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JP5158968B2 - Contact combustion type gas sensor - Google Patents
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JP5158968B2 - Contact combustion type gas sensor - Google Patents

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JP5158968B2
JP5158968B2 JP2008282662A JP2008282662A JP5158968B2 JP 5158968 B2 JP5158968 B2 JP 5158968B2 JP 2008282662 A JP2008282662 A JP 2008282662A JP 2008282662 A JP2008282662 A JP 2008282662A JP 5158968 B2 JP5158968 B2 JP 5158968B2
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sensitive layer
gas sensor
combustion type
type gas
particles
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JP2010112708A (en
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史朗 馬場
克一 芝崎
昌英 安田
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Riken Keiki KK
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Description

本発明は、表面に感応層を有する接触燃焼式ガスセンサ、より詳細には感応層の構造に関する。   The present invention relates to a catalytic combustion type gas sensor having a sensitive layer on the surface, and more particularly to the structure of the sensitive layer.

接触燃焼式ガスセンサは、原理的には特許文献1に見られるように電気抵抗体の外周に電気絶縁層を介して貴金属粒子からなる感応層を形成して構成されており、感応層に可燃性ガスが接触することにより生じる熱を電気抵抗体の抵抗値変化として検出するものである。
この感応層を構成するパラジウム粒子は、環境中の硫化水素に接触すると、触媒としての性能が劣化、いわゆる被毒を受けるという問題がある。
In principle, the contact combustion type gas sensor is constructed by forming a sensitive layer made of noble metal particles on the outer periphery of the electrical resistor via an electrical insulating layer as seen in Patent Document 1, and the sensitive layer is combustible. Heat generated by gas contact is detected as a change in the resistance value of the electrical resistor.
When the palladium particles constituting the sensitive layer come into contact with hydrogen sulfide in the environment, there is a problem that the performance as a catalyst is deteriorated, that is, so-called poisoning.

このため、ガス取り入れ口に硫化水素除去フィルタを配置して被毒を防止することも行われているが、被検出ガスの種類によってはフィルタに吸収され、測定誤差が生じるという問題もある。
特開平8−226908号公報
For this reason, a hydrogen sulfide removal filter is disposed at the gas inlet to prevent poisoning. However, depending on the type of gas to be detected, there is a problem that a measurement error occurs due to absorption by the filter.
JP-A-8-226908

本発明はこのような問題に鑑みてなされたものであって、その目的とするところは硫化水素による被毒を可及的に少なくした接触燃焼式ガスセンサを提供することである。   The present invention has been made in view of such problems, and an object of the present invention is to provide a catalytic combustion type gas sensor in which poisoning by hydrogen sulfide is minimized.

このような課題を達成するために本発明においては、電気抵抗体の外周に電気絶縁層を介して貴金属粒子からなる感応層を形成して感応層に可燃性ガスが接触することにより生じる熱を前記電気抵抗体の抵抗変化として検出する接触燃焼式ガスセンサにおいて、前記感応層が、結晶子径25.0〜26.0nmの複数のパラジウムの結晶子の集合体からなる粒子により構成されている。   In order to achieve such a problem, in the present invention, a heat sensitive layer made of noble metal particles is formed on the outer periphery of the electric resistor via an electric insulating layer, and heat generated by contact of the combustible gas with the sensitive layer is generated. In the catalytic combustion type gas sensor that detects the change in resistance of the electric resistor, the sensitive layer is composed of particles made of an aggregate of a plurality of palladium crystallites having a crystallite diameter of 25.0 to 26.0 nm.

本発明によれば、結晶子径25.0〜26.0nmの各粒子が感応層を形成しているため、感度の低下を招くことなく硫化水素に対する耐久性が向上し、被毒による感度低下を防止することができる。   According to the present invention, since each particle having a crystallite diameter of 25.0 to 26.0 nm forms a sensitive layer, durability against hydrogen sulfide is improved without causing a decrease in sensitivity, and a decrease in sensitivity due to poisoning is prevented. be able to.

