JP5123482B2 - Cylindrical inspection device and equipment state evaluation method for the same - Google Patents

Description

  The present invention relates to a cylindrical body inspection apparatus that performs surface inspection of a cylindrical body such as a photosensitive drum base, a facility state evaluation method thereof, and the like.

  Surface inspection and the like for detecting surface defects such as scratches, irregularities, adhesion of foreign matter, and dirt are performed on cylindrical bodies such as a photosensitive drum substrate (see Patent Documents 1 and 2 below).

In such surface inspection, the position of the optical system such as the illumination and camera is set by illuminating the cylindrical body set at the inspection position and visually checking the intensity level and waveform of the reflected light with an oscilloscope or the like. .
JP-A-11-185040 JP2003-121129A

  By the way, since surface inspection of a photosensitive drum substrate or the like requires high inspection accuracy capable of detecting minute defects, high accuracy is required for equipment conditions such as optical system position setting.

  However, in the above-described visual confirmation method using an oscilloscope or the like, it is difficult to evaluate the quality of the delicate equipment state because sufficient detection sensitivity cannot be ensured even if positional deviation occurs in each part.

  It is also conceivable to measure the position of the illumination, camera, etc. with a three-dimensional measuring device or a separate displacement sensor, but according to the equipment that evaluates such an inspection device from the outside, the mounting position of the light source with respect to the external shape of the illumination It is not possible to cope with errors, mounting position errors of the lens and image sensor with respect to the outer shape of the camera, and the final equipment state cannot be guaranteed.

  The present invention has been made in view of the above problems, and a cylindrical body inspection apparatus capable of evaluating a facility state with high accuracy, and thus producing a highly accurate cylindrical body by performing accurate inspection. The purpose is to provide the evaluation method.

  The present invention provides the following means. That is,

[1] A support portion that rotatably supports a cylindrical body that is an inspection object in a circumferential direction at a predetermined inspection position, illumination that illuminates the outer surface of the cylindrical body, and a detection region that extends in the axial direction of the cylindrical body. A cylindrical body inspection apparatus equipment state evaluation method having a camera for photographing,
The cylindrical body is supported at the inspection position by the support part,
Illuminating the surface of the cylindrical body so that light and dark stripes are formed in the axial direction of the cylindrical body by the illumination,
Photographing the cylindrical body with the camera to detect the light and dark gradation of each part of the light and dark stripes,
A facility state evaluation method for a cylindrical body inspection apparatus, wherein the state of the facility state is evaluated based on the detected light and dark gradation of the light and dark stripes.

  [2] A slit body in which a plurality of light-shielding portions and light-transmitting portions are alternately and repeatedly formed in the axial direction of the cylindrical body is disposed at a predetermined position between the illumination and the cylindrical body, and the slit body is interposed therebetween. 2. The equipment state evaluation method for a cylindrical body inspection apparatus according to item 1, wherein the bright and dark stripes are formed by illuminating the surface of the cylindrical body with the illumination.

  [3] The equipment state evaluation method for a cylindrical body inspection device according to item 2 above, wherein the slit body is permanently installed in the inspection device.

  [4] The equipment state evaluation method for a cylindrical body inspection apparatus according to any one of claims 1 to 3, wherein the evaluation is performed based on a light and dark gradation of a dark part of the light and dark stripes.

  [5] The equipment state evaluation method for a cylindrical body inspection apparatus according to item 4 above, wherein a minimum gradation of a dark part of the light and dark stripes is included in a sensitivity range of the camera.

  [6] The equipment state evaluation method for a cylindrical body inspection apparatus according to [5], wherein the evaluation is performed based on a gradation value of a minimum gradation of a dark part of the light and dark stripes.

  [7] The equipment state evaluation method for a cylindrical body inspection apparatus according to [6], wherein the evaluation is performed based on whether or not a gradation value of a minimum gradation of a dark part of the light and dark stripes is within a predetermined allowable range. .

  [8] The equipment state evaluation method for a cylindrical body inspection apparatus according to [6], wherein the evaluation is performed based on a tendency of change in the axial direction of the cylindrical body of the lowest gradation of a plurality of dark portions.

  [9] The equipment state evaluation method for a cylindrical body inspection apparatus according to any one of [1] to [3], wherein the evaluation is performed based on a width of a dark part of the light and dark stripes in an axial direction of the cylindrical body.

  [10] The evaluation is performed by comparing the light and dark gradation of the light and dark stripes detected at the time of the equipment state evaluation with the light and dark gradation data of the light and dark stripes detected and stored in advance for the specific master work in the inspection apparatus. The equipment state evaluation method of the cylindrical body inspection apparatus according to any one of claims 1 to 9.

  [11] The equipment state evaluation method for a cylindrical body inspection apparatus according to [10], wherein the master work is used as a subject to be photographed at the time of equipment state evaluation.

  [12] The equipment state evaluation method for a cylindrical body inspection apparatus according to any one of the preceding items 1 to 11, wherein the equipment state is evaluated as to whether the lighting, the camera, and the cylindrical body are in a positional relationship.

  [13] The facility state evaluation method for a cylindrical body inspection apparatus according to any one of the preceding items 1 to 12, wherein illumination unevenness of the illumination is detected as the facility state.

  [14] The method according to any one of the above items 1 to 13, wherein a light and dark stripe is formed on the surface of the cylindrical body, and a change in the circumferential direction of the cylindrical body of the light and dark gradation of the light and dark stripe is detected while rotating the cylindrical body. Equipment state evaluation method of cylindrical body inspection apparatus of description.

  [15] The equipment state evaluation method for a cylindrical body inspection apparatus according to any one of [1] to [14], wherein the camera is a line sensor camera.

  [16] The equipment state evaluation method for a cylindrical body inspection apparatus according to any one of [1] to [15], wherein the cylindrical body has a mirror surface.

  [17] The equipment state evaluation method for a cylindrical body inspection apparatus according to any one of [1] to [16], wherein the cylindrical body as the inspection object is a photosensitive drum substrate.

[18] A step of evaluating the equipment state by the equipment state evaluation method according to any one of 1 to 17 above with respect to the cylindrical body inspection device;
Based on the evaluation result, adjusting the equipment state of the cylindrical body inspection device,
A method for adjusting a cylindrical body inspection apparatus, comprising:

[19] A step of evaluating the equipment state by the equipment state evaluation method according to any one of the preceding items 1 to 17 with respect to the cylindrical body inspection device;
Based on the evaluation result, adjusting the equipment state of the cylindrical body inspection device,
A step of inspecting the surface state of the cylindrical body as the inspection object by the cylindrical body inspection apparatus in which the equipment state is adjusted; and
A cylindrical body inspection method comprising:

[20] forming a cylindrical body;
A step of evaluating the equipment state by the equipment state evaluation method according to any one of claims 1 to 17 with respect to the cylindrical body inspection device;
Based on the evaluation result, adjusting the equipment state of the cylindrical body inspection device,
A step of inspecting the surface state of the cylindrical body as the inspection object by the cylindrical body inspection apparatus in which the equipment state is adjusted; and
The manufacturing method of the cylindrical body characterized by including.

[21] A support portion that supports a cylindrical body that is an inspection object so as to be rotatable in a circumferential direction at a predetermined inspection position;
Illumination for illuminating the outer surface of the cylindrical body;
A camera for photographing a detection region extending in the axial direction of the cylindrical body;
A plurality of light shielding portions and light transmitting portions are alternately and repeatedly formed in the axial direction of the cylindrical body, and a slit body permanently installed at a predetermined position between the illumination and the cylindrical body,
When the cylindrical body is supported at the inspection position by the support portion and the surface of the cylindrical body is illuminated by the illumination through the slit body to form light and dark stripes on the surface of the cylindrical body, the camera Evaluation means for evaluating the quality of the equipment state, based on the light / dark gradation of each part of the light / dark stripes detected by photographing the cylindrical body,
A cylindrical body inspection apparatus comprising:

[22] Molding means for molding the cylindrical body;
The cylindrical body inspection apparatus according to the preceding item 21 in which surface inspection is performed using the cylindrical body as an inspection object, and the cylindrical body is classified according to whether an inspection result in the cylindrical body inspection apparatus satisfies a predetermined criterion, and the predetermined body A discriminating means for making the cylindrical body a finished product when the criteria of
A cylindrical body manufacturing system comprising:

  [23] A cylindrical body manufactured by the method for manufacturing a cylindrical body as described in 20 above.

  [24] A photosensitive drum substrate produced by the method for producing a cylindrical body as described in 20 above.

  According to the above invention [1], bright and dark stripes are formed on the surface of the cylindrical body, and the light and dark gradations of the bright and dark stripes are detected by the camera. Therefore, the equipment state can be evaluated with high accuracy, and thus an accurate inspection can be performed. This can contribute to the production of a highly accurate cylindrical body.

  Also, in order to evaluate the equipment state based on the detection results of the support unit, the illumination, and the camera itself used at the time of the actual inspection, the outer shape of the illumination as in the case where the displacement of the illumination or the camera is detected by a displacement sensor, etc. The equipment state can be evaluated under conditions approximate to those at the time of actual inspection without being affected by the mounting position error of the light source or the mounting position error of the lens or image sensor on the outer shape of the camera.

