JP6181467B2 - Program, information processing apparatus and information processing method - Google Patents

Description

  The present invention relates to a program for performing information processing by a computer having a control unit, an information processing apparatus, and an information processing method.

  A film-formed material (hereinafter referred to as a sample) in which diamond-like carbon (DLC) is formed on a substrate is used in various directions (for example, see Patent Document 1).

JP 2009-84591 A

  However, conventionally, various types of samples have been provided, and there is a problem that it is unclear what kind of sample affects what kind of living body.

  The present invention has been made in view of such circumstances. In one aspect, the present invention provides a program or the like that can grasp the biocompatibility of a sample.

The program according to the present invention provides a computer having a control unit, the film thickness of DLC obtained by irradiating a sample having diamond-like carbon (DLC) formed on a substrate with a spectroscopic ellipsometer, or the optical thickness of the DLC. A constant is acquired by the control unit, a storage unit that stores the biocompatibility of the DLC with respect to the living body in association with the film thickness or the optical constant is referred to, and the living body corresponding to the film thickness or the optical constant acquired by the control unit A process of reading out the affinity and outputting the read-out bioaffinity by the control unit is executed.

  The program according to the present invention acquires the surface roughness of the DLC obtained by irradiating the sample with light using a spectroscopic ellipsometer by the control unit, and associates the DLC with the film thickness, optical constant, or surface roughness. Referring to the storage unit storing the biocompatibility, the control unit causes the biocompatibility corresponding to the acquired film thickness, optical constant, or surface roughness to be read.

  In the program according to the present invention, biocompatibility is stored in the storage unit in association with a film thickness or an optical constant for each of a plurality of cells cultured in DLC, and a cell type is received by the control unit. Then, a process of reading the bioaffinity corresponding to the received cell and the acquired film thickness or optical constant from the storage unit is executed.

  In the program according to the present invention, biocompatibility is stored in the storage unit in association with a film thickness or an optical constant for each of a plurality of uses of the sample, and the use is accepted by the control unit. And the process which reads the bioaffinity corresponding to the acquired film thickness or optical constant from the said memory | storage part is performed.

  The program according to the present invention causes a process of outputting a film thickness or an optical constant stored in the storage unit corresponding to the read biocompatibility.

In the information processing apparatus according to the present invention, the control unit controls the thickness or optical constant of the DLC obtained by irradiating a sample with diamond-like carbon (DLC) formed on a substrate with a spectroscopic ellipsometer. The biometric affinity corresponding to the film thickness or the optical constant acquired by the acquisition unit is obtained by referring to the acquisition unit acquired by the above and the storage unit storing the biocompatibility of the DLC with respect to the living body in association with the film thickness or the optical constant. A reading unit that reads out and an output unit that outputs the biocompatibility read out by the reading unit.

An information processing method according to the present invention is an information processing method using an information processing apparatus having a control unit, wherein a sample having diamond-like carbon (DLC) formed on a substrate is irradiated with light by a spectroscopic ellipsometer. The film thickness or optical constant of the DLC obtained by the above is acquired by the control unit, and the storage unit that stores the biocompatibility of the DLC with respect to the living body in association with the film thickness or the optical constant is acquired by the control unit. The biocompatibility corresponding to the measured film thickness or optical constant is read, and the read biocompatibility is output by the control unit.

  According to one aspect, it is possible to grasp the biocompatibility of a sample. In addition, conditions necessary for film formation can be fed back, and a sample can be provided efficiently.

It is a block diagram which shows the hardware constitutions of a spectroscopic ellipsometer. It is explanatory drawing which shows the record layout of result DB. It is explanatory drawing which shows the record layout of biometric DB. It is a flowchart which shows the output processing procedure of a cell growth rate. It is explanatory drawing which shows the record layout of biometric DB which concerns on Embodiment 2. FIG. 10 is a flowchart showing a procedure for outputting a cell growth rate according to the second embodiment. It is explanatory drawing which shows the record layout of biometric DB which concerns on Embodiment 3. FIG. 12 is a flowchart showing a procedure for outputting a cell proliferation rate according to the third embodiment. 10 is a flowchart illustrating an output processing procedure according to the fourth embodiment. FIG. 10 is a block diagram illustrating a hardware group of a spectroscopic ellipsometer according to a fifth embodiment. It is a flowchart which shows the output processing procedure of a cell growth rate. It is explanatory drawing which shows the record layout of biometric DB which concerns on Embodiment 7. FIG.

