JP4957482B2 - Thermocompression bonding equipment - Google Patents

Description

  The present invention relates to a thermocompression bonding apparatus, and more particularly to a thermocompression bonding apparatus that can suppress a thermal influence from a heater block to a moving mechanism of a pressure bonding head and can secure parallelism and flatness at the tip of a pressure bonding tool.

  For example, in the manufacturing process of a flat display panel such as a liquid crystal panel or a plasma display panel, as shown in FIG. 7, a component 3 such as a TCP (Tape Carrier Package) or FPC (Flexible Printed Circuit) is pressure-bonded to the panel 2 as a substrate. There is a step of mounting the circuit board 5 on the panel 2 by crimping the component 3 such as TCP or FPC mounted on the panel 2 to the circuit board 5 as shown in FIG. A thermocompression bonding apparatus is used for the crimping process.

  As a thermocompression bonding device, a crimping head including a crimping tool and a heater block that covers and heats the portion excluding the tip of the crimping tool is moved toward the cradle, and between the tip of the crimping tool and the cradle. A member configured to heat and press the member to be bonded is known. Furthermore, as a specific configuration of the crimping head, a head base having a required rigidity is supported so as to be vertically movable via a linear guide, and a heater block is fastened and fixed to the head base with bolts. It is known that it is fixed to the head base so that the position can be adjusted with an adjustment bolt mechanism that is placed through the block, and the parallelism and flatness of the tip surface of the crimping tool can be adjusted. (For example, refer to Patent Document 1).

  Further, this Patent Document 1 also describes a configuration in which a block is attached to the lower part of the head base so that the vertical position can be adjusted, a heater block is fixed to the block, and a crimping tool is attached and fixed to the heater block.

  In addition, a heater block is fixed to a reference block that can be moved and driven by a cylinder mechanism with bolts, a crimping tool is screwed to the lower surface of the heater block, and a gap is formed between the heater block and the surface of the crimping tool. The structure which has arrange | positioned the heat insulation member so that it may open and cover is also disclosed (for example, refer patent document 2).

In addition, a crimping tool is mounted on the lower part of the lifting block with a first heat insulating material interposed therebetween, a heater block is mounted on the back surface of the pressing tool, and a bent portion having a second heat insulating material on the inner surface on the front surface of the lifting block. It is also known that a holding member provided at the lower end portion is attached and the second heat insulating material is pressed against the tapered surface of the front surface of the crimping tool to hold the crimping tool (see, for example, Patent Document 3). ).
JP 2002-151835 A Japanese Patent No. 3885949 Japanese Patent No. 3344223

  However, in the configuration described in Patent Document 1, the parallelism and flatness of the tip surface of the crimping tool can be accurately adjusted by the adjusting bolt mechanism, but supported by the linear guide so as to be movable up and down. Since the heater block is in contact with and fixed to the head base, the heat of the heater block is transmitted to the moving mechanism through the head base, greatly affecting the moving mechanism, causing thermal distortion in the moving mechanism, and There is a problem that it is not possible to stably secure accurate crimping by deteriorating the positional accuracy of the distal end surface or by causing variation in the movement resistance and causing variation in the applied pressure.

  Further, in the configuration described in Patent Document 2, the heater block is fixed with a plurality of bolts with respect to the reference block moved by the moving mechanism, the crimping tool is fixed to the lower surface thereof, and Since the heat insulating member that covers the surface of the heater block and the crimping tool with a gap is disposed, the heat of the heater block can be suppressed from being transmitted to the moving mechanism through the reference block, and the above problem is solved. Since the position of each part in the longitudinal direction of the crimping tool is not directly adjusted, the position of the tip surface of the crimping tool cannot be adjusted with accuracy, and accurate crimping can be secured stably. There is a problem that you can not.

  Moreover, combining the patent document 1 and the patent document 2, it replaces with the volt | bolt of the patent document 2, the adjustment bolt mechanism of patent document 1 is applied, and it suppresses that the heat | fever of a heater block is transmitted to a moving mechanism, a heater Even if the adjustment bolt mechanism is used to adjust the position of the block and the crimping tool, the crimping tool is fixed to the lower surface of the heater block. Therefore, there is a problem that it is impossible to adjust the position with high accuracy with respect to variations in flatness, and it is impossible to stably secure high-precision crimping.

