JP6410151B2 - Substrate storage container - Google Patents

Description

  The present invention relates to a substrate storage container.

  Conventionally, a substrate storage container for storing a plurality of substrates made of semiconductor wafers is known (for example, see Patent Document 1).

  Patent Document 1 discloses a substrate storage container including a container main body that has an opening and stores a plurality of substrates in an aligned state, and a lid that closes the opening. A pair of support members that support the substrate are attached to the inner surface of the container body, and attachment members used for transport, handling, and positioning are attached to the outer surface of the container body. These container main bodies and attachment members are generally formed of a resin molded product, and it may be difficult to ensure strength with only the walls. In such a case, generally, the necessary rigidity is ensured by forming reinforcing ribs on the container body and the mounting member. Various shapes of the reinforcing ribs are known. For example, in the substrate storage container disclosed in Patent Document 2, lattice-shaped reinforcing ribs are provided on the surface of the container body.

  By the way, in order to maintain the cleanliness of the inside of this type of substrate storage container during the period of use, the substrate storage container is generally frequently washed with washing water.

  FIG. 9A is a view showing a basic configuration of a conventional reinforcing rib, and FIG. 9B is a view showing a state in which cleaning water is accumulated on the conventional reinforcing rib.

  As shown in FIGS. 9A and 9B, when the reinforcing ribs 101 and 102 are formed on the wall 100 such as the container main body or the mounting member, the reinforcing ribs extending in a specific direction after cleaning the substrate storage container. Wash water 103 may accumulate on 102. Here, the reinforcing rib 102 in a specific direction is a rib oriented in a direction orthogonal to the direction of gravity or the wind pressure of the drying air in the drying device. On such a reinforcing rib 102, the cleaning water 103 is hard to move and accumulates, so that it takes a long time to dry the substrate storage container after cleaning. In particular, when the diameter of the substrate is large and the container is large, many of the reinforcing ribs 101 and 102 are required, so that such a problem is more prominent.

Japanese Patent No. 3916342 Japanese Patent No. 4825241

  The present invention has been made in view of such circumstances. The purpose of the present invention is to move the cleaning water on the reinforcing rib in a certain direction by gravity or wind pressure, and smoothly drain it from the reinforcing rib and dry it. An object of the present invention is to provide a substrate storage container that can shorten the time and can prevent the influence of moisture on the substrate because no cleaning water remains.

The present invention is grasped by the following composition.
(1) A first aspect according to the present invention is a substrate storage container, wherein a container body having an opening, a lid for closing the opening, an attachment component provided in the container body, A reinforcing rib extending along at least one surface of the container main body, the lid, and the attachment part, and the reinforcing rib is against a virtual plane orthogonal to the direction of the force acting on the cleaning water. It is characterized by being inclined in the extending direction or in a direction perpendicular to the extending direction so as to form an inclined drainage structure.

(2) In the configuration of (1), the reinforcing rib may have an inclined portion, a bent portion, or a curved portion between both ends thereof.

(3) In the configuration of the above (1) or (2), the reinforcing rib may have a notch at a position just before its both end portions intersect with another wall surface.

(4) In any one configuration of the above (1) to (3), the reinforcing rib may have a notch at an intermediate position between both ends thereof.

(5) In the configuration of the above (1), a plurality of the reinforcing ribs are provided, and the plurality of reinforcing ribs are provided side by side with the first reinforcing rib and the first reinforcing rib. A reinforcing rib; and a third reinforcing rib provided between the first reinforcing rib and the second reinforcing rib in a direction intersecting with the first reinforcing rib and the first reinforcing rib. The second reinforcing rib and the third reinforcing rib may form a drainage structure.

(6) In the configuration of (5), the third reinforcing rib is linearly formed in a direction perpendicular to the first reinforcing rib and the second reinforcing rib, and You may have a notch in the front position which cross | intersects the reinforcing rib and / or the said 2nd reinforcing rib.

