JP6222575B2 - Sheet workpiece gripping mechanism and chemical processing apparatus - Google Patents

Description

  The present invention relates to a sheet-like workpiece gripping mechanism and a chemical processing apparatus.

  When a treatment such as plating is performed on the surface of a sheet-like workpiece such as a flexible circuit board, an apparatus 100 as shown in FIG. 4 is used (see Patent Document 1).

  As shown in FIG. 4, the apparatus 100 is configured such that the sheet-like workpiece S supplied from the workpiece supply unit 101 is plated by the plating unit 103 while being conveyed by the conveying unit 110 and is collected by the workpiece collecting unit 102. have.

  The workpiece supply unit 101 is configured to rewind and supply the sheet-like workpiece S wound around the reel R <b> 1 to the transport unit 110.

  The transport unit 110 includes an endless belt 111 that circulates between the workpiece supply unit 101 and the workpiece collection unit 102, and a plurality of gripping units 12 that grip the sheet-like workpiece S (see FIG. 5). The grip portions 12 are arranged along the endless belt 111 at equal intervals. The transport unit 110 is configured to sequentially hold the workpiece S supplied from the workpiece supply unit 101 and release the workpiece S at the position of the workpiece collection unit 102 as the endless belt 111 rotates. . Moreover, the conveying means 110 is provided so that the surface of the workpiece S is parallel to the vertical direction when the gripping portion 12 grips one end (upper end) or both ends (upper and lower ends) in the width direction of the workpiece S. Yes.

  The workpiece collection unit 102 is configured to wind the workpiece S released from the grip unit 12 of the transport unit 110 around the reel R2.

  The plating unit 103 is provided in the order of the pretreatment tank 104, the plating tank 105, and the posttreatment tank 106 from the upstream side (that is, the workpiece supply unit 101 side) to the downstream side (that is, the workpiece collection unit 102 side). In each tank, the surface of the workpiece S is processed.

  Since the apparatus 100 is configured as described above, in the apparatus 100, while the surface of the workpiece S supplied from the workpiece supply unit 101 is maintained in parallel with the vertical direction by the conveyance unit 110, the plating unit 103 performs the operation of the workpiece S. The surface can be plated and the workpiece S plated can be collected in the workpiece collection unit 102.

  By the way, in the plating process in the plating part 103, the process is performed by energizing the work S through the grip part 12. And in order to make the plating process of the workpiece | work S into a predetermined | prescribed state, the energization state to the workpiece | work S must be kept constant. For this purpose, it is necessary to keep the contact state between the workpiece S and the grip portion 12 constant.

  Moreover, the workpiece | work S is a continuous sheet form, and the some holding part 12 hold | grips the workpiece | work S along the longitudinal direction (refer FIG. 4, FIG. 5). For this reason, the state of the sheet S between adjacent gripping portions 12 also affects the energization state of the workpiece S. For this reason, in order to maintain the energized state of the workpiece S, it is necessary to keep the state of the sheet S between the adjacent gripping portions 12 constant. Specifically, the workpiece S must be held by the gripping portion 12 so that the sheet S cannot be wrinkled while keeping the distance between the adjacent gripping portions 12 constant.

JP 2012-251182 A

  However, as shown in FIG. 6A, if the end portion in the width direction of the workpiece S is in an extended state, the gripping portion 12 is set so that the contact state between the gripping portion 12 and the workpiece S is constant. Thus, the end of the workpiece S can be gripped.

  However, as shown in FIG. 6B, when the end portion in the width direction of the workpiece S is curled due to the thickness of the workpiece S or pre-working on the workpiece S, the grip portion 12 is bent and the end portion is bent. May grip the end of the workpiece S. In this case, the contact state between the gripping portion 12 and the workpiece S is different from the contact state between the other gripping portion 12 and the workpiece S. Then, at the location gripped by the gripping part 12, the energization state of the work S is different from other parts, and the plating process of the work S cannot be performed properly.

