JP6306831B2 - Position detection apparatus and position detection method - Google Patents

Description

  The present invention relates to a position detection device and a position detection method for recognizing the position of an object to be inspected.

2. Description of the Related Art Conventionally, a position detection device that recognizes the position of a semiconductor wafer (hereinafter simply referred to as “wafer”) (inspected object) in a semiconductor manufacturing process is known (for example, Patent Document 1).
A position detection device described in Patent Document 1 includes a positioning table that supports a wafer, temperature adjusting means provided inside the positioning table, and an infrared camera that photographs a circuit pattern (modeled object) formed on the surface of the wafer. The temperature difference due to the difference in thermal conductivity is captured by an infrared camera by heating the wafer, and the position of the wafer is recognized.

JP 2007-305627 A

  However, in the conventional position detection apparatus as described in Patent Document 1, since the entire object to be inspected is heated, for example, the thermal conductivity is almost increased between the wafer main body and a modeled object formed on the surface of the wafer main body. If there is no difference, the entire object will reach the same temperature in an instant. For this reason, the time in which the temperature difference appears between the region where the modeled object is formed and the other region is extremely short, and instantaneous imaging data (discrimination data) capable of recognizing the region where the modeled object is formed and the other region, That is, the position of the object to be inspected must be recognized based on a small amount of information. For example, when there is an abnormality or erroneous imaging in the imaging data, there is a disadvantage that different positioning is performed.

  The objective of this invention is providing the position detection apparatus and position detection method which can improve the position detection accuracy of a to-be-inspected object.

The position detection apparatus of the present invention is a position detection apparatus for recognizing the position of an object to be inspected in which a predetermined shaped object is formed on at least one surface of a substrate, and the temperature change capable of changing the temperature of the object to be inspected. Means for recognizing the position of the object to be inspected by capturing the discrimination data when the temperature of the object to be inspected is changed, and discriminating the region of the object to be inspected and the other region wherein the alternating temperature means between the position recognition of one of the test subject, the stop of the thermocline operation and HenAtsushi operation to the device under test to each repeated a plurality of times, said recognizing means, The discrimination data obtained when heating the object to be inspected is compared with the discrimination data obtained when the object to be inspected is cooled over time, and one of the discrimination result during heating and the discrimination result during cooling The configuration of verifying the other is adopted.

The position detection apparatus of the present invention is a position detection apparatus that recognizes the position of an object to be inspected in which a predetermined shaped object is formed on at least one surface of a base material, and can change the temperature of the object to be inspected. Recognizing the temperature change means and the recognition data when the temperature of the object to be inspected is changed, and the position of the object to be inspected is determined by discriminating between the region where the shaped object of the object to be inspected is formed and the other region. And the temperature changing means comprises a heating means capable of heating the object to be inspected and a cooling means capable of cooling the object to be inspected. wherein by the heating means and stopping the poikilothermic operation and HenAtsushi operation to the object to be inspected, have at least one line above alternately and stopping of poikilothermic operation and HenAtsushi operation to the object to be inspected by the cooling means, The recognizing means includes discrimination data obtained when heating the object to be inspected, Comparing the determined data obtained when cooling the object to be tested, while verifying the other hand determination result and the cooling time of the determination result at the time of heating, adopts a configuration that.

On the other hand, the position detection method of the present invention is a position detection method for recognizing the position of an object to be inspected in which a predetermined shaped object is formed on at least one surface of a base material, and the position recognition of one object to be inspected. Between the step of changing the temperature of the object to be inspected by repeating the temperature change operation and the temperature change operation to the object to be inspected a plurality of times, and taking the discrimination data when the temperature of the object to be inspected is changed, A recognition step of recognizing the position of the object to be inspected by discriminating between the region where the shaped object of the object to be inspected is formed and another region, and the recognition step is for heating the object to be inspected The determination data obtained by comparing the determination data obtained when the object to be inspected is cooled over time, and verifying one of the determination result during heating and the determination result during cooling. Adopted.

