JP6439554B2 - Measuring apparatus, measuring method, program, and computer-readable storage medium - Google Patents

Description

  The present invention relates to a measuring apparatus and a measuring method for measuring a wave height, which is a difference in height between a corrugated peak and a trough, of a conductor having a corrugated surface, and for causing a computer to execute the measuring method. The present invention relates to a program and a computer-readable storage medium storing the program.

  For example, in continuous casting of steel, the bulging phenomenon in which the slab expands due to the static pressure of the molten steel inside the slab causes troubles such as breakout and deterioration of the slab quality. It is desired to measure the amount corresponding to “a” and suppress it to a certain level or less.

  As a conventional bulging measuring device, as described in the following Patent Document 1, a roller or a wheel is brought into contact with a slab under light pressure, and the amount of displacement is changed via a leaf spring or the like, such as a differential transformer or a magnescale. An apparatus for measuring with a micro displacement meter is known. In the contact-type bulging measuring device described in Patent Document 1 below, the wheel is in contact with the slab under light pressure so as not to damage the solidified shell of the slab. If it enters a moving part such as an axle, the wheel will not rotate and the conditions under light pressure will break, resulting in an increase in pressure on the solidified shell, which breaks the solidified shell of the slab and breaks out. There was a problem that there is a high possibility of reaching.

  In order to avoid the problems described above, as a non-contact type method, there is a method of measuring the profile of the slab using an optical distance meter, but it touches spray water for cooling the slab or a hot slab. Since the field of view of the optical distance meter is obstructed by the influence of water vapor generated in this way, continuous and stable measurement is difficult.

  As a technique capable of realizing stable measurement even in such a spray water, water vapor, or high temperature environment, as described in Patent Document 2 below, using an eddy current type distance meter, A method of measuring the amount of bulging from the difference between the two is conceivable. In this eddy current type distance meter, when a conductor is placed in the alternating magnetic flux generated by the coil, an eddy current that weakens the magnetic flux of the coil is generated on the surface of the conductor. Therefore, when the distance between the coil and the conductor approaches, The distance is measured based on the fact that the magnetic flux becomes weaker and the coil inductance decreases.

  In general, the decrease in inductance depends not only on the distance between the coil and the conductor, but also on the material (conductivity / magnetism), size, thickness, and shape of the conductor. It is necessary to create a distance calibration curve by changing the distance while keeping the material, size, thickness, and shape of a conductor constant.

  In addition, the decrease in inductance depends particularly on the size and shape of the conductor because the magnetic flux produced by the coil spreads to about 3 to 5 times the coil diameter. When the change in shape is small (the shape shows a gradual change) compared to the spread of magnetic flux created by the coil, as in bulging on the long side of the slab described in Patent Document 2 below, The wave height (bulging amount) can be accurately measured from the difference in distance to the mountain valley. However, as in the case of bulging on the short side of the slab described in Patent Document 2 below, when the change in shape is large compared to the spread of magnetic flux generated by the coil (the shape shows a sudden change), Since the inductance of the coil depends not only on the distance but also on the shape (that is, the shape cannot be ignored), the distance from the coil to the valley is not uniquely determined, and it is difficult to accurately measure the wave height. is there.

Japanese Patent Application Laid-Open No. 3-71961 JP-A-53-113222

  The present invention has been made in view of such problems, and even when the change in the shape of the conductor being measured is not negligible compared to the spread of magnetic flux produced by the coil of the eddy current rangefinder. An object of the present invention is to provide a mechanism that can accurately measure the wave height in the shape change of a conductor.

The measuring device of the present invention has a corrugated surface, and a conductor having a known position of the corrugated crests, troughs and nodes in the horizontal direction, the crests and troughs in the vertical direction. A measuring device for measuring a wave height, which is a difference in height with respect to a portion, wherein a relationship between an inductance of a coil disposed at a position above the node portion in the vertical direction and a distance from the coil to the node portion A distance calibration curve storage means for storing a distance calibration curve indicating a coil, an inductance of a coil disposed at a position above the valley in the vertical direction, and a coil disposed at a position above the peak in the vertical direction A wave height calibration curve group storage means for storing a wave height calibration curve group determined for each of the plurality of distances, a wave height calibration curve indicating a relationship between the inductance difference which is a difference between the inductance and the wave height; A node inductance acquisition means for acquiring the inductance of a coil arranged at a position above the section, and a position above the node from the inductance acquired by the node inductance acquisition means using the distance calibration curve. A distance calculating means for calculating the distance from the coil arranged in the coil to the node, and a wave height for obtaining a wave height calibration curve corresponding to the distance calculated by the distance calculating means from the group of wave height calibration curves A calibration curve acquisition means, a peak inductance acquisition means for acquiring the inductance of the coil disposed at a position above the peak, and a trough that acquires the inductance of the coil disposed at a position above the valley Inductance acquisition means, inductance acquired by the valley inductance acquisition means and acquired by the peak inductance acquisition means From the inductance difference calculated by the inductance difference calculating means using the inductance difference calculating means for calculating the inductance difference that is the difference between the inductance and the wave height calibration curve acquired by the wave height calibration curve acquiring means, Wave height calculating means for calculating the wave height.
The present invention also includes a measurement method using the above-described measurement apparatus, a program for causing a computer to execute the measurement method, and a computer-readable storage medium storing the program.

  According to the present invention, compared to the spread of magnetic flux generated by the coil of the eddy current rangefinder, even when the change in shape of the conductor as the object to be measured cannot be ignored, the wave height in the change in shape of the conductor can be accurately determined. Can be measured.

It is a schematic diagram which shows an example of schematic structure of the measuring apparatus which concerns on the 1st Embodiment of this invention. It is a flowchart which shows an example of the process sequence of the measuring method by the measuring apparatus which concerns on the 1st Embodiment of this invention. It is a flowchart which shows an example of the acquisition procedure of the calibration data by the measuring apparatus which concerns on the 1st Embodiment of this invention. It is a flowchart which shows an example of the preparation procedure of the distance calibration curve by the measuring apparatus which concerns on the 1st Embodiment of this invention. It is a flowchart which shows an example of the preparation procedure of the wave height calibration curve group by the measuring apparatus which concerns on the 1st Embodiment of this invention. It is a schematic diagram which shows an example of schematic structure of the measuring apparatus which concerns on the 2nd Embodiment of this invention. It is a schematic diagram which shows an example of schematic structure of the measuring apparatus which concerns on the 3rd Embodiment of this invention. It is a flowchart which shows an example of the acquisition procedure of the calibration data by the measuring apparatus which concerns on the 3rd Embodiment of this invention. It is a figure which shows the test piece of the conductor used in the Example of this invention. FIG. 8 is a graph illustrating a relationship between a distance from a coil disposed at a position above the node illustrated in FIG. 7 to the node and a node inductance that is an inductance of the coil according to the embodiment of the present invention. . FIG. 7 shows an example of the present invention, and plots the relationship between the wave height and the valley-to-valley inductance difference when the distance from the coil arranged at the position above the node shown in FIG. 7 to the node is set to 35 mm, 40 mm, and 45 mm. FIG. FIG. 7 shows an embodiment of the present invention, and h and the coefficient b2 (h (h)) in the range of 35 mm to 45 mm with respect to the distance h from the coil arranged at the position above the node shown in FIG. j)), b1 (h (j)), and b0 (h (j)) are plots representing the relationship, and the results of approximating these plots with a polynomial by the least square method. For the test piece having wave heights WH (1) = 0 mm, WH (2) = 10 mm, and WH (3) = 20 mm shown in FIG. 9, the coil is arranged from the coil disposed at a position above the node shown in FIG. It is a figure which shows the matching result of the setting value regarding the distance to, and the calculated measured value. FIG. 7 shows an embodiment of the present invention, and shows a set value and a calculated measurement value relating to the wave height when the distance from the coil arranged at a position above the node shown in FIG. 7 to the node is 35 mm, 40 mm, and 45 mm. It is a figure which shows the matching result. It is a figure which shows an example of arrangement | positioning of the coil applicable to the Example of this invention.

  Hereinafter, embodiments (embodiments) for carrying out the present invention will be described with reference to the drawings.

(First embodiment)
First, a first embodiment of the present invention will be described.

<Schematic configuration of measuring device>
FIG. 1 is a schematic diagram illustrating an example of a schematic configuration of a measurement apparatus 100-1 according to the first embodiment of the present invention. The measuring apparatus 100-1 according to the present embodiment has a corrugated surface 210, and the positions of the corrugated peaks 211, valleys 212, and nodes 213 in the X direction (horizontal direction) are known. This is an apparatus for measuring the wave height WH, which is the height difference between the peak portion 211 and the valley portion 212 in the Z direction (vertical direction) of the conductor 200. Note that the node portion 213 of the conductor 200 refers to an intermediate portion between the peak portion 211 and the valley portion 212 in the X direction (horizontal direction).

  As shown in FIG. 1, the measurement apparatus 100-1 according to the present embodiment includes a first coil 111, a second coil 112, a third coil 113, a first LCR meter 121, a second LCR meter 122, a third LCR meter 123, and a scanning. A control device 131, a scanning mechanism 132, a processing / control device 140, an input device 150, and an output device 160 are configured.