  Further, if one portion is bent and is gripped by the gripping portion 12, a similar gripping failure may occur in the subsequent gripping portion 12, and the gripping portion 12 may not be able to grip the workpiece S in some cases. If it becomes such a state, wrinkles, sagging, etc. will generate | occur | produce in the workpiece | work S, plating failure will increase, it will become impossible to convey stably by the conveyance means 110, and there exists a possibility of producing a lot of defective goods. .

  In view of the above circumstances, an object of the present invention is to provide a gripping mechanism for a sheet-like workpiece that can stably grip an end portion of the sheet-like workpiece, and a chemical processing apparatus including the gripping mechanism.

(Sheet workpiece gripping mechanism)
A gripping mechanism for a sheet-like workpiece according to a first aspect of the invention is a gripping mechanism that grips an end portion of a sheet-like member, the gripping portion having a pair of gripping members provided so as to be able to approach and separate from each other, and the gripping portion Fluid ejecting means provided with a fluid ejecting section that sprays fluid into a space formed between the end portions of the pair of gripping members that grip the end portions of the sheet-like member separated from each other; The fluid blowing part of the fluid blowing means is arranged so that the fluid blown into the space flows along a direction from the inside of the sheet-like member toward the edge. .
In the gripping mechanism for a sheet-like workpiece according to a second aspect of the invention, in the first aspect, the fluid outlet of the fluid outlet means is configured such that the axial direction of the outlet from which the fluid is blown is inclined with respect to the surface of the sheet-like member. It is provided in.
According to a gripping mechanism for a sheet-like workpiece of a third invention, in the first or second invention, the fluid blowing means includes a plurality of the fluid blowing portions, and the plurality of fluid blowing portions are in the sheet-like member. It arrange | positions along with the edge part edge, It is characterized by the above-mentioned.
(Chemical processing equipment)
A chemical treatment apparatus according to a fourth aspect of the invention is an apparatus that performs chemical treatment of a member while holding and conveying the end of a sheet-like member, and the device holds the end of the sheet-like member. The sheet-like workpiece gripping mechanism according to the first, second, or third invention is provided.
According to a fifth aspect of the present invention, there is provided a chemical processing apparatus according to the fourth aspect of the invention, wherein the chemical processing apparatus performs processing while energizing a sheet-like member through a gripping portion.

(Sheet workpiece gripping mechanism)
According to the first aspect of the present invention, the end of the sheet-like member is formed in the space formed between the separated end portions when the end portions that grip the end portions of the sheet-like member of the pair of gripping members of the gripping portion are separated from each other. The fluid is sprayed from the fluid blowing portion of the fluid blowing means in a state where the portion is arranged. Then, since the fluid sprayed along the surface of the sheet-like member flows toward the end of the sheet-like member, even if the end of the sheet-like member is curled inward, the sheet-like member Can be stretched. Therefore, the edge part of a sheet-like member can be grasped stably.
According to the second invention, since the sheet-like member is pressed against either one of the pair of gripping members by the fluid blown from the fluid blowing means, the effect of extending the sheet-like member can be enhanced.
According to the third aspect, since the fluid is sprayed by the plurality of fluid blowing portions, the effect of extending the sheet-like member can be enhanced.
(Chemical processing equipment)
According to the fourth aspect of the invention, since the end portion of the sheet-like member can be held in a stable state, the chemical treatment for the member can be performed stably.
According to the fifth aspect, since the energization to the sheet-like member is stabilized, the chemical treatment for the member can be stabilized.

1 is a schematic side view of a gripping mechanism 10 for a sheet-like workpiece according to an embodiment. 1 is a schematic front view of a gripping mechanism 10 for a sheet-like workpiece according to an embodiment. It is a schematic explanatory drawing in the case of gripping the workpiece S with its end curled by the sheet-like workpiece gripping mechanism 10 of the present embodiment. It is a schematic explanatory drawing of the chemical processing equipment 100 which can employ | adopt the holding | grip mechanism 10 of the sheet-like workpiece of this embodiment. It is a partial expanded explanatory view of the chemical processing equipment 100 which can employ | adopt the holding | grip mechanism 10 of the sheet-like workpiece of this embodiment. It is a schematic explanatory drawing of the state of the edge part of the workpiece | work S, (A) is explanatory drawing of the workpiece | work S in which the edge part is extended, (B) is explanatory drawing of the workpiece | work S in which the edge part is curled. .

