JP5042769B2 - OPTICAL ELEMENT MOLDING MANUFACTURING METHOD AND OPTICAL ELEMENT MOLDING MOLD - Google Patents

Description

The present invention relates to a method of manufacturing an optical element molding die, for manufacturing or machined optical element molding die by 及 beauty method or processing method for their preparation.

  There is provided a technique for directly manufacturing an optical element such as a lens or a prism by press-molding a glass material without requiring a polishing process. In recent years, this technique has been widely applied to the manufacture of optical elements because it can eliminate the complicated steps required in the conventional method and can easily and inexpensively manufacture optical elements. .

By the way, as an optical element molding die used for such molding, a mixed layer of chromium and oxygen is used as a base material (mold base material) as a layer excellent in releasability without welding with glass. What was formed in the surface of this is known (for example, refer patent document 1).
Also, a surface layer made of platinum, palladium, iridium, osmium, ruthenium, rhenium is formed on the surface of the mold base material made of cemented carbide or silicon carbide, and an intermediate layer is provided between the surface layer and the substrate. Is also known in which the roughness of the surface layer in contact with the glass material is prevented from increasing (for example, see Patent Document 2).
JP 9-48622 A JP 2004-244306 A

However, the molding die in which the mixed layer of chromium and oxygen of Patent Document 1 is formed, when refractory glass having a high molding temperature is used as a molding material, particularly when the base material is oxidized and deteriorated under high temperature heating conditions. Will be promoted. Then, by repeatedly using it in the heat cycle, strain is accumulated on the base material, and the durability and the like of the mold may be lowered, and the moldability may also be lowered.
Further, in the molding die of Patent Document 2, oxygen in this material migrates (diffuses) from the glass material to the surface layer of the molding die during molding, and the surface layer causes an oxidation reaction. The reactivity between the glass material and the surface layer is increased. Then, due to such a reaction, the glass material is welded to the surface layer during molding, and after molding, it becomes difficult to take out the molded product from the mold due to poor releasability of the molded product. There is also a risk that defects will occur.

  The present invention solves such a conventional problem, and does not cause glass welding, and can be stably repeated. Manufacturing method and processing method of optical element molding die, and optical element molding die The purpose is to provide.

In order to achieve the above object, a method for manufacturing an optical element molding die of the present invention is a method for manufacturing an optical element molding die for press molding a glass material to mold an optical element. Alternatively, in the mold base material made of silicon carbide, a step of forming a surface layer that contacts the glass material during press molding, and a heating step of heating the surface layer to form a heated oxide layer on the surface portion thereof, It has a, the surface layer, platinum, palladium, iridium, osmium, ruthenium, rhenium, hafnium, an alloy containing at least one kind of element selected from tantalum, in the above heating step, the basic material is A heat-oxidized layer is formed on the surface portion by performing heat treatment at a temperature that does not substantially oxidize .

According to this method for manufacturing an optical element molding die, since the surface layer is heated and a heating oxide layer is formed on the surface portion, the molding die to be obtained is formed of the surface layer. A heated oxide layer is formed on the surface portion. Therefore, when a glass material is molded using such a molding die, since there is a heating oxide layer on the outermost surface, it is possible to suppress oxygen migration (diffusion) from the glass material to the molding die, As a result, the oxidation reaction in the surface layer does not occur, and the reaction hardly occurs between the glass material and the surface layer during molding. Therefore, according to this manufacturing method, after the molding, a mold for molding that prevents the inconvenience that the mold releasability of the molded product becomes worse and it becomes difficult to take out the molded product from the mold, and further, the occurrence of molding defects can be prevented. Can be manufactured.
In addition, the obtained molding die is difficult to be oxidized during molding, and therefore, inconveniences such that the mold release property of the molded product after molding is deteriorated and it is difficult to take out the molded product from the mold are prevented.

