JP6780538B2 - Shape measuring device and shape measuring method - Google Patents

Description

The present invention relates to a shape measuring device and a shape measuring method for measuring the shape of a conductor.

For example, in continuous steel casting, the bulging phenomenon in which the slab swells due to the static pressure of the molten steel inside the slab causes troubles such as breakout and deterioration of the slab quality, so the amount of bulging (“wave height” described later). It is desirable to measure (amount corresponding to "sa") and suppress it below a certain level.

As a conventional bulging measuring device, as described in Patent Document 1, a roller or a wheel is brought into contact with a slab under light pressure, and the amount of displacement thereof is measured by a minute such as a differential transformer or a magnet scale via a leaf spring or the like. A device for measuring with a displacement meter is known. In the contact-type bulging measuring device described in Patent Document 1, a device is devised to bring wheels or the like into contact with the slab under light pressure so as not to damage the solidified shell of the slab, but the oxide scale is peeled off and the axle or the like is removed. If it enters the moving part of the slab, the conditions under light pressure will be disrupted because the wheels, etc. will not rotate, resulting in an increase in pressure on the solidified shell, which will damage the solidified shell of the slab and lead to breakout. There was a problem that it was likely.

In order to avoid the above-mentioned problems, as a non-contact method, there is a method of measuring the profile of the slab using an optical range finder, but the spray water for cooling the slab or the hot slab is touched. Due to the influence of the water vapor generated in the process, the field of view of the optical rangefinder is obstructed, which makes continuous and stable measurement difficult.

As a technique capable of realizing stable measurement even in such an environment of spray water, water vapor, and high temperature, as described in Patent Document 2, an eddy current type range finder is used to make a difference in the distance between mountains and valleys. A method of measuring the amount of bulging can be considered. In this eddy current type distance meter, when a conductor is placed in the alternating magnetic flux generated by the coil, an eddy current that weakens the magnetic flux of the coil is generated on the surface of the conductor. Therefore, when the distance between the coil and the conductor approaches, the coil The distance is measured based on the fact that the magnetic flux of the coil is weakened and the inductance of the coil is reduced.

In general, the decrease in inductance depends not only on the distance between the coil and the conductor, but also on the material (conductivity / magnetism) of the conductor, size, thickness, and shape. Therefore, to measure the distance, use the object under test. It is necessary to make the material, size, thickness, and shape of a certain conductor constant, and then perform calibration at different distances to create a distance calibration curve.

Further, the decrease in inductance depends on the size and shape of the conductor, because the magnetic flux generated by the coil spreads to about 3 to 5 times the diameter of the coil. When the change in shape is small (the shape shows a gradual change) compared to the spread of the magnetic flux created by the coil, as in the case of bulging on the long side of the slab described in Patent Document 2, the mountain valley portion from the coil It is possible to accurately measure the wave height (bulging amount) from the difference in distance to. However, when the shape change is large (the shape shows a sudden change) with respect to the spread of the magnetic flux created by the coil, as in the case of bulging on the short side of the slab described in Patent Document 2, the coil Since the inductance depends not only on the distance but also on the shape (that is, the shape cannot be ignored), the distance from the coil to the mountain valley is not uniquely determined, and it is difficult to measure the wave height accurately.

Japanese Unexamined Patent Publication No. 3-71961 Japanese Unexamined Patent Publication No. 53-11322

The present invention has been made in view of such problems, and even when the shape change of the conductor to be measured cannot be ignored as compared with the spread of the magnetic flux created by the coil of the eddy current type rangefinder. An object of the present invention is to provide a mechanism capable of accurately measuring the wave height when the shape of a conductor changes.

The shape measuring device of the present invention is a shape measuring device that measures the shape of a conductor by measuring inductance, and is a coil arranged at a position facing the wavy surface of the conductor and the coil. By scanning the corrugated peaks to valleys and the coil with the scanning means, the value of the inductance from the peaks to the valleys in the scanning direction of the scanning means. An inductance history acquisition means for acquiring a set inductance history, an average value calculation means for calculating an average value of the inductance history which is an average value of the inductance values in the inductance history, and an inductance value in the inductance history. , The inclination calculating means for calculating the inclination of the inductance history, which is the inclination with respect to the scanning direction, the average value of the inductance history, and the coil from the wavy node located between the peak and the valley. It is a distance calibration line storage means that stores a distance calibration line indicating a relationship with the distance to, an inclination of the inductance history, and a distance difference between the peak portion and the valley portion as seen from the coil during the scanning. The wave height inductance line indicating the relationship between the wave height and the wave height is provided with a wave height inductance line group storage means for storing a plurality of wave height inductance line groups determined for each of the distances, and the distance inductance line is used. The distance from the coil to the node is calculated from the average value of the inductance history calculated by the average value calculating means, and the wave height calibration corresponding to the calculated distance is performed from the wave height calibration line group. A line is acquired, and the wave height is calculated from the slope of the inductance history calculated by the slope calculating means using the wave height calibration line.
Another aspect of the shape measuring device of the present invention is a shape measuring device that measures the shape of a conductor by measuring inductance, and is fixedly arranged at a position facing the corrugated surface of the conductor. By switching between the plurality of coils provided between the wave-shaped peaks and valleys and the plurality of coils, it is a set of inductance values from the wave-shaped peaks to valleys. The switching between the inductance history acquisition means for acquiring the inductance history, the average value calculation means for calculating the average value of the inductance history which is the average value of the inductance values in the inductance history, and the inductance value in the inductance history. A tilt calculating means for calculating the slope of the inductance history, which is a slope with respect to the direction, the average value of the inductance history, and the distance from the wave-shaped node located between the peak and the valley to the coil. The distance calibration line storage means for storing the distance calibration line indicating the relationship between the above, the inclination of the inductance history, and the wave height which is the distance difference between the peak and the valley as seen from the coil at the time of switching. It has a wave height inductance line group storage means for storing a plurality of wave height inductance line groups determined for each of the distances, and the average value using the distance inductance line. The distance from the coil to the node is calculated from the average value of the inductance history calculated by the calculation means, and the wave height calibration line corresponding to the calculated distance is obtained from the wave height calibration line group. Then, using the wave height calibration line, the wave height is calculated from the slope of the inductance history calculated by the slope calculating means.
The present invention also includes a shape measuring method using the shape measuring device described above.

According to the present invention, the wave height in the shape change of the conductor can be accurately measured even when the shape change of the conductor to be measured cannot be ignored as compared with the spread of the magnetic flux created by the coil of the eddy current type range finder. Can be measured.

It is a schematic diagram which shows an example of the schematic structure of the shape measuring apparatus which concerns on 1st Embodiment of this invention. It is a figure which shows 1st Embodiment of this invention and is for demonstrating the inductance history. It is a flowchart which shows an example of the processing procedure of the measurement method by the shape measuring apparatus which concerns on 1st Embodiment of this invention. It is a flowchart which shows an example of the acquisition procedure of the calibration data by the shape measuring apparatus which concerns on 1st Embodiment of this invention. It is a flowchart which shows an example of the procedure for making a distance calibration curve by the shape measuring apparatus which concerns on 1st Embodiment of this invention. It is a flowchart which shows an example of the procedure for making a wave height calibration curve group by the shape measuring apparatus which concerns on 1st Embodiment of this invention. It is a schematic diagram which shows an example of the schematic structure of the shape measuring apparatus which concerns on 2nd Embodiment of this invention. It is a figure which shows an example of the arrangement of the coil used in the 2nd Embodiment of this invention. It is a flowchart which shows an example of the acquisition procedure of the calibration data by the shape measuring apparatus which concerns on 2nd Embodiment of this invention. It is a figure which shows the test piece of the conductor used in the Example of this invention. It is a figure of the graph of the inductance history which shows the Example of this invention and shows the relationship between the position of the coil shown in FIG. 1 in the X direction (horizontal direction), and the inductance of a coil. An embodiment of the present invention is shown, and the relationship between the distance from the coil (for example, the position above the node) shown in FIG. 1 to the node in the Z direction (vertical direction) and the average value of the inductance history at the distance is shown. It is a figure of a graph. An embodiment of the present invention is shown, and the wave height and inductance history when the distances from the coil (for example, the position above the node) shown in FIG. 1 to the node in the Z direction (vertical direction) are 35 mm, 40 mm, and 45 mm. It is the figure which plotted the relationship with the inclination. An embodiment of the present invention is shown, and the distance from the coil (for example, the position above the node) shown in FIG. 1 to the node in the Z direction (vertical direction) is in the range of 35 mm to 45 mm, and the distance and the equation (3). It is a figure which shows the plot which shows the relationship of the coefficient of, and the result of polynomial approximation of these plots by the least squares method. For the test pieces with wave heights of 0 mm, 10 mm, and 20 mm shown in FIG. 10, the set values were calculated with respect to the distance from the coil shown in FIG. 1 (for example, the position above the node) to the node in the Z direction (vertical direction). It is a figure which shows the collation result with the measured value. An embodiment of the present invention is shown, and the set values relating to the wave height when the distances from the coil (for example, the position above the node) shown in FIG. 1 to the node in the Z direction (vertical direction) are 35 mm, 40 mm, and 45 mm. It is a figure which shows the collation result with the calculated measured value.

