JP5921152B2 - Display method, monitoring apparatus, substrate processing system, substrate processing apparatus, and program - Google Patents

Description

  The present invention relates to a method for monitoring an operating state of a substrate processing apparatus, an apparatus for monitoring the operating state of a substrate processing apparatus, and a substrate processing system including the apparatus and the substrate processing apparatus.

  In the substrate processing apparatus, the substrate processing is performed while changing processing conditions such as the heater temperature, the pressure in the processing chamber, and the gas flow rate for each step of the substrate processing step based on the process recipe.

  In the substrate processing apparatus, resource consumption such as electric power and gas becomes large when performing substrate processing. Therefore, in the idle period (non-production) from the completion of the immediately preceding substrate processing to the start of the next substrate processing, the substrate processing apparatus, for example, supplies power to devices with high power consumption such as exhaust pumps and heaters. The operation state was switched to a reduced supply amount. Thus, energy saving is achieved by performing operation while saving energy consumption during the idle period.

  Conventional substrate processing apparatuses are switched to eco-operation when the idle period is reached. Here, eco-driving refers to a state where the substrate processing apparatus is operating with reduced resource consumption. For example, it means a state in which the substrate processing apparatus is operating while suppressing power consumption, gas consumption, and the like. However, even if energy consumption during non-production is reduced, energy saving is not necessarily realized comprehensively because a great deal of energy and resources are required during substrate processing. For example, there is a desire to suppress wasteful consumption of electric power, gas, and the like with the recent reduction in substrate processing temperature and reduction in film thickness. On the other hand, the method of switching from normal operation to eco-drive has been performed manually. For this reason, the worker (user) sometimes fails to switch the substrate processing apparatus to eco-operation due to forgetting to set or an input error.

  The present invention includes an eco driving monitoring method capable of preventing a loss of switching to eco driving, an eco driving monitoring device that monitors whether a substrate processing apparatus is eco driving, a substrate processing device, and an eco driving monitoring device. An object is to provide a substrate processing system.

  According to one aspect of the present invention, a data value (data value) corresponding to a data type to be determined whether or not the vehicle is eco-driving, and a boundary value indicating a boundary that can be taken by data corresponding to the data type And an eco-driving monitoring method for executing a predetermined operation in accordance with a result of comparing the data value and the boundary value based on the determination condition. Provided.

According to another aspect of the present invention, a data type to be determined whether or not the vehicle is eco-friendly, a predetermined determination condition set in advance, and a data value corresponding to the data type satisfy the determination condition. A setting means for receiving an input of a setting of a predetermined operation performed in accordance with a condition value to be compared when determining whether or not, and a result of comparing the data value and the condition value based on the determination condition; An eco-driving monitoring apparatus is provided that includes a determination unit that compares the data value with the boundary value based on the determination condition and determines whether the data value satisfies the determination condition.
Furthermore, according to another aspect of the present invention, a substrate processing system including a substrate processing apparatus and an ecological driving monitoring apparatus is provided.

  According to the present invention, it is possible to prevent a loss of switching to eco-driving by enabling the setting on the operation screen for the data type to be determined as to whether or not eco-driving, and furthermore, eco-driving Since the operating state can be displayed on the operation screen, it is possible to monitor whether or not the substrate processing apparatus is in an eco-operation. Further, by switching to eco-operation, it is possible to save energy and reduce the running cost of the substrate processing apparatus.

1 is a schematic configuration diagram of a substrate processing system according to a first embodiment of the present invention. 1 is a block configuration diagram of a substrate processing system according to a first embodiment of the present invention. It is a figure which illustrates the list of the setting content of eco-check conditions. It is a figure which illustrates the screen composition displayed on a group management device. It is a figure which illustrates the detailed screen of the determination result which concerns on eco-drive. It is a figure which illustrates the trace graph on which the heater temperature and the eco level were displayed by overlapping. 1 is a perspective view of a substrate processing apparatus according to a first embodiment of the present invention. 1 is a side perspective view of a substrate processing apparatus according to a first embodiment of the present invention. 1 is a longitudinal sectional view of a processing furnace of a substrate processing apparatus according to a first embodiment of the present invention. It is a figure which illustrates the list of the setting content of the eco-check conditions based on the 2nd Embodiment of this invention. It is a schematic block diagram of the substrate processing apparatus which concerns on the 2nd Embodiment of this invention, and the auxiliary power generation system connected to a substrate processing apparatus. It is a 1st illustration example of the switching flow of the electric power supply line by the switching control part which concerns on the 2nd Embodiment of this invention. It is a 2nd example of a switching flow of the electric power supply line by the switching control part which concerns on the 2nd Embodiment of this invention. It is a 3rd example of illustration of the switching flow of the electric power supply line by the switching control part which concerns on the 2nd Embodiment of this invention. It is a 4th example of a switching flow of the electric power supply line by the switching control part which concerns on the 2nd Embodiment of this invention. It is a 5th example of a switching flow of the electric power supply line by the switching control part which concerns on the 2nd Embodiment of this invention. It is a figure which illustrates the list of the setting content of the eco check condition which concerns on the 3rd Embodiment of this invention. It is a block block diagram of the substrate processing system which concerns on the 3rd Embodiment of this invention. It is a flowchart explaining switching of the electric power supply source with respect to the substrate processing apparatus which concerns on the 3rd Embodiment of this invention.

<First Embodiment of the Present Invention>
The first embodiment of the present invention will be described below.

(1) Configuration of Substrate Processing System First, the configuration of the substrate processing system according to the first embodiment of the present invention will be described with reference to FIG. FIG. 1 is a schematic configuration diagram of a substrate processing system according to a first embodiment of the present invention.

  As shown in FIG. 1, the substrate processing system according to this embodiment includes at least one substrate processing apparatus that repeatedly executes a substrate processing process based on a process recipe having a plurality of main steps in which processing procedures and processing conditions are defined. 100 and an eco-operation monitoring apparatus connected so as to exchange data with the substrate processing apparatus 100, that is, a group management apparatus 500 as a host management apparatus. The substrate processing apparatus 100 and the group management apparatus 500 are connected by a network 400 such as a local line (LAN) or a wide area line (WAN).

(2) Configuration of Substrate Processing Apparatus Next, the configuration of the substrate processing apparatus 100 according to the present embodiment will be described with reference to FIGS. FIG. 7 is a perspective view of the substrate processing apparatus according to the first embodiment of the present invention. FIG. 8 is a side perspective view of the substrate processing apparatus according to the first embodiment of the present invention. The substrate processing apparatus 100 according to the present embodiment is configured as a vertical apparatus that performs oxidation, diffusion processing, CVD processing, and the like on a substrate such as a wafer.

  As shown in FIGS. 7 and 8, the substrate processing apparatus 100 according to the present embodiment includes a housing 111 configured as a pressure vessel. A front maintenance port 103 serving as an opening provided for maintenance is provided in the front front portion of the front wall 111a of the casing 111. The front maintenance port 103 is provided with a pair of front maintenance doors 104 that open and close the front maintenance port 103. A pod (substrate container) 110 containing a wafer (substrate) 200 such as silicon is used as a carrier for transporting the wafer 200 into and out of the housing 111.

  A pod loading / unloading port (substrate container loading / unloading port) 112 is opened on the front wall 111 a of the housing 111 so as to communicate between the inside and the outside of the housing 111. The pod loading / unloading port 112 is opened and closed by a front shutter (substrate container loading / unloading port opening / closing mechanism) 113. A load port (substrate container delivery table) 114 is installed on the front front side of the pod loading / unloading port 112. On the load port 114, the pod 110 is placed and aligned. The pod 110 is configured to be transferred onto the load port 114 by an in-process transfer device (not shown).

  A rotary pod shelf (substrate container mounting shelf) 105 is installed at an upper portion of the housing 111 at a substantially central portion in the front-rear direction. A plurality of pods 110 are stored on the rotary pod shelf 105. The rotary pod shelf 105 includes a support column 116 that is erected vertically and intermittently rotates in a horizontal plane, and a plurality of shelf plates (substrate container mounting table) that are radially supported by the support column 116 at each of the upper, middle, and lower levels. 117). The plurality of shelf plates 117 are configured to hold a plurality of pods 110 in a state where they are mounted.

  A pod transfer device (substrate container transfer device) 118 is installed between the load port 114 and the rotary pod shelf 105 in the housing 111. The pod transfer device 118 includes a pod elevator (substrate container lifting mechanism) 118a that can be moved up and down while holding the pod 110, and a pod transfer mechanism (substrate container transfer mechanism) 118b as a transfer mechanism. The pod transfer device 118 moves the pod 110 between the load port 114, the rotary pod shelf 105, and the pod opener (substrate container lid opening / closing mechanism) 121 by the continuous operation of the pod elevator 118a and the pod transfer mechanism 118b. It is comprised so that it may convey mutually.

  A sub-housing 119 is provided at a lower portion in the housing 111 from a substantially central portion in the front-rear direction in the housing 111 to a rear end. A pair of wafer loading / unloading ports (substrate loading / unloading ports) 120 that transfer the wafer 200 into and out of the sub-casing 119 are provided on the front wall 119a of the sub-casing 119 so as to be arranged vertically in two stages. Yes. Pod openers 121 are respectively installed at the upper and lower wafer loading / unloading ports 120.

  Each pod opener 121 includes a pair of mounting bases 122 on which the pod 110 is mounted, and a cap attaching / detaching mechanism (lid attaching / detaching mechanism) 123 that attaches / detaches a cap (cover) of the pod 110. The pod opener 121 is configured to open and close the wafer loading / unloading port of the pod 110 by attaching / detaching the cap of the pod 110 placed on the placing table 122 by the cap attaching / detaching mechanism 123.

  In the sub casing 119, a transfer chamber 124 that is fluidly isolated from a space in which the pod transfer device 118, the rotary pod shelf 105, and the like are installed is configured. A wafer transfer mechanism (substrate transfer mechanism) 125 is installed in the front region of the transfer chamber 124. The wafer transfer mechanism 125 includes a wafer transfer device (substrate transfer device) 125a that can rotate or linearly move the wafer 200 in the horizontal direction, and a wafer transfer device elevator (substrate transfer device) that moves the wafer transfer device 125a up and down. (Elevating mechanism) 125b. As shown in FIG. 7, the wafer transfer apparatus elevator 125 b is installed between the right end of the front area of the transfer chamber 124 and the right end of the casing 111 of the sub casing 119. The wafer transfer device 125 a includes a tweezer (substrate holding body) 125 c as a mounting portion for the wafer 200. By continuous operation of the wafer transfer device elevator 125b and the wafer transfer device 125a, the wafer 200 can be loaded (charged) and unloaded (discharged) from the boat (substrate holder) 217. It is configured.

  In the rear region of the transfer chamber 124, a standby unit 126 that houses and waits for the boat 217 is configured. A processing furnace 202 serving as a substrate processing system is provided above the standby unit 126. The lower end portion of the processing furnace 202 is configured to be opened and closed by a furnace port shutter (furnace port opening / closing mechanism) 147.

  As shown in FIG. 7, a boat elevator (substrate holder lifting mechanism) 115 for raising and lowering the boat 217 is installed between the right end portion of the standby portion 126 and the right end portion of the casing 111 of the sub-housing 119. ing. An arm 128 as a connecting tool is connected to the elevator platform of the boat elevator 115. A seal cap 219 serving as a lid is horizontally installed on the arm 128. The seal cap 219 is configured to support the boat 217 vertically and to close the lower end portion of the processing furnace 202.

  The boat 217 includes a plurality of holding members. The boat 217 is configured to hold a plurality of wafers 200 (for example, about 50 to 125 wafers) horizontally in a state where the centers are aligned in the vertical direction.

  As shown in FIG. 7, a clean atmosphere or an inert gas, clean air 133, is supplied to the left end of the transfer chamber 124 opposite to the wafer transfer device elevator 125b side and the boat elevator 115 side. A clean unit 134 composed of a supply fan and a dustproof filter is installed. Although not shown, a notch alignment device as a substrate alignment device for aligning the circumferential position of the wafer is installed between the wafer transfer device 125a and the clean unit 134.

  The clean air 133 blown out from the clean unit 134 flows around the boat 217 in the notch alignment device, wafer transfer device 125a, and standby unit 126 (not shown), and is then sucked in by a duct (not shown) to the outside of the casing 111. Or is circulated to the primary side (supply side) that is the suction side of the clean unit 134 and is blown out again into the transfer chamber 124 by the clean unit 134.

(3) Operation of Substrate Processing Apparatus Next, the operation of the substrate processing apparatus 100 according to the present embodiment will be described with reference to FIGS.

  As shown in FIGS. 7 and 8, when the pod 110 is supplied to the load port 114, the pod loading / unloading port 112 is opened by the front shutter 113. Then, the pod 110 on the load port 114 is carried into the housing 111 from the pod carry-in / out port 112 by the pod carrying device 118.

  The pod 110 carried into the housing 111 is automatically transported and temporarily stored on the shelf plate 117 of the rotary pod shelf 105 by the pod transport device 118, and then one of the pods 110 from the shelf plate 117. It is transferred onto the mounting table 122 of the pod opener 121. Note that the pod 110 carried into the housing 111 may be directly transferred onto the mounting table 122 of the pod opener 121 by the pod transfer device 118. At this time, the wafer loading / unloading port 120 of the pod opener 121 is closed by the cap attaching / detaching mechanism 123, and clean air 133 is circulated and filled in the transfer chamber 124. For example, when the transfer chamber 124 is filled with nitrogen gas as clean air 133, the oxygen concentration in the transfer chamber 124 becomes, for example, 20 ppm or less, which is much lower than the oxygen concentration in the casing 111 that is an atmospheric atmosphere. It is set to be.

  The pod 110 mounted on the mounting table 122 is pressed against the opening edge of the wafer loading / unloading port 120 in the front wall 119a of the sub-housing 119, and the cap is removed by the cap attaching / detaching mechanism 123. Then, the wafer loading / unloading port is opened. Thereafter, the wafer 200 is picked up from the pod 110 through the wafer loading / unloading port by the tweezer 125c of the wafer transfer device 125a, aligned in the notch alignment device, and then in the standby unit 126 at the rear of the transfer chamber 124. Are loaded into the boat 217 (charging). The wafer transfer device 125 a loaded with the wafer 200 in the boat 217 returns to the pod 110 and loads the next wafer 200 into the boat 217.

  During the loading operation of the wafer into the boat 217 by the wafer transfer mechanism 125 in the one (upper or lower) pod opener 121, another pod is placed on the mounting table 122 of the other (lower or upper) pod opener 121. 110 is transferred from the rotary pod shelf 105 by the pod transfer device 118 and transferred, and the opening operation of the pod 110 by the pod opener 121 is simultaneously performed.

  When a predetermined number of wafers 200 are loaded into the boat 217, the lower end portion of the processing furnace 202 closed by the furnace port shutter 147 is opened by the furnace port shutter 147. Subsequently, the boat 217 holding the wafer 200 group is loaded into the processing furnace 202 when the seal cap 219 is lifted by the boat elevator 115.

  After loading, arbitrary processing is performed on the wafer 200 in the processing furnace 202. After the processing, except for the wafer alignment process in the notch alignment apparatus, the boat 217 storing the processed wafers 200 is unloaded from the processing furnace 202 in a procedure almost opposite to the above-described procedure, and the processed wafers 200 are removed. The stored pod 110 is carried out of the casing 111.

(4) Configuration of Processing Furnace Next, the configuration of the processing furnace 202 according to the present embodiment will be described with reference to FIG. FIG. 9 is a longitudinal sectional view of the processing furnace 202 of the substrate processing apparatus 100 according to the first embodiment of the present invention.

