JP6338281B2 - SEALED POLYMER ACTUATOR AND MANUFACTURING METHOD THEREOF - Google Patents

Description

  The present invention relates to a polymer actuator element that is deformed according to a voltage between electrode layers, and more particularly, to a sealed polymer actuator having a sealing structure that is shielded from an external environment and a method for manufacturing the same.

  In various electronic devices, there is an increasing need for a small, lightweight, and flexible actuator. In response to this demand, a polymer telescopic polymer actuator element is expected. Some polymer actuator elements use water as an electrolyte, and polymer actuator elements that use water do not operate when water evaporates. Therefore, the polymer actuator elements are covered so as to enclose the entire polymer actuator element. It was necessary to apply a stop structure. Further, even a polymer actuator element using an electrolyte other than water, such as an organic solvent or an ionic liquid, may require a similar sealing structure in order to avoid adverse effects due to condensation or excessive humidity.

  As a sealing polymer actuator having such a sealing structure, Patent Document 1 proposes a polymer actuator 900 as shown in FIG. FIG. 9 is a cross-sectional view illustrating the structure of a conventional polymer actuator 900. FIG. 10 is a cross-sectional view illustrating a method for manufacturing a conventional polymer actuator 900.

  A conventional polymer actuator 900 shown in FIG. 9 includes an actuator body 915, electrodes 925a and 925b disposed with the actuator body 915 interposed therebetween, and a metal layer 944 disposed outside the electrodes 925a and 925b. And a conductive wire 942 for applying a voltage to the electrode 925a and the electrode 925b, and a sealing film 930 that covers the whole so as to wrap the whole. And the sealing film 930 has the performance which interrupts outside air. As a result, the actuator body 915, the electrode 925a, and the electrode 925b are cut off from the outside, so that the polymer actuator 900 can be stably maintained in various atmospheres such as water, solvent, and air while maintaining good characteristics over a long period of time. And can be operated. Further, the sealing film 930 acts as a protection for the entire actuator (actuator body 915, electrode 925a and electrode 925b).

  Further, in the conventional example of Patent Document 1, the polymer actuator 900 can be manufactured by the following procedure. First, as shown in FIG. 10B1, an electrode 925b is formed on another sealing film 930 on the sealing film 930 (polymer film). Next, as illustrated in FIG. 10B2, conductive wires 942 are arranged on the electrodes 925 a and 925 b of the above-described stacked body, and are fixed using a conductive adhesive 943. The conductive wire 942 is covered with a polymer film 949 made of an electrically insulating thermoplastic resin. Next, as shown in (B3) of FIG. 10, the actuator body 915 is sandwiched so that the electrode 925a of one laminated body and the electrode 925b of the other laminated body shown in (B2) of FIG. Let them be arranged. Next, although not shown in FIG. 10 (B4), the laminated body electrode 925a and electrode 925b are thermocompression-bonded to the opposing surfaces of the actuator body 915 with the sealing film (polymer film) 930 as the outside. . Thereafter, the thermocompression bonded body is left in an atmosphere of 40 ° C. and 90% for 1 hour and humidified. Finally, although not shown in FIG. 10B5, sealing is performed by thermocompression bonding of a pair of laminated sealing films (polymer films) 930 to each other. At this time, the pair of conductive wires 942 are taken out of the sealing film (polymer film). In this way, the polymer actuator 900 shown in FIG. 9 is completed.

JP 2008-35682 A

  In the polymer actuator 900 of the conventional example, since a polymer film having air permeability and water absorption is used as the sealing film 930, high sealing performance cannot be obtained, and sealing is required to obtain sealing performance. It was necessary to make the film 930 as thick as possible. However, when the sealing film 930 is made thick, there is a problem that the deformation of the polymer actuator 900 is hindered.

  An object of the present invention is to solve the above-described problems, and to provide a sealed polymer actuator that has a sufficient sealing effect and does not hinder the deformation of the polymer actuator element, and a method for manufacturing the same.

In order to solve this problem, a sealed polymer actuator according to the present invention includes a polymer actuator element that deforms in response to a voltage between a pair of electrode layers, and a seal that covers the polymer actuator element so as to entirely enclose the polymer actuator element. a sealing polymer actuator having a stop member, said sealing member, an adhesive film formed on the outside of the polymer actuator elements have a moisture barrier properties, it is formed on the outside of the adhesive film have a, a support film containing the slits in the direction orthogonal to the driving direction of the polymer actuator elements, in between the pair of electrode layers of the polymer actuator element, and the slit between faces It is characterized in that there.