The first coil 111 is a peak coil that is fixedly disposed at a position above the peak 211 in the wave shape of the surface 210 of the conductor 200.
The second coil 112 is a trough coil that is fixedly disposed at a position above the trough 212 in the wave shape of the surface 210 of the conductor 200.
The third coil 113 is a node coil fixedly disposed at a position above the node 213 in the wave shape of the surface 210 of the conductor 200.
The first coil 111, the second coil 112, and the third coil 113 are installed at predetermined positions inside the casing. That is, the first coil 111, the second coil 112, and the third coil 113 are fixed inside the housing so that the relative positions do not change. In addition, the housing is assumed to be disposed at a position that does not contact the conductor 200 in consideration of the predicted wave height WH and the movable range of the conductor 200 under the control of the scanning control device 131.

  Here, it is desirable that the first coil 111 and the second coil 112 have the same shape and the same number of turns. Further, it is desirable that the distance in the Z direction (vertical direction) from the node portion 213 to the first coil 111 and the distance in the Z direction (vertical direction) from the node portion 213 to the second coil 112 should be approximately the same. The third coil 113 may be different in shape and number of turns from the first coil 111 and the second coil 112. The distance in the Z direction (vertical direction) from the node portion 213 to the third coil 113 is the distance in the Z direction (vertical direction) from the node portion 213 to the first coil 111 or the distance from the node portion 213 to the second coil 112. It may be different from the distance in the direction (vertical direction).

The first LCR meter 121 is a peak inductance measuring unit that measures the inductance of the first coil (peak coil) 111 based on the control of the processing / control device 140.
The second LCR meter 122 is a trough inductance measuring unit that measures the inductance of the second coil (valley coil) 112 based on the control of the processing / control device 140.
The third LCR meter 123 is a node inductance measuring unit that measures the inductance of the third coil (node coil) 113 based on the control of the processing / control device 140.
Here, if the plurality of coils 111 to 113 are simultaneously oscillated, mutual interference occurs in which the inductance of each coil fluctuates with time. Therefore, the processing / control device 140 oscillates coils other than the coil for measuring the inductance. Each LCR meter 121-123 is controlled so that it may not be made.

The scanning control device 131 is a case mechanically connected to the scanning mechanism 132 based on the control of the processing / control device 140 (including the first coil 111, the second coil 112, and the third coil 113 inside). Is controlled to scan in the Z direction (vertical direction).
The scanning mechanism 132 includes a mechanically connected housing (including the first coil 111, the second coil 112, and the third coil 113 inside) based on the control of the scanning control device 131 in the Z direction (vertical direction). ).

  The processing / control apparatus 140 comprehensively controls various processes in the measuring apparatus 100-1 and operations in the measuring apparatus 100-1. As shown in FIG. 1, the processing / control device 140 includes a distance calibration curve storage unit 141, a wave height calibration curve group storage unit 142, a node inductance acquisition unit 143, a distance calculation unit 144, and a wave height calibration curve acquisition unit 145. A peak inductance acquisition unit 146, a valley inductance acquisition unit 147, an inductance difference calculation unit 148, and a wave height calculation unit 149.

  The distance calibration curve storage unit 141 shows the relationship between the inductance of the third coil 113 arranged at a position above the node part 213 in the Z direction (vertical direction) and the distance from the third coil 113 to the node part 213. The distance calibration curve shown is stored.

  The wave height calibration curve group storage unit 142 has an inductance of the second coil 112 arranged at a position above the valley 212 in the Z direction (vertical direction) and a position above the peak 211 in the Z direction (vertical direction). A wave height calibration curve showing a relationship between an inductance difference which is a difference from the inductance of the first coil 111 arranged and a wave height WH which is a height difference between the peak portion 211 and the valley portion 212 in the Z direction (vertical direction). Is stored for each of the plurality of distances (distance from the third coil 113 to the node portion 213).

  The node inductance acquisition unit 143 acquires the inductance of the third coil 113 disposed at a position above the node 213. Specifically, the node inductance acquiring unit 143 acquires the inductance measured by the third LCR meter (node inductance measuring means) 123.

  The distance calculation unit 144 uses a distance calibration curve stored in the distance calibration curve storage unit 141 to calculate a third value arranged at a position above the node 213 from the inductance acquired by the node inductance acquisition unit 143. The distance from the coil 113 to the node portion 213 is calculated.

  The wave height calibration curve acquisition unit 145 acquires a wave height calibration curve corresponding to the distance calculated by the distance calculation unit 144 from the wave height calibration curve group stored in the wave height calibration curve group storage unit 142. .

  The peak inductance acquisition unit 146 acquires the inductance of the first coil 111 disposed at a position above the peak 211. Specifically, the peak inductance acquisition unit 146 acquires the inductance measured by the first LCR meter (peak peak inductance measuring means) 121.

  The valley inductance acquisition unit 147 acquires the inductance of the second coil 112 disposed at a position above the valley 212. Specifically, the valley inductance acquisition unit 147 includes a second LCR meter (valley inductance measurement means). ) Obtain the inductance measured at 122.

  The inductance difference calculation unit 148 calculates an inductance difference that is a difference between the inductance acquired by the valley inductance acquisition unit 147 and the inductance acquired by the peak inductance acquisition unit 146.

  The wave height calculation unit 149 uses the wave height calibration curve acquired by the wave height calibration curve acquisition unit 145 to calculate the peak 211 in the Z direction (vertical direction) from the inductance difference calculated by the inductance difference calculation unit 148. The wave height WH, which is the height difference from the valley 212, is calculated.

  The input device 150 is a device that inputs various types of information to the processing / control device 140. For example, the input device 150 inputs information related to a distance calibration curve stored in the distance calibration curve storage unit 141, or inputs information related to a wave height calibration curve group stored in the wave height calibration curve group storage unit 142. To do. The input device 150 also provides the processing / control device 140 with information related to the measurement timing of the wave height WH, information related to the timing at which the scanning control device 131 scans the housing in the Z direction (vertical direction), and the like. input.

  The output device 160 is a device that outputs various types of information from the processing / control device 140. For example, the output device 160 displays and outputs information related to the wave height WH calculated by the wave height calculation unit 149, or transmits information related to the wave height WH calculated by the wave height calculation unit 149 to an external device. Or output.

<Measurement procedure with measuring device>
FIG. 2 is a flowchart showing an example of the processing procedure of the measuring method by the measuring apparatus 100-1 according to the first embodiment of the present invention. At the time of starting the processing of this flowchart, the above-described distance calibration curve is already stored in the distance calibration curve storage unit 141, and the above-described wave height calibration curve group is stored in the wave height calibration curve group storage unit 142. It shall be.

  First, in step S <b> 101, the node inductance obtaining unit 143 obtains the inductance L <b> 3 of the third coil 113 disposed at a position above the node 213. Specifically, in this embodiment, the node inductance obtaining unit 143 obtains the inductance L3 measured by the third LCR meter 123.

  Subsequently, in step S102, the distance calculation unit 144 arranges the distance calibration curve stored in the distance calibration curve storage unit 141 at a position above the node 213 from the inductance L3 acquired in step S101. A distance h from the third coil 113 to the node 213 is calculated. Specifically, in the present embodiment, the distance calculation unit 144 substitutes the inductance L3 acquired in step S101 into a distance calibration curve L3 = F (h), which will be described later with reference to FIG. 4, and L3 = F (h ) Is regarded as an equation relating to the unknown h, and a distance h in the Z direction (vertical direction) from the third coil 113 disposed at a position above the node 213 to the node 213 is calculated.

  Subsequently, in step S103, the wave height calibration curve acquisition unit 145 selects the wave height corresponding to the distance h calculated in step S102 from the wave height calibration curve group stored in the wave height calibration curve group storage unit 142. Get a calibration curve. Specifically, in the present embodiment, the wave height calibration curve acquisition unit 145 substitutes the distance h calculated in step S102 for a wave height calibration curve group ΔL = G (h, WH), which will be described later with reference to FIG. Then, a wave height calibration curve ΔL = G (h, WH) when the distance from the third coil 113 to the node portion 213 is h is acquired. Here, h in the wave height calibration curve ΔL = G (h, WH) is a known value.

  Subsequently, in step S <b> 104, the peak inductance acquisition unit 146 acquires the inductance L <b> 1 of the first coil 111 disposed at a position above the peak 211. Specifically, in the present embodiment, the peak inductance acquisition unit 146 acquires the inductance L <b> 1 measured by the first LCR meter 121.

  Subsequently, in step S105, the valley inductance acquisition unit 147 acquires the inductance L2 of the second coil 112 disposed at a position above the valley 212. Specifically, in this embodiment, the valley inductance acquisition is performed. The unit 147 acquires the inductance L <b> 2 measured by the second LCR meter 122.

  Subsequently, in step S106, the inductance difference calculation unit 148 calculates an inductance difference ΔL = L2−L1 which is a difference between the inductance L2 acquired in step S105 and the inductance L1 acquired in step S104.

  Subsequently, in step S107, the wave height calculation unit 149 uses the wave height calibration curve acquired in step S103 to calculate the peak portion 211 in the Z direction (vertical direction) from the inductance difference ΔL calculated in step S106. The wave height WH, which is the height difference from the valley 212, is calculated. Specifically, in the present embodiment, the wave height calculation unit 149 substitutes the inductance difference ΔL calculated in step S106 for the wave height calibration curve ΔL = G (h, WH) acquired in step S103, and ΔL = G (h, WH) is regarded as an equation relating to the unknown WH and solved to calculate the wave height WH.

  Thereafter, the processing / control device 140 causes the output device 160 to display information related to the wave height WH calculated in step S107, or to transmit information related to the wave height WH calculated in step S107 to an external device. To do. Then, when this series of processing ends, the processing of the flowchart shown in FIG. 2 ends.

