JP5533708B2 - Antenna carrier, array antenna type plasma CVD apparatus, and antenna and substrate carrying method of array antenna type plasma CVD apparatus - Google Patents

Description

  The present invention relates to an array antenna type plasma CVD apparatus for generating a thin film on a substrate surface by generating plasma in a vacuum chamber, and in particular, an antenna carrier for carrying an antenna in a vacuum chamber, and the antenna carrier. Further, the present invention relates to an array antenna type plasma CVD apparatus and a method for transferring an antenna and a substrate into a vacuum chamber.

  Conventionally, an array antenna type plasma CVD apparatus disclosed in Patent Documents 1 to 3 is known. These array antenna type plasma CVD apparatuses include a vacuum chamber that can be evacuated to a vacuum state, and a plurality of connectors electrically connected to a high-frequency power source are disposed on the ceiling of the vacuum chamber. Yes. An array antenna unit having a plurality of electrode rods is provided in the vacuum chamber, and the electrode rods of the array antenna unit are connected to the plurality of connectors.

  And while conveying the board | substrate carriage for holding a board | substrate in the vacuum chamber pressure-reduced to the vacuum state, and supplying the material gas in a vacuum chamber in the state which the said board | substrate opposes the array antenna unit, The high frequency power is supplied to the electrode rod. As a result, plasma is generated in a vacuum atmosphere, the component of the material gas decomposed by the plasma adheres to the surface of the substrate, and a thin film such as an amorphous silicon film or a microcrystalline silicon film is generated on the substrate surface. It becomes.

JP 2007-262541 A JP 2003-86581 A JP 2003-109798 A

  In the above array antenna type plasma CVD apparatus, a film adheres to the surface of the electrode rod in the process of forming a thin film on the surface of the substrate. Therefore, it is necessary to periodically maintain the array antenna unit. However, in the conventional array antenna type plasma CVD apparatus, at the time of maintenance, each electrode bar must be removed from the connector one by one or a new electrode bar must be connected to the connector. For this reason, during the maintenance, the work of attaching and detaching a large number of electrode rods and the transportation work become complicated, and it takes a long time for the maintenance. It was.

  A guide roller is provided in an array antenna unit that integrally holds a plurality of electrode rods, and a guide rail that guides the guide rollers is provided in a vacuum chamber, and the electrode rods are conveyed together. It may be possible to make maintenance more efficient. However, if dedicated parts for conveying the array antenna unit, such as guide rails and guide rollers, are provided, the space in the vacuum chamber must be widened accordingly, and the entire apparatus becomes large. In addition, because the vacuum chamber is in a vacuum state and is exposed to material gas, dedicated parts such as guide rails and guide rollers must use vacuum pressure resistant and chemical resistant parts. In other words, the cost of parts increases.

  The present invention provides an antenna carrier, an array antenna type plasma CVD apparatus, and an array antenna type that can simplify the maintenance work of the array antenna unit without increasing the size of the apparatus and suppressing the cost. An object of the present invention is to provide an antenna and a substrate transfer method for a plasma CVD apparatus.

  In order to solve the above-mentioned problems, an antenna carrier of the present invention is electrically connected to a high-frequency power source provided in a vacuum chamber in which a material gas is supplied from a gas supply source into an interior that can be decompressed to a vacuum state. It has a plurality of possible connectors and a plurality of electrode rods that can be connected to each of the plurality of connectors in the vacuum chamber, and plasma is generated by supplying power from a high-frequency power source with the electrode rods connected to the connectors An antenna antenna unit that is detachably latched, and an antenna latch means for detachably latching the array antenna unit and maintaining the connector and the electrode rod in a connected state while the array antenna unit is latched, and a vacuum chamber. A guide unit for holding the substrate and a movement guide unit corresponding to the guide unit. An antenna carrier for carrying the array antenna unit to an array antenna type plasma CVD apparatus comprising: a substrate carrier for carrying the substrate to a position facing the array antenna unit that is guided by the means and held in the vacuum chamber. An antenna holding member that detachably holds the array antenna unit, and a conveyance guide unit that corresponds to the guide means and conveys the array antenna unit that is guided by the guide means and held by the antenna holding member, It is characterized by having.

  Moreover, the antenna carrier of the present invention is characterized in that the conveyance guide section is composed of wheels that roll on guide rails that constitute guide means.

  The antenna carrier of the present invention is characterized in that the antenna holding member further includes a displacement means for displacing the array antenna unit in the connection direction of the plurality of connectors provided in the vacuum chamber.

  In the antenna carrier of the present invention, a plurality of connectors are provided above the inside of the vacuum chamber, and the electrode rods are arranged so as to be connectable from below in the vertical direction upward, and the displacement means includes the array antenna unit. It is characterized by being raised or lowered in the vertical direction.

  In the antenna carrier of the present invention, the antenna holding member holds a plurality of array antenna units, and a plurality of displacement means are provided corresponding to the plurality of array antenna units. The array antenna units can be raised or lowered in the vertical direction independently of each other.

  In the antenna carrier of the present invention, the antenna holding member holds the array antenna unit with the arrangement direction of the plurality of electrode rods aligned with the carrying direction, and part or all of the antenna holding member carries It is provided to be movable in the horizontal direction intersecting the direction.

  Further, the array antenna type plasma CVD apparatus of the present invention includes a vacuum chamber in which a material gas is supplied from a gas supply source to an inside that can be decompressed to a vacuum state, and a plurality of plasma antennas that are provided in the vacuum chamber and can be electrically connected to a high frequency power source Array antenna having a plurality of electrode rods connectable to each of the plurality of connectors in the vacuum chamber, and generating plasma by supplying power from a high-frequency power source with the electrode rods connected to the connectors An antenna latch means for detachably latching the unit and the array antenna unit, and maintaining the connector and the electrode rod in a connected state with the array antenna unit latched, and a guide means provided in the vacuum chamber And a movement guide portion corresponding to the guide means, the movement guide portion being a guide. Corresponding to a substrate transport body for transporting the substrate to a position facing the array antenna unit guided by the means and held in the vacuum chamber, an antenna holding member for detachably holding the array antenna unit, and a guide means And an antenna carrier that moves in the vacuum chamber by being guided by the guide means, and the movement guide part of the substrate carrier and the carrier guide part of the antenna carrier are common. It is possible to move in the vacuum chamber by being guided by the guide means.

