JP5820672B2 - Vacuum chuck device - Google Patents

Description

  The present invention relates to a vacuum chuck device for adsorbing a workpiece (workpiece) using vacuum pressure.

Conventionally, as this type of technology, for example, the one shown in FIG. 10 is known.
FIG. 10 is a cross-sectional view showing a schematic structure of a conventional vacuum chuck device.
In this vacuum chuck device, for example, a cylinder chamber 111 having a cylindrical shape, a vacuum channel 112 communicating with the cylinder chamber 111, and an insertion hole 113 for a piston rod are integrally cut in a rectangular metal block 110. . A cylindrical piston 114 is accommodated in the cylinder chamber 111 so as to reciprocate in the axial direction, and a ring-shaped sealing material 114 a is attached to the outer peripheral surface of the piston 114. As a result, a pneumatic chamber 111 a is formed between the end surface of the piston 114 and the inner wall surface of the cylinder chamber 111.

  A rod-shaped piston rod 115 extends in the axial direction at the center of the piston 114, and an end of the piston rod 115 protrudes outside the cylinder chamber 111. A male screw is formed on the outer peripheral surface of the piston rod 115, and a female screw that engages with the male screw is engraved in the insertion hole 113, and the operator rotates the handle attached to the end 115a of the piston rod 115. Thus, the pull screw type piston 114 reciprocates in the axial direction.

  The surface side of the metal block 110 in which the external opening 112a of the vacuum flow path 112 is formed becomes an adsorption surface 110a for adsorbing the workpiece 200, and a sealing material 116 is annularly provided along the peripheral edge portion.

  According to such a pulling screw type vacuum chuck device, the operator places the workpiece 200 on the suction surface 110a when the piston 114 is at the left side position of the cylinder chamber 111 as shown in FIG. The piston 114 is moved in the direction of the arrow W in FIG. As a result, the air pressure chamber 111a is depressurized, and the workpiece 200 can be held in a state of being sucked to the suction surface 110a.

  A vacuum chuck device that holds a workpiece on a suction plate using a vacuum suction force generated by a vacuum pump is also generally known (for example, see Patent Document 1). A vacuum chuck device using such a vacuum pump has a problem that chips or the like enter the vacuum pump when the workpiece is processed and cause the vacuum pump to fail.

  Therefore, an ejector-type vacuum chuck device that uses a compressor and an ejector connected to the compressor to generate a vacuum suction force with the compressed air from the compressor and holds the workpiece on the suction plate without using a vacuum pump. Has been.

JP-A-6-262465

However, the conventional vacuum chuck apparatus described above has the following problems.
In the pulling screw type vacuum chuck apparatus, since it is necessary to manually rotate the pulling screw, a large amount of labor and time are required for each operation. Furthermore, a space for the handle for rotating the pull screw and a space for the operator to hold the handle and rotate the handle are required. For this reason, when this vacuum chuck device is attached to various machine tools, machine devices, and the like, many restrictions are imposed on the attachment direction and the attachment position, and it is difficult to attach them freely.

  Also, in the ejector-type vacuum chuck device, in order to maintain the vacuum pressure, that is, to keep the workpiece on the suction plate, it is necessary to continuously operate the compressor, and the air consumption (power consumption) Is a big problem.

  The present invention has been made in view of such circumstances, and the object thereof is that it does not require much labor and time for operation, and can be easily attached to various machine tools, etc., and has an energy saving and simple structure. And providing a low-cost vacuum chuck apparatus.

