JP5207844B2 - Micro chemical plant and manufacturing method thereof - Google Patents

Description

  The present invention relates to a microchemical plant constituted by microchannels which are minute passages and a method for producing the same.

  The target microchemical plant uses a millimeter-sized to micron-sized passage formed on a substrate or a space portion that forms the passage. For example, a passage such as a reactor has a large surface area per volume of a reaction solution. It is excellent in diffusibility of reaction heat generated in the inside and temperature control when cooling from the outside, and in a minute passage, molecular dispersion is large, and uniform mixing can be easily realized in a short time. These characteristics are useful, for example, as a microreaction apparatus such as chemistry and biochemistry, a microanalysis apparatus, a microelectrophoresis apparatus, etc.

  By the way, as the substrate, resin is used together with glass, metal and ceramic. As a manufacturing method, for example, there is a configuration in which a passage space is formed in one base material and the space is closed by joining the other substrate to the one substrate. In addition, as a resin configuration example, Patent Document 1 discloses, as a microchemical plant particularly excellent in chemical resistance, a first fluororesin layer made of an amorphous fluororesin and an amorphous fluororesin bonded thereto. The structure provided with the channel | path which consists of the space part (concave part) formed in the joint surface side of the 2nd fluororesin layer which becomes and the 2nd fluororesin layer of the 1st fluororesin layer is disclosed. As the manufacturing method, a step of forming the first fluororesin layer on a first substrate such as glass, a step of forming a passage made of a space (concave portion) in the first fluororesin layer, At least a step of forming the second fluororesin layer on the substrate and a step of joining the surface of the first fluororesin layer and the surface of the second fluororesin layer are performed.

On the other hand, in Patent Document 2, when both base materials are joined with a liquid adhesive, the coating thickness may be uneven or it is difficult to remove the solvent. The manufacturing method which closes the space part (groove part) provided in the surface facing the other base material of one base material by using and bonding is formed is disclosed. Here, the material of the base material is arbitrary.
JP 2005-279493 A JP 2007-136292 A

  In the manufacturing method of Patent Document 1, it is described that the passage space (concave portion) can be formed by selective etching, dry etching, and a method in which a convex mold is engraved in a heated state. However, with etching and engraving methods, it is difficult to form passage spaces (recesses) in micron size with a uniform width and depth with high precision, and so-called functionality with various catalysts provided in part of the passages. Even if it wants to be a passage, it cannot be implemented easily and lacks mass productivity. In the manufacturing method of Patent Document 2, it is described that the passage space (groove) can be formed by micromachining or etching, but there is a problem similar to that of Patent Document 1.

  From the above-mentioned background, the present inventors have studied the material selection of the base material and the method of forming the functional passage. As a result, the resin is used as the base material and the passage formation method is devised with high accuracy and easy. Thus, it was found that a functional passage can be formed, and the present invention has been achieved. That is, the object of the present invention is, as a microchemical plant and a manufacturing method thereof, particularly excellent in chemical resistance, and a functional passage having a catalyst attached to a part of the passage is highly accurate, easy to manufacture, and excellent in mass productivity. There is to provide a configuration.

The present invention of claim 1 for achieving the above object, there is provided a method for producing a micro-chemical plant having a passage provided excellent substrate chemical resistance provided in a part of the catalyst, the While incorporating the catalyst in the cylinder and using what is provided at both ends of the cylinder to prevent the catalyst from coming off , the resin powder is used as the base material, and the cylinder is disposed in the resin powder. A pre-forming step for compressing, a sintering step for firing the compressed body obtained in the pre-forming step, and the passage leading to the cylindrical body by machining such as a drill in the sintered body obtained in the sintering step. It is characterized by passing through a passage forming step for forming the.

The invention according to claim 2 is a method of manufacturing a microchemical plant having a passage provided on a part of a base material having excellent chemical resistance and partially provided with a catalyst, the cylinder having the catalyst incorporated therein state body, and with a core consisting of the cylindrical body at both ends in the mesh material the passage forming wire material which projects through the, the resin powder as the base material, to the resin powder, was placed the in children In addition to calcining the preform obtained in the preforming step and the compact obtained in the preforming step, the wire for forming the passage of the core is drawn out from the compact or the sintered compact obtained by calcining the compact. It is characterized by undergoing a core removal step for forming a passage.

