JP6465026B2 - Method for producing sulfonium salt compound and intermediate thereof - Google Patents

Description

  The present invention relates to a method for producing a sulfonium salt compound useful as, for example, an acid generator, a cationic polymerization initiator, an acid diffusion inhibitor used in the resist field, and the like, and more specifically, using a sulfonium bicarbonate salt as a raw material. The present invention relates to a method for producing a sulfonium salt compound and the sulfonium bicarbonate sulfonium salt.

  Triarylsulfonium salt compounds are widely used as photoacid generators, cationic polymerization initiators, acid diffusion inhibitors, and the like, for example, in photolithography processes in the field of semiconductor manufacturing.

  Triarylsulfonium salt compounds are prepared by going through synthetic intermediates such as triarylsulfonium halides such as triarylsulfonium chloride and triarylsulfonium bromide.

  That is, the triarylsulfonium salt compound is obtained by reacting, for example, (1) a diarylsulfoxide with a Grignard reagent in the presence of chlorotrimethylsilane (for example, Patent Document 1), 2) A method of reacting diaryl sulfoxide or thionyl chloride with an aromatic hydrocarbon in the presence of aluminum chloride (for example, Patent Document 2), (3) A method of reacting a diaryl sulfide and a diaryl iodonium salt (for example, Patent Document 3), etc. And then by salt exchange of the halide portion (counter anion) of the triarylsulfonium halide obtained by such a method.

  Although triarylsulfonium halide is a stable and easy-to-handle synthetic intermediate, the exchange activity of the counter anion is not high, so the exchangeable counter anion is limited to anions derived from super strong acids such as fluorosulfonic acid. It was.

  On the other hand, in the production of a triarylsulfonium salt compound having a counter anion derived from a weak acid, a method via triarylsulfonium hydroxide is known by treating triarylsulfonium halide with silver oxide or an anion exchange resin. (For example, patent document 4). Triarylsulfonium hydroxide is an intermediate with very high counteranion exchange activity, so it can react with weak acids such as sulfonic acids and carboxylic acids to produce the corresponding triarylsulfonium salt compounds. . However, since triarylsulfonium hydroxide is unstable and difficult to store for a long period of time, it must be used immediately after preparation.

International Publication WO2005 / 037778 JP 2009-084219 A International Publication WO2010 / 055887 JP 2004-292389 A

  By the way, in recent years, sulfonium salt compounds having counter anions derived from weak acids such as sulfonic acids and carboxylic acids have been used as acid diffusion inhibitors for trapping strong acids generated by exposure in patterning in the resist field and the like. . Various resists and strong acids used for patterning are known, and combinations thereof are also various. Therefore, since it is difficult to predict whether a sulfonium salt compound having a counter anion derived from a weak acid properly acts as an acid diffusion inhibitor for the resist and strong acid used, these sulfonium salt compounds The actual condition is that an appropriate sulfonium salt compound is determined by screening. However, in order to produce a sulfonium salt compound having a counter anion derived from a weak acid by a conventional method, it is necessary to convert to a sulfonium hydroxide each time. Therefore, various sulfonium salt compounds are synthesized and evaluated by screening. However, there is a problem that the synthesis of the sulfonium salt compound itself is complicated. Under such circumstances, development of a production method capable of efficiently producing a sulfonium salt compound having an anion derived from a weak acid as a counter anion is desired.

  The present invention has been made in view of the above situation, and can efficiently produce a sulfonium salt compound having various counter anions, and in particular, can efficiently produce a sulfonium salt compound having a counter anion derived from a weak acid. It is in providing the manufacturing method of.

The present invention comprises the following configurations [I] and [II].
[I] A process for producing a sulfonium salt compound represented by the general formula (2), comprising reacting a sulfonium hydrogen carbonate salt represented by the general formula (1) with an organic acid.

（式中、Ｒ^１〜Ｒ^１５はそれぞれ独立して、水素原子、炭素数１〜１２のアルキル基、炭素数１〜１２のアルコキシ基、炭素数２〜１２のアルコキシカルボニル基、炭素数６〜１０のアリール基、炭素数６〜１０のアリールオキシ基、炭素数６〜１０のアリールチオ基、炭素数７〜１１のアリールオキシカルボニル基、ハロゲン原子またはヒドロキシル基を表し、隣接する２つのＲが互いに結合して環構造を形成していてもよい。）

(Wherein R ^{1 to} R ¹⁵ are each independently a hydrogen atom, an alkyl group having 1 to 12 carbon atoms, an alkoxy group having 1 to 12 carbon atoms, an alkoxycarbonyl group having 2 to 12 carbon atoms, or 6 to 6 carbon atoms). Represents an aryl group having 10 carbon atoms, an aryloxy group having 6 to 10 carbon atoms, an arylthio group having 6 to 10 carbon atoms, an aryloxycarbonyl group having 7 to 11 carbon atoms, a halogen atom or a hydroxyl group. It may be bonded to form a ring structure.)

（式中、Ｚ⁻は有機酸由来のアニオンを表し、Ｒ^１〜Ｒ^１５は上記に同じ。）

(In the formula, Z ⁻ represents an anion derived from an organic acid, and R ^{1 to} R ¹⁵ are the same as above.)

  [II] A sulfonium hydrogencarbonate salt represented by the general formula (1 ′).

（式中、Ｒ^１'〜Ｒ^１５'はそれぞれ独立して、水素原子、炭素数１〜１２のアルキル基、炭素数１〜１２のアルコキシ基、炭素数２〜１２のアルコキシカルボニル基、炭素数６〜１０のアリール基、炭素数６〜１０のアリールオキシ基、炭素数６〜１０のアリールチオ基、炭素数７〜１１のアリールオキシカルボニル基、ハロゲン原子またはヒドロキシル基を表し、隣接する２つのＲ'が互いに結合して環構造を形成していてもよい。ただし、Ｒ^１'〜Ｒ^１５'のすべてが水素原子である場合を除く。）

Wherein R ^{1 ′ to} R ^{15 ′} are each independently a hydrogen atom, an alkyl group having 1 to 12 carbon atoms, an alkoxy group having 1 to 12 carbon atoms, an alkoxycarbonyl group having 2 to 12 carbon atoms, or a carbon number. Represents an aryl group having 6 to 10 carbon atoms, an aryloxy group having 6 to 10 carbon atoms, an arylthio group having 6 to 10 carbon atoms, an aryloxycarbonyl group having 7 to 11 carbon atoms, a halogen atom or a hydroxyl group, and two adjacent R 'May be bonded to each other to form a ring structure, except that all of R ^{1 ′ to} R ^{15 ′} are hydrogen atoms.)

  The method for producing a sulfonium salt compound of the present invention uses a sulfonium hydrogen carbonate salt having a high counteranion exchange activity and good storage stability (high storage stability) as a raw material. This is a method capable of easily and efficiently producing a wide range of sulfonium salt compounds including a sulfonium salt compound having a counter anion derived from a weak acid. In addition, if the production method of the present invention is used, various sulfonium salt compounds can be easily synthesized, so that the target sulfonium salt compound can be quickly screened.

  In addition, the sulfonium hydrogencarbonate salt of the present invention can be easily produced from sulfonium halides having various structures, and can be a raw material for efficiently producing sulfonium salt compounds having different anion moiety structures. Furthermore, the sulfonium hydrogen carbonate salt of the present invention has good storage stability and is suitable for the production of a wide range of sulfonium salt compounds. If the sulfonium hydrogen carbonate salt of the present invention is used as an intermediate, there is an effect that it is effective in reducing the production cost.

  As a result of intensive studies to achieve the above-mentioned object, the inventors of the present invention have produced a sulfonium salt compound. The inventors have found that salt exchange can be easily performed, and have completed the present invention.

-Method for producing sulfonium salt compound of the present invention-
The production method of the present invention is a method for producing a sulfonium salt compound represented by the following general formula (2), which comprises reacting a hydrogen carbonate sulfonium salt represented by the following general formula (1) with an organic acid. It is what.

（式中、Ｒ^１〜Ｒ^１５はそれぞれ独立して、水素原子、炭素数１〜１２のアルキル基、炭素数１〜１２のアルコキシ基、炭素数２〜１２のアルコキシカルボニル基、炭素数６〜１０のアリール基、炭素数６〜１０のアリールオキシ基、炭素数６〜１０のアリールチオ基、炭素数７〜１１のアリールオキシカルボニル基、ハロゲン原子またはヒドロキシル基を表し、隣接する２つのＲが互いに結合して環構造を形成していてもよい。）

(Wherein R ^{1 to} R ¹⁵ are each independently a hydrogen atom, an alkyl group having 1 to 12 carbon atoms, an alkoxy group having 1 to 12 carbon atoms, an alkoxycarbonyl group having 2 to 12 carbon atoms, or 6 to 6 carbon atoms). Represents an aryl group having 10 carbon atoms, an aryloxy group having 6 to 10 carbon atoms, an arylthio group having 6 to 10 carbon atoms, an aryloxycarbonyl group having 7 to 11 carbon atoms, a halogen atom or a hydroxyl group. It may be bonded to form a ring structure.)

（式中、Ｚ⁻は有機酸由来のアニオンを表し、Ｒ^１〜Ｒ^１５は上記に同じ。）

(In the formula, Z ⁻ represents an anion derived from an organic acid, and R ^{1 to} R ¹⁵ are the same as above.)

The alkyl group having 1 to 12 carbon atoms represented by R ^{1 to} R ¹⁵ in the general formulas (1) and (2) may be linear, branched or cyclic, specifically For example, methyl group, ethyl group, n-propyl group, isopropyl group, n-butyl group, isobutyl group, sec-butyl group, tert-butyl group, cyclobutyl group, n-pentyl group, isopentyl group, sec-pentyl group, tert-pentyl group, neopentyl group, 2-methylbutyl group, 1,2-dimethylpropyl group, 1-ethylpropyl group, cyclopentyl group, n-hexyl group, isohexyl group, sec-hexyl group, tert-hexyl group, neohexyl group 2-methylpentyl group, 1,2-dimethylbutyl group, 2,3-dimethylbutyl group, 1-ethylbutyl group, cyclohexyl group, n-heptyl group, isoheptyl group, sec-heptyl group Tert-heptyl group, neoheptyl group, cycloheptyl group, n-octyl group, isooctyl group, sec-octyl group, tert-octyl group, neooctyl group, 2-ethylhexyl group, cyclooctyl group, n-nonyl group, isononyl group , Sec-nonyl group, tert-nonyl group, neononyl group, cyclononyl group, n-decyl group, isodecyl group, sec-decyl group, tert-decyl group, neodecyl group, cyclodecyl group, n-undecyl group, cycloundecyl group , N-dodecyl group, cyclododecyl group, nonylbonyl group (norbornane-χ-yl group), bornyl group (bornan-χ-yl group), menthyl group (menta-χ-yl group), adamantyl group, decahydronaphthyl group Among them, for example, methyl group, ethyl group, n-propyl group, isopropyl group, n-butyl group, isobutyl group, sec-butyl group, tert-butyl group, etc. Til, cyclobutyl, n-pentyl, isopentyl, sec-pentyl, tert-pentyl, neopentyl, 2-methylbutyl, 1,2-dimethylpropyl, 1-ethylpropyl, cyclopentyl, n -Hexyl group, isohexyl group, sec-hexyl group, tert-hexyl group, neohexyl group, 2-methylpentyl group, 1,2-dimethylbutyl group, 2,3-dimethylbutyl group, 1-ethylbutyl group, cyclohexyl group, etc. A linear, branched or cyclic alkyl group having 1 to 6 carbon atoms is preferred.

The alkoxy group having 1 to 12 carbon atoms represented by R ^{1 to} R ¹⁵ in the general formulas (1) and (2) may be linear, branched or cyclic, specifically For example, methoxy group, ethoxy group, n-propoxy group, isopropoxy group, n-butoxy group, isobutoxy group, sec-butoxy group, tert-butoxy group, cyclobutoxy group, n-pentyloxy group, isopentyloxy group, sec-pentyloxy group, tert-pentyloxy group, neopentyloxy group, 2-methylbutoxy group, 1,2-dimethylpropoxy group, 1-ethylpropoxy group, cyclopentyloxy group, n-hexyloxy group, isohexyloxy Group, sec-hexyloxy group, tert-hexyloxy group, neohexyloxy group, 2-methylpentyloxy group, 1,2-dimethylbutoxy group, 2, -Dimethylbutoxy group, 1-ethylbutoxy group, cyclohexyloxy group, n-heptyloxy group, isoheptyloxy group, sec-heptyloxy group, tert-heptyloxy group, neoheptyloxy group, cycloheptyloxy group, n- Octyloxy group, isooctyloxy group, sec-octyloxy group, tert-octyloxy group, neooctyloxy group, 2-ethylhexyloxy group, cyclooctyloxy group, n-nonyloxy group, isononyloxy group, sec-nonyloxy group Group, tert-nonyloxy group, neononyloxy group, cyclononyloxy group, n-decyloxy group, isodecyloxy group, sec-decyloxy group, tert-decyloxy group, neodecyloxy group, cyclodecyloxy group, n-un Decyloxy, cycloundecyloxy, n-dodecyloxy, cycl Dodecyloxy group, norbornyloxy group (norbornane-χ-yloxy group), bornyloxy group (bornane-χ-yloxy group), menthyloxy group (menta-χ-yloxy group), adamantyloxy group, decahydronaphthyloxy group Among them, for example, methoxy group, ethoxy group, n-propoxy group, isopropoxy group, n-butoxy group, isobutoxy group, sec-butoxy group, tert-butoxy group, cyclobutoxy group, n-pentyloxy Group, isopentyloxy group, sec-pentyloxy group, tert-pentyloxy group, neopentyloxy group, 2-methylbutoxy group, 1,2-dimethylpropoxy group, 1-ethylpropoxy group, cyclopentyloxy group, n- Hexyloxy group, isohexyloxy group, sec-hexyloxy group, tert-hexyloxy group, neo C1-C6 linear or branched such as xyloxy group, 2-methylpentyloxy group, 1,2-dimethylbutoxy group, 2,3-dimethylbutoxy group, 1-ethylbutoxy group, cyclohexyloxy group Alternatively, a cyclic alkoxy group is preferable, and among them, for example, methoxy group, ethoxy group, n-propoxy group, isopropoxy group, n-butoxy group, isobutoxy group, sec-butoxy group, tert-butoxy group, cyclobutoxy group, etc. The linear, branched or cyclic alkoxy group having 1 to 4 carbon atoms is more preferable.

The alkoxycarbonyl group having 2 to 12 carbon atoms represented by R ^{1 to} R ¹⁵ in the general formulas (1) and (2) may be linear, branched or cyclic, specifically Is, for example, a methoxycarbonyl group, an ethoxycarbonyl group, an n-propoxycarbonyl group, an isopropoxycarbonyl group, an n-butoxycarbonyl group, an isobutoxycarbonyl group, a sec-butoxycarbonyl group, a tert-butoxycarbonyl group, a cyclobutoxycarbonyl group, n-pentyloxycarbonyl group, isopentyloxycarbonyl group, sec-pentyloxycarbonyl group, tert-pentyloxycarbonyl group, neopentyloxycarbonyl group, 2-methylbutoxycarbonyl group, 1,2-dimethylpropoxycarbonyl group, 1 -Ethylpropoxycarbonyl group, cyclope Tiloxycarbonyl group, n-hexyloxycarbonyl group, isohexyloxycarbonyl group, sec-hexyloxycarbonyl group, tert-hexyloxycarbonyl group, neohexyloxycarbonyl group, 2-methylpentyloxycarbonyl group, 1,2- Dimethylbutoxycarbonyl group, 2,3-dimethylbutoxycarbonyl group, 1-ethylbutoxycarbonyl group, cyclohexyloxycarbonyl group, n-heptyloxycarbonyl group, isoheptyloxycarbonyl group, sec-heptyloxycarbonyl group, tert-heptyloxy Carbonyl group, neoheptyloxycarbonyl group, cycloheptyloxycarbonyl group, n-octyloxycarbonyl group, isooctyloxycarbonyl group, sec-octyloxycarbonyl group, tert-octyloxycarboni Group, neooctyloxycarbonyl group, 2-ethylhexyloxycarbonyl group, cyclooctyloxycarbonyl group, n-nonyloxycarbonyl group, isononyloxycarbonyl group, sec-nonyloxycarbonyl group, tert-nonyloxycarbonyl group, neononyl Oxycarbonyl group, cyclononyloxycarbonyl group, n-decyloxycarbonyl group, isodecyloxycarbonyl group, sec-decyloxycarbonyl group, tert-decyloxycarbonyl group, neodecyloxycarbonyl group, cyclodecyloxycarbonyl group, n -Undecyloxycarbonyl group, cycloundecyloxycarbonyl group, norbornyloxycarbonyl group (norbornane-χ-yloxycarbonyl group), bornyloxycarbonyl group (bornane-χ-yloxycarbonyl) ), Menthyloxycarbonyl group (menta-χ-yloxycarbonyl group), adamantyloxycarbonyl group, decahydronaphthyloxycarbonyl group and the like. Among them, for example, methoxycarbonyl group, ethoxycarbonyl group, n-propoxycarbonyl group , Isopropoxycarbonyl group, n-butoxycarbonyl group, isobutoxycarbonyl group, sec-butoxycarbonyl group, tert-butoxycarbonyl group, cyclobutoxycarbonyl group, n-pentyloxycarbonyl group, isopentyloxycarbonyl group, sec-pentyl Oxycarbonyl group, tert-pentyloxycarbonyl group, neopentyloxycarbonyl group, 2-methylbutoxycarbonyl group, 1,2-dimethylpropoxycarbonyl group, 1-ethylpropoxycarbonyl group, cyclopentyl Xoxycarbonyl group, n-hexyloxycarbonyl group, isohexyloxycarbonyl group, sec-hexyloxycarbonyl group, tert-hexyloxycarbonyl group, neohexyloxycarbonyl group, 2-methylpentyloxycarbonyl group, 1,2-dimethyl A linear, branched or cyclic alkoxycarbonyl group having 2 to 7 carbon atoms such as butoxycarbonyl group, 2,3-dimethylbutoxycarbonyl group, 1-ethylbutoxycarbonyl group, cyclohexyloxycarbonyl group and the like is preferable. However, for example, methoxycarbonyl group, ethoxycarbonyl group, n-propoxycarbonyl group, isopropoxycarbonyl group, n-butoxycarbonyl group, isobutoxycarbonyl group, sec-butoxycarbonyl group, tert-butoxycarbonyl group, cyclobutoxycar Alkenyl group number of 2 to 5 straight in, alkoxycarbonyl group branched or cyclic is more preferable.

The aryl group having 6 to 10 carbon atoms represented by R ^{1 to} R ¹⁵ in the general formulas (1) and (2) may be monocyclic or condensed polycyclic, specifically, Examples thereof include a phenyl group and a naphthyl group. Among them, a phenyl group which is an aryl group having 6 carbon atoms is preferable.

The aryloxy group having 6 to 10 carbon atoms represented by R ^{1 to} R ¹⁵ in the general formulas (1) and (2) may be monocyclic or condensed polycyclic, specifically Examples thereof include a phenyloxy group and a naphthyloxy group, and among them, a phenyloxy group which is an aryloxy group having 6 carbon atoms is preferable.

The arylthio group having 6 to 10 carbon atoms represented by R ^{1 to} R ¹⁵ in the general formulas (1) and (2) may be monocyclic or condensed polycyclic, and specifically, Examples thereof include a phenylthio group and a naphthylthio group. Among them, a phenylthio group which is an arylthio group having 6 carbon atoms is preferable.

The aryloxycarbonyl group having 7 to 11 carbon atoms represented by R ^{1 to} R ¹⁵ in the general formulas (1) and (2) may be monocyclic or condensed polycyclic, specifically Examples thereof include a phenyloxycarbonyl group and a naphthyloxycarbonyl group, and among them, a phenyloxycarbonyl group which is an aryloxycarbonyl group having 7 carbon atoms is preferable.

Specific examples of the halogen atom represented by R ^{1 to} R ¹⁵ in the general formulas (1) and (2) include a fluorine atom, a chlorine atom, a bromine atom, and an iodine atom. Among them, a fluorine atom A chlorine atom is preferable, and a fluorine atom is more preferable among them.

In the general formulas (1) and (2), when two adjacent Rs are bonded to each other to form a ring structure, the two Rs are R ¹ and R ² , R ² and R ³ , R ³ and R ⁴ , R ⁴ and R ⁵ , R ⁶ and R ⁷ , R ⁷ and R ⁸ , R ⁸ and R ⁹ , R ⁹ and R ¹⁰ , R ¹¹ and R ¹² , R ¹² and R ¹³ , R ¹³ and R ¹⁴ and Two Rs selected from the combination of R ¹⁴ and R ¹⁵ are indicated. That is, it means that these two adjacent Rs form a ring structure together with the alkylene chain (two carbon atoms) constituting the benzene ring. Further, the ring structure is not limited to one, and a plurality of ring structures may be formed. The ring structure may be either an aliphatic ring or an aromatic ring. Specifically, for example, an aliphatic ring having 5 to 8 carbon atoms such as a cyclopentene ring, a cyclohexene ring, a cycloheptene ring, a cyclooctene ring, For example, C6-C10 aromatic rings, such as a benzene ring and a naphthalene ring, are mentioned.

Examples of the anion derived from an organic acid represented by Z ⁻ in the general formula (2) include anions derived from an organic acid such as an anion derived from a carboxylic acid, an anion derived from a sulfonic acid, and an anion derived from a sulfonimide.

  Specific examples of the anion derived from carboxylic acid include, for example, formate ion, acetate ion, propionate ion, butyrate ion, isobutyrate ion, valerate ion, isovalerate ion, pivalate ion, hydroangelic acid ion, caproic acid ion , Enanthate ion, caprylate ion, pelargonate ion, caprate ion, laurate ion, cyclopentanecarboxylate ion, cyclohexanecarboxylate ion, 1-adamantane carboxylate ion, 2-adamantane carboxylate ion, etc. ~ 20 alkyl carboxylate ions such as trifluoroacetate ion, perfluoropropionate ion, perfluorobutanoate ion, perfluorodimethylacetate ion, perfluoropentanoate ion, perfluoro-2-methylbutanoate ion, Perfluoro-3-methylbutanoic acid ion, perfluoro-2,2-dimethylpropanoic acid ion, perfluorohexanoic acid ion, perfluoroheptanoic acid ion, perfluorooctanoic acid ion, perfluorononanoic acid ion, perfluorodecanoic acid ion , Tricosafluorododecanoic acid ion, perfluorocyclopentanecarboxylic acid ion, perfluorocyclohexanecarboxylic acid ion, perfluoro-1-adamantane carboxylate ion, perfluoro-2-adamantane carboxylate ion, etc. Examples thereof include fluoroalkylcarboxylic acid ions, for example, arylcarboxylic acid ions having 7 to 20 carbon atoms such as benzoic acid ions, salicylic acid ions, naphthalenecarboxylic acid ions, and anthracenecarboxylic acid ions. Among these anions derived from carboxylic acid, for example, acetate ion, propionate ion, butyrate ion, isobutyrate ion, valerate ion, isovalerate ion, pivalate ion, hydroangelic acid ion, caproic acid ion, enanthic acid 2-11 carbon atoms such as ion, caprylate ion, pelargonate ion, caprate ion, laurate ion, cyclopentanecarboxylate ion, cyclohexanecarboxylate ion, 1-adamantanecarboxylate ion, 2-adamantanecarboxylate ion, etc. Alkylcarboxylate ions such as trifluoroacetate ion, perfluoropropionate ion, perfluorobutanoate ion, perfluorodimethylacetate ion, perfluoropentanoate ion, perfluoro-2-methylbutanoate ion, perfluoro Rho-3-methylbutanoic acid ion, perfluoro-2,2-dimethylpropanoic acid ion, perfluorohexanoic acid ion, perfluoroheptanoic acid ion, perfluorooctanoic acid ion, perfluorononanoic acid ion, perfluorodecanoic acid ion, Fluorocarbon having 2 to 12 carbon atoms such as tricosafluorododecanoic acid ion, perfluorocyclopentanecarboxylic acid ion, perfluorocyclohexanecarboxylic acid ion, perfluoro-1-adamantanecarboxylic acid ion, perfluoro-2-adamantanecarboxylic acid ion, etc. Alkyl carboxylate ions such as benzoate ions, salicylate ions and the like are preferred, and among them, acetate ions, propionate ions, butyrate ions, 1-adamantane carboxylate ions, Ruoro acetate ion, Trichoderma fluoro-dodecanoic acid ion and salicylate ion may be mentioned as an anion derived from a more preferred carboxylic acid. These more preferable sulfonium salt compounds having anions derived from carboxylic acids are highly versatile as acid generators, cationic polymerization initiators, acid diffusion inhibitors and the like used in the resist field and the like. Although it cannot be produced efficiently by the method, it is a sulfonium salt compound that can be produced efficiently by using the production method of the present invention. For example, as shown in the above-described specific examples such as salicylate ion, these carboxylic acid-derived anions may have a functional group other than the carboxylate ion such as a hydroxyl group.

