JP5359484B2 - Solvent gas processing equipment - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a solvent gas treatment device always carrying out accurate and stable evaluation of a treatment capacity of a volatile organic compound, and simplifying a configuration. <P>SOLUTION: The solvent gas treatment device includes a nozzle hole 129 having a port blowing out solvent gas vaporized by a vaporizing tube 121, a blower A 136 supplying dilution gas to be mixed with the solvent gas, a solvent gas generator 100 supplying solvent liquid to the heated vaporizing tube by a pump to carry out heating vaporization and to provide the solvent gas and generating diluted solvent gas by mixing the dilution gas supplied by the blower A 136 with the solvent gas blown out of the nozzle hole, and a solvent gas treatment device body 200 treating treatment reception gas. Evaluation operation of the treatment capacity of the solvent gas of the solvent gas treatment device body by supply of the diluted treatment gas, and treatment operation of the treatment reception gas by supply of the treatment reception gas can be carried out, and the treatment reception gas is supplied to the solvent gas treatment device body by the blower A 136. <P>COPYRIGHT: (C)2011,JPO&amp;INPIT

Description

  The present invention relates to a solvent gas processing apparatus for purifying exhaust gas (gas to be processed) containing a volatile compound such as volatile organic compounds (VOC), an operating method thereof, and a processing capacity of the solvent gas processing apparatus. The present invention relates to a solvent gas generator used for evaluation.

  In recent years, odor complaints from small and medium-sized businesses and livestock industries close to the living environment have increased, and the sources of odor causing complaints tend to diversify. Among them, volatile organic compounds (solvent gases) contained in gases discharged from printing / painting plants and the like not only cause bad odor, but are also causative substances such as suspended particulate matter (SPM) and photochemical oxidants. For this reason, measures for reducing VOC emissions at individual offices are required. In 2006, the Air Pollution Control Law was amended to set emission standards for volatile organic compounds in large-scale facilities.

  As a method for deodorizing bad odors, there are methods for purifying gases generally called volatile organic compounds such as flammable hydrocarbons such as decomposition methods (combustion, catalytic decomposition, etc.), removal / separation methods (adsorption, It is roughly divided into biological deodorization methods such as cooling condensation, including recovery methods).

  In the purification treatment method and apparatus therefor, conventionally, in general, the volatile organic compound component in the gas to be processed (the gas to be processed) from the generation source on the inlet side of the processing apparatus and the processing gas on the outlet side of the processing apparatus The concentration of volatile organic compound components was measured with a concentration meter, and the purification treatment capacity was grasped and the overall control of the apparatus was performed.

  The following are typical examples of the processing apparatus described above. An exhaust gas treatment monitoring apparatus for removing a volatile compound contained in exhaust gas and monitoring a treatment function of a recyclable exhaust gas treatment unit in order to accurately grasp a removal state of a volatile organic compound, Concentration detecting means for detecting an inflow concentration of the volatile compound flowing into the exhaust gas treatment unit along a flow path of the processing gas and an exhaust concentration of the volatile compound discharged from the exhaust gas processing unit, and the inflow An exhaust gas treatment monitoring device, an exhaust gas treatment device comprising state detection means for detecting a reduced state of the treatment function during use of the exhaust gas treatment unit or a recovery state of the treatment function during regeneration based on the concentration and the exhaust concentration; (See, for example, Patent Document 1).

JP 2008-302348 A

  However, what is described in Patent Document 1 described above is a method in which a part of the exhaust gas (gas to be treated) containing the volatile organic compound component to be purified and the treated gas after the purification treatment are branched and switched. The concentration of the volatile organic compound component is measured with a gas sensor.

  In this case, the concentration of the volatile organic compound component in the exhaust gas to be purified (the gas to be treated) discharged from the generation source of the volatile organic compound component-containing gas such as a coating factory, a printing factory, or a chemical factory is extremely high. It is unstable, and the concentration of the VOC component constantly fluctuates in a very short time and does not become constant. Further, various volatile organic compound components may be mixed.

  In addition, when the generation source of the volatile organic compound component-containing gas is stopped and there is no generation of the volatile organic compound component-containing gas, the processing capability of the processing apparatus cannot be evaluated.