<Procedure for obtaining calibration data>
Next, in the first embodiment, the calibration used when creating the distance calibration curve stored in the distance calibration curve storage unit 141 and the wave height calibration curve group stored in the wave height calibration curve group storage unit 142. A data acquisition procedure will be described.

  As a configuration for acquiring the calibration data, the measuring apparatus 100-1 according to the present embodiment has a housing containing the first coil 111, the second coil 112, and the third coil 113 in the Z direction (vertical direction). ) Is provided with a scanning control device 131 and a scanning mechanism 132. Then, the processing / control device 140 controls the scanning control device 131 to position the casings at predetermined positions in the Z direction (vertical direction) and to set the inductances of the coils 111 to 113 to the LCR meters 121 to 113, respectively. 123, and these are stored together with the distance from the third coil 113 to the node portion 213 to obtain calibration data.

FIG. 3 is a flowchart showing an example of a calibration data acquisition procedure by the measuring apparatus 100-1 according to the first embodiment of the present invention.
When starting the processing of the flowchart of FIG. 3, N test pieces for preparing calibration data are prepared. Further, the distance in the Z direction (vertical direction) from the third coil 113 to the node portion 213 is such that the starting distance is hs, and the inductance is measured at a distance of M (i) points in increments of Δh. In the flowchart of FIG. 3, the number of measurement points of the test piece having a wave height of WH (i) is M (i). This is a distance range in which data can be collected depending on the wave height of the test piece. This is because there is a possibility of different.

  First, when a test piece having a wave height of WH (i) is arranged, in step S201, the processing / control device 140 adds i = 1, 2,..., I to a subscript for identifying the test piece. N is sequentially set.

  Subsequently, in step S202, the processing / control device 140 sets the distance from the third coil 113 arranged at a position above the node 213 to the node 213 to h (j) = hs + Δh · (j−1). Set. At this time, the processing / control device 140 sequentially sets j = 1, 2,..., M (i) to j, which is a subscript for identifying the distance.

  Subsequently, in step S203, the node inductance obtaining unit 143 obtains the inductance L3 (j) of the third coil 113 arranged at a position above the node 213. Specifically, in this embodiment, the node inductance acquisition unit 143 acquires the inductance L3 (j) measured by the third LCR meter 123.

  Subsequently, in step S <b> 204, the peak inductance acquisition unit 146 acquires the inductance L <b> 1 (j) of the first coil 111 disposed at a position above the peak 211. Specifically, in the present embodiment, the peak inductance acquisition unit 146 acquires the inductance L1 (j) measured by the first LCR meter 121.

  Subsequently, in step S205, the trough inductance acquisition unit 147 acquires the inductance L2 (j) of the second coil 112 disposed at a position above the trough 212. Specifically, in this embodiment, the trough inductance acquisition unit 147 The partial inductance acquisition unit 147 acquires the inductance L2 (j) measured by the second LCR meter 122.

  Subsequently, in step S206, the processing / control device 140 associates the distance h (j) set in step S202 with the distance h (j) and the inductance L3 (j) acquired in step S203. The inductance L1 (j) acquired in S204 and the inductance L2 (j) acquired in step S205 are added to the data acquired so far and stored in a memory (not shown) as calibration data.

  Subsequently, in step S207, the processing / control apparatus 140 changes j by adding 1 to j, which is a subscript for identifying the distance, and whether or not j after the change is larger than M (i). Determine whether. As a result of this determination, if j after the change is not larger than M (i) (S207 / NO), the process returns to step S202, and the processes after step S202 are performed for the j after the change.

On the other hand, as a result of the determination in step S207, if j after the change is larger than M (i) (S207 / YES), the process proceeds to step S208. Here, the process proceeds to step S208 when the processes of steps S202 to S206 are repeated M (i) times.
In step S208, the processing / control apparatus 140 ends the calibration data acquisition process for the test piece having the wave height WH (i).

  Subsequently, in step S209, the processing / control apparatus 140 adds 1 to i, which is a subscript for identifying the test piece, to change i, and whether or not i after the change is larger than N. to decide. As a result of this determination, if i after the change is not greater than N (S209 / NO), the process returns to step S201, and the processes after step S201 are performed for the i after the change.

On the other hand, if i after the change is larger than N as a result of the determination in step S209 (S209 / YES), the process proceeds to step S210. Here, the process proceeds to step S210 when the processes of steps S201 to S208 are repeated N times.
In step S210, the processing / control apparatus 140 ends the calibration data acquisition process for all the test pieces.

<Procedure for creating a distance calibration curve>
Next, a procedure for creating a distance calibration curve stored in the distance calibration curve storage unit 141 using the calibration data acquired by the processing of the flowchart shown in FIG. 3 will be described.

  FIG. 4 is a flowchart showing an example of a procedure for creating a distance calibration curve by the measuring apparatus 100-1 according to the first embodiment of the present invention.

  First, in step S401, the processing / control device 140 determines the distance h (from the coil arranged at a position above the node 213 to the node 213 from the calibration data of the test piece having the wave height WH (i). j), M (i) sets of calibration data (h (j), L3 (j)) (j = 1, 2,... in the range from hs to he = hs + Δh · (M (i) −1). , M (i)). At this time, the processing / control device 140 sequentially sets i = 1, 2,..., N to i, which is a subscript for identifying the test piece.

  Subsequently, in step S402, the processing / control apparatus 140 first sets L3 = as a function form representing the relationship between the distance h and the coil inductance L3 at the node 213 for the test piece having the wave height WH (i). Assume Fi (h). Next, the processing / control apparatus 140 is based on the M (i) sets of calibration data (h (j), L3 (j)) (j = 1, 2,..., M (i)) acquired in step S401. Then, a coefficient that determines the function Fi (h) is obtained by using a function approximation optimization method such as a least square method.

  Subsequently, in step S403, the processing / control device 140 adds 1 to i, which is a subscript for identifying the test piece, to change i, and whether or not i after the change is larger than N. to decide. As a result of this determination, if i after the change is not greater than N (S403 / NO), the process returns to step S401, and the processes after step S401 are performed for the i after the change.

On the other hand, if i after the change is larger than N as a result of the determination in step S403 (S403 / YES), the process proceeds to step S404. Here, the process proceeds to step S404 when the processes of steps S401 to S402 are repeatedly performed N times to obtain a function Fi (h) (i = 1, 2,..., N).
In step S404, the processing / control apparatus 140 determines the average F (h) = ΣFi (h) / N = (F1 (h)) of the obtained functions Fi (h) (i = 1, 2,..., N). + F2 (h) +... + FN (h)) / N is calculated as a distance calibration curve L3 = F (h). Thereafter, the processing / control apparatus 140 performs processing for storing the calculated distance calibration curve L3 = F (h) in the distance calibration curve storage unit 141.

<Procedure for creating wave height calibration curve group>
Next, a procedure for creating a wave height calibration curve group stored in the wave height calibration curve group storage unit 142 using the calibration data acquired by the processing of the flowchart shown in FIG. 3 will be described.

  FIG. 5 is a flowchart showing an example of a procedure for creating a wave height calibration curve group by the measuring apparatus 100-1 according to the first embodiment of the present invention.

  First, in step S501, the processing / control device 140, based on the calibration data, the inductance difference ΔL (i) = L2 (i) = L2 (i) −L1 (i) (i = 1, 2) at the distance h (j). ,..., N) are calculated for all wave heights WH (i), and N sets of data (WH (i), ΔL (i)) (i = 1, 2,..., N) are acquired. At this time, the processing / control apparatus 140 sequentially sets j = 1, 2,..., M2 to j, which is a subscript for identifying the distance.

  Subsequently, in step S502, the processing / control apparatus 140 first assumes ΔL = Gj (WH) as a function form representing the relationship between the wave height WH and the inductance difference ΔL of the valley at the distance h (j). To do. Next, the processing / control apparatus 140 uses the least square method or the like based on the N sets of data (WH (i), ΔL (i)) (i = 1, 2,..., N) acquired in step S501. A function Gj (WH) is obtained using a function approximation optimization technique.

  Subsequently, in step S503, the processing / control apparatus 140 changes j by adding 1 to j, which is a subscript for identifying the distance, and determines whether j after the change is larger than M2. To do. As a result of this determination, if j after the change is not larger than M2 (S503 / NO), the process returns to step S501, and the processes after step S501 are performed for the j after the change.

On the other hand, as a result of the determination in step S503, if j after the change is larger than M2 (S503 / YES), the process proceeds to step S504. Here, when the process proceeds to step S504, the processes of steps S501 to S502 are repeated M2 times, and the function Gj (WH) (j = 1, 2,..., M2) is obtained for all the distances h (j). Is the case.
In step S504, the processing / control apparatus 140 acquires a coefficient bs (h (j)) that determines the obtained function Gj (WH). At this time, the processing / control device 140 sequentially sets s = 0, 1, 2,..., Ns to s of the coefficient bs.

  Subsequently, in step S505, the processing / control apparatus 140 first assumes bs (h) as a function form for the coefficients. Next, the processing / control apparatus 140 performs the minimum two based on the M2 sets of data (h (j), bs (h (j))) (j = 1, 2,..., M2) acquired in step S504. The function bs (h) is obtained using a function approximation optimization method such as multiplication.

  Subsequently, in step S506, the processing / control apparatus 140 adds 1 to s to change s, and determines whether s after the change is larger than ns. If the result of this determination is that s after the change is not greater than ns (S506 / NO), the process returns to step S504, and the processes after step S504 are performed for the s after the change.