Invention of Claim 3 is a manufacturing method of the micro chemical plant which has the channel | path which was provided in the base material excellent in chemical-resistance, and provided the catalyst in part, Comprising : The cylinder which incorporates the said catalyst state body, and with a core consisting of the cylindrical body at both ends in the mesh material the passage forming wire material which projects through the, the resin powder as the base material, to the resin powder, was placed the in children in a preforming step of compressing, the with firing the resultant compact at the preliminary molding step, the obtained sintered body is decomposed removing the passage forming wire material before SL core at the firing time of the heat It is characterized by undergoing a sintering / core removal step for forming a passage. In the above invention, “the core is decomposed and removed by heat during firing” is a configuration in which the core is decomposed by heat, vaporized or incinerated and removed, and the core is melted and removed by heat. including.

The present invention of claim 4 is a method for manufacturing a microchemical plant having a passage provided in a part of a catalyst provided on a base material excellent in chemical resistance, and incorporating the catalyst. cylindrical body, and with a core consisting of the cylindrical body at both ends in the mesh material the passage forming wire material which projects through the, the resin powder is used as the base material, to the resin powder, placing the in children A preforming step for compressing in a state of being pressed, a sintering step for firing the compressed body obtained in the preforming step, and the wire for forming the passage of the core from the sintered body obtained in the sintering step. It is characterized by undergoing a core removal step of chemically melting to form the passage.

  In the first aspect of the invention, as a base material resin, for example, as a microchemical plant such as various reactors and analyzers having excellent chemical resistance, heat resistance, and weather resistance by simply selecting a fluororesin powder such as PTFE. In addition, it is possible to efficiently form a functional passage in which the catalyst is retained by going through a preforming step in which the catalyst is arranged in the resin powder, a sintering step, and a passage forming step by machining. For this reason, the production method of the present invention is excellent in mass productivity even if it is a functional passage, thereby contributing to the expansion of the application field of micro chemical plants.

  In the invention of claim 2, as a substrate resin, for example, as a microchemical plant such as various reactors and analyzers excellent in chemical resistance, heat resistance and weather resistance simply by selecting fluororesin powder such as PTFE. In addition, in the core removal process, the functional passage with the catalyst held in place is formed by drawing out the core from the compact obtained in the preforming process or the sintered body obtained by firing the compact to form a passage. Can be well formed. For this reason, the production method of the present invention is excellent in mass productivity even if it is a functional passage, thereby contributing to the expansion of the application field of micro chemical plants.

  In the invention of claim 3, as a substrate resin, for example, as a microchemical plant such as various reactors and analyzers excellent in chemical resistance, heat resistance and weather resistance simply by selecting a fluororesin powder such as PTFE. It becomes optimal and can be molded at a low temperature in the sintering process, and the core with a part of the catalyst inserted in the compression body is decomposed and removed by the heat during firing, and the catalyst is created at the same time as the production of the sintered body It is possible to efficiently form a functional passage that is secured. For this reason, the production method of the present invention is excellent in mass productivity even if it is a functional passage, thereby contributing to the expansion of the application field of micro chemical plants.

  In the invention of claim 4, as in the case of claim 1, various reaction devices and analyzers excellent in chemical resistance, heat resistance, and weather resistance can be obtained simply by selecting a fluororesin powder such as PTFE as the base resin. In the sintering process, the compacted body can be fired into a sintered body at a low temperature, and the core that has partly held the catalyst inserted in the sintered body is chemically dissolved. And functional passages can be formed efficiently. For this reason, the production method of the present invention is excellent in mass productivity even if it is a functional passage, thereby contributing to the expansion of the application field of micro chemical plants.

Further, in the invention of claim 1, since the catalyst is provided in the sintered body in a state where it is put in the cylinder and protected by the mesh material on both sides, it is easy to integrate the catalyst so as not to move carelessly in the cylinder, Filtering action of the mesh material, that is, the catalyst is less likely to be clogged, and high quality can be realized. The invention of claims 2 4, in addition to such work-effective, since the core has a tubular body passage forming wire protruding through the mesh material at both ends of the positioning of the passage forming wire material Can be performed accurately.

