motor of the present invention. For convenience of explanation, a part of the structure is crushed for convenience.
FIG. 6 is a view of the inkjet head as viewed from below.
FIG. 7 is a schematic view showing a state in which a plurality of movers are densely arranged on the same traveling path of a linear motor when ink is landed on a transparent substrate in the functional thin film manufacturing apparatus of the present invention.

With reference to FIG. 1, the structure of the magnetic circuit, rail 97, multiphase coil 81, etc. of the movable coil type Z-axis linear motor 80 will be described.
83a, 83b and 83c are all ferromagnetic plate yokes (for example, made of SS400), which are fastened together with screws (not shown) to form an assembly having a U-shaped cross section along the Z-axis. ing. A predetermined number of block-shaped permanent magnets (for example, NdFeB-based anisotropic sintered magnet manufactured by NEOMAX Co., Ltd.) are adjacent to each other along the Z axis on the opposing inner surfaces of the yokes 83a and 83c. A pair of permanent magnet rows 82 and 82 are formed by being fixedly extended and facing opposite poles through a magnetic gap 89. A magnetic circuit (stator 84) having a substantially U-shaped cross-section along the Z-axis travel path is formed by a pair of permanent magnet rows 82 and 82 and yokes 83a, 83b and 83c extending at equal lengths in the Z-axis direction. Is formed.
The yoke 83c also serves as a Z-axis base, and a traveling rail 97 for linearly guiding the Z-axis movable element 85 is laid on the outer surface of the yoke 83c. The rail 97 is fastened with screws 93 on the yoke 83c. The carriage 88 (for example, made of Al alloy) is slid while a support sliding member 99 (for example, a linear motor bearing) provided at the bottom thereof is linearly guided by the rail 97. In the Z-axis linear motor of the present invention, the rail 97 is not limited to that shown in FIG. 1, and it is sufficient that at least one rail 97 is provided in the Z-axis direction on the outer surfaces of the yokes 83a, 83b and 83c. And it is preferable to provide two or three or more according to running accuracy.
Reference numeral 86 denotes a comb-like coil holder (for example, made of epoxy resin containing glass), and two-phase rectangular coils 81a and 81b are fixed to the tip. The bottom of the coil holder 86 is fastened with a carriage 88 and screws (not shown) to form a Z-axis movable element 85. The coil holder 86 straddles the permanent magnet row 82, the yoke 83c, and the rail 97 on one side, and the two-phase coils 81a, 81b of the coil holder 86 and the magnetic poles of the pair of permanent magnet rows 82, 82 face each other in the magnetic gap 89. It is supposed to be.
Therefore, the constituent members including the magnetic circuit of the stator 84, the rail 97, the two-phase coils 81a and 81b, the coil holder 86, and the carriage 88 in FIG. 1 have a compact structure, and are projected onto a plane perpendicular to the Z axis. When a circle having a minimum diameter (D) in which the constituent members enter is drawn on the projection surface, D can be reduced to a small size of 200 mm or less, preferably 80 to 200 mm, more preferably 100 to 150 mm. D is equivalent to D = 0.8D1 with respect to D1 described later.

