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JP5537064B2 - Inner diameter measuring device - Google Patents
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JP5537064B2 - Inner diameter measuring device - Google Patents

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JP5537064B2
JP5537064B2 JP2009103038A JP2009103038A JP5537064B2 JP 5537064 B2 JP5537064 B2 JP 5537064B2 JP 2009103038 A JP2009103038 A JP 2009103038A JP 2009103038 A JP2009103038 A JP 2009103038A JP 5537064 B2 JP5537064 B2 JP 5537064B2
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inner diameter
transmission line
measuring
measurement object
coaxial transmission
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JP2010256036A (en
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喜久男 森
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Yazaki Corp
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Description

本発明は、計測対象物の内径を計測するための装置に関し、詳しくは導電性を有する筒状の計測対象物に対応する内径計測装置に関する。   The present invention relates to an apparatus for measuring the inner diameter of a measurement object, and more particularly to an inner diameter measurement apparatus corresponding to a cylindrical measurement object having conductivity.

計測対象物の内径を計測する装置としては従来より各種の方式が提案されている。下記特許文献1に開示された内径計測装置にあっては、計測対象物の内部に計測ヘッドを挿入し、この測定ヘッドに設けられた接触子の変位量によって測定物の内径を計測する方式となっている。   Conventionally, various methods have been proposed as an apparatus for measuring the inner diameter of a measurement object. In the inner diameter measuring device disclosed in the following Patent Document 1, a measuring head is inserted into the measuring object, and the inner diameter of the measuring object is measured by the amount of displacement of the contact provided on the measuring head; It has become.

一方、下記特許文献2に開示された内径計測装置にあっては、計測対象物の内部に挿入される計測ヘッドに反射鏡やレンズを設けており、計測対象物の内面に対し接触せずに内径を光学的に計測する方式となっている。   On the other hand, in the inner diameter measuring device disclosed in Patent Document 2 below, the measuring head inserted into the measuring object is provided with a reflecting mirror and a lens without contacting the inner surface of the measuring object. The inner diameter is optically measured.

他方、下記特許文献3に開示された内径計測装置にあっては、特許文献2と同様に計測対象物の内面に対し非接触となる方式であって、計測対象物の内部に挿入される計測ヘッドがプローブとなっており、計測対象物の内径を超音波で計測する方式となっている。   On the other hand, the inner diameter measuring device disclosed in Patent Document 3 below is a method in which the inner surface of the measurement object is not contacted as in Patent Document 2, and is a measurement inserted into the measurement object. The head serves as a probe, and is a method of measuring the inner diameter of the measurement object with ultrasonic waves.

特開2005−257395号公報JP 2005-257395 A 特開2002−39724号公報JP 2002-39724 A 特開2003−75142号公報JP 2003-75142 A

ところで、上記従来技術にあっては、計測対象物の内部に計測ヘッドを挿入する必要があることから、測定ヘッドの構造上、内径が小さな計測対象物は計測対象外になってしまうという問題点を有している。また、超音波で内径計測をする方式の装置にあっては、高精度で計測をすることができないという問題点を有している。   By the way, in the above prior art, since it is necessary to insert a measuring head inside the measuring object, the measuring object having a small inner diameter is excluded from the measuring object due to the structure of the measuring head. have. In addition, an apparatus that measures the inner diameter using ultrasonic waves has a problem in that measurement cannot be performed with high accuracy.

計測対象物の用途が例えば光導波路や伝送路等を構成する部品である場合に、このような構成部品は内径が小さく尚かつ高精度の計測を必要とすることから、上記従来技術で挙げた装置は不向きであると言える。   When the use of the measurement object is, for example, a component constituting an optical waveguide, a transmission line, etc., since such a component has a small inner diameter and requires high-precision measurement, it is mentioned in the above prior art. It can be said that the device is unsuitable.

本発明は、上記した事情に鑑みてなされたもので、内径が小さな計測対象物の内径計測をすることが可能であり、また、内径計測を高精度で行うことが可能な内径計測装置を提供することを課題とする。   The present invention has been made in view of the above-described circumstances, and provides an inner diameter measuring device capable of measuring an inner diameter of a measurement object having a small inner diameter and capable of measuring the inner diameter with high accuracy. The task is to do.

