JP5117052B2 - Exposure apparatus and exposure method - Google Patents

Description

  The present invention relates to an exposure apparatus and an exposure method for performing exposure for each block on an exposure stage while feeding a film-like tape to the exposure stage block by block.

  In general, a film-like tape is used as a base material of an electronic circuit board used in small devices such as mobile phones and mobile devices. The film-like tape is handled by a reel that can be wound.

  In order to enable stable feeding, the tape has perforation holes of equal size in the vicinity of 1 mm to 2 mm inside from the left and right sides so that the tape can be fed via a sprocket. It is configured.

In the manufacturing process of the electronic circuit board, an exposure process is performed to form a circuit pattern on the tape. In this exposure process, the tape is sent from the reel to the exposure stage and fixed on the exposure stage. In order to fix the tape to the exposure stage, a method of sandwiching the tape between the plate and the exposure stage has been proposed (for example, see Patent Document 1). In addition, a method for fixing a tape to a curved exposure stage using a plurality of electromagnetic valves has been proposed (see, for example, Patent Document 2).
Japanese Patent No. 2892079 (column 7, lines 40 to 47 and FIG. 2) Japanese Patent No. 2793000 (Claims 1, 2 and 1)

  The thickness of the tape tends to be thin in order to improve the performance of the electronic circuit board, but there is a problem that the tape warps due to changes in stress, temperature, and humidity caused by the manufacturing process. In the exposure process, resist is applied to the surface of the tape and baked, so stress remains due to thermal expansion and contraction.When the tape is fed from the reel, the temperature and humidity of the tape change due to changes in the surrounding environment. Warpage occurred between the central region and the side regions on both sides, particularly outside the perforation hole.

  If the tape is warped, even if you try to fix the tape to the exposure stage, even if the center area of the tape hits the exposure stage, the side area of the tape will rise from the exposure stage, and the tape cannot be fixed to a flat surface on the exposure stage. In some cases, the transfer of the circuit pattern is affected.

Therefore, for example, as disclosed in Patent Document 1, a method of fixing the tape to the exposure stage with a plate has been proposed. However, this method has a problem that the tape is scratched because the tape is pressed by the plate. Further, even if pressed by a plate, the tape and the exposure stage cannot be adhered over the entire surface, and there is a problem that a part of the side area of the tape is lifted from the exposure stage.
In addition to tapes, there are tapes that differ in the presence and location of perforation and placement, so the effects that can be obtained when pressing are not constant. There was no versatility.

  An object of the present invention is to provide an exposure apparatus and an exposure method that can fix a central area and a side area of a tape to an exposure stage.

  The present invention provides an exposure apparatus that exposes a tape for each block on an exposure stage while feeding a film-like tape in a feed direction one block at a time. The exposure stage applies a first suction force that attracts the central area of the tape, A central suction port for sucking and sucking the central region and a side suction port for sucking and sucking the side region by applying a second suction force stronger than the first suction force for attracting the side region of the tape. And

  According to the present invention, the central region of the tape can be fixed to the exposure stage by the first suction force. At this time, the side region of the tape that has been lifted from the exposure stage due to the warp of the tape is the second stronger than the first suction force. It can be fixed to the exposure stage by suction force. Therefore, the exposure apparatus can accurately transfer the circuit pattern onto the tape.

  The exposure apparatus preferably includes a first decompression device connected to the central suction port and a second decompression device connected to the side suction port and having a suction force stronger than that of the first decompression device. The first decompression device depressurizes the inside of the central suction port. The central suction port sucks the central region of the tape including the air near the central suction port due to the pressure difference between the inside and the atmosphere. Then, the central region of the tape is adsorbed to the central suction port. The second decompression device depressurizes the inside of the side suction port. The side suction port sucks the side region of the tape including the air near the side suction port due to the pressure difference between the inside and the atmosphere. In this suction, since the second decompression device has a stronger suction force than the first decompression device, the side suction port can suck more air per hour than the central suction port. Although the region is farther from the exposure stage than the central region, air in the vicinity of the separated side region can also be sucked. By this suction, the side region of the tape is also attracted to the side suction port.

