JP6206816B2 - Manufacturing method of sealing polymer actuator - Google Patents

Description

  The present invention relates to a polymer actuator element that deforms according to a voltage between electrode layers, and more particularly, to a method for manufacturing a sealed polymer actuator having a sealing structure that blocks from an external environment.

  In various electronic devices, there is an increasing need for a small, lightweight, and flexible actuator. In response to this demand, a polymer telescopic polymer actuator element is expected. Some polymer actuator elements use water as an electrolyte, and the polymer actuator elements using water are not operated when water evaporates. It was necessary to take a sealing structure. Further, even a polymer actuator element using an electrolyte other than water, such as an organic solvent or an ionic liquid, may require a similar sealing structure in order to avoid adverse effects due to condensation or excessive humidity.

  As a sealing polymer actuator having such a sealing structure, Patent Document 1 proposes a polymer actuator 900 shown in FIG. FIG. 14 is a cross-sectional view illustrating the structure of a conventional polymer actuator 900. FIG. 15 is a cross-sectional view illustrating a method of manufacturing a conventional polymer actuator 900.

  A conventional polymer actuator 900 shown in FIG. 14 includes an actuator body 915, electrodes 925a and 925b disposed with the actuator body 915 interposed therebetween, and a metal layer 944 disposed outside the electrodes 925a and 925b. And a conductive wire 942 for applying a voltage to the electrode 925a and the electrode 925b, and a sealing film 930 that covers the whole so as to wrap the whole. And the sealing film 930 has the performance which interrupts outside air. As a result, the actuator body 915, the electrode 925a, and the electrode 925b are cut off from the outside, so that the polymer actuator 900 can be stably maintained in various atmospheres such as water, solvent, and air while maintaining good characteristics over a long period of time. And can be operated. Further, the sealing film 930 acts as a protection for the entire actuator (actuator body 915, electrode 925a and electrode 925b).

  Further, in the conventional example of Patent Document 1, the polymer actuator 900 can be manufactured by the following procedure. First, as shown in FIG. 15B1, an electrode 925b is formed on another sealing film 930 on the sealing film 930 (polymer film). Next, as illustrated in FIG. 15B 2, conductive wires 942 are arranged on the electrodes 925 a and 925 b of the above-described stacked body, and are fixed using a conductive adhesive 943. The conductive wire 942 is covered with a polymer film 949 made of an electrically insulating thermoplastic resin. Next, as shown in FIG. 15B3, the actuator body 915 is sandwiched so that the electrode 925a of one laminate and the electrode 925b of the other laminate shown in FIG. Let them be arranged. Next, although not shown in FIG. 15 (B4), the laminated body electrode 925a and electrode 925b are thermocompression-bonded to the opposing surfaces of the actuator body 915 with the sealing film (polymer film) 930 as the outside. . Thereafter, the thermocompression bonded body is left in an atmosphere of 40 ° C. and 90% for 1 hour and humidified. Finally, although not shown in FIG. 15 (B5), the sealing film (polymer film) 930 of a pair of laminated bodies is sealed by thermocompression bonding. At this time, the pair of conductive wires 942 are taken out of the sealing film (polymer film). In this way, the polymer actuator 900 shown in FIG. 14 is completed.

JP 2008-35682 A

  However, in the conventional example, since a polymer film having air permeability and water absorption is used as the sealing film 930, the sealing performance may be insufficient when a high degree of sealing is required. Further, since the pair of sealing films 930 are sealed by thermocompression bonding, it is difficult to process the pressure-bonded portion, and in particular, a device for suppressing the entry or release of moisture from the conductive wire 942 portion is necessary. Met. Due to the above, there is water that enters or releases the polymer actuator 900, and there is a problem that the performance of the polymer actuator 900 deteriorates due to the water.

  The present invention solves the above-described problems, and an object of the present invention is to provide a method for producing a sealed polymer actuator capable of reliably and easily sealing a polymer actuator element.

  In order to solve this problem, a manufacturing method of a sealed polymer actuator according to the present invention includes a polymer actuator element that is deformed in accordance with a voltage between a pair of electrode layers, and enveloping the polymer actuator element entirely. A sealing member for covering, a sealing polymer actuator comprising: a resin layer forming step of forming a sealing resin layer as the sealing member on the polymer actuator element; and the sealing A coating step of applying polysilazane to the outside of the resin layer; and an ultraviolet irradiation step of irradiating the polysilazane with ultraviolet rays to use the polysilazane as a silicon oxide film as the sealing member.