  The sheet-like workpiece gripping mechanism of the present invention is a gripping mechanism that grips a workpiece end when a sheet-like workpiece is conveyed, and can stably grip the workpiece end even if the workpiece end is curled or the like. It has the feature in doing so.

  The sheet-like workpiece gripped by the sheet-like workpiece gripping mechanism of the present invention is not particularly limited. For example, it is suitable as a mechanism for gripping a long sheet-like workpiece such as a flexible circuit board used for COF (Chip On Flexible) or the like.

Further, the sheet-like workpiece gripping mechanism of the present invention can be adopted as long as it is a facility that needs to continuously convey the sheet-like workpiece. For example, it is suitable as a mechanism for gripping a long sheet-like workpiece in an apparatus for performing chemical treatment such as plating on the surface of a flexible circuit board used in the above-described COF.
Below, the case where it employ | adopts as a representative to the chemical processing equipment which plating-processes the surface of a elongate sheet-like workpiece | work is demonstrated.

(General description of the chemical treatment facility 100)
First, before explaining the sheet-like workpiece gripping mechanism 1 of the present embodiment, the sheet-like workpiece gripping mechanism 10 of the present embodiment (hereinafter simply referred to as the gripping mechanism 10) is employed with reference to FIGS. The chemical processing facility 100 will be briefly described.

  As shown in FIG. 4, the apparatus 100 performs a plating process on a sheet-like workpiece S (hereinafter simply referred to as a workpiece S) supplied from a workpiece supply unit 101 by a chemical processing unit 103 while being conveyed by a conveying unit 110. The workpiece collecting unit 102 collects the workpiece.

  In FIG. 4, the chemical processing unit 103 has a pretreatment tank 104, a chemical treatment tank 105, and a posttreatment tank from the upstream side (that is, the workpiece supply unit 101 side) to the downstream side (that is, the workpiece collection unit 102 side). 106 in order, and the surface of the workpiece S is processed in each tank. However, the configuration of the chemical processing unit 103 is not limited to the above configuration. For example, when the chemical treatment is a plating treatment, a plating tank is set, and when the electrolytic treatment is performed, it is appropriately set according to the chemical treatment applied to the surface of the workpiece S such as a washing tank.

(Work supply unit 101)
The workpiece supply unit 101 is configured to rewind and supply the sheet-like workpiece S wound around the reel R <b> 1 to the transport unit 110. The workpiece supply unit 101 changes the posture of the workpiece S that has been rewound from the reel R1 so that the surface thereof is parallel to the vertical direction and the moving direction (that is, the longitudinal direction) is horizontal. SR is provided. That is, the workpiece supply unit 101 changes the posture of the workpiece S by the posture changing roll SR so that the surface of the workpiece S is parallel to the vertical direction and the width direction thereof is parallel to the vertical direction, and then the workpiece S is changed. It is configured to be supplied to the conveying means 110.

(Work collection unit 102)
The workpiece collection unit 102 is configured to take up and collect the workpiece S conveyed by the conveyance unit 110, that is, the workpiece S plated by the chemical processing unit 103, on the reel R2. The workpiece collection unit 102 may include a device that performs various processes such as heat treatment on the workpiece S supplied from the transport unit 110. In this case, after various processing is performed, the workpiece S is wound on the reel R2.

(Conveying means 110)
The transport unit 110 includes a pair of upper and lower endless belts 111 and 111 that circulate between the workpiece supply unit 101 and the workpiece collection unit 102, and the gripping mechanism 10.

