JP5535705B2 - Crystal device for surface mounting - Google Patents
Crystal device for surface mounting Download PDFInfo
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- JP5535705B2 JP5535705B2 JP2010062631A JP2010062631A JP5535705B2 JP 5535705 B2 JP5535705 B2 JP 5535705B2 JP 2010062631 A JP2010062631 A JP 2010062631A JP 2010062631 A JP2010062631 A JP 2010062631A JP 5535705 B2 JP5535705 B2 JP 5535705B2
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Description
本発明は表面実装用の水晶デバイス（以下、表面実装デバイスとする）を技術分野とし、特に封止時に発生するガスの残留を少なくして封止を確実にした表面実装デバイスに関する。 The present invention relates to a surface mount crystal device (hereinafter referred to as a surface mount device), and more particularly to a surface mount device that ensures sealing by reducing residual gas generated during sealing.
（発明の背景）
表面実装デバイスは小型・軽量であることから、特に携帯型の電子機器に周波数や時間の基準源として内蔵される。通常では、圧電材としての水晶片が外底面に実装端子を有する容器内に密閉封入される。このようなものの一つに、例えば水晶片を音叉状とし、真空封止としてクリスタルインピーダンス（ＣＩ）を小さくした音叉型振動子がある。
(Background of the Invention)
Since surface-mounted devices are small and light, they are built in as reference sources for frequency and time, especially in portable electronic devices. Usually, a crystal piece as a piezoelectric material is hermetically sealed in a container having mounting terminals on the outer bottom surface. As one of such devices, there is a tuning fork type vibrator in which, for example, a crystal piece is made into a tuning fork shape and a crystal impedance (CI) is reduced as a vacuum seal.
（従来技術の一例）
第４図は一従来例を説明する図で、同図（ａ）は表面実装とした音叉型振動子の断面図、同図（ｂ）はカバーを除く平面図、同図（ｃ）は水晶片の平面図である。
(Example of conventional technology)
FIG. 4 is a diagram for explaining a conventional example. FIG. 4 (a) is a sectional view of a tuning fork type vibrator mounted on a surface, FIG. 4 (b) is a plan view excluding a cover, and FIG. It is a top view of a piece.
音叉型振動子は音叉状の水晶片１をベース基板としての凹状の容器本体２に収容する。そして、容器本体２の開口端面にカバー３を接合する。音叉状水晶片１は基本的な構成として音叉基部１ａから一対の音叉腕1ｂが延出する。一対の音叉腕1ｂの各４面には音叉振動を励起する励振電極４ａを有し、音叉基部１ａの両端側に２端子とする正負の引出電極４ｂを延出する。励振電極４ａはそれぞれ両主面及び両側面を異符号の同電位とし、一対の音叉腕1ｂ間では両主面及び両側面を異符号として共通接続される。 The tuning fork vibrator accommodates a tuning-fork crystal piece 1 in a concave container body 2 as a base substrate. Then, the cover 3 is joined to the opening end surface of the container body 2. As a basic configuration of the tuning fork crystal piece 1, a pair of tuning fork arms 1b extend from the tuning fork base 1a. Each of the four surfaces of the pair of tuning fork arms 1b has excitation electrodes 4a for exciting tuning fork vibrations, and positive and negative extraction electrodes 4b serving as two terminals are extended to both ends of the tuning fork base 1a. The excitation electrode 4a has both main surfaces and both side surfaces having the same potential with different signs, and is commonly connected between the pair of tuning fork arms 1b with both main surfaces and both side faces having different signs.