  According to this, since the manufacturing method of the sealing polymer actuator of this invention has the process of forming the sealing resin layer and silicon oxide film which are sealing members in a polymer actuator element, a polymer actuator The element can be easily sealed with a sealing member having good sealing performance. In particular, since a sealing member for a silicon oxide film can be easily obtained by irradiating the polysilazane with ultraviolet rays, it is compared with the case where the polysilazane is cured using a high temperature or the silicon oxide film is formed using an expensive vacuum apparatus. Thus, a silicon oxide film can be easily manufactured. As a result, the polymer actuator element can be reliably and easily sealed.

  In the method for producing a sealed polymer actuator of the present invention, the polymer actuator element can be easily sealed with a sealing member (sealing resin layer and silicon oxide film) having good sealing performance. In particular, since a sealing member for a silicon oxide film can be easily obtained by irradiating the polysilazane with ultraviolet rays, it is compared with the case where the polysilazane is cured using a high temperature or the silicon oxide film is formed using an expensive vacuum apparatus. Thus, a silicon oxide film can be easily manufactured. As a result, the polymer actuator element can be reliably and easily sealed.

It is a block diagram explaining the manufacturing method of the sealing polymer actuator concerning 1st Embodiment of this invention, Comprising: It is a perspective view of a sealing polymer actuator. It is a block diagram explaining the sealing polymer actuator of 1st Embodiment of this invention, Comprising: It is the top view seen from the Z1 side shown in FIG. It is a block diagram explaining the sealing polymer actuator of 1st Embodiment of this invention, Comprising: It is sectional drawing in the III-III line | wire shown in FIG. It is a block diagram explaining the sealing polymer actuator of 1st Embodiment of this invention, Comprising: It is sectional drawing in the IV-IV line | wire shown in FIG. It is the schematic diagram explaining the principle of operation of the polymer actuator element used for the sealing polymer actuator concerning a 1st embodiment of the present invention. It is a chemical structural formula of the sealing resin used in the sealing polymer actuator concerning 1st Embodiment of this invention. 2 is a chemical structural formula of polysilazane and silicon oxide used in the sealed polymer actuator according to the first embodiment of the present invention. It is sectional process drawing explaining the manufacturing method of the sealing polymer actuator in 1st Embodiment of this invention. It is a block diagram explaining the manufacturing method of the sealing polymer actuator concerning 2nd Embodiment of this invention, Comprising: It is a perspective view of a sealing polymer actuator. It is a block diagram explaining the sealing polymer actuator of 2nd Embodiment of this invention, Comprising: It is the top view seen from the Z1 side shown in FIG. It is a block diagram explaining the sealing polymer actuator of 2nd Embodiment of this invention, Comprising: It is sectional drawing in the XI-XI line shown in FIG. It is a block diagram explaining the sealing polymer actuator of 2nd Embodiment of this invention, Comprising: It is sectional drawing in the XII-XII line | wire shown in FIG. It is sectional process drawing explaining the manufacturing method of the sealing polymer actuator in 2nd Embodiment of this invention. It is sectional drawing explaining the structure of the polymer actuator of a prior art example. It is sectional drawing explaining the manufacturing method of the polymer actuator of a prior art example.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

[First Embodiment]
First, the sealing polymer actuator F11 will be described. FIG. 1 is a configuration diagram for explaining a manufacturing method of the sealed polymer actuator F11 according to the first embodiment of the present invention, and is a perspective view of the sealed polymer actuator F11. FIG. 2 is a configuration diagram illustrating the sealed polymer actuator F11 according to the first embodiment of the present invention, and is a top view seen from the Z1 side shown in FIG. FIG. 3 is a configuration diagram illustrating the sealed polymer actuator F11 according to the first embodiment of the present invention, and is a cross-sectional view taken along line III-III shown in FIG. FIG. 4 is a configuration diagram illustrating the sealed polymer actuator F11 according to the first embodiment of the present invention, and is a cross-sectional view taken along line IV-IV shown in FIG.