Embodiment 1
Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a block diagram showing a hardware configuration of a spectroscopic ellipsometer. The spectroscopic ellipsometer 1 includes a xenon lamp 2, a light irradiator 3, a stage 4, a light acquirer 5, a spectroscope 7, a data acquisition device 8, a motor controller 9, an information processing device 10, and the like. The information processing apparatus is, for example, a personal computer, a PDA (Personal Digital Assistance), a mobile phone, or the like. Hereinafter, the information processing apparatus 10 will be described as being replaced with the computer 10. The computer 10 may be connected directly to the spectroscopic ellipsometer 1 as in this embodiment, or may be connected via a communication network such as the Internet or a LAN (Local Area Network). In addition, data such as film thickness and optical constant acquired by the spectroscopic ellipsometer 1 may be manually input to the computer 10 or input via a recording medium such as a USB (Universal Serial Bus) memory. The computer 10 performs processing described later based on the input data.

  The spectroscopic ellipsometer 1 measures a sample 50 in which DLC (amorphous carbon) is formed on a substrate such as polyurethane, polystyrene, PMMA (Poly methyl methacrylate) polymethyl methacrylate resin, polycarbonate, metal, ceramics, or cotton fiber. DLC is an amorphous carbon film having characteristics such as high hardness, wear resistance, low coefficient of friction, electrical insulation, chemical stability, gas barrier properties, biocompatibility and the like. The main film forming methods of DLC are divided into a PVD (Physical Vapor Deposition) method and a CVD (Chemical Vapor Deposition) method. Specifically, ion beam evaporation, pulse laser ablation, filtered arc ion plating method, magnetron sputtering method, plasma CVD method, PBII & D (Plasma Based Ion Implantation and Deposition) method and the like can be mentioned.

  The spectroscopic ellipsometer 1 irradiates the sample 50 with the DLC film with polarized light, acquires the light reflected by the sample 50 and measures the polarization state of the reflected light, and the model corresponding to the measurement result and the sample 50 Based on the above, the DLC characteristics of the sample 50 are analyzed.

  The spectroscopic ellipsometer 1 is roughly divided into a measurement analysis system part including a measuring instrument including a pair of light irradiators 3 and a light acquisition unit 5 and a drive system part. As a part of the measurement analysis system, the spectroscopic ellipsometer 1 connects the xenon lamp 2 and the light irradiator 3 with a first optical fiber cable 15a. The spectroscopic ellipsometer 1 irradiates polarized light onto a sample 50 placed on the stage 4 to make the light incident, and takes in the light reflected by the sample 50 with the light acquisition device 5. The light acquisition unit 5 is connected to the spectroscope 7 via the second optical fiber cable 15b. The spectroscope 7 performs measurement for each wavelength and transmits the measurement result to the data acquisition unit 8 as an analog signal. The data fetcher 8 converts the analog signal into a required value and transmits it to the computer 10. The computer 10 performs analysis.

  The spectroscopic ellipsometer 1 includes a first motor M1 to a sixth motor M6 in the stage 4, the light irradiator 3, the light acquirer 5, and the spectroscope 7 as drive system parts. By controlling the driving of the first motor M1 to the sixth motor M6 by the motor controller 9 connected to the computer 10, the stage 4, the light irradiator 3, the light acquisition device 5 and the spectroscope 7 can be appropriately controlled according to the measurement. Change to position and posture. The motor controller 9 performs drive control of the first motor M1 to the sixth motor M6 based on instructions output from the computer 10.

  Next, the above-described parts of the spectroscopic ellipsometer 1 will be described in detail in order. First, the xenon lamp 2 is a light source, generates white light including a plurality of wavelength components, and sends the generated white light to the light irradiator 3 via the first optical fiber cable 15a. The light irradiator 3 is arranged on a semicircular arc-shaped rail 6 and has a polarizer 3 a inside. The light irradiator 3 polarizes white light with the polarizer 3 a and irradiates the sample 50 with polarized light. Further, the light irradiator 3 moves along the rail 6 by driving the fourth motor M4, and the angle (incident angle φ) of the irradiating light with respect to the perpendicular H of the stage surface 4a of the stage 4 can be adjusted. ing.

