JP5736707B2

JP5736707B2 - Cam follower

Info

Publication number: JP5736707B2
Application number: JP2010218807A
Authority: JP
Inventors: 佐藤　光; 光佐藤
Original assignee: Oiles Corp
Current assignee: Oiles Corp
Priority date: 2010-09-29
Filing date: 2010-09-29
Publication date: 2015-06-17
Anticipated expiration: 2030-09-29
Also published as: JP2012072853A

Description

本発明は、カム等の相手部材の作動を他の部材に伝達すべく相手部材に接触して用いられるカムフォロアに関する。 The present invention relates to a cam follower that is used in contact with a mating member to transmit the operation of the mating member such as a cam to another member.

例えば特許文献１においては、外輪とスタッドとの間に複数のころが配置されてなるカムフォロアが提案されている。 For example, Patent Document 1 proposes a cam follower in which a plurality of rollers are arranged between an outer ring and a stud.

特開２００７−１２０５９１号公報JP 2007-120591 A

ところで、斯かるカムフォロアでは、外輪及びスタッドと複数のころとが接触しているために、回転摩擦の更なる低減、回転速度の更なる向上を図り難い。また、斯かるカムフォロアでは、外輪、スタッド及び複数のころが摩耗するため、カムフォロアの使用期間の長期化、ランニングコストの低減も図り難い。 By the way, in such a cam follower, since the outer ring, the stud, and the plurality of rollers are in contact with each other, it is difficult to further reduce the rotational friction and further improve the rotational speed. Further, in such a cam follower, the outer ring, the stud, and the plurality of rollers are worn, so that it is difficult to extend the use period of the cam follower and reduce the running cost.

本発明は、上記諸点に鑑みてなされたものであり、その目的とするところは、回転摩擦の低減、回転速度の向上に加えて、使用期間の長期化、ランニングコストの低減を図り得るカムフォロアを提供することにある。 The present invention has been made in view of the above-mentioned points, and the object of the present invention is to provide a cam follower capable of extending the period of use and reducing running costs in addition to reducing rotational friction and improving rotational speed. It is to provide.

本発明のカムフォロアは、中空の転動体と、この転動体の中空部に隙間をもって挿通されていると共に一端部が転動体から突出している軸体と、ラジアル方向に関して転動体を静圧気体によって支持すべく転動体と軸体との間に介在されている静圧気体軸受手段と、スラスト方向に関して転動体を磁力によって支持する磁性軸受手段とを具備しており、磁性軸受手段は、転動体の一端部側の内周面に軸方向に所定の間隔を隔てて形成された２つの環状凹溝と、一方の環状凹溝を挟み、かつ外周面で転動体の内周面と環状の隙間をもって対面し、軸体に装着されている一対の内側磁性体と、該環状凹溝に臨むと共に一対の内側磁性体間に介在されている永久磁石と、他方の環状凹溝に臨むと共に一方の端面が該一対の内側磁性体の一方の内側磁性体の端面に当接し、他方の端面が静圧気体軸受手段に当接して配された環状スペーサとを具備しており、スラスト方向に関して転動体を支持すべく永久磁石の磁力に基づいて転動体と一対の内側磁性体とが互いに引き合う力を生じさせるようになっている。 The cam follower according to the present invention includes a hollow rolling element, a shaft body that is inserted into the hollow portion of the rolling element with a gap and one end projecting from the rolling element, and supports the rolling element with a static pressure gas in the radial direction. Preferably, a static pressure gas bearing means interposed between the rolling element and the shaft body and a magnetic bearing means for supporting the rolling element with a magnetic force in the thrust direction are provided. Two annular grooves formed on the inner peripheral surface on one end side with a predetermined interval in the axial direction, and one annular concave groove sandwiched between the inner peripheral surface of the rolling elements and an annular gap on the outer peripheral surface A pair of inner magnetic bodies facing each other and mounted on the shaft body, a permanent magnet facing the annular concave groove and interposed between the pair of inner magnetic bodies, and one end face facing the other annular concave groove Is one inner magnet of the pair of inner magnetic bodies. An annular spacer arranged in contact with the end face of the body and the other end face in contact with the static pressure gas bearing means, and based on the magnetic force of the permanent magnet to support the rolling element in the thrust direction. And a pair of inner magnetic bodies generate a pulling force.

本発明のカムフォロアによれば、特に、磁性軸受手段は、転動体の一端部側の内周面に軸方向に所定の間隔を隔てて形成された２つの環状凹溝と、一方の環状凹溝を挟み、かつ外周面で転動体の内周面と環状の隙間をもって対面し、軸体に装着されている一対の内側磁性体と、該環状凹溝に臨むと共に一対の内側磁性体間に介在されている永久磁石と、他方の環状凹溝に臨むと共に一方の端面が該一対の内側磁性体の一方の内側磁性体の端面に当接し、他方の端面が静圧気体軸受手段に当接して配された環状スペーサとを具備しており、スラスト方向に関して転動体を支持すべく永久磁石の磁力に基づいて転動体と一対の内側磁性体とが互いに引き合う力を生じさせるようになっているために、静圧気体軸受手段によって転動体をラジアル方向に関して非接触で支持する一方、磁性軸受手段によって転動体をスラスト方向に関して非接触で支持することができて、回転摩擦を低減させると共に回転速度を向上させることができ、しかも、カムフォロアの使用期間の長期化を図り得ると共にランニングコストをも低減させ得、スラスト方向の非接触支持においてはエアを消費することがないので、カムフォロアの更なる低廉化、エア消費量の削減を図り得る。 According to the cam follower of the present invention, in particular, the magnetic bearing means includes two annular grooves formed on the inner peripheral surface on the one end portion side of the rolling element at a predetermined interval in the axial direction, and one annular groove. With the outer peripheral surface facing the inner peripheral surface of the rolling element with an annular gap, facing the annular concave groove and interposing between the pair of inner magnetic bodies Facing the other annular concave groove, one end face is in contact with the end face of one inner magnetic body of the pair of inner magnetic bodies, and the other end face is in contact with the static pressure gas bearing means An annular spacer that is arranged to generate a pulling force between the rolling element and the pair of inner magnetic bodies based on the magnetic force of the permanent magnet to support the rolling element in the thrust direction. In addition, the rolling element is radially The rolling element can be supported in a non-contact manner in the thrust direction by the magnetic bearing means, so that the rotational friction can be reduced and the rotation speed can be improved. The running time can be reduced and the running cost can be reduced, and air is not consumed in the non-contact support in the thrust direction. Therefore, the cam follower can be further reduced in price and the air consumption can be reduced.