  According to this, the sealed polymer actuator of the present invention has a moisture-proof thin and soft adhesive film that seals the polymer actuator element, and the support film that supports the adhesive film has a certain thickness and rigidity. Even if it has, the drive of a polymer actuator element is hardly inhibited. By these things, the sealing polymer actuator which has a sufficient sealing effect and does not inhibit the deformation | transformation of the driving direction of a polymer actuator element is obtained.

In addition, the manufacturing method of the sealed polymer actuator of the present invention includes a polymer actuator element that is deformed according to a voltage between a pair of electrode layers, and a sealing member that covers the polymer actuator element so as to entirely enclose the polymer actuator element. A manufacturing method of a sealed polymer actuator comprising: a hole forming step for making a support film having a slit by punching a base film, and a moisture-proof performance for the support film having a slit. It has the lamination process which laminates the adhesive film which has, and produces a laminated body, and the sealing process which pinches | interposes the said polymer actuator element between the said laminated bodies, and is characterized by the above-mentioned.

  According to this, even a pressure-sensitive adhesive film that is thin and soft and difficult to handle can be easily handled in the subsequent steps by the support film, and the polymer actuator element can be easily manufactured. It can be sealed. Furthermore, since a support film having slits is used as the sealing member, even a support film having a certain thickness and rigidity is less likely to hinder driving of the polymer actuator element. By these things, the sealing polymer actuator which has sufficient sealing effect and does not inhibit the deformation | transformation of the driving direction of a polymer actuator element can be produced easily.

A method of manufacturing a sealing polymer actuator of the present invention, after the laminating step is characterized by having a higher cutting Engineering for cutting a portion of said slit.

  According to this, if the polymer actuator element is sandwiched so that the slits of the two support films face each other in the sealing process PF4, a part of the slit is cut in the cutting process, so the slits are connected over the entire circumference. Can be produced. For this reason, it is possible to produce a sealing member that does not inhibit the deformation of the polymer actuator element in the driving direction. This makes it possible to easily produce a sealed polymer actuator that does not hinder the deformation in the driving direction of the polymer actuator element.

  Moreover, the manufacturing method of the sealing polymer actuator of the present invention is characterized in that a laser beam is used for drilling in the hole machining step.

  According to this, it is possible to easily make a hole, and it is possible to easily produce a plurality of slits having a narrow width and interval. For this reason, it is possible to produce a support film that does not inhibit the deformation with respect to the fine deformation of the polymer actuator element. This makes it possible to easily produce a sealed polymer actuator that does not hinder the deformation in the driving direction of the polymer actuator element.

  In the sealed polymer actuator of the present invention, a thin and soft adhesive film having moisture-proof performance seals the polymer actuator element, and the support film supporting the adhesive film has a certain thickness and rigidity. However, the drive of the polymer actuator element is hardly hindered. By these things, the sealing polymer actuator which has a sufficient sealing effect and does not inhibit the deformation | transformation of the driving direction of a polymer actuator element is obtained.

  In addition, the manufacturing method of the sealed polymer actuator of the present invention can be easily handled in the subsequent steps by the support film, even if it is an adhesive film that is adhesive and thin and soft and difficult to handle. Moreover, the polymer actuator element can be easily sealed. Furthermore, since a support film having slits is used as the sealing member, even a support film having a certain thickness and rigidity is less likely to hinder driving of the polymer actuator element. By these things, the sealing polymer actuator which has sufficient sealing effect and does not inhibit the deformation | transformation of the driving direction of a polymer actuator element can be produced easily.

