JP5812316B2 - Roll device - Google Patents

Description

  The present invention relates to coating of plastic sheets and films, manufacturing of electronic devices in a film form (roll-to-roll method), and a roll apparatus used for conveying the sheets, films and the like.

  For example, Patent Documents 1 and 2 propose a roll device using a static pressure gas bearing in the radial direction and the thrust direction.

JP 11-190338 A JP 2010-25208 A

  In such a roll device, in order to use the static pressure gas bearing in both the radial direction and the thrust direction, it is necessary to manage the bearing gap (gap on one side of 10 to 15 μm) by the static pressure gas bearing, and high accuracy. Since management of the bearing clearance is required, an expensive hydrostatic gas bearing is required, and it is difficult to reduce the cost of the apparatus. In addition, in such a roll device, air is consumed in both the radial and thrust bearings, so it is difficult to reduce the running cost of the device.

  In view of the above-mentioned points, the present applicant, in Japanese Patent Application No. 2010-43375, is a hollow roll body, and a shaft body that is inserted through the hollow portion of the roll body with a gap and has both ends protruding from the roll body. A static pressure gas bearing interposed between the roll body and the shaft body to support the roll body with a static pressure gas in the radial direction, and a magnetic bearing that supports the roll body with a magnetic force in the thrust direction. The magnetic bearing is mounted on the shaft body with a ring-shaped outer magnetic body mounted on one end of the roll body via a bolt, with an outer peripheral surface facing the inner peripheral surface of the outer magnetic body with a gap. A pair of annular inner magnetic bodies and a permanent magnet interposed between the pair of inner magnetic bodies, and the outer magnet is arranged on the basis of the magnetic force of the permanent magnet to support the roll body in the thrust direction. A roll apparatus is proposed in which a magnetic body and a pair of inner magnetic bodies generate a pulling force. According to such a roll apparatus, the roll body is supported in the radial direction by a static pressure gas bearing. On the other hand, the roll body can be supported in the thrust direction by the magnetic bearing, so that the cost of the apparatus can be reduced and the air consumption can be reduced.

  Moreover, the number of parts of the roll device can be reduced, the assembly man-hours can be reduced, and the attractive force due to the magnetism in the radial direction becomes uneven based on the outer magnetic body of the roll device and the misalignment between the roll bodies. It would be desirable to be able to eliminate the risk of a reduction in radial load capacity.

  The present invention has been made in view of the above-mentioned points. The object of the present invention is to reduce the cost of the apparatus and reduce the air consumption, reduce the number of parts, and reduce the number of assembly steps. And it is providing the roll apparatus which can eliminate the possibility that the attractive force by the magnetism of radial direction may become non-uniform | heterogenous, and the load capacity of radial direction may fall.

  The roll device of the present invention includes a hollow roll body, a shaft body inserted through the hollow portion of the roll body with a gap, and a roll body and a shaft body to support the roll body with static pressure gas in the radial direction. A static pressure gas bearing means interposed therebetween, and a magnetic bearing means for supporting the roll body by magnetic force in the thrust direction. The roll body is made of a magnetic body, and the magnetic bearing means is formed on the outer peripheral surface. The roll body includes a pair of inner magnetic bodies facing the inner peripheral surface of the roll body with a gap and attached to the shaft body, and a permanent magnet interposed between the pair of inner magnetic bodies, and has a thrust direction. In order to support the roll body, a force that attracts the roll body and the pair of inner magnetic bodies to each other is generated based on the magnetic force of the permanent magnet.

  According to the roll device of the present invention, in particular, the magnetic bearing means has a pair of inner magnetic bodies facing the inner peripheral surface of the roll body with a gap on the outer peripheral surface and a pair of inner magnetic bodies mounted on the shaft body. And a permanent magnet interposed between the magnetic bodies, so that the roll body and the pair of inner magnetic bodies attract each other based on the magnetic force of the permanent magnet to support the roll body in the thrust direction. Therefore, the roll body can be supported in the radial direction by the static pressure gas bearing means, while the roll body can be supported in the thrust direction by the magnetic bearing means, thus reducing the cost of the apparatus and air consumption. In addition, since the roll body itself is made of a magnetic body that functions as an outer magnetic body facing the inner magnetic body, the outer magnetic body facing the inner magnetic body can be reduced. It is possible to reduce the number of parts by eliminating the need to provide individual roll bodies, and to reduce the number of assembly steps of the roll device. Further, for example, there is a misalignment between the outer magnetic body and the roll body during assembly. This eliminates the possibility that the attractive force due to the magnetism in the radial direction becomes non-uniform and the load capacity in the radial direction decreases.