  The second decompression device preferably includes a decompression pump connected to the side suction port, and a decompression tank connected to the side suction port and the decompression pump and whose internal pressure is decompressed by the decompression pump. A decompression tank whose internal pressure is reduced by a decompression pump has a suction force for sucking air until the internal pressure reaches atmospheric pressure. The decompression pump also has a suction force of sucking air as an original function. By connecting a decompression pump and a decompression tank to the side suction port, a large suction force is obtained by combining the suction force of the decompression pump and the suction force of the decompression tank, and the side suction port sucks a large amount of air. With this suction, the side region of the tape separated by the warp of the tape can be attracted and adsorbed.

  The exposure apparatus preferably has a blower unit that blows gas toward the tape from the side opposite to the central suction port or the side suction port of the tape after the suction of the central region and the side region is started. As the gas, air or nitrogen gas inert to the tape can be used. The tape is blown toward the exposure stage by the gas blown from the blower section. Since the distance between the tape and the exposure stage is reduced, the volume of air between the tape and the exposure stage is also reduced, and the volume of air sucked by the first pressure reducing device and the second pressure reducing device to draw the tape to the exposure stage. Can be reduced. Then, the tape can be adsorbed quickly, while the suction force of the first decompression device and the second decompression device can be reduced.

  For example, some tapes have at least a pair of perforations extending in the feed direction, the central region is the region between the pair of perforations, and the side region is from the perforations to the end of the tape. It is characterized by being. Another type of exposed film-like tape is a tape without perforation. In the case of this type of tape, the center of the tape is the central region, and the side region is from the end of the tape to the region that is about 10% inward. Yet another type of tape is a tape with two or more pairs of perforations. If the tape has two or more pairs of perforations, the central region is between the paired perforations.

  Further, the present invention provides an exposure method in which a film-like tape is fed one block at a time while the tape is adsorbed and exposed for each block at an exposure stage, and the internal pressure of the vacuum tank is reduced by a first vacuum pump, A first suction force that attracts the central region of the first surface of the tape is exerted by the second decompression pump, and then the side region of the first surface of the tape is attracted by the first pump and the decompression tank that has been decompressed. A second suction force stronger than the first suction force is applied.

  According to the present invention, the central region of the tape can be fixed to the exposure stage by the first suction force. At this time, the side region of the tape that has been lifted from the exposure stage due to the warp of the tape reduces the internal pressure to the decompression tank. The exposure stage with the second suction force of the side portion stronger than the first suction force at the center, by sucking with the side suction port that sucks in the state of suction and the central suction port larger than the suction area of the side suction port. Can be fixed. According to this exposure method, the circuit pattern can be accurately transferred to the tape.

  In this exposure method, after the second suction force is applied and before the exposure, gas is blown out toward a second surface different from the first surface. By blowing out the gas from the opposite side while the second suction force is applied, the side area tape of the tape floating from the exposure stage can be adsorbed to the exposure stage. Further, it is preferable to stop the gas before the start of exposure so as not to affect the exposure.

  As described above, according to the present invention, it is possible to provide an exposure apparatus and an exposure method capable of accurately transferring a pattern by fixing the central region and the side region of the tape to the exposure stage.

<Overall configuration of exposure apparatus>
FIG. 1 shows an exposure apparatus 1 according to an embodiment of the present invention. The exposure apparatus 1 includes an exposure stage 2 that sucks the tape 6, a decompression device that is connected to the exposure stage 2 and sucks the tape 6 to the exposure stage 2, and air 4 toward the exposure stage 2 toward the tape 6. The blower 5 that blows out, a transport unit that sends the tape 6 to the exposure stage 2, an optical unit that emits light so that a circuit pattern of an electronic circuit is imaged on the tape 6 on the exposure stage 2, and the exposure apparatus 1 are controlled. It has a control part.

  The exposure stage 2 is provided with a plurality of side suction ports 3. The side suction ports 3 are respectively connected to the side ports 11 through the connection holes 12. The decompression device includes a joint 7 connected to the side port 11, a three-way valve 8 connected to the joint 7, a decompression pump 10 and a decompression tank 9 connected to the three-way valve 8. The three-way valve 8 can be switched so that the connection from the joint 7 is connected to the atmosphere or to be connected to the decompression tank 9 and the decompression pump 10.