(7) In the configuration of (5) or (6), the third reinforcing rib has a first surface rising from the surface and a second surface opposite to the first surface in a cross-sectional view, The first surface may be formed to have a larger inclination angle with respect to a surface orthogonal to the surface than the second surface.

  According to the present invention, the cleaning water on the reinforcing ribs is moved in a certain direction by gravity or wind pressure, drained smoothly from the reinforcing ribs, and the drying time can be shortened. There is provided a substrate storage container that can prevent the substrate from being affected by the above.

It is a disassembled perspective view of the substrate storage container which concerns on embodiment of this invention. It is explanatory drawing of the structure of the cover body which concerns on embodiment, (a) is a perspective view of the main body of a cover body, (b) is a disassembled perspective view of a locking mechanism, (c) is a perspective view of a cover member. (A) is a perspective view of the drainage structure which concerns on embodiment, (b) is a perspective view of the drainage structure which concerns on a 1st modification. (A) is a perspective view of the drainage structure which concerns on a 2nd modification, (b) is a perspective view of the drainage structure which concerns on a 3rd modification. It is a perspective view of the drainage structure concerning the 4th modification. It is a perspective view of the drainage structure concerning the 5th modification. (A) is a perspective view of the drainage structure which concerns on a 6th modification, (b) is AA sectional drawing of (a). It is a perspective view of the substrate storage container concerning other embodiments. (A) is a figure which shows the basic composition of the conventional reinforcement rib, (b) is a figure which shows the state which the washing water collected on the conventional reinforcement rib.

  DESCRIPTION OF EMBODIMENTS Hereinafter, embodiments for carrying out the present invention (hereinafter referred to as “embodiments”) will be described in detail with reference to the accompanying drawings. The same number is attached | subjected to the same element through the whole description of embodiment.

<First Embodiment>
As shown in FIG. 1, the substrate storage container 1 according to the first embodiment includes a container body 2 having an opening 4 on the front surface, and a lid 11 that closes the opening 4. The container body 2 can store a plurality of substrates (not shown) arranged in a vertical direction in a horizontal state, and the container body 2 is provided with a pair of support members 3 on the inner surfaces 2b facing each other. 3, support portions for horizontally supporting the peripheral portion of the substrate are formed at regular intervals in the vertical direction. A holding member 12 that presses and holds the edge of the substrate is attached to the back surface of the lid 11.

  A robotic flange 7a is detachably mounted on the top surface 2a, which is the outer surface of the container body 2, as one of the attachment parts 7. The substrate storage container 1 is transported in the process and between the processes by holding the robotic flange 7a on an automatic ceiling transport machine.

  The side surface 2c of the container main body 2 is provided with one reinforcing rib 21 or a plurality of reinforcing rib groups 21 that extend along the side surface 2c and reinforce the container main body 2. Further, the cleaning water L attached to one reinforcing rib 21 or the reinforcing rib group 21 is applied to one reinforcing rib 21 or the reinforcing rib group 21 in a state where the container body 2 is held in a specific posture. A drainage structure 30 for draining from the reinforcing rib group 21 is provided. The drainage structure 30 is orthogonal to the direction of the force acting on the cleaning water L when removing the cleaning water L attached to one reinforcing rib 21 or the reinforcing rib group 21 (the direction of gravity or the wind pressure of the drying device). The washing water L is drained in a direction inclined with respect to the direction.

  In the following description, when the plurality of reinforcing rib groups 21 and different reinforcing ribs are referred to separately, “the first reinforcing rib 21a, the second reinforcing rib 21b, the third reinforcing rib” are referred to. 21c,... ”Is followed by a lowercase alphabet followed by“ symbol 21 ”. Further, when “the first reinforcing rib 21a, the second reinforcing rib 21b, the third reinforcing rib 21c,...” Are collectively referred to, they are simply referred to as “the reinforcing rib group 21”. When one reinforcing rib 21 is referred to, the third reinforcing rib 21 c is handled as one reinforcing rib 21.