The position detection method of the present invention is a position detection method for recognizing the position of an object to be inspected in which a predetermined shaped object is formed on at least one surface of a substrate, and the position recognition of one object to be inspected During this period, the temperature changing operation and the temperature changing operation on the object to be inspected by the heating means and the temperature changing operation and the temperature changing operation on the object to be inspected by the cooling means are alternately performed at least once. Thus, the step of changing the temperature of the object to be inspected, the determination data is captured when the temperature of the object to be inspected is changed, and the region where the shaped object of the object to be inspected is formed and the other region are determined. A recognition step for recognizing the position of the object to be inspected, and the recognition step compares the determination data obtained when the inspection object is heated with the determination data obtained when the inspection object is cooled. However, one of the discrimination results during heating and the other during cooling To verify, it has adopted the configuration that.

  According to the position detection device and the position detection method as described above, the temperature change operation to the object to be inspected and the stop of the temperature change operation are each repeated a plurality of times during the position recognition of one object to be inspected. Even if the time during which the temperature difference appears between the region where the object is formed and the other region is extremely short, the state immediately before the entire object to be inspected reaches the same temperature can be repeatedly reproduced. Therefore, even if there is almost no difference in thermal conductivity between the region where the shaped object of the object to be inspected is formed and other regions, a plurality of instantaneous determination data capable of recognizing those regions can be obtained. For example, the position of the object to be inspected can be recognized by performing predetermined data processing and control such as comparing and verifying the plurality of determination data by the recognition means. In this way, based on a large amount of discriminant data, for example, even if one or a small number of discriminant data has abnormalities or misclassifications, statistics can be corrected using a large number of other discriminating data or verified. Thus, the position detection accuracy can be improved.

  Further, according to the position detection device and the position detection method as described above, during the position recognition of one object to be inspected, the temperature change operation by the heating means and the temperature change operation are stopped, the temperature change operation by the cooling means, and By alternately stopping the temperature change operation at least once, the entire object to be inspected reaches the same temperature even if the time in which the temperature difference appears between the region where the shaped object is formed and the other region is extremely short. The previous state can be forcibly repeated repeatedly. Therefore, even when there is almost no difference in thermal conductivity between the region where the shaped object of the object to be inspected is formed and other regions, a plurality of instantaneous determination data capable of recognizing those regions are forcibly obtained. For example, the discrimination data obtained when heating the object to be inspected is compared with the discrimination data obtained when cooling the object to be inspected, and the discrimination result during heating is verified with the discrimination result during cooling. Or by verifying the determination result at the time of cooling with the determination result at the time of cooling, the reliability of the determination data can be improved. In addition, if the test object is quickly returned to the initial temperature to facilitate handling of the test object, or if a heat-sensitive adhesive sheet is affixed to the test object, the adhesive sheet may be overheated. Can prevent the problem of adhesive residue.

The side view which shows the position detection apparatus which concerns on one Embodiment of this invention. Explanatory drawing of the temperature change of a to-be-inspected object. The side view which shows the position detection apparatus which concerns on a modification.

Hereinafter, an embodiment of the present invention will be described with reference to the drawings.
Note that the X axis, the Y axis, and the Z axis in this specification are orthogonal to each other, the X axis and the Y axis are axes in a horizontal plane, and the Z axis is an axis that is orthogonal to the horizontal plane. Furthermore, in the present embodiment, when viewed from the near side of FIG. 1 parallel to the Y axis, when indicating the direction, “up” is the arrow direction of the Z axis, “down” is the opposite direction, “ “Left” is the X-axis arrow direction, “Right” is the opposite direction, “Front” is the front direction of the paper, which is the Y-axis arrow direction, and “Back” is the opposite direction.

  In FIG. 1, a position detection device 1 is a device that recognizes the position of an object to be inspected WK in which a plurality of electronic circuits EC as a predetermined shaped object are formed on at least one surface of a wafer WF as a base material. The support means 2 that supports the object to be inspected WK, the temperature changing means 3 that can change the temperature of the object to be inspected WK, and the discrimination data are fetched when the temperature of the object to be inspected WK changes, and the electronic circuit EC of the object to be inspected WK A recognition means 6 for recognizing the position of the inspected object WK by discriminating between the area where the object is formed and the street line SL as another area, a rotation means 8 for rotating the support means 2 around the Z axis, and X And biaxial moving means 9 for moving the supporting means 2 in the axial direction and the Y-axis direction. In the inspected object WK, a plurality of electronic circuits EC are arranged at predetermined intervals, thereby forming street lines SL between adjacent electronic circuits EC and forming the electronic circuits EC. An adhesive sheet AS is affixed to the surface.