It is a schematic diagram explaining the sealing polymer actuator concerning 1st Embodiment of this invention, Comprising: It is a perspective view of a sealing polymer actuator. It is a schematic diagram explaining the sealing polymer actuator of 1st Embodiment of this invention, Comprising: It is the top view seen from the Z1 side shown in FIG. It is a schematic diagram explaining the sealing polymer actuator of 1st Embodiment of this invention, Comprising: It is sectional drawing in the III-III line | wire shown in FIG. It is the schematic diagram explaining the principle of operation of the polymer actuator element used for the sealing polymer actuator concerning a 1st embodiment of the present invention. It is a cross-sectional schematic diagram in the manufacturing process of the polymer actuator element concerning 1st Embodiment of this invention. It is a cross-sectional schematic diagram in the manufacturing process of the sealing polymer actuator concerning 1st Embodiment of this invention. It is a schematic diagram explaining the manufacturing process of the sealing polymer actuator concerning 1st Embodiment of this invention, Comprising: It is the top view which showed the support film after a hole drilling process. It is a schematic diagram explaining the manufacturing process of the sealing polymer actuator concerning 1st Embodiment of this invention, Comprising: It is the top view which showed the state after a sealing process. It is sectional drawing explaining the structure of the polymer actuator of a prior art example. It is sectional drawing explaining the manufacturing method of the polymer actuator of a prior art example.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings.

[First Embodiment]
First, the sealing polymer actuator F11 will be described. FIG. 1 is a schematic diagram for explaining a sealed polymer actuator F11 according to the first embodiment of the present invention, and is a perspective view of the sealed polymer actuator F11. FIG. 2 is a schematic view for explaining the sealed polymer actuator F11 according to the first embodiment of the present invention, and is a top view seen from the Z1 side shown in FIG. FIG. 3 is a schematic diagram for explaining the sealed polymer actuator F11 according to the first embodiment of the present invention, and is a cross-sectional view taken along line III-III shown in FIG. Since FIGS. 1 to 3 are schematic diagrams, the actual dimensions of the sealed polymer actuator F11 are different.

  The sealed polymer actuator F11 according to the first embodiment of the present invention has an appearance as shown in FIGS. 1 and 2, and is deformed according to the voltage between the pair of electrode layers 12 as shown in FIG. A molecular actuator element A3 and a sealing member B5 that covers the polymer actuator element A3 so as to entirely wrap are configured. Moreover, in 1st Embodiment of this invention, sealing member B5 is comprised by the adhesive film 14 formed in the outer side of polymer actuator element A3, and the support film 16 formed in the outer side of the adhesive film 14. FIG. ing. In addition, as shown in FIG. 3, the sealing polymer actuator F11 has a pair of terminal members (first members) electrically connected to each of the pair of electrode layers 12 (12A, 12B) of the polymer actuator element A3. A first conductive terminal 19A and a second conductive terminal 19B).

  Here, the polymer actuator element A3 used in the sealed polymer actuator F11 according to the first embodiment of the present invention will be described. FIG. 4 is a schematic diagram illustrating the operating principle of the polymer actuator element A3. FIG. 4A is a schematic diagram of ions in the electrolyte layer 11 and the electrode layer 12 according to the first embodiment of the present invention. FIG. 4B shows a state in which a voltage is applied to the electrode layer 12 of the first embodiment of the present invention.

  As shown in FIG. 4A, the polymer actuator element A3 is provided between the pair of electrode layers 12 (12A, 12B) arranged opposite to each other and the pair of electrode layers 12 (12A, 12B). Electrolyte layer 11, and cation CA and anion AN are dispersed in each layer.

  Then, as shown in FIG. 4B, when a voltage is applied between the electrode layer 12A and the electrode layer 12B, the electrolyte layer 11 sandwiched between the electrode layer 12A and the electrode layer 12B. An electric field is generated, and the positive ions CA move to the electrode layer 12A, and the negative ions AN move to the electrode layer 12B. Therefore, if one side is supported and used as a fulcrum PP (supporting portion), the other side of the actuator is greatly displaced according to the direction of the electric field to the actuator (in FIG. 4B, it is displaced toward the Z1 direction). )

  If the other side of the actuator is an action point LP (action part), it can be used as various actuators. That is, the deformation in the Y direction and the deformation in the Z direction occur, and driving in the Z direction and the Y direction (the driving direction KD shown in FIG. 4B) becomes possible at the action point LP. Note that by changing the direction of the electric field applied to the actuator, the direction of action of the actuator can be changed, and by changing the strength of the voltage applied to the actuator, the amount of deformation deformed according to the voltage can also be changed.