  A roll apparatus according to another aspect of the present invention includes a hollow roll body, a shaft body that is inserted through the hollow portion of the roll body with a gap, and a roll body that supports the roll body with static pressure gas in the radial direction. A hydrostatic gas bearing means interposed between the shaft body and a magnetic bearing means for supporting the roll body by magnetic force in the thrust direction, and the magnetic bearing means is fitted on the inner peripheral surface of the roll body. The outer magnetic body that is attached, the outer peripheral surface facing the inner peripheral surface of the outer magnetic body with a gap and a pair of inner magnetic bodies mounted on the shaft body, and the pair of inner magnetic bodies interposed The outer magnetic body and the pair of inner magnetic bodies attract each other based on the magnetic force of the permanent magnet to support the roll body in the thrust direction.

  According to the roll device of another aspect of the present invention, in particular, the magnetic bearing means faces the outer magnetic body fitted on the inner peripheral surface of the roll body, and the outer peripheral surface faces the inner peripheral surface of the outer magnetic body with a gap. And a pair of inner magnetic bodies mounted on the shaft body, and a permanent magnet interposed between the pair of inner magnetic bodies, the permanent magnets for supporting the roll body in the thrust direction. Since the outer magnetic body and the pair of inner magnetic bodies generate a pulling force based on the magnetic force, the roll body is supported in the radial direction by the static pressure gas bearing means, while the roll is supported by the magnetic bearing means. The body can be supported in the thrust direction, thus reducing the cost of the apparatus and reducing the air consumption, and the outer magnetic body is fitted to the inner peripheral surface of the roll body. Preliminary outer magnetic material It can be fitted to the roll body and can be made as a single body, and the assembly work of the shaft body, the static pressure gas bearing means and the magnetic bearing means with respect to the roll body can be reduced, and in addition, the core of the roll body and the outer magnetic body Pre-adjustment can be performed in advance, and there is no risk of misalignment between the outer magnetic body and the roll body during assembly, resulting in non-uniform attracting force due to radial magnetism and reduced load capacity in the radial direction. Can be lost.

  A roll apparatus according to still another aspect of the present invention includes a hollow roll body, a shaft body that is inserted through a hollow portion of the roll body with a gap, and a roll body that supports the roll body with static pressure gas in the radial direction. A static pressure gas bearing means interposed between the shaft body and a magnetic bearing means supported by a roll body and a magnetic force in the thrust direction, and the magnetic bearing means is mounted on the end of the roll body. The outer magnetic body is opposed to the inner peripheral surface of the outer magnetic body on the outer peripheral surface with a gap, and is interposed between the pair of inner magnetic bodies mounted on the shaft body and the pair of inner magnetic bodies. A permanent magnet, and the outer magnetic body and the pair of inner magnetic bodies are attracted to each other based on the magnetic force of the permanent magnet to support the roll body in the thrust direction. gas The receiving means has a radial bearing surface facing the inner peripheral surface of the roll body with an annular bearing gap and a cylindrical bearing body fixed to the shaft body, and a bearing from the radial bearing surface. An air supply passage formed in the bearing body so that the gas to be supplied to the gap can be supplied, and a gas supply passage formed in the shaft body and supplied to the air supply passage. And a supply passage communicating with the air passage.

  According to the roll device of still another aspect of the present invention, in particular, the magnetic bearing means faces the outer magnetic body mounted on the end of the roll body and the outer peripheral surface faces the inner peripheral surface of the outer magnetic body with a gap. And a pair of inner magnetic bodies mounted on the shaft body and a permanent magnet interposed between the pair of inner magnetic bodies, and the magnetic force of the permanent magnet to support the roll body in the thrust direction. The outer magnetic body and the pair of inner magnetic bodies generate a pulling force to each other, so that the roll body is supported in the radial direction by the static pressure gas bearing means, while the roll body is supported by the magnetic bearing means. Can be supported with respect to the thrust direction, so that the cost of the apparatus can be reduced and the air consumption can be reduced, and the static pressure gas bearing means has an annular bearing gap with respect to the inner peripheral surface of the roll body. With A cylindrical bearing body that has a radial bearing surface that faces the shaft and is fixed to the shaft body, and a gas that should be supplied from the radial bearing surface to the bearing gap can be supplied to the bearing body. Since the air supply passage formed and the supply passage that is formed in the shaft body and communicates with the air supply passage so that gas can be supplied to the air supply passage, for example, Compared to the case where a gas supply passage is provided in the bearing body so as to open at one end face of the bearing body of the static pressure gas bearing means, the magnetic bearing means can be provided on both end faces of the roll body. The load capacity in the thrust direction can be increased.