  Specific examples of the anion derived from sulfonic acid include, for example, methanesulfonic acid ion, ethanesulfonic acid ion, propanesulfonic acid ion, butanesulfonic acid ion, pentanesulfonic acid ion, hexanesulfonic acid ion, heptanesulfonic acid ion, octanesulfonic acid. Ion, nonanesulfonate ion, decanesulfonate ion, undecanesulfonate ion, dodecanesulfonate ion, tridecanesulfonate ion, tetradecanesulfonate ion, pentadecanesulfonate ion, hexadecanesulfonate ion, heptadecanesulfonate ion, octadecanesulfonate C 1-20 alkyl sulfonate ions such as sulfonate ion, nonadecane sulfonate ion, icosane sulfonate ion, 10-camphor sulfonate ion, for example Trifluoromethanesulfonic acid ion, pentafluoroethanesulfonic acid ion, heptafluoropropanesulfonic acid ion, nonafluorobutanesulfonic acid ion, perfluoropentanesulfonic acid ion, perfluorohexanesulfonic acid ion, perfluoroheptanesulfonic acid ion, perfluoro Octane sulfonate ion, perfluorononane sulfonate ion, perfluorodecane sulfonate ion, perfluoroundecane sulfonate ion, perfluorododecane sulfonate ion, perfluorotridecane sulfonate ion, perfluorotetradecane sulfonate ion, perfluoro Pentadecane sulfonate ion, perfluorohexadecane sulfonate ion, perfluoroheptadecane sulfonate ion, perf C1-C20 fluoroalkyl sulfonate ions such as olooctadecane sulfonate ion, perfluorononadecane sulfonate ion, perfluoroicosane sulfonate ion, for example, benzene sulfonate ion, (o-, m-, p- ) Aryl sulfonate ions having 6 to 20 carbon atoms such as toluene sulfonate ion, xylene sulfonate ion, naphthalene sulfonate ion, anthracene sulfonate ion, such as 2,4-difluorobenzene sulfonate ion, perfluorobenzene sulfonate ion Examples thereof include C6-C20 fluoroarylsulfonic acid ions such as 4-trifluoromethylbenzenesulfonic acid ions. Among these sulfonic acid-derived anions, for example, methanesulfonic acid ions, ethanesulfonic acid ions, propanesulfonic acid ions, butanesulfonic acid ions, pentanesulfonic acid ions, hexanesulfonic acid ions, heptanesulfonic acid ions, octanesulfonic acid ions C1-C10 alkyl sulfonate ions such as ions, nonane sulfonate ions, decane sulfonate ions, 10-camphor sulfonate ions, such as trifluoromethane sulfonate ions, pentafluoroethane sulfonate ions, heptafluoropropane sulfonate acids Ion, nonafluorobutane sulfonate ion, perfluoropentane sulfonate ion, perfluorohexane sulfonate ion, perfluoroheptane sulfonate ion, perfluorooctane C1-C10 fluoroalkyl sulfonate ions such as sulfonate ion, perfluorononane sulfonate ion, perfluorodecane sulfonate ion, for example, benzene sulfonate ion, (o-, m-, p-) toluene sulfonic acid C6-C7 aryl sulfonate ions such as ions such as 2,4-difluorobenzene sulfonate ions, perfluorobenzene sulfonate ions, 4-trifluoromethylbenzene sulfonate ions, etc. Aryl sulfonate ions are preferred, and among them, 10-camphor sulfonate ion, p-toluene sulfonate ion, trifluoromethane sulfonate ion and nonafluorobutane sulfonate ion are more preferable examples of sulfonate-derived anions, Among them Also, for example, 10-camphorsulfonic acid ion and p-toluenesulfonic acid ion are particularly preferable anions derived from sulfonic acid. These particularly preferred sulfonium salt compounds having anions derived from sulfonic acids are highly versatile as acid generators, cationic polymerization initiators, acid diffusion inhibitors and the like used in the resist field and the like. Although it cannot be produced efficiently by the method, it is a sulfonium salt compound that can be produced efficiently by using the production method of the present invention. For example, as shown in the above-mentioned specific examples such as 10-camphorsulfonic acid ions, these sulfonic acid-derived anions may have a functional group other than sulfonic acid ions such as a carbonyl group.

  Specific examples of the anion derived from sulfonimide include, for example, bis (methanesulfonyl) imide anion, bis (ethanesulfonyl) imide anion, bis (propanesulfonyl) imide anion, bis (butanesulfonyl) imide anion, bis (pentanesulfonyl) imide Anion, bis (hexanesulfonyl) imide anion, bis (heptanesulfonyl) imide anion, bis (octanesulfonyl) imide anion, bis (nonanesulfonyl) imide anion, bis (decanesulfonyl) imide anion, cyclopropane-1,3-bis C2-C20 bis (alkylsulfonyl) imide anions such as (sulfonyl) imide anion, such as bis (trifluoromethanesulfonyl) imide anion, bis (pentafluoroethanesulfur) Nyl) imide anion, bis (heptafluoropropanesulfonyl) imide anion, bis (nonafluorobutanesulfonyl) imide anion, bis (perfluoropentanesulfonyl) imide anion, bis (perfluorohexanesulfonyl) imide anion, bis (perfluoroheptane) Sulfonyl) imide anion, bis (perfluorooctanesulfonyl) imide anion, bis (perfluorononanesulfonyl) imide anion, bis (perfluorodecanesulfonyl) imide anion, cyclohexafluoropropane-1,3-bis (sulfonyl) imide anion C2-C20 bis (perfluoroalkylsulfonyl) imide anion such as bis (benzenesulfonyl) imide anion, bis ((o-, m-, p-) tol Nsuruhoniru) imide anion, bis (xylene sulfonyl) imide anion, bis (naphthalene) imide (arylsulfonyl having a carbon number of 12 to 20 anionic etc.) imide anion, and the like. Among these anions derived from sulfonimide, for example, bis (trifluoromethanesulfonyl) imide anion, bis (pentafluoroethanesulfonyl) imide anion, bis (heptafluoropropanesulfonyl) imide anion, bis (nonafluorobutanesulfonyl) imide anion Bis (perfluoropentanesulfonyl) imide anion, bis (perfluorohexanesulfonyl) imide anion, bis (perfluoroheptanesulfonyl) imide anion, bis (perfluorooctanesulfonyl) imide anion, bis (perfluorononanesulfonyl) imide anion , Bis (perfluorodecanesulfonyl) imide anion, cyclohexafluoropropane-1,3-bis (sulfonyl) imide anion, etc. Preferably 20 bis (perfluoroalkyl sulfonyl) imide anion, Among them, bis (nonafluorobutanesulfonyl) imide anions as preferred anion derived from a sulfonimide. These sulfonimide-derived anions may have a functional group other than a sulfonylimide anion such as a hydroxyl group or a carbonyl group.

R ¹ , R ³ , R ⁵ , R ⁶ , R ⁸ , R ¹⁰ , R ¹¹ , R ¹³ and R ^{15 in the} general formulas (1) and (2) are a hydrogen atom or an alkyl group having 1 to 12 carbon atoms. And a group selected from an alkoxy group having 1 to 12 carbon atoms, an aryl group having 6 to 10 carbon atoms, a halogen atom, and a hydroxyl group.

As R ² , R ⁴ , R ⁷ , R ⁹ , R ¹² and R ^{14 in the} general formulas (1) and (2), a hydrogen atom is more preferable.

As Z ⁻ in the general formula (2), acetate ion, propionate ion, butyrate ion, 1-adamantanecarboxylate ion, trifluoroacetate ion, tricosafluorododecanoate ion, salicylate ion, 10-camphorsulfonate ion, An anion derived from an organic acid selected from the group consisting of p-toluenesulfonic acid ion, trifluoromethanesulfonic acid ion, nonafluorobutanesulfonic acid ion and bis (nonafluorobutanesulfonyl) imide anion is more preferable, and among them, acetate ion , Propionate ion, butyrate ion, 1-adamantanecarboxylate ion, trifluoroacetate ion, tricosafluorododecanoate ion, salicylate ion, 10-camphorsulfonate ion and p-toluenesulfonate ion An anion derived from an organic acid selected from the group consisting of

  Preferable specific examples of the hydrogen carbonate sulfonium salt represented by the general formula (1) according to the production method of the present invention include a hydrogen carbonate sulfonium salt represented by the following general formula (1A). The sulfonium hydrogen carbonate salt represented by the general formula (1A) is preferable in that it can be a raw material or an intermediate for synthesizing a highly versatile sulfonium salt compound.

（式中、Ｒ^１ａ、Ｒ^３ａ、Ｒ^５ａ、Ｒ^６ａ、Ｒ^８ａ、Ｒ^１０ａ、Ｒ^１１ａ、Ｒ^１３ａおよびＲ^１５ａはそれぞれ独立して、水素原子、炭素数１〜１２のアルキル基、炭素数１〜１２のアルコキシ基、炭素数６〜１０のアリール基、ハロゲン原子またはヒドロキシル基を表す。）

(In the formula, R ^1a , R ^3a , R ^5a , R ^6a , R ^8a , R ^10a , R ^11a , R ^13a and R ^15a are each independently a hydrogen atom, an alkyl group having 1 to 12 carbon atoms, or a carbon number. Represents an alkoxy group having 1 to 12, an aryl group having 6 to 10 carbon atoms, a halogen atom or a hydroxyl group.)

Specific examples of the alkyl group having 1 to 12 carbon atoms represented by R ^1a , R ^3a , R ^5a , R ^6a , R ^8a , R ^10a , R ^11a , R ^13a and R ^15a in the general formula (1A) include include those similar to the specific examples of the alkyl group represented by R ¹ to R ¹⁵ in the formula (1), specific examples of the preferred alkyl group include those similar.

Specific examples of the alkoxy group having 1 to 12 carbon atoms represented by R ^1a , R ^3a , R ^5a , R ^6a , R ^8a , R ^10a , R ^11a , R ^13a and R ^15a in the general formula (1A) include The same thing as the specific example of the alkoxy group shown by R < ¹ > -R < ¹⁵ > in Formula (1) is mentioned, The specific example of a preferable alkoxy group is also the same.

Specific examples of the aryl group having 6 to 10 carbon atoms represented by R ^1a , R ^3a , R ^5a , R ^6a , R ^8a , R ^10a , R ^11a , R ^13a and R ^15a in the general formula (1A) include include those similar to the specific examples of the aryl group represented by R ¹ to R ¹⁵ in the formula (1), specific examples of preferred aryl group include those similar.

Specific examples of the halogen atom represented by R ^1a , R ^3a , R ^5a , R ^6a , R ^8a , R ^10a , R ^11a , R ^13a and R ^15a in the general formula (1A) include R in the general formula (1). ¹ are the same as specific examples of the halogen atom represented by to R ¹⁵ are mentioned, specific examples of preferred halogen atom include those similar.

As R ^<1a> , R ^<5a> , R ^<6a> , R ^<10a> , R ^<11a> and R ^<15a> in General formula (1A), a hydrogen atom is more preferable.

  More preferable specific examples of the hydrogencarbonate sulfonium salt represented by the general formula (1A) include, for example, (unsubstituted) hydrogencarbonate triphenylsulfonium salt, in which a hydrogen atom on the phenyl group is substituted with an alkyl group (alkyl group substitution). ) Triphenylsulfonium hydrogencarbonate, hydrogen atom on phenyl group substituted with alkoxy group (substituted alkoxy group) Triphenylsulfonium hydrogencarbonate, hydrogen atom on phenyl group substituted with aryl group (aryl) Triphenylsulfonium hydrogen carbonate (with a group substitution), hydrogen atom on the phenyl group substituted with a halogen atom (halogen substituted) triphenylsulfonium hydrogen carbonate, a hydrogen atom on the phenyl group with a hydroxyl group And triphenylsulfonium hydrogen carbonate (with hydroxyl group substitution)

  Specific examples of the hydrogen carbonate triphenylsulfonium salt in which a hydrogen atom on the phenyl group is substituted with an alkyl group (alkyl group-substituted) include, for example, diphenyl-4-methylphenylsulfonium hydrogencarbonate, diphenyl-4-ethyl hydrogencarbonate Phenylsulfonium salt, diphenyl-4-propylphenylsulfonium bicarbonate, diphenyl-4-isopropylphenylsulfonium bicarbonate, diphenyl-4-butylphenylsulfonium bicarbonate, diphenyl-4-tert-butylphenylsulfonium bicarbonate, Diphenyl-4-pentylphenylsulfonium hydrogencarbonate, diphenyl-4-hexylphenylsulfonium hydrogencarbonate, diphenyl-4-cyclohexylphenylsulfonium hydrogencarbonate, diphenyl-4-heptylphenylsulfonium hydrogencarbonate, carbonic acid Diphenyl-4-octylphenylsulfonium hydrogen salt, diphenyl-4-nonylphenylsulfonium hydrogencarbonate, diphenyl-4-decylphenylsulfonium hydrogencarbonate, diphenyl-4-undecylphenylsulfonium hydrogencarbonate, diphenyl-4-bicarbonate Dodecylphenylsulfonium salt, hydrogencarbonate phenyl-di (4-methylphenyl) sulfonium salt, hydrogencarbonate phenyl-di (4-ethylphenyl) sulfonium salt, hydrogencarbonate phenyl-di (4-propylphenyl) sulfonium salt, phenyl hydrogencarbonate -Di (4-isopropylphenyl) sulfonium salt, hydrogencarbonate phenyl-di (4-butylphenyl) sulfonium salt, hydrogencarbonate phenyl-di (4-tert-butylphenyl) sulfonium salt, hydrogencarbonate phenyl-di (4-pentyl) Phenyl) sulfonium salt, carbonic acid Phenyl-di (4-hexylphenyl) sulfonium salt, phenyl-di (4-cyclohexylphenyl) sulfonium hydrogen carbonate, phenyl-di (4-heptylphenyl) sulfonium hydrogen carbonate, phenyl-di (4-octyl hydrogencarbonate) Phenyl) sulfonium salt, hydrogencarbonate phenyl-di (4-nonylphenyl) sulfonium salt, hydrogencarbonate phenyl-di (4-decylphenyl) sulfonium salt, hydrogencarbonate phenyl-di (4-undecylphenyl) sulfonium salt, hydrogencarbonate Phenyl-di (4-dodecylphenyl) sulfonium salt, hydrogen carbonate tri (4-methylphenyl) sulfonium salt, hydrogen carbonate tri (4-ethylphenyl) sulfonium salt, hydrogen carbonate tri (4-propylphenyl) sulfonium salt, hydrogen carbonate Tri (4-isopropylphenyl) sulfonium salt, carbonated water Tri (4-butylphenyl) sulfonium salt, hydrogen carbonate tri (4-tert-butylphenyl) sulfonium salt, hydrogen carbonate tri (4-pentylphenyl) sulfonium salt, hydrogen carbonate tri (4-hexylphenyl) sulfonium salt, hydrogen carbonate Tri (4-cyclohexylphenyl) sulfonium salt, hydrogen carbonate tri (4-heptylphenyl) sulfonium salt, hydrogen carbonate tri (4-octylphenyl) sulfonium salt, hydrogen carbonate tri (4-nonylphenyl) sulfonium salt, hydrogen carbonate tri ( 4-decylphenyl) sulfonium salt, tri (4-undecylphenyl) sulfonium hydrogencarbonate, tri (4-dodecylphenyl) sulfonium hydrogencarbonate, diphenyl-2,4,6-trimethylphenylsulfonium hydrogencarbonate, hydrogencarbonate Diphenyl-2,4,6-triethylphenyls Rufonium salt, diphenyl-2,4,6-tripropylphenylsulfonium hydrogencarbonate, diphenyl-2,4,6-triisopropylphenylsulfonium hydrogencarbonate, diphenyl-2,4,6-tributylphenylsulfonium hydrogencarbonate, Diphenyl-2,4,6-tri-tert-butylphenylsulfonium bicarbonate, diphenyl-2,4,6-tripentylphenylsulfonium bicarbonate, diphenyl-2,4,6-trihexylphenylsulfonium bicarbonate Diphenyl-2,4,6-tricyclohexylphenylsulfonium hydrogencarbonate, diphenyl-2,4,6-triheptylphenylsulfonium hydrogencarbonate, diphenyl-2,4,6-trioctylphenylsulfonium hydrogencarbonate, carbonic acid Hydrogen diphenyl-2,4,6-trinonylphenylsulfo Um salt, diphenyl-2,4,6-tridecylphenylsulfonium bicarbonate, diphenyl-2,4,6-triundecylphenylsulfonium bicarbonate, diphenyl-2,4,6-tridodecylphenylsulfonium bicarbonate Salts, phenyl-bis (2,4,6-trimethylphenyl) sulfonium hydrogencarbonate, phenyl-bis (2,4,6-triethylphenyl) sulfonium hydrogencarbonate, phenyl-bis (2,4,6-bicarbonate) Tripropylphenyl) sulfonium salt, phenyl-bis (2,4,6-triisopropylphenyl) sulfonium bicarbonate, phenyl-bis (2,4,6-tributylphenyl) sulfonium bicarbonate, phenyl-bis ( 2,4,6-Tri-tert-butylphenyl) sulfonium salt, phenyl-bis (2,4,6-bicarbonate) Ripentylphenyl) sulfonium salt, phenyl-bis (2,4,6-trihexylphenyl) sulfonium bicarbonate, phenyl-bis (2,4,6-tricyclohexylphenyl) sulfonium bicarbonate, phenyl-biscarbonate (2,4,6-triheptylphenyl) sulfonium salt, phenyl-bis (2,4,6-trioctylphenyl) sulfonium hydrogencarbonate, phenyl-bis (2,4,6-trinonylphenyl) sulfonium hydrogencarbonate Salt, hydrogencarbonate phenyl-bis (2,4,6-tridecylphenyl) sulfonium salt, hydrogencarbonate phenyl-bis (2,4,6-triundecylphenyl) sulfonium salt, hydrogencarbonate phenyl-bis (2,4 , 6-Tridodecylphenyl) sulfonium salt, Tris (2,4,6-trimethylphenyl) sulfonium hydrogencarbonate Um salt, hydrogen carbonate tris (2,4,6-triethylphenyl) sulfonium salt, hydrogen carbonate tris (2,4,6-tripropylphenyl) sulfonium salt, hydrogen carbonate tris (2,4,6-triisopropylphenyl) Sulfonium salt, hydrogen carbonate tris (2,4,6-tributylphenyl) sulfonium salt, hydrogen carbonate tris (2,4,6-tri-tert-butylphenyl) sulfonium salt, hydrogen carbonate tris (2,4,6-tri Pentylphenyl) sulfonium salt, hydrogen carbonate tris (2,4,6-trihexylphenyl) sulfonium salt, hydrogen carbonate tris (2,4,6-tricyclohexylphenyl) sulfonium salt, hydrogen carbonate tris (2,4,6- Triheptylphenyl) sulfonium salt, tris (2,4,6-trioctylphenyl) sulfonium hydrogen carbonate, carbonic acid Hydrogen tris (2,4,6-trinonylphenyl) sulfonium salt, hydrogen carbonate tris (2,4,6-tridecylphenyl) sulfonium salt, hydrogen carbonate tris (2,4,6-triundecylphenyl) sulfonium salt And hydrogen carbonate tris (2,4,6-tridodecylphenyl) sulfonium salt.

  Specific examples of the hydrogen carbonate triphenylsulfonium salt in which the hydrogen atom on the phenyl group is substituted with an alkoxy group (alkoxy group-substituted) include diphenyl-4-methoxyphenylsulfonium hydrogencarbonate, diphenyl-4-ethoxyhydrogencarbonate, and the like. Phenylsulfonium salt, diphenyl-4-propoxyphenylsulfonium bicarbonate, diphenyl-4-isopropoxyphenylsulfonium bicarbonate, diphenyl-4-butoxyphenylsulfonium bicarbonate, diphenyl-4-tert-butoxyphenylsulfonium bicarbonate Diphenyl-4-pentyloxyphenylsulfonium bicarbonate, diphenyl-4-hexyloxyphenylsulfonium bicarbonate, diphenyl-4-cyclohexyloxyphenylsulfonium bicarbonate, diphenyl-4-hecarbonate Ptyloxyphenylsulfonium salt, diphenyl-4-octyloxyphenylsulfonium bicarbonate, diphenyl-4-nonyloxyphenylsulfonium bicarbonate, diphenyl-4-decyloxyphenylsulfonium bicarbonate, diphenyl-4-undecyl bicarbonate Oxyphenylsulfonium salt, hydrogen carbonate diphenyl-4-dodecyloxyphenylsulfonium salt, hydrogencarbonate phenyl-di (4-methoxyphenyl) sulfonium salt, hydrogencarbonate phenyl-di (4-ethoxyphenyl) sulfonium salt, hydrogencarbonate phenyl-di (4-propoxyphenyl) sulfonium salt, hydrogencarbonate phenyl-di (4-isopropoxyphenyl) sulfonium salt, hydrogencarbonate phenyl-di (4-butoxyphenyl) sulfonium salt, hydrogencarbonate phenyl-di (4-tert-butoxypheny ) Sulfonium salt, phenyl-di (4-pentyloxyphenyl) sulfonium hydrogen carbonate, phenyl-di (4-hexyloxyphenyl) sulfonium hydrogen carbonate, phenyl-di (4-cyclohexyloxyphenyl) sulfonium hydrogen carbonate, carbonic acid Hydrogen phenyl-di (4-heptyloxyphenyl) sulfonium salt, hydrogencarbonate phenyl-di (4-octyloxyphenyl) sulfonium salt, hydrogencarbonate phenyl-di (4-nonyloxyphenyl) sulfonium salt, hydrogencarbonate phenyl-di ( 4-decyloxyphenyl) sulfonium salt, phenyl-di (4-undecyloxyphenyl) sulfonium hydrogencarbonate, phenyl-di (4-dodecyloxyphenyl) sulfonium hydrogencarbonate, tri (4-methoxyphenyl) sulfonium hydrogencarbonate Salt, tricarbonate (4-ethoxy) Ciphenyl) sulfonium salt, hydrogen carbonate tri (4-propoxyphenyl) sulfonium salt, hydrogen carbonate tri (4-isopropoxyphenyl) sulfonium salt, hydrogen carbonate tri (4-butoxyphenyl) sulfonium salt, hydrogen carbonate tri (4-tert- Butoxyphenyl) sulfonium salt, hydrogen carbonate tri (4-pentyloxyphenyl) sulfonium salt, hydrogen carbonate tri (4-hexyloxyphenyl) sulfonium salt, hydrogen carbonate tri (4-cyclohexyloxyphenyl) sulfonium salt, hydrogen carbonate tri (4 -Heptyloxyphenyl) sulfonium salt, hydrogen carbonate tri (4-octyloxyphenyl) sulfonium salt, hydrogen carbonate tri (4-nonyloxyphenyl) sulfonium salt, hydrogen carbonate tri (4-decyloxyphenyl) sulfonium salt, hydrogen carbonate tri (4-Undeci Oxyphenyl) sulfonium salt, tri (4-dodecyloxyphenyl) sulfonium hydrogencarbonate, diphenyl-2,4,6-trimethoxyphenylsulfonium hydrogencarbonate, diphenyl-2,4,6-triethoxyphenylsulfonium hydrogencarbonate Diphenyl-2,4,6-tripropoxyphenylsulfonium hydrogencarbonate, diphenyl-2,4,6-triisopropoxyphenylsulfonium hydrogencarbonate, diphenyl-2,4,6-tributoxyphenylsulfonium hydrogencarbonate, Diphenyl-2,4,6-tri-tert-butoxyphenylsulfonium bicarbonate, diphenyl-2,4,6-tripentyloxyphenylsulfonium bicarbonate, diphenyl-2,4,6-trihexyloxyphenyl bicarbonate Sulfonium salt, diphenyl hydrogencarbonate-2,4,6- Licyclohexyloxyphenylsulfonium salt, diphenyl-2,4,6-triheptyloxyphenylsulfonium hydrogencarbonate, diphenyl-2,4,6-trioctyloxyphenylsulfonium hydrogencarbonate, diphenyl-2,4,6 hydrogencarbonate -Trinonyloxyphenylsulfonium salt, diphenyl-2,4,6-tridecyloxyphenylsulfonium hydrogencarbonate, diphenyl-2,4,6-triundecyloxyphenylsulfonium hydrogencarbonate, diphenyl-2,4 hydrogencarbonate , 6-Tridodecyloxyphenylsulfonium salt, phenyl-bis (2,4,6-trimethoxyphenyl) sulfonium hydrogencarbonate, phenyl-bis (2,4,6-triethoxyphenyl) sulfonium hydrogencarbonate, hydrogencarbonate Phenyl-bis (2,4,6-tripropoxyphe Nyl) sulfonium salt, hydrogencarbonate phenyl-bis (2,4,6-triisopropoxyphenyl) sulfonium salt, hydrogencarbonate phenyl-bis (2,4,6-tributoxyphenyl) sulfonium salt, hydrogencarbonate phenyl-bis ( 2,4,6-tri-tert-butoxyphenyl) sulfonium salt, phenyl-bis (2,4,6-tripentyloxyphenyl) sulfonium bicarbonate, phenyl-bis (2,4,6-trihexyl bicarbonate) Oxyphenyl) sulfonium salt, phenyl-bis (2,4,6-tricyclohexyloxyphenyl) sulfonium hydrogen carbonate, phenyl-bis (2,4,6-triheptyloxyphenyl) sulfonium hydrogencarbonate, phenyl hydrogencarbonate- Bis (2,4,6-trioctyloxyphenyl) sulfonium salt, phenyl hydrogen carbonate-bis (2, , 6-trinonyloxyphenyl) sulfonium salt, phenyl-bis (2,4,6-tridecyloxyphenyl) sulfonium hydrogencarbonate, phenyl-bis (2,4,6-triundecyloxyphenyl) sulfonium hydrogencarbonate Salt, hydrogen carbonate phenyl-bis (2,4,6-tridodecyloxyphenyl) sulfonium salt, hydrogen carbonate tris (2,4,6-trimethoxyphenyl) sulfonium salt, hydrogen carbonate tris (2,4,6-tri Ethoxyphenyl) sulfonium salt, hydrogen carbonate tris (2,4,6-tripropoxyphenyl) sulfonium salt, hydrogen carbonate tris (2,4,6-triisopropoxyphenyl) sulfonium salt, hydrogen carbonate tris (2,4,6 -Tributoxyphenyl) sulfonium salt, Tris (2,4,6-tri-tert-butoxyphenyl) bicarbonate Honium salt, hydrogen carbonate tris (2,4,6-tripentyloxyphenyl) sulfonium salt, hydrogen carbonate tris (2,4,6-trihexyloxyphenyl) sulfonium salt, hydrogen carbonate tris (2,4,6-tri Cyclohexyloxyphenyl) sulfonium salt, hydrogen carbonate tris (2,4,6-triheptyloxyphenyl) sulfonium salt, hydrogen carbonate tris (2,4,6-trioctyloxyphenyl) sulfonium salt, hydrogen carbonate tris (2,4 , 6-trinonyloxyphenyl) sulfonium salt, hydrogen carbonate tris (2,4,6-tridecyloxyphenyl) sulfonium salt, hydrogen carbonate tris (2,4,6-triundecyloxyphenyl) sulfonium salt, hydrogen carbonate And tris (2,4,6-tridodecyloxyphenyl) sulfonium salt.

  Specific examples of the hydrogen carbonate triphenylsulfonium salt in which the hydrogen atom on the phenyl group is substituted with an aryl group (substituted aryl group) include diphenyl-4-phenylphenylsulfonium hydrogencarbonate, diphenyl-4-naphthyl hydrogencarbonate, and the like. Phenylsulfonium salt, hydrogencarbonate phenyl-di (4-phenylphenyl) sulfonium salt, hydrogencarbonate phenyl-di (4-naphthylphenyl) sulfonium salt, hydrogencarbonate tri (4-phenylphenyl) sulfonium salt, hydrogencarbonate tri (4- Naphthylphenyl) sulfonium salt, diphenyl-2,4,6-triphenylphenylsulfonium bicarbonate, diphenyl-2,4,6-trinaphthylphenylsulfonium bicarbonate, phenyl-bis (2,4,6-bicarbonate) Triphenylphenyl) sulfonium salt, phenyl bicarbonate- (2,4,6-trinaphthylphenyl) sulfonium salt, hydrogen carbonate tris (2,4,6-triphenylphenyl) sulfonium salt, hydrogen carbonate tris (2,4,6-trinaphthylphenyl) sulfonium salt, etc. Can be mentioned.