  Next, each component of the polymer actuator element A3 described above will be described in detail. First, the electrolyte layer 11 of the polymer actuator element A3 is a gel film in which an ionic liquid is mixed with a base polymer (resin material). As shown in FIG. 3, a pair of electrode layers 12 (12A, 12B) ). The electrolyte layer 11 is produced by dissolving a ionic liquid and a resin material (polymer) in a solvent to produce a cast liquid, casting the cast liquid on a mold, and then vacuum drying to evaporate the solvent. . In addition, as a material of the polymer (resin material) of the electrolyte layer 11, for example, polyvinylidene fluoride (PVDGF), polymethyl methacrylate (PMMA), or the like can be used.

  Next, the electrode layer 12 of the polymer actuator element A3 includes a polymer (resin material) and an ionic liquid which are the same base as the electrolyte layer 11, and conductive particles, and the polymer (resin material) and the ionic liquid. The conductive particles are mixed into a gel. And as above-mentioned, a pair of electrode layer 12 (12A, 12B) is provided in both surfaces of the thickness direction of the electrolyte layer 11, and clamps the electrolyte layer 11 (refer FIG. 3). When the electrolyte layer 11 and the electrode layer 12 (12A, 12B) configured as described above are used, a large displacement can be obtained at a low voltage. In addition, as the conductive particles of the electrode layer 12, carbon nanotubes, carbon fibers, gold particles, platinum particles, nickel particles, and the like can be used.

  Next, the sealing member B5 of the sealing polymer actuator F11 will be described. As described above, the sealing member B5 includes the adhesive film 14 formed outside the polymer actuator element A3 and the support film 16 formed outside the adhesive film 14, and the polymer actuator element A3. Is covered so that it is entirely wrapped. The pair of terminal members (first conductive terminal 19A and second conductive terminal 19B) are partially exposed from the end of the sealing member B5.

  The adhesive film 14 of the sealing member B5 has a film shape with a thickness of about 25 μm, has adhesiveness, and has excellent moisture-proof performance that does not transmit moisture. Further, as shown in FIGS. 1 and 3, the adhesive film 14 is attached to the polymer actuator element A3 so as to entirely enclose the polymer actuator element A3 and a part of the pair of terminal members (19A, 19B). Closely coated. In addition, since the adhesive film 14 is very soft in addition to being as thin as about 25 μm, it has an effect of not adversely affecting the deformation of the polymer actuator element A3.

  The support film 16 of the sealing member B5 uses a PEN film (PEN, Polyethylene naphthalate) having a thickness of about 1 μm, and is formed outside the adhesive film 14 as shown in FIGS. Then, the support film 16 can be gripped and handled. This solves the problem that it is difficult to handle the adhesive film 14 alone, and the sealing polymer actuator F11 can be easily handled. In addition, although the PEN film was used for the support film 16, it is not restricted to this, For example, a PET film (PET, Polyethylene terephthalate) and a PPS film (PPS, Poly Phenylene Sulfide) may be used.

  Further, as shown in FIG. 1, the support film 16 has a plurality of slits 16s in an orthogonal direction VD (X direction shown in FIG. 1) orthogonal to the driving direction KD of the polymer actuator element A3. In other words, it can be said that the orthogonal direction VD is orthogonal to the directions (the Y direction and the Z direction shown in FIG. 1) in which the polymer actuator element A3 is deformed. The shape (width size, etc.) and the number of slits 16s are appropriately selected according to the usage status of the sealing polymer actuator F11.

  In the sealing polymer actuator F11 of the present invention configured as described above, the sealing member B5 includes the pressure-sensitive adhesive film 14 having moisture-proof performance and the support film 16 having slits 16s. The polymer actuator element A3 is sealed by covering the polymer actuator element A3 so that the thin and soft adhesive film 14 supported on the whole covers the polymer actuator element A3. Moreover, since the support film 16 has slits 16s in the orthogonal direction VD orthogonal to the drive direction KD of the polymer actuator element A3, even if the support film 16 has a certain thickness and rigidity, There is little impediment to driving of the molecular actuator element A3. By these, the sealing polymer actuator F11 which has a sufficient sealing effect and does not hinder the deformation of the driving direction KD of the polymer actuator element A3 is obtained.