  Moreover, in the structure described in patent document 3, since a heat insulating material is respectively interposed between the raising / lowering block and the crimping tool and between the crimping tool and the holding member attached to the raising / lowering block, Although heat transfer to the lifting block can be suppressed to some extent, the position adjustment mechanism of the crimping tool is not provided, so in the case of a long crimping tool, the parallelism and flatness of the tip surface due to thermal strain, etc. are accurate. There is a problem that it cannot be adjusted well.

  In view of the above-mentioned conventional problems, the present invention can suppress the thermal influence from the heater block to the moving mechanism of the crimping head, and can ensure the parallelism and flatness of the tip of the crimping tool, and stably secure highly accurate crimping. It is an object of the present invention to provide a thermocompression bonding apparatus that can be used.

  The thermocompression bonding apparatus of the present invention moves a crimping head having a heating tool block covering a portion excluding the crimping tool and the tip of the crimping tool toward the cradle, and connects the tip of the crimping tool to the cradle. In a thermocompression bonding apparatus that heats and presses a member to be bonded between, a crimping head is disposed at a distance from a movable support that can be driven to move in a perspective direction with respect to a cradle. A plurality of fixing bolt mechanisms arranged at intervals in the longitudinal direction are fixed to the movable support portion at intervals, and the crimping tool is arranged at intervals in the longitudinal direction and through the heater block. It is fixed to the movable support portion so that the position can be adjusted by a plurality of adjustment screw mechanisms provided.

  According to this configuration, since the crimping head including the heater block and the crimping tool is disposed at a distance from the movable support portion, the heat of the heater block is transmitted to the movable support portion and its moving mechanism. The heater block is fixed to the movable support with multiple fixing bolt mechanisms, and the position of the crimping tool can be adjusted with another adjusting screw mechanism that penetrates the heater block. Since it is fixed to the movable support portion, it is possible to accurately adjust the position of only the crimping tool independently with respect to the fixed heater block. Therefore, the thermal influence from the heater block can be suppressed and the parallelism and flatness of the tip of the crimping tool can be adjusted with high accuracy, so that accurate crimping can be stably secured.

  The fixed bolt mechanism is composed of a sleeve disposed between the movable support portion and the heater block, and a fixed bolt screwed into the heater block through the movable support portion and the sleeve, and the adjustment screw mechanism is located at the movable support portion. When the screw is fixed in an adjustable manner and the tip part passes through the heater block and comes into contact with the crimping tool, and the fixing screw is screwed into the crimping tool through the hollow adjustment screw. The heater block can be firmly fixed, and the position of the hollow adjusting screw can be adjusted and fixed by the fixing screw, so that the position of the crimping tool can be easily adjusted and fixed.

  In addition, a cooling air passage is provided in the movable support portion along the longitudinal direction of the pressure-bonding head, and is branched from the cooling air passage so as to come into contact with a screwing portion of each adjustment screw mechanism and to be opened at a side surface of the movable support portion. By providing the movable support and the adjustment screw mechanism, which is the main heat transfer path, can be actively cooled with cooling air, the thermal influence from the heater block can be more reliably suppressed, and the movable When the cooling air is blown out from the side surface of the support portion, it is possible to cause convection in the surrounding atmosphere and suppress adverse effects due to an increase in the ambient temperature.

  In addition, when the heat insulating cover is disposed so as to cover the surface and both sides facing the movable support portion of the heater block with a gap, heating of the movable support portion due to radiant heat from the heater block can be effectively suppressed, and the heater Since the heat dissipation of the block can be effectively prevented by the air layer between the heater block and the heat insulating cover and the heat insulating material constituting the heat insulating cover, the heater block heating efficiency can be improved.

  In addition, if a pressing means for moving and driving the movable support portion is provided on the center axis of the crimping tool, an eccentric load acts on the moving mechanism of the movable support portion during the pressurization to cause a deflection. Since a load is applied perpendicularly to the center of the front end surface of the crimping tool without causing any positional shift, accurate crimping can be stably secured.