  For this reason, it is impossible to always evaluate the processing capability of the solvent gas processing apparatus accurately and stably due to the fluctuation (variation) of the concentration of the volatile organic compound component in a short time. Further, it is not possible to evaluate the processing capability of the solvent gas processing apparatus by arbitrarily changing the amount of the gas to be processed or the concentration of the volatile organic compound component in the gas to be processed to various conditions.

  The present invention solves the above-mentioned conventional problems, and provides a solvent gas processing apparatus that can always evaluate the processing ability of a volatile organic compound accurately and stably and that has a simplified configuration. With the goal.

  The solvent gas processing apparatus of the present invention includes a tank that stores a solvent liquid of a volatile organic compound, a pump that sucks and discharges the solvent liquid from the tank, and a vaporization that heats and vaporizes the solvent liquid supplied by the pump as a solvent gas. A pipe, heating means for heating the vaporization pipe, temperature adjusting means for detecting the temperature of the vaporization pipe and controlling it to a predetermined temperature, and a nozzle hole having a jet outlet for jetting solvent gas vaporized in the vaporization pipe, A driving means for driving a needle that opens and closes the nozzle hole, a blower for supplying a dilution gas mixed with the solvent gas, a solvent liquid is supplied by a pump to a vaporizing tube heated by the heating means, and the solvent is evaporated by heating. Diluted gas supplied by a blower to the solvent gas ejected from the nozzle hole by driving the needle to open the nozzle hole and ejecting the solvent gas A solvent gas generator for generating a diluted solvent gas by mixing and a solvent gas processing device body for processing a gas to be processed containing a volatile organic compound, and the solvent gas generator volatilizes the diluted solvent gas generated by the solvent gas generator. By selecting the supply of the gas to be processed containing the volatile organic compound to the main body of the solvent gas processing apparatus, by evaluating the solvent gas processing capacity of the main body of the solvent gas processing apparatus by supplying the diluted solvent gas, and by supplying the gas to be processed It is possible to perform the processing operation of the gas to be processed, and supply the gas to be processed to the solvent gas processing apparatus main body by the blower.

  According to the solvent gas processing apparatus of the present invention, it is possible to always evaluate the processing capability of a volatile organic compound accurately and stably, and to simplify the configuration.

  1st invention, the tank which stores the solvent liquid of a volatile organic compound, the pump which sucks and discharges the solvent liquid from the said tank, the vaporization pipe | tube which heats and vaporizes the solvent liquid supplied by the said pump as solvent gas, Heating means for heating the vaporizing pipe, temperature adjusting means for detecting the temperature of the vaporizing pipe and controlling it to a predetermined temperature, a nozzle hole for jetting solvent gas vaporized in the vaporizing pipe, and the nozzle A driving means for driving a needle for opening and closing the hole, a blower for supplying a dilution gas mixed with the solvent gas, a solvent liquid is supplied by a pump to a vaporizing tube heated by the heating means, and is heated and vaporized to obtain a solvent gas. At the same time, the needle is driven to open the nozzle hole to eject the solvent gas, and the solvent gas ejected from the nozzle hole is mixed with the diluted gas supplied by the blower to dilute the solvent gas. A solvent gas generating device that generates a solvent gas and a solvent gas processing device main body that processes a gas to be processed containing a volatile organic compound, and the diluted solvent gas and the volatile organic compound generated by the solvent gas generating device The gas to be treated can be selected to be supplied to the main body of the solvent gas processing apparatus, the operation of evaluating the solvent gas processing capacity of the main body of the solvent gas processing apparatus by supplying the diluted solvent gas, and the gas to be processed by supplying the gas to be processed The solvent gas processing apparatus is characterized in that the gas to be processed is supplied to the solvent gas processing apparatus main body by the blower.

  As a result, there is no fluctuation (variation) in the solvent gas concentration in a short time, and furthermore, the amount of the diluted solvent gas or the solvent gas concentration in the diluted solvent gas is arbitrarily changed to various conditions to An evaluation of the processing capacity can be performed. Therefore, it is possible to always evaluate the processing ability of the volatile organic compound accurately and stably. Further, the configuration can be simplified by supplying the diluted solvent gas and the gas to be processed to the solvent gas processing apparatus main body with one blower.

  According to a second invention, in the first invention, the diluted solvent gas is supplied from the solvent gas generator to perform the evaluation operation of the solvent gas processing capacity of the main body of the solvent gas processing device, and then the above-mentioned gas supply by supplying the gas to be processed The solvent gas processing apparatus according to claim 1, wherein a processing operation of a gas to be processed is performed.