As shown in FIG. 9, the processing furnace 202 includes a process tube 203 as a reaction tube. The process tube 203 includes an inner tube 204 as an internal reaction tube and an outer tube 205 as an external reaction tube provided on the outside thereof. The inner tube 204 is made of a heat-resistant material such as quartz (SiO ₂ ) or silicon carbide (SiC), and is formed in a cylindrical shape having upper and lower ends opened. A processing chamber 201 for processing a wafer 200 as a substrate is formed in a hollow cylindrical portion in the inner tube 204. The processing chamber 201 is configured to accommodate a boat 217 described later. The outer tube 205 is provided concentrically with the inner tube 204. The outer tube 205 has an inner diameter larger than the outer diameter of the inner tube 204, is formed in a cylindrical shape with the upper end closed and the lower end opened. The outer tube 205 is made of a heat resistant material such as quartz or silicon carbide.

  A heater 206 as a heating mechanism is provided outside the process tube 203 so as to surround the side wall surface of the process tube 203. The heater 206 has a cylindrical shape and is vertically installed by being supported by a heater base 251 as a holding plate.

  A manifold 209 is disposed below the outer tube 205 so as to be concentric with the outer tube 205. The manifold 209 is made of, for example, stainless steel and is formed in a cylindrical shape with an upper end and a lower end opened. The manifold 209 is engaged with the lower end portion of the inner tube 204 and the lower end portion of the outer tube 205, and is provided so as to support them. An O-ring 220a as a seal member is provided between the manifold 209 and the outer tube 205. By supporting the manifold 209 on the heater base 251, the process tube 203 is installed vertically. A reaction vessel is formed by the process tube 203 and the manifold 209.

  A nozzle 230 as a gas introduction unit is connected to a seal cap 219 described later so as to communicate with the inside of the processing chamber 201. The downstream end of the gas supply pipe 232 is connected to the upstream end of the nozzle 230. On the upstream side of the gas supply pipe 232 (on the side opposite to the side connected to the nozzle 230), a processing gas supply source, an inert gas supply source, etc. (not shown) are connected via an MFC (mass flow controller) 241 as a gas flow rate controller. Is connected. A gas flow rate control unit 235 is electrically connected to the MFC 241. The gas flow rate control unit 235 is configured to control the MFC 241 so that the flow rate of the gas supplied into the processing chamber 201 becomes a desired flow rate at a desired timing.

  The manifold 209 is provided with an exhaust pipe 231 that exhausts the atmosphere in the processing chamber 201. The exhaust pipe 231 is disposed at the lower end portion of the cylindrical space 250 formed by the gap between the inner tube 204 and the outer tube 205 and communicates with the cylindrical space 250. On the downstream side of the exhaust pipe 231 (on the side opposite to the connection side with the manifold 209), a pressure sensor 245 as a pressure detector, for example, a pressure adjusting device 242 configured as an APC (Auto Pressure Controller), a vacuum such as a vacuum pump, etc. The exhaust device 246 is connected in order from the upstream side. A pressure controller 236 is electrically connected to the pressure adjusting device 242 and the pressure sensor 245. The pressure control unit 236 is configured to control the pressure adjustment device 242 so that the pressure in the processing chamber 201 becomes a desired pressure at a desired timing based on the pressure value detected by the pressure sensor 245. ing.

  Below the manifold 209, a seal cap 219 is provided as a furnace port lid that can airtightly close the lower end opening of the manifold 209. The seal cap 219 is brought into contact with the lower end of the manifold 209 from the lower side in the vertical direction. The seal cap 219 is made of a metal such as stainless steel and has a disk shape. On the upper surface of the seal cap 219, an O-ring 220b is provided as a seal member that comes into contact with the lower end of the manifold 209. A rotation mechanism 254 for rotating the boat is installed near the center of the seal cap 219 and on the side opposite to the processing chamber 201. The rotation shaft 255 of the rotation mechanism 254 passes through the seal cap 219 and supports the boat 217 from below. The rotation mechanism 254 is configured to rotate the wafer 200 by rotating the boat 217. The seal cap 219 is configured to be lifted and lowered in the vertical direction by a boat elevator 115 as a lifting mechanism vertically installed outside the process tube 203. By moving the seal cap 219 up and down, the boat 217 can be transferred into and out of the processing chamber 201. A mechanical control unit 238 is electrically connected to the rotation mechanism 254 and the boat elevator 115. The mechanical control unit 238 is configured to control the rotation mechanism 254 and the boat elevator 115 so as to perform a desired operation at a desired timing.

  As described above, the boat 217 as a substrate holder is configured to hold a plurality of wafers 200 in a multi-stage by aligning the wafers 200 in a horizontal posture and in a state where their centers are aligned with each other. The boat 217 is made of a heat resistant material such as quartz or silicon carbide. In the lower part of the boat 217, a plurality of heat insulating plates 216 as a disk-shaped heat insulating member made of a heat resistant material such as quartz or silicon carbide are arranged in multiple stages in a horizontal posture. It is configured to be difficult to be transmitted to the manifold 209 side.

  A temperature sensor 263 is installed in the process tube 203 as a temperature detector. A temperature controller 237 is electrically connected to the heater 206 and the temperature sensor 263. Based on the temperature information detected by the temperature sensor 263, the temperature control unit 237 adjusts the power supply to the heater 206 so that the temperature in the processing chamber 201 becomes a desired temperature distribution at a desired timing. It is configured.

  The gas flow rate control unit 235, the pressure control unit 236, the mechanical control unit 238, and the temperature control unit 237 are electrically connected to a display device control unit 239 as a main control unit that controls the entire substrate processing apparatus (hereinafter, referred to as “the control unit 239”). (The gas flow rate control unit 235, the pressure control unit 236, and the temperature control unit 237 are also called I / O control units). The gas flow rate control unit 235, the pressure control unit 236, the mechanical control unit 238, the temperature control unit 237, and the display device control unit 239 as a main control unit are configured as a substrate processing apparatus controller 240. The configuration and operation of the substrate processing apparatus controller 240 will be described later.

(5) Operation of Processing Furnace Subsequently, as one step of the semiconductor device manufacturing process, a method of forming a thin film on the wafer 200 by the CVD method using the processing furnace 202 according to the above configuration will be described with reference to FIG. explain. In the following description, the operation of each part constituting the substrate processing apparatus 100 is controlled by the substrate processing apparatus controller 240.

  When a plurality of wafers 200 are loaded into the boat 217 (wafer charge), as shown in FIG. 9, the boat 217 holding the plurality of wafers 200 is lifted by the boat elevator 115 and loaded into the processing chamber 201. (Boat loading). In this state, the seal cap 219 seals the lower end of the manifold 209 via the O-ring 220b.

  The processing chamber 201 is evacuated by the evacuation device 246 so that a desired pressure (degree of vacuum) is obtained. At this time, based on the pressure value measured by the pressure sensor 245, the pressure adjusting device 242 (the valve opening) is feedback-controlled. In addition, the heater 206 is heated so that the inside of the processing chamber 201 has a desired temperature. At this time, the energization amount to the heater 206 is feedback controlled based on the temperature value detected by the temperature sensor 263. Subsequently, the boat 217 and the wafers 200 are rotated by the rotation mechanism 254.

  Next, the gas supplied from the processing gas supply source and controlled to have a desired flow rate by the MFC 241 flows through the gas supply pipe 232 and is introduced into the processing chamber 201 from the nozzle 230. The introduced gas rises in the processing chamber 201, flows out from the upper end opening of the inner tube 204 into the cylindrical space 250, and is exhausted from the exhaust pipe 231. The gas comes into contact with the surface of the wafer 200 when passing through the processing chamber 201, and at this time, a thin film is deposited on the surface of the wafer 200 by a thermal CVD reaction.

  When a preset processing time has passed, an inert gas is supplied from an inert gas supply source, the inside of the processing chamber 201 is replaced with an inert gas, and the pressure in the processing chamber 201 is returned to normal pressure. .

  Thereafter, the seal cap 219 is lowered by the boat elevator 115 to open the lower end of the manifold 209, and the boat 217 holding the processed wafer 200 is carried out from the lower end of the manifold 209 to the outside of the process tube 203 (boat unloading). Loading). Thereafter, the processed wafer 200 is taken out from the boat 217 and stored in the pod 110 (wafer discharge).

(6) Configuration of Substrate Processing Apparatus Controller Next, the configuration of the substrate processing apparatus controller 240 according to the present embodiment will be described with reference to FIG. FIG. 2 is a block diagram of the substrate processing system according to the first embodiment of the present invention.

  The substrate processing apparatus controller 240 can exchange data with the I / O control unit (gas flow rate control unit 235, pressure control unit 236, temperature control unit 237) that controls the processing furnace 202, and the I / O control unit. And a processing control unit 239a connected as described above. The process control unit 239a controls the operation of the process furnace 202 via the I / O control unit, and acquires (reads out) monitor data indicating the state (temperature, gas flow rate, pressure, etc.) of the process furnace 202. It is configured.

  The substrate processing apparatus controller 240 includes a display device control unit 239 as a main control unit connected to the processing control unit 239a so as to exchange data. The display device control unit 239 is connected to a data display unit 240a such as a display and an input unit 240b such as a keyboard. The display device control unit 239 receives an input (input of an operation command or the like) from the input unit 240b by an operator, and displays a status display screen or an operation input reception screen of the substrate processing apparatus 100 on the data display unit 240a. It is configured.

  Further, the substrate processing apparatus controller 240 is connected to the display device control unit 239 as the main control unit so that data can be exchanged, and is connected to the mechanical control unit 238 so that data can be exchanged. And a mechanical mechanism I / O 238a. Each part (for example, pod elevator 118a, pod transfer mechanism 118b, pod opener 121, wafer transfer mechanism 125, boat elevator 115, etc.) constituting the substrate processing apparatus 100 is connected to the mechanical mechanism I / O 238a. The mechanical control unit 238 controls the operation of each part constituting the substrate processing apparatus 100 via the mechanical mechanism I / O 238a, and the state of each part constituting the substrate processing apparatus 100 (for example, position, open / closed state, and operation). Monitor data indicating whether the state is a wait state or the like) is acquired (read out). Further, the substrate processing apparatus controller 240 is configured to generate monitor data to which an apparatus ID, monitor data generation time, recipe ID, elapsed time, and the like are added.

 The monitor data may be an arbitrary period from when the wafer 200 is loaded into the boat 217 of the substrate processing apparatus 100 until it is detached from the boat 217, an arbitrary period from the start to the end of the process recipe related to the processing of the wafer 200, or a process Collected for a predetermined period in the recipe. The monitor data is also collected during an idle period after the previous substrate processing is completed and before the next substrate processing is started.

  Further, the substrate processing apparatus controller 240 includes a data holding unit 239e connected to a display device control unit 239 as a main control unit. The data holding unit 239e includes a program for realizing various functions in the substrate processing apparatus controller 240, a process recipe in which processing procedures and processing conditions of the substrate processing process executed in the processing furnace 202 are defined, and monitor data Etc. are stored (held). In the present invention, the data holding unit 239e stores at least a control program for executing a process recipe and a collection program for collecting the monitor data, as well as at least an eco driving monitoring program and a power storage monitoring program to be described later. There is a case.

  Further, the substrate processing apparatus controller 240 includes a communication control unit 239b connected to a display device control unit 239 as a main control unit. The communication control unit 239b is connected to the group management device 500 (described later) via the network 400 so that data can be exchanged. The communication control unit 239b is configured to receive monitor data generated by the substrate processing apparatus controller 240 and transmit the monitor data to the group management apparatus 500.

  The substrate processing apparatus controller 240 is also configured to be able to transmit the generated monitor data directly to the group management apparatus 500 without going through the communication control unit 239b.

(7) Configuration of Group Management Device Subsequently, the configuration of the ecological operation monitoring device according to the present embodiment configured to exchange data with the substrate processing device 100 described above, that is, the configuration of the group management device 500 as a host management device. This will be described with reference to FIGS. FIG. 3 is a diagram illustrating a list of setting contents of the eco check condition. FIG. 4 is a diagram illustrating a screen configuration displayed on the group management apparatus. FIG. 5 is a diagram illustrating a detailed screen of a determination result related to eco-driving. FIG. 6 is a diagram illustrating a trace graph in which the heater temperature and the eco level are displayed in an overlapping manner.

  The group management device 500 is a control unit 501 configured as a central processing unit (CPU), a memory (not shown) having a shared memory 502 area therein, and a storage unit configured as a storage device such as an HDD. A data holding unit (storage unit) 503; a data display unit 505 configured as a display unit such as a display device; an input unit 506 such as a keyboard; and a communication control unit (communication unit) 504 as a communication unit. It is configured as a computer. The memory, the data holding unit 503, the data display unit 505, the input unit 506, and the communication control unit 504 are configured to exchange data with the control unit 501 via an internal bus or the like. The control unit 501 has a clock function (not shown).

  The data holding unit (storage unit) 503 stores a plurality of unillustrated group management programs (programs executed by the group management device 500) including the eco-driving monitoring program. Then, the eco-driving monitoring program is read from the data holding unit 503 and executed by the control unit 501, thereby realizing various functions such as a setting unit 510, a determination unit 520, and an execution unit 530 described later. Further, a power storage monitoring program to be described later may be stored in the data holding unit 503 as necessary.

  The communication control unit 504 serving as a communication unit is connected to the communication control unit 239b of the substrate processing apparatus controller 240. The communication control unit 504 is configured to receive monitor data from the substrate processing apparatus 100 and pass it to the shared memory 502.

  The control unit 501 converts the monitor data read from the shared memory 502 into a database in association with the apparatus ID that identifies the substrate processing apparatus 100 that is the monitor data generation source, the monitor data generation time, the recipe ID, the elapsed time, and the like. It is configured to be transferred to the data holding unit 503 and stored as possible.

  Further, the control unit 501 is configured to pass the monitor data to be stored in the data holding unit 503 to the data display unit 505 together with the device ID, recipe ID, elapsed time, and the like so that the data display unit 505 displays the monitor data. .

  In the present embodiment, the control unit 501 searches the data holding unit 503 based on search conditions such as a device ID, monitor data generation time, recipe ID, and elapsed time input from the input unit 506. The monitor data corresponding to the condition is read from the data holding unit 503 and displayed on the data display unit 505.

(Setting method)
In addition, the setting unit 510 included in the control unit 501 designates from the monitor data corresponding to the data type to be determined as to whether or not the vehicle is eco-friendly, the determination condition related to the determination as to whether or not the vehicle is eco-friendly, and the data type. Setting of a condition value to be compared when determining whether or not a data value to be satisfied satisfies a determination condition, and a predetermined operation (action) performed according to a result of comparison of the data value based on the determination condition Is configured to accept input. In the present embodiment, the setting means 510 is configured to be displayed on the data display unit 505 as shown in FIG. As shown in FIG. 3, the setting means 510 has an “ID” for identifying each eco check condition, a “condition name” for displaying the name of the eco check condition, a “data type”, a “judgment condition”, and a “condition value”. ”And“ predetermined operation ”are set using the input unit 506. Each item of the input eco-check condition is stored in the data holding unit 503 in association with each other for each eco-check condition.

Examples of the “predetermined operation” described above include the following. As a first example, a warning indicating that the vehicle is not eco-driving (non-eco-driving) is displayed on the data display unit 505. As a second example, a mail is transmitted to the administrator PC 560 of the substrate processing system via the mail server 550 shown in FIG. As a third example, various parameter setting values defined in the process recipe are changed. Or the operation | movement which combined these 1st-3rd examples in multiple numbers is performed.

  The setting unit 510 is configured to set a check index as to whether or not to execute the determination for each eco-check condition. Specifically, when the check index is set to “valid” like the eco check conditions indicated by IDs “001” and “003” shown in FIG. 3, the corresponding eco check is executed. Is done. On the other hand, when the check index is set to “invalid” like the eco check condition indicated by the ID “002”, the corresponding eco check is not executed. According to the present embodiment, the eco-check conditions are all set to “-”, but the form is not particularly limited.

