JP5573723B2 - Antenna exchange method, antenna carrier system, and antenna carrier device - Google Patents

Description

  The present invention relates to an antenna replacement method, an antenna transfer system, and an antenna transfer device for an array antenna type plasma CVD apparatus that generates plasma in a vacuum chamber to generate a thin film on the surface of a film substrate.

  In recent years, plasma CVD that forms thin films such as amorphous silicon films or microcrystalline silicon films on resinous or metallic film substrates instead of glass substrates in order to improve weight reduction, workability, and mass productivity Equipment has been developed. In such a plasma CVD apparatus for forming a film substrate, for example, one set of electrodes is provided between a feed roller and a take-up roller, and the film substrate fed from the feed roller is used as one set of electrodes. The film formation is performed while passing between them (for example, Patent Document 1).

  On the other hand, an array antenna type plasma CVD apparatus disclosed in Patent Documents 2 to 4 is known. These array antenna type plasma CVD apparatuses include a vacuum chamber that can be evacuated to a vacuum state, and a plurality of connectors electrically connected to a high-frequency power source are disposed on the ceiling of the vacuum chamber. Yes. An array antenna unit having a plurality of electrode rods is provided in the vacuum chamber, and the electrode rods of the array antenna unit are connected to the plurality of connectors.

  When a film substrate is formed using such an array antenna type plasma CVD apparatus, a material gas is supplied into a vacuum chamber whose pressure is reduced to a vacuum state, and the film substrate is opposed to the electrode rod to which high-frequency power is supplied. Allow the material to pass through. As a result, plasma is generated in the vacuum atmosphere, the component of the material gas decomposed by the plasma adheres to the surface of the film substrate, and a thin film such as an amorphous silicon film or a microcrystalline silicon film is formed on the surface of the film substrate. Will be generated.

JP 2010-121156 A JP 2007-262541 A JP 2003-86581 A JP 2003-109798 A

  In order to efficiently form a film substrate using the above array antenna type plasma CVD apparatus, a plurality of vacuum chambers in which a plurality of electrode rods are installed are provided between the feeding roller and the winding roller. It is conceivable to form a thin film having a desired film thickness on the film substrate in a shorter time by passing the film substrate through a plurality of vacuum chambers.

  On the other hand, in the array antenna type plasma CVD apparatus, since the film adheres to the surface of the electrode rod in the process of forming a thin film on the surface of the film substrate, it is necessary to periodically maintain the array antenna unit. There is. When maintaining the array antenna unit, it is necessary to open the vacuum chamber to the atmosphere. However, if the vacuum chamber is opened to the atmosphere during film formation, the film base material will be contaminated. The array antenna unit cannot be maintained until after the film formation on the substrate is completed. For this reason, the array antenna units provided in a plurality of vacuum chambers must be maintained at the same time, which requires a long time for maintenance, prolonging the operation stop time of the apparatus and reducing the operation rate. It was.

  Here, if the number of vacuum chambers through which the film substrate passes is reduced, the time required for maintenance can be shortened. However, in order to form a film with a desired film thickness, the film substrate feed rate can be reduced, The substrate needs to reciprocate in the vacuum chamber. Eventually, the amount of the film adhering to the electrode rod increases, the maintenance cycle of the array antenna unit is shortened, and the length of the film substrate that can be formed in one maintenance cycle is limited.

  In view of the above problems, the present invention provides an antenna replacement method, an antenna transport system, and an antenna transport apparatus that can improve the operation rate of the apparatus by reducing the operation stop time of the apparatus due to maintenance work. The purpose is that.

  In order to solve the above-described problems, an antenna replacement method for an array antenna type plasma CVD apparatus according to the present invention includes a plurality of vacuum chambers in which a material gas is supplied from a gas supply source into an interior that can be decompressed to a vacuum state, Each of the vacuum chambers has a plurality of connectors that can be electrically connected to a high-frequency power source, and a plurality of electrode bars that can be connected to each of the plurality of connectors in the vacuum chamber, and the electrode bars are connected to the connectors. An array antenna unit that generates plasma by being supplied with electric power from the high-frequency power source in a state in which the plurality of vacuum chambers communicate with each other on one side surface of the plurality of vacuum chambers; A feed roller that is provided at one end in the horizontal direction of the substrate transport chamber and feeds the film substrate, and the substrate transport A winding roller provided at the other end in the horizontal direction of the chamber and winding up the film substrate sent out by the sending roller, and provided between the sending roller and the winding roller in the substrate transport chamber. A plurality of transport guide rollers for guiding the transport of the film base material and applying a predetermined tension to the film base material, and provided between each of the plurality of vacuum chambers and moving between the transport guide rollers. A film forming guide roller for guiding the film base so that the film base and the array antenna unit face each other and applying a predetermined tension to the film base; An array antenna exchange method for exchanging an array antenna unit in a plasma CVD apparatus, wherein the inside of the plurality of vacuum chambers and the substrate transport A step of depressurizing the interior of the chamber to a vacuum state, a step of depressurizing the interior of the antenna transfer chamber to a vacuum state, connecting the antenna transfer chamber and the vacuum chamber, and an interior of the antenna transfer chamber and the vacuum chamber. Communicating the two chambers while maintaining a vacuum state, removing the array antenna unit from the vacuum chamber, and transporting the removed array antenna unit from the vacuum chamber to the antenna transport chamber; , Including.

  In the antenna replacement method, before the inside of the antenna transfer chamber is decompressed to a vacuum state, a new array antenna unit is accommodated in the antenna transfer chamber, and the removed array antenna unit is removed from the vacuum chamber. Subsequent to the step of transferring to the antenna transfer chamber, a step of transferring the new array antenna unit from the antenna transfer chamber to the vacuum chamber between the two chambers that communicate with each other while maintaining a vacuum state. And a step of latching the new array antenna unit in the vacuum chamber so that each electrode rod of the new array antenna unit is connected to the plurality of connectors.

  In order to solve the above-described problems, an antenna transfer system for an array antenna type plasma CVD apparatus according to the present invention includes a plurality of vacuum chambers in which a material gas is supplied from a gas supply source into an interior that can be decompressed to a vacuum state, Each of the vacuum chambers has a plurality of connectors that can be electrically connected to a high-frequency power source, and a plurality of electrode bars that can be connected to each of the plurality of connectors in the vacuum chamber, and the electrode bars are connected to the connectors. An array antenna unit that generates plasma by being supplied with electric power from the high-frequency power source in a state in which the plurality of vacuum chambers communicate with each other on one side surface of the plurality of vacuum chambers; A feed roller that is provided at one end in the horizontal direction of the substrate transport chamber and feeds the film substrate; A take-up roller which is provided at the other end in the horizontal direction of the feed chamber and winds up the film substrate sent out by the feed roller; and between the feed roller and the take-up roller in the substrate transport chamber A plurality of transport guide rollers for guiding the transport of the film base material and applying a predetermined tension to the film base material, and provided in each of the plurality of vacuum chambers, and between the transport guide rollers. A film forming guide roller for guiding the film base so that the moving film base and the array antenna unit face each other and applying a predetermined tension to the film base, and the array antenna unit An antenna transfer chamber that can be accommodated and communicated with the vacuum chamber while maintaining the interior in a vacuum state, Between the antenna transfer chamber and the vacuum chamber communicated with each other, the antenna transfer means for allowing the array antenna unit to travel between the antenna transfer chamber and the array antenna unit carried into the vacuum chamber by the antenna transfer means. And an antenna latching means for latching.

  The antenna transfer means includes a guide rail provided in the antenna transfer chamber and the vacuum chamber, and a guide roller that can roll on the guide rail and is provided integrally or detachably with the array antenna unit. , May be included.

  In order to solve the above-described problems, another antenna antenna plasma CVD method for an array antenna plasma CVD apparatus of the present invention includes a plurality of vacuum chambers in which a material gas is supplied from a gas supply source into an interior that can be decompressed to a vacuum state, A plurality of connectors provided in each of the plurality of vacuum chambers and electrically connectable to a high-frequency power supply; and a plurality of electrode rods connectable to each of the plurality of connectors in the vacuum chamber, wherein the electrode rods are connectors An array antenna unit that generates plasma by being supplied with power from the high-frequency power source while being connected to a substrate, and a substrate transfer chamber that communicates the plurality of vacuum chambers with one side of each of the plurality of vacuum chambers; A feed roller that is provided at one end in the horizontal direction of the substrate transport chamber and feeds the film substrate; and the substrate A take-up roller which is provided at the other end in the horizontal direction of the feed chamber and winds up the film substrate sent out by the feed roller; and between the feed roller and the take-up roller in the substrate transport chamber A plurality of transport guide rollers for guiding the transport of the film base material and applying a predetermined tension to the film base material, and provided in each of the plurality of vacuum chambers, and between the transport guide rollers. A film forming guide roller for guiding the film base so that the moving film base and the array antenna unit face each other and applying a predetermined tension to the film base, the vacuum chamber, and the vacuum chamber An array antenna plasma CVD apparatus comprising: a roller moving mechanism for moving the film forming guide roller between the substrate conveying chamber and the substrate conveying chamber; An array antenna exchanging method for exchanging units, wherein the inside of the plurality of vacuum chambers and the inside of the substrate transport chamber are reduced in pressure to a vacuum state and communicated while maintaining the vacuum state by the roller moving mechanism. A step of moving the film forming guide roller from any one or more of the plurality of vacuum chambers to the base material transport chamber, and the film forming guide roller is configured to move the base material while maintaining a vacuum state. A step of releasing communication between the vacuum chamber moved to the transfer chamber and the substrate transfer chamber, a step of removing the array antenna unit from the vacuum chamber where the film formation guide roller is moved to the substrate transfer chamber, It is characterized by including.