  The sealed polymer actuator F11 according to the first embodiment of the present invention has an appearance as shown in FIGS. 1 and 2, and is deformed according to the voltage between the pair of electrode layers 12 as shown in FIG. A molecular actuator element 13 and a sealing member 15 that covers the polymer actuator element 13 so as to entirely wrap are configured. In the first embodiment of the present invention, the sealing member 15 includes a sealing resin layer J5 formed outside the polymer actuator element 13 and a silicon oxide film formed outside the sealing resin layer J5. Silica layer S5. In addition, as shown in FIGS. 3 and 4, the sealing polymer actuator F <b> 11 is provided with a pair of terminal members 19 electrically connected to each of the pair of electrode layers 12 and the polymer actuator element 13. Connecting member 17.

  First, as shown in FIG. 3, the polymer actuator element 13 of the sealing polymer actuator F11 includes an electrolyte layer 11 and a pair of electrode layers 12 provided on both surfaces in the thickness direction of the electrolyte layer 11. Configured. When electric power is supplied from a pair of terminal members 19 electrically connected to each of the pair of electrode layers 12, the polymer actuator element 13 is deformed in accordance with the voltage between the pair of electrode layers 12. ing.

  Here, the operation principle of the polymer actuator element 13 used in the sealed polymer actuator F11 of the first embodiment of the present invention will be briefly described. FIG. 5 is a schematic diagram illustrating the operating principle of the polymer actuator element 13, and FIG. 5 (a) schematically illustrates ions in the electrolyte layer 11 and the pair of electrode layers 12 according to the first embodiment of the present invention. FIG. 5B shows a state in which a voltage is applied to the electrode layer 12 of the first embodiment of the present invention.

  As shown in FIG. 5 (a), the polymer actuator element 13 has a pair of electrode layers 12 arranged opposite to each other, and an electrolyte layer 11 provided between the pair of electrode layers 12, respectively. In this layer, cation CA and anion AN are dispersed. As shown in FIG. 5B, when a voltage is applied between the pair of electrode layers 12, an electric field is generated in the electrolyte layer 11 sandwiched between the pair of electrode layers 12, While the cation CA moves to the electrode layer 12A (12), the anion AN moves to the other electrode layer 12B (12). For this reason, if one side is supported and used as a fulcrum PP (supporting portion), the other side of the polymer actuator element 13 is greatly displaced according to the direction of the electric field applied to the polymer actuator element 13. If the other side of the polymer actuator element 13 is an action point LP (action part), it can be used as various actuators. The direction of action of the polymer actuator element 13 can be changed by changing the direction of the electric field applied to the polymer actuator element 13, and the voltage can be changed by changing the strength of the voltage to the polymer actuator element 13. The amount of deformation can be changed accordingly.

  Next, the above-described polymer actuator element 13 will be described in detail. The electrolyte layer 11 is a gel film in which an ionic liquid is mixed with a base polymer (resin material), and is sandwiched between a pair of electrode layers 12 as shown in FIG. The electrolyte layer 11 is prepared by dissolving a ionic liquid and a resin material (polymer) in a solvent to prepare a cast liquid, casting the cast liquid on a mold, and then vacuum drying to evaporate the solvent. Moreover, as a material of the polymer (resin material) of the electrolyte layer 11, for example, polyvinylidene fluoride (PVDF), polymethyl methacrylate (PMMA), or the like can be used.

  The pair of electrode layers 12 includes a polymer (resin material) and an ionic liquid which are the same base as the electrolyte layer 11 and a conductive filler, and the conductive filler is mixed in the polymer (resin material) and the ionic liquid. And made into a gel. As the conductive filler of the pair of electrode layers 12, carbon nanotubes, carbon fibers, gold particles, platinum particles, nickel particles, and the like can be used. When the electrolyte layer 11 and the pair of electrode layers 12 configured as described above are used, a large displacement can be obtained at a low voltage.

  Next, the sealing member 15 of the sealing polymer actuator F11 will be described. FIG. 6 is a chemical structural formula of a sealing resin used in the sealing polymer actuator F11 according to the first embodiment of the present invention. FIG. 7 is a chemical structural formula of polysilazane and silicon oxide used in the sealed polymer actuator according to the first embodiment of the present invention.