  The transport unit guides a supply reel 41 around which the tape 6 is wound, a take-up reel 51 that winds the tape 6, air dancers 43 and 49 that adjust the tension of the tape 6 being transported, and a route along which the tape 6 travels. Guide rollers 42, 44, 48, 50 and conveying rollers 45, 47. The supply reel 41 is provided at a position higher than the guide roller 42, and the guide rollers 42 and 44 are provided immediately above the air dancer 43. As a result, the tape 6 can be smoothly fed from the supply reel 41 to the air dancer 43, and the tape 6 can be smoothly taken out from the air dancer 43. The conveyance roller 45 is provided directly above the exposure stage 2 and at a position lower than the guide roller 44, and the conveyance roller 47 is provided immediately below the exposure stage 2. As a result, the tape 6 can be smoothly fed in the vicinity of the exposure stage 2 from above to below in the vertical direction 46. The tape 6 is disposed so as to face the side suction port 3. The guide rollers 48 and 50 are provided immediately above the air dancer 49, and the take-up reel 51 is provided at a position higher than the guide roller 50. By these things, the tape 6 can be smoothly fed into the air dancer 49, and the tape 6 can be smoothly pulled up from the air dancer 49 to the take-up reel 51 and taken up. The air dancers 43 and 49 apply tension to the tape 6 between the guide rollers 42 and 44 and between the guide rollers 48 and 50 to constantly adjust the tension of the tape 6.

  The optical unit is arranged on the optical axis with a lamp 34 that irradiates ultraviolet rays of a predetermined wavelength, an elliptical mirror 35 that reflects the light emitted by the lamp 34, a reflective mirror 33 that changes the direction of light rays from the elliptical mirror 35, and an optical axis. The fly-eye lens 32 for adjusting the light intensity distribution, the mask M on which the circuit pattern drawn on the optical axis and supported by the mask holding frame is drawn, and the circuit pattern arranged on the optical axis is projected onto the tape 6. Exposure optical system (for example, Dyson optical system) 31.

  The control unit includes an imaging device 36, an image processing device 37, and a device control device 38. The imaging device 36 is arranged in the vicinity of the exposure stage 2 and the tape 6, and photographs the alignment mark already formed on the tape 6 and the alignment mark projected onto the tape 6 by the mask M. To do. The image processing device 37 converts the image data of the photographed mark into data that can be processed by the device control device 38. The apparatus control device 38 performs exposure such as control for aligning the tape 6 on the exposure stage 2 from data received from the image processing device 37, and control for stopping the exposure when the number of exposures reaches a predetermined number. General control relating to the exposure method in the apparatus 1 is performed.

<Suction by exposure stage>
As shown in FIG. 2A, the tape 6 used here is, for example, a so-called work having a width of about 100 mm and having perforation holes 20 formed on both sides. The perforation hole 20 is formed in a size equal to an equal interval in the vicinity of 1 mm to 2 mm inside from the left and right sides. In the exposure stage 2, the tape 6 is fed from the top to the bottom in the vertical direction 46 by the transport rollers 45 and 47. In the center of the tape 6, a central region 17 is provided in which the circuit pattern is transferred for each block 21. On both sides of the central region 17, there are provided hole regions 18 in which perforation holes 20 for feeding the tape 6 are formed. Outside the hole area 18, a side area 19 having a width of 1 mm or more and 2 mm or less is provided up to the side of the tape 6.

  As shown in FIGS. 2A and 2B, the central region 17 and the side region 19 of the tape 6 are adsorbed to the exposure stage 2. The side region 19 is attracted to the central portion 22 and the side region 19 is attracted to the side portion 23 of the exposure stage 2. A plurality of central suction ports 13 are provided on the entire surface of the central portion 22, and the central suction ports 13 are connected to the central port 24 through the connection holes 14. A plurality of side suction ports 3 are provided on the entire surface of the side portion 23 on both sides of the tape 6, and each side suction port 3 is connected to the side port 11 via the connection hole 12. .

  A decompression device is connected to each of the three ports of the central port 24 and the side ports 11 on both sides. Connected to the central port 24 is a first pressure reducing device including a joint 25 connected to the central port 24, a three-way valve 15 connected to the joint 25, and a pressure reducing pump 16 connected to the three-way valve 15. The three-way valve 15 can be switched so that the connection from the joint 25 is connected to the atmosphere or to be connected to the decompression pump 16. Connected to the side port 11 is a joint 7 connected to the side port 11, a three-way valve 8 connected to the joint 7, a decompression pump 10 connected to the three-way valve 8, and a decompression tank 9. Has been. Since neither the central suction port 13 nor the side suction port 3 is provided on the exposure stage 2 with which the perforation hole 20 is in contact, the atmosphere from the perforation hole 20 receives the central suction port 13 and the side suction port 3. The tape 6 can be firmly adsorbed to the exposure stage 2 without being inhaled.