容器本体２は底壁２ａ及び二層とした枠壁２（ｂｃ）を有する例えばアルミナセラミック（Ａｌ2 Ｏ3）とした積層セラミックからなる。そして、枠壁２（ｂｃ）の一層目２ｂは一端部から中央領域に延出して底壁２ａと二層目２ｃとの間に内壁段部を有する。内壁段部の一端部両側には一対の水晶保持端子５を有し、外側面の端面電極（不図示）等を経て外底面の両端側の実装端子６に電気的に接続する。ここでは、例えば枠壁の一層目２ｂを含む底壁２ａの中央部に大小の貫通孔（封止孔）７を有し、封止材８としての金属材８ｘが充填される。 The container body 2 is made of a laminated ceramic made of, for example, alumina ceramic (Al 2 O 3 ) having a bottom wall 2a and a two-layer frame wall 2 (bc). The first layer 2b of the frame wall 2 (bc) extends from one end to the central region and has an inner wall step between the bottom wall 2a and the second layer 2c. A pair of crystal holding terminals 5 are provided on both sides of one end of the inner wall step portion, and are electrically connected to mounting terminals 6 on both ends of the outer bottom surface through end surface electrodes (not shown) on the outer surface. Here, for example, there is a large and small through hole (sealing hole) 7 in the center of the bottom wall 2a including the first layer 2b of the frame wall, and the metal material 8x as the sealing material 8 is filled.
このようなものでは、先ず、引出電極４ｂの延出した音叉基部１ａの両端側を容器本体２の水晶保持端子５に導電性接着剤９によって固着する。そして、例えば低融点のガラス１０の溶融によって開口端面にカバー３を接合する（ガラス封止）。次に、音叉型振動子を真空中に収容し、低融点ガラス１０から発生する不要ガスともども貫通孔７から排気して真空にする。そして、第５図に示したように、封止材８としての金属ボール８ａを貫通孔７に位置決する。最後に、金属ボール８ａを溶融した金属材８ｘによって貫通孔７を閉塞する（真空封止）。 In such a case, first, the both ends of the tuning fork base 1a extended from the extraction electrode 4b are fixed to the crystal holding terminal 5 of the container body 2 by the conductive adhesive 9. Then, for example, the cover 3 is joined to the opening end surface by melting the low melting point glass 10 (glass sealing). Next, the tuning fork vibrator is accommodated in a vacuum, and unnecessary gas generated from the low melting point glass 10 is exhausted from the through hole 7 to be evacuated. Then, as shown in FIG. 5, the metal ball 8 a as the sealing material 8 is positioned in the through hole 7. Finally, the through hole 7 is closed with a metal material 8x obtained by melting the metal ball 8a (vacuum sealing).
これにより、カバー３の接合時に発生する不要ガスを排出して音叉状水晶片１を真空中に密閉封入するので、摩擦抵抗によるＣＩの低下を抑制し、特に音叉型振動子の場合はその効果が顕著になる。なお、不要ガスは、ガラス封止に限らず、樹脂封止や、金属カバー３を用いたシーム溶接等を用いた場合でも同様に発生する。そして、容器本体２の内壁段部を中央領域にまで延出することによって、衝撃時に音叉腕1ｂの先端が内底面（底壁２ａの表面）に衝突することを防止する。 As a result, unnecessary gas generated during joining of the cover 3 is discharged and the tuning fork crystal piece 1 is hermetically sealed in a vacuum, so that the reduction in CI due to frictional resistance is suppressed, and particularly in the case of a tuning fork vibrator. Becomes prominent. The unnecessary gas is not limited to glass sealing, but is generated in the same manner even when resin sealing, seam welding using the metal cover 3 or the like is used. Then, by extending the inner wall step portion of the container body 2 to the central region, the tip of the tuning fork arm 1b is prevented from colliding with the inner bottom surface (the surface of the bottom wall 2a) at the time of impact.