With reference to FIG. 2, the manufacturing apparatus for functional thin films of this invention is demonstrated.
The functional thin film manufacturing apparatus 50 in FIG. 2 includes a vibration isolation unit 11, a lower-axis linear motor drive stage 10, and an upper-axis linear motor drive stage 40.
The lower-axis linear motor drive stage 10 includes a lower base 1 (for example, made of stone) placed on the vibration isolation unit 11 and an X-axis linear motor (moving coil linear motor) 2 placed on the lower base 1. A lower Y-axis linear motor (movable coil type linear motor) 22 placed on the mover 7 of the X-axis linear motor 2, and a carriage 13 (for example, made of Al alloy) constituting the mover of the lower Y-axis linear motor ) And a glass substrate holding table 27 and the like. Between the carriage 13 and the table 27, a rotation motor (not shown) in the θ direction is provided. When this motor is energized, the rotor (not shown) and the table 27 rotate along the θ direction to index the table 27 (rotation index).
The X-axis linear motor 2 has a block-like permanent magnet (for example, an NdFeB-based anisotropic sintered magnet) on opposite inner surfaces of a ferromagnetic yoke (for example, made of SS400) having a U-shaped cross section. A stator 4 having a pair of permanent magnets (not shown) formed by extending a predetermined number of different poles adjacent to each other along the X axis and facing the different poles via a magnetic gap 8; The movable member 7 includes a three-phase coil (not shown) that freely travels in the X-axis direction along the magnetic gap 8 of the stator 4. Reference numerals 5 and 5 denote X-axis linear motor rails. Reference numeral 6 denotes a reference member (for example, made of stone). Reference numeral 9 denotes an X-axis cable bear (cable bear is a registered trademark, the same applies hereinafter), which is a flexible caterpillar type housing cables (not shown ) (signal lines, power lines, cooling pipes, etc.).
Reference numeral 29 denotes a lower Y-axis cable bear (the same structure as the X-axis cable bear 9). Reference numeral 30 denotes a storage space for the lower Y-axis cable bear 29. Reference numeral 21 denotes a lower Y-axis base (for example, made of stone). A lower Y-axis linear motor stator 31 (an assembly having the same structure as the stator 4) is disposed in the groove 26, and a pair of protrusions 28 and 28 are paired. Lower Y-axis linear motor rails 25, 25 are provided. A three-phase coil (not shown) constituting the mover of the lower Y-axis linear motor 22 is disposed along the magnetic gap of the stator 31 so as to be able to run in the Y-axis direction.
Reference numeral 33 denotes a screw hole. In addition to 33, similar screw holes are provided in various places such as the lower base 1, the lower Y-axis base 21, the support column 3, and the upper base 41, and are used appropriately for fastening the respective components.

As shown in FIGS. 2 to 4, the upper-axis linear motor drive stage 40 includes support columns 3, 3 (for example, made of stone) standing on the lower base 1, and an upper base 41 ( (For example, made of stone), an upper Y-axis linear motor (movable coil type linear motor) 42 disposed in the vicinity of the groove 55 of the upper base 41, and a mover 47 of the upper Y-axis linear motor θ. The motor 90, a movable coil type Z-axis linear motor 80 connected to the lower part of the θ motor 90, an ink jet unit 61 connected to the lower part of the Z-axis linear motor 80, and the like.
The stator 46 of the upper Y-axis linear motor 42 has a U-shaped ferromagnetic yoke 44 (for example, made of SS400), and a block-shaped permanent magnet (for example, an NdFeB system) on the opposing inner surface of the yoke 44. A pair of permanent magnets 39 in which a predetermined number of anisotropic magnets (adjacent sintered magnets) are arranged adjacent to each other along the Y-axis and are fixed to each other with a magnetic gap therebetween. , 39 has a substantially U-shaped magnetic circuit in cross section.
The mover 47 of the upper Y-axis linear motor 42 has a three-phase coil 43, and four (47a, 47b, 47c, 47d) are disposed on the same traveling path of the upper Y-axis linear motor 42, and It can run independently in the Y-axis direction. Reference numerals 48a, 48b, 48c and 48d denote upper Y-axis cable bears (the same structure as the X-axis cable bear 9) of the four movable elements 47, respectively.

  As with the mover 47, four (90a, 90b, 90c, 90d) θ motors 90 (brushless motors) constituting a part of each mover 47 of the upper Y-axis linear motor are arranged. Reference numeral 75 denotes a bracket (for example, made of an Al alloy), which supports the rotating portion 95 of the θ motor 90. The rotation angle (θ) around the Z axis is not particularly limited, but it is practical to set θ = 30 to 120 °, for example. Reference numeral 32 denotes a cable bear of the θ motor 90 (a caterpillar type housing a signal line, a power line and the like), and four like the θ motor 90 are arranged.