  Specific examples of the hydrogen carbonate triphenylsulfonium salt in which the hydrogen atom on the phenyl group is substituted with a halogen atom (halogen atom-substituted) include diphenyl-4-fluorophenylsulfonium hydrogen carbonate, diphenyl-4-chlorophenyl hydrogencarbonate, Sulfonium salt, diphenyl-4-bromophenylsulfonium bicarbonate, diphenyl-4-iodophenylsulfonium bicarbonate, phenyl-di (4-fluorophenyl) sulfonium bicarbonate, phenyl-di (4-chlorophenyl) sulfonium bicarbonate Salt, hydrogencarbonate phenyl-di (4-bromophenyl) sulfonium salt, hydrogencarbonate phenyl-di (4-iodophenyl) sulfonium salt, hydrogencarbonate tri (4-fluorophenyl) sulfonium salt, hydrogencarbonate tri (4-chlorophenyl) Sulfonium salt, hydrogen carbonate Li (4-bromophenyl) sulfonium salt, tri (4-iodophenyl) sulfonium bicarbonate, diphenyl-2,4,6-trifluorophenylsulfonium bicarbonate, diphenyl-2,4,6-trichlorophenyl bicarbonate Sulfonium salt, diphenyl-2,4,6-tribromophenylsulfonium hydrogen carbonate, diphenyl-2,4,6-triiodophenylsulfonium hydrogen carbonate, phenyl-bis (2,4,6-trifluorophenyl hydrogencarbonate) ) Sulfonium salt, phenyl-bis (2,4,6-trichlorophenyl) sulfonium bicarbonate, phenyl-bis (2,4,6-tribromophenyl) sulfonium bicarbonate, phenyl-bis (2,4) , 6-Triiodophenyl) sulfonium salt, hydrogen carbonate tris (2,4,6-trifluorofe L) sulfonium salt, hydrogen carbonate tris (2,4,6-trichlorophenyl) sulfonium salt, hydrogen carbonate tris (2,4,6-tribromophenyl) sulfonium salt, hydrogen carbonate tris (2,4,6-triiodo) Phenyl) sulfonium salt and the like.

  Specific examples of the hydrogen carbonate triphenylsulfonium salt in which the hydrogen atom on the phenyl group is substituted with a hydroxyl group (hydroxyl group-substituted) include, for example, diphenyl-4-hydroxyphenylsulfonium hydrogen carbonate, phenyl-di (4 -Hydroxyphenyl) sulfonium salt, hydrogen carbonate tri (4-hydroxyphenyl) sulfonium salt, hydrogen carbonate diphenyl-2,4,6-trihydroxyphenylsulfonium salt, hydrogencarbonate phenyl-bis (2,4,6-trihydroxyphenyl) ) Sulfonium salt, hydrogen carbonate tris (2,4,6-trihydroxyphenyl) sulfonium salt, and the like.

  What is necessary is just to use what was synthesize | combined by the conventional method as described in Unexamined-Japanese-Patent No. 2002-193925 etc., for example, as the hydrogencarbonate sulfonium salt shown by General formula (1) concerning the manufacturing method of this invention. Specifically, for example, a solution obtained by dissolving a commercially available or triarylsulfonium halide synthesized by a conventional method in an appropriate solvent is passed through a strongly basic anion exchange resin in which the anion portion is replaced with hydrogen carbonate ions. Then, the obtained eluate is appropriately washed to synthesize a sulfonium carbonate salt represented by the general formula (1), which may be used.

  As an organic acid concerning the manufacturing method of this invention, what reacts with the sulfonium carbonate salt shown by the said General formula (1) should just be mentioned, for example, carboxylic acid, a sulfonic acid, sulfonimide etc. are mentioned specifically ,. It is done.

  Specific examples of the carboxylic acid include, for example, formic acid, acetic acid, propionic acid, butyric acid, isobutyric acid, valeric acid, isovaleric acid, pivalic acid, hydroangelic acid, caproic acid, enanthic acid, caprylic acid, pelargonic acid, capric acid, C1-C20 alkyl carboxylic acids such as lauric acid, cyclopentanecarboxylic acid, cyclohexanecarboxylic acid, 1-adamantanecarboxylic acid, 2-adamantanecarboxylic acid, such as trifluoroacetic acid, perfluoropropionic acid, perfluorobutanoic acid, Perfluorodimethylacetic acid, perfluoropentanoic acid, perfluoro-2-methylbutanoic acid, perfluoro-3-methylbutanoic acid, perfluoro-2,2-dimethylpropanoic acid, perfluorohexanoic acid, perfluoroheptanoic acid, perfluorooctane Acid, perfluorononanoic acid, per Fluoroalkylcarboxylic acids having 2 to 20 carbon atoms such as lurodecanoic acid, tricosafluorododecanoic acid, perfluorocyclopentanecarboxylic acid, perfluorocyclohexanecarboxylic acid, perfluoro-1-adamantanecarboxylic acid, perfluoro-2-adamantanecarboxylic acid, etc. Examples thereof include acids such as aryl carboxylic acids having 7 to 20 carbon atoms such as benzoic acid, salicylic acid, naphthalene carboxylic acid and anthracene carboxylic acid. Among these carboxylic acids, for example, acetic acid, propionic acid, butyric acid, isobutyric acid, valeric acid, isovaleric acid, pivalic acid, hydroangelic acid, caproic acid, enanthic acid, caprylic acid, pelargonic acid, capric acid, lauric acid , Cyclopentanecarboxylic acid, cyclohexanecarboxylic acid, 1-adamantanecarboxylic acid, 2-adamantanecarboxylic acid and other alkyl carboxylic acids having 2 to 11 carbon atoms such as trifluoroacetic acid, perfluoropropionic acid, perfluorobutanoic acid, perfluoro Dimethylacetic acid, perfluoropentanoic acid, perfluoro-2-methylbutanoic acid, perfluoro-3-methylbutanoic acid, perfluoro-2,2-dimethylpropanoic acid, perfluorohexanoic acid, perfluoroheptanoic acid, perfluorooctanoic acid, Perfluorononanoic acid, perful Fluoroalkylcarboxylic acids having 2 to 12 carbon atoms such as rhodecanoic acid, tricosafluorododecanoic acid, perfluorocyclopentanecarboxylic acid, perfluorocyclohexanecarboxylic acid, perfluoro-1-adamantanecarboxylic acid, perfluoro-2-adamantanecarboxylic acid Acids such as aryl carboxylic acids having 7 carbon atoms such as benzoic acid and salicylic acid are preferable, and among them, acetic acid, propionic acid, butyric acid, 1-adamantane carboxylic acid, trifluoroacetic acid, tricosafluorododecanoic acid and salicylic acid are more preferable. Mentioned as preferred carboxylic acids. These more preferred carboxylic acids were difficult to exchange efficiently with the halide portion (counter anion) of triarylsulfonium halide in the conventional method. ) And anions can be exchanged efficiently. For example, as shown in the above-described specific examples such as salicylic acid, these carboxylic acids may have a functional group other than a carboxyl group such as a hydroxyl group. These carboxylic acids may be commercially available.

  Specific examples of the sulfonic acid include, for example, methanesulfonic acid, ethanesulfonic acid, propanesulfonic acid, butanesulfonic acid, pentanesulfonic acid, hexanesulfonic acid, heptanesulfonic acid, octanesulfonic acid, nonanesulfonic acid, decanesulfonic acid, undecane. Sulfonic acid, dodecanesulfonic acid, tridecanesulfonic acid, tetradecanesulfonic acid, pentadecanesulfonic acid, hexadecanesulfonic acid, heptadecanesulfonic acid, octadecanesulfonic acid, nonadecanesulfonic acid, icosanesulfonic acid, 10-camphorsulfonic acid, etc. C1-C20 alkylsulfonic acid, for example, trifluoromethanesulfonic acid, pentafluoroethanesulfonic acid, heptafluoropropanesulfonic acid, nonafluorobutanesulfonic acid, perfluoropentane Sulfonic acid, perfluorohexanesulfonic acid, perfluoroheptanesulfonic acid, perfluorooctanesulfonic acid, perfluorononanesulfonic acid, perfluorodecanesulfonic acid, perfluoroundecanesulfonic acid, perfluorododecanesulfonic acid, perfluorotridecanesulfone Carbon number of acids, perfluorotetradecane sulfonic acid, perfluoropentadecane sulfonic acid, perfluorohexadecane sulfonic acid, perfluoroheptadecane sulfonic acid, perfluorooctadecane sulfonic acid, perfluorononadecane sulfonic acid, perfluoroicosane sulfonic acid, etc. 1-20 fluoroalkyl sulfonic acids such as benzene sulfonic acid, (o-, m-, p-) toluene sulfonic acid, xylene sulfonic acid, naphthalene sulfonic acid, Aryl sulfonic acids having 6 to 20 carbon atoms such as tracene sulfonic acid, for example, fluoroaryl sulfones having 6 to 20 carbon atoms such as 2,4-difluorobenzenesulfonic acid, perfluorobenzenesulfonic acid, 4-trifluoromethylbenzenesulfonic acid, etc. An acid etc. are mentioned. Among these sulfonic acids, for example, methanesulfonic acid, ethanesulfonic acid, propanesulfonic acid, butanesulfonic acid, pentanesulfonic acid, hexanesulfonic acid, heptanesulfonic acid, octanesulfonic acid, nonanesulfonic acid, decanesulfonic acid, 10 -Alkylsulfonic acid having 1 to 10 carbon atoms such as camphorsulfonic acid, such as trifluoromethanesulfonic acid, pentafluoroethanesulfonic acid, heptafluoropropanesulfonic acid, nonafluorobutanesulfonic acid, perfluoropentanesulfonic acid, perfluorohexanesulfone C1-C10 fluoroalkylsulfonic acid such as acid, perfluoroheptanesulfonic acid, perfluorooctanesulfonic acid, perfluorononanesulfonic acid, perfluorodecanesulfonic acid, C6-7 aryl sulfonic acids such as zen sulfonic acid, (o-, m-, p-) toluene sulfonic acid, such as 2,4-difluorobenzene sulfonic acid, perfluorobenzene sulfonic acid, 4-trifluoromethylbenzene C6-C7 fluoroarylsulfonic acid such as sulfonic acid is preferable, and among them, 10-camphorsulfonic acid, p-toluenesulfonic acid, trifluoromethanesulfonic acid and nonafluorobutanesulfonic acid are more preferable sulfonic acids. Among them, 10-camphorsulfonic acid and p-toluenesulfonic acid are particularly preferable sulfonic acids. These particularly preferred sulfonic acids were difficult to efficiently exchange anions with the halide portion (counter anion) of triarylsulfonium halide in the conventional method. However, according to the production method of the present invention, a bicarbonate ion (counter anion) was used. ) And anions can be exchanged efficiently. For example, as shown in the above specific examples such as 10-camphorsulfonic acid, these sulfonic acids may have a functional group other than a sulfonic acid group such as a carbonyl group. These sulfonic acids may be commercially available.

  Specific examples of the sulfonimide include bis (methanesulfonyl) imide, bis (ethanesulfonyl) imide, bis (propanesulfonyl) imide, bis (butanesulfonyl) imide, bis (pentanesulfonyl) imide, and bis (hexanesulfonyl) imide. Bis (heptanesulfonyl) imide, bis (octanesulfonyl) imide, bis (nonanesulfonyl) imide, bis (decanesulfonyl) imide, cyclopropane-1,3-bis (sulfonyl) imide, etc. (Alkylsulfonyl) imides such as bis (trifluoromethanesulfonyl) imide, bis (pentafluoroethanesulfonyl) imide, bis (heptafluoropropanesulfonyl) imide, bis (nonafluorobutanesulfonyl) imide, bis (per Fluoropentanesulfonyl) imide, bis (perfluorohexanesulfonyl) imide, bis (perfluoroheptanesulfonyl) imide, bis (perfluorooctanesulfonyl) imide, bis (perfluorononanesulfonyl) imide, bis (perfluorodecanesulfonyl) C2-C20 bis (perfluoroalkylsulfonyl) imide such as imide, cyclohexafluoropropane-1,3-bis (sulfonyl) imide, such as bis (benzenesulfonyl) imide, bis ((o-, m-, Examples thereof include bis (arylsulfonyl) imide having 12 to 20 carbon atoms such as p-) toluenesulfonyl) imide, bis (xylenesulfonyl) imide, and bis (naphthalenesulfonyl) imide. Among these sulfonimides, for example, bis (trifluoromethanesulfonyl) imide, bis (pentafluoroethanesulfonyl) imide, bis (heptafluoropropanesulfonyl) imide, bis (nonafluorobutanesulfonyl) imide, bis (perfluoropentanesulfonyl) ) Imide, bis (perfluorohexanesulfonyl) imide, bis (perfluoroheptanesulfonyl) imide, bis (perfluorooctanesulfonyl) imide, bis (perfluorononanesulfonyl) imide, bis (perfluorodecanesulfonyl) imide, cyclohexa C2-C20 bis (perfluoroalkylsulfonyl) imide such as fluoropropane-1,3-bis (sulfonyl) imide is preferred, and among them, bis (nonafluorobuta) Sulfonyl) imide as a more preferable sulfonimide. In addition, these sulfonimides may have a functional group other than a sulfonylimide group such as a hydroxyl group and a carbonyl group. These sulfonimides may be commercially available.

  Among the organic acids according to the production method of the present invention, acetic acid, propionic acid, butyric acid, 1-adamantanecarboxylic acid, trifluoroacetic acid, tricosafluorododecanoic acid, salicylic acid, 10-camphorsulfonic acid, p-toluenesulfonic acid, More preferred are organic acids selected from the group consisting of trifluoromethanesulfonic acid, nonafluorobutanesulfonic acid and bis (nonafluorobutanesulfonyl) imide, and among them, acetic acid, propionic acid, butyric acid, 1-adamantanecarboxylic acid, trifluoro More preferred is an organic acid selected from the group consisting of acetic acid, tricosafluorododecanoic acid, salicylic acid, 10-camphorsulfonic acid and p-toluenesulfonic acid.

  The amount of the organic acid used in the production method of the present invention is not particularly limited as long as it is a practical amount. For example, the amount used is usually 0.8 with respect to the number of moles of the sulfonium hydrogencarbonate salt represented by the general formula (1). -10 equivalents, preferably 0.8-5 equivalents, more preferably 0.9-2 equivalents.

  The reaction in the production method of the present invention may be performed in the absence of a solvent or in a solvent. Specific examples of the solvent are not particularly limited as long as it is a solvent that does not react with the hydrogen carbonate sulfonium salt represented by the general formula (1) and the organic acid according to the production method of the present invention. For example, fat such as hexane, heptane, and octane. Aromatic hydrocarbon solvents such as benzene, toluene, xylene, etc., halogenated hydrocarbon solvents such as dichloromethane, trichloromethane (chloroform), tetrachloromethane (carbon tetrachloride), such as methanol, Alcohol solvents such as ethanol, propanol and butanol, for example diethyl ether, diisopropyl ether, methyl-tert-butyl ether, cyclopentyl methyl ether, tetrahydrofuran, 2-methyltetrahydrofuran, 1,4-dioxane and the like, for example ethylene glycol Glycol ether solvents such as dimethyl ether, propylene glycol dimethyl ether, ethylene glycol diethyl ether, propylene glycol diethyl ether, diethylene glycol dimethyl ether, dipropylene glycol dimethyl ether, dipropylene glycol diethyl ether, such as ethylene glycol monoethyl ether acetate, diethylene glycol monoethyl ether acetate , Glycol ether acetate such as diethylene glycol monobutyl ether acetate, propylene glycol monomethyl ether acetate, propylene glycol monoethyl ether acetate, dipropylene glycol monomethyl ether acetate, dipropylene glycol monoethyl ether acetate Ketone solvents such as 2-propanone (acetone), 2-butanone (ethyl methyl ketone), 4-methyl-2-pentanone (methyl isobutyl ketone), such as ethyl acetate, n-propyl acetate, isopropyl acetate Ester solvents such as isobutyl acetate, acetic acid-sec-butyl, acetic acid-tert-butyl, ethyl butyrate, isoamyl butyrate, such as N, N-dimethylformamide, N, N-dimethylacetamide, 1-methyl-2-pyrrolidinone ( N-methylpyrrolidone), amide solvents such as 1,3-dimethyl-2-imidazolidinone (dimethylethylene urea), sulfoxide solvents such as dimethyl sulfoxide, organic solvents such as nitrile solvents such as acetonitrile, and the like Water is mentioned. Among these solvents, for example, halogenated hydrocarbon solvents such as dichloromethane, trichloromethane (chloroform), tetrachloromethane (carbon tetrachloride), alcohol solvents such as methanol, ethanol, propanol, butanol, etc. Preferred solvents include ketone solvents such as propanone (acetone), 2-butanone (ethyl methyl ketone), 4-methyl-2-pentanone (methyl isobutyl ketone), and water. In addition, such a solvent may be used alone or in combination of two or more solvents. In particular, specific examples of a combination of two or more solvents include, for example, combinations of alcohol solvents such as methanol, ethanol, propanol, and butanol with water, such as dichloromethane, trichloromethane (chloroform), tetrachloromethane (four Combinations of halogenated hydrocarbon solvents such as carbon chloride) and water, for example, ketone systems such as 2-propanone (acetone), 2-butanone (ethyl methyl ketone), 4-methyl-2-pentanone (methyl isobutyl ketone) Examples include a combination of a solvent and water. Examples of the mixing ratio (weight ratio) of the solvents when combining the solvents include alcohol solvents, halogenated hydrocarbon solvents or ketone solvents: water = 10: 0.1 to 0.1: 10. In addition, what is necessary is just to use a commercially available solvent.

  The usage-amount of the solvent mentioned above will not be restrict | limited especially if it is a practical amount, For example, 0.1-20 mL normally with respect to 1 mmol of hydrogencarbonate sulfonium salts shown by General formula (1), Preferably it is 0.5 -10 mL, more preferably 1-5 mL.

  The reaction temperature (reaction temperature) in the production method of the present invention is such that the hydrogen carbonate sulfonium salt represented by the general formula (1) according to the production method of the present invention and an organic acid react efficiently, and the general formula (2) It is desirable to set the temperature so that the sulfonium salt compound represented by the above can be obtained with good yield. Specifically, it is -20-80 degreeC normally, for example, Preferably it is 0-50 degreeC.

  The pressure at the time of reaction in the production method of the present invention is not particularly limited as long as a series of reactions are carried out without delay, and may be performed at normal pressure, for example.

  The reaction time during the reaction in the production method of the present invention is the kind of the hydrogen carbonate sulfonium salt and organic acid represented by the general formula (1) according to the production method of the present invention, and the amount used, the presence or absence of a solvent, and the type thereof, It may be affected by the reaction temperature and pressure during the reaction. For this reason, a desirable reaction time cannot be generally stated, but is usually 1 minute to 10 hours, preferably 1 minute to 5 hours, for example.

  The sulfonium salt compound represented by the general formula (2) according to the present invention obtained by the production method of the present invention can be isolated by general post-treatment operations and purification operations usually performed in this field. As a specific example of the isolation method, for example, if necessary, extraction is performed by adding a solvent such as dichloromethane to the reaction system, and the obtained organic layer is concentrated and dried to be represented by the general formula (2). A sulfonium salt compound can be isolated. In addition, if necessary, the organic layer after extraction is concentrated, and the obtained residue is subjected to recrystallization, distillation, column chromatography, etc. to isolate the sulfonium salt compound represented by the general formula (2). Also good.

  Preferable specific examples of the sulfonium salt compound represented by the general formula (2) according to the production method of the present invention thus obtained include a sulfonium salt compound represented by the following general formula (2A).

（式中、Ｒ^１ａ、Ｒ^３ａ、Ｒ^５ａ、Ｒ^６ａ、Ｒ^８ａ、Ｒ^１０ａ、Ｒ^１１ａ、Ｒ^１３ａおよびＲ^１５ａおよびＺ⁻は上記に同じ。）

(Wherein R ^1a , R ^3a , R ^5a , R ^6a , R ^8a , R ^10a , R ^11a , R ^13a and R ^15a and Z ⁻ are the same as above).

  More preferable specific examples of the sulfonium salt compound represented by the general formula (2A) include, for example, an (unsubstituted) triphenylsulfonium salt compound, wherein a hydrogen atom on the phenyl group is substituted with an alkyl group (substituted with an alkyl group) Triphenylsulfonium salt compound, hydrogen atom on phenyl group is substituted with alkoxy group (alkoxy group substitution), triphenylsulfonium salt compound, hydrogen atom on phenyl group is substituted with aryl group (aryl group substitution) Triphenylsulfonium salt compound, a hydrogen atom on the phenyl group is substituted with a halogen atom (with halogen atom substitution), a hydrogen atom on the phenyl group is substituted with a hydroxyl group (with a hydroxyl group substitution) A triphenylsulfonium salt compound is mentioned.

  Specific examples of (unsubstituted) triphenylsulfonium salt compounds include, for example, triphenylsulfonium acetate, triphenylsulfonium propionate, triphenylsulfonium butyrate, 1-adamantanecarboxylic acid triphenylsulfonium salt, tritrifluoroacetate Phenylsulfonium salt, triphenylsulfonium salt of tricosafluorododecanoic acid, triphenylsulfonium salt of salicylic acid, 10-camphorsulfonic acid triphenylsulfonium salt, p-toluenesulfonic acid triphenylsulfonium salt, trifluoromethanesulfonic acid triphenylsulfonium salt, nona Examples include fluorobutanesulfonic acid triphenylsulfonium salt, bis (nonafluorobutanesulfonyl) imide triphenylsulfonium salt, and the like.

  Specific examples of the triphenylsulfonium salt compound in which a hydrogen atom on the phenyl group is substituted with an alkyl group (alkyl group-substituted) include sulfonium salt compounds represented by the following [1] to [7]. .