  According to the thermocompression bonding apparatus of the present invention, since the crimping head is disposed at a distance from the movable support portion, the heat of the heater block of the crimping head is transmitted to the movable support portion and its moving mechanism. While the heater block is fixed to the movable support part, the position of the crimping tool can be adjusted independently with respect to the fixed heater block. Since the parallelism and flatness of the tip of the crimping tool can be adjusted with high accuracy, accurate crimping can be stably secured.

  Hereinafter, the thermocompression bonding apparatus of the present invention is applied to a main pressure bonding apparatus that heats and presses components such as TCP and FPC on a panel in a flat panel display (FPD) as a substrate, and press-bonds the components to the panel. A form is demonstrated referring FIGS. 1-8.

  In the thermocompression bonding apparatus 1 of the present embodiment, as shown in FIGS. 7A and 7B, the panel 2 is carried in a state in which the component 3 is temporarily bonded, and the component 3 is heated and heated against the panel 2. The component 3 is mounted on the panel 2 by applying pressure and press-bonding. Specifically, the component 3 is temporarily press-bonded to the side end portion of the panel 2 via an anisotropic conductive material (ACF) 4 (see FIG. 7B) as a bonding material, and the component 3 is heated. By pressing, the component 3 is joined to the panel 2 in a state where the electrode of the component 3 and the electrode of the panel 2 are electrically connected by the anisotropic conductive material 4.

  As shown in FIGS. 1 to 3, the thermocompression bonding apparatus 1 includes a cradle 10 that supports a crimping portion of the panel 2 from below, and a crimping head that press-bonds the panel 2 and the component 3 in cooperation with the cradle 10. 11 is provided. The cradle 10 is configured by installing a receiving member 10a made of quartz or ceramic on the pedestal portion 10b. In the crimping step, the side end of the panel 2 is placed on the upper surface of the receiving member 10a, and the crimping head 11 The side end of the panel 2 and the component 3 are sandwiched between them, and heated and pressed to perform pressure bonding.

  The crimping head 11 is attached to the lower part of the movable support part 12 with a gap. The movable support portion 12 extends along the guide rails 14 provided on both sides of the back support plate 13a provided on the back side of the portal frame 13 provided so as to surround the upper space of the cradle 10. And is supported up and down freely. A slide guide 15 is movable along the guide rail 14 and is fixed to the back surface of the movable support portion 12. A pressure cylinder 16 as pressure means is disposed on the upper surface of the frame 13 on the center axis of the pressure bonding head 11 and the movable support portion 12, and the tip of the cylinder rod 16 a is fixed to the movable support portion 12, and is supported in a movable manner. The unit 12 is configured to move up and down and to apply pressure.

  The crimping head 11 is composed of a crimping tool 17 and a heater block 18 as shown in FIGS. The crimping tool 17 has an elongated rectangular parallelepiped shape, and has a pressurizing portion 17a extending downwardly at a lower portion thereof, and pressurizes the component 3 with a tip surface of the pressurizing portion 17a. . The heater block 18 is formed by combining a block main body 18a having an L-shaped cross section and a pressing plate 18b, and covering the portion of the crimping tool 17 excluding the pressurizing portion 17a. The crimping tool 17 is held by fastening the block body 18a and the retainer plate 18b with the bolts 19 in a state where the crimping tool 17 is accommodated in the space of the lower surface formed by the main body 18a and the retainer plate 18b. It is configured. Therefore, a step portion 20a that contacts the side surface of the block main body 18a is provided at the upper end portion of the pressing plate 18b, and a fixing portion 20b that is pressed and fixed to the side surface of the crimping tool 17 is provided at the lower portion so as to be recessed therebetween. It is configured so that the intermediate portion of the pressing plate 18b is pressed by a bolt 19.

  As shown in FIGS. 2 and 4, the heater block 18 of the pressure-bonding head 11 includes a plurality of (four in the illustrated example) fixing bolt mechanisms 21 arranged at intervals in the longitudinal direction, and the movable support portion 12. Are fixed below the attachment plate 12a at the lower end with a gap. The fixing bolt mechanism 21 is screwed into the heater block 18 through the mounting plate portion 12a and the sleeve 22 and the sleeve 22 made of a material having low thermal conductivity disposed between the mounting plate portion 12a and the upper surface of the heater block 18. A heat insulating material 24 is interposed between the head 23a of the fixing bolt 23 and the upper surface of the mounting plate portion 12a. Thereby, even if it uses stainless steel with high intensity | strength as the fixing bolt 23, heat transfer is suppressed.