  In the above-described roll device and the roll device according to another aspect of the present invention, the static pressure gas bearing means has a radial bearing surface facing the inner peripheral surface of the roll body with an annular bearing gap. Formed in the shaft body, a cylindrical bearing body fixed to the shaft body, an air supply passage formed in the bearing body so that gas to be supplied to the bearing gap from the radial bearing surface can be supplied And a supply passage communicating with the supply passage so that gas can be supplied to the supply passage.

  According to the present invention, the cost of the apparatus can be reduced and the air consumption can be reduced, the number of parts can be reduced, the number of assembling steps can be reduced, and the attraction force due to the magnetism in the radial direction becomes uneven. It is possible to provide a roll device that can eliminate the risk of a decrease in radial load capacity.

It is a partial cross section whole explanatory view which looked at the example of the embodiment of the present invention from the front. It is a partial cross section explanatory view of the example shown in FIG. FIG. 3 is an explanatory view taken along the line III-III of the example shown in FIG. 1. It is IV-IV sectional view explanatory drawing of the example shown in FIG. It is VV sectional view explanatory drawing of the example shown in FIG. It is VI-VI sectional view explanatory drawing of the example shown in FIG. FIG. 2 is an enlarged explanatory view mainly showing magnetic bearing means in the example shown in FIG. 1. It is sectional explanatory drawing of the other example of embodiment of this invention.

  Next, the present invention will be described in more detail based on an example of a preferred embodiment shown in the drawings. The present invention is not limited to these examples.

  1 to 7, the roll apparatus 1 of this example includes a hollow roll body 2, a shaft body 4 inserted through a hollow portion of the roll body 2 with a gap 3, and a static pressure applied to the roll body 2 in the radial direction. Static pressure gas bearing means 7 and 8 interposed between the roll body 2 and the shaft body 4 to be supported by gas, and magnetic bearing means 9 and 10 for supporting the roll body 2 by magnetic force in the thrust direction. doing.

  The static pressure gas bearing means 7 and the magnetic bearing means 9 are arranged on the one end portion 5 side of the roll body 2, and the static pressure gas bearing means 8 and the magnetic bearing means 10 are arranged on the other end portion 6 side of the roll body 2, respectively. Yes. Since the static pressure gas bearing means 7 and the magnetic bearing means 9 are formed in the same manner as the static pressure gas bearing means 8 and the magnetic bearing means 10, respectively, hereinafter, the static pressure gas bearing means 7 disposed on the one end portion 5 side. The magnetic bearing means 9 will be described in detail, and the static pressure gas bearing means 8 and the magnetic bearing means 10 arranged on the other end 6 side will be appropriately affixed in FIG. To do. The magnetic bearing means 9 is disposed on the one end 5 side with respect to the static pressure gas bearing means 7 adjacent to the magnetic bearing means 9, and the magnetic bearing means 10 is statically adjacent to the magnetic bearing means 10. The pressure gas bearing means 8 is disposed on the other end 6 side.

  The roll body 2 is made of a cylindrical magnetic body, and faces the static pressure gas bearing means 7 and 8 and the magnetic bearing means 9 and 10 with an annular bearing gap 31 and an annular gap 64 on the inner peripheral surface 12 thereof. ing.

  The shaft body 4 has a columnar shape, and its one end portion 21 protrudes from one end portion 5 of the roll body 2, and is fixedly supported by the one end portion 21 on the support frame 15 or the like. The other end portion 22 of the shaft body 4 protrudes from the other end portion 6 of the roll body 2, and is fixedly supported by the support frame 15 and the like at the other end portion 22. In this example, the shaft body 4 is supported at both ends by the support frame 15 or the like. However, for example, only the one end portion 21 or the other end portion 22 may be cantilevered. Static pressure gas bearing means 7 and 8 and magnetic bearing means 9 and 10 are attached to the shaft body 4. The outer peripheral surface 20 of the shaft body 4 faces the inner peripheral surface 12 of the roll body 2 with a gap 3. The outer peripheral portion of the shaft body 4 located between the static pressure gas bearing means 7 and 8 is expanded in diameter.

  The static pressure gas bearing means 7 has a radial bearing surface 32 facing the inner peripheral surface 12 of the roll body 2 with an annular bearing gap 31 and is a cylindrical shape fixed to the shaft body 4. Gas is supplied to the air supply passage 44 formed in the bearing body 36 and the air supply passage 44 so that the gas to be supplied to the bearing gap 31 from the bearing body 36 and the radial bearing surface 32 can be supplied. A supply passage 45 formed in the shaft body 4 so as to communicate with the air supply passage 44 is provided.

  The bearing body 36 includes a cylindrical main body 55 fixed to the outer peripheral surface 20 of the shaft body 4 by an inner peripheral surface 51 and a cylindrical porous body as a porous body joined to the outer peripheral surface 52 of the main body 55. And a sintered metal layer 56.