The moving coil type Z-axis linear motor of the present invention constituting each mover 47 of the upper Y-axis linear motor will be described below.
As shown in FIG. 2, the movable coil type Z-axis linear motor 80 of the present invention is provided with four (80a, 80b, 80c, 80d) as with the mover 47 of the upper Y-axis linear motor. 2 to 4, the structure of the magnetic circuit and rail of the stator 84 of the movable coil type Z-axis linear motor 80 and the structure of the multiphase coil, coil holder, and carriage of the movable element 85 are the same as those in FIG. 1.

As shown in FIG. 4, in the Z-axis lock mechanism 24, a bracket 110 (for example, made of Al alloy) is fastened with a screw 118 on a carriage 88 of a Z-axis movable element 85, and a bottom surface side of the Z-axis lock mechanism 24 is placed on the bracket 110. Fastened with screws (not shown) and attached.
FIG. 5 is a perspective view for explaining an example of the Z-axis locking mechanism 24. The left main body 78 is crushed for easy understanding, but the left and right structures are the same. As shown in FIG. 4, the Z-axis locking mechanism 24 is connected to the main body 78 of the wedge slide gear 72 (for example, a Ni-plated product made of SCr415) and the lower end portion of the bracket 75 of the θ motor 90 to connect the Z-axis stator 84. A part of the shaft 71 (for example, SUJ2), an adjustment screw 73 (for example, SUJ2), a piston 76, a spring 74, and a wedge (taper) portion 92 are configured. When the Z-axis lock mechanism 24 is energized to the two-phase coils 81a and 81b and thrust is generated in the Z-axis mover 85, the shaft 71 and the clamper 73b of the wedge slide gear 72 leave a predetermined gap. It is arranged. When the Z-axis mover 85 is mechanically locked, that is, when the two-phase coils 81a and 81b are not energized, the air pressure due to compressed air (not shown) passes through the air pipe 120 (see FIG. 4) and the spring 74. To be added. The air pressure is preferably set to 0.55 to 0.7 MPa in order to ensure mechanical locking. If the pressure is less than 0.55 MPa, the pressing force is insufficient, and if it exceeds 0.7 MPa, mechanical unlocking failure occurs. When the piston 76 is pushed in the direction of the arrow by the elastic force of the spring 74 to which the air pressure is added, the tapered large diameter portion 92b of the wedge portion 92 connected to the piston 76 is interposed between the clampers 73a and 73b. Therefore, the clamper 73b moves in the direction of the arrow and strongly presses the shaft 71 (the right clamper (not shown) also strongly presses the shaft 71 simultaneously), so that the shaft 71 is mechanically locked. When the Z-axis linear motor 80 is driven again, the air pressure applied to the spring 74 is released. At this time, since the spring 74 returns in the direction opposite to the arrow, the piston 76 also moves in the direction opposite to the arrow, and the tapered small diameter portion 92a of the wedge portion 92 is disposed between the clampers 73a and 73b. A gap is formed between 73b and the shaft 71, and the mechanical lock is released.

  The Z-axis lock mechanism is not necessarily arranged on the Z-axis movable element side. That is, a Z-axis lock mechanism may be mounted on the Z-axis stator side, and a predetermined position of the Z-axis mover may be mechanically locked by a clamper of the Z-axis lock mechanism. In this case, the shape of the clamper is appropriately adjusted so that the predetermined position of the Z-axis movable element is firmly abutted and fixed, or can be securely gripped.