（従来技術の問題点）
しかしながら、上記構成の音叉型振動子では、金属ボール８ａの溶融時に金属屑が飛散して水晶片１に付着して振動特性を悪化させる問題があるから、特許文献１では次の提案を開示する。すなわち、先ず、焼成後の容器本体２の枠壁の一層目２ｂを含む底壁２ａの貫通孔７に、金属粒子の混入した金属ペーストを印刷等によって充填する。次に、容器本体２とともに金属ペーストを焼成して、ポーラス（多孔質）とした封止材８としての焼結金属８ｙを得る。最後に、容器本体２の開口端面にカバー３をガラス封止した後、外底面側から金属８ｚの蒸着や溶融によって焼結金属８ｙの微細孔を埋めて覆い、これにより貫通孔７を確実に閉塞（封止）することを提案している。
(Problems of conventional technology)
However, in the tuning fork type vibrator having the above-described configuration, there is a problem that metal scraps are scattered when the metal ball 8a is melted and adheres to the crystal piece 1 to deteriorate the vibration characteristics. Therefore, Patent Document 1 discloses the following proposal. . That is, first, a metal paste mixed with metal particles is filled into the through holes 7 of the bottom wall 2a including the first layer 2b of the frame wall of the container body 2 after firing by printing or the like. Next, the metal paste is fired together with the container body 2 to obtain a sintered metal 8y as the sealing material 8 made porous. Finally, the cover 3 is sealed with glass on the opening end face of the container body 2, and then the fine holes of the sintered metal 8y are filled and covered from the outer bottom surface side by vapor deposition or melting of the metal 8z, thereby ensuring the through hole 7 It is proposed to close (seal).
しかし、この場合には、容器本体２（セラミック）と焼結金属８ｙとの膨張係数の違いから、金属ペーストを埋設後の焼結前後（加熱前後）等で歪みを生じる。このため、容器本体２の貫通孔周辺に亀裂等を生じて封止不良とする問題があった。また、ここでは、容器本体２となるセラミック生シートを焼成した後、貫通孔７に金属ペーストを塗布して低温焼成によって焼結金属８ｙを得る。したがって、セラミック生シート及び金属ペーストの焼成工程を別個に要するので、生産性を低下させる問題もあった。 However, in this case, distortion occurs before and after sintering (before and after heating) after embedding the metal paste due to the difference in expansion coefficient between the container body 2 (ceramic) and the sintered metal 8y. For this reason, there existed a problem which a crack etc. were produced in the periphery of the through-hole of the container main body 2, and it was set as poor sealing. In addition, here, after firing the ceramic raw sheet to be the container body 2, a metal paste is applied to the through holes 7, and the sintered metal 8 y is obtained by low-temperature firing. Therefore, since the firing process of the ceramic raw sheet and the metal paste is required separately, there is a problem that productivity is lowered.
（発明の目的）
本発明は貫通孔の封止を確実にして生産性を高めた表面実装デバイスを提供することを目的とする。
(Object of invention)
It is an object of the present invention to provide a surface mount device that improves the productivity by ensuring the sealing of a through hole.
本発明は、特許請求の範囲（請求項１）に示したように、セラミックからなるベース基板に少なくとも水晶片を搭載してカバーが被せられるとともに、前記ベース基板に設けた貫通孔が多孔質性の封止材及び前記封止材の微細孔を金属によって閉塞した表面実装用の水晶デバイスにおいて、前記封止材は多孔質性のセラミックからなる構成とする。 According to the present invention, as shown in the claims (Claim 1), at least a crystal piece is mounted on a base substrate made of ceramic and a cover is covered, and the through-hole provided in the base substrate is porous. In the sealing device and the surface mount crystal device in which the fine holes of the sealing material are closed with metal, the sealing material is made of porous ceramic.