  The porous metal sintered layer 56 has a large number of pores which open at a large number of random sites on the entire surface and communicate with each other in a random manner. The radial bearing surface 32 is composed of an outer peripheral surface exposed to face the inner peripheral surface 12 of the roll body 2 to be supported by the porous metal sintered layer 56.

  The porous metal sintered layer 56 includes 4% by weight to 10% by weight tin, 10% by weight to 40% by weight nickel, 0.1% by weight to less than 0.5% by weight phosphorus, 2 The inorganic substance particles of not less than 10% by weight and not more than 10% by weight and the balance may be made of copper. The inorganic substance particles dispersedly contained in the porous metal sintered layer may be composed of at least one of graphite, boron nitride, graphite fluoride, calcium fluoride, aluminum oxide, silicon oxide, and silicon carbide.

  The air supply passage 44 is formed in the main body 55 extending in the axial direction with a plurality of annular passages 71 and 72 formed in the outer peripheral surface 52 of the main body 55 of the bearing body 36, and communicates with the annular passages 71 and 72. And a communication passage 76 communicating with the supply passage 45. The supply passage 45 extends in the axial direction and is formed in the shaft body 4. The supply passage 45 opens at the one end 21 and communicates with the communication passage 76. In such an air supply passage 44, gas (compressed gas) supplied from the one end portion 21 via the supply passage 45 is supplied to the communication passage 76, and the gas supplied to the communication passage 76 flows into the annular passages 71 and 72. Then, by supplying the inflowed gas to the porous metal sintered layer 56, the gas is supplied to the bearing gap 31. The supply passage 45 of the static pressure gas bearing means 7 provided on the one end portion 5 side of the roll body 2 and the supply passage (not shown) of the static pressure gas bearing means 8 provided on the other end portion 6 side of the roll body 2. Are communicating with each other.

  The roll apparatus 1 of this example includes static pressure gas bearing means 7 and 8 having porous metal sintered layers 56 and 56a, respectively. Instead, for example, formed in bearing bodies 36 and 36a. There may be provided a self-drawing type static pressure gas bearing means for supplying static pressure gas to the bearing gap 31 through the formed self-drawing passage and supporting the roll body 2 in a non-contact manner in the radial direction.

The magnetic bearing means 9 has an outer peripheral surface 62 facing the inner peripheral surface 12 of the roll body 2 with an annular gap 64 and a pair of annular inner magnetic bodies 65 and 66 mounted on the shaft body 4 and a pair of magnetic bearing means 9. And a permanent magnet 67 having a magnetic pole N and S in the thrust direction , in this example, a hollow disk-shaped permanent magnet 67. Based on the magnetic force of the permanent magnet 67 to support the roll body 2 with respect to the direction, the roll body 2 and the pair of inner magnetic bodies 65 and 66 generate a pulling force. The gap 64 is disposed adjacent to the bearing gap 31.

  The roll body 2 has an annular protrusion 82 formed on the inner peripheral surface 12 of the roll body 2 so as to protrude toward the inner magnetic body 65 on the one end 5 side, and an inner magnetic body 66 on the one end 5 side. And an annular convex portion 83 formed on the inner peripheral surface 12 of the roll body 2 is formed.

  The annular protrusions 82 and 83 have the same shape, and the annular protrusion 82 is located on the one end 5 side with respect to the annular protrusion 83. Annular grooves 84 and 85 are formed between the annular convex portions 82 and 83 and between the annular convex portion 83 and the bearing body 36, respectively. The concave groove 84 faces the permanent magnet 67, and the concave groove 85 faces an annular spacer 80 described later. The annular convex portions 82 and 83 of this example may be chamfered, for example. The surfaces of the annular convex portions 82 and 83 facing the outer peripheral surface 62 of the inner magnetic bodies 65 and 66 may be flat surfaces.

  The inner magnetic body 65 is positioned on the one end 5 side with respect to the inner magnetic body 66, the outer peripheral surface 62 of the inner magnetic body 65 is an annular convex portion 82, and the outer peripheral surface 62 of the inner magnetic body 66 is an annular convex portion. 83 face each other with an annular gap 64.

  Each of the inner magnetic bodies 65 and 66 has a hollow disk shape, and is fixed to the shaft body 4 in the hollow portion. The outer peripheral surfaces 62 of the inner magnetic bodies 65 and 66 may be chamfered. The outer peripheral surfaces 62 of the inner magnetic bodies 65 and 66 may be flat surfaces that face the annular convex portions 82 and 83 with a gap 64 therebetween. The inner magnetic body 66 is attached to the bearing body 36 via an annular spacer 80.