  In the antenna replacement method, following the step of removing the array antenna unit from the vacuum chamber in which the film formation guide roller has been moved to the substrate transfer chamber, the film formation guide roller has been moved to the substrate transfer chamber. A step of bringing a new array antenna unit into the chamber and latching the new array antenna unit in the vacuum chamber so that each electrode rod of the new array antenna unit is connected to the plurality of connectors. A step of communicating the two chambers while maintaining the inside of the vacuum chamber in which the new array antenna unit is hooked and the base material transport chamber in a vacuum state, and the base material transport by the roller moving mechanism. From the chamber to the vacuum chamber to which the new array antenna unit is hung, And moving the guide rollers may include.

  In order to solve the above-described problems, another antenna transfer system for an array antenna type plasma CVD apparatus according to the present invention includes a plurality of vacuum chambers in which a material gas is supplied from a gas supply source into an interior that can be decompressed to a vacuum state, A plurality of connectors provided in each of the plurality of vacuum chambers and electrically connectable to a high-frequency power supply; and a plurality of electrode rods connectable to each of the plurality of connectors in the vacuum chamber, wherein the electrode rods are connectors An array antenna unit that generates plasma by being supplied with power from the high-frequency power source while being connected to a substrate, and a substrate transfer chamber that communicates the plurality of vacuum chambers with one side of each of the plurality of vacuum chambers; A feed roller that is provided at one end in the horizontal direction of the base material transport chamber and feeds the film base material; A take-up roller that is provided at the other end in the horizontal direction of the material transport chamber and winds up the film base material sent out by the feed roller; and between the feed roller and the take-up roller in the base material transport chamber. A plurality of transport guide rollers for guiding the transport of the film base material and applying a predetermined tension to the film base material, and provided between each of the plurality of vacuum chambers, and between the transport guide rollers A film forming guide roller for guiding the film base so that the film base and the array antenna unit moving on the surface face each other, and applying a predetermined tension to the film base, and the vacuum chamber A roller moving mechanism for moving the film forming guide roller between the substrate transport chamber and the array antenna unit carried into the vacuum chamber; An antenna latching means for hooked detachably, characterized by comprising a.

In order to solve the above-described problems, an antenna carrier device according to the present invention includes a plurality of vacuum chambers in which a material gas is supplied from a gas supply source in an interior that can be decompressed to a vacuum state, and a high frequency provided in each of the plurality of vacuum chambers A plurality of connectors electrically connectable to a power supply; and a plurality of electrode bars connectable to each of the plurality of connectors in the vacuum chamber; and the high frequency power supply in a state where the electrode bars are connected to the connectors An array antenna unit that generates plasma by being supplied with electric power, a substrate transport chamber that communicates the plurality of vacuum chambers with one side of each of the plurality of vacuum chambers, and a horizontal direction of the substrate transport chamber A feed roller that feeds the film substrate, and a horizontal end of the substrate transport chamber. A take-up roller that winds up the film substrate sent out by the feed roller, and the base material transport chamber, and is provided between the feed roller and the take-up roller to guide the transport of the film base material, And a plurality of transport guide rollers for applying a predetermined tension to the film base, and the film base and the array antenna unit provided between each of the plurality of vacuum chambers and moving between the transport guide rollers. A film forming guide roller for guiding the film base so as to face each other and applying a predetermined tension to the film base, and the array antenna unit carried into the vacuum chamber are detachably latched. An antenna carrying device coupled to an array antenna type plasma CVD apparatus, the array antenna comprising: An antenna transfer chamber that can accommodate a knit and can communicate with the vacuum chamber while maintaining a vacuum state, and the antenna transfer chamber and the vacuum chamber that communicate with each other while maintaining a vacuum state. An antenna carrier unit that allows the array antenna unit to come and go, wherein the antenna latch unit detachably latches the array antenna unit carried into the vacuum chamber by the antenna carrier unit. And
The antenna transfer means includes a guide rail provided in the antenna transfer chamber and the vacuum chamber, and a guide roller that can roll on the guide rail and is provided integrally or detachably with the array antenna unit. , May be included.

  According to the present invention, the operating rate of the apparatus can be improved by shortening the operation stop time of the apparatus due to the maintenance work.

It is explanatory drawing for demonstrating the structure of the antenna conveyance system of the array antenna type plasma CVD apparatus concerning 1st Embodiment. It is a perspective view which shows the front side of a vacuum chamber. It is a perspective view which shows the back side of a vacuum chamber. It is a figure which shows typically the cross section of the front side of a vacuum chamber. It is a right view of a vacuum chamber. It is a perspective view of an array antenna unit. It is the elements on larger scale of FIG. (A) is the VII (a) -VII (a) sectional view taken on the line of FIG. 7, (b) is the VII (b) -VII (b) sectional view taken on the line of FIG. (A) is a top view of FIG. 7, (b) is a perspective view of a first antenna side connector. It is front sectional drawing of the vacuum chamber of the state by which the array antenna unit was latched. It is a right view of the vacuum chamber in the state where the array antenna unit is hooked. (A) is a perspective view of an antenna carrier, and (b) is an enlarged view of an alternate long and short dash line portion of (a). It is the elements on larger scale of FIG.12 (b). It is a figure explaining the relationship between an adjustment member and an array antenna unit when an array antenna unit is hold | maintained at the antenna conveyance body. It is a perspective view which shows the state by which the array antenna unit was hold | maintained at the antenna carrier. It is a figure explaining the process which latches an array antenna unit in a vacuum chamber. It is a conceptual diagram explaining the process of carrying out an antenna carrier. It is a figure explaining the conveyance process of an antenna carrier. It is a figure explaining the conveyance process of an antenna carrier. It is a conceptual diagram explaining the modification of an antenna conveyance chamber. It is a conceptual diagram explaining the modification of an antenna conveyance chamber. It is a conceptual diagram explaining the modification of an antenna conveyance chamber. It is a figure which shows the modification of an antenna conveyance means. It is explanatory drawing for demonstrating the structure of the antenna conveyance system of the array antenna type plasma CVD apparatus concerning 2nd Embodiment. It is explanatory drawing for demonstrating the movement process of the film-forming guide roller. It is explanatory drawing for demonstrating the movement process of the film-forming guide roller.

  Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. The dimensions, materials, and other specific numerical values shown in the embodiments are merely examples for facilitating the understanding of the invention, and do not limit the present invention unless otherwise specified. In the present specification and drawings, elements having substantially the same function and configuration are denoted by the same reference numerals, and redundant description is omitted, and elements not directly related to the present invention are not illustrated. To do.

(First embodiment: antenna carrier system 100)
FIG. 1 is an explanatory diagram for explaining a configuration of an antenna transfer system 100 of an array antenna type plasma CVD apparatus according to the present embodiment. As shown in FIG. 1, the antenna transfer system 100 includes a vacuum chamber 1, an array antenna unit 30, a substrate transfer chamber 150, an antenna transfer body 70 as an antenna transfer means, and an antenna transfer chamber 200. Composed. Hereinafter, each structure of the vacuum chamber 1, the array antenna unit 30, the base material transfer chamber 150, the antenna transfer body 70, and the antenna transfer chamber 200 will be described in detail.

(Configuration of vacuum chamber)
First, the structure of the vacuum chamber of the array antenna type (inductively coupled) plasma CVD apparatus according to the present embodiment will be described with reference to FIGS. FIG. 2 is a perspective view showing the front side of the vacuum chamber, and FIG. 3 is a perspective view showing the back side of the vacuum chamber.

  As shown in FIGS. 2 and 3, the vacuum chamber 1 includes a housing 2. The housing 2 is arranged facing the ceiling 2a and the bottom 2b facing in the y direction in the figure, the right side 2c and the left side 2d facing in the x direction in the figure, and in the z direction in the figure. A front part 2e and a back part 2f. In the following description, the ceiling 2a side is defined as the upper or upper surface of the vacuum chamber 1, the right side 2c side is defined as the right or right side of the vacuum chamber 1, and the left side 2d side is defined as the left or left side of the vacuum chamber 1. .

  A front opening 3 and a rear opening 4 are formed in the front part 2e and the back part 2f, respectively. A front opening / closing door 5 and a rear opening / closing door 6 for opening and closing the front opening 3 and the rear opening 4 are respectively provided. Is provided. A right opening 7 is formed in the right side 2c, and a left opening 9 is formed in the left side 2d. As will be described in detail later, the left opening 9 can be connected to the substrate transfer chamber 150 via a gate valve 151, and the right opening 7 can be connected to the antenna transfer chamber 200 via a gate valve 201. (See FIG. 1).

  The ceiling portion 2a is provided with two rows of connector groups 11a and 11b. In the connector groups 11a and 11b, a plurality of connectors are arranged in series along the x direction in the figure, and a predetermined interval is maintained in the z direction in the figure.