  Here, a specific example of the eco-check condition shown in FIG. 3 will be described below. First, “idle heater output check” with ID “001” will be described. In the “idle heater output check”, the output of the heater 206 is set to a predetermined determination condition in an idle period (non-production) after the substrate processing apparatus 100 completes the previous substrate processing and starts the next substrate processing. It is checked whether or not In “idle heater output check”, monitor data corresponding to “heater output” defined in “data type” is specified as a determination target data value as a determination target of eco-drive. “Under the condition value during the idle period” defined as the “determination condition” stipulates that the output (data value) of the heater 206 during the idle period is less than the condition value as an eco-driving condition. “90%” defined as “condition value” is a value that is compared with the data value when actually checking whether or not the vehicle is eco-friendly. That is, in the idle heater output check, it is determined whether or not the heater output during the idle period is less than 90%.

  Next, “always gas flow check” with ID “003” will be described. In the “always gas flow rate check”, when the substrate processing apparatus 100 is operating, it is checked whether or not the gas flow rate to the processing chamber 201 satisfies a predetermined determination condition. In the “always gas flow rate check”, monitor data corresponding to “gas flow rate” defined in “data type” is designated as a determination target data value as a determination target for eco-drive. “Always, less than the condition value” defined as “judgment condition” is defined as an eco-run condition that the gas flow rate to the processing chamber 201 is less than the condition value when the substrate processing apparatus is operating. Yes. Since the “condition value” is defined as “20L”, the “always gas flow check” always determines whether or not the gas flow rate into the processing chamber 201 is less than 20L per predetermined period.

  Further, in the eco check condition indicated by the ID “002”, the check index is set to “invalid”. Therefore, the detailed contents of the eco check condition are not displayed here. In this way, by configuring so that settings are not input, it is possible to suppress erroneous settings of workers.

(Judgment means)
The determination unit 520 provided in the control unit 501 is configured to designate a data value corresponding to the data type for each eco-check condition among the monitor data stored in the data holding unit 503. Then, the determination unit 520 is configured to compare the specified data value with the condition value and determine whether the data value satisfies the determination condition.

  Further, the determination unit 520 is not only in the eco-operation state at the time when the monitor data is acquired but also in the eco-operation state based on a plurality of determination results within a predetermined period regarding the same eco-check condition. Whether or not it can be determined over time.

  The determination unit 520 is configured to store at least the latest two determination results in the data holding unit 503 for the determination results related to the same eco-check condition. Further, the control unit 501 calculates an eco-driving index in which the eco-driving degree in the substrate processing apparatus 100 is quantified in the range of 0% to 100% based on the determination results of the plurality of eco-check conditions. It is configured as follows. The eco driving index indicates, for example, that eco driving is progressing as the numerical value increases (approaching 100%).

(Execution means)
The execution means 530 is configured to execute the predetermined operation described above according to the determination result obtained by determining the data value based on the predetermined determination condition. For example, when the data value does not satisfy the determination condition, the execution unit 530 is configured to execute a predetermined operation shown in FIG.

(Display means)
The data display unit 505 serving as a display unit is configured to display an icon indicating a determination result whether or not the data value satisfies the determination condition. By the icon, the data display unit 505 identifies whether the substrate processing apparatus 100 is in eco-operation or non-eco-operation.

  Here, the screen configuration of the data display unit 505 will be briefly described with an example. As shown in FIG. 4, the data display unit 505 includes a device status display area 505X, a device status detail display area 505Y, and an operation button area 505Z. The apparatus status display area 505X is configured to display a level meter (icon) 505a indicating the eco level of the substrate processing apparatus 100, an (eco level) icon 505b indicating the determination result, and the like. In the apparatus status detail display area 505Y, for example, monitor data transmitted from the substrate processing apparatus 100, monitor data generation time associated with each monitor data, apparatus ID, recipe ID, elapsed time, and the like are displayed. It is configured. The operation button area 505Z is configured to display various buttons related to operations of the substrate processing apparatus 100. Since the apparatus status display area 505X is an area that is always displayed regardless of screen switching, the eco level of the substrate processing apparatus 100 can be monitored. Further, an eco-operation panel may be provided in the vicinity of the operation panel. Further, an icon (for example, an eco mark icon) indicating an energy saving operation using alternative energy described later may be separately displayed in the device state display area 505X.

  Further, the data display unit 505 sets an eco level based on the eco driving index calculated by the determination unit 520 within a range of “0” to “5”, for example, and displays the eco level on the level meter (icon) 505a. It is configured. The eco level indicates, for example, that eco-driving is progressing whenever the numerical value of eco-driving increases (as it approaches “5”), and eco-driving is performed as the numerical value decreases (as it approaches “0”). Set to indicate no progress. For example, if the eco driving index is less than 20%, the eco level is set to “1”, and if the eco driving index is 20% or more and less than 40%, the eco level is set to “2”, and the eco driving index is 40. If the eco-level is 60% or more and less than 60%, the eco-level is set to "3". If the eco-driving index is 60% or more and less than 80%, the eco-level is set to "4". The eco level is set to “5”. When resources are consumed more than necessary, the eco level is set to “0”.

  The data display unit 505 is configured to store the set eco level in the data holding unit 503 in association with the monitor data. Specifically, the data display unit 505 is configured to cause the data holding unit 503 to store monitor data (data values) collected within a predetermined period and an eco level set based on these monitor data. ing. The monitor data and eco level stored in the data holding unit 503 are used as data (hereinafter also referred to as “trace graph data”) when creating a trace graph, which will be described later.

  The data display unit 505 is configured to display different icons depending on whether the data value satisfies the determination condition or the data value does not satisfy the determination condition. For example, the data display unit 505 is configured to display an icon 505b based on the eco level displayed on the level meter 505a. In the example shown in FIG. 4, the icon “Eco4” corresponding to the eco level (in FIG. 4, eco level “4”) displayed on the level meter 505a is displayed. The data display unit 505 is also configured to display an (eco level) icon 505b indicating the determination result for each eco check condition.

  Further, when the icon 505b is selected, the data display unit 505 is configured to display a determination result detail screen 610 (hereinafter also referred to as a “determination result detail screen 610”) as shown in FIG. Yes. For example, the determination result detail screen 610 displays a determination result for each eco check condition, an eco level, and the like. First, the determination result for each eco-check condition will be described. The determination result detail screen 610 displays, for example, an ID indicating each eco check condition, a check state indicating the determination result, a condition name, and a data value for each eco check condition. For example, symbols “■” and “□” are attached to the “check status” for each eco-check condition so that the determination result of whether each eco-check condition is eco-drive is displayed. It has become. The symbol “■” indicates that the data value does not satisfy the determination condition in the corresponding eco-check condition. That is, regarding the eco check condition with the symbol “■”, it is determined that the substrate processing apparatus 100 is determined not to be in the eco operation state. On the other hand, the symbol “□” indicates that the data value satisfies the determination condition in the corresponding eco-check condition. That is, regarding the eco-check condition with the symbol “□”, it is determined that the substrate processing apparatus 100 is determined to be in the eco-operation state.

  Specifically, in the eco-check condition “heater output check at idling” with ID “001”, the heater output condition value shown in FIG. 3 is “90%”, whereas the measured value of the heater output is “95%”. When these values are compared by applying the judgment condition, it can be seen that the measured value of the heater output does not satisfy the judgment condition. Accordingly, regarding the “idle heater output check”, it is determined that the substrate processing apparatus 100 is not in the eco-operation state, and the symbol “■” is displayed in the “check state” column of the “idle heater output check” on the determination result detail screen 610. Is attached. Similarly, regarding the eco-check condition “always gas flow rate check” of ID “003”, the gas flow rate condition value is “20L” while the gas flow rate condition value is “20L”. When these values are compared by applying the determination condition, it can be seen that the gas flow rate does not satisfy the determination condition. Therefore, regarding the “always gas flow rate check”, the substrate processing apparatus 100 is determined not to be in the eco-operation state, and the symbol “■” is displayed in the “check state” column of the “always gas flow rate check” on the determination result detail screen 610. Attached. On the other hand, when the data value satisfies the determination condition, the symbol “□” is added to the “check state” column of each eco-check condition. Further, for example, the symbol “□” is added to the “check condition” column for the eco-check condition in which the check index for determining whether or not to perform the determination is set to “invalid” as in the case of ID “002”. It has become.

  Next, the determination result of the eco level will be described. The determination result detail screen 610 displays an eco-driving index 610a that is quantified based on the determination results of a plurality of eco-check conditions and an eco-level that is set based on the eco-driving index 610a. In FIG. 5, for example, the eco-driving index calculated based on the determination result regarding the eco-check condition of ID “001” to “999” is displayed as “78%”. The determination result detail screen 510 displays an eco level “4” corresponding to the eco driving index “78%”.

  Further, the data display unit 505 is configured to display a single graph in which monitor data collected within a predetermined period and an eco level calculated from these monitor data are overlapped with the time axis aligned. ing. As an example of the trace graph, FIG. 6 shows a trace graph 620 in which a heater output graph 620a and an eco-level graph 620b are superimposed. Hereinafter, the trace graph 620 of FIG. 6 will be briefly described. In the trace graph 620, the horizontal axis indicates time, and the vertical axis indicates the heater 206 output and the eco level. The time on the horizontal axis is displayed, for example, as monitor data generation time or a predetermined time (elapsed time) that has elapsed since the start of the process recipe. The heater 206 output on the vertical axis is displayed as a ratio (0% to 100%) with respect to the maximum output. The eco level on the vertical axis is displayed in multiple stages such as “0”, “1”,..., “5”. In the trace graph 620, a graph 620a related to the output of the heater 206 within a predetermined period and a graph 620b related to the eco level calculated from the determination results related to a plurality of eco check conditions are displayed. By displaying the trace graph 620 in which the graphs 620a and 620b are superimposed, the operation of the substrate processing apparatus 100 and the eco level are easily compared.

(8) Eco Driving Monitoring Method Next, an eco driving monitoring method by executing the eco driving monitoring program according to the present embodiment will be described below.

(Eco-check condition input process)
First, an eco check condition for implementing the eco driving monitoring method of the present embodiment is input. The data processing target for the substrate processing system is the data type to be determined whether or not it is eco driving, the determination condition for determining whether or not it is eco driving, and the data value specified from the monitor data corresponding to the data type The input means 506 is used to input a condition value to be compared when determining whether or not the determination condition satisfies the determination condition, and a predetermined operation performed according to a result of comparison of the data value based on the determination condition To do. Specifically, the worker, as shown in FIG. 3, “ID”, “condition name”, “data type”, “determination condition”, “condition value”, “predetermined operation” for each eco-check condition. Is input using the input means 506. The setting unit 510 included in the group management apparatus 500 accepts the setting of each item (ID, condition name, data type, determination condition, condition value, predetermined operation) of the input eco-check condition, and sets data for each eco-check condition. The data is stored in the holding unit 503. In addition, regarding the “check index” for setting whether or not to execute the determination relating to each eco-check condition, an operator may input directly using the input unit 506, or the contents of a process recipe or the like Based on the above, the setting unit 510 may be set as appropriate by the eco-drive monitoring program.

(Eco driving monitoring process)
The control unit 501 reads each item of the eco-check condition from the data holding unit 503 for the ID (“001” and “003”) for which the index is specified as valid by the setting unit 510, and holds the items in the shared memory 502. Monitor eco-driving according to “judgment conditions”. If the setting is to constantly monitor in the judgment condition, the eco-driving is monitored as soon as it is stored in the memory 502, and if the setting is to monitor during non-driving (idle time, etc.), data (event data) that is switched during non-driving Is received by the shared memory 502, and monitoring is started. If there is a setting for monitoring at the time of recipe execution under the determination condition, this arbitrary ID “***” is configured so that eco-driving is monitored when the recipe and the designated step are started. For example, when data (event data) indicating the start of a recipe or the start of a designated step is received in the shared memory 502, the eco-driving is started.

(Eco-driving judgment process)
The determination unit 520 included in the group management apparatus 500 monitors whether or not the substrate processing apparatus 100 is in the eco-operation state for the eco-check condition in which the “check index” illustrated in FIG. 3 is set to “valid”. Specifically, the control unit 501 reads out the eco check conditions stored in the data holding unit 503 and starts monitoring for each eco check condition.

  The determination unit 520 compares the data value with the condition value for each eco-check condition, and determines whether the data value satisfies the determination condition. In the present embodiment, the control unit 501 designates a data value corresponding to the data type of each eco check condition from the monitor data stored in the data holding unit 503. Then, the control unit 501 compares the specified data value with the condition value, and determines whether or not the data value satisfies the determination condition.

  Further, the determination unit 520 stores at least the latest two determination results in the data holding unit 503 regarding the same eco-check condition. In addition, the determination unit 520 calculates an eco-driving index in which the eco-driving progress in the substrate processing apparatus 100 is quantified in the range of 0% to 100% based on the determination results of the plurality of eco-check conditions. To do. Further, the determination unit 520 displays the eco level based on the eco driving index in multiple stages within a range of “0” to “5”, for example.

  Further, the data holding unit 503 stores monitor data and an eco level set based on the monitor data. Specifically, the data holding unit 503 is a trace for displaying the monitor data (data values) collected within a predetermined period and the eco level calculated from these monitor data in an overlapping manner on the same graph. The data is stored in the data holding unit 503 as graph data.

  In addition, the determination unit 520 determines whether the substrate processing apparatus 100 is in the eco-operation state over time based on not only the eco-drive state at the time when the monitor data is acquired but also a plurality of determination results regarding the same eco-check condition. Judgment. That is, the determination unit 520 determines whether or not the substrate processing apparatus 100 is in the eco-operation state based on a plurality of determination results within a predetermined period with respect to the same eco-check condition.

(Predetermined operation execution process)
Further, the execution means 530 provided in the group management apparatus 500 executes a predetermined operation set for each eco check condition. For example, the execution unit 530 causes the data display unit 505 to display a warning that the vehicle is not eco-friendly. Alternatively, the execution unit 530 transmits a mail indicating that the operation is not eco-friendly to the manager PC 560 of the substrate processing system via the mail server 550. Or the execution means 530 changes the parameter setting value prescribed | regulated to the process recipe based on the determination result. Alternatively, the control unit 501 executes a combination of these operations.

(Judgment result display process)
The data display unit 505 displays an icon indicating a determination result in the eco-driving determination process. Thereby, the data display unit 505 displays whether the substrate processing apparatus 100 is in the eco-operation or the non-eco-operation. More specifically, for example, as shown in FIG. 4, the data display unit 505 displays a level meter (icon) 505a that indicates the calculated eco level in multiple stages. The data display unit 505 displays different (eco-level) icons 505b based on the eco-level displayed on the level meter (icon) 505a. The data display unit 505 displays an icon “Eco4” corresponding to the eco level “4” indicated on the level meter 505a.

  Further, when the icon 505b is selected, the data display unit 505 displays a determination result detail screen 610 as shown in FIG. The data display unit 505 displays a determination result for each eco check condition, monitor data (data value) for each eco check condition, an eco driving index, an eco level, and the like on the determination result detail screen 610.

(Trace graph display process)
The data display unit 505 displays a trace graph based on the trace data stored in the data holding unit 503. The data display unit 505 displays a graph 520a relating to the output of the heater 206 within a predetermined period and a graph 620b relating to the eco level calculated from the determination results relating to a plurality of eco check conditions.

(9) Effects according to the present embodiment According to the present embodiment, the following one or more effects are achieved.