(A pair of upper and lower endless belts 111, 111)
The pair of upper and lower endless belts 111 are wound around a plurality of pulleys p and the like so as to form a substantially rectangular loop in plan view (see FIGS. 4 and 5). That is, the pair of upper and lower endless belts 111 are provided so as to move around in the horizontal direction.

  The pair of upper and lower endless belts 111 are provided at positions where the workpiece S supplied from the workpiece supply unit 101 is sandwiched from above and below. That is, the upper endless belt 111 is disposed so as to be positioned above the upper end portion of the workpiece S (the end portion in the width direction of the workpiece S and positioned at the upper side). Further, the lower endless belt 111 is disposed so as to be positioned below the lower end portion of the workpiece S (the end portion in the width direction of the workpiece S and positioned below).

(Grip mechanism 10)
The pair of upper and lower endless belts 111 and 111 are provided with a plurality of gripping portions 12 of the gripping mechanism 10. The plurality of gripping portions 12 grip the end portion of the work S, and are provided along the endless belt 111. Specifically, the plurality of gripping portions 12 provided on the upper endless belt 111 are provided at equal intervals along the endless belt 111 so that the upper end portion of the workpiece S can be gripped at equal intervals. Similarly, the plurality of gripping portions 12 provided on the lower endless belt 111 are provided at equal intervals along the endless belt 111 so that the lower end portion of the workpiece S can be gripped at equal intervals.

  In the gripping mechanism 10, the gripper 12 grips the workpiece S whose posture has been changed by the posture change roll SR of the workpiece supply unit 101 in the vicinity of the posture change roll SR, and the gripper 12 in the vicinity of the workpiece recovery unit 102. Is configured to release.

  Moreover, the gripping mechanism 10 includes a fluid blowing portion 11n of the fluid blowing means 11 that supports the gripping of the workpiece S by the gripping portion 12 at a position where the workpiece S is gripped. The details will be described later.

  Since the apparatus 100 is configured as described above, in the apparatus 100, the chemical processing unit 103 performs the work S while the surface of the work S supplied from the work supply unit 101 is transported by the transport unit 110 while being maintained parallel to the vertical direction. The surface of the workpiece can be plated, and the workpiece S plated can be collected by the workpiece collection unit 102.

  Note that when the workpiece S is plated, current is normally supplied to the workpiece S. For this reason, when performing the plating process on the workpiece S, it is configured such that a current can be passed through the workpiece S via the grip portion 12. For example, a portion (that is, both or one of gripping members 13 and 14 to be described later) in contact with the workpiece S in each gripping portion 12 is formed of a conductive material, and this portion is electrically connected to a power source or the like by a lead wire or the like Keep it. Then, a current can be passed through the workpiece S through the grip portion 12 at a necessary timing.

  Moreover, it is preferable that the holding parts 12 provided on the upper and lower endless belts 111 are provided at positions corresponding to each other. In other words, it is desirable that the upper and lower endless belts 111 are provided with the gripping portions 12 so that the same position in the longitudinal direction of the workpiece S is gripped by the gripping portions 12 provided on the upper and lower endless belts 111. In this case, there is an advantage that wrinkles and the like are hardly formed on the work S when the work S is gripped by the grip portion 12.

  In the above example, the case where the conveying unit 110 is provided with the upper and lower endless belts 111 has been described, but the endless belt 111 may be provided only on the upper side. That is, it is good also as a structure which conveys the workpiece | work S in the state which hold | grips only the upper end part of the workpiece | work S with the holding | grip part 12, and the workpiece | work S is suspended by the endless belt 111.

(Detailed description of the gripping mechanism 10)
Next, the gripping mechanism 10 will be described in detail.

  As shown in FIGS. 1 and 2, the gripping mechanism 10 includes a fluid blowing means 11 including a fluid blowing portion 11 n and a plurality of gripping portions 12.

(Gripping part 12)
First, the plurality of gripping portions 12 include a pair of gripping members 13 and 14 that grip the end portion of the workpiece S. Of the pair of gripping members 13 and 14, the gripping member 14 is transported by the connecting portion 15. 110 is connected to the endless belt 111 (the upper endless belt 111 in FIGS. 1 and 2). Accordingly, the plurality of gripping portions 12 move around together with the endless belt 111.