  FIG. 4 is a diagram schematically showing a cross section of the front side of the vacuum chamber 1. As shown in this figure, the connector group 11 a includes a first ceiling-side connector 13 electrically connected to a supply side (non-grounded side) of a high-frequency power source 12 that supplies high-frequency power, and a ground side of the high-frequency power source 12. The second ceiling-side connectors 14 that are electrically connected are alternately provided while maintaining a predetermined interval. The first ceiling side connector 13 and the second ceiling side connector 14 have their connecting portions directed downward in the vertical direction (bottom surface portion 2b), and electrode rods of an array antenna unit 30 described later are directed upward from the lower side in the vertical direction. It is arranged so that it can be connected toward.

  As will be described in detail later, a gas supply source 15 is connected to the second ceiling-side connector 14, and the material gas supplied from the gas supply source 15 is connected to the second ceiling-side connector 14. It can be ejected from the electrode rod of the antenna unit 30 into the vacuum chamber 1. Although the connector group 11a has been described here, the connector group 11b has the same configuration as described above. Further, a vacuum pump 16 is connected to the ceiling 2a of the housing 2, and the vacuum chamber 1 can be decompressed to a vacuum state by driving the vacuum pump 16 with the internal space 10 sealed. Yes.

  In addition, a guide rail 17 extending along the x direction in the drawing is provided on the bottom surface portion 2b of the housing 2 from the right side surface portion 2c to the left side surface portion 2d. FIG. 5 is a right side view of the vacuum chamber 1. As shown in this figure, the guide rails 17 are provided in the vicinity of the front portion 2e and in the vicinity of the back portion 2f, and accordingly, in the z direction in the drawing. Thus, a pair is arranged with the interval maintained. The pair of guide rails 17 function as a guide when the array antenna unit 30 is carried into or out of the vacuum chamber 1.

  Further, as shown in FIG. 4, a film forming guide roller 20 is provided on the bottom surface portion 2 b on the right side surface portion 2 c side of the housing 2. FIG. 5 is a right side view of the vacuum chamber 1. As shown in this figure, the film forming guide rollers 20 (indicated by 20a, 20b, and 20c in FIG. 5) are arranged in series along the z direction in the figure. Has been placed. These film forming guide rollers 20 guide a film base that moves between conveyance guide rollers 164 described later so as to face the array antenna unit 30 and apply a predetermined tension to the film base.

(Configuration of array antenna unit)
Next, the configuration of the array antenna unit will be described with reference to FIGS. 6 is a perspective view of the array antenna unit 30, and FIG. 7 is a partially enlarged view of FIG. As shown in these drawings, the array antenna unit 30 includes an antenna support member 31, and a plurality of inductively coupled electrodes 50 are supported on the antenna support member 31.

  This inductively coupled electrode 50 is an antenna element in which a first electrode bar 51 and a second electrode bar 52 are electrically connected by a connection fitting 53, and a plurality of inductive coupling electrodes 50 are supported along the longitudinal direction of the antenna support member 31. Has been. Specifically, the upper ends of the electrode rods 51 and 52 are supported by the antenna support member 31 in a state where the electrode rods 51 and 52 are alternately arranged in series while maintaining a predetermined interval in a direction orthogonal to the longitudinal direction. . Thereby, both the electrode rods 51 and 52 are suspended and supported by the antenna support member 31 in a state in which their longitudinal directions are along the vertical direction.

  8A is a cross-sectional view taken along line VII (a) -VII (a) in FIG. 7, and FIG. 8B is a cross-sectional view taken along line VII (b) -VII (b) in FIG. As shown in these drawings, the antenna support member 31 is formed of a member having a U-shaped cross section, and its opening faces downward in the vertical direction. As is apparent from FIG. 8B, the antenna support member 31 has an antenna support hole 32 formed at the center in the width direction. As shown in FIGS. 8A and 9A, the antenna support hole 32 has a long hole shape formed along the longitudinal direction of the antenna support member 31, and the antenna support hole 32 has The first electrode rod 51 and the second electrode rod 52 are supported in a suspended manner alternately.

  More specifically, the first antenna-side connector 54 that can be connected to the first ceiling-side connector 13 provided on the ceiling 2 a of the vacuum chamber 1 is fixed to the upper end of the first electrode bar 51. A second antenna-side connector 55 that can be connected to the second ceiling-side connector 14 provided on the ceiling 2 a of the vacuum chamber 1 is fixed to the upper end of the second electrode rod 52.

  FIG. 9A is a top view of FIG. 7, and FIG. 9B is a perspective view of the first antenna-side connector 54. However, FIG. 9A shows a state in which a cover member 33 described later is removed. As shown in this figure, the first antenna-side connector 54 includes a cylindrical main body 54a, and is fixed to the bottom surface portion 54b of the main body 54a with the first electrode rod 51 penetrating therethrough. A flange portion 54c having a larger diameter than that of the main body 54a is provided on the opening side of the main body 54a. The flange portion 54 c maintains a dimensional relationship that has a larger diameter than the width of the antenna support hole 32 formed in the antenna support member 31. The main body 54a is formed with a pair of flat surface portions 54d and 54d having chamfered portions facing each other on the cylindrical outer peripheral surface. The planar portions 54d and 54d maintain a dimensional relationship in which the facing distance is slightly smaller than the width of the antenna support hole 32.

  Therefore, when the first antenna side connector 54 is inserted from above the antenna support hole 32, the main body 54a is inserted through the antenna support hole 32, and the flange portion 54c is brought into contact with the upper surface of the antenna support member 31, and is latched. As a result, the first electrode rod 51 is suspended and supported by the antenna support member 31.

  At this time, the width between the flat portions 54 d and 54 d is a dimensional relationship that restricts the movement of the first antenna-side connector 54 in the width direction of the antenna support member 31 within a range that can be connected to the first ceiling-side connector 13. Is maintained. In addition, even if rotational stress acts on the first antenna-side connector 54 supported by the antenna support member 31, the flat portions 54 d and 54 d come into contact with the inner peripheral edge of the antenna support hole 32, and the first antenna-side connector 54 rotates. Is limited. In this way, the first electrode rods 51 are positioned in series with the antenna support member 31 positioned in the width direction, and all the first electrode rods 51 are supported hanging down in the same direction. .

  Although the first antenna side connector 54 has been described here, the configuration of the second antenna side connector 55 is the same as that of the first antenna side connector 54. That is, the second antenna-side connector 55 includes a main body 55a, a bottom surface portion 55b, a flange portion 55c, and a pair of flat surface portions 55d and 55d, and the second electrode rod 52 penetrates the bottom surface portion 55b. It is fixed in the state.

  And the flange part 55c larger diameter than the said main body 55a is provided in the opening side of the main body 55a. As described above, the second antenna-side connector 55 is also restricted from rotating and moving in the width direction of the antenna support member 31 as in the case of the first antenna-side connector 54, and the second electrode rod 52 is also arranged in series. All the second electrode rods 52 are supported in a suspended manner in the same direction.

  Further, as shown in FIG. 8A, each first electrode bar 51 includes an outer cylinder 56 made of a dielectric material such as ceramics or resin on the outer periphery thereof. On the other hand, each second electrode rod 52 has a cylindrical shape, and a gas supply path 52a extending in the longitudinal direction is formed inside. Each second electrode rod 52 includes an ejection hole 52b that communicates perpendicularly to the gas supply path 52a. As described above, the second electrode rod 52 is connected to the second ceiling-side connector 14 when the array antenna unit 30 is hooked in the vacuum chamber 1, and is connected to the gas supply source 15 and the gas supply. The road 52a communicates with each other.

  Accordingly, when the material gas is supplied from the gas supply source 15 in a state where the array antenna unit 30 is hooked in the vacuum chamber 1, the material gas is directed from the ejection holes 52 b toward the internal space 10 of the vacuum chamber 1. It will be ejected.

  As shown in FIGS. 6 to 9, a cover member 33 having a U-shaped cross section that covers both antenna-side connectors 54 and 55 is fixed to the antenna support member 31. The cover member 33 is provided with a plurality of circular through holes 33a that coincide with the main bodies 54a, 55a of the antenna-side connectors 54, 55. As a result, the openings of the main bodies 54 a and 55 a of the antenna-side connectors 54 and 55, that is, the upper ends of both the electrode bars 51 and 52 face upward through the through-holes 33 a of the cover member 33.

  In addition, an adhesion preventing panel 34 is provided on both side surfaces of the antenna support member 31 in the width direction. On the upper surface of the antenna support member 31 is a positioning pin that stands vertically upward and is tapered at the tip. 35 is provided. The positioning pin 35 is provided further outward in the longitudinal direction of the antenna support member 31 than the electrode rod located on the outermost side among the plurality of first electrode rods 51 and second electrode rods 52. Further, a hooking hole 36 is formed in the vicinity of both ends in the longitudinal direction of the antenna support member 31. The retaining hole 36 is for retaining the array antenna unit 30 on the vacuum chamber 1.

  FIG. 10 is a front sectional view of the vacuum chamber 1 in a state where the array antenna unit 30 is hooked. As shown in this figure, the ceiling portion 2a of the vacuum chamber 1 is provided with positioning holes 18 penetrating in the vertical direction and tapered downward in the vertical direction in the vicinity of the right side surface portion 2c and the left side surface portion 2d. Yes. Further, a latch pin 19 that hangs downward is fixed to the outside of the positioning hole 18 in the x direction in the figure. The positioning hole 18 corresponds to the positioning pin 35 of the array antenna unit, and the locking pin 19 corresponds to the locking hole 36 of the array antenna unit 30.