  In the array antenna plasma CVD apparatus of the present invention, the movement guide part of the substrate carrier and the carrier guide part of the antenna carrier are constituted by wheels, and the guide means provided in the vacuum chamber can roll the wheels. It is characterized by comprising a guide rail.

  In the array antenna type plasma CVD apparatus of the present invention, the antenna holding member further includes a displacement means for displacing the array antenna unit in the connection direction of the plurality of connectors provided in the vacuum chamber.

  Further, in the array antenna type plasma CVD apparatus of the present invention, the plurality of connectors are provided inside the vacuum chamber and arranged so that the electrode rods can be connected upward from the lower side in the vertical direction. The antenna unit is raised or lowered in the vertical direction.

  In the array antenna type plasma CVD apparatus of the present invention, the antenna holding member holds a plurality of array antenna units, and a plurality of displacement means are provided corresponding to the plurality of array antenna units. The means is characterized in that the array antenna unit can be raised or lowered in the vertical direction independently of each other.

  In the array antenna type plasma CVD apparatus of the present invention, the antenna holding member holds the array antenna unit with the arrangement direction of the plurality of electrode rods aligned with the transport direction, and part or all of the antenna holding member Is provided so as to be movable in the horizontal direction intersecting the transport direction.

  In addition, the antenna and the substrate transfer method of the array antenna type plasma CVD apparatus of the present invention use an antenna carrier holding an array antenna unit having a plurality of electrode rods to guide a guide means provided in a vacuum chamber. Therefore, the array antenna unit is placed in the vacuum chamber so that each of the electrode rods of the array antenna unit carried in the vacuum chamber and the step of carrying is collectively connected to a plurality of connectors electrically connected to the high-frequency power source. And the step of unloading the antenna carrier from the inside of the vacuum chamber, and the step of guiding the substrate carrier holding the substrate to the position where the substrate faces the array antenna unit that is hooked in the vacuum chamber. And conveying according to the guidance of the means.

  According to the present invention, the vacuum chamber, that is, the entire apparatus is not increased in size, and the transportation work of the array antenna unit can be simplified while suppressing the cost.

It is a perspective view which shows the front side of a vacuum chamber. It is a perspective view which shows the back side of a vacuum chamber. It is a figure which shows typically the cross section of the front side of a vacuum chamber. 3 is a right side view of the vacuum chamber 1. FIG. It is a perspective view of an array antenna unit. It is the elements on larger scale of FIG. (A) is the VII (a) -VII (a) sectional view taken on the line of FIG. 6, (b) is the VII (b) -VII (b) sectional view taken on the line of FIG. (A) is a top view of FIG. 6, (b) is a perspective view of a first antenna side connector. It is front sectional drawing of the vacuum chamber of the state by which the array antenna unit was latched. It is a right view of the vacuum chamber in the state where the array antenna unit is hooked. It is a perspective view of a board | substrate conveyance body. It is a top view of a board | substrate conveyance body. It is a right view of a board | substrate conveyance body. It is a right view of the vacuum chamber in the state in which the board | substrate conveyance body was carried in. (A) is a perspective view of an antenna carrier, and (b) is an enlarged view of an alternate long and short dash line portion of (a). It is the elements on larger scale of FIG.15 (b). It is a figure explaining the relationship between an adjustment member and an array antenna unit when an array antenna unit is hold | maintained at the antenna conveyance body. It is a perspective view which shows the state by which the array antenna unit was hold | maintained at the antenna carrier. It is a figure explaining the process which latches an array antenna unit in a vacuum chamber. It is a conceptual diagram explaining the process of carrying out an antenna carrier.

  Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. The dimensions, materials, and other specific numerical values shown in the embodiments are merely examples for facilitating the understanding of the invention, and do not limit the present invention unless otherwise specified. In the present specification and drawings, elements having substantially the same function and configuration are denoted by the same reference numerals, and redundant description is omitted, and elements not directly related to the present invention are not illustrated. To do.

(Configuration of vacuum chamber)
First, the structure of the vacuum chamber of the array antenna type (inductively coupled) plasma CVD apparatus according to the present embodiment will be described with reference to FIGS. FIG. 1 is a perspective view showing the front side of the vacuum chamber, and FIG. 2 is a perspective view showing the back side of the vacuum chamber.

  As shown in FIGS. 1 and 2, the vacuum chamber 1 includes a housing 2. The housing 2 is arranged facing the ceiling 2a and the bottom 2b facing in the y direction in the figure, the right side 2c and the left side 2d facing in the x direction in the figure, and in the z direction in the figure. A front part 2e and a back part 2f. In the following description, the ceiling 2a side is defined as the upper or upper surface of the vacuum chamber 1, the right side 2c side is defined as the right or right side of the vacuum chamber 1, and the left side 2d side is defined as the left or left side of the vacuum chamber 1. .

  A front opening 3 and a rear opening 4 are formed in the front part 2e and the back part 2f, respectively. A front opening / closing door 5 and a rear opening / closing door 6 for opening and closing the front opening 3 and the rear opening 4 are respectively provided. Is provided. A right opening 7 is also formed in the right side surface 2c, and an open / close door 8 for opening and closing the right opening 7 is provided. Further, a left opening 9 is formed in the left side surface portion 2d. The left opening 9 can be connected to a substrate transfer chamber (not shown). The left opening 9 is provided with a gate valve (not shown) for connecting the vacuum chamber 1 and the substrate transfer chamber while maintaining a vacuum state or blocking the connection state. Then, by closing the gate valve and closing the front opening / closing door 5, the rear opening / closing door 6, and the opening / closing door 8, an internal space 10 that is completely sealed from the outside is formed inside the housing 2. Become.

  The ceiling portion 2a is provided with three rows of connector groups 11a, 11b, and 11c. In these connector groups 11a, 11b, and 11c, a plurality of connectors are arranged in series along the x direction in the figure, and a predetermined interval is maintained in the z direction in the figure.

  FIG. 3 is a diagram schematically showing a cross section of the front side of the vacuum chamber 1. As shown in this figure, the connector group 11 a includes a first ceiling-side connector 13 electrically connected to a supply side (non-grounded side) of a high-frequency power source 12 that supplies high-frequency power, and a ground side of the high-frequency power source 12. The second ceiling-side connectors 14 that are electrically connected are alternately provided while maintaining a predetermined interval. The first ceiling side connector 13 and the second ceiling side connector 14 have their connecting portions directed downward in the vertical direction (bottom surface portion 2b), and the electrode rods of the array antenna unit, which will be described later, are directed upward from below in the vertical direction. It is arranged so that it can be connected.