上記課題を解決するためになされた請求項1記載の本発明の内径計測装置は、筒状となる導電性の計測対象物の内径を計測するための装置であって、前記計測対象物を外導体として組み付けることにより同軸伝送路が形成される同軸伝送路装置と、該同軸伝送路装置の両端にそれぞれ接続される二つの同軸ケーブルと、該同軸ケーブルを介して前記同軸伝送路装置に接続され、且つ前記同軸伝送路の特性インピーダンス値を計測し、且つ該特性インピーダンス値及び前記同軸伝送路装置における内導体の既知外径値を基に前記計測対象物の内径を得るための演算をし、且つこの演算結果を出力する内径演算出力手段と、を備えることを特徴としている。   In order to solve the above-mentioned problems, the inner diameter measuring device according to the present invention as claimed in claim 1 is a device for measuring the inner diameter of a cylindrical conductive measuring object, wherein the measuring object is externally mounted. A coaxial transmission line device in which a coaxial transmission line is formed by assembling as a conductor, two coaxial cables respectively connected to both ends of the coaxial transmission line device, and the coaxial transmission line device connected via the coaxial cable And measuring the characteristic impedance value of the coaxial transmission line, and calculating to obtain the inner diameter of the measurement object based on the characteristic impedance value and the known outer diameter value of the inner conductor in the coaxial transmission line device, And an inner diameter calculation output means for outputting the calculation result.

このような特徴を有する本発明によれば、計測対象物の内径に応じて特性インピーダンス値が異なる数値をとることに着目し、これを内径計測に利用する。すなわち、本発明は特性インピーダンス値を内径計測に用いる。また、計測対象物を外導体とした時に内導体となる部品の既知外径値を内径計測に用いる。計測対象物の内径は、特性インピーダンス値及び内導体の既知外径値を基に所定の演算をすることにより、高精度に計測される。   According to the present invention having such characteristics, attention is paid to the fact that the characteristic impedance value is different depending on the inner diameter of the measurement object, and this is used for inner diameter measurement. That is, the present invention uses the characteristic impedance value for the inner diameter measurement. Further, a known outer diameter value of a component that becomes an inner conductor when the measurement target is an outer conductor is used for inner diameter measurement. The inner diameter of the measurement object is measured with high accuracy by performing a predetermined calculation based on the characteristic impedance value and the known outer diameter value of the inner conductor.

本発明によれば、内径が小さな計測対象物であっても、内導体を細く形成することで内径計測が可能になる(内導体は同軸伝送路における導体としての機能を有していれば良く、従来技術のような機能部品を各種組み付けてなるものではないことから、内径の小さな計測対象物に対して挿入可能に形成することが容易である)。   According to the present invention, the inner diameter can be measured by forming the inner conductor thin even if the inner diameter of the measurement object is small (the inner conductor only needs to have a function as a conductor in the coaxial transmission line). Since various functional parts as in the prior art are not assembled, it is easy to form such that it can be inserted into a measurement object having a small inner diameter).

本発明によれば、特性インピーダンス値に基づくことから、この特性インピーダンス値の変化によって計測対象物の内径のバラツキを把握することが可能になる。   According to the present invention, since it is based on the characteristic impedance value, it is possible to grasp the variation in the inner diameter of the measurement object by the change in the characteristic impedance value.

請求項2記載の本発明の内径計測装置は、請求項1に記載の内径計測装置において、前記同軸伝送路装置は、前記外導体となる前記計測対象物の内部所定位置に挿入されるとともに前記既知外径値を有する前記内導体と、該内導体の端部に接続される内部コンタクト及び前記計測対象物の端部に接続される外部コンタクトを有するとともに前記同軸ケーブルに対する接続部を有する二つのSMAコネクタと、を備えることを特徴としている。   An inner diameter measuring apparatus according to a second aspect of the present invention is the inner diameter measuring apparatus according to the first aspect, wherein the coaxial transmission line device is inserted into a predetermined position inside the measurement object serving as the outer conductor. Two of the inner conductor having a known outer diameter value, the inner contact connected to the end of the inner conductor and the outer contact connected to the end of the measurement object, and the connection to the coaxial cable And an SMA connector.