  As shown in FIGS. 1 and 5, a plurality of heaters 25 (18 in the example of FIG. 2) are inserted and arranged in the heater block 18 at an appropriate pitch interval in the longitudinal direction, and the temperature detection means 26 is directly below the heater block 18. Is inserted and arranged so that the heater block 18 is heated and controlled uniformly in the longitudinal direction. The heater 25 is controlled to be heated to a maximum temperature of about 500 ° C. so that the temperature of the lower surface of the pressurizing portion 17a of the crimping tool 17 during pressurization can be heated to about 190 to 200 ° C., for example.

  The heater block 18 is provided with a heat insulating cover 27 so as to cover the upper surface and both side surfaces with a gap. For the heat insulating cover 27, for example, a ceramic heat insulating material having a thermal conductivity of about 1.5 to 2.0 (W / m · K) is preferably used. The heat insulating cover 27 is divided into two parts, front and rear (left and right in FIG. 5), and is arranged so as to cover the heater block 18 from the front and rear. The heat insulating cover 27 includes a mounting block 29 in which mounting brackets 28 provided on the front and rear sides of two upper surfaces spaced apart in the longitudinal direction are mounted and fixed to the lower surface of the mounting plate portion 12a of the movable support portion 12. It is attached to the movable support portion 12 by being fastened and fixed to the front and rear side surfaces. Reference numeral 29 a denotes a positioning pin of the mounting block 29. In addition, as shown in FIG. 5B, a notch 27a through which the heater 25 and the temperature detecting means 26 are inserted is provided at the location of the heater 25 in the heat insulating cover 27.

  As shown in FIGS. 2 and 6, the crimping tool 17 accommodated and held in the open space at the lower end in the heater block 18 is movable in a position-adjustable manner by a plurality of (9 in the illustrated example) adjustment screw mechanisms 30. It is fixed to the support part 12. These adjustment screw mechanisms 30 are provided with a reference adjustment screw mechanism 30 (S) on the central axis of the crimping tool 17, and the reference adjustment screw mechanism 30 (S) is set at the center and other intervals are set at other intervals. An adjusting screw mechanism 30 is provided. The heaters 25 are disposed on both sides of each adjustment screw mechanism 30, and the fixing bolt mechanism 21 is disposed between the adjustment screw mechanisms 30 and 30 and between the heaters 25 and 25.

  The adjustment screw mechanism 30 is screwed and fixed to the mounting plate portion 12a of the movable support portion 12 so as to be position-adjustable, and has a hollow adjustment screw 31 whose front end portion penetrates the heater block 18 and contacts the upper surface of the crimping tool 17; The fixing screw 32 is screwed into the crimping tool 17 through the adjusting screw 31. The hollow adjustment screw 31 has a screw portion 31a that is screwed into a screw hole 12b that is formed through the mounting plate portion 12a of the movable support portion 12 on the outer periphery of the hollow adjustment screw 31, and a lock nut 33 is screwed to the screw portion 31a. The hollow adjustment screw 31 is fastened and fixed at an arbitrary adjustment position by the lock nut 33 and the mounting plate portion 12a. Since the hollow adjusting screw 31 and the fixing screw 32 contact the center of the heater block 18 in a wide area and directly receive heat, the hollow adjusting screw 31 and the fixing screw 32 are preferably made of a material having high heat resistance such as chrome molybdenum heat resistant steel.

  A cooling air passage 34 is formed in the mounting plate portion 12a of the movable support portion 12 so as to pass through the longitudinal direction in the position of the back portion of the adjustment screw mechanism 30, and air supply sources (not shown) are formed at both ends thereof. A connected fitting 35 is attached. The cooling air passage 34 is branched from a cooling air outlet passage 36 corresponding to each adjustment screw mechanism 30. The cooling air outlet passage 36 is formed so as to be in contact with the screw hole 12b into which the screw portion 31a of the hollow adjusting screw 31 is screwed, and is opened at the front side surface of the mounting plate portion 12a. A silencer 37 that also functions as a filter is attached to the part.