  The permanent magnet 67 has one end face 86 as an N pole and the other end face 88 as an S pole. The inner magnetic bodies 65 and 66 are magnetized based on the magnetic force of the permanent magnet 67, whereby the outer peripheral surface 62 of the inner magnetic body 65 is an N pole and the outer peripheral surface 62 of the inner magnetic body 66 is an S pole. The one end portion 5 of the roll body 2 is magnetized based on the magnetic force of the plurality of permanent magnets 67, whereby the annular convex portion 82 becomes the S pole and the annular convex portion 83 becomes the N pole. Accordingly, in the magnetic bearing means 9, for example, as shown in FIG. 7, a magnetic flux 68 is generated, and an attracting force is generated between the annular convex portion 82 and the outer peripheral surface 62 of the inner magnetic body 65, and the annular convex portion 83 and the inner side. An attractive force is generated between the magnetic body 66 and the outer peripheral surface 62. Since such an attractive force increases with the displacement of the roll body 2 in the thrust direction with respect to the shaft body 4, the roll body 2 is supported by a magnetic force in the thrust direction. Thus, the magnetic bearing means 9 has a force that the one end portion 5 of the roll body 2 and the pair of inner magnetic bodies 65 and 66 attract each other based on the magnetic force of the permanent magnet 67 to support the roll body 2 in the thrust direction. It is supposed to be generated. The magnetic bearing means 10 also generates an attractive force based on the magnetic force of the permanent magnet 67a so as to support the roll body 2 in the thrust direction, similarly to the magnetic bearing means 9.

  The magnetic bearing means 9 and 10 are each provided with one hollow disk-shaped permanent magnet 67 and 67a. Alternatively, for example, the magnetic bearing means 9 and 10 may be provided with a plurality of permanent magnets arranged in the circumferential direction. Good.

  In such a roll device 1, gas is supplied from the radial bearing surfaces 32 and 32 a to the bearing gaps 31 and 31 a by supplying air to the porous metal sintered layers 56 and 56 a from the respective supply passages 44. The roll body 2 is supported by the static pressure gas bearing means 7 and 8 so as to be rotatable in the R direction without contact. Further, as described above, the roll body 2 is supported by the magnetic force of the magnetic bearing means 9 and 10 so as to be rotatable in the R direction without contact with respect to the lateral direction. Is not allowed. In the roll device 1, air consumption in supporting the roll body 2 in the thrust direction does not occur, so that it is possible to suppress the air consumption when supporting the roll body 2.

  According to the roll device 1 of the present example, the hollow roll body 2, the shaft body 4 inserted through the hollow portion of the roll body 2 with the gap 3 and the roll body 2 with respect to the radial direction should be supported by static pressure gas. A hydrostatic gas bearing means 7 and 8 interposed between the roll body 2 and the shaft body 4 and magnetic bearing means 9 and 10 for supporting the roll body 2 by magnetic force in the thrust direction; The body 2 is made of a magnetic body, and the magnetic bearing means 9 is opposed to the inner peripheral surface 12 of the roll body 2 on the outer peripheral surface 62 with an annular gap 64 and is attached to the shaft body 4 with a pair of inner magnets. Body 65 and 66 and a permanent magnet 67 interposed between the pair of inner magnetic bodies 65 and 66, and the roll body based on the magnetic force of the permanent magnet 67 to support the roll body 2 in the thrust direction. 2 and a pair The side magnetic bodies 65 and 66 generate a pulling force. The magnetic bearing means 10 faces the inner peripheral surface 12 of the roll body 2 with a gap 3 at the outer peripheral surface 62 and the shaft body 4. A pair of inner magnetic bodies 65a and 66a and a permanent magnet 67a interposed between the pair of inner magnetic bodies 65a and 66a, which are permanent to support the roll body 2 in the thrust direction. Since the roll body 2 and the pair of inner magnetic bodies 65a and 66a generate a pulling force based on the magnetic force of the magnet 67a, the roll body 2 is moved in the radial direction by the static pressure gas bearing means 7 and 8. On the other hand, it is possible to support the roll body 2 in the thrust direction by the magnetic bearing means 9 and 10, thus reducing the cost of the apparatus and reducing the air consumption. Further, since the roll body 2 itself is composed of the inner magnetic bodies 65 and 66 and the magnetic body functioning as the outer magnetic body facing the inner magnetic bodies 65a and 66a, the inner magnetic body 65 And 66 and the outer magnetic body facing the inner magnetic bodies 65a and 66a need not be provided on the roll body 2 separately from the roll body 2, and the number of parts can be reduced, and the assembly man-hour of the roll apparatus 1 can be reduced. Further, it is possible to eliminate the occurrence of misalignment between the outer magnetic body and the roll body 2 during assembly, and there is a risk that the radial magnetic force will be uneven and the load capacity in the radial direction may be reduced. It can be lost.