Hereinafter, embodiments (embodiments) for carrying out the present invention will be described with reference to the drawings.

(First Embodiment)
First, the first embodiment of the present invention will be described.

<Outline configuration of shape measuring device>
FIG. 1 is a schematic view showing an example of a schematic configuration of the shape measuring device 100-1 according to the first embodiment of the present invention. The shape measuring device 100-1 according to the present embodiment has a wave-shaped surface 210, and the conductor 200 whose positions of the wave-shaped peaks 211 and valleys 212 are known in the X direction (horizontal direction). This is a device for measuring the wave height WH, which is the height difference (distance difference) between the peak portion 211 and the valley portion 212 in the Z direction (vertical direction). That is, the shape measuring device 100-1 according to the present embodiment is a device that measures the shape of the conductor 200. In the present embodiment, the node 213 of the conductor 200 is located between the mountain portion 211 and the valley portion 212 in the X direction (horizontal direction) (specifically, for example, the mountain portion 211 and the valley portion 212). It shall be located in the middle part of.

As shown in FIG. 1, the shape measuring device 100-1 according to the present embodiment includes a coil 110, an LCR meter 120, a scanning control device 131, a scanning mechanism 132, a processing / control device 140, an input device 150, and an output device. It is configured to have 160.

In the present embodiment, only one coil 110 is provided, and this one coil 110 is installed at a predetermined position inside the housing. This housing is supported by the scanning mechanism 132. Further, it is assumed that the housing is arranged at a position where it does not come into contact with the conductor 200 in consideration of the predicted wave height WH and movable range of the conductor 200 under the control of the scanning control device 131. Here, in the present embodiment, as shown in FIG. 1, this one coil 110 is arranged at a position above the wave-shaped surface 210 (in the direction of the arrow indicating the Z direction (vertical direction) in FIG. 1). It is assumed that

The LCR meter 120 is an inductance measuring means for measuring the inductance of one coil 110 based on the control of the processing / control device 140.

The scanning control device 131 sets the housing (including the coil 110 inside) mechanically connected to the scanning mechanism 132 in the X direction (horizontal direction) and the Z direction (vertical direction) based on the control of the processing / control device 140. Controls scanning in the direction).
The scanning mechanism 132 scans the mechanically connected housing (including the coil 110 inside) in the X direction (horizontal direction) and the Z direction (vertical direction) under the control of the scanning control device 131. Specifically, in the present embodiment, the scanning mechanism 132 uses the coil 110 installed inside the housing under the control of the scanning control device 131 when measuring the wave height WH, for example. Scan from at least the peak portion 211 to the valley portion 212 in the X direction (horizontal direction). At this time, in the present embodiment, the origin in the X direction (horizontal direction) is assumed to be the mountain portion 211. Further, in the present embodiment, the scanning mechanism 132, for example, when acquiring calibration data, sets the coil 110 installed inside the housing in the X direction (in the X direction) based on the control of the scanning control device 131. Scan in the horizontal direction) and in the Z direction (vertical direction).

The processing / control device 140 comprehensively controls various processes in the shape measuring device 100-1 and operations in the shape measuring device 100-1. As shown in FIG. 1, the processing / control device 140 includes a distance calibration curve storage unit 141, a wave height calibration curve group storage unit 142, an inductance history acquisition unit 143, an average value calculation unit 144, a distance calculation unit 145, and a wave height. It includes a calibration curve acquisition unit 146, an inclination calculation unit 147, and a wave height calculation unit 148.

The distance calibration line storage unit 141 is obtained from the peak portion 211 to the valley in the X direction (horizontal direction) obtained by using the coil 110 arranged at a position above the wavy surface 210 when acquiring the calibration data. The relationship between the average value of the inductance history, which is a set of the inductances of the coil up to the portion 212, and the distance in the Z direction (vertical direction) from the coil (for example, the position Ph above the node 213) to the node 213. Memorize the distance calibration line indicating.

FIG. 2 is a diagram for showing the first embodiment of the present invention and explaining the inductance history. In FIG. 2, the horizontal axis represents the X direction (horizontal direction), and the vertical axis represents the value of the inductance L measured by the LCR meter 120. Here, in the inductance history 301 shown in FIG. 2, the position of the start point corresponds to the position of the mountain portion 211 and the position of the end point corresponds to the position of the valley portion 212 in the X direction (horizontal direction) of the horizontal axis. However, the present embodiment is not limited to this aspect.

Explaining with reference to FIG. 2, the distance calibration curve storage unit 141 has the average value of the inductance history, which is the average value of the inductance in the inductance history 301 shown in FIG. 2, obtained when the calibration data is acquired, and the coil. A distance calibration curve showing the relationship between the distance from 110 to the node 213 in the Z direction (vertical direction) is stored.

The wave height calibration line group storage unit 142 is based on the value of the inductance in the above-mentioned inductance history obtained by using the coil 110 arranged at a position above the wave-shaped surface 210 when acquiring the calibration data. A plurality of the distances (coil 110 (coil 110)) are drawn on a wave height calibration line showing the relationship between the inclination of the inductance history and the wave height WH which is the height difference between the peak portion 211 and the valley portion 212 in the Z direction (vertical direction). For example, a wave height calibration line group determined for each distance in the Z direction (vertical direction) from the position Ph) above the node 213 to the node 213 is stored.

Explaining with reference to FIG. 2, the wave height calibration curve group storage unit 142 has the slope of the inductance history, which is the slope of the approximate straight line 302 of the inductance history 301 shown in FIG. 2, obtained when the calibration data is acquired. , The wave height calibration curve group indicating the relationship between the wave height WH and the wave height calibration curve is stored for each distance in the Z direction (vertical direction) from the coil 110 to the node 213.

When measuring the wave height WH, the inductance history acquisition unit 143 uses a coil 110 arranged at a position above the wave-shaped surface 210 to set the inductance of the coil from the peak portion 211 to the valley portion 212. Get a certain inductance history. Specifically, in the present embodiment, the inductance history acquisition unit 143 has a plurality of positions (1, 2, in the example shown in FIG. 1) in which one coil 110 is located from the peak portion 211 to the valley portion 212 by the scanning mechanism 132. When placed at each position in (Nc), the inductance of the coil 110 at each position measured by the LCR meter 120 is acquired as an inductance history. Explaining with reference to FIG. 2, the inductance history acquisition unit 143 acquires the inductance history 301 shown in FIG. 2 when measuring the wave height WH.

When measuring the wave height WH, the mean value calculation unit 144 calculates the average value of the inductance history, which is the average value of the inductance in the inductance history acquired by the inductance history acquisition unit 143. Explaining with reference to FIG. 2, the mean value calculation unit 144 calculates the average value of the inductance history, which is the average value of the inductance in the inductance history 301 shown in FIG. 2, when measuring the wave height WH.

When measuring the wave height WH, the distance calculation unit 145 uses the distance calibration curve stored in the distance calibration curve storage unit 141, and uses the coil from the average value of the inductance history calculated by the average value calculation unit 144. The distance in the Z direction (vertical direction) from 110 (for example, the position Ph above the node 213) to the node 213 is calculated.

When measuring the wave height WH, the wave height calibration curve acquisition unit 146 selects the distance calculated by the distance calculation unit 145 from the wave height calibration curve group stored in the wave height calibration curve group storage unit 142. Obtain the corresponding wave height calibration curve.

When measuring the wave height WH, the inclination calculation unit 147 calculates the inclination of the inductance history based on the value of the inductance in the inductance history acquired by the inductance history acquisition unit 143. Explaining with reference to FIG. 2, the slope calculation unit 147 calculates the slope of the approximate straight line 302 of the inductance history 301 shown in FIG. 2 as the slope of the inductance history when measuring the wave height WH.

When measuring the wave height WH, the wave height calculation unit 148 uses the wave height calibration curve acquired by the wave height calibration curve acquisition unit 146, and Z from the slope of the inductance history calculated by the slope calculation unit 147. The wave height WH, which is the height difference between the mountain portion 211 and the valley portion 212 in the direction (vertical direction), is calculated.

The input device 150 is a device that inputs various information to the processing / control device 140. For example, the input device 150 inputs information related to the distance calibration curve stored in the distance calibration curve storage unit 141, or inputs information related to the wave height calibration curve group stored in the wave height calibration curve group storage unit 142. To do. Further, the input device 150 also provides information related to the measurement timing of the wave height WH to the processing / control device 140, information related to the timing of scanning the housing in the Z direction (vertical direction) by the scanning control device 131, and the like. input.