3 and 4, the fixed side metal fitting 17 (for example, made of SUS304) is fastened to the bracket 75 of the θ motor 90 by screws 124. In addition, the movable side metal fitting 18 (for example, made of SUS304) is fastened to the side surface portion of the carriage 88 with screws 128. The fixed metal fittings 17 and 18 have holes 170 and 180, respectively, and both ends of a coil spring 38 (for example, made of spring stainless steel) are inserted into the holes, respectively, and the mover 85 including the carriage 88 by the coil spring 38. Is supported. In order to eliminate the influence of the elastic force of the coil spring 38 over time, the coil spring 38 is periodically replaced. In order to simplify the replacement work of the coil spring 38, both end portions of the coil spring 38 are detachable so as to be inserted into the holes 170 and 180 and locked.
The type of the spring 38 is not particularly limited, and for example, a spiral spring (spring) other than a coil spring is practical. The range of the spring constant of the spring 38 is preferably 0.1 to 1.0 N / mm, and more preferably 0.3 to 0.6 N / mm. If the spring constant is less than 0.1 N / mm, it is difficult to support the dead weight of the mover 85, and the lowermost position (balance point) of the mover 85 is stable over a work (transparent substrate, etc.) over a long period of time. It becomes difficult to hold with high accuracy. When the spring constant exceeds 1.0 N / mm, it is difficult to adjust the balance point.

The ink jet unit 61 will be described with reference to FIGS.
The ink jet unit 61 is also provided with four (61a, 61b, 61c, 61d) as with the mover 47 of the upper Y-axis linear motor. Reference numerals 53a, 53b, 53c, and 53d denote inkjet bears, on which signal lines, power lines, air supply tubes, ink supply tubes, and the like (all not shown) are arranged.
The ink jet head 62 provided at the tip of the ink jet unit 61 has, for example, a slit-like ejection port 63 shown in FIG. 6A, from which ink (not shown) is ejected. As the ink ejection mechanism of the ink jet head 62, a well-known one composed of a piezoelectric element and a diaphragm (not shown) is used. The shape of the ink discharge port 63 is not particularly limited, but it is preferable that the slit-shaped discharge port 63 is constituted by an assembly of small lattices because it is easy to form a predetermined high-definition patterning film on a transparent substrate (not shown). As shown in FIG. 6A, a pair of air discharge ports 65aa and 65bb around the ink discharge port 63 (for example, the size of the discharge port is a slit of length 60 mm × width 0.5 mm, air discharge pressure) : 0.1 MPa), and when ejecting ink, air is ejected from the air ejection ports 65aa and 65bb to form an air curtain. The air discharge pressure is preferably 0.01 to 0.5 MPa. If the air discharge pressure is less than 0.01 MPa, the effect of forming an air curtain cannot be obtained, and the flying curve of ink cannot be suppressed. When the air discharge pressure exceeds 0.5 MPa, problems such as air leakage are caused, which is not practical.
In the color filter manufacturing apparatus 50 of FIG. 2, for example, when ejecting ink, the inkjet unit 61 is stopped at a predetermined position, and a glass substrate (not shown) held on the lower Y-axis table 27 is required. Accordingly, it moves by a predetermined amount in the X, Y, and θ directions and is positioned at a predetermined position with high accuracy (the gap between the glass substrate and the ejection port 63 (balance point) of the inkjet head is set to 0.5 mm), and ink Is discharged. At this time, the flying bend of the ejected ink is suppressed by the shielding effect of the air ejected from the air ejection ports 65aa and 65bb against the turbulence of the ambient atmosphere caused by the high-speed movement of the glass substrate.
In the color filter manufacturing apparatus 50, for example, R (red), G (green), B (blue), and four types of inks that are inks for forming a protective film for these color filter inks are filled in, respectively, not shown. An ink supply unit is provided above. An ink supply tube (not shown) extending from the ink supply unit extends to the inkjet units 61a, 61b, 61c, and 61d via inkjet bearers 53a, 53b, 53c, and 53d, respectively. Then, according to a predetermined high-definition film forming pattern forming operation, ink is landed on the glass substrate from the ink discharge ports 63 of the respective ink jet heads without ink bending, so that a high-definition film forming pattern is formed. can get.
In the color filter manufacturing apparatus 50, the inkjet head is cleaned when a predetermined ink ejection operation is completed. In the cleaning process, for example, each of the inkjet heads is moved at a high speed by an upper Y-axis linear motor 42 and a Z-axis linear motor 80 to a cleaning unit (not shown) provided above the color filter manufacturing apparatus 50, and a predetermined process is performed. Stop with high accuracy at the position. Next, it consists of a series of operations of rotating 90 ° by the θ motor 90 and then storing it in the cleaning unit. In order to improve the production efficiency of the color filter and maintain high quality, the cleaning operation of the inkjet head and the operation of rotating from the cleaning unit to the ink ejection position again, moving at high speed, and stopping at a predetermined position with high accuracy Must be repeated with good reproducibility. The color filter manufacturing apparatus 50 sufficiently satisfies the required specifications.
In the color filter manufacturing apparatus 50, the upper Y-axis linear motor 43 having the same structure as that of the upper Y-axis linear motor 42 may be provided in the groove 56 on the back side of the upper base 41 and in the vicinity thereof.