  The support means 2 is configured by a hollow box-shaped table 21 having a support surface 25, a side surface portion 23, and a bottom surface portion 24 that support the object to be inspected WK. The support surface 25 communicates with decompression means (not shown) such as a decompression pump and a vacuum ejector.

  The temperature changing unit 3 includes a heating unit 31 such as an infrared irradiation device, a coil heater, a heat pump (heat radiation side), and the like, and is housed in the table 21.

  The recognition unit 6 includes a data capturing unit 61 such as an infrared camera or a thermography, and an analyzing unit 62 such as a personal computer or a sequencer capable of analyzing the discrimination data captured from the data capturing unit 61. In addition, not only the data fetching means 61 but also the entire operation of the position detecting device 1 can be controlled.

  The rotating means 8 rotatably supports the table 21 with an output shaft 82 of a rotating motor 81 as a driving device supported by the biaxial moving means 9.

  The biaxial moving means 9 is a linear motor 92 as a driving device capable of moving the slider 91 supporting the rotation motor 81 in the Y-axis direction, and a drive capable of moving the slider 93 supporting the linear motor 92 in the X-axis direction. It has a linear motor 94 as a device.

A procedure for detecting the position of the inspected object WK in the position detection apparatus 1 will be described.
First, in FIG. 1, when the inspection object WK having the adhesive sheet AS is placed on the support surface 25 by a conveying means (not shown) or manually, the supporting means 2 drives a decompression means (not shown) to attract the inspection object WK. Hold. Next, while the temperature change means 3 recognizes the position of one object to be inspected WK, the temperature change operation and the temperature change operation to the object to be inspected WK are stopped, that is, the heating means 31 is driven and stopped. Repeat once. At this time, the recognizing unit 6 drives the data capturing unit 61 and takes images as a plurality of determination data capturing temperature differences due to differences in thermal conductivity in accordance with the driving of the heating unit 31.

  Here, when the street line SL portion of the object to be inspected WK has a higher thermal conductivity than the electronic circuit EC portion, the temperature of the street line SL portion rises faster than the electronic circuit EC portion by driving the heating means 31. To do. When this is seen in the image of the data fetching means 61, first, the electronic circuit EC portion is driven as shown in FIG. 2 (B) by driving the heating means 31 from a state where there is no temperature difference shown in FIG. 2 (A). Heat rays (infrared rays) emitted from the portion of the street line SL that has become high temperature for a moment earlier are observed (the black portion in FIG. 2 is the portion that has become high temperature). For this reason, the data fetching means 61 can pick up an image as if the street line SL was distinguished from the electronic circuit EC portion, so that the analysis means 62 can reliably determine the street line SL. After that, as shown in FIG. 2C, the electronic circuit EC portion having a lower thermal conductivity than the street line SL portion becomes high temperature (instantaneously) with time, and the street line SL is displayed in the image of the data capturing means 61. Is difficult to discriminate (in some cases, it cannot be discriminated).

  Thereafter, the object to be inspected WK is cooled by the stop of the driving of the heating means 31 and the lapse of time, and the state returns to the state without the temperature difference shown in FIG. 2A. The analysis means 62 determines the street line SL from the image of the capturing means 61. When the object to be inspected WK is cooled, as shown in FIG. 2 (D), the street line SL portion having a high thermal conductivity becomes a lower temperature sooner than the electronic circuit EC portion (the white portion in FIG. 2). May be determined by capturing the image at this time with the data capturing means 61. In addition, the above-described driving and driving stop of the heating unit 31 and the determination operation by the recognition unit 6 may be performed as many times as necessary.