The inventions of claim 5, as a micro-chemical plant having a passage provided provided excellent substrate chemical resistance to some catalysts, those comprising a benefit of claim 1-4 Can be provided.

  Hereinafter, as a method for manufacturing a microchemical plant according to the present invention, a first embodiment corresponding to claim 1, a second embodiment corresponding to claim 2, a third embodiment corresponding to claim 3, and claim 4 are provided. The 4th form corresponding to 1 and the 5th form which developed them are explained. In this description, the base material common to each form and the catalyst or the core for forming a passage are described, and then the main part is described in detail for each form.

(Substrate) The substrate used in the manufacturing method of each embodiment may be a chemical-resistant resin powder satisfying characteristics or performance according to the purpose of use. For example, it is a fluororesin, and commercially available products include PTFE (tetrafluoroethylene) resin, PFA (tetrafluoroethylene / perfluoroalkoxyethylene copolymer) resin, FEP (tetrafluoroethylene / hexafluoropropylene copolymer). ) Resin, ETFE (tetrafluoroethylene / ethylene copolymer) resin, PVDF (vinylidene fluoride) resin, PVF (vinyl fluoride) resin, CTFE (chlorotrifluoroethylene) resin, ECTFE (ethylene / chlorotrifluoroethylene) ) Resin and AF (amorphous fluoropolymer) resin. These are thermoplastic resins that are excellent in chemical resistance, heat resistance, weather resistance, wear resistance, and the like, and thus are suitable as base materials for microchemical plants. Further, such a resin powder may be mixed with a filler such as carbon fiber powder, preferably in the range of about 1 to 15% by weight.

(Catalyst) The catalyst 15 used in the method of the present invention is incorporated in the cylindrical cylinder 10 as shown in FIGS. 1A to 1C, and is provided inside the both ends of the cylinder 10. It is prevented from coming off via the material 13. As shown in FIG. 2 (d), the mesh material 13 may be provided in a double manner with the hollow portion 10 a interposed at both ends of the cylindrical body 10.

  Here, a tube made of Teflon (trade name), which is a fluororesin, is used as the tube body 10, but other materials may be used as long as the shape is maintained at the firing temperature in the sintering process described later. . The shape and length are appropriately designed in consideration of the diameter of the passage to be formed and the size of the catalyst 15 to be used.

  The mesh members 13 and 14 are made of a Teflon (trade name) net, that is, a commercially available Teflon mesh, but the material maintains the shape at the firing temperature in the sintering step, as with the cylinder 10. Any other material may be used. In this mesh material configuration, the mesh is several microns to several tens of microns and is press-fitted inside both ends of the cylinder 10. This is to prevent inadvertent movement of the catalyst 15 in the cylinder 10 and to protect the catalyst 15 from clogging due to impurities flowing into the cylinder 10.

  Examples of the catalyst 15 include a nickel catalyst. The material should just hold | maintain a shape with the calcination temperature in a sintering process. The shape is illustrated as a roll having a plurality of holes 15a penetrating in the longitudinal direction, but it may be a homogeneous catalyst such as liquid or a heterogeneous catalyst such as granular or block. The shape is arbitrary.

(Core) As shown in FIGS. 2 (a) to 2 (c), the passage-forming core 1 used in the method of the present invention has a cylindrical body 10 containing the catalyst 15 of FIG. The wire 11 for channel | path formation protruded through. In this case, the mesh member 13 also serves to position and hold the corresponding ends of the passage forming wire 11 and the wire 12 shown in FIG.

  The wire 11 is a thin rod or wire for forming a passage, but may be tubular. The outer diameter of such a wire or tube is set according to the intended passage, but is usually from millimeter to micron size. The shape is also arbitrary, and may be set to a Y shape like the wire 12 in FIG. In the case of the second form of FIG. 4, the material may be any material that can be decomposed and removed at the firing temperature, such as wax, paper, or organic fiber. In the case of the third form in FIG. 5, it is made of acid or alkali-soluble glass or resin.