In order to achieve the above object, a vacuum chuck device of the present invention comprises a cylinder body (10) in which a first cylinder chamber (11) and a second cylinder chamber (12) are formed via a partition wall (13). ,
The first cylinder chamber is equipped with a first reciprocating motion in the axial direction so as to be kept airtight with a cylinder inner wall surface (10a) extending in the axial direction of the first cylinder chamber. The second cylinder chamber can be reciprocated in the axial direction such that the airtightness between the piston (14) and the cylinder inner wall surface (10b) extending in the axial direction of the second cylinder chamber is maintained. A built-in second piston (15), a rod (16) that hermetically penetrates the partition and connects the first piston (14) and the second piston (15), and a workpiece (50) placing a suction means for vacuum adsorption (30), the first space (11a) and a second space (11b formed on the first cylinder chamber by the first piston a) intake passing through the cylinder wall of the first space A first through hole (21) for fluid supply, a second through hole (22) for fluid supply / discharge passing through the cylinder wall of the second space, and the second piston chamber. A third space (12a) and a fourth space (12b) formed in the third space, a third through hole (23) for fluid supply and discharge penetrating the cylinder wall of the third space , and the fourth space And a fourth through-hole (24) for ventilation passing through the cylinder wall of the space, and the pressure-reducing area of the suction means and the first through-hole communicate with each other in an airtight manner, and the workpiece is sucked. At the time of clamping by vacuum suction to the means, the fluid in the second space is discharged from the second through hole, and the fluid is press-fitted into the third space from the third through hole. When unclamping to release the vacuum suction state of the object, the front through the third through hole While discharging the fluid in the third space, said second through-hole fluid is pressed into the second space, a fluid supply source for supplying the fluid is detachably mounted, said at the clamp A fluid path (23a) communicating at least the fluid supply source and the third through hole when the supply of fluid from the fluid supply source that supplies the fluid into the third space from the third through hole is stopped the characterized Rukoto provided with valve means (60) for air-tightly closed.

According to the vacuum chuck apparatus of the present invention, a required vacuum pressure within the first space communicating with the vacuum area of the suction means and is driven once by the first and second piston flow body pressure within the cylinder body get it becomes possible. As a result, unlike the prior art that operates with a handle or the like, the work suction operation does not require much labor and time, and when attaching the vacuum chuck device to various machine tools or machine devices, Free installation is possible. Moreover, the structure is simplified and low cost is realized.

Furthermore, according to the vacuum chuck device of the present invention, the vacuum pressure generated in the first space at the time of clamping can be held for a long time even when the fluid supply source is disconnected from the valve means. This eliminates the need to operate the fluid supply source continuously in order to maintain the vacuum pressure, as in the ejector-type vacuum chuck device, and greatly reduces air consumption (power consumption) and saves energy. Realized.

  Further, the vacuum chuck device of the present invention is provided in a suction path that hermetically communicates the decompression area of the suction means and the first through hole, and is opened at the time of clamping and closed at the time of unclamping. 1 check valve, and a branch path that branches from a midway portion of the suction path between the first check valve and the first through hole and opens to the outside, and is closed at the time of clamping. And a second check valve that opens at the time of unclamping.

According to the vacuum chuck device of the present invention, it becomes possible to replenish the vacuum pressure a plurality of times while the workpiece is adsorbed on the adsorbing means, and even when the vacuum pressure is lowered, etc. be able to.

Further, the vacuum chuck apparatus of the present invention, the suction means is mounted on said cylinder body, characterized in that the reduced pressure area and said first through hole of the suction means communicating with the straight.

Further, the vacuum chuck device of the present invention includes a plurality of the cylinder main bodies, and a combined suction path that is coupled to the respective first through holes of the cylinder main bodies is connected to a decompression area of the suction means. The cylinder main bodies cooperate with each other to perform the clamping or the unclamping.
According to the vacuum chuck device of the present invention, since the vacuum capacity is greatly increased, a strong vacuum suction force can be realized, and the case where the size of the workpiece is wide can be dealt with.

Further, the vacuum chuck device of the present invention has a horizontal plate-shaped base portion and a hollow escaping body vertically erected from the base portion, and the suction means has a plate shape. the tombstone is attached to the flat row on the side surface of the body, said cylinder body, characterized in that accommodated in the hollow of the tombstone body.
According to the vacuum chuck device of the present invention, the entire vacuum chuck device is made compact and easy to attach to various machine tools and the like.

  According to the vacuum chuck device of the present invention, the workpiece suction operation is simplified, and attachment to various machine tools and the like is facilitated. In addition, significant energy savings can be realized, and the cost can be reduced due to the simple structure.