本発明の他の態様のカムフォロアは、中空の転動体と、この転動体の中空部に隙間をもって挿通されていると共に一端部が転動体から突出している軸体と、ラジアル方向に関して転動体を静圧気体によって支持すべく転動体と軸体との間に介在されている静圧気体軸受手段と、スラスト方向に関して転動体を磁力によって支持する磁性軸受手段とを具備しており、磁性軸受手段は、転動体の一端部側の内周面に形成された拡径凹所に嵌着された環状の外側磁性体と、外側磁性体の内周面に一方の端面から軸方向に所定の間隔を隔てて形成された２つの環状凹溝と、該外側磁性体の一方の環状凹溝を挟み、かつ外周面で外側磁性体の内周面と環状の隙間をもって対面し、軸体に装着されている一対の内側磁性体と、一対の内側磁性体間に介在されていると共に外周面が外側磁性体の環状凹溝に臨む永久磁石と、一方の端面が一対の内側磁性体の一方の内側磁性体の端面に当接し、他方の端面が静圧気体軸受手段に当接して配され、外周面が外側磁性体の環状凹溝に臨む環状スペーサとを具備しており、スラスト方向に関して転動体を支持すべく永久磁石の磁力に基づいて外側磁性体と一対の内側磁性体とが互いに引き合う力を生じさせるようになっている。 A cam follower according to another aspect of the present invention includes a hollow rolling element, a shaft that is inserted into the hollow portion of the rolling element with a gap and one end projecting from the rolling element, and the rolling element in a radial direction. A static pressure gas bearing means interposed between the rolling element and the shaft body to be supported by the pressurized gas, and a magnetic bearing means for supporting the rolling element by a magnetic force in the thrust direction. An annular outer magnetic body fitted in a diameter-enlarged recess formed on the inner peripheral surface on one end side of the rolling element, and a predetermined interval in the axial direction from one end surface to the inner peripheral surface of the outer magnetic body. Two annular grooves formed apart from each other and one annular groove of the outer magnetic body are sandwiched, and the outer circumferential surface faces the inner circumferential surface of the outer magnetic body with an annular gap, and is attached to the shaft body. Between the pair of inner magnetic bodies and the pair of inner magnetic bodies. A permanent magnet whose outer peripheral surface faces the annular groove of the outer magnetic body, one end surface abuts on the end surface of one inner magnetic body of the pair of inner magnetic bodies, and the other end surface serves as a static pressure gas bearing means. An annular spacer having an outer peripheral surface facing the annular concave groove of the outer magnetic body, and an outer magnetic body and a pair of inner magnets based on the magnetic force of the permanent magnet to support the rolling element in the thrust direction. The magnetic material generates a pulling force.

本発明の他の態様のカムフォロアによれば、特に、磁性軸受手段は、転動体の一端部側の内周面に形成された拡径凹所に嵌着された環状の外側磁性体と、外側磁性体の内周面に一方の端面から軸方向に所定の間隔を隔てて形成された２つの環状凹溝と、該外側磁性体の一方の環状凹溝を挟み、かつ外周面で外側磁性体の内周面と環状の隙間をもって対面し、軸体に装着されている一対の内側磁性体と、一対の内側磁性体間に介在されていると共に外周面が外側磁性体の環状凹溝に臨む永久磁石と、一方の端面が一対の内側磁性体の一方の内側磁性体の端面に当接し、他方の端面が静圧気体軸受手段に当接して配され、外周面が外側磁性体の環状凹溝に臨む環状スペーサとを具備しており、スラスト方向に関して転動体を支持すべく永久磁石の磁力に基づいて外側磁性体と一対の内側磁性体とが互いに引き合う力を生じさせるようになっているために、静圧気体軸受手段によって転動体をラジアル方向に関して非接触で支持する一方、磁性軸受手段によって転動体をスラスト方向に関して非接触で支持することができて、回転摩擦を低減させると共に回転速度を向上させることができ、しかも、カムフォロアの使用期間の長期化を図り得ると共にランニングコストをも低減させ得、スラスト方向の非接触支持においてはエアを消費することがないので、カムフォロアの更なる低廉化、エア消費量の削減を図り得る。尚、例えば外側磁性体が転動体にボルト止めされる態様のカムフォロアにおいても、回転摩擦の低減、回転速度の向上に加えて、使用期間の長期化、ランニングコストの低減を図り得るが、本発明の他のカムフォロアでは、外側磁性体が転動体の内周面に嵌着されているために、外側磁性体を予め転動体に嵌着させておくことができて、転動体に対する軸体、静圧気体軸受手段及び磁性軸受手段の組み立て工数を減少させ得、加えて、転動体及び外側磁性体の芯出しを予め精確に行い得、ラジアル方向の磁気による吸着力が不均一となってラジアル方向の負荷容量が低下する虞をなくし得る。 According to the cam follower of another aspect of the present invention, in particular, the magnetic bearing means includes an annular outer magnetic body fitted in a diameter-enlarged recess formed on the inner peripheral surface on the one end portion side of the rolling element, and an outer side. Two annular grooves formed on the inner circumferential surface of the magnetic body at a predetermined interval from one end surface in an axial direction, and one outer circumferential groove of the outer magnetic body, and the outer magnetic body on the outer circumferential surface Facing the inner circumferential surface of the pair of inner magnetic bodies mounted on the shaft body, and interposed between the pair of inner magnetic bodies, and the outer circumferential surface faces the annular concave groove of the outer magnetic body. The permanent magnet and one end face are in contact with the end face of one inner magnetic body of the pair of inner magnetic bodies, the other end face is in contact with the static pressure gas bearing means, and the outer peripheral surface is an annular recess of the outer magnetic body. An annular spacer facing the groove, and a permanent magnet for supporting the rolling element in the thrust direction. Since the outer magnetic body and the pair of inner magnetic bodies generate a pulling force based on the force, the rolling element is supported in a non-contact manner in the radial direction by the static pressure gas bearing means, while the magnetic bearing The rolling element can be supported in a non-contact manner in the thrust direction by the means, the rotational friction can be reduced and the rotational speed can be improved, and the use period of the cam follower can be extended and the running cost can be increased. In the non-contact support in the thrust direction, air is not consumed, so the cam follower can be further reduced in price and the air consumption can be reduced. For example, even in a cam follower in which the outer magnetic body is bolted to the rolling element, in addition to reducing rotational friction and improving rotational speed, it is possible to extend the period of use and reduce running costs. In other cam followers, since the outer magnetic body is fitted to the inner peripheral surface of the rolling element, the outer magnetic body can be fitted in advance to the rolling element, and the shaft body, The assembly man-hours of the pressurized gas bearing means and the magnetic bearing means can be reduced. In addition, the rolling elements and the outer magnetic bodies can be accurately centered in advance, and the radial magnetic force becomes uneven and the radial direction becomes non-uniform. It is possible to eliminate the possibility that the load capacity of the battery is reduced.

本発明の上述のカムフォロア及び他の態様のカムフォロアでは、静圧気体軸受手段は、転動体の内周面に対して環状の軸受隙間をもって対面しているラジアル軸受面を有していると共に軸体に固着されている円筒状の軸受体と、ラジアル軸受面から軸受隙間に供給すべき気体を給気することができるように軸受体に形成されている給気通路と、軸体に形成されていると共に給気通路に気体を供給することができるように当該給気通路に連通した供給通路とを具備していてもよい。 In the above-described cam follower and the cam follower according to another aspect of the present invention, the static pressure gas bearing means has a radial bearing surface facing the inner peripheral surface of the rolling element with an annular bearing gap and a shaft body. A cylindrical bearing body fixed to the bearing body, an air supply passage formed in the bearing body so as to supply a gas to be supplied to the bearing gap from the radial bearing surface, and a shaft body. And a supply passage communicating with the supply passage so as to supply gas to the supply passage.