  As a result, there is no fluctuation (variation) in the solvent gas concentration in a short time, and furthermore, the amount of the diluted solvent gas or the solvent gas concentration in the diluted solvent gas is arbitrarily changed to various conditions to It is possible to reliably perform the evaluation of the processing capacity and to operate the solvent gas processing apparatus optimally based on the evaluation.

  According to a third invention, in the first or second invention, a calibration gas that does not contain a solvent gas can be supplied to the solvent gas processing apparatus main body by a blower, and the solvent gas processing apparatus main body can be calibrated. The solvent gas processing apparatus is characterized by the above.

  Thereby, the measurement accuracy of the solvent gas concentration meter can be improved by supplying the calibration gas. Further, once the residual solvent gas in the main body of the solvent gas processing apparatus is driven out, it is possible to grasp the processing capacity by the diluted solvent gas from the solvent gas generating apparatus with higher accuracy. Moreover, it can implement suitably as needed.

  According to a fourth invention, in the third invention, after the calibration gas is supplied to the solvent gas processing device main body, the solvent gas is supplied from the solvent gas generating device to evaluate the processing capability of the solvent gas processing device main body. The solvent gas processing apparatus is characterized in that it is performed.

  Thereby, the evaluation operation of the processing capacity of the solvent gas supplied from the solvent gas generator in the main part of the solvent gas processing apparatus can be performed with higher accuracy.

  Hereinafter, a solvent gas processing apparatus according to an embodiment of the present invention will be described with reference to FIGS. FIG. 1 is a basic configuration diagram of a solvent gas processing apparatus according to an embodiment of the present invention, FIG. 2 is a basic configuration diagram of a solvent liquid supply unit and a vaporization mixing unit of the solvent gas generation device, and FIG. FIG. 4A and FIG. 4B are graphs showing examples of supplying solvent gas from the solvent gas generator, and FIG. 5 is a basic configuration diagram showing an example of the main body of the solvent gas processing apparatus. FIG. 6 is a basic configuration diagram of another example of the solvent gas processing apparatus main body, and FIG. 7 is a basic configuration diagram of another solvent gas processing apparatus according to an embodiment of the present invention.

  First, a basic configuration of a solvent gas processing apparatus according to an embodiment of the present invention will be described. The solvent gas generator 100 is mainly composed of a solvent liquid supply unit 101 and a vaporization mixing unit 120 which is a vaporization means. The solvent liquid supply unit 101 includes a tank 102, a tank 103, and a tank 104 that store different solvent liquids, and a tank 105 that mixes and stores a plurality of solvent liquids at a predetermined ratio. Examples of the solvent liquid include volatile organic compounds such as toluene, xylene, ethyl acetate, and butyl acetate. The volatile organic compound is not limited to this.

  Also, the supply pipes 106, 107, 108, 109 are connected to the tanks 102, 103, 104, 105, respectively. Furthermore, flow meters 110, 111, 112, 113 and on-off valves 114, 115, 116, 117 are arranged in the supply pipes 106, 107, 108, 109, respectively.

  The other end of each supply pipe 106, 107, 108, 109 is connected to a pump (solvent liquid supply means) 118. A discharge pipe 119 is connected to the discharge side of the pump 118, and the discharge pipe 119 is connected to the vaporization pipe 121 of the vaporization mixing unit 120. Further, the supply amount of the solvent liquid of the pump 118 can be adjusted by controlling the pump 118 by the solvent liquid supply amount control means 118a.

  The vaporizing and mixing unit 120 serving as a vaporizing unit includes a vaporizing tube 121 having one end opened, and an electric heater 122 (heating unit) attached to the outer peripheral surface of the vaporizing tube 121. The temperature of the vaporizing pipe 121 is adjusted by temperature adjusting means 122a that detects the temperature of the vaporizing pipe 121 and controls it to a predetermined temperature.

  The vaporization passage 123 of the vaporization pipe 121 is filled with a vaporization promoting body 124 in order to improve the uniform flow and permeability of the solvent liquid flowing in from the discharge pipe 119. The vaporization promoting body 124 is composed of, for example, a metal fiber material made of a thin wire, a metal foam material having connectivity, or the like.

