JP5264656B2 - Multi-DOF active vibration control device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a multi-degree-of-freedom active vibration damping device enlarging the maximum vibrating damping force and maximum vibration damping torque applicable to a vibration damping object. <P>SOLUTION: The device for damping vibration by applying triaxial vibration damping force and vibration damping torque offsetting three degrees of freedom of linear vibration and rotational vibration generated to the vibration damping object, is equipped with: a base plate mounted to the vibration damping object; six linear motion links expansible in predetermined directions respectively with one ends fixed in a displacement restricted manner to the base plate; a movable mass supported in a displacement restricted manner to the other end of each linear motion link; a displacement detecting means for detecting the amount of expansion of each linear motion link; a vibration detecting means for detecting vibration components generated to the vibration damping object; and a control means for controlling the expansion operation of each linear link according to the amount of expansion detected by the displacement detecting means and the vibration components detected by the vibration detecting means. Fixed points of the respective linear motion links to the base plate and the movable mass are arranged to reduce a distance between the base plate and the movable mass. <P>COPYRIGHT: (C)2011,JPO&amp;INPIT

Description

  The present invention relates to a multi-degree-of-freedom active vibration damping device that is used to remove vibrations having multiple degrees of freedom transmitted to a high-precision observation instrument.

  In a high-precision observation instrument, when vibration is transmitted even from the outside, the observation resolution may deteriorate and the observation result may be greatly hindered. Therefore, conventionally, the installation housing such as the floor and the high-precision observation equipment are connected to the high-precision observation equipment via the vibration isolation table using vibration-proof rubber, spring / damper system, etc. A method for removing the vibrations is used. In this case, vibrations from the installation housing can be removed, but vibrations transmitted from other than the installation housing to the high-precision observation equipment, such as vibrations generated by equipment installed on the vibration isolation table, should be removed. I can't. Therefore, an active vibration damping device has been developed that absorbs vibration energy by applying a vibration damping force that cancels the generated vibration to a device that generates vibration.

  In many cases, this active vibration damping device generates an inertial force F = Mα by applying a uniaxial acceleration α to a movable mass (movable body) of mass M, and generates a device to be controlled. By canceling the vibration with the inertial force, a one-degree-of-freedom active vibration damping device that removes vibration in one axial direction (movable mass driving direction) is obtained. In order to remove vibrations having a plurality of degrees of freedom with such a one-degree-of-freedom active vibration damping device, it is necessary to provide a plurality of one-degree-of-freedom active vibration damping devices according to the degree of freedom of vibration to be removed. There was a problem that the whole was enlarged.

  In response to such a problem, a multi-degree-of-freedom active vibration control device capable of generating a vibration control force and vibration control torque having a plurality of degrees of freedom with a single active vibration control device has been developed. In a conventional multi-degree-of-freedom active vibration damping device (for example, described in Patent Document 1 below), a movable mass arranged at three orthogonal points orthogonal to each other is supported by a displacement member that can be displaced in each direction of the three axes. Yes. Then, the multi-degree-of-freedom active vibration control device is mounted on the vibration suppression target, and the vibration transmitted from the outside to the vibration suppression target or the vibration generated by the vibration suppression target in each direction of the three axes. A reaction force is generated in the displacement member so as to cancel the vibration. Thereby, by giving an acceleration in the triaxial direction to the movable mass supported by the displacement member, an inertial force is generated in each of the triaxial directions, and the vibration of the vibration control target is canceled by the inertial force. The linear motion vibration of 3 degrees of freedom in the vibration control target is removed.

  As another example of a conventional multi-degree-of-freedom active vibration damping device (for example, described in Patent Document 2 below), a base plate attached to a vibration damping target and an applied voltage provided upright on one surface of the base plate 6 linear motion links that can be expanded and contracted in a predetermined direction, a movable mass supported at one end of each linear motion link, vibration detection means for detecting vibration components generated in the base plate, and detection thereof There is a multi-degree-of-freedom active vibration control device including control means for driving each linear link in accordance with the vibration component. In the multi-degree-of-freedom active vibration control device, when vibration generated in the vibration suppression target is detected by the vibration detection means, a control amount for suppressing the vibration according to the vibration component is obtained by the control means, The linear link is driven and controlled. By driving the six linear motion links, a triaxial inertial force and a triaxial inertial torque are generated in the movable mass supported by the link, and the inertial force and the inertial torque are applied to each linear motion link. The three-degree-of-freedom linear motion vibration and the three-degree-of-freedom rotational vibration of the object to be controlled are removed by acting on the base plate attached to the object to be controlled via

JP 2001-193786 A JP-A-6-341486

  In the conventional multi-degree-of-freedom active vibration damping device shown in Patent Document 1, by generating a triaxial acting force on the movable mass, the acting force is reduced on the installation surface of the active damping device and the vibration damping target. Since the sign inversion value acts as a damping force in the three-axis direction, it is possible to remove the three-degree-of-freedom linear motion vibration in the damping target.

  However, since the movable mass of the multi-degree-of-freedom active vibration damping device is supported by a displacement member at a predetermined distance from the installation surface, the X-axis and Y-axis, which are orthogonal to the in-plane direction of the installation surface, respectively, are out of plane. When the Z-axis is taken in the direction, particularly when an acting force in the X-axis direction (Y-axis direction) is generated on the movable mass in order to remove the linear motion vibration in the in-plane X-axis direction (Y-axis direction), In addition to the vibration damping force in the X-axis direction (Y-axis direction), the installation surface is given by the outer product of the acting force in the X-axis direction (Y-axis direction) and the position vector from the center of the installation surface to the center of the movable mass. The damping torque in the axial direction (X-axis direction) acts. Therefore, even if the three-degree-of-freedom linear motion vibration of the vibration control target can be removed, the in-plane two-degree-of-freedom rotational vibration of the installation surface is excited in reverse, and the vibration of the vibration control target is strictly removed. There was a problem that it was difficult to do.