  As described above, even when the time during which the temperature difference appears between the area where the electronic circuit EC is formed and the street line SL is extremely short, the heating means 31 is repeatedly driven and stopped a plurality of times, and a plurality of images are taken in accordance with each driving. By repeating the number of times, the recognition unit 6 can obtain a plurality of instantaneous images capable of recognizing the electronic circuit EC and the street line SL.

  Furthermore, the analysis means 62 performs position recognition of the electronic circuit EC and the street line SL. For example, even if one or a small number of images have an abnormality or an erroneous imaging, the analysis means 62 performs statistical analysis using a large number of other images. The position detection accuracy can be improved by taking the correction and verifying and correcting. Further, the image obtained when heating the inspection object WK is compared with the image obtained when the inspection object WK is cooled, and the determination result at the time of heating by the heating means 31 is verified by the determination result at the time of cooling. By verifying the discrimination result at the time of cooling with the discrimination result at the time of heating by the heating means 31, it is possible to further improve the reliability of the images.

  When the position of the object to be inspected WK can be recognized as described above, the rotating means 8 and the biaxial moving means 9 drive the rotating motor 81 and the linear motors 92 and 94 based on the recognition result of the recognizing means 6, and The inspection body WK is positioned at a predetermined position. In the case of the present embodiment, the biaxial moving means 9 drives the linear motors 92 and 94 to place the center of the object to be inspected WK at a predetermined position (for example, the center position LN), and the rotating means 8 causes the rotating motor 81 to move. Driven, the street lines SL orthogonal to each other are arranged so as to be parallel to the X axis and the Y axis.

  According to the present embodiment as described above, the electronic circuit EC of the inspected object WK is repeated by repeating driving and stopping of the inspected object WK a plurality of times during the position recognition of one inspected object WK. Even if there is almost no difference in thermal conductivity between the area where the area is formed and the area where the street line SL is formed, it is possible to obtain a plurality of instantaneous images capable of recognizing those areas. Thus, the position of the object to be inspected WK can be recognized, and the position detection accuracy can be improved.

  As described above, the best configuration, method and the like for carrying out the present invention have been disclosed in the above description, but the present invention is not limited to this. That is, the invention has been illustrated and described with particular reference to certain specific embodiments, but without departing from the spirit and scope of the invention, Various modifications can be made by those skilled in the art in terms of material, quantity, and other detailed configurations. In addition, the description of the shape, material, and the like disclosed above is exemplary for ease of understanding of the present invention, and does not limit the present invention. The description by the name of the member which remove | excluded the limitation of one part or all of such restrictions is included in this invention.

  For example, instead of the heating means 31 constituting the temperature changing means 3 of the above embodiment, a cooling means such as a blower, a Peltier element, a heat pump (heat absorption side) is adopted, and the cooling means is repeatedly driven and stopped several times. The data capturing means 61 captures an instant in which the temperature of the street line SL decreases immediately before the electronic circuit EC part during each drive, and the analyzing means 62 recognizes the position of the electronic circuit EC or street line SL. Also good.

  Further, as shown in FIG. 3, the temperature changing means 3 is constituted by a heating means 31 capable of heating the object to be inspected WK and a cooling means 32 capable of cooling the object to be inspected WK, and a single object to be inspected WK is formed. During the position recognition, the heating unit 31 may be driven and stopped and the cooling unit 32 may be driven and stopped alternately at least once. In this case, the heating means 31 and the cooling means 32 can be the same as those described above. They are accommodated in the table 21 and imaged by the data capturing means 61 in accordance with the driving of the heating means 31. The cooling unit 32 is driven almost simultaneously with the driving stop of the heating unit 31 or immediately after the driving stop to forcibly cool the inspected object WK, so that an image as shown in FIG. It is also possible to take an image. Note that the above-described driving operation of the heating unit 31, driving stop and driving of the cooling unit 32, driving stop and determination operation by the recognition unit 6 may be performed as many times as necessary.