  2C, the mesh material is double, that is, the outer mesh material 13, the cavity 10a, and the inner mesh material 14 are arranged at both ends of the cylinder 10. This is because, for example, even if the mesh material 13 is clogged, the normal action of the catalyst 15 can be maintained by the presence of the cavity 10a and the mesh material 14, or even if the catalyst 15 is relatively small, Make sure that it can be accommodated. In the above core configuration, for example, if the mesh material 13 is provided on both sides of the cylinder 10 and the wire 11 is constituted by a tube, the gas generated in the sintering process described later is generated. It becomes easy to release to the outside, and thermal expansion caused by gas generation can be reduced or eliminated.

(First Embodiment) The manufacturing method of FIG. 3 corresponds to claim 1 and includes a pre-forming step, a sintering step, and a passage forming step. First, in the pre-molding step, the base material resin powder was filled in a state where the cylinder 10 containing the catalyst 15 of FIG. 1 was disposed in the cavity of the mold using a compression mold. After that, compression molding is performed. Here, the mold is the same as that normally used for compression molding, and the mold body forms a powder charging part, and has an upper and lower punch that moves up and down with respect to the powder charging part. doing.

  In the case of the compressed body corresponding to the sintered body 2A of (a), for example, the lower punch is raised with respect to the powder charging portion of the die body, and the compressed body is formed by the powder charging portion and the upper end surface of the lower punch. A corresponding cavity is defined. Next, after about half of the total amount of resin powder is charged into the cavity, the cylinder 10 containing the catalyst 15 of FIG. 1 is positioned on the charged resin powder, and the arranged cylinder is arranged. The remaining amount of resin powder is put on the body 10.

  Then, from the above resin powder charged state, the upper punch is lowered and simultaneously the lower punch is raised to compress and compress the fluororesin powder. Thus, in the pre-forming, the double pressing method of the upper and lower punches is preferable. However, in principle, a one-push method in which the lower punch is fixed and pressed by the upper punch is also possible. Further, the pressure applied in the preforming is 15 to 50 MPa when the resin powder is a fluororesin (PTFE resin) powder alone, and the above filler is mixed into the fluororesin (PTFE resin) powder from various tests. In some cases, about 40 to 150 MPa is preferable.

(Sintering step) In this step, the compact obtained in the pre-forming step is put in a heating furnace and heated to a temperature slightly higher than the melting point, and the powders are fused together in a core insertion state. The heating furnace is preferably a hot air circulation type from the viewpoint of uniform firing. Although the firing temperature varies depending on the resin used, for example, in the case of a fluororesin, it is 400 ° C. or lower, preferably 360 to 380 ° C. In the sintering step, when the compressed body is heated to a firing temperature, it is formed into a sintered body 2A that is baked by mutual diffusion of molecules, and a cylindrical body 10 containing a catalyst 15 is formed into the sintered body 2A. Buried. The sintered body 2A is treated by air cooling at room temperature as a cooling after firing.

(Passage Forming Step) In the step (b), the sintered body 2A after machining is formed by machining the passage portion a leading to the cylinder 10 containing the catalyst 15 with respect to the sintered body 2A obtained in the sintering step. Is shown. In machining, for example, a drill or similar precision drilling machine is used. In this example, each passage portion a is provided in a straight line toward the mesh member 13 at both ends of the cylindrical body with respect to the cylindrical body 10 containing the catalyst 15. For this reason, in this sintered body 2A, the passage 21 is constituted by the cylindrical body 10 incorporating the one passage portion a and the catalyst 15 and the other passage portion a.

  The microchemical plant 20 in FIG. 3C is an example in which the connecting pipe 6 is connected to both ends (that is, the passage portions a at both ends) of each passage 21 formed in the sintered body 2A of FIG. Therefore, in the case of the microchemical plant 20, for example, a fluid such as a test solution can be introduced into the passage 21 from the one side connection pipe 6 and discharged from the other side connection pipe 6. In this case, in this configuration, in each of the passages 21 described above, when the target solution or the mixed gas flows from the one passage portion a to the other passage portion a, that is, when the catalyst 15 passes through the cylindrical body 10, The reaction starting action can be obtained.

(Second Embodiment) The manufacturing method of FIG. 4 corresponds to claim 2 and requires a preforming step and a core removing step. First, in the preforming step, using the compression mold, after filling the resin powder for a base material with the passage-forming core 1 of FIG. 2 disposed in the cavity of the mold, Compression molding. Here, the mold is the same as that normally used for compression molding, and the mold body forms a powder charging part, and has an upper and lower punch that moves up and down with respect to the powder charging part. doing.