  The stage 4 is slidably disposed on a moving rail portion (not shown), and the stage 4 is driven by the first motor M1 to the third motor M3 in the x-axis direction and y-axis direction (FIG. 1). In the direction orthogonal to the paper surface) and the z direction which is the height direction. By moving the stage 4, the location where the light is incident on the sample 50 is appropriately changed, and the surface analysis of the sample 50 is performed. In the present embodiment, an example in which the stage 4 is moved in the x-axis direction and the y-axis direction will be described. However, the present invention is not limited to this. For example, the stage 4 may be fixed, the light irradiator 3 and the light acquirer 5 may be moved, and the irradiation position may be moved in the x-axis direction and the y-axis direction. Further, the stage surface 4a on which the sample 50 of the stage 4 is placed is black to prevent light reflection.

The light acquisition unit 5 acquires the light reflected by the sample 50 and measures the polarization state of the acquired light. Similar to the light irradiator 3, the light acquirer 5 is arranged on the rail 6, and includes a PEM (Photo Elastic Modulator) 5 a and an analyzer 5 b and is reflected by the sample 50. The light is guided to the analyzer 5b through the PEM 5a. The light acquisition unit 5 is movable along the rail 6 by driving the fifth motor M5. The light acquisition unit 5 is controlled by the motor controller 9 so that the reflection angle φ and the incident angle φ are the same angle in conjunction with the movement of the light irradiator 3. The PEM 5a built in the light acquisition unit 5 obtains elliptically polarized light from linearly polarized light by phase-modulating the captured light at a required frequency (for example, 50 kHz). The analyzer 5b selectively acquires polarized light from various polarized light phase-modulated by the PEM 5a and measures it.

  The spectroscope 7 includes a reflection mirror, a diffraction grating, a photomultiplier (PMT: photomultiplier tube), a control unit, and the like, and reflects light transmitted from the light acquisition device 5 through the second optical fiber cable 15b with the reflection mirror. To the diffraction grating. The diffraction grating changes the wavelength of the emitted light by changing the angle by the sixth motor M6. The light traveling into the spectroscope 7 is amplified by the PMT, and the measured signal (light) is stabilized even when the amount of light is small. Further, the control unit performs a process of generating an analog signal corresponding to the measured wavelength and sending it to the data fetcher 8.

The data acquisition unit 8 calculates the amplitude ratio Ψ and the phase difference Δ of the polarization state of the reflected light (p-polarized light, s-polarized light) for each wavelength based on the signal from the spectroscope 7, and sends the calculated results to the computer 10. To do. Note that the amplitude ratio Ψ and the phase difference Δ satisfy the relationship of the following formula (1) with respect to the amplitude reflection coefficient Rp of p-polarized light and the amplitude reflection coefficient Rs of s-polarized light.
Rp / Rs = tan Ψ · exp (i · Δ) (1)
However, i is an imaginary unit (the same applies hereinafter). Rp / Rs is referred to as a polarization change amount ρ.

  In addition, the computer 10 analyzes the sample 50 based on the amplitude ratio Ψ and phase difference Δ of the polarization state obtained by the data acquisition device 8 and a model corresponding to the sample 50, and also supports the movement of the stage 4 and the like. Take control. The computer 10 includes a CPU 11 (Central Processing Unit), a display unit 14, an input unit 13, a storage unit 15, a clock unit 11e, a RAM 12 (Random Access Memory), and the like. The CPU 11 is connected to each part of the hardware of the computer 10 via a bus, controls them, and executes various software functions according to various programs stored in the storage unit 15.

  The RAM 12 is a semiconductor element or the like, and writes and reads necessary information according to instructions from the CPU 11. The display unit 14 is, for example, a liquid crystal display or an organic EL (electroluminescence) display. The input unit 13 is a keyboard and a mouse. The input unit 13 may be a touch panel stacked on the display unit 14. The clock unit 11e outputs date information to the CPU 11. The storage unit 15 is composed of, for example, a hard disk or a large-capacity memory, and stores various programs such as a computer program for analysis and a computer program for movement control of the stage 4 in advance, and various menus for displaying on the display unit 14. Image data, known data related to the sample 50, a plurality of models, a plurality of dispersion formulas used to create the model, the created model, reference data corresponding to the various samples 50, and the like are stored.

  In addition, the storage unit 15 stores a biological database (hereinafter referred to as DB) 151, a result DB 152, and the like. These DBs may be stored in a DB server or the like (not shown). The spectroscopic ellipsometer 1 measures the DLC film formed on the sample 50. The CPU 11 calculates the film thickness, optical constant, and surface roughness based on the measurement data acquired from the spectroscopic ellipsometer 1. The CPU 11 stores the calculated film thickness, optical constant, and surface roughness in the result DB 152. In the present embodiment, an example using two extinction coefficients and a refractive index as an optical constant will be described. However, only one of them may be used. In this embodiment, an example of storing four values of film thickness, extinction coefficient, refractive index, and surface roughness is given, but only one to three may be stored.