  In the present embodiment, as indicated by phantom lines in FIGS. 1 and 4 to 6, the sheet 40 is placed between the tip surface of the pressing portion 17 a of the crimping tool 17 and the component 3 on the cradle 10. It is configured to supply. In the illustrated example, the sheet 40 is uniformly crimped by absorbing variations in the dimensions of the polytetrafluoroethylene sheet 40a that prevents the anisotropic conductive material 4 protruding during the crimping from adhering to the panel 2 and the parts 3. The thermocompression bonding apparatus 1 is configured by a silicone rubber sheet 40b having a cushioning property for ensuring a state, so that these sheets 40a and 40b are separately supplied and supplied in the vicinity of the pressurizing portion 17a. A sheet supply unit 41 is disposed at the rear, and a sheet collection unit 43 is disposed at the front.

  The sheet supply unit 41 includes supply rolls 42a and 42b around which the sheets 40a and 40b are wound. The supply rolls 42a and 42b are rotatably supported and include braking means (not shown) for rotationally braking when necessary. The sheet collection unit 43 includes winding rolls 44a and 44b that wind the sheets 40a and 40b, a motor (not shown) that rotates the winding rolls 44a and 44b, and tension units 45a and 45b. The tension portions 45a and 45b are constituted by a pair of guide rollers 46a and 46b and a tension roller 46c that is movable between the pair of guide rollers 46a and 46b and is urged to move away from the rollers. 47a and 47b are guide rollers for guiding the sheet 40 between the sheet supply unit 41 and the sheet collecting unit 43 and the crimping head 11, and 48a and 48b are moved up and down with the crimping head 11 on both front and rear sides of the crimping head 11. Thus, the guide roller guides the sheet 40.

  A crimping process for crimping the component 3 to the panel 2 by the thermocompression bonding apparatus 1 having the above configuration will be described. First, the panel 2 on which the component 3 is temporarily crimped is carried into the thermocompression bonding apparatus 1, and the side end portion of the panel 2 on which the component 3 is provisionally crimped is placed on the receiving base 4 and supported. Next, a pressure bonding operation is started, the pressure cylinder 16 is operated, the pressure bonding head 11 is lowered via the movable support portion 12, and the pressure bonding portion of the component 3 is moved via the sheet 40 by the pressure bonding tool 17 of the pressure bonding head 11. Perform the main pressure bonding operation to pressurize and heat. When the main crimping is finished, the crimping head 11 is raised and the panel 2 is carried out of the thermocompression bonding apparatus 1. Thereafter, the operation of carrying in the next panel 2 is started, and the above-described operation is repeated, so that the main press-bonding operation of the component 3 with respect to the panel 2 is sequentially performed.

  According to the above embodiment, since the crimping head 11 provided with the heater block 18 and the crimping tool 17 is arranged at a distance from the movable support portion 12, the heat of the heater block 18 is transferred to the movable support portion. 12 and the slide guide 15 which is the moving mechanism thereof can be effectively suppressed, and it is possible to prevent the displacement of the pressure-bonding head 11 due to thermal distortion in the moving mechanism. Further, since the upper surface and both side surfaces of the heater block 18 facing the movable support portion 12 are covered with a heat insulating cover 27 through a gap, high heat insulating performance is exhibited, and the movable support portion 12 of the movable support portion 12 due to radiant heat from the heater block 18 is exhibited. Since the heating can be effectively suppressed, the above effect is further exhibited. Further, the heat dissipation of the heater block 18 is effectively prevented by the air layer between the heater block 18 and the heat insulating cover 27 and the heat insulating material constituting the heat insulating cover 27, so that the heating efficiency of the heater block 18 is also improved. improves.

  Moreover, while the heater block 18 is fixed to the movable support portion 12 with a plurality of fixing bolt mechanisms 21 at intervals, the position of the crimping tool 17 can be adjusted by another adjusting screw mechanism 30 penetrating the heater block 18. Since it is fixed to the movable support portion 12, the position of an arbitrary portion in the longitudinal direction of the crimping tool 17 can be independently and accurately adjusted with respect to the fixed heater block 18. Therefore, the thermal influence from the heater block 18 can be suppressed and the parallelism and flatness of the tip of the crimping tool 17 with respect to the cradle 10 can be adjusted with high accuracy, so that accurate crimping can be stably secured.