  Here, the specific posture is a posture of the substrate storage container 1 when the cleaning water L is removed from the substrate storage container 1 after the substrate storage container 1 is washed with the cleaning water L. Is set to a posture in which the lid 11 and the opening 4 are oriented horizontally, the top surface 2a of the container body 2 is directed upward, and the side surface 2c of the container body 2 is oriented vertically. The specific posture is arbitrary as long as it is a posture capable of drying the substrate storage container 1 such as a posture in which the lid 11 and the opening 4 are directed upward (the same applies hereinafter).

  The lid 11 includes a main body 11a (see FIG. 2A), a locking mechanism 11b (see FIG. 2B) incorporated in the main body 11a, and one side of the main body 11a in a state where the locking mechanism 11b is incorporated. Cover member 11e (see FIG. 2C). As shown in FIG. 2B, the locking mechanism 11b includes a rotating plate 11c rotated by a key (not shown), and a pair of power transmission plates 11d connected to the rotating plate 11c and slidable in the vertical direction in the figure. The lid 11 can be assembled to the container body 2 in a locked state by rotating the rotary plate 11c with a key and sliding the power transmission plate 11d up and down. A ring-shaped seal member (not shown) that seals between the container body 2 and the container body 2 can be attached to the peripheral wall of the cover body 11, and the container body 2 and the cover body 11 are fitted via the seal member. The opening part 4 is sealed by closing by the locking mechanism 11b in the made state.

  The container body 2 and the lid body 11 can be formed from a synthetic resin such as polycarbonate, polyether ether ketone, polyether imide, polybutylene terephthalate, polyacetal, liquid crystal polymer, or cycloolefin polymer. In addition, conductivity can be imparted to these resins by adding carbon powder, carbon fibers, carbon nanotubes, or the like.

  2C, on the surface of the cover member 11e, one reinforcing rib 21 extending in one direction or a plurality of reinforcing rib groups 21 extending in a plurality of directions, and the container body A drainage structure 30 is provided for draining the cleaning water L attached to one reinforcing rib 21 or the reinforcing rib group 21 from the reinforcing rib group 21 in a state where 2 is held in a specific posture.

  Then, the drainage structure 30 provided in the container main body 2 and the cover member 11e is demonstrated. 3 to 7, the broken-line arrows indicate the flow of the cleaning water L. In addition, here, the substrate storage container 1 is placed with the lid 11 and the opening 4 facing in the horizontal direction and the top surface 2a of the container body 2 facing upward, and the attached cleaning water L is removed by gravity or dry air. An example of removal by wind pressure will be described. In this example, the direction of the force acting on the cleaning water L (the direction of gravity or wind pressure, which is indicated by a white arrow in the figure) is vertically downward.

  As shown in FIG. 3A, the drainage structure 30 includes, for example, two first reinforcing ribs 21a and a first rib disposed side by side along the vertical direction in a state where the container body 2 is held in a specific posture. 2 reinforcing ribs 21b and a third reinforcing rib 21c provided between them and in a direction crossing them. As will be described later, the cross-sectional shape of the third reinforcing rib 21c can be selected from various shapes such as an isosceles trapezoidal shape, a triangular shape, and a semicircular shape. Here, a configuration in which the two first reinforcing ribs 21a and the second reinforcing ribs 21b are opposed to both ends of the third reinforcing rib 21c is illustrated, but the third reinforcing rib 21c is exemplified. Wall surfaces forming protrusions or steps such as bosses such as screw holes and pin holes provided in the reinforcing rib group 21 may be opposed to both end portions of the reinforcing rib group 21, and the third reinforcing rib 21 c may be a single reinforcing member. The ribs 21 may exist independently without intersecting with other wall surfaces.