  Although details of the method of attaching the array antenna unit 30 will be described later, when the array antenna unit 30 is hooked in the vacuum chamber 1, the array antenna unit 30 is mounted on the ceiling so that the positioning pins 35 are inserted into the positioning holes 18. Lift up from below the part 2a. Then, the latch holes 36 of the array antenna unit 30 are inserted into the latch pins 19, and at this time, the first ceiling-side connector 13 and the second ceiling-side connector 14 provided on the ceiling portion 2 a are respectively connected to the array antenna. The unit 30 is fitted into each of the first antenna side connector 54 and the second antenna side connector 55. In this state, by fixing a fixing means such as a bolt from below the latch pin 19, the array antenna unit 30 is latched on the ceiling portion 2 a of the vacuum chamber 1 as shown in the figure.

  FIG. 11 is a right side view of the vacuum chamber 1 in a state where the array antenna unit 30 is hooked. As described above, the ceiling portion 2a is provided with two rows of connector groups 11a and 11b, and the array antenna unit 30 can be connected to the connector groups 11a and 11b. Therefore, when the array antenna unit 30 is connected to all the connector groups 11a and 11b, the two array antenna units 30 are positioned at a predetermined distance in the z direction in the figure as shown in the figure. Become.

  Then, the film base material is carried into the vacuum chamber 1 where the array antenna unit 30 is hooked as described above, guided by the film forming guide roller 20. The carrying-in and carrying-out of the film base material will be described with reference to FIG.

(Configuration of base material transfer chamber and film base material transfer process)
As shown in FIG. 1, a base material transfer chamber 150 is connected to the left opening 9 of the vacuum chamber 1 via a gate valve 151. The substrate transfer chamber 150 can be decompressed to a vacuum state by a vacuum pump (not shown), and is normally communicated with the plurality of vacuum chambers 1 while maintaining the vacuum state. That is, the gate valve 151 communicates the inside of the vacuum chamber 1 and the inside of the base material transfer chamber 150 while maintaining a vacuum state.

  As shown in FIG. 1, the substrate transport chamber 150 includes a feed roller 160, a take-up roller 162, and a plurality of transport guide rollers 164 (eight in FIG. 1). The delivery roller 160 is provided at one end in the horizontal direction (longitudinal direction here) of the substrate transport chamber 150 and feeds the film substrate W. The take-up roller 162 is provided at the other end in the horizontal direction (here, the longitudinal direction) of the base material transport chamber 150, and takes up the film base material W sent out by the feed roller 160. Since film formation may be performed by reciprocating the film base W, the take-up roller 162 may send out the film base W and the feed roller 160 may take up the film base W (in FIG. (Indicated by an open double arrow). The conveyance guide roller 164 is provided between the delivery roller 160 and the take-up roller 162 in the substrate conveyance chamber 150, guides conveyance of the film substrate W, and applies a predetermined tension to the film substrate W. .

  Accordingly, the film substrate W is fed from the feed roller 160 and guided by the conveyance guide roller 164 and the film forming guide roller 20 and passes through the plurality of vacuum chambers 1 in the direction indicated by the white arrow in FIG. And is wound around the winding roller 162. In the example shown in FIG. 1, the film forming guide roller 20 rolls counterclockwise when viewed from above, and the feed roller 160, the winding roller 162, and the conveyance guide roller 164 roll clockwise when viewed from above. Further, in the vacuum chamber 1, the film substrate W is transported so that one side faces the array antenna unit 30.

  In this embodiment, the film deposition target is a resinous, metallic, or glassy film substrate W. However, the feeding roller 160 feeds out (winds out) and the winding roller 162 winds up. If it is possible (if the roll-to-roll method can be used), the material and shape of the base material are not limited. The procedure of the film forming process will be described below.

(Deposition process)
First, the film substrate W is pulled out from the delivery roller 160 of the substrate conveyance chamber 150, wound around the conveyance guide roller 164 and the film formation guide roller 20, and finally wound around the take-up roller 162. Thereafter, the internal space 10 of the vacuum chamber 1 is sealed, the gate valve 151 is opened, and the vacuum pump 16 and the vacuum pump installed in the base material transport chamber 150 are driven to drive the internal space 10 and the base material transport chamber 150. The internal space is depressurized to a vacuum state. Then, as shown in FIG. 1, while feeding the film base material W from the feed roller 160 (while winding the film base material W by the winding roller 162), the material gas is supplied from the gas supply source 15 to the second electrode rod 52. Then, the material gas is ejected into the vacuum chamber 1 from the ejection hole 52b. In this state, when high frequency power is supplied to the inductively coupled electrode 50 by the high frequency power source 12, plasma is generated around the array antenna unit 30, and the component of the material gas decomposed by the plasma is applied to the surface of the film substrate W. Adhere to. In this way, a thin film such as an amorphous silicon film or a microcrystalline silicon film is formed on the surface of the film substrate W.

  Then, with the movement of the film substrate W as described above, a film forming process is performed on the film substrate W in each vacuum chamber 1, and when the film forming process is completed, the film substrate W is wound around the winding roller 162. Thereafter, the above steps are repeated for each roll of film base W.

  Here, during the film forming process, a film adheres to the array antenna unit 30, and therefore, it is necessary to periodically remove the array antenna unit 30 from the vacuum chamber 1 for maintenance. In the following, the configuration of the antenna carrier that carries the array antenna unit 30 into and out of the vacuum chamber 1 during maintenance of the array antenna unit 30 will be described. The attachment / detachment method will be described.

(Configuration of antenna carrier)
FIG. 12A is a perspective view of the antenna carrier 70, and FIG. 12B is a partially enlarged view of an alternate long and short dash line in FIG. As shown in this figure, the antenna carrier 70 includes the base 71 described above, and a plurality of wheels 72 are provided at both ends in the width direction (z direction in the drawing) of the base 71. The wheels 72 are provided so that the antenna carrier 70 can move in a straight line in the x direction in the figure. The wheels 72 roll on the guide rail 17 in the vacuum chamber 1, thereby The body 70 can be moved in the vacuum chamber 1.

  In addition, the base 71 is provided with two antenna holding members 73 that hold the array antenna unit 30 while maintaining a gap in the horizontal direction perpendicular to the direction in which the antenna carrier 70 is carried. The antenna holding member 73 includes a slide device 74 that is fixed to the base 71 at both ends of the antenna carrier 70 in the carrying direction, and a pair of support columns 75a and 75b that stand vertically upward from the slide device 74. Yes. The pair of support columns 75 a and 75 b are configured to be slidable in a horizontal direction (z direction) orthogonal to the transport direction (x direction) of the antenna transport body 70 by the slide device 74.

  Each of the pair of struts 75a and 75b accommodates an air cylinder 76 that expands and contracts the telescopic rod 76a in the vertical direction. At both ends of the telescopic rod 76a of the air cylinder 76, both end portions of a thin plate-like adjusting member 78 are placed via a load receiving portion 77, whereby the adjusting member 78 becomes a pair of support columns 75a and 75b. Will be suspended.

  A notch 71 a is formed between the columns 75 b of the base 71. When the antenna carrier 70 is carried into the vacuum chamber 1, the notch 71 a passes through the film forming guide roller 20. Will do.

  FIG. 13 is a partially enlarged view of FIG. As shown in this figure, a load receiving portion 77 is provided at the tip of the telescopic rod 76a. The load receiving portion 77 is fixed to the distal end of the telescopic rod 76 a and is placed on the receiving surface 79 a so that the concave receiving surface 79 a faces upward, and is provided integrally on the lower surface of the adjusting member 78. And the oscillating portion 80 formed. The receiving portion 79 and the swinging portion 80 are made of metal such as stainless steel, but may be made of a material other than metal such as resin.

  In the swinging portion 80, the hemispherical spherical surface portion 80a is in contact with the receiving surface 79a of the receiving portion 79. At this time, the curvature of the receiving surface 79a is smaller than the curvature of the spherical surface portion 80a. Therefore, a gap is formed between the spherical surface portion 80 a and the receiving surface 79 a, so that the swinging portion 80 can swing with respect to the receiving portion 79. In other words, the configuration of the load receiving portion 77 described above allows the adjustment member 78 to move or tilt in the horizontal direction. However, when the swinging portion 80 is inclined at a predetermined angle on the receiving surface 79a, the adjustment member 78 comes into contact with the outer peripheral edge of the receiving portion 79, and the inclination beyond that is limited. That is, the adjustment member 78 is designed to be allowed to tilt within a range that does not fall off the receiving portion 79.

  FIG. 14 is a diagram for explaining a relationship between the adjustment member 78 and the array antenna unit 30 when the array antenna unit 30 is held on the antenna carrier 70. The adjustment member 78 extends in the conveying direction of the antenna carrier 70, and a plurality of movements projecting from the extending portion 78a in a direction intersecting in the horizontal direction (orthogonal in the present embodiment). The flat surface formed by the limiting portion 78b is formed of a thin plate member having a comb shape. The plurality of movement restricting portions 78b are provided at predetermined intervals in the longitudinal direction of the extending portion 78a, that is, in the conveying direction of the antenna carrier 70.

  As shown in the figure, when the array antenna unit 30 is held by the antenna carrier 70, the lower surface of the antenna support member 31 of the array antenna unit 30 and the upper surface of the adjustment member 78 are in pressure contact with each other in a surface contact state. Thereby, the load of the array antenna unit 30 acts on the load receiving portion 77 via the adjustment member 78, and the array antenna unit 30 is held by the antenna holding member 73 of the antenna carrier 70.

