JP6203632B2 - Micro component holding jig - Google Patents

Description

  The present invention relates to a micro-component holding jig that elastically supports a row bar mounted with micro-components by a leaf spring in a polishing apparatus for polishing micro-components, particularly when the pitch of micro-components becomes high. The present invention also relates to a micro-component holding jig that can reduce breakage of a leaf spring.

  Recent mechanical parts may be polished while supporting a row bar with multiple micro parts mounted by a leaf spring for high-precision processing. For example, in recent magnetic disk devices, the magnetic recording density on the magnetic disk is improved. As a result, the magnetic head element has also been miniaturized, and the micro component holding jig such as the magnetic head element holding jig can reproduce data by utilizing the change in the resistance value of the MR element (magnetoresistance effect element). As shown in the upper part of FIG. 4, the composite magnetic head comprises an inductive magnetic recording element composed of a coil 5, an upper magnetic film 6 and an upper shield film 8, and electrodes 7 on both ends. A magnetoresistive reproducing element can be obtained by sandwiching the MR element 4 connected to each other with an upper shield film 8 and a lower shield film 9 for reducing noise during data reproduction. Form, it is necessary to polished MR element height H that is exposed to the air bearing surface that greatly affects the reproduction output with high precision.

  In this composite type magnetic head, as shown in the lower to the middle of FIG. 4, an induction type magnetic transducer element and an MR element 4 are formed on the surface of a ceramic wafer 3 by sputtering, mask formation and thin film processes, and the wafer 3 is cut. Thus, the row bar 12 shown in FIG. 5 in which a plurality of magnetic head sliders are connected to each other is formed, and the row bar 12 is cut to form a magnetic head slider.

  As shown in FIG. 6, a polishing apparatus for polishing the MR element height H with high accuracy includes a polishing surface plate 101 on a rotating disk and a magnetic head element holding jig (not shown) on the polishing surface plate 101. A load applying mechanism 30 for applying a load to each head element of the row bar while being elastically supported by a tool, a swing shaft 103 that supports the load applying mechanism 30 so as to be movable in the horizontal direction, and both ends of the swing shaft 103 are supported. A pair of struts 102, a positioning mechanism 24 for positioning the load applying mechanism 30 using the scale guide 25, and a gap sensor for detecting the MR element height H by resistance value conversion of each magnetic head element of the row bar. 21, and the load adding mechanism 30 performs polishing while applying a load to each head element of the row bar while detecting the MR element height H by the gap sensor 21. It is configured to.

  When the magnetic head element holding jig elastically supporting the row bar of the load applying mechanism 30 according to the prior art is shown from the side, as shown in FIG. 7, the row bar 12 is supported on the lower surface and the pressure is individually applied from the upper side. A plurality of U-shaped pressurizing portions 41 to be applied; and a fixing portion 42 that is fixed to the load applying mechanism 30 and elastically supports the plurality of pressurizing portions 41 by a plurality of linear leaf springs 45. By applying pressure to each magnetic head element from above the pressurizing unit 41, polishing is performed while applying a load to each head element of the row bar.

  The technique relating to the above-described composite magnetic head and polishing apparatus is described in Patent Document 1 below.

Patent Registration No. 4868856

  Although the technique described in Patent Document 1 can process the height of the MR element with high accuracy, the pitch between magnetic head elements (composite magnetic heads) is further increased due to recent needs for improving recording density. The leaf springs may require low rigidity due to the necessity of processing accuracy, and the strength of the leaf springs may decrease due to narrow pitch and low stiffness, and the leaf springs may buckle and break. There was a problem. For example, the magnetic head element holding jig according to the prior art has 20 pressing portions arranged in a horizontal row, but it is necessary to arrange them three times or more in the same outer dimension due to the narrow pitch. The width of the straight leaf spring is shortened in the same manner, and there is a problem that the leaf spring is damaged due to a load in the buckling direction accompanying the handling of the operator due to insufficient strength.

  An object of the present invention is to solve the above-described problems caused by the prior art, and it is possible to reduce the breakage of the leaf spring even when the pitch of the micro components mounted on the row bar becomes high. It is to provide a minute component holding jig that can be used.

In order to achieve the above-mentioned object, the invention according to claim 1 is mounted on a load applying mechanism that elastically supports a row bar on which a micro component is mounted, supports the micro component on the lower surface, and individually from the upper side in the vertical direction. A plurality of U-shaped pressurizing portions to which pressure is applied, and an inverted U-shaped fixing portion fixed to a load applying mechanism and elastically supporting the plurality of pressurizing portions by a plurality of leaf springs. a small component holding fixture, comprising the plate spring, the curved shape reaches the fixing unit from the pressing while being curved arcuately in the pressure direction opposite to the direction with respect to the horizontal direction perpendicular to the vertical direction According to a second aspect of the present invention, the curvature radius of the plurality of leaf springs is set in the range of 30 mm to 60 mm.