  FIG. 2 is an explanatory diagram showing a record layout of the result DB 152. The result DB 152 includes a sample ID field, a film thickness field, a refractive index field, an extinction coefficient field, a surface roughness field, and the like. In the sample ID field, identification information (hereinafter referred to as sample ID) for specifying the sample 50 on which the DLC film to be evaluated is formed is stored. In the film thickness field, the film thickness (angstrom) of DLC formed on the sample 50 in association with the sample ID is stored. The refractive index field stores the refractive index of DLC formed on the sample 50 in association with the sample ID.

  In the extinction coefficient field, an extinction coefficient of DLC formed on the sample 50 in association with the sample ID is stored. In the surface roughness field, the surface roughness (angstrom) of the DLC film is stored in association with the sample ID. When the CPU 11 newly measures the sample 50, the CPU 11 generates a sample ID and stores it in the result DB 152. The CPU 11 stores the film thickness, refractive index, extinction coefficient, and surface roughness of the DLC film formed on the sample 50 in the result DB 152 in association with the sample ID.

  FIG. 3 is an explanatory diagram showing a record layout of the biometric DB 151. The biological DB 151 includes a film thickness field, a refractive index field, an extinction coefficient field, a surface roughness field, a cell growth rate field, and the like. The cell growth rate as the biocompatibility is a rate indicating how much the cells cultured on the DLC surface have grown after a certain period of time. In this embodiment, it is assumed that the higher the growth rate, the higher the biocompatibility, and the lower the growth rate, the lower the biocompatibility. For example, mouse-derived fibroblasts (NIH-3T3) are used. The initial number of cells is, for example, 20000, and the increase or decrease in the number of cells after 24 hours, for example, is counted with a microscope. The biological DB 151 stores data based on experimental results in advance. Moreover, although the cell proliferation rate was mentioned as an example of biocompatibility, it is not restricted to this. For example, antithrombogenicity may be used as biocompatibility. When antithrombogenicity is high, the amount of albumin absorbed increases and the adsorption of fibrinogen and globulin decreases. What is necessary is just to memorize | store antithrombogenicity corresponding to a film thickness etc. in biological DB151 through experiment. As other biocompatibility, a bacteriostatic activity value or a bactericidal activity value on a fiber may be used.

  The film thickness field stores the DLC film thickness (angstrom), the refractive index field stores the DLC refractive index, and the extinction coefficient field stores the DLC extinction coefficient. In the surface roughness field, the surface roughness (angstrom) of DLC is stored. The cell growth rate field stores the growth rate (%) of cells cultured on the DLC film in association with the film thickness, refractive index, extinction coefficient, and surface roughness. That is, the biological DB 151 stores the relationship between the refractive index of the film and the biocompatibility obtained in advance by experiments. As can be seen from FIG. 3, for example, when the refractive index is 1.573, the cell proliferation rate is significantly increased to 410%. In the present embodiment, an example in which the film thickness, the refractive index, the extinction coefficient, and the surface roughness are stored is described, but the present invention is not limited to this. The number is not limited as long as it is one or more. In addition to film thickness, refractive index, extinction coefficient, and surface roughness, non-uniformity of the film may be stored. In the present embodiment, for ease of explanation, an example using only the refractive index will be described.

  The CPU 11 reads the evaluation target refractive index from the result DB 152. The CPU 11 refers to the read refractive index and the biological DB 151 and extracts the refractive index having the smallest difference from the read refractive index. The CPU 11 reads out the cell growth rate corresponding to the extracted refractive index from the biological DB 151. The CPU 11 outputs the read cell proliferation rate to the display unit 14. In addition, the CPU 11 may output the cell proliferation rate to another computer (not shown) via a communication unit (not shown). If the smallest difference in refractive index is larger than the threshold stored in the storage unit 15, information indicating that there is no corresponding cell growth rate (hereinafter referred to as no-target information) may be output.