The output device 160 is a device that outputs various information from the processing / control device 140. For example, the output device 160 displays and outputs information related to the wave height WH calculated by the wave height calculation unit 148, or transmits information related to the wave height WH calculated by the wave height calculation unit 148 to an external device. And output.

<Measurement procedure using shape measuring device>
FIG. 3 is a flowchart showing an example of a processing procedure of the measurement method by the shape measuring device 100-1 according to the first embodiment of the present invention. Specifically, FIG. 3 is a flowchart showing a processing procedure for measuring the wave height WH. At the time when the processing of this flowchart is started, the above-mentioned distance calibration curve is already stored in the distance calibration curve storage unit 141, and the above-mentioned wave height calibration curve group is stored in the wave height calibration curve group storage unit 142. It is assumed that

First, when the processing / control device 140 scans the coil 110 in the X direction (horizontal direction) by the scanning means including the scanning control device 131 and the scanning mechanism 132, the inductance history acquisition unit 143 sets the scanning position in step S101. Inductance history Lk = L (xk) with xx (k is a subscript for identifying the horizontal position and takes a range of k = 1, 2, ..., Nc. Nc indicates the number of scanning positions). ) To get. For example, here, the inductance history 301 shown in FIG. 2 is acquired.

Subsequently, in step S102, the average value calculation unit 144 calculates the average value Lm of the inductance history, which is the average value of the inductance in the inductance history acquired in step S101.

Subsequently, in step S103, the distance calculation unit 145 uses the distance calibration curve stored in the distance calibration curve storage unit 141 to obtain the coil 110 (for example, a node) from the average value Lm of the inductance history calculated in step S102. The distance h in the Z direction (vertical direction) from the position Ph) above the portion 213 to the node portion 213 is calculated. Specifically, the distance calculation unit 145 substitutes the average value Lm of the inductance history calculated in step S102 into the distance calibration line Lm = F (h), and regards Lm = F (h) as an equation for the unknown number h. The distance h in the Z direction (vertical direction) from the coil 110 to the node 213 is calculated. The distance calibration curve Lm = F (h) will be described later with reference to FIG.

Subsequently, in step S104, the wave height calibration curve acquisition unit 146 receives the wave height corresponding to the distance h calculated in step S103 from the wave height calibration curve group stored in the wave height calibration curve group storage unit 142. Get the calibration curve. Specifically, the wave height calibration curve acquisition unit 146 substitutes the distance h calculated in step S103 into the wave height calibration curve group aL = G (h, WH), and substitutes the Z direction from the coil 110 to the node 213 ( The wave height calibration curve aL = G (h, WH) when the distance in the vertical direction) is h is acquired. The wave height calibration curve group aL = G (h, WH) will be described later with reference to FIG.

Subsequently, in step S105, the slope calculation unit 147 linearly approximates the inductance history acquired in step S101, and calculates the slope of the approximate straight line obtained by the linear approximation as the slope aL of the inductance history. For example, here, the slope of the approximate straight line 302 shown in FIG. 2 is calculated as the slope aL of the inductance history.

Subsequently, in step S106, the wave height calculation unit 148 uses the wave height calibration curve acquired in step S104 to obtain a mountain portion in the Z direction (vertical direction) from the slope aL of the inductance history calculated in step S105. The wave height WH, which is the height difference between 211 and the valley 212, is calculated. Specifically, the wave height calculation unit 148 substitutes the slope aL of the inductance history calculated in step S105 into the wave height calibration curve aL = G (h, WH) acquired in step S104, and aL = G ( h, WH) is regarded as an equation related to the unknown WH and solved to calculate the wave height WH.

After that, the processing / control device 140 causes the output device 160 to display the information related to the wave height WH calculated in step S106, or causes the output device 160 to transmit the information related to the wave height WH calculated in step S106 to the external device. To do. Then, when this series of processing is completed, the processing of the flowchart shown in FIG. 3 is completed.

<Proofreading data acquisition procedure>
Next, in the first embodiment, the calibration used when creating the distance calibration curve stored in the distance calibration curve storage unit 141 and the wave height calibration curve group stored in the wave height calibration curve group storage unit 142. The procedure for acquiring data will be described.

The shape measuring device 100-1 according to the present embodiment scans the housing containing the coil 110 in the X direction (horizontal direction) and the Z direction (vertical direction) as a configuration for acquiring the calibration data. The scanning control device 131 and the scanning mechanism 132 for the purpose are provided. Then, the processing / control device 140 controls the scanning control device 131 to position the housing at predetermined positions in the X direction (horizontal direction) and the Z direction (vertical direction), and adjusts the inductance of the coil 110 to an LCR meter. Obtained from 120, these are stored together with the distance in the Z direction (vertical direction) from the coil 110 (for example, the position Ph above the node 213) to the node 213 to acquire calibration data.

FIG. 4 is a flowchart showing an example of a procedure for acquiring calibration data by the shape measuring device 100-1 according to the first embodiment of the present invention.
When starting the processing of the flowchart of FIG. 4, N test pieces for creating calibration data are prepared. Further, the distance from the coil 110 (for example, the position Ph above the node 213) to the node 213 in the Z direction (vertical direction) is the starting distance as hs and the inductance at the distance of M (i) in Δh increments. Shall be measured. In the flowchart of FIG. 4, the number of measurement points of the test piece having a wave height of WH (i) is M (i), but this is a distance range in which data can be collected depending on the wave height of the test piece. This is because may be different. Further, in the case of the shape measuring device 100-1 according to the first embodiment, the step Δx of the scanning distance in the X direction (horizontal direction) is larger than the step width Δh in the Z direction (vertical direction), and it takes time to move. Therefore, the calibration data is acquired by forming a loop of the procedure of scanning in the Z direction (vertical direction) at each position in the X direction (horizontal direction).

First, when a test piece having a wave height of WH (i) is arranged, in step S201, the processing / control device 140 adds i = 1, 2, ..., Which is a subscript for identifying the test piece. N is set sequentially.

Subsequently, in step S202, the processing / control device 140 controls the coil 110 to be arranged at the horizontal position xk = xs + Δx · (k-1) by the scanning means including the scanning control device 131 and the scanning mechanism 132. At this time, the processing / control device 140 sequentially sets k = 1, 2, ..., Nc (Nc indicates the number of points in the horizontal direction) to k, which is a subscript for identifying the horizontal position. Further, xs indicates the scanning start position in the horizontal direction, and Δx indicates the step of the scanning distance.

Subsequently, in step S203, the processing / control device 140 sets the distance from the coil 110 arranged at the position Ph above the node 213 to the node 213 to h (j) = hs + Δh · (j-1). To do. At this time, the processing / control device 140 sequentially sets j = 1, 2, ..., M (i) in j, which is a subscript for identifying the distance.

Subsequently, in step S204, the processing / control device 140 acquires the inductance Lk (j) of the coil 110 arranged at the horizontal position xk and the distance h (j) from the LCR meter 120.

Subsequently, in step S205, the processing / control device 140 associates the distance h (j) set in step S203 with the distance h (j), and the inductance Lk (j) acquired in step S204 is combined with the distance h (j). In addition to the data acquired so far, it is saved as calibration data in a memory (not shown).

Subsequently, in step S206, the processing / control device 140 changes j by adding 1 to j, which is a subscript for identifying the distance, and whether or not j after the change is larger than M (i). To judge. As a result of this determination, if the changed j is not larger than M (i) (S206 / NO), the process returns to step S203, and the changed j is processed after step S203.

On the other hand, as a result of the determination in step S206, if the changed j is larger than M (i) (S206 / YES), the process proceeds to step S207. Here, when proceeding to step S207, it is a case where the processes of steps S203 to S205 are repeated M (i) times.
Proceeding to step S207, the processing / control device 140 ends the processing of acquiring the calibration data at the horizontal position xk.

Subsequently, in step S208, the processing / control device 140 changes k by adding 1 to k, which is a subscript for identifying the horizontal position, and whether or not k after the change is larger than Nc. To judge. As a result of this determination, if the changed k is not larger than Nc (S208 / NO), the process returns to step S202, and the changed k is processed after step S202.

On the other hand, as a result of the determination in step S208, if the changed k is larger than Nc (S208 / YES), the process proceeds to step S209. Here, when proceeding to step S209, it is a case where the processes of steps S202 to S207 are repeated Nc times.
Proceeding to step S209, the processing / control device 140 ends the processing of acquiring the calibration data on the test piece having the wave height WH (i).

Subsequently, in step S210, the processing / control device 140 changes i by adding 1 to i, which is a subscript for identifying the test piece, and determines whether or not the changed i is larger than N. to decide. As a result of this determination, if the changed i is not larger than N (S210 / NO), the process returns to step S201, and the changed i is processed after step S201.

On the other hand, as a result of the determination in step S210, if the changed i is larger than N (S210 / YES), the process proceeds to step S211. Here, the case where the process proceeds to step S211 is a case where the processes of steps S201 to S209 are repeated N times.
Proceeding to step S211 the processing / control device 140 ends the process of acquiring calibration data for all the test pieces.