  As will be described in detail later, a gas supply source 15 is connected to the second ceiling-side connector 14, and the material gas supplied from the gas supply source 15 is connected to the second ceiling-side connector 14. It can be ejected from the electrode rod of the antenna unit into the vacuum chamber 1. Although the connector group 11a has been described here, the connector groups 11b and 11c have the same configuration as described above. Further, a vacuum pump 16 is connected to the ceiling 2a of the housing 2, and the vacuum chamber 1 can be decompressed to a vacuum state by driving the vacuum pump 16 with the internal space 10 sealed. Yes.

  The bottom surface 2b of the housing 2 is provided with a guide rail 17 (corresponding to the guide means of the present invention) extending along the x direction in the figure from the right side 2c to the left side 2d. FIG. 4 is a right side view of the vacuum chamber 1. As shown in this figure, the guide rails 17 are provided in the vicinity of the front portion 2e and the vicinity of the back portion 2f, respectively. Thus, a pair is arranged with the interval maintained. The pair of guide rails 17 function as a guide when a board or an array antenna unit described later is carried into or out of the vacuum chamber 1.

(Configuration of array antenna unit)
Next, the configuration of the array antenna unit will be described with reference to FIGS. 5 is a perspective view of the array antenna unit 30, and FIG. 6 is a partially enlarged view of FIG. As shown in these drawings, the array antenna unit 30 includes an antenna support member 31, and a plurality of inductively coupled electrodes 50 are supported on the antenna support member 31.

  This inductively coupled electrode 50 is an antenna element in which a first electrode bar 51 and a second electrode bar 52 are electrically connected by a connection fitting 53, and a plurality of inductive coupling electrodes 50 are supported along the longitudinal direction of the antenna support member 31. Has been. Specifically, the upper ends of the electrode rods 51 and 52 are supported by the antenna support member 31 in a state where the electrode rods 51 and 52 are alternately arranged in series while maintaining a predetermined interval in a direction orthogonal to the longitudinal direction. . Thereby, both the electrode rods 51 and 52 are suspended and supported by the antenna support member 31 in a state in which their longitudinal directions are along the vertical direction.

  7A is a cross-sectional view taken along line VII (a) -VII (a) in FIG. 6, and FIG. 7B is a cross-sectional view taken along line VII (b) -VII (b) in FIG. As shown in these drawings, the antenna support member 31 is formed of a member having a U-shaped cross section, and its opening faces downward in the vertical direction. As is clear from FIG. 7B, the antenna support member 31 has an antenna support hole 32 formed at the center in the width direction. As shown in FIGS. 7A and 8A, the antenna support hole 32 has a long hole shape formed along the longitudinal direction of the antenna support member 31. In the antenna support hole 32, The first electrode rod 51 and the second electrode rod 52 are supported in a suspended manner alternately.

  More specifically, the first antenna-side connector 54 that can be connected to the first ceiling-side connector 13 provided on the ceiling 2 a of the vacuum chamber 1 is fixed to the upper end of the first electrode bar 51. A second antenna-side connector 55 that can be connected to the second ceiling-side connector 14 provided on the ceiling 2 a of the vacuum chamber 1 is fixed to the upper end of the second electrode rod 52.

  FIG. 8A is a top view of FIG. 6, and FIG. 8B is a perspective view of the first antenna-side connector 54. However, FIG. 8A shows a state in which a cover member 33 described later is removed. As shown in this figure, the first antenna-side connector 54 includes a cylindrical main body 54a, and is fixed to the bottom surface portion 54b of the main body 54a with the first electrode rod 51 penetrating therethrough. A flange portion 54c having a larger diameter than that of the main body 54a is provided on the opening side of the main body 54a. The flange portion 54 c maintains a dimensional relationship that has a larger diameter than the width of the antenna support hole 32 formed in the antenna support member 31. The main body 54a is formed with a pair of flat surface portions 54d and 54d having chamfered portions facing each other on the cylindrical outer peripheral surface. The planar portions 54d and 54d maintain a dimensional relationship in which the facing distance is slightly smaller than the width of the antenna support hole 32.

  Therefore, when the first antenna side connector 54 is inserted from above the antenna support hole 32, the main body 54a is inserted through the antenna support hole 32, and the flange portion 54c is brought into contact with the upper surface of the antenna support member 31, and is latched. As a result, the first electrode rod 51 is suspended and supported by the antenna support member 31.

  At this time, the width between the flat portions 54 d and 54 d is a dimensional relationship that restricts the movement of the first antenna-side connector 54 in the width direction of the antenna support member 31 within a range that can be connected to the first ceiling-side connector 13. Is maintained. In addition, even if rotational stress acts on the first antenna-side connector 54 supported by the antenna support member 31, the flat portions 54 d and 54 d come into contact with the inner peripheral edge of the antenna support hole 32, and the first antenna-side connector 54 rotates. Is limited. In this way, the first electrode rods 51 are positioned in series with the antenna support member 31 positioned in the width direction, and all the first electrode rods 51 are supported hanging down in the same direction. .

  Although the first antenna side connector 54 has been described here, the configuration of the second antenna side connector 55 is the same as that of the first antenna side connector 54. That is, the second antenna-side connector 55 includes a main body 55a, a bottom surface portion 55b, a flange portion 55c, and a pair of flat surface portions 55d and 55d, and the second electrode rod 52 penetrates the bottom surface portion 55b. It is fixed in the state.

  And the flange part 55c larger diameter than the said main body 55a is provided in the opening side of the main body 55a. As described above, the second antenna-side connector 55 is also restricted from rotating and moving in the width direction of the antenna support member 31 as in the case of the first antenna-side connector 54, and the second electrode rod 52 is also arranged in series. All the second electrode rods 52 are supported in a suspended manner in the same direction.