  Moreover, what is necessary is just to extract a cell growth rate by the following processes, when using a some parameter. An example using the film thickness and the refractive index will be described. CPU11 reads the film thickness and refractive index of evaluation object from result DB152. The CPU 11 calculates the square of the difference between the film thickness stored in the biological DB 151 and the read film thickness. Similarly, the CPU 11 calculates the square of the difference between the refractive index corresponding to the film thickness stored in the biological DB 151 and the read refractive index. In addition to squaring the difference, the square root may be calculated after the square. Alternatively, the absolute value of the difference may be obtained without squaring. The CPU 11 calculates the sum of squares. CPU11 performs the process mentioned above with respect to each record of biometric DB151. The CPU 11 reads from the living body DB 151 the cell growth rate corresponding to the film thickness and refractive index with the smallest sum. Similarly, when the sum is larger than the threshold value stored in the storage unit 15, the non-target information may be output. In addition, use all of film thickness, refractive index, extinction coefficient and surface roughness, use film thickness and extinction coefficient, use film thickness and surface roughness, use only refractive index, refractive index and surface roughness The cell growth rate may be read using all combinations such as using.

  In the above hardware configuration, various software processes will be described with reference to flowcharts. FIG. 4 is a flowchart showing a procedure for outputting the cell growth rate. The CPU 11 measures with the spectroscopic ellipsometer 1 and obtains the refractive index of DLC obtained by the arithmetic processing (step S41). The CPU 11 reads the refractive index from the biological DB 151 (step S42). The CPU 11 extracts the refractive index having the smallest absolute value of the difference between the refractive index read in step S42 and the refractive index acquired in step S41 (step S43). CPU11 reads a threshold value from the memory | storage part 15 (step S44).

  The CPU 11 determines whether or not the absolute value exceeds a threshold value (step S45). If the CPU 11 determines that the absolute value exceeds the threshold value (YES in step S45), the CPU 11 outputs the non-target information to the display unit 14 (step S46). If the CPU 11 determines that the absolute value does not exceed the threshold value (NO in step S45), the process proceeds to step S47. The CPU 11 reads the cell proliferation rate corresponding to the refractive index extracted in step S43 (step S47). The CPU 11 outputs the read cell proliferation rate to the display unit 14 (step S48). Thereby, the person who manufactures the sample 50 can objectively grasp how much the deposited DLC is compatible with the living body. It is also possible for medical staff to know in advance how the DLC used will affect the living body.

Embodiment 2
Embodiment 2 relates to a form using a plurality of cells. FIG. 5 is an explanatory diagram showing a record layout of the biological DB 151 according to the second embodiment. The living body DB 151 stores a cell growth rate corresponding to the film thickness, refractive index, extinction coefficient, or surface roughness for each cell to be cultured. That is, the biological DB 151 stores the relationship between the refractive index of the film and the biocompatibility for each cell obtained in advance by experiments. In addition, although the cell growth rate was mentioned as an example of biocompatibility in FIG. 5, it is not restricted to this. As the biocompatibility, antithrombogenicity, bacteriostatic activity value, bactericidal activity value or the like may be used. FIG. 6 is a flowchart showing a procedure for outputting the cell proliferation rate according to the second embodiment. The CPU 11 measures with the spectroscopic ellipsometer 1 and acquires the refractive index of DLC obtained by the calculation process (step S61). CPU11 receives the kind of cell from the input part 13 (step S62). The cell type may be input from the input unit 13 or may be received from a communication unit (not shown).

  CPU11 reads the refractive index corresponding to the cell received from living body DB151 (step S63). The CPU 11 extracts the refractive index having the smallest absolute value of the difference between the refractive index read in step S63 and the refractive index acquired in step S61 (step S64). CPU11 reads a threshold value from the memory | storage part 15 (step S65).

  CPU11 judges whether an absolute value exceeds a threshold (Step S66). When the CPU 11 determines that the absolute value exceeds the threshold value (YES in step S66), the CPU 11 outputs the non-target information to the display unit 14 (step S67). If the CPU 11 determines that the absolute value does not exceed the threshold value (NO in step S66), the process proceeds to step S68. The CPU 11 reads the cell proliferation rate corresponding to the refractive index extracted in step S64 (step S68). The CPU 11 outputs the read cell proliferation rate to the display unit 14 (step S69). This makes it possible to provide biocompatibility according to various characteristics where the cell growth rate differs depending on the cells and the film formation characteristics.

  The second embodiment is configured as described above, and the other configurations and operations are the same as those of the first embodiment. Therefore, corresponding parts are denoted by the same reference numerals, and detailed description thereof is omitted.