  A roll apparatus 101 shown in FIG. 8 of another embodiment of the present example is formed in the same manner as the roll apparatus 1 except for the roll body 2, and includes a hollow roll body 102 made of a nonmagnetic material. The magnetic bearing means 9 of the roll device 101 further includes an outer magnetic body 103 fitted to the inner peripheral surface 12 of the one end portion 5 of the roll body 102. The magnetic bearing means 10 of the roll device 101 includes: Similarly to the magnetic bearing means 9 of the roll device 101 described above, an outer magnetic body (not shown) fitted to the inner peripheral surface 12 of the other end 6 of the roll body 102 is further provided.

  The inner peripheral surface 12 of the roll body 102 is expanded in diameter at one end portion 5 and the other end portion 6 thereof, and the outer magnetic body 103 is formed on the expanded end portion 5 of the magnetic bearing means 10 of the roll device 101. The outer magnetic bodies are respectively fitted to the expanded other end portions 6.

  The outer magnetic body 103 is formed with the above-described annular convex portions 82 and 83 and concave grooves 84 and 85. The outer magnetic body of the magnetic bearing means 10 of the roll device 101 is formed in the same manner as the outer magnetic body 103.

Magnetic bearing means 9 and 10 of such a roll apparatus 101 includes an outer magnetic body of the outer magnetic 103及beauty magnetic resistance bearing means 10 based on the magnetic force of the permanent magnet 67 and 67a so as to support the roll body 102 with respect to the thrust direction The inner magnetic bodies 65 and 66 and 65a and 66a generate a pulling force. The static pressure gas bearing means 7 and 8 are located between the magnetic bearing means 9 and 10 in the thrust direction, and are sandwiched between the magnetic bearing means 9 and 10 in the thrust direction, and the gaps 31 and 31a are Each communicates with the outside through a gap 64.

  According to the roll device 101, as in the roll device 1, the roll body 102 is supported in the radial direction by the static pressure gas bearing means 7 and 8, while the roll body 102 is supported in the thrust direction by the magnetic bearing means 9 and 10. Thus, the cost of the apparatus can be reduced and the air consumption can be reduced, and the outer magnetic body 103 and the outer magnetic body of the magnetic bearing means 10 of the roll apparatus 101 are connected to the inner peripheral surface 12 of the roll body 102. Therefore, the outer magnetic body 103 and the magnetic bearing means 10 of the roll device 101 can be fitted into the roll body 102 in advance to form an integral body. The assembly man-hours of the pressurized gas bearing means 7 and 8 and the magnetic bearing means 9 and 10 can be reduced, and in addition, the roll body 102 and the outer magnetic body 103 and the low Centering of the outer magnetic body of the magnetic bearing means 10 of the apparatus 101 can be easily and accurately performed in advance, and there is no misalignment between the outer magnetic body and the roll body during assembly, and the magnetic adsorption in the radial direction is performed. The possibility that the force becomes non-uniform and the load capacity in the radial direction decreases can be eliminated.

  The roll device (not shown) of still another aspect of the present example has outer magnetic bodies attached to both ends of a roll body made of a non-magnetic material. Except for such matters, the roll devices 1 and 101 It is formed similarly. According to each of the roll device and the roll devices 1 and 101, in particular, the static pressure gas bearing means 7 and 8 have annular bearing gaps 31 and 31a with respect to the inner peripheral surface 12 of the roll body 2 (102). Cylindrical bearing bodies 36 and 36a having radial bearing surfaces 32 and 32a facing each other and fixed to the shaft body 4, and the bearing clearances 31 and 31a should be supplied from the radial bearing surfaces 32 and 32a. An air supply passage 44 formed in the bearing bodies 36 and 36a so that gas can be supplied (the air supply passage of the static pressure gas bearing means 8 is not shown) and the shaft body 4 are formed. And the supply passage 45 (the supply passage of the static pressure gas bearing means 8 is not shown) communicating with the supply passage 44 so that gas can be supplied to the supply passage 44. For example, static pressure air In addition to the magnetic bearing means 9 provided on the one end portion 5 side of the static pressure gas bearing means 7 as compared with the case where a gas supply passage is provided in either one of the bearing bodies 36 and 36a of the bearing means 7 and 8. Thus, the magnetic bearing means 9 is provided in the same manner as the magnetic bearing means 9 and provided adjacent to the other end 6 side of the static pressure gas bearing means 8.