  In the first embodiment, the third reinforcing rib 21c has a mountain-shaped bent portion, and a top portion 21c1 and a first reinforcing rib 21a extending from the top portion 21c1 toward the first reinforcing rib 21a. 1 portion 41 and a second portion 42 extending from the top portion 21c1 toward the other second reinforcing rib 21b. The first portion 41 is inclined with respect to the horizontal direction (an example of “a direction perpendicular to the direction of the force acting on the cleaning water”, and is indicated by a horizontal plane H in the drawing), and the second portion 42 is inclined in the direction opposite to the first portion 41 with respect to the horizontal plane H. The horizontal plane is a virtual plane (the same applies hereinafter). Thus, the inclined surface provided on the third reinforcing rib 21c is formed so as to be inclined from the horizontal plane along the extending direction (longitudinal direction) of the third reinforcing rib 21c. 21c is inclined and arranged. The mountain-shaped top portion 21c1 is not limited to one location, and a plurality of the same shape may be continuously provided.

  The drainage structure 30 has a first inclined surface 41 a formed on the upper surface of the first portion 41 and a second inclined surface 42 a formed on the upper surface of the second portion 42. The first inclined surface 41 a has a first inclination angle θ 1 with respect to the horizontal plane H, and the second inclined surface 42 a has a second inclination angle θ 2 with respect to the horizontal plane H. The drainage structure 30 using the third reinforcing rib 21c may be formed in a fold-like mountain shape in a bilaterally symmetric shape, or the first inclination angle θ1 and the second inclination angle θ2. Can be formed in an asymmetrical shape, for example, by setting to different sizes. The magnitudes of the inclination angles θ1 and θ2 set in the drainage structure 30 can be arbitrarily set, but can be suitably selected from a range of 5 ° to 45 °. Preferably, the angle is 30 ° or less, and in this case, the third reinforcing rib 21c can be installed so as not to be excessively wide.

  In the drainage structure 30 configured as described above, the cleaning water L on the third reinforcing rib 21c causes the first inclined surface 41a and the second inclined surface 42a to move to the first due to gravity or wind pressure directed vertically downward. Since the first reinforcing rib 21a and the second reinforcing rib 21b flow and drop well toward the intersection, the cleaning water L on the third reinforcing rib 21c is moved in a certain direction, and the third reinforcing rib Water can be smoothly drained from the rib 21c.

  Then, the modification of the drainage structure 30 which concerns on 1st Embodiment is demonstrated based on FIG.3 (b). In the following description, elements common to the above-described drainage structure 30 (see FIG. 3A) are denoted by the same reference numerals, and redundant description is omitted.

  As shown in FIG. 3B, in the drainage structure 31 according to the modified example of the first embodiment, the end of the third reinforcing rib 21c in the drainage structure 30 (see FIG. 3A) described above is used. A notch 22 is provided that opens in the vertical direction. The notch 22 is formed at a position in front of the both ends of the third reinforcing rib 21c intersecting the first reinforcing rib 21a and the second reinforcing rib 21b. According to the drainage structure 31 according to this modification, the cleaning water L that flows toward both ends of the third reinforcing rib 21c flows down from the notch 22. For this reason, the washing water L can be drained more smoothly from the third reinforcing rib 21c. Further, the first reinforcing rib 21a, the second reinforcing rib 21b, and other wall surfaces such as protrusions do not exist at both ends of the third reinforcing rib 21c, and the third reinforcing rib 21c has one reinforcement. The same effect can be obtained even when the rib 21 is present alone as it is drained from both ends.

Second Embodiment
As shown in FIG. 4A, the second embodiment forms the drainage structure 32 in the first embodiment by forming the third reinforcing rib 21c to have a valley-shaped bent portion. To do.

  The third reinforcing rib 21c includes a bottom portion 21c2, a first portion 51 extending from the bottom portion 21c2 toward one first reinforcing rib 21a, and a second reinforcing rib 21b from the top portion 21b1. And a second portion 52 extending toward the surface. The first portion 51 is inclined with respect to the horizontal plane H, and the second portion 52 is inclined with respect to the horizontal plane H in the direction opposite to the first portion 51. Here, the bottom portion 21c2 forming the valley shape is not limited to one location, and the same shape may be continuously provided at a plurality of locations.