このような構成であれば、ベース基板と封止材とはいずれもセラミック例えばアルミナセラミックからなり、熱膨張係数や焼成温度を基本的に同じにする。したがって、焼結金属を形成する場合に比較し、膨張係数差に基づいた亀裂等を防止する。また、焼成温度を同じにするのでベース基板を形成するセラミック生シートと封止材とを同一工程での焼成によって同時に形成でき、生産性を高められる。 If it is such a structure, both a base substrate and a sealing material will consist of ceramics, for example, an alumina ceramic, and a thermal expansion coefficient and a calcination temperature will be made fundamentally the same. Therefore, cracks and the like based on the difference in expansion coefficient are prevented as compared with the case of forming a sintered metal. Moreover, since the firing temperature is made the same, the ceramic raw sheet and the sealing material for forming the base substrate can be simultaneously formed by firing in the same process, and productivity can be improved.
（請求項１の引用項）
請求項２では、請求項１において、前記封止材は、前記ベース基板の表面上から少なくとも突出した平板部を有して前記貫通孔を覆うとともに、前記封止材は前記水晶片の上下動に対応して接触し、前記水晶片の他端部の揺れ幅を小さくする枕とする。これにより、封止材は水晶片の他端部の衝撃を緩和する枕を兼用し、他端部の破損等を防止できる。
(Citation of claim 1)
According to a second aspect of the present invention, in the first aspect, the sealing material has a flat plate portion protruding at least from the surface of the base substrate to cover the through hole, and the sealing material moves up and down of the crystal piece. And a pillow that makes contact with the other end of the crystal piece to reduce the swinging width. Thereby, the sealing material can also be used as a pillow that alleviates the impact at the other end of the crystal piece, and the other end can be prevented from being damaged.
請求項３では、請求項１において、前記水晶片は音叉状として前記ベース基板とカバーとは真空封止とする。これにより、水晶片の摩擦抵抗が減ってＣＩを向上でき、特に音叉型振動子の場合に顕著な効果を奏する。 According to a third aspect of the present invention, in the first aspect of the present invention, the crystal piece is a tuning fork and the base substrate and the cover are vacuum-sealed. As a result, the frictional resistance of the crystal piece is reduced and the CI can be improved, and a remarkable effect can be obtained particularly in the case of a tuning fork vibrator.
以下、本発明の一実施形態を第１図（音叉型振動子の断面図）によって説明する。なお、前従来例と同一部分には同番号を付与してその説明は簡略又は省略する。 Hereinafter, an embodiment of the present invention will be described with reference to FIG. 1 (cross-sectional view of a tuning fork vibrator). In addition, the same number is attached | subjected to the same part as a prior art example, and the description is simplified or abbreviate | omitted.
音叉型振動子は、前述したように、一対の音叉腕1ｂの励振電極４ａが延出した音叉基部１ａの一端部両側を、底壁２ａと枠壁からなる凹状とした容器本体（ベース基板）２の水晶保持端子５に固着し、ガラス封止によってカバー３を接合する。水晶保持端子５は外底面の実装端子６に電気的に接続する。容器本体２の中央部となる底壁２ａ及び枠壁の一層目２ｂに段差を形成する大小の貫通孔７（ａｂ）を有する。 As described above, the tuning fork vibrator has a container body (base substrate) in which both ends of one end of the tuning fork base 1a from which the excitation electrodes 4a of the pair of tuning fork arms 1b extend are formed in a concave shape including a bottom wall 2a and a frame wall. The cover 3 is bonded to the quartz crystal holding terminal 5 by glass sealing. The crystal holding terminal 5 is electrically connected to the mounting terminal 6 on the outer bottom surface. A large and small through hole 7 (ab) is formed in the bottom wall 2a, which is the center of the container body 2, and the first layer 2b of the frame wall.