Embodiment 3
The third embodiment relates to a mode for outputting biocompatibility according to the application. FIG. 7 is an explanatory diagram showing a record layout of the biometric DB 151 according to the third embodiment. The biological DB 151 stores biocompatibility corresponding to the film thickness, refractive index, extinction coefficient, or surface roughness for each application. Note that bioaffinity corresponding to the non-uniformity of the film may be stored as described in the first embodiment. The use is for the sample 50, such as an artificial heart, an artificial tooth root, an artificial bone, an artificial blood vessel, a fiber material, an orthodontic wire, a stent, or a catheter. Preferred biocompatibility is determined according to the application. In addition, the film thickness, refractive index, extinction coefficient, surface roughness, film non-uniformity, or a combination thereof that can achieve biocompatibility determined by the application is also determined. The biological DB 151 stores the relationship between the refractive index of the film and the biocompatibility for each application obtained in advance by experiments. Note that the processing described in this embodiment and the processing described in Embodiment 2 may be combined. That is, the biological DB 151 may store bioaffinity for the refractive index and the like for each use and cell. In addition, although the cell growth rate was mentioned as an example of biocompatibility in FIG. 7, it is not restricted to this. As the biocompatibility, antithrombogenicity, bacteriostatic activity value, bactericidal activity value or the like may be used.

  FIG. 8 is a flowchart showing a procedure for outputting the cell proliferation rate according to the third embodiment. The CPU 11 performs measurement with the spectroscopic ellipsometer 1 and acquires the refractive index of DLC obtained by the calculation process (step S81). CPU11 receives a use from the input part 13 (step S82). The usage may be received from a communication unit (not shown) in addition to being input from the input unit 13.

  CPU11 reads the refractive index corresponding to the use received from living body DB151 (step S83). The CPU 11 extracts the refractive index having the smallest absolute value of the difference between the refractive index read in step S83 and the refractive index acquired in step S81 (step S84). CPU11 reads a threshold value from the memory | storage part 15 (step S85).

  The CPU 11 determines whether or not the absolute value exceeds a threshold value (step S86). When the CPU 11 determines that the absolute value exceeds the threshold value (YES in step S86), the CPU 11 outputs the non-target information to the display unit 14 (step S87). If the CPU 11 determines that the absolute value does not exceed the threshold value (NO in step S86), the CPU 11 proceeds to step S88. The CPU 11 reads the cell proliferation rate corresponding to the refractive index extracted in step S84 (step S88). The CPU 11 outputs the read cell proliferation rate to the display unit 14 (step S89). Thereby, it is possible to determine whether or not the measured sample 50 has appropriate biocompatibility depending on the application.

  The third embodiment is configured as described above, and the other configurations and operations are the same as those of the first and second embodiments. Therefore, corresponding parts are denoted by the same reference numerals, and detailed description thereof is omitted. To do.

Embodiment 4
Embodiment 4 relates to a mode of outputting preferable film forming conditions. In addition to outputting the cell growth rate in step S48, S69 or S89, the CPU 11 may output preferable film forming conditions. FIG. 9 is a flowchart showing an output processing procedure according to the fourth embodiment. After the processing in any one of Embodiments 1, 2, and 3, the following processing is performed. In the present embodiment, processing performed after the third embodiment will be described. The CPU 11 performs measurement with the spectroscopic ellipsometer 1 and acquires the refractive index of DLC obtained by the calculation process (step S81). CPU11 receives a use from the input part 13 (step S82). Since the processing in steps S83 to S88 is the same, a description thereof will be omitted. The CPU 11 outputs the cell proliferation rate to the display unit 14 (step S89). The CPU 11 refers to the biological DB 151 and reads the film thickness, refractive index, extinction coefficient, and surface roughness corresponding to the output cell proliferation rate (step S91). The CPU 11 outputs the read film thickness, refractive index, extinction coefficient, and surface roughness to the display unit 14 (step S92). It should be noted that all of the film thickness, refractive index, extinction coefficient, and surface roughness may be read out, or a part thereof may be used. In addition, as described above, the non-uniformity of the film corresponding to the cell growth rate may be read out. Further, the CPU 11 may output the read film thickness, refractive index, extinction coefficient, or surface roughness to a computer or film forming apparatus (not shown) via a communication network. The biological DB 151 stores an apparatus and a film forming method that should be recommended for each application in association with the cell growth rate. The recommended apparatus and film forming method may be stored in the biological DB 151 in a text format, an HTML (HyperText Markup Language) format, or the like. The CPU 11 reads out the cell growth rate output in step S83 and the apparatus and film forming method corresponding to the application received in step S82 from the biological DB 151 and outputs them to the display unit 14 (step S93). Thereby, the person who formed the DLC can grasp how the DLC with high biocompatibility can be formed by changing the film forming conditions.