  On the other hand, in the conventional multi-degree-of-freedom active vibration damping device disclosed in Patent Document 2, a 3-axis degree of direct acting vibration in a vibration-damping target is generated by generating a triaxial acting force and a triaxial acting torque on the movable mass. In addition to this, it is also possible to remove rotational vibration with three degrees of freedom. At this time, as in the multi-degree-of-freedom active vibration control device disclosed in Patent Document 1, the sign-inversion value of the three-axis direction force generated in the movable mass corresponds to the vibration control force in the three-axis direction acting on the vibration suppression target. To do.

  However, the three-axis vibration damping torque acting on the object to be damped is based on the three-axis acting force generated on the movable mass and the center of the installation surface with respect to the sign inversion value of the three-axis acting torque generated on the movable mass. The component which overlaps the outer product with the position vector to the movable mass mass center corresponds. Therefore, in order to apply a desired damping torque to the damping object, it is necessary to control the acting torque on the movable mass after explicitly considering the outer product of the acting force and the position vector. There was a problem.

  In addition, in general, the maximum acting force and maximum acting torque that can be generated on a movable mass in an active vibration control device are limited by the movable range and frequency of the movable mass, but are proportional to the distance between the installation surface and the center of the movable mass. Since the outer product component of the acting force and the position vector is increased, there is a problem that the maximum damping force and the maximum damping torque that can be applied to the vibration suppression target are reduced due to the influence of the outer product component. Especially when the Stewart platform is composed of a base plate, a movable mass, and six linear motion links as in the conventional multi-degree-of-freedom active vibration control device shown in Patent Document 2, the installation surface and the movable surface are inevitably movable. Since the distance from the mass center is large, the above problem becomes significant.

  The present invention has been made to solve the above-described problems, and provides a multi-degree-of-freedom active vibration damping device capable of expanding the maximum vibration damping force and the maximum vibration damping torque that can be applied to a vibration damping target. For the purpose.

According to the present invention, a three-degree-of-freedom linear motion vibration or a three-degree-of-freedom direct-motion vibration generated in a vibration-suppressed object and a three-axis direction damping force and a three-axis direction damping torque canceling out the three-degree-of-freedom rotational vibration In a multi-degree-of-freedom active vibration control device that applies vibration control to a vibration suppression object, the base plate attached to the vibration suppression object, and one end of the base plate is fixed by displacement restraint, and each can expand and contract in a predetermined direction 6 linear motion links, a movable mass supported by the other end of each linear motion link and displacement restraint, displacement detection means for detecting the amount of expansion / contraction of each linear motion link, and the vibration control target Vibration detecting means for detecting a generated vibration component, and control means for controlling the expansion / contraction operation of each linear link in accordance with the amount of expansion / contraction detected by the displacement detection means and the vibration component detected by the vibration detection means, The base plate and the As the distance between the moving mass is reduced, the six linear link, the base plate and the movable mass becomes the first distance range is greater from the central axis of the base plate and the moving mass Three linear motion links having a fixed point with respect to the base plate, and the base plate and the movable mass with respect to the base plate and the movable mass, the distance from the central axis of the base plate and the movable mass being a second distance shorter than the first distance. In the multi-degree-of-freedom active vibration damping device, three linear motion links having fixed points are alternately arranged in a circumferential direction around the central axis .

  According to the present invention, it is possible to provide a multi-degree-of-freedom active vibration damping device that expands the maximum vibration damping force and the maximum vibration damping torque that can be applied to the vibration damping target.

It is a perspective view which shows an example of a structure of the parallel link mechanism of the multi-degree-of-freedom active vibration damping device by this invention. It is a top view of the parallel link mechanism of FIG. It is a side view of the parallel link mechanism of FIG. It is a figure which shows the spatial arrangement | positioning of the vibration detection means of the multi-degree-of-freedom active vibration damping device by Embodiment 1 of this invention. It is a block diagram which shows the structure of the control system of the multi-degree-of-freedom active vibration damping device by Embodiment 1 of this invention. It is a schematic block diagram which shows the structure of the mechanical system of the multi-degree-of-freedom active vibration damping device by Embodiment 1 of this invention. It is a figure which shows the spatial arrangement | positioning of the vibration detection means of the multi-degree-of-freedom active vibration damping device by Embodiment 2 of this invention. It is a block diagram which shows the structure of the control system of the multi-degree-of-freedom active vibration damping device by Embodiment 2 of this invention. It is a perspective view which shows the structure of the parallel link mechanism in the conventional multi-degree-of-freedom active vibration damping device. It is a top view which shows the structure of the parallel link mechanism in the conventional multi-degree-of-freedom active vibration damping device. It is a side view which shows the structure of the parallel link mechanism in the conventional multi-degree-of-freedom active vibration damping device.

  In the multi-degree-of-freedom active vibration damping device according to the present invention, by suppressing the distance between the installation surface and the movable mass mass center, the three-axis acting force on the movable mass and the position vector from the installation surface center to the movable mass mass center And obtaining a multi-degree-of-freedom active vibration damping device that expands the maximum damping force and the maximum damping torque that can be applied to the damping target, and explicitly considering the outer product component, By accurately controlling the three-axis direction damping force and the three-axis direction damping torque acting on the damping target, the three-degree-of-freedom linear motion vibration and the three-degree-of-freedom rotational vibration of the damping target can be strictly removed. it can.

  Hereinafter, a multi-degree-of-freedom active vibration damping device according to the present invention will be described with reference to the drawings based on preferred embodiments. Note that the same or corresponding parts in the respective embodiments are denoted by the same reference numerals and redundant description is omitted.

Embodiment 1 FIG.
A multi-degree-of-freedom active vibration damping device according to Embodiment 1 of the present invention will be described with reference to FIGS. FIG. 1 is a perspective view showing an example of the configuration of a parallel link mechanism of a multi-degree-of-freedom active vibration damping device according to the present invention, and FIGS. 2 and 3 are a top view and a side view of the parallel link mechanism of FIG.