In the method for manufacturing an optical element molding die, in the heating step, a heating oxide layer is formed on the surface portion by performing a heat treatment at a temperature at which the mold base material is not substantially oxidized. Is preferred.
In this way, since there is no oxidative deterioration of the mold base material in the heating step, a good mold that has excellent durability and further suppresses deterioration of formability due to oxidative deterioration is obtained. Can be manufactured. Here, “substantially not oxidize” means that the change in the degree of oxidation of the mold base material that occurs before and after the heating step is the degree of oxidation when left alone in the atmosphere without performing the heating step. This means that there is almost no difference in actual use compared to changes.

The formation in the method of manufacturing the optical element molding die, the said surface layer, platinum, palladium, iridium, osmium, ruthenium, rhenium, hafnium, an alloy containing at least two types of elemental selected from tantalum It is preferable to do this.
The surface layer is preferably formed of an alloy of platinum and iridium.
In this way, the molding die to be obtained is less likely to be oxidized at the time of molding, and therefore the inconvenience that the mold release property of the molded product after molding becomes worse and it becomes difficult to take out the molded product from the mold is prevented. .

The optical element molding die of the present invention is manufactured by the method for manufacturing an optical element molding die of the above invention.
According to this optical element molding die, since it is manufactured by the above-described manufacturing method, after molding, it is possible to prevent the inconvenience that the molded product has poor releasability and it is difficult to take out the molded product from the die. It can be set as the metal mold | die which can also prevent generation | occurrence | production of a molding defect.

  In the method for manufacturing an optical element molding die according to the present invention, the method includes a step of oxidizing the surface portion of the surface layer, and a heating oxide layer is formed on the surface portion of the surface layer of the molding die to be obtained. Therefore, after molding, it is possible to prevent the inconvenience that the mold releasability of the molded product becomes worse and it becomes difficult to take out the molded product from the mold, and it is possible to produce a molding die that can prevent the occurrence of molding defects. it can. Therefore, by using this molding die, the optical element can be efficiently and stably molded, thereby improving the productivity.

  In addition, since the optical element molding die of the present invention has a heated oxide layer on the outermost surface, after the molding, the release property of the molded product becomes worse and it is difficult to take out the molded product from the die. It is possible to prevent the inconvenience of becoming and further to prevent the occurrence of molding defects. Therefore, the optical element can be molded efficiently and stably, thereby improving the productivity.

The present invention will be described in detail below.
First, the optical element molding die of the present invention will be described. 1 and 2 are views showing an embodiment of an optical element molding die of the present invention. In these drawings, reference numeral 1 denotes an optical element molding die (hereinafter referred to as a molding die). . This molding die 1 is for manufacturing a convex lens (optical element) by press molding. In this embodiment, a glass material M is placed between a pair of molding dies 1 and 1 as shown in FIG. It is sandwiched and press-molded in that state.

  As shown in FIG. 2, the molding die 1 is formed on a mold base material 2 and a surface 2a of the mold base material 2, and has a molding surface 3a that comes into contact with the glass material M during press molding. A layer 3 and an intermediate layer 4 formed between the mold base material 2 and the surface layer 3, and a heating oxide layer 5 is formed on the surface portion of the surface layer 3, that is, the molding surface 3 a described above. It is.

  As shown in FIG. 1, the mold base material 2 has a surface 2a formed in a concave shape matching the radius of curvature of the convex lens, and is made of sintered cemented carbide or silicon carbide. . In addition, as the material of the mold base material 2, in particular, a cemented carbide containing tungsten carbide (WC) as a main component is suitable in terms of excellent durability. It is assumed that it is made of a cemented carbide whose main component is tungsten carbide.

  As shown in FIG. 2, the intermediate layer 4 is composed of a metal layer 6 formed in contact with the surface 2 a of the mold base 2 and a nitride layer 7 formed in contact with the surface 6 a of the metal layer 6. ing. The metal layer 6 is made of at least one metal material of chromium, titanium, aluminum, and molybdenum. By forming such a metal layer 6 between the mold base material 2 and the surface layer 3, sufficient adhesion can be obtained between the mold base material 2 and the surface layer 3. The stress generated by the thermal cycle during molding can be relaxed. Therefore, even if press molding is repeated, peeling of the surface layer 3 can be reliably prevented. As such a metal layer 6, chromium is particularly suitable. Therefore, in this embodiment, the metal layer 6 is formed of chromium.