<Procedure for creating a distance calibration curve>
Next, a procedure for creating a distance calibration curve to be stored in the distance calibration curve storage unit 141 will be described using the calibration data acquired by the processing of the flowchart shown in FIG.

FIG. 5 is a flowchart showing an example of a procedure for creating a distance calibration curve by the shape measuring device 100-1 according to the first embodiment of the present invention.

First, in step S301, the processing / control device 140 (for example, the inductance history acquisition unit 143) obtains the calibration data of the test piece having the wave height WH (i) from the calibration data acquired by the processing of the flowchart shown in FIG. get.

Subsequently, in step S302, the processing / control device 140 (for example, the inductance history acquisition unit 143) has a distance from the coil 110 at the position Ph above the node 213 to the node 213 h (j) = hs + Δh · (j). The inductance history data Lk (j) (k = 1, 2, ..., Nc) at the time of -1) is acquired.

Subsequently, in step S303, the processing / control device 140 (for example, the average value calculation unit 144) calculates the average value Lm (j) of the inductance history data Lk (j) acquired in step S302.

Subsequently, in step S304, the processing / control device 140 changes j by adding 1 to j, which is a subscript for identifying the distance, and whether or not j after the change is larger than M (i). To judge. As a result of this determination, if the changed j is not larger than M (i) (S304 / NO), the process returns to step S302, and the changed j is processed after step S302.

On the other hand, as a result of the determination in step S304, if the changed j is larger than M (i) (S304 / YES), the process proceeds to step S305. Here, when proceeding to step S305, it is a case where the processes of steps S302 to S303 are repeated M (i) times.

Proceeding to step S305, the processing / control device 140 first has Lm = Fi (h) as a functional form representing the relationship between the distance h and the average value Lm of the inductance history for the test piece having the wave height WH (i). ) Is assumed. Next, the processing / control device 140 is minimized based on the acquired calibration data (h (j), Lm (j)) (j = 1, 2, ..., M (i)) of the M (i) set. The coefficient that determines the function Fi (h) is obtained by using a function approximation optimization method such as the square method.

Subsequently, in step S306, the processing / control device 140 changes i by adding 1 to i, which is a subscript for identifying the test piece, and determines whether or not the changed i is larger than N. to decide. As a result of this determination, if the changed i is not larger than N (S306 / NO), the process returns to step S301, and the changed i is processed after step S301.

On the other hand, as a result of the determination in step S306, if the changed i is larger than N (S306 / YES), the process proceeds to step S307. Here, when proceeding to step S307, the processing of steps S301 to S305 is repeated N times to obtain the functions Fi (h) (i = 1, 2, ..., N).
Proceeding to step S307, the processing / control device 140 determines that the average F (h) = ΣFi (h) / N = (F1 (h)) of the obtained functions Fi (h) (i = 1, 2, ..., N). + F2 (h) + ... + FN (h)) / N is calculated as the distance calibration curve Lm = F (h). After that, the processing / control device 140 performs a process of storing the calculated distance calibration curve Lm = F (h) in the distance calibration curve storage unit 141.

<Procedure for creating wave height calibration curve group>
Next, a procedure for creating a wave height calibration curve group to be stored in the wave height calibration curve group storage unit 142 will be described using the calibration data acquired by the processing of the flowchart shown in FIG.

FIG. 6 is a flowchart showing an example of a procedure for creating a wave height calibration curve group by the shape measuring device 100-1 according to the first embodiment of the present invention.

First, in step S401, the processing / control device 140 (for example, the inclination calculation unit 147) has a distance h (j) (j = 1, 2, ..., M2) from the calibration data acquired by the processing of the flowchart shown in FIG. The inductance history data Lk (j) (k = 1, 2, ..., Nc) in the above is acquired, the slope aL (i) of the inductance history data is calculated for all wave heights WH (i), and N sets of Data (WH (i), aL (i)) (i = 1, 2, ..., N) are acquired.

Subsequently, in step S402, the processing / control device 140 first assumes aL = Gj (WH) as a functional form representing the relationship between the wave height WH and the slope aL of the inductance history at the distance h (j). .. Next, the processing / control device 140 uses the N sets of data (WH (i), aL (i)) (i = 1, 2, ..., N) acquired in step S401 to perform a least squares method or the like. The function Gj (WH) is obtained by using the optimization method of function approximation.

Subsequently, in step S403, the processing / control device 140 changes j by adding 1 to j, which is a subscript for identifying the distance, and determines whether or not j after the change is larger than M2. To do. As a result of this determination, if the changed j is not larger than M2 (S403 / NO), the process returns to step S401, and the changed j is processed after step S401.

On the other hand, as a result of the determination in step S403, if the changed j is larger than M2 (S403 / YES), the process proceeds to step S404. Here, when proceeding to step S404, the processes of steps S401 to S402 are repeated M2 times, and the functions Gj (WH) (j = 1, 2, ..., M2) are obtained for all distances h (j). If this is the case.
Proceeding to step S404, the processing / control device 140 acquires the coefficient bs (h (j)) that determines the obtained function Gj (WH). At this time, the processing / control device 140 sequentially sets s = 0, 1, 2, ..., Ns to s of the coefficient bs.

Subsequently, in step S405, the processing / control device 140 first assumes bs (h) as a functional form of the coefficient. Next, the processing / control device 140 has a minimum of two based on the M2 set data (h (j), bs (h (j))) (j = 1, 2, ..., M2) acquired in step S404. The function bs (h) is obtained by using an optimization method of function approximation such as multiplication.

Subsequently, in step S406, the processing / control device 140 adds 1 to s to change s, and determines whether or not the changed s is larger than ns. As a result of this determination, if the changed s is not larger than ns (S406 / NO), the process returns to step S404, and the changed s is processed after step S404.

On the other hand, as a result of the determination in step S406, if the changed s is larger than ns (S406 / YES), the process proceeds to step S407. Here, when proceeding to step S407, it is a case where the processes of steps S404 to S405 are repeated ns + 1 times.
Proceeding to step S407, the processing / control device 140 completes the function approximation for all the coefficients bs (h) (s = 0, 1, 2, ..., Ns), and the wave height calibration curve group aL = G ( h, WH) is calculated. After that, the processing / control device 140 performs a process of storing the calculated wave height calibration curve group aL = G (h, WH) in the wave height calibration curve group storage unit 142.

According to the shape measuring device 100-1 according to the first embodiment described above, the coil 110 arranged at a position above the corrugated surface 210 is placed in the X direction (horizontal direction) from the peak portion 211 to the valley portion 212. The inductance history, which is a set of the inductances of the coil, is acquired by scanning up to, the average value of the inductance history is calculated, and the distance calibration line stored in the distance calibration line storage unit 141 is obtained from the average value of the inductance history. The distance from the coil 110 to the node 213 in the Z direction (vertical direction) is calculated using the coil 110, and corresponds to the calculated distance from the wave height inductance line group stored in the wave height calibration line group storage unit 142. Since the wave height calibration line is acquired and the wave height WH is calculated using the acquired wave height calibration line, the conductivity that is the object to be measured is compared with the spread of the magnetic flux created by the coil of the eddy current type distance meter. Even when the shape change of the body cannot be ignored, the wave height due to the shape change of the conductor can be measured with high accuracy.

For example, if the wave height WH is quantified using a wave height calibration curve in which the distance from the coil 110 to the node 213 in the Z direction (vertical direction) is constant, the measurement error becomes large and the wave height is measured accurately. Becomes difficult. Therefore, in the present embodiment, the distance from the coil 110 to the node 213 in the Z direction (vertical direction) is calculated, and the wave height calibration curve is changed according to the calculated distance to quantify the wave height WH. ing.
In the present embodiment, the conductor 200 is placed horizontally, the coil 110 is placed above, the coil 110 is scanned in the horizontal direction (X direction), and the wave height of the surface of the conductor 200 is in the Z direction. However, the present invention is not limited to these embodiments, and the coil 110 is arranged so as to face the surface of the conductor 200, and the coil 110 is placed on the conductor. By scanning along a specific surface of 200, the difference in the distance between the wave surface of the surface shape and the coil 110 in the direction perpendicular to the scanning direction is defined as the wave height. It is possible to carry out.

(Second Embodiment)
Next, a second embodiment of the present invention will be described.

<Outline configuration of shape measuring device>
FIG. 7 is a schematic view showing an example of a schematic configuration of the shape measuring device 100-2 according to the second embodiment of the present invention. In FIG. 7, the same reference numerals are given to the configurations similar to the schematic configuration of the shape measuring device 100-1 according to the first embodiment shown in FIG. 1, and detailed description thereof will be omitted if necessary. Further, in the following description in the schematic configuration of the shape measuring device 100-2 according to the second embodiment, mainly a portion different from the schematic configuration of the shape measuring device 100-1 according to the first embodiment shown in FIG. explain.