Another embodiment of the ink jet unit used in the present invention is shown in FIGS.
FIG. 6B shows a configuration in which the ink discharge port 63 is surrounded by an annular air discharge port 65 cc. As a modified example, the discharge port of the inkjet head may be surrounded by an air discharge port provided in an annular shape.
FIG. 6C shows a case where air discharge ports 65 dd, 65 ee, 65 ff, and 65 gg are arranged vertically and horizontally with respect to the ink discharge port 63. In these cases, the flying curve of the ink can be remarkably suppressed by the same air curtain forming effect as in FIG.

  EXAMPLES Hereinafter, although an Example demonstrates this invention in detail, this invention is not limited by the following Example.

Example 1
A color filter manufacturing apparatus 50 (see FIG. 2) of the present invention was manufactured, and typical specifications of this apparatus are shown in Table 1. However, Table 1 shows the results of evaluation in a balanced state after releasing the mechanical lock.
As the coil spring 38 for canceling the self-weight of the Z-axis movable element 85, material: SUS304-WPB, outer diameter 12 mm × length 65 mm × wire diameter 1.2 mm, initial tension: 5.39 N, spring constant: 0.37 N / mm The tension spring was used. 2.18 kg of the total mass (including the ink jet unit 61) of the Z-axis movable element 85 was supported by the coil spring 38, and generation of thrust in the Z-axis downward due to the weight of the Z-axis movable element 85 was zero. Therefore, the Z-axis traveling with the predetermined pattern can be performed with low power consumption.
FIG. 7 is a diagram schematically showing the arrangement of the four movable elements of the upper Y-axis linear motor 42 when the ink is landed in the manufactured color filter manufacturing apparatus 50. In FIG. 7, when the four colors of ink are landed on the same glass substrate (not shown) in a predetermined pattern, the same rail (traveling path) 45, 45 of the upper Y-axis linear motor 42 is used in order to maximize the landing efficiency. Four movable elements 47a, 47b, 47c, and 47d are densely arranged on the (effective stroke total length: 600 mm) with a minimum interval. Hereinafter, the arrangement state of the four movers is referred to as the closest state. Reference numeral 16 denotes a stopper (for example, made of urethane rubber) attached to the right end of each of the movers 47a, 47b and 47c, and regulates the closest state. In this color filter manufacturing apparatus 50, D1 = 115 mm and L1 = 5 mm can be realized by mounting the moving coil type Z-axis linear motor of the present invention.

(Example 2)
A color filter manufacturing apparatus was manufactured and evaluated in the same manner as in Example 1 except that the coil spring was not used. The results are shown in Table 1.