本発明によれば、回転摩擦の低減、回転速度の向上に加えて、使用期間の長期化、ランニングコストの低減を図り得るカムフォロアを提供し得る。 According to the present invention, it is possible to provide a cam follower capable of reducing the rotational friction and improving the rotation speed, as well as prolonging the use period and reducing the running cost.

図２に示す例の断面説明図である。FIG. 3 is an explanatory cross-sectional view of the example shown in FIG. 2. 本発明の実施の形態の例の正面説明図である。It is front explanatory drawing of the example of embodiment of this invention. 図１に示す例のＩＩＩ−ＩＩＩ線断面矢視説明図である。FIG. 3 is an explanatory view taken along the line III-III of the example shown in FIG. 1. 図１に示す例のＩＶ−ＩＶ線断面矢視説明図である。It is IV-IV sectional view explanatory drawing of the example shown in FIG. 図１に示す例のＶ−Ｖ線断面矢視説明図である。It is VV sectional view explanatory drawing of the example shown in FIG. 図１に示す例のＶＩ−ＶＩ線断面矢視説明図である。It is VI-VI sectional view explanatory drawing of the example shown in FIG. 図１に示す例の主に磁性軸受手段の拡大説明図である。FIG. 2 is an enlarged explanatory view mainly showing magnetic bearing means in the example shown in FIG. 1. 図１に示す例の主に磁性軸受手段の拡大動作説明図である。It is expansion operation explanatory drawing mainly of a magnetic bearing means of the example shown in FIG. 本発明の実施の形態の他の例の断面説明図である。It is sectional explanatory drawing of the other example of embodiment of this invention.

次に本発明を、図に示す好ましい実施の形態の例に基づいて更に詳細に説明する。なお、本発明はこれら例に何等限定されないのである。 Next, the present invention will be described in more detail based on an example of a preferred embodiment shown in the drawings. The present invention is not limited to these examples.

図１から図８において、本例のカムフォロア１は、中空の転動体２と、転動体２の中空部に隙間３を形成して挿通されている軸体４と、ラジアル方向に関して転動体２を静圧気体によって支持すべく転動体２と軸体４との間に介在されている静圧気体軸受手段７と、スラスト方向に関して転動体２を磁力によって支持する磁性軸受手段９及び１０とを具備している。 1 to 8, a cam follower 1 of this example includes a hollow rolling element 2, a shaft body 4 inserted through a hollow portion of the rolling element 2 with a gap 3 formed therein, and the rolling element 2 in the radial direction. A static pressure gas bearing means 7 interposed between the rolling element 2 and the shaft body 4 to be supported by a static pressure gas, and magnetic bearing means 9 and 10 for supporting the rolling element 2 with a magnetic force in the thrust direction. doing.

転動体２は、円筒状の磁性体からなり、その内周面１２で静圧気体軸受手段７並びに磁性軸受手段９及び１０に対して環状の軸受隙間３１及び環状の隙間６４をもって対面している。 The rolling element 2 is made of a cylindrical magnetic body and faces the static pressure gas bearing means 7 and the magnetic bearing means 9 and 10 with an annular bearing gap 31 and an annular gap 64 on the inner peripheral surface 12 thereof. .

軸体４は、円柱状であり、その一端部２１が転動体２の一端部５から突出しており、当該一端部２１で支持フレーム１５等に片持ち支持されている。軸体４には静圧気体軸受手段７並びに磁性軸受手段９及び１０が取り付けられている。軸体４の外周面２０は、転動体２の内周面１２に対して環状の隙間３をもって対面している。尚、軸体４は、本例では一端部２１で支持フレーム１５等に片持ちされているが、例えば、その他端部が転動体２の他端部６から突出していると共に当該軸体４の他端部が支持フレーム等を介して固定支持されることによって両持ち支持されていてもよい。 The shaft body 4 has a columnar shape, and one end 21 thereof protrudes from one end 5 of the rolling element 2 and is cantilevered by the support frame 15 and the like at the one end 21. A static pressure gas bearing means 7 and magnetic bearing means 9 and 10 are attached to the shaft body 4. The outer peripheral surface 20 of the shaft body 4 faces the inner peripheral surface 12 of the rolling element 2 with an annular gap 3. In this example, the shaft body 4 is cantilevered at one end 21 to the support frame 15 or the like. For example, the other end projects from the other end 6 of the rolling element 2 and the shaft 4 The other end may be supported at both ends by being fixedly supported via a support frame or the like.

静圧気体軸受手段７は、転動体２の内周面１２に対して環状の軸受隙間３１をもって対面しているラジアル軸受面３２を有していると共に軸体４に固着されている円筒状の軸受体３６と、ラジアル軸受面３２から軸受隙間３１に供給すべき気体を給気することができるように、軸受体３６に形成されている給気通路４４と、給気通路４４に気体を供給することができるように当該給気通路４４に連通して軸体４に形成されている供給通路４５とを具備している。軸受隙間３１は、軸方向の一端において環状の隙間６４を介して、軸方向の他端において環状の隙間６４を介して夫々外部に連通している。 The static pressure gas bearing means 7 has a radial bearing surface 32 facing the inner circumferential surface 12 of the rolling element 2 with an annular bearing gap 31 and is a cylindrical shape fixed to the shaft body 4. Gas is supplied to the air supply passage 44 formed in the bearing body 36 and the air supply passage 44 so that the gas to be supplied to the bearing gap 31 from the bearing body 36 and the radial bearing surface 32 can be supplied. A supply passage 45 formed in the shaft body 4 so as to communicate with the air supply passage 44 is provided. The bearing gap 31 communicates with the outside through an annular gap 64 at one end in the axial direction and through an annular gap 64 at the other end in the axial direction.

軸受体３６は、内周面５１で軸体４の外周面２０に固着されている円筒状の本体５５と、本体５５の外周面５２に接合されている多孔質体としての円筒状の多孔質金属焼結層５６とを具備している。 The bearing body 36 includes a cylindrical main body 55 fixed to the outer peripheral surface 20 of the shaft body 4 by an inner peripheral surface 51 and a cylindrical porous body as a porous body joined to the outer peripheral surface 52 of the main body 55. And a sintered metal layer 56.

多孔質金属焼結層５６は、その全表面の無秩序な多数の部位で開口すると共に無秩序に互いに連通する多数の細孔を内部に有している。ラジアル軸受面３２は、多孔質金属焼結層５６の支持すべき転動体２の内周面１２に対面して露出する外周面からなる。 The porous metal sintered layer 56 has a large number of pores which open at a large number of random sites on the entire surface and communicate with each other in a random manner. The radial bearing surface 32 is composed of an outer peripheral surface exposed to the inner peripheral surface 12 of the rolling element 2 to be supported by the porous metal sintered layer 56.