このような特徴を有する本発明によれば、計測対象物を外導体として特性インピーダンス値を計測するにあたり、同軸伝送路装置側では、計測対象物の他に、この計測対象物に挿入される内導体と、二つのSMAコネクタとを備えればよい。   According to the present invention having such characteristics, in measuring the characteristic impedance value using the measurement object as an outer conductor, the coaxial transmission line device side, in addition to the measurement object, is inserted into the measurement object. What is necessary is just to provide a conductor and two SMA connectors.

請求項1に記載された本発明によれば、特性インピーダンス値等に基づいて演算をすることにより内径を得る装置であることから、従来技術のような大きなものにはならず、内径の小さな計測対象物であっても内径計測をすることができるという効果を奏する。また、本発明によれば、計測対象物の内径を高精度で計測することができるという効果を奏する。   According to the first aspect of the present invention, since the inner diameter is obtained by calculating based on the characteristic impedance value or the like, it is not as large as in the prior art, and the measurement with a small inner diameter is performed. Even if it is a target object, there exists an effect that an internal diameter measurement can be performed. Moreover, according to this invention, there exists an effect that the internal diameter of a measuring object can be measured with high precision.

請求項2に記載された本発明によれば、同軸伝送路装置のより良い形態を提供することができるという効果を奏する。   According to the second aspect of the present invention, there is an effect that a better form of the coaxial transmission line device can be provided.

本発明の内径計測装置を示す基本構成図である。It is a basic lineblock diagram showing the inside diameter measuring device of the present invention. 実施例における内径計測装置の構成図である。It is a block diagram of the internal diameter measuring apparatus in an Example.

以下、図面を参照しながら説明する。図1は本発明の内径計測装置を示す基本構成図である。   Hereinafter, description will be given with reference to the drawings. FIG. 1 is a basic configuration diagram showing an inner diameter measuring apparatus of the present invention.

図1において、引用符号1は、筒状となる導電性の計測対象物2の内径D1を計測するための装置、すなわち本発明の内径計測装置を示している。本発明の内径計測装置1は、内径計測対象となる計測対象物2を外導体として組み付けることにより同軸伝送路が形成される同軸伝送路装置3と、この同軸伝送路装置3の両端にそれぞれ接続される二つの同軸ケーブル4と、同軸ケーブル4を介して同軸伝送路装置3に接続される内径演算出力手段5とを備えて構成されている。   In FIG. 1, reference numeral 1 indicates an apparatus for measuring an inner diameter D1 of a conductive measuring object 2 having a cylindrical shape, that is, an inner diameter measuring apparatus of the present invention. An inner diameter measuring device 1 of the present invention is connected to a coaxial transmission line device 3 in which a coaxial transmission line is formed by assembling a measurement object 2 as an inner diameter measurement target as an outer conductor, and to both ends of the coaxial transmission line device 3. Two coaxial cables 4 and an inner diameter calculation output means 5 connected to the coaxial transmission line device 3 via the coaxial cables 4.

同軸伝送路装置3は、上記同軸伝送路の特性インピーダンス値を内径演算出力手段5において計測することができるように構成されている。具体的には、計測対象物2を外導体として組み付けるものであることから、計測対象物2の他に内導体を含むように装置が構成されている(詳細に関しては、後述する実施例の欄でより良い一例を挙げて説明するものとする)。上記内導体は、予め外径値が分かっているものが用いられている。   The coaxial transmission line device 3 is configured so that the characteristic impedance value of the coaxial transmission line can be measured by the inner diameter calculation output means 5. Specifically, since the measurement object 2 is assembled as an outer conductor, the apparatus is configured so as to include an inner conductor in addition to the measurement object 2 (for details, see the section of an embodiment described later). I will explain with a better example.) As the inner conductor, one whose outer diameter value is known in advance is used.