  As shown in FIG. 7A, each first electrode bar 51 includes an outer cylinder 56 made of a dielectric material such as ceramics or resin on the outer periphery thereof. On the other hand, each second electrode rod 52 has a cylindrical shape, and a gas supply path 52a extending in the longitudinal direction is formed inside. Each second electrode rod 52 includes an ejection hole 52b that communicates perpendicularly to the gas supply path 52a. As described above, the second electrode rod 52 is connected to the second ceiling-side connector 14 when the array antenna unit 30 is hooked in the vacuum chamber 1, and is connected to the gas supply source 15 and the gas supply. The road 52a communicates with each other.

  Accordingly, when the material gas is supplied from the gas supply source 15 in a state where the array antenna unit 30 is hooked in the vacuum chamber 1, the material gas is directed from the ejection holes 52 b toward the internal space 10 of the vacuum chamber 1. It will be ejected.

  As shown in FIGS. 5 to 8, a cover member 33 having a U-shaped cross section covering the antenna-side connectors 54 and 55 is fixed to the antenna support member 31. The cover member 33 is provided with a plurality of circular through holes 33a that coincide with the main bodies 54a, 55a of the antenna-side connectors 54, 55. As a result, the openings of the main bodies 54 a and 55 a of the antenna-side connectors 54 and 55, that is, the upper ends of both the electrode bars 51 and 52 face upward through the through-holes 33 a of the cover member 33.

  In addition, an adhesion preventing panel 34 is provided on both side surfaces of the antenna support member 31 in the width direction. On the upper surface of the antenna support member 31 is a positioning pin that stands vertically upward and is tapered at the tip. 35 is provided. The positioning pin 35 is provided further outward in the longitudinal direction of the antenna support member 31 than the electrode rod located on the outermost side among the plurality of first electrode rods 51 and second electrode rods 52. Further, a hooking hole 36 is formed in the vicinity of both ends in the longitudinal direction of the antenna support member 31. The retaining hole 36 is for retaining the array antenna unit 30 on the vacuum chamber 1.

  FIG. 9 is a front sectional view of the vacuum chamber 1 in a state where the array antenna unit 30 is hooked. As shown in this figure, the ceiling portion 2a of the vacuum chamber 1 is provided with positioning holes 18 penetrating in the vertical direction and tapered downward in the vertical direction in the vicinity of the right side surface portion 2c and the left side surface portion 2d. Yes. Further, a latch pin 19 that hangs downward is fixed to the outside of the positioning hole 18 in the x direction in the figure. The positioning hole 18 corresponds to the positioning pin 35 of the array antenna unit, and the locking pin 19 corresponds to the locking hole 36 of the array antenna unit 30.

  Although details of the method of attaching the array antenna unit 30 will be described later, when the array antenna unit 30 is hooked in the vacuum chamber 1, the array antenna unit 30 is mounted on the ceiling so that the positioning pins 35 are inserted into the positioning holes 18. Lift up from below the part 2a. Then, the latch holes 36 of the array antenna unit 30 are inserted into the latch pins 19, and at this time, the first ceiling-side connector 13 and the second ceiling-side connector 14 provided on the ceiling portion 2 a are respectively connected to the array antenna. The unit 30 is fitted into each of the first antenna side connector 54 and the second antenna side connector 55. In this state, by fixing a fixing means such as a bolt from below the latch pin 19, the array antenna unit 30 is latched on the ceiling portion 2 a of the vacuum chamber 1 as shown in the figure.

  FIG. 10 is a right side view of the vacuum chamber 1 with the array antenna unit 30 hooked. As described above, the ceiling portion 2a is provided with three rows of connector groups 11a, 11b, and 11c, and the array antenna unit 30 can be connected to the connector groups 11a, 11b, and 11c. Therefore, when the array antenna unit 30 is connected to all the connector groups 11a, 11b, and 11c, as shown in the figure, the three array antenna units 30 are positioned at a predetermined interval in the z direction in the figure. It will be.

  Then, a substrate carrier holding the substrate is carried into the vacuum chamber 1 where the array antenna unit 30 is hooked as described above. This board | substrate conveyance body is demonstrated using FIGS. 11-13.

(Configuration of substrate carrier)
11 is a perspective view of the substrate transport body 60, FIG. 12 is a top view of the substrate transport body 60, and FIG. 13 is a right side view of the substrate transport body 60. As shown in these drawings, the substrate transport body 60 includes a base 61, and wheels 62 (corresponding to the movement guide portion of the present invention) at both ends in the width direction (z direction in the figure) of the base 61. Are provided. The wheel 62 is provided so that the substrate transport body 60 can move in a straight line in the x direction in the drawing, and the substrate 62 is transported by rolling on the guide rail 17 described above in the vacuum chamber 1. The body 60 can be moved in the vacuum chamber 1.

  The base 61 is provided with a thin plate-like substrate holding member 63 that stands upward from the base 61. The substrate holding member 63 can detachably hold the substrate W to which the amorphous silicon film or the microcrystalline silicon film is attached, and is in a direction orthogonal to the transport direction of the substrate transport body 60 ( Six are provided at predetermined intervals in the z direction in the figure.

  On the lower surface of the base 61, a rack 64 fixed at the center position in the width direction of the base 61 is provided. The rack 64 is provided along the transfer direction of the substrate transfer body 60, and is provided at the bottom of the vacuum chamber 1 and meshes with the drive pinion 21 rotated by the drive motor 20 as shown in FIG. It has become. The drive motor 20 and the drive pinion 21 are also provided in the substrate transfer chamber connected to the vacuum chamber 1 in the same manner. Therefore, when the drive motor 20 is driven and the drive pinion 21 is rotationally driven, the rotational power of the drive pinion 21 is converted into the linear motion of the rack 64, whereby the substrate transport body 60 moves inside the substrate transport chamber and the vacuum chamber 1. Will move.

  FIG. 14 is a right side view of the vacuum chamber 1 in a state in which the substrate transport body 60 is loaded. As shown in this figure, in a state where the substrate transport body 60 is carried into the vacuum chamber 1, the substrate W is placed on both sides in the width direction (z direction in the figure) with respect to one array antenna unit 30. Keep facing each other and face each other. The procedure of the film forming process will be described below.