  In addition to the above-described matters, the roll devices 1 and 101 and the roll device according to still another aspect of the present example include magnetic bearing means 9 provided adjacent to the one end portion 5 side of the static pressure gas bearing means 7. And the other magnetic bearing means (not shown) provided adjacent to the other end side of the static pressure gas bearing means 7 and the one end 6 side of the static pressure gas bearing means 8. And other magnetic bearing means (not shown) provided adjacent to the other end side of the static pressure gas bearing means 8 and the magnetic bearing means 10 provided adjacent thereto. In such a case, the load capacity in the thrust direction can be further increased.

DESCRIPTION OF SYMBOLS 1,101 Roll apparatus 2,102 Roll body 4 Shaft body 7,8 Static pressure gas bearing means 9,10 Magnetic bearing means 64 Gap 65,66,65a, 66a Inner magnetic body 67,67a Permanent magnet 31,31a Bearing gap 32 32a Radial bearing surface 44 Air supply passage 45 Supply passage 103 Outer magnetic body

Claims (3)

A hollow roll body made of a magnetic body, a shaft body inserted through the hollow portion of the roll body with a gap, and provided on one end side of the roll body, and the roll body in the radial direction A first hydrostatic gas bearing means interposed via a first bearing gap between the roll body and the shaft body to be supported by the roll body, and a radial body provided on the other end side of the roll body A second static pressure gas bearing means interposed via a second bearing gap between the roll body and the shaft body to support the roll body with a static pressure gas with respect to the direction, and a magnetic force to the roll body with respect to the thrust direction. And a first magnetic bearing means provided on one end side of the roll body with respect to the thrust direction, and supporting the roll body with magnetic force with respect to the thrust direction and And comprising a second magnetic bearing means provided on the other end of the Le body, the first magnetic bearing means, a radial direction with a third gap with the inner circumferential surface of the roll body at an outer circumferential surface And a first pair of inner magnetic bodies mounted on the shaft side by side in the thrust direction and a magnetic pole interposed in the thrust direction and interposed between the first pair of inner magnetic bodies in the thrust direction And the second magnetic bearing means is opposed to the inner circumferential surface of the roll body on the outer circumferential surface with a fourth gap in the radial direction and in the thrust direction. A second pair of inner magnetic bodies mounted on the shaft body side by side and a second pair of inner magnetic bodies interposed between the second pair of inner magnetic bodies in the thrust direction and having magnetic poles in the thrust direction With permanent magnets. The roll body and the first pair of inner magnetic bodies generate a pulling force based on the magnetic force of the first permanent magnet to support the roll body in the thrust direction. Based on the magnetic force of the second permanent magnet to be supported, the roll body and the second pair of inner magnetic bodies are caused to attract each other, and the first and second static pressure gas bearing means are: , Located between the first and second magnetic bearing means in the thrust direction and sandwiched between the first and second magnetic bearing means in the thrust direction, and the first and second bearing gaps are The first hydrostatic gas bearing means communicates with the outside through the third and fourth gaps, and faces the inner circumferential surface of the roll body in the radial direction with an annular first bearing gap. With radial bearing surface A cylindrical first bearing body fixed to the shaft body, and the second hydrostatic gas bearing means is a second annular member that is annular with respect to the inner peripheral surface of the roll body in the radial direction. A cylindrical second bearing body having a radial bearing surface facing the bearing gap and being fixed to the shaft body is provided. First and second annular projections are formed respectively protruding toward one pair of inner magnetic bodies, and the second pair of inner magnetic bodies are formed on the inner peripheral surface of the other end of the roll body. Third and fourth annular projections projecting toward each other are formed, and a first annular concave groove is formed between the first and second annular projections in the thrust direction, and the thrust direction A second annular concave groove is formed between the second annular convex portion and the first bearing body. A third annular groove is formed between the third and fourth annular protrusions in the thrust direction, and a fourth annular groove is formed between the fourth annular protrusion and the second bearing body in the thrust direction. The first concave groove faces the first permanent magnet in the radial direction, and the third concave groove faces the second permanent magnet in the radial direction. The outer peripheral surface of one inner magnetic body of the first pair of inner magnetic bodies is on the first annular convex portion, and the outer peripheral surface of the other inner magnetic body of the first pair of inner magnetic bodies is The second annular projections face each other in the radial direction with an annular third gap, and the outer peripheral surface of one of the second pair of inner magnetic bodies is the third annular projection. The outer peripheral surface of the other inner magnetic body of the second pair of inner magnetic bodies is respectively connected to the fourth annular convex portion. Roll devices facing in the radial direction with a fourth gap. A hollow roll body, a shaft body that is inserted through the hollow portion of the roll body with a gap, and a roll body that is provided on one end side of the roll body and supports the roll body with static pressure gas in the radial direction A first hydrostatic gas bearing means interposed between the roll body and the shaft body via a first bearing gap; and the roll body provided on the other end side of the roll body and with respect to the radial direction. A