  The upper end portions of the pair of gripping members 13 and 14 are connected so that the lower end portions can approach and separate from each other. For example, as shown in FIGS. 1 and 2, if a bracket 14b is provided at the upper end of the gripping member 14, and the upper end of the gripping member 13 is pivotably connected to the bracket 14b via a shaft or the like, a pair of grips Both can be connected so that the lower end parts of the members 13 and 14 can approach and separate.

  The pair of gripping members 13 and 14 are preferably urged by a spring or the like so that the lower ends of both of them are always close. In this case, in the state where the workpiece S is gripped, the state where the workpiece S is gripped can be maintained even if there is some trouble. Moreover, when opening and closing a pair of holding members 13 and 14 by actuators, such as a cylinder, it is not necessary to provide a spring.

  Hereinafter, a state in which the lower ends of the pair of gripping members 13 and 14 are approached is referred to as a state in which the pair of gripping members 13 and 14 are closed, and a state in which the lower ends of the pair of gripping members 13 and 14 are separated from each other. The members 13 and 14 are in an open state.

(Fluid blowing means 11)
The gripping unit 12 described above grips the end portion of the workpiece S supplied from the workpiece supply unit 101 in the vicinity of the posture changing roll SR of the workpiece supply unit 101. At this time, the gripping portion 12 is arranged such that the end portion of the workpiece S is disposed between the lower ends of the pair of gripping members 13 and 14 in a state where the pair of gripping members 13 and 14 are opened and closed and the pair of gripping members 13 and 14 are opened. Is done. As described above, the fluid blowing portion 11n of the fluid blowing means 11 is provided in the vicinity of the position where the end portion of the workpiece S is disposed between the lower ends of the pair of gripping members 13 and 14. More specifically, the fluid is located at a position where the pair of gripping members 13 and 14 are open and the end of the workpiece S is disposed between the bottom ends of the pair of gripping members 13 and 14. A fluid blowing portion 11n of the blowing means 11 is provided.

  The fluid blowing means 11 includes a fluid blowing portion 11n and a fluid supply portion 11a that supplies a fluid L such as air to the fluid blowing portion 11n.

  The fluid supply part 11a can supply the fluid L having a certain pressure to the fluid blowing part 11n. Specifically, when the fluid L is discharged from the fluid blowing portion 11n, the fluid L is applied to the fluid blowing portion 11n with a pressure that can deform the end portion of the work S (can extend the curl). It can be supplied. In addition, the fluid supply part 11a should just be what can supply the fluid L as mentioned above to the fluid blowing part 11n, and is not specifically limited. For example, if the fluid L is air, a compressor, a cylinder, or the like can be employed as the fluid supply unit 11a. If the fluid L is a liquid such as water, a pump can be employed as the fluid supply unit 11a.

  The fluid blowout part 11n is provided with a blowout port for blowing out the fluid L at its tip, and if the fluid L is supplied from the fluid supply part, the fluid L can be blown out from the blowout port.

  The fluid blowing portion 11n can spray the fluid L blown from the blowout port into a space formed between the lower ends of the pair of gripping members 13, 14 when the pair of gripping members 13, 14 are opened. (Refer to FIG. 3). More specifically, in a state where the pair of gripping members 13 and 14 are opened, the fluid blown out from the blowout port to the end surface of the work S disposed in the space between the lower ends of the pair of gripping members 13 and 14. The fluid outlet 11n is arranged so that L can be sprayed.

  Moreover, among the fluid L blown from the outlet to the end surface of the workpiece S, at least a part of the fluid L flows along the direction from the inside of the workpiece S toward the end edge. 11n is arranged.