  That is, in the case of the compressed body 3 of (a), for example, the lower punch is raised with respect to the powder charging portion of the die body, and the cavity corresponding to the compressed body 3 is defined by the powder charging portion and the upper end surface of the lower punch. Form. Next, after about half of the total amount of resin powder is charged into the cavity, the core 1 is positioned and disposed on the charged resin powder, and the resin powder is placed on the disposed core 1. Insert the remaining amount. In this case, the passage forming wire 11 on both sides is set to a length that slightly protrudes from the compression body 3 on which both ends are formed, and is disposed in positioning holes provided on the opposing side walls of the mold body. Then, from the state where the resin powder is charged, the upper punch is lowered and simultaneously the lower punch is raised to compress and compress the fluororesin powder. These are the same as in the first embodiment except for the core 1. Moreover, what was described in the first embodiment also applies to the pressing force in the preforming.

(Core removal step) In this step, the cores 11 on both sides are formed by pulling out the cores 11 from the compressed body 3 obtained in the preforming step, or each core is formed from the sintered body 3A obtained by firing the compressed body 3. 11 is pulled out to form a passage 11a. That is, in the former case, the compressed body 3 from which the core 11 has been pulled out, and in the latter case, the compressed body 3 obtained in the preforming step is placed in a heating furnace and heated to a temperature slightly higher than the melting point to obtain a powder. We fuse together. The firing conditions and the treatment after sintering are the same as in the first embodiment. In this configuration, when the compressed body 3 is heated to the firing temperature, it is formed into a sintered body 3A baked by mutual diffusion of molecules. In the latter case, each core 11 is pulled out from the sintered body 3A to form a passage 11a. The same (b) shows the sintered body 3A thus produced. Each passage 31 includes passage portions 11a and 11a corresponding to the wires 11 and 11 and an inner diameter passage portion of the cylindrical body 10 between the passage portions. The above-described catalyst 15 is incorporated in the inner diameter passage portion of the cylindrical body 10.

  The microchemical plant 30 in FIG. 4C is an example in which the connecting pipe 6 is connected to both ends (that is, the passage portions 11a at both ends) of each passage 31 formed in the sintered body 3A of FIG. Therefore, in the case of the microchemical plant 30, for example, a fluid such as a test solution can be introduced into the passage 11 a from the one side connection pipe 6 and discharged from the other side connection pipe 6. In this case, in this configuration, in each of the passages 31 described above, a reaction promoting action of the catalyst 15 when the target solution or mixed gas is flowing from the one passage portion 11a to the other passage portion 11a, that is, when passing through the cylindrical body 10, The reaction starting action can be obtained.

(Third Embodiment) The manufacturing method shown in FIG. First, in the preforming step, using the compression mold, after filling the resin powder for a base material with the passage-forming core 1 of FIG. 2 disposed in the cavity of the mold, Compression molding. Here, the mold is the same as that normally used for compression molding, and the mold body forms a powder charging part, and has an upper and lower punch that moves up and down with respect to the powder charging part. doing.

  That is, in the case of the compressed body 3 of (a), for example, the lower punch is raised with respect to the powder charging portion of the die body, and the cavity corresponding to the compressed body 3 is defined by the powder charging portion and the upper end surface of the lower punch. Form. Next, after about half of the total amount of resin powder is charged into the cavity, the core 1 is positioned and disposed on the charged resin powder, and the resin powder is placed on the disposed core 1. Insert the remaining amount. Then, from the state where the resin powder is charged, the upper punch is lowered and simultaneously the lower punch is raised to compress and compress the fluororesin powder. These are the same as in the second embodiment except for the core 1. Moreover, what was described in the first embodiment also applies to the pressing force in the preforming.

(Sintering process) In this process, the compact 3 obtained in the preforming process is put into a heating furnace and heated to a temperature slightly higher than the melting point, and the powders are fused together in a state where the core is inserted. The heating furnace is preferably a hot air circulation type from the viewpoint of uniform firing. Although the firing temperature varies depending on the resin used, for example, in the case of a fluororesin, it is 400 ° C. or lower, preferably 360 to 380 ° C.