  According to the above invention [2], bright and dark stripes are formed on the surface of the cylindrical body by the illumination through the slit body, and the bright and dark stripes thus formed change sensitively with respect to the positional relationship of each part. By detecting the light / dark gradation with a camera, the equipment state can be evaluated with higher accuracy, and as a result, an accurate inspection can be performed to contribute to the production of a highly accurate cylinder.

  According to the above invention [3], since the slit body is also permanently installed in the inspection apparatus, the equipment state can be more appropriately evaluated under conditions further approximated during actual inspection of the cylindrical body.

  According to the above invention [4], the evaluation is performed with higher accuracy because the evaluation is performed based on the light / dark gradation of the dark part of the light / dark stripe where the change in the positional relationship of each part is more easily detected. Can do.

  According to the said invention [5], since the minimum gradation of the dark part of a light-and-dark stripe is contained in the sensitivity range of a camera, the light and dark gradation of a dark part can be caught reliably, and an equipment state can be evaluated with a higher precision. .

  According to the invention [6], the evaluation is performed based on the gradation value of the lowest gradation of the dark part of the light and dark stripes where the change in the positional relationship of each part is more easily detected. Evaluation can be made.

  According to the invention [7], since the evaluation is performed based on whether or not the gradation value of the lowest gradation of the dark part of the light and dark stripes is within a predetermined allowable range, the facility state can be easily evaluated. it can.

  According to the above invention [8], since the evaluation is performed based on the tendency of the change in the axial direction of the lowest gradation of the plurality of dark portions, the type and degree of the equipment state failure that appears in the tendency of the change in the axial direction are also evaluated. can do.

  According to the invention [9], since the evaluation is performed based on the width of the dark part of the light and dark stripes in the axial direction of the cylindrical body, the equipment state can be easily evaluated.

  According to the invention [10], since the evaluation is performed by comparing the light / dark gradation detected at the time of the equipment state evaluation with the light / dark gradation data of the master work, the appropriate equipment state in the apparatus is used as a reference. The current equipment state can be evaluated.

  According to the above invention [11], since the master work is used as a subject to be photographed at the time of equipment state evaluation, it is possible to eliminate the error caused by the cylindrical body and more accurately evaluate the equipment state.

  According to the said invention [12], the positional relationship of each part can be evaluated as an equipment state.

  According to the said invention [13], illumination nonuniformity can be evaluated as an equipment state.

  According to the invention [14], since the change in the circumferential direction of the light and dark stripes is detected while rotating the cylindrical body, the rotational support state of the cylindrical body in the support portion can be evaluated.

  According to the invention [15], since the line sensor camera is used, it is possible to reliably capture the continuous change of each part of the inspection region extending in the axial direction of the cylindrical body.

  According to the above invention [16], since the surface of the cylindrical body is specular, it is possible to reduce the influence of diffused light in the inspection region and capture light and dark stripes.

  According to the above invention [17], the inspection accuracy of the surface accuracy required for the photosensitive drum substrate can be evaluated, which can contribute to the production of a suitable photosensitive drum substrate.

  According to the adjustment method according to the above invention [18], the equipment state is adjusted based on the evaluation result obtained by the equipment state evaluation method described above. Therefore, the equipment state is adjusted with high accuracy, thereby contributing to the production of a highly accurate cylindrical body. can do.

  According to the cylindrical body inspection method according to the invention [19], it is possible to reliably inspect the surface state of the cylindrical body with high accuracy and contribute to the production of a highly accurate cylindrical body.

  According to the method for manufacturing a cylindrical body according to the invention [20], the surface accuracy of the formed cylindrical body can be reliably inspected with high accuracy to manufacture a highly accurate cylindrical body.

  According to the cylindrical body inspection apparatus according to the invention [21], it is possible to reliably inspect the surface state of the cylindrical body with high accuracy and contribute to the production of a highly accurate cylindrical body.

  According to the cylindrical body manufacturing system according to the invention [22], it is possible to reliably inspect the surface accuracy of the formed cylindrical body with high accuracy and manufacture a highly accurate cylindrical body.

  According to the cylindrical body according to the invention [23], high surface accuracy can be reliably ensured.

  According to the photosensitive drum substrate according to the invention [24], high surface accuracy can be reliably ensured.

[First Embodiment]
A first embodiment of the present invention will be described with reference to schematic explanatory diagrams.

  FIG. 1 is a perspective view of a cylindrical body (tubular body) as an inspection object of the surface inspection apparatus (cylindrical body inspection apparatus) according to the first embodiment.

<Inspection object>
As shown in FIG. 1, a cylindrical body (tubing body) 90 is a photosensitive drum, a transfer roller, a developing roller, and other parts in a copying machine, a printer, a FAX machine, and a multi-function machine constituting an electrophotographic system. The outer peripheral surface 91 is used as an inspection target region for surface inspection.

  Specific examples of such a cylindrical body 90 include an element tube and a substrate for a photosensitive drum in a copying machine, a printer, or the like that employs an electrophotographic system. The substrate for the photosensitive drum is a cylindrical body that has been subjected to cutting, drawing, or the like, and is a cylindrical body before the formation of the photosensitive layer. Further, the cylindrical body after the photosensitive layer is formed on the photosensitive drum substrate can also be a cylindrical body to be subjected to the inspection of the present invention. The inspection target area 91 on the outer peripheral surface of the photosensitive drum substrate has a metallic luster and is a mirror surface that regularly reflects most of the incident light.

  The substrate for a photosensitive drum to be inspected by the surface inspection apparatus has a diameter of about 10 to 60 mm and a length of about 200 to 500 mm, for example.

  As a manufacturing method of such a cylindrical body 90, a combination of extrusion molding and pultrusion molding can be mentioned as described later. However, the method is not limited to this, and any method can be used as long as the cylindrical body can be piped, such as extrusion molding, pultrusion molding, casting, forging, injection molding, cutting, or a combination thereof.

  The material of the target cylindrical body 90 is not particularly limited, and various types of metal materials, synthetic resins, and the like can be applied. For example, aluminum and aluminum alloys (1000 to 7000 series), copper and copper alloys, steel materials, magnesium and magnesium alloys can be mentioned.

  Examples of particularly preferable materials include aluminum alloys 3003, 6061, 6051, and 7075. For example, 3003 alloy can be preferably used as a substrate for a photosensitive drum, 6061 alloy can be preferably used as a propeller shaft which is an automobile part, 6051 alloy can be preferably used as a general mechanical part, and 7075 alloy is Preferably it can be used as a bat tube. In addition, “aluminum” in this specification includes an aluminum alloy.

<Overall configuration>
FIG. 2 is a front view of the surface inspection apparatus according to the first embodiment of the present invention. FIG. 3 is a plan view of the apparatus. FIG. 4 is a side view of the apparatus.

  As shown in FIG. 2, the surface inspection apparatus 1 is imaged by an illumination (light source) 10, a light shielding body 20, a camera 30, a chuck unit 70 that supports a cylindrical body (inspection object) 90 at an inspection position, and the camera 30. Inspection apparatus main body 2 provided with an image processing apparatus 80 for processing the processed image, a cylindrical body supply conveyor 51 for supplying the cylindrical body 90 to the inspection apparatus main body 2, and passing the cylindrical body 90 sequentially from the inspection apparatus main body 2 The product delivery conveyor 52 and the reject product delivery conveyor 53 are provided.

  The cylindrical body supply conveyor 51 supports the vicinity of both ends of each cylindrical body 90 with a cylindrical body support base 59 having an upper edge cut into a V shape, and each cylindrical body support base 59 is not illustrated with a drive chain (not shown). The cylindrical body 90 before the inspection is transferred to the inspection apparatus main body 2 by moving the inspection body.

  On the cylindrical body supply side (the left side in FIGS. 2 and 3) of the inspection apparatus main body 2, an inter-conveyor transfer device 54 that lifts and transfers the cylindrical body 90 from both side ends is provided. The cylindrical body 90 transported by the conveyor 51 is transferred to the transport conveyor 61 in the inspection apparatus main body 2 by the inter-conveyor transfer device 54.

  Both the accepted product carry-out conveyor 52 and the rejected product carry-out conveyor 53 support the vicinity of both ends of each cylindrical body 90 with cylindrical support bases 59 having upper edges cut into V-shapes. The cylindrical body 90 after inspection is carried out of the inspection apparatus main body 2 by moving the support bases 59 with a drive chain (not shown). Further, an unacceptable item delivery robot 56 is provided at a position across the acceptable item unloading conveyor 52 and the unacceptable item unloading conveyor 53, and the cylindrical body 90 that has been determined to be unacceptable by the inspection in the inspection apparatus body 2 The undelivered product delivery conveyor 53 is fed out from the accepted product delivery conveyor 52.

  On the cylinder carrying-out side (right side in FIGS. 2 and 3) of the inspection apparatus body 2, an inter-conveyor transfer device 55 that lifts and transfers the cylindrical body 90 from both side ends is provided. The cylindrical body 90 on the transport conveyor 62 in 2 is transferred to the accepted product delivery conveyor 52 by the inter-conveyor transfer device 55.