(Deposition process)
First, the internal space 10 of the vacuum chamber 1 is sealed, and the vacuum pump 16 is driven to decompress the internal space 10 to a vacuum state. In this state, the substrate transfer body 60 is carried into the vacuum chamber 1 from the substrate transfer chamber connected to the vacuum chamber 1 through the gate valve and maintained in a vacuum state. Then, the material gas is supplied from the gas supply source 15 to the second electrode rod 52, and the material gas is ejected into the vacuum chamber 1 from the ejection hole 52b. When high frequency power is supplied to the inductively coupled electrode 50 by the high frequency power source 12 in this state, plasma is generated around the array antenna unit 30, and the component of the material gas decomposed by the plasma adheres to the surface of the substrate W. . In this manner, a thin film such as an amorphous silicon film or a microcrystalline silicon film is formed on the surface of the substrate W.

  When the film forming process is completed as described above, the substrate transfer body 60 is unloaded from the vacuum chamber 1 to the substrate transfer chamber, and the substrate transfer body 60 holding a new substrate W is transferred into the vacuum chamber 1. Thereafter, the above steps are repeatedly performed.

  Here, during the film forming process, a film adheres to the array antenna unit 30, and therefore, it is necessary to periodically remove the array antenna unit 30 from the vacuum chamber 1 for maintenance. In the following, the configuration of the antenna carrier that carries the array antenna unit 30 into and out of the vacuum chamber 1 during maintenance of the array antenna unit 30 will be described. The attachment / detachment method will be described.

(Configuration of antenna carrier)
FIG. 15A is a perspective view of the antenna carrier 70, and FIG. 15B is a partially enlarged view of a dashed line in FIG. 15A. As shown in this figure, the antenna carrier 70 is provided with a base 71 as in the case of the substrate carrier 60 described above. Are provided). The wheels 72 are provided so that the antenna carrier 70 can move in a straight line in the x direction in the figure. The wheels 72 roll on the guide rail 17 in the vacuum chamber 1, thereby The body 70 can be moved in the vacuum chamber 1.

  In addition, the base 71 is provided with three antenna holding members 73 that hold the array antenna unit 30 while maintaining a gap in the horizontal direction orthogonal to the transfer direction of the antenna carrier 70. The antenna holding member 73 includes a slide device 74 that is fixed to the base 71 at both ends of the antenna carrier 70 in the carrying direction, and a pair of support columns 75a and 75b that stand vertically upward from the slide device 74. Yes. The pair of support columns 75 a and 75 b are configured to be slidable in a horizontal direction (z direction) orthogonal to the transport direction (x direction) of the antenna transport body 70 by the slide device 74.

  Each of the pair of support columns 75a and 75b accommodates an air cylinder 76 (corresponding to the displacement means of the present invention) for expanding and contracting the telescopic rod 76a in the vertical direction. At both ends of the telescopic rod 76a of the air cylinder 76, both end portions of a thin plate-like adjusting member 78 are placed via a load receiving portion 77, whereby the adjusting member 78 becomes a pair of support columns 75a and 75b. Will be suspended.

  FIG. 16 is a partially enlarged view of FIG. As shown in this figure, a load receiving portion 77 is provided at the tip of the telescopic rod 76a. The load receiving portion 77 is fixed to the distal end of the telescopic rod 76 a and is placed on the receiving surface 79 a so that the concave receiving surface 79 a faces upward, and is provided integrally on the lower surface of the adjusting member 78. And the oscillating portion 80 formed. The receiving portion 79 and the swinging portion 80 are made of metal such as stainless steel, but may be made of a material other than metal such as resin.

  In the swinging portion 80, the hemispherical spherical surface portion 80a is in contact with the receiving surface 79a of the receiving portion 79. At this time, the curvature of the receiving surface 79a is smaller than the curvature of the spherical surface portion 80a. Therefore, a gap is formed between the spherical surface portion 80 a and the receiving surface 79 a, so that the swinging portion 80 can swing with respect to the receiving portion 79. In other words, the configuration of the load receiving portion 77 described above allows the adjustment member 78 to move or tilt in the horizontal direction. However, when the swinging portion 80 is inclined at a predetermined angle on the receiving surface 79a, the adjustment member 78 comes into contact with the outer peripheral edge of the receiving portion 79, and the inclination beyond that is limited. That is, the adjustment member 78 is designed to be allowed to tilt within a range that does not fall off the receiving portion 79.

  FIG. 17 is a diagram illustrating the relationship between the adjustment member 78 and the array antenna unit 30 when the array antenna unit 30 is held on the antenna carrier 70. The adjustment member 78 extends in the conveying direction of the antenna carrier 70, and a plurality of movements projecting from the extending portion 78a in a direction intersecting in the horizontal direction (orthogonal in the present embodiment). The flat surface formed by the limiting portion 78b is formed of a thin plate member having a comb shape. The plurality of movement restricting portions 78b are provided at predetermined intervals in the longitudinal direction of the extending portion 78a, that is, in the conveying direction of the antenna carrier 70.

  As shown in the figure, when the array antenna unit 30 is held by the antenna carrier 70, the lower surface of the antenna support member 31 of the array antenna unit 30 and the upper surface of the adjustment member 78 are in pressure contact with each other in a surface contact state. Thereby, the load of the array antenna unit 30 acts on the load receiving portion 77 via the adjustment member 78, and the array antenna unit 30 is held by the antenna holding member 73 of the antenna carrier 70.

  In the state where the array antenna unit 30 is held by the antenna holding member 73, the main body 54a of the first antenna-side connector 54 and the main body 55a of the second antenna-side connector 55 are spaced apart from each other by the movement restriction portions 78b adjacent to each other. It is designed to be located alternately. At this time, the distance between the movement restricting portions 78b is slightly larger than the diameter of the main body 54a of the first antenna side connector 54 and the main body 55a of the second antenna side connector 55. As a result, the movement restricting portion 78b faces the opposing surface between the adjacent first electrode rod 51 (first antenna side connector 54) and the second electrode rod 52 (second antenna side connector 55), and the antenna carrier 70. The movement of both electrode bars 51 and 52 with respect to the transport direction is limited.

  The adjustment member 78 has an extending portion 78a provided only on one side of the electrode rods 51 and 52, and extends in the horizontal direction (z direction) orthogonal to the conveyance direction (x direction) of the antenna carrier 70. The function of restricting the movement of the electrode rods 51 and 52 is not provided. That is, the adjustment member 78 restricts at least the movement of the electrode bars 51 and 52 in the transport direction (x direction) of the antenna transport body 70.