  The parallel link mechanism 20 shown in FIG. 1 includes a base plate 1 attached to a vibration control target, and six end plates that are fixed to the base plate 1 at fixed points B1 to B6 with displacement restraints and can be expanded and contracted in the longitudinal direction. The linear motion links 2a to 2f, and the movable mass 3 supported by displacement restraints at the other ends of the linear motion links 2a to 2f and fixed points M1 to M6. The fixed points of the linear motion links 2a to 2f have a large distance from the central axis O of the base plate 1 and the movable mass 3 having the common central axis O as shown in FIGS. A set of three linear motion links 2b, 2d, 2f set to be a predetermined distance) and three linear links set to be a small distance (a second predetermined distance shorter than the first predetermined distance). In the group of the moving links 2a, 2c, and 2e, the linear links 2b, 2d, and 2f (or the linear links 2a, 2c, and 2e) with respect to the central axis O are the same centering on the central axis O for each group. Evenly arranged at equal intervals of 120 degrees in the circumferential direction on the circumference, and the linear motion links 2a, 2c, and 2e are alternately disposed in the circumferential direction by 60 degrees with respect to the linear motion links 2b, 2d, and 2f, respectively. Next, the fixed point B1 of the linear links 2a to 2f with respect to the base plate 1 B6, and are arranged fixed point M1~M6 the linear motion link 2a~2f for moving mass 3.

FIG. 4 shows a spatial arrangement of vibration detecting means (acceleration sensor unit) of the multi-DOF active vibration damping device according to Embodiment 1 of the present invention, where (a) is a top view and (b) is (a). It is the side view seen from the lower surface of the paper surface of the top view. As shown in FIG. 4, as a vibration detecting means for detecting a vibration component generated in the vibration suppression target 4 to which the base plate 1 is attached, three triaxial accelerations each having sensitivity in each of three orthogonal directions are orthogonal. Sensor units 5a to 5c are used. Each of the three-axis acceleration sensor units 5a to 5c has a damping target 4 at 120 degree intervals on the same circumference centered on the center of the installation surface of the base plate 1 with respect to the damping target 4 (same as the central axis O). The three upper axes are equally arranged with respect to the center, and the detection axes X _Aj , Y _Aj , and Z _Aj (j = 1, 2, 3) of each of the three-axis acceleration sensor units 5a to 5c are the axes X _{Aj Are} arranged such that the radial direction from the center of the installation surface, the axis Y _Aj is a tangential direction on the same circumference, and the axis Z _Aj is a direction perpendicular to the installation surface.

  FIG. 5 is a block diagram showing the configuration of the control system of the multi-degree-of-freedom active vibration damping device according to Embodiment 1 of the present invention. As shown in FIG. 5, in the multi-degree-of-freedom active vibration damping device of the first embodiment, displacement detecting means 10a to 10f (strain gauges) for detecting the expansion / contraction amount of each of the linear motion links 2a to 2f. Type displacement sensors, etc.), the expansion / contraction amount of the linear motion links 2a to 2f detected by the displacement detection means 10a to 10f, and the vibration suppression detected by the three-axis acceleration sensor units 5a to 5c which are vibration detection means. In accordance with the vibration component of the object 4, the expansion / contraction operation of the linear motion links 2 a to 2 f is controlled by the control means 13.

  The control means 13 includes a vibration component converter 9 and a vibration component converter 9 that convert the vibration components detected by the three-axis acceleration sensor units 5 a to 5 c into the three-axis acceleration and the three-axis angular acceleration of the vibration suppression target 4. Based on the calculated three-axis acceleration and three-axis angular acceleration of the vibration suppression target 4, the three-degree-of-freedom linear motion vibration and the three-degree-of-freedom rotation vibration generated in the vibration suppression target 4 are canceled out. An acting force / acting torque converter 11 for calculating an axial acting force and a triaxial acting torque, a triaxial acting force and a triaxial acting torque for the movable mass 3 calculated by the acting force / acting torque converter 11, Further, based on the expansion / contraction amount of the linear motion links 2a to 2f detected by the displacement detection means 10a to 10f, the linear motion is performed so that the triaxial acting force and the triaxial acting torque are actually applied to the movable mass 3. Of links 2a-2f It consists of linear motion link controller 12 which controls the contraction operation.

  The vibration component converter 9 outputs the imperfect integrators 6a to 6c and the imperfect integrators 6a to 6c that integrate the vibration components detected by the three-axis acceleration sensor units 5a to 5c in a higher frequency region than the predetermined frequency. Is calculated by the velocity / angular velocity converter 7 that converts the three-axis velocity and the three-axis angular velocity of the vibration control object 4, the vibration component detected by the three-axis acceleration sensor units 5 a to 5 c, and the velocity / angular velocity converter 7. An acceleration / angular acceleration converter 8 that calculates the three-axis acceleration and the three-axis angular acceleration of the vibration suppression target 4 based on the three-axis velocity and the three-axis angular velocity of the vibration suppression target 4 is provided.

  FIG. 6 is a schematic configuration diagram showing the configuration of the mechanical system of the multi-degree-of-freedom active vibration damping device according to Embodiment 1 of the present invention. With respect to the vibration suppression target 4 supported by the spring / damper system 14 simulating the installation rigidity, vibration components generated in the vibration suppression target 4 are detected by the three-axis acceleration sensor units 5a to 5c, and the displacement detection means 10a to Based on the expansion and contraction amounts of the linear motion links 2a to 2f detected at 10f (see FIG. 5), the parallel link mechanism 20 arranged on the vibration suppression target 4 is controlled by the control means 13 (see FIG. 5) based on these. As a result, a three-axis direction damping force and a three-axis direction damping torque that cancel out the three-degree-of-freedom linear motion vibration and the three-degree-of-freedom rotational vibration generated in the damping target 4 are applied to the damping target 4 and controlled. Shake.