  The nitride layer 7 is formed between the metal layer 6 and the surface layer 3, and includes a nitride containing at least one element of chromium, titanium, aluminum, molybdenum, for example, chromium nitride, It is made of titanium nitride, aluminum nitride, aluminum nitride titanium, molybdenum nitride or the like. Since the nitride layer 7 formed of such a nitride is excellent in heat resistance and oxidation resistance, even if repeated press molding is performed, oxygen is formed on the molding surface 3a of the surface layer 3 (heated oxide layer 5). To the inside of the intermediate layer 4 can be suppressed. For this reason, it is suppressed that oxygen reaches | attains the metal layer 6 formed from chromium, titanium, etc., and the fall of the adhesive force by the oxidation of the metal layer 6 is prevented. Therefore, peeling of the surface layer 6 can be prevented over a long period of time. As such a nitride layer 7, since the metal layer 6 is formed of chromium in particular, in this embodiment, the nitride layer 7 is made of chromium nitride having good adhesion to chromium (metal layer 6). It is assumed that the nitride layer 7 is formed.

  The surface layer 3 is formed in contact with the surface 7a of the nitride layer 7, and is composed of platinum (Pt), palladium (Pd), iridium (Ir), osmium (Os), ruthenium (Ru), rhenium (Re). , At least one element selected from hafnium (Hf) and tantalum (Ta), or an alloy containing these elements. By being made of such an element or an alloy containing the element, the surface layer 3 is not easily oxidized during molding, and therefore, the release property of the molded product after molding becomes poor, and the molded product is difficult to be taken out from the mold. Such inconvenience is prevented. In addition, as such a surface layer 3, platinum or an alloy containing this is particularly suitable. Therefore, in this embodiment, the surface layer 3 is formed of an alloy of platinum and iridium (Pt—Ir). And

  The heating oxide layer 5 is formed on the molding surface 3a of the surface layer 3, that is, the outermost surface portion. As will be described later, the surface layer 3 is formed on the surface 2a of the mold base material 2 via the intermediate layer 4. After the surface layer is formed, the surface layer 3 is formed by heat treatment. The heating oxide layer 5 may be made of a metal oxide formed by chemically bonding a metal element constituting the surface layer 3 and oxygen, or a mixed layer containing a mixture of the metal element and oxygen. Further, a layer including both of these metal oxides and mixed layers may be used. Since such a heat-oxidized layer 5 contains more oxygen than the surface layer 3, it suppresses oxygen from migrating (diffusing) from the glass material when the glass material is molded as described later. To function. Such a heating oxide layer 5 is formed on the outermost surface side of the surface layer 3 to have a thickness (depth) of, for example, about several nm to several tens of nm.

Next, based on the manufacturing method of the molding die of such a configuration, an embodiment of the manufacturing method of the optical element molding die of the present invention will be described.
First, a cemented carbide containing tungsten carbide as a main component is processed into a desired shape to form a mold base material 2, and the surface on the molding surface 3a side is formed into a concave surface as shown in FIG.
Next, chromium is deposited on the surface 2a of the mold base 2 by ion beam sputtering using chromium as a target to form a metal layer 6 made of a chromium film having a thickness of 200 nm (2000 mm).

Next, chromium nitride is deposited on the metal layer 6 by ion beam sputtering using chromium nitride as a target to form a nitride layer 7 made of a chromium nitride film having a thickness of 100 nm (1000 Å).
Subsequently, an alloy of platinum and iridium (Pt—Ir) is formed on the nitride layer 7 by ion beam sputtering using a platinum and iridium alloy as a target, and a surface layer having a thickness of 300 nm (3000 ３). 3 is formed.
Thereafter, the surface layer 3 is uniformly polished and finished to a surface roughness Ra (0.5 μm or less) desired for the optical element.
In addition to the ion beam sputtering method, the metal layer 6, the nitride layer 7, and the surface layer 3 are formed, for example, by a PVD (Physical Vapor Deposition) method such as RF sputtering or vapor deposition, CVD ( Chemical vapor deposition method) can also be used.