  The conveyors 61 and 62 in the inspection apparatus main body 2 support the vicinity of both ends of each cylindrical body 90 with cylindrical support bases 63 having upper edges cut into V-shapes, and each cylindrical support base 63. Are moved by the drive chain, thereby transferring the cylindrical body 90 immediately before and immediately after the inspection.

<Rotary transfer device>
A rotary transfer device 64 that transfers the cylindrical body 90 to the inspection position B is disposed between the conveyors 61 and 62 before and after the inspection. The rotary transfer device 64 includes a plurality of (here, four) chuck portions 70 that support the cylindrical body 90.

  Each chuck portion 70 is attached to a rotary frame 67 connected to a rotary shaft 66 of a rotation drive motor 65, and an extraction position A for taking out the cylindrical body 90 from the conveyor 61, the light source 10, the light shielding body 20, and the like. The chuck portions 70... Are located at the same time at an inspection position B where inspection by an inspection optical system such as the camera 30 is performed and a delivery position C where the cylindrical body 90 is sent to the transport conveyor 62.

  The chuck unit 70 located at the take-out position A chucks and takes out the cylindrical body 90 before inspection from the transport conveyor 61, and the chuck unit 70 located at the inspection position B rotates and supports the cylindrical body 90 to perform surface inspection. The chuck portion 70 located at the delivery position C can simultaneously perform the work of releasing the chuck of the cylindrical body 90 after inspection and sending it to the transport conveyor 62. Further, the chuck portion 70 that moves from the take-out position A to the inspection position B starts to rotate the cylindrical body 90 in advance so that the rotation of the cylindrical body 90 is stabilized before the chuck portion 70 is conveyed to the inspection position B. As a result, when the inspection position C is reached, the surface inspection is immediately performed, and the cycle time can be shortened.

<Chuck part>
FIG. 5 is a front view of the chuck portion 70 according to the first embodiment. FIG. 6 is a side view of the chuck portion 70.

  As shown in these drawings, each chuck portion 70 includes one reference roller 71 and two support rollers 72 and 72, and a pair of chuck portions 70 and 70 disposed on both sides of the cylindrical body 90. Cooperate to chuck one cylindrical body 90.

  In the posture at the inspection position B, the reference roller 71 in each chuck portion 70 is in contact with the upper side of the inner peripheral surface of the cylindrical body 90 and defines its height position. The reference roller 71 is rotatably attached to the chuck portion main body 76, and rotates together with the cylindrical body 90 when performing inspection. In addition, a reference roller rotation drive motor 73 is provided on one of the pair of chuck portions 70 that cooperate to chuck one cylindrical body 90, and the reference roller 71 is driven to rotate at the time of inspection. 90 can be rotated.

  In the posture at the inspection position B, the support rollers 72 and 72 are respectively in contact with the lower left and right sides of the inner peripheral surface of the cylindrical body 90 and urge the cylindrical body 90 downward by air driving pressure. The upper side of the inner peripheral surface is reliably brought into contact with the reference roller 71 to stabilize the height position. Further, the support rollers 72 and 72 are rotatably attached to the chuck portion main body 76, and rotate together with the cylindrical body 90 when the inspection is executed. Further, as shown by the broken line and the solid line in FIGS. 5 and 6, the support rollers 72, 72 are moved in the vertical direction in the posture at the inspection position B, so that the distance from the reference roller 71 is set to the inner diameter of the cylindrical body 90. The cylindrical roller 90 can be inserted into the cylindrical body 90 together with the reference roller 71 before and after chucking the cylindrical body 90. For these operations, each chuck unit 70 is provided with a support roller driving unit 74 that moves the support rollers 72 and 72 up and down by air driving pressure.

  The chuck body 76 to which the reference roller 71 and the support rollers 72 and 72 are attached is moved in the axial direction of the cylindrical body 90 by the slide drive portion 75 with respect to the chuck portion base 77 attached to the rotary frame 67 of the rotary transfer device 64. The sliding operation is possible, and the cylindrical body 90 can be sandwiched from both outer sides and chucked.

  The rotary transfer device 64 and the chuck portion 70 constitute a support portion that supports the cylindrical body 90 so as to be rotatable at a predetermined inspection position B.

<Lighting (light source)>
The illumination (light source) 10 irradiates the outer surface of the cylindrical body 90 conveyed to the inspection position B with illumination light for inspection. The illumination 10 is composed of a linear light source such as a fluorescent lamp capable of obtaining high brightness, and has an extension along the longitudinal direction of the cylindrical body 90. As shown in FIG. 2, the illumination 10 is disposed almost directly above the cylindrical body 90 at the inspection position B by the light source support frame 13, and effectively directs the light to be irradiated toward the cylindrical body 90. The hood 12 covers other than the lower part.

  The illumination 10 includes a light source that has a predetermined spread and that emits diffused light.

  Diffused light refers to light that is diffused and irradiated in a random direction from a light source. In addition, parallel light is mentioned as light which is not diffused light. Parallel light refers to light emitted from a light source that is collected using, for example, a lens or fiber, and is irradiated as a bundle of light with directionality.

  The phrase “the light source of the illumination 10 has a predetermined spread” means that the light source is not a point light source but a portion that emits diffused light has a certain area.

  If the illumination 10 that has such a predetermined spread and irradiates diffused light is used, light in various directions enters each part of the surface of the cylindrical body 90 from each part of the illumination 10.

<Shading body>
The light shielding body 20 shields part of the light emitted from the light source 10 and forms bright and dark stripes on the outer peripheral surface 91 of the cylindrical body 90 to constitute various different optical conditions.

  FIG. 7 is a perspective view of the light blocking body 20 in the first embodiment. As shown in FIG. 7, the light shielding body 20 of the first embodiment is configured by a slit body formed such that a plurality of slit hole-like light transmitting portions 23... And light shielding portions 24. Yes.

  The sizes of the light transmitting part 23 and the light shielding part 24 can be appropriately set. For example, the width (opening width) a of the light transmitting part 23 is about 1 to 6 mm, and the width of the light shielding part 24 is about 3 to 6 mm. Is preferred.

  As shown in FIGS. 2 to 4, the light shield 20 is attached to the light shield support base 25 and is permanently disposed between the illumination 10 and the cylindrical body 90 at the inspection position B.

  When the cylindrical body 90 is illuminated by the illumination 10 that has a predetermined spread and irradiates diffused light through the light-shielding body (slit body) 20 in which the light-transmitting portions 23 and the light-shielding portions 24 are formed, the cylinder 90 is illuminated. On the surface of the body 90, the amount of light shielded by the light shielding portions 24 differs depending on the part, so that light and dark stripes in which the amount of light reached continuously changes are formed.

<Camera>
The camera 30 includes a line sensor 32 in which a large number of light quantity detection elements are arranged one-dimensionally, a lens that forms an image of a predetermined detection region 31 extending in the axial direction of the cylindrical body 90 on the line sensor 32, and the like. It is configured as a line sensor camera, and detects the amount of light incident from each part of the detection region 31.

  The line sensor 32 only needs to be capable of detecting one-dimensional light amount information. Even if it is a single line black and white line sensor, for example, a color line sensor in which sensors for each color such as RGB are arranged in a total of three lines, or A color line sensor in which sensors for respective colors are alternately arranged may be used. Furthermore, a TDI line sensor in which a plurality of rows of sensors are arranged in a direction perpendicular to the main arrangement direction of the line sensors may be used. Alternatively, it may be a partial scan camera or the like that is substantially used as a line sensor by selectively using only one or a plurality of specific rows of sensors that are two-dimensionally arranged.

  This camera 30 is attached to a camera support base 34 whose position and angle can be finely adjusted, and aims at a predetermined area extending in the axial direction as the detection area 31 in the outer peripheral surface 91 of the cylindrical body 90 at the inspection position B. Yes.

<Slide table>
The light-shielding body support base 25 to which the light-shielding body 20 is attached and the camera support base 34 to which the camera 30 is attached are both mounted on the slide table 40 and can be slid in the axial direction of the cylindrical body 90 at the inspection position B. Yes. That is, the slide table 40 is supported by a slide roller 41 so as to be slidable on a slide table support 42 fixed to the main body frame, and is slid by a slide drive motor 43.

  The stroke of this slide driving operation is set to be larger than the sum of the width a of the light transmitting portion 23 of the light shielding body 20 and the width b of the light shielding portion 24. Specifically, for example, about 1.1 times or more of the sum of the width a of the light transmitting portion 23 and the width b of the light shielding portion 24 is preferable. As a result, a case where the entire axial position of the inspection target region 91 on the outer peripheral surface of the cylindrical body 90 is located immediately below the light transmitting portion 23 and the light shielding portion 24 of the light shielding body 20 is realized.

<Main part>
FIG. 8 is a side view illustrating an outline of a main part of the surface inspection apparatus for the cylindrical body 90 according to the first embodiment. FIG. 9 is a perspective view of the same.