It is a cross-sectional schematic diagram which shows the structure of the vacuum chuck apparatus which concerns on 1st Embodiment. It is a cross-sectional schematic diagram which shows the structure of the vacuum chuck apparatus which concerns on 2nd Embodiment. It is a cross-sectional schematic diagram which shows the structure of the vacuum chuck apparatus which concerns on 3rd Embodiment. It is a cross-sectional schematic diagram which shows another structure which concerns on 3rd Embodiment. It is a cross-sectional schematic diagram which shows the structure of the vacuum chuck apparatus which concerns on 4th Embodiment. It is an external appearance perspective view which shows the mounting form of the vacuum chuck apparatus shown in FIG. FIG. 7 is a top view and a side view of the mounting form shown in FIG. 6. It is a figure of the scale jig | tool which shows the other mounting form of the vacuum chuck apparatus of FIG. It is a figure of the scale jig | tool which shows the mounting form of the vacuum chuck apparatus of this invention. It is sectional drawing which shows schematic structure of the conventional vacuum chuck apparatus.

Hereinafter, embodiments of the present invention will be described with reference to the drawings.
<First Embodiment>

FIG. 1 is a schematic cross-sectional view showing a configuration of a vacuum chuck device according to a first embodiment of the present invention.
As shown in FIG. 1, the vacuum chuck device includes, for example, a cylindrical cylinder body 10 in which a first cylinder chamber 11 and a second cylinder chamber 12 are formed through a partition wall 13, and communicates with the cylinder body 10. And a vacuum adsorber 30. The vacuum suction device 30 is a suction means for placing the work (workpiece) 50 in a reduced pressure area and vacuum suction.

A first piston 14 and a second piston 15 are housed in the first cylinder chamber 11 and the second cylinder chamber 12, respectively. Specifically, the first piston 14 is provided in the first cylinder chamber 11 so as to be capable of reciprocating in the axial direction. Similarly, the second piston 15 is housed in the second cylinder chamber 12 so as to be capable of reciprocating in the axial direction. The first piston 14 and the second piston 15 have grooves formed on their outer peripheral surfaces, and O-rings are accommodated therein. Therefore, the cylinder inner wall surfaces 10a and 10b extending in the axial direction of the first and second cylinder chambers 11 and 12 and the outer peripheral surfaces of the first and second pistons 14 and 15 are sealed, respectively, and the first space 11a and The airtightness between the second space 11b and between the third space 12a and the fourth space 12b is maintained.
A connecting rod 16 is inserted in a through hole 13a having a circular cross section that penetrates the partition wall 13 so as to reciprocate in the axial direction, thereby connecting the first piston 14 and the second piston 15 together. Two grooves are formed on the inner peripheral surface of the through hole 13a, and an O-ring is accommodated in each groove. For this reason, the airtightness between the 2nd space 11b and the 3rd space 12a is maintained.

  Further, the first piston 14 forms a first space 11 a and a second space 11 b in the first cylinder chamber 11. A first through hole 21 for suction is formed in the cylinder wall of the first space 11a, and a second through hole 22 for fluid supply / discharge is formed in the cylinder wall of the second space 11b. Yes. Further, a third space 12 a and a fourth space 12 b are formed in the second cylinder chamber 12 by the second piston 15. A third through hole 23 for supplying and discharging fluid is formed in the cylinder wall of the third space 12a, and a fourth through hole 24 for ventilation is formed in the cylinder wall of the fourth space 12b. Yes.

  The first through hole 21 is in airtight communication with the reduced pressure area of the vacuum suction device 30 through the suction path 21a. The 2nd through-hole 22 and the 3rd through-hole 23 are connected to the fluid inlet / outlet ports 61 and 62 of the direction change valve 60 of 4 port pressure maintenance type via the fluid paths 22a and 23a, respectively. The fluid paths 22a and 23a are made of a vinyl tube such as polyurethane, for example.

  The four-port pressure-holding direction switching valve 60 is known and includes four fluid inlet / outlet ports 61, 62, 63, 64 and two valve bodies 65, 66. And the two valve bodies 65 and 66 are driven by the compressed fluid (for example, compressed air) supplied through the fluid inlet / outlet port 63 or 64 from the fluid supply source, and the fluid inlet / outlet port 61 communicated with the fluid paths 22a and 23a. , 62 is controlled to open and close. Examples of the fluid supply source include an air gun driven by a compressor. That is, the fluid inlet / outlet port 63 or 64 is detachably mounted with the tip nozzle of the fluid supply source.