  The micro-component holding jig according to the present invention is configured such that the leaf spring has a curved shape that reaches the fixed portion from the pressurizing portion while being curved in an arc shape with respect to the horizontal direction perpendicular to the vertical direction of the applied pressure. By this, even if the pitch of the minute parts becomes high density, the breakage of the leaf spring can be reduced.

The figure which shows the perspective view of the micro component holding jig by embodiment of this invention. The figure which shows the side surface of the micro component holding jig by this embodiment. The graph which shows the curvature radius and buckling stress of the curved leaf | plate spring by this embodiment. The figure for demonstrating the composite magnetic head by a prior art. The figure which shows the rover by a prior art. The figure which shows the grinding | polishing apparatus by a prior art. The figure for demonstrating the micro component holding jig by a prior art.

Hereinafter, an embodiment of a micro component holding jig according to the present invention will be described in detail by taking, as an example, a magnetic head element holding jig in which a micro component is a magnetic head element and a portion on which a plurality of the magnetic head elements are mounted is a row bar. To do.
The magnetic head element holding jig according to the present embodiment is mounted on a load applying mechanism that elastically supports the row bar of the polishing apparatus, and supports the row bar on the lower surface as shown in FIGS. A plurality of U-shaped pressurizing portions 41 to which vertical pressure is individually applied from the upper side, and fixed to a load applying mechanism, and the plurality of pressurizing portions 41 are circularly upward (circular with respect to the horizontal direction). Arcuate) and a pair of curved leaf springs 43 that are elastically supported by a reverse U-shaped fixing portion 42, and 60 or more pressing portions 41 are juxtaposed in a horizontal row at a pitch of 1 mm or less, The external dimensions are about 35 mm in height, about 50 mm in width, and about 25 mm in depth. The pressing part 41, the fixing part 42, and the curved leaf spring 43 are made of stainless steel, but are not limited thereto. In addition, the stopper 42a and the stopper 42 in a figure are for preventing the pressurization part 41 from moving to the fixing | fixed part 42 side in a buckling direction.

  The magnetic head element holding jig configured as described above can perform polishing while applying a load to each head element of the row bar by applying a pressing force to each magnetic head element from above the plurality of pressure units 41. it can.

  In particular, in the magnetic head element holding jig according to the present embodiment, the leaf spring that supports the pressurizing unit 41 according to the prior art is formed linearly toward the fixed unit 42, but the circle upwards toward the fixed unit 42. An arc-curved curved shape (curved shape reaching the fixed portion from the pressurizing portion while curving in an arc shape with respect to the horizontal direction orthogonal to the pressurizing vertical direction), and the curvature radius and buckling of the curved leaf spring 43 As shown in FIG. 3 where the stress was measured, when the radius of curvature of the curved leaf spring 43 was set in the range of 30 mm to 60 mm, the buckling stress could be around 1000 MPa (megapascal) under the condition of 0.3 mm displacement. The curvature radius is preferably set to 40 mm.

In this embodiment, an example in which two curved leaf springs are used has been described. However, the curved spring according to the present invention is not limited to this, and the number of leaf springs is not limited to two. In the present embodiment, the magnetic head element is described as an example of the micro component. However, the present invention is not limited to the target for the magnetic head element, and a plurality of micro components can be mounted on a single mounting member (for example, It can be applied to a polishing apparatus that is mounted on a row bar and performs polishing simultaneously.

3 wafer, 4 MR element, 5 coil, 6 upper magnetic film, 7 electrode,
8 Upper shield film, 9 Lower shield film, 12 Rover,
21 gap sensor, 24 positioning mechanism, 25 scale guide,
30 load applying mechanism, 41 pressurizing part, 42 fixing part, 43 curved leaf spring,
45 Straight leaf spring, 101 polishing surface plate, 102 strut, 103 rocking shaft

Claims (2)

A plurality of U-shaped pressurizing portions mounted on a load applying mechanism that elastically supports a row bar on which microcomponents are mounted, supporting microcomponents on the lower surface and individually applying vertical pressure from above; A micro-component holding jig provided with an inverted U-shaped fixing portion fixed to a load applying mechanism and elastically supporting the plurality of pressing portions by a plurality of leaf springs,
A small component holding jig configured to have a curved shape in which the leaf spring is bent in an arcuate shape in a direction opposite to the pressurizing direction with respect to a horizontal direction orthogonal to the vertical direction, and reaches a fixed portion from a pressure portion. .   The microcomponent holding jig according to claim 1, wherein the radius of curvature of the plurality of leaf springs is set in a range of 30 mm to 60 mm.

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