second static pressure gas bearing means interposed between the roll body and the shaft body via a second bearing gap to support the roll body by a static pressure gas, and supporting the roll body by magnetic force in the thrust direction. A first magnetic bearing means provided on one end side of the roll body with respect to the thrust direction; and supporting the roll body with a magnetic force with respect to the thrust direction and the other of the roll body with respect to the thrust direction. Second magnetic bearing means provided on the part side, and the first magnetic bearing means is a first outer magnetic body fitted on the inner peripheral surface on one end side of the roll body. And a first pair of inner magnetic bodies that are opposed to each other in the radial direction with a third gap on the inner circumferential surface of the first outer magnetic body on the outer circumferential surface and that are mounted on the shaft body side by side in the thrust direction. And a first permanent magnet interposed between the first pair of inner magnetic bodies in the thrust direction and having a magnetic pole in the thrust direction, and the second magnetic bearing means is a roll body A second outer magnetic body fitted to the inner peripheral surface on the other end side of the second outer magnetic body, and an outer peripheral surface facing the inner peripheral surface of the second outer magnetic body in the radial direction with a fourth gap. A second pair of inner magnets mounted on the shaft side by side in the thrust direction And body, and it comprises a second permanent magnet having a magnetic pole in the axial direction with being interposed between the second pair of inner magnetic body in the thrust direction, to support the roll body with respect to the thrust direction Therefore, the first outer magnetic body and the first pair of inner magnetic bodies are caused to attract each other on the basis of the magnetic force of the first permanent magnet, and the first permanent magnet is designed to support the roll body in the thrust direction. Based on the magnetic force of the two permanent magnets, the second outer magnetic body and the second pair of inner magnetic bodies are caused to attract each other, and face the first pair of inner magnetic bodies. The inner peripheral surface on one end side of the roll body and the inner peripheral surface on the other end side of the roll body facing the second pair of inner magnetic bodies are the inner periphery on the one end side. Inside the surface and the other end side The diameter is expanded with respect to the inner peripheral surface of the roll body excluding the peripheral surface, and the first outer magnetic body is fitted to the expanded inner peripheral surface on one end side of the roll body. The second outer magnetic body is fitted to the enlarged inner peripheral surface on the other end side of the roll body, and the first and second hydrostatic gas bearing means are arranged in the thrust direction. Located between the first and second magnetic bearing means and sandwiched between the first and second magnetic bearing means in the thrust direction, the first and second bearing gaps are the third and fourth The first hydrostatic gas bearing means has a radial bearing surface that faces the inner peripheral surface of the roll body in the radial direction with an annular first bearing gap. And a cylindrical first bearing body fixed to the shaft body. The gas bearing means has a cylindrical second bearing surface having a radial bearing surface facing the inner circumferential surface of the roll body in the radial direction with an annular second bearing gap and fixed to the shaft body. The first and second annular protrusions are formed on the inner peripheral surface of the first outer magnetic body so as to protrude toward the first pair of inner magnetic bodies, respectively. In addition, third and fourth annular protrusions are formed on the inner peripheral surface of the second outer magnetic body so as to protrude toward the second pair of inner magnetic bodies, respectively. A first annular concave groove is formed between the two annular convex portions, and a second annular concave groove is formed between the second annular convex portion and the first bearing body in the thrust direction. A third annular groove is formed between the third and fourth annular protrusions in the thrust direction. A fourth annular groove is formed between the fourth annular convex portion and the second bearing body in the thrust direction, and the first concave groove faces the first permanent magnet in the radial direction. The third concave groove faces the second permanent magnet in the radial direction, and the outer peripheral surface of one inner magnetic body of the first pair of inner magnetic bodies has a first annular shape. The outer peripheral surface of the other inner magnetic body of the first pair of inner magnetic bodies faces the convex portion in the radial direction with a third annular gap on the second annular convex portion, and the second The outer peripheral surface of one inner magnetic body of the pair of inner magnetic bodies is the third annular convex portion, and the outer peripheral surface of the other inner magnetic body of the second pair of inner magnetic bodies is the fourth Roll devices that face each other in the radial direction with an annular fourth gap on each of the annular projections . The first hydrostatic gas bearing means includes a first air supply passage formed in the first bearing body so as to be able to supply the gas to be supplied to the first bearing gap La dialkyl bearing surface When, and further comprising a first supply passage communicating with the first supply passage so as to supply the gas to the first supply passage with are formed in the axial body, the The second static pressure gas bearing means includes a second air supply passage formed in the second bearing body so that gas to be supplied from the radial bearing surface to the second bearing gap can be supplied, A second supply passage formed in the shaft body and communicated with the second air supply passage so as to supply gas to the second air supply passage. 2. The roll device according to 2.

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