  A waste liquid pipe 125 for solvent liquid is connected to the lower part of the vaporization pipe 121, and an open / close valve 126 is provided here.

  The outlet pipe 127 is fixed in a direction orthogonal to the vaporizing passage 123 of the vaporizing pipe 121, and the inside of the outlet pipe 127 is electrically connected to the vaporizing passage 123. Further, a nozzle body 128 having a nozzle hole 129 is fixed to the vaporizing tube 121.

  An electromagnetic solenoid 130 (driving means) is provided on the side of the lead-out pipe 127 facing the nozzle body 128, and the needle 131 is configured to move in the axial direction by the electromagnetic solenoid 130. On the side of the needle 131 facing the electromagnetic solenoid 130, a tapered portion 132 and a tip portion 133 having a diameter that can be inserted into the nozzle hole 129 are formed.

  Further, on the nozzle body 128 side, a rectifying plate 135 having a plurality of small holes 135 a formed so as to surround the nozzle body 128 is provided. The blowing cylinder 134 is connected to the discharge side of the blower A 136 (dilution gas supply means), and further connected to a discharge cylinder 137 and a dilution solvent gas supply line 138 in which the discharge cylinder 137 and the opening / closing valve 139 are arranged. Yes.

  Furthermore, the supply amount of air (dilution gas) by the blower A136 is configured to be adjusted by a dilution gas supply amount control means 136a that controls the rotational speed of the motor included in the blower A136. In addition, an electric heater 140 (heating means) is provided in the discharge cylinder 137, and the solvent gas passing through the discharge cylinder 137 and air are mixed by the temperature adjusting means 140a that detects the temperature of the diluted solvent gas and controls it to a predetermined temperature. The temperature of the diluted solvent gas is adjusted. Although the electric heater 140 is provided, a means for heating and cooling the diluted solvent gas may be provided. In this case, the temperature of the diluted solvent gas can be adjusted more widely, and the evaluation conditions for the solvent gas processing capacity in the solvent gas processing apparatus main body 200 can be set more widely.

  Further, to the suction side of the blower A 136, a gas supply line 300 to be processed provided with an opening / closing valve 301 and a calibration gas supply line 400 not including a solvent gas provided with an opening / closing valve 401 are connected.

  A flow meter 201 and a solvent gas concentration meter 202 are provided on the inlet side of the calibration gas, the diluted solvent gas, and the gas to be processed of the solvent gas processing apparatus main body 200, and on the outlet side of the solvent gas processing apparatus main body 200. A solvent gas concentration meter 203 is provided.

  Although the solvent gas processing apparatus main body 200 does not limit the solvent gas processing system in the present invention, representative apparatuses are shown in FIGS. 5 and 6 as examples. The basic structure shown in FIG. 6 is a catalytic oxidation type solvent gas processing apparatus main body, which is disposed in the vicinity of the honeycomb-shaped catalyst body 205 and the catalyst body 205 and heats the heater 206 (heating means such as an electric heater). ). This method can decompose the solvent gas at a lower temperature using an oxidation catalyst.

  Further, the basic configuration shown in FIG. 5 is a combustion heat storage type solvent gas processing apparatus main body 200, which is a burner 251, honeycomb-shaped heat storage materials 252 a and 252 b that store heat by combustion of the burner 251, a flow path switching unit 253, Members 254a and 254b are provided. In this method, the solvent gas can be decomposed by the combustion heat of the burner 251 and the high-temperature heat storage materials 252a and 252b.

  Next, the basic operation of the solvent gas processing device and the solvent gas generator will be described. First, an operation of supplying a predetermined amount of calibration gas not containing solvent gas to the solvent gas processing apparatus main body 200 will be described. During this operation, the solvent gas processing apparatus main body 200, the flow meter 201, and the solvent gas concentration meter 202 are in an operating state, the on-off valve 139 is closed, and the pump 118 and the electric heater 122 of the vaporizing and mixing unit 120 are energized and operated. In the stop state, the blower A 136 is operated to suck a predetermined amount of calibration gas not containing the solvent gas from the calibration gas supply line 400 and supply it to the solvent gas processing apparatus main body 200 via the diluted solvent gas supply line 138.

  The calibration gas enters the solvent gas processing apparatus main body 200 through the flow meter 201 and the solvent gas concentration meter 202, and is discharged through the solvent gas concentration meter 203 on the outlet side.