(Comparative Example 1)
In the first embodiment, instead of the spring 38, a conventional gravity canceling mechanism that cancels the self-weight of the Z-axis movable element 85 by a combination of an air cylinder and compressed air is employed. By adopting this gravity canceling mechanism, the Z-axis movable element becomes large, and in order to realize the recently installed state of FIG. 7, the total effective stroke length of the upper Y-axis linear motor has to be extended to about twice that of the first embodiment. There wasn't. Other than this, a color filter manufacturing apparatus was manufactured and evaluated in the same manner as in Example 1. The results are shown in Table 1.

  From Table 1, in the color filter manufacturing apparatus of Examples 1 and 2, D1 is small, and the occupation length in the Y direction of the four movable elements is (4 × D1 + 3 × L1) = 475 mm. It was found that the landing efficiency of can be improved compared to the conventional. On the other hand, in the case of the comparative example 1, D1 became a large dimension of 250 mm, and the occupation length of the four movers in the Y direction was 1015 mm. At the same time, it was found that the ink landing efficiency was also reduced by more than 10% compared to Example 1.

2 to 4, the case where the θ motor 90, the movable coil type Z-axis linear motor 80 and the ink jet unit 61 are arranged on the mover 47 of the upper Y-axis linear motor 42 is described. However, the present invention is not limited to this.
That is, the same structure as the upper Y-axis linear motor 42 (hereinafter referred to as the upper X-axis linear motor) is extended in the upper X-axis direction, and the θ motor 90 is movable on the mover of the upper X-axis linear motor. A coil type Z-axis linear motor 80 and an inkjet unit 61 may be provided.

  In the first and second embodiments, the case where the multi-phase coil is a two-phase or three-phase coil is described.

  In the above embodiment, the case where the linear motors mounted on the lower shaft and the upper shaft drive stage are both movable coil type linear motors except for the Z axis has been described, but is not particularly limited. For example, except for the Z axis, the linear motor mounted on the lower axis and upper axis drive stages may be a movable magnet type linear motor. Alternatively, except for the Z-axis, when at least one of the linear motor mounted on the lower-axis drive stage and the linear motor mounted on the upper-axis drive stage is a moving coil type linear motor and the other is a moving magnet type linear motor But you can.

  In the above embodiment, air pressure is used as the deformation driving force of the spring of the wedge slide gear, but a system using hydraulic pressure may be used.

It is a perspective view explaining a magnetic circuit, a multiphase coil, a carriage, a rail, etc. of a movable coil type Z axis linear motor of the present invention. It is a perspective view which shows one Embodiment of the manufacturing apparatus of the color filter of this invention. It is a principal part front view which shows the structure of the upper Y-axis linear motor, (theta) motor, a movable coil type Z-axis linear motor, and an inkjet unit when it sees from a Y-axis direction. It is a principal part perspective view for supplementarily explaining the structure of an upper Y-axis linear motor, a θ motor, a movable coil type Z-axis linear motor, and an ink jet unit. It is a perspective view which shows the structure of the lock mechanism with which the moving coil type Z-axis linear motor of this invention is mounted | worn. FIG. 4 is a view of the inkjet head as viewed from below, in which (a) shows a pair of air discharge ports, (b) shows a case where square annular air discharge ports are provided, and (c) shows up, down, left and right air. This is a case where a discharge port is provided. In the color filter manufacturing apparatus of the present invention, it is a schematic diagram illustrating a preferred arrangement state of the mover at the time of landing of ink. It is the perspective view (a) concerning the conventional inkjet head, and the figure (b) seen from the lower side. It is a perspective view which shows the conventional inkjet apparatus. It is sectional drawing which shows the conventional Z-axis linear motor which uses an air cylinder.