  As described above, the sealing member 15 includes the sealing resin layer J5 formed outside the polymer actuator element 13 and the silicon oxide film silica layer S5 formed outside the sealing resin layer J5. (See FIG. 3). The sealing member 15 is provided with through holes 15h for exposing the pair of terminal members 19 in the thickness direction (Z direction shown in FIG. 3).

  The sealing resin layer J5 of the sealing member 15 uses a paraxylylene-based polymer as illustrated in FIG. 6, and as shown in FIG. 3, the polymer actuator element 13, a pair of terminal members 19, and a connecting member 17 Is tightly covered with the polymer actuator element 13 so as to envelop the entire surface. In addition, although the sealing resin layer J5 has a very thin thickness of about 10 μm, it has excellent barrier performance that does not transmit moisture. Moreover, since the thickness of the sealing resin layer J5 is as very thin as about 10 μm, there is an effect that the deformation of the polymer actuator element 13 is not adversely affected. Further, the sealing resin layer J5 has a function of filling the surface irregularities of the pair of electrode layers 12 and flattening, and a pair of the sealing resin layer J5 with respect to the silica layer S5 formed outside the sealing resin layer J5. The adverse effect on the silica layer S5 due to the unevenness of the surface of the electrode layer 12 is reduced, and the effect of uniformly forming the silica layer S5 is also achieved.

  The silica layer S5 of the silicon oxide film of the sealing member 15 has a structure having a skeleton as illustrated in FIG. 7B, and is formed on the outside so as to entirely enclose the sealing resin layer J5. Has been. Since the silica layer S5 is an inorganic film, the silica layer S5 has an excellent barrier performance that does not transmit moisture as compared with a generally used synthetic resin film. Therefore, the sealing member 15 can prevent the intrusion or release of moisture from the polymer actuator element 13, and the polymer actuator element 13 can be reliably sealed.

  Next, the pair of terminal members 19 of the sealing polymer actuator F11 is made of a conductive metal material and has a rectangular shape, and one end side thereof is a pair of the polymer actuator elements 13 as shown in FIG. As shown in FIG. 4, the other end side is disposed so as to be in contact with both surfaces in the thickness direction of the connection member 17. The pair of terminal members 19 are exposed at the other end side at the portion of the through hole 15h of the sealing member 15, and a voltage is applied to the polymer actuator element 13 from the exposed pad electrode portion 19p. Can do.

  Finally, the connecting member 17 of the sealing polymer actuator F11 is made of a synthetic resin such as polyethylene terephthalate (PET) and has a sheet-like shape. As shown in FIG. In addition to being in contact with the side end surfaces of 13, they are disposed at positions sandwiched between a pair of terminal members 19, as shown in FIG. 4. By providing this connecting member 17, this part of the sealing polymer actuator F11 can be used as a supporting part, and the deformation of the sealing member 15 at this part is prevented, and the resistance of the sealing member 15 is improved. Can be made. Further, by providing the pad electrode portion 19p in the portion corresponding to the connection member 17, the connection portion with the outside can be provided at a distance from the polymer actuator element 13. By these things, the sealing effect of the sealing member 15 can be improved.

  As described above, the sealing polymer actuator F11 according to the first embodiment of the present invention covers the polymer actuator element 13, the pair of terminal members 19, and the connection member 17 with the sealing member 15, and the sealing member. A voltage can be applied between the pair of electrode layers 12 of the polymer actuator element 13 from the pad electrode portion 19p in the 15 through holes 15h. As a result, the sealing polymer actuator F11 is sealed by sealing the outside of the through hole 15h from the outside with the sealing member 15, so that the moisture to the polymer actuator element 13 can be reduced while having a simple shape. Intrusion or release can be prevented, and the polymer actuator element 13 can be reliably sealed. Furthermore, since the sealing member 15 is configured by using the sealing resin layer J5 and the silica layer S5 having excellent barrier performance, the intrusion or release of moisture to the polymer actuator element 13 is further prevented. Can do.

  Next, the manufacturing method P101 of the sealing polymer actuator F11 will be described. FIG. 8 is a cross-sectional process diagram illustrating a manufacturing method P101 of the sealed polymer actuator F11 according to the first embodiment of the present invention. FIG. 8 (a) shows the middle of the disposing process PS1, and FIG. (B) shows the end of the disposing step PS1, FIG. 8 (c) shows the end of the resin layer forming step P12, FIG. 8 (d) shows the end of the covering step P13, 8 (e) shows the end of the ultraviolet irradiation step P14, FIG. 8 (f) shows the end of the hole processing step P15, and FIG. 8 (g) shows the end of the cutting step PV6. .