  In addition, a plurality of adjustment screw mechanisms 30 are provided with a reference adjustment screw mechanism 30 (S) on the central axis of the crimping tool 17, and the reference adjustment screw mechanism 30 (S) is the center, and other adjustment screw mechanisms 30 are arranged at regular intervals. Since the adjustment screw mechanism 30 is provided, the thermal expansion of the crimping tool 17 is performed based on the center reference in the longitudinal direction when the crimping tool 17 is reheated at the time of starting up the equipment. Can be performed with good workability based on the reference adjusting screw mechanism 30 (S). In addition, a plurality of fixing bolt mechanisms 21 are arranged between the arbitrary adjusting screw mechanisms 30 and 30 so that the adjusting screw mechanisms 30 are present on both sides of the fixing bolt mechanism 21. Even if heat is transmitted to the portion 12 and a temperature change occurs, the deflection of the crimping tool 17 can be easily and reliably adjusted.

  The fixing bolt mechanism 21 includes a sleeve 22 disposed between the movable support portion 12 and the heater block 18, and a fixing bolt 23 screwed into the heater block 18 through the movable support portion 12 and the sleeve 22, and an adjustment screw. The mechanism 30 is screwed and fixed to the movable support portion 12 so that the position of the mechanism 30 can be adjusted. The heater block 18 can be firmly fixed by fastening the fixing bolt 21, and the position of the hollow adjusting screw 31 is adjusted and fixed by the fixing screw 32. Thus, the position of the crimping tool 17 can be easily adjusted and fixed with good workability.

  Further, a cooling air passage 34 is provided in the mounting plate portion 12a of the movable support portion 12 along the longitudinal direction of the pressure-bonding head 11, and is branched from the cooling air passage 34 to be screwed with the mounting plate portion 12a of each adjusting screw mechanism 30. Since the cooling air outlet passage 36 that is in contact with the opening and opens at the front side surface of the mounting plate portion 12a is provided, the mounting plate portion 12a of the movable support portion 12 can be actively cooled with cooling air, and the heater The adjusting screw mechanism 30 that is a main heat transfer path from the block 18 to the mounting plate portion 12a can also be actively cooled by the cooling air. Therefore, the thermal influence from the heater block 18 can be reliably suppressed, and the cooling air is blown out from the front side surface of the mounting plate portion 12a through the silencer 37, thereby causing convection in the surrounding atmosphere and the surrounding ambient temperature. It is possible to suppress harmful effects caused by the rise.

  Further, since the pressure cylinder 16 for moving and driving the movable support portion 12 is disposed on the central axis of the crimping tool 17, an eccentric load acts on the moving mechanism of the movable support portion 12 during pressurization. Since there is no risk of causing deflection and positional displacement of the crimping tool 17, a load is applied perpendicularly to the center of the front end surface of the crimping tool 17, so that the crimping tool 17 stably ensures accurate crimping. be able to.

  In the above description, the example in which the part 3 temporarily bonded to the panel 2 via the anisotropic conductive material 4 is pressure bonded has been described. However, the pressure bonding apparatus 1 according to the present invention is shown in FIGS. ), The circuit board 5 on which the component 3 bonded to the panel 2 is temporarily bonded is brought in via various bonding materials 6 such as an anisotropic conductive material and a non-conductive bonding material. The present invention can also be applied to the case where the circuit board 5 is mounted on the panel 2 by heating and pressurizing and bonding the circuit board 5 to the circuit board 5.

  In the above description, the example in which the thermocompression bonding apparatus 1 is applied to the main pressure bonding apparatus for main pressure bonding of the panel 2 or the circuit board 5 and the component 3 has been described. Applicable. Furthermore, the present invention can be applied not only to the main pressure bonding but also to a temporary pressure bonding apparatus or the like. However, since the heating temperature of the pressure bonding tool is high in the main pressure bonding apparatus, the effect of the present invention is particularly remarkable.

  According to the thermocompression bonding apparatus of the present invention, the heat of the heater block of the crimping head can be effectively suppressed from being transmitted to the movable support portion and the moving mechanism, and the heater block is fixed to the movable support portion. On the other hand, since the position of the crimping tool can be adjusted independently with respect to the fixed heater block, the thermal influence from the heater block can be suppressed and the parallelism and flatness of the tip of the crimping tool can be adjusted with high accuracy. Since good crimping can be secured stably, it can be suitably used for an electronic component crimping apparatus that crimps components to various substrates.