給気通路４４は、本体５５の外周面５２に形成された複数の環状通路７１及び７２と、軸方向に伸びて本体５５内に形成されており、環状通路７１及び７２に連通していると共に供給通路４５に連通している連通路７６とを具備している。供給通路４５は、軸方向に伸びて軸体４内に形成されており、一端部２１で開口していると共に連通路７６に連通している。斯かる給気通路４４では、一端部２１から供給通路４５を介して供給される気体（圧縮気体）が連通路７６に供給され、連通路７６に供給された気体が環状通路７１及び７２に流入され、当該流入された気体を多孔質金属焼結層５６に供給することで、軸受隙間３１に気体を供給する。 The air supply passage 44 is formed in the main body 55 by extending in the axial direction with a plurality of annular passages 71 and 72 formed on the outer peripheral surface 52 of the main body 55, and communicates with the annular passages 71 and 72. And a communication passage 76 communicating with the supply passage 45. The supply passage 45 extends in the axial direction and is formed in the shaft body 4. The supply passage 45 opens at the one end 21 and communicates with the communication passage 76. In such an air supply passage 44, gas (compressed gas) supplied from the one end portion 21 via the supply passage 45 is supplied to the communication passage 76, and the gas supplied to the communication passage 76 flows into the annular passages 71 and 72. Then, by supplying the inflowed gas to the porous metal sintered layer 56, the gas is supplied to the bearing gap 31.

本例のカムフォロア１は、多孔質金属焼結層５６を有した静圧気体軸受手段７を具備しているが、これらに代えて、例えば、軸受体３６に形成された自成絞り通路を介して静圧気体を軸受隙間３１に供給して転動体２をラジアル方向に関して非接触支持する自成絞り型の静圧気体軸受手段を具備していてもよい。 The cam follower 1 of the present example includes the static pressure gas bearing means 7 having the porous metal sintered layer 56, but instead, for example, via a self-contained throttle passage formed in the bearing body 36. In addition, a self-drawing type static pressure gas bearing means for supplying static pressure gas to the bearing gap 31 and supporting the rolling element 2 in a non-contact manner in the radial direction may be provided.

磁性軸受手段９及び１０は、夫々互いに同様に形成されているので、以下、磁性軸受手段９について詳細に説明し、磁性軸受手段１０については図に符号ａを適宜付してその詳細な説明を省略する。尚、磁性軸受手段９は一端部５側に配されており、磁性軸受手段１０は、転動体２の他端部６側に配されており、磁性軸受手段９及び１０間には軸受体３６が位置している。 Since the magnetic bearing means 9 and 10 are respectively formed in the same manner, the magnetic bearing means 9 will be described in detail below, and the magnetic bearing means 10 will be described in detail by appropriately adding a symbol a to the drawing. Omitted. The magnetic bearing means 9 is disposed on the one end 5 side, the magnetic bearing means 10 is disposed on the other end 6 side of the rolling element 2, and the bearing body 36 is provided between the magnetic bearing means 9 and 10. Is located.

磁性軸受手段９は、転動体２の一端部５間の内周面１２に軸方向に所定の間隔をおいて形成された２つの環状凹溝８４及び８５と、一方の環状凹溝８４を挟み、かつ外周面６２で転動体２の内周面１２と環状の隙間６４をもって対面し、軸体４に装着されている一対の内側磁性体６５及び６６と、該環状凹溝８４に臨むと共に一対の内側磁性体６５及び６６間に介在されている永久磁石、本例では中空円板状の一つの永久磁石６７と、他方の環状凹溝８５に臨むと共に一方の端面が該一対の内側磁性体６５及び６６の一方の内側磁性体６６の端面に当接し、他方の端面が静圧気体軸受手段７、本例では静圧気体軸受手段７の軸受体３６の円筒状の本体５５の端面に当接して配された磁力遮断体としての環状スペーサ８０とから形成されている。 The magnetic bearing means 9 sandwiches two annular grooves 84 and 85 formed on the inner peripheral surface 12 between the one end portions 5 of the rolling element 2 at predetermined intervals in the axial direction, and one annular groove 84. Further, the outer peripheral surface 62 faces the inner peripheral surface 12 of the rolling element 2 with an annular gap 64, faces the pair of inner magnetic bodies 65 and 66 mounted on the shaft body 4, and the annular concave groove 84 and a pair. Permanent magnets interposed between the inner magnetic bodies 65 and 66, in this example one hollow disk-shaped permanent magnet 67, and the other annular concave groove 85, and one end face of the pair of inner magnetic bodies 65 and 66 abut against the end face of one of the inner magnetic bodies 66 and the other end face abuts against the end face of the cylindrical main body 55 of the bearing body 36 of the static pressure gas bearing means 7, in this example, the static pressure gas bearing means 7. It is formed from an annular spacer 80 as a magnetic blocker arranged in contact with each other.

該磁性軸受手段９においては、スラスト方向に関して転動体２を支持すべく永久磁石６７の磁力に基づいて転動体２と一対の内側磁性体６５及び６６とが互いに引き合う力を生じさせるようになっている。 In the magnetic bearing means 9, the rolling element 2 and the pair of inner magnetic bodies 65 and 66 generate a force attracting each other based on the magnetic force of the permanent magnet 67 to support the rolling element 2 in the thrust direction. Yes.

磁性軸受手段９において、転動体２の一端部５側の内周面１２に軸方向に所定の間隔をおいて形成された２つの環状凹溝８４及び８５は、図８に示すように転動体２にスラスト方向の力（外力）９１が作用し、スラスト方向に転動体２が変位したとき、スラスト方向に反力９２が発生し、当該変位を磁力により復元させるように作用するものである。図８において、符号９３は転動体２と内側磁性体６５及び６６との引き合い力（吸着力）を示しており、反力９２は引き合い力９３に基づいて発生する。 In the magnetic bearing means 9, two annular grooves 84 and 85 formed at predetermined intervals in the axial direction on the inner peripheral surface 12 on the one end 5 side of the rolling element 2 are formed as shown in FIG. When a thrust force (external force) 91 acts on 2 and the rolling element 2 is displaced in the thrust direction, a reaction force 92 is generated in the thrust direction and acts to restore the displacement by magnetic force. In FIG. 8, reference numeral 93 indicates an attractive force (adsorptive force) between the rolling element 2 and the inner magnetic members 65 and 66, and a reaction force 92 is generated based on the attractive force 93.