  As shown in FIG. 8, according to the curvature of the cylindrical body 90, the camera 30 regularly reflects light that is incident on the inspection target area 91 on the outer peripheral surface of the cylindrical body 90 from the light source 10 unless the light shielding body 20 exists. Is disposed at a position for receiving light.

  Further, the detection region 31 by the camera 30 is a portion on the outer peripheral surface 91 side facing the portion where the inner peripheral surface side of the cylindrical body 90 is supported by the reference roller 71. This portion is the portion where the position and angle are most stable because each portion of the cylindrical body 90 is supported by the reference roller 71. Therefore, it is possible to reduce the influence on the result of the surface inspection due to the shape accuracy such as the bending of the cylindrical body 90.

  Further, since the detection region 31 by the camera 30 is a portion facing the reference roller 71, even the cylindrical bodies 90 having different sizes (diameters) can constitute substantially the same optical conditions. In particular, if the cylindrical body 90 has the same thickness, the detection region 31 can be configured with substantially the same optical conditions. Therefore, even when the surface inspection of the cylindrical body 90 of various sizes is performed, it is possible to efficiently perform the surface inspection while minimizing the labor and time required for the setup change.

  Further, since the cylindrical body 90 is supported from the inner peripheral surface side, it is possible to reduce adverse effects on the surface inspection such as the reference roller 71 and the like causing a shadow on the outer peripheral surface 91 of the cylindrical body 90.

  Further, as shown in FIG. 8, the light source 10 spreads in the axial direction of the cylindrical body 90 and irradiates light of various angles downward, so each part of the inspection target region on the outer peripheral surface 91 of the cylindrical body 90. Although light of various angles that have passed through the light transmitting portion 23 of the light shielding body 20 is incident on the light shielding portion 20, the angle of the light incident by the light shielding portions 24. When viewed from the camera 30, the detection region 31 of the camera 30 is formed with a regular reflection light region 28 where the regular reflection light incident on the camera 30 exists and a regular reflection light limiting region 29 where there is no regular reflection light. Has been. For this reason, in the first embodiment, in the regular reflection light limiting region 29, light that becomes regular reflection light to the camera 10 when each part is normal is shielded, and a slight change occurs in the reflected light. The reflected light due to the surface defect can be detected with high contrast without being buried in the regular reflected light of the normal part.

  Further, the detection region 31 of the camera 30 passes through the regular reflection light region 28 and the regular reflection light restriction region 29 formed in the illumination restriction region, and the boundary between them, and the optical conditions such as the restriction of the incident angle change. It is a continuous area. An optical condition suitable for detecting each type of surface defect is configured in any part of the detection region 31 and can be easily detected. In addition, surface defects detected in each region can be efficiently captured.

  Moreover, since the camera 30 is comprised from the line sensor camera, the continuous change of each part of the detection area 31 from which this optical condition changes can be caught reliably.

  Further, since the detection area 31 is formed so as to pass through the boundary between the regular reflection light area 28 and the regular reflection light restriction area 29, the detection area 31 is very close to the regular reflection light area 28 in the regular reflection light restriction area 29. It includes a close part. For this reason, even a shallow and gentle concave defect that changes the reflection angle only slightly can be detected without being buried by the regular reflection light of the normal part.

  The regular reflection light region 28 and the regular reflection light limiting region 29 are formed such that a plurality of regular reflection light regions 28 and regular reflection light limiting regions 29 are alternately repeated in the longitudinal direction of the detection region 31. Crosses the boundary perpendicular to the direction in which the boundary between the regular reflection light region 28 and the regular reflection light limiting region 29 extends. This boundary is a portion where a part of specular reflected light is likely to be incident due to the size of the light receiving angle of the camera or the diffraction of light by the light shield, but the detection region 31 passes through this boundary in the shortest direction. Thus, a portion closer to the regular reflection light region 28 can be formed in the detection region 31 without being affected by the regular reflection light.

  In addition, since the detection region 31 is formed so as to pass through the plurality of regular reflection light regions 28 and the regular reflection light restriction region 29, a plurality of portions in the regular reflection light restriction region 29 that are close to the regular reflection light region 28 are provided. Thus, fine surface defects can be efficiently detected.

  The specific surface inspection is performed by continuously imaging the outer peripheral surface 91 of the cylindrical body 90 that is sent to the inspection position B and rotated by the reference roller 70 by the camera 30. Therefore, each circumferential position of the outer peripheral surface 91 of the cylindrical body 90 sequentially becomes the detection region 31 of the camera 30, and the entire region can be inspected.

  The rotational speed of the cylindrical body 90 is set according to the defect size to be detected and the line sensor capture speed of the camera 30. That is, the substantial width of the detection region 31 photographed by the camera 30 is determined according to the line sensor capture speed and the rotational speed of the cylindrical body 90 when the cylindrical body 90 is rotating. The substantial width of the detection area 31 is set to be smaller than the defect size to be detected.

  Further, while rotating the cylindrical body 90 in this way, the light shielding body 20 slides with a stroke larger than the sum of the width a of the light transmitting portion 23 and the width b of the light shielding portion 24 in the axial direction of the cylindrical body 90. Operate. For this reason, the entire outer peripheral surface 91 of the cylindrical body 90 is included in the detection region 31 of the camera 30 as the regular reflection light region 28 and the regular reflection light limiting region 29 and further as a boundary between them. It is possible to perform surface inspection that can detect surface defects.

  The specific surface defects to be detected depend on the resolution 30 of the camera, but various sizes and depths such as millimeter order, micron order, submicron order, etc. Faults can be detected.

  In addition, since the camera 30 slides and moves together with the light blocking body 20, the regular reflection light region 28 and the regular reflection light limiting region 29 are always formed at the same position in the detection region 31 of the camera 30. For this reason, the detection of surface defects can be reliably performed by simple image processing.

  Further, since the light shielding body 20 and the camera 30 move in the axial direction of the cylindrical body 90 while rotating the cylindrical body 90, the regular reflection light region 28 and the regular reflection light limiting region 29 on the outer peripheral surface 91 of the cylindrical body 90, and The detection region 31 of the camera 30 moves spirally on the outer peripheral surface 91 of the cylindrical body 90. In this case, each part on the outer peripheral surface 91 of the cylindrical body 90 is subjected to surface inspection under different optical conditions for each rotation of the cylindrical body 90 due to the movement of the light shielding body 20 and the camera 30.

<Image processing example>
FIG. 10 is an explanatory diagram illustrating an example of an image processing process performed by the image processing device 80 in order to detect a surface defect from an image captured by a camera.

  FIG. 10A is an example of an image photographed by the camera 30. In this figure, the brightness of the detection area 31 detected by the camera (line sensor) 30 at a certain moment is represented as a graph, the horizontal axis indicates each part of the detection area 31, and the vertical axis indicates the light / dark gradation. ing.

  As shown in this figure, in this example, the camera sensitivity is such that the light / dark gradation in the boundary area between the bright area and the dark area gradually changes in gradation in the intermediate gradation area of the sensitivity area of the camera 30. (Brightness / darkness resolution) and sensitivity range (detection gradation region) are set.

  FIG. 10B is an example of an image taken while rotating the tubular body 90. In this figure, each line in the horizontal axis direction indicates the brightness of the detection region 31 detected by the camera (line sensor) 30 at each moment, and imaging is repeated successively and sequentially while rotating the tube 90. The obtained images are arranged in the vertical axis direction.

  Since the camera 30 moves in the axial direction of the tubular body 90 together with the light blocking body 20, in the captured image shown in this figure, the regular reflection light region 28 (the white portion extending in the vertical direction in the figure) and the regular reflection light limiting region 29 ( In the figure, the horizontal position of the black portion extending in the vertical direction is not changed. Incidentally, unless the camera 30 is moved, the regular reflection light region 28 and the like extend in an oblique direction in the drawing.

  For the image thus obtained, in order to facilitate defect detection, image processing such as differentiation processing, integration processing, expansion processing, and contraction processing is used to make the regular reflection light limited region (dark region) 29 and the boundary region. It is desirable to perform processing that emphasizes the weak signal.

  FIG. 10 (c) expresses the amount of change in brightness by performing a difference process on the image captured by the camera 30 with respect to the scanning direction of the camera 30 (line sensor arrangement direction, horizontal axis direction in the figure). Is.

  At this time, in the portion where the light and dark gradation changes stepwise, the gradation change due to surface defects and the like is added to the original stepwise gradation change and is easily emphasized. There is a feature in image processing that is easily detected.

  As described above, in this example, since the camera sensitivity and sensitivity range are set so that a stepwise gradation change can be seen in the boundary region between the bright region and the dark region, surface defects or the like in particular in the boundary region. The gradation change due to is easily detected.

  FIG. 10D further shows the difference between the data of each line and the data at the same position of one or more previous lines, and the magnitude of the difference is expressed in shades.

  FIG. 10E shows a portion of the obtained grayscale data that exceeds a predetermined threshold value (reference value) as a surface defect.

  As described above, in the first embodiment, the image processing apparatus 80 evaluates the surface defect based on the result of the surface inspection, and when the cylindrical body 90 has no surface defect or the type and degree of the surface defect found are acceptable. When it is within the range, the cylindrical body 90 is determined to be an acceptable product (finished product). That is, the image processing device 80 functions as a determination unit.