  Finally, the terminal members (first conductive terminal 19A and second conductive terminal 19B) of the encapsulating polymer actuator F11 are manufactured by processing conductive steel plates, and the surface is plated with nickel or tin. ing. The terminal member is disposed such that one end thereof is in contact with the pair of electrode layers 12 of the polymer actuator element A3 (only the first conductive terminal 19A is shown in FIG. 3), and the other end is exposed from the sealing member B5. Arranged. From this terminal member, a voltage can be applied to the polymer actuator element A3.

  Next, a manufacturing method of the sealing polymer actuator F11 will be described. First, the manufacturing method of the polymer actuator element A3 used for the sealing polymer actuator F11 will be described. FIG. 5 is a schematic cross-sectional view during the manufacturing process of the polymer actuator element A3 according to the first embodiment of the present invention. FIG. 5 (a) shows the state after the electrode layer forming process PA1, and FIG. b) shows after the peeling step PA2, FIG. 5 (c) shows after the end of the clamping step PA3, and FIG. 5 (d) shows after the end of the terminal attaching step PA4.

  In the manufacturing method of the polymer actuator element A3, first, as shown in FIG. 5A, an electrode layer forming step PA1 for forming the electrode layer 12 is performed. In the electrode layer forming step PA1, the electrode layer 12 containing conductive particles is formed by a casting method. Specifically, first, an ionic liquid, conductive particles, and a resin material (polymer) are dissolved in a solvent and mixed to prepare a casting solution. Subsequently, the cast solution is cast on a base 18 made of quartz or the like, and then the solvent is evaporated by vacuum drying. And the gel-like electrode layer 12 is obtained.

  Next, as shown in FIG. 5B, a peeling process PA2 for peeling the electrode layer 12 from the pedestal 18 is performed. The electrode layer forming process PA1 and the peeling process PA2 are performed in the same manner to form the electrode layer 12A and the electrode layer 12B.

  Next, as shown in FIG. 5C, a sandwiching process PA3 is performed in which the electrolyte layer 11 is sandwiched between a pair of electrode layers 12 (12A, 12B). In the sandwiching process PA3, the electrode layer 12A and another electrode layer 12B are opposed to each other, and both surfaces of the electrolyte layer 11 are sandwiched between the electrode layers 12 (12A, 12B). Specifically, the electrolyte layer 11, the electrode layer 12A, and the electrode layer 12B are laminated by thermocompression bonding. The electrolyte layer 11 is produced by using a casting method similar to that for the electrode layer 12 by producing a cast liquid in which an ionic liquid and a resin material (polymer) are dissolved in a solvent.

  By performing the above steps, the polymer actuator element A3 according to the first embodiment of the present invention can be manufactured. By simply laminating the electrolyte layer 11 and the pair of electrode layers 12 (12A, 12B) in sequence, The polymer actuator element A3 can be easily manufactured.

  Finally, as shown in FIG. 5D, a terminal attaching process PA4 for mounting the first conductive terminal 19A and the second conductive terminal 19B on the polymer actuator element A3 is performed. Specifically, first, the first conductive terminal 19A is bonded to the electrode layer 12A, and the second conductive terminal 19B is bonded to the electrode layer 12B. A conductive adhesive is suitably used for this adhesion.

  Next, a manufacturing method of the sealing polymer actuator F11 will be described. FIG. 6 is a schematic cross-sectional view during the manufacturing process of the sealed polymer actuator F11 according to the first embodiment of the present invention. FIG. 6 (a) shows a state after the completion of the preparation process PF1, and FIG. ) Shows the end of the hole processing step PF2, FIG. 6C shows the end of the lamination step PF3, FIG. 6D shows the state in the middle of the sealing step PF4, FIG. e) shows after the end of the sealing step PF4, and FIG. 6 (f) shows after the end of the cutting step PF5. FIG. 7 is a plan view showing the support film 16 after the hole processing step PF2. FIG. 8 is a plan view showing a state after the sealing step PF4.

  In the manufacturing method of the sealed polymer actuator F11 of the present invention, first, as shown in FIG. 6A, a preparation step PF1 for preparing a base film G7 that is a PEN film is performed.

  Next, as shown in FIG.6 (b), the hole processing process PF2 which perforates the base film G7 is performed. In the hole processing step PF2, holes are made in a portion excluding the outer periphery of the prepared base film G7, and a support film 16 in which a plurality of slits 16s as shown in FIG. By making holes in the portion other than the outer periphery, the support film 16 can be easily handled in the subsequent steps.