内径演算出力手段5は、同軸伝送路装置3における上記同軸伝送路の特性インピーダンス値を計測することができるように構成されている。また、内径演算出力手段5は、計測した特性インピーダンス値と、同軸伝送路装置3における上記内導体の既知外径値とに基づいて、計測対象物2の内径D1を得るための演算をすることができるように構成されている。さらに、内径演算出力手段5は、上記の演算結果を出力することができるように構成されている。   The inner diameter calculation output means 5 is configured to measure the characteristic impedance value of the coaxial transmission line in the coaxial transmission line device 3. Further, the inner diameter calculation output means 5 performs a calculation for obtaining the inner diameter D1 of the measurement object 2 based on the measured characteristic impedance value and the known outer diameter value of the inner conductor in the coaxial transmission line device 3. It is configured to be able to. Further, the inner diameter calculation output means 5 is configured to output the above calculation result.

以下、図面を参照しながら実施例を説明する。図2は実施例における内径計測装置の構成図である。尚、図1と同一の構成部材には同一の符号を付すものとする。   Hereinafter, embodiments will be described with reference to the drawings. FIG. 2 is a configuration diagram of the inner diameter measuring apparatus in the embodiment. In addition, the same code | symbol shall be attached | subjected to the same structural member as FIG.

図2において、計測対象物2の内径D1(図1参照)を計測するための内径計測装置1は、同軸伝送路装置3と、二つの同軸ケーブル4と、内径演算出力手段5とを備えて構成されている。内径計測装置1は、大小様々な内径を有する計測対象物2の内径D1を計測することができるように構成されている。   In FIG. 2, an inner diameter measuring device 1 for measuring an inner diameter D1 (see FIG. 1) of a measurement object 2 includes a coaxial transmission line device 3, two coaxial cables 4, and an inner diameter calculation output means 5. It is configured. The inner diameter measuring device 1 is configured to be able to measure the inner diameter D1 of the measuring object 2 having various inner diameters.

同軸伝送路装置3は、外導体としての計測対象物2と、この計測対象物2の内部所定位置(中心軸位置)に挿入される内導体6と、二つのSMAコネクタ7とを備えて構成されている。同軸伝送路装置3には、同軸伝送路が形成されるようになっている。   The coaxial transmission line device 3 includes a measurement object 2 as an outer conductor, an inner conductor 6 inserted into a predetermined position (center axis position) of the measurement object 2, and two SMA connectors 7. Has been. A coaxial transmission line is formed in the coaxial transmission line device 3.

計測対象物2は、円筒形状に形成されている。計測対象物2は、例えば内部貫通部分が切削加工によって形成されている。本実施例は、切削加工の加工精度を確認するために(仕上がり状態を確認するために)、内径計測装置1を用いて内径D1を計測するような状況になっているものとする。計測対象物2は、少なくとも15mm〜30mm程度の長さを有するように形成されている。   The measurement object 2 is formed in a cylindrical shape. The measurement object 2 has an internal penetration portion formed by cutting, for example. In the present embodiment, it is assumed that the inner diameter D1 is measured using the inner diameter measuring device 1 in order to confirm the processing accuracy of the cutting process (in order to confirm the finished state). The measurement object 2 is formed to have a length of at least about 15 mm to 30 mm.

内導体6は、導電性を有する導体であって、極細で真っ直ぐな円筒形状に形成されている。内導体6は、この外径D2が所定の値になるように形成されている。外径値(外径D2)は、計測対象物2の内径D1を得るための演算をする際に用いられるようになっている。   The inner conductor 6 is a conductive conductor and is formed in an extremely thin and straight cylindrical shape. The inner conductor 6 is formed so that the outer diameter D2 has a predetermined value. The outer diameter value (outer diameter D2) is used when performing calculation to obtain the inner diameter D1 of the measurement object 2.

SMAコネクタ7は、内導体6の端部に挿入接続される内部コンタクト8と、計測対象物2の端部に接続される外部コンタクト9と、これら内部コンタクト8及び外部コンタクト9の間に介在する絶縁体10と、同軸ケーブル4に対する接続部11とを有している。SMAコネクタ7は、既知のもの(SMA:SUB−MINIATURE A)と基本的に同じになっている。本実施例においては、特に図示しないが、大小様々な内径D1を有する計測対象物2に対応することができる形状に外部コンタクト9が形成されている。   The SMA connector 7 is interposed between the internal contact 8 inserted and connected to the end of the inner conductor 6, the external contact 9 connected to the end of the measurement object 2, and the internal contact 8 and the external contact 9. An insulator 10 and a connection portion 11 for the coaxial cable 4 are provided. The SMA connector 7 is basically the same as a known one (SMA: SUB-MINIATURE A). In the present embodiment, although not particularly illustrated, the external contact 9 is formed in a shape that can correspond to the measuring object 2 having various inner diameters D1.