When the fluid blowing portion 11n is arranged in this way, the end portion of the workpiece S can be gripped by the grip portion 12 even if the end portion of the workpiece S is curled.
That is, as shown in FIG. 3, when the end portion of the workpiece S is curled inward, the end portion of the workpiece S is bent even when the pair of gripping members 13 and 14 of the gripping portion 12 are closed. There is a possibility that it will be gripped in a state, or the workpiece S cannot be gripped.
However, if the fluid blowing portion 11n is arranged as described above, the curl is extended by the fluid L in the direction from the inside of the workpiece S toward the edge. That is, the end of the workpiece S can be extended by the fluid L. Then, when the pair of gripping members 13 and 14 of the gripping portion 12 are closed, the end portion of the workpiece S can be securely gripped in a normal state.

(Arrangement of fluid outlet 11n)
The fluid blowing portion 11n is configured such that at least a part of the fluid L out of the fluid L blown from the blowout port to the surface of the end portion of the workpiece S extends from the inside of the workpiece S to an edge (an edge near the fluid blowing portion 11n). What is necessary is just to be provided so that it may flow along the direction to go.

  For example, the fluid blowing portion so that the flowing direction of the fluid L blown from the blowing port of the fluid blowing portion 11n (in other words, the axial direction of the blowing port (na in FIG. 1)) is orthogonal to the end surface of the workpiece S. 11n is arranged. Then, since the fluid L that has hit the end surface of the workpiece S flows along the end surface of the workpiece S, a part of the fluid L flows along the direction from the inside of the workpiece S toward the edge. it can.

  Further, the fluid blowing portion 11n may be arranged so that the fluid L blown from the blowing port of the fluid blowing portion 11n is blown toward the end edge of the workpiece S in a direction parallel to the end surface of the workpiece S. That is, the fluid outlet 11n is arranged so that the axial direction of the outlet is substantially parallel to the end surface of the workpiece S. Then, it is possible to directly form the flow of the fluid L from the inside of the workpiece S toward the edge along the end surface of the workpiece S.

  Furthermore, as shown in FIG. 1, the fluid outlet 11 n can be provided so that the axial direction of the outlet is inclined with respect to the end surface of the workpiece S. If the fluid blowing portion 11n is arranged in this way, when the fluid L blown from the blowout port collides with the end surface of the workpiece S, the fluid L ends along the end surface of the workpiece S mainly from the inside of the workpiece S. It flows toward the edge. Then, compared with the case where the fluid L collides so as to be orthogonal to the end surface of the workpiece S, the force that extends the end portion of the workpiece S by the fluid L can be increased. Moreover, a force that presses the workpiece S against the gripping member 14 is also generated. If the workpiece S is pressed against the gripping member 14, the force that extends the end of the workpiece S by the fluid L can be effectively applied. Therefore, as shown in FIG. 1, if the fluid outlet 11n is provided so that the axial direction of the outlet is inclined with respect to the end surface of the workpiece S, the end of the workpiece S is curled. The effect of extending the end can be increased.

  In particular, as shown in FIG. 3B, the axial direction of the outlet of the fluid outlet 11n is such that when the end of the workpiece S is curled, the fluid L is directly sprayed on the curled portion. By doing so, the pressure of the fluid L sprayed onto the end portion of the work S becomes the force for extending the curl as it is, so that the effect of extending the end portion of the work S can be further enhanced.

  When the fluid blowing portion 11n is inclined with respect to the surface of the end portion of the workpiece S, the angle θ (see FIG. 1) is not particularly limited. For example, it can be set to about 0 to 45 degrees. In particular, 30 to 40 degrees is preferable because the fluid L can be sprayed directly on the inside of the curled portion.

(Number of fluid outlets 11n)
One or more fluid outlets 11n may be provided. Specifically, the plurality of fluid blowing portions 11n may be arranged along the end edge of the workpiece S. In this case, since the fluid L is sprayed to the end portion of the workpiece S by the plurality of fluid blowing portions 11n, the effect of extending the end portion of the workpiece S can be enhanced.