永久磁石６７は、一端面８６がＮ極、他端面８８がＳ極となっている。内側磁性体６５及び６６は、当該永久磁石６７の磁力に基づいて磁性を帯び、これにより、内側磁性体６５の外周面６２がＮ極、内側磁性体６６の外周面６２がＳ極となる。転動体２の一端部５は、当該複数の永久磁石６７の磁力に基づいて磁性を帯び、これにより、環状凸部８２がＳ極、環状凸部８３がＮ極となる。従って、磁性軸受手段９には、例えば図７に示すように磁束６８が生じて、環状凸部８２と内側磁性体６５の外周面６２との間に引き合い力が生じると共に環状凸部８３と内側磁性体６６の外周面６２との間に引き合い力が生じる。斯かる引き合い力は、転動体２の軸体４に対するスラスト方向の変位に伴って増大するため、転動体２はスラスト方向に関して磁力によって支持されることになる。このように、磁性軸受手段９は、スラスト方向に関して転動体２を支持すべく永久磁石６７の磁力に基づいて転動体２の一端部５と一対の内側磁性体６５及び６６とが互いに引き合う力を生じさせるようになっている。尚、磁性軸受手段１０もまた、磁性軸受手段９と同様に、スラスト方向に関して転動体２を支持すべく永久磁石６７ａの磁力に基づいて転動体２の他端部６と一対の内側磁性体６５ａ及び６６ａとが互いに引き合う力を生じさせるようになっている。 The permanent magnet 67 has one end face 86 as an N pole and the other end face 88 as an S pole. The inner magnetic bodies 65 and 66 are magnetized based on the magnetic force of the permanent magnet 67, whereby the outer peripheral surface 62 of the inner magnetic body 65 is an N pole and the outer peripheral surface 62 of the inner magnetic body 66 is an S pole. The one end portion 5 of the rolling element 2 is magnetized based on the magnetic force of the plurality of permanent magnets 67, whereby the annular convex portion 82 becomes the S pole and the annular convex portion 83 becomes the N pole. Accordingly, in the magnetic bearing means 9, for example, as shown in FIG. 7, a magnetic flux 68 is generated, and an attracting force is generated between the annular convex portion 82 and the outer peripheral surface 62 of the inner magnetic body 65, and the annular convex portion 83 and the inner side. An attractive force is generated between the magnetic body 66 and the outer peripheral surface 62. Such an attraction force increases as the rolling element 2 is displaced in the thrust direction with respect to the shaft 4, so that the rolling element 2 is supported by a magnetic force in the thrust direction. Thus, the magnetic bearing means 9 has a force that attracts the one end portion 5 of the rolling element 2 and the pair of inner magnetic bodies 65 and 66 based on the magnetic force of the permanent magnet 67 to support the rolling element 2 in the thrust direction. It is supposed to be generated. Similarly to the magnetic bearing means 9, the magnetic bearing means 10 also has the other end 6 of the rolling element 2 and a pair of inner magnetic bodies 65a based on the magnetic force of the permanent magnet 67a to support the rolling element 2 in the thrust direction. And 66a generate a force to attract each other.

磁性軸受手段９及び１０は、一つの中空円板状の永久磁石６７及び６７ａを夫々具備しているが、これに代えて、例えば円周方向に並んだ複数の永久磁石を具備していてもよい。 The magnetic bearing means 9 and 10 are each provided with one hollow disk-shaped permanent magnet 67 and 67a. Alternatively, for example, the magnetic bearing means 9 and 10 may be provided with a plurality of permanent magnets arranged in the circumferential direction. Good.

斯かるカムフォロア１では、給気通路４４から多孔質金属焼結層５６に給気されることによりラジアル軸受面３２から軸受隙間３１に気体が供給され、而して、静圧気体軸受手段７により転動体２を非接触にてＲ方向に回転自在に支持する。転動体２は、上述のように、磁性軸受手段９及び１０の磁力により横方向に関して非接触にてＲ方向に回転自在に支持され、これにより、転動体２の軸体４に対する横方向の位置ずれは禁止される。また、カムフォロア１では、スラスト方向に関する転動体２の支持におけるエア消費は生じないので、転動体２を支持する際のエア消費量を抑えることができる。 In such a cam follower 1, gas is supplied from the radial bearing surface 32 to the bearing gap 31 by supplying air from the supply passage 44 to the porous metal sintered layer 56, and thus by the static pressure gas bearing means 7. The rolling element 2 is supported so as to be rotatable in the R direction without contact. As described above, the rolling element 2 is supported by the magnetic force of the magnetic bearing means 9 and 10 so as to be rotatable in the R direction without contact with respect to the lateral direction. Deviation is prohibited. Further, in the cam follower 1, no air consumption occurs in the support of the rolling elements 2 in the thrust direction, so that it is possible to suppress the amount of air consumption when supporting the rolling elements 2.

本例のカムフォロア１によれば、中空の転動体２と、転動体２の中空部に隙間３をもって挿通されている軸体４と、ラジアル方向に関して転動体２を静圧気体によって支持すべく転動体２と軸体４との間に介在されている静圧気体軸受手段７と、スラスト方向に関して転動体２を磁力によって支持する磁性軸受手段９及び１０とを具備しており、磁性軸受手段９は、転動体２の一端部５間の内周面１２に軸方向に所定の間隔をおいて形成された２つの環状凹溝８４及び８５と、一方の環状凹溝８４を挟み、かつ外周面６２で転動体２の内周面１２と環状の隙間６４をもって対面し、軸体４に装着されている一対の内側磁性体６５及び６６と、該環状凹溝８４に臨むと共に一対の内側磁性体６５及び６６間に介在されている永久磁石、本例では中空円板状の一つの永久磁石６７と、他方の環状凹溝８５に臨むと共に一方の端面が該一対の内側磁性体６５及び６６の一方の内側磁性体６６の端面に当接し、他方の端面が静圧気体軸受手段７に当接して配された磁力遮断体としての環状スペーサ８０とを具備しており、スラスト方向に関して転動体２を支持すべく永久磁石６７の磁力に基づいて転動体２と一対の内側磁性体６５及び６６とが互いに引き合う力を生じさせるようになっており、磁性軸受手段１０は、転動体２の一端部５間の内周面１２に軸方向に所定の間隔をおいて形成された２つの環状凹溝８４ａ及び８５ａと、一方の環状凹溝８４ａを挟み、かつ外周面６２ａで転動体２の内周面１２と環状の隙間６４をもって対面し、軸体４に装着されている一対の内側磁性体６５ａ及び６６ａと、該環状凹溝８４ａに臨むと共に一対の内側磁性体６５ａ及び６６ａ間に介在されている永久磁石、本例では中空円板状の一つの永久磁石６７ａと、他方の環状凹溝８５ａに臨むと共に一方の端面が該一対の内側磁性体６５ａ及び６６ａの一方の内側磁性体６６ａの端面に当接し、他方の端面が静圧気体軸受手段７に当接して配された磁力遮断体としての環状スペーサ８０ａとを具備しており、スラスト方向に関して転動体２を支持すべく永久磁石６７ａの磁力に基づいて転動体２と一対の内側磁性体６５ａ及び６６ａとが互いに引き合う力を生じさせるようになっているために、静圧気体軸受手段７によって転動体２をラジアル方向に関して非接触で支持する一方、磁性軸受手段９及び１０によって転動体２をスラスト方向に関して非接触で支持することができて、回転摩擦を低減させると共に回転速度を向上させることができ、しかも、カムフォロア１の使用期間の長期化を図り得ると共にランニングコストをも低減させ得、スラスト方向の非接触支持においてはエアを消費することがないので、カムフォロア１の更なる低廉化、エア消費量の削減を図り得る。 According to the cam follower 1 of this example, the hollow rolling element 2, the shaft body 4 inserted through the hollow portion of the rolling element 2 with a gap 3 and the rolling element 2 to support the rolling element 2 with static pressure gas in the radial direction are supported. A hydrostatic gas bearing means 7 interposed between the moving body 2 and the shaft body 4 and magnetic bearing means 9 and 10 for supporting the rolling element 2 with a magnetic force in the thrust direction are provided. The two annular grooves 84 and 85 formed on the inner circumferential surface 12 between the one end portions 5 of the rolling element 2 at a predetermined interval in the axial direction and the one annular groove 84 sandwiched between the outer circumferential surfaces. 62 faces the inner peripheral surface 12 of the rolling element 2 with an annular gap 64, faces a pair of inner magnetic bodies 65 and 66 mounted on the shaft body 4, and the annular groove 84 and a pair of inner magnetic bodies Permanent magnet interposed between 65 and 66, in this example One end face that faces one empty disk-shaped permanent magnet 67 and the other annular groove 85, and one end face abuts against the end face of one inner magnetic body 66 of the pair of inner magnetic bodies 65 and 66, and the other end face Is provided with an annular spacer 80 serving as a magnetic blocker disposed in contact with the static pressure gas bearing means 7, and based on the magnetic force of the permanent magnet 67 to support the rolling element 2 in the thrust direction. And the pair of inner magnetic bodies 65 and 66 generate a force to attract each other, and the magnetic bearing means 10 has a predetermined interval in the axial direction on the inner peripheral surface 12 between the one end portions 5 of the rolling element 2. Sandwiched between the two annular grooves 84a and 85a formed on the inner surface 12 of the rolling element 2 and facing the inner circumferential surface 12 of the rolling element 2 with the annular gap 64 at the outer circumferential surface 62a. A pair of attached inner magnetic bodies 65a 66a, a permanent magnet facing the annular groove 84a and interposed between the pair of inner magnetic bodies 65a and 66a, one permanent magnet 67a in the form of a hollow disk in this example, and the other annular groove 85a As one of the pair of inner magnetic bodies 65a and 66a, one end face comes into contact with the end face of one inner magnetic body 66a, and the other end face comes into contact with the static pressure gas bearing means 7 as a magnetic shield. The annular spacer 80a is provided, and the rolling element 2 and the pair of inner magnetic bodies 65a and 66a are caused to attract each other based on the magnetic force of the permanent magnet 67a to support the rolling element 2 in the thrust direction. Therefore, the rolling element 2 is supported by the hydrostatic gas bearing means 7 in a non-contact manner in the radial direction, while the rolling element 2 is supported in the thrust direction by the magnetic bearing means 9 and 10. Thus, it can be supported in a non-contact manner, the rotational friction can be reduced and the rotational speed can be improved, and the use period of the cam follower 1 can be extended and the running cost can be reduced, and the thrust can be reduced. Since air is not consumed in the non-contact support in the direction, the cam follower 1 can be further reduced in price and the air consumption can be reduced.