内径演算出力手段5は、特性インピーダンス計測装置12と、内径演算装置13と、内径表示装置14とを含んで構成されている。   The inner diameter calculation output means 5 includes a characteristic impedance measuring device 12, an inner diameter calculation device 13, and an inner diameter display device 14.

特性インピーダンス計測装置12は、特性インピーダンス値(Zo)を計測するための装置であって、TDR法を採用した構成になっている(本実施例においては既知のネットワークアナライザが用いられるものとする。尚、TDRとは、Time Domain Reflectometry(時間領域反射)の略である。本実施例においては、上記同軸伝送路に高速なパルス等を印可して、返ってくる反射波形を観測する手法を採用するものとする)。このような特性インピーダンス計測装置12の各ポートには、同軸ケーブル4がそれぞれ接続されている。   The characteristic impedance measuring device 12 is a device for measuring the characteristic impedance value (Zo), and is configured to employ the TDR method (in this embodiment, a known network analyzer is used). Note that TDR is an abbreviation for Time Domain Reflectometry, and in this embodiment, a method of applying a high-speed pulse or the like to the coaxial transmission line and observing the reflected waveform returned is adopted. It shall be). A coaxial cable 4 is connected to each port of such a characteristic impedance measuring device 12.

内径演算装置13は、特性インピーダンス計測装置12で得られた特性インピーダンス値を入力することができるように構成されている。また、内径演算装置13は、入力された特性インピーダンス値と、内導体6の既知外径値(外径D2)とに基づいて計測対象物2の内径D1を得るための演算をすることができるように構成されている。内径演算装置13には、内導体6の既知外径値(外径D2)等が予め記憶されているものとする。上記演算に関しては、下記の数式に所定の値を代入して計測対象物2の内径D1を算出するものとする。内径演算装置13は、所謂マイクロコンピュータの機能を有している。   The inner diameter calculation device 13 is configured to be able to input the characteristic impedance value obtained by the characteristic impedance measurement device 12. Further, the inner diameter calculation device 13 can perform calculation for obtaining the inner diameter D1 of the measurement object 2 based on the input characteristic impedance value and the known outer diameter value (outer diameter D2) of the inner conductor 6. It is configured as follows. It is assumed that the inner diameter calculation device 13 stores a known outer diameter value (outer diameter D2) of the inner conductor 6 in advance. Regarding the above calculation, an inner diameter D1 of the measurement object 2 is calculated by substituting a predetermined value into the following mathematical formula. The inner diameter calculation device 13 has a so-called microcomputer function.

下記数式において、Zoは特性インピーダンス値、Keは比誘電率(ここでは1)、D1は計測対象物2の内径、D2は内導体6の既知外径を示すものとする。   In the following equation, Zo represents a characteristic impedance value, Ke represents a relative dielectric constant (here, 1), D1 represents an inner diameter of the measurement object 2, and D2 represents a known outer diameter of the inner conductor 6.

Figure 0005537064
Figure 0005537064

内径表示装置14は、内径演算装置13において算出された計測対象物2の内径D1を画面表示することができる装置として備えられている。尚、画面表示をしないでプリントアウトするような装置であってもよいものとする。   The inner diameter display device 14 is provided as a device that can display the inner diameter D1 of the measurement object 2 calculated by the inner diameter calculation device 13 on the screen. It should be noted that an apparatus that prints out without displaying a screen may be used.

内径演算出力手段5は、特性インピーダンス計測装置12として上記のネットワークアナライザを用いていることから、このような装置の場合、上記Zoで1Ω以下の分別が可能である。1Ωの内径変化は10μm程度に相当することから、本発明はこれ以下の分解能を得ることができるようになっている(従来技術にあっては100分の1の精度を得ることができず、また、小内径では場所による変化を把握することもできない)。   Since the inner diameter calculation output means 5 uses the above network analyzer as the characteristic impedance measuring device 12, in the case of such a device, it is possible to sort 1Ω or less by the above Zo. Since the change in the inner diameter of 1Ω corresponds to about 10 μm, the present invention can obtain a resolution less than this (the conventional technology cannot obtain an accuracy of 1/100, In addition, it is not possible to grasp changes due to location with a small inner diameter).