  In the state where the array antenna unit 30 is held by the antenna holding member 73, the main body 54a of the first antenna-side connector 54 and the main body 55a of the second antenna-side connector 55 are spaced apart from each other by the movement restriction portions 78b adjacent to each other. It is designed to be located alternately. At this time, the distance between the movement restricting portions 78b is slightly larger than the diameter of the main body 54a of the first antenna side connector 54 and the main body 55a of the second antenna side connector 55. As a result, the movement restricting portion 78b faces the opposing surface between the adjacent first electrode rod 51 (first antenna side connector 54) and the second electrode rod 52 (second antenna side connector 55), and the antenna carrier 70. The movement of both electrode bars 51 and 52 with respect to the transport direction is limited.

  The adjustment member 78 has an extending portion 78a provided only on one side of the electrode rods 51 and 52, and extends in the horizontal direction (z direction) orthogonal to the conveyance direction (x direction) of the antenna carrier 70. The function of restricting the movement of the electrode rods 51 and 52 is not provided. That is, the adjustment member 78 restricts at least the movement of the electrode bars 51 and 52 in the transport direction (x direction) of the antenna transport body 70.

  On the other hand, as already described, the movement of the electrode rods 51 and 52 in the horizontal direction orthogonal to the transport direction is limited by the antenna support hole 32 of the antenna support member 31 (see FIG. 9). At this time, since the antenna support hole 32 is formed in a long hole shape that is continuous in the longitudinal direction of the antenna support member 31, in the array antenna unit 30, movement of both electrode bars 51 and 52 in the arrangement direction is restricted. It has not been. That is, the antenna support member 31 restricts the movement of the electrode rods 51 and 52 only in the horizontal direction orthogonal to the conveyance direction of the antenna carrier 70.

  FIG. 15 is a perspective view showing a state in which the array antenna unit 30 is held by the antenna carrier 70. As shown in this figure, in a state where the array antenna unit 30 is held by the antenna carrier 70, the movement of the electrode rods 51 and 52 in the carrying direction (x direction in the figure) 78), and the movement of both electrode bars 51 and 52 in the horizontal direction (z direction in the figure) orthogonal to the transport direction is limited by the array antenna unit 30 (antenna support member 31).

  Since the array antenna unit 30 is placed in the high-temperature vacuum chamber 1, the antenna support member 31 is thermally expanded. Therefore, while restricting the movement of the electrode rods 51 and 52 in the horizontal direction perpendicular to the transport direction, the antenna support hole 32 has a long hole shape to ensure escape during thermal expansion, and between the members. I try to prevent interference. However, if the escape at the time of thermal expansion is ensured as described above, when the array antenna unit 30 is hooked in the vacuum chamber 1, the positions of the electrode bars 51, 52 are shifted, and the electrode bars 51, 52 are shifted. The operation of connecting the cables to the ceiling side connectors 13 and 14 becomes complicated.

  Therefore, in the present embodiment, the adjustment member 78 is provided on the antenna carrier 70 that is carried outside during the film forming process, and the movement of the electrode rods 51 and 52 in the conveyance direction is restricted by the adjustment member 78. To do. As a result, it is possible to ensure the positioning accuracy when the array antenna unit 30 is hooked in the vacuum chamber 1, and the working efficiency at the time of hooking can be improved. In other words, with the above-described configuration, it is possible to meet two conflicting requirements consisting of securing escape during thermal expansion during film formation and positioning accuracy when latching the array antenna unit 30. It has become. Hereinafter, an operation when the array antenna unit 30 is hooked in the vacuum chamber 1 will be described.

(Holding process of array antenna unit)
FIG. 16 is a diagram for explaining a process of hanging the array antenna unit 30 in the vacuum chamber 1. In FIG. 16, the film formation guide roller 20 is not shown for easy understanding. In FIG. 16A, as shown in FIG. 15, the antenna carrier 70 holding the array antenna unit 30 that has been cleaned (maintained) is carried into the vacuum chamber 1 and contacts a stopper (not shown). Thus, it shows a state stopped at a predetermined position.

  When the telescopic rod 76a of the air cylinder 76 is extended upward from this state, the positioning pins 35 of the array antenna unit 30 are provided on the ceiling portion 2a of the vacuum chamber 1 as shown in FIG. The positioning hole 18 is inserted. As a result, the array antenna unit 30 is lifted while being positioned with respect to the vacuum chamber 1. In the process of raising the array antenna unit 30, the latch pin 19 provided on the ceiling portion 2 a is inserted into the latch hole 36, and the first ceiling-side connector 13 is fitted to the first antenna-side connector 54. The second ceiling side connector 14 is fitted to the second antenna side connector 55.

  At this time, the array antenna unit 30 is swingably held on the antenna carrier 70 by a load receiving portion 77, that is, a load receiving structure including the receiving surface 79a and the swinging portion 80 (see FIG. 13). Therefore, even if the array antenna unit 30 is deviated from the latching position, the array antenna unit 30 can be adjusted to a predetermined latching position by swinging the array antenna unit 30. Thereby, even if the dimensional management of the positioning pin 35, the positioning hole 18, or the connectors 13, 14, 54, 55 is not strict, the array antenna unit 30 can be reliably hung on the ceiling portion 2a.

  Then, in the state shown in FIG. 16 (b), fixing means such as a bolt is fixed to the latch pin 19 inserted through the latch hole 36 of the array antenna unit 30 from below by a fixing device (not shown). The array antenna unit 30 is hooked in the vacuum chamber 1. When the array antenna unit 30 is hooked in this way, the telescopic rod 76a of the air cylinder 76 is contracted downward. Then, as shown in FIG. 16 (c), the adjustment member 78 suspended on the columns 75 a and 75 b is lowered, and the array antenna unit 30 is detached from the antenna carrier 70.

  However, in this state, the first electrode rod 51 and the second electrode rod 52 hanging from the ceiling portion 2a of the vacuum chamber 1 and the columns 75a and 75b are positioned on the same straight line in the conveyance direction of the antenna carrier 70. It has been done. Further, the movement restricting portion 78b of the adjustment member 78 suspended from the pair of support columns 75a and 75b remains facing the first electrode rod 51 and the second electrode rod 52. Therefore, in this state, the antenna carrier 70 cannot be carried out of the vacuum chamber 1.

  Therefore, as shown in FIG. 17, the slide device 74 is driven to slide the pair of support columns 75a and 75b in the horizontal direction orthogonal to the transfer direction of the antenna carrier 70, and to move the pair of support columns 75a and 75b to the first. The electrode rod 51 and the second electrode rod 52 are retracted from the alignment line. As a result, the movement restricting portion 78b of the adjustment member 78 is also retracted from the opposing surfaces of the adjacent first electrode rod 51 and second electrode rod 52. Then, when the antenna carrier 70 is carried out of the vacuum chamber 1 along the guide rail 17 again, the maintenance work is completed.

  In addition, when carrying out the array antenna unit 30 which needed maintenance from the inside of the vacuum chamber 1, what is necessary is just to perform said each process in reverse order. That is, the empty antenna carrier 70 in a state in which the pair of support columns 75 a and 75 b are retracted from the arrangement line of the first electrode rod 51 and the second electrode rod 52 is carried into the vacuum chamber 1. Then, the slide device 74 is driven to slide the pair of support columns 75a and 75b on the alignment line of the first electrode rod 51 and the second electrode rod 52, and then the telescopic rod 76a of the air cylinder 76 extends upward. Let In this state, after fixing means such as bolts are removed and the load of the array antenna unit 30 is applied to the load receiving portion 77, the telescopic rod 76a is contracted, and the antenna carrier 70 is carried out of the vacuum chamber 1. Good.

(Configuration of antenna transfer chamber and transfer process of antenna transfer body)
18 and 19 are diagrams for explaining the transport process of the antenna transport body 70. FIG. As shown in FIG. 1, a base material transfer chamber 150 is connected to the left opening 9 of the vacuum chamber 1 via a gate valve 151, and to the right opening 7 of the vacuum chamber 1 via a gate valve 201. An antenna transfer chamber 200 is connected.

  The antenna transfer chamber 200 includes an opening / closing door 204 in an opening 202 provided on a surface opposite to a surface to which the gate valve 201 is connected. The opening / closing door 204 allows the inside of the antenna transfer chamber 200 to be connected to the outside at atmospheric pressure. The communication is made or the communication is released. The antenna transfer chamber 200 can be decompressed to a vacuum state by a vacuum pump (not shown), and is normally communicated with the vacuum chamber 1 while maintaining the vacuum state. That is, the gate valve 151 communicates the inside of the vacuum chamber 1 and the inside of the substrate transfer chamber 150 while maintaining a vacuum state, and the gate valve 201 is connected to the inside of the vacuum chamber 1 and the antenna transfer chamber 200. Are communicated with each other while maintaining a vacuum state.

  The antenna transfer chamber 200 is provided with a transfer device (not shown) that transfers the antenna transfer body 70 to a position facing the gate valve 201, such as a belt conveyor. Further, as shown in FIG. 1, a guide rail 210 for guiding the wheels 72 of the antenna carrier 70 is provided in the antenna carrier chamber 200 at a position facing the vacuum chamber 1.