  Note that the above-described image processing is an example, and any processing procedure can be employed.

<Equipment condition evaluation>
Next, the equipment state evaluation method of the cylindrical body inspection apparatus according to the present invention will be described.

  In order to appropriately perform the surface inspection in the above-described cylindrical body inspection apparatus (surface inspection apparatus), it is naturally necessary that the equipment is in a well-equipped state. For example, the illumination light is appropriately irradiated to the inspection area, and the reflected light from the inspection object (cylindrical body) must enter the camera as intended. If an appropriate amount of reflected light cannot be obtained, an intended surface inspection image cannot be obtained and appropriate inspection cannot be performed.

  In particular, when performing a surface inspection on a cylindrical body, if the axial position of the cylindrical body slightly shifts in a direction that deviates from the optical path, the angle of the outer surface of the cylindrical body that becomes the inspection surface changes. There is a difficulty that it will fluctuate extremely.

  Therefore, when targeting a cylindrical body, it is necessary to adjust the equipment state very accurately. For this reason, the positional relationship of each part, angle (orientation), illumination unevenness, and optical systems such as illumination and cameras. It is required to evaluate the adhesion of dirt.

  Hereinafter, with respect to this surface inspection apparatus, the evaluation and adjustment of the equipment state performed prior to the surface inspection of the cylindrical body (photosensitive drum substrate) as an inspection object will be described.

  Such an evaluation and adjustment of the equipment state is appropriately performed at the start of daily work, during regular maintenance, or when the equipment state is in doubt.

  The equipment state evaluation in this surface inspection device is the same master work as the master data detected and stored in advance when the equipment state of the equipment is good and the equipment state evaluation at the time of the equipment state. This is done by comparing the detected data against the data. In this way, if the current equipment state is detected using the same master work as when the master data was detected when the equipment state is good, the error that caused the cylindrical body is eliminated, and the equipment state is accurately evaluated. It can be carried out.

  The data to be compared is that the surface of the master work is supported by the illumination light from the illumination 10 through the light shielding body (slit body) 20 in the same manner as in the surface inspection for the normal cylindrical body 90. A light / dark gradation is used in which light and dark stripes are formed and detected by photographing with the camera 30. The master work supported at the predetermined inspection position B may be rotated as described later or may be in a stationary state.

  The master work is arbitrarily selected from the cylindrical body 90 which is an inspection object, from a specific one excellent in shape and surface condition, for example, one whose shape and surface condition pass inspection standards. However, the master work may be subjected to a different material, special surface treatment, or the like from the cylindrical body 90, which is a normal inspection object, in order to improve its storage stability.

  Such master data is stored on a computer constituting the image processing apparatus 80 provided in the surface inspection apparatus. Further, the image processing device 80 functions as an evaluation unit that evaluates the quality of various equipment states, which will be described later, based on the light / dark gradation detected during the equipment state evaluation.

As described above, the evaluation of equipment state, the supporting portion to be used when the actual test, to be done on the basis of the detection result by the lighting and the camera itself, the case of detecting the positional deviation of the illumination and camera displacement sensor or the like The equipment condition is evaluated under conditions that are similar to those at the actual inspection without being affected by the mounting position error of the light source with respect to the outer shape of the illumination and the mounting position error of the lens or image sensor with respect to the outer shape of the camera. There is an advantage that you can.

  11 to 14 and FIGS. 16 to 18, the horizontal axis represents the axial direction of the cylindrical body, and the vertical axis represents the light and dark gradation values of each part of the detection region extending in the cylindrical body axial direction.

  FIG. 11 is a light / dark gradation graph in which the light / dark gradation detected at the time of the equipment condition evaluation and the light / dark gradation (master data) stored in advance when the equipment is good are shown, and the broken line is a good equipment. This represents data (master data) detected under the condition, and a solid line is detected at the time of evaluation.

  In addition, in this FIG. 11, although what is displayed on the light-and-dark gradation graph at the time of an equipment state slightly shifted in the horizontal axis direction so that the master data graph can be visually recognized, The positions where dark portions are formed in both graphs coincide with each other in the axial direction of the cylindrical body.

  Also, if the master data graph and the equipment condition evaluation graph are actually misaligned, the shading body (slit body) or camera installation position will be misaligned between the master data acquisition and the equipment condition evaluation. Can be judged.

  Here, among the light and dark stripes formed on the surface of the cylindrical body 90, the equipment state is evaluated using the light and dark gradation values of the dark part. For this reason, the sensitivity range of the camera 30 is adjusted so that the lowest gradation of the dark part of the light and dark stripes is included therein, so that the light and dark gradations of the dark part of the light and dark stripes can be reliably captured. .

  Thus, the bright and dark stripes formed by the slit body have a characteristic that changes sensitively to the positional relationship of the optical system including the illumination, the cylindrical body, and the camera. In particular, since dark portions of light and dark stripes originally have a small amount of light, the rate of change in the amount of light (change rate) due to a change in the positional relationship of the optical system is large, and it is easy to detect changes sensitively. Therefore, if the gradation value of the dark part of the light and dark stripes is used, the equipment state can be evaluated with higher accuracy.

The evaluation using the light / dark gradation value of the dark part can include, for example, a method in which the lowest gradation value for each dark part is compared between the current evaluation time and the master data. In FIG. 11, with regard to the dark portion near the center in the axial direction of the cylindrical body 90, attention is focused on the difference in light and dark gradation between the lowest gradation value of the dark portion at the time of evaluation and that of the master data. Based on this difference, it is possible to evaluate the degree of deviation (displacement) of how much the equipment state at the time of evaluation deviates from the good equipment state when the master data is detected.

  Further, if it is determined whether or not the current equipment state is within an allowable range in which a predetermined surface inspection accuracy can be ensured, for example, an allowable gradation area based on the master data is set and the current brightness / darkness is set. It is also possible to easily determine whether or not the light / dark gradation of the dark part of the stripe is within the allowable gradation area.

  FIG. 12 shows an example of setting the allowable gradation area based on the master data. In the same figure, the graph shows the gradation range of the master data, and the area between the two broken lines indicates the allowable gradation area.

  In this setting example, for example, ± α% (α = allowable constant: for example, 1 to 20) is set as the allowable range with the master data as the center.

  In this example, if the minimum gradation value of each dark part of the light and dark stripes detected at the time of evaluation is in the allowable gradation area, it can be determined that the current equipment state is within the allowable range.

  Further, as shown in FIG. 11, the master data and the light / dark gradation graphs at the time of equipment evaluation may be directly compared, but the influence of variations in the surface shape (unevenness) of the cylindrical body and the amount of reflected light (gloss). In order to minimize the above, it is desirable to extract the characteristics of each graph and compare them.

  As such a method, for example, it is possible to evaluate what type of equipment failure has occurred in the current equipment state based on the tendency of changes in a plurality of dark portions arranged in the axial direction of the cylindrical body 90. it can. This is because a feature corresponding to the type of equipment failure appears in the tendency of changes in the light and dark gradations of dark parts arranged in the axial direction.

  The tendency of the change in the plurality of dark portions can be characterized by, for example, representing each dark portion as a minimum gradation value of each dark portion, plotting these minimum gradation values in the axial direction, and the shape and position of a curved curve. it can.

  Specifically, as a method of obtaining a curve (trend curve) obtained by extracting the characteristics of such a light / dark gradation graph, in addition to forming the above-described minimum gradation value, low-pass filter processing, minimum gradation value Examples thereof include a fitting process to a multidimensional curve, and a cumulative curve of the curve thus obtained.

Thus, if the kind of equipment failure that has occurred can also be evaluated, the equipment state can be easily and appropriately adjusted.
<Specific example of equipment condition evaluation>
Hereinafter, specific examples of the equipment state evaluation will be described.

  FIGS. 13 and 14 are examples of a light / dark gradation graph detected when the positional relationship between the illumination, the cylindrical body, and the optical system of the camera is shifted in parallel. In these figures, a broken line extending to the left and right is a trend curve representing the change tendency of the dark portion of the master data obtained by plotting the minimum gradation values of the dark portions in the master data and smoothing them. A solid line extending to the left and right is a trend curve representing a change tendency of the minimum gradation value of each dark part detected at the time of evaluation.

  As shown in FIG. 13 and FIG. 14, when the positional relationship between the three is shifted in parallel, the light / dark gradation value of the dark portion is almost uniformly on the upper side or the lower side with respect to the trend curve of the master data. It's off.

  In this way, the light and dark gradation values of the dark part are substantially uniformly shifted over the entire region, indicating that there is a shift in equipment state that is not different in each part in the axial direction. As a cause, there is a high possibility that the positional relationship between the illumination, the cylindrical body, and the optical system of the camera is shifted in parallel. Note that the parallel displacement in the positional relationship includes a shift in the direction (angle) of the camera and illumination. In addition, since the position of the cylindrical body depends on the support portion that supports the cylindrical body, it can be determined that the displacement of the cylindrical body is a defect in the set state of the cylindrical body (master work) with respect to the support portion or the displacement of the support portion. .