そして、この実施形態では、容器本体２の枠壁の一層目２ｂを含む底壁２ａの貫通孔７に充填する封止材８を、前述した金属粒子を焼成したポーラスな焼結金属８ｙに代えて同セラミック８ｙ′とする。ポーラスなセラミック８ｙ′は例えば容器本体２と同様のアルミナセラミック（Ａｌ2 Ｏ3）とする。そして、例えば特許文献２（段落０００３）に示されるように、気泡を含有した状態でセラミックの生シートを焼成させることによって得られる。この場合、気泡の量が多いほど気孔率は高まる。 In this embodiment, the sealing material 8 filling the through hole 7 of the bottom wall 2a including the first layer 2b of the frame wall of the container body 2 is replaced with the porous sintered metal 8y obtained by firing the metal particles described above. The ceramic 8y ′. The porous ceramic 8y ′ is, for example, an alumina ceramic (Al 2 O 3 ) similar to the container body 2. And as shown, for example in patent document 2 (paragraph 0003), it is obtained by baking the ceramic raw sheet in the state containing the bubble. In this case, the porosity increases as the amount of bubbles increases.
ここでは、先ず、容器本体２の枠壁の二層目２ｂに相当した矩形状領域を縦横に有する図示しないセラミック生シートにそれぞれに対応して貫通孔（小孔）７ｂを形成する。そして、マスクを用いた印刷によって、気泡を含有したセラミックペーストを各貫通孔７ｂに充填して一体化する。 Here, first, through holes (small holes) 7b are formed corresponding to the ceramic raw sheets (not shown) each having a rectangular region corresponding to the second layer 2b of the frame wall of the container body 2 in the vertical and horizontal directions. Then, the ceramic paste containing bubbles is filled into each through hole 7b and integrated by printing using a mask.
次に、底壁２ａに相当した矩形状領域に貫通孔（大穴）７ａが設けられたセラミック生シート及び枠壁の二層目２ｃを積層して焼成する。但し、これらにはＷ（タングステン）やＭｏ（モリブテン）による水晶保持端子５等の回路パターン（下地電極）が形成されて積層される。そして、焼成後に電解メッキによって、下地電極上にＡu（金）を設け、容器本体２が縦横に並んだシート状容器を形成する。 Next, a ceramic raw sheet provided with a through hole (large hole) 7a in a rectangular region corresponding to the bottom wall 2a and a second layer 2c of the frame wall are laminated and fired. However, a circuit pattern (underlying electrode) such as a crystal holding terminal 5 made of W (tungsten) or Mo (molybdenum) is formed and laminated on these. Then, Au (gold) is provided on the base electrode by electrolytic plating after firing to form a sheet-like container in which the container main body 2 is arranged vertically and horizontally.
次に、シート状容器の各容器本体２の水晶保持端子５に音叉状水晶片１の音叉基部部の両端側を固着する。そして、各容器本体２の開口端面にガラス封止によってカバー３を接合する。そして、例えば真空中で、ガラス封止の際に生ずる不要ガスを封止材８としてのポーラスとしたセラミックを経て排出する。 Next, both ends of the tuning fork base portion of the tuning fork crystal piece 1 are fixed to the crystal holding terminals 5 of the container main bodies 2 of the sheet-like container. And the cover 3 is joined to the opening end surface of each container main body 2 by glass sealing. Then, for example, in a vacuum, unnecessary gas generated during glass sealing is discharged through a porous ceramic as the sealing material 8.
最後に、同真空中で、各容器本体２の外底面に露出した貫通孔７ａに、例えばＡg（銀）を蒸着やスパッタ等によって金属８ｚの粒子を堆積するとともに、封止材８としてのセラミック８ｙ′の微細孔を閉塞する。そして、シート状容器を縦横に分割して個々の音叉型振動子を得る。この場合、枠壁の一層目２ｂの下面や底壁２ａの内周に予め印刷による金属膜（不図示）を形成し、蒸着等による付着強度を高めることもできる。 Finally, in the same vacuum, particles of metal 8z are deposited in the through-holes 7a exposed on the outer bottom surface of each container body 2 by vapor deposition, sputtering, or the like, for example, and ceramic as the sealing material 8 Close the 8y 'micropores. The sheet-like container is divided vertically and horizontally to obtain individual tuning fork vibrators. In this case, a metal film (not shown) by printing may be formed in advance on the lower surface of the first layer 2b of the frame wall and the inner periphery of the bottom wall 2a to increase the adhesion strength by vapor deposition or the like.