  However, these guide rails 210 are configured to be able to ascend or descend in the vertical direction, and are normally retracted and positioned below the moving locus range of the antenna carrier 70 in the antenna carrier chamber 200. As a result, the antenna carrier 70 moving in the antenna transfer chamber 200 by the transfer device normally moves above the guide rail 210.

  Note that the guide rail 210 may move in the antenna transfer chamber 200 integrally with the antenna transfer body 70. In other words, the antenna carrier 70 may be carried to a position facing the target vacuum chamber 1 while being placed on the guide rail 210.

  Then, the antenna carrier 70 is pushed out from the antenna carrier chamber 200 side to the vacuum chamber 1 side, or the antenna carrier 70 is drawn from the vacuum chamber 1 side to the antenna carrier chamber 200 side. A device (not shown) is provided.

  For example, if it is necessary to replace the array antenna unit 30 in the vacuum chamber 1A, first, as shown in FIG. 18 (a), the antenna conveyance at atmospheric pressure is applied to the gate valve 201 of the vacuum chamber 1A. The chambers 200 are connected. Next, as shown in FIG. 18B, the empty antenna carrier 70 </ b> A is conveyed through the opening / closing door 204 to a position facing the gate valve 201 in the antenna conveyance chamber 200. Then, the open / close door 204 of the antenna transfer chamber 200 is closed, and the inside of the antenna transfer chamber 200 is decompressed to a vacuum state by a vacuum pump provided in the antenna transfer chamber 200.

  Next, as shown in FIG. 19 (a), the gate valve 201 is opened to allow the inside of the vacuum chamber 1A and the inside of the antenna transfer chamber 200 to communicate with each other while maintaining the vacuum state. As indicated by the white arrow, the antenna carrier 70A is carried into the vacuum chamber 1A. Thus, when the antenna carrier 70A is carried into the vacuum chamber 1A, the array antenna unit 30 hung on the ceiling portion 2a of the vacuum chamber 1A is removed and held by the antenna carrier 70A.

  Then, as shown by the white arrow in FIG. 19B, the antenna carrier 70A holding the array antenna unit 30 is carried out from the vacuum chamber 1A to the antenna carrier chamber 200, and the gate valve 201 is closed.

  In this way, the used array antenna unit 30 is unloaded from the vacuum chamber 1A while maintaining the vacuum state of the vacuum chamber 1B and the substrate transfer chamber 150, that is, in parallel with the film forming process in the vacuum chamber 1B. Can do. Therefore, when the array antenna unit 30 is taken out as in the prior art, the base material transfer chamber 150 and all the vacuum chambers 1 connected to the base material transfer chamber 150 are not opened to the atmosphere, and any vacuum chamber 1B is formed. While performing the film processing, the array antenna unit 30 of another vacuum chamber 1A can be removed. Thereby, the apparatus operation stop time due to maintenance can be shortened, and the operation rate of the apparatus can be improved.

  Furthermore, the array antenna unit 30 in the vacuum chamber 1 can be replaced in parallel with the film forming process in the other vacuum chamber 1. That is, the array antenna unit 30 can be replaced regardless of whether the film forming process for one roll has been completed. Conventionally, it was necessary to match the timing for completing the film forming process for one roll with the timing for replacing the array antenna unit, so the length of the film base for one roll is limited according to the replacement period of the array antenna unit. It had been. However, in this embodiment, since the array antenna unit 30 can be replaced regardless of whether or not the film forming process for one roll has been completed, it is possible to avoid a situation in which the length of the film base W is limited. It becomes possible.

  At this time, the film forming process is performed in the vacuum chamber 1A and the vacuum chamber 1B even if the film forming process is performed only in the vacuum chamber 1B by slowing the rotation speeds of the delivery roller 160 and the take-up roller 162. It becomes possible to form into a film thickness equivalent to.

  Furthermore, since the configurations of the plurality of vacuum chambers 1 are the same, it is possible to replace the array antenna units 30 of the plurality of vacuum chambers 1 with one antenna transfer chamber 200. Further, since the antenna carrier 70 does not need to be kept in the vacuum chamber 1 during the film forming process, even if it is a plasma CVD apparatus provided with a plurality of vacuum chambers 1, Maintenance can also be performed.

  When the array antenna unit 30 that has been maintained is carried into the vacuum chamber 1, the above steps may be performed in the reverse order.

  20 to 22 are conceptual diagrams for explaining modifications of the antenna transfer chamber 300. 20 to 22, the guide rail 17 and the guide rail 210 are not shown for easy understanding. Hereinafter, in describing the antenna transfer chamber 300 of the modified example, the same reference numerals are given to the same configurations as those of the above-described embodiment, and detailed description thereof is omitted. As shown in FIGS. 20 to 22, the antenna transfer chamber 300 of this modification has a size that can accommodate three antenna transfer bodies 70 and is connected to the vacuum chamber 1 via the gate valve 201. The Similarly to the vacuum chamber 1, the antenna transfer chamber 300 is configured so that the inside can be decompressed to a vacuum state by a vacuum pump. The antenna transfer chamber 300 is provided with an opening / closing door 304 in an opening 302 provided on a surface opposite to a surface to which the gate valve 201 is connected, and the outside of the antenna transfer chamber 300 is at atmospheric pressure by the opening / closing door 304. Is communicated with, or the communication is released.

  The antenna transfer chamber 300 is provided with a transport device such as a belt conveyor, and the antenna transport body 70 can be transported by the transport device. When maintenance of the array antenna unit 30 becomes necessary, the antenna carrier 70 moves in the antenna carrier chamber 300 and is carried into the vacuum chamber 1 or unloaded from the vacuum chamber 1.

  For example, if it is necessary to replace the array antenna unit 30 in the vacuum chamber 1A, first, as shown in FIG. 20A, the antenna transfer chamber 300 that is at atmospheric pressure is placed in the gate valve 201 of the vacuum chamber 1A. At the same time, the empty antenna carrier 70A and the antenna carrier 70B holding the new (maintenanced) array antenna unit 30 are carried through the open / close door 304. Then, the empty antenna carrier 70A is conveyed to a position facing the gate valve 201 in the antenna conveyance chamber 300, the open / close door 304 is closed, and the inside of the antenna conveyance chamber 300 is evacuated by a vacuum pump provided in the antenna conveyance chamber 300. Depressurize to the state.

  Next, as shown in FIG. 20B, the gate valve 201 is opened, and the inside of the vacuum chamber 1A and the inside of the antenna transfer chamber 300 are communicated with each other while maintaining a vacuum state. As indicated by the white arrow, the antenna carrier 70A is carried into the vacuum chamber 1A. Then, as shown in FIG. 21A, when the antenna carrier 70A holds the array antenna unit 30, the antenna carrier 70A is unloaded from the vacuum chamber 1A and moved to the antenna carrier chamber 300. 21A, the antenna carrier 70B is moved to the position facing the gate valve 201 by the carrier device provided in the antenna carrier chamber 300, and accordingly, the antenna The transport body 70A moves from the position facing the gate valve 201 in the right direction in FIG. Further, as shown by the white arrow in FIG. 21B, the antenna carrier 70B is carried from the antenna carrier chamber 300 to the vacuum chamber 1A. When the array antenna unit 30 held by the antenna carrier 70B is hooked on the vacuum chamber 1A, the emptied antenna carrier 70B is removed from the vacuum chamber 1A as indicated by the white arrow in FIG. Unload and move to the antenna transfer chamber 300.

  When the antenna carriers 70A and 70B return to the antenna carrier chamber 300, respectively, as shown in FIG. 22B, the gate valve 201 is closed to release the communication between the antenna carrier chamber 300 and the vacuum chamber 1A. . Then, the open / close door 304 of the antenna transfer chamber 300 is opened, and both the antenna transfer bodies 70A and 70B are carried out of the antenna transfer chamber 300, and the maintenance work is completed.

  Also according to the above modification, the film forming process can be performed in the vacuum chamber 1B, and the array antenna unit 30 of the vacuum chamber 1A can be maintained, so that the same operational effects as in the above embodiment can be realized.

  In the above-described embodiment, the guide rail 17 is provided in the vacuum chamber 1 and the wheels 72 are provided on the antenna carrier 70 as a carrier means for carrying the antenna carrier 70.

  However, conversely, a plurality of guide rollers may be arranged in the vacuum chamber, and a plate-like member that slides on the guide rollers may be provided on the antenna carrier. In any case, it suffices to provide a transport means that allows the transport body to travel between the vacuum chamber and the antenna transport chamber.

  For example, as in the modification shown in FIG. 23, the antenna rail guide rail 25 is provided on the ceiling 2a of the vacuum chamber 1, and the guide roller 26 that rolls on the guide rail 25 is replaced with the array antenna unit 30. May be provided integrally or detachably. In this case, the antenna conveying means is constituted by the guide rail 25 and the guide roller 26. In this modification as well, after the array antenna unit 30 is carried to a predetermined position in the vacuum chamber 1, the array antenna unit 30 is raised in the vertical direction and hooked in the vacuum chamber 1 (FIG. The array antenna unit 30 located on the middle left side). At this time, a mechanism for raising, lowering, and latching the array antenna unit 30 may be provided in the vacuum chamber 1.