  (A) In the group management apparatus 500 of this embodiment, “ID” for identifying each eco-check condition, “condition name” for displaying the name of the eco-check condition, and determination targets for whether or not the eco-drive is performed are specified. "Data type" to be used, "judgment condition" that regulates whether or not the vehicle is eco-friendly, and comparison when determining whether the data value specified from the monitor data corresponding to the data type satisfies the judgment condition The setting contents of each item of “predetermined operation” performed when the target “condition value” and the data value do not satisfy the determination condition are input using the input means 506, and the setting means 510 sets the setting contents. Is configured to accept. Based on the monitor data received from the substrate processing apparatus 100, the determination unit 520 is configured to determine whether the substrate processing apparatus 100 is in an eco-operation state for each eco-check condition. According to this configuration, since the data value corresponding to the data type for each eco-check condition is compared with the condition value based on the determination condition, the group management apparatus 500 allows the substrate processing apparatus 100 to be in the eco-operation state. It is possible to monitor whether or not. In addition, the substrate processing system worker can take appropriate measures based on the determination result, and even when the substrate processing apparatus 100 is determined not to be in the eco-operation state, Switching failure can be prevented, and the substrate processing apparatus 100 can be promptly shifted to the eco-operation state.

  Further, the determination unit 520 is configured to calculate the eco-operation index of the substrate processing apparatus 100 based on the determination results of the plurality of eco-check conditions. According to this configuration, the group management apparatus 500 can comprehensively determine how much the eco-operation state of the substrate processing apparatus 100 has progressed. Therefore, the determination unit 520 can reduce the possibility that the determination influenced by the determination result related to the specific eco-check condition is made. Therefore, the group management apparatus 500 can more accurately monitor whether or not the substrate processing apparatus 100 is in the eco-operation state.

  The determination unit 520 is configured to be able to determine over time whether or not the substrate processing apparatus 100 is in the eco-operation state. According to this configuration, the determination unit 520 can reduce the possibility of a determination being influenced by the determination result at a specific time. Therefore, the group management apparatus 500 can more accurately monitor whether or not the substrate processing apparatus 100 is in the eco-operation state.

  For example, when the use frequency (production frequency) of the substrate processing apparatus 100 is high and the idle period is short, it is more efficient to hold the heater temperature than to lower the heater temperature and then raise it again. In some cases, the total amount of However, if it is determined whether or not the substrate processing apparatus 100 is in the eco-operation state based only on the determination result at a specific time, even if the power supply amount to the heater 206 is held as described above, the result is May overlook the case where power consumption is reduced. Thus, if the substrate processing apparatus 100 can determine over time whether or not the substrate processing apparatus 100 is in the eco-operation state as in the present embodiment, the occurrence frequency of the oversight as described above can be reduced. Is possible.

  (B) In the group management apparatus 500 of this embodiment, when the data value does not satisfy the determination condition, the control unit 501 performs a predetermined operation such as warning display, mail transmission, or parameter setting value change in the process recipe. Is configured to run. According to this configuration, when it is determined that the substrate processing apparatus 100 is not in the eco-operation state, the control unit 501 can immediately notify the worker of the substrate processing system to that effect. Therefore, it becomes possible for the worker of the substrate processing system to take appropriate measures based on the determination result, and even if it is determined that the substrate processing apparatus 100 is not in the eco-operation state, the switching to the eco-operation state is prevented from being lost. The substrate processing apparatus 100 can be promptly shifted to the eco-operation state, and the environmental load can be reduced.

  (C) In the group management apparatus 500 of the present embodiment, the data display unit 505 displays on the screen a level meter (icon) 505a and an (eco level) icon 505b that indicate eco levels in multiple stages, as shown in FIG. Is configured to do. According to this configuration, the group management apparatus 500 can make a worker of the substrate processing system recognize the progress of the eco-driving state. Therefore, the worker of the substrate processing system can take appropriate measures based on the displayed eco level. Even if it is determined that the substrate processing apparatus 100 is not in the eco-operation state, the operator of the substrate processing system can check the ecology by the display contents of the level meter (icon) 505a or the (eco-level) icon 505b. It is possible to prevent the switching to the operation state from being lost, to promptly shift the substrate processing apparatus 100 to the eco operation state, and to reduce the environmental load. Further, the eco level obtained by simplifying the eco driving index is displayed on the data display unit 505, so that a worker of the substrate processing system can easily recognize the state of the substrate processing apparatus 100.

  The data display unit 505 is configured to display a determination result detail screen 610 when the icon 505b displayed on the screen is selected. The determination result detail screen 610 displays a determination result for each eco check condition, a data value as a comparison target designated from the monitor data, a specific numerical value of the eco driving index, an eco level, and the like. According to this configuration, since the worker of the substrate processing system can know the details of the determination result from the determination result detail screen 610, the eco operation index and the eco level of the substrate processing apparatus 100 are improved and the environmental load is reduced. It is possible to take more appropriate measures.

  The data display unit 505 is configured to display a trace graph in which the monitor data and the eco level are superimposed based on the trace data stored in the data holding unit 503. For example, the data display unit 505 is configured to display a trace graph 620 in which a heater output graph 620a and an eco-level graph 620b are overlapped with the time axis aligned as shown in FIG. According to this configuration, the worker of the substrate processing system can recognize the acquired monitor data while comparing the eco level, so it is possible to easily identify a location that is not in an eco-operation state, and to select a location where the environmental load is improved. Can be clear. Thereby, even if it is determined that the substrate processing apparatus 100 is not in the eco-operation state, appropriate measures based on the environmental load improvement portion are taken to promptly shift the substrate processing apparatus 100 to the eco-operation state. Can do. Even if it is determined that the substrate processing apparatus 100 is in an eco-operation state, the eco-operation index and the eco-level of the substrate processing apparatus 100 are further improved by taking appropriate measures to further reduce the environmental load. Environmental burden can be further reduced.

<Modification of First Embodiment of the Present Invention>
Below, the modification of the 1st Embodiment of this invention is demonstrated. The present modification is different from the first embodiment in that it is configured so that it can be determined in the substrate processing apparatus 100 whether or not it is in an eco-drive state. Specifically, the main control unit 239 reads the above-described eco-driving monitoring program from the data holding unit 239a and realizes the setting unit, the determination unit, and the execution unit in the first embodiment described above, whereby the substrate processing apparatus The controller 240 is configured to function as the setting means, determination means, and execution means in the first embodiment described above. The eco-check condition is configured to be input using the input unit 240b. Further, the data display unit 240a is configured to function as a display unit in the first embodiment described above.

  In the substrate processing apparatus 100 of this modification, the substrate processing apparatus controller 240 is configured to determine whether or not the substrate processing apparatus 100 is in the eco-operation state. According to this configuration, since it is not necessary to provide the group management device 500, the installation area of the substrate processing system can be reduced. In addition, since the number of apparatuses in the process is reduced, the power consumption of the substrate processing system can be reduced.

<Second Embodiment of the Present Invention>
The second embodiment of the present invention will be described below. In the second embodiment, a determination is made as to whether or not eco-driving is possible in the substrate processing apparatus 100, and a switching control unit is provided in the substrate processing apparatus controller 240. The point which is comprised so that the energy-saving driving | operation by alternative energy by switching a supply line differs from 1st Embodiment. Specifically, first, the main control unit 239 reads the above-described eco-driving monitoring program from the data holding unit 239a and realizes at least setting means, determination means, and execution means, so that the substrate processing apparatus controller 240 is It is comprised so that it may function as a setting means, determination means, and execution means in the first embodiment. The eco-check condition is configured to be input using the input unit 240b. The data display unit 240a is configured to function as display means in the first embodiment described above. The main control unit 239 is configured to read the power storage monitoring program from the data holding unit 239a and realize a switching control unit described later in the substrate processing apparatus controller 240.

The eco-operation monitoring program itself (executed by the substrate processing apparatus controller 240) executed in the second embodiment is the same as that in the first embodiment. However, the configuration for realizing the switching control unit by executing the power storage monitoring program is different from that of the first embodiment. Here, the differences from the first embodiment will be briefly described.

FIG. 11 is a schematic configuration diagram of a substrate processing apparatus 100 and an auxiliary power generation system 300 as a power generation unit connected to the substrate processing apparatus 100 according to the second embodiment of the present invention. The substrate processing apparatus controller 240 according to the second embodiment has basically the same configuration as the substrate processing apparatus controller 240 according to the first embodiment. According to the present embodiment, the eco-drive monitoring program is executed by the substrate processing apparatus controller 240, and the power storage monitoring program is executed by the substrate processing apparatus controller 240, whereby power is supplied from the auxiliary power generation system 300. A switching control unit 336 that switches between a supply line (second power supply line) 12 and a line (first power supply line) 11 that supplies commercial power is realized in the controller 240 in the substrate processing apparatus.

First, the eco-driving monitoring program in the second embodiment will be described. Here, FIG. 10 is a diagram illustrating a list of setting contents of the eco-check condition in the second embodiment of the present invention.

(Setting method)
In the second embodiment, the setting means realized by the main control unit 239 has the same configuration as the setting means shown in FIG. The setting means in the second embodiment is configured to be displayed on the data display unit 240a as shown in FIG. As in the setting means shown in FIG. 3, the setting means shown in FIG. 10 has an “ID” for identifying each eco-check condition, a “condition name” for displaying the name of the eco-check condition, and whether or not the operation is eco-friendly. “Data type” that defines the judgment target of “No.”, “Judgment condition” that regulates whether or not it is eco-driving, and whether the data value specified from the monitor data corresponding to the data type satisfies the judgment condition Setting information of each item of “predetermined operation” performed according to a result of comparison of “condition value” to be compared at the time of determination and data value based on the determination condition is input using the input unit 240b. Configured to be. Each item of the input eco-check condition is associated with each other for each eco-check condition and stored in the data holding unit 239a. Note that the description of the same eco-check condition as in FIG. 3 is omitted.

Here, a specific example of the eco-check condition shown in FIG. 10 will be described below. First, the “battery storage amount check” with the ID “101” will be described. In the “battery storage amount check”, whether or not the storage amount of the battery satisfies a predetermined determination condition while the substrate processing apparatus 100 is supplied with power (other than when the apparatus is shut down and stopped). Is checked. In the “battery storage amount check”, monitor data corresponding to “storage amount” defined in “data type” is designated as a determination target data value as a determination target of eco-drive. “Less than condition value” defined as “judgment condition” stipulates that the amount of power stored in the battery is less than the condition value as a condition for eco-driving. “100%” defined as “condition value” is a value that is compared with the maximum amount of power that can be stored in the battery when actually checking whether or not the vehicle is eco-friendly. In this case, it is determined whether the amount of power storage has reached the maximum power amount “100%”. Similarly, in the “IDLE mode when the battery is charged” check with ID “104” and “battery charge check when in RUN mode” ID is “105” It is determined whether the amount is the maximum amount of power that can be stored. In “IDLE mode, battery storage amount check” is determined (checked) only during the IDLE (idle) period. In “RUN mode, battery storage amount check”, during RUN (recipe execution), other than the film formation step Is judged (checked). Next, “energy saving operation in IDLE mode” indicated by ID “102” will be described. Event data corresponding to “event” defined in “data type” is designated as data to be determined. Therefore, in “IDLE mode, energy saving operation”, it is checked whether or not a predetermined event that satisfies a predetermined determination condition occurs during the IDLE (idle) period. “ON” defined as “determination condition” indicates that data indicating the occurrence of a predetermined event indicating energy saving operation, that is, event data indicating switching of the power supply line is defined as the condition of energy saving operation. Since “condition value” is not defined, “-” is displayed. Similarly, the “energy saving operation in the RUN mode” indicated by the ID “103” similarly indicates a predetermined energy saving operation that satisfies a predetermined determination condition during the RUN (recipe execution) except for the film forming step. It is checked whether data has occurred.

(Judgment means)
The determination means realized by the main control unit 239 compares the data value corresponding to the data type for each eco-check condition among the data stored in the data holding unit 239a with the condition value, and the data value determines the determination condition. It is comprised so that determination whether to satisfy | fill may be performed. Further, the determination unit is configured to determine whether the substrate processing apparatus 100 is in the eco-operation state based on a plurality of determination results within a predetermined period regarding the same eco-check condition as well as the eco-operation state at the time when data such as monitor data is acquired. It is at least configured so that it can be determined over time. Further, the determination unit is configured to perform determination based on whether or not predetermined event data is generated according to the eco check condition.

(Execution means)
The execution means is configured to execute a predetermined operation set in the setting means shown in FIG. 10 according to the result of comparison of the data values based on the determination condition. Specifically, for example, when the data value defined by the “condition value” does not satisfy the determination condition, a predetermined operation is performed.

  Examples of the “predetermined operation” described above are the same as those in the first embodiment as follows. As a first example, as shown in FIG. 10, a warning that the vehicle is not eco-friendly (non-eco-friendly) is displayed on the data display unit 240a. As a second example, for example, a mail is transmitted to an administrator PC of the substrate processing system via a mail server (not shown). As a third example, various parameter setting values defined in the process recipe are changed. Or the operation | movement which combined these 1st-3rd examples in multiple numbers is performed.

Further, unlike the first embodiment, as in this embodiment (second embodiment), a switching control unit is provided in the controller for substrate processing apparatus 240 as will be described later, and energy saving operation is performed by switching the power supply line. When performing the above, it may be configured such that “predetermined operation” is executed when the data (event data) defined by the “condition value” satisfies the determination condition (when it occurs). For example, if the power supply line has been switched (if event data indicating the switching of the power supply line has occurred), an eco-mark (such as an icon) indicating that the energy-saving operation has been performed is displayed on the data display unit 240a. It may be configured as described above.

Note that the various steps (eco driving determination step and the like) realized by the eco driving monitoring program including the setting unit, the determining unit, the executing unit, and the like are the same as those in the first embodiment, and thus description thereof is omitted.

Next, using FIG. 11, the substrate processing apparatus 100 and the auxiliary power generation system 300 according to the present embodiment, including the peripheral configuration of the switching control unit 336 to which the first power supply line 11 and the second power supply line 12 are connected. The configuration of will be described.

  As shown in FIG. 11, the switching control unit 336 included in the substrate processing apparatus 100 that operates by receiving power supply includes, for example, a first power supply line 11 that supplies power from the equipment side of the semiconductor device manufacturing factory, and a fuel cell 311. Is connected to a second power supply line 12 that supplies the power generated by. Examples of the power supplied from the equipment side of the semiconductor device manufacturing factory include commercial AC power supplied from a power plant. For example, an auxiliary power generation system 300 including a fuel cell 311 is connected to the second power supply line 12.

  The auxiliary power generation system 300 includes a fuel cell unit 310 as a fuel power generation unit, a water vapor generation device 320s as a water vapor generation unit, and a steam power generation unit 320 as a water vapor power generation unit.

The fuel cell unit 310 includes, in addition to the fuel cell 311, for example, a reformer that obtains hydrogen-containing gas supplied to the fuel cell 311 from natural gas, an air supply device that supplies air containing oxygen-containing gas to the fuel cell 311, Equipped with a waste heat / drainage recovery device (not shown). The fuel cell 311 burns a hydrogen-containing gas such as hydrogen gas (H ₂ ) and an oxygen-containing gas such as oxygen (O ₂ ) gas or carbon monoxide (CO) gas so as to generate DC power, for example. Composed. The fuel cell unit 310 is configured to transmit the obtained power to the second power supply line 12. Exhaust heat and water (H ₂ O) generated at the time of power generation are recovered by an exhaust heat / drainage recovery device and supplied to the steam generator 330.

  The steam generator 330 includes, for example, a water circulation device, a heat exchange device, and the like (both not shown), and is configured to generate water vapor using water generated in the fuel cell unit 310 and exhaust heat. The steam generator 330 is configured to supply the generated steam to the steam power generation unit 320.

  The steam power generation unit 320 includes, for example, a steam turbine (not shown), and is configured to generate DC power, for example, using the steam generated by the steam generator 330. The steam power generation unit 320 is configured to transmit the obtained power to the second power supply line 12 together with the power obtained by the fuel cell unit 310.