以上、本発明の内径計測装置1によれば、特性インピーダンス値及び内導体6の既知外径値(外径D2)を基に所定の演算をし、これによって計測対象物2の内径D1を得ていることから、従来技術とは異なる計測の方式であって、内径D1が小さな計測対象物2であっても計測することができ、また、従来よりも高精度に計測することができる。   As described above, according to the inner diameter measuring apparatus 1 of the present invention, a predetermined calculation is performed based on the characteristic impedance value and the known outer diameter value (outer diameter D2) of the inner conductor 6, thereby obtaining the inner diameter D1 of the measurement object 2. Therefore, it is a measurement method different from that of the conventional technique, and even a measurement object 2 having a small inner diameter D1 can be measured, and can be measured with higher accuracy than in the past.

本発明は本発明の主旨を変えない範囲で種々変更実施可能なことは勿論である。   It goes without saying that the present invention can be variously modified without departing from the spirit of the present invention.

1…内径計測装置
2…計測対象物
3…同軸伝送路装置
4…同軸ケーブル
5…内径演算出力手段
6…内導体
7…SMAコネクタ
8…内部コンタクト
9…外部コンタクト
10…絶縁体
11…接続部
12…特性インピーダンス計測装置
13…内径演算装置
14…内径表示装置
D1…内径
D2…外径
DESCRIPTION OF SYMBOLS 1 ... Inner diameter measuring device 2 ... Measurement object 3 ... Coaxial transmission line device 4 ... Coaxial cable 5 ... Inner diameter calculation output means 6 ... Inner conductor 7 ... SMA connector 8 ... Internal contact 9 ... External contact 10 ... Insulator 11 ... Connection part DESCRIPTION OF SYMBOLS 12 ... Characteristic impedance measuring device 13 ... Inner diameter calculating device 14 ... Inner diameter display apparatus D1 ... Inner diameter D2 ... Outer diameter

Claims (2)

筒状となる導電性の計測対象物の内径を計測するための装置であって、
前記計測対象物を外導体として組み付けることにより同軸伝送路が形成される同軸伝送路装置と、
該同軸伝送路装置の両端にそれぞれ接続される二つの同軸ケーブルと、
該同軸ケーブルを介して前記同軸伝送路装置に接続され、且つ前記同軸伝送路の特性インピーダンス値を計測し、且つ該特性インピーダンス値及び前記同軸伝送路装置における内導体の既知外径値を基に前記計測対象物の内径を得るための演算をし、且つこの演算結果を出力する内径演算出力手段と、
を備える
ことを特徴とする内径計測装置。
A device for measuring the inner diameter of a cylindrical conductive measuring object,
A coaxial transmission line device in which a coaxial transmission line is formed by assembling the measurement object as an outer conductor;
Two coaxial cables respectively connected to both ends of the coaxial transmission line device;
It is connected to the coaxial transmission line device via the coaxial cable and measures the characteristic impedance value of the coaxial transmission line, and based on the characteristic impedance value and the known outer diameter value of the inner conductor in the coaxial transmission line device An inner diameter calculation output means for calculating the inner diameter of the measurement object and outputting the calculation result;
An inner diameter measuring device comprising:
請求項1に記載の内径計測装置において、
前記同軸伝送路装置は、
前記外導体となる前記計測対象物の内部所定位置に挿入されるとともに前記既知外径値を有する前記内導体と、
該内導体の端部に接続される内部コンタクト及び前記計測対象物の端部に接続される外部コンタクトを有するとともに前記同軸ケーブルに対する接続部を有する二つのSMAコネクタと、
を備える
ことを特徴とする内径計測装置。
The inner diameter measuring device according to claim 1,
The coaxial transmission line device is
The inner conductor inserted at a predetermined position inside the measurement object to be the outer conductor and having the known outer diameter value;
Two SMA connectors having an internal contact connected to the end of the inner conductor and an external contact connected to the end of the measurement object, and having a connection to the coaxial cable;
An inner diameter measuring device comprising:
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