Next, the operation will be described.
At the time of clamping to vacuum-suck the work 50 to the vacuum suction device 30, the work 50 is placed in the reduced pressure area of the vacuum suction device 30, and the fluid in the second space 11b is discharged from the second through hole 22, A fluid is pressed into the third space 12a from the third through hole 23.
Specifically, when a tip nozzle of a fluid supply source is attached to the fluid inlet / outlet port 64 of the direction switching valve 60 and the compressed fluid is supplied into the valve 60, first, the valve body 65 is driven to open, and the fluid path 22a. A fluid inlet / outlet port 61 communicating with the second through hole 22 is opened. As a result, the fluid remaining in the second space 11 b is discharged from the fluid inlet / outlet port 63 to the outside of the valve 60 via the fluid inlet / outlet port 61.

  Subsequently, the valve body 66 is driven to open, and the fluid inlet / outlet port 62 communicating with the third through hole 23 via the fluid path 23a is opened. As a result, the compressed fluid is supplied from the third through hole 23 into the third space 12a, and the first and second pistons 14 and 15 move to the right in FIG. Thereby, the first space 11 a is depressurized, and the work 50 is vacuum-sucked to the vacuum suction unit 30.

  At the time of such clamping, when the supply of compressed fluid is stopped by disconnecting the fluid supply source from the fluid inlet / outlet port 64 of the direction switching valve 60, at least the valve body 66 is driven to close, and the third space 12a. The fluid inlet / outlet port 62 communicating with the airtightly is closed. Thereby, the vacuum pressure produced | generated in the 1st space 11a can be hold | maintained for a long time.

Further, at the time of unclamping to release the vacuum suction state of the workpiece 50, the fluid in the third space 12a is discharged from the third through hole 23, and the fluid is discharged from the second through hole 22 into the second space 11b. Press fit.
Specifically, when a tip nozzle of a fluid supply source is attached to the fluid inlet / outlet port 63 of the direction switching valve 60 and the compressed fluid is supplied into the valve 60, the valve body 66 is first driven to open, and the fluid path 23a. A fluid inlet / outlet port 62 communicating with the third through hole 23 is opened. As a result, the fluid remaining in the third space 12 a is discharged out of the valve 60 from the fluid inlet / outlet port 64 via the fluid inlet / outlet port 62.

  Subsequently, the valve body 65 is driven to open, and the fluid inlet / outlet port 61 communicating with the second through hole 22 through the fluid path 22a is opened. As a result, the compressed fluid is supplied from the second through hole 22 into the second space 11b, and the first and second pistons 14 and 15 move to the left in FIG. As a result, the vacuum suction state of the workpiece 50 is released.

According to the vacuum chuck apparatus of this embodiment, the first communicating with the vacuum area of the vacuum holder 30 when the driven once by the first and second flow body pressure piston 15 in the cylinder body 10 it is possible to obtain a required vacuum pressure in the space 11a. Thus, the work suction operation can be easily performed without requiring much labor and time as in the prior art which is operated by a handle or the like. Furthermore, since it has a simple structure that does not use a handle or the like, it is possible to reduce the cost, and when the vacuum chuck device is attached to various machine tools or machine devices, it can be freely attached.

  Further, by using the pressure holding type direction switching valve 60 as the valve means, the vacuum pressure generated in the first space 11a at the time of clamping is maintained for a long time even when the fluid supply source is disconnected from the valve means. Thus, a vacuum pressure holding type vacuum chuck device is realized. This eliminates the need to operate the fluid supply source continuously in order to maintain the vacuum pressure, as in the ejector-type vacuum chuck device, and greatly reduces air consumption (power consumption) and saves energy. Realized. Furthermore, a single fluid supply source can handle a plurality of clamps, and can be used in a machine tool such as a horizontal machining center.