  By supplying the calibration gas, the zero point of the solvent gas concentration meters 202 and 203 is calibrated, and the measurement accuracy can be improved. Further, the residual solvent gas before the supply of the calibration gas staying in the solvent gas processing apparatus main body 200 is once discharged, and the zero point of the solvent gas concentration meter 203 on the outlet side can be calibrated more reliably. Further, once the residual solvent gas in the solvent gas processing apparatus main body 200 is driven out, it is possible to grasp the processing capacity of the diluted solvent gas from the solvent gas generating apparatus 100 with higher accuracy.

  The operation of supplying the calibration gas not containing the solvent gas to the solvent gas processing apparatus main body 200 is performed for a predetermined time, the operation of the blower A136 is stopped, and the on-off valve 401 is closed to complete the calibration step.

  Next, the operation of the solvent gas generator 100 after the calibration step is completed will be described. First, as shown in FIG. 2, the electromagnetic solenoid 130 is deenergized. At this time, the needle 131 is pressed against the nozzle hole 129 by a coil spring (not shown) included in the electromagnetic solenoid 130, and the distal end portion 133 is in the nozzle hole 129. The taper portion 132 is inserted into the nozzle hole 129 and closes the nozzle hole 129.

  In this state, the electric heater (heating means) 122 is energized, and the vaporization pipe 121 and the vaporization promoting body 124 are preheated to about 120 ° C., for example. At this time, the outlet pipe 127 and the nozzle body 128 are also preheated to substantially the same temperature level by the conduction heat from the vaporization pipe 121.

  After the preheating operation described above, the blower A136 is driven, air in the atmosphere not containing solvent gas is supplied into the blower tube 134, and is ejected from the plurality of small holes 135a of the rectifying plate 135 to the vicinity of the nozzle body 128. . (At this time, the on-off valve 301 is closed).

  After the drive of the blower A136 is started, the electromagnetic solenoid 130 is energized as shown in FIG. 2, and at this time, the needle 131 is attracted to the electromagnetic solenoid 130 side against a coil spring (not shown) included in the electromagnetic solenoid 130, At the same time that the tip 133 is removed from the nozzle 129, the tapered portion 132 is separated from the nozzle hole 129, thereby opening the nozzle hole 129. The on-off valve 139 is opened.

  Next, the pump 118 is driven, for example, the on-off valve 114 is opened, the other on-off valves 115, 116, 117 are closed, the solvent liquid in the tank 102 is sucked into the supply pipe 106, and is discharged through the discharge pipe 119. The vaporization passage 123 of the vaporization pipe 121 is supplied at a predetermined pressure. This solvent liquid comes into contact with the vaporizing pipe 121 and the vaporization promoting body 124 and is instantly vaporized, enters the outlet pipe 127 as a solvent gas, and jets out of the nozzle hole 129 vigorously.

  The solvent gas ejected from the nozzle hole 129 is uniformly mixed with the air that is the diluted gas ejected from the plurality of small holes 135a of the rectifying plate 135, becomes a diluted solvent gas, becomes the discharge cylinder 137, and the diluted solvent gas supply line 138. And is supplied to the solvent gas processing apparatus main body 200 via the gas to perform purification treatment.

  At this time, the flow rate of the diluted solvent gas by the flow meter 201 and the concentration of the solvent gas in the diluted solvent gas by the solvent gas concentration meter 202 are measured on the inlet side of the solvent gas processing apparatus main body 200.

  Further, the solvent gas component in the diluted solvent gas is purified by the solvent gas processing apparatus main body 200 and discharged. At this time, the solvent gas concentration meter 203 measures the concentration of the solvent gas in the purified air.

  The solvent gas concentration measured by the solvent gas concentration meter 203 is purified to a predetermined value or less under conditions such as the amount of diluted solvent gas supplied from the solvent gas generating device 100 to the solvent gas processing device main body 200 and the solvent gas concentration. And the basic evaluation of the processing capability of the solvent gas processing apparatus main body 200 is performed from the difference in solvent gas concentration between the solvent gas concentration meter 202 and the solvent gas concentration meter 203.