  Next, the function of the decompression tank 9 will be described. The decompression tank 9 can be pulled by the decompression pump 10 to reduce the internal pressure. When the three-way valve 8 is opened in this depressurized state and the side suction port 3 and the depressurization tank 9 are connected, the depressurization tank 9 has a suction action of sucking atmospheric air near the exposure stage 2. In parallel, the decompression pump 10 is also connected to the side suction port 3 and performs the same suction action. By these suction actions, the suction capacity is increased as compared with the case of only the ordinary pressure reducing pump 10, and the volume of air in terms of atmospheric pressure that can be sucked per hour can be increased. The volume of air in terms of atmospheric pressure that can be sucked per time becomes an index of the suction force, and the suction force can be increased by employing the decompression tank 9.

  Next, considering the case where the tape 6 is warped, the side region 19 of the tape 6 is farther from the exposure stage 2 than the central region 17 due to this warp. Therefore, the volume of air existing between the side region 19 and the side portion 23 of the exposure stage 2 is larger than the volume of air existing between the central region 17 and the center portion 22 of the exposure stage 2. If these volumes of air are sucked by the decompression pumps 10 and 16, respectively, the pressure on the exposure stage 2 side of the tape 6 is lowered and pushed to the atmospheric pressure from the optical part side of the tape 6, and the tape 6 is exposed. It moves in the direction of the stage 2 and is finally pressed against the exposure stage 2. However, since the air existing between the side region 19 and the side portion 23 and the air existing between the central region 17 and the central portion 22 are open to the atmosphere, they were sucked slowly. Then, air flows in from the atmosphere, and no pressure difference is created before and after the tape 6. Therefore, in such open air, it is necessary to suck air faster than other air flows.

  That is, a decompression device having a suction force for sucking air having a volume larger than the volume into which other air flows is required. Here, since the volume of air existing between the side region 19 and the side portion 23 is larger than the volume of air existing between the central region 17 and the central portion 22, the side region 19 and the side portion The suction force for sucking air existing between the portions 23 needs to be larger than the suction force for sucking air existing between the central region 17 and the central portion 22. Therefore, a decompression tank 9 is connected to the decompression pump 10 in order to increase the suction force. That is, by providing the decompression tank 9, the suction capacity for sucking the air existing between the side region 19 and the side portion 23 faster than the air existing between the central region 17 and the central portion 22 is increased. Secured. This suction capacity can be secured using the decompression pump 10 prior to the suction of the tape 6 on the exposure stage 2, so that the decompression pump 10 is not overloaded.

  In this manner, the second decompression device connected to the side suction port 3 has a greater suction force than the first decompression device connected to the central suction port 13. Accordingly, the second force that the side portion 23 with the side suction port 3 attracts the side region 19 of the tape 6 is greater than the first force at which the center portion 22 with the central suction port 13 attracts the central region 17 of the tape 6. growing. According to such a configuration, the central region 17 of the tape 6 can be fixed to the exposure stage 2 by the first force, and at this time, the side region 19 of the tape 6 lifted from the exposure stage 2 due to the warp of the tape 6 is The exposure stage 2 can be fixed by a second force stronger than the first force.

  As shown in FIG. 1, when the tape 6 is attracted to the exposure stage 2, when the air 4 is blown out toward the tape 6 in the direction of the exposure stage 2 by the blower 5, the air 4 blown out by the blower 5 The tape 6 is blown toward the exposure stage 2. Since the distance between the tape 6 and the exposure stage 2 is reduced, the volume of air between the tape 6 and the exposure stage 2 is also reduced, and the volume of air sucked in order to attract the tape 6 to the exposure stage 2 can be reduced. it can. And quick suction and adsorption become possible. Further, the warped tape 6 may be copied along the surface of the exposure stage 2 by increasing the pressure to be sprayed. The pressure to be sprayed can be integrated with the suction force to increase the force for fixing the tape 6 and fix the tape 6 to the exposure stage 2 in a planar shape. On the contrary, since the suction force of the first decompression device and the second decompression device can be reduced by the amount of pressure blown by the blower 5, the capacity of the decompression pumps 10, 16 can be reduced.