そこで以下に本発明の詳細を図示した実施例に基づいて説明する。
図1は本発明のガスセンサの一実施例を示すものであって、白金などの比較的温度抵抗係数が大きな抵抗線をコイル状に整形した電気ヒータ1の外周には、良熱伝導性と電気絶縁性を有する多孔質粒子にパラジウム(Pd)を付着させた粒子2の泥状体を球状に焼結して感応層3を設けて構成されている。
Therefore, details of the present invention will be described below based on the illustrated embodiment.
FIG. 1 shows an embodiment of the gas sensor according to the present invention. The outer periphery of an electric heater 1 in which a resistance wire having a relatively large temperature resistance coefficient such as platinum is shaped like a coil is provided on the outer periphery of the electric sensor 1. A mud body of particles 2 in which palladium (Pd) is attached to porous particles having insulating properties is sintered into a spherical shape, and a sensitive layer 3 is provided.

この感応層3を構成する粒子2は、パラジウム(Pd)を溶解させた溶液に多孔質粒子、たとえばアルミナ粒子を投入して真空蒸発法などにより溶液の水分を可及的に減少させてから焼成して塊状または顆粒状とし、さらにこの塊状または顆粒状の固体を元の多孔質粒子程度に粉砕して粉体状に戻されて、焼成により固化されている。   The particles 2 constituting the sensitive layer 3 are fired after introducing porous particles such as alumina particles into a solution in which palladium (Pd) is dissolved and reducing the water in the solution as much as possible by a vacuum evaporation method or the like. Then, it is made into a lump or granule, and this lump or granule solid is further pulverized to the same level as the original porous particles, returned to a powder form, and solidified by firing.

つまり粒子2は、所定の粘度となるように有機粘度調整剤とともに泥状化してヒータ1に球状に整形して焼成されて上述の感応層3を構成している。   That is, the particles 2 are mud together with an organic viscosity modifier so as to have a predetermined viscosity, and are shaped into a spherical shape on the heater 1 and baked to form the sensitive layer 3 described above.

粒子2を構成する多孔質粒子のパラジウム(Pd)4は、焼結前は図2に示したようにその細穴2aに入り込んだり表面に付着した状態で担持されているが、焼成の後には粒子2のパラジウム(Pd)は、図3に示したように複数の結晶子4aからなる細粒4bとして存在している。   The porous particles palladium (Pd) 4 constituting the particles 2 are supported in a state of entering the fine holes 2a or adhering to the surface as shown in FIG. 2 before sintering. The palladium (Pd) of the particle 2 exists as fine particles 4b composed of a plurality of crystallites 4a as shown in FIG.

ところで本発明者らはその製造の過程で細粒4bを構成する結晶子4aのサイズによって硫化水素に対する耐性が異なることを発見した。この知見に基づいて各アルミナ粒子に付着しているパラジウム(Pd)の細粒4bを構成している結晶子4aのサイズ、つまり結晶子径を28.4nm、28.2nm、26.0nm、24.8nm、23.8nm、及び20.1nmに変化させたものを感応層3とするセンサを製作し、濃度25ppmの硫化水素を含む一定濃度の可燃性ガスを検出した。
なお、結晶子径の測定は、ラウエカメラなどによりデバイ環を測定することにより行った。
By the way, the present inventors have found that the resistance to hydrogen sulfide differs depending on the size of the crystallite 4a constituting the fine grain 4b in the course of the production. Based on this knowledge, the size of the crystallite 4a constituting the fine particles 4b of palladium (Pd) adhering to each alumina particle, that is, the crystallite diameter is 28.4 nm, 28.2 nm, 26.0 nm, 24.8 nm, 23.8 A sensor with the sensitive layer 3 changed to nm and 20.1 nm was fabricated, and a certain concentration of combustible gas containing 25 ppm hydrogen sulfide was detected.
The crystallite diameter was measured by measuring the Debye ring with a Laue camera or the like.