  The drainage structure 32 has a first inclined surface 51 a formed on the upper surface of the first portion 51, and a second inclined surface 52 a formed on the upper surface of the second portion 52. The first inclined surface 51 a has a third inclination angle θ 3 with respect to the horizontal plane H, and the second inclined surface 52 a has a fourth inclination angle θ 4 with respect to the horizontal plane H. The third reinforcing rib 21c and the drainage structure 32 may be formed in a bilaterally symmetric shape, or the third inclination angle θ3 and the fourth inclination angle θ4 are set to different sizes so as to be left-right asymmetric. It can also be formed in any shape. The magnitudes of the inclination angles θ3 and θ4 set in the drainage structure 32 can be arbitrarily set, but can be suitably selected from a range of 5 ° to 45 ° as in the previous embodiment.

  In the drainage structure 32, the cleaning water L on the third reinforcing rib 21c causes the first inclined surface 51a and the second inclined surface 52a to move to the bottom portion 21c2 of the third reinforcing rib 21c by gravity or wind pressure. Since the water flows and falls well, the cleaning water L on the third reinforcing rib 21c can be moved in a certain direction and smoothly drained from the third reinforcing rib 21c.

  Then, the modification of the drainage structure 32 which concerns on 2nd Embodiment is demonstrated based on FIG.4 (b).

  As shown in FIG. 4B, in the drainage structure 33 according to the modification of the second embodiment, in the drainage structure 32 described above (see FIG. 4A), the bottom portion 21c2 of the third reinforcing rib 21c ( A cutout 23 that opens in the vertical direction is provided in an example of “an intermediate portion of the third reinforcing rib 21c” according to the present invention. According to the drainage structure 33 according to this modification, the wash water L flows downward from the notch 23 after flowing through the third reinforcing rib 21c. For this reason, the washing water L can be drained more smoothly from the third reinforcing rib 21c. Further, the first reinforcing rib 21a, the second reinforcing rib 21b, and other wall surfaces such as protrusions do not exist at both ends of the third reinforcing rib 21c, and the third reinforcing rib 21c has one reinforcement. Even when it exists alone as the rib 21 for use, since it drains from the notch 23 of an intermediate part, the same effect is acquired.

<Third Embodiment>
As shown in FIG. 5, the third embodiment constitutes the drainage structure 34 by forming the third reinforcing rib 21 c so as to have a linear inclined portion in the first embodiment.

  The third reinforcing rib 21 c is formed in a straight line and is inclined with respect to the horizontal plane H. The drainage structure 34 has a third inclined surface 53a formed on the upper surface of the third reinforcing rib 21c. The third inclined surface 53a has a fifth inclination angle θ5 with respect to the horizontal plane H. Although the magnitude | size of inclination-angle (theta) 5 set in the drainage structure 34 can be set arbitrarily, it can select suitably from the range of 5 degrees or more and 10 degrees or less.

  Also in this drainage structure 34, the washing water L on the third reinforcing rib 21c is moved from the higher end of the third reinforcing rib 21c to the lower side by the gravity and wind pressure. Since it flows and falls well toward the end, the cleaning water L on the third reinforcing rib 21c can be moved in a certain direction and can be smoothly drained from the third reinforcing rib 21c. FIG. 5 shows an example in which both end portions of the third reinforcing rib 21c are in contact with the first reinforcing rib 21a and the second reinforcing rib 21b. In consideration of conditions such as the arrangement location, the notch 22 may be provided in front of the end portion intersecting with the second reinforcing rib 21b on the lower side, similarly to the modification of the first embodiment. Further, the first reinforcing rib 21a, the second reinforcing rib 21b, and other wall surfaces such as protrusions do not exist at both ends of the third reinforcing rib 21c, and the third reinforcing rib 21c has one reinforcement. Even when the rib 21 is present alone, the same effect is obtained because the water is drained from the lower end.

<Fourth embodiment>
As shown in FIG. 6, the fourth embodiment constitutes the drainage structure 35 in the first embodiment by forming the third reinforcing rib 21 c so as to have a mountain-shaped curved portion. .