As shown in FIG. 7, the shape measuring device 100-2 according to the present embodiment includes a plurality of coils 110-1 to 110-Nc, an LCR meter 120, a scanning control device 133, a scanning mechanism 134, a processing / control device 140, and the like. It includes an input device 150, an output device 160, and a signal switching device 170.

In the first embodiment described above, one coil 110 is scanned in the X direction (horizontal direction) to acquire inductance history data at a plurality of (Nc) positions from the peak portion 211 to the valley portion 212. However, in the second embodiment, the coils 110 (coils 110-1 to 110-Nc) are provided at each of the plurality (Nc) positions without scanning the coils 110 in the X direction (horizontal direction). It is a form. Specifically, in the case of the second embodiment, the coils 110-1 to 110-Nc are respectively installed at predetermined positions inside the housing. In the present embodiment, each coil in the coils 110-1 to 110-Nc has the same shape and the same number of turns, and the distance from each coil to the node 213 in the Z direction (vertical direction) is It shall be about the same.

FIG. 8 is a diagram showing an example of the arrangement of the coils 110-1 to 110-Nc used in the second embodiment of the present invention.
When each coil of the coils 110-1 to 110-Nc arranged from the mountain portion 211 to the valley portion 212 is large, these coils 110-1 to 110-Nc are aligned in the X direction (horizontal direction). It is not necessary to arrange the coils, for example, as shown in FIG. 8, the coils 110-1 to 110-Nc may be arranged so as to be diagonally arranged at a distance from each other. Note that FIG. 8 shows an example in which the coils 110-1 to 110-Nc are arranged in two stages in the Y direction (longitudinal direction) of the conductor 200, but the number of coils may be larger depending on the size and number of the coils. It may be arranged in the number of stages.

The scanning control device 133 sets the housing (including the coils 110-1 to 110-Nc inside) mechanically connected to the scanning mechanism 134 in the Z direction (vertical direction) based on the control of the processing / control device 140. ) Is controlled to scan.
The scanning mechanism 134 scans the mechanically connected housing (including the coils 110-1 to 110-Nc inside) in the Z direction (vertical direction) under the control of the scanning control device 133. Specifically, in the present embodiment, the scanning mechanism 134 scans the housing in the Z direction (vertical direction) based on the control of the scanning control device 133, for example, when acquiring calibration data.

Based on the control of the processing / control device 140, the signal switching device 170 sequentially switches each coil of the Nc coils 110-1 to 110-Nc with respect to the LCR meter 120 while switching each coil with a relay switch or the like. It is a switching means for electrically connecting. The signal switching device 170 electrically connects only one of the Nc coils 110-1 to 110-Nc to the LCR meter 120.

The processing / control device 140 comprehensively controls various processes in the shape measuring device 100-2 and operations in the shape measuring device 100-2. As shown in FIG. 7, the processing / control device 140 includes a distance calibration curve storage unit 141, a wave height calibration curve group storage unit 142, an inductance history acquisition unit 143, an average value calculation unit 144, a distance calculation unit 145, and a wave height. It includes a calibration curve acquisition unit 146, an inclination calculation unit 147, and a wave height calculation unit 148.

The distance calibration line storage unit 141 was obtained by using a plurality of coils 110-1 to 110-Nc arranged at positions above the wavy surface 210 when acquiring calibration data, and was obtained in the X direction (horizontal direction). The average value of the inductance history, which is a set of the inductances of the plurality of coils from the peak portion 211 to the valley portion 212 in the direction), and the joint from the coil (for example, the coil 110 arranged at the position Ph above the node 213). A distance calibration line indicating the relationship between the distance to the unit 213 in the Z direction (vertical direction) and the distance is stored.

The wave height calibration line group storage unit 142 was obtained by using a plurality of coils 110-1 to 110-Nc arranged at positions above the wave-shaped surface 210 when acquiring calibration data, as described above. A wave height calibration line showing the relationship between the inclination of the inductance history based on the value of the inductance in the inductance history and the wave height WH which is the height difference between the peak portion 211 and the valley portion 212 in the Z direction (vertical direction). A wave height calibration line group determined for each of the plurality of distances (for example, the distance in the Z direction (vertical direction) from the coil arranged at the position Ph above the node 213) to the node 213 is stored.

When measuring the wave height WH, the inductance history acquisition unit 143 uses a plurality of coils 110-1 to 110-Nc arranged at positions above the wave-shaped surface 210 from the peak portion 211 to the valley portion 212. The inductance history, which is a set of the inductances of the plurality of coils, is acquired. For example, the inductance history acquisition unit 143 acquires the inductance history 301 shown in FIG. 2 when measuring the wave height WH.

Similar to the first embodiment, the mean value calculation unit 144 calculates the average value of the inductance history, which is the average value of the inductance in the inductance history acquired by the inductance history acquisition unit 143, when measuring the wave height WH. calculate.

Similar to the first embodiment, the distance calculation unit 145 is calculated by the average value calculation unit 144 using the distance calibration curve stored in the distance calibration curve storage unit 141 when measuring the wave height WH. From the average value of the inductance history, the distance from the coil 110 (for example, the coil 110 arranged at the position Ph above the node 213) to the node 213 in the Z direction (vertical direction) is calculated.

Similar to the first embodiment, the wave height calibration curve acquisition unit 146 is a distance from the wave height calibration curve group stored in the wave height calibration curve group storage unit 142 when measuring the wave height WH. The wave height calibration curve corresponding to the distance calculated by the calculation unit 145 is acquired.

Similar to the first embodiment, the inclination calculation unit 147 calculates the inclination of the inductance history based on the value of the inductance in the inductance history acquired by the inductance history acquisition unit 143 when measuring the wave height WH. For example, when measuring the wave height WH, the slope calculation unit 147 calculates the slope of the inductance history 301 shown in FIG. 2 on the approximate straight line 302 as the slope of the inductance history.

Similar to the first embodiment, the wave height calculation unit 148 calculates the slope calculation unit 147 using the wave height calibration curve acquired by the wave height calibration curve acquisition unit 146 when measuring the wave height WH. From the slope of the inductance history, the wave height WH, which is the height difference between the peak portion 211 and the valley portion 212 in the Z direction (vertical direction), is calculated.

<Measurement procedure using shape measuring device>
Next, the processing procedure of the measurement method by the shape measuring device 100-2 according to the second embodiment will be described. An example of the processing procedure of the measuring method by the shape measuring device 100-2 according to the second embodiment is the same as in FIG. At this time, in step S101 of FIG. 3, in the first embodiment, the inductance history Lk = L (xk) was acquired by scanning one coil 110 in the X direction (horizontal direction), but the second embodiment. The embodiment differs in that the inductance history Lk = L (xx) is acquired using a plurality of coils 110-1 to 110-Nc fixedly arranged at the horizontal position k. Since the other processes are basically the same as the processes in the first embodiment, the description thereof will be omitted.

<Proofreading data acquisition procedure>
Next, in the second embodiment, the calibration used when creating the distance calibration curve stored in the distance calibration curve storage unit 141 and the wave height calibration curve group stored in the wave height calibration curve group storage unit 142. The procedure for acquiring data will be described.

The shape measuring device 100-2 according to the present embodiment scans a housing containing a plurality of coils 110-1 to 110-Nc in the Z direction (vertical direction) as a configuration for acquiring the calibration data. The scanning control device 133 and the scanning mechanism 134 are provided. Then, the processing / control device 140 controls the scanning control device 133 to position the housing at a predetermined position in the Z direction (vertical direction), while positioning each coil in the plurality of coils 110-1 to 110-Nc. Inductances are obtained from the LCR meter 120 and stored and calibrated along with the distance in the Z direction (vertical direction) from the coil 110 (eg, the coil 110 located at position Ph above the node 213) to the node 213. Get the data.

FIG. 9 is a flowchart showing an example of a procedure for acquiring calibration data by the shape measuring device 100-2 according to the second embodiment of the present invention.
When starting the processing of the flowchart of FIG. 9, N test pieces for creating calibration data are prepared. Further, the distance from the coil 110 (for example, the coil 110 arranged at the position Ph above the node 213) to the node 213 in the Z direction (vertical direction) is M (i) in increments of Δh, where hs is the starting distance. ) The inductance shall be measured at the distance of the points. In the flowchart of FIG. 9, the number of measurement points of the test piece having a wave height of WH (i) is M (i), but this is a distance range in which data can be collected depending on the wave height of the test piece. This is because may be different. Further, in the flowchart of FIG. 9, it is assumed that each coil in the plurality of coils 110-1 to 110-Nc is arranged in the X direction (horizontal direction) at a distance interval of Δx.

First, when a test piece having a wave height of WH (i) is arranged, in step S501, the processing / control device 140 adds i = 1, 2, ..., Which is a subscript for identifying the test piece. N is set sequentially.