  In the sintering process, when the compressed body 3 is heated to the firing temperature, it is formed into a sintered body 3A that is baked by mutual diffusion of molecules, and of the inserted core 1, the cylindrical body 10 Each wire 11 protruding at the front and rear ends is decomposed and removed by heat during firing, that is, vaporized or melted and removed. That is, in this configuration, a material that is decomposed at the firing temperature is used as each wire 11 of the core 1, and a plurality of passages 31 are formed by thermally decomposing and removing the sintered body 3A from which the wire itself can be obtained. . The sintered body 3A is treated by air cooling at room temperature as a cooling after firing. Then, each channel | path 31 is comprised by the channel | path parts 11a and 11a corresponding to the wire materials 11 and 11, and the internal-diameter channel | path part of the cylinder 10 between these channel | path parts. The above-described catalyst 15 is incorporated in the inner diameter passage portion of the cylindrical body 10.

  The microchemical plant 30 in FIG. 5C is an example in which the connecting pipe 6 is connected to both ends (that is, the passage portions 11a at both ends) of each passage 31 formed in the sintered body 3A in FIG. Therefore, in the case of the microchemical plant 30, for example, a fluid such as a test solution can be introduced into the passage 11 a from the one side connection pipe 6 and discharged from the other side connection pipe 6. In this case, in this configuration as well as in the second embodiment, in each passage 31 described above, the catalyst 15 is mixed while the target solution or mixed gas is flowing from the one passage portion 11a to the other passage portion 11a, that is, when passing through the cylindrical body 10. Reaction promoting action and reaction initiating action are obtained.

(Fourth Mode) The manufacturing method of FIG. 6 corresponds to claim 4 and includes a preforming step, a sintering step, and a core removing step. Among these, the preforming process is almost the same as the third embodiment except for the core. That is, in this step, a compression molding die is used, the core resin powder is filled in the state where the core 1A is disposed in the cavity of the die, and then compression molding is performed. Here, the mold is the same as that normally used for compression molding, and the mold body forms a powder charging part, and has an upper and lower punch that moves up and down with respect to the powder charging part. doing. The core 1A is different from the core 1 in FIG. 2 in that one of the wire rods 11 on both sides is changed to a Y-shaped wire rod 12, but the other points are the same. The material is such that the wires 11 and 12 do not change shape at the firing temperature and are chemically dissolved, and are preferably glass or resin.

  In the case of the compressed body corresponding to the sintered body 4A of (a), for example, the lower punch is raised with respect to the powder charging portion of the die body, and the compressed body 1 is formed by the powder charging portion and the upper end surface of the lower punch. A cavity corresponding to is defined. Next, after about half of the total amount of resin powder is charged into the cavity, the core 1A is positioned on the charged resin powder and the resin powder is placed on the core 1A. Fill the remaining amount.

  From the charged state of the resin powder, the upper punch is lowered and simultaneously the lower punch is raised to compress and compress the fluororesin powder. Thus, in the pre-forming, the double pressing method of the upper and lower punches is preferable. These are the same as the above embodiments except for the core 1A. In addition, what is described in each form also applies to the point of pressure applied in preforming.

(Sintering process) In this process, a hot-air circulating heating furnace is used, and the compact obtained in the preforming process is put into the heating furnace and heated to a temperature slightly higher than the melting point, and the powder is inserted into the core. We fuse together. In this case as well, although the firing temperature varies depending on the resin used, for example, in the case of a fluororesin, it is 400 ° C. or lower, preferably 360 to 380 ° C. After firing, it is treated by air cooling at room temperature as cooling.

(Core removal step) In this step, for example, the wires 11 and 12 of the inserted core 1A are chemically treated by immersing the sintered body 4A of FIG. It is removed by dissolving. That is, in this configuration, for example, the wires 11 and 12 of the core 1A are made of acid or alkali-soluble glass, and the wires 11 and 12 are inserted into the sintered body 4A from the inside of the sintered body 4A. The passage 41 is formed by melting. The passage 41 includes passage portions 11a and 12a corresponding to the wires 11 and 12, and an inner diameter passage portion of the cylindrical body 10 between the passage portions. The above-described catalyst 15 is incorporated in the inner diameter passage portion of the cylindrical body 10.