In addition, by using commercially available materials for the apparatus components such as the cylinder body 10 and the connecting rod 16, vacuum chuck apparatuses of a wide size of large, small, and short can be manufactured at low cost. Thereby, it becomes easy to give a necessary vacuum pressure and a vacuum capacity | capacitance with respect to the workpiece | work of various sizes with which utilization is assumed.
<Second Embodiment>

FIG. 2 is a schematic cross-sectional view showing a configuration of a vacuum chuck device according to a second embodiment of the present invention. Elements common to those in FIG.
The vacuum chuck device of the present embodiment is similar to the vacuum chuck device of the first embodiment described above, on the suction path 21a side that communicates the reduced pressure area of the vacuum suction device 30 and the first through hole 21 in an airtight manner. A first check valve 71 and a second check valve 72 are provided.

  Specifically, the first check valve 71 is interposed in the suction path 21a, allows air flowing from the vacuum adsorber 30 side to the first through hole 21 to pass therethrough, and flows air flowing in the opposite direction. Cut off. The second check valve 72 is interposed in a branch path 21b that branches from the middle part of the suction path 21a between the first check valve 71 and the first through hole 21 and opens to the outside. . Then, the air flowing in the direction from the first through hole 21 toward the branch path 21b is allowed to pass, and the air flowing in the opposite direction is blocked.

  That is, when the clamping operation of moving the first and second pistons 14 and 15 to the right in FIG. 2 is performed, the first check valve 71 is opened and the second check valve 72 is closed. When the first check valve 71 is opened, air flows from the vacuum adsorber 30 side toward the first through hole 21. Conversely, when an unclamping operation for moving the first and second pistons 14 and 15 to the left in FIG. 2 is performed, the first check valve 71 is closed and the second check valve 72 is opened. When the second check valve 72 is opened, air is discharged from the first through hole 21 to the outside of the cylinder body 10 via the branch path 21b.

According to the present embodiment, it becomes possible to replenish the vacuum pressure a plurality of times while the work 50 is adsorbed to the vacuum adsorber 30, and it is possible to respond quickly even when the vacuum pressure is reduced or the like. Can do.
<Third Embodiment>

3 and 4 are schematic cross-sectional views illustrating the configuration of the vacuum chuck device according to the third embodiment. Elements common to those in FIG.
Vacuum chuck apparatus of this embodiment, as shown in FIGS. 3 and 4, has a vacuum area of the vacuum holder 30 and the first through-hole 21 configured in communication with the straight. That is, as shown in FIG. 3, the first through-hole 21 provided in the side wall of the lateral direction of the cylinder body 10 communicates with the vacuum areas of the vacuum holder 30 immediately thereto. That shown in Figure 4, the first through-hole 21 is provided in the longitudinal direction of the side wall of the cylinder body 10 communicates with the vacuum areas of the vacuum holder 30 immediately thereto.

According to the vacuum chuck device of the present embodiment, since no piping is interposed, the vacuum suction device 30 can be integrated with the cylinder body, and the vacuum chuck device can be made compact. Also, clamping at various angles and positions is possible.
<Fourth Embodiment>

FIG. 5 is a schematic cross-sectional view showing the configuration of the vacuum chuck device according to the fourth embodiment. Elements common to those in FIG. 1 are denoted by the same reference numerals, and description thereof is omitted.
As shown in FIG. 5, the vacuum chuck device of the present embodiment includes two cylinder bodies 10 </ b> A and 10 </ b> B having the same configuration as the cylinder body 10 described above. A combined suction path 21b is provided by connecting suction paths 21a communicating with the respective first through holes 21 of the cylinder bodies 10A and 10B. The combined suction path 21b communicates with the decompression area of the vacuum adsorber 30 in an airtight manner. doing. Further, in order to communicate one 4-port pressure holding type direction switching valve 60 with each cylinder body 10A, 10B, the fluid paths 22a, 23a are branched to form branched fluid paths 22b, 23b.