  In the first embodiment of the present invention, a laser beam such as a carbon dioxide laser is used to make a hole in the base film G7. As a result, it is possible to easily make a hole, and it is possible to easily produce a plurality of slits 16s having a narrow width and interval. For this reason, the support film 16 which does not inhibit a deformation | transformation with respect to the fine deformation | transformation of polymer actuator element A3 can be produced.

  Next, as shown in FIG.6 (c), the lamination process PF3 which laminates | stacks the adhesion film 14 on the support film 16 is performed. In the laminating step PF3, first, an adhesive film 14 having moistureproof performance in which both sides are sandwiched between carrier films is prepared. Next, after peeling off the carrier film on one side, the adhesive film 14 is laminated and adhered to the support film 16 having the slits 16s. And the carrier film of the other side is peeled off and the laminated body 46 shown in FIG.6 (c) is produced. Thereby, even if it is the adhesive film 14 which has adhesiveness and is thin and is soft and difficult to handle, it can be easily handled by subsequent processes (especially sealing process PF4).

  Next, as shown in FIGS. 6D and 6E, a sealing step PF4 for sealing the polymer actuator element A3 is performed. In the sealing step PF4, first, the two laminated bodies 46 produced in the laminating step PF3 are used, and the polymer actuator element A3 is sandwiched between the two laminated bodies 46 as shown in FIG. In that case, it laminates | stacks so that the slits 16s of the support film 16 in the two laminated bodies 46 may oppose.

  Next, the outer peripheral portion where the two laminated bodies 46 overlap each other is heated and thermocompression bonded, and as shown in FIGS. 6E and 8, the sealing member B5 (the adhesive film 14 and the support film 16) is high. The molecular actuator element A3 is covered so as to be entirely wrapped. In this way, the sealing step PF4 is performed. Thereby, the polymer actuator element A3 can be easily sealed. Further, since the support film 16 having slits 16s is used as the sealing member B5, even if the support film 16 has a certain thickness and rigidity, the driving of the polymer actuator element A3 is obstructed. Less is.

  Finally, as shown in FIG. 6F, a cutting process PF5 for cutting the outer peripheral portion of the sealing member B5 is performed. In the cutting step PF5, the outer peripheral portion of the sealing member B5 is cut along the cutting line CL shown in FIG. At that time, in the first embodiment of the present invention, a part of the slit 16s that has been drilled in the hole machining step PF2 is cut. Thereby, since the slits 16s of the two support films 16 are bonded together so as to face each other, it is possible to manufacture the slits 16s that are connected over the entire circumference in the orthogonal direction VD. For this reason, it is possible to manufacture the sealing member B5 that does not inhibit the deformation of the polymer actuator element A3 in the driving direction KD.

  In addition, the cutting step PF5 can be performed in any step as long as it is after the laminating step PF3 in which the support film 16 and the adhesive film 14 are laminated. In the first embodiment of the present invention, the cutting step PF5 is performed. This is performed after the sealing step PF4. Thereby, until the sealing process PF4 is completed, the adhesive film 14 which has adhesiveness and is thin and soft and difficult to handle can be easily handled.

  By performing the above steps, the sealed polymer actuator F11 of the first embodiment of the present invention can be manufactured.

  The effects of the sealed polymer actuator F11 and the manufacturing method thereof according to the first embodiment of the present invention configured as described above will be collectively described below.

  The sealing polymer actuator F11 according to the first embodiment of the present invention is supported by the support film 16 because the sealing member B5 includes the adhesive film 14 having moisture-proof performance and the support film 16 including the slits 16s. The thin and soft adhesive film 14 covers the polymer actuator element A3 so as to entirely enclose the polymer actuator element A3. Moreover, since the support film 16 has slits 16s in the orthogonal direction VD orthogonal to the drive direction KD of the polymer actuator element A3, even if the support film 16 has a certain thickness and rigidity, There is little impediment to driving of the molecular actuator element A3. By these, the sealing polymer actuator F11 which has a sufficient sealing effect and does not hinder the deformation of the driving direction KD of the polymer actuator element A3 is obtained. Furthermore, it is possible to solve the problem that it is difficult to handle the pressure-sensitive adhesive film 14 alone, and to make the sealed polymer actuator F11 easy to handle.