  FIGS. 9 to 11 are a perspective view, a top view, and a side view, respectively, showing the configuration of the parallel link mechanism in the conventional multi-degree-of-freedom active vibration damping device.

  Next, the operation of the multi-degree-of-freedom active vibration damping device according to the present invention will be described. For example, the parallel link mechanism in the conventional multi-degree-of-freedom active vibration damping device disclosed in Patent Document 2 includes a base plate 1 attached to a vibration damping object as shown in FIG. The parts are fixed to the fixing points B1 to B6 by displacement restraint, and each of the six linear motion links 2a to 2f that can expand and contract in the longitudinal direction, and the other end portions of these linear motion links 2a to 2f are fixed points M1 to M6. A movable mass 3 supported by displacement restraint constitutes a Stewart platform.

  As shown in FIGS. 10 and 11 (particularly when viewed from the top view of FIG. 10), the fixed points of the linear links 2a to 2f in this Stewart platform are the central axes O of the base plate 1 and the movable mass 3. The fixed points (B1, B6), (B2, B3), (B4, B5) of the linear motion links 2a to 2f with respect to the base plate 1 are located at positions shifted by 120 degrees from each other on a common circumference centered on Arranged (equal arrangement at intervals of 120 degrees), further shifted by 120 degrees on the common circumference (equal arrangement at intervals of 120 degrees), and fixed points (B1, B6), (B2, B3), (B4, B5) The fixed points (M1, M2), (M3, M4), (M5, M6) of the linear motion links 2a to 2f with respect to the movable mass 3 are arranged at the positions rotated (shifted) by 60 degrees respectively. doing.

When the multi-DOF active vibration suppression is realized by such a parallel link mechanism, the vibration component generated in the vibration suppression target 4 is detected by the vibration detection means, and the three-axis direction vibration suppression force f _B that cancels the vibration. In addition, it is necessary to apply the three-axis direction damping torque τ _B to the damping target 4. However, in general, the amount of control in the active vibration damping device is the triaxial action force f _M and the triaxial action torque τ _M generated in the movable mass 3, and the relationship between them is the installation of the base plate 1 in the vibration damping object 4. The position vector from the center of the surface to the center of mass of the movable mass 3 is given by equation (1), where γ _MB .

  However,

  H: Height from base plate installation surface to center of mass of movable mass

Thus, the three-axis direction damping force f _B acting on the damping target 4 corresponds to the sign inversion value of the three-axis direction acting force f _M generated on the movable mass 3, but the three-axis direction damping torque. the tau _B, to the code inverted value of 3 axially acting torque tau _M, a component obtained by superposing an outer product of the position vector gamma _MB from 3 axially acting force f _M and the installation surface center to the movable mass center of mass Correspond.

In general, the maximum acting force max (f _M ) and the maximum acting torque max (τ _M ) that can be generated in the movable mass 3 in the active vibration damping device are restricted by the movable range and the movable frequency of the movable mass 3, but the installation surface Since the second term on the right side of the second equation of the equation (1) increases in proportion to the height H from the movable mass to the center of mass of the movable mass, the maximum damping force max that can act on the damping object 4 due to the influence of the outer product component (f _B ) and the maximum damping torque max (τ _B ) become smaller.

  In particular, the linear link (2) requires a predetermined link length with respect to its maximum extension, so when the parallel link mechanism is configured with a Stewart platform like the conventional multi-degree-of-freedom active vibration control device. Inevitably, the height H from the installation surface to the center of mass of the movable mass increases, and the above problem becomes remarkable.

For example, the maximum extension of the linear motion link (2): 80 μm
Link length: 92 mm (distance from fixed points B1 to B6 to fixed points M1 to M6)
Apply the piezo actuator of
In movable mass 3
Mass: 1.51 kg
In-plane direction main moment of inertia: 1.19 × 10 ⁻³ kgm ²
Out-of-plane main moment of inertia: 2.28 × 10 ⁻³ kgm ²
When the cylindrical shape is used, the maximum damping force in the predetermined single axis direction (the remaining 5 degrees of freedom damping force / damping torque = 0) that can act on the damping target 4 as a multi-degree-of-freedom active damping device and The maximum vibration damping torque is as shown in Table 1 at an operating frequency of 50 Hz.

  Therefore, in the multi-degree-of-freedom active vibration damping device according to the present invention, as shown in FIGS. 1 to 3, the parallel link mechanism 20 is set so that the distance from the central axis O of the base plate 1 and the movable mass 3 is increased. In each set of the three linear motion links 2b, 2d, and 2f and the three linear motion links 2a, 2c, and 2e that are set to have a small distance, the linear motion link 2b, 2d and 2f (linear motion links 2a, 2c, and 2e) are symmetrically displaced by 120 degrees from each other (equally arranged at equal intervals of 120 degrees in the circumferential direction on the same circumference), and the linear motion links 2a, 2c, and 2e Are fixed to the fixed links B1 to B6 of the linear motion links 2a to 2f with respect to the base plate 1 and the movable mass 3 so that the linear motion links 2b, 2d, and 2f are alternately displaced in the circumferential direction by 60 degrees. Fixed points M1 to M6 of the linear motion links 2a to 2f are arranged.

By using such a parallel link mechanism 20, the distance between the base plate 1 and the movable mass 3 is suppressed, and the outer product component given by the second term on the right side of the second equation of equation (1) is reduced. The maximum damping force max (f _B ) and the maximum damping torque max (τ _B ) that can be applied to the damping target 4 are increased.

  As an example, when the same linear motion link (2) and movable mass 3 as those set in Table 1 are applied, a predetermined single-axis direction (damping force / damping with the remaining 5 degrees of freedom) that can act on the vibration damping object 4 is applied. The maximum damping force and the maximum damping torque of torque = 0) are as shown in Table 2 at an operating frequency of 50 Hz.