  As shown in FIG. 13 or FIG. 14, depending on whether the deviation of the master data from the trend curve is positive or negative, any of the three directions of illumination, cylindrical body, and camera optical system is selected. It is possible to determine whether or not there is a deviation (displacement).

  This is because the target surface inspection device in this example does not maximize the amount of light incident on the camera as the positional relationship between the illumination, the cylindrical body, and the camera, but the part where the light amount starts to decrease from there. This is because it is assumed that the setting for aiming at is the optimum equipment state.

  FIG. 15 is an example of a relationship diagram between a gradation change amount and an optical system axis deviation amount in the surface inspection apparatus. In this example, among the three members of the illumination, the cylindrical body, and the camera, the amount of axial displacement of the optical system is represented by the amount of positional displacement of the cylindrical body, and in the same figure, when the three are in an appropriate positional relationship. The horizontal axis indicates the amount of positional deviation of the cylindrical body taken as zero. The vertical axis in the figure indicates the amount of change in the amount of light (brightness / darkness gradation).

  In the surface inspection apparatus having the relationship shown in the example of FIG. 15, it can be seen that there is a portion where the reflected light incident on the camera has a peak on the side where the positional deviation of the cylindrical body is positive.

  If such a relationship between the amount of gradation change and the amount of axis deviation is clear in advance, the direction and amount of deviation of the positional relationship between the three of the illumination, the cylindrical body and the camera from the gradation change from the master data. (Distance) can be obtained.

  For example, in FIG. 13, since the light / dark gradation value of the dark portion is increased with respect to the master data, the amount of reflected light incident on the camera is larger than the proper equipment state when the master data is detected. It can be seen that at least one of the illumination, the cylindrical body, and the camera is deviated in the direction (plus direction). In FIG. 14, it can be seen that there is a deviation in the direction (minus direction) in which the amount of reflected light incident on the camera is reduced. Further, the shift amount converted into the shift amount of the cylindrical body can be obtained from the detected gradation change amount.

  If such a relationship is clear, an adjustment mechanism that can be adjusted from the outside is provided for the optical system of the cylindrical body inspection apparatus, the optical system such as the camera, the support portion of the cylindrical body, etc. Based on the 15 data, the positional relationship deviation can be automatically corrected by feeding back the positional relationship deviation to each adjusting mechanism. As a result, the masterwork can be measured periodically and the operation can be performed while adjusting the positional relationship.

  FIG. 16 is an example of a light / dark gradation graph detected when the positional relationship between the illumination, the cylindrical body, and the optical system of the camera is shifted so as to be inclined. A broken line in the figure is the above-described trend curve of the master data, and a solid line is a trend curve representing a change tendency of the minimum gradation value of each dark part detected at the time of evaluation.

  As shown in this figure, when the positional relationship between the lighting, the cylindrical body, and the camera is shifted so as to be inclined, the shift of the light / dark gradation value of the dark portion with respect to the tendency curve of the master data is in the axial direction. It changes so as to continuously increase from one end side toward the other end side.

  In this way, the change of the dark and light gradation value in the dark portion so as to increase continuously indicates that the shift of the equipment state gradually increases from one end side to the other end side. The cause is that the positional relationship between the lighting, the cylindrical body, and the optical system of the camera has shifted so as to incline obliquely, so that the shift of the light / dark gradation value is small at one end where the amount of positional shift is small, and There is a high possibility that the difference between the light and dark gradation values increases as the positional deviation amount increases.

  In FIG. 16, the position of the optical system in the part corresponding to the left side of the figure is substantially in the proper position, but the illumination and cylindrical body are directed in the direction (minus direction) in which the amount of light incident on the camera decreases toward the right side. It can be seen that at least one of the camera and the camera is shifted.

  Further, if the relationship between the gradation change amount and the axis deviation amount as shown in FIG. 15 is clear in advance, the deviation amount of the optical system on the right end side (for example, the gradation change amount from the master data on the right end side). Displacement amount).

  FIG. 17 is an example of a light / dark gradation graph detected when the amount of light at both ends of the illumination is reduced. A broken line in the figure is the above-described trend curve of the master data, and a solid line is a trend curve representing a change tendency of the minimum gradation value of each dark part detected at the time of evaluation.

  In the case of a fluorescent lamp or the like, the light quantity at both ends in the longitudinal direction may be reduced with long-term use. In this case, as shown in FIG. 17, the light / dark gradation value of the dark portion at both end portions decreases with respect to the master data tendency curve.

  In this way, when the light / dark gradation value of the dark portion at both ends is reduced, it is possible to detect illumination unevenness such as a decrease in the light amount at both ends.

  In addition, as shown in FIG. 17, the light / dark gradation values at both ends are reduced because the positional relationship between the illumination, the cylindrical body, and the optical system of the camera is deviated obliquely. There is also.

  Although the above-mentioned evaluation of the equipment state can be executed even when the cylindrical body supported by the support portion is in a stationary state, it is rotated while the cylindrical body is supported by the support portion as in the case of performing a normal surface inspection. While doing, you may make it detect the light-dark gradation of the light-and-dark stripe formed on the surface. In this way, it is possible to detect temporal changes in the light and dark gradations of light and dark stripes and gradation changes in the circumferential direction of the cylindrical body.

  FIG. 18 is an example of a light / dark gradation graph in which the light / dark gradation of light / dark stripes is detected while rotating the cylindrical body. The waveform in the figure shows the light / dark gradation detected at a certain moment, and the two broken lines extending to the left and right indicate the fluctuation range (shake width) of the lowest gradation value in the dark part as the light / dark gradation value changes over time. Is shown.

  In the example of FIG. 18, the light and dark gradations vibrate due to the rotation of the cylindrical body or with the passage of time. Such vibrations are the light emission amount of illumination typified by flickering of a fluorescent lamp or the like. There may be fluctuations and mechanical vibrations caused by the rotational support state of the support part that rotates the cylindrical body.

  Note that when the equipment state is evaluated while rotating the cylindrical body, the rotational speed may be the same as that when performing surface inspection (defect detection) on the cylindrical body, but suitable for the equipment state evaluation. Different speeds may be set. In this case, it is desirable to set so that a plurality of positions can be photographed in the circumferential direction of the cylindrical body according to the imaging time interval of the camera, and specifically, at least four directions with a 90-degree pitch in the circumferential direction of the cylindrical body It is desirable to set a speed at which imaging can be performed at least four times by the camera per one rotation of the cylindrical body so that imaging can be performed.

  Various equipment state evaluations such as those described above are performed by the arithmetic unit provided in the image processing apparatus using the master data stored in the master data storage unit and the captured image data captured from the camera as described above. This can be realized by performing a comparison process. In addition, the processing result can be displayed on the display unit.

  If the equipment state is evaluated in this way and the kind and degree of the equipment failure occurring can be evaluated, the equipment state of the inspection apparatus can be easily and appropriately adjusted based on this evaluation.

  Specifically, since the surface inspection apparatus according to the first embodiment has four chuck portions that support the cylindrical body 90 as described above, a master work is sequentially set on each chuck portion and the equipment state is set. By performing the evaluation and adjustment, it is possible to maintain the equipment state with high accuracy, and as a result, perform an accurate inspection and contribute to the production of a highly accurate cylindrical body.

[Second Embodiment]
Next, a second embodiment of the present invention will be described with reference to the drawings.

  This 2nd Embodiment is a manufacturing system of the cylindrical body 90 provided with the surface inspection apparatus 1 concerning 1st Embodiment mentioned above.

  FIG. 19 is a functional block diagram showing a configuration of a cylindrical body manufacturing system 700 according to the second embodiment.

  The manufacturing system 700 includes a pipe manufacturing apparatus 710 for manufacturing the cylindrical body 10, the above-described cylindrical surface inspection apparatus 1, and a feedback unit 720 that feeds back the inspection result of the surface inspection apparatus 1 to the pipe manufacturing apparatus 710. I have.

  For example, if the photosensitive drum base is to be piped by drawing an aluminum alloy, the pipe making apparatus 710 is a process for dissolving the raw material to produce an extruded material, an extrusion process, a drawing process, a bending correction process, a predetermined correction process, etc. It is configured as a set of mechanical devices that perform a cutting process to length, a rough cleaning process, a finishing cleaning process, and the like.

  The extrusion process is a process of obtaining an aluminum extruded element tube by extruding, for example, an aluminum billet.

  FIG. 20 is a schematic plan view of an extruder that performs this extrusion process. The aluminum extruding element tubes 740 extruded from the extruder main body 730 are conveyed forward in the extrusion direction by a plurality of pairs of support rollers 750, and are cut into a predetermined length R by a cutting machine 760.