この結果、図4に示したように感応層3として結晶子径26.0nm、及び24.8nmのパラジウムの結晶子により構成されているガスセンサは、他の結晶子径のガスセンサよりも長時間、感度を維持することが判明した。   As a result, as shown in FIG. 4, the gas sensor composed of palladium crystallites having a crystallite diameter of 26.0 nm and 24.8 nm as the sensitive layer 3 has a longer sensitivity than gas sensors of other crystallite diameters. It was found to maintain.

なお、一般的に結晶子のサイズは、焼結の際の温度や時間を制御したり、目的金属の溶液の酸度により調整できることが知られている。   In general, it is known that the crystallite size can be adjusted by controlling the temperature and time during sintering or by the acidity of the solution of the target metal.

一例をあげるなら、焼成温度を500℃から1000℃まで変化させて感応層3を形成すると、温度により粒子径が表1のように変化するので、焼成温度を制御することにより高い耐性のセンサを効率的に製作することができる。
表1

Figure 0005158968
As an example, when the sensitive layer 3 is formed by changing the firing temperature from 500 ° C. to 1000 ° C., the particle diameter changes according to the temperature as shown in Table 1. Therefore, by controlling the firing temperature, a highly resistant sensor can be obtained. It can be manufactured efficiently.
table 1
Figure 0005158968

本発明の接触燃焼式ガスセンサの一実施例を模式的に示す図である。It is a figure which shows typically one Example of the contact combustion type gas sensor of this invention. 同上ガスセンサを構成する粒子の、焼成前の状態を模式的に示す図である。It is a figure which shows typically the state before baking of the particle | grains which comprise a gas sensor same as the above. 同上ガスセンサを構成する粒子の、焼成後の状態を模式的に示す図である。It is a figure which shows typically the state after baking of the particle | grains which comprise a gas sensor same as the above. 硫化水素が存在する環境下での時間と感度の変化との関係を結晶子径ごとに示す線図である。It is a diagram which shows the relationship between the time in the environment where hydrogen sulfide exists, and the change of a sensitivity for every crystallite diameter.

符号の説明Explanation of symbols

1 電気ヒータ 2 粒子 3 感応層 4 パラジウム 4a パラジウムの結晶子 4b パラジウムの細粒   1 Electric heater 2 Particles 3 Sensitive layer 4 Palladium 4a Palladium crystallite 4b Palladium fine particles

Claims (1)

電気抵抗体の外周に電気絶縁層を介して貴金属粒子からなる感応層を形成して感応層に可燃性ガスが接触することにより生じる熱を前記電気抵抗体の抵抗変化として検出する接触燃焼式ガスセンサにおいて、
前記感応層が、結晶子径25.0〜26.0nmの複数のパラジウムの結晶子の集合体からなる粒子により構成されている接触燃焼式ガスセンサ。
A contact combustion type gas sensor that forms a sensitive layer made of noble metal particles on the outer periphery of an electric resistor and detects heat generated by contact of the combustible gas with the sensitive layer as a resistance change of the electric resistor. In
The catalytic combustion type gas sensor, wherein the sensitive layer is composed of particles made of an aggregate of a plurality of palladium crystallites having a crystallite diameter of 25.0 to 26.0 nm.
JP2008282662A 2008-11-04 2008-11-04 Contact combustion type gas sensor Expired - Fee Related JP5158968B2 (en)

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US7526942B2 (en) * 2003-06-12 2009-05-05 Riken Keiki Co., Ltd. Contact combustion gas sensor
JP4794398B2 (en) * 2006-09-08 2011-10-19 フィガロ技研株式会社 Manufacturing method of SnO2 gas sensor
JP5134599B2 (en) * 2008-08-25 2013-01-30 独立行政法人産業技術総合研究所 Catalyst for CO gas sensor, paste, and CO gas sensor

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