On the other hand, as a result of the determination in step S506, if s after the change is larger than ns (S506 / YES), the process proceeds to step S507. Here, the process proceeds to step S507 when the processes of steps S504 to S505 are repeated ns + 1 times.
In step S507, the processing / control apparatus 140 completes the function approximation for all the coefficients bs (h) (s = 0, 1, 2,..., Ns), and the wave height calibration curve group ΔL = G ( h, WH). Thereafter, the processing / control device 140 performs processing for storing the calculated wave height calibration curve group ΔL = G (h, WH) in the wave height calibration curve group storage unit 142.

  According to the measuring apparatus 100-1 according to the first embodiment described above, the distance from the third coil 113 arranged at the position above the node 213 to the node 213 is calculated, and the wave height calibration curve group is calculated. Since the wave height calibration curve corresponding to the calculated distance is acquired from the group of wave height calibration curves stored in the storage unit 142, the wave height WH is calculated using the acquired wave height calibration curve. Compared with the spread of the magnetic flux produced by the coil of the eddy current rangefinder, even when the change in shape of the conductor being measured cannot be ignored, the wave height in the change in shape of the conductor can be accurately measured. .

  For example, if the wave height WH is quantified using a wave height calibration curve with a constant distance from the coil arranged at a position above the node 213 to the node 213, the measurement error increases and the wave height is accurately measured. It becomes difficult to measure well. For this reason, in the present embodiment, the distance from the coil arranged at a position above the node 213 to the node 213 is calculated, and the wave height calibration curve is changed according to the calculated distance to quantify the wave height WH. Like to do.

(Second Embodiment)
Next, a second embodiment of the present invention will be described.

<Schematic configuration of measuring device>
FIG. 6 is a schematic diagram illustrating an example of a schematic configuration of a measurement apparatus 100-2 according to the second embodiment of the present invention. In FIG. 6, the same reference numerals are given to the same configuration as the schematic configuration of the measuring apparatus 100-1 according to the first embodiment shown in FIG. 1, and the detailed description thereof is omitted. Further, in the following description of the schematic configuration of the measurement apparatus 100-2 according to the second embodiment, a different part from the schematic configuration of the measurement apparatus 100-1 according to the first embodiment shown in FIG. 1 will be described.

  As shown in FIG. 6, the measuring apparatus 100-2 according to the present embodiment includes a first coil 111, a second coil 112, a third coil 113, an LCR meter 120, a scanning control device 131, a scanning mechanism 132, and processing / control. The apparatus 140 includes an apparatus 140, an input apparatus 150, an output apparatus 160, and a signal switching apparatus 170.

  The arrangement, shape, and number of turns of the first coil 111, the second coil 112, and the third coil 113 in the present embodiment, as well as a housing that houses the first coil 111, the second coil 112, and the third coil 113. The conditions for the arrangement are the same as those of the measurement apparatus 100-1 according to the first embodiment described above.

  In the present embodiment, the LCR meter 120 includes the inductance of the first coil 111 that is fixedly disposed at a position above the peak portion 211 and the second coil 112 that is fixedly disposed at a position above the valley portion 212. And an inductance measuring means for measuring the inductance of the third coil 113 fixedly disposed at a position above the node portion 213.

  Based on the control of the processing / control device 140, the signal switching device 170 switches the first coil 111, the second coil 112, and the third coil 113 to the LCR meter 120 with a relay switch, etc. It is the switching means to make it connect. The signal switching device 170 electrically connects only one of the first coil 111, the second coil 112, and the third coil 113 to the LCR meter 120.

The node inductance acquisition unit 143 acquires the inductance measured by the LCR meter 120 when the third coil 113 is electrically connected to the LCR meter 120 by the signal switching device 170.
The peak inductance acquisition unit 146 acquires the inductance measured by the LCR meter 120 when the first coil 111 is electrically connected to the LCR meter 120 by the signal switching device 170.
The valley inductance acquisition unit 147 acquires the inductance measured by the LCR meter 120 when the second coil 112 is electrically connected to the LCR meter 120 by the signal switching device 170.

  The other configuration of the measurement apparatus 100-2 according to the second embodiment shown in FIG. 6 is the same as that of the measurement apparatus 100-1 according to the first embodiment shown in FIG.

<Measurement procedure with measuring device>
Next, the procedure of the measurement method performed by the measurement apparatus 100-2 according to the second embodiment will be described. An example of the processing procedure of the measuring method by the measuring apparatus 100-2 according to the second embodiment is the same as that in FIG. In the following description of the measurement method using the measurement apparatus 100-2 according to the second embodiment, portions different from the measurement method using the measurement apparatus 100-1 according to the first embodiment will be described.

  First, in step S101, the node inductance acquisition unit 143 acquires the inductance L3 measured by the LCR meter 120 when the third coil 113 is electrically connected to the LCR meter 120 by the signal switching device 170. To do.

  Subsequently, in step S102, the same processing as that of the first embodiment is performed, and the distance h from the third coil 113 arranged at the position above the node 213 to the node 213 is calculated.

  Subsequently, in step S103, the same processing as in the first embodiment is performed, and the distance h calculated in step S102 from the wave height calibration curve group stored in the wave height calibration curve group storage unit 142 is calculated. A wave height calibration curve corresponding to is obtained.

  Subsequently, in step S <b> 104, the peak inductance acquisition unit 146 obtains the inductance L <b> 1 measured by the LCR meter 120 when the first coil 111 is electrically connected to the LCR meter 120 by the signal switching device 170. get.

  Subsequently, in step S <b> 105, the valley inductance acquisition unit 147 uses the inductance L <b> 2 measured by the LCR meter 120 when the second coil 112 is electrically connected to the LCR meter 120 by the signal switching device 170. get.

  Subsequently, in step S106, processing similar to that of the first embodiment is performed to calculate an inductance difference ΔL = L2−L1.

  Subsequently, in step S107, the same processing as in the first embodiment is performed, and the Z-direction (vertical direction) is calculated from the inductance difference ΔL calculated in step S106 using the wave height calibration curve acquired in step S103. ) To calculate the wave height WH which is the height difference between the peak portion 211 and the valley portion 212.

  Thereafter, the processing / control device 140 causes the output device 160 to display information related to the wave height WH calculated in step S107, or to transmit information related to the wave height WH calculated in step S107 to an external device. To do. Then, when this series of processing ends, the processing of the flowchart shown in FIG. 2 ends.

<Procedure for obtaining calibration data>
Next, in the second embodiment, the calibration used when creating the distance calibration curve stored in the distance calibration curve storage unit 141 and the wave height calibration curve group stored in the wave height calibration curve group storage unit 142. A data acquisition procedure will be described.

  Note that the measuring apparatus 100-2 according to the present embodiment has a housing for housing the first coil 111, the second coil 112, and the third coil 113 in the Z direction (vertical direction) as a configuration for acquiring the calibration data. ) Is provided with a scanning control device 131 and a scanning mechanism 132. Then, the processing / control device 140 controls the scanning control device 131 to acquire the inductances of the coils 111 to 113 from the LCR meter 120 while positioning the casing at a predetermined position in the Z direction (vertical direction). These are stored together with the distance from the third coil 113 to the node portion 213 to obtain calibration data.

  An example of the calibration data acquisition procedure by the measuring apparatus 100-2 according to the second embodiment is the same as that shown in FIG. In the following description of the calibration data acquisition process performed by the measurement apparatus 100-2 according to the second embodiment, a different part from the calibration data acquisition process performed by the measurement apparatus 100-1 according to the first embodiment will be described.

  First, in step S201, i = 1, 2,..., N are sequentially set to i, which is a subscript for identifying a test piece, by performing the same processing as in the first embodiment.

  Subsequently, in step S202, the same processing as that of the first embodiment is performed, and the distance from the third coil 113 arranged at the position above the node portion 213 to the node portion 213 is set to h (j) = hs + Δh · Set to (j-1). At this time, the processing / control device 140 sequentially sets j = 1, 2,..., M (i) to j, which is a subscript for identifying the distance.

  Subsequently, in step S203, the node inductance obtaining unit 143 determines the inductance L3 (measured by the LCR meter 120 when the third coil 113 is electrically connected to the LCR meter 120 by the signal switching device 170. j).

  Subsequently, in step S <b> 204, the peak inductance acquisition unit 146 uses the inductance L <b> 1 (measured by the LCR meter 120 when the first coil 111 is electrically connected to the LCR meter 120 by the signal switching device 170. j).

  Subsequently, in step S <b> 205, the valley inductance acquisition unit 147 detects the inductance L <b> 2 (measured by the LCR meter 120 when the second coil 112 is electrically connected to the LCR meter 120 by the signal switching device 170. j).

  Subsequently, in step S206, the same processing as that of the first embodiment is performed, and the inductance acquired in step S203 is associated with the distance h (j) set in step S202 and the distance h (j). L3 (j), the inductance L1 (j) acquired in step S204, and the inductance L2 (j) acquired in step S205 are added to the data acquired so far and are not shown as calibration data. Save to memory.

  Subsequently, in step S207, the same processing as in the first embodiment is performed to add 1 to j, which is a subscript for identifying the distance, to change j, and the changed j becomes M (i ) Or greater. As a result of this determination, if j after the change is not larger than M (i) (S207 / NO), the process returns to step S202, and the processes after step S202 are performed for the j after the change.