From comparison with Table 1, by applying the parallel link mechanism 20 according to the present invention, the maximum damping force max (f _B ) and the maximum damping torque max (τ _{B with} five degrees of freedom excluding the out-of-plane direction damping torque. ) Is expanding. Moreover, in this parallel link mechanism 20, since the symmetry is maintained in the spatial arrangement of the linear motion links 2a to 2f as in the conventional Stewart platform (the equal arrangement of the linear motion links 2a to 2f around the central axis O). ) One of the features is that the symmetry of the movable mass 3 is maintained without degrading the controllability of the specific degree of freedom.

Next, in the multi-degree-of-freedom active vibration control device, the three-degree-of-freedom linear motion vibration and the three-degree-of-freedom rotational vibration generated in the vibration control target 4 are accurately measured, and the 3 Axial damping force f _B and triaxial damping torque τ _B , triaxial acting force f _M and triaxial acting torque τ _M to the movable mass 3 to realize the damping force and damping torque It is necessary to control the expansion / contraction operation of the linear motion links 2a to 2f so as to realize the acting force and the acting torque.

Therefore, in the multi-degree-of-freedom active vibration damping device according to the present invention, as a vibration detecting means for detecting a vibration component generated in the vibration damping object 4 as shown in FIG. Of the three-axis acceleration sensor units 5a to 5c of 3 on the vibration control target 4 that are shifted from each other by 120 degrees on the same circumference centered on the center of the installation surface (same as the central axis O) (with equal intervals of 120 degrees). At this point, the detection axes X _Aj , Y _Aj , and Z _Aj (j = 1, 2, 3) of each sensor unit are arranged so as to be symmetric with respect to the center of the installation surface.

With the above configuration, it is possible to detect information related to the three-degree-of-freedom linear motion vibration and the three-degree-of-freedom rotational vibration generated in the vibration suppression target 4 with the minimum necessary acceleration sensor unit. At this time, the detection values of the three-axis acceleration sensor units 5a to 5c are obtained by using the orthogonal three axes X _Aj , Y _Aj , and Z _Aj (j = 1, 2, 3) with which the unit is sensitive as coordinate axes. fixed acceleration sensor coordinate system sigma _Aj in (j = 1,2,3), the position vector of the acceleration sensor coordinate system sigma _Aj viewed from the inertial coordinate system _{Σ U (j = 1,2,3) γ} ajU The coordinate system expressing the variable and the time derivative of the variable are expressed by the upper left subscript of the variable and (

Given in. Vibration component detected by each triaxial acceleration sensor unit 5a-5c

5 is a three-axis acceleration of the object 4 to be controlled by the vibration component converter 9 as shown in FIG.

And 3-axis angular acceleration

Is converted to It should be noted that here, the component coordinate system fixed to the vibration suppression target 4 is Σ _C , the inertial coordinate system Σ, with the center of the installation surface as the origin, the Xc and Yc axes orthogonal to each other in the in-plane direction, and the Zc axis in the out-of-plane direction. The position vector of the component coordinate system Σ _C viewed from _U is γ _CU , and the angular velocity vector is ω _CU .

Specifically, the incomplete integrator 6a~6c for integrating a high frequency range than the frequency omega _C, the vibration component after removing the influence of drift

, And outputs of incomplete integrators 6a to 6c

In the speed / angular velocity converter 7 based on the equation (3),

And a triaxial angular velocity ^C ω _CU .

However A∈R ^{6 × 9:} _Aj acceleration sensor coordinate system sigma for the component coordinate system sigma _C
Transformation matrix determined by position ^C γ _AjC and posture ^C R _Aj (j = 1, 2, 3)

  In addition, vibration components detected by the three-axis acceleration sensor units 5a to 5c

, And the triaxial speed of the vibration control target 4 calculated by the speed / angular speed converter 7

And the triaxial angular velocity ^C ω _CU as input, the triaxial acceleration of the object 4 to be controlled by the acceleration / angular acceleration converter 8 based on the equation (4).

And 3-axis angular acceleration

Is calculated.

  With the above configuration, it is possible to accurately derive the three-degree-of-freedom linear motion vibration and the three-degree-of-freedom rotational vibration generated in the vibration suppression target 4 from only the acceleration sensor output.

  The triaxial acceleration of the vibration suppression target 4 calculated in this way

And 3-axis angular acceleration

Is converted into a three-axis direction damping force f _B and a three-axis direction damping torque τ _B to the damping target 4 such that the acceleration and the angular acceleration become zero in the acting force / action torque converter 11, 3 axially acting force f _M of the movable mass 3 is determined based on equation (5) so that the sign-inverted value of the three-axis directions damping force f _B.

Further, the three-axis direction acting torque τ _M to the movable mass 3 is set to the three-axis direction acting force f _M determined by the equation (5) with respect to the sign inversion value of the three-axis direction damping torque τ _B , and the vibration damping. A value obtained by superimposing the outer product with the position vector γ _MB from the center of the installation surface of the base plate 1 to the center of mass of the movable mass 3 in the object 4 is determined based on the equation (6).

Linear motion link control 12 is thus 3 axially acting forces _{f M} and 3 axially acting torque tau _M of determined to the movable mass 3, and the stretch of the linear motion link 2a~2f detected by the displacement detecting means 10a~10f Based on the amount, the expansion / contraction operation of the linear motion links 2a to 2f is controlled so that the acting force and the acting torque actually act on the movable mass 3.

With the above configuration, as shown in FIG. 6, the vibration component of the vibration suppression target 4 is detected by the triaxial acceleration sensor units 5a to 5c, and the parallel link mechanism 20 is controlled by the control means 13 (see FIG. 5). It becomes possible to accurately control the three-axis direction damping force f _B and the three-axis direction damping torque τ _B acting on the damping target 4, and the three-degree-of-freedom linear motion vibration and the three-freedom generated in the damping target 4. Degree rotation vibration can be strictly eliminated.