  The fourth embodiment is configured as described above, and the other configurations and operations are the same as those of the first to third embodiments. Therefore, the corresponding parts are denoted by the same reference numerals and detailed description thereof is omitted. To do.

Embodiment 5
FIG. 10 is a block diagram showing a hardware group of the spectroscopic ellipsometer 1 according to the fifth embodiment. A program for operating the computer 10 causes a reading unit 10A such as a disk drive to read a portable recording medium 1A such as a CD-ROM, a DVD (Digital Versatile Disc) disk, a memory card, or a USB memory, and the storage unit 15 You may memorize. Further, a semiconductor memory 1B such as a flash memory storing the program may be mounted in the computer 10. Further, the program can be downloaded from another server computer (not shown) connected via a communication network such as the Internet. The contents will be described below.

  A computer 10 shown in FIG. 10 reads a program for executing the above-described various software processes from the portable recording medium 1A or the semiconductor memory 1B or downloads it from another server computer (not shown) via a communication network. . The program is installed as a control program, loaded into the RAM 12 and executed. Thereby, it functions as the computer 10 described above.

  The fifth embodiment is as described above, and the other parts are the same as those of the first to fourth embodiments. Therefore, the corresponding parts are denoted by the same reference numerals, and detailed description thereof is omitted.

Embodiment 6
The sixth embodiment relates to a mode in which a range is stored in the living body DB 151. In the above-described embodiment, the example of extracting the cell proliferation rate with a small difference between the acquired refractive index and the refractive index stored in the biological DB 151 has been described, but the present invention is not limited to this. As in the present embodiment, a range such as a refractive index may be stored in the living body DB 151, and when the obtained refractive index belongs to the range, the corresponding cell growth rate may be extracted. In the film thickness field of the living body DB 151, a film thickness range is stored in association with the cell growth rate. In the refractive index field, a refractive index range is stored in association with the cell growth rate. Also in the extinction coefficient field, an extinction coefficient is stored in association with the cell growth rate. In the surface roughness field, a surface roughness range is stored in association with the cell growth rate. Note that, as described in the first embodiment, the range of non-uniformity of the membrane may be stored in association with the cell growth rate. Moreover, you may make it memorize | store the range also for the cell growth rate memorize | stored in biological DB151.

  FIG. 11 is a flowchart showing a procedure for outputting the cell proliferation rate. The CPU 11 performs measurement with the spectroscopic ellipsometer 1 and obtains the refractive index of DLC obtained by the calculation process (step S111). CPU11 reads the range of refractive index from living body DB151 (step S112). The CPU 11 reads out the cell proliferation rate corresponding to the range to which the acquired refractive index belongs from the living body DB 151 (step S113). The CPU 11 outputs the cell proliferation rate to the display unit 14 (step S114). When a plurality of parameters such as a refractive index and a film thickness are used, the processes of steps S111 to S114 are performed for each parameter.

  When the cell growth rate corresponding to each parameter matches, the CPU 11 outputs the matched cell growth rate to the display unit 14. CPU11 calculates | requires the average value of the cell growth rate corresponding to each read parameter, when it does not correspond. The CPU 11 outputs the average value to the display unit 14. Further, the CPU 11 may output the minimum value and the maximum value of the cell growth rate or the range from the minimum value to the maximum value when the cell growth rates corresponding to the respective parameters do not match. For example, assume that the cell growth rate corresponding to the film thickness is A, the cell growth rate corresponding to the refractive index is B, and the cell growth rate corresponding to the extinction coefficient is C. If A <B <C, the CPU 11 may output the minimum value A to the maximum value B as the range of the cell proliferation rate. In addition, the cell growth rate corresponding to each parameter may be output to the display unit 14. In this case, the cell growth rate corresponding to the film thickness, extinction coefficient, refractive index, and surface roughness is displayed. In the present embodiment, an example in which one cell proliferation rate corresponding to the range to which the acquired refractive index belongs is described, but the present invention is not limited to this. A range such as a refractive index corresponding to the cell growth rate stored in the living body DB 151 may overlap each other. When the obtained refractive indexes belong to a range where they overlap each other, the CPU 11 reads out a plurality of corresponding cell growth rates. For example, when the obtained refractive index belongs to two refractive index ranges stored in the living body DB 151, the CPU 11 reads out two cell proliferation ratios corresponding to the two refractive index ranges and outputs them to the display unit 14. . Alternatively, the CPU 11 may read out the minimum cell growth rate and the maximum cell growth rate and output the minimum value to the maximum value as the range of the cell growth rate. As a result, various types of information can be similarly provided in the algorithm according to the present embodiment.