  After the basic evaluation of the processing capability of the solvent gas processing apparatus main body 200, the driving of the pump 118 is stopped and the electric heater (heating means) 122 and the electromagnetic solenoid 130 are de-energized. By de-energizing the electromagnetic solenoid 130, the needle 131 is pressed toward the nozzle hole 129, the tip end portion 133 is inserted into the nozzle hole 129, and the tapered portion 132 hits the nozzle hole 129 to close the nozzle hole 129. , Stop the ejection of solvent gas instantly.

  After the above-described operation, the blower A 136 is continuously driven for a predetermined time (for example, approximately 30 seconds), air in the atmosphere is supplied into the blower cylinder 134, and the solvent gas is passed through the flow path leading to the diluted solvent gas supply line 138. Replace with free air. Thereafter, the drive of the blower A136 is stopped and the on-off valve 139 is closed.

  Next, the on-off valve 301 is opened, the blower A 136 is driven, and the air to be processed (the gas to be processed) containing the solvent gas from the source of the solvent gas is supplied through the gas supply line 300 to the solvent gas processing apparatus main body. Switch to supply to 200.

  Thereby, the purification treatment of the air to be treated containing the solvent gas is started. At this time, the flow rate of the air to be processed by the flow meter 201 and the concentration of the solvent gas in the air to be processed by the solvent gas concentration meter 202 are measured on the inlet side of the solvent gas processing apparatus main body 200.

  Further, the solvent gas component in the air to be treated is purified by the solvent gas processing apparatus main body 200 and discharged. At this time, the solvent gas concentration meter 203 measures the concentration of the solvent gas in the purified air.

  The solvent gas concentration measured by the solvent gas concentration meter 203 is purified to a predetermined value or less under conditions such as the amount of air to be treated supplied from the solvent gas generation source to the solvent gas processing apparatus main body 200 and the solvent gas concentration. And a basic confirmation of the processing capacity of the solvent gas processing apparatus main body 200 from the difference in solvent gas concentration between the solvent gas concentration meter 202 and the solvent gas concentration meter 203.

  The overall control of the solvent gas processing apparatus is performed by an operation unit, a notifying unit, and a control device (not shown), a calibration gas supply operation, a solvent gas generator 100 dilution solvent gas supply operation, and a gas to be processed supply operation. Switching control, selection of the solvent liquid in the solvent gas generator 100, setting of the concentration in the diluted solvent gas, and the like, and further the solvent gas from the solvent gas concentration difference between the solvent gas concentration meter 202 and the solvent gas concentration meter 203 Data processing of the processing capability (purification degree or the like) of the processing apparatus main body 200 and notification by storage, display, voice, or the like are performed.

  The solvent gas processing apparatus main body zero calibration operation by supplying calibration gas, and the solvent gas processing apparatus 200 evaluation performance of the solvent gas processing apparatus main body 200 by supplying diluted solvent gas generated by the solvent gas generating apparatus 100 are solvent gas. It can be appropriately performed at the start of operation of the processing apparatus main body 200, at the time of operation stop, at the time of maintenance.

  Next, a method for setting conditions such as the amount of diluted solvent gas supplied from the solvent gas generator 100 to the solvent gas processing apparatus main body 200 and the solvent gas concentration will be described.

  First, a method of supplying a plurality of solvent liquids to a solvent gas processing apparatus main body 200 of a diluted solvent gas containing the solvent gas of the selected solvent liquid will be described. As described above, in the description of the basic operation, the on-off valve 114 is opened, the other on-off valves 115, 116, 117 are closed, and the solvent liquid in the tank 102 is sucked into the supply pipe 106 by the pump 118 and discharged. Supplying at a predetermined pressure to the vaporizing passage 123 of the vaporizing pipe 121 via the pipe 119, the solvent gas of the solvent liquid in the tank 102 was generated. Further, the on-off valves 114, respectively corresponding to the tanks 102, 103, 104, 115 or 116 is opened and the other is closed, so that any one of the solvent liquids in the opened tank is selected and vaporized, and the diluted solvent containing the solvent gas of the selected solvent liquid The gas can be supplied to the solvent gas processing apparatus main body 200.

  Further, by opening any two of the on-off valves 114, 115, and 116 corresponding to the tanks 102, 103, and 104 and closing the other, respectively, the solvent liquid in the two opened tanks is changed to any two. One can be selected and vaporized, and the diluted solvent gas containing the solvent gas of the selected solvent liquid can be supplied to the solvent gas processing apparatus main body 200. Furthermore, by the same means, any three of the solvent liquids can be selected and vaporized, and the diluted solvent gas containing the solvent gas of the selected solvent liquid can be supplied to the solvent gas processing apparatus main body 200.