Thereafter, the surface layer 3 is heated with respect to the mold base material 2 formed up to the surface layer 3 to oxidize the surface portion to form the heated oxide layer 5. Thereby, the molding die 1 shown in FIGS. 1 and 2 is obtained.
In this heating step, the mold base material 2 is heated in an air atmosphere using an air heating furnace, and the surface portion (the molding surface 3a side of the surface layer 3) is heated and oxidized. The temperature is preferably set so that the mold base material 2 is not substantially oxidized. Here, “substantially does not oxidize” means that the oxidation of the mold base material 2 by this heat treatment proceeds only to the same extent as the oxidation when left in the atmosphere, as described above. ing.
In this way, since the mold base material 2 is not oxidized and deteriorated in this heating step, the resulting molding die 1 is particularly excellent in durability with respect to the mold base material 2. The deterioration of moldability due to oxidative degradation is suppressed, and the quality is improved.

  In this embodiment, heating was performed for 10 hours at 200 ° C., which is lower than the temperature at which tungsten carbide (WC) constituting the mold base material 2 is oxidized. Here, the most effective heating temperature is 150 ° C. or more and 300 ° C. or less, which is a temperature range in which tungsten carbide is not substantially oxidized. This is because, when the temperature is lower than 150 ° C., the surface layer 3 is not sufficiently oxidized, so that the glass material is easily welded during molding. Further, when the temperature exceeds 300 ° C., the oxidative deterioration of the mold base material 2 is promoted, the durability of the mold base material 2 is lowered, and the durability of the resulting molding die 1 is lowered. It is.

  The heating oxide layer 5 formed in such a heating process may be made of a metal oxide formed by chemically bonding a metal element constituting the surface layer 3 and oxygen as described above. In addition, a mixed layer in which a metal element and oxygen are mixed may be used, and further, a layer including both of the metal oxide and the mixed layer may be used.

Next, the manufacturing process of the optical element using such a molding die 1 will be described.
First, as shown in FIG. 1, a pair of molding dies 1 obtained by the above manufacturing method is prepared, and these molding surfaces 3a (heated oxide layers 5) are opposed to each other. An optical element (convex lens) is obtained by placing a glass material M between the molding surfaces 3a and 3a and press-molding the molding material 1 and 1 with a predetermined pressure. At this time, in order to soften the glass material M, the molding die 1 is heated by a heating means (not shown) such as a heater.

When the glass material is press-molded in this way to produce an optical element, the glass material M is not welded to the molding surface 3a (heated oxide layer 5), and therefore, the release property of the molded product after molding is deteriorated. Thus, it is not difficult to take out the molded product from the mold, and the molded product can be easily taken out from the molding die 1. That is, since the molding die 1 has the heating oxide layer 5 on the outermost surface, it is possible to prevent oxygen from migrating (diffusing) from the glass material M to the molding die 1. The oxidation reaction does not occur, the reaction is less likely to occur between the glass material M and the surface layer 3 during molding, and no welding occurs. Further, the occurrence of molding defects is eliminated, and the optical element can be manufactured satisfactorily.
Therefore, in the case of using a conventional molding die that does not form the heating oxide layer 5, a lot of welding of the glass material M to the molding surface 3a (surface layer 3) has been confirmed. In the case where the molding die 1 manufactured by the method is used, since the glass material M is not welded, the optical element can be molded efficiently and stably, thereby improving the productivity. .