このような構成であれば、発明の効果の欄でも記載するように、ベース基板としての容器本体２と封止材８とはいずれもアルミナセラミックとするので、熱膨張係数や焼成温度を基本的に同じにする。したがって、封止材８として金属粒子からなる焼結金属８ｙを形成する場合に比較し、膨張係数差に基づいた亀裂等を防止する。 With such a configuration, as described in the column of the effect of the invention, since the container body 2 and the sealing material 8 as the base substrate are both made of alumina ceramic, the thermal expansion coefficient and the firing temperature are basically set. To the same. Therefore, as compared with the case where the sintered metal 8y made of metal particles is formed as the sealing material 8, cracks and the like based on the difference in expansion coefficient are prevented.
また、焼成温度を同じにするので、セラミック生シートと封止材８とを同一工程での焼成によって同時に形成でき、生産性を高められる。そして、ここでは、水晶片１を音叉状とした音叉型振動子として真空封止とするので、特にＣＩを良好にする。 Moreover, since the firing temperature is the same, the ceramic raw sheet and the sealing material 8 can be simultaneously formed by firing in the same process, and productivity can be improved. Here, since the crystal piece 1 is vacuum-sealed as a tuning fork type vibrator having a tuning fork shape, the CI is particularly improved.
なお、この実施形態では、第２枠壁の一層目２ｂを中央領域にまで延出して音叉腕２ｂの先端が底壁２ａに衝突することを防止したが、例えば第２図に示したようにしてもよい。すなわち、第２枠壁の一層目２ｂとは別個に、印刷によって、封止材８としての少なくとも平板部を有するポーラスとしたセラミック８ｙ′を底壁上面から突出して形成する（所謂枕を形成する）。この場合、セラミック８ｙ′の平板部は底壁２ａの貫通孔７を覆い、蒸着等による金属８ｚで閉塞される。 In this embodiment, the first layer 2b of the second frame wall is extended to the central region to prevent the tip of the tuning fork arm 2b from colliding with the bottom wall 2a. For example, as shown in FIG. May be. That is, separately from the first layer 2b of the second frame wall, a porous ceramic 8y 'having at least a flat plate portion as the sealing material 8 is formed by printing so as to protrude from the upper surface of the bottom wall (so-called pillow is formed). ). In this case, the flat plate portion of the ceramic 8y ′ covers the through hole 7 of the bottom wall 2a and is closed by the metal 8z by vapor deposition or the like.
（第２実施形態）
第２実施形態では、第３図（表面実装振動子の断面図、平面図、水晶片の平面図）に示したように、水晶片１は厚みすべり振動とした平板状のＡＴカットとする。なお、第１実施形態と同一部分の説明は省略又は簡略する。水晶片１は両主面に励振電極４ａを有し、他端部に引出電極４ｂを延出する。そして、水晶片１の他端部を容器本体２の他端側から突出した枠壁の二層目２ｂに対面する。底壁２ａ及び枠壁の二層目２ｂには前述同様に大小の貫通孔７（ａｂ）を有する。
(Second Embodiment)
In the second embodiment, as shown in FIG. 3 (a cross-sectional view, a plan view, and a plan view of a crystal piece of a surface-mounted vibrator), the crystal piece 1 is formed into a flat plate AT cut having a thickness shear vibration. In addition, description of the same part as 1st Embodiment is abbreviate | omitted or simplified. The quartz crystal piece 1 has excitation electrodes 4a on both main surfaces, and extends an extraction electrode 4b on the other end. Then, the other end portion of the crystal piece 1 faces the second layer 2 b of the frame wall protruding from the other end side of the container body 2. The bottom wall 2a and the second layer 2b of the frame wall have large and small through holes 7 (ab) as described above.