  In the manufacturing method P101 of the sealed polymer actuator F11 according to the first embodiment of the present invention, first, as shown in FIGS. 8A and 8B, the disposing step PS1 for disposing each member is performed. Do. In the disposing step PS1, as shown in FIG. 8A, one terminal member 19 (19A), the polymer actuator element 13, the connecting member 17 and the support SP are mounted on a carrier film (not shown). Put. Then, as shown in FIG. 8B, the other terminal member so that the polymer actuator element 13 and the connecting member 17 are sandwiched between the one terminal member 19 (19A) and the other terminal member 19 (19B). 19 (19B) is disposed. At that time, the electrode layer 12 of the polymer actuator element 13 and the pair of terminal members 19 are adhered to each other with a conductive adhesive in order to ensure electrical connection and to move the support SP by grasping it. deep. The support SP shown in FIG. 1 is arranged so that the cross-sectional portion faces toward the front of the page. However, for ease of explanation, the support SP shown in FIG. It is shown extending in the same direction as the longitudinal direction.

  Next, a step of forming the sealing member 15 is performed.

  First, as shown in FIG. 8C, a resin layer forming step P12 for forming a sealing resin layer J5 on the polymer actuator element 13 is performed. In the resin layer forming step P12, first, the polymer actuator element 13, the connecting member 17, and the sample of the support SP are set in a vacuum deposition chamber. Next, a monomer gas obtained by heating and thermally decomposing a raw material dimer powder to be a paraxylylene polymer as illustrated in FIG. 6 is introduced into a vapor deposition chamber. The monomer gas rich in reactivity is polymerized on the surface in contact with the room temperature sample in the vapor deposition chamber to become a high molecular paraxylylene polymer, and the sealing resin layer J5 is formed. The formation of the sealing resin layer J5 is performed at room temperature, and the temperature rise during film formation is limited to a few degrees, and the internal stress in the sealing resin layer J5 can be kept low. Moreover, since the monomer gas introduced into the vapor deposition chamber is polymerized on the object surface to form a continuous film, a uniform film can be obtained on the object surface while being extremely thin.

  Next, as shown in FIG. 8D, polysilazane (perhydropolysilazane) shown in FIG. 7A (indicated by PHPS in FIG. 8D) is formed outside the sealing resin layer J5. The coating process P13 to apply is performed. In the covering step P13, the sample on which the sealing resin layer J5 is formed is dipped in a container filled with liquid polysilazane, and then pulled up to rotate the sample until a desired film thickness is obtained.

  Finally, as shown in FIG. 8E, an ultraviolet irradiation step P14 for irradiating the polysilazane with ultraviolet rays is performed. In the ultraviolet irradiation step P14, the sample having the sealing resin layer J5 coated with polysilazane is irradiated with ultraviolet light having a wavelength of 172 nm using an excimer lamp. As a result, the polysilazane shown in FIG. 7A becomes the silicon oxide film shown in FIG. 7B, and the silica layer S5 as the sealing member 15 is formed. Thus, a silicon oxide film can be easily produced as compared with a case where polysilazane is cured using a high temperature or a silicon oxide film is formed using an expensive vacuum apparatus.

  Thus, the sealing member 15 is formed. In the manufacturing method P101 of the sealing polymer actuator F11 according to the first embodiment of the present invention, the sealing resin layer that is the sealing member 15 is provided on the polymer actuator element 13. Since the step of forming the silica layer S5 of J5 and silicon oxide film is included, the polymer actuator element 13 can be easily sealed with the sealing member 15 having good sealing performance.

  Next, as shown in FIG. 8 (f), a hole processing step P 15 for providing a through hole 15 h in the sealing member 15 is performed. In the hole processing step P15, a rectangular cut is made using a mold at the position of the sealing member 15 corresponding to the pad electrode portion 19p, and the sealing member 15 in that portion is peeled off. In this way, the through hole 15h is provided and the pad electrode portion 19p is exposed to the outside. Thereby, the through-hole 15h for applying a voltage between the pair of electrode layers 12 of the polymer actuator element 13 from the pad electrode part 19p can be easily produced. Further, since the connecting member 17 serves as a receiving portion for the processing pressure when the cut is made using the mold, it is possible to easily perform the drilling processing. In addition, since the drilling process is performed at the connecting member 17 provided along with the polymer actuator element 13, adverse effects on the polymer actuator element 13 can be reduced.