  [1] Diphenyl-4-methylphenylsulfonium acetate, diphenyl-4-methylphenylsulfonium propionate, diphenyl-4-methylphenylsulfonium butyrate, 1-adamantanecarboxylic acid diphenyl-4-methylphenylsulfonium salt, trifluoro Diphenyl-4-methylphenylsulfonium acetate, diphenyl-4-methylphenylsulfonium salt of tricosafluorododecanoic acid, diphenyl-4-methylphenylsulfonium salt of salicylic acid, 10-camphorsulfonic acid diphenyl-4-methylphenylsulfonium salt, p- Toluenesulfonic acid diphenyl-4-methylphenylsulfonium salt, trifluoromethanesulfonic acid diphenyl-4-methylphenylsulfonium salt, nonafluorobutanesulfonic acid diphenyl-4-methylphenyls Ruphonium salt, bis (nonafluorobutanesulfonyl) imidodiphenyl-4-methylphenylsulfonium salt, acetic acid diphenyl-4-ethylphenylsulfonium salt, diphenyl-4-ethylphenylsulfonium propionate, diphenyl-4-ethylphenylsulfonium salt of butyrate 1-adamantanecarboxylic acid diphenyl-4-ethylphenylsulfonium salt, trifluoroacetic acid diphenyl-4-ethylphenylsulfonium salt, tricosafluorododecanoic acid diphenyl-4-ethylphenylsulfonium salt, salicylic acid diphenyl-4-ethylphenylsulfonium salt 10-camphorsulfonic acid diphenyl-4-ethylphenylsulfonium salt, p-toluenesulfonic acid diphenyl-4-ethylphenylsulfonium salt, trifluoromethanesulfonic acid difer 4-ethylphenylsulfonium salt, nonafluorobutanesulfonic acid diphenyl-4-ethylphenylsulfonium salt, bis (nonafluorobutanesulfonyl) imidodiphenyl-4-ethylphenylsulfonium salt, diphenyl-4-propylphenylsulfonium acetate, Diphenyl-4-propylphenylsulfonium salt of propionate, diphenyl-4-propylphenylsulfonium butyrate, 1-adamantanecarboxylic acid diphenyl-4-propylphenylsulfonium salt, diphenyl-4-propylphenylsulfonium trifluoroacetate, tricosafluoro Dodecanoic acid diphenyl-4-propylphenylsulfonium salt, salicylic acid diphenyl-4-propylphenylsulfonium salt, 10-camphorsulfonic acid diphenyl-4-propylphenylsulfonium salt Ni salt, p-toluenesulfonic acid diphenyl-4-propylphenylsulfonium salt, trifluoromethanesulfonic acid diphenyl-4-propylphenylsulfonium salt, nonafluorobutanesulfonic acid diphenyl-4-propylphenylsulfonium salt, bis (nonafluorobutanesulfonyl) ) Imidodiphenyl-4-propylphenylsulfonium salt, diphenyl-4-isopropylphenylsulfonium acetate, diphenyl-4-isopropylphenylsulfonium propionate, diphenyl-4-isopropylphenylsulfonium butyrate, 1-adamantanecarboxylate diphenyl-4 -Isopropylphenylsulfonium salt, trifluoroacetic acid diphenyl-4-isopropylphenylsulfonium salt, tricosafluorododecanoic acid diphenyl-4-isopropylate Ruphenylsulfonium salt, diphenyl-4-isopropylphenylsulfonium salt of salicylic acid, 10-camphorsulfonic acid diphenyl-4-isopropylphenylsulfonium salt, p-toluenesulfonic acid diphenyl-4-isopropylphenylsulfonium salt, trifluoromethanesulfonic acid diphenyl-4 -Isopropylphenylsulfonium salt, nonafluorobutanesulfonic acid diphenyl-4-isopropylphenylsulfonium salt, bis (nonafluorobutanesulfonyl) imidodiphenyl-4-isopropylphenylsulfonium salt, acetic acid diphenyl-4-butylphenylsulfonium salt, diphenyl propionate -4-butylphenylsulfonium salt, diphenyl-4-butylphenylsulfonium butyrate, 1-adamantanecarboxylate diphenyl-4-butyl Ruphenylsulfonium salt, trifluoroacetic acid diphenyl-4-butylphenylsulfonium salt, tricosafluorododecanoic acid diphenyl-4-butylphenylsulfonium salt, salicylic acid diphenyl-4-butylphenylsulfonium salt, 10-camphorsulfonic acid diphenyl-4- Butylphenylsulfonium salt, p-toluenesulfonic acid diphenyl-4-butylphenylsulfonium salt, trifluoromethanesulfonic acid diphenyl-4-butylphenylsulfonium salt, nonafluorobutanesulfonic acid diphenyl-4-butylphenylsulfonium salt, bis (nonafluoro) Butanesulfonyl) imidodiphenyl-4-butylphenylsulfonium salt, acetic acid diphenyl-4-tert-butylphenylsulfonium salt, diphenyl-4-tert-butylphenylsulfuric acid propionate Nium salt, diphenyl-4-tert-butylphenylsulfonium salt of butyrate, 1-adamantanecarboxylate diphenyl-4-tert-butylphenylsulfonium salt, diphenyl-4-tert-butylphenylsulfonium trifluoroacetate, tricosafluorododecanoic acid Diphenyl-4-tert-butylphenylsulfonium salt, salicylic acid diphenyl-4-tert-butylphenylsulfonium salt, 10-camphorsulfonic acid diphenyl-4-tert-butylphenylsulfonium salt, p-toluenesulfonic acid diphenyl-4-tert- Butylphenylsulfonium salt, trifluoromethanesulfonic acid diphenyl-4-tert-butylphenylsulfonium salt, nonafluorobutanesulfonic acid diphenyl-4-tert-butylphenylsulfonium salt, bis (nonafluorobutanesulfonyl) imidodiphenyl- -tert-butylphenylsulfonium salt, diphenyl-4-pentylphenylsulfonium acetate, diphenyl-4-pentylphenylsulfonium propionate, diphenyl-4-pentylphenylsulfonium butyrate, 1-adamantanecarboxylate diphenyl-4-pentylphenyl Sulfonium salt, diphenyl-4-pentylphenylsulfonium trifluoroacetate, diphenyl-4-pentylphenylsulfonium tricosafluorododecanoate, diphenyl-4-pentylphenylsulfonium salicylate, 10-camphorsulfonic acid diphenyl-4-pentylphenyl Sulfonium salt, p-toluenesulfonic acid diphenyl-4-pentylphenylsulfonium salt, trifluoromethanesulfonic acid diphenyl-4-pentylphenylsulfonium salt, nonaflu Orobutanesulfonic acid diphenyl-4-pentylphenylsulfonium salt, bis (nonafluorobutanesulfonyl) imidodiphenyl-4-pentylphenylsulfonium salt, diphenyl-4-hexylphenylsulfonium acetate, diphenyl-4-hexylphenylsulfonium propionate Diphenyl-4-hexylphenylsulfonium butyrate, 1-adamantanecarboxylic acid diphenyl-4-hexylphenylsulfonium salt, trifluoroacetic acid diphenyl-4-hexylphenylsulfonium salt, tricosafluorododecanoic acid diphenyl-4-hexylphenylsulfonium salt Diphenyl-4-hexylphenylsulfonium salt of salicylic acid, 10-camphorsulfonic acid diphenyl-4-hexylphenylsulfonium salt, p-toluenesulfonic acid dipheny -4-hexylphenylsulfonium salt, diphenyl-4-hexylphenylsulfonium trifluoromethanesulfonate, diphenyl-4-hexylphenylsulfonium salt nonafluorobutanesulfonate, bis (nonafluorobutanesulfonyl) imidodiphenyl-4-hexylphenylsulfonium Salt, diphenyl-4-cyclohexylphenylsulfonium salt, diphenyl-4-cyclohexylphenylsulfonium propionate, diphenyl-4-cyclohexylphenylsulfonium butyrate, 1-adamantanecarboxylate diphenyl-4-cyclohexylphenylsulfonium salt, trifluoroacetic acid Diphenyl-4-cyclohexylphenylsulfonium salt, diphenyl-4-cyclohexylphenylsulfonium salt of tricosafluorododecanoic acid, Diphenyl-4-cyclohexylphenylsulfonium salt of diphenyl lithylate, 10-camphorsulfonic acid diphenyl-4-cyclohexylphenylsulfonium salt, p-toluenesulfonic acid diphenyl-4-cyclohexylphenylsulfonium salt, trifluoromethanesulfonic acid diphenyl-4-cyclohexylphenylsulfonium Salt, nonafluorobutanesulfonic acid diphenyl-4-cyclohexylphenylsulfonium salt, bis (nonafluorobutanesulfonyl) imidodiphenyl-4-cyclohexylphenylsulfonium salt.

  [2] Diphenyl-4-heptylphenylsulfonium salt of acetic acid, diphenyl-4-heptylphenylsulfonium salt of propionate, diphenyl-4-heptylphenylsulfonium salt of butyrate, 1-adamantanecarboxylic acid diphenyl-4-heptylphenylsulfonium salt, trifluoro Diphenyl-4-heptylphenylsulfonium acetate, diphenyl-4-heptylphenylsulfonium salt of tricosafluorododecanoic acid, diphenyl-4-heptylphenylsulfonium salt of salicylate, 10-camphorsulfonic acid diphenyl-4-heptylphenylsulfonium salt, p- Toluenesulfonic acid diphenyl-4-heptylphenylsulfonium salt, trifluoromethanesulfonic acid diphenyl-4-heptylphenylsulfonium salt, nonafluorobutanesulfonic acid dipheny -4-heptylphenylsulfonium salt, bis (nonafluorobutanesulfonyl) imidodiphenyl-4-heptylphenylsulfonium salt, diphenyl-4-octylphenylsulfonium acetate, diphenyl-4-octylphenylsulfonium propionate, diphenyl-4 butyrate -Octylphenylsulfonium salt, 1-adamantanecarboxylic acid diphenyl-4-octylphenylsulfonium salt, trifluoroacetic acid diphenyl-4-octylphenylsulfonium salt, tricosafluorododecanoic acid diphenyl-4-octylphenylsulfonium salt, salicylic acid diphenyl-4 -Octylphenylsulfonium salt, 10-camphorsulfonic acid diphenyl-4-octylphenylsulfonium salt, p-toluenesulfonic acid diphenyl-4-octylphenylsulfonium Salt, diphenyl-4-octylphenylsulfonium salt of trifluoromethanesulfonic acid, diphenyl-4-octylphenylsulfonium salt of nonafluorobutanesulfonic acid, bis (nonafluorobutanesulfonyl) imidodiphenyl-4-octylphenylsulfonium salt, diphenyl acetate 4-nonylphenylsulfonium salt, diphenyl-4-nonylphenylsulfonium propionate, diphenyl-4-nonylphenylsulfonium butyrate, 1-adamantanecarboxylic acid diphenyl-4-nonylphenylsulfonium salt, diphenyl-4-nonyl trifluoroacetate Phenylsulfonium salt, Tricosafluorododecanoic acid diphenyl-4-nonylphenylsulfonium salt, Salicylic acid diphenyl-4-nonylphenylsulfonium salt, 10-camphorsulfonic acid Phenyl-4-nonylphenylsulfonium salt, p-toluenesulfonic acid diphenyl-4-nonylphenylsulfonium salt, trifluoromethanesulfonic acid diphenyl-4-nonylphenylsulfonium salt, nonafluorobutanesulfonic acid diphenyl-4-nonylphenylsulfonium salt, Bis (nonafluorobutanesulfonyl) imidodiphenyl-4-nonylphenylsulfonium salt, diphenyl-4-decylphenylsulfonium acetate, diphenyl-4-decylphenylsulfonium propionate, diphenyl-4-decylphenylsulfonium butyrate, 1- Adamantanecarboxylic acid diphenyl-4-decylphenylsulfonium salt, trifluoroacetic acid diphenyl-4-decylphenylsulfonium salt, tricosafluorododecanoic acid diphenyl-4-decylphenyls Ruphonium salt, diphenyl-4-decylphenylsulfonium salt of salicylate, 10-camphorsulfonic acid diphenyl-4-decylphenylsulfonium salt, p-toluenesulfonic acid diphenyl-4-decylphenylsulfonium salt, trifluoromethanesulfonic acid diphenyl-4-decyl Phenylsulfonium salt, diphenyl-4-decylphenylsulfonium salt of nonafluorobutanesulfonate, bis (nonafluorobutanesulfonyl) imidodiphenyl-4-decylphenylsulfonium salt, diphenyl-4-undecylphenylsulfonium acetate, diphenylpropionate- 4-undecylphenylsulfonium salt, diphenyl-4-undecylphenylsulfonium butyrate, 1-adamantanecarboxylic acid diphenyl-4-undecylphenylsulfonium salt, tri Diphenyl-4-undecylphenylsulfonium salt of trifluoroacetic acid, diphenyl-4-undecylphenylsulfonium salt of tricosafluorododecanoic acid, diphenyl-4-undecylphenylsulfonium salt of salicylic acid, 10-camphorsulfonic acid diphenyl-4-undecylphenyl Sulfonium salt, p-toluenesulfonic acid diphenyl-4-undecylphenylsulfonium salt, trifluoromethanesulfonic acid diphenyl-4-undecylphenylsulfonium salt, nonafluorobutanesulfonic acid diphenyl-4-undecylphenylsulfonium salt, bis (nona Fluorobutanesulfonyl) imidodiphenyl-4-undecylphenylsulfonium salt, diphenyl-4-dodecylphenylsulfonium acetate, diphenyl-4-dodecylphenylsulfone propionate Um salt, diphenyl-4-dodecylphenylsulfonium salt of butyrate, 1-adamantanecarboxylate diphenyl-4-dodecylphenylsulfonium salt, diphenyl-4-dodecylphenylsulfonium trifluoroacetate, diphenyl-4-dodecylphenyl tricosafluorododecanoate Sulfonium salt, diphenyl-4-dodecylphenylsulfonium salt of salicylic acid, 10-camphorsulfonic acid diphenyl-4-dodecylphenylsulfonium salt, p-toluenesulfonic acid diphenyl-4-dodecylphenylsulfonium salt, trifluoromethanesulfonic acid diphenyl-4-dodecyl Phenylsulfonium salt, nonafluorobutanesulfonic acid diphenyl-4-dodecylphenylsulfonium salt, bis (nonafluorobutanesulfonyl) imidodiphenyl-4-dodecylfetal Rusuruhoniumu salt.

  [3] Acetic acid phenyl-di (4-methylphenyl) sulfonium salt, propionic acid phenyl-di (4-methylphenyl) sulfonium salt, butyric acid phenyl-di (4-methylphenyl) sulfonium salt, 1-adamantanecarboxylic acid phenyl- Di (4-methylphenyl) sulfonium salt, trifluoroacetic acid phenyl-di (4-methylphenyl) sulfonium salt, tricosafluorododecanoic acid phenyl-di (4-methylphenyl) sulfonium salt, salicylic acid phenyl-di (4-methyl) Phenyl) sulfonium salt, 10-camphorsulfonic acid phenyl-di (4-methylphenyl) sulfonium salt, p-toluenesulfonic acid phenyl-di (4-methylphenyl) sulfonium salt, trifluoromethanesulfonic acid phenyl-di (4-methyl) Phenyl) sulfonium salt, nonafluorobuta Sulfonic acid phenyl-di (4-methylphenyl) sulfonium salt, bis (nonafluorobutanesulfonyl) imidophenyl-di (4-methylphenyl) sulfonium salt, acetic acid phenyl-di (4-ethylphenyl) sulfonium salt, phenyl propionate -Di (4-ethylphenyl) sulfonium salt, butyric acid phenyl-di (4-ethylphenyl) sulfonium salt, 1-adamantanecarboxylic acid phenyl-di (4-ethylphenyl) sulfonium salt, trifluoroacetic acid phenyl-di (4- Ethylphenyl) sulfonium salt, tricosafluorododecanoic acid phenyl-di (4-ethylphenyl) sulfonium salt, salicylic acid phenyl-di (4-ethylphenyl) sulfonium salt, 10-camphorsulfonic acid phenyl-di (4-ethylphenyl) Sulfonium salt, p-toluenesulfone Phenyl-di (4-ethylphenyl) sulfonium salt, trifluoromethanesulfonic acid phenyl-di (4-ethylphenyl) sulfonium salt, nonafluorobutanesulfonic acid phenyl-di (4-ethylphenyl) sulfonium salt, bis (nonafluorobutane) Sulfonyl) imidophenyl-di (4-ethylphenyl) sulfonium salt, phenyl-di (4-propylphenyl) sulfonium acetate, phenyl-di (4-propylphenyl) sulfonium propionate, phenyl-di (4-propyl) butyrate Phenyl) sulfonium salt, 1-adamantanecarboxylic acid phenyl-di (4-propylphenyl) sulfonium salt, trifluoroacetic acid phenyl-di (4-propylphenyl) sulfonium salt, tricosafluorododecanoic acid phenyl-di (4-propylphenyl) ) Sulfoniu Salt, salicylic acid phenyl-di (4-propylphenyl) sulfonium salt, 10-camphorsulfonic acid phenyl-di (4-propylphenyl) sulfonium salt, p-toluenesulfonic acid phenyl-di (4-propylphenyl) sulfonium salt, trifluoro L-methanesulfonic acid phenyl-di (4-propylphenyl) sulfonium salt, nonafluorobutanesulfonic acid phenyl-di (4-propylphenyl) sulfonium salt, bis (nonafluorobutanesulfonyl) imidophenyl-di (4-propylphenyl) sulfonium Salts, phenyl acetate-di (4-isopropylphenyl) sulfonium salt, phenylpropionate-di (4-isopropylphenyl) sulfonium salt, phenylbutyrate-di (4-isopropylphenyl) sulfonium salt, phenyl 1-adamantanecarboxylate -Di (4-isopropylphenyl) sulfonium salt, phenyl trifluoroacetate-di (4-isopropylphenyl) sulfonium salt, phenyl-di (4-isopropylphenyl) sulfonium salt of tricosafluorododecanoic acid, phenyl-di (4- Isopropylphenyl) sulfonium salt, 10-camphorsulfonic acid phenyl-di (4-isopropylphenyl) sulfonium salt, p-toluenesulfonic acid phenyl-di (4-isopropylphenyl) sulfonium salt, trifluoromethanesulfonic acid phenyl-di (4- Isopropylphenyl) sulfonium salt, nonafluorobutanesulfonic acid phenyl-di (4-isopropylphenyl) sulfonium salt, bis (nonafluorobutanesulfonyl) imidophenyl-di (4-isopropylphenyl) sulfonium salt Acetic acid phenyl-di (4-butylphenyl) sulfonium salt, propionic acid phenyl-di (4-butylphenyl) sulfonium salt, butyric acid phenyl-di (4-butylphenyl) sulfonium salt, 1-adamantanecarboxylic acid phenyl-di (4 -Butylphenyl) sulfonium salt, trifluoroacetic acid phenyl-di (4-butylphenyl) sulfonium salt, tricosafluorododecanoic acid phenyl-di (4-butylphenyl) sulfonium salt, salicylic acid phenyl-di (4-butylphenyl) sulfonium Salt, 10-camphorsulfonic acid phenyl-di (4-butylphenyl) sulfonium salt, p-toluenesulfonic acid phenyl-di (4-butylphenyl) sulfonium salt, trifluoromethanesulfonic acid phenyl-di (4-butylphenyl) sulfonium Salt, nonafluorobutanesulfur Acid phenyl-di (4-butylphenyl) sulfonium salt, bis (nonafluorobutanesulfonyl) imidophenyl-di (4-butylphenyl) sulfonium salt, acetic acid phenyl-di (4-tert-butylphenyl) sulfonium salt, propion Acid phenyl-di (4-tert-butylphenyl) sulfonium salt, butyric acid phenyl-di (4-tert-butylphenyl) sulfonium salt, 1-adamantanecarboxylic acid phenyl-di (4-tert-butylphenyl) sulfonium salt, tri Fluoroacetic acid phenyl-di (4-tert-butylphenyl) sulfonium salt, tricosafluorododecanoic acid phenyl-di (4-tert-butylphenyl) sulfonium salt, salicylic acid phenyl-di (4-tert-butylphenyl) sulfonium salt, 10-camphorsulfonic acid phenyl-di (4-tert-butylphenyl) sulfonium salt P-toluenesulfonic acid phenyl-di (4-tert-butylphenyl) sulfonium salt, trifluoromethanesulfonic acid phenyl-di (4-tert-butylphenyl) sulfonium salt, nonafluorobutanesulfonic acid phenyl-di (4-tert -Butylphenyl) sulfonium salt, bis (nonafluorobutanesulfonyl) imidophenyl-di (4-tert-butylphenyl) sulfonium salt, phenyl-di (4-pentylphenyl) sulfonium acetate, phenyl-dipropionate (4- Pentylphenyl) sulfonium salt, phenylbutyrate-di (4-pentylphenyl) sulfonium salt, 1-adamantanecarboxylic acid phenyl-di (4-pentylphenyl) sulfonium salt, trifluoroacetic acid phenyl-di (4-pentylphenyl) sulfonium salt , Phenyl tricosafluorododecanoate (4-pentylphenyl) sulfonium salt, salicylic acid phenyl-di (4-pentylphenyl) sulfonium salt, 10-camphorsulfonic acid phenyl-di (4-pentylphenyl) sulfonium salt, p-toluenesulfonic acid phenyl-di (4- Pentylphenyl) sulfonium salt, trifluoromethanesulfonic acid phenyl-di (4-pentylphenyl) sulfonium salt, nonafluorobutanesulfonic acid phenyl-di (4-pentylphenyl) sulfonium salt, bis (nonafluorobutanesulfonyl) imidophenyl-di (4-pentylphenyl) sulfonium salt, phenyl-di (4-hexylphenyl) sulfonium acetate, phenyl-di (4-hexylphenyl) sulfonium propionate, phenyl-di (4-hexylphenyl) sulfonium butyrate, 1 -Adama Tannic acid phenyl-di (4-hexylphenyl) sulfonium salt, trifluoroacetic acid phenyl-di (4-hexylphenyl) sulfonium salt, tricosafluorododecanoic acid phenyl-di (4-hexylphenyl) sulfonium salt, salicylic acid phenyl- Di (4-hexylphenyl) sulfonium salt, 10-camphorsulfonic acid phenyl-di (4-hexylphenyl) sulfonium salt, p-toluenesulfonic acid phenyl-di (4-hexylphenyl) sulfonium salt, trifluoromethanesulfonic acid phenyl- Di (4-hexylphenyl) sulfonium salt, phenyl nonafluorobutanesulfonate-di (4-hexylphenyl) sulfonium salt, bis (nonafluorobutanesulfonyl) imidophenyl-di (4-hexylphenyl) sulfonium salt, phenyl acetate- Di (4-cyclohexylphenyl) sulfonium salt, phenyl-propionate-di (4-cyclohexylphenyl) sulfonium salt, phenylbutyrate-di (4-cyclohexylphenyl) sulfonium salt, 1-adamantanecarboxylic acid phenyl-di (4-cyclohexylphenyl) ) Sulfonium salt, trifluoroacetic acid phenyl-di (4-cyclohexylphenyl) sulfonium salt, tricosafluorododecanoic acid phenyl-di (4-cyclohexylphenyl) sulfonium salt, salicylic acid phenyl-di (4-cyclohexylphenyl) sulfonium salt, 10 -Phenyl-di (4-cyclohexylphenyl) sulfonium salt of camphor sulfonic acid, phenyl-di (4-cyclohexylphenyl) sulfonium salt of p-toluenesulfonic acid, phenyl-di-trifluoromethanesulfonic acid 4-cyclohexyl-phenyl) sulfonium salts, nonafluorobutanesulfonate phenyl - di (4-cyclohexyl-phenyl) sulfonium salts, bis (nonafluorobutanesulfonyl) imide phenyl - di (4-cyclohexyl-phenyl) sulfonium salt.

  [4] Tri (4-methylphenyl) sulfonium salt of acetic acid, tri (4-methylphenyl) sulfonium salt of propionate, tri (4-methylphenyl) sulfonium salt of butyrate, tri (4-methylphenyl) sulfonium salt of 1-adamantanecarboxylate Salt, trifluoroacetic acid tri (4-methylphenyl) sulfonium salt, tricosafluorododecanoic acid tri (4-methylphenyl) sulfonium salt, salicylic acid tri (4-methylphenyl) sulfonium salt, 10-camphorsulfonic acid tri (4- Methylphenyl) sulfonium salt, p-toluenesulfonic acid tri (4-methylphenyl) sulfonium salt, trifluoromethanesulfonic acid tri (4-methylphenyl) sulfonium salt, nonafluorobutanesulfonic acid tri (4-methylphenyl) sulfonium salt, Bis (Nonaful Lobutanesulfonyl) imido tri (4-methylphenyl) sulfonium salt, tri (4-ethylphenyl) sulfonium acetate, tri (4-ethylphenyl) sulfonium propionate, tri (4-ethylphenyl) sulfonium butyrate, 1- Adamantanecarboxylic acid tri (4-ethylphenyl) sulfonium salt, trifluoroacetic acid tri (4-ethylphenyl) sulfonium salt, tricosafluorododecanoic acid tri (4-ethylphenyl) sulfonium salt, salicylic acid tri (4-ethylphenyl) sulfonium Salt, 10-camphorsulfonic acid tri (4-ethylphenyl) sulfonium salt, p-toluenesulfonic acid tri (4-ethylphenyl) sulfonium salt, trifluoromethanesulfonic acid tri (4-ethylphenyl) sulfonium salt, nonafluorobutanesulfur Tri (4-ethylphenyl) sulfonium salt, bis (nonafluorobutanesulfonyl) imido tri (4-ethylphenyl) sulfonium salt, tri (4-propylphenyl) sulfonium acetate, tri (4-propylphenyl) sulfonium propionate Salt, butanoic acid tri (4-propylphenyl) sulfonium salt, 1-adamantanecarboxylic acid tri (4-propylphenyl) sulfonium salt, trifluoroacetic acid tri (4-propylphenyl) sulfonium salt, tricosafluorododecanoic acid tri (4- Propylphenyl) sulfonium salt, tri (4-propylphenyl) sulfonium salt of salicylic acid, 10-camphorsulfonic acid tri (4-propylphenyl) sulfonium salt, p-toluenesulfonic acid tri (4-propylphenyl) sulfonium salt, trifluoro Methanesulfonic acid tri (4-propylphenyl) sulfonium salt, nonafluorobutanesulfonic acid tri (4-propylphenyl) sulfonium salt, bis (nonafluorobutanesulfonyl) imidotri (4-propylphenyl) sulfonium salt, acetic acid tri (4- Isopropylphenyl) sulfonium salt, propionate tri (4-isopropylphenyl) sulfonium salt, butyric acid tri (4-isopropylphenyl) sulfonium salt, 1-adamantanecarboxylic acid tri (4-isopropylphenyl) sulfonium salt, trifluoroacetic acid tri (4 -Isopropylphenyl) sulfonium salt, tricosafluorododecanoic acid tri (4-isopropylphenyl) sulfonium salt, salicylic acid tri (4-isopropylphenyl) sulfonium salt, 10-camphorsulfonic acid tri 4-isopropylphenyl) sulfonium salt, p-toluenesulfonic acid tri (4-isopropylphenyl) sulfonium salt, trifluoromethanesulfonic acid tri (4-isopropylphenyl) sulfonium salt, nonafluorobutanesulfonic acid tri (4-isopropylphenyl) sulfonium Salt, bis (nonafluorobutanesulfonyl) imido tri (4-isopropylphenyl) sulfonium salt, tri (4-butylphenyl) sulfonium acetate, tri (4-butylphenyl) sulfonium propionate, tri (4-butylphenyl) butyrate Sulfonium salt, 1-adamantanecarboxylic acid tri (4-butylphenyl) sulfonium salt, trifluoroacetic acid tri (4-butylphenyl) sulfonium salt, tricosafluorododecanoic acid tri (4-butylphenyl) sulfur Nium salt, tri (4-butylphenyl) sulfonium salt of salicylic acid, 10-camphorsulfonic acid tri (4-butylphenyl) sulfonium salt, p-toluenesulfonic acid tri (4-butylphenyl) sulfonium salt, trifluoromethanesulfonic acid tri ( 4-butylphenyl) sulfonium salt, nonafluorobutanesulfonic acid tri (4-butylphenyl) sulfonium salt, bis (nonafluorobutanesulfonyl) imidotri (4-butylphenyl) sulfonium salt, tri (4-tert-butylphenyl) acetate Sulfonium salt, propionate tri (4-tert-butylphenyl) sulfonium salt, butyric acid tri (4-tert-butylphenyl) sulfonium salt, 1-adamantanecarboxylic acid tri (4-tert-butylphenyl) sulfonium salt, trifluoroacetic acid Tri (4-tert-butylphenol) Nyl) sulfonium salt, tricosafluorododecanoic acid tri (4-tert-butylphenyl) sulfonium salt, salicylic acid tri (4-tert-butylphenyl) sulfonium salt, 10-camphorsulfonic acid tri (4-tert-butylphenyl) sulfonium Salt, p-toluenesulfonic acid tri (4-tert-butylphenyl) sulfonium salt, trifluoromethanesulfonic acid tri (4-tert-butylphenyl) sulfonium salt, nonafluorobutanesulfonic acid tri (4-tert-butylphenyl) sulfonium Salt, bis (nonafluorobutanesulfonyl) imido tri (4-tert-butylphenyl) sulfonium salt, tri (4-pentylphenyl) sulfonium acetate, tri (4-pentylphenyl) sulfonium propionate, tri (4-pentyl) butyrate Phenyl) sulfonium salt, 1-adama N-carboxylate tri (4-pentylphenyl) sulfonium salt, trifluoroacetic acid tri (4-pentylphenyl) sulfonium salt, tricosafluorododecanoic acid tri (4-pentylphenyl) sulfonium salt, salicylic acid tri (4-pentylphenyl) sulfonium Salt, 10-camphorsulfonic acid tri (4-pentylphenyl) sulfonium salt, p-toluenesulfonic acid tri (4-pentylphenyl) sulfonium salt, trifluoromethanesulfonic acid tri (4-pentylphenyl) sulfonium salt, nonafluorobutanesulfone Tri (4-pentylphenyl) sulfonium acid salt, bis (nonafluorobutanesulfonyl) imido tri (4-pentylphenyl) sulfonium salt, tri (4-hexylphenyl) sulfonium acetate, tri (4-hexylpropionic acid) Sylphenyl) sulfonium salt, tri (4-hexylphenyl) sulfonium butyrate, 1-adamantanecarboxylic acid tri (4-hexylphenyl) sulfonium salt, trifluoroacetic acid tri (4-hexylphenyl) sulfonium salt, tricosafluorododecanoic acid tri (4-hexylphenyl) sulfonium salt, salicylic acid tri (4-hexylphenyl) sulfonium salt, 10-camphorsulfonic acid tri (4-hexylphenyl) sulfonium salt, p-toluenesulfonic acid tri (4-hexylphenyl) sulfonium salt, Tri (4-hexylphenyl) sulfonium salt of trifluoromethanesulfonic acid, tri (4-hexylphenyl) sulfonium salt of nonafluorobutanesulfonic acid, bis (nonafluorobutanesulfonyl) imidotri (4-hexylphenyl) s Rufonium salt, tri (4-cyclohexylphenyl) sulfonium acetate, tri (4-cyclohexylphenyl) sulfonium salt propionate, tri (4-cyclohexylphenyl) sulfonium butyrate, 1-adamantanecarboxylate tri (4-cyclohexylphenyl) sulfonium Salt, tri (4-cyclohexylphenyl) sulfonium salt of trifluoroacetic acid, tri (4-cyclohexylphenyl) sulfonium salt of tricosafluorododecanoic acid, tri (4-cyclohexylphenyl) sulfonium salt of salicylic acid, 10-camphorsulfonic acid tri (4- Cyclohexylphenyl) sulfonium salt, p-toluenesulfonic acid tri (4-cyclohexylphenyl) sulfonium salt, trifluoromethanesulfonic acid tri (4-cyclohexylphenyl) sulfonium Salt, tri (4-cyclohexylphenyl) sulfonium salt of nonafluorobutanesulfonic acid, bis (nonafluorobutanesulfonyl) imide tri (4-cyclohexylphenyl) sulfonium salt.