  Even if it is set as such a structure, the effect similar to the said embodiment can be acquired, for example, the image obtained when the to-be-inspected object WK is heated with the heating means 31, and the to-be-inspected object WK are cooling means. Compared with the image obtained when cooling at 32, the discrimination result at the time of heating by the heating means 31 is verified by the discrimination result at the time of cooling by the cooling means 32, or the discrimination result at the time of cooling by the cooling means 32 is verified. The position detection accuracy can be further improved by verifying with the discrimination result at the time of heating by 31. In addition, if the object to be inspected WK is quickly returned to the initial temperature to facilitate the handling of the object to be inspected WK, or the heat-sensitive adhesive sheet AS is affixed to the object to be inspected WK, the adhesive sheet AS. It is possible to prevent the problem of adhesive residue due to overheating of the film. The heating means 31 and the cooling means 32 may be singular or plural.

Furthermore, the modeled object of the inspected object WK is not limited to a mold, a pattern, a pattern, a character, a symbol, or the like.
Further, when both the heating unit 31 and the cooling unit 32 are provided, the temperature changing unit 3 may drive and stop the cooling unit 32 first, and then drive and stop the heating unit 31 after that. As described above, when the cooling unit 32 is driven first, the cooling unit 32 may cool the object to be inspected WK below room temperature.
Furthermore, when both of them are provided, the position of the inspected object WK may be recognized using only one of them.
Further, after the temperature changing means 3 drives and stops the heating means 31 and the cooling means 32 and images are taken by the data capturing means 61, the rotating means 8 rotates the table 21 by a predetermined angle, and / or moves biaxially. After the means 9 moves the table 21 by a predetermined amount, the temperature changing means 3 drives and stops the heating means 31 and the cooling means 32 again, and the data capturing means 61 may take an image.
By doing so, the electronic circuit EC part and the street line SL part can be imaged from different angles and positions. For example, the analyzing unit 62 could not recognize the image from the image due to light reflection or shading. The part can be clearly defined and imaged again, and the position detection accuracy can be further improved.

  1 is divided into a plurality of regions heated by the heating means 31 (regions heated by the cooling means) or the temperature changing means 3 in FIG. 3, for example, from one end side to the other end side. The heating means 31 and the cooling means 32 may be sequentially driven and stopped from the front and rear end sides toward the other end side and from the center toward the outside. In this case, it is also possible to generate the discrimination data for the entire inspected object WK by continuously taking images by the data capturing means 61 and connecting the discrimination data obtained by the continuous shooting imaging. In this case, the same heating means 31 is driven and stopped several times, or the same cooling means 32 is not driven and stopped a plurality of times, but sequentially driven from one end side to the other end side, By stopping the driving, the driving must be stopped and stopped a plurality of times during the position recognition of one inspection object WK, which is included in the present invention.

Alternatively, a plurality of annular members having different diameters may be prepared as the heating unit 31 and the cooling unit 32, and these may be arranged in a concentric circle around the position LN.
Further, the heating means 31 and the cooling means 32 may be arranged above the support means 2, and the recognition means 6 may be housed inside the table 21 to heat and cool the object WK from above.
Further, the discrimination data of the recognition means 6 may be a moving image or a still image, or may be image data or electronic (electrical) data without taking an image.

Furthermore, the inspection object WK may be placed with the adhesive sheet AS on the upper side in the configuration of the embodiment.
Further, the inspected object WK may be one in which the adhesive sheet AS is affixed on both front and back surfaces, or may be one in which the adhesive sheet AS is not affixed on both front and back surfaces.

  Further, the material, type, shape, and the like of the adhesive sheet AS and the inspected object WK in the present invention are not particularly limited. For example, as the adhesive sheet AS, a heat-sensitive adhesive or a pressure-sensitive adhesive may be employed. Examples of the object to be inspected WK include foods, resin containers, semiconductor wafers such as silicon semiconductor wafers and compound semiconductor wafers, information recording substrates such as circuit boards and optical disks, glass plates, steel plates, ceramics, wood plates, or resin plates. Any form of member or article can also be targeted. In addition, the adhesive sheet AS is replaced with a functional and intended reading, for example, any information label, decorative label, protective sheet, dicing tape, die attach film, die bonding tape, recording layer forming resin sheet, etc. Arbitrary sheets, films, tapes, etc. in shape can be affixed to any inspection object as described above.