枠壁の二層目２ｂの貫通孔７ｂには、前述したと同様に、封止材８としてのポーラスなセラミック８ｙ′が印刷によって充填され、セラミック生シートとともに焼成される。そして、水晶片１の引出電極4ｂの延出した一端部両側を水晶保持端子５に導電性接着剤９によって固着し、例えばシーム溶接によってカバー３を接合する。さらに、真空中での排気後に、蒸着等によって底壁２ａの貫通孔７ａ内に金属粒子８ｚを堆積してセラミック８ｙ′のポーラス面を閉塞する。なお、符号１１はシーム溶接用の金属リングである。 As described above, the porous ceramic 8y ′ as the sealing material 8 is filled in the through hole 7b of the second layer 2b of the frame wall by printing, and fired together with the ceramic raw sheet. Then, both ends of the extended end portion of the extraction electrode 4b of the crystal piece 1 are fixed to the crystal holding terminal 5 by the conductive adhesive 9, and the cover 3 is joined by, for example, seam welding. Further, after evacuation in a vacuum, metal particles 8z are deposited in the through holes 7a of the bottom wall 2a by vapor deposition or the like to close the porous surface of the ceramic 8y ′. Reference numeral 11 denotes a metal ring for seam welding.
これらより、第１実施形態と同様に、ベース基板としての容器本体２と封止材８とはいずれもアルミナセラミックとするので、熱膨張係数や焼成温度を基本的に同じにする。したがって、膨張係数差に基づいた亀裂等を防止するとともに、セラミック生シートと封止材８とを同一工程での焼成によって同時に形成できて生産性を高める。そして、この場合でも、真空封止とするのでＣＩを良好にする。さらに、水晶片１の他端部を枠壁の二層目２ｂに対面するので、封止材８が枕として機能し、衝撃時における水晶片１の他端部の振幅を小さくして破損等を防止できる。 From these, as in the first embodiment, the container body 2 as the base substrate and the sealing material 8 are both made of alumina ceramic, so that the thermal expansion coefficient and the firing temperature are basically the same. Therefore, cracks and the like based on the difference in expansion coefficient can be prevented, and the ceramic raw sheet and the sealing material 8 can be simultaneously formed by firing in the same process, thereby increasing productivity. Even in this case, since the vacuum sealing is used, the CI is improved. Further, since the other end of the crystal piece 1 faces the second layer 2b of the frame wall, the sealing material 8 functions as a pillow, and the amplitude of the other end of the crystal piece 1 at the time of impact is reduced to cause damage. Can be prevented.
（他の事項）
上記実施形態では、ベース基板は凹状の容器本体としてカバーは平板状としたが、ベース基板を平板状としてカバーを凹状とした場合でも同様に適用できる。また、水晶振動子として説明したが、例えば水晶片とともに発振回路を形成するＩＣチップを搭載した場合でも同様に適用でき、要は少なくとも水晶片を収容した水晶デバイスに適用できる。
(Other matters)
In the above embodiment, the base substrate is a concave container body and the cover is flat. However, the present invention can be similarly applied to a case where the base substrate is flat and the cover is concave. Further, although described as a crystal resonator, the present invention can be similarly applied to, for example, a case where an IC chip that forms an oscillation circuit together with a crystal piece is mounted.
１ 水晶片、２ ベース基板（容器本体）、３ カバー、４ 励振及び引出電極、５ 水晶保持端子、６ 実装端子、７ 貫通孔、８ 封止材、８ｙ 焼結金属、８ｙ′ セラミック、９ 導電性接着剤、１０ ガラス、１１ 金属リング。 1 crystal piece, 2 base substrate (container body), 3 cover, 4 excitation and extraction electrodes, 5 crystal holding terminal, 6 mounting terminal, 7 through-hole, 8 sealing material, 8y sintered metal, 8y ′ ceramic, 9 conductive Adhesive, 10 glass, 11 metal ring.
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