  The microchemical plant 40 in FIG. 6C is obtained by attaching the connecting pipe 6 to the end of each passage portion 11a, 12a of the sintered body 4A in FIG. 6B. Therefore, in the case of the microchemical plant 30, for example, a fluid such as a test solution can be introduced into each passage 12 a from the one side connection pipe 6 and the connection pipe 6, and can be discharged from the other side connection pipe 6 through the cylinder 10. It becomes. In this case, even in this configuration, in the above-described passage 41, the reaction of the catalyst 15 is promoted when the target solution or the mixed gas is flowing from the one passage portion 12 or 12a to the other passage portion 11a, that is, when passing through the cylindrical body 10. And a reaction start action can be obtained.

(5th form) The microchemical plant 50 of FIG.7 (b) has shown the example which laminated | stacked the sintered compact 2A or 3A which formed the channel | path with the above manufacturing method, and the plurality of sintered compacts 4A. The microchemical plant 50 in the figure includes a sintered body 2A or 3A having a passage a or 11a that is the same as or similar to the first form or the second form, and a sintered body having a passage 12a that is the same or similar to the third form. 4 A of laminated bodies are laminated | stacked, the channel | path ends of the same side of sintered compact 2A or 3A are connected with the connection pipe 9, and the connection pipe | tube 6 is attached to the other channel | path end.

  That is, the above structural features are as follows. As shown in FIG. 7A, the sintered body 2A or 3A having the passages a or 11a and the passages 12a and 11a created in the first to third forms. By arranging a plurality of 4A layers, for example, the sintered body 2A or 3A and the sintered body 4A are on the same side, and the left passage portion a or 11a of the sintered body 2A or 3A and the Y of the sintered body 4A A first passage (for example, an introduction first passage) connected to one of the shaped passage portions 12a by a connecting pipe 9, and a right passage portion 11a of the sintered body 2A or 3A and a Y-shaped passage portion 12a of the sintered body 4A. A second passage (for example, an introduction second passage) that is connected to the other by a connecting pipe 9, and a passage on the opposite side of the sintered body 4A from the joining portion of the Y-shaped passage portion 12a of the sintered body 4A through the cylindrical body 10 Formed as a third passage (discharge side passage) leading to the portion 11a, each sintered body having a plurality of bolts C- are integrated in such simple fastening members and not shown adhesive nuts 8 or the like. For example, the target solution and the mixed gas flow through the first passage (for example, the introduction first passage) and the second passage (for example, the introduction second passage), and each of the sintered bodies 2A or 3A. The reaction promoting action and the reaction starting action of the catalyst 15 can be obtained when the cylinders 10 constituting the passages 21 or 31 are respectively passed. Further, when the target solution or mixed gas passes through the cylindrical body 10 of the sintered body 4A in the middle of the third passage (discharge side passage), the reaction promoting action and the reaction starting action of the catalyst 15 are obtained. It is supposed to be.

  Note that the configuration in FIG. 7 is an example of a plurality of stacked layers. As for the passage design, not only the passage is formed between the opposing side surfaces of the sintered body, but, for example, in the case of a rectangular sintered body, the entrance of the passage is one side on the left and right, one side on the front and back, both sides on the left and right It can be arranged according to the purpose, such as the front and back side surfaces.

In addition, as described above, the present invention is based on the sintered body having the functional passages created in the first to fourth embodiments, and the units 2A, 3A, and 4A are used as the microchemical plant 20, In addition to constituting 30 and 40, by laminating a plurality of the unit sintered bodies, it is easy to form a complicated functional passage, and further expansion of the application field can be expected. Furthermore, the microchemical plant 20, 30, 40 comprising the unit sintered bodies 2A, 3A, 4A requires, for example, a fluid reservoir, a junction, and a branching portion together with the passages at appropriate locations of each sintered body. It can be provided according to.