Subsequently, in step S502, the processing / control device 140 sets the distance from the coil 110 arranged at the position Ph above the node 213 to the node 213 to h (j) = hs + Δh · (j-1). To do. At this time, the processing / control device 140 sequentially sets j = 1, 2, ..., M (i) in j, which is a subscript for identifying the distance.

Subsequently, in step S503, the processing / control device 140 controls the signal switching device 170, connects the coil k arranged at the horizontal position xk = xs + Δx · (k-1) to the LCR meter 120, and distances it. The inductance Lk (j) of the coil k at h (j) is obtained from the LCR meter 120. At this time, the processing / control device 140 sequentially sets k = 1, 2, ..., Nc (Nc indicates the number of points in the horizontal direction) to k, which is a subscript for identifying the horizontal position. Further, xs indicates the position of the starting coil in the horizontal direction, and Δx indicates the step of the arrangement interval in the X direction (horizontal direction) of each coil.

Subsequently, in step S504, the processing / control device 140 associates the distance h (j) set in step S502 with the distance h (j), and the inductance Lk (j) acquired in step S503 is combined with the distance h (j). In addition to the data acquired so far, it is saved as calibration data in a memory (not shown).

Subsequently, in step S505, the processing / control device 140 changes k by adding 1 to k, which is a subscript for identifying the horizontal position, and whether or not k after the change is larger than Nc. To judge. As a result of this determination, if the changed k is not larger than Nc (S505 / NO), the process returns to step S503, and the changed k is processed after step S503.

On the other hand, as a result of the determination in step S505, if the changed k is larger than Nc (S505 / YES), the process proceeds to step S506. Here, when proceeding to step S506, it is a case where the processes of steps S503 to S504 are repeated Nc times.
Proceeding to step S506, the processing / control device 140 acquires calibration data having an inductance history Lk (j) (k = 1, 2, ..., Nc) in the X direction (horizontal direction) at a distance h (j). To finish.

Subsequently, in step S507, the processing / control device 140 changes j by adding 1 to j, which is a subscript for identifying the distance, and whether or not j after the change is larger than M (i). To judge. As a result of this determination, if the changed j is not larger than M (i) (S507 / NO), the process returns to step S502, and the changed j is processed after step S502.

On the other hand, as a result of the determination in step S507, if the changed j is larger than M (i) (S507 / YES), the process proceeds to step S508. Here, when proceeding to step S508, it is a case where the processes of steps S502 to S506 are repeated M (i) times.
Proceeding to step S508, the processing / control device 140 ends the process of acquiring the calibration data on the test piece having the wave height WH (i).

Subsequently, in step S509, the processing / control device 140 changes i by adding 1 to i, which is a subscript for identifying the test piece, and determines whether or not the changed i is larger than N. to decide. As a result of this determination, if the changed i is not larger than N (S509 / NO), the process returns to step S501, and the changed i is processed after step S501.

On the other hand, as a result of the determination in step S509, if the changed i is larger than N (S509 / YES), the process proceeds to step S510. Here, when proceeding to step S510, it is a case where the processes of steps S501 to S508 are repeated N times.
Proceeding to step S510, the processing / control device 140 ends the process of acquiring calibration data for all the test pieces.

<Procedure for creating a distance calibration curve>
Next, a procedure for creating a distance calibration curve to be stored in the distance calibration curve storage unit 141 will be described using the calibration data acquired by the processing of the flowchart shown in FIG.

An example of a procedure for creating a distance calibration curve by the shape measuring device 100-2 according to the second embodiment is an example of a procedure for creating a distance calibration curve by the shape measuring device 100-1 according to the first embodiment shown in FIG. Is similar to. That is, also in the second embodiment, since the process of the flowchart shown in FIG. 5 is performed to create the distance calibration curve stored in the distance calibration curve storage unit 141, the detailed description thereof will be omitted.

<Procedure for creating wave height calibration curve group>
Next, a procedure for creating a wave height calibration curve group stored in the wave height calibration curve group storage unit 142 will be described using the calibration data acquired by the processing of the flowchart shown in FIG.

An example of the procedure for creating the wave height calibration curve group by the shape measuring device 100-2 according to the second embodiment is the wave height calibration curve group created by the shape measuring device 100-1 according to the first embodiment shown in FIG. It is the same as an example of the creation procedure. That is, also in the second embodiment, since the process of the flowchart shown in FIG. 6 is performed to create the wave height calibration curve group stored in the wave height calibration curve group storage unit 142, detailed description thereof will be omitted.

According to the shape measuring device 100-2 according to the second embodiment described above, the shape measuring device 100-2 is arranged above the wavy surface 210 and extends from the peak portion 211 to the valley portion 212 in the X direction (horizontal direction). The inductance history, which is a set of inductances of a plurality of coils 110-1 to 110-Nc, is acquired, the average value of the inductance history is calculated, and the average value of the inductance history is stored in the distance calibration line storage unit 141. Calculate the distance from the coil 110 to the node 213 in the Z direction (vertical direction) using the existing distance calibration line, and calculate from the wave height calibration line group stored in the wave height calibration line group storage unit 142. Since the wave height inductance line corresponding to the measured distance is acquired and the wave height WH is calculated using the acquired wave height inductance line, it is covered compared to the spread of the magnetic flux created by the coil of the eddy current type distance meter. Even when the shape change of the conductor as the measuring body cannot be ignored, the wave height due to the shape change of the conductor can be measured with high accuracy.

For example, if the wave height WH is quantified using a wave height calibration curve in which the distance from the coil 110 to the node 213 in the Z direction (vertical direction) is constant, the measurement error becomes large and the wave height is measured accurately. Becomes difficult. Therefore, in the present embodiment, the distance from the coil 110 to the node 213 in the Z direction (vertical direction) is calculated, and the wave height calibration curve is changed according to the calculated distance to quantify the wave height WH. ing.
In the present embodiment, the conductor 200 is placed horizontally, the coil 110 is placed above, the plurality of coils 110 are switched in the horizontal direction (X direction), and the wave height on the surface of the conductor 200 is Z. Although the case where the height difference in the directions has been described as an example, the present invention is not limited to such an embodiment, and the coils 110 are arranged so as to face the surface of the conductor 200, and a plurality of coils 110 Is switched along a specific surface of the conductor 200, and the difference in the distance between the wave surface of the surface shape and the coil 110 is defined as the wave height. , It is possible to carry out in the same way.

[Example]
Next, specific examples based on the above-described embodiment of the present invention will be described.

<Shape measuring device>
The shape measuring device 100 used in this embodiment is the shape measuring device 100-1 according to the first embodiment shown in FIG. 1, and one coil 110 is in the X direction (horizontal direction) and the Z direction (vertical direction). It was configured so that it could be scanned. Further, in this embodiment, the coil 110 has an inner diameter of 30 mm, a length of 10 mm, a number of turns of about 180, and an air core inductance of 2.73 mH. The measurement frequency of the LCR meter 120 was set to 12 kHz. Further, the scanning mechanism 132 used an XZ automatic stage driven by a stepping motor and having a 1-pulse movement amount of 2 μm.

<Test piece>
FIG. 10 is a diagram showing a test piece of the conductor 200 used in the embodiment of the present invention.
The material of the test piece was non-magnetic SUS304. The minimum thickness of the test piece from the bottom surface to the valley portion was 30 mm, the width was 250 mm, and the depth was 150 mm. Further, the test piece has a wave height WH of WH (1) = 0 mm (FIG. 10 (a)), WH (2) = 10 mm (FIG. 10 (b)), and WH (3) = 20 mm (FIG. 10), respectively. N = 3 in (c)).

FIG. 10 shows the details of the shape of each test piece. Originally, the Z coordinate was taken in the vertical direction with respect to the bottom surface of the test piece so that the bottom surface was Z = 0 at the origin, and the X coordinate was taken in the direction parallel to the bottom surface of the test piece (horizontal direction). When the X coordinate of the mountain part in the center of one piece is X = 0 of the origin, the horizontal distance from the mountain part to the valley part in the center is X1 = 83 mm, and the minimum thickness is dm = 30 mm, the surface part of the test piece The profile of is assumed to be a sinusoidal shape Z = WH / 2 · (1 + cos (π · X / X1)) + dm, and this is a trapezoidal approximation in mm units. The knot portion was set at a position of X = 41 mm near the middle between the peak portion X = 0 mm and the valley portion X = 83 mm.

<Acquisition of calibration data>
In the X direction (horizontal direction), the scanning start position xs was a peak portion of xs = 0 mm, and the inductance history was acquired at the position of Nc = 84 points in increments of Δx = 1 mm. Further, in the Z direction (vertical direction), the start position hs of the distance h to the node of the test piece is set to hs = 30 mm in increments of Δh = 0.1 mm, and the end position he is set to the range of he = 50 mm. I set it.

For all test pieces of WH (1) = 0 mm, WH (2) = 10 mm and WH (3) = 20 mm, the number of data points in the Z direction (vertical direction) is M (1) = M (2) = M (3). ) = 201 points, and the end position of the distance h to the node of the test piece was set to he = 50 mm. Then, in this embodiment, the scanning mechanism 132 was scanned according to the calibration data acquisition procedure shown in FIG. 4, and the calibration data was acquired.