本発明の実施の形態の他の例のカムフォロア１０１は、図９に示すように、カムフォロア１と同様の軸体４、静圧気体軸受手段７並びに磁性軸受手段９及び１０と、非磁性体からなる中空の転動体１０２とを具備しており、当該磁性軸受手段９は、転動体１０２の一端部５における内周面１２の部位に嵌着された環状の外側磁性体１０３を更に具備しており、当該磁性軸受手段１０は、転動体１０２の他端部６における内周面１２の部位に嵌着された環状の外側磁性体１０３ａを更に具備している。 As shown in FIG. 9, a cam follower 101 according to another example of the embodiment of the present invention includes a shaft body 4 similar to the cam follower 1, a static pressure gas bearing means 7, magnetic bearing means 9 and 10, and a nonmagnetic material. The magnetic bearing means 9 further includes an annular outer magnetic body 103 fitted to a portion of the inner peripheral surface 12 of the one end portion 5 of the rolling element 102. The magnetic bearing means 10 further includes an annular outer magnetic body 103 a that is fitted to the inner peripheral surface 12 of the other end 6 of the rolling element 102.

転動体１０２の一端部５における内周面１２の部位は拡径されており、外側磁性体１０３は当該拡径された部位に嵌着されている。転動体１０２の他端部６における内周面１２の部位は拡径されており、外側磁性体１０３ａは当該拡径された部位に嵌着されている。 The part of the inner peripheral surface 12 in the one end part 5 of the rolling element 102 is expanded in diameter, and the outer magnetic body 103 is fitted in the expanded part. A part of the inner peripheral surface 12 in the other end portion 6 of the rolling element 102 is enlarged in diameter, and the outer magnetic body 103a is fitted in the enlarged part.

環状の外側磁性体１０３は、環状の転動体１０２の内周面１２に、一方の端面から軸方向に所定の間隔を隔てて形成された２つの環状凹溝８４及び８５を具備しており、該外側磁性体１０３は、前記転動体１０２の一端部５における内周面１２に形成された拡径凹所に、外側磁性体１０３の一方の端面を該転動体１０２の一端部５と面一にして嵌着されている。外側磁性体１０３ａは外側磁性体１０３と同様に形成されているので、外側磁性体１０３ａについては図に適宜符号ａを付してその詳細な説明を省略する。 The annular outer magnetic body 103 includes two annular grooves 84 and 85 formed on the inner peripheral surface 12 of the annular rolling element 102 at a predetermined interval in the axial direction from one end face. The outer magnetic body 103 has one end surface of the outer magnetic body 103 flush with the one end portion 5 of the rolling element 102 in a diameter-enlarged recess formed in the inner peripheral surface 12 of the one end portion 5 of the rolling element 102. Is fitted. Since the outer magnetic body 103a is formed in the same manner as the outer magnetic body 103, the outer magnetic body 103a is appropriately denoted by a in the drawing and its detailed description is omitted.

カムフォロア１０１の磁性軸受手段９及び１０は、転動体１０２の一端部５側の内周面１２に形成された拡径凹所に嵌着された環状の外側磁性体１０３と、外側磁性体１０３の内周面に一方の端面から軸方向に所定の間隔を隔てて形成された２つの環状凹溝８４及び８５と、該外側磁性体１０３の一方の環状凹溝８４を挟み、かつ外周面６２で外側磁性体１０３の内周面と環状の隙間６４をもって対面し、軸体４に装着されている一対の内側磁性体６５及び６６と、一対の内側磁性体６５及び６６間に介在されていると共に外周面が外側磁性体１０３の環状凹溝８４に臨む永久磁石６７と、一方の端面が一対の内側磁性体６５及び６６の一方の内側磁性体６６の端面に当接し、他方の端面が軸受体３６の円筒状の本体５５の端面に当接して配され、外周面が外側磁性体１０３の環状凹溝８５に臨む磁力遮断体としての環状スペーサ８０とから形成されている。 The magnetic bearing means 9 and 10 of the cam follower 101 include an annular outer magnetic body 103 fitted in a diameter-enlarged recess formed on the inner peripheral surface 12 on the one end portion 5 side of the rolling element 102, and an outer magnetic body 103. The inner circumferential surface sandwiches two annular grooves 84 and 85 formed at a predetermined interval in the axial direction from one end surface, and one annular groove 84 of the outer magnetic body 103. It faces the inner peripheral surface of the outer magnetic body 103 with an annular gap 64 and is interposed between the pair of inner magnetic bodies 65 and 66 attached to the shaft body 4 and the pair of inner magnetic bodies 65 and 66. The permanent magnet 67 whose outer peripheral surface faces the annular concave groove 84 of the outer magnetic body 103, one end face abuts on the end face of one inner magnetic body 66 of the pair of inner magnetic bodies 65 and 66, and the other end face is a bearing body. 36 in contact with the end face of the cylindrical body 55 Is, the outer peripheral surface is formed an annular spacer 80 serving as a magnetic blocking member facing the annular groove 85 of the outer magnetic body 103.