(A) is a schematic external view of the cylinder containing the catalyst used in the manufacturing method of the first embodiment, (b) is a sectional view taken along the line AA of (a), and (c) shows an example of the shape of the catalyst. . (A) is a schematic external view of a core for forming a passage used in the manufacturing method of the second embodiment to the fourth embodiment, (b) is a sectional view taken along the line A1-A1 of (a), and (c) is a view of the core. A modification is shown. (A) shows the sintered body obtained in the sintering step of the manufacturing method of the first embodiment, (b) shows the sintered body after machining, and (c) shows a micro-machine using the sintered body. Indicates a chemical plant. (A) shows the compressed body obtained in the pre-compression process of the manufacturing method of the second embodiment, (b) shows the sintered body that has been fired, and (c) shows a microchemical plant using the sintered body. Is shown. (A) shows the compressed body obtained in the pre-compression process of the manufacturing method of the third embodiment, (b) shows a sintered body that has been fired, and (c) shows a microchemical plant using the sintered body. Is shown. (A) shows the sintered body obtained in the sintering step of the manufacturing method of the fourth embodiment, (b) shows the sintered body after the core has been chemically removed, and (c) shows the sintered body. A microchemical plant using a ligation is shown. (A) shows the some sintered compact produced with the manufacturing method of each form, (b) has shown the microchemical plant which laminated | stacked the some sintered compact.

DESCRIPTION OF SYMBOLS 1,1A ... Core 2A, 3A, 4A ... Sintered body 3 ... Compression body 6, 9 ... Connection pipe 10 ... Cylindrical body 11, 12 ... Core wire (passage formation part)
13, 14 ... Mesh material 15 ... Catalyst (15a is a hole)
21 ... passage (a is a passage part)
31 ... passage (11a is a passage part corresponding to a wire)
41 ... passage (11a and 12a are passage portions corresponding to the wire)
20, 30, 40, 50 ... micro chemical plant

Claims (5)

A method of manufacturing a microchemical plant having a passage provided in a part of a catalyst provided on a substrate having excellent chemical resistance,
While incorporating the catalyst in a cylinder, using what was provided at both ends of the cylinder and retained by a mesh material,
A preforming step of compressing resin powder as the base material in a state where the cylindrical body is disposed in the resin powder;
A sintering step of firing the compact obtained in the preforming step;
A method of manufacturing a microchemical plant, wherein the sintered body obtained in the sintering step is subjected to a passage forming step for forming the passage leading to the cylindrical body by machining such as a drill. A method of manufacturing a microchemical plant having a passage provided in a part of a catalyst provided on a substrate having excellent chemical resistance,
Using a core composed of a cylindrical body containing the catalyst, and a passage forming wire projecting through a mesh material at both ends of the cylindrical body,
The resin powder as the base material, a preforming step of compressing in a state in which the said resin powder, placing the in children,
A core removing step of firing the compressed body obtained in the preforming step and drawing the passage forming wire of the core from the compressed body or a sintered body obtained by firing the compressed body to form the passage. The manufacturing method of the micro chemical plant characterized by passing through. A method of manufacturing a microchemical plant having a passage provided in a part of a catalyst provided on a substrate having excellent chemical resistance,
Using a core composed of a cylindrical body containing the catalyst, and a passage forming wire projecting through a mesh material at both ends of the cylindrical body,
The resin powder as the base material, a preforming step of compressing in a state in which the said resin powder, placing the in children,
Wherein with firing the resultant compact at the preliminary molding step, during sintering, which was obtained sintered body is decomposed and removed the passage forming wire material before SL core in baking heat during formation of the passageway A method of manufacturing a microchemical plant, characterized by undergoing a child removal step. A method of manufacturing a microchemical plant having a passage provided in a part of a catalyst provided on a substrate having excellent chemical resistance,
Using a core composed of a cylindrical body containing the catalyst, and a passage forming wire projecting through a mesh material at both ends of the cylindrical body,
The resin powder used as the base material, to the resin powder, and preforming step of compressing in the state in which the said in children,
A sintering step of firing the compact obtained in the preforming step;
A microchemical plant manufacturing method comprising: a core removal step of chemically melting the passage forming wire of the core from the sintered body obtained in the sintering step to form the passage. . A microchemical plant having a passage provided in a part of a catalyst provided on a base material excellent in chemical resistance, which is produced by the manufacturing method according to any one of claims 1 to 4. A micro chemical plant.

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