  Finally, as shown in FIG. 8G, a cutting process PV6 for cutting the excess support SP is performed. In the cutting step PV6, the part of the support SP that protrudes from the sealing member 15 is cut using a mold.

  In this way, the sealed polymer actuator F11 of the first embodiment of the present invention can be manufactured.

  The effects of the manufacturing method P101 for the sealed polymer actuator F11 according to the first embodiment of the present invention configured as described above will be described below.

  In the manufacturing method P101 of the sealing polymer actuator F11 according to the first embodiment of the present invention, the sealing resin layer J5 as the sealing member 15 and the silica layer S5 of the silicon oxide film are formed on the polymer actuator element 13. Therefore, the polymer actuator element 13 can be easily sealed with the sealing member 15 having good sealing performance. In particular, since the polysilazane is irradiated with ultraviolet rays, the silicon oxide film sealing member 15 can be easily obtained. Therefore, the polysilazane is cured using a high temperature, or the silicon oxide film is formed using an expensive vacuum apparatus. In comparison, a silicon oxide film can be easily manufactured. As a result, the polymer actuator element 13 can be reliably and easily sealed.

  Further, since the sealing member 15 at a position corresponding to the pad electrode portion 19p has the hole processing step P15 in which the through hole 15h is provided, between the pad electrode portion 19p and the pair of electrode layers 12 of the polymer actuator element 13 is provided. A voltage can be applied. This makes it possible to easily produce a sealed polymer actuator F11 that has a simple shape and can prevent moisture from entering or discharging into the polymer actuator element 13. Furthermore, since the drilling process is performed at the connecting member 17 provided in the polymer actuator element 13, the adverse effect on the polymer actuator element 13 can be reduced.

[Second Embodiment]
First, the sealing polymer actuator F21 will be described. FIG. 9 is a configuration diagram illustrating a manufacturing method of the sealed polymer actuator F21 according to the second embodiment of the present invention, and is a perspective view of the sealed polymer actuator F21. FIG. 10 is a configuration diagram illustrating the sealed polymer actuator F21 according to the second embodiment of the present invention, and is a top view as viewed from the Z1 side illustrated in FIG. FIG. 11 is a configuration diagram for explaining the sealed polymer actuator F21 according to the second embodiment of the present invention, and is a cross-sectional view taken along the line XI-XI shown in FIG. FIG. 12 is a configuration diagram for explaining the sealed polymer actuator F21 according to the second embodiment of the present invention, and is a cross-sectional view taken along line XII-XII shown in FIG. Further, the sealing polymer actuator F21 of the second embodiment is mainly different from the first embodiment in that the sealing resin layer J5 is not provided. In addition, about the same structure as 1st Embodiment, the same code | symbol is attached | subjected and detailed description is abbreviate | omitted.

  The sealed polymer actuator F21 according to the second embodiment of the present invention has an appearance as shown in FIGS. 9 and 10, and is deformed according to the voltage between the pair of electrode layers 12 as shown in FIG. The molecular actuator element 13 and a sealing member 25 that covers the polymer actuator element 13 so as to entirely wrap are configured. In addition, as shown in FIGS. 11 and 12, the sealing polymer actuator F <b> 21 is provided with a pair of terminal members 29 electrically connected to each of the pair of electrode layers 12 and the polymer actuator element 13. Connecting member 27.

  First, the polymer actuator element 13 of the sealing polymer actuator F21 uses the same polymer actuator element as in the first embodiment. As shown in FIG. 11, the electrolyte layer 11 and the thickness of the electrolyte layer 11 are the same. And a pair of electrode layers 12 provided on both sides in the direction. When electric power is supplied from a pair of terminal members 29 electrically connected to each of the pair of electrode layers 12, the polymer actuator element 13 is deformed according to the voltage between the pair of electrode layers 12. ing.