<Creation of distance calibration curve>
From the coil 110 (for example, the position Ph above the node 213) to the node 213 for the three test pieces of WH (1) = 0 mm, WH (2) = 10 mm, and WH (3) = 20 mm shown in FIG. FIG. 11 shows a graph of the inductance history when the distance h in the Z direction (vertical direction) is 40 mm.

FIG. 11 is a graph of an inductance history showing an embodiment of the present invention and showing the relationship between the position of the coil 110 shown in FIG. 1 in the X direction (horizontal direction) and the inductance of the coil 110.

Further, FIG. 12 shows an embodiment of the present invention, and the distance h and the distance h in the Z direction (vertical direction) from the coil 110 (for example, the position Ph above the node 213) shown in FIG. 1 to the node 213. It is a figure of the graph which shows the relationship with the average value Lm of the inductance history in.
In FIG. 12, the plots of WH (1) = 0 mm and WH (2) = 10 mm almost overlap. Further, in the plot of WH (3) = 20 mm, the average value Lm of the inductance history is slightly lower, but there is almost no problem in calculating the distance, and it can be considered that the three plots are almost the same. ..

In this embodiment, in each test piece, the relationship between the distance h in the Z direction (vertical direction) from the coil 110 (for example, the position Ph above the node 213) to the node 213 and the average value Lm of the inductance history is determined. As the function Fi (h) represented by Lm = Fi (h), a cubic equation relating to h is assumed as in the following equation (1).
Fi (h) = a3 (i) · h ³ + a2 (i) · h ²
+ A1 (i), h + a0 (i) ... (1)

For the Fi (h) of the three test pieces, the coefficients a3 (i), a2 (i), a1 (i) and a0 (i) of the equation (1) are obtained by the least squares method. It became like.

Further, Fi (h) of Eq. (1) was averaged to obtain a distance calibration curve F (h) as shown in Eq. (2) below.
F (h) = a3 ・ h ³ + a2 ・ h ² + a1 ・ h + a0 ・ ・ ・ (2)

However, in the equation (2), a3 = (a3 (1) + a3 (2) + a3 (3)) / 3, and a2 = (a2 (1) + a2 (2) + a2 (3)) / 3. a1 = (a1 (1) + a1 (2) + a1 (3)) / 3, and a0 = (a0 (1) + a0 (2) + a0 (3)) / 3.

The coefficient of the distance calibration curve F (h) is shown at the right end of Table 1, and the graph of the distance calibration curve F (h) is shown by a thick solid line in FIG.

<Creation of wave height calibration curve group>
In this embodiment, the distance h in the Z direction (vertical direction) from the coil 110 (for example, the position Ph above the node 213) to the node 213 is from 30 mm to 50 mm, which is the range of the distance for which the distance calibration curve is created. Was in the range of 35 mm to 45 mm on the inner side, and the number of data points was M2 = 101 points.

Then, for three test pieces of WH (1) = 0 mm, WH (2) = 10 mm, and WH (3) = 20 mm, from the calibration data, from the coil 110 (for example, the position Ph above the node 213). Inductance history data Lk (j) (k = 1, 2, ..., Nc) at a distance h (j) (j = 1, 2, ..., M2) in the Z direction (vertical direction) up to the node 213. Obtained, the slope aL (i) of the inductance history was calculated, and the wave height WH (i) and the slope aL (i) of the inductance history were plotted.

FIG. 13 shows an embodiment of the present invention, in which the distance h in the Z direction (vertical direction) from the coil 110 (for example, the position Ph above the node 213) to the node 213 shown in FIG. 1 is h = 35 mm, h. It is a figure which plotted the relationship between the wave height WH (i) and the slope aL (i) of the inductance history when = 40 mm and h = 45 mm.

From the results shown in FIG. 13, it can be seen that there is a high correlation between the wave height WH (i) and the slope aL (i) of the inductance history. However, when the distance h changes, the relationship between the two changes significantly, so it is necessary to change the wave height calibration curve according to the distance h.

Since there are only three test pieces for creating the wave height calibration curve group, the function Gj (WH) such that aL = Gj (WH) representing the relationship between the wave height WH and the slope aL of the inductance history shown in FIG. As shown in the following equation (3), a quadratic equation (ns = 2) of the maximum degree was adopted as the polynomial for approximating the three data, and the approximation was performed.
Gj (WH) = b2 (h (j)) · WH ²
+ B1 (h (j)), WH + b0 (h (j)) ... (3)

FIG. 14 shows an embodiment of the present invention, and the distance h from the coil 110 (for example, the position Ph above the node 213) to the node 213 in the Z direction (vertical direction) shown in FIG. 1 is h = 35 mm to A plot showing the relationship between h and the coefficients b2 (h (j)), b1 (h (j)), b0 (h (j)) in Eq. (3) in the range of 45 mm, and these plots are the least squares method. It is a figure which shows the result approximated by the polynomial by.

Regarding the coefficients b2 (h), b1 (h), and b0 (h) in the equation (3), the following equation (4) and the following (5) are taken into consideration in consideration of the behavior and the degree of approximation of the data in FIG. 14, respectively. The equation was approximated by the quadratic equation with respect to the distance h in the following equation (6). In addition, each coefficient is shown in Table 2 below.
b2 (h) = b22 ・ h ² + b21 ・ h + b20 ・ ・ ・ (4)
b1 (h) = b12 · h ² + b11 · h + b10 ... (5)
b0 (h) = b02 ・ h ² + b01 ・ h + b00 ・ ・ ・ (6)

As described above, the calibration data (h (j), bs) obtained discretely with respect to the distance h in the Z direction (vertical direction) from the coil 110 (for example, the position Ph above the node 213) to the node 213. By performing function approximation from (h (j))), even when a continuous value h is given, the corresponding coefficient bs (h) can be uniquely obtained.

Furthermore, bs (h) (s = 0) corresponds to the function Gj (WH) such that aL = Gj (WH), which is obtained by developing the equation (3) and taking a discrete value, as in the following equation (7). By defining the function G (h, WH) of the distance h and the wave height WH using, 1 and 2), the wave height calibration curve group aL = G (h, WH) can be obtained.
G (h, WH) = b2 (h), WH ² + b1 (h), WH + b0 (h) ... (7)

<Measurement example of wave height>
Next, an example in which the wave height WH is measured using the distance calibration curve and the wave height calibration curve group obtained by the above-mentioned calibration procedure will be described.

First, the distance calibration curve F (h) was prepared by substituting the numerical values in Table 1 for the coefficients a3, a2, a1 and a0 in Eq. (2). The wave height calibration curve group G (h, WH) represents the coefficients b2 (h), b1 (h), and b0 (h) of the equation (7), and the coefficients (b22) of the equations (4) to (6). , B21, b20), (b12, b11, b10), (b02, b01, b00) with the values in Table 2 substituted.

Since there is no new test piece available for measurement, the calibration data obtained at intervals of Δh = 0.1 mm in the range of distance h = 30 mm to 50 mm at the time of calibration is regarded as the measurement data obtained in the measurement. The distance h and the wave height WH in the Z direction (vertical direction) from the coil 110 (for example, the position Ph above the node 213) to the node 213 were calculated as unknowns.

First, Lm = F (h) obtained by substituting the average value Lm of the inductance history into the distance calibration line is solved by regarding it as an equation related to the unknown number h, and the section is started from the coil 110 (for example, the position Ph above the node 213). The distance h in the Z direction (vertical direction) to the part 213 was calculated.

In this example, Lm = F (h) is a cubic equation, so a real number solution in the range of h = 30 mm to 50 mm was obtained using Cardano's solution formula. When F (h) is a quartic equation Lm = F (h), an algebraic solution formula can be used, but in the case of a higher-order or complicated non-linear equation that cannot be solved algebraically, Alternatively, even in the case of a cubic equation or a quartic equation in which a solution formula exists, if the determination of the real number solution is complicated, the unknown number h is calculated by using a numerical solution method such as the Newton method.

FIG. 15 shows a test piece having a wave height of WH (1) = 0 mm, WH (2) = 10 mm, WH (3) = 20 mm shown in FIG. 10 above the coil 110 (for example, node 213) shown in FIG. It is a figure which shows the collation result of the set value about the distance h in the Z direction (vertical direction) from a position Ph) to a node 213, and the calculated measured value.

For the test piece having a wave height of WH (3) = 20 mm shown in FIG. 15 (c), the wave heights shown in FIGS. 15 (a) and 15 (b) are WH (1) = 0 mm and WH (2) =. Compared to the 10 mm test piece, the measured value is slightly lower than the set value due to the deviation of the data from the distance calibration curve shown in FIG. 12, but there is no problem in accuracy for all the test pieces. The distance can be measured normally in the range.