In the vacuum chuck device having such a configuration, the cylinder bodies 10A and 10B cooperate to perform a clamping operation or an unclamping operation.
According to the vacuum chuck device of the present embodiment, since the vacuum capacity is greatly increased, a strong vacuum suction force can be realized, and it is possible to cope with a case where the size of the workpiece 50 is wide. .
<Fifth Embodiment>

FIG. 6 is an external perspective view of the scale jig showing the mounting form of the vacuum chuck device shown in FIG. 5. Elements common to those in FIG. FIG. 7A is a top view of the mounting form shown in FIG. 6, and FIG. 7B is a side view in the short direction.
As shown in FIGS. 6 and 7A and 7B, this vacuum chuck device is composed of a horizontal plate-like base portion 80 and a hollow two-sided scale standing upright from the base portion 80. It is configured as an scale jig having a main body 81. Vacuum holder 30 is a plate-shaped, is attached to a flat row of a plurality of screws 82 to the longitudinal side of the rectangular cross section of tombstone body 81. In the plate-like vacuum suction device 30, a sealing material 31 is provided in an annular shape along the peripheral edge portion of the mounting surface of the work 50. Further, a plurality of the screws 82 exist in the inner region of the annular sealing material 31, and an O-ring 32 is attached around the screws 82. The area surrounded by the annular sealing material 31 and the O-ring 32 is a decompression area 33. In the decompression area 33, a suction hole 34 communicating with the combined suction path 21b is opened.

Each cylinder main body 10A, 10B is accommodated in the hollow of the scale main body 81, and a four-port pressure holding type direction switching valve 60 is attached to the side surface of the short main body 81. Further, although not shown, a pressure gauge for measuring the vacuum pressure is attached to the side surface in the short direction of the scale main body 81.
According to the vacuum chuck device of such a mounting form, the entire vacuum chuck device is made compact and easy to attach to various machine tools and the like. That is, for example, it is possible to provide an scale jig that is attached to a table unit or pallet of a machine tool or the like and positions the workpiece 50. If this scale jig is attached to an automatic pallet change type machine tool such as a horizontal machining center, it will function suitably as a jig for processing thin workpieces of materials such as aluminum used in the aircraft industry, etc., and processing efficiency in that field It becomes possible to contribute to the conversion.
<Sixth Embodiment>

FIG. 8A is a top view of the scale jig showing another mounting form of the vacuum chuck device shown in FIG. 5, and FIG. 8B is a side view thereof. Elements common to FIGS. 5 and 6 are denoted by the same reference numerals, and the description thereof is omitted.
This vacuum chuck apparatus has a configuration in which vacuum chucks 30A and 30B are attached to both side surfaces in the longitudinal direction of the two-sided scale body 81 in the scale jig shown in FIG.

In this case, two systems having the same configuration as the system shown in FIG. 5 are prepared. That is, in addition to the cylinder main bodies 10A and 10B, the cylinder main bodies 10C and 10D are accommodated in the hollow two-sided scale body 81, and the direction switching of the 4-port pressure holding type is performed on both lateral sides of the scale body 81. Valves 60A and 60B are respectively attached.
Then, the vacuum adsorber 30A is operated in one system, and another vacuum adsorber 30B is operated in the other system.
<Seventh Embodiment>

FIG. 9A is a top view of the scale jig showing the mounting form of the vacuum chuck device shown in FIG. 1, FIG. 2, FIG. 3 or FIG. 4, and FIG. Elements common to those in FIG. 6 are denoted by the same reference numerals and description thereof is omitted.
As shown in FIG. 9A, the scale jig in the present embodiment is different from the scale jig shown in FIG. 6 in that the scale body is composed of a hollow four-sided scale body 81A having a square cross section. It is a point. 9A and 9B, the vacuum chucks 30A, 30B, 30C, and 30D are attached to the side surfaces of the four-sided escaping body 81A, respectively, and the four workpieces are made independent of each other. Vacuum suction.

  In this case, four systems shown in FIG. 1, FIG. 2, FIG. 3 or FIG. 4 are prepared. The four-port pressure-holding type direction switching valves 60A, 60B, 60C, 60D are attached to the upper portion of the scale body 81A as shown in FIG. 9B. Using each of these systems, the vacuum suction devices 30A, 30B, 30C, and 30D are operated independently.

The present invention is not limited to the above-described embodiments, and various modifications can be made. Examples of such modifications include the following.
In the seventh embodiment, the four workpieces are independently vacuum-sucked, but other configurations such as vacuum-sucking two workpieces as a set are possible.
The shape of the scale jig is desirably a shape that matches the workpiece, and is not limited to the shape shown in the above embodiment.