  Next, as in the first embodiment, the sealing member 25 of the sealing polymer actuator F21 uses a silicon oxide film having a skeleton as illustrated in FIG. 13 and a part of the pair of terminal members 29 and the connecting member 27 are closely attached to and covered with the polymer actuator element 13. Since the sealing member 25 is an inorganic film, the sealing member 25 has better barrier performance that does not transmit moisture as compared with a synthetic resin film that is generally used. Therefore, the sealing member 25 can prevent moisture from entering or discharging into the polymer actuator element 13, and the polymer actuator element 13 can be reliably sealed.

  Next, the pair of terminal members 29 of the sealing polymer actuator F21 is made of a conductive metal material and has a rectangular shape. As shown in FIG. 11, one terminal member 29 </ b> A is disposed so that one end side thereof is in contact with one electrode layer 12 </ b> A (12) of the polymer actuator element 13 and the other end side penetrates the sealing member 25. Exposed outside. In addition, although not shown, the other terminal member 29B is disposed so that one end side thereof is in contact with the other electrode layer 12B (12) of the polymer actuator element 13, and the other end side is sealed. It penetrates the member 25 and is exposed to the outside. A voltage can be applied to the polymer actuator element 13 from the exposed terminal member 29 (29A, 29B) on the other end side.

  Finally, the connection member 27 of the sealing polymer actuator F21 is made of a synthetic resin such as polyethylene terephthalate (PET) and has a sheet shape. As shown in FIG. As shown in FIG. 12, it is disposed at a position interposed between the pair of terminal members 29 (29A, 29B). By providing this connection member 27, this portion of the sealing polymer actuator F21 can be used as a support portion, and the deformation of the sealing member 25 in this portion is prevented, and the resistance of the sealing member 25 is improved. Therefore, the sealing effect of the sealing member 25 can be improved.

  As described above, the sealed polymer actuator F21 according to the second embodiment of the present invention includes the polymer actuator element 13, a part of the pair of terminal members 29 (29A, 29B), and the connection member 27 as a sealing member. A voltage can be applied between the pair of electrode members 12 (12A, 12B) of the polymer actuator element 13 from the exposed pair of terminal members 29 (29A, 29B). Thereby, since the sealing polymer actuator F21 is sealed off from the outside by the sealing member 25, it is possible to prevent moisture from entering or discharging into the polymer actuator element 13 while having a simple shape. In addition, the polymer actuator element 13 can be reliably sealed. Furthermore, since the sealing member 25 is formed using a silicon oxide film having excellent barrier performance, it is possible to further prevent moisture from entering or discharging from the polymer actuator element 13.

  Next, the manufacturing method P102 of the sealing polymer actuator F21 will be described. FIG. 13 is a cross-sectional process diagram illustrating a manufacturing method P102 of the sealed polymer actuator F21 according to the second embodiment of the present invention. FIG. 13 (a) shows the middle of the disposing process PS1, and FIG. (B) shows the end of the disposing step PS1, FIG. 13 (c) shows the end of the covering step P23, FIG. 13 (d) shows the end of the ultraviolet irradiation step P24, and FIG. (E) has shown after completion | finish of the cutting process PV6.

  In the manufacturing method P102 of the sealed polymer actuator F21 according to the second embodiment of the present invention, first, as shown in FIGS. 13A and 13B, the disposing step PS1 for disposing each member is performed. Do. In the disposing step PS1, as shown in FIG. 13A, one terminal member 29A, the polymer actuator element 13, and the connecting member 27 are placed on a carrier film (not shown). One terminal member 29A is provided with a support portion Sp to be gripped in the subsequent process.

  Next, in the disposing step PS1, as shown in FIG. 13B, the other terminal member 29B is disposed on the electrode layer 12B side of the polymer actuator element 13. At that time, the electrode layer 12 (12A, 12B) of the polymer actuator element 13 and the pair of terminals are provided to ensure electrical connection and to be able to grip and move the support portion Sp provided on the terminal member 29A. The member 29 (29A, 29B) is adhered with a conductive adhesive.

  Next, the process of forming the sealing member 25 is performed.

  First, as shown in FIG. 13C, a coating process P23 for applying polysilazane (perhydropolysilazane) shown in FIG. 7A to the outside of the polymer actuator element 13 is performed. In the covering step P23, after the polymer actuator element 13 is dipped in a container filled with liquid polysilazane, the polymer actuator element 13 is pulled up and rotated until a desired film thickness is obtained.