Thus, in the auxiliary power generation system 300 according to the present embodiment, the water and exhaust heat generated in the fuel cell unit 310 are further effectively utilized by the steam generator 330 and the steam power generation unit 320. Further, since the auxiliary power generation system 300 can be installed in the vicinity of the substrate processing apparatus 100, it is possible to suppress power loss due to power transmission. As a result, for example, the use of exhaust heat generated during power generation is not so advanced, and the energy efficiency of the auxiliary power generation system 300 can be increased as compared with a commercial power source or the like in which power loss due to power transmission is large. In addition, both the fuel cell unit 310 and the steam power generation unit 320 do not generate a large amount of air pollutants such as CO ₂ and NO _x during power generation, unlike commercial power sources.

  The substrate processing apparatus 100 that receives power supply from the first power supply line 11 and the second power supply line 12, respectively, includes a processing furnace 202, the above-described components (not shown), a battery 347 as a power storage unit, and a control device. And a switching control unit 336 included in the substrate processing apparatus controller 240. A first power supply line 11 and a second power supply line 12 are connected to the switching control unit 336, respectively. The battery 347 is provided on the second power supply line 12, and the second power supply line 12 is connected to the switching control unit 336 via the battery 347.

  The battery 347 is configured to store the electric power generated by the fuel cell unit 310 included in the auxiliary power generation system 300 and the electric power generated by the steam power generation unit 320. The switching control unit 336 is configured to switch between the first power supply line 11 and the second power supply line 12 via the battery 347. The power supplied from the first power supply line 11 or the second power supply line 12 by switching the switching control unit 336 is supplied to each part of the substrate processing apparatus 100 including the processing furnace 202 by the in-apparatus power supply line 13. Is done.

  The power supplied from the first power supply line 11 to the substrate processing apparatus 100 is, for example, AC power from a commercial power supply, and the power supplied from the second power supply line 12 to the substrate processing apparatus 100 is , For example, DC power via the battery 347. The substrate processing apparatus 100 converts a part or all of the AC power from the first power supply line 11 into DC power via an inverter (not shown), and then each part of the substrate processing apparatus 100 from the in-apparatus power supply line 13. It may be configured to supply to. Further, part or all of the DC power from the second power supply line 12 is converted into AC power via an inverter (not shown) and then supplied from the in-apparatus power supply line 13 to each part of the substrate processing apparatus 100. It may be configured as follows.

  As described above, the substrate processing apparatus 100 according to the present embodiment is supplied with commercial power by the first power supply line 11 and also supplied with power generated by the fuel cell 311 by the second power supply line 12. It is configured. As a result, in the substrate processing apparatus 100 using the electric power generated by the fuel cell 311 while ensuring the stable operation of the substrate processing apparatus 100 using commercial power having technical reliability and stability. Commercial power consumption can be reduced.

  In addition, the substrate processing apparatus 100 according to the present embodiment includes a battery 347 that stores electric power generated by the auxiliary power generation system 300. Thereby, surplus power generated by the auxiliary power generation system 300 can be stored, and waste of power can be reduced. Further, even when it takes time from the start of the auxiliary power generation system 300 to stable operation or when the power required by the substrate processing apparatus 100 temporarily exceeds the power generation amount of the auxiliary power generation system 300, Electric power can be obtained from the battery 347, and the power supply to the substrate processing apparatus 100 can be further stabilized.

  According to the present embodiment (second embodiment), the following one or more effects are achieved.

(A) According to the present embodiment, the substrate processing apparatus 100 switches between the first power supply line 11 that supplies commercial power and the second power supply line 12 that supplies power generated by the fuel cell 311. A switching control unit 336 is provided. As a result, in the substrate processing apparatus 100 using the electric power generated by the fuel cell 311 while ensuring the stable operation of the substrate processing apparatus 100 using commercial power having technical reliability and stability. Commercial power consumption can be reduced.

(B) The auxiliary power generation system 300 connected to the second power supply line 12 includes a fuel cell unit 310 that generates power by burning a hydrogen-containing gas and an oxygen-containing gas by the fuel cell 311. This contributes to the prevention of global warming in the substrate processing apparatus 100 that does not generate a large amount of air pollutants such as CO ₂ and NO _x during power generation and consumes a large amount of power unlike a commercial power source. It is possible.

(C) Further, the auxiliary power generation system 300 uses the water vapor generated by the water vapor generator 330 using the water vapor generator 330 that generates water vapor using the water and exhaust heat generated in the fuel cell unit 310. And a steam power generation unit 320 for generating power. Thereby, the power generation amount of the auxiliary power generation system 300 as a whole can be further increased by utilizing the water and exhaust heat generated in the fuel cell unit 310, and the energy efficiency of the auxiliary power generation system 300 can be further increased. Since the water and waste heat generated in the fuel cell unit 310 are used, a large amount of air pollutants such as CO ₂ and NO _x is not generated during power generation.

(D) Further, according to the present embodiment, the substrate processing apparatus 100 includes the battery 347 that stores the power generated by the fuel cell unit 310 and the power generated by the steam power generation unit 320. Thereby, surplus power generated by the auxiliary power generation system 300 can be stored, and waste of power can be reduced. In addition, power can be stably supplied to the substrate processing apparatus 100 until the auxiliary power generation system 300 is stably operated or even when a large amount of power is required in the substrate processing apparatus 100.

(E) Also, according to the present embodiment, the eco-driving monitoring program including the setting means, the determination means, the execution means, and the like that are substantially equivalent to those of the first embodiment is executed, so that the effects of the first embodiment are achieved. Needless to say, it can be played.

(F) When the switching control unit operates (data indicating switching from the first power supply line 11 to the second power supply line 12 is generated), an eco-mark icon indicating that switching to energy-saving operation is performed Since it is displayed on the screen, it is possible to grasp the degree of eco-driving related to the power generated in the auxiliary power generation system 300 (the power of the second power supply line 12).

FIG. 12 shows a first specific example in the second embodiment of the present invention. The operation of the control unit 240 according to this embodiment, in particular, the monitoring unit (not shown) realized in the switching control unit 336 will be described with reference to FIG. FIG. 12 is a flowchart of switching of the power supply line by the switching control unit 336 according to the present embodiment. Note that the operation of the control device 240 as the controller in the substrate processing apparatus is performed as one step of the semiconductor device manufacturing process.

  A power storage monitoring program and a database program are read from a storage unit 239e as a data holding unit included in the control device 240 and executed by the main control unit 239, whereby a monitoring unit and a database unit (not shown) are activated.

  As shown in FIG. 12, the monitoring unit activated by executing the power storage monitoring program starts monitoring the battery 347, and determines whether or not the power storage amount is equal to or greater than a predetermined value (S210). When it is equal to or greater than the predetermined value (to YES), it is determined whether power is being supplied from the first power supply line 11 (S221). If being supplied (to YES), the switching control unit 336 is switched to the second power supply line 12 (S231). If not being supplied (NO), the supply from the second power supply line 12 is continued.

  When the amount of power stored in the battery 347 is less than the predetermined value (S210 → NO), it is determined whether power is being supplied from the second power supply line 12 (S222). If it is being supplied (to YES), the switching control unit 336 is switched to the first power supply line 11 (S232). If not being supplied (NO), the supply from the first power supply line 11 is continued. Thus, the power supply switching operation by the control device 240 is completed. In the present embodiment, since the condition value “100%” is defined by the setting means shown in FIG. 10, the predetermined value is the maximum electric energy that can be stored in the battery 336b. Therefore, the predetermined value can be changed according to the set value of the “condition value” of the setting means.

  The monitoring unit monitors the power consumption during power supply from the second power supply line 12 and stores it in the database unit. In addition, the monitoring unit may be configured to read out the power consumption amount at a predetermined timing and display it on the data display unit 240a.

  Needless to say, the present embodiment (first specific example) also has the same effects as those of the second embodiment described above.

(A) Also, according to the present embodiment, the switching control unit 336 monitors the amount of electricity stored in the battery 347, and when the amount of electricity is greater than or equal to the amount of power sufficient to operate the substrate processing apparatus 100, The power is supplied from the second power supply line 12, and the power is supplied from the first power supply line 11 when the storage amount is less than a sufficient amount of power to operate the substrate processing apparatus 100. . Thereby, when the amount of power stored in the battery 347 is insufficient, the stable operation of the substrate processing apparatus 100 can be more reliably ensured by supplying the commercial power to the substrate processing apparatus 100. Further, when the amount of power stored in the battery 347 is sufficient, consumption of commercial power in the substrate processing apparatus 100 can be suppressed by using power from the fuel cell 311.

(B) Further, according to the present embodiment, the switching control unit 336 monitors the power consumption from the fuel cell 311 and stores the power consumption in the database unit in a readable manner, and also displays the power consumption in the data display unit. 240a is displayed. Thus, it can be seen how much the consumption of commercial power can be reduced.

(C) Further, according to the present embodiment, when the switching control unit 336 switches from the first power supply line to the second power supply line from the power storage monitoring program, this switching event is sent to the shared memory (not shown). Through the setting means of the main control unit 239, the determination unit determines that the energy-saving operation is performed based on the event data, and the execution unit displays an icon (eco-mark icon) indicating the energy-saving operation on the data display unit 240a or the like. May be displayed. Thereby, it is possible to monitor whether the substrate processing apparatus 100 is performing eco-operation (reducing consumption of commercial power).

(D) Moreover, according to this embodiment, since the eco-driving monitoring program including the setting means, the determination means, the execution means and the like that are substantially the same as those of the first embodiment is executed, each of the first embodiment Needless to say, an effect can also be achieved.

(E) Furthermore, when data indicating switching from the first power supply line 11 to the second power supply line 12 is generated, an eco-mark icon indicating that switching to energy-saving operation is displayed on the operation screen. The degree (level) of eco-driving related to the power generated in the auxiliary power generation system 300 (the power of the second power supply line 12) can be grasped.

  FIG. 13 shows a second specific example in the second embodiment of the present invention. Here, the substrate processing apparatus 100 has a plurality of apparatus states such as an IDLE mode and a RUN mode. In such individual apparatus states, the amount of power consumed by the substrate processing apparatus 100 is not constant. On the other hand, as described above, in the auxiliary power generation system 300, there may be restrictions on the upper limit of the power generation amount.

  Therefore, in the present embodiment (second specific example), the switching control unit 336 included in the control device 240 switches the power supply lines 11 and 12 according to the device state of the substrate processing apparatus 100. The control device 240 according to the present embodiment has the same configuration as that of the above-described embodiment (first specific example) with respect to other points. Hereinafter, the operation of the control device 240 according to the present embodiment will be described. FIG. 13 is a flowchart of switching of the power supply line by the switching control unit according to the present embodiment. The operation of the control device is performed as one step of the semiconductor device manufacturing process.

  The switching control unit 336 according to the present embodiment causes the transition instruction unit to change the apparatus state from the transition instruction unit every time a transition instruction unit (not shown) realized in the main control unit 239 makes the substrate processing apparatus 100 transition to a predetermined apparatus state. It is configured to receive information. Such exchange of information is performed, for example, via a shared memory (not shown) included in the control device 240.

  As shown in FIG. 13, the switching control unit 336 determines whether or not the apparatus state of the substrate processing apparatus 100 is in the IDLE mode (S310). In the IDLE mode (to YES), it is determined whether power is being supplied from the first power supply line 11 (S321). If supply is in progress (to YES), switching to the second power supply line 12 is performed (S331). If not being supplied (NO), the supply from the second power supply line 12 is continued.

  When not in the IDLE mode (S310 → NO), it is determined whether power is being supplied from the second power supply line 12 (S322). If supply is in progress (to YES), switching to the first power supply line 11 is performed (S332). If not being supplied (NO), the supply from the first power supply line 11 is continued. Thus, the power supply switching operation by the control device 240 according to the present embodiment is completed.

  As described above, in the substrate processing apparatus 100, due to the necessity of the stable operation of the substrate processing apparatus 100, the substrate processing apparatus 100 is set in the IDLE mode and power supply is continued during the time period when the substrate processing is not performed. Therefore, the consumption of commercial power in the substrate processing apparatus 100 can be suppressed by supplying power from the second power supply line 12 at least during the IDLE mode as described above.

  Further, when the substrate processing apparatus 100 is in the IDLE mode, for example, the power supply to the heater 206 is stopped as described above, and the power consumption in the substrate processing apparatus 100 is lower than that in the RUN mode. It is suppressed. In addition, since the operation of each unit is small, such as when the transfer mechanism such as the wafer transfer mechanism is stopped at the origin position, the power consumption is substantially constant, and it is easy to predict the amount of power required per unit time.

  Therefore, as described above, power is supplied from the second power supply line 12 in the IDLE mode, and power is supplied from the first power supply line 11 in other modes where power consumption is large and it is difficult to predict the required amount. By performing the supply, consumption of commercial power in the substrate processing apparatus 100 can be suppressed while ensuring stable operation of the substrate processing apparatus 100 more reliably.

  In addition, when the monitoring function of the battery 347 is added to the switching control unit according to the present embodiment like the switching control unit 336 described above, the substrate processing apparatus 100 can be more stably operated, and the substrate processing can be performed. It becomes easier to suppress the consumption of commercial power in the apparatus 100.

In addition, according to the present embodiment, since the ecological maneuver monitoring program is executed, it goes without saying that the effects of the first embodiment can also be achieved.
Therefore, according to the present embodiment, when the transition to the IDLE mode is detected and the switching control unit 336 switches from the first power supply line to the second power supply line, this switching event is not shared. The data is transmitted to the setting means of the main control unit 239 via the memory, the determination means determines that the energy saving operation is performed based on the event data, and the execution means displays an icon (eco mark) indicating the energy saving operation on the data display portion 240a or the like. Icon) is displayed. Thereby, it is possible to monitor whether the substrate processing apparatus 100 is performing eco-operation (reducing consumption of commercial power).
Furthermore, when the switching control unit operates (data indicating switching from the first power supply line 11 to the second power supply line 12 is generated), an eco-mark icon indicating that switching to the energy saving operation is displayed on the operation screen. Therefore, the degree (level) of eco-driving related to the power generated in the auxiliary power generation system 300 (the power of the second power supply line 12) can be grasped.

  FIG. 14 shows a third specific example in the second embodiment of the present invention.

  In the substrate processing apparatus 100, for example, a substrate processing process including a film forming step is performed during the RUN mode. At this time, depending on the contents of the substrate processing, the duration of a predetermined step, for example, a film forming step may take a long time. On the other hand, as described above, the auxiliary power generation system 300 may be limited in the duration of power supply because the upper limit of the power generation amount is limited.

  Therefore, in the present embodiment, the switching control unit 239 included in the control device 240 switches the power supply lines 11 and 12 according to the step being performed. The control device 240 according to the present embodiment has the same configuration as that of the above-described embodiment (second specific example) with respect to other points. Hereinafter, the operation of the control device 240 according to the present embodiment will be described. FIG. 14 is a flowchart of switching of the power supply line by the switching control unit 336 according to the present embodiment. The operation of the control device is performed as one step of the semiconductor device manufacturing process.

  The switching control unit 336 according to the present embodiment receives information on the steps being performed from various control units via, for example, a switching hub. Such exchange of information is performed, for example, via a shared memory (not shown) included in the control device 240.

  As shown in FIG. 14, the switching control unit determines whether a step other than the film forming step is being performed, for example (S410). When steps other than the film forming step are being performed (to YES), it is determined whether power is being supplied from the first power supply line 11 (S421). If supply is in progress (to YES), switching to the second power supply line 12 is performed (S431). If not being supplied (NO), the supply from the second power supply line 12 is continued.

  When the film forming step is being performed (S410 → NO), it is determined whether power is being supplied from the second power supply line 12 (S422). If supply is in progress (to YES), switching to the first power supply line 11 is performed (S432). If not being supplied (NO), the supply from the first power supply line 11 is continued. Thus, the power supply switching operation by the control device according to the present embodiment is completed.

As described above, in the substrate processing step, oxygen (O ₂ ) gas, nitrogen (N ₂ ) gas, or the like is diffused to form a film such as an oxide film or a nitride film on the wafer 100. In some cases, for example, the duration of the film forming step may take a long time. In addition, the film forming step has a large influence on the substrate processing characteristics and yield as compared with other steps, and is highly important.