The AA arrow cross-section side view of FIG. 2 which shows the structure of one Embodiment of the thermocompression bonding apparatus of this invention. The front view of the embodiment. The perspective view which shows the principal part structure of the embodiment. The BB arrow expanded sectional view of FIG. 2 which abbreviate | omitted and showed the heat insulation cover. (A) is a CC arrow expanded sectional view of FIG. 2, (b) is the EE arrow view of (a). (A) is a DD arrow enlarged sectional view of FIG. 2 which abbreviate | omitted and showed the heat insulation cover, (b) is the FF arrow line view of (a). The main crimping | compression-bonding apparatus of the application example of the thermocompression bonding apparatus of the embodiment is shown, (a) is a perspective view, (b) is a longitudinal cross-sectional view of the principal part. The main crimping | compression-bonding apparatus of the other application example of the thermocompression bonding apparatus of the embodiment is shown, (a) is a perspective view, (b) is a longitudinal cross-sectional view of the principal part.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Thermocompression bonding apparatus 10 Base 11 Crimping head 12 Movable support part 16 Pressure cylinder (pressurizing means)
DESCRIPTION OF SYMBOLS 17 Crimping tool 18 Heater block 21 Fixing bolt mechanism 22 Sleeve 23 Fixing bolt 27 Heat insulation cover 30 Adjustment screw mechanism 30 (S) Reference | standard adjustment screw mechanism 31 Hollow adjustment screw 32 Fixing screw 34 Cooling air passage 36 Cooling air blowing passage 36

Claims (4)

Move the crimping head equipped with a crimping tool and a heater block that covers and heats the part excluding the tip of the crimping tool toward the cradle, and heat the member to be crimped between the tip of the crimping tool and the cradle. In the thermocompression bonding apparatus, the crimping head is disposed at a distance from the movable support that can be moved and moved in the perspective direction with respect to the cradle, and the heater block of the crimping head is disposed at a distance in the longitudinal direction. A plurality of fixing bolt mechanisms are fixed to the movable support portion at intervals, and the crimping tool is provided with a plurality of adjustment screw mechanisms arranged at intervals in the longitudinal direction and through the heater block. It is fixed to the movable support so that the position can be adjusted,
The fixed bolt mechanism is composed of a sleeve arranged between the movable support part and the heater block, and a fixed bolt screwed to the heater block through the movable support part and the sleeve, and the position of the adjustment screw mechanism can be adjusted to the movable support part. thermocompression bonding device you wherein a hollow adjusting screw in contact with the screwed fixed pressure bonding tool tip through the heater block, that constituted by fixing screws screwed into the crimping tool through the hollow adjusting screw . Move the crimping head equipped with a crimping tool and a heater block that covers and heats the part excluding the tip of the crimping tool toward the cradle, and heat the member to be crimped between the tip of the crimping tool and the cradle. In the thermocompression bonding apparatus, the crimping head is disposed at a distance from the movable support that can be moved and moved in the perspective direction with respect to the cradle, and the heater block of the crimping head is disposed at a distance in the longitudinal direction. A plurality of fixing bolt mechanisms are fixed to the movable support portion at intervals, and the crimping tool is provided with a plurality of adjustment screw mechanisms arranged at intervals in the longitudinal direction and through the heater block. It is fixed to the movable support so that the position can be adjusted,
A cooling air passage is provided in the movable support portion along the longitudinal direction of the pressure-bonding head, and a cooling air blowing passage that branches off from the cooling air passage and comes into contact with the screwing portion of each adjustment screw mechanism and opens on the front side surface of the movable support portion. thermocompression bonding device characterized by comprising. The thermocompression bonding apparatus according to claim 1 or 2 , wherein a heat insulating cover is disposed so as to cover the surface and both side surfaces of the heater block facing the movable support portion with a gap therebetween. The thermocompression bonding apparatus according to any one of claims 1 to 3 , wherein a pressing means for moving and driving the movable support portion is disposed on a central axis of the crimping tool.

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