  [5] Diphenyl-2,4,6-trimethylphenylsulfonium acetate, diphenyl-2,4,6-trimethylphenylsulfonium propionate, diphenyl-2,4,6-trimethylphenylsulfonium butyrate, 1-adamantanecarboxyl Diphenyl-2,4,6-trimethylphenylsulfonium salt, diphenyl-2,4,6-trimethylphenylsulfonium trifluoroacetate, diphenyl-2,4,6-trimethylphenylsulfonium tricosafluorododecanoate, diphenyl salicylate -2,4,6-trimethylphenylsulfonium salt, 10-camphorsulfonic acid diphenyl-2,4,6-trimethylphenylsulfonium salt, p-toluenesulfonic acid diphenyl-2,4,6-trimethylphenylsulfonium salt, trifluoromethane The Diphenyl-2,4,6-trimethylphenylsulfonium sulfonate, diphenyl-2,4,6-trimethylphenylsulfonium salt, nonafluorobutanesulfonate, bis (nonafluorobutanesulfonyl) imidodiphenyl-2,4,6-trimethyl Phenylsulfonium salt, diphenyl-2,4,6-triethylphenylsulfonium acetate, diphenyl-2,4,6-triethylphenylsulfonium propionate, diphenyl-2,4,6-triethylphenylsulfonium butyrate, 1-adamantane Carboxylic acid diphenyl-2,4,6-triethylphenylsulfonium salt, trifluoroacetic acid diphenyl-2,4,6-triethylphenylsulfonium salt, tricosafluorododecanoic acid diphenyl-2,4,6-triethylphenylsulfonium salt, Diphenyl-2,4,6-triethylphenylsulfonium salt, 10-camphorsulfonic acid diphenyl-2,4,6-triethylphenylsulfonium salt, p-toluenesulfonic acid diphenyl-2,4,6-triethylphenylsulfonium salt , Trifluoromethanesulfonic acid diphenyl-2,4,6-triethylphenylsulfonium salt, nonafluorobutanesulfonic acid diphenyl-2,4,6-triethylphenylsulfonium salt, bis (nonafluorobutanesulfonyl) imidodiphenyl-2,4 6-triethylphenylsulfonium salt, diphenyl-2,4,6-tripropylphenylsulfonium acetate, diphenyl-2,4,6-tripropylphenylsulfonium propionate, diphenyl-2,4,6-tripropylphenylbutyrate Sulfoniu Salt, 1-adamantanecarboxylic acid diphenyl-2,4,6-tripropylphenylsulfonium salt, trifluoroacetic acid diphenyl-2,4,6-tripropylphenylsulfonium salt, tricosafluorododecanoic acid diphenyl-2,4 6-tripropylphenylsulfonium salt, diphenyl-2,4,6-tripropylphenylsulfonium salt, salicylic acid diphenyl-2,4,6-tripropylphenylsulfonium salt, p-toluenesulfonic acid diphenyl-2 , 4,6-Tripropylphenylsulfonium salt, diphenyl-2,4,6-tripropylphenylsulfonium trifluoromethanesulfonate, diphenyl-2,4,6-tripropylphenylsulfonium salt nonafluorobutanesulfonate, bis ( Nonafluorobutane Sulfonyl) imidodiphenyl-2,4,6-tripropylphenylsulfonium salt, diphenyl-2,4,6-triisopropylphenylsulfonium acetate, diphenyl-2,4,6-triisopropylphenylsulfonium propionate, diphenylbutyrate -2,4,6-triisopropylphenylsulfonium salt, 1-adamantanecarboxylic acid diphenyl-2,4,6-triisopropylphenylsulfonium salt, trifluoroacetic acid diphenyl-2,4,6-triisopropylphenylsulfonium salt, tricho Diphenyl-2,4,6-triisopropylphenylsulfonium salt of safluorododecanoic acid, diphenyl-2,4,6-triisopropylphenylsulfonium salt of salicylic acid, 10-camphorsulfonic acid diphenyl-2,4,6-triisopropylphenol Nylsulfonium salt, p-toluenesulfonic acid diphenyl-2,4,6-triisopropylphenylsulfonium salt, trifluoromethanesulfonic acid diphenyl-2,4,6-triisopropylphenylsulfonium salt, nonafluorobutanesulfonic acid diphenyl-2 4,6-triisopropylphenylsulfonium salt, bis (nonafluorobutanesulfonyl) imide diphenyl-2,4,6-triisopropylphenylsulfonium salt, diphenyl-2,4,6-tributylphenylsulfonium acetate, diphenylpropionate- 2,4,6-tributylphenylsulfonium salt, diphenyl-2,4,6-tributylphenylsulfonium butyrate, 1-adamantanecarboxylic acid diphenyl-2,4,6-tributylphenylsulfonium salt, trifluoroacetic acid Diphenyl-2,4,6-tributylphenylsulfonium salt, diphenyl-2,4,6-tributylphenylsulfonium salt, tricosafluorododecanoic acid diphenyl-2,4,6-tributylphenylsulfonium salt, 10-camphorsulfonic acid Diphenyl-2,4,6-tributylphenylsulfonium salt, p-toluenesulfonic acid diphenyl-2,4,6-tributylphenylsulfonium salt, trifluoromethanesulfonic acid diphenyl-2,4,6-tributylphenylsulfonium salt, nonafluoro Butanesulfonic acid diphenyl-2,4,6-tributylphenylsulfonium salt, bis (nonafluorobutanesulfonyl) imidodiphenyl-2,4,6-tributylphenylsulfonium salt, diphenyl-2,4,6-tri-tert-acetate Butyl Fe Rusulfonium salt, diphenyl-2,4,6-tri-tert-butylphenylsulfonium salt of propionate, diphenyl-2,4,6-tri-tert-butylphenylsulfonium salt of butyrate, diphenyl-2,1-adamantanecarboxylate 4,6-tri-tert-butylphenylsulfonium salt, trifluoroacetic acid diphenyl-2,4,6-tri-tert-butylphenylsulfonium salt, tricosafluorododecanoic acid diphenyl-2,4,6-tri-tert- Butylphenylsulfonium salt, salicylic acid diphenyl-2,4,6-tri-tert-butylphenylsulfonium salt, 10-camphorsulfonic acid diphenyl-2,4,6-tri-tert-butylphenylsulfonium salt, p-toluenesulfonic acid Diphenyl-2,4,6-tri-tert-butylphenylsulfonium salt, trifluoromethanesulfonic acid diphe 2,4,6-tri-tert-butylphenylsulfonium salt, diphenyl-2,4,6-tri-tert-butylphenylsulfonium salt, bis (nonafluorobutanesulfonyl) imidodiphenyl-2 , 4,6-tri-tert-butylphenylsulfonium salt, diphenyl-2,4,6-tripentylphenylsulfonium acetate, diphenyl-2,4,6-tripentylphenylsulfonium propionate, diphenyl-2 butyrate 4,6-tripentylphenylsulfonium salt, 1-adamantanecarboxylic acid diphenyl-2,4,6-tripentylphenylsulfonium salt, trifluoroacetic acid diphenyl-2,4,6-tripentylphenylsulfonium salt, tricosafluorododecane Acid diphenyl-2,4,6-tripentylphenylsulfonium Salt, diphenyl-2,4,6-tripentylphenylsulfonium salt of salicylic acid, 10-camphorsulfonic acid diphenyl-2,4,6-tripentylphenylsulfonium salt, p-toluenesulfonic acid diphenyl-2,4,6-tri Pentylphenylsulfonium salt, trifluoromethanesulfonic acid diphenyl-2,4,6-tripentylphenylsulfonium salt, nonafluorobutanesulfonic acid diphenyl-2,4,6-tripentylphenylsulfonium salt, bis (nonafluorobutanesulfonyl) imide Diphenyl-2,4,6-tripentylphenylsulfonium salt, diphenyl-2,4,6-trihexylphenylsulfonium acetate, diphenyl-2,4,6-trihexylphenylsulfonium propionate, diphenyl-2, butyrate 4,6-trihex Ruphenylsulfonium salt, 1-adamantanecarboxylic acid diphenyl-2,4,6-trihexylphenylsulfonium salt, trifluoroacetic acid diphenyl-2,4,6-trihexylphenylsulfonium salt, tricosafluorododecanoic acid diphenyl-2 4,6-trihexylphenylsulfonium salt, diphenyl-2,4,6-trihexylphenylsulfonium salt, 10-camphorsulfonic acid diphenyl-2,4,6-trihexylphenylsulfonium salt, p-toluenesulfonic acid diphenyl -2,4,6-trihexylphenylsulfonium salt, diphenyl-2,4,6-trihexylphenylsulfonium salt of trifluoromethanesulfonic acid, diphenyl-2,4,6-trihexylphenylsulfonium salt of nonafluorobutanesulfonic acid, Bi (Nonafluorobutanesulfonyl) imidodiphenyl-2,4,6-trihexylphenylsulfonium salt, acetic acid diphenyl-2,4,6-tricyclohexylphenylsulfonium salt, diphenyl-2,4,6-tricyclohexylphenylsulfonium propionate Salt, diphenyl-2,4,6-tricyclohexylphenylsulfonium salt of butyrate, 1-adamantanecarboxylic acid diphenyl-2,4,6-tricyclohexylphenylsulfonium salt, diphenyl-2,4,6-tricyclohexylphenyl trifluoroacetate Sulfonium salt, diphenyl-2,4,6-tricyclohexylphenylsulfonium salt of tricosafluorododecanoic acid, diphenyl-2,4,6-tricyclohexylphenylsulfonium salt of salicylic acid, 10-camphorsulfonic acid diph Nyl-2,4,6-tricyclohexylphenylsulfonium salt, p-toluenesulfonic acid diphenyl-2,4,6-tricyclohexylphenylsulfonium salt, trifluoromethanesulfonic acid diphenyl-2,4,6-tricyclohexylphenylsulfonium salt Nonafluorobutanesulfonic acid diphenyl-2,4,6-tricyclohexylphenylsulfonium salt, bis (nonafluorobutanesulfonyl) imidodiphenyl-2,4,6-tricyclohexylphenylsulfonium salt.

  [6] Acetic acid phenyl-bis (2,4,6-trimethylphenyl) sulfonium salt, propionic acid phenyl-bis (2,4,6-trimethylphenyl) sulfonium salt, butyric acid phenyl-bis (2,4,6-trimethyl) Phenyl) sulfonium salt, 1-adamantanecarboxylic acid phenyl-bis (2,4,6-trimethylphenyl) sulfonium salt, trifluoroacetic acid phenyl-bis (2,4,6-trimethylphenyl) sulfonium salt, tricosafluorododecanoic acid Phenyl-bis (2,4,6-trimethylphenyl) sulfonium salt, phenyl-bis (2,4,6-trimethylphenyl) sulfonium salt of salicylate, 10-camphorsulfonic acid phenyl-bis (2,4,6-trimethylphenyl) ) Sulfonium salt, phenyl-bis (2,4,6-to-toluenesulfonate) Methylphenyl) sulfonium salt, trifluoromethanesulfonic acid phenyl-bis (2,4,6-trimethylphenyl) sulfonium salt, nonafluorobutanesulfonic acid phenyl-bis (2,4,6-trimethylphenyl) sulfonium salt, bis (nona Fluorobutanesulfonyl) imidophenyl-bis (2,4,6-trimethylphenyl) sulfonium salt, phenyl-bis (2,4,6-triethylphenyl) sulfonium acetate, phenyl-bis (2,4,6-propionate) Triethylphenyl) sulfonium salt, butyric acid phenyl-bis (2,4,6-triethylphenyl) sulfonium salt, 1-adamantanecarboxylic acid phenyl-bis (2,4,6-triethylphenyl) sulfonium salt, trifluoroacetic acid phenyl-bis (2,4,6-triethylphenyl) Sulfonium salt, tricosafluorododecanoic acid phenyl-bis (2,4,6-triethylphenyl) sulfonium salt, salicylic acid phenyl-bis (2,4,6-triethylphenyl) sulfonium salt, 10-camphorsulfonic acid phenyl-bis ( 2,4,6-triethylphenyl) sulfonium salt, p-toluenesulfonic acid phenyl-bis (2,4,6-triethylphenyl) sulfonium salt, trifluoromethanesulfonic acid phenyl-bis (2,4,6-triethylphenyl) Sulfonium salt, Nonafluorobutanesulfonic acid phenyl-bis (2,4,6-triethylphenyl) sulfonium salt, Bis (nonafluorobutanesulfonyl) imidophenyl-bis (2,4,6-triethylphenyl) sulfonium salt, Phenyl acetate -Bis (2,4,6-tripropyl Enyl) sulfonium salt, propionate phenyl-bis (2,4,6-tripropylphenyl) sulfonium salt, butyrate phenyl-bis (2,4,6-tripropylphenyl) sulfonium salt, 1-adamantanecarboxylate phenyl-bis (2,4,6-Tripropylphenyl) sulfonium salt, trifluoroacetic acid phenyl-bis (2,4,6-tripropylphenyl) sulfonium salt, tricosafluorododecanoic acid phenyl-bis (2,4,6-tri Propylphenyl) sulfonium salt, salicylic acid phenyl-bis (2,4,6-tripropylphenyl) sulfonium salt, 10-camphorsulfonic acid phenyl-bis (2,4,6-tripropylphenyl) sulfonium salt, p-toluenesulfone Acid phenyl-bis (2,4,6-tripropylphenyl) sulfonium , Trifluoromethanesulfonic acid phenyl-bis (2,4,6-tripropylphenyl) sulfonium salt, nonafluorobutanesulfonic acid phenyl-bis (2,4,6-tripropylphenyl) sulfonium salt, bis (nonafluorobutanesulfonyl) ) Imidophenyl-bis (2,4,6-tripropylphenyl) sulfonium salt, phenyl-bis (2,4,6-triisopropylphenyl) sulfonium acetate, phenyl-bis (2,4,6-tripropionate) Isopropylphenyl) sulfonium salt, phenylbutyrate-bis (2,4,6-triisopropylphenyl) sulfonium salt, 1-adamantanecarboxylic acid phenyl-bis (2,4,6-triisopropylphenyl) sulfonium salt, phenyltrifluoroacetate -Bis (2,4,6-triisopropylphen Nyl) sulfonium salt, tricosafluorododecanoic acid phenyl-bis (2,4,6-triisopropylphenyl) sulfonium salt, salicylic acid phenyl-bis (2,4,6-triisopropylphenyl) sulfonium salt, 10-camphorsulfonic acid Phenyl-bis (2,4,6-triisopropylphenyl) sulfonium salt, p-toluenesulfonic acid phenyl-bis (2,4,6-triisopropylphenyl) sulfonium salt, trifluoromethanesulfonic acid phenyl-bis (2,4 , 6-Triisopropylphenyl) sulfonium salt, phenyl-bis (2,4,6-triisopropylphenyl) sulfonium salt of nonafluorobutanesulfonate, bis (nonafluorobutanesulfonyl) imidophenyl-bis (2,4,6- Triisopropylphenyl) sulfoniu Salts, phenyl-bis (2,4,6-tributylphenyl) sulfonium acetate, phenyl-bis (2,4,6-tributylphenyl) sulfonium propionate, phenyl-bis (2,4,6-tributylbutyrate) Phenyl) sulfonium salt, 1-adamantanecarboxylic acid phenyl-bis (2,4,6-tributylphenyl) sulfonium salt, trifluoroacetic acid phenyl-bis (2,4,6-tributylphenyl) sulfonium salt, tricosafluorododecanoic acid Phenyl-bis (2,4,6-tributylphenyl) sulfonium salt, salicylic acid phenyl-bis (2,4,6-tributylphenyl) sulfonium salt, 10-camphorsulfonic acid phenyl-bis (2,4,6-tributylphenyl) ) Sulfonium salt, phenyl-bis (2,4,6-to-toluenesulfonate) Butylphenyl) sulfonium salt, trifluoromethanesulfonic acid phenyl-bis (2,4,6-tributylphenyl) sulfonium salt, nonafluorobutanesulfonic acid phenyl-bis (2,4,6-tributylphenyl) sulfonium salt, bis (nona Fluorobutanesulfonyl) imidophenyl-bis (2,4,6-tributylphenyl) sulfonium salt, acetic acid phenyl-bis (2,4,6-tri-tert-butylphenyl) sulfonium salt, propionate phenyl-bis (2, 4,6-tri-tert-butylphenyl) sulfonium salt, butyric acid phenyl-bis (2,4,6-tri-tert-butylphenyl) sulfonium salt, 1-adamantanecarboxylic acid phenyl-bis (2,4,6- Tri-tert-butylphenyl) sulfonium salt, phenyl-bis (2,4,6-tritrifluoroacetate) -tert-butylphenyl) sulfonium salt, phenyl-bis (2,4,6-tri-tert-butylphenyl) sulfonium salt of tricosafluorododecanoic acid, phenyl-bis (2,4,6-tri-tert-butyl salicylate) Phenyl) sulfonium salt, 10-camphorsulfonic acid phenyl-bis (2,4,6-tri-tert-butylphenyl) sulfonium salt, p-toluenesulfonic acid phenyl-bis (2,4,6-tri-tert-butyl) Phenyl) sulfonium salt, phenyl-bis (2,4,6-tri-tert-butylphenyl) sulfonium trifluoromethanesulfonate, phenyl-bis (2,4,6-tri-tert-butylphenyl) nonafluorobutanesulfonate ) Sulfonium salt, bis (nonafluorobutanesulfonyl) imidophenyl-bis (2,4,6-tri-tert-butylphenyl) sulfoniu Salts, phenyl-bis (2,4,6-tripentylphenyl) sulfonium acetate, phenyl-bis (2,4,6-tripentylphenyl) sulfonium propionate, phenyl-bis (2,4,6) butyrate -Tripentylphenyl) sulfonium salt, 1-adamantanecarboxylic acid phenyl-bis (2,4,6-tripentylphenyl) sulfonium salt, trifluoroacetic acid phenyl-bis (2,4,6-tripentylphenyl) sulfonium salt, Tricosafluorododecanoic acid phenyl-bis (2,4,6-tripentylphenyl) sulfonium salt, salicylic acid phenyl-bis (2,4,6-tripentylphenyl) sulfonium salt, 10-camphorsulfonic acid phenyl-bis (2 , 4,6-Tripentylphenyl) sulfonium salt, p-toluenesulfonic acid phenyl-bi (2,4,6-Tripentylphenyl) sulfonium salt, trifluoromethanesulfonic acid phenyl-bis (2,4,6-tripentylphenyl) sulfonium salt, nonafluorobutanesulfonic acid phenyl-bis (2,4,6- Tripentylphenyl) sulfonium salt, bis (nonafluorobutanesulfonyl) imidophenyl-bis (2,4,6-tripentylphenyl) sulfonium salt, acetic acid phenyl-bis (2,4,6-trihexylphenyl) sulfonium salt, Phenyl-bis (2,4,6-trihexylphenyl) sulfonium salt of propionate, phenyl-bis (2,4,6-trihexylphenyl) sulfonium salt of butyrate, phenyl-bis (2,4,2-adamantanecarboxylate) 6-trihexylphenyl) sulfonium salt, trifluoroacetic acid phenyl-bis 2,4,6-trihexylphenyl) sulfonium salt, tricosafluorododecanoic acid phenyl-bis (2,4,6-trihexylphenyl) sulfonium salt, salicylic acid phenyl-bis (2,4,6-trihexylphenyl) Sulfonium salt, 10-camphorsulfonic acid phenyl-bis (2,4,6-trihexylphenyl) sulfonium salt, p-toluenesulfonic acid phenyl-bis (2,4,6-trihexylphenyl) sulfonium salt, trifluoromethanesulfone Acid phenyl-bis (2,4,6-trihexylphenyl) sulfonium salt, nonafluorobutanesulfonic acid phenyl-bis (2,4,6-trihexylphenyl) sulfonium salt, bis (nonafluorobutanesulfonyl) imidophenyl- Bis (2,4,6-trihexylphenyl) sulfoniu Salt, phenyl-bis (2,4,6-tricyclohexylphenyl) sulfonium acetate, phenyl-bis (2,4,6-tricyclohexylphenyl) sulfonium propionate, phenyl-bis (2,4,6) butyrate -Tricyclohexylphenyl) sulfonium salt, 1-adamantanecarboxylic acid phenyl-bis (2,4,6-tricyclohexylphenyl) sulfonium salt, trifluoroacetic acid phenyl-bis (2,4,6-tricyclohexylphenyl) sulfonium salt, Tricosafluorododecanoic acid phenyl-bis (2,4,6-tricyclohexylphenyl) sulfonium salt, salicylic acid phenyl-bis (2,4,6-tricyclohexylphenyl) sulfonium salt, 10-camphorsulfonic acid phenyl-bis (2 , 4,6-Tricyclohexylphenyl) Rufonium salt, p-toluenesulfonic acid phenyl-bis (2,4,6-tricyclohexylphenyl) sulfonium salt, trifluoromethanesulfonic acid phenyl-bis (2,4,6-tricyclohexylphenyl) sulfonium salt, nonafluorobutanesulfone Acid phenyl-bis (2,4,6-tricyclohexylphenyl) sulfonium salt, bis (nonafluorobutanesulfonyl) imidophenyl-bis (2,4,6-tricyclohexylphenyl) sulfonium salt.