カムフォロア１０１によれば、静圧気体軸受手段７によって転動体１０２をラジアル方向に関して非接触で支持する一方、磁性軸受手段９及び１０によって転動体１０２をスラスト方向に関して非接触で支持することができて、回転摩擦を低減させると共に回転速度を向上させることができ、しかも、カムフォロア１０１の使用期間の長期化を図り得ると共にランニングコストをも低減させ得、スラスト方向の非接触支持においてはエアを消費することがないので、カムフォロア１０１の更なる低廉化、エア消費量の削減を図り得る。尚、外側磁性体１０３及び１０３ａが転動体１０２の内周面１２に嵌着されているために、外側磁性体１０３及び１０３ａを予め転動体１０２に嵌着させておくことができて、転動体１０２に対する軸体４、静圧気体軸受手段７並びに磁性軸受手段９及び１０の組み立て工数を減少させ得、加えて、転動体１０２に外側磁性体１０３及び１０３ａが嵌着されるので、転動体１０２並びに外側磁性体１０３及び１０３ａの芯出しを予め簡単に且つ精確に行い得、例えば、外側磁性体１０３及び１０３ａが転動体１０２にボルト止め等される態様のカムフォロアの組み立て時に生じ得る外側磁性体と転動体との芯ズレをなくし得て、ラジアル方向の磁気による吸着力が不均一となってラジアル方向の負荷容量が低下する虞をなくし得る。例えば外側磁性体が転動体にボルト止めされる態様のカムフォロア（図示せず）においても、回転摩擦の低減、回転速度の向上に加えて、使用期間の長期化、ランニングコストの低減を図り得るが、カムフォロア１０１では、外側磁性体１０３が転動体１０２の内周面１２に嵌着されているために、外側磁性体１０３を予め転動体１０２に嵌着させておくことができて、転動体１０２に対する軸体４、静圧気体軸受手段７及び磁性軸受手段９及び１０の組み立て工数を減少させ得、加えて、転動体２及び外側磁性体１０３の芯出しを予め精確に行い得、ラジアル方向の磁気による吸着力が不均一となってラジアル方向の負荷容量が低下する虞をなくし得る。 According to the cam follower 101, the rolling element 102 can be supported by the hydrostatic gas bearing means 7 in a non-contact manner in the radial direction, while the rolling element 102 can be supported by the magnetic bearing means 9 and 10 in a non-contact manner in the thrust direction. Rotational friction can be reduced and rotational speed can be improved, and the cam follower 101 can be used for a longer period of time and running costs can be reduced, and air is consumed in non-contact support in the thrust direction. Therefore, the cam follower 101 can be further reduced in price and the air consumption can be reduced. Since the outer magnetic bodies 103 and 103a are fitted to the inner peripheral surface 12 of the rolling element 102, the outer magnetic bodies 103 and 103a can be fitted to the rolling element 102 in advance. The number of man-hours for assembling the shaft body 4, the static pressure gas bearing means 7 and the magnetic bearing means 9 and 10 with respect to 102 can be reduced. In addition, since the outer magnetic bodies 103 and 103a are fitted to the rolling element 102, the rolling element 102 In addition, the outer magnetic bodies 103 and 103a can be centered easily and accurately in advance, for example, an outer magnetic body that can be generated when assembling the cam follower in such a manner that the outer magnetic bodies 103 and 103a are bolted to the rolling elements 102, and the like. The misalignment with the rolling element can be eliminated, and the possibility that the attractive force due to the magnetism in the radial direction becomes non-uniform and the load capacity in the radial direction decreases can be eliminated. For example, even in a cam follower (not shown) in which the outer magnetic body is bolted to the rolling element, in addition to reducing the rotational friction and improving the rotational speed, the use period can be extended and the running cost can be reduced. In the cam follower 101, since the outer magnetic body 103 is fitted on the inner peripheral surface 12 of the rolling element 102, the outer magnetic body 103 can be fitted in the rolling element 102 in advance. The number of assembling steps of the shaft body 4, the static pressure gas bearing means 7 and the magnetic bearing means 9 and 10 can be reduced, and in addition, the rolling element 2 and the outer magnetic body 103 can be accurately centered in advance, in the radial direction. It is possible to eliminate the possibility that the attractive force due to magnetism becomes uneven and the load capacity in the radial direction is reduced.

本例の更に他の態様のカムフォロア（図示せず）は、非磁性体からなる転動体の両端部に外側磁性体１０３が装着されている事項を除いてはカムフォロア１及び１０１と同様に形成されている。斯かるカムフォロア並びにカムフォロア１及び１０１の夫々によれば、特に、静圧気体軸受手段９及び１０は、転動体２（１０２）の内周面１２に対して環状の軸受隙間３１をもって対面しているラジアル軸受面３２を有していると共に軸体４に固着されている円筒状の軸受体３６と、ラジアル軸受面３２から軸受隙間３１に供給すべき気体を給気することができるように軸受体３６に形成されている給気通路４４と、軸体４に形成されていると共に給気通路４４に気体を供給することができるように当該給気通路４４に連通した供給通路４５とを具備しているために、磁性軸受手段９及び１０を転動体２（１０２）の両端面に設けることができるようになり、スラスト方向の負荷容量を増大させることができる。 The cam follower (not shown) according to still another embodiment of the present example is formed in the same manner as the cam followers 1 and 101 except that the outer magnetic body 103 is attached to both ends of the non-magnetic rolling element. ing. According to each of the cam follower and the cam followers 1 and 101, in particular, the static pressure gas bearing means 9 and 10 face each other with an annular bearing gap 31 with respect to the inner peripheral surface 12 of the rolling element 2 (102). A cylindrical bearing body 36 having a radial bearing surface 32 and fixed to the shaft body 4, and a bearing body so that gas to be supplied from the radial bearing surface 32 to the bearing gap 31 can be supplied. 36, and a supply passage 45 formed in the shaft body 4 and connected to the supply passage 44 so that gas can be supplied to the supply passage 44. Therefore, the magnetic bearing means 9 and 10 can be provided on both end faces of the rolling element 2 (102), and the load capacity in the thrust direction can be increased.

尚、外側磁性体が転動体にボルト止めされる態様のカムフォロアにおいても、回転摩擦の低減、回転速度の向上に加えて、使用期間の長期化、ランニングコストの低減を図り得るが、斯かるカムフォロアに対して、本例のカムフォロア１では、転動体２が磁性体からなるために、内側磁性体６５及び６６に対面する外側磁性体を転動体２に対して別個に設ける必要をなくすことができて部品点数を削減し得、カムフォロアの組み立て工数を減少し得、加えて、磁性体からなる転動体２自体が内側磁性体６５及び６６に対面する外側磁性体としての機能を発揮するので、当該転動体２に芯ズレが生じることがなくなり、ラジアル方向の磁気による吸着力が不均一となってラジアル方向の負荷容量が低下する虞をなくし得る。 In addition, in the cam follower in which the outer magnetic body is bolted to the rolling element, in addition to reducing the rotational friction and improving the rotational speed, the use period can be prolonged and the running cost can be reduced. On the other hand, in the cam follower 1 of this example, since the rolling element 2 is made of a magnetic material, it is possible to eliminate the need to separately provide the outer magnetic material facing the inner magnetic members 65 and 66 with respect to the rolling element 2. The number of parts can be reduced, and the number of assembling steps of the cam follower can be reduced. In addition, the rolling element 2 itself made of a magnetic substance exhibits a function as an outer magnetic body facing the inner magnetic bodies 65 and 66. The rolling element 2 can be prevented from being misaligned, and it is possible to eliminate the possibility that the radial attracting force is uneven and the load capacity in the radial direction is reduced.