  The third reinforcing rib 21c is a rib that is formed in a curved shape as a whole, and the drainage structure 35 is formed on the upper surface of the third reinforcing rib 21c and is a curved portion that is inclined with respect to the horizontal plane H ( (Curved surface) 54. The curved portion 54 is formed in a convex shape upward. Further, notches 22 that open in the vertical direction are provided at both ends of the third reinforcing rib 21c. Although the magnitude | size of the inclination angle (not shown) with respect to the horizontal surface H of the both ends of the curved part (curved surface) 54 set in the drainage structure 35 can be set arbitrarily, it is 5 degrees or more similarly to the previous embodiment. It can select suitably from the range of 45 degrees or less.

  Also in this drainage structure 35, the washing water L on the third reinforcing rib 21c flows favorably on the curved portion 54 toward both ends of the third reinforcing rib 21c due to gravity and wind pressure. The cleaning water L on the third reinforcing rib 21c can be moved in a certain direction, and can be drained smoothly from the notches 22 at both ends of the third reinforcing rib 21c. Further, there is no other wall surface such as the first reinforcing rib 21a, the second reinforcing rib 21b, and the protrusions at both ends of the third reinforcing rib 21c, and the third reinforcing rib 21c is one reinforcing rib. Even when the rib 21 is present alone, the same effect is obtained because the water is drained from both ends. FIG. 6 shows an example in which the notches 22 are provided at both ends of the third reinforcing rib 21c. However, in the drainage structure 35, the first implementation is performed in consideration of the conditions such as the arrangement location. Similar to the configuration, the cutout 22 may not be provided.

<Fifth Embodiment>
As shown in FIG. 7A and FIG. 7B, the fifth embodiment is different from the third embodiment in that the third reinforcing rib 21c is replaced with the first reinforcing rib 21a and the second reinforcing rib. The drainage structure 34 is formed by forming a straight line in a direction perpendicular to 21b and making the cross-sectional shape of the washing water L easy to flow down.

  The third reinforcing rib 21c has an upper surface (first surface) and a lower surface (second surface) opposite to the upper surface (first surface) rising from the surface on which the third reinforcing rib 21c is disposed. The upper surface is formed as a fourth inclined surface 55, and the fourth inclined surface 55 is inclined at a sixth inclination angle θ6 with respect to a horizontal plane H1 orthogonal to the surface to be arranged. Here, the fourth inclined surface 55 is formed to be inclined downward from the base end 21f1 side to the tip end 21f2 side of the third reinforcing rib 21c in a cross-sectional view. The lower surface of the third reinforcing rib 21c is formed as a fifth inclined surface 56, and is inclined at a seventh inclination angle θ7 with respect to a horizontal plane H2 orthogonal to the surface to be arranged, and θ6 and θ7 are the angles. Are different. In other words, the third reinforcing rib 21c has a non-isosceles trapezoidal shape in which θ6 is set larger than θ7 in a cross-sectional view. Although the magnitude | size of inclination-angle (theta) 6 set in the drainage structure 36 can be set arbitrarily, it is desirable that it is 5 degrees or more.

  In addition, the cross-sectional shape of the third reinforcing rib 21c is not limited to the isosceles trapezoidal shape, and may be a triangular shape having an upper surface having a larger inclination angle than the lower surface. Furthermore, it may be an irregular semicircular shape having an upper surface whose curvature is smaller than that of the lower surface. In short, the upper surface may have a larger inclination angle than the lower surface so that the upper surface (first surface) and the lower surface (second surface) on the opposite side are asymmetric.

  Also in the drainage structure 36, the washing water L on the third reinforcing rib 21c causes the fourth inclined surface 55 to move from the base end 21f1 side to the tip 21f2 side of the third reinforcing rib 21c due to gravity or wind pressure. Since the water flows and falls well, the cleaning water L on the third reinforcing rib 21c can be moved in a certain direction and smoothly drained from the third reinforcing rib 21c. Further, the first reinforcing rib 21a, the second reinforcing rib 21b, and other wall surfaces such as protrusions do not exist at both ends of the third reinforcing rib 21c, and the third reinforcing rib 21c has one reinforcement. The same effect can be obtained even when the rib 21 is present alone as it is drained from both ends. 7A shows an example in which the notches 22 are provided at both ends of the third reinforcing rib 21c, the drainage structure 36 also takes into account the conditions such as the location thereof. Similarly to the first embodiment, the cutout 22 may not be provided.

  The cross-sectional shape of the third reinforcing rib 21c according to the fifth embodiment may be applied to the third reinforcing rib 21c according to the first to fourth embodiments, and further, the third reinforcing rib 21c according to each embodiment. The present invention may be applied to the first reinforcing rib 21a and / or the second reinforcing rib 21b.

<Disposition of drainage structure>
In the above-described substrate storage container 1 (see FIG. 1), the example in which the third reinforcing rib 21c and the drainage structures 30 to 36 are provided in the container main body 2 and the lid body 11 is shown. The reinforcing ribs 21 c and the drainage structures 30 to 36 can be provided on various attachment parts 7 attached to the container body 2.

  As shown in FIG. 8, the substrate storage container 1 </ b> B has a side surface of the container body 2 in addition to the transfer robotic flange 7 a that is attached to the top surface 2 a of the container body 2 as an attachment part 7. A manual handle 7b attached to 2c, a side rail 7c, a bottom plate 7d attached to the bottom surface 2d of the container body 2, and a tag holder 7e attached to the back surface 2e of the container body 2. In this example, at least one mounting part 7 selected from the group consisting of these robotic flange 7a, manual handle 7b, side rail 7c, bottom plate 7d, tag holder 7e, and support member 3 (see FIG. 1), The third reinforcing rib 21c and the drainage structures 30 to 36 are provided. Thereby, also in the various attachment components 7, the washing water L can be smoothly drained by gravity or wind pressure, and the drying time can be shortened.

(Effect of embodiment)
The effects of the embodiment described above will be described. According to each embodiment, the cleaning water L on the third reinforcing rib 21c can be moved in a certain direction by gravity or wind pressure, and can be smoothly drained from the third reinforcing rib 21c. Shortening can be achieved. Moreover, since the cleaning water L does not remain, the substrate storage container 1 that can prevent the influence of moisture on the substrate is provided.

  As mentioned above, although this invention was demonstrated using embodiment, it cannot be overemphasized that the technical scope of this invention is not limited to the range as described in the said embodiment. It will be apparent to those skilled in the art that various modifications or improvements can be added to the above embodiment. Moreover, the form which added such a change or improvement, and the mountain-valley structure in which the inclined surface formed in the rib for reinforcement may continue may be sufficient, and the technical scope of this invention also when a plurality of mountain-valley structures are continuous. It is apparent from the description of the scope of claims. In this case, a notch is formed in a portion corresponding to the valley or the sixth inclination with respect to the horizontal plane H1 perpendicular to the extending direction of the reinforcing rib, that is, the surface on which the reinforcing rib is disposed. It is preferable to form an inclined surface inclined at an angle θ6 and drain the water.

  For example, the third reinforcing ribs 21c and the drainage structures 30 to 36 according to each embodiment are appropriately combined in consideration of the arrangement location conditions such as the arrangement space and ensuring the strength to be given to the members and parts. Can be. In the first, fourth, and fifth embodiments, the notches 22 are provided at both ends of the third reinforcing rib 21c, but may be provided at any one of the ends.