  [7] Tris (2,4,6-trimethylphenyl) sulfonium acetate, tris (2,4,6-trimethylphenyl) sulfonium propionate, tris (2,4,6-trimethylphenyl) sulfonium butyrate, 1 -Adamantanecarboxylic acid tris (2,4,6-trimethylphenyl) sulfonium salt, trifluoroacetic acid tris (2,4,6-trimethylphenyl) sulfonium salt, tricosafluorododecanoic acid tris (2,4,6-trimethylphenyl) ) Sulfonium salt, tris (2,4,6-trimethylphenyl) sulfonium salt of salicylic acid, 10-camphorsulfonic acid tris (2,4,6-trimethylphenyl) sulfonium salt, p-toluenesulfonic acid tris (2,4,6) -Trimethylphenyl) sulfonium salt, trifluoromethanesulfone Tris (2,4,6-trimethylphenyl) sulfonium salt, nonafluorobutanesulfonic acid tris (2,4,6-trimethylphenyl) sulfonium salt, bis (nonafluorobutanesulfonyl) imide tris (2,4,6-trimethylphenyl) ) Sulfonium salt, tris (2,4,6-triethylphenyl) sulfonium acetate, tris (2,4,6-triethylphenyl) sulfonium propionate, tris (2,4,6-triethylphenyl) sulfonium butyrate, 1-adamantanecarboxylic acid tris (2,4,6-triethylphenyl) sulfonium salt, trifluoroacetic acid tris (2,4,6-triethylphenyl) sulfonium salt, tricosafluorododecanoic acid tris (2,4,6-triethyl) Phenyl) sulfonium salt, tris salicylate 2,4,6-triethylphenyl) sulfonium salt, 10-camphorsulfonic acid tris (2,4,6-triethylphenyl) sulfonium salt, p-toluenesulfonic acid tris (2,4,6-triethylphenyl) sulfonium salt, Tris (2,4,6-triethylphenyl) sulfonium salt of trifluoromethanesulfonic acid, tris (2,4,6-triethylphenyl) sulfonium salt of nonafluorobutanesulfonic acid, bis (nonafluorobutanesulfonyl) imide tris (2,4,4) 6-triethylphenyl) sulfonium salt, tris (2,4,6-tripropylphenyl) sulfonium acetate, tris (2,4,6-tripropylphenyl) sulfonium propionate, tris (2,4,6-butyrate) Tripropylphenyl) sulfonium salt, 1-adaman Carboxylic acid tris (2,4,6-tripropylphenyl) sulfonium salt, trifluoroacetic acid tris (2,4,6-tripropylphenyl) sulfonium salt, tricosafluorododecanoic acid tris (2,4,6-tripropyl) Phenyl) sulfonium salt, salicylic acid tris (2,4,6-tripropylphenyl) sulfonium salt, 10-camphorsulfonic acid tris (2,4,6-tripropylphenyl) sulfonium salt, p-toluenesulfonic acid tris (2, 4,6-tripropylphenyl) sulfonium salt, trifluoromethanesulfonic acid tris (2,4,6-tripropylphenyl) sulfonium salt, nonafluorobutanesulfonic acid tris (2,4,6-tripropylphenyl) sulfonium salt, Bis (nonafluorobutanesulfonyl) imide tri (2,4,6-tripropylphenyl) sulfonium salt, tris (2,4,6-triisopropylphenyl) sulfonium acetate, tris (2,4,6-triisopropylphenyl) sulfonium propionate, trisbutyrate ( 2,4,6-Triisopropylphenyl) sulfonium salt, 1-adamantanecarboxylic acid tris (2,4,6-triisopropylphenyl) sulfonium salt, trifluoroacetic acid tris (2,4,6-triisopropylphenyl) sulfonium salt Trisosafluorododecanoic acid tris (2,4,6-triisopropylphenyl) sulfonium salt, salicylic acid tris (2,4,6-triisopropylphenyl) sulfonium salt, 10-camphorsulfonic acid tris (2,4,6- Triisopropylphenyl) sulfonium salt, p-tolue Sulfonic acid tris (2,4,6-triisopropylphenyl) sulfonium salt, trifluoromethanesulfonic acid tris (2,4,6-triisopropylphenyl) sulfonium salt, nonafluorobutanesulfonic acid tris (2,4,6-tri Isopropylphenyl) sulfonium salt, bis (nonafluorobutanesulfonyl) imidotris (2,4,6-triisopropylphenyl) sulfonium salt, tris (2,4,6-tributylphenyl) sulfonium acetate, trispropionic acid (2,4 , 6-Tributylphenyl) sulfonium salt, butyric acid tris (2,4,6-tributylphenyl) sulfonium salt, 1-adamantanecarboxylic acid tris (2,4,6-tributylphenyl) sulfonium salt, trifluoroacetic acid tris (2, 4,6-Tributylpheny L) sulfonium salt, tricosafluorododecanoic acid tris (2,4,6-tributylphenyl) sulfonium salt, salicylic acid tris (2,4,6-tributylphenyl) sulfonium salt, 10-camphorsulfonic acid tris (2,4,4) 6-tributylphenyl) sulfonium salt, p-toluenesulfonic acid tris (2,4,6-tributylphenyl) sulfonium salt, trifluoromethanesulfonic acid tris (2,4,6-tributylphenyl) sulfonium salt, nonafluorobutanesulfonic acid Tris (2,4,6-tributylphenyl) sulfonium salt, bis (nonafluorobutanesulfonyl) imide tris (2,4,6-tributylphenyl) sulfonium salt, tris (2,4,6-tri-tert-butylphenyl) acetate ) Sulfonium salt, tris propionate (2 , 4,6-tri-tert-butylphenyl) sulfonium salt, butyric acid tris (2,4,6-tri-tert-butylphenyl) sulfonium salt, 1-adamantanecarboxylic acid tris (2,4,6-tri-tert -Butylphenyl) sulfonium salt, trifluoroacetic acid tris (2,4,6-tri-tert-butylphenyl) sulfonium salt, tricosafluorododecanoic acid tris (2,4,6-tri-tert-butylphenyl) sulfonium salt , Tris (2,4,6-tri-tert-butylphenyl) sulfonium salt of salicylic acid, 10-camphorsulfonic acid tris (2,4,6-tri-tert-butylphenyl) sulfonium salt, p-toluenesulfonic acid tris ( 2,4,6-tri-tert-butylphenyl) sulfonium salt, tris (2,4,6-tri-tert-butylphenyl) sulfonium trifluoromethanesulfonate Salt, nonafluorobutanesulfonic acid tris (2,4,6-tri-tert-butylphenyl) sulfonium salt, bis (nonafluorobutanesulfonyl) imidotris (2,4,6-tri-tert-butylphenyl) sulfonium salt, Tris (2,4,6-tripentylphenyl) sulfonium acetate, tris (2,4,6-tripentylphenyl) sulfonium propionate, tris (2,4,6-tripentylphenyl) sulfonium butyrate, 1 -Adamantanecarboxylic acid tris (2,4,6-tripentylphenyl) sulfonium salt, trifluoroacetic acid tris (2,4,6-tripentylphenyl) sulfonium salt, tricosafluorododecanoic acid tris (2,4,6- Tripentylphenyl) sulfonium salt, tris (2,4,6-tripentylpheny) salicylate ) Sulfonium salt, 10-camphorsulfonic acid tris (2,4,6-tripentylphenyl) sulfonium salt, p-toluenesulfonic acid tris (2,4,6-tripentylphenyl) sulfonium salt, trifluoromethanesulfonic acid tris ( 2,4,6-Tripentylphenyl) sulfonium salt, nonafluorobutanesulfonic acid tris (2,4,6-tripentylphenyl) sulfonium salt, bis (nonafluorobutanesulfonyl) imidotris (2,4,6-tripentyl) Phenyl) sulfonium salt, tris (2,4,6-trihexylphenyl) sulfonium acetate, tris (2,4,6-trihexylphenyl) sulfonium salt of propionate, tris (2,4,6-trihexylphenyl) butyrate ) Sulfonium salt, 1-adamantanecarboxylic acid tris (2,4,6-trihexylphenyl) sulfonium salt, trifluoroacetic acid tris (2,4,6-trihexylphenyl) sulfonium salt, tricosafluorododecanoic acid tris (2,4,6-trihexylphenyl) sulfonium Salt, salicylic acid tris (2,4,6-trihexylphenyl) sulfonium salt, 10-camphorsulfonic acid tris (2,4,6-trihexylphenyl) sulfonium salt, p-toluenesulfonic acid tris (2,4,6 -Trihexylphenyl) sulfonium salt, trifluoromethanesulfonic acid tris (2,4,6-trihexylphenyl) sulfonium salt, nonafluorobutanesulfonic acid tris (2,4,6-trihexylphenyl) sulfonium salt, bis (nona Fluorobutanesulfonyl) imidotris (2,4,6-tri Xylphenyl) sulfonium salt, tris (2,4,6-tricyclohexylphenyl) sulfonium acetate, tris (2,4,6-tricyclohexylphenyl) sulfonium propionate, tris (2,4,6-tricyclohexyl) butyrate Phenyl) sulfonium salt, 1-adamantanecarboxylic acid tris (2,4,6-tricyclohexylphenyl) sulfonium salt, trifluoroacetic acid tris (2,4,6-tricyclohexylphenyl) sulfonium salt, tricosafluorododecanoic acid tris ( 2,4,6-tricyclohexylphenyl) sulfonium salt, tris (2,4,6-tricyclohexylphenyl) sulfonium salt of salicylic acid, 10-camphorsulfonic acid tris (2,4,6-tricyclohexylphenyl) sulfonium salt, p -toluene Tris (2,4,6-tricyclohexylphenyl) sulfonium salt of sulfonic acid, Tris (2,4,6-tricyclohexylphenyl) sulfonium salt of trifluoromethanesulfonic acid, Tris (2,4,6-triphenyl) nonafluorobutanesulfonate (Cyclohexylphenyl) sulfonium salt, bis (nonafluorobutanesulfonyl) imide tris (2,4,6-tricyclohexylphenyl) sulfonium salt.

  Specific examples of the triphenylsulfonium salt compound in which the hydrogen atom on the phenyl group is substituted with an alkoxy group (alkoxy group-substituted) include, for example, sulfonium salt compounds represented by the following [8] to [14]. .

  [8] Diphenyl-4-methoxyphenylsulfonium acetate, diphenyl-4-methoxyphenylsulfonium propionate, diphenyl-4-methoxyphenylsulfonium butyrate, 1-adamantanecarboxylic acid diphenyl-4-methoxyphenylsulfonium salt, trifluoro Diphenyl-4-methoxyphenylsulfonium acetate, diphenyl-4-methoxyphenylsulfonium salt of tricosafluorododecanoic acid, diphenyl-4-methoxyphenylsulfonium salt of salicylic acid, 10-camphorsulfonic acid diphenyl-4-methoxyphenylsulfonium salt, p- Toluenesulfonic acid diphenyl-4-methoxyphenylsulfonium salt, trifluoromethanesulfonic acid diphenyl-4-methoxyphenylsulfonium salt, nonafluorobutanesulfonic acid dipheny -4-methoxyphenylsulfonium salt, bis (nonafluorobutanesulfonyl) imidodiphenyl-4-methoxyphenylsulfonium salt, diphenyl-4-ethoxyphenylsulfonium acetate, diphenyl-4-ethoxyphenylsulfonium salt propionate, diphenyl-4 butyrate -Ethoxyphenylsulfonium salt, 1-adamantanecarboxylic acid diphenyl-4-ethoxyphenylsulfonium salt, trifluoroacetic acid diphenyl-4-ethoxyphenylsulfonium salt, tricosafluorododecanoic acid diphenyl-4-ethoxyphenylsulfonium salt, salicylic acid diphenyl-4 -Ethoxyphenylsulfonium salt, 10-camphorsulfonic acid diphenyl-4-ethoxyphenylsulfonium salt, p-toluenesulfonic acid diphenyl-4-ethoxyphenylsulfonium Salt, diphenyl-4-ethoxyphenylsulfonium salt of trifluoromethanesulfonic acid, diphenyl-4-ethoxyphenylsulfonium salt of nonafluorobutanesulfonic acid, bis (nonafluorobutanesulfonyl) imidodiphenyl-4-ethoxyphenylsulfonium salt, diphenyl acetate 4-propoxyphenylsulfonium salt, diphenyl-4-propoxyphenylsulfonium salt of propionate, diphenyl-4-propoxyphenylsulfonium salt of butyrate, 1-adamantanecarboxylate diphenyl-4-propoxyphenylsulfonium salt, diphenyl-4-propoxy trifluoroacetate Phenylsulfonium salt, Tricosafluorododecanoic acid diphenyl-4-propoxyphenylsulfonium salt, Salicylic acid diphenyl-4-propoxyphenylsulfonium salt 10-camphorsulfonic acid diphenyl-4-propoxyphenylsulfonium salt, p-toluenesulfonic acid diphenyl-4-propoxyphenylsulfonium salt, trifluoromethanesulfonic acid diphenyl-4-propoxyphenylsulfonium salt, nonafluorobutanesulfonic acid diphenyl-4 -Propoxyphenylsulfonium salt, bis (nonafluorobutanesulfonyl) imidodiphenyl-4-propoxyphenylsulfonium salt, diphenyl-4-isopropoxyphenylsulfonium acetate, diphenyl-4-isopropoxyphenylsulfonium propionate, diphenyl-4 butyrate -Isopropoxyphenylsulfonium salt, 1-adamantanecarboxylic acid diphenyl-4-isopropoxyphenylsulfonium salt, trifluoroacetic acid diphenyl-4-iso Lopoxyphenylsulfonium salt, diphenyl-4-isopropoxyphenylsulfonium salt of tricosafluorododecanoic acid, diphenyl-4-isopropoxyphenylsulfonium salt of salicylic acid, 10-camphorsulfonic acid diphenyl-4-isopropoxyphenylsulfonium salt, p-toluene Diphenyl-4-isopropoxyphenylsulfonium sulfonate, diphenyl-4-isopropoxyphenylsulfonium trifluoromethanesulfonate, diphenyl-4-isopropoxyphenylsulfonium nonafluorobutanesulfonate, bis (nonafluorobutanesulfonyl) imidodiphenyl -4-isopropoxyphenylsulfonium salt, acetic acid diphenyl-4-butoxyphenylsulfonium salt, propionate diphenyl-4-butoxyphenylsulfonium Nium salt, diphenyl-4-butoxyphenylsulfonium salt of butyrate, 1-adamantanecarboxylic acid diphenyl-4-butoxyphenylsulfonium salt, diphenyl-4-butoxyphenylsulfonium trifluoroacetate, diphenyl-4-butoxyphenyl tricosafluorododecanoate Sulfonium salt, diphenyl-4-butoxyphenylsulfonium salt of salicylic acid, 10-camphorsulfonic acid diphenyl-4-butoxyphenylsulfonium salt, p-toluenesulfonic acid diphenyl-4-butoxyphenylsulfonium salt, trifluoromethanesulfonic acid diphenyl-4-butoxy Phenylsulfonium salt, nonafluorobutanesulfonic acid diphenyl-4-butoxyphenylsulfonium salt, bis (nonafluorobutanesulfonyl) imidodiphenyl-4-butoxyf Phenylsulfonium salt, diphenyl-4-tert-butoxyphenylsulfonium acetate, diphenyl-4-tert-butoxyphenylsulfonium propionate, diphenyl-4-tert-butoxyphenylsulfonium butyrate, 1-adamantanecarboxylate diphenyl-4- tert-butoxyphenylsulfonium salt, trifluoroacetic acid diphenyl-4-tert-butoxyphenylsulfonium salt, tricosafluorododecanoic acid diphenyl-4-tert-butoxyphenylsulfonium salt, salicylic acid diphenyl-4-tert-butoxyphenylsulfonium salt, 10 -Diphenyl-4-tert-butoxyphenylsulfonium salt of camphorsulfonic acid, diphenyl-4-tert-butoxyphenylsulfonium salt of p-toluenesulfonic acid, diphenyl-4-tert-butoxyphenylsulfuric acid trifluoromethanesulfonate Honium salt, diphenyl-4-tert-butoxyphenylsulfonium salt, nonafluorobutanesulfonate, bis (nonafluorobutanesulfonyl) imidodiphenyl-4-tert-butoxyphenylsulfonium salt, diphenyl-4-pentyloxyphenylsulfonium acetate, propion Acid diphenyl-4-pentyloxyphenylsulfonium salt, butyric acid diphenyl-4-pentyloxyphenylsulfonium salt, 1-adamantanecarboxylic acid diphenyl-4-pentyloxyphenylsulfonium salt, trifluoroacetic acid diphenyl-4-pentyloxyphenylsulfonium salt, Diphenyl-4-pentyloxyphenylsulfonium salt of tricosafluorododecanoic acid, diphenyl-4-pentyloxyphenylsulfonium salt of salicylic acid, 10-camphorsulfonic acid dife 4-Petyloxyphenylsulfonium salt, p-toluenesulfonic acid diphenyl-4-pentyloxyphenylsulfonium salt, trifluoromethanesulfonic acid diphenyl-4-pentyloxyphenylsulfonium salt, nonafluorobutanesulfonic acid diphenyl-4-pentyloxy Phenylsulfonium salt, bis (nonafluorobutanesulfonyl) imidodiphenyl-4-pentyloxyphenylsulfonium salt, acetic acid diphenyl-4-hexyloxyphenylsulfonium salt, diphenyl-4-hexyloxyphenylsulfonium propionate, diphenyl-4-butyrate Hexyloxyphenylsulfonium salt, 1-adamantanecarboxylic acid diphenyl-4-hexyloxyphenylsulfonium salt, trifluoroacetic acid diphenyl-4-hexyloxyphene Sulfulonium salt, diphenyl-4-hexyloxyphenylsulfonium salt of tricosafluorododecanoic acid, diphenyl-4-hexyloxyphenylsulfonium salt of salicylic acid, 10-camphorsulfonic acid diphenyl-4-hexyloxyphenylsulfonium salt, p-toluenesulfonic acid Diphenyl-4-hexyloxyphenylsulfonium salt, trifluoromethanesulfonic acid diphenyl-4-hexyloxyphenylsulfonium salt, nonafluorobutanesulfonic acid diphenyl-4-hexyloxyphenylsulfonium salt, bis (nonafluorobutanesulfonyl) imidodiphenyl-4 -Hexyloxyphenylsulfonium salt, diphenyl-4-cyclohexyloxyphenylsulfonium acetate, diphenyl-4-cyclohexyloxyphpropionate Phenylsulfonium salt, diphenyl-4-cyclohexyloxyphenylsulfonium salt of butyrate, 1-adamantanecarboxylic acid diphenyl-4-cyclohexyloxyphenylsulfonium salt, diphenyl-4-cyclohexyloxyphenylsulfonium trifluoroacetate, diphenyl-tricosafluorododecanoate 4-cyclohexyloxyphenylsulfonium salt, diphenyl-4-cyclohexyloxyphenylsulfonium salt, salicylic acid diphenyl-4-cyclohexyloxyphenylsulfonium salt, p-toluenesulfonic acid diphenyl-4-cyclohexyloxyphenylsulfonium salt, trifluoro Diphenyl-4-cyclohexyloxyphenylsulfonium salt of lomethanesulfonic acid, difluoro nonafluorobutanesulfonic acid Enyl-4-cyclohexyloxyphenylsulfonium salt, bis (nonafluorobutanesulfonyl) imidodiphenyl-4-cyclohexyloxyphenylsulfonium salt.

  [9] Diphenyl-4-heptyloxyphenylsulfonium salt of acetic acid, diphenyl-4-heptyloxyphenylsulfonium salt of propionate, diphenyl-4-heptyloxyphenylsulfonium salt of butyrate, 1-adamantanecarboxylate diphenyl-4-heptyloxyphenylsulfonium Salt, diphenyl-4-heptyloxyphenylsulfonium salt of trifluoroacetic acid, diphenyl-4-heptyloxyphenylsulfonium salt of tricosafluorododecanoic acid, diphenyl-4-heptyloxyphenylsulfonium salt of salicylic acid, 10-camphorsulfonic acid diphenyl-4-phenyl Heptyloxyphenylsulfonium salt, p-toluenesulfonic acid diphenyl-4-heptyloxyphenylsulfonium salt, trifluoromethanesulfonic acid diphenyl-4-heptyloxy Enylsulfonium salt, nonafluorobutanesulfonic acid diphenyl-4-heptyloxyphenylsulfonium salt, bis (nonafluorobutanesulfonyl) imidodiphenyl-4-heptyloxyphenylsulfonium salt, diphenyl-4-octyloxyphenylsulfonium acetate, propionic acid Diphenyl-4-octyloxyphenylsulfonium salt, diphenyl-4-octyloxyphenylsulfonium butyrate, 1-adamantanecarboxylic acid diphenyl-4-octyloxyphenylsulfonium salt, trifluoroacetic acid diphenyl-4-octyloxyphenylsulfonium salt, tricho Diphenyl-4-octyloxyphenylsulfonium salt of safluorododecanoic acid, diphenyl-4-octyloxyphenylsulfonium salt of salicylic acid, 10-camphor Diphenyl-4-octyloxyphenylsulfonium salt of sulfonic acid, diphenyl-4-octyloxyphenylsulfonium salt of p-toluenesulfonic acid, diphenyl-4-octyloxyphenylsulfonium salt of trifluoromethanesulfonic acid, diphenyl-4-nonafluorobutanesulfonic acid Octyloxyphenylsulfonium salt, bis (nonafluorobutanesulfonyl) imidodiphenyl-4-octyloxyphenylsulfonium salt, diphenyl-4-nonyloxyphenylsulfonium acetate, diphenyl-4-nonyloxyphenylsulfonium propionate, diphenylbutyrate 4-nonyloxyphenylsulfonium salt, 1-adamantanecarboxylic acid diphenyl-4-nonyloxyphenylsulfonium salt, trifluoroacetic acid diphenyl-4-nonyloxy Phenylsulfonium salt, diphenyl-4-nonyloxyphenylsulfonium salt of tricosafluorododecanoic acid, diphenyl-4-nonyloxyphenylsulfonium salt of salicylic acid, 10-camphorsulfonic acid diphenyl-4-nonyloxyphenylsulfonium salt, p-toluenesulfonic acid Diphenyl-4-nonyloxyphenylsulfonium salt, diphenyl-4-nonyloxyphenylsulfonium salt of trifluoromethanesulfonic acid, nonafluorobutanesulfonic acid diphenyl-4-nonyloxyphenylsulfonium salt, bis (nonafluorobutanesulfonyl) imidodiphenyl-4 -Nonyloxyphenylsulfonium salt, diphenyl-4-decyloxyphenylsulfonium acetate, diphenyl-4-decyloxyphenylsulfonium salt propionate, dairy Acid diphenyl-4-decyloxyphenylsulfonium salt, 1-adamantanecarboxylic acid diphenyl-4-decyloxyphenylsulfonium salt, diphenyl-4-decyloxyphenylsulfonium trifluoroacetate, diphenyl-4-decyloxy tricosafluorododecanoate Phenylsulfonium salt, salicylic acid diphenyl-4-decyloxyphenylsulfonium salt, 10-camphorsulfonic acid diphenyl-4-decyloxyphenylsulfonium salt, p-toluenesulfonic acid diphenyl-4-decyloxyphenylsulfonium salt, trifluoromethanesulfonic acid diphenyl -4-decyloxyphenylsulfonium salt, nonafluorobutanesulfonic acid diphenyl-4-decyloxyphenylsulfonium salt, bis (nonafluorobutanesulfonyl) imide Phenyl-4-decyloxyphenylsulfonium salt, diphenyl-4-undecyloxyphenylsulfonium acetate, diphenyl-4-undecyloxyphenylsulfonium propionate, diphenyl-4-undecyloxyphenylsulfonium butyrate, 1-adamantane Carboxylic acid diphenyl-4-undecyloxyphenylsulfonium salt, trifluoroacetic acid diphenyl-4-undecyloxyphenylsulfonium salt, tricosafluorododecanoic acid diphenyl-4-undecyloxyphenylsulfonium salt, salicylic acid diphenyl-4-undecyl Oxyphenylsulfonium salt, 10-camphorsulfonic acid diphenyl-4-undecyloxyphenylsulfonium salt, p-toluenesulfonic acid diphenyl-4-undecyloxyphenylsulfonium Salt, diphenyl-4-undecyloxyphenylsulfonium salt of trifluoromethanesulfonate, diphenyl-4-undecyloxyphenylsulfonium salt of nonafluorobutanesulfonate, bis (nonafluorobutanesulfonyl) imidodiphenyl-4-undecyloxyphenylsulfonium Salt, diphenyl-4-dodecyloxyphenylsulfonium acetate, diphenyl-4-dodecyloxyphenylsulfonium propionate, diphenyl-4-dodecyloxyphenylsulfonium butyrate, 1-adamantanecarboxylic acid diphenyl-4-dodecyloxyphenylsulfonium salt , Diphenyl-4-dodecyloxyphenylsulfonium trifluoroacetate, diphenyl-4-dodecyloxyphenylsulfonium tricosafluorododecanoate, salicylic acid Diphenyl-4-dodecyloxyphenylsulfonium salt, 10-camphorsulfonic acid diphenyl-4-dodecyloxyphenylsulfonium salt, p-toluenesulfonic acid diphenyl-4-dodecyloxyphenylsulfonium salt, trifluoromethanesulfonic acid diphenyl-4-dodecyloxy Phenylsulfonium salt, diphenyl-4-dodecyloxyphenylsulfonium salt of nonafluorobutanesulfonic acid, bis (nonafluorobutanesulfonyl) imidodiphenyl-4-dodecyloxyphenylsulfonium salt.

  [10] Acetic acid phenyl-di (4-methoxyphenyl) sulfonium salt, propionic acid phenyl-di (4-methoxyphenyl) sulfonium salt, butyric acid phenyl-di (4-methoxyphenyl) sulfonium salt, 1-adamantanecarboxylic acid phenyl- Di (4-methoxyphenyl) sulfonium salt, trifluoroacetic acid phenyl-di (4-methoxyphenyl) sulfonium salt, tricosafluorododecanoic acid phenyl-di (4-methoxyphenyl) sulfonium salt, salicylic acid phenyl-di (4-methoxy Phenyl) sulfonium salt, 10-camphorsulfonic acid phenyl-di (4-methoxyphenyl) sulfonium salt, p-toluenesulfonic acid phenyl-di (4-methoxyphenyl) sulfonium salt, trifluoromethanesulfonic acid phenyl-di (4-methoxy) Phenyl) sulfoniu Salt, phenyl-di (4-methoxyphenyl) sulfonium salt of nonafluorobutanesulfonic acid, bis (nonafluorobutanesulfonyl) imidophenyl-di (4-methoxyphenyl) sulfonium salt, phenyl-di (4-ethoxyphenyl) sulfonium acetate Salt, phenyl-di (4-ethoxyphenyl) sulfonium salt of propionate, phenyl-di (4-ethoxyphenyl) sulfonium salt of butyrate, phenyl-di (4-ethoxyphenyl) sulfonium salt of 1-adamantanecarboxylic acid, phenyl trifluoroacetate -Di (4-ethoxyphenyl) sulfonium salt, phenyl tricosafluorododecanoate-di (4-ethoxyphenyl) sulfonium salt, phenyl salicylate-di (4-ethoxyphenyl) sulfonium salt, 10-camphorsulfonic acid phenyl-di ( 4-Ethoxyph Nyl) sulfonium salt, p-toluenesulfonic acid phenyl-di (4-ethoxyphenyl) sulfonium salt, trifluoromethanesulfonic acid phenyl-di (4-ethoxyphenyl) sulfonium salt, nonafluorobutanesulfonic acid phenyl-di (4-ethoxy) Phenyl) sulfonium salt, bis (nonafluorobutanesulfonyl) imidophenyl-di (4-ethoxyphenyl) sulfonium salt, phenyl-di (4-propoxyphenyl) sulfonium acetate, phenyl-di (4-propoxyphenyl) sulfonium propionate Salt, butyric acid phenyl-di (4-propoxyphenyl) sulfonium salt, 1-adamantanecarboxylic acid phenyl-di (4-propoxyphenyl) sulfonium salt, trifluoroacetic acid phenyl-di (4-propoxyphenyl) sulfonium salt, Tricosaf Orododecanoic acid phenyl-di (4-propoxyphenyl) sulfonium salt, salicylic acid phenyl-di (4-propoxyphenyl) sulfonium salt, 10-camphorsulfonic acid phenyl-di (4-propoxyphenyl) sulfonium salt, p-toluenesulfonic acid phenyl -Di (4-propoxyphenyl) sulfonium salt, phenyl trifluoromethanesulfonate-di (4-propoxyphenyl) sulfonium salt, phenyl-di (4-propoxyphenyl) sulfonium salt of nonafluorobutanesulfonate, bis (nonafluorobutanesulfonyl) ) Imidophenyl-di (4-propoxyphenyl) sulfonium salt, phenyl-di (4-isopropoxyphenyl) sulfonium acetate, phenyl-di (4-isopropoxyphenyl) sulfonium salt propionate, phenyl butyrate -Di (4-isopropoxyphenyl) sulfonium salt, 1-adamantanecarboxylic acid phenyl-di (4-isopropoxyphenyl) sulfonium salt, trifluoroacetic acid phenyl-di (4-isopropoxyphenyl) sulfonium salt, tricosafluorododecane Acid phenyl-di (4-isopropoxyphenyl) sulfonium salt, salicylic acid phenyl-di (4-isopropoxyphenyl) sulfonium salt, 10-camphorsulfonic acid phenyl-di (4-isopropoxyphenyl) sulfonium salt, p-toluenesulfone Acid phenyl-di (4-isopropoxyphenyl) sulfonium salt, trifluoromethanesulfonic acid phenyl-di (4-isopropoxyphenyl) sulfonium salt, nonafluorobutanesulfonic acid phenyl-di (4-isopropoxyphenyl) sulfonium salt Bis (nonafluorobutanesulfonyl) imidophenyl-di (4-isopropoxyphenyl) sulfonium salt, acetic acid phenyl-di (4-butoxyphenyl) sulfonium salt, propionic acid phenyl-di (4-butoxyphenyl) sulfonium salt, phenyl butyrate -Di (4-butoxyphenyl) sulfonium salt, 1-adamantanecarboxylic acid phenyl-di (4-butoxyphenyl) sulfonium salt, trifluoroacetic acid phenyl-di (4-butoxyphenyl) sulfonium salt, tricosafluorododecanoic acid phenyl- Di (4-butoxyphenyl) sulfonium salt, phenyl salicylate-di (4-butoxyphenyl) sulfonium salt, 10-camphorsulfonic acid phenyl-di (4-butoxyphenyl) sulfonium salt, p-toluenesulfonic acid phenyl-di (4 -Butoxyphenyl ) Sulfonium salt, trifluoromethanesulfonic acid phenyl-di (4-butoxyphenyl) sulfonium salt, nonafluorobutanesulfonic acid phenyl-di (4-butoxyphenyl) sulfonium salt, bis (nonafluorobutanesulfonyl) imidophenyl-di (4 -Butoxyphenyl) sulfonium salt, phenyl-di (4-tert-butoxyphenyl) sulfonium acetate, phenyl-di (4-tert-butoxyphenyl) sulfonium salt propionate, phenyl-di (4-tert-butoxyphenyl) butyrate Sulfonium salt, 1-adamantanecarboxylic acid phenyl-di (4-tert-butoxyphenyl) sulfonium salt, trifluoroacetic acid phenyl-di (4-tert-butoxyphenyl) sulfonium salt, tricosafluorododecanoic acid phenyl-di (4- tert-butoxyphenyl) sulfonium salt, Salicylic acid phenyl-di (4-tert-butoxyphenyl) sulfonium salt, 10-camphorsulfonic acid phenyl-di (4-tert-butoxyphenyl) sulfonium salt, p-toluenesulfonic acid phenyl-di (4-tert-butoxyphenyl) Sulfonium salt, trifluoromethanesulfonic acid phenyl-di (4-tert-butoxyphenyl) sulfonium salt, nonafluorobutanesulfonic acid phenyl-di (4-tert-butoxyphenyl) sulfonium salt, bis (nonafluorobutanesulfonyl) imidophenyl- Di (4-tert-butoxyphenyl) sulfonium salt.