  Further, the on-off valves 114, 115, and 116 are flow rate control valves including closing, so that a mixing ratio of a plurality of solvent liquids can be arbitrarily selected and vaporized, and a diluted solvent gas containing a solvent gas having an arbitrary mixing ratio is used. Can be supplied to the main body 200 of the solvent gas processing apparatus.

  In addition, a tank 105 for storing a mixture of a plurality of solvent solutions in advance at a predetermined ratio is stored, and the mixed solvent solution is selected and vaporized, and the selected solvent solution is diluted with a solvent gas. The solvent gas can be supplied to the solvent gas processing apparatus main body 200.

  Further, the concentration of the solvent gas in the diluted solvent gas containing the solvent gas of the vaporized solvent liquid can be set by adjusting the supply amount of the diluted gas by the blower A136 and / or the supply amount of the solvent liquid by the pump 118. .

  When the supply amount of the dilution gas by the blower A136 is constant, it can be set by adjusting the supply amount of the solvent liquid by the pump 118. In addition, when the supply amount of the solvent liquid by the pump 118 is constant, it can be set by adjusting the supply amount of the dilution gas by the blower A136. Further, it can be set by adjusting the supply amount of the dilution gas by the blower A136 and the supply amount of the solvent liquid by the pump 118. Thus, the amount of the diluted solvent gas and the solvent gas concentration in the diluted solvent gas can be arbitrarily changed.

  The amount of the diluted solvent gas and the solvent gas concentration in the diluted solvent gas can be arbitrarily set by controlling the rate at which the diluted gas supply amount by the blower A136 and the solvent liquid supply amount by the pump 118 are changed. . Furthermore, the selection of the solvent liquid to be vaporized can be switched almost instantaneously by opening / closing control of the on-off valves 114, 115, 116, 117.

  (A) shown in FIG. 4 changes the solvent gas concentration in the diluting solvent gas in a stepless increase or decrease direction, and (b) changes the solvent gas concentration in the diluting solvent gas stepwise. An example of supplying to the solvent gas processing apparatus main body 200 will be shown.

  Further, the supply amount of the solvent liquid to the vaporizing means or the supply amount of the dilution gas is controlled so that the concentration of the solvent gas in the diluted solvent gas mixed with the solvent gas and air is not more than the lower limit of the explosion limit. .

  Further, when the solvent gas concentration meter 202 detects a concentration not less than the lower limit value of the explosion limit of the solvent gas, the supply amount of the solvent liquid to the vaporization means is decreased below the lower limit value of the explosion limit of the solvent gas, or You may make it stop supply to the vaporization means of a solvent liquid. In this case, safety can be further improved.

  Further, a dilution gas supply amount detection means (not shown) is provided, and when the dilution gas supply amount detection means detects a supply amount of dilution gas below a predetermined value, supply of the solvent liquid to the vaporization means is stopped. You may do it. In this case, it is possible to further improve the safety that the blower A136 can be placed when the blower A136 is stopped.

  Note that the supply amount of air (dilution gas) and the gas to be processed by the blower A136 can be adjusted by a dilution gas supply amount control means 136a that controls the number of rotations of the motor included in the blower A136. In addition, the electric heater 140 provided in the portion of the discharge cylinder 137 may be energized when the gas to be processed is supplied, and the temperature of the gas to be processed passing through the discharge cylinder 137 may be adjusted by the temperature adjusting unit 140a. In this case, the solvent gas treatment apparatus main body 200 can perform the purification treatment more stably.

  FIG. 7 shows a basic configuration diagram of another solvent gas processing apparatus according to an embodiment of the present invention. The same reference numerals as those in FIG. The difference from the configuration of FIG. 1 is that the blower A136 is provided between the solvent gas processing apparatus main body 200 and the solvent gas generator 100, and this configuration can provide the same operations and effects as the configuration of FIG. Is.

  The present invention can be applied to a wide range of apparatuses that require purification treatment of various solvent gases.