  Next, as shown in FIG. 13D, an ultraviolet irradiation step P24 for irradiating the polysilazane with ultraviolet rays is performed. In the ultraviolet irradiation step P24, the sample in which the polymer actuator element 13 is coated with polysilazane is irradiated with ultraviolet light having a wavelength of 172 nm using an excimer lamp. As a result, the polysilazane shown in FIG. 7A becomes the silicon oxide film shown in FIG. 7B, and the sealing member 25 is formed. Thereby, the polymer actuator element 13 can be easily sealed with the sealing member 25 having good sealing performance. In particular, since the polysilazane is irradiated with ultraviolet rays to easily obtain the silicon oxide film sealing member 25, the polysilazane is cured using a high temperature, or the silicon oxide film is formed using an expensive vacuum apparatus. In comparison, a silicon oxide film can be easily manufactured.

  Finally, as shown in FIG. 13 (e), a cutting step PV6 for cutting the excess support portion Sp is performed. In the cutting step PV6, the support portion Sp is cut using a mold.

  In this way, the sealed polymer actuator F21 of the second embodiment of the present invention can be produced.

  The effects of the manufacturing method P102 for the sealed polymer actuator F21 according to the second embodiment of the present invention configured as described above will be described below.

  Since the manufacturing method P102 of the sealed polymer actuator F21 according to the second embodiment of the present invention includes the step of forming the silicon oxide film sealing member 25 on the polymer actuator element 13, the polymer actuator element 13 can be easily sealed with the sealing member 25 having good sealing performance. In particular, since the polysilazane is irradiated with ultraviolet rays to easily obtain the silicon oxide film sealing member 25, the polysilazane is cured using a high temperature, or the silicon oxide film is formed using an expensive vacuum apparatus. In comparison, a silicon oxide film can be easily manufactured. As a result, the polymer actuator element 13 can be reliably and easily sealed.

  In addition, this invention is not limited to the said embodiment, For example, it can deform | transform and implement as follows, These embodiments also belong to the technical scope of this invention.

<Modification 1>
In the first embodiment, in the resin layer forming step P12 and the covering step P13, the process is performed by grasping the support SP, but the position corresponding to the pad electrode portion 19p of the terminal member 19 is grasped by the jig, May be performed. As a result, the sealing resin layer J5 and the silica layer S5 are not formed in the portion gripped by the jig, and an opening is naturally formed in this portion when removed from the jig. This makes it possible to omit the hole processing step P15 in which the opening is formed as a through-hole and to provide the through-hole 15h, so that the sealing polymer actuator F11 can be easily manufactured.

<Modification 2>
In the first embodiment, the paraxylylene-based polymer is formed by vapor deposition as the sealing resin layer J5. However, the sealing resin layer J5 may be formed of a polymer film. In this case, an adhesive may be interposed between the sealing resin layer J5 and the polymer actuator element 13. As the polymer film that can be used as the sealing resin layer J5, a polymer having low moisture permeability is preferable, and a film in which moisture permeability is suppressed by vapor deposition of an inorganic film may be used.

<Modification 3>
A sealing resin layer may be further formed outside the sealing polymer actuator F21 according to the second embodiment.

<Modification 4>
In the said embodiment, although the connection member (17, 27) was used suitably, the structure which does not use a connection member (17, 27) may be sufficient.

  The present invention is not limited to the above-described embodiment, and can be modified as appropriate without departing from the scope of the object of the present invention.

12, 12A, 12B Electrode layer 13 Polymer actuator element 15, 25 Sealing member J5 Sealing resin layer P12 Resin layer forming process P13, P23 Covering process P14, P24 Ultraviolet irradiation process F11, F21 Sealing polymer actuator P101, P102 Manufacturing method of sealing polymer actuator

Claims (1)

A polymer actuator element that deforms according to a voltage between a pair of electrode layers;
A sealing member that covers the polymer actuator element so as to entirely enclose the polymer actuator element,
A resin layer forming step of forming a sealing resin layer as the sealing member on the polymer actuator element;
A coating step of applying polysilazane to the outside of the sealing resin layer;
An ultraviolet irradiation step of irradiating the polysilazane with ultraviolet rays to use the polysilazane as a silicon oxide film as the sealing member.