The means and steps in the present invention are not limited in any way as long as they can perform the operations, functions, or steps described with respect to those means and steps. The process is not limited at all. For example, if the temperature changing means can repeat the temperature changing operation to the object to be inspected and stop the temperature changing operation a plurality of times during the position recognition of one object to be inspected, If it is in the range in light of common sense, it will not be limited at all (explanation about other means is omitted).
The drive device in the embodiment includes an electric device such as a rotation motor, a linear motion motor, a linear motor, a single axis robot, an articulated robot, an actuator such as an air cylinder, a hydraulic cylinder, a rodless cylinder, and a rotary cylinder. In addition to the above, it is possible to adopt a combination of them directly or indirectly (some of them overlap with those exemplified in the embodiment).

DESCRIPTION OF SYMBOLS 1 Position detection apparatus 3 Temperature change means 31 Heating means
32 Temperature change means
6 Recognition means EC Electronic circuit (molded object)
WF Wafer (base material)
WK Inspected object

Claims (4)

A position detection device for recognizing the position of an object to be inspected in which a predetermined shaped object is formed on at least one surface of a substrate,
A temperature changing means capable of changing the temperature of the test object;
Recognizing means for recognizing the position of the object to be inspected by capturing the discrimination data when the temperature of the object to be inspected is changed, discriminating between the region where the shaped object of the object to be inspected is formed and other regions,
The temperature changing means, during the position recognition of one of the test subject, the stop of the thermocline operation and HenAtsushi operation to the device under test to each repeated a plurality of times,
The recognizing unit compares the determination data obtained when the object to be inspected is heated with the determination data obtained when the object to be inspected is cooled over time. A position detection device that verifies one of the discrimination results . A position detection device for recognizing the position of an object to be inspected in which a predetermined shaped object is formed on at least one surface of a substrate,
A temperature changing means capable of changing the temperature of the test object;
Recognizing means for recognizing the position of the object to be inspected by capturing the discrimination data when the temperature of the object to be inspected is changed, discriminating between the region where the shaped object of the object to be inspected is formed and other regions,
The temperature changing means includes a heating means capable of heating the object to be inspected and a cooling means capable of cooling the object to be inspected, and the heating means by the heating means during one position recognition of the object to be inspected. and stopping the poikilothermic operation and HenAtsushi operation to the object to be inspected, it has at least one row stop and the alternating of the thermocline operation and HenAtsushi operation to the cooling unit by the device under test,
The recognizing means compares the determination data obtained when heating the object to be inspected and the determination data obtained when cooling the object to be inspected. On the other hand, a position detection device characterized by verifying the other . A position detection method for recognizing the position of an object to be inspected in which a predetermined shaped object is formed on at least one surface of a substrate,
The step of changing the temperature of the object to be inspected by repeating the temperature change operation and the temperature change operation to the object to be inspected a plurality of times during the position recognition of one object to be inspected,
It includes a recognition step of capturing discrimination data when the temperature of the inspection object is changed, recognizing the position of the inspection object by determining the area where the shaped object of the inspection object is formed and another area ,
The recognition step compares the determination data obtained when the object to be inspected is heated with the determination data obtained when the object to be inspected is cooled over time, and the determination result at the time of heating and the data at the time of cooling are compared. A position detection method characterized in that one of the discrimination results is verified . A position detection method for recognizing the position of an object to be inspected in which a predetermined shaped object is formed on at least one surface of a substrate,
During the position recognition of one object to be inspected, the temperature changing operation and temperature changing operation to the object to be inspected by the heating means, and the temperature changing operation and temperature changing operation to the object to be inspected by the cooling means are performed. A step of changing the temperature of the object to be inspected by alternately performing at least one stop; and
It includes a recognition step of capturing discrimination data when the temperature of the inspection object is changed, recognizing the position of the inspection object by determining the area where the shaped object of the inspection object is formed and another area ,
The recognition step compares the determination data obtained when heating the object to be inspected and the determination data obtained when cooling the object to be inspected. On the other hand, a position detection method characterized by verifying the other .

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