  The sixth embodiment is as described above, and the other parts are the same as those of the first to fifth embodiments. Accordingly, the corresponding parts are denoted by the same reference numerals, and detailed description thereof is omitted.

Embodiment 7
Embodiment 7 relates to a form using a plurality of biocompatibility. FIG. 12 is an explanatory diagram showing a record layout of the biological DB 151 according to the seventh embodiment. 3, 5, and 7, an example is shown in which one biocompatibility (cell growth rate in the figure) is stored with respect to the film thickness and the like, but a plurality of biocompatibility may be stored. For example, one or more of cell growth rate, antithrombogenicity, bacteriostatic activity value, or bactericidal activity may be stored in association with the film thickness. In the example of FIG. 12, two values of antithrombogenicity and bacteriostatic activity are stored as biocompatibility with respect to film thickness, refractive index, extinction count, and surface roughness. That is, the biological DB 151 stores the relationship between the refractive index of the film and the biocompatibility obtained in advance by experiments. This makes it possible to extract optimal conditions from various viewpoints.

  The seventh embodiment is as described above, and the other parts are the same as those of the first to sixth embodiments. Therefore, the corresponding parts are denoted by the same reference numerals, and detailed description thereof is omitted.

DESCRIPTION OF SYMBOLS 1 Spectroscopic ellipsometer 1A Portable recording medium 2 Xenon lamp 3 Light irradiator 4 Stage 5 Light acquisition device 6 Rail 7 Spectrometer 8 Data acquisition machine 9 Motor controller 10 Computer 11 CPU
12 RAM
13 Input unit 14 Display unit 15 Storage unit 50 Sample 151 Biological DB
152 result BD
M1 to M6 First motor to sixth motor

Claims (7)

To a computer having a control unit,
The DLC film thickness or optical constant obtained by irradiating light with a spectroscopic ellipsometer on a sample having diamond-like carbon (DLC) formed on a substrate is obtained by the control unit,
Reference is made to the storage unit storing the biocompatibility of DLC with respect to the living body in association with the film thickness or the optical constant, and the control unit reads out the biocompatibility corresponding to the acquired film thickness or optical constant,
A program for executing a process of outputting the read biocompatibility by the control unit. The surface roughness of the DLC obtained by irradiating the sample with light by a spectroscopic ellipsometer is acquired by the control unit,
By referring to the storage unit storing the biocompatibility of DLC in association with the film thickness, optical constant or surface roughness, the control unit determines the biocompatibility corresponding to the acquired film thickness, optical constant or surface roughness. The program according to claim 1, which causes a process to be read out to be executed. In the storage unit, biocompatibility is stored in association with the film thickness or optical constant for each of a plurality of cells cultured in DLC,
Accept the cell type by the control unit,
3. The program according to claim 1, wherein the bioaffinity corresponding to the received cell and the acquired film thickness or optical constant is read from the storage unit. The storage unit stores biocompatibility in association with the film thickness or optical constant for each of a plurality of uses of the sample,
Accepting the use by the control unit,
The program as described in any one of Claim 1 to 3 which performs the process which reads the biocompatibility corresponding to the received use and the acquired film thickness or optical constant from the said memory | storage part. The program according to any one of claims 1 to 4, wherein a program for outputting a film thickness or an optical constant stored in the storage unit corresponding to the read biocompatibility is executed. An acquisition unit for acquiring, by the control unit, the film thickness or optical constant of the DLC obtained by irradiating light with a spectroscopic ellipsometer on a sample in which diamond-like carbon (DLC) is formed on a substrate;
A reading unit that reads the bioaffinity corresponding to the film thickness or the optical constant acquired by the acquisition unit with reference to the storage unit that stores the biocompatibility of the DLC with respect to the living body in association with the film thickness or the optical constant;
An information processing apparatus comprising: an output unit that outputs biocompatibility read by the reading unit. In an information processing method using an information processing apparatus having a control unit,
The DLC film thickness or optical constant obtained by irradiating light with a spectroscopic ellipsometer on a sample having diamond-like carbon (DLC) formed on a substrate is obtained by the control unit,
Reference is made to the storage unit storing the biocompatibility of DLC with respect to the living body in association with the film thickness or the optical constant, and the control unit reads out the biocompatibility corresponding to the acquired film thickness or optical constant,
An information processing method for outputting the read biocompatibility by the control unit.

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