<An example of another tape>
In the above embodiment, the tape 6 in which the perforation holes 20 are formed on both sides has been described. However, there are various types of tape 6.
FIG. 3A shows a state in which the tape 6-1 that does not have the perforation hole 20 is adsorbed by the exposure stage 2. Thus, even the tape 6-1 that does not have the perforation hole 20 can sufficiently adsorb the warpage on the outer side (end portion) of the tape 6-1. In the case of this tape 6-1, the side area 19 is an area of 10% or less of each of the left and right of the entire width of the tape 6.

FIG. 3B shows a state in which the tape 6-2 having two pairs of perforation holes 20 is adsorbed by the exposure stage 2. In the tape 6-2 having such two pairs of perforation holes 20, the perforation hole 20 is formed at the center of the entire width of the tape 6-2. For this reason, the warp on the outer side (end portion) of the tape 6-1 can be sufficiently adsorbed to the tape 6-1 that does not have the perforation hole 20 as described above.
In this case, since the two pairs of perforation holes 20 are in the center of the tape, the central suction port 13 cannot be provided at a location corresponding to the perforation holes 20. For this reason, a central suction port 13 is formed in the central region 17 between the pair of perforation holes 20. Since a different tape 6 is used depending on the application, the exposure stage 2 is formed by forming the central suction port 13 and the side suction port 3 suitable for the tape 6 according to the arrangement of the perforation holes 20 of the tape 6. It can be replaced as appropriate.

<Operation of exposure apparatus>
Next, an exposure method using the exposure apparatus 1 will be described. It is assumed that the tape 6 is already stretched from the supply reel 41 to the take-up reel 51 via the guide rollers 42, 44, 48, 50 and the transport rollers 45, 47 so that the tape 6 can be fed. . Further, this exposure method can be applied to any of the tape 6, the tape 6-1, and the tape 6-2.
First, as shown in FIG. 4, in step S <b> 1, the internal pressure of the vacuum tank 9 is reduced by the vacuum pump 10.
In step S2, the three-way valve 8 between the side suction port 3 provided in the exposure stage 2 and the decompressed tank 9 is opened. Further, the three-way valve 15 between the central suction port 13 and the decompression pump 16 is opened.
In step S3, first, even if the tape 6 is warped, the central suction port 13 having a narrow gap between the exposure stage 2 and the tape 6 starts suction. Immediately after that, the side suction port 3 sucks the tape 6 together with the surrounding air. Furthermore, since the suction of the central suction port 13 and the side suction port 3 has started, the air 4 is blown out to a surface different from the suction surface of the tape 6 so that the tape 6 is in close contact with the exposure stage 2 by the blower 5. That is, the air 4 blown out from the blower 5 pushes the tape 6 toward the exposure stage 2.
In step S4, at the same time as step S3, the internal pressure of the decompression tank 9 is increased while reducing the pressure. If the decompression tank 9 is in a decompressed state, the suction can be continued.

In step S <b> 5, the side suction port 3 and the central suction port 13 keep the side region 19 and the central region 17 of the tape 6 being sucked. On the other hand, the blower 5 stops the blowout of the air 4 so that the air 4 from the blower 5 does not affect before the alignment. That is, the blower 5 stops the blowing of the air 4 before the start of exposure. During this time, the side suction port 3 and the central suction port 13 are in a sucked state.
In step S6, after aligning using the control unit, the optical unit is used to irradiate the adsorbed tape 6 with light that forms an image of the circuit pattern of the mask M, thereby exposing the block 21 of the tape 6.
In step S7, the three-way valves 8 and 15 are closed, the side suction port 3 and the central suction port 13 are connected to the atmosphere via the three-way valves 8 and 15, and the side suction port 3 and the center suction port 13 are connected. Set the pressure to atmospheric pressure.
In step S <b> 8, the internal pressure of the decompression tank 9 is lowered with the decompression pump 10 while the decompression tank 9 is decompressed, and the capacity that the decompression tank 9 can suck is recovered.
In step S9, the tape 6 is fed by one block 21 using the transport unit.