On the other hand, as a result of the determination in step S207, if j after the change is larger than M (i) (S207 / YES), the process proceeds to step S208. Here, the process proceeds to step S208 when the processes of steps S202 to S206 are repeated M (i) times.
In step S208, processing similar to that in the first embodiment is performed, and the calibration data acquisition processing for the test piece having the wave height WH (i) is terminated.

  Subsequently, in step S209, the same processing as that of the first embodiment is performed, and 1 is added to i, which is a subscript for identifying the test piece, to change i. It is judged whether it is also large. As a result of this determination, if i after the change is not greater than N (S209 / NO), the process returns to step S201, and the processes after step S201 are performed for the i after the change.

On the other hand, if i after the change is larger than N as a result of the determination in step S209 (S209 / YES), the process proceeds to step S210. Here, the process proceeds to step S210 when the processes of steps S201 to S208 are repeated N times.
In step S210, the same processing as in the first embodiment is performed, and the calibration data acquisition processing for all the test pieces is completed.

<Procedure for creating a distance calibration curve>
Next, a procedure for creating a distance calibration curve stored in the distance calibration curve storage unit 141 using the calibration data acquired by the processing of the flowchart shown in FIG. 3 will be described.

  An example of a procedure for creating a distance calibration curve by the measuring apparatus 100-2 according to the second embodiment is the same as an example of a procedure for creating a distance calibration curve by the measuring apparatus 100-1 according to the first embodiment shown in FIG. It is. That is, also in the second embodiment, since the distance calibration curve stored in the distance calibration curve storage unit 141 is created by performing the processing of the flowchart shown in FIG.

<Procedure for creating wave height calibration curve group>
Next, a procedure for creating a wave height calibration curve group stored in the wave height calibration curve group storage unit 142 using the calibration data acquired by the processing of the flowchart shown in FIG. 3 will be described.

  An example of a procedure for creating a wave height calibration curve group by the measurement apparatus 100-2 according to the second embodiment is a procedure for creating a wave height calibration curve group by the measurement apparatus 100-1 according to the first embodiment shown in FIG. This is the same as the example. That is, also in the second embodiment, since the processing of the flowchart shown in FIG. 5 is performed to create the wave height calibration curve group stored in the wave height calibration curve group storage unit 142, detailed description thereof is omitted.

  According to the measuring apparatus 100-2 according to the second embodiment described above, the distance from the third coil 113 arranged at a position above the node 213 to the node 213 is calculated, and the wave height calibration curve group is calculated. Since the wave height calibration curve corresponding to the calculated distance is acquired from the group of wave height calibration curves stored in the storage unit 142, the wave height WH is calculated using the acquired wave height calibration curve. Compared with the spread of the magnetic flux produced by the coil of the eddy current rangefinder, even when the change in shape of the conductor being measured cannot be ignored, the wave height in the change in shape of the conductor can be accurately measured. .

(Third embodiment)
Next, a third embodiment of the present invention will be described.

<Schematic configuration of measuring device>
FIG. 7 is a schematic diagram illustrating an example of a schematic configuration of a measuring apparatus 100-3 according to the third embodiment of the present invention. In FIG. 7, the same reference numerals are given to the same configuration as the schematic configuration of the measurement apparatus 100-1 according to the first embodiment shown in FIG. 1, and the detailed description thereof is omitted. Further, in the following description of the schematic configuration of the measurement apparatus 100-3 according to the third embodiment, a different part from the schematic configuration of the measurement apparatus 100-1 according to the first embodiment shown in FIG. 1 will be described.

  As shown in FIG. 7, the measurement apparatus 100-3 according to the present embodiment includes a coil 110, an LCR meter 120, a scanning control device 133, a scanning mechanism 134, a processing / control device 140, an input device 150, and an output device 160. It is comprised.

  In the present embodiment, only one coil 110 is provided, and this one coil 110 is installed at a predetermined position inside the casing. It is assumed that the casing is disposed at a position where it does not contact the conductor 200 in consideration of the predicted wave height WH and the movable range of the conductor 200 under the control of the scanning control device 133. The housing is supported by the scanning mechanism 134.

Based on the control of the processing / control device 140, the scanning control device 133 includes a housing (including the coil 110) mechanically connected to the scanning mechanism 134 in the X direction (horizontal direction) and the Z direction (vertical). Direction).
The scanning mechanism 134 scans the mechanically connected housing (including the coil 110) in the X direction (horizontal direction) and the Z direction (vertical direction) based on the control of the scanning control device 133.

  Specifically, for example, when measuring the wave height WH, the scanning control device 133 uses a housing (including the coil 110) mechanically connected to the scanning mechanism 134 in the X direction (horizontal direction). And a control is performed to scan one coil 110 at a position 111a above the peak 211, a position 112a above the valley 212, and a position 113a above the node 213. For example, when acquiring the calibration data, the scanning control device 133 includes a housing (including the coil 110) mechanically connected to the scanning mechanism 134 in the X direction (horizontal direction) and the Z direction. Control to scan in the (vertical direction) is performed.

  In the present embodiment, the LCR meter 120 is an inductance measuring unit that measures the inductance of the coil 110.

The node inductance acquisition unit 143 is measured by the LCR meter 120 when one coil 110 is positioned and arranged at a position 113 a above the node 213 by the scanning unit including the scanning control device 133 and the scanning mechanism 134. Get the inductance.
The peak inductance acquisition unit 146 is measured by the LCR meter 120 when one coil 110 is positioned and arranged at the position 111 a above the peak 211 by the scanning unit including the scanning control device 133 and the scanning mechanism 134. Get the inductance.
The valley inductance acquisition unit 147 is measured by the LCR meter 120 when one coil 110 is positioned and arranged at a position 112 a above the valley 212 by the scanning unit including the scanning control device 133 and the scanning mechanism 134. Get the inductance.

  The other configuration of the measurement apparatus 100-3 according to the third embodiment shown in FIG. 7 is the same as that of the measurement apparatus 100-1 according to the first embodiment shown in FIG.

<Measurement procedure with measuring device>
Next, the procedure of the measurement method performed by the measurement apparatus 100-3 according to the third embodiment will be described. An example of the processing procedure of the measuring method by the measuring apparatus 100-3 according to the third embodiment is the same as that in FIG. In the following description of the measurement method using the measurement apparatus 100-3 according to the third embodiment, parts different from the measurement method using the measurement apparatus 100-1 according to the first embodiment will be described.

  First, in step S101, the node inductance acquisition unit 143 is configured to display the LCR meter when the coil 110 is positioned and disposed at the position 113a above the node 213 by the scanning unit including the scanning control device 133 and the scanning mechanism 134. The inductance L3 measured at 120 is obtained.

  Subsequently, in step S102, the same processing as that in the first embodiment is performed to calculate the distance h from the coil 110 arranged at the position 113a above the node 213 to the node 213.

  Subsequently, in step S103, the same processing as in the first embodiment is performed, and the distance h calculated in step S102 from the wave height calibration curve group stored in the wave height calibration curve group storage unit 142 is calculated. A wave height calibration curve corresponding to is obtained.

  Subsequently, in step S104, the peak inductance acquisition unit 146 determines that the LCR is positioned when the coil 110 is positioned and disposed at the position 111a above the peak 211 by the scanning unit including the scanning control device 133 and the scanning mechanism 134. An inductance L1 measured by the meter 120 is acquired.

  Subsequently, in step S105, the valley inductance acquisition unit 147 determines that the LCR is positioned when the coil 110 is positioned and disposed at the position 112a above the valley 212 by the scanning unit including the scanning control device 133 and the scanning mechanism 134. An inductance L2 measured by the meter 120 is acquired.

  Subsequently, in step S106, processing similar to that of the first embodiment is performed to calculate an inductance difference ΔL = L2−L1.

  Subsequently, in step S107, the same processing as in the first embodiment is performed, and the Z-direction (vertical direction) is calculated from the inductance difference ΔL calculated in step S106 using the wave height calibration curve acquired in step S103. ) To calculate the wave height WH which is the height difference between the peak portion 211 and the valley portion 212.

  Thereafter, the processing / control device 140 causes the output device 160 to display information related to the wave height WH calculated in step S107, or to transmit information related to the wave height WH calculated in step S107 to an external device. To do. Then, when this series of processing ends, the processing of the flowchart shown in FIG. 2 ends.

<Procedure for obtaining calibration data>
Next, in the third embodiment, the calibration used when creating the distance calibration curve stored in the distance calibration curve storage unit 141 and the wave height calibration curve group stored in the wave height calibration curve group storage unit 142. A data acquisition procedure will be described.

  Note that the measuring apparatus 100-3 according to the present embodiment scans the casing containing the coil 110 in the X direction (horizontal direction) and the Z direction (vertical direction) as a configuration for acquiring the calibration data. The scanning control device 133 and the scanning mechanism 134 are provided. Then, the processing / control apparatus 140 controls the scanning control apparatus 133 to position the inductance of the coil 110 in an LCR meter while positioning the casing at a predetermined position in the X direction (horizontal direction) and the Z direction (vertical direction). 120, and these are stored together with the distance from the coil 110 disposed at the position 113a above the node 213 to the node 213, and the calibration data is acquired. More specifically, the processing / control device 140 moves the housing in the Z direction (vertical direction) at each of the position 111a above the peak 211, the position 112a above the valley 212, and the position 113a above the node 213. The inductance of the coil 110 disposed at each of the positions 111a to 113a is acquired from the LCR meter 120 while being positioned at a predetermined distance, and these are obtained from the coil 110 disposed at the position 113a above the node 213. Save with distance to 213 and get calibration data.