  On the other hand, as already described, the movement of both electrode bars 51 and 52 in the horizontal direction orthogonal to the transport direction is limited by the antenna support hole 32 of the antenna support member 31 (see FIG. 8). At this time, since the antenna support hole 32 is formed in a long hole shape that is continuous in the longitudinal direction of the antenna support member 31, in the array antenna unit 30, movement of both electrode bars 51 and 52 in the arrangement direction is restricted. It has not been. That is, the antenna support member 31 restricts the movement of the electrode rods 51 and 52 only in the horizontal direction orthogonal to the conveyance direction of the antenna carrier 70.

  FIG. 18 is a perspective view showing a state where the array antenna unit 30 is held by the antenna carrier 70. As shown in this figure, in a state where the array antenna unit 30 is held by the antenna carrier 70, the movement of the electrode rods 51 and 52 in the carrying direction (x direction in the figure) 78), and the movement of both electrode bars 51 and 52 in the horizontal direction (z direction in the figure) orthogonal to the transport direction is limited by the array antenna unit 30 (antenna support member 31).

  Since the array antenna unit 30 is placed in the high-temperature vacuum chamber 1, the antenna support member 31 is thermally expanded. Therefore, while restricting the movement of the electrode rods 51 and 52 in the horizontal direction perpendicular to the transport direction, the antenna support hole 32 has a long hole shape to ensure escape during thermal expansion, and between the members. I try to prevent interference. However, if the escape at the time of thermal expansion is ensured as described above, when the array antenna unit 30 is hooked in the vacuum chamber 1, the positions of the electrode bars 51, 52 are shifted, and the electrode bars 51, 52 are shifted. The operation of connecting the cables to the ceiling side connectors 13 and 14 becomes complicated.

  Therefore, in the present embodiment, the adjustment member 78 is provided on the antenna carrier 70 that is carried outside during the film forming process, and the movement of the electrode rods 51 and 52 in the conveyance direction is restricted by the adjustment member 78. To do. As a result, it is possible to ensure the positioning accuracy when the array antenna unit 30 is hooked in the vacuum chamber 1, and the working efficiency at the time of hooking can be improved. In other words, with the above-described configuration, it is possible to meet two conflicting requirements consisting of securing escape during thermal expansion during film formation and positioning accuracy when latching the array antenna unit 30. It has become. Hereinafter, the operation when the new array antenna unit 30 is hooked in the vacuum chamber 1 in a state where the array antenna unit 30 that needs to be cleaned is detached from the vacuum chamber 1 will be described.

(Holding process of array antenna unit)
In the present embodiment, as shown in FIG. 1, an antenna carrier 70 is carried into the vacuum chamber 1 from the right opening 7 provided in the right side surface 2 c of the vacuum chamber 1. In FIG. 1, when the open / close door 8 is opened, an antenna transfer chamber (not shown) can be connected to the vacuum chamber 1. The antenna transfer chamber is provided with a guide rail that can be connected to a guide rail 17 provided in the vacuum chamber 1. When the antenna transfer chamber is connected to the vacuum chamber 1, a guide provided in the antenna transfer chamber is provided. The rail and the guide rail 17 provided in the vacuum chamber 1 are continuous. As a result, the antenna carrier 70 is carried into the vacuum chamber 1 from the antenna carrier chamber.

  Thus, according to the present embodiment, the antenna carrier 70 is guided by the guide rail 17 for carrying the substrate carrier 60 and moves in the vacuum chamber 1. In other words, since the same guide rail 17 is shared by the substrate carrier 60 and the antenna carrier 70, it is not necessary to provide a dedicated component for guiding the antenna carrier 70 in the vacuum chamber 1. . Therefore, the vacuum chamber 1, that is, the entire plasma CVD apparatus is not increased in size, and the transporting operation of the array antenna unit 30 can be simplified while suppressing the cost.

  FIG. 19 is a diagram illustrating a process of hanging the array antenna unit 30 in the vacuum chamber 1. In FIG. 19A, as shown in FIG. 18, the antenna carrier 70 holding the array antenna unit 30 that has been cleaned is carried into the vacuum chamber 1 from the antenna carrier chamber and comes into contact with a stopper (not shown). The state stopped at a predetermined position is shown. The stopper is provided at a position that contacts the antenna carrier 70 but does not contact the substrate carrier 60.

  When the telescopic rod 76a of the air cylinder 76 is extended upward from this state, the positioning pins 35 of the array antenna unit 30 are provided on the ceiling portion 2a of the vacuum chamber 1 as shown in FIG. The positioning hole 18 is inserted. As a result, the array antenna unit 30 is lifted while being positioned with respect to the vacuum chamber 1. In the process of raising the array antenna unit 30, the latch pin 19 provided on the ceiling portion 2 a is inserted into the latch hole 36, and the first ceiling-side connector 13 is fitted to the first antenna-side connector 54. The second ceiling side connector 14 is fitted to the second antenna side connector 55.

  At this time, the array antenna unit 30 is swingably held by the antenna carrier 70 by a load receiving portion 77, that is, a load receiving structure including the receiving surface 79a and the swinging portion 80 (see FIG. 16). Therefore, even if the array antenna unit 30 is deviated from the latching position, the array antenna unit 30 can be adjusted to a predetermined latching position by swinging the array antenna unit 30. Thereby, even if the dimensional management of the positioning pin 35, the positioning hole 18, or the connectors 13, 14, 54, 55 is not strict, the array antenna unit 30 can be reliably hung on the ceiling portion 2a.

  Then, in the state shown in FIG. 19B, the array antenna unit 30 is vacuumed by fixing a fixing means such as a bolt from below to the latch pin 19 inserted through the latch hole 36 of the array antenna unit 30. It is latched in the chamber 1. When the array antenna unit 30 is hooked in this way, the telescopic rod 76a of the air cylinder 76 is contracted downward. Then, as shown in FIG. 19 (c), the adjustment member 78 suspended on the columns 75 a and 75 b is lowered and the array antenna unit 30 is detached from the antenna carrier 70.

  However, in this state, the first electrode rod 51 and the second electrode rod 52 hanging from the ceiling portion 2a of the vacuum chamber 1 and the columns 75a and 75b are positioned on the same straight line in the conveyance direction of the antenna carrier 70. It has been done. Further, the movement restricting portion 78b of the adjustment member 78 suspended from the pair of support columns 75a and 75b remains facing the first electrode rod 51 and the second electrode rod 52. Therefore, in this state, the antenna carrier 70 cannot be carried out of the vacuum chamber 1.