  FIG. 21 is a cross-sectional view of an example of an extrusion die provided in the extruder body. This extrusion die 770 is a port hole die, 771 is a female die, and 772 is a male die. The die female die 771 is formed with a through-hole through-hole 773 formed in the center, and the peripheral surface on the inlet side of the extrusion hole 773 is a circular bearing portion 774. Reference numeral 775 denotes a relief portion. On the other hand, the die male die 772 has a molding convex portion 776 having a circular cross section at the center thereof, and a circular bearing portion 777 is formed on the tip peripheral surface of the molding convex portion 776. Reference numeral 778 denotes a passage hole through which the aluminum billet passes. Then, the die female die 771 and the die male die 772 are combined, and the tip of the molding convex portion 776 of the male die 772 is desired in the extrusion hole 773 of the female die 771, and both male and female bearing portions 774, 777 are annular. They are arranged opposite to each other with a molding gap 779 therebetween.

  The extrusion method is not particularly limited, and may be one using a porthole die or mandrel extrusion.

  The drawing process is a process of drawing an aluminum extruded tube having a predetermined length obtained by extrusion to obtain an aluminum drawn tube.

  FIG. 22 is a cross-sectional view showing an example of a drawing machine that performs this drawing step. For example, the drawing machine 780 includes an aluminum extrusion tube 781 passed between a drawing die 782 and a drawing plug 783, and a mouthpiece 784 formed at the tip of the extrusion tube 781 is gripped by a chuck portion 785 of a carriage portion. By moving the carriage portion forward, an aluminum drawing tube 786 is obtained. The extraction plug 783 is supported by a rod 787. One or a plurality of cores 788 are attached to the rod 787 over substantially the entire length thereof, and the core 788 abuts against the inner peripheral surface of the extrusion element pipe 781 and pushes the extrusion element pipe 781 by its own weight. Therefore, the axis of the extruded element pipe 781 can be held in a state where it coincides with the axis of the die 782 from the beginning to the end of drawing. Further, during the drawing process, lubricating oil is supplied between the drawing die 782 and the extrusion element pipe 781.

  In this drawing step, the drawing may be performed by a floating plug drawing method in which the plug is not fixed. The drawing may be performed only once to obtain an aluminum drawn tube. However, it is preferable to repeat the drawing a plurality of times to reduce the diameter in order to obtain the aluminum drawn tube. In particular, it is preferable to obtain an aluminum drawn tube by performing drawing twice.

  The bending correction process is a process of correcting the bending of the aluminum drawn tube obtained by the drawing process. Specifically, the aluminum drawn tube obtained by the drawing process is first removed at its mouth by a press cutting method, then put into a roll straightening machine, and straightened by the action of an internal straightening roll. .

  FIG. 23 is a cross-sectional view illustrating an example of a cutting machine that performs the mouthpiece part cutting step. This cutting machine 790 inserts the end portion of the aluminum drawing tube 791 on the side of the mouthpiece 792 into the inside of the molds 793 and 793, and lowers the cutting blade 794 to cut and remove the mouthpiece portion 792. Since this cutting is performed by a parting blade, no chips are generated, and chips and the like are brought into the roll straightening machine so that the aluminum drawing tube 791 is not scratched.

  FIG. 24 is a conceptual diagram illustrating an example of a roll straightening machine that performs a bending straightening process. The roll straightening machine 810 straightly straightens the aluminum drawing tube 811 whose mouth is cut off by the action of the straightening roller 812 inside.

  The rough cleaning step is a step of removing lubricating oil or the like adhering to the aluminum drawing pipe in the drawing step or the like. This rough cleaning process is performed using, for example, a solvent having a degreasing power. Although it does not specifically limit as a specific method, For example, the immersion method, the shower method, etc. are mentioned.

  The finish cleaning step is preferably performed by ultrasonic cleaning, for example.

  FIG. 25 is a conceptual diagram illustrating an example of an ultrasonic cleaning machine. This ultrasonic cleaning machine 830 immerses a plurality of aluminum drawing tubes 833 that are objects to be cleaned in the cleaning liquid 832 stored in the cleaning increment 831, and sends ultrasonic waves into the cleaning liquid 832 by the vibrator 834. The aluminum drawing tube 833, which is an object to be cleaned, is cleaned.

  The ultrasonic irradiation method is not particularly limited, and an adhesive type, a vibration transmitter type, and other various cleaning machines can be used in addition to the throwing type shown in FIG. The cleaning liquid is generally white kerosene, light oil, alkali, surfactant, trichloroethylene, or the like, but is not limited thereto, and water-based, hydrocarbon-based, chlorinated organic solvents, etc. may be used as appropriate. Good.

  The cylindrical body (aluminum drawing tube) 90 obtained through the extrusion process, the cutting process, the drawing process, the bending correction process, the cleaning process, and the finishing cleaning process as described above has excellent surface quality accuracy, and is a copier, printer, facsimile machine. It is suitable as a photosensitive drum substrate of an electrophotographic apparatus such as the above.

  The cylindrical body (aluminum drawn pipe) 90 manufactured in this way is inspected by the surface inspection apparatus 1 as to whether or not the surface state is within a predetermined allowable range, and the inspection result is within the predetermined allowable range. If there is, the cylindrical body 90 is determined as a finished product.

  Further, in the surface inspection apparatus 1, when the type or characteristic of the defect occurring in the cylindrical body 90 is determined, the feedback unit 720 feeds back the inspection result to the pipe making apparatus 710, thereby the defective pipe It is designed to prevent the occurrence of this.

  In the pipe manufacturing apparatus 710 to which the inspection result is fed back in this manner, the pipe manufacturing conditions are set according to the contents of the inspection result. Specifically, setting of extrusion conditions such as extrusion die attachment state and extrusion speed, selection of raw pipe, confirmation of attachment state of drawing die and setting of drawing conditions such as drawing speed, adjustment of roll height in roll straightener The roll straightening machine conditions such as the transport speed and the like are controlled. As a result, it is possible to obtain a cylindrical body having a necessary and sufficient surface accuracy more reliably, and even when a defective pipe is generated, it is possible to quickly cope with this and suppress the number of generated defective pipes.

  According to such a manufacturing system 700, a cylindrical body having a predetermined shape accuracy and a set of cylindrical bodies can be reliably obtained.

[Other Embodiments]
(1) In the said embodiment, although the equipment state was evaluated based on the light / dark gradation value of the dark part of a light / dark stripe, you may evaluate based on the light / dark gradation value of the light part of a light / dark stripe. Further, the evaluation may be performed based on the formation position of the boundary region between the bright part and the dark part and the rate of change in the axial direction of the light / dark gradation in the boundary region.

  (2) In the above embodiment, as an evaluation of the equipment state based on the light and dark gradations of the dark part of the light and dark stripes, attention is paid to the lowest gradation value of the dark part. You may make it evaluate an equipment state paying attention to the width | variety about.

  (3) In the above embodiment, the light and dark stripes at the time of the equipment state evaluation are formed using the master work used when detecting the master data when the equipment state is good. The equipment state may be evaluated using a cylindrical body. In this way, although the error due to the difference in the cylindrical body is included, the equipment state can be easily evaluated. In this case, it is desirable to use a cylindrical body whose correlation with the master data using the master work in advance is used as a semi-master work for daily equipment state evaluation. If it does in this way, everyday equipment state evaluation can be performed appropriately, preserve | saving a true masterwork safely.

  (4) In the above embodiment, the equipment state is evaluated by comparing the light and dark stripes of the light and dark stripes at the time of equipment state evaluation with the master data. However, a predetermined allowable gradation range is set regardless of the master work. The light and dark gradations of the light and dark stripes at the time of evaluation may be evaluated based on the allowable gradation range.

  (5) In the embodiment described above, the slit body (light-shielding body) is permanently installed in the cylindrical body inspection apparatus. However, the slit body may be attached only when the equipment state is evaluated.

  (6) A plurality of cameras may be used according to the size of the inspection area.

  (7) The camera is not limited to a line sensor camera, and may be an area sensor having an imaging region having a two-dimensional extent, a camera composed of an optical sensor that detects a specific amount of light, or the like.

  (8) In the above embodiment, the camera is arranged at a position for receiving the regular reflection light of the inspection illumination light. However, the camera is arranged so as to aim at a position shifted from the position for receiving the regular reflection light, and there is a surface defect. In this case, regular reflection light may be incident on the camera.

  (9) In the above embodiment, the bright and dark stripes are formed by the slit body in which the optical characteristics of the light transmitting part and the light shielding part do not change. However, the light quantity of the bright part and the dark part is obtained by the slit body using the neutral density filter (ND filter). May be adjusted. Moreover, the light quantity of a bright part and a dark part may be adjusted with the slit body using a liquid crystal panel, and you may enable it to change the light-shielding form continuously and freely.

  (10) In the above embodiment, the width (size) of the light transmitting portion and the light shielding portion in the light shielding body (slit body) is determined according to the surface defect to be detected, but the width (size) suitable for the evaluation of the equipment state You may make it set to.

  For example, if only the evaluation accuracy of the equipment state is considered, the width (size) of the light transmitting portion and the light shielding portion of the slit body is based on optical conditions such as the amount of illumination light and the aperture amount of the camera in the cylindrical body inspection device to be evaluated. Therefore, it is desirable to set so that the minimum gradation value of the dark part of the light and dark stripes formed by the slit body is included in the gradation range that can be detected with particularly high sensitivity even within the sensitivity of the camera.