  Therefore, as described above, in the film forming step of forming a film on the wafer 200 while maintaining the inside of the processing chamber 201 at a predetermined condition, power is supplied from the first power supply line 11 suitable for long-time power supply. By doing so, stable operation of the substrate processing apparatus 100 can be ensured more reliably. Moreover, in each other step, consumption of commercial power can be suppressed by supplying power from the second power supply line 12.

  Note that, when the switching control unit according to the present embodiment is provided with the monitoring function of the battery 347 like the switching control unit 336, the substrate processing apparatus 100 can be more stably operated, and the substrate processing apparatus 100 can be operated. This makes it easier to reduce the consumption of commercial power.

Further, according to the present embodiment, since the ecological maneuver monitoring program is executed, it is needless to say that the effects of the first embodiment can be achieved. Therefore, according to the present embodiment, when the switching control unit 336 that has detected the transition to a step other than the film forming step is switched from the first power supply line to the second power supply line during the RUN mode. The switching event is transmitted to the setting unit of the main control unit 239 via a shared memory (not shown), the determination unit determines that the energy saving operation is performed based on the event data, and the execution unit performs the data display unit 240a and the like. Is configured to display an icon indicating energy saving operation. Thereby, it is possible to monitor whether the substrate processing apparatus 100 is performing eco-operation (reducing consumption of commercial power). Furthermore, when the switching control unit operates (data indicating switching from the first power supply line 11 to the second power supply line 12 is generated), an eco-mark icon indicating that switching to the energy saving operation is displayed on the operation screen. Therefore, the degree (level) of eco-driving related to the power generated in the auxiliary power generation system 300 (the power of the second power supply line 12) can be grasped.

  FIG. 15 shows a fourth specific example according to the second embodiment of the present invention. As shown in FIG. 15, the present embodiment (fourth specific example) is a combination of the first specific example and the second specific example. Hereinafter, the operation of the control device according to the present embodiment will be described. FIG. 15 is a flowchart of switching of the power supply line by the switching control unit 336 according to the present embodiment. The operation of the control device is performed as one step of the semiconductor device manufacturing process.

  As shown in FIG. 15, the switching control unit 336 determines whether or not the apparatus state of the substrate processing apparatus 100 is in the IDLE mode (S510). In the IDLE mode (to YES), the monitoring unit activated by executing the power storage monitoring program executes monitoring of the battery 347 and determines whether the power storage amount is equal to or greater than a predetermined value (S520). When it is equal to or greater than the predetermined value (to YES), it is determined whether power is being supplied from the first power supply line 11 (S531). If it is being supplied (to YES), the switching control unit 336 is switched to the second power supply line 12 (S541). If not being supplied (NO), the supply from the second power supply line 12 is continued.

  When the amount of power stored in the battery 347 is less than the predetermined value (S520 → NO), it is determined whether power is being supplied from the second power supply line 12 (S532). If being supplied (to YES), the switching control unit 236 is switched to the first power supply line 11 (S542). If not being supplied (NO), the supply from the first power supply line 11 is continued.

  When not in the IDLE mode (S510 → NO), it is determined whether power is being supplied from the second power supply line 12 (S532). If supply is in progress (to YES), switching to the first power supply line 11 is performed (S542). If not being supplied (NO), the supply from the first power supply line 11 is continued. Thus, the power supply switching operation by the control device according to the present embodiment is completed.

  The monitoring unit monitors the power consumption during power supply from the second power supply line 12 and stores it in the database unit. The monitoring unit reads out the power consumption amount at a predetermined timing, and displays it on the data display unit 240a.

  In the present embodiment (fourth specific example), the same effects as those of the above-described embodiments (first specific example and second specific example) are obtained.

(A) Also, according to the present embodiment, the switching control unit 336 monitors the amount of electricity stored in the battery 347, and when the amount of electricity is greater than or equal to the amount of power sufficient to operate the substrate processing apparatus 100, The power is supplied from the second power supply line 12, and the power is supplied from the first power supply line 11 when the storage amount is less than a sufficient amount of power to operate the substrate processing apparatus 100. . Thereby, when the amount of power stored in the battery 347 is insufficient, the stable operation of the substrate processing apparatus 100 can be more reliably ensured by supplying the commercial power to the substrate processing apparatus 100. Further, when the amount of power stored in the battery 347 is sufficient, consumption of commercial power in the substrate processing apparatus 100 can be suppressed by using power from the fuel cell 311.

(B) Further, according to the present embodiment, the switching control unit 336 monitors the power consumption from the fuel cell 311 and stores the power consumption in the database unit in a readable manner, and also displays the power consumption in the data display unit. 240a is displayed. Thus, it can be seen how much the consumption of commercial power can be reduced.

(C) Further, according to the present embodiment, when the switching control unit 336 switches from the first power supply line to the second power supply line from the power storage monitoring program, this switching event is sent to the shared memory (not shown). To the setting unit of the main control unit 239, the determination unit determines that the eco-driving is performed based on the event data, and the execution unit displays an icon indicating the eco-driving on the data display unit 240a or the like. It may be configured. Thereby, it is possible to monitor whether the substrate processing apparatus 100 is performing eco-operation (reducing consumption of commercial power).

(D) Moreover, according to this embodiment, since the eco-driving monitoring program including the setting means, the determination means, the execution means and the like that are substantially the same as those of the first embodiment is executed, each of the first embodiment Needless to say, an effect can also be achieved. Further, when the switching control unit 336 operates (data indicating switching from the first power supply line 11 to the second power supply line 12 is generated) by the eco-operation monitoring program, an eco-mark indicating that switching to the energy-saving operation is performed. Since the icon is displayed on the operation screen, it is possible to grasp the degree (level) of eco-driving related to the power generated in the auxiliary power generation system 300 (power of the second power supply line 12).

(E) As described above, in the substrate processing apparatus 100, due to the necessity of the stable operation of the substrate processing apparatus 100, the substrate processing apparatus 100 is set in the IDLE mode and power supply is continued during the time period when the substrate processing is not performed. ing. Therefore, when at least the IDLE mode as described above is executed, the power storage monitoring program is executed to monitor the power storage amount, and if a predetermined condition (for example, “condition value” in the setting means) is satisfied, the second By performing power supply (energy saving operation) from the power supply line 12, consumption of commercial power in the substrate processing apparatus 100 can be suppressed.

(F) When the substrate processing apparatus 100 is in the IDLE mode, for example, the power supply to the heater 206 is stopped as described above, and the power consumption in the substrate processing apparatus 100 is compared with that in the RUN mode. The amount is kept low. Also, since the operation of each unit is small, such as the transfer mechanism such as the wafer transfer mechanism being stopped at the origin position, the power consumption is substantially constant, and it is easy to predict the amount of power required per unit time. Therefore, as described above, when the power storage monitoring program is executed and the predetermined condition is satisfied in the IDLE mode, power supply is performed from the second power supply line 12 to stabilize the substrate processing apparatus 100. Consumption of commercial power in the substrate processing apparatus 100 can be suppressed while ensuring the operation more reliably.

  FIG. 16 shows a fifth example in the second embodiment of the present invention. As shown in FIG. 16, the present embodiment (fifth specific example) is a combination of the first specific example and the third specific example. Hereinafter, the operation of the control device according to the present embodiment will be described. FIG. 16 is a flowchart of power supply line switching by the switching control unit according to the present embodiment. The operation of the control device is performed as one step of the semiconductor device manufacturing process.

  The switching control unit 336 according to the present embodiment receives information on the steps being performed from various control units via, for example, a switching hub. Such information exchange is performed, for example, via a shared memory (not shown) provided in the control device.

  As shown in FIG. 16, the switching control unit 336 determines whether a step other than the film formation step is being performed, for example (S610). When a step other than the film forming step is being performed (to YES), a monitoring unit (not shown) activated by executing the power storage monitoring program starts monitoring the battery 347 and determines whether the power storage amount is equal to or greater than a predetermined value. Judgment is made (S620). When the value is equal to or greater than the predetermined value (to YES), it is determined whether power is being supplied from the first power supply line 11 (S631). If being supplied (to YES), the switching control unit 336 is switched to the second power supply line 12 (S641). If not being supplied (NO), the supply from the second power supply line 12 is continued.

  When the amount of power stored in the battery 347 is less than the predetermined value (S620 → NO), it is determined whether power is being supplied from the second power supply line 12 (S632). If being supplied (to YES), the switching control unit 336 is switched to the first power supply line 11 (S642). If not being supplied (NO), the supply from the first power supply line 11 is continued.

  When the film forming step is being performed (S610 → NO), it is determined whether power is being supplied from the second power supply line 12 (S632). If supply is in progress (to YES), switching to the first power supply line 11 is performed (S642). If not being supplied (NO), the supply from the first power supply line 11 is continued. Thus, the power supply switching operation by the control device according to the present embodiment is completed.

  The monitoring unit monitors the power consumption during power supply from the second power supply line 12 and stores it in the database unit. In addition, the monitoring unit may be configured to read out the power consumption amount at a predetermined timing and display it on the data display unit 240a.

  In the present embodiment (fifth specific example), the same effects as those of the above-described embodiments (first specific example and third specific example) are obtained.

(A) Also, according to the present embodiment, the switching control unit 336 monitors the amount of electricity stored in the battery 347, and when the amount of electricity is greater than or equal to the amount of power sufficient to operate the substrate processing apparatus 100, The power is supplied from the second power supply line 12, and the power is supplied from the first power supply line 11 when the storage amount is less than a sufficient amount of power to operate the substrate processing apparatus 100. . Thereby, when the amount of power stored in the battery 347 is insufficient, the stable operation of the substrate processing apparatus 100 can be more reliably ensured by supplying the commercial power to the substrate processing apparatus 100. Further, when the amount of power stored in the battery 347 is sufficient, consumption of commercial power in the substrate processing apparatus 100 can be suppressed by using power from the fuel cell 311.

(B) Further, according to the present embodiment, the switching control unit 336 monitors the power consumption from the fuel cell 311 and stores the power consumption in the database unit in a readable manner, and also displays the power consumption in the data display unit. 240a is displayed. Thus, it can be seen how much the consumption of commercial power can be reduced.

(C) As described above, in the substrate processing step, oxygen (O ₂ ) gas, nitrogen (N ₂ ) gas, or the like is diffused to form a film such as an oxide film or a nitride film on the wafer 100. Depending on the contents of, for example, the duration of the film forming step may take a long time. In addition, the film forming step has a large influence on the substrate processing characteristics and yield as compared with other steps, and is highly important. Therefore, as described above, in the film forming step of forming a film on the wafer 200 while maintaining the inside of the processing chamber 201 at a predetermined condition, power is supplied from the first power supply line 11 suitable for long-time power supply. By doing so, stable operation of the substrate processing apparatus 100 can be ensured more reliably. In each of the other steps, the power storage monitoring program is executed to monitor the amount of power stored, and if a predetermined condition (for example, “condition value” in the setting means) is satisfied, the power is supplied from the second power supply line 12. By making the supply, consumption of commercial power can be suppressed.

(D) Moreover, according to this embodiment, since the eco-driving monitoring program including the setting means, the determination means, the execution means and the like that are substantially the same as those of the first embodiment is executed, each of the first embodiment Needless to say, an effect can also be achieved. Furthermore, when the switching control unit 336 operates (data indicating switching from the first power supply line 11 to the second power supply line 12 is generated) by this eco-operation monitoring program, the eco-operation indicating that switching to the energy-saving operation is performed. Since the mark icon is displayed on the operation screen, it is possible to grasp the degree (level) of eco-driving related to the power generated in the auxiliary power generation system 300 (the power of the second power supply line 12).

  The sixth specific example in the second embodiment of the present invention is a combination of the first specific example, the second specific example, and the third specific example. Hereinafter, the operation of the control device according to the present embodiment will be described.

The switching control unit 336 determines whether the apparatus state of the substrate processing apparatus 100 is in the IDLE mode. In the IDLE mode, monitoring of the battery 347 is started by executing the power storage monitoring program, and it is determined whether or not the power storage amount is a predetermined value or more. When it is equal to or greater than the predetermined value, it is determined whether or not power is being supplied from the first power supply line 11. If the power is being supplied, the switching control unit 336 is switched to the second power supply line 12. If not being supplied, the supply from the second power supply line 12 is continued.

  Further, when the amount of power stored in the battery 347 is less than a predetermined value, it is determined whether power is being supplied from the second power supply line 12. If the power is being supplied, the switching control unit 336 is switched to the first power supply line 11. If not being supplied, the supply from the first power supply line 11 is continued.

  When not in the IDLE mode, the switching control unit 336 determines whether a step other than the film forming step is being performed. When steps other than the film forming step are being performed, monitoring of the battery 347 is started by executing a power storage monitoring program, and it is determined whether the power storage amount is equal to or greater than a predetermined value. When it is equal to or greater than the predetermined value, it is determined whether or not power is being supplied from the first power supply line 11. If the power is being supplied, the switching control unit 336 is switched to the second power supply line 12. If not being supplied, the supply from the second power supply line 12 is continued.

  Further, when the amount of power stored in the battery 347 is less than a predetermined value, it is determined whether power is being supplied from the second power supply line 12. If the power is being supplied, the switching control unit 336 is switched to the first power supply line 11. If not being supplied, the supply from the first power supply line 11 is continued.

  Further, when the film forming step is being performed, it is determined whether power is being supplied from the second power supply line 12. If the power is being supplied, switching to the first power supply line 11 is performed. If not being supplied, the supply from the first power supply line 11 is continued. Thus, the power supply switching operation by the control device according to the present embodiment is completed.

  According to the present embodiment (sixth specific example), the first specific example, the second specific example, and the third specific example have the effects described above.

In the above-described second embodiment of the present invention (first to sixth specific examples), the fuel cell unit 310 includes a natural gas reforming device and an air supply device, from natural gas and air, Although the hydrogen-containing gas and the oxygen-containing gas are respectively obtained, when H ₂ gas or O ₂ gas is used in the substrate processing apparatus, these H ₂ gas source and O ₂ gas source are used as the fuel cell. The unit 310 may also be used. In particular, for example, when the substrate processing apparatus is operated by supplying and exhausting H ₂ gas or O ₂ gas into the processing chamber at all times in an almost unreacted state as a carrier gas, By taking in H ₂ gas and O ₂ gas from the exhaust side to the fuel cell unit, further effective utilization of resources becomes possible. Further, the configuration of the reformer or the like can be omitted in the fuel cell unit, and the fuel cell unit can be further downsized.

  In the above-described second embodiment of the present invention (the first to sixth specific examples), the eco-operation monitoring program and the power storage monitoring program are executed to shift to the energy-saving operation (substrate processing apparatus). In addition to displaying power supply to 100 from switching from commercial power to power generated by the auxiliary power generation system 300, it is possible to grasp the eco-operation state (eco-level) in the energy-saving operation. For example, eco-driving (commercial power consumption is reduced) by calculating an eco-driving index from event data indicating switching to energy-saving driving and a plurality of monitor data set as data indicating eco-driving status You can grasp the state of.

<Modification of Second Embodiment of the Present Invention>
Below, the modification of the 2nd Embodiment of this invention is demonstrated. This modification is realized by holding at least the eco-drive monitoring program and the power storage monitoring program in the data holding unit 503 and executing the respective programs by the control unit 501. Specifically, when the control unit 501 is activated, the eco-drive monitoring program and the power storage monitoring program described above are read from the data holding unit 503, and the setting unit, determination unit, and execution unit in the second embodiment described above are read out. By realizing this, the group management apparatus 500 is configured to function as the setting means, determination means, and execution means in the first embodiment described above. Further, the group management device 500 is configured such that when the power storage monitoring program is executed, the switching control unit 336 can perform switching control of the power supply line. The eco check condition is configured to be input using the input unit 506.