(Second Embodiment)
In the first embodiment described above, by connecting the antenna transfer chamber 300 to the vacuum chamber 1A that requires replacement of the array antenna unit 30, the vacuum chamber can be obtained without interrupting the film forming process in the other vacuum chamber 1B. Although the antenna transfer system 100 capable of maintaining the array antenna unit 30 of 1A has been described, the array antenna unit 30 of the vacuum chamber 1A can be installed without providing the antenna transfer chamber 300 by devising the film formation guide roller. Maintenance is possible. In the following embodiment, an antenna transfer system 400 capable of maintaining the array antenna unit 30 of the vacuum chamber 1A in parallel with the film forming process in the vacuum chamber 1B without providing the antenna transfer chamber 300 will be described.

  FIG. 24 is an explanatory diagram for explaining the configuration of the antenna transfer system 400 of the array antenna type plasma CVD apparatus according to the present embodiment. As shown in FIG. 24, the antenna transfer system 400 includes a vacuum chamber 401, an array antenna unit 30, and a substrate transfer chamber 450. The vacuum chamber 401 includes a housing 2, a ceiling 2a, a bottom 2b, a right side 2c, a left side 2d, a front 2e, a back 2f, a front opening 3, a rear opening 4, a front open / close door 5, Rear opening / closing door 6, right opening 7, opening / closing door 8, left opening 9, connector group 11, high frequency power supply 12, first ceiling side connector 13, second ceiling side connector 14, gas supply source 15, vacuum pump 16, The guide rail 17, the gate valve 201, and the film forming guide roller 410 are configured, and the substrate transport chamber 450 is configured to include the gate valve 151, the delivery roller 160, the take-up roller 162, and the transport guide roller 164. In addition, about the structure similar to 1st Embodiment, while attaching | subjecting the same code | symbol, the detailed description is abbreviate | omitted. Hereinafter, the film forming guide roller 410 having a configuration different from that of the first embodiment will be described in detail. As shown in FIG. 24, the film forming guide roller 410 disposed in the vacuum chamber 401 is moved to the substrate transport chamber 450 by a roller moving mechanism (not shown) (indicated by a white arrow in FIG. 24), The film formation guide roller 410 moved to the material transfer chamber 450 is returned to the vacuum chamber 401. Here, the roller moving mechanism may be provided in the vacuum chamber 401 and the substrate transport chamber 450, or the film forming guide roller 410 itself may be provided. Hereinafter, the moving process of the film forming guide roller 410 by the roller moving mechanism will be described with reference to FIGS.

(Movement process of film forming guide roller)
25 and 26 are explanatory diagrams for explaining the movement process of the film forming guide roller 410. For example, if it is necessary to replace the array antenna unit 30 in the vacuum chamber 401A, first, as shown by a white arrow in FIG. 25, the roller moving mechanism guides the film formation from the vacuum chamber 401A to the substrate transfer chamber 450. The roller 410 is moved.

  Next, as shown in FIG. 26A, the gate valve 151 is closed, the gate valve 201 of the vacuum chamber 401A is opened, and the vacuum chamber 401A is opened to the atmosphere. Then, as shown in FIG. 26B, the array antenna unit 30 hung on the ceiling portion 2a of the vacuum chamber 401A is removed using the antenna carrier 70 or the like.

  As described above, the antenna transfer system 400 according to the present embodiment maintains the vacuum state of the vacuum chamber 401B and the substrate transfer chamber 450 in which the film forming process is performed with a simple configuration in which the film forming guide roller 410 is moved. In this state, the used array antenna unit 30 can be carried out from the vacuum chamber 401A.

  At this time, similarly to the first embodiment described above, even if the film forming process is performed only in the vacuum chamber 401B by reducing the rotation speeds of the delivery roller 160 and the take-up roller 162, the vacuum chamber 401A In addition, it is possible to form a film with a film thickness equivalent to that in the case where the film forming process is performed in the vacuum chamber 401B.

  When the array antenna unit 30 that has been maintained is carried into the vacuum chamber 401, the above steps may be performed in the reverse order.

  In addition, the configurations of the array antenna unit and the antenna holding member in the above embodiment are merely examples. In any case, the antenna holding member only needs to hold the array antenna unit detachably. Therefore, in the antenna holding member, an adjustment member that restricts the movement of the electrode rod supported by the array antenna unit and a swing mechanism for swingably holding the array antenna unit are not essential components.

  Also, depending on the configuration of the array antenna unit and the configuration of the antenna holding member that holds the array antenna unit, a slide device that slides the antenna holding member is not essential. In other words, the purpose of sliding the antenna holding member in a direction orthogonal to or intersecting the transport direction is to prevent interference between the antenna holding member and the array antenna unit when the antenna transport body is carried out. Therefore, when carrying out the antenna carrier, if the antenna carrier and the array antenna unit do not interfere with each other, only a part of the antenna holding member is slid without sliding the whole antenna holding member, for example, only the adjusting member. You may make it slide. When the antenna holding member can be slid in a direction orthogonal to or intersecting the transport direction, the slide may be automatically performed by the slide device as in the above embodiment, or may be manually performed. . As described above, the configuration of the antenna holding member may be appropriately designed according to the configuration of the array antenna unit.

  In the above-described embodiment, the antenna carrier is provided with an air cylinder so that the array antenna unit can be moved up and down in the vertical direction. However, a displacement means for displacing the array antenna unit is not an essential configuration. In the above embodiment, the displacement means moves the array antenna unit up and down in the vertical direction. However, the displacement direction of the array antenna unit by the displacement means is not limited to this. In other words, the purpose of displacing the array antenna unit by the displacing means is to collectively connect the electrode rods (antenna side connector) of the array antenna unit to the connector provided in the vacuum chamber. Therefore, for example, when the connector provided in the vacuum chamber is arranged so that the electrode rod is displaced in the horizontal direction and connected, the displacing means displaces the array antenna unit in the same horizontal direction. Become.

  In the above embodiment, the array antenna unit is moved up and down in the vertical direction by the air cylinder. However, the displacement of the array antenna unit may be manually performed. Further, in the case of providing a displacement means for automatically displacing the array antenna unit, the displacement means can be configured by various actuators such as a hydraulic cylinder and an electric cylinder, not limited to an air cylinder. However, since the air cylinder has higher cushioning properties than other devices, in combination with the above-described swing mechanism, the degree of freedom of movement when the array antenna unit is hooked is increased, and the ease of attachment can be improved. The displacement means for raising or lowering the array antenna unit may be provided in the vacuum chamber without being provided in the antenna carrier.

  Moreover, in the said embodiment, although it was set as the structure which can hold | maintain two array antenna units simultaneously at an antenna carrier, the number of array antenna units which can be simultaneously hold | maintained at an antenna carrier is not limited. Further, when a plurality of array antenna units are configured to be held at the same time, the same number of antenna holding members as the array antenna units may be provided, and a plurality of array antenna units can be held on one antenna holding member. It is good also as a structure.

  In addition, when it is set as the structure which can hold | maintain several array antenna units simultaneously like the said embodiment, and the displacement means to displace these array antenna units is provided, each array antenna unit can be displaced individually. It is desirable. When each array antenna unit is hung on the vacuum chamber, it is necessary to visually check the connection state of the connector. At this time, if a plurality of array antenna units are displaced at the same time, it is difficult to confirm the mounting state of the array antenna unit positioned relatively far behind as viewed from the operator. Therefore, when a plurality of array antenna units are displaced by the displacement means, the displacement means may be configured to operate individually.

  As mentioned above, although preferred embodiment of this invention was described referring an accompanying drawing, it cannot be overemphasized that this invention is not limited to this embodiment. It will be apparent to those skilled in the art that various changes and modifications can be made within the scope of the claims, and these are naturally within the technical scope of the present invention. Is done.

  INDUSTRIAL APPLICABILITY The present invention can be used for an antenna replacement method, an antenna transfer system, and an antenna transfer device of an array antenna type plasma CVD apparatus that generates plasma in a vacuum chamber to generate a thin film on the surface of a film substrate.

DESCRIPTION OF SYMBOLS 1,401 Vacuum chamber 10 Internal space 12 High frequency power supply 13 First ceiling side connector 14 Second ceiling side connector 15 Gas supply source 17, 25 Guide rail 19 Latching pin 20, 410 Film formation guide roller 26 Guide roller 30 Array antenna unit 36 latching hole 50 inductively coupled electrode 51 first electrode rod 52 second electrode rod 62 wheel 70 antenna carrier 72 wheel 73 antenna holding member 100, 450 substrate carrier chamber 160 delivery roller 162 take-up roller 164 carrier guide roller 200 300 Antenna transfer chamber W Film substrate

Claims (9)