It is a perspective view of the cylindrical body which is a test object of the surface inspection apparatus concerning 1st Embodiment. It is a front view of the surface inspection apparatus concerning a 1st embodiment of the present invention. It is a top view of the apparatus. It is a side view of the same apparatus. It is a front view of the chuck | zipper part in 1st Embodiment. It is a side view of the chuck part. It is a perspective view of the light-shielding body in 1st Embodiment. It is a side view showing the outline of the principal part of the cylindrical surface inspection apparatus concerning a 1st embodiment. It is the same perspective view. It is explanatory drawing which shows the example of the image process which detects a surface defect from the image imaged with the camera. It is the light / dark gradation graph which represented together the light / dark gradation detected at the time of an equipment state evaluation, and the light / dark gradation (master data) at the time of the equipment favorable preserve | saved. It is an example of setting an allowable gradation area based on master data. It is an example of the light-and-dark gradation graph detected when the positional relationship of three of illumination, a cylindrical body, and the optical system of a camera has shifted | deviated in parallel. It is an example of the light-and-dark gradation graph detected when the positional relationship of three of illumination, a cylindrical body, and the optical system of a camera has shifted | deviated in parallel. It is an example of the relationship figure of the gradation variation | change_quantity in this surface inspection apparatus, and the axial deviation | shift amount of an optical system. It is an example of the light-and-dark gradation graph detected when the positional relationship of three parts of illumination, a cylindrical body, and the optical system of a camera has shifted | deviated diagonally. It is an example of the light / dark gradation graph detected when the light quantity fall of the both-ends part of illumination generate | occur | produces. It is an example of the light / dark gradation graph which detected the light / dark gradation of the light / dark stripe, rotating the cylindrical body. It is a functional block diagram which shows the structure of the manufacturing system of the cylindrical body concerning 2nd Embodiment. It is a schematic plan view of the extruder which performs an extrusion process. It is sectional drawing in an example of the extrusion die with which an extruder main body is provided. These are the cross sections which show an example of the drawing machine which performs this drawing process. It is sectional drawing which shows an example of the cutting machine which performs a lip attachment part cutting process. It is a conceptual diagram which shows an example of the roll straightening machine which performs a bending correction process. It is a conceptual diagram which shows an example of an ultrasonic cleaner.

Explanation of symbols

1 Surface inspection device (cylindrical body inspection device)
2 Inspection device body 10 Illumination 20 Light shielding body (slit body)
23 Translucent part 24 Light-shielding part 30 Camera 31 Detection area 40 Slide table 64 Rotation transfer device (support part)
70 Chuck part (support part)
71 Reference roller 72 Support roller 80 Image processing apparatus (evaluation means)
90 Cylindrical body 91 Outer peripheral surface 700 Manufacturing system B Inspection position

Claims (10)

A support unit that supports a cylindrical body that is an inspection object to be rotatable in a circumferential direction at a predetermined inspection position, illumination that illuminates the outer surface of the cylindrical body, and a camera that captures a detection region extending in the axial direction of the cylindrical body And an equipment state evaluation method for a cylindrical body inspection apparatus,
The cylindrical body is supported at the inspection position by the support part,
Illuminating the surface of the cylindrical body so that light and dark stripes are formed in the axial direction of the cylindrical body by the illumination,
Photographing the cylindrical body with the camera to detect the light and dark gradation of each part of the light and dark stripes,
Assessing the quality of the equipment state based on the light and dark gradation of the detected light and dark stripes,
The lowest gradation of the dark part of the light and dark stripes is included in the sensitivity range of the camera,
The evaluation is performed based on the gradation value of the lowest gradation for each dark part of the light and dark stripes,
The equipment state evaluation method for a cylindrical body inspection apparatus, wherein the evaluation is performed based on a change tendency of gradation values of minimum gradations of a plurality of dark portions arranged in the axial direction of the cylindrical body. A support unit that supports a cylindrical body that is an inspection object to be rotatable in a circumferential direction at a predetermined inspection position, illumination that illuminates the outer surface of the cylindrical body, and a camera that captures a detection region extending in the axial direction of the cylindrical body And an equipment state evaluation method for a cylindrical body inspection apparatus,
The cylindrical body is supported at the inspection position by the support part,
Illuminating the surface of the cylindrical body so that light and dark stripes are formed in the axial direction of the cylindrical body by the illumination,
Photographing the cylindrical body with the camera to detect the light and dark gradation of each part of the light and dark stripes,
Assessing the quality of the equipment state based on the light and dark gradation of the detected light and dark stripes,
The lowest gradation of the dark part of the light and dark stripes is included in the sensitivity range of the camera,
The evaluation is performed based on the gradation value of the lowest gradation for each dark part of the light and dark stripes,
The evaluation is performed based on whether or not the gradation value of the lowest gradation of each dark part of the light and dark stripes is within a predetermined allowable range set for each dark part . Equipment condition evaluation method.  A slit body in which a plurality of light-shielding portions and light-transmitting portions are alternately and repeatedly formed in the axial direction of the cylindrical body is disposed at a predetermined position between the illumination and the cylindrical body, and the illumination is passed through the slit body. The equipment state evaluation method for a cylindrical body inspection apparatus according to claim 1 or 2, wherein the bright and dark stripes are formed by illuminating the surface of the cylindrical body by the above.  The said slit body is the equipment state evaluation method of the cylindrical body inspection apparatus of Claim 3 currently installed in the said inspection apparatus. A step of evaluating the equipment state by the equipment state evaluation method according to any one of claims 1 to 4 with respect to the cylindrical body inspection device;
Based on the evaluation result, adjusting the equipment state of the cylindrical body inspection device,
A method for adjusting a cylindrical body inspection apparatus, comprising: A step of evaluating the equipment state by the equipment state evaluation method according to any one of claims 1 to 4 with respect to the cylindrical body inspection device;
Based on the evaluation result, adjusting the equipment state of the cylindrical body inspection device,
A step of inspecting the surface state of the cylindrical body as the inspection object by the cylindrical body inspection apparatus in which the equipment state is adjusted; and
A cylindrical body inspection method comprising: Forming a cylindrical body;
A step of evaluating the equipment state by the equipment state evaluation method according to any one of claims 1 to 4 with respect to the cylindrical body inspection device;
Based on the evaluation result, adjusting the equipment state of the cylindrical body inspection device,
A step of inspecting the surface state of the cylindrical body as the inspection object by the cylindrical body inspection apparatus in which the equipment state is adjusted; and
The manufacturing method of the cylindrical body characterized by including. A support portion that supports a cylindrical body as an inspection object to be rotatable in a circumferential direction at a predetermined inspection position;
Illumination for illuminating the outer surface of the cylindrical body;
A camera for photographing a detection region extending in the axial direction of the cylindrical body;
A plurality of light-shielding portions and light-transmitting portions are alternately and repeatedly formed in the axial direction of the cylindrical body, and a slit body permanently installed at a predetermined position between the illumination and the cylindrical body;
When the cylindrical body is supported by the support portion at the inspection position and the surface of the cylindrical body is illuminated by the illumination through the slit body to form bright and dark stripes on the surface of the cylindrical body, the camera Evaluation means for evaluating the quality of the equipment state based on the light and dark gradation of each part of the light and dark stripes detected by photographing the cylindrical body,
The lowest gradation of the dark part of the light and dark stripes is included in the sensitivity range of the camera,
The evaluation is performed based on the gradation value of the lowest gradation for each dark part of the light and dark stripes,
The cylindrical body inspection apparatus is characterized in that the evaluation is performed based on a tendency of change in the gradation value of the lowest gradation of a plurality of dark portions arranged in the axial direction of the cylindrical body. A support portion that supports a cylindrical body as an inspection object to be rotatable in a circumferential direction at a predetermined inspection position;
Illumination for illuminating the outer surface of the cylindrical body;
A camera for photographing a detection region extending in the axial direction of the cylindrical body;
A plurality of light-shielding portions and light-transmitting portions are alternately and repeatedly formed in the axial direction of the cylindrical body, and a slit body permanently installed at a predetermined position between the illumination and the cylindrical body;
When the cylindrical body is supported at the inspection position by the support portion and the surface of the cylindrical body is illuminated by the illumination through the slit body to form light and dark stripes on the surface of the cylindrical body, the camera Evaluation means for evaluating the quality of the equipment state based on the light and dark gradation of each part of the light and dark stripes detected by photographing the cylindrical body,
The lowest gradation of the dark part of the light and dark stripes is included in the sensitivity range of the camera,
The evaluation is performed based on the gradation value of the lowest gradation for each dark part of the light and dark stripes,
The evaluation is performed based on whether or not the gradation value of the lowest gradation of each dark part of the light and dark stripes is within a predetermined allowable range set for each dark part . Forming means for forming a cylindrical body;
The cylindrical body inspection device according to claim 8 or 9, wherein the cylindrical body is subjected to a surface inspection as an inspection object,
The cylindrical body is sorted according to whether or not the inspection result in the cylindrical body inspection device satisfies a predetermined criterion, and when the predetermined criterion is satisfied, a determination unit that makes the cylindrical body a finished product,
A cylindrical body manufacturing system comprising: