JP6417637B2 - Mid-range static eliminator - Google Patents

Description

The present invention relates to a static eliminator (static elimination system) that removes static electricity at high speed and high accuracy without wind in an operation range where an objective distance (distance between an apparatus and an object) is a middle range (about 300 mm to 600 mm).

Conventionally, there has been no static eliminator that removes static electricity at high speed and high accuracy without wind in a work area having an intermediate objective distance (about 300 mm to 600 mm). A narrow static eliminator that operates without wind is high speed and high accuracy, but has an objective distance of about 50 mm to 300 mm. The wide-area static eliminator that operates without wind has an objective distance of about 500 mm to 1,500 mm, but high-speed static elimination cannot be performed because of the low ion concentration. In addition, there is a possibility of damaging the semiconductor because the ion balance is poor and high-precision static elimination cannot be performed. As described above, there has been no static eliminator that operates in an ideal windless environment for use in a middle work area (about 300 mm to 600 mm).

An object of the present invention is to provide a static eliminator that removes static electricity in a work area having an objective distance in the middle range (about 300 mm to 600 mm) at high speed and high accuracy without wind.

  In the present invention, at least two ion radiators that simultaneously emit positive ions and negative ions and in which the polarity of more ions than the other of the positive ion amount and the negative ion amount are alternately switched on the time axis are arranged. The positive ion emission port and the manas ion emission port of the ion radiator are arranged at intervals of 50 mm to 150 mm, and each ion radiator has an ion balance pulsation of ± 50 V to ± 300 V at a position 300 mm forward from each ion radiator. Is in range. The ion emitters operate in synchronism, and the ion balances of adjacent ion radiators are always opposite to each other, and the ion emission direction of each ion emitter is the forward direction or the center direction of the work area. The intervals between the ion radiators are 200 mm to 1,500 mm, and each ion radiator operates without wind.

ADVANTAGE OF THE INVENTION According to this invention, it can contribute to removing static electricity in the work area of the middle range (about 300 mm-about 600 mm) which was difficult conventionally with no wind and with high accuracy.

FIG. 3 is a diagram for explaining Example 1; FIG. 6 is a diagram for explaining a second embodiment. 6 is a diagram for explaining an example of an ion radiator used in Example 1 or 2. FIG. It is a figure explaining the difference of the ion space (effective area) of the mid range static elimination system of this invention, and the conventional wide area static elimination system. It is a figure for demonstrating ion distribution of a wide area static elimination system. It is a figure for demonstrating ion distribution of a mid range static elimination system. It is a figure for demonstrating the change on the time-axis of +/- ion amount and ion balance of a wide area static elimination system. It is a figure for demonstrating the change on the time-axis of +/- ion amount and ion balance of a mid range static elimination system. It is a figure for demonstrating the change of the ion balance by a place.

At least two ion radiators that radiate positive ions and negative ions at the same time and alternately switch the polarity of the positive ion amount and the negative ion amount on the time axis are arranged. The positive ion emission port and the manas ion emission port of the ion radiator are arranged at intervals of 50 mm to 150 mm, and each ion radiator has an ion balance pulsation of ± 50 V to ± 300 V at a position 300 mm forward from each ion radiator. Is in range. The ion emitters operate in synchronism, and the ion balances of adjacent ion radiators are always opposite to each other, and the ion emission direction of each ion emitter is the forward direction or the center direction of the work area. The intervals between the ion radiators are preferably 200 mm to 1,500 mm, and the ion radiators preferably operate without wind.

A first embodiment will be described with reference to FIG. FIG. 1 is a diagram for explaining the arrangement and orientation of ion emitters. The ion emitters are arranged with an interval of 200 mm to 1,500 mm. FIG. 1 a shows a state in which two ion radiators are arranged on the left and right and are directed in the forward direction (the direction of the work area). In this case, the ion space 12 (a space filled with ions) becomes a semicircular work area, and static electricity in the work area is removed.

  FIG. 1 b shows a state in which two ion radiators 10 are arranged on the left and right sides and are directed obliquely inward (in the center of the work area). In this case, the ion space 12 (a space filled with ions) becomes a fan-shaped work area, and static electricity in the work area is removed.

FIG. 1 c shows a state in which two ion radiators 10 are arranged on the left and right sides and are directed in the opposite direction (the center direction of the work area). In this case, the ion space 12 (a space filled with ions) becomes a rectangular work area, and static electricity in the work area is removed.

A second embodiment will be described with reference to FIG. FIG. 2 shows the arrangement and orientation when two or more ion radiators 10 are arranged. Each ion radiator 10 is disposed with an interval of 200 mm to 1,500 mm. The direction of the ion emitter 10 is the forward direction (the direction of the work area). In this case, the ion space 12 (the space filled with ions) is a belt-like work area on the left and right, and the static electricity in this work area is removed.

FIG. 3 is a diagram showing the structure, ion emission direction, and operation of the ion emitter 10 used in the first or second embodiment. Here, as a desirable form of the ion emitter, an embodiment is shown in which ion emission ports are provided on the front surface, the left side surface, and the right side surface and ions are emitted from three surfaces. Since the operation changes state at regular time intervals, the first state will be described as phase 1 and the subsequent state will be described as phase 2.

Here, the ion radiator 10 has four ion emission ports on the front surface. More specifically, the ion radiator 10 includes two ion emission ports arranged on the upper side and two ion emission ports arranged on the lower side. The upper left and right ion emission ports and the lower left and right ion emission ports are in positions corresponding to the vertical direction.
A discharge needle (not shown) is arranged to face each ion emission port so as to emit ions through each ion emission port. Similarly, it is desirable that the discharge needles are similarly arranged at the ion emission ports on the left and right sides of the ion radiator 10.

FIG. 3 a illustrates the operation of phase 1 using a plan view, a front view, a left side view, and a right side view of the ion radiator. FIG. 3b illustrates the operation of Phase 2 using a plan view, a front view, a left side view, and a right side view of the ion radiator. FIG. 3c illustrates an alternative form of ion emitter in plan view.

In Phase 1, there are two ion emission ports on the left side of the front surface, and the upper emits + ions and the lower emits-ions. Hereinafter, an ion emission port that emits + ions is referred to as a positive ion emission port, and an ion emission port that emits − ions is referred to as a negative ion emission port. At this time, since the flight distance of the ions varies depending on the balance between the diffusive force and the attractive force between the ions, it is preferable that these ion emission ports have an interval of 50 mm to 150 mm. At the same time, there are two ion emission openings on the left side of the left side, and the upper side emits + ions and the lower side emits-ions. At this time, since the flight distance of the ions varies depending on the balance between the diffusive force and the attractive force between the ions, it is preferable that these ion emission ports have an interval of 50 mm to 150 mm. Further, at the same time, two ion emission openings are provided on the right side of the right side surface, and the upper side emits + ions and the lower side emits − ions. At this time, since the flight distance of the ions varies depending on the balance between the diffusive force and the attractive force between the ions, it is preferable that these ion emission ports have an interval of 50 mm to 150 mm.

In Phase 2, there are two ion emission ports on the right side of the front surface, and the upper side emits -ion and the lower side emits + ion. At this time, since the flight distance of the ions varies depending on the balance between the diffusive force and the attractive force between the ions, it is preferable that these ion emission ports have an interval of 50 mm to 150 mm. At the same time, it has two ion emission ports on the right side of the left side surface, and the upper side emits − ions and the lower side emits + ions. At this time, since the flight distance of the ions varies depending on the balance between the diffusive force and the attractive force between the ions, it is preferable that these ion emission ports have an interval of 50 mm to 150 mm. Further, at the same time, two ion emission ports are provided on the left side of the right side surface, and the upper side emits − ions and the lower side emits + ions. At this time, since the flight distance of the ions varies depending on the balance between the diffusive force and the attractive force between the ions, it is preferable that these ion emission ports have an interval of 50 mm to 150 mm.

FIG. 3c shows an alternative to the shape of the ion emitter, which may have a round shape with a front side, a left side, and a right side instead of a rectangle.

A third embodiment will be described with reference to FIG. FIG. 4 is a diagram for explaining the difference in ion space (effective area) between the middle-range static elimination system of the present invention and the conventional wide-area static elimination system. FIG. 4A shows an effective area of the wide-area static elimination method, and FIG. 4B shows an effective area of the mid-range static elimination method. In the conventional wide-area static elimination system, the ion space has a frontage of about 6,000 mm and a depth of about 1,500 mm. On the other hand, in the middle-range static elimination system of the present invention, the ion space has a frontage of about 1,800 mm × depth of about 600 mm.

Next, the ion distribution of the wide-area neutralization system and the intermediate-area neutralization system using the above-described ion radiator will be described with reference to FIGS. 5 and 6. FIG. 5a shows the ion distribution of the wide-area static elimination system, and FIG. 6b shows the ion distribution of the mid-range static elimination system. The size of the ion space is about 6,000 mm x about 1,50 mm for the wide-area static elimination method, and about 1,800 mm x about 600 mm for the mid-range static elimination method, but the ion distribution shape is almost the same. The area is divided into an area center, an area L (left), and an area R (right).

In the center of the area, the ions emitted from the ionizer L (left ion radiator 10) and the ionizer R (right ion radiator 10) are added together, so that an ion space with a high ion concentration is formed. In the area L, an ion space is formed only by ions emitted from the ionizer L, and in the area R, an ion space is formed only by ions emitted from the ionizer R.

Next, changes on the time axis of the +/− ion amount and the ion balance in the wide-area static elimination method and the mid-range static elimination method will be described with reference to FIGS. 7 and 8. 7 and 8 show changes on the time axis of +/− ion amount and ion balance. FIG. 7A shows a wide-area static elimination system, and FIG. 8B shows a mid-area static elimination system. (1), (2), and (3) show changes in the amount of ions and ion balance in the area L, area R, and center of the area on the time axis, respectively.