  [11] Tri (4-methoxyphenyl) sulfonium acetate, tri (4-methoxyphenyl) sulfonium propionate, tri (4-methoxyphenyl) sulfonium butyrate, 1-adamantanecarboxylate tri (4-methoxyphenyl) sulfonium Salt, trifluoroacetic acid tri (4-methoxyphenyl) sulfonium salt, tricosafluorododecanoic acid tri (4-methoxyphenyl) sulfonium salt, salicylic acid tri (4-methoxyphenyl) sulfonium salt, 10-camphorsulfonic acid tri (4- Methoxyphenyl) sulfonium salt, p-toluenesulfonic acid tri (4-methoxyphenyl) sulfonium salt, trifluoromethanesulfonic acid tri (4-methoxyphenyl) sulfonium salt, nonafluorobutanesulfonic acid tri (4-methoxyphenyl) sulfo Um salt, bis (nonafluorobutanesulfonyl) imido tri (4-methoxyphenyl) sulfonium salt, tri (4-ethoxyphenyl) sulfonium acetate, tri (4-ethoxyphenyl) sulfonium salt propionate, tri (4-ethoxyphenyl) butyrate ) Sulfonium salt, 1-adamantanecarboxylic acid tri (4-ethoxyphenyl) sulfonium salt, trifluoroacetic acid tri (4-ethoxyphenyl) sulfonium salt, tricosafluorododecanoic acid tri (4-ethoxyphenyl) sulfonium salt, salicylic acid tri ( 4-ethoxyphenyl) sulfonium salt, 10-camphorsulfonic acid tri (4-ethoxyphenyl) sulfonium salt, p-toluenesulfonic acid tri (4-ethoxyphenyl) sulfonium salt, trifluoromethanesulfonic acid tri (4-ethoxyphenyl) Nyl) sulfonium salt, nonafluorobutanesulfonic acid tri (4-ethoxyphenyl) sulfonium salt, bis (nonafluorobutanesulfonyl) imide tri (4-ethoxyphenyl) sulfonium salt, acetic acid tri (4-propoxyphenyl) sulfonium salt, propionic acid Tri (4-propoxyphenyl) sulfonium salt, butyric acid tri (4-propoxyphenyl) sulfonium salt, 1-adamantanecarboxylic acid tri (4-propoxyphenyl) sulfonium salt, trifluoroacetic acid tri (4-propoxyphenyl) sulfonium salt, trico Safluorododecanoic acid tri (4-propoxyphenyl) sulfonium salt, salicylic acid tri (4-propoxyphenyl) sulfonium salt, 10-camphorsulfonic acid tri (4-propoxyphenyl) sulfonium salt, p-tolue Sulfonic acid tri (4-propoxyphenyl) sulfonium salt, trifluoromethanesulfonic acid tri (4-propoxyphenyl) sulfonium salt, nonafluorobutanesulfonic acid tri (4-propoxyphenyl) sulfonium salt, bis (nonafluorobutanesulfonyl) imide tri ( 4-propoxyphenyl) sulfonium salt, tri (4-isopropoxyphenyl) sulfonium acetate, tri (4-isopropoxyphenyl) sulfonium salt propionate, tri (4-isopropoxyphenyl) sulfonium butyrate, 1-adamantanecarboxylic acid Tri (4-isopropoxyphenyl) sulfonium salt, trifluoroacetic acid tri (4-isopropoxyphenyl) sulfonium salt, tricosafluorododecanoic acid tri (4-isopropoxyphenyl) sulfonium salt, Salicylic acid tri (4-isopropoxyphenyl) sulfonium salt, 10-camphorsulfonic acid tri (4-isopropoxyphenyl) sulfonium salt, p-toluenesulfonic acid tri (4-isopropoxyphenyl) sulfonium salt, trifluoromethanesulfonic acid tri ( 4-isopropoxyphenyl) sulfonium salt, nonafluorobutanesulfonic acid tri (4-isopropoxyphenyl) sulfonium salt, bis (nonafluorobutanesulfonyl) imidotri (4-isopropoxyphenyl) sulfonium salt, tri (4-butoxyphenyl) acetate ) Sulfonium salt, tri (4-butoxyphenyl) sulfonium salt of propionate, tri (4-butoxyphenyl) sulfonium salt of butyrate, tri (4-butoxyphenyl) sulfonium salt of 1-adamantanecarboxylic acid, trif Trifluoroacetic acid tri (4-butoxyphenyl) sulfonium salt, tricosafluorododecanoic acid tri (4-butoxyphenyl) sulfonium salt, salicylic acid tri (4-butoxyphenyl) sulfonium salt, 10-camphorsulfonic acid tri (4-butoxyphenyl) Sulfonium salt, p-toluenesulfonic acid tri (4-butoxyphenyl) sulfonium salt, trifluoromethanesulfonic acid tri (4-butoxyphenyl) sulfonium salt, nonafluorobutanesulfonic acid tri (4-butoxyphenyl) sulfonium salt, bis (nona Fluorobutanesulfonyl) imido tri (4-butoxyphenyl) sulfonium salt, tri (4-tert-butoxyphenyl) sulfonium acetate, tri (4-tert-butoxyphenyl) sulfonium salt propionate, tri (4-tert-butoxyphene) butyrate Nyl) sulfonium salt, 1-adamantanecarboxylic acid tri (4-tert-butoxyphenyl) sulfonium salt, trifluoroacetic acid tri (4-tert-butoxyphenyl) sulfonium salt, tricosafluorododecanoic acid tri (4-tert-butoxyphenyl) ) Sulfonium salt, tri (4-tert-butoxyphenyl) sulfonium salt of salicylic acid, 10-camphorsulfonic acid tri (4-tert-butoxyphenyl) sulfonium salt, p-toluenesulfonic acid tri (4-tert-butoxyphenyl) sulfonium salt , Trifluoromethanesulfonic acid tri (4-tert-butoxyphenyl) sulfonium salt, nonafluorobutanesulfonic acid tri (4-tert-butoxyphenyl) sulfonium salt, bis (nonafluorobutanesulfonyl) imidotri (4-tert-butoxyphenyl) Sulfonium salt.

  [12] Diphenyl-2,4,6-trimethoxyphenylsulfonium salt of acetic acid, diphenyl-2,4,6-trimethoxyphenylsulfonium salt of propionate, diphenyl-2,4,6-trimethoxyphenylsulfonium salt of butyrate, 1 -Adamantanecarboxylic acid diphenyl-2,4,6-trimethoxyphenylsulfonium salt, trifluoroacetic acid diphenyl-2,4,6-trimethoxyphenylsulfonium salt, tricosafluorododecanoic acid diphenyl-2,4,6-trimethoxy Phenylsulfonium salt, salicylic acid diphenyl-2,4,6-trimethoxyphenylsulfonium salt, 10-camphorsulfonic acid diphenyl-2,4,6-trimethoxyphenylsulfonium salt, p-toluenesulfonic acid diphenyl-2,4,6 -Trimethoxyphenylsulfonium salt, Diphenyl-2,4,6-trimethoxyphenylsulfonium salt of trifluoromethanesulfonic acid, diphenyl-2,4,6-trimethoxyphenylsulfonium salt of nonafluorobutanesulfonic acid, bis (nonafluorobutanesulfonyl) imidodiphenyl-2, 4,6-trimethoxyphenylsulfonium salt, diphenyl-2,4,6-triethoxyphenylsulfonium acetate, diphenyl-2,4,6-triethoxyphenylsulfonium propionate, diphenyl-2,4,6-butyrate Triethoxyphenylsulfonium salt, 1-adamantanecarboxylic acid diphenyl-2,4,6-triethoxyphenylsulfonium salt, trifluoroacetic acid diphenyl-2,4,6-triethoxyphenylsulfonium salt, tricosafluorododecanoic acid diphenyl-2 , 4,6-G Ethoxyphenylsulfonium salt, diphenyl-2,4,6-triethoxyphenylsulfonium salt, 10-camphorsulfonic acid diphenyl-2,4,6-triethoxyphenylsulfonium salt, p-toluenesulfonic acid diphenyl-2,4 6-triethoxyphenylsulfonium salt, diphenyl-2,4,6-triethoxyphenylsulfonium salt trifluoromethanesulfonate, diphenyl-2,4,6-triethoxyphenylsulfonium salt nonafluorobutanesulfonate, bis (nonafluorobutane) Sulfonyl) imidodiphenyl-2,4,6-triethoxyphenylsulfonium salt, diphenyl-2,4,6-tripropoxyphenylsulfonium acetate, diphenyl-2,4,6-tripropoxyphenylsulfonium salt of propionate, Acid diphenyl-2,4,6-tripropoxyphenylsulfonium salt, 1-adamantanecarboxylic acid diphenyl-2,4,6-tripropoxyphenylsulfonium salt, trifluoroacetic acid diphenyl-2,4,6-tripropoxyphenylsulfonium salt Diphenyl-2,4,6-tripropoxyphenylsulfonium salt of tricosafluorododecanoic acid, diphenyl-2,4,6-tripropoxyphenylsulfonium salt of salicylic acid, diphenyl-2,4,6-tripropoxy of 10-camphorsulfonic acid Phenylsulfonium salt, p-toluenesulfonic acid diphenyl-2,4,6-tripropoxyphenylsulfonium salt, trifluoromethanesulfonic acid diphenyl-2,4,6-tripropoxyphenylsulfonium salt, nonafluorobutanesulfonic acid diphenyl- , 4,6-Tripropoxyphenylsulfonium salt, bis (nonafluorobutanesulfonyl) imide diphenyl-2,4,6-tripropoxyphenylsulfonium salt, diphenyl-2,4,6-triisopropoxyphenylsulfonium salt, propion Diphenyl-2,4,6-triisopropoxyphenylsulfonium salt, diphenyl-2,4,6-triisopropoxyphenylsulfonium butyrate, 1-adamantanecarboxylate diphenyl-2,4,6-triisopropoxyphenylsulfonium Salt, diphenyl-2,4,6-triisopropoxyphenylsulfonium salt of trifluoroacetic acid, diphenyl-2,4,6-triisopropoxyphenylsulfonium salt of tricosafluorododecanoic acid, diphenyl-2,4,6-trisalicylate Isopropoxy Phenylsulfonium salt, 10-camphorsulfonic acid diphenyl-2,4,6-triisopropoxyphenylsulfonium salt, p-toluenesulfonic acid diphenyl-2,4,6-triisopropoxyphenylsulfonium salt, trifluoromethanesulfonic acid diphenyl- 2,4,6-triisopropoxyphenylsulfonium salt, nonafluorobutanesulfonic acid diphenyl-2,4,6-triisopropoxyphenylsulfonium salt, bis (nonafluorobutanesulfonyl) imidodiphenyl-2,4,6-tri Isopropoxyphenylsulfonium salt, diphenyl-2,4,6-tributoxyphenylsulfonium acetate, diphenyl-2,4,6-tributoxyphenylsulfonium propionate, diphenyl-2,4,6-tributoxyphenylsulfobutyrate D 1-adamantanecarboxylic acid diphenyl-2,4,6-tributoxyphenylsulfonium salt, trifluoroacetic acid diphenyl-2,4,6-tributoxyphenylsulfonium salt, tricosafluorododecanoic acid diphenyl-2,4 6-tributoxyphenylsulfonium salt, diphenyl-2,4,6-tributoxyphenylsulfonium salt of salicylic acid, 10-camphorsulfonic acid diphenyl-2,4,6-tributoxyphenylsulfonium salt, p-toluenesulfonic acid diphenyl-2 , 4,6-Tributoxyphenylsulfonium salt, diphenyl-2,4,6-tributoxyphenylsulfonium trifluoromethanesulfonate, diphenyl-2,4,6-tributoxyphenylsulfonium salt nonafluorobutanesulfonate, bis ( Nonafluoro pig Sulfonyl) imidodiphenyl-2,4,6-tributoxyphenylsulfonium salt, diphenyl-2,4,6-tri-tert-butoxyphenylsulfonium acetate, diphenyl-2,4,6-tri-tert-propionate Butoxyphenylsulfonium salt, diphenyl-2,4,6-tri-tert-butoxyphenylsulfonium butyrate, 1-adamantanecarboxylic acid diphenyl-2,4,6-tri-tert-butoxyphenylsulfonium salt, diphenyltrifluoroacetate 2,4,6-tri-tert-butoxyphenylsulfonium salt, diphenyl-2,4,6-tri-tert-butoxyphenylsulfonium salt of tricosafluorododecanoic acid, diphenyl-2,4,6-tri-tert-salicylate Butoxyphenylsulfonium salt, 10-camphorsulfonic acid diphenyl-2,4,6-tri-tert-butoxy Phenylsulfonium salt, p-toluenesulfonic acid diphenyl-2,4,6-tri-tert-butoxyphenylsulfonium salt, trifluoromethanesulfonic acid diphenyl-2,4,6-tri-tert-butoxyphenylsulfonium salt, nonafluorobutane Diphenyl-2,4,6-tri-tert-butoxyphenylsulfonium salt of sulfonic acid, bis (nonafluorobutanesulfonyl) imidodiphenyl-2,4,6-tri-tert-butoxyphenylsulfonium salt.

  [13] Acetic acid phenyl-bis (2,4,6-trimethoxyphenyl) sulfonium salt, propionic acid phenyl-bis (2,4,6-trimethoxyphenyl) sulfonium salt, butyric acid phenyl-bis (2,4,6) -Trimethoxyphenyl) sulfonium salt, 1-adamantanecarboxylic acid phenyl-bis (2,4,6-trimethoxyphenyl) sulfonium salt, trifluoroacetic acid phenyl-bis (2,4,6-trimethoxyphenyl) sulfonium salt, Tricosafluorododecanoic acid phenyl-bis (2,4,6-trimethoxyphenyl) sulfonium salt, salicylic acid phenyl-bis (2,4,6-trimethoxyphenyl) sulfonium salt, 10-camphorsulfonic acid phenyl-bis (2 , 4,6-Trimethoxyphenyl) sulfonium salt, phenyl p-toluenesulfonate (2,4,6-trimethoxyphenyl) sulfonium salt, phenyl-bis (2,4,6-trimethoxyphenyl) sulfonium trifluoromethanesulfonate, phenyl-bis (2,4,6) nonafluorobutanesulfonate -Trimethoxyphenyl) sulfonium salt, bis (nonafluorobutanesulfonyl) imidophenyl-bis (2,4,6-trimethoxyphenyl) sulfonium salt, acetic acid phenyl-bis (2,4,6-triethoxyphenyl) sulfonium salt , Propionate phenyl-bis (2,4,6-triethoxyphenyl) sulfonium salt, butyrate phenyl-bis (2,4,6-triethoxyphenyl) sulfonium salt, 1-adamantanecarboxylate phenyl-bis (2,4 , 6-Triethoxyphenyl) sulfonium salt, phenyl trifluoroacetate (2,4,6-triethoxyphenyl) sulfonium salt, tricosafluorododecanoic acid phenyl-bis (2,4,6-triethoxyphenyl) sulfonium salt, salicylic acid phenyl-bis (2,4,6-triethoxyphenyl) ) Sulfonium salt, 10-camphorsulfonic acid phenyl-bis (2,4,6-triethoxyphenyl) sulfonium salt, p-toluenesulfonic acid phenyl-bis (2,4,6-triethoxyphenyl) sulfonium salt, trifluoromethane Sulfonic acid phenyl-bis (2,4,6-triethoxyphenyl) sulfonium salt, Nonafluorobutanesulfonic acid phenyl-bis (2,4,6-triethoxyphenyl) sulfonium salt, Bis (nonafluorobutanesulfonyl) imidophenyl -Bis (2,4,6-triethoxyphenyl) sulfoni Umum salt, phenyl-bis (2,4,6-tripropoxyphenyl) sulfonium acetate, phenyl-bis (2,4,6-tripropoxyphenyl) sulfonium propionate, phenyl-bis (2,4,6) butyrate -Tripropoxyphenyl) sulfonium salt, 1-adamantanecarboxylic acid phenyl-bis (2,4,6-tripropoxyphenyl) sulfonium salt, trifluoroacetic acid phenyl-bis (2,4,6-tripropoxyphenyl) sulfonium salt, Tricosafluorododecanoic acid phenyl-bis (2,4,6-tripropoxyphenyl) sulfonium salt, salicylic acid phenyl-bis (2,4,6-tripropoxyphenyl) sulfonium salt, 10-camphorsulfonic acid phenyl-bis (2 , 4,6-Tripropoxyphenyl) sulfonium salt, p-toluenesulfuric acid Phosphonic acid phenyl-bis (2,4,6-tripropoxyphenyl) sulfonium salt, trifluoromethanesulfonic acid phenyl-bis (2,4,6-tripropoxyphenyl) sulfonium salt, nonafluorobutanesulfonic acid phenyl-bis (2 , 4,6-Tripropoxyphenyl) sulfonium salt, bis (nonafluorobutanesulfonyl) imidophenyl-bis (2,4,6-tripropoxyphenyl) sulfonium salt, phenyl-bis (2,4,6-triisoacetate) Propoxyphenyl) sulfonium salt, propionate phenyl-bis (2,4,6-triisopropoxyphenyl) sulfonium salt, butyrate phenyl-bis (2,4,6-triisopropoxyphenyl) sulfonium salt, 1-adamantanecarboxylic acid Phenyl-bis (2,4,6-triisopropoxyphene L) sulfonium salt, trifluoroacetic acid phenyl-bis (2,4,6-triisopropoxyphenyl) sulfonium salt, tricosafluorododecanoic acid phenyl-bis (2,4,6-triisopropoxyphenyl) sulfonium salt, salicylic acid Phenyl-bis (2,4,6-triisopropoxyphenyl) sulfonium salt, 10-camphorsulfonic acid phenyl-bis (2,4,6-triisopropoxyphenyl) sulfonium salt, p-toluenesulfonic acid phenyl-bis ( 2,4,6-triisopropoxyphenyl) sulfonium salt, phenyl-bis (2,4,6-triisopropoxyphenyl) sulfonium trifluoromethanesulfonate, phenyl-bis (2,4,6) nonafluorobutanesulfonate -Triisopropoxyphenyl) sulfonium salt, bis ( Nafluorobutanesulfonyl) imidophenyl-bis (2,4,6-triisopropoxyphenyl) sulfonium salt, acetic acid phenyl-bis (2,4,6-tributoxyphenyl) sulfonium salt, propionate phenyl-bis (2, 4,6-tributoxyphenyl) sulfonium salt, butyric acid phenyl-bis (2,4,6-tributoxyphenyl) sulfonium salt, 1-adamantanecarboxylic acid phenyl-bis (2,4,6-tributoxyphenyl) sulfonium salt , Trifluoroacetic acid phenyl-bis (2,4,6-tributoxyphenyl) sulfonium salt, tricosafluorododecanoic acid phenyl-bis (2,4,6-tributoxyphenyl) sulfonium salt, salicylic acid phenyl-bis (2, 4,6-Tributoxyphenyl) sulfonium salt, 10-camphorsulfone Acid phenyl-bis (2,4,6-tributoxyphenyl) sulfonium salt, p-toluenesulfonic acid phenyl-bis (2,4,6-tributoxyphenyl) sulfonium salt, trifluoromethanesulfonic acid phenyl-bis (2, 4,6-tributoxyphenyl) sulfonium salt, nonafluorobutanesulfonic acid phenyl-bis (2,4,6-tributoxyphenyl) sulfonium salt, bis (nonafluorobutanesulfonyl) imidophenyl-bis (2,4,6 -Tributoxyphenyl) sulfonium salt, phenyl-bis (2,4,6-tri-tert-butoxyphenyl) sulfonium acetate, phenyl-bis (2,4,6-tri-tert-butoxyphenyl) sulfonium salt propionate , Phenyl-bis (2,4,6-tri-tert-butoxyphenyl) sulfonium salt of butyrate, 1-adapter Ntancarboxylic acid phenyl-bis (2,4,6-tri-tert-butoxyphenyl) sulfonium salt, trifluoroacetic acid phenyl-bis (2,4,6-tri-tert-butoxyphenyl) sulfonium salt, tricosafluorododecane Acid phenyl-bis (2,4,6-tri-tert-butoxyphenyl) sulfonium salt, salicylic acid phenyl-bis (2,4,6-tri-tert-butoxyphenyl) sulfonium salt, 10-camphorsulfonic acid phenyl-bis (2,4,6-tri-tert-butoxyphenyl) sulfonium salt, p-toluenesulfonic acid phenyl-bis (2,4,6-tri-tert-butoxyphenyl) sulfonium salt, trifluoromethanesulfonic acid phenyl-bis ( 2,4,6-tri-tert-butoxyphenyl) sulfonium salt, phenyl-bis (2,4,6) nonafluorobutanesulfonate -Tri-tert-butoxyphenyl) sulfonium salt, bis (nonafluorobutanesulfonyl) imidophenyl-bis (2,4,6-tri-tert-butoxyphenyl) sulfonium salt.

  [14] Tris (2,4,6-trimethoxyphenyl) sulfonium acetate, tris (2,4,6-trimethoxyphenyl) sulfonium propionate, tris (2,4,6-trimethoxyphenyl) sulfonium butyrate Salt, 1-adamantanecarboxylic acid tris (2,4,6-trimethoxyphenyl) sulfonium salt, trifluoroacetic acid tris (2,4,6-trimethoxyphenyl) sulfonium salt, tricosafluorododecanoic acid tris (2,4 , 6-Trimethoxyphenyl) sulfonium salt, salicylic acid tris (2,4,6-trimethoxyphenyl) sulfonium salt, 10-camphorsulfonic acid tris (2,4,6-trimethoxyphenyl) sulfonium salt, p-toluenesulfone Acid tris (2,4,6-trimethoxyphenyl) sulfonium salt, trif Oromethanesulfonic acid tris (2,4,6-trimethoxyphenyl) sulfonium salt, nonafluorobutanesulfonic acid tris (2,4,6-trimethoxyphenyl) sulfonium salt, bis (nonafluorobutanesulfonyl) imide tris (2, 4,6-trimethoxyphenyl) sulfonium salt, tris (2,4,6-triethoxyphenyl) sulfonium acetate, tris (2,4,6-triethoxyphenyl) sulfonium propionate, trisbutyrate (2,4 , 6-Triethoxyphenyl) sulfonium salt, 1-adamantanecarboxylic acid tris (2,4,6-triethoxyphenyl) sulfonium salt, trifluoroacetic acid tris (2,4,6-triethoxyphenyl) sulfonium salt, tricosa Fluorododecanoic acid tris (2,4,6-triethoxyphen L) sulfonium salt, salicylic acid tris (2,4,6-triethoxyphenyl) sulfonium salt, 10-camphorsulfonic acid tris (2,4,6-triethoxyphenyl) sulfonium salt, p-toluenesulfonic acid tris (2, 4,6-triethoxyphenyl) sulfonium salt, trifluoromethanesulfonic acid tris (2,4,6-triethoxyphenyl) sulfonium salt, nonafluorobutanesulfonic acid tris (2,4,6-triethoxyphenyl) sulfonium salt, Bis (nonafluorobutanesulfonyl) imide tris (2,4,6-triethoxyphenyl) sulfonium salt, acetic acid tris (2,4,6-tripropoxyphenyl) sulfonium salt, propionate tris (2,4,6-tripropoxy) Phenyl) sulfonium salt, butyric acid tris (2,4 6-tripropoxyphenyl) sulfonium salt, 1-adamantanecarboxylic acid tris (2,4,6-tripropoxyphenyl) sulfonium salt, trifluoroacetic acid tris (2,4,6-tripropoxyphenyl) sulfonium salt, tricosafluoro Dodecanoic acid tris (2,4,6-tripropoxyphenyl) sulfonium salt, salicylic acid tris (2,4,6-tripropoxyphenyl) sulfonium salt, 10-camphorsulfonic acid tris (2,4,6-tripropoxyphenyl) Sulfonium salt, p-toluenesulfonic acid tris (2,4,6-tripropoxyphenyl) sulfonium salt, trifluoromethanesulfonic acid tris (2,4,6-tripropoxyphenyl) sulfonium salt, nonafluorobutanesulfonic acid tris (2 , 4,6-Tripropoxy Enyl) sulfonium salt, bis (nonafluorobutanesulfonyl) imide tris (2,4,6-tripropoxyphenyl) sulfonium salt, acetic acid tris (2,4,6-triisopropoxyphenyl) sulfonium salt, propionic acid tris (2, 4,6-triisopropoxyphenyl) sulfonium salt, butyric acid tris (2,4,6-triisopropoxyphenyl) sulfonium salt, 1-adamantanecarboxylic acid tris (2,4,6-triisopropoxyphenyl) sulfonium salt, Tris (2,4,6-triisopropoxyphenyl) sulfonium trifluoroacetate, Trisosafluorododecanoic acid tris (2,4,6-triisopropoxyphenyl) sulfonium salt, Tris (2,4,6-trisalicylate) Isopropoxyphenyl) sulfonium salt, 10- Nfer sulfonic acid tris (2,4,6-triisopropoxyphenyl) sulfonium salt, p-toluenesulfonic acid tris (2,4,6-triisopropoxyphenyl) sulfonium salt, trifluoromethanesulfonic acid tris (2,4 , 6-Triisopropoxyphenyl) sulfonium salt, nonafluorobutanesulfonic acid tris (2,4,6-triisopropoxyphenyl) sulfonium salt, bis (nonafluorobutanesulfonyl) imide tris (2,4,6-triisopropoxy) Phenyl) sulfonium salt, tris (2,4,6-tributoxyphenyl) sulfonium acetate, tris (2,4,6-tributoxyphenyl) sulfonium propionate, tris (2,4,6-tributoxyphenyl) butyrate ) Sulfonium salt, 1-adamantanecarboxylic acid Lis (2,4,6-tributoxyphenyl) sulfonium salt, trifluoroacetic acid tris (2,4,6-tributoxyphenyl) sulfonium salt, tricosafluorododecanoic acid tris (2,4,6-tributoxyphenyl) Sulfonium salt, tris (2,4,6-tributoxyphenyl) sulfonium salt of salicylic acid, 10-camphorsulfonic acid tris (2,4,6-tributoxyphenyl) sulfonium salt, p-toluenesulfonic acid tris (2,4,4) 6-tributoxyphenyl) sulfonium salt, trifluoromethanesulfonic acid tris (2,4,6-tributoxyphenyl) sulfonium salt, nonafluorobutanesulfonic acid tris (2,4,6-tributoxyphenyl) sulfonium salt, bis ( Nonafluorobutanesulfonyl) imidotris (2,4,6- Ributoxyphenyl) sulfonium salt, tris (2,4,6-tri-tert-butoxyphenyl) sulfonium acetate, tris (2,4,6-tri-tert-butoxyphenyl) sulfonium salt, trisbutyrate (2 , 4,6-Tri-tert-butoxyphenyl) sulfonium salt, 1-adamantanecarboxylic acid tris (2,4,6-tri-tert-butoxyphenyl) sulfonium salt, trifluoroacetic acid tris (2,4,6-tri -tert-butoxyphenyl) sulfonium salt, tricosafluorododecanoic acid tris (2,4,6-tri-tert-butoxyphenyl) sulfonium salt, salicylic acid tris (2,4,6-tri-tert-butoxyphenyl) sulfonium salt 10-camphorsulfonic acid tris (2,4,6-tri-tert-butoxyphenyl) sulfonium salt, p-toluenesulfonic acid Lis (2,4,6-tri-tert-butoxyphenyl) sulfonium salt, trifluoromethanesulfonic acid tris (2,4,6-tri-tert-butoxyphenyl) sulfonium salt, nonafluorobutanesulfonic acid tris (2,4 , 6-Tri-tert-butoxyphenyl) sulfonium salt, bis (nonafluorobutanesulfonyl) imidotris (2,4,6-tri-tert-butoxyphenyl) sulfonium salt.