  In step S10, the apparatus controller 38 determines whether the number of exposures has reached a predetermined number. If the number of exposures has not reached the predetermined number, the process returns to step S2, and the loop consisting of steps S2 to S10 is repeated until the predetermined number of times is reached. When the number of exposures reaches a predetermined number, the exposure method using the exposure apparatus 1 is terminated. The decompression tank 9 reinforces the suction force of the decompression pump 10, but if the suction tank 9 continues to suck air, the internal pressure increases and the suction force of the decompression tank 9 decreases. Therefore, each time one block 21 is exposed, the internal pressure of the decompression tank 9 is lowered using the decompression pump 10 to recover the suction force of the decompression tank 9. The tape 6 can be attracted to the exposure stage 2 with a large suction force every time for each block 21.

  As described above, according to the exposure apparatus 1, even a thin and warped tape 6 can be stably transported and fixed to the exposure stage 2, and can be reliably wound and recovered after exposure. Therefore, a fine pattern can be stably transferred to the tape 6.

It is a side view of the exposure apparatus which concerns on one Embodiment of this invention. (A) is a perspective view from the back direction in the state in which the tape was adsorbed to the exposure stage of the exposure apparatus of the present invention, and (b) is an AA of (a) in the state in which the tape was adsorbed on the stage. It is sectional drawing of a direction. In an embodiment relating to another tape, another tape is in a state of being adsorbed on the stage. It is a flowchart of the exposure method which concerns on one Embodiment of this invention.

Explanation of symbols

DESCRIPTION OF SYMBOLS 1 Exposure apparatus 2 Exposure stage 3 Side suction port 5 Blower 6 Tape 8 Three-way valve 9 Pressure-reducing tank 10 Pressure-reducing pump 13 Center suction port 15 Three-way valve 16 Pressure-reducing pump 17 Central region 18 Hole region 19 Side region 20 Perforation hole 21 Block 22 Central part 23 Side part

Claims (8)

In an exposure apparatus that exposes the tape for each block on an exposure stage while feeding a film-shaped tape one block at a time,
The exposure apparatus includes:
A first pressure reducing device connected to the central suction port;
Connected to the side suction port, having a second decompression device having a stronger suction than the first decompression device,
The exposure stage is
The central suction port for sucking and sucking the central region of the tape by a first suction force by which the first pressure reducing device attracts the tape;
A side suction port that sucks and sucks the side region with a second suction force stronger than the first suction force with which the second decompression device attracts the side region of the tape;
Have
An exposure apparatus characterized in that the exposure stage is replaceable. In an exposure apparatus that exposes the tape for each block on an exposure stage while feeding a film-shaped tape one block at a time,
The exposure apparatus includes:
The first decompressor connected to the central suction port;
Connected to the side suction port, having a second decompression device having a stronger suction than the first decompression device,
The second decompression device includes:
A decompression pump connected to the side suction port;
A decompression tank connected to the side suction port and the decompression pump, and an internal pressure is decompressed by the decompression pump;
Have
The exposure stage is
The central suction port for sucking and sucking the central region of the tape by the first suction force with which the first pressure reducing device attracts the tape;
A side suction port that sucks and sucks the side region with a second suction force stronger than the first suction force with which the second decompression device attracts the side region of the tape;
Have
An exposure apparatus characterized in that the exposure stage is replaceable. The tape has at least a pair of perforations extending in the feed direction;
  The exposure apparatus according to claim 1, wherein the exposure apparatus includes the central region between a pair of perforations and the side region from the perforation to an end portion of the tape. 3. The exposure apparatus according to claim 1, wherein the side region is a region of 10% or less with respect to the width of the tape not having perforation. Claims wherein after starting the suction of the central region and the side edge region, and the central suction opening or the side suction port of the tape and having a blower unit for blowing air toward the tape from the opposite side The exposure apparatus according to any one of claims 1 to 4. In the exposure method in which the tape is sucked and exposed for each block on the exposure stage while feeding the film-like tape one block at a time,
Reducing the internal pressure of the vacuum tank with the first vacuum pump ;
Applying a first suction force that attracts a central region of the first surface of the tape by a second vacuum pump ;
Next, a step of exerting a second suction force stronger than the first suction force for attracting a side region of the first surface of the tape by the first pump and the decompressed tank .
An exposure method characterized by the above.   The exposure method according to claim 6, wherein gas is blown out toward a second surface different from the first surface after the second suction force is applied and before the exposure. The tape has at least a pair of perforations extending in the feeding direction, the central region is a region between a pair of perforations, and the side region is an end portion of the tape from the perforations. The exposure method according to claim 6, wherein the exposure method is any one of the following.