In the wide-area static elimination method of FIG. 7a, assuming that the amount of emitted ions is ± 100 ion amount unit,
(1) In area L, the ion amount is +100 ion amount unit in phase 1 and −100 ion amount unit in phase 2. Therefore, the average ion concentration of + ions is 50 ion quantity units, and the average ion concentration of-ions is 50 ion concentration units. At this time, if one ion amount unit corresponds to one ion balance unit, the ion balance becomes ± 100 ion balance units.

(2) In area R, the ion amount is -100 ion amount unit in Phase 1 and +100 ion amount unit in Phase 2. Accordingly, the average ion concentration of − ions is 50 ion quantity units, and the average ion concentration of + ions is 50 ion concentration units. At this time, if one ion amount unit corresponds to one ion balance unit, the ion balance becomes ± 100 ion balance units.

(3) At the center of the area, the amount of ions is +100 ion amount unit and −100 ion amount unit in Phase 1, and in Phase 2 is +100 ion amount unit and −100 ion amount unit.
Therefore, the average ion concentration of + ions is 100 ion amount units, and the average ion concentration of − ions is 100 ion concentration units. At this time, if one ion amount unit corresponds to one ion balance unit, the ion balance becomes ± 0 ion balance unit.

8b, the amount of ions radiated is set to ± 100 ion amount units, and in each phase, there is a certain amount of ions having either + or − polarity, and the subsequent phase is opposite to the previous phase. Since there are a certain amount of polar ions, assuming that the amount is 10 ion units, (1) In area L, the ion amount is +110 ion units and −100 ion units in Phase 1, and +100 ions in Phase 2. Unit of measure and unit of -110 ions. Accordingly, the average ion concentration of + ions is 105 ion quantity units, and the average ion concentration of − ions is 105 ion concentration units. At this time, if one ion amount unit corresponds to one ion balance unit, the ion balance becomes ± 10 ion balance units.

(2) In area R, in Phase 1, it is +100 ion amount unit and −110 ion amount unit, and in Phase 2, it is +110 ion amount unit and −100 ion amount unit. Accordingly, the average ion concentration of + ions is 105 ion quantity units, and the average ion concentration of − ions is 105 ion concentration units. At this time, if one ion amount unit corresponds to one ion balance unit, the ion balance becomes ± 10 ion balance units.

(3) At the center of the area, in Phase 1, it is +210 ion amount unit and -210 ion amount unit, and in Phase 2, it is +210 ion amount unit and -210 ion amount unit. Therefore, the average ion concentration of + ions is 210 ion quantity units, and the average ion concentration of-ions is 210 ion concentration units. At this time, if one ion amount unit corresponds to one ion balance unit, the ion balance becomes ± 0 ion balance unit.

The following table summarizes the characteristics of the above-mentioned a-wide neutralization system and b-intermediate neutralization system.

As described above, the mid-range static elimination method is 1) the average ion amount is almost doubled compared with the wide-area static elimination method, so that high-speed neutralization is possible about twice as much.
2) Since the ion balance is almost halved, high-accuracy static elimination of about twice is possible.
I understand that.

Next, changes in ion balance depending on the location will be described with reference to FIG. FIG. 9 shows the change in ion balance with location. FIG. 9a shows a wide-area static elimination system, and FIG. 9b shows a mid-range static elimination system. In the wide-area static elimination method a, the ion balance is ± 100 ion balance units in the areas L and R, whereas the ion balance is ± 0 ion balance units in the center of the area.

In the middle band static elimination system of b, the ion balance is ± 10 ion balance units in the areas L and R, whereas the ion balance is ± 0 ion balance units in the center of the area.

As described above, the wide-area static elimination method a has a poor ion balance on the whole except for the central part, and greatly varies depending on the location, whereas the middle-range static elimination method b has a good ion balance throughout. It is.

10 Ion radiator 12 Ion space a Wide area static elimination system b Middle area static elimination system

Claims (7)

A neutralization system in which at least two ion radiators are arranged, wherein each ion radiator includes a positive ion emission port that emits positive ions, and negative ion emission that emits negative ions simultaneously with the emission of the positive ions. A positive ion amount radiated from the positive ion radiation port and a negative ion amount radiated from the negative ion radiation port, and the positive ion amount is more than the negative ion amount. And a period in which the amount of negative ions is greater than the amount of positive ions is alternately set. The static elimination system of Claim 1 WHEREIN: The positive ion emission port and negative ion emission port of an ion radiator are arrange | positioned by the space | interval of 50 mm-150 mm, The static elimination system characterized by the above-mentioned. 3. The static eliminator system according to claim 1, wherein each ion emitter has a pulsation of ion balance at a position 300 mm ahead of each ion emitter within a range of ± 50V to ± 300V. The neutralization system according to any one of claims 1 to 3, wherein each ion radiator operates in synchronism, and adjacent ion radiators always have opposite ion balance polarities. Static elimination system. 5. The static elimination system according to claim 1, wherein an ion emission direction of each ion radiator is a forward direction or a center direction of a work area. 6. The static elimination system according to claim 1, wherein an interval between the ion radiators is 200 mm to 1,500 mm. The static elimination system according to claim 1, wherein each ion radiator operates without wind.

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