  Therefore, as shown in FIG. 20, the slide device 74 is driven to slide the pair of support columns 75a and 75b in the horizontal direction orthogonal to the transport direction of the antenna transport body 70, and the pair of support columns 75a and 75b are moved to the first position. The electrode rod 51 and the second electrode rod 52 are retracted from the alignment line. As a result, the movement restricting portion 78b of the adjustment member 78 is also retracted from the opposing surfaces of the adjacent first electrode rod 51 and second electrode rod 52. Then, when the antenna carrier 70 is carried out of the vacuum chamber 1 along the guide rail 17 again, the maintenance work is completed. As a result, the substrate transfer body 60 can be carried into the vacuum chamber 1 and the film forming process can be resumed.

  As described above, since the antenna carrier 70 is unloaded from the vacuum chamber 1 during the film forming process, it is not necessary to use pressure-resistant or chemical-resistant parts for the antenna carrier 70, and cost is reduced. It becomes possible to suppress. Further, since it is not necessary to keep the antenna carrier 70 in the vacuum chamber 1 during the film forming process, even if the plasma CVD apparatus is provided with a plurality of vacuum chambers 1, the single antenna carrier 70 is provided. It is only necessary to provide it.

  In the above embodiment, as a guide mechanism for transporting the substrate transport body 60 and the antenna transport body 70, the guide rail 17 is provided in the vacuum chamber 1, and the wheel 62 is provided in the substrate transport body 60. The wheels 72 are provided on the antenna carrier 70.

  However, conversely, a plurality of guide rollers may be arranged in the vacuum chamber, and a plate-like member that is in sliding contact with the guide rollers may be provided on the substrate carrier and the antenna carrier. In any case, the guide means is provided in the vacuum chamber, and the guide portion guided by the guide means may be provided on the substrate carrier and the antenna carrier. Further, at this time, the movement guide part provided on the substrate carrier and the conveyance guide part provided on the antenna carrier may be the same parts or different in size and shape. Good. That is, if the movement guide part provided in the substrate transport body and the transport guide part provided in the antenna transport body are guided by the same guide means provided in the vacuum chamber, the guide means and both guides are provided. The configuration of the part is not limited.

  In addition, the configurations of the array antenna unit and the antenna holding member in the above embodiment are merely examples. In any case, the antenna holding member only needs to hold the array antenna unit detachably. Therefore, in the antenna holding member, an adjustment member that restricts the movement of the electrode rod supported by the array antenna unit and a swing mechanism for swingably holding the array antenna unit are not essential components.

  Also, depending on the configuration of the array antenna unit and the configuration of the antenna holding member that holds the array antenna unit, a slide device that slides the antenna holding member is not essential. In other words, the purpose of sliding the antenna holding member in a direction orthogonal to or intersecting the transport direction is to prevent interference between the antenna holding member and the array antenna unit when the antenna transport body is carried out. Therefore, when carrying out the antenna carrier, if the antenna carrier and the array antenna unit do not interfere with each other, only a part of the antenna holding member is slid without sliding the whole antenna holding member, for example, only the adjusting member. You may make it slide. When the antenna holding member can be slid in a direction orthogonal to or intersecting the transport direction, the slide may be automatically performed by the slide device as in the above embodiment, or may be manually performed. . As described above, the configuration of the antenna holding member may be appropriately designed according to the configuration of the array antenna unit.

  In the above-described embodiment, the antenna carrier is provided with an air cylinder so that the array antenna unit can be moved up and down in the vertical direction. However, a displacement means for displacing the array antenna unit is not an essential configuration. In the above embodiment, the displacement means moves the array antenna unit up and down in the vertical direction. However, the displacement direction of the array antenna unit by the displacement means is not limited to this. In other words, the purpose of displacing the array antenna unit by the displacing means is to collectively connect the electrode rods (antenna side connector) of the array antenna unit to the connector provided in the vacuum chamber. Therefore, for example, when the connector provided in the vacuum chamber is arranged so that the electrode rod is displaced in the horizontal direction and connected, the displacing means displaces the array antenna unit in the same horizontal direction. Become. As described above, the displacing means of the present invention widely includes those that displace the array antenna unit in the connecting direction of the plurality of connectors provided in the vacuum chamber.

  In the above embodiment, the array antenna unit is moved up and down in the vertical direction by the air cylinder. However, the displacement of the array antenna unit may be manually performed. Further, in the case of providing a displacement means for automatically displacing the array antenna unit, the displacement means can be configured by various actuators such as a hydraulic cylinder and an electric cylinder, not limited to an air cylinder. However, since the air cylinder has higher cushioning properties than other devices, in combination with the above-described swing mechanism, the degree of freedom of movement when the array antenna unit is hooked is increased, and the ease of attachment can be improved.

  Moreover, in the said embodiment, although it was set as the structure which can hold | maintain three array antenna units simultaneously at an antenna carrier, the number of array antenna units which can be simultaneously hold | maintained at an antenna carrier is not limited. Further, when a plurality of array antenna units are configured to be held at the same time, the same number of antenna holding members as the array antenna units may be provided, and a plurality of array antenna units can be held on one antenna holding member. It is good also as a structure.

  In addition, when it is set as the structure which can hold | maintain several array antenna units simultaneously like the said embodiment, and the displacement means to displace these array antenna units is provided, each array antenna unit can be displaced individually. It is desirable. When each array antenna unit is hung on the vacuum chamber, it is necessary to visually check the connection state of the connector. At this time, if a plurality of array antenna units are displaced at the same time, it is difficult to confirm the mounting state of the array antenna unit positioned relatively far behind as viewed from the operator. Therefore, when a plurality of array antenna units are displaced by the displacement means, the displacement means may be configured to operate individually.

  The antenna carrier may be transported manually, or, like the substrate carrier, a carrier corresponding to the drive pinion may be provided to carry the carrier with a drive motor. It is good. Further, in the above embodiment, the substrate carrier is carried into the vacuum chamber from the left opening, and the antenna carrier is carried into the vacuum chamber from the right opening. The directions may be the same.

  As mentioned above, although preferred embodiment of this invention was described referring an accompanying drawing, it cannot be overemphasized that this invention is not limited to this embodiment. It will be apparent to those skilled in the art that various changes and modifications can be made within the scope of the claims, and these are naturally within the technical scope of the present invention. Is done.