  As described above, the multi-degree-of-freedom active vibration damping device of the first embodiment maintains the symmetry in the spatial arrangement of the linear motion link 2 between the installation surface of the base plate 1 and the mass center of the movable mass 3. The distance can be suppressed, and thus the outer product component of the three-axis direction acting force on the movable mass 3 and the position vector from the center of the installation surface to the movable mass mass while maintaining symmetry in the controllability of the movable mass 3 And the maximum damping force and maximum damping torque that can be applied to the damping target 4 can be increased.

  In addition, three-degree-of-freedom linear motion vibration and three-degree-of-freedom rotational vibration generated in the vibration suppression target are detected by the minimum necessary acceleration sensor unit, and the three-degree-of-freedom direct vibration control target is detected from this acceleration sensor output alone. Dynamic vibration and rotational vibration with three degrees of freedom can be accurately measured. Furthermore, it becomes possible to accurately control the three-axis direction damping force and the three-axis direction damping torque acting on the damping target 4, and strictly control the three-degree-of-freedom linear motion vibration and the three-degree-of-freedom rotational vibration of the damping target. Can be removed.

  In the multi-degree-of-freedom active vibration damping device of the first embodiment, the spatial arrangement of the linear motion links in the parallel link mechanism 20 is configured as shown in FIGS. 1 to 3, but the present invention is not limited to this. In other words, the distance between the base plate 1 and the movable mass 3 may be suppressed.

Further, in the multi-degree-of-freedom active vibration damping device of the first embodiment, the spatial arrangement of the three-axis acceleration sensor units 5a to 5c is configured as shown in FIG. 4, but the present invention is not limited to this. The triaxial acceleration sensor units 5a to 5c may be arranged on the base plate 1, and each of the detection axes _XAj , _YAj , _ZAj (j = 1, 2) of the triaxial acceleration sensor units 5a to 5c. 3) may all be arranged in parallel. In addition, the three-axis acceleration sensor unit may have any spatial arrangement as long as the spatial arrangement is not the same linear one-dimensional arrangement, and the number thereof may be an arbitrary number of three or more.

Embodiment 2. FIG.
A multi-degree-of-freedom active vibration damping device according to Embodiment 2 of the present invention will be described with reference to FIGS. FIG. 7 shows a spatial arrangement of vibration detecting means (acceleration sensor unit) of the multi-DOF active vibration damping device according to Embodiment 2 of the present invention, where (a) is a top view and (b) is (a). It is the side view seen from the lower surface of the paper surface of the top view. As shown in FIG. 7, in the multi-degree-of-freedom active vibration damping device according to the second embodiment, as a vibration detection means for detecting the vibration component generated in the vibration damping object 4, the sensitivity is individually measured in each of the three orthogonal directions. The three-axis acceleration sensor unit 5a having the above is used, and is arranged at the center of the installation surface on the base plate 1 (same as the central axis O). FIG. 8 is a block diagram showing a configuration of a control system of the multi-degree-of-freedom active vibration damping device according to Embodiment 2 of the present invention.

  As shown in FIG. 8, in the multi-degree-of-freedom active vibration damping device of the second embodiment, the amount of expansion / contraction of the linear motion links 2a to 2f detected by the displacement detection means 10a to 10f and the triaxial acceleration that is the vibration detection means. The expansion and contraction operation of the linear motion links 2a to 2f is controlled by the control means 13 in accordance with the vibration component of the vibration control target 4 detected by the sensor unit 5a.

  This control means 13 is based on the vibration component detected by the three-axis acceleration sensor unit 5a, and the three-axis direction acting force on the movable mass 3 so as to cancel out the three-degree-of-freedom linear motion vibration generated in the vibration control target 4. And an acting force / acting torque converter 11a for calculating the acting torque in three axes, a three acting force and an acting torque on the movable mass 3 calculated by the acting force / acting torque converter 11a, and a displacement detecting means. Based on the expansion / contraction amount of the linear motion links 2a to 2f detected by 10a to 10f, the linear motion links 2a to 2f are applied so that the triaxial acting force and the triaxial acting torque are actually applied to the movable mass 3. The linear motion link controller 12 controls the expansion / contraction operation.

  The configuration of the parallel link mechanism 20 in the multi-degree-of-freedom active vibration damping device according to the second embodiment is the same as that in FIGS. 1 to 3 and 6 of the first embodiment.

Next, the operation will be described. In the first embodiment, the purpose is to strictly remove the three-degree-of-freedom linear motion vibration and the three-degree-of-freedom rotational vibration generated in the vibration control target 4, but in the second embodiment, the three-degree-of-freedom rotational vibration is excited. Thus, the configuration is intended to strictly remove the three-degree-of-freedom linear motion vibration generated in the vibration suppression target 4. In this case, the multi-degree-of-freedom active vibration control device accurately measures the three-degree-of-freedom linear motion vibration generated in the vibration control target 4 and three-axis direction vibration control force on the vibration control target 4 that cancels the vibration. f _B , a three-axis direction acting force f _M and a three-axis direction acting torque τ _M to the movable mass 3 that realize the damping force are determined, and linear motion is performed so as to realize the acting force and the acting torque. It is necessary to control the expansion / contraction operation of the links 2a to 2f.

Therefore, in the multi-degree-of-freedom active vibration damping device according to the second embodiment of the present invention, as a vibration detection means for detecting the vibration component generated in the vibration suppression object 4 as shown in FIG. one 3-axis acceleration sensor unit 5a having a sensitivity to the installation surface center on a base plate 1 and each coordinate axis of the acceleration sensor coordinate system sigma _A1 is arranged parallel to the component coordinate system sigma _C Yes.

  Vibration component detected by the 3-axis acceleration sensor unit 5a at this time

Is the three-axis angular velocity of the vibration suppression object 4

3 axis acceleration of the vibration control target 4

In the acting force / acting torque converter 11a.