  Further, the power generation unit 300 is not limited to the configuration in the present embodiment, and for example, as will be described later, a power generation unit that generates power using the power of the driving unit may be provided.

<Other Embodiments of the Present Invention>
The present invention is not limited to the case where the substrate processing apparatus 100 and the group management apparatus 500 are arranged on the same floor (in the same clean room). For example, the substrate processing apparatus 100 is arranged in a clean room, and the group management apparatus 500 is arranged in an office (a floor different from the clean room) so that the progress of the recipe and the state of the substrate processing apparatus 100 can be monitored remotely. May be. Similarly, according to the first embodiment and the second embodiment of the present invention, the auxiliary power generation system (power generation unit) 300 is integrated with the substrate processing apparatus 100 or the group management apparatus 500. The configuration is not limited to this. Next, a configuration in which the auxiliary power generation system (power generation unit) 300 is separated from the substrate processing apparatus 100 and the group management apparatus 500 in the third embodiment of the present invention will be described.

<Third Embodiment of the Present Invention>

  FIG. 18 is a diagram showing a substrate processing system 36 according to the third embodiment of the present invention. In the substrate processing system 36, it is assumed that the substrate processing apparatus 1 and a management device 54 such as a PC are installed on the same floor (clean room). In the present embodiment, the setting means, determination means, and execution means realized by executing the eco-driving monitoring program are the same as the setting means, determination means, and execution means in the second embodiment described above. Needless to say, it is a function. The contents of the power storage monitoring program are substantially the same as those in the second embodiment. In the second embodiment, the switching control unit 336 is provided in the substrate processing apparatus controller 240. The difference is that a supply power switching controller 49 for executing a program is provided separately from the substrate processing apparatus controller 240. Therefore, this difference in configuration will be briefly described below.

FIG. 17 is a diagram illustrating a list of setting contents of the eco-check condition in the third embodiment of the present invention. FIG. 17 is almost the same as the diagram illustrating the list of setting contents of the eco check condition in the second embodiment shown in FIG. Therefore, only a brief explanation will be given below.

(Setting method)
In addition, the setting means provided in the management device 54 such as a PC is the monitor data corresponding to the data type to be determined whether or not the vehicle is eco-friendly, the determination condition relating to the determination of whether or not the vehicle is eco-friendly, and the data type. Accepts input of a condition value to be compared when determining whether or not the data value specified from the condition satisfies the determination condition, and a setting of a predetermined operation (action) performed when the data value does not satisfy the determination condition It is configured as follows. In the setting means shown in FIG. 17, as in FIG. 3 and FIG. 10, “ID” for identifying each eco check condition, “condition name” for displaying the name of the eco check condition, “data type”, “determination” Setting information for each item of “condition”, “condition value”, and “predetermined operation” is input using the input means 240b. Each item of the input eco-check condition is stored in a data holding unit (not shown) in association with each other for each eco-check condition. Here, since the specific example of the eco-check condition shown in FIG. 17 is the same as that in FIG. 10, the description of the eco-check condition is omitted. The determination unit and the execution unit are the same as those in the first embodiment and the second embodiment, and thus description thereof is omitted. Furthermore, various processes (eco-driving determination process and the like) realized by the eco-driving monitoring program are applied in substantially the same manner as in the first embodiment and the second embodiment, and thus description thereof is omitted.

  Next, referring to FIG. 18, a substrate processing system 36 in which the substrate processing apparatus 1 of this embodiment is used will be described.

  The processing chamber 37 is connected to a suction port 41 of a vacuum pump 39 which is an exhaust means through a gas exhaust pipe 38. The vacuum pump 39 has a rotor 42, and the rotor 42 is rotated by a rotor drive motor 43, which is a driving means, so that the inside of the processing chamber 37 sucked into the vacuum pump 39 from the suction port 41. The gas is discharged from the discharge port 44. The rotor drive motor 43 is connected to an external power supply (not shown) via an external power supply cable 52, which will be described later, so that the rotor 42 is rotated by supplying power from the external power supply. It has become.

  The rotor 42 or the rotor drive motor 43 is mechanically connected to a power generation unit 45 as power generation means, and the power generation motor of the power generation unit 45 is driven by surplus power among the power for driving the vacuum pump 39. Rotate (not shown) to generate power.

  The power generation unit 45 is connected to a battery 47 as stored power supply means via a generated power supply cable 46, and the power generated by the power generation unit 45 is stored in the battery 47. 47 is connected via a battery power supply cable 48 to a supply power switching controller 49 as switching means.

  The supply power switching controller 49 is connected to the substrate processing apparatus 1 via a power cable 51 and connected to an external power supply (not shown) which is an external power supply means outside the clean room via the external power supply cable 52. In addition to being connected, it is connected to a management device 54 such as a PC via a communication means such as a LAN 53. Further, the management device 54 is connected to the control device 27 via a communication means such as a LAN 55, and inputs of instructions and settings from the management device 54 to the control device 27 and the supply power switching controller 49. Can be done.

  The supply power switching controller 49 includes a supply power switching unit 56, a battery storage amount monitoring unit 57, and a power usage amount measuring unit 58.

  The power supply switching unit 56 determines whether power is supplied to the substrate processing apparatus 1 from the battery 47 or an external power source (not shown), and externally if the power supply source is the battery 47. If the power supply source is an external power source (not shown) to a power source (not shown), the battery 47 has a function of switching the power supply source.

  The battery storage amount monitoring unit 57 constantly monitors the storage amount of electric power stored in the battery 47, outputs the detected storage amount to the management device 54, and the detected storage amount is the management device 54. It has a function of determining whether or not the value exceeds a preset value.

  The power consumption measuring unit 58 has a function of measuring the amount of power supplied from the battery 47 to the substrate processing apparatus 1 and outputting the measurement result to the management apparatus 54.

  When the start of the substrate processing is input from the control device 27 or the management device 54, a sequence program stored in the storage unit for controlling each mechanism unit and performing a transport process is executed.

  According to the sequence program, the transfer control unit drives the pod transfer device 118, loads the pod 110 into the substrate processing apparatus 1, and loads the pod 110 transferred into the substrate processing apparatus 1 to the pod storage unit and the pod opener 121. Transport.

  Next, the substrate transfer machine 125 is driven according to the sequence program, the wafers 200 in the pod 110 mounted on the mounting table 122 are transferred to the boat 217, and finally the boat elevator 115 is driven, The boat 217 is charged into the processing furnace 202.

  After the loading of the boat 217, a control program for controlling the pressure, gas flow rate, and temperature to perform process processing is executed. When the control program is executed, the pressure in the processing chamber 37 is controlled by controlling the vacuum pump 39 by the pressure control unit 236 according to the recipe stored in the storage unit. The control unit 33 controls a gas supply unit (not shown) to control the flow rates of the processing gas and purge gas supplied into the processing chamber 37, and the heating control unit 34 controls a heating unit (not shown). The wafer 200 in the processing chamber 37 is heated, and a predetermined film is generated on the wafer 200.

  The processing conditions of the wafer 3 at this time, the progress of processing, and the like are displayed on the display unit and are also output to the management device 54 via the LAN 55. The processing conditions of the wafer 200 are also output from the management device 54. The progress status of the process can be confirmed.

  After a predetermined film is formed on the wafer 200, a sequence program for controlling each mechanism unit is executed again, and a pod containing the processed wafer 200 is performed by performing a process opposite to the above-described transfer process. 110 is carried out of the substrate processing apparatus 1 and the substrate processing is completed.

  In the above processing, the substrate processing apparatus 1 is normally operated by supplying external power from an external power source (not shown) through the supply power switching controller 49. In process processing, The rotor 42 is rotated by the rotation of the rotor drive motor 43, and the rotation of the rotor 42 causes the gas in the processing chamber 37 to be exhausted through the gas exhaust pipe 38, thereby adjusting the pressure in the processing chamber 37. Has been.

  As the rotor drive motor 43 or the rotor 42 is rotated by the rotor drive motor 43, the rotor 42 or a power generation motor (not shown) of the power generation unit 45 mechanically connected to the rotor drive motor 43 rotates. Power is generated. That is, the power generation unit 45 is driven by surplus power of the rotor drive motor 43 that drives the vacuum pump 39, and surplus energy is recovered as electric power. The electric power generated in the power generation unit 45 is stored in the battery 47 via the generated power supply cable 46.

  Whether the storage amount of power stored in the battery 47 exceeds a specified value preset by the management device 54 is constantly monitored by the battery storage amount monitoring unit 57 of the supply power switching controller 49. When the amount of electricity stored in the battery 47 exceeds a specified value, the supply source of the power supplied to the substrate processing apparatus 1 by the supply power switching unit 56 is changed from an external power source (not shown) to the battery 47. The power is supplied from the battery 47 to the substrate processing apparatus 1 via the supply power switching controller 49.

  In the state where electric power is supplied from the battery 47 to the substrate processing apparatus 1, when the stored amount of the battery 47 falls below a specified value, the supply power switching unit 56 supplies the electric power to the substrate processing apparatus 1. The power supply source is switched from the battery 47 to an external power source (not shown).

  Further, in a state where power is supplied from the battery 47 to the substrate processing apparatus 1, the power usage amount measurement unit 58 measures the usage amount of power supplied from the battery 47, and the measurement result is The data is output to the management device 54 via the LAN 53.

  Next, the power supply source switching process for the substrate processing apparatus 1 will be described with reference to the flowchart of FIG. Since the flow is the same as in FIG. 12, the description will be simplified.

  (Step 01) After the substrate processing is started, the battery storage amount monitoring unit 57 monitors the storage amount of the battery 47, and whether the storage amount of the battery 47 is equal to or greater than a predetermined value preset by the management device 54. To be judged.

  STEP: 02 When it is determined in STEP: 01 that the amount of electricity stored in the battery 47 is greater than or equal to a specified value, the supply source of the power supplied to the substrate processing apparatus 1 by the supply power switching unit 56 is an external power source. If it is determined whether the power supply source is not an external power source (not shown), the power supply source is not switched by the supply power switching unit 56, and the battery is again supplied. The storage amount monitoring unit 57 monitors the storage amount of the battery 47.

  STEP: 03 When it is determined in STEP: 02 that the power supply source supplied to the substrate processing apparatus 1 is an external power source (not shown), the power supply source is externally supplied by the supply power switching unit 56. The battery 47 is switched from a power source (not shown), and the battery charge amount monitoring unit 57 monitors the charge amount of the battery 47 again.

  STEP: 04 If it is determined in STEP: 01 that the amount of electricity stored in the battery 47 is less than a specified value, the supply source of the power supplied to the substrate processing apparatus 1 by the supply power switching unit 56 is the battery. If the power supply source is not the battery 47, the power storage source is not switched by the power supply switching unit 56, but the battery charge amount monitoring unit 57 again performs the battery storage amount monitoring unit 57. The amount of stored power 47 is monitored.

  STEP: 05 When it is determined in STEP: 04 that the power supply source supplied to the substrate processing apparatus 1 is the battery 47, the power supply source is externally connected from the battery 47 by the supply power switching unit 56. The power is switched to a power source (not shown), and the battery charge amount monitoring unit 57 monitors the charge amount of the battery 47 again.

  The processing of STEP: 01 to STEP: 05 may be repeated in a state where the substrate processing is completed and the substrate to be processed does not exist in the substrate processing apparatus 1 regardless of the present embodiment. It should be noted that the amount of electricity stored in the substrate processing may be measured in advance, and power may be supplied from the battery 47 in the substrate processing when the amount of electricity stored is far exceeded.

  As described above, in this embodiment, the power generation unit 45 that generates electric power with the surplus power of the rotor drive motor 43 that drives the vacuum pump 39 is provided, and the electric power generated by the power generation unit 45 is stored in the battery 47. In addition, the substrate processing apparatus 1 is operated using the electric power stored in the battery 47, that is, the surplus power of the rotor drive motor 43 is converted into electric power and reused. Energy saving and CO2 reduction in processing can be achieved, and the running cost of the substrate processing apparatus 1 can be reduced.

  Also, since the power consumption measuring unit 58 measures the amount of power supplied from the battery 47, it is possible to reduce how much power from an external power source (not shown) can be reduced during substrate processing. Can be obtained by actual measurement.

  In this embodiment, the battery storage amount monitoring unit 57 constantly monitors the storage amount of the battery 47 and detects the storage amount of the battery 47 in real time, but is set by the management device 54. The specified value may be adjusted to detect the amount of power stored in the battery 47 at regular intervals.

  In this embodiment, the battery storage amount monitoring unit 57 determines whether or not the storage amount of the battery 47 exceeds a specified value in the supply power switching controller 49. 49, only the detection of the amount of electricity stored in the battery 47 may be performed, and the management device 54 may determine whether the amount of electricity stored in the battery 47 exceeds a specified value and determine whether to switch the supply source.

  In this embodiment, a specified value for the storage amount is set by the management device 54, and the detection results and measurement results of the battery storage amount monitoring unit 57 and the power usage amount measurement unit 58 are output to the management device 54. However, the operation unit and the display unit are provided in the supply power switching controller 49, the specified value of the storage amount is directly set from the supply power switching controller 49, and the detection result of the storage amount and the measurement of the used power are measured. The value may be displayed on the supply power switching controller 49.

In this embodiment, the battery storage amount monitoring unit 57 determines whether or not the storage amount of the battery 47 exceeds a specified value in the supply power switching controller 49. The power supply source may be switched by the supply power switching unit 56 in stages (holding the first specified value and the second specified value). For example, if the storage amount stored by the battery storage amount monitoring unit 57 is greater than or equal to a preset first specified value, power is supplied from the battery 47 to the substrate processing apparatus 1, and the power amount is stored in advance. If it is less than the set first specified value and greater than or equal to the second specified value, the substrate 47 is transferred from the battery 47 to the substrate processing apparatus 1 in a state where the substrate to be processed is not put in the substrate processing apparatus 1. When electric power is supplied and the amount of electric power is less than a preset second specified value, the electric power generated by the power generation means is stored in the battery 47. If the amount of power is less than a preset second specified value, the power supply source supplied to the substrate processing apparatus 1 is power supply means (external power source) for supplying commercial power.

According to such a configuration, the surplus power of the rotor drive motor 43 can be converted into electric power, and the electric power stored in the battery 47 can be reused more efficiently, so that energy saving in substrate processing and CO2 reduction can be achieved. Reduction can be further promoted, and the running cost of the substrate processing apparatus 1 can be further reduced.

In the third embodiment as described above, as in the second embodiment, an eco-drive monitoring program including at least setting means, determination means, execution means, and the like, and power storage monitoring for monitoring the amount of power stored in the battery Since each of the programs is executed, the same effects as those in the second embodiment are obtained. As an example, not only the transition to energy-saving operation (switching the power supply to the substrate processing apparatus 1 from commercial power to power generated by the power generation unit 45) is displayed, but also the eco-operation state in the energy-saving operation ( (Eco-level) can be ascertained.

  The present invention is not limited to film formation by CVD (Chemical Vapor Deposition), ALD (Atomic Layer Deposition), PVD (Physical Vapor Deposition), as well as diffusion, annealing, oxidation, nitridation, lithography, etc. It can be suitably applied to the substrate processing. Furthermore, the present invention can be suitably applied to other substrate processing apparatuses such as an annealing processing apparatus, an oxidation processing apparatus, a nitriding processing apparatus, an exposure apparatus, a coating apparatus, a drying apparatus, and a heating apparatus in addition to a thin film forming apparatus.

  The present invention is not limited to a substrate processing apparatus that processes a substrate such as the semiconductor manufacturing apparatus according to the present embodiment, but is also suitably applied to a substrate processing apparatus that processes a glass substrate such as an LCD (Liquid Crystal Display) manufacturing apparatus. it can.

  As mentioned above, although embodiment of this invention was described concretely, this invention is not limited to the above-mentioned embodiment, It can change variously in the range which does not deviate from the summary.

<Preferred embodiment of the present invention>
Hereinafter, desirable aspects of the present invention will be additionally described.