Then, the calculated distance h was substituted into the wave height calibration curve group aL = G (h, WH) to obtain the wave height calibration curve aL = G (h, WH).

After that, the calculated slope aL of the inductance history is substituted into the wave height calibration curve aL = G (h, WH), and aL = G (h, WH) is solved by regarding it as an equation with the wave height WH as an unknown number. The wave height WH was calculated.

In this example, aL = G (h, WH) is a quadratic equation for WH, so a real number solution was obtained using the solution formula. In the case of a higher order that cannot be solved algebraically, or in the case of a complicated nonlinear equation, the unknown WH is calculated by using a numerical solution method such as Newton's method.

FIG. 16 shows an embodiment of the present invention, in which the distances h from the coil 110 (for example, the position Ph above the node 213) to the node 213 in the Z direction (vertical direction) shown in FIG. 1 are 35 mm, 40 mm, and 45 mm. It is a figure which shows the collation result of the set value about the wave height at the time of, and the calculated measured value.

When the distance h changes, the slope aL of the inductance history changes significantly as shown in FIG. 13, but by using the wave height calibration curve corresponding to the distance h, the wave height does not depend on the distance h as shown in FIG. WH can be quantified.

<Supplementary information on how to calculate the distance calibration curve>
In this embodiment, in each test piece, the distance h (j) from the coil 110 (for example, the position Ph above the node 213) to the node 213 in the Z direction (vertical direction) and the average value Lm of the inductance history (Lm). Based on the discrete data of j), a function of Lm = Fi (h) representing the relationship between the distance h and the average value Lm of the inductance history is obtained, and then these are averaged to obtain the distance Lm = F (h). The function F (h) of the calibration line was obtained, but it is not always necessary to average the functions Fi (h) obtained in all the test pieces, and any number (for example, one) of test pieces can be used. It may be extracted and the distance calibration line may be calculated.

As an example of these, F1 (h) obtained for a test piece having a wave height WH (1) = 0 mm may be referred to as F (h), and the wave height WH (1) = 0 mm and the wave height WH (3). The average of F1 (h) and F3 (h) obtained for a test piece of = 20 mm may be a function F (h).

(Other embodiments)
In the first and second embodiments of the present invention described above, the embodiment using the average value of the inductance history has been described, but the present invention is not limited to this embodiment, for example, the inductance history. A form in which the “median value of the inductance history” is used instead of the average value of is also applicable to the present invention.

The present invention is also realized by executing the following processing.
That is, software (program) that realizes the functions of the above-described embodiment is supplied to the system or device via a network or various storage media, and the computer (or CPU, MPU, etc.) of the system or device reads the program. This is the process to be executed.
This program and a computer-readable recording medium that stores the program are included in the present invention.

It should be noted that the above-described embodiments of the present invention merely show examples of embodiment in carrying out the present invention, and the technical scope of the present invention should not be construed in a limited manner by these. Is. That is, the present invention can be implemented in various forms without departing from the technical idea or its main features.

100-1 Shape measuring device, 110 coil, 120 LCR meter, 131 scanning control device, 132 scanning mechanism, 140 processing / control device, 141 distance calibration curve storage unit, 142 wave height calibration curve storage unit, 143 inductance history acquisition unit 144 Average value calculation unit, 145 Distance calculation unit, 146 Wave height calibration curve acquisition unit, 147 Tilt calculation unit, 148 Wave height calculation unit, 150 Input device, 160 Output device, 200 Conductor (measured object), 210 Conductivity Body surface, 211 peaks, 212 valleys, 213 nodes, WH wave height

Claims (4)

A shape measuring device that measures the shape of a conductor by measuring the inductance.
A coil arranged at a position facing the corrugated surface of the conductor,
A scanning means for scanning the coil from the wave-shaped peak to the valley,
An inductance history acquisition means that acquires an inductance history, which is a set of inductance values from the peak portion to the valley portion in the scanning direction of the scanning means, by scanning the coil with the scanning means.
An average value calculating means for calculating the average value of the inductance history, which is the average value of the inductance values in the inductance history, and
A slope calculating means for calculating the slope of the inductance history, which is the slope of the value of the inductance in the inductance history with respect to the scanning direction.
A distance calibration curve storage means for storing a distance calibration curve indicating the relationship between the average value of the inductance history and the distance from the wave-shaped node located between the peak and the valley to the coil. When,
A wave height calibration curve showing the relationship between the slope of the inductance history and the wave height, which is the distance difference between the peak portion and the valley portion as seen from the coil during scanning, is defined for each of the plurality of distances. Wave height calibration curve group storage means for storing the calibration curve group,
Have,
Using the distance calibration curve, the distance from the coil to the node is calculated from the average value of the inductance history calculated by the mean value calculating means.
From the wave height calibration curve group, the wave height calibration curve corresponding to the calculated distance is acquired.
A shape measuring device characterized in that the wave height is calculated from the slope of the inductance history calculated by the slope calculating means using the wave height calibration curve. A shape measuring device that measures the shape of a conductor by measuring the inductance.
A plurality of coils fixedly arranged at positions facing the wave-shaped surface of the conductor and provided between the wave-shaped peaks and valleys, and
An inductance history acquisition means for acquiring an inductance history, which is a set of inductance values from the peak to the valley of the wave shape, by switching the plurality of coils.
An average value calculating means for calculating the average value of the inductance history, which is the average value of the inductance values in the inductance history, and
A slope calculating means for calculating the slope of the inductance history, which is the slope of the value of the inductance in the inductance history with respect to the switching direction.
A distance calibration curve storage means for storing a distance calibration curve indicating the relationship between the average value of the inductance history and the distance from the wave-shaped node located between the peak and the valley to the coil. When,
A wave height calibration curve showing the relationship between the inclination of the inductance history and the wave height which is the distance difference between the peak portion and the valley portion as seen from the coil at the time of switching is defined for each of the plurality of distances. Wave height calibration curve group storage means for storing the calibration curve group,
Have,
Using the distance calibration curve, the distance from the coil to the node is calculated from the average value of the inductance history calculated by the mean value calculating means.
From the wave height calibration curve group, the wave height calibration curve corresponding to the calculated distance is acquired.
A shape measuring device characterized in that the wave height is calculated from the slope of the inductance history calculated by the slope calculating means using the wave height calibration curve. It is a shape measurement method that measures the shape of a conductor by measuring the inductance.
A scanning step of scanning from the peak to the valley of the wave shape using a coil arranged at a position facing the wave shape surface of the conductor.
An inductance history acquisition step of acquiring an inductance history, which is a set of inductance values from the peak portion to the valley portion, by scanning the coil.
An average value calculation step for calculating the average value of the inductance history, which is the average value of the inductance values in the inductance history, and
A slope calculation step for calculating the slope of the inductance history, which is the slope of the value of the inductance in the inductance history with respect to the scanning direction.
A distance calibration curve storage step for storing a distance calibration curve indicating the relationship between the average value of the inductance history and the distance from the wave-shaped node located between the peak and the valley to the coil. When,
A wave height calibration curve showing the relationship between the slope of the inductance history and the wave height, which is the distance difference between the peak portion and the valley portion as seen from the coil during scanning, is defined for each of the plurality of distances. Wave height calibration curve group storage step to store the calibration curve group,
Have,
Using the distance calibration curve, the distance from the coil to the node is calculated from the average value of the inductance history calculated in the average value calculation step.
From the wave height calibration curve group, the wave height calibration curve corresponding to the calculated distance is acquired.
A shape measuring method characterized in that the wave height is calculated from the slope of the inductance history calculated in the slope calculation step using the wave height calibration curve. It is a shape measurement method that measures the shape of a conductor by measuring the inductance.
By switching a plurality of coils provided between the wave-shaped peaks and valleys, which are fixedly arranged at positions facing the wave-shaped surface of the conductor, from the wave-shaped peaks. Inductance history acquisition step to acquire inductance history, which is a set of inductance values up to the valley,
An average value calculation step for calculating the average value of the inductance history, which is the average value of the inductance values in the inductance history, and
A slope calculation step for calculating the slope of the inductance history, which is the slope of the value of the inductance in the inductance history with respect to the switching direction.
A distance calibration curve storage step for storing a distance calibration curve indicating the relationship between the average value of the inductance history and the distance from the wave-shaped node located between the peak and the valley to the coil. When,
A wave height calibration curve showing the relationship between the inclination of the inductance history and the wave height which is the distance difference between the peak portion and the valley portion as seen from the coil at the time of switching is defined for each of the plurality of distances. Wave height calibration curve group storage step to store the calibration curve group,
Have,
Using the distance calibration curve, the distance from the coil to the node is calculated from the average value of the inductance history calculated in the average value calculation step.
From the wave height calibration curve group, the wave height calibration curve corresponding to the calculated distance is acquired.
A shape measuring method characterized in that the wave height is calculated from the slope of the inductance history calculated in the slope calculation step using the wave height calibration curve.