  The present invention relates to an array antenna type plasma CVD apparatus for generating a thin film on a substrate surface by generating plasma in a vacuum chamber, and in particular, an antenna carrier for carrying an antenna in a vacuum chamber, and the antenna carrier. Further, the present invention can be used for an array antenna type plasma CVD apparatus and a method for transferring an antenna and a substrate into a vacuum chamber.

DESCRIPTION OF SYMBOLS 1 Vacuum chamber 10 Internal space 12 High frequency power supply 13 1st ceiling side connector 14 2nd ceiling side connector 15 Gas supply source 17 Guide rail 19 Latch pin 30 Array antenna unit 36 Latch hole 50 Inductive coupling type electrode 51 1st electrode rod 52 Second electrode rod 60 Substrate transport body 62 Wheel 70 Antenna transport body 72 Wheel 73 Antenna holding member 75a, 75b Strut 76 Air cylinder 77 Load receiving portion 79 Receiving portion 79a Receiving surface 80 Oscillating portion 80a Hemispherical portion W Substrate

Claims (13)

A vacuum chamber in which a material gas is supplied from a gas supply source into an interior that can be decompressed to a vacuum state;
A plurality of connectors provided in the vacuum chamber and electrically connectable to a high-frequency power source;
An array antenna having a plurality of electrode rods connectable to each of the plurality of connectors in the vacuum chamber, and generating plasma by supplying power from the high-frequency power source while the electrode rods are connected to the connectors Unit,
An antenna latching means for detachably latching the array antenna unit, and maintaining the connector and the electrode rod in a connected state with the array antenna unit latched;
Guide means provided in the vacuum chamber;
While holding a substrate, and having a movement guide portion corresponding to the guide means, the movement guide portion is guided by the guide means to the position facing the array antenna unit hung in the vacuum chamber. A substrate carrier for conveying the substrate;
An antenna carrier for carrying the array antenna unit to an array antenna type plasma CVD apparatus comprising:
An antenna holding member for detachably holding the array antenna unit;
A conveyance guide unit that corresponds to the guide unit and conveys the array antenna unit guided by the guide unit and held by the antenna holding member;
An antenna carrier characterized by comprising:   2. The antenna carrier according to claim 1, wherein the conveyance guide unit includes wheels that roll on a guide rail constituting the guide means.   The antenna carrier according to claim 1 or 2, wherein the antenna holding member further includes a displacement means for displacing the array antenna unit in a connection direction of the plurality of connectors provided in a vacuum chamber. The plurality of connectors are provided inside the vacuum chamber and disposed so that the electrode rods can be connected upward from the lower side in the vertical direction.
4. The antenna carrier according to claim 3, wherein the displacing means raises or lowers the array antenna unit in a vertical direction. The antenna holding member holds a plurality of the array antenna units, and is provided with a plurality of displacement means corresponding to the plurality of array antenna units.
5. The antenna carrier according to claim 4, wherein each of the plurality of displacing means can independently raise or lower the array antenna unit in the vertical direction.   The antenna holding member holds the array antenna unit with the arrangement direction of the plurality of electrode rods aligned with the transport direction, and a part or all of the antenna holding member intersects the transport direction in the horizontal direction. The antenna carrier according to any one of claims 1 to 5, wherein the antenna carrier is provided so as to be movable. A vacuum chamber in which a material gas is supplied from a gas supply source into an interior that can be decompressed to a vacuum state;
A plurality of connectors provided in the vacuum chamber and electrically connectable to a high-frequency power source;
An array antenna having a plurality of electrode rods connectable to each of the plurality of connectors in the vacuum chamber, and generating plasma by supplying power from the high-frequency power source while the electrode rods are connected to the connectors Unit,
An antenna latching means for detachably latching the array antenna unit, and maintaining the connector and the electrode rod in a connected state with the array antenna unit latched;
Guide means provided in the vacuum chamber;
The substrate has a movement guide portion corresponding to the guide means and holds the substrate, and the movement guide portion is guided by the guide means to a position facing the array antenna unit that is latched in the vacuum chamber. A substrate carrier for conveying
Antenna holding member for detachably holding the array antenna unit, and a carrier guide corresponding to the guide means, and the carrier guide guided by the guide means and moving in the vacuum chamber With body,
The array antenna type plasma CVD apparatus, wherein the movement guide section of the substrate transport body and the transport guide section of the antenna transport body are guided by the common guide means and can move in the vacuum chamber. .   The movement guide section of the substrate transport body and the transport guide section of the antenna transport body are configured by wheels, and the guide means provided in the vacuum chamber is configured by a guide rail on which the wheels can roll. 8. The array antenna type plasma CVD apparatus according to claim 7, wherein   9. The array antenna type plasma according to claim 7, wherein the antenna holding member further comprises a displacement means for displacing the array antenna unit in a connection direction of the plurality of connectors provided in the vacuum chamber. CVD equipment. The plurality of connectors are provided inside the vacuum chamber and disposed so that the electrode rods can be connected upward from the lower side in the vertical direction.
10. The array antenna type plasma CVD apparatus according to claim 9, wherein the displacing means raises or lowers the array antenna unit in a vertical direction. The antenna holding member holds a plurality of the array antenna units, and is provided with a plurality of displacement means corresponding to the plurality of array antenna units.
11. The array antenna type plasma CVD apparatus according to claim 10, wherein the plurality of displacing means can independently raise or lower the array antenna unit in the vertical direction.   The antenna holding member holds the array antenna unit with the arrangement direction of the plurality of electrode rods aligned with the transport direction, and a part or all of the antenna holding member intersects the transport direction in the horizontal direction. The array antenna type plasma CVD apparatus according to any one of claims 7 to 11, wherein the array antenna type plasma CVD apparatus is movably provided. Transporting the antenna carrier holding the array antenna unit having a plurality of electrode rods according to the guide of the guide means provided in the vacuum chamber;
The array antenna unit is latched in the vacuum chamber so that each electrode rod of the array antenna unit transported into the vacuum chamber is connected to a plurality of connectors electrically connected to a high frequency power source. Process,
Unloading the antenna carrier from the vacuum chamber;
Transporting the substrate transport body holding the substrate according to the guidance of the guide means to a position where the substrate faces the array antenna unit held in the vacuum chamber;
An antenna for an array antenna type plasma CVD apparatus and a substrate transport method.

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