[Appendix 1]
The first aspect of the present invention is:
Based on a data value corresponding to a data type to be determined whether or not to be eco-driving, a condition value to be compared with the data value, and a determination condition relating to determination of whether or not to be eco-driving This is an eco-driving monitoring method for performing a predetermined operation in accordance with a result of comparing and comparing the data value and the condition value.

[Appendix 2]
The second aspect of the present invention is:
Data type to be determined whether or not to be eco-driving, determination condition for determining whether or not to be eco-driving, and whether or not a data value corresponding to the data type satisfies the determination condition A setting means for receiving an input of a setting of a predetermined operation performed when the condition value to be compared at the time and the data value do not satisfy the determination condition;
A determination unit that compares the data value with the condition value based on the determination condition, and determines whether the data value satisfies the determination condition;
Is an eco-driving monitoring device.

[Appendix 3]
It is preferable that the data processing apparatus further includes execution means for executing the predetermined operation in accordance with a result of the data being compared based on the determination condition.

[Appendix 4]
Moreover, it is preferable to further have a display means for displaying a determination result as to whether or not the data value satisfies the determination condition.

[Appendix 5]
The third aspect of the present invention is:
A host management device connected to a substrate processing apparatus for processing a substrate,
A communication unit that generates monitor data indicating the progress of the substrate processing process and the state of the substrate processing apparatus, which is generated by the substrate processing apparatus, from the substrate processing apparatus;
A storage unit for storing the monitor data received from the substrate processing apparatus;
The data type to be determined whether or not the vehicle is eco-friendly, the determination condition related to the determination of whether or not the vehicle is eco-friendly, and the data value specified from the monitor data corresponding to the data type satisfies the criteria A setting means for receiving a condition value to be compared when determining whether or not to satisfy, and an input of a setting of a predetermined operation performed when the data value does not satisfy the determination condition;
A determination unit that compares the data value with the condition value based on the determination condition, and determines whether the data value satisfies the determination condition;
Is a high-order management device.

[Appendix 6]
The monitor data is an arbitrary period from when the substrate is loaded into the substrate holder of the substrate processing apparatus to when it is detached from the substrate container, from the start to the end of the process recipe relating to the processing of the substrate. Preferably, it is collected for a period of time or a predetermined period in the process recipe.

[Appendix 7]
In addition, it is preferable to further include an execution unit that executes the predetermined operation in accordance with a result of comparison of the data value based on the determination condition.

[Appendix 8]
Moreover, it is preferable to further have a display means for displaying a determination result as to whether or not the data value satisfies the determination condition.

[Appendix 9]
Moreover, it is preferable that the said display means is comprised so that the icon which shows the said determination result may be displayed.

[Appendix 10]
The display means is preferably configured to display different icons when the data value satisfies the determination condition and when the data value does not satisfy the determination condition.

[Appendix 11]
The display means displays the icon indicating the determination result for each data type, and when the data value satisfies the determination condition and when the data value does not satisfy the determination condition, respectively. It is preferable to be configured to display different icons.

[Appendix 12]
The display unit is preferably configured to display a screen showing details of the determination result when the icon is pressed.

[Appendix 13]
Further, an eco level of the substrate processing apparatus is calculated based on the determination result stored in the storage unit,
Preferably, the display means is configured to display a level meter that indicates the calculated eco level in multiple stages.

[Appendix 14]
The fourth aspect of the present invention is:
A substrate processing apparatus for processing a substrate,
A storage unit for storing monitor data indicating the progress of the substrate processing process and the state of the substrate processing apparatus;
The data type to be determined whether or not the vehicle is eco-friendly, the determination condition related to the determination of whether or not the vehicle is eco-friendly, and the data value specified from the monitor data corresponding to the data type satisfies the criteria A setting means for receiving a condition value to be compared when determining whether or not to satisfy, and an input of a setting of a predetermined operation performed when the data value does not satisfy the determination condition;
A determination unit that compares the data value with the condition value based on the determination condition, and determines whether the data value satisfies the determination condition;
Is a substrate processing apparatus.

[Appendix 15]
According to a fifth aspect of the present invention,
A substrate processing system comprising: a substrate processing apparatus that processes a substrate; and an upper management device connected to the substrate processing apparatus,
The substrate processing apparatus includes:
Generate monitor data indicating the progress of the substrate processing process and the state of the substrate processing apparatus,
Configured to transmit the generated monitor data to the host management device;
The upper management device is:
A communication unit receives the monitor data from the substrate processing apparatus;
Store the received monitor data in the storage unit,
The setting means has a data type to be determined as to whether or not it is eco-driving, a judgment condition relating to judgment as to whether or not it is eco-driving, and a data value specified from the monitor data corresponding to the data type. Receiving a condition value to be compared when determining whether or not the determination condition is satisfied, and an input of a setting of a predetermined operation performed when the data value does not satisfy the determination condition;
The substrate processing system is configured such that the determination unit compares the data value with the condition value based on the determination condition, and determines whether or not the data value satisfies the determination condition.

[Appendix 16]
A first power supply line for supplying commercial power;
A second power supply line for supplying power generated by the fuel cell;
It is a substrate processing apparatus provided with the switching control part which switches.

[Appendix 17]
It is preferable to further include a power storage unit that stores the power generated by the fuel cell.

[Appendix 18]
In the second power supply line,
A fuel power generation unit configured to generate power by burning a hydrogen-containing gas and an oxygen-containing gas by the fuel cell;
A water vapor generation unit that generates water vapor using water and exhaust heat generated in the fuel power generation unit;
A steam power generation unit that generates power using the steam generated by the steam generation unit;
An auxiliary power generation system is connected.

[Appendix 19]
The power storage unit
The power generated by the fuel power generation unit, the power generated by the steam power generation unit,
Is preferably configured to store the power.

[Appendix 20]
At least one of the hydrogen-containing gas or the oxygen-containing gas used in the fuel cell is
It is preferable to be configured to be supplied from a hydrogen-containing gas or oxygen-containing gas used in the substrate processing apparatus and a gas supply source.

[Appendix 21]
The switching control unit
Monitoring the amount of electricity stored in the electricity storage unit;
If the amount of stored electricity is greater than or equal to the amount of power sufficient to operate the substrate processing apparatus, power is supplied from the second power supply line,
It is preferable that power is supplied from the first power supply line when the amount of stored electricity is less than a sufficient amount of power for operating the substrate processing apparatus.

[Appendix 22]
The substrate processing apparatus includes:
A plurality of apparatus states including at least a standby state in which maintenance work is possible and a running state in which substrate processing is performed;
The switching control unit
When the device state is the running state, power is supplied from the first power supply line,
When the device state is the standby state, power is supplied from the second power supply line.

[Appendix 23]
Yet another aspect of the present invention is:
By the switching control unit provided in the substrate processing apparatus,
This is a control method for a substrate processing apparatus that switches between a first power supply line that supplies commercial power and a second power supply line that supplies power generated by a fuel cell.

[Appendix 24]
The sixth aspect of the present invention is:
A substrate processing apparatus comprising at least a processing chamber for processing a substrate, an exhaust means for exhausting a gas in the processing chamber, and a driving means for driving the exhaust means;
Power switching provided with switching means for supplying power to the substrate processing apparatus from any one of power generation means for generating power using the power of the drive means and power supply means for supplying commercial power with the power generation means A control device;
Is a substrate processing system.

[Appendix 25]
The power switching control device
Furthermore, a storage power supply means capable of storing the power generated by the power generation means,
If the amount of power stored in the stored power supply means is equal to or greater than a predetermined value, power is supplied from the stored power supply means to the substrate processing apparatus,
If the amount of power is less than a preset specified value, it is preferable to store the power generated by the power generation means in the stored power supply means.

[Appendix 26]
The power switching control device
Furthermore, a storage power supply means capable of storing the power generated by the power generation means,
If the amount of power stored in the stored power supply means is greater than or equal to a preset first specified value, power is supplied from the stored power supply means to the substrate processing apparatus,
If the amount of electric power is less than a preset first specified value and greater than or equal to a second specified value, the stored power supply means provides a state in which no substrate to be processed is put in the substrate processing apparatus. Supplying power to the substrate processing apparatus;
If the amount of power is less than a preset second specified value, it is preferable to store the power generated by the power generation means in the stored power supply means.

1
Substrate processing apparatus 36
Substrate processing system 45
Power generation unit 47
Battery 49
Supply power switching controller (switching control means)
54
Management device 100
Substrate processing apparatus 240 Controller in substrate processing apparatus (control device)
300 Power Generation Auxiliary System 336 Switching Control Unit 347 Battery 500
Group management device 501
Control unit

Claims (5)

A data holding unit in which monitor data is stored;
An item that identifies the eco-check condition indicating the condition for checking whether the substrate processing apparatus is operating while suppressing energy consumption, and an object for determining whether the substrate processing apparatus is an eco-operation that operates while suppressing energy consumption An item indicating the data type, an item indicating the determination condition for determining whether the vehicle is eco-friendly, and a comparison when determining whether the data value of the monitor data corresponding to the data type satisfies the determination condition Among the monitor data stored in the data holding unit, the setting means for receiving the setting input of the item indicating the target condition value and the item indicating the index for comparing the data value of the monitor data with the condition value The data value of the monitor data corresponding to the data type is compared with the condition value to determine whether the data value satisfies the determination condition. A control unit having a judging means, at least,
A data display unit for displaying an icon indicating a determination result of whether or not the determination condition is satisfied for determining whether the data value is the eco driving;
Have
The controller is
Receiving each item of the eco-check conditions;
Reading the monitor data corresponding to each item of the eco-check condition from the data holding unit, and monitoring the data value of the monitor data according to the determination condition;
The substrate processing apparatus is configured to compare the data value of the monitor data with the condition value for each item for identifying the eco-check condition according to the index and determine whether the data value satisfies the determination condition. Calculating a numerical value of how much the eco-driving is progressing in
Displaying an icon indicating an eco level determined according to the calculated index in an area that is always displayed regardless of screen switching;
The monitoring apparatus which monitors the operation state of the substrate processing apparatus characterized by performing this. A substrate processing system including a substrate processing apparatus that processes a substrate and a group management apparatus that manages the substrate processing apparatus,
The group management device includes:
A data holding unit in which monitor data is stored;
An item that identifies the eco-check condition indicating the condition for checking whether the substrate processing apparatus is operating while suppressing energy consumption, and an object for determining whether the substrate processing apparatus is an eco-operation that operates while suppressing energy consumption An item indicating the data type, an item indicating the determination condition for determining whether the vehicle is eco-friendly, and a comparison when determining whether the data value of the monitor data corresponding to the data type satisfies the determination condition Among the monitor data stored in the data holding unit, the setting means for receiving the setting input of the item indicating the target condition value and the item indicating the index for comparing the data value of the monitor data with the condition value The data value of the monitor data corresponding to the data type is compared with the condition value to determine whether the data value satisfies the determination condition. A control unit having a judging means, at least,
A data display unit for displaying an icon indicating a determination result of whether or not the determination condition is satisfied for determining whether the data value is the eco driving;
Have
The controller is
Receiving each item of the eco-check conditions;
Reading the monitor data corresponding to each item of the eco-check condition from the data holding unit, and monitoring the data value of the monitor data according to the determination condition;
The substrate processing apparatus is configured to compare the data value of the monitor data with the condition value for each item for identifying the eco-check condition according to the index and determine whether the data value satisfies the determination condition. Calculating a numerical value of how much the eco-driving is progressing in
Displaying an icon indicating an eco level determined according to the calculated index in an area that is always displayed regardless of screen switching;
The substrate processing system characterized by performing. A data holding unit in which monitor data is stored;
An item that identifies the eco-check condition indicating the condition for checking whether the substrate processing apparatus is operating while suppressing energy consumption, and an object for determining whether the substrate processing apparatus is an eco-operation that operates while suppressing energy consumption An item indicating the data type, an item indicating the determination condition for determining whether the vehicle is eco-friendly, and a comparison when determining whether the data value of the monitor data corresponding to the data type satisfies the determination condition Among the monitor data stored in the data holding unit, the setting means for receiving the setting input of the item indicating the target condition value and the item indicating the index for comparing the data value of the monitor data with the condition value The data value of the monitor data corresponding to the data type is compared with the condition value to determine whether the data value satisfies the determination condition. A control unit having a judging means, at least,
A data display unit for displaying an icon indicating a determination result of whether or not the determination condition is satisfied for determining whether the data value is the eco driving;
Have
The controller is
Receiving each item of the eco-check conditions;
Reading the monitor data corresponding to each item of the eco-check condition from the data holding unit, and monitoring the data value of the monitor data according to the determination condition;
The substrate processing apparatus is configured to compare the data value of the monitor data with the condition value for each item for identifying the eco-check condition according to the index and determine whether the data value satisfies the determination condition. Calculating a numerical value of how much the eco-driving is progressing in
Displaying an icon indicating an eco level determined according to the calculated index in an area that is always displayed regardless of screen switching;
The substrate processing apparatus characterized by performing. A data holding unit in which monitor data is stored;
An item that identifies the eco-check condition indicating the condition for checking whether the substrate processing apparatus is operating while suppressing energy consumption, and an object for determining whether the substrate processing apparatus is an eco-operation that operates while suppressing energy consumption An item indicating the data type, an item indicating the determination condition for determining whether the vehicle is eco-friendly, and a comparison when determining whether the data value of the monitor data corresponding to the data type satisfies the determination condition Among the monitor data stored in the data holding unit, the setting means for receiving the setting input of the item indicating the target condition value and the item indicating the index for comparing the data value of the monitor data with the condition value The data value of the monitor data corresponding to the data type is compared with the condition value to determine whether the data value satisfies the determination condition. A control unit having a judging means, at least,
A data display unit for displaying an icon indicating a determination result of whether or not the determination condition is satisfied for determining whether the data value is the eco driving;
A display method for displaying an operating state of a substrate processing apparatus having
Receiving each item of the eco-check conditions;
Reading the monitor data corresponding to each item of the eco-check condition from the data holding unit, and monitoring the data value of the monitor data according to the determination condition;
The substrate processing apparatus is configured to compare the data value of the monitor data with the condition value for each item for identifying the eco-check condition according to the index and determine whether the data value satisfies the determination condition. Calculating a numerical value of how much the eco-driving is progressing in
Displaying an icon indicating an eco level determined according to the calculated index in an area that is always displayed regardless of screen switching;
A display method for a substrate processing apparatus, comprising: A data holding unit in which monitor data is stored;
An item that identifies the eco-check condition indicating the condition for checking whether the substrate processing apparatus is operating while suppressing energy consumption, and an object for determining whether the substrate processing apparatus is an eco-operation that operates while suppressing energy consumption An item indicating the data type, an item indicating the determination condition for determining whether the vehicle is eco-friendly, and a comparison when determining whether the data value of the monitor data corresponding to the data type satisfies the determination condition Among the monitor data stored in the data holding unit, the setting means for receiving the setting input of the item indicating the target condition value and the item indicating the index for comparing the data value of the monitor data with the condition value The data value of the monitor data corresponding to the data type is compared with the condition value to determine whether the data value satisfies the determination condition. A control unit having a judging means, at least,
A data display unit for displaying an icon indicating a determination result of whether or not the determination condition is satisfied for determining whether the data value is the eco driving;
A program executed by a substrate processing apparatus having:
In the control unit,
A procedure for accepting each item of the eco-check condition;
Reading the monitor data corresponding to each item of the eco-check condition from the data holding unit, and monitoring the data value of the monitor data according to the determination condition;
The substrate processing apparatus is configured to compare the data value of the monitor data with the condition value for each item for identifying the eco-check condition according to the index and determine whether the data value satisfies the determination condition. A procedure for calculating an index that quantifies the degree of progress of the eco-driving in
A procedure for displaying an icon indicating an eco-level determined according to the calculated index in an area that is always displayed regardless of screen switching;
A program that executes