  Moreover, when providing the some fluid blowing part 11n, you may provide the several fluid blowing part 11n so that the workpiece | work S may be pinched | interposed from both sides. That is, one fluid blowing portion 11n may be provided on the surface (left side surface in FIG. 3) side of the workpiece S, and the other fluid blowing portion 11n may be provided on the back surface (right side surface in FIG. 3) side. . In this case, even if the workpiece S is curled in any direction, the end portion of the workpiece S can be extended by the fluid L blown from the fluid blowing portion 11n.

  In addition, the movement of the workpiece S in the thickness direction by the fluid L blown from one fluid blowing part 11n can be suppressed by the fluid L blown from the other fluid blowing part 11n. Then, since the flow of the fluid L which goes to the edge from the inside of the workpiece | work S can be produced reliably by the fluid L which blown off from the one fluid blowing part 11n, the effect which extends the edge part of the workpiece | work S is made high. Can do.

(About the fluid outlet 11n)
The fluid outlet 11n described above is not particularly limited as long as it has the above function. For example, a nozzle having an outlet at the tip can be cited as an example, but a simple pipe or the like can also be used.

(Blowout timing of fluid L)
The fluid L may be continuously blown out from the fluid blowing portion 11n or may be blown out intermittently. When intermittently blowing, for example, when it is detected by a sensor or the like that the grip portion 12 is disposed at a predetermined position, a method of blowing the fluid L can be employed.

(Opening / closing mechanism of the grip part 12)
The gripping mechanism 10 opens and closes the pair of gripping members 13 and 14 of the gripping unit 12 to release and grip the workpiece S. The mechanism for opening and closing the pair of gripping members 13 and 14 of the gripping part 12 is not particularly limited, and various methods can be employed.

  For example, if an actuator such as a cylinder is used to operate the actuator at a predetermined position, the pair of gripping members 13 and 14 can be opened and closed at the predetermined position. Further, as described above, when the pair of gripping members 13 and 14 of the gripping portion 12 are always closed by a spring or the like, the pair of gripping members 13, 14 may be opened and closed. In this case, since the pair of gripping members 13 and 14 can be mechanically opened, the pair of gripping members 13 and 14 can be reliably opened at a predetermined position.

  The sheet-like workpiece gripping mechanism of the present invention is suitable for a mechanism for gripping a long sheet-like workpiece in a chemical processing apparatus or the like that performs chemical processing.

DESCRIPTION OF SYMBOLS 10 Grasp mechanism of a sheet-like workpiece | work 11 Fluid blowing means 12 Grip part 13 Grip member 14 Grip member 100 Chemical processing apparatus S Work L Fluid

Claims (5)

A gripping mechanism for gripping an end portion of a sheet-like member,
A gripping portion having a pair of gripping members provided so as to be close to and away from each other;
Fluid ejecting means comprising a fluid ejecting section for ejecting a fluid to a space formed between the end portions of the pair of gripping members of the gripping portion that grip the end portions of the sheet-like member separated from each other And,
The fluid outlet of the fluid outlet is
A gripping mechanism for a sheet-like workpiece, wherein the fluid sprayed into the space is arranged so as to flow along a direction from the inside to the edge of the sheet-like member. The fluid outlet of the fluid outlet is
The sheet-like workpiece gripping mechanism according to claim 1, wherein an axial direction of a blowout port for blowing out the fluid is provided so as to be inclined with respect to a surface of the sheet-like member. The fluid blowing means is
A plurality of fluid outlets;
The plurality of fluid outlets are
The sheet-like workpiece gripping mechanism according to claim 1, wherein the sheet-like workpiece gripping mechanism is arranged side by side along an end edge of the sheet-like member. An apparatus for performing chemical treatment of the member while holding and conveying the end of the sheet-like member,
The device is
A chemical processing apparatus comprising the sheet-like workpiece gripping mechanism according to claim 1, which holds an end of a sheet-like member. The chemical processing apparatus according to claim 4, wherein the chemical processing apparatus is a device that performs processing while energizing a sheet-like member through a gripping portion.

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