FIG. 8 is a flowchart showing an example of a calibration data acquisition procedure by the measuring apparatus 100-3 according to the third embodiment of the present invention.
When starting the process of the flowchart of FIG. 8, N test pieces for preparing calibration data are prepared. The distance in the Z direction (vertical direction) from the coil 110 arranged at the position 113a above the node 213 to the node 213 is the distance of M (i) points in increments of Δh, where hs is the start distance. Inductance shall be measured. In the flowchart of FIG. 8, the number of measurement points of the test piece having a wave height of WH (i) is M (i). This is a distance range in which data can be collected depending on the wave height of the test piece. This is because there is a possibility of different. Further, in the case of the measuring apparatus 100-3 according to the third embodiment, the movement distances to the positions 111a, 112a, and 113a that are positions in the X direction (horizontal direction) are set to the step width Δh in the Z direction (vertical direction). Since the movement is relatively large and takes a long time, calibration data is acquired by assembling a loop of a procedure for scanning in the Z direction (vertical direction) at each position in the X direction (horizontal direction).

  First, when a test piece having a wave height of WH (i) is arranged, in step S301, the processing / control device 140 adds i = 1, 2,..., I to a subscript for identifying the test piece. N is sequentially set.

  Subsequently, in step S <b> 302, the processing / control device 140 performs control to place the coil 110 at the horizontal position k by the scanning unit including the scanning control device 133 and the scanning mechanism 134. At this time, the processing / control apparatus 140 sequentially sets k = 1, 2, 3 to k, which is a subscript for identifying the horizontal position. Here, k = 1 corresponds to the position 111a above the peak portion 211, k = 2 corresponds to the position 112a above the valley portion 212, and k = 3 corresponds to the position 113a above the node portion 213. It shall correspond.

  Subsequently, in step S303, the processing / control device 140 sets h (j) = hs + Δh · (j−1) as the distance from the coil 110 arranged at the position 113a above the node 213 to the node 213. To do. At this time, the processing / control device 140 sequentially sets j = 1, 2,..., M (i) to j, which is a subscript for identifying the distance.

  Subsequently, in step S304, the processing / control device 140 (the node inductance acquisition unit 143, the peak inductance acquisition unit 146, or the valley inductance acquisition unit 147) causes the inductance Lk (of the coil 110 disposed at the horizontal position k ( j) is obtained from the LCR meter 120.

  Subsequently, in step S305, the processing / control device 140 associates the inductance Lk (j) acquired in step S304 with the distance h (j) in association with the distance h (j) set in step S303. In addition to the data acquired so far, it is stored in a memory (not shown) as calibration data.

  Subsequently, in step S306, the processing / control apparatus 140 changes j by adding 1 to j, which is a subscript for identifying the distance, and whether j after the change is larger than M (i) or not. Determine whether. As a result of this determination, if j after the change is not larger than M (i) (S306 / NO), the process returns to step S303, and the processes after step S303 are performed for the j after the change.

On the other hand, as a result of the determination in step S306, if j after the change is larger than M (i) (S306 / YES), the process proceeds to step S307. Here, the process proceeds to step S307 when the processes in steps S303 to S305 are repeated M (i) times.
In step S307, the processing / control apparatus 140 ends the calibration data acquisition process at the horizontal position k.

  Subsequently, in step S308, the processing / control apparatus 140 changes k by adding 1 to k, which is a subscript for identifying the horizontal position, and whether or not k after the change is greater than 3? Judging. As a result of the determination, if the changed k is not larger than 3 (S308 / NO), the process returns to step S302, and the processes after step S302 are performed for the changed k.

On the other hand, if the result of determination in step S308 is that k after the change is greater than 3 (S308 / YES), the process proceeds to step S309. Here, the process proceeds to step S309 when the processes in steps S302 to S307 are repeated three times.
In step S309, the processing / control apparatus 140 ends the calibration data acquisition process for the test piece having the wave height WH (i).

  Subsequently, in step S310, the processing / control apparatus 140 adds 1 to i, which is a subscript for identifying the test piece, to change i, and whether or not i after the change is larger than N. to decide. As a result of this determination, if i after the change is not greater than N (S310 / NO), the process returns to step S301, and the processes after step S301 are performed for the i after the change.

On the other hand, if i after the change is larger than N as a result of the determination in step S310 (S310 / YES), the process proceeds to step S311. Here, the case where the process proceeds to step S311 is a case where the processes of steps S301 to S309 are repeated N times.
In step S311, the processing / control apparatus 140 ends the calibration data acquisition process for all the test pieces.

<Procedure for creating a distance calibration curve>
Next, a procedure for creating a distance calibration curve stored in the distance calibration curve storage unit 141 using the calibration data acquired by the processing of the flowchart shown in FIG. 8 will be described.

  An example of a procedure for creating a distance calibration curve by the measuring apparatus 100-3 according to the third embodiment is the same as an example of a procedure for creating a distance calibration curve by the measuring apparatus 100-1 according to the first embodiment shown in FIG. It is. That is, also in the third embodiment, since the distance calibration curve to be stored in the distance calibration curve storage unit 141 is created by performing the processing of the flowchart shown in FIG.

<Procedure for creating wave height calibration curve group>
Next, a procedure for creating a wave height calibration curve group stored in the wave height calibration curve group storage unit 142 using the calibration data acquired by the processing of the flowchart shown in FIG. 8 will be described.

  An example of a procedure for creating a wave height calibration curve group by the measuring apparatus 100-3 according to the third embodiment is a procedure for creating a wave height calibration curve group by the measuring apparatus 100-1 according to the first embodiment shown in FIG. This is the same as the example. That is, also in the third embodiment, the processing of the flowchart shown in FIG. 5 is performed to create a wave height calibration curve group to be stored in the wave height calibration curve group storage unit 142, and thus detailed description thereof is omitted.

  According to the measuring apparatus 100-3 according to the third embodiment described above, the distance from the coil 110 disposed at the position 113a above the node 213 to the node 213 is calculated, and the wave height calibration curve group storage is performed. Since the wave height calibration curve corresponding to the calculated distance is acquired from the group of wave height calibration curves stored in the unit 142, the wave height WH is calculated using the acquired wave height calibration curve. Compared with the spread of the magnetic flux produced by the coil of the eddy current rangefinder, even when the shape change of the conductor as the object to be measured cannot be ignored, the wave height in the shape change of the conductor can be accurately measured.

[Example]
Next, specific examples based on the above-described embodiment of the present invention will be described.

<Measurement device>
The measurement apparatus 100 used in this example is the measurement apparatus 100-3 according to the third embodiment shown in FIG. It was. In this embodiment, the coil 110 has a copper wire portion with an inner diameter of 30 mm, a length of 10 mm, a number of turns of about 890, and an air core inductance of 28.8 mH. The measurement frequency of the LCR meter 120 was 10 kHz. The scanning mechanism 134 is an XZ automatic stage driven by a stepping motor and having a 1-pulse movement amount of 2 μm.

<Specimen>
FIG. 9 is a diagram showing a test piece of the conductor 200 used in the example of the present invention.
The material of the test piece was nonmagnetic SUS304. The test piece had a minimum thickness from the bottom surface to the valley of 30 mm, a width of 250 mm, and a depth of 150 mm. In addition, the test pieces have wave heights WH of WH (1) = 0 mm (FIG. 9A), WH (2) = 10 mm (FIG. 9B), and WH (3) = 20 mm (FIG. 9), respectively. N = 3 in (c)).

  FIG. 9 shows details of the shape of each test piece. This was originally performed by taking the Z coordinate in the vertical direction with respect to the bottom surface of the test piece, setting the bottom surface portion to Z = 0 as the origin, and taking the X coordinate in the direction parallel to the bottom surface of the test piece (horizontal direction). When the X coordinate of the peak at the center of the piece is X = 0 as the origin, the distance in the horizontal direction from the peak at the center to the valley is X1 = 83 mm, and the minimum thickness is dm = 30 mm, the surface portion of the test piece Is a sinusoidal Z = WH / 2 · (1 + cos (π · X / X1)) + dm, and approximates a trapezoid in mm. In addition, the node part was made into the position of X = 41 mm of the middle vicinity of the peak part X = 0mm and the trough part X = 83mm.

<Acquisition of calibration data>
In the Z direction (vertical direction), the starting position hs = 30 mm of the distance h to the node of the test piece was set in the range of Δh = 0.1 mm and the end position he = 50 mm.

  For test pieces with WH (1) = 0 mm and WH (2) = 10 mm, the data score is M (1) = M (2) = 201 points, and the end position of the distance h to the nodal part of the test piece is he. = 50 mm. For the test piece with WH (3) = 20 mm, the number of data points is M (3) = 172 points due to the limitation of the scanning range, and the end position of the distance h to the node of the test piece is he = 47.1 mm. Set to. In this embodiment, the scanning mechanism 134 is scanned according to the calibration data acquisition procedure shown in FIG. 8 to acquire calibration data.

<Create distance calibration curve>
With respect to three test pieces having WH (1) = 0 mm, WH (2) = 10 mm, and WH (3) = 20 mm shown in FIG. 9, the coil 110 to the node portion 213 arranged at the position 113 a above the node portion 213. , And the data (h (j), L3 (j)) (j = 1, 2,...) Of the inductance (node inductance) L3 of the coil 110 arranged at the position 113a above the node 213. When M (i)) is plotted, the graph shown in FIG. 10 is obtained.