  However, if the molding is repeated many times in this way, the surface layer 3 on which the heated oxide layer 5 is formed is subject to oxidation deterioration and molding wear, and the mold releasability of the molded product is lowered and glass welding is likely to occur. Become. Therefore, in the method for processing an optical element molding die according to the present invention, after the molding is performed a predetermined number of times, the surface side of the surface portion (heated oxide layer 5) of the molding die 1 is removed. For example, the surface side of the oxidized surface portion (heated oxide layer 5) is polished and the surface portion is removed by 10 nm or more. And the surface layer 3 which removed the surface side of the surface part in this way is heat-processed again, the surface part is oxidized, and the heating oxide layer 5 is newly formed.

When the optical element was manufactured again using the molding die 1 in which the heat treatment was again performed in this manner and the heating oxide layer 5 was newly formed, molding was performed using the molding die 1 immediately after the production. As in the case of the above, the glass element was not welded, and the optical element could be molded efficiently and stably.
Therefore, according to this optical element molding die processing method, after the molding is performed a predetermined number of times, the surface side of the surface portion of the molding die 1 is removed, and the surface layer 3 is heated again. A new heat-oxidized layer 5 can be formed on the surface layer 3 every time a predetermined number of times of molding is performed, so that the releasability of the molded product is always good and the occurrence of molding defects is prevented. Molding can be performed.

For the surface portion (molding surface 3a) of the surface layer 3 of the molding die 1 according to the present invention, the oxygen concentration of the surface was examined using X-ray photoelectron spectroscopy (XPS). The obtained results are shown in FIG.
As shown in the graph of FIG. 3, after the surface layer 3 was formed (immediately after the film formation), the oxygen concentration was 30%, whereas after the heating, the heated oxide layer 5 was formed (after the heating). Then, it increased by about 20% by 50%.
Thereafter, after the molding is repeated (after molding), it becomes close to 60%, and oxidative deterioration is likely to occur. Therefore, by performing surface polishing, the oxygen concentration can be increased to nearly 50% by once decreasing the oxygen concentration to about 20% and then heating again (reheating).
Further, it can be seen that if the molding is repeated, the oxygen concentration exceeds 70%, and the glass is likely to be welded due to oxidative degradation.

The present invention is not limited to the above-described embodiment, and various modifications can be made without departing from the gist of the present invention. For example, in the above embodiment, the present invention is applied to a molding die for molding a convex lens, but the present invention can be applied to other optical elements such as other lenses and prisms. is there.
In addition to the above materials, various materials can be used as the material constituting the mold base material 2 and the surface layer 3.

It is a sectional side view which shows one Embodiment of the optical element shaping die concerning this invention. It is a principal part expanded sectional view of the optical element shaping die shown in FIG. It is a graph which shows the relationship between the state of the optical element shaping | molding die concerning this invention, and the oxygen concentration of the surface of the surface layer.

Explanation of symbols

  DESCRIPTION OF SYMBOLS 1 ... Optical element shaping | molding die, 2 ... Mold base material, 3 ... Surface layer, 3a ... Molding surface, 4 ... Intermediate | middle layer, 5 ... Heating oxidation layer, 6 ... Metal layer, 7 ... Nitride layer, M ... Glass Material

Claims (4)

A method of manufacturing an optical element molding die for press molding a glass material to mold an optical element,
Forming a surface layer in contact with the glass material at the time of press molding on a mold base material made of cemented carbide or silicon carbide;
A heating step of forming a thermal oxidation layer on the surface portion by heating the surface layer, was closed,
The surface layer is formed of an alloy containing at least one element selected from platinum, palladium, iridium, osmium, ruthenium, rhenium, hafnium, and tantalum,
In the heating step, a heating oxide layer is formed on the surface portion by performing a heat treatment at a temperature at which the mold base material does not substantially oxidize . The surface layer, platinum, palladium, iridium, osmium, ruthenium, rhenium, hafnium, optical element according to claim 1, characterized in that an alloy containing at least two types of elemental selected from tantalum molding Mold manufacturing method. 3. The method for manufacturing an optical element molding die according to claim 2, wherein the surface layer is formed of an alloy of platinum and iridium.   An optical element molding die manufactured by the method for manufacturing an optical element molding die according to any one of claims 1 to 3.

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