Is converted into a three-axis direction damping force f _B to the damping target 4 such that becomes zero, and then the three-axis direction acting force f _M to the movable mass 3 is inverted to the sign of the three-axis direction damping force f _B The value is determined based on the equation (5) so as to be a value. Further, the three-axis direction acting torque τ _M to the movable mass 3 is determined from the three-axis direction acting force f _M determined by the equation (5) and the center of the surface of the base plate 1 on the object 4 to be controlled. Based on the outer product with the position vector γ _MB to the center of mass, it is determined by equation (7).

Linear motion link controller 12, thus 3 axially acting force _{f M} and 3 axially acting torque tau _M of determined to the movable mass 3, and the stretch of the linear motion link 2a~2f detected by the displacement detecting means 10a~10f Based on the amount, the expansion / contraction operation of the linear motion links 2a to 2f is controlled so that the acting force and the acting torque actually act on the movable mass 3.

With the above configuration, the vibration component of the vibration suppression target 4 is detected by the three-axis acceleration sensor unit 5a, and the parallel link mechanism 20 is controlled by the control unit 13, thereby suppressing vibration without exciting three-degree-of-freedom rotational vibration. it is possible to accurately control the 3 axial damping force f _B acting on the object 4, it is possible to precisely remove the 3 DOF linear vibration generated damped 4.

  As described above, the multi-degree-of-freedom active vibration damping device of the second embodiment maintains the symmetry between the spatial arrangement of the linear motion links 2 between the installation surface of the base plate 1 and the center of mass of the movable mass 3. The distance can be suppressed, and thus the outer product component of the three-axis direction acting force on the movable mass 3 and the position vector from the center of the installation surface to the movable mass mass while maintaining symmetry in the controllability of the movable mass 3 And the maximum damping force and maximum damping torque that can be applied to the damping target 4 can be increased.

  Further, it is possible to accurately control the three-axis direction damping force acting on the vibration suppression target 4 without exciting the three-degree-of-freedom rotational vibration, and the three-degree-of-freedom linear vibration generated on the vibration suppression target can be strictly controlled. Can be removed.

In the second embodiment, the spatial arrangement of the three-axis acceleration sensor unit 5a is configured as shown in FIG. 7, but the present invention is not limited to this, and the three-axis acceleration sensor unit 5a is damped. may be disposed on the object 4, further 3 detection axis X _{A1, Y A1,} Z _A1 axis acceleration sensor unit 5a is arranged to have a predetermined posture angle for the component coordinate system sigma _C Also good.

  As described above, in the multi-degree-of-freedom active vibration damping device according to the present invention, the base plate attached to the vibration damping target, and one end of the base plate fixed to the base plate with displacement restraint, each of which can expand and contract in a predetermined direction. A linear motion link, a movable mass supported by displacement restraint and the other end of each linear motion link, a displacement detection means for detecting the amount of expansion / contraction of each linear motion link, and a vibration component generated in a vibration control target. It comprises vibration detection means and control means for controlling the expansion / contraction operation of each linear link in accordance with the amount of expansion / contraction detected by the displacement detection means and the vibration component detected by the vibration detection means. Since the fixed point for the base plate of each linear link and the fixed point for the movable mass are arranged so that the distance becomes smaller, the distance between the installation surface of the multi-degree-of-freedom active vibration control device and the center of the movable mass is set. By controlling, the outer product component of the three-axis direction acting force on the movable mass and the position vector from the center of the installation surface to the movable mass center is reduced, and the maximum damping force and the largest damping force that can act on the damping target. Torque can be increased.

  In addition, the three linear motion links in which the fixed point with respect to the base plate and the movable mass of each linear motion link are set so that the distance from the central axis of the base plate and the movable mass is increased, and the central shaft Installation of multi-degree-of-freedom active vibration control devices while maintaining symmetry in the spatial arrangement of the linear motion links by the configuration in which the three linear motion links set so as to reduce the distance from each other are arranged alternately. The distance between the surface and the mass center of the movable mass can be suppressed, and therefore, the three-axis acting force on the movable mass and the center of the installation surface to the mass center of the movable mass are maintained while maintaining symmetry in the controllability of the movable mass. The outer product component with the position vector can be reduced, and the maximum damping force and the maximum damping torque that can be applied to the damping target can be increased.

  Further, the control means is configured to control the three-axis direction such that the acting force on the movable mass cancels out the three-degree-of-freedom linear motion vibration generated in the vibration suppression object based on the vibration component of the vibration suppression object detected by the vibration detection means. It is determined to be a sign reversal value of the vibration force, and further, the acting torque on the movable mass is compared with the sign reversal value of the three-axis direction vibration damping torque that cancels the rotational vibration of three degrees of freedom generated in the vibration control target. And acting force / acting torque converter that determines the product of the outer product of the acting force on the movable mass and the position vector from the center of the base plate installation surface to the center of the moving mass, and acting force / acting torque conversion Based on the acting force and acting torque output from the device and the amount of expansion / contraction of each direct acting link detected by the displacement detecting means, the acting force and acting torque of each direct acting link act on the movable mass. Control expansion and contraction The three-axis direction damping force and the three-axis direction damping torque acting on the vibration control target can be accurately controlled, and the three-degree-of-freedom of the vibration control target can be directly controlled. Dynamic vibration and three-degree-of-freedom rotational vibration can be strictly eliminated.

  The vibration detecting means is composed of a plurality of three-axis acceleration sensor units each having sensitivity in each of three orthogonal directions, and each of the three-axis acceleration sensor units is mounted on a base plate or a vibration suppression target. In addition, by arranging so that it does not become a one-dimensional arrangement on the same straight line, it is possible to detect information relating to the three-degree-of-freedom linear motion vibration and the three-degree-of-freedom rotational vibration generated in the vibration control target only by the acceleration sensor. it can.

  In addition, the vibration detecting means is composed of three triaxial acceleration sensor units each having sensitivity in each of three orthogonal directions, and each of the triaxial acceleration sensor units is centered on the center of the base plate installation surface. The three-degree-of-freedom linear motion generated in the vibration control object is symmetrically arranged with respect to the center of the installation surface at the three points on the base plate or the vibration control object that are 120 degrees apart from each other on the same circumference. And information on rotational vibration of three degrees of freedom can be detected by a minimum necessary acceleration sensor unit.