1 is a basic configuration diagram of a solvent gas processing apparatus according to an embodiment of the present invention. Basic configuration diagram of solvent liquid supply unit and vaporization mixing unit of solvent gas generator Configuration diagram of the vaporization mixing unit when the nozzle hole is closed (A), (b) The graph which shows the example of solvent gas supply from a solvent gas generator Basic configuration diagram showing an example of a solvent gas treatment device body Basic configuration diagram of another example of the solvent gas treatment device main body The basic block diagram of the other solvent gas processing apparatus of one Example of this invention

DESCRIPTION OF SYMBOLS 100 Solvent gas generator 101 Solvent liquid supply part 102 Tank 103 Tank 104 Tank 105 Tank 106 Supply pipe 107 Supply pipe 108 Supply pipe 109 Supply pipe 110 Flowmeter 111 Flowmeter 112 Flowmeter 113 Flowmeter 114 Open / close valve 115 Open / close valve 116 Open / close Valve 117 Opening / closing valve 118 Pump 118a Solvent liquid supply amount control means 119 Discharge pipe 120 Vaporization mixing section (vaporization means)
121 Vaporizer (vaporizer)
122 Electric heater (heating means)
122a Temperature adjusting means 123 Vaporization passage 124 Vaporization promoting body 125 Waste liquid pipe 126 Opening and closing valve 127 Deriving pipe 128 Nozzle body 129 Nozzle hole 130 Electromagnetic solenoid (drive means)
131 Needle 132 Tapered part 133 Tip part 134 Blower cylinder 135 Current plate 135a Small hole 136 Blower A
136a Diluted gas supply amount control means 137 Discharge cylinder 138 Diluted solvent gas supply line 139 On-off valve 140 Electric heater (heating means)
140a Temperature control means 200 Solvent gas processing device main body 201 Flow meter 202 Solvent gas concentration meter 203 Solvent gas concentration meter 204 Catalytic oxidation type solvent gas processing device main body 205 Catalyst body 206 Heater 250 Combustion heat storage type solvent gas processing device body 251 Burner 252a Thermal storage material 252b Thermal storage material 253 Flow path switching unit 254a Connection member 254b Connection member 300 Processed gas supply line 301 Open / close valve 400 Calibration gas supply line 401 Open / close valve

Claims (4)

A tank for storing a solvent liquid of a volatile organic compound, a pump for sucking and discharging the solvent liquid from the tank, a vaporization pipe for heating and vaporizing the solvent liquid supplied by the pump as a solvent gas, and heating the vaporization pipe A heating means, temperature adjusting means for detecting the temperature of the vaporizing tube and controlling it to a predetermined temperature, a nozzle hole having a jet port for ejecting the solvent gas vaporized in the vaporizing tube, and a needle for opening and closing the nozzle hole A driving means for driving, a blower for supplying a dilution gas mixed with the solvent gas, a solvent liquid is supplied by a pump to the vaporizing tube heated by the heating means to be heated and vaporized to obtain a solvent gas, and the needle is driven. The nozzle holes are opened to eject the solvent gas, and the solvent gas ejected from the nozzle holes is mixed with the diluted gas supplied by the blower to generate the diluted solvent gas. And a solvent gas processing apparatus main body for processing a gas to be processed containing a volatile organic compound, and a gas to be processed containing a diluted solvent gas and a volatile organic compound generated by the solvent gas generator Supply to the solvent gas processing apparatus main body can be selected, and the operation of evaluating the solvent gas processing capacity of the solvent gas processing apparatus main body by supplying the diluted solvent gas and the processing operation of the gas to be processed by supplying the gas to be processed A solvent gas processing apparatus, characterized in that the gas to be processed is supplied to the main body of the solvent gas processing apparatus by the blower. The diluted gas gas is supplied from the solvent gas generating device and the solvent gas processing apparatus main body is evaluated for the processing capability of the solvent gas, and then the gas to be processed is supplied by supplying the gas to be processed. The solvent gas processing apparatus according to claim 1. 3. The solvent according to claim 1, wherein a calibration gas not containing a solvent gas is supplied to the solvent gas processing apparatus main body by a blower, and the solvent gas processing apparatus main body can be calibrated. Gas processing device. 4. The method according to claim 3, wherein after the calibration gas is supplied to the solvent gas processing apparatus main body, the solvent gas is supplied from the solvent gas generator to perform an operation for evaluating the processing capacity of the solvent gas processing apparatus main body. Solvent gas processing equipment.

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