  FIG. 10 shows an embodiment of the present invention, and the distance h from the coil 110 to the node portion 213 disposed at the position 113a above the node portion 213 shown in FIG. It is a figure of the graph which shows the relationship with L3.

  In FIG. 10, the plots of WH (1) = 0 mm and WH (2) = 10 mm almost overlap. In the plot of WH (3) = 20 mm, the node inductance L3 is slightly lower, but it is hardly a problem in calculating the distance, and it can be considered that the three plots are almost the same.

In this embodiment, in each test piece, L3 = Fi (h) representing the relationship between the distance h from the coil 110 disposed at the position 113a above the node 213 to the node 213 and the node inductance L3. As the function Fi (h), a cubic expression related to h was assumed as in the following expression (1).
Fi (h) = a3 (i) · h ³ + a2 (i) · h ²
+ A1 (i) · h + a0 (i) (1)

  When the coefficients a3 (i), a2 (i), a1 (i), and a0 (i) of the equation (1) are determined by the least square method for Fi (h) of three test pieces, the following Table 1 is obtained. It became like this.

Further, Fi (h) in equation (1) was averaged to obtain a distance calibration curve F (h) as in equation (2) below.
F (h) = a3 · h ³ + a2 · h ² + a1 · h + a0 (2)

  However, in Formula (2), a3 = (a3 (1) + a3 (2) + a3 (3)) / 3, a2 = (a2 (1) + a2 (2) + a2 (3)) / 3, a1 = (a1 (1) + a1 (2) + a1 (3)) / 3, and a0 = (a0 (1) + a0 (2) + a0 (3)) / 3.

  In addition, the coefficient of the distance calibration curve F (h) is shown at the right end of Table 1, and the graph of the distance calibration curve F (h) is shown by a bold solid line in FIG.

<Creation of wave height calibration curve group>
In the present embodiment, the distance h from the coil 110 arranged at the position 113a above the node portion 213 to the node portion 213 is 35 mm to 45 mm on the inner side of 30 mm to 50 mm, which is the distance range in which the distance calibration curve is created. The number of data points was M2 = 101 points.

  Then, three test pieces of WH (1) = 0 mm, WH (2) = 10 mm, and WH (3) = 20 mm shown in FIG. 9 are arranged at the position 113a above the node portion 213 from the calibration data. At the distance h (j) (j = 1, 2,..., M2) from the coil 110 to the node 213, the peak inductance L1 (i) (i = 1, 2, 3) and the valley inductance L2 ( The data of i) was acquired, the peak / valley inductance difference ΔL (i) = L2 (i) −L1 (i) was calculated, and the wave height WH (i) and the peak / valley inductance difference ΔL (i) were plotted.

  11 shows an embodiment of the present invention, and distances h from the coil 110 arranged at the position 113a above the node 213 shown in FIG. 7 to the node 213 are h = 35 mm, h = 40 mm, h = 45 mm. It is the figure which plotted the relationship between wave height WH (i) in this case, and a trough and valley part inductance difference (DELTA) L (i).

  From the results shown in FIG. 11, it can be seen that there is a high correlation between the wave height WH (i) and the peak / valley inductance difference ΔL (i). However, if the distance h from the coil 110 arranged at the position 113a above the node 213 to the node 213 changes, the relationship between the two changes greatly. Therefore, it is necessary to change the wave height calibration curve according to the distance h. There is.

Since there are only three test pieces in creating the wave height calibration curve group, a function Gj (WH) of ΔL = Gj (WH) representing the relationship between the wave height WH and the peak / valley inductance difference ΔL shown in FIG. As shown in the following equation (3), approximation was performed by adopting a quadratic equation (ns = 2) of the maximum degree as a polynomial for approximating three pieces of data.
Gj (WH) = b2 (h (j)) · WH ²
+ B1 (h (j)). WH + b0 (h (j)) (3)

  FIG. 12 shows an embodiment of the present invention, and the distance h from the coil 110 arranged at the position 113a above the node 213 shown in FIG. 7 to the node 213 is in the range of h = 35 mm to 45 mm. And a plot representing the relationship between the coefficients b2 (h (j)), b1 (h (j)), b0 (h (j)) in the equation (3), and a result obtained by approximating these plots with a polynomial by the least square method FIG.

Regarding the coefficients b2 (h), b1 (h), and b0 (h) in the equation (3), considering the behavior and approximation of the data in FIG. 12, respectively, the following equation (4) and the following (5): Approximation was performed using a linear expression, a quadratic expression, and a linear expression related to the distance h in the following expression (6) Each coefficient is shown in Table 2 below.
b2 (h) = b21 · h + b20 (4)
b1 (h) = b12 · h ² + b11 · h + b10 (5)
b0 (h) = b01 · h + b00 (6)

  As described above, the calibration data (h (j), bs (h (j))) obtained discretely with respect to the distance h from the coil 110 arranged at the position 113a above the node 213 to the node 213. ), By performing function approximation, the coefficient bs (h) corresponding to the continuous value h can be uniquely obtained even when a continuous value h is given.

Further, the expression (3) is developed, and bs (h) (s = 0) as in the following expression (7) corresponding to the function Gj (WH) of ΔL = Gj (WH) taking a discrete value. , 1, 2) to define a function G (h, WH) of the distance h and the wave height WH, a wave height calibration curve group ΔL = G (h, WH) can be obtained.
G (h, WH) = b2 (h) · WH ² + b1 (h) · WH + b0 (h) (7)

<Example of wave height measurement>
Next, an example in which the wave height WH is measured using the distance calibration curve and the wave height calibration curve group obtained by the calibration procedure described above will be described.

  First, the distance calibration curve F (h) was prepared by substituting the numerical values of Table 1 into the coefficients a3, a2, a1, and a0 of the equation (2). The wave height calibration curve group G (h, WH) is expressed by coefficients b2 (h), b1 (h), b0 (h) in the formula (7), coefficients b21 in the formulas (4) to (6), Prepared by substituting the values in Table 2 for b20, b12, b11, b10, b01, and b00.

  Since there is no preparation of a new test piece for measurement, at the time of calibration, the distance from the coil 110 arranged at the position 113a above the node 213 to the node 213 is 0.1 mm in the range of h = 30 mm to 50 mm. The calibration data of the node inductance L3, the peak inductance L1, and the valley inductance L2 obtained at the intervals is regarded as the measurement data obtained by the measurement, and the nodes from the coil 110 arranged at the position 113a above the node 213 are connected. The distance h to the part 213 and the wave height WH were calculated as unknowns.

  First, L3 = F (h) obtained by substituting the node inductance L3 into the distance calibration curve is regarded as an equation relating to the unknown h, and is solved from the coil 110 arranged at the position 113a above the node 213. The distance h to 213 was calculated.

  In the present embodiment, L3 = F (h) is a cubic equation, and a real solution in the range of h = 30 mm to 50 mm was obtained using the Cardano solution formula. If F (h) is an equation L3 = F (h) of the fourth order or lower, an algebraic solution formula can be used, but in the case of a higher-order or complicated nonlinear equation that cannot be solved algebraically, Alternatively, even in the case of a cubic equation or a quadratic equation in which a solution formula exists, if the discrimination of the real number solution is complicated, the unknown number h is calculated using a numerical solution method such as Newton's method.

  FIG. 13 shows a test piece with wave heights WH (1) = 0 mm, WH (2) = 10 mm, and WH (3) = 20 mm shown in FIG. 9 arranged at a position 113a above the node portion 213 shown in FIG. It is a figure which shows the matching result of the set value regarding the distance h from the performed coil 110 to the node part 213, and the calculated measured value.

  13 (c), the wave heights shown in FIGS. 13 (a) and 13 (b) are WH (1) = 0 mm and WH (2) =. Compared to the 10 mm test piece, there is a divergence of data from the distance calibration curve shown in FIG. 10, so the measured value is slightly lower than the set value, but there is no problem with accuracy for all the test pieces. The distance can be measured normally in the range.

  Then, the calculated distance h was substituted into the wave height calibration curve group ΔL = G (h, WH) to obtain the wave height calibration curve ΔL = G (h, WH).

  Thereafter, the inductance difference ΔL of the peak and valley portions was calculated using the peak portion inductance L1 and the valley portion inductance L2. Then, the calculated inductance difference ΔL of the valley is substituted for the wave height calibration curve ΔL = G (h, WH), and ΔL = G (h, WH) is regarded as an equation with the wave height WH as an unknown. The wave height WH was calculated.

  In this embodiment, ΔL = G (h, WH) is a quadratic equation for WH, so a real solution was obtained using the solution formula. In the case of higher order that cannot be solved algebraically, or in the case of a cubic equation or a quadratic equation in which the solution formula exists, the discrimination of the real number solution is complicated or in the case of a complicated nonlinear equation. Calculates the unknown WH using a numerical solution such as Newton's method.

  FIG. 14 shows an embodiment of the present invention and relates to the wave height when the distance h from the coil 110 arranged at the position 113a above the node 213 shown in FIG. 7 to the node 213 is 35 mm, 40 mm, and 45 mm. It is a figure which shows the matching result of a setting value and the calculated measured value.

  When the distance h from the coil 110 arranged at the position 113a above the node 213 to the node 213 changes, the peak-to-valley inductance difference ΔL changes greatly as shown in FIG. By using the line, as shown in FIG. 14, it is possible to quantify the wave height WH independent of the distance h.