  The control means integrates the vibration component detected by the three-axis acceleration sensor unit constituting the vibration detection means in a frequency region higher than a predetermined frequency, and outputs the output of the incomplete integrator. Based on the velocity / angular velocity converter that converts the target three-axis velocity and the three-axis angular velocity, the vibration component detected by the three-axis acceleration sensor unit, and the output of the velocity / angular velocity converter, With a configuration including a vibration component converter composed of an acceleration / angular acceleration converter that converts to triaxial angular acceleration, three-degree-of-freedom linear motion vibration and three-degree-of-freedom rotational vibration generated in the vibration control target It can be accurately derived from only the acceleration sensor output.

  1 base plate, 2a to 2f linear motion link, 3 movable mass, 4 vibration suppression target, 5a to 5c 3-axis acceleration sensor unit, 6a to 6c incomplete integrator, 7 speed / angular velocity converter, 8 acceleration / angle Acceleration converter, 9 vibration component converter, 10a to 10f displacement detection means, 11, 11a action force / action torque converter, 12 linear motion link controller, 13 control means, 14 spring / damper system, 20 parallel link mechanism.

Claims (6)

The three-degree-of-freedom linear motion vibration or the three-degree-of-freedom linear motion vibration and the three-degree-of-freedom rotational vibration generated in the vibration control target are set as the vibration control target. In a multi-degree-of-freedom active vibration control device that applies vibration suppression,
A base plate attached to the object to be damped;
Six linear motion links, each of which is fixed to the base plate by displacement restraint and can be expanded and contracted in a predetermined direction;
A movable mass supported by the other end of each linear link and displacement restraint;
Displacement detecting means for detecting the amount of expansion / contraction of each linear link;
Vibration detecting means for detecting a vibration component generated in the vibration suppression target;
Control means for controlling the expansion / contraction operation of each linear link in accordance with the amount of expansion / contraction detected by the displacement detection means and the vibration component detected by the vibration detection means;
With
The six linear motion links are such that the distance between the base plate and the movable mass becomes a first distance that is large from the central axis of the movable mass so that the distance between the base plate and the movable mass is small. Three linear motion links having fixed points with respect to the plate and the movable mass, and the base having a second distance that is shorter than the first distance from the central axis of the base plate and the movable mass. 3. A multi-degree-of-freedom active vibration damping device comprising: three linear motion links having fixed points with respect to a plate and the movable mass; and alternately arranged in a circumferential direction around the central axis . The control means is
Based on the vibration component of the vibration suppression object detected by the vibration detection means, the acting force on the movable mass is a three-axis direction vibration suppression force that cancels out the three-degree-of-freedom linear vibration generated in the vibration suppression object. Further, the acting torque on the movable mass is determined based on the outer product of the acting force on the movable mass and the position vector from the center of the base plate to the movable mass mass center. An acting force / acting torque converter determined by
Based on the action force and the action torque output from the action force / action torque converter, and the amount of expansion / contraction of each linear link detected by the displacement detection means, the action force and the action on the movable mass. A linear motion link controller that controls the expansion and contraction of each linear motion link so that torque acts;
The multi-degree-of-freedom active vibration damping device according to claim 1 , comprising: The vibration detecting means is composed of a single triaxial acceleration sensor unit which is arranged on the base plate or on the vibration control object and has sensitivity in each of three orthogonal axes. The multi-DOF active vibration damping device according to claim 1 or 2 . The multi-degree-of-freedom active vibration damping device according to claim 3 , wherein the one three-axis acceleration sensor unit is arranged at the center of the installation surface on the base plate. The vibration detecting means is composed of three or more three-axis acceleration sensor units each having sensitivity in each of orthogonal three-axis directions, and each of the three-axis acceleration sensor units is mounted on the base plate or the Arranged on the vibration suppression object so as not to be one-dimensional arrangement on the same straight line,
The control means is
An incomplete integrator that integrates vibration components detected by each of the three-axis acceleration sensor units constituting the vibration detecting means in a higher frequency region than a predetermined frequency, and the output of the incomplete integrator is 3 A speed / angular velocity converter for converting to an axial velocity and a triaxial angular velocity, a vibration component detected by the triaxial acceleration sensor unit, and an output of the velocity / angular velocity transducer, and a triaxial acceleration and a triaxial angle of the object to be controlled A vibration component converter having an acceleration / angular acceleration converter for calculating acceleration;
Based on the three-axis acceleration and the three-axis angular acceleration of the vibration control object calculated by the acceleration / angular acceleration converter of the vibration component converter, the acting force on the movable mass is generated with three degrees of freedom. It is determined to be a sign-inverted value of the three-axis direction damping force that cancels the linear motion vibration, and further, the torque acting on the movable mass is canceled out the three-degree-of-freedom rotational vibration generated in the damping target. The value obtained by superposing the outer product of the acting force on the movable mass and the position vector from the center of the base plate installation surface to the center of the movable mass is determined with respect to the sign inversion value of the three-axis direction damping torque. Acting force / acting torque converter,
Based on the action force and the action torque output from the action force / action torque converter, and the amount of expansion / contraction of each linear link detected by the displacement detection means, the action force and the action on the movable mass. A linear motion link controller that controls the expansion and contraction of each linear motion link so that torque acts;
The multi-degree-of-freedom active vibration damping device according to claim 1 , comprising: The vibration detecting means is composed of three triaxial acceleration sensor units each having sensitivity in each of orthogonal three axis directions, and each of the three axis acceleration sensor units has a center of the installation surface of the base plate. according to claim 5, characterized in that it is arranged uniformly with respect to the installation surface centered on three points of the same said at circumferential intervals of 120 ° on the base plate or on the damped around the Multi-degree-of-freedom active vibration control device.

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