１、１０１カムフォロア
２、１０２転動体
４軸体
７静圧気体軸受手段
９、１０磁性軸受手段
６４隙間
６５、６６、６５ａ、６６ａ内側磁性体
６７、６７ａ永久磁石
３１軸受隙間
３２ラジアル軸受面
４４給気通路
４５供給通路
１０３、１０３ａ外側磁性体 DESCRIPTION OF SYMBOLS 1,101 Cam follower 2,102 Rolling body 4 Shaft body 7 Hydrostatic gas bearing means 9, 10 Magnetic bearing means 64 Gap 65, 66, 65a, 66a Inner magnetic body 67, 67a Permanent magnet 31 Bearing gap 32 Radial bearing surface 44 Supply Air passage 45 Supply passage 103, 103a Outside magnetic body

Claims

A hollow rolling elements, in order to support a shaft member having one end protruding from the rolling elements together is inserted to form a gap in the hollow portion of the rolling elements, the rolling elements hydrostatic gas with respect to the radial direction rolling A single static pressure gas bearing means interposed between the moving body and the shaft body, and a first bearing which supports the rolling element by a magnetic force in the thrust direction and sandwiches the static pressure gas bearing means in the thrust direction. And the first magnetic bearing means. The first magnetic bearing means includes two first magnetic bearing means formed at a predetermined interval in the axial direction on an inner peripheral surface on one end side of the rolling element. The annular groove and one of the first annular grooves are sandwiched, and the outer circumferential surface faces the inner circumferential surface of the rolling element with the first annular gap and is attached to the shaft body. A pair of first inner magnetic bodies and one of the first annular grooves A first permanent magnet that faces one annular groove and is interposed between a pair of first inner magnetic bodies, and one that faces the other first annular groove of the first annular grooves and one of them The first annular spacer is arranged such that the end surface of the first abutting member is in contact with the end surface of one of the pair of first inner magnetic members and the other end surface is in contact with the static pressure gas bearing means. In order to support the rolling element in the thrust direction, the rolling element and the pair of first inner magnetic bodies generate a force to attract each other based on the magnetic force of the first permanent magnet. The second magnetic bearing means includes two second annular grooves formed on the inner peripheral surface on the other end side of the rolling element at a predetermined interval in the axial direction, and a second annular groove. A shaft body that sandwiches one of the second annular concave grooves and faces the inner peripheral surface of the rolling element on the outer peripheral surface with a second annular gap. A pair of second inner magnetic bodies mounted thereon, and a second annular concave groove facing one of the second annular concave grooves and interposed between the pair of second inner magnetic bodies Two permanent magnets and one second inner magnetic body facing the other second annular concave groove of the second annular concave groove and one end face of the pair of second inner magnetic bodies And a second annular spacer disposed on the other end surface in contact with the hydrostatic gas bearing means, and the magnetic force of the second permanent magnet to support the rolling element in the thrust direction. The rolling element and the pair of second inner magnetic bodies generate a force that attracts each other, and the static pressure gas bearing means faces the inner peripheral surface of the rolling element with an annular bearing gap. A cylindrical bearing body having a radial bearing surface and secured to the shaft body; A gas supply passage formed in the bearing body so that the gas to be supplied to the bearing gap can be supplied from the bearing surface, and a gas is supplied to the supply passage formed in the shaft body. A supply passage that communicates with the air supply passage so that the bearing gap can pass through the first annular gap at one end in the axial direction and the second annular gap at the other end in the axial direction. Cam followers that communicate with each other via

A hollow rolling elements, in order to support a shaft member having one end protruding from the rolling elements together is inserted to form a gap in the hollow portion of the rolling elements, the rolling elements hydrostatic gas with respect to the radial direction rolling A single static pressure gas bearing means interposed between the moving body and the shaft body, and a first bearing which supports the rolling element by a magnetic force in the thrust direction and sandwiches the static pressure gas bearing means in the thrust direction. And the first magnetic bearing means, the first magnetic bearing means is an annular first fitting fitted in a diameter-enlarged recess formed on the inner peripheral surface on one end side of the rolling element. An outer magnetic body, two first annular grooves formed on the inner peripheral surface of the first outer magnetic body at a predetermined interval in the axial direction from one end face, and the first outer magnetic body One of the first annular grooves is sandwiched between the first annular grooves and the outer circumferential surface A pair of first inner magnetic bodies facing the inner peripheral surface of the outer magnetic body with a first annular gap and mounted on the shaft body, and interposed between the pair of first inner magnetic bodies A first permanent magnet whose outer peripheral surface faces one of the first annular grooves of the first outer magnetic body, and one end face of the pair of first inner magnetic bodies Of the first inner magnetic body, the other end face is in contact with the hydrostatic gas bearing means, and the outer peripheral surface of the first annular concave groove of the first outer magnetic body. A first annular spacer facing the other first annular concave groove, and a first outer magnetic body based on the magnetic force of the first permanent magnet to support the rolling element in the thrust direction. The pair of first inner magnetic bodies generate a pulling force with each other, and the second magnetic bearing means has the other end of the rolling element. A ring-shaped second outer magnetic body fitted in a diameter-enlarged recess formed on the inner peripheral surface of the side, and a predetermined interval in the axial direction from one end surface to the inner peripheral surface of the second outer magnetic body The second annular groove formed between the second annular groove and one of the second annular grooves of the second outer magnetic body is sandwiched between the second annular grooves and the second outer circumferential groove A pair of second inner magnetic bodies facing the inner peripheral surface of the outer magnetic body with a second annular gap, and interposed between the pair of second inner magnetic bodies. A second permanent magnet whose outer peripheral surface faces one of the second annular grooves in the second outer magnetic body, and one end surface of the pair of second inner magnetic bodies Of the second inner magnetic body, and the other end face is in contact with the static pressure gas bearing means, and the outer peripheral surface of the second annular concave groove of the second outer magnetic body. Inside A second annular spacer facing the other second annular concave groove, and a pair of the second outer magnetic body and a pair based on the magnetic force of the second permanent magnet to support the rolling element in the thrust direction. The second inner magnetic body generates a force attracting each other, and the static pressure gas bearing means has a radial bearing surface facing the inner peripheral surface of the rolling element with an annular bearing gap. A cylindrical bearing body fixed to the shaft body, and an air supply passage formed in the bearing body so as to supply gas to be supplied to the bearing gap from the radial bearing surface, A supply passage that is formed in the shaft body and communicates with the air supply passage so that gas can be supplied to the air supply passage, and the bearing gap has a first annular shape at one end in the axial direction. At the other end in the axial direction. Cam follower communicating with the respective outside through the annular gap.

A portion of the inner peripheral surface of the rolling element facing the pair of first inner magnetic bodies and the pair of second inner magnetic bodies is expanded, and the first and second outer magnetic bodies are the rolling elements. The cam follower of Claim 2 currently fitted by the said diameter-expanded site | part of the internal peripheral surface.

The cam follower according to claim 1, wherein the rolling element is made of a magnetic material.