<Supplementary information on how to calculate the distance calibration curve>
In the present embodiment, the distance h (j) from the coil 110 to the node 213 disposed at the position 113a above the node 213 in each test piece and the discrete data of the node inductance L3 (j) are used. Then, after obtaining a function L3 = Fi (h) representing the relationship between the distance h and the node inductance L3, these are averaged to obtain a function F (h) of the distance calibration curve L3 = F (h). However, it is not always necessary to average the function Fi (h) obtained for all the test pieces, and an arbitrary number (for example, one) may be extracted to calculate a distance calibration curve. Also good.

  As these examples, F1 (h) obtained for a test piece having a wave height WH (1) = 0 mm may be F (h), and the wave height WH (1) = 0 mm and the wave height WH (3). = The average of F1 (h) and F3 (h) obtained for a test piece of 20 mm may be used as the function F (h).

<Supplementary information about coil arrangement>
FIG. 15 is a diagram showing an example of a coil arrangement applicable to the embodiment of the present invention.
When the coils 111 to 113 in the first and second embodiments described above are large, it is not necessary to arrange these coils 111 to 113 in a straight line in the X direction (horizontal direction), for example, as shown in FIG. As described above, the coils 111 to 113 may be arranged so as to be diagonally spaced from each other.

(Other embodiments)
The present invention can also be realized by executing the following processing.
That is, software (program) that realizes the functions of the above-described embodiments is supplied to a system or apparatus via a network or various storage media, and a computer (or CPU, MPU, etc.) of the system or apparatus reads the program. It is a process to be executed.
This program and a computer-readable recording medium storing the program are included in the present invention.

  Note that the above-described embodiments of the present invention are merely examples of implementation in practicing the present invention, and the technical scope of the present invention should not be construed as being limited thereto. It is. That is, the present invention can be implemented in various forms without departing from the technical idea or the main features thereof.

100-1 measuring device, 111 first coil, 112 second coil, 113 third coil, 121 first LCR meter, 122 second LCR meter, 123 third LCR meter, 131 scanning control device, 132 scanning mechanism, 140 processing / control device , 141 Distance calibration curve storage unit, 142 Wave height calibration curve group storage unit, 143 Nodal part inductance acquisition unit, 144 Distance calculation unit, 145 Wave height calibration curve acquisition unit, 146 Mountain part inductance acquisition unit, 147 Valley part inductance acquisition unit 148 Inductance difference calculation unit, 149 Wave height calculation unit, 150 input device, 160 output device, 200 conductor (measured body), 210 surface of conductor, 211 peak, 212 valley, 213 node, WH wave height The

Claims (7)

The height difference between the crest and the trough in the vertical direction of a conductor having a corrugated surface and the positions of the crests, troughs and nodes in the wavy shape in the horizontal direction is known. A measuring device for measuring the wave height,
A distance calibration curve storage means for storing a distance calibration curve indicating a relationship between an inductance of a coil disposed at a position above the node in the vertical direction and a distance from the coil to the node;
An inductance difference that is a difference between an inductance of a coil disposed at a position above the valley in the vertical direction and an inductance of a coil disposed at a position above the peak in the vertical direction, and the wave height Wave height calibration curve group storage means for storing a wave height calibration curve group for each of a plurality of the distances, and a wave height calibration curve group storage means for storing a relationship.
Node inductance obtaining means for obtaining the inductance of a coil disposed at a position above the node;
Using the distance calibration curve, distance calculation means for calculating a distance from the coil arranged at a position above the node to the node from the inductance acquired by the node inductance acquisition means;
Wave height calibration curve acquisition means for acquiring a wave height calibration curve corresponding to the distance calculated by the distance calculation means from the wave height calibration curve group;
A peak inductance acquisition means for acquiring the inductance of a coil arranged at a position above the peak;
Trough inductance acquisition means for acquiring the inductance of a coil disposed at a position above the trough,
Inductance difference calculating means for calculating an inductance difference which is a difference between the inductance acquired by the valley inductance acquiring means and the inductance acquired by the peak inductance acquiring means;
Wave height calculating means for calculating the wave height from the inductance difference calculated by the inductance difference calculating means using the wave height calibration curve acquired by the wave height calibration curve acquiring means. measuring device. A mountain coil fixedly disposed at a position above the mountain,
A trough coil fixedly disposed at a position above the trough,
A node coil fixedly disposed at a position above the node;
A peak inductance measuring means for measuring the peak coil inductance;
Trough inductance measuring means for measuring the inductance of the trough coil;
A node inductance measuring means for measuring the inductance of the node coil;
The node inductance acquisition means acquires the inductance measured by the node inductance measurement means,
The peak inductance acquisition means acquires the inductance measured by the peak inductance measurement means;
The measuring apparatus according to claim 1, wherein the valley inductance acquisition unit acquires the inductance measured by the valley inductance measurement unit. A mountain coil fixedly disposed at a position above the mountain,
A trough coil fixedly disposed at a position above the trough,
A node coil fixedly disposed at a position above the node;
Inductance measuring means for measuring the inductance of the peak coil, the inductance of the valley coil, and the inductance of the node coil;
Switching means for electrically connecting the coils sequentially while switching the peak coil, the valley coil and the node coil with respect to the inductance measuring means;
The node inductance acquisition means acquires the inductance measured by the inductance measurement means when the node coil is electrically connected to the inductance measurement means by the switching means,
The peak inductance acquisition means acquires the inductance measured by the inductance measurement means when the peak coil is electrically connected to the inductance measurement means by the switching means,
The valley inductance acquisition means acquires the inductance measured by the inductance measurement means when the valley coil is electrically connected to the inductance measurement means by the switching means. The measuring apparatus according to claim 1. One coil,
Scanning means for scanning the one coil to a position above the peak, a position above the valley, and a position above the node;
An inductance measuring means for measuring the inductance of the one coil;
The node inductance acquisition means acquires the inductance measured by the inductance measurement means when the one coil is arranged at a position above the node by the scanning means,
The peak inductance acquisition means acquires the inductance measured by the inductance measurement means when the one coil is disposed at a position above the peak by the scanning means,
The said valley part inductance acquisition means acquires the inductance measured by the said inductance measurement means, when the said one coil is arrange | positioned in the position above the said valley part by the said scanning means. The measuring apparatus according to 1. The height difference between the crest and the trough in the vertical direction of a conductor having a corrugated surface and the positions of the crests, troughs and nodes in the wavy shape in the horizontal direction is known. A measuring method using a measuring device for measuring the wave height,
A distance calibration curve storage that stores a distance calibration curve indicating a relationship between an inductance of a coil arranged at a position above the node in the vertical direction and a distance from the coil to the node in the distance calibration curve storage means. Steps,
An inductance difference that is a difference between an inductance of a coil disposed at a position above the valley in the vertical direction and an inductance of a coil disposed at a position above the peak in the vertical direction, and the wave height A wave height calibration curve group storage step for storing a wave height calibration curve group indicating wave height calibration curve groups determined for each of the plurality of distances in the wave height calibration curve group storage means;
A node inductance obtaining step of obtaining an inductance of a coil disposed at a position above the node;
Using the distance calibration curve, from the inductance acquired in the node inductance acquisition step, a distance calculation step of calculating a distance from the coil disposed at a position above the node to the node,
From the wave height calibration curve group, a wave height calibration curve obtaining step for obtaining a wave height calibration curve corresponding to the distance calculated in the distance calculating step;
A peak inductance acquisition step of acquiring the inductance of a coil disposed at a position above the peak;
A trough inductance obtaining step for obtaining the inductance of a coil disposed at a position above the trough;
An inductance difference calculating step for calculating an inductance difference which is a difference between the inductance acquired in the valley inductance acquiring step and the inductance acquired in the peak inductance acquiring step;
A wave height calculating step of calculating the wave height from the inductance difference calculated in the inductance difference calculating step using the wave height calibration curve acquired in the wave height calibration curve acquiring step. Measuring method. The height difference between the crest and the trough in the vertical direction of a conductor having a corrugated surface and the positions of the crests, troughs and nodes in the wavy shape in the horizontal direction is known. A program for causing a computer to execute a measurement method using a measurement device for measuring wave height,
A distance calibration curve storage that stores a distance calibration curve indicating a relationship between an inductance of a coil arranged at a position above the node in the vertical direction and a distance from the coil to the node in the distance calibration curve storage means. Steps,
An inductance difference that is a difference between an inductance of a coil disposed at a position above the valley in the vertical direction and an inductance of a coil disposed at a position above the peak in the vertical direction, and the wave height A wave height calibration curve group storage step for storing a wave height calibration curve group indicating wave height calibration curve groups determined for each of the plurality of distances in the wave height calibration curve group storage means;
A node inductance obtaining step of obtaining an inductance of a coil disposed at a position above the node;
Using the distance calibration curve, from the inductance acquired in the node inductance acquisition step, a distance calculation step of calculating a distance from the coil disposed at a position above the node to the node,
From the wave height calibration curve group, a wave height calibration curve obtaining step for obtaining a wave height calibration curve corresponding to the distance calculated in the distance calculating step;
A peak inductance acquisition step of acquiring the inductance of a coil disposed at a position above the peak;
A trough inductance obtaining step for obtaining the inductance of a coil disposed at a position above the trough;
An inductance difference calculating step for calculating an inductance difference which is a difference between the inductance acquired in the valley inductance acquiring step and the inductance acquired in the peak inductance acquiring step;
For causing the computer to execute a wave height calculating step of calculating the wave height from the inductance difference calculated in the inductance difference calculating step using the wave height calibration curve acquired in the wave height calibration curve acquiring step. program.   A computer-readable storage medium storing the program according to claim 6.

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