  Moreover, since the manufacturing method of the sealing polymer actuator F11 concerning 1st Embodiment of this invention has the lamination process PF3 which laminates | stacks the support film 16 and the adhesion film 14, and produces the laminated body 46, it is adhesion. Even if it is the adhesive film 14 which has the property and is thin and is soft and difficult to handle, it can be easily handled in the subsequent steps. In addition, since the sealing step PF4 is included, the polymer actuator element A3 can be easily sealed simply by sandwiching the polymer actuator element A3 between the laminated bodies 46 and pressing them. Further, since the support film 16 having slits 16s is used as the sealing member B5, even if the support film 16 has a certain thickness and rigidity, the driving of the polymer actuator element A3 is obstructed. Less is. By these, the sealing polymer actuator F11 which has a sufficient sealing effect and does not hinder the deformation of the polymer actuator element A3 in the driving direction KD can be easily manufactured.

  Further, if the polymer actuator element A3 is sandwiched so that the slits 16s of the two support films 16 face each other in the sealing step PF4, a part of the slit 16s is cut in the cutting step PF5, so that the slit 16s is formed. What was connected over the circumference in the orthogonal direction VD can be produced. For this reason, it is possible to manufacture the sealing member B5 that does not inhibit the deformation of the polymer actuator element A3 in the driving direction KD. As a result, it is possible to easily produce the sealed polymer actuator F11 that does not hinder the deformation of the polymer actuator element A3 in the driving direction KD.

  In addition, since the laser beam is used for the hole forming step PF2, the holes can be easily formed and a plurality of slits 16s having a narrow width and interval can be easily formed. For this reason, the support film 16 which does not inhibit a deformation | transformation with respect to the fine deformation | transformation of polymer actuator element A3 can be produced. As a result, it is possible to easily produce the sealed polymer actuator F11 that does not hinder the deformation of the polymer actuator element A3 in the driving direction KD.

  In addition, this invention is not limited to the said embodiment, For example, it can deform | transform and implement as follows, These embodiments also belong to the technical scope of this invention.

<Modification 1>
In the first embodiment, the slits 16s are connected to each other around the circumference and are preferably formed. However, the present invention is not limited to this, and some slits may exist.

<Modification 2>
In the first embodiment, laser light is suitably used for drilling in the hole drilling step PF2, but the present invention is not limited to this. For example, drilling is performed by using a Bic or Pinnacle mold. Also good.

  The present invention is not limited to the above-described embodiment, and can be modified as appropriate without departing from the scope of the object of the present invention.

12, 12A, 12B Electrode layer 14 Adhesive film 16 Support film 16s Slit 46 Laminate A3 Polymer actuator element B5 Sealing member G7 Substrate film KD Drive direction VD Orthogonal direction PF2 Hole machining process PF3 Lamination process PF4 Sealing process PF5 Cutting Process F11 Sealed polymer actuator

Claims (4)

A sealed polymer actuator comprising: a polymer actuator element that deforms in response to a voltage between a pair of electrode layers; and a sealing member that covers the polymer actuator element so as to entirely enclose the polymer actuator element,
The sealing member includes an adhesive film have a moisture barrier properties is formed on the outside of the polymer actuator elements, the slits in the direction orthogonal to the driving direction of the polymer actuator elements is formed on the outer side of the adhesive film possess entered a support film was, the,
A sealed polymer actuator , wherein the slits face each other with the pair of electrode layers of the polymer actuator element interposed therebetween . A method for producing a sealed polymer actuator comprising: a polymer actuator element that is deformed according to a voltage between a pair of electrode layers; and a sealing member that covers the polymer actuator element so as to entirely wrap the polymer actuator element. ,
Perforating a base film, making a support film with slits,
A lamination step of preparing a laminate by laminating an adhesive film having moisture barrier properties to the support film containing the said slits,
And a sealing step in which the polymer actuator element is sandwiched between the laminates and pressure-bonded. After the lamination step, the manufacturing method of the sealing polymer actuator according to claim 2, characterized in that it has a higher cutting Engineering for cutting a portion of said slit. 4. The method for producing a sealed polymer actuator according to claim 2, wherein a laser beam is used for drilling in the hole machining step.