Explanation of symbols

1: lower base, 2: X-axis linear motor, 3: support, 4: X-axis linear motor stator, 5: rail of X-axis linear motor, 6: reference member, 7: mover of X-axis linear motor,
8: Magnetic gap, 9: X-axis cable bear, 10: Lower-axis linear motor drive stage,
11: Anti-vibration unit, 13: Carriage,
14: Upper Y-axis linear motor bearing (block), 16: Stopper,
17: Fixed side bracket, 18: Movable side bracket, 21: Lower Y-axis base, 22: Lower Y-axis linear motor,
23: Z-axis cable carrier, 24: Z-axis lock mechanism,
25: Rail of the lower Y-axis linear motor, 26: Groove,
27: Lower Y-axis table (lower Y-axis linear motor mover), 28: Projection,
29: Lower Y-axis cable track, 30: Lower Y-axis cable track storage space,
31: Lower Y-axis stator, 32: Cable bear of θ motor, 33: Screw hole, 35: Wiring,
36, 49: frame, 38: spring, 39: permanent magnet,
40: Upper shaft linear motor drive stage, 41: Upper base,
42: upper Y-axis linear motor, 43: polyphase coil, 44: yoke,
45: Rail of upper Y-axis linear motor, 46: Stator of upper Y-axis linear motor,
47, 47a, 47b, 47c, 47d: mover of upper Y-axis linear motor,
48a, 48b, 48c, 48d: upper Y-axis cable bear, 50: functional thin film manufacturing apparatus,
53a, 53b, 53c, 53d: inkjet bear, 55, 56: groove,
61, 61a, 61b, 61c, 61d, 61 ′, 61 ″: an inkjet unit,
62: inkjet head, 63: ink discharge port, 65a, 65b: air nozzle,
65aa, 65bb, 65cc, 65dd, 65ee, 65ff, 65gg: air outlet,
66a, 66b, 66c, 66d, 66e, 66f, 66g, 66h: air elbow (air supply path),
67, 67 ′, 67 ″: inkjet base portion, 68: hole, 71: shaft,
71a, 71b: shaft end, 72: wedge slide gear,
73a, 73b: adjustment screw (clamp member), 74: spring,
75: Bracket, 76: Piston, 77: Silencer, 78: Body, 79: Screw hole,
80, 80a, 80b, 80c, 80d: movable coil type Z-axis linear motor,
81, 81a, 81b: polyphase coil, 82: permanent magnet, 83a: bottom yoke,
83b: side yoke, 83c: Z-axis base, 84: stator, 85: mover,
86: Coil holder (coil support), 87: Sensor (non-rotating part),
88: carriage, 89: magnetic gap, 90, 90a, 90b, 90c, 90d: θ motor, 92, 92a, 92b: wedge (taper), 95: rotating part,
97: Rail, 99: Z-axis linear motor bearing (block),
110, 111, 112: bracket,
115, 118, 124, 128: screw,
120: Air piping, 170, 180: Hole.

Claims (2)

A stator having a substantially U-shaped magnetic circuit formed by a permanent magnet and a yoke extending in the Z-axis direction, a magnetic air gap formed along the magnetic circuit, and the permanent magnet. A movable coil having a multiphase coil disposed opposite to the magnetic pole, and a movable element configured to freely move in the vertical direction along the Z-axis direction in the magnetic gap. Type Z-axis linear motor,
The mover has a substantially U-shaped cross section formed by a coil holder including the multiphase coil and a carriage attached to the coil holder, and is supported and slid on the coil holder attachment surface side of the carriage. Providing a member, and by causing the supporting sliding member to be fitted to a single traveling rail laid in the Z-axis direction on the outer surface of the yoke, linearly moves along the traveling rail; and Z arranged on the back side of the coil holder mounting surface of the carriage
The shaft lock mechanism is configured to mechanically lock when the multiphase coil is not energized to prevent dropping in the Z-axis direction, and the Z-axis lock mechanism is connected and supported by the stator. And a shaft suspended in the same direction as the linear movement direction of the mover, and a clamper that is attached to the back side of the coil holder mounting surface of the carriage and presses the side surface of the shaft,
The movable coil type Z-axis linear motor, wherein the clamper presses the shaft when the multiphase coil is not energized. The movable coil type Z-axis linear motor according to claim 1, wherein the clamper presses and releases the shaft by compressed air and a spring.

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