DESCRIPTION OF SYMBOLS 1,1B ... Board | substrate storage container, 2 ... Container main body, 2a ... Top surface (outer surface), 2b ... Inner surface, 2c ... Side surface (outer surface), 2d ... Bottom surface (outer surface), 2e ... Back surface ( (Outside surface), 3 ... support member, 4 ... opening, 7 ... mounting part, 7a ... robotic flange (flange), 7b ... manual handle, 7c ... side rail, 7d ... bottom plate, 7e ... tag holder, 11 ... Lid, 11a ... main body, 11e ... cover member, 12 ... holding member, 21 ... one reinforcing rib or reinforcing rib group, 21a ... first reinforcing rib, 21b ... second reinforcing rib, 21c ... 3rd reinforcement rib (one reinforcement rib), 22, 23 ... notch, 30-36 ... drainage structure, 41 ... 1st part (of drainage structure 30,31), 42 ... 2nd part ( Drainage structures 30, 31), 51 ... first part (drainage Structure 32, 33), 52 ... second part (drainage structure 32, 33), 54 ... curved portion, [theta] 1 to [theta] 7 ... first to seventh inclination angles, H, H1, H2 ... horizontal plane (virtual plane) ), L ... Wash water

Claims (4)

A substrate storage container,
A container body having an opening;
A lid that closes the opening;
Mounting parts provided on the container body;
A reinforcing rib extending along at least one surface of the container body, the lid, and the attachment part;
The reinforcing rib is disposed in a slanting direction or in a direction perpendicular to the stretching direction so as to form a drainage structure that is slanted with respect to a virtual plane orthogonal to the direction of the force acting on the cleaning water ,
A plurality of the reinforcing ribs are provided,
The plurality of reinforcing ribs include a first reinforcing rib, a second reinforcing rib provided adjacent to the first reinforcing rib, the first reinforcing rib, and the second reinforcing rib. A third reinforcing rib provided in a direction intersecting with the first reinforcing rib, the second reinforcing rib, and the third reinforcing rib having a drainage structure. Forming,
The third reinforcing rib is linearly formed in a direction perpendicular to the first reinforcing rib and the second reinforcing rib, and the first reinforcing rib and / or the second reinforcing rib is formed. substrate storage container according to claim Rukoto to have a notch at a position before intersecting the use ribs. A substrate storage container,
A container body having an opening;
A lid that closes the opening;
Mounting parts provided on the container body;
A reinforcing rib extending along at least one surface of the container body, the lid, and the attachment part;
The reinforcing rib is disposed in a slanting direction or in a direction perpendicular to the stretching direction so as to form a drainage structure that is slanted with respect to a virtual plane orthogonal to the direction of the force acting on the cleaning water,
A plurality of the reinforcing ribs are provided,
  The plurality of reinforcing ribs include a first reinforcing rib, a second reinforcing rib provided adjacent to the first reinforcing rib, the first reinforcing rib, and the second reinforcing rib. A third reinforcing rib provided in a direction intersecting with the first reinforcing rib, the second reinforcing rib, and the third reinforcing rib having a drainage structure. Forming,
The substrate storage container, wherein the third reinforcing rib is formed to have a valley-shaped bent portion. A substrate storage container,
A container body having an opening;
A lid that closes the opening;
Mounting parts provided on the container body;
A reinforcing rib extending along at least one surface of the container body, the lid, and the attachment part;
The reinforcing rib is disposed in a slanting direction or in a direction perpendicular to the stretching direction so as to form a drainage structure that is slanted with respect to a virtual plane orthogonal to the direction of the force acting on the cleaning water,
A plurality of the reinforcing ribs are provided,
  The plurality of reinforcing ribs include a first reinforcing rib, a second reinforcing rib provided adjacent to the first reinforcing rib, the first reinforcing rib, and the second reinforcing rib. A third reinforcing rib provided in a direction intersecting with the first reinforcing rib, the second reinforcing rib, and the third reinforcing rib having a drainage structure. Forming,
The substrate storage container, wherein the third reinforcing rib is formed to have a linear inclined portion from the first reinforcing rib toward the second reinforcing rib. The third reinforcing rib has a first surface rising from the surface in a cross-sectional view and a second surface opposite to the first surface, and the first surface is more orthogonal to the surface than the second surface. The substrate storage container according to any one of claims 1 to 3 , wherein the substrate storage container is formed to have a large inclination angle with respect to a virtual plane.

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