A plurality of vacuum chambers in which a material gas is supplied from a gas supply source into an interior that can be decompressed to a vacuum state;
A plurality of connectors provided in each of the plurality of vacuum chambers and electrically connectable to a high-frequency power source;
An array antenna having a plurality of electrode rods connectable to each of the plurality of connectors in the vacuum chamber, and generating plasma by supplying power from the high-frequency power source while the electrode rods are connected to the connectors Unit,
A substrate transfer chamber that communicates the plurality of vacuum chambers on one side of each of the plurality of vacuum chambers;
A feed roller that is provided at one end in the horizontal direction of the substrate transport chamber, and that feeds the film substrate;
A take-up roller that is provided at the other end in the horizontal direction of the base material transport chamber and winds up the film base material sent out by the feed roller;
In the base material transport chamber, a plurality of transport guides provided between the delivery roller and the take-up roller for guiding the transport of the film base material and applying a predetermined tension to the film base material. Laura,
Guided to each of the plurality of vacuum chambers so that the film substrate moving between the transport guide rollers and the array antenna unit are opposed to each other, and a predetermined amount is provided on the film substrate. A film forming guide roller for applying tension;
An array antenna exchange method for exchanging an array antenna unit in an array antenna type plasma CVD apparatus comprising:
Reducing the inside of the plurality of vacuum chambers and the inside of the substrate transport chamber to a vacuum state;
Reducing the inside of the antenna transfer chamber to a vacuum state;
Connecting the antenna transfer chamber and the vacuum chamber, and communicating the two chambers while maintaining the inside of the antenna transfer chamber and the vacuum chamber in a vacuum state;
Removing the array antenna unit from the vacuum chamber;
Transferring the removed array antenna unit from the vacuum chamber to the antenna transfer chamber, and replacing the antenna of the array antenna type plasma CVD apparatus. Before depressurizing the inside of the antenna transfer chamber to a vacuum state, a new array antenna unit is accommodated in the antenna transfer chamber,
Following the step of transporting the removed array antenna unit from the vacuum chamber to the antenna transport chamber,
Carrying the new array antenna unit from the antenna transfer chamber to the vacuum chamber between the two chambers that communicate with each other while maintaining a vacuum state;
2. The method includes: latching the new array antenna unit in the vacuum chamber so that each electrode rod of the new array antenna unit is connected to the plurality of connectors. The antenna exchange method of the array antenna type plasma CVD apparatus as described in 1 above. A plurality of vacuum chambers in which a material gas is supplied from a gas supply source into an interior that can be decompressed to a vacuum state;
A plurality of connectors provided in each of the plurality of vacuum chambers and electrically connectable to a high-frequency power source;
An array antenna having a plurality of electrode rods connectable to each of the plurality of connectors in the vacuum chamber, and generating plasma by supplying power from the high-frequency power source while the electrode rods are connected to the connectors Unit,
A substrate transfer chamber that communicates the plurality of vacuum chambers on one side of each of the plurality of vacuum chambers;
A feed roller that is provided at one end in the horizontal direction of the substrate transport chamber, and that feeds the film substrate;
A take-up roller that is provided at the other end in the horizontal direction of the base material transport chamber and winds up the film base material sent out by the feed roller;
In the base material transport chamber, a plurality of transport guides provided between the delivery roller and the take-up roller for guiding the transport of the film base material and applying a predetermined tension to the film base material. Laura,
Guided to each of the plurality of vacuum chambers so that the film substrate moving between the transport guide rollers and the array antenna unit are opposed to each other, and a predetermined amount is provided on the film substrate. A film forming guide roller for applying tension;
An antenna transfer chamber capable of accommodating the array antenna unit and communicating with the vacuum chamber while maintaining a vacuum inside;
Antenna transfer means for allowing the array antenna unit to be able to come and go between the antenna transfer chamber and the vacuum chamber that communicate with each other while maintaining a vacuum state with each other;
Antenna latching means for detachably latching the array antenna unit carried into the vacuum chamber by the antenna transport means;
An antenna carrier system for an array antenna type plasma CVD apparatus. The antenna carrying means is
Guide rails provided in the antenna transfer chamber and the vacuum chamber;
The antenna of the array antenna type plasma CVD apparatus according to claim 3, further comprising a guide roller that can roll on the guide rail and is provided integrally or detachably on the array antenna unit. Conveying system. A plurality of vacuum chambers in which a material gas is supplied from a gas supply source into an interior that can be decompressed to a vacuum state;
A plurality of connectors provided in each of the plurality of vacuum chambers and electrically connectable to a high-frequency power source;
An array antenna having a plurality of electrode rods connectable to each of the plurality of connectors in the vacuum chamber, and generating plasma by supplying power from the high-frequency power source while the electrode rods are connected to the connectors Unit,
A substrate transfer chamber that communicates the plurality of vacuum chambers on one side of each of the plurality of vacuum chambers;
A feed roller that is provided at one end in the horizontal direction of the substrate transport chamber, and that feeds the film substrate;
A take-up roller that is provided at the other end in the horizontal direction of the base material transport chamber and winds up the film base material sent out by the feed roller;
In the base material transport chamber, a plurality of transport guides provided between the delivery roller and the take-up roller for guiding the transport of the film base material and applying a predetermined tension to the film base material. Laura,
Guided to each of the plurality of vacuum chambers so that the film substrate moving between the transport guide rollers and the array antenna unit are opposed to each other, and a predetermined amount is provided on the film substrate. A film forming guide roller for applying tension;
A roller moving mechanism for moving the film forming guide roller between the vacuum chamber and the substrate transport chamber;
An array antenna exchange method for exchanging an array antenna unit in an array antenna type plasma CVD apparatus comprising:
Reducing the inside of the plurality of vacuum chambers and the inside of the substrate transport chamber to a vacuum state;
Moving the film forming guide roller from any one or more of the plurality of vacuum chambers communicated while maintaining a vacuum state to the substrate transport chamber by the roller moving mechanism;
Releasing the communication between the vacuum chamber in which the film forming guide roller is moved to the base material transport chamber and the base material transport chamber while maintaining a vacuum state;
Removing the array antenna unit from the vacuum chamber in which the film forming guide roller has been moved to the substrate transport chamber, and an antenna exchange method for an array antenna type plasma CVD apparatus. Following the step of removing the array antenna unit from the vacuum chamber in which the film forming guide roller is moved to the substrate transfer chamber,
A new array antenna unit is carried into the vacuum chamber in which the film forming guide roller has been moved to the substrate transport chamber, and the electrode rods of the new array antenna unit are connected to the plurality of connectors. Hooking a new array antenna unit into the vacuum chamber;
Communicating both chambers while maintaining the inside of the vacuum chamber in which the new array antenna unit is hooked and the base material transfer chamber in a vacuum state;
The step of moving the film forming guide roller from the base material transfer chamber to a vacuum chamber on which the new array antenna unit is hooked by the roller moving mechanism. Antenna exchange method for array antenna type plasma CVD apparatus. A plurality of vacuum chambers in which a material gas is supplied from a gas supply source into an interior that can be decompressed to a vacuum state;
A plurality of connectors provided in each of the plurality of vacuum chambers and electrically connectable to a high-frequency power source;
An array antenna having a plurality of electrode rods connectable to each of the plurality of connectors in the vacuum chamber, and generating plasma by supplying power from the high-frequency power source while the electrode rods are connected to the connectors Unit,
A substrate transfer chamber that communicates the plurality of vacuum chambers on one side of each of the plurality of vacuum chambers;
A feed roller that is provided at one end in the horizontal direction of the substrate transport chamber, and that feeds the film substrate;
A take-up roller that is provided at the other end in the horizontal direction of the base material transport chamber and winds up the film base material sent out by the feed roller;
In the base material transport chamber, a plurality of transport guides provided between the delivery roller and the take-up roller for guiding the transport of the film base material and applying a predetermined tension to the film base material. Laura,
Guided to each of the plurality of vacuum chambers so that the film substrate moving between the transport guide rollers and the array antenna unit are opposed to each other, and a predetermined amount is provided on the film substrate. A film forming guide roller for applying tension;
A roller moving mechanism for moving the film forming guide roller between the vacuum chamber and the substrate transport chamber;
An antenna latching means for detachably latching the array antenna unit carried into the vacuum chamber;
An antenna carrier system for an array antenna type plasma CVD apparatus. A plurality of vacuum chambers in which a material gas is supplied from a gas supply source into an interior that can be decompressed to a vacuum state;
A plurality of connectors provided in each of the plurality of vacuum chambers and electrically connectable to a high-frequency power source;
An array antenna having a plurality of electrode rods connectable to each of the plurality of connectors in the vacuum chamber, and generating plasma by supplying power from the high-frequency power source while the electrode rods are connected to the connectors Unit,
A substrate transfer chamber that communicates the plurality of vacuum chambers on one side of each of the plurality of vacuum chambers;
A feed roller that is provided at one end in the horizontal direction of the substrate transport chamber, and that feeds the film substrate;
A take-up roller that is provided at the other end in the horizontal direction of the base material transport chamber and winds up the film base material sent out by the feed roller;
In the base material transport chamber, a plurality of transport guides provided between the delivery roller and the take-up roller for guiding the transport of the film base material and applying a predetermined tension to the film base material. Laura,
Guided to each of the plurality of vacuum chambers so that the film substrate moving between the transport guide rollers and the array antenna unit are opposed to each other, and a predetermined amount is provided on the film substrate. A film forming guide roller for applying tension;
An antenna latching means for detachably latching the array antenna unit carried into the vacuum chamber;
An antenna carrier device coupled to an array antenna type plasma CVD apparatus comprising:
An antenna transfer chamber capable of accommodating the array antenna unit and communicating with the vacuum chamber while maintaining a vacuum state;
Antenna transfer means for allowing the array antenna unit to be able to come and go between the antenna transfer chamber and the vacuum chamber that communicate with each other while maintaining a vacuum state with each other;
With
The antenna carrying device, wherein the antenna carrying device detachably latches the array antenna unit carried into the vacuum chamber by the antenna carrying device. The antenna carrying means is
Guide rails provided in the antenna transfer chamber and the vacuum chamber;
The antenna conveyance device according to claim 8, further comprising a guide roller that can roll on the guide rail and is provided integrally or detachably on the array antenna unit.

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