Further, although the pressure holding type is used as the valve means, when it is not necessary to hold the pressure for a long time while being disconnected from the fluid supply source, a commercially available 4-port type switching valve that is not a pressure holding type may be used. it can. Even in such a case, effects such as simplification of the work suction operation as described above can be obtained.
Further, the fluid supplied from the fluid supply source may be a liquid such as water or oil in addition to air.

10, 10A, 10B, 10C, 10D Cylinder body 11 First cylinder chamber 11a First space 11b Second space 12 Second cylinder chamber 12a Third space 12b Fourth space 13 Partition 14 First piston 15 Second piston 16 Rod 30, 30A, 30B Vacuum adsorber (adsorption means)
50 Workpiece 21 First through-hole 22 for suction Second through-hole 22a, 23a for fluid supply / discharge Fluid path 23 Third through-hole 24 for fluid supply / discharge Fourth through-hole 71 for ventilation First check valve 72 Second check valve 80 Horizontal plate-shaped base part 81 Equal body

Claims (5)

A cylinder body (10) in which a first cylinder chamber (11) and a second cylinder chamber (12) are formed via a partition wall (13);
The first cylinder chamber is equipped with a first reciprocating motion in the axial direction so as to be kept airtight with a cylinder inner wall surface (10a) extending in the axial direction of the first cylinder chamber. A piston (14);
A second cylinder chamber is provided so as to be capable of reciprocating in the axial direction so as to maintain airtightness with a cylinder inner wall surface (10b) extending in the axial direction of the second cylinder chamber. A piston (15);
A rod (16) that penetrates the partition wall in an airtight manner and connects the first piston (14) and the second piston (15);
Suction means (30) for placing the workpiece (50) and vacuum-sucking ;
A first space (11a) and a second space (11b) formed in the first cylinder chamber by the first piston ;
A first through hole (21) for suction penetrating the cylinder wall of the first space;
A second through hole (22) for fluid supply and discharge penetrating the cylinder wall of the second space;
A third space (12a) and a fourth space (12b) formed in the second cylinder chamber by the second piston ;
A third through hole (23) for fluid supply and discharge penetrating the cylinder wall of the third space;
And a fourth through hole for ventilation (24) penetrating the cylinder wall of the fourth space, communicates the reduced pressure area and said first through hole of the suction means in an airtight manner,
During clamping in which the workpiece is vacuum-sucked by the suction means, the fluid in the second space is discharged from the second through-hole, and the fluid is discharged from the third through-hole into the third space. When unclamping to release the vacuum suction state of the workpiece, the fluid in the third space is discharged from the third through hole, and the second through hole is used for discharging the second through the second through hole. Press the fluid into the space ,
When the fluid supply source for supplying the fluid is detachably mounted and the supply of the fluid from the fluid supply source for supplying the fluid into the third space from the third through hole is stopped during the clamping, at least the fluid supply source and the third through hole vacuum chuck apparatus Ru provided with valve means (60) for closing the fluid path communicating (23a) airtightly. A first check valve (71) that is interposed in a suction path (21a) that communicates the pressure reducing area of the suction means and the first through hole in an airtight manner and opens during the clamping and closes during the unclamping. )When,
A branch path (21b) that branches from an intermediate portion of the suction path between the first check valve and the first through-hole and opens to the outside, closes at the time of clamping, and The vacuum chuck device according to claim 1 , further comprising a second check valve (72) that opens at the time of clamping. It said suction means is mounted on said cylinder body, the vacuum chuck device according to the reduced pressure area and said first through hole of the suction means to claim 1, characterized in that communicating with the straight. A plurality of cylinder bodies are provided,
A combined suction path (21b), which is a combination of suction paths communicating with the individual first through holes of the cylinder bodies (10A, 10B), is hermetically communicated with the decompression area of the suction means,
The vacuum chuck device according to claim 1 , wherein the cylinder main bodies cooperate to perform the clamping or the unclamping. A horizontal plate-shaped base portion (80), and a hollow equal body (81) standing vertically from the base portion,
The suction means is mounted on the flat row on the sides of the angle plate body form a plate, said cylinder body, said angle plate any one of claims 1 to 4, characterized in that accommodated in the hollow body The vacuum chuck device according to item.

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