  Specific examples of the triphenylsulfonium salt compound in which the hydrogen atom on the phenyl group is substituted with an aryl group (aryl group-substituted) include sulfonium salt compounds represented by the following [15] and [16], for example. .

  [15] Diphenyl-4-phenylphenylsulfonium salt of acetic acid, diphenyl-4-phenylphenylsulfonium propionate, diphenyl-4-phenylphenylsulfonium butyrate, 1-adamantanecarboxylic acid diphenyl-4-phenylphenylsulfonium salt, trifluoro Diphenyl-4-phenylphenylsulfonium acetate, diphenyl-4-phenylphenylsulfonium salt, tricosafluorododecanoic acid, diphenyl-4-phenylphenylsulfonium salt, 10-camphorsulfonic acid diphenyl-4-phenylphenylsulfonium salt, p- Toluenesulfonic acid diphenyl-4-phenylphenylsulfonium salt, trifluoromethanesulfonic acid diphenyl-4-phenylphenylsulfonium salt, nonafluorobutanesulfonic acid diphe 4-phenylphenylsulfonium salt, bis (nonafluorobutanesulfonyl) imidodiphenyl-4-phenylphenylsulfonium salt, diphenyl-4-naphthylphenylsulfonium acetate, diphenyl-4-naphthylphenylsulfonium propionate, diphenylbutyrate 4-naphthylphenylsulfonium salt, 1-adamantanecarboxylic acid diphenyl-4-naphthylphenylsulfonium salt, trifluoroacetic acid diphenyl-4-naphthylphenylsulfonium salt, tricosafluorododecanoic acid diphenyl-4-naphthylphenylsulfonium salt, salicylic acid diphenyl- 4-naphthylphenylsulfonium salt, 10-camphorsulfonic acid diphenyl-4-naphthylphenylsulfonium salt, p-toluenesulfonic acid diphenyl-4-naphthylphenylsulfone Um salt, trifluoromethanesulfonic acid diphenyl-4-naphthylphenylsulfonium salt, nonafluorobutanesulfonic acid diphenyl-4-naphthylphenylsulfonium salt, bis (nonafluorobutanesulfonyl) imidodiphenyl-4-naphthylphenylsulfonium salt, phenyl-acetate Di (4-phenylphenyl) sulfonium salt, phenyl-di (4-phenylphenyl) sulfonium salt of propionate, phenyl-di (4-phenylphenyl) sulfonium butyrate, 1-adamantanecarboxylic acid phenyl-di (4-phenylphenyl) ) Sulfonium salt, trifluoroacetic acid phenyl-di (4-phenylphenyl) sulfonium salt, tricosafluorododecanoic acid phenyl-di (4-phenylphenyl) sulfonium salt, salicylic acid phenyl-di (4-phenylphenyl) ) Sulfonium salt, 10-camphorsulfonic acid phenyl-di (4-phenylphenyl) sulfonium salt, p-toluenesulfonic acid phenyl-di (4-phenylphenyl) sulfonium salt, trifluoromethanesulfonic acid phenyl-di (4-phenylphenyl) ) Sulfonium salt, nonafluorobutanesulfonic acid phenyl-di (4-phenylphenyl) sulfonium salt, bis (nonafluorobutanesulfonyl) imidophenyl-di (4-phenylphenyl) sulfonium salt, phenyl-di (4-naphthylphenyl acetate) ) Sulfonium salt, propionate phenyl-di (4-naphthylphenyl) sulfonium salt, butyrate phenyl-di (4-naphthylphenyl) sulfonium salt, 1-adamantanecarboxylic acid phenyl-di (4-naphthylphenyl) sulfonium salt, trifluoro Acetic acid Enyl-di (4-naphthylphenyl) sulfonium salt, phenyl-di (4-naphthylphenyl) sulfonium salt, tricosafluorododecanoic acid, phenyl-di (4-naphthylphenyl) sulfonium salt, 10-camphorsulfonic acid phenyl-di (4-Naphtylphenyl) sulfonium salt, p-toluenesulfonic acid phenyl-di (4-naphthylphenyl) sulfonium salt, trifluoromethanesulfonic acid phenyl-di (4-naphthylphenyl) sulfonium salt, nonafluorobutanesulfonic acid phenyl-di (4-naphthylphenyl) sulfonium salt, bis (nonafluorobutanesulfonyl) imidophenyl-di (4-naphthylphenyl) sulfonium salt, tri (4-phenylphenyl) sulfonium acetate, tri (4-phenylphenyl) sulfoniton propionate Um salt, butyric acid tri (4-phenylphenyl) sulfonium salt, 1-adamantanecarboxylic acid tri (4-phenylphenyl) sulfonium salt, trifluoroacetic acid tri (4-phenylphenyl) sulfonium salt, tricosafluorododecanoic acid tri (4 -Phenylphenyl) sulfonium salt, salicylic acid tri (4-phenylphenyl) sulfonium salt, 10-camphorsulfonic acid tri (4-phenylphenyl) sulfonium salt, p-toluenesulfonic acid tri (4-phenylphenyl) sulfonium salt, trifluoromethane Sulfonic acid tri (4-phenylphenyl) sulfonium salt, nonafluorobutanesulfonic acid tri (4-phenylphenyl) sulfonium salt, bis (nonafluorobutanesulfonyl) imidotri (4-phenylphenyl) sulfonium salt, acetic acid tri (4-naphthylphenyl) sulfonium salt, propionate tri (4-naphthylphenyl) sulfonium salt, butyric acid tri (4-naphthylphenyl) sulfonium salt, 1-adamantanecarboxylic acid tri (4-naphthylphenyl) sulfonium salt, trifluoroacetic acid Tri (4-naphthylphenyl) sulfonium salt, Tricosafluorododecanoic acid tri (4-naphthylphenyl) sulfonium salt, Salicylic acid tri (4-naphthylphenyl) sulfonium salt, 10-Camphorsulfonic acid tri (4-naphthylphenyl) sulfonium salt P-toluenesulfonic acid tri (4-naphthylphenyl) sulfonium salt, trifluoromethanesulfonic acid tri (4-naphthylphenyl) sulfonium salt, nonafluorobutanesulfonic acid tri (4-naphthylphenyl) sulfonium salt, bis ( Na perfluorobutane sulfonyl) Imidotori (4-naphthylphenyl) sulfonium salt.

  [16] Diphenyl-2,4,6-triphenylphenylsulfonium salt of acetic acid, diphenyl-2,4,6-triphenylphenylsulfonium propionate, diphenyl-2,4,6-triphenylphenylsulfonium salt of butyrate, 1 -Adamantanecarboxylic acid diphenyl-2,4,6-triphenylphenylsulfonium salt, trifluoroacetic acid diphenyl-2,4,6-triphenylphenylsulfonium salt, tricosafluorododecanoic acid diphenyl-2,4,6-triphenyl Phenylsulfonium salt, salicylic acid diphenyl-2,4,6-triphenylphenylsulfonium salt, 10-camphorsulfonic acid diphenyl-2,4,6-triphenylphenylsulfonium salt, p-toluenesulfonic acid diphenyl-2,4,6 -Triphenylphenylsulfonium salt, Diphenyl-2,4,6-triphenylphenylsulfonium salt of trifluoromethanesulfonic acid, diphenyl-2,4,6-triphenylphenylsulfonium salt of nonafluorobutanesulfonic acid, bis (nonafluorobutanesulfonyl) imidodiphenyl-2, 4,6-triphenylphenylsulfonium salt, diphenyl-2,4,6-trinaphthylphenylsulfonium acetate, diphenyl-2,4,6-trinaphthylphenylsulfonium propionate, diphenyl-2,4,6-butyrate Trinaphthylphenylsulfonium salt, 1-adamantanecarboxylic acid diphenyl-2,4,6-trinaphthylphenylsulfonium salt, trifluoroacetic acid diphenyl-2,4,6-trinaphthylphenylsulfonium salt, tricosafluorododecanoic acid diphenyl-2 , 4,6-G Naphthylphenylsulfonium salt, diphenyl-2,4,6-trinaphthylphenylsulfonium salt of salicylic acid, 10-camphorsulfonic acid diphenyl-2,4,6-trinaphthylphenylsulfonium salt, p-toluenesulfonic acid diphenyl-2,4 6-trinaphthylphenylsulfonium salt, trifluoromethanesulfonic acid diphenyl-2,4,6-trinaphthylphenylsulfonium salt, nonafluorobutanesulfonic acid diphenyl-2,4,6-trinaphthylphenylsulfonium salt, bis (nonafluorobutane) Sulfonyl) imidodiphenyl-2,4,6-trinaphthylphenylsulfonium salt, phenyl-bis (2,4,6-triphenylphenyl) sulfonium acetate, phenyl-bis (2,4,6-triphenylphenyl) propionate ) Sulfoni Salt, butyric acid phenyl-bis (2,4,6-triphenylphenyl) sulfonium salt, 1-adamantanecarboxylic acid phenyl-bis (2,4,6-triphenylphenyl) sulfonium salt, trifluoroacetic acid phenyl-bis ( 2,4,6-triphenylphenyl) sulfonium salt, phenyl-bis (2,4,6-triphenylphenyl) sulfonium salt of tricosafluorododecanoic acid, phenyl-bis (2,4,6-triphenylphenyl) salicylate Sulfonium salt, 10-camphorsulfonic acid phenyl-bis (2,4,6-triphenylphenyl) sulfonium salt, p-toluenesulfonic acid phenyl-bis (2,4,6-triphenylphenyl) sulfonium salt, trifluoromethanesulfone Acid phenyl-bis (2,4,6-triphenylphenyl) sulfonium salt Nonafluorobutanesulfonic acid phenyl-bis (2,4,6-triphenylphenyl) sulfonium salt, bis (nonafluorobutanesulfonyl) imidophenyl-bis (2,4,6-triphenylphenyl) sulfonium salt, phenylacetate- Bis (2,4,6-trinaphthylphenyl) sulfonium salt, propionate phenyl-bis (2,4,6-trinaphthylphenyl) sulfonium salt, butyrate phenyl-bis (2,4,6-trinaphthylphenyl) sulfonium Salt, 1-adamantanecarboxylic acid phenyl-bis (2,4,6-trinaphthylphenyl) sulfonium salt, trifluoroacetic acid phenyl-bis (2,4,6-trinaphthylphenyl) sulfonium salt, phenyl tricosafluorododecanoate -Bis (2,4,6-trinaphthylphenyl) sulfonium salt, sa Phenyl bis (2,4,6-trinaphthylphenyl) sulfonium salt of thiolate, phenyl-bis (2,4,6-trinaphthylphenyl) sulfonium salt of 10-camphorsulfonic acid, phenyl-bis (p-toluenesulfonate) 2,4,6-trinaphthylphenyl) sulfonium salt, trifluoromethanesulfonic acid phenyl-bis (2,4,6-trinaphthylphenyl) sulfonium salt, nonafluorobutanesulfonic acid phenyl-bis (2,4,6-tri Naphthylphenyl) sulfonium salt, bis (nonafluorobutanesulfonyl) imidophenyl-bis (2,4,6-trinaphthylphenyl) sulfonium salt, acetic acid tris (2,4,6-triphenylphenyl) sulfonium salt, propionic acid tris (2,4,6-triphenylphenyl) sulfonium salt, butyric acid (2,4,6-triphenylphenyl) sulfonium salt, 1-adamantanecarboxylic acid tris (2,4,6-triphenylphenyl) sulfonium salt, trifluoroacetic acid tris (2,4,6-triphenylphenyl) Sulfonium salt, tricosafluorododecanoic acid tris (2,4,6-triphenylphenyl) sulfonium salt, salicylic acid tris (2,4,6-triphenylphenyl) sulfonium salt, 10-camphorsulfonic acid tris (2,4,4) 6-triphenylphenyl) sulfonium salt, p-toluenesulfonic acid tris (2,4,6-triphenylphenyl) sulfonium salt, trifluoromethanesulfonic acid tris (2,4,6-triphenylphenyl) sulfonium salt, nonafluoro Butanesulfonic acid tris (2,4,6-triphenylpheny ) Sulfonium salt, bis (nonafluorobutanesulfonyl) imido tris (2,4,6-triphenylphenyl) sulfonium salt, tris (2,4,6-trinaphthylphenyl) sulfonium salt, tris propionate (2,4,4) 6-trinaphthylphenyl) sulfonium salt, butyric acid tris (2,4,6-trinaphthylphenyl) sulfonium salt, 1-adamantanecarboxylic acid tris (2,4,6-trinaphthylphenyl) sulfonium salt, trifluoroacetic acid tris ( 2,4,6-trinaphthylphenyl) sulfonium salt, tricosafluorododecanoic acid tris (2,4,6-trinaphthylphenyl) sulfonium salt, salicylic acid tris (2,4,6-trinaphthylphenyl) sulfonium salt, 10 -Camphorsulfonic acid tris (2,4,6-trinaphthyl Phenyl) sulfonium salt, p-toluenesulfonic acid tris (2,4,6-trinaphthylphenyl) sulfonium salt, trifluoromethanesulfonic acid tris (2,4,6-trinaphthylphenyl) sulfonium salt, nonafluorobutanesulfonic acid tris (2,4,6-trinaphthylphenyl) sulfonium salt, bis (nonafluorobutanesulfonyl) imidotris (2,4,6-trinaphthylphenyl) sulfonium salt.

  Specific examples of the triphenylsulfonium salt compound in which the hydrogen atom on the phenyl group is substituted with a halogen atom (halogen atom-substituted) include the sulfonium salt compounds represented by the following [17] and [18]. .

  [17] Diphenyl-4-fluorophenylsulfonium salt of acetic acid, diphenyl-4-fluorophenylsulfonium propionate, diphenyl-4-fluorophenylsulfonium butyrate, 1-adamantanecarboxylic acid diphenyl-4-fluorophenylsulfonium salt, trifluoro Diphenyl-4-fluorophenylsulfonium salt of acetic acid, diphenyl-4-fluorophenylsulfonium salt of tricosafluorododecanoic acid, diphenyl-4-fluorophenylsulfonium salt of salicylic acid, 10-camphorsulfonic acid diphenyl-4-fluorophenylsulfonium salt, p- Toluenesulfonic acid diphenyl-4-fluorophenylsulfonium salt, trifluoromethanesulfonic acid diphenyl-4-fluorophenylsulfonium salt, nonafluorobutanesulfonic acid dife 4-fluorophenylsulfonium salt, bis (nonafluorobutanesulfonyl) imidodiphenyl-4-fluorophenylsulfonium salt, diphenyl-4-chlorophenylsulfonium acetate, diphenyl-4-chlorophenylsulfonium propionate, diphenyl-4-butyrate Chlorophenylsulfonium salt, 1-adamantanecarboxylic acid diphenyl-4-chlorophenylsulfonium salt, trifluoroacetic acid diphenyl-4-chlorophenylsulfonium salt, tricosafluorododecanoic acid diphenyl-4-chlorophenylsulfonium salt, salicylic acid diphenyl-4-chlorophenylsulfonium salt, 10-camphorsulfonic acid diphenyl-4-chlorophenylsulfonium salt, p-toluenesulfonic acid diphenyl-4-chlorophenylsulfonium salt, triflu Diphenyl-4-chlorophenylsulfonium salt of lomethanesulfonic acid, diphenyl-4-chlorophenylsulfonium salt of nonafluorobutanesulfonic acid, bis (nonafluorobutanesulfonyl) imidodiphenyl-4-chlorophenylsulfonium salt, diphenyl-4-bromophenylsulfonium acetate, Diphenyl-4-bromophenylsulfonium salt of propionate, diphenyl-4-bromophenylsulfonium butyrate, 1-adamantanecarboxylic acid diphenyl-4-bromophenylsulfonium salt, diphenyl-4-bromophenylsulfonium trifluoroacetate, tricosafluoro Dodecanoic acid diphenyl-4-bromophenylsulfonium salt, salicylic acid diphenyl-4-bromophenylsulfonium salt, 10-camphorsulfonic acid diphenyl-4-bromophen Nylsulfonium salt, p-toluenesulfonic acid diphenyl-4-bromophenylsulfonium salt, trifluoromethanesulfonic acid diphenyl-4-bromophenylsulfonium salt, nonafluorobutanesulfonic acid diphenyl-4-bromophenylsulfonium salt, bis (nonafluorobutane) Sulfonyl) imidodiphenyl-4-bromophenylsulfonium salt, diphenyl-4-iodophenylsulfonium acetate, diphenyl-4-iodophenylsulfonium salt propionate, diphenyl-4-iodophenylsulfonium butyrate, 1-adamantanecarboxylic acid diphenyl- 4-iodophenylsulfonium salt, diphenyl-4-iodophenylsulfonium salt of trifluoroacetic acid, diphenyl-4-iodophenylsulfonium salt of tricosafluorododecanoic acid, salicyl Acid diphenyl-4-iodophenylsulfonium salt, 10-camphorsulfonic acid diphenyl-4-iodophenylsulfonium salt, p-toluenesulfonic acid diphenyl-4-iodophenylsulfonium salt, trifluoromethanesulfonic acid diphenyl-4-iodophenylsulfonium salt , Nonafluorobutanesulfonic acid diphenyl-4-iodophenylsulfonium salt, bis (nonafluorobutanesulfonyl) imidodiphenyl-4-iodophenylsulfonium salt, acetic acid phenyl-di (4-fluorophenyl) sulfonium salt, propionic acid phenyl-di (4-fluorophenyl) sulfonium salt, phenylbutyrate-di (4-fluorophenyl) sulfonium salt, 1-adamantanecarboxylic acid phenyl-di (4-fluorophenyl) sulfonium salt, trifluoroacetic acid Nyl-di (4-fluorophenyl) sulfonium salt, tricosafluorododecanoic acid phenyl-di (4-fluorophenyl) sulfonium salt, salicylic acid phenyl-di (4-fluorophenyl) sulfonium salt, 10-camphorsulfonic acid phenyl-di (4-Fluorophenyl) sulfonium salt, p-toluenesulfonic acid phenyl-di (4-fluorophenyl) sulfonium salt, trifluoromethanesulfonic acid phenyl-di (4-fluorophenyl) sulfonium salt, nonafluorobutanesulfonic acid phenyl-di (4-fluorophenyl) sulfonium salt, bis (nonafluorobutanesulfonyl) imidophenyl-di (4-fluorophenyl) sulfonium salt, phenyl-di (4-chlorophenyl) sulfonium acetate, phenyl-di (4-chlorophenyl) propionate ) Rufonium salt, butyric acid phenyl-di (4-chlorophenyl) sulfonium salt, 1-adamantanecarboxylic acid phenyl-di (4-chlorophenyl) sulfonium salt, trifluoroacetic acid phenyl-di (4-chlorophenyl) sulfonium salt, tricosafluorododecanoic acid Phenyl-di (4-chlorophenyl) sulfonium salt, salicylic acid phenyl-di (4-chlorophenyl) sulfonium salt, 10-camphorsulfonic acid phenyl-di (4-chlorophenyl) sulfonium salt, p-toluenesulfonic acid phenyl-di (4- Chlorophenyl) sulfonium salt, trifluoromethanesulfonic acid phenyl-di (4-chlorophenyl) sulfonium salt, nonafluorobutanesulfonic acid phenyl-di (4-chlorophenyl) sulfonium salt, bis (nonafluorobutanesulfonyl) imido Phenyl-di (4-chlorophenyl) sulfonium salt, phenyl-di (4-bromophenyl) sulfonium acetate, phenyl-di (4-bromophenyl) sulfonium propionate, phenyl-di (4-bromophenyl) sulfonium butyrate 1-adamantanecarboxylic acid phenyl-di (4-bromophenyl) sulfonium salt, trifluoroacetic acid phenyl-di (4-bromophenyl) sulfonium salt, tricosafluorododecanoic acid phenyl-di (4-bromophenyl) sulfonium salt, Salicylic acid phenyl-di (4-bromophenyl) sulfonium salt, 10-camphorsulfonic acid phenyl-di (4-bromophenyl) sulfonium salt, p-toluenesulfonic acid phenyl-di (4-bromophenyl) sulfonium salt, trifluoromethanesulfone Acid phenyl-di (4-bromophen Nyl) sulfonium salt, nonafluorobutanesulfonic acid phenyl-di (4-bromophenyl) sulfonium salt, bis (nonafluorobutanesulfonyl) imidophenyl-di (4-bromophenyl) sulfonium salt, phenyl-di (4-iodoacetate) Phenyl) sulfonium salt, phenyl-di (4-iodophenyl) sulfonium salt of propionate, phenyl-di (4-iodophenyl) sulfonium salt of butyrate, phenyl-di (4-iodophenyl) sulfonium salt of 1-adamantanecarboxylic acid, tri Fluoroacetic acid phenyl-di (4-iodophenyl) sulfonium salt, tricosafluorododecanoic acid phenyl-di (4-iodophenyl) sulfonium salt, salicylic acid phenyl-di (4-iodophenyl) sulfonium salt, 10-camphorsulfonic acid phenyl -Di (4-iodofeny L) sulfonium salt, p-toluenesulfonic acid phenyl-di (4-iodophenyl) sulfonium salt, trifluoromethanesulfonic acid phenyl-di (4-iodophenyl) sulfonium salt, nonafluorobutanesulfonic acid phenyl-di (4-iodo) Phenyl) sulfonium salt, bis (nonafluorobutanesulfonyl) imidophenyl-di (4-iodophenyl) sulfonium salt, tri (4-fluorophenyl) sulfonium acetate, tri (4-fluorophenyl) sulfonium propionate, tributyric acid (4-Fluorophenyl) sulfonium salt, 1-adamantanecarboxylic acid tri (4-fluorophenyl) sulfonium salt, trifluoroacetic acid tri (4-fluorophenyl) sulfonium salt, tricosafluorododecanoic acid tri (4-fluorophenyl) sulfonium Salt, tri (4-fluorophenyl) sulfonium salt of salicylic acid, 10-camphorsulfonic acid tri (4-fluorophenyl) sulfonium salt, p-toluenesulfonic acid tri (4-fluorophenyl) sulfonium salt, trifluoromethanesulfonic acid tri (4 -Fluorophenyl) sulfonium salt, nonafluorobutanesulfonic acid tri (4-fluorophenyl) sulfonium salt, bis (nonafluorobutanesulfonyl) imido tri (4-fluorophenyl) sulfonium salt, tri (4-chlorophenyl) sulfonium acetate, propion Acid tri (4-chlorophenyl) sulfonium salt, butyric acid tri (4-chlorophenyl) sulfonium salt, 1-adamantanecarboxylic acid tri (4-chlorophenyl) sulfonium salt, trifluoroacetic acid tri (4-chlorophenyl) sulfur Nium salt, tri (4-chlorophenyl) sulfonium salt of tricosafluorododecanoic acid, tri (4-chlorophenyl) sulfonium salt of salicylic acid, 10-camphorsulfonic acid tri (4-chlorophenyl) sulfonium salt, p-toluenesulfonic acid tri (4- Chlorophenyl) sulfonium salt, trifluoromethanesulfonic acid tri (4-chlorophenyl) sulfonium salt, nonafluorobutanesulfonic acid tri (4-chlorophenyl) sulfonium salt, bis (nonafluorobutanesulfonyl) imidotri (4-chlorophenyl) sulfonium salt, triacetic acid (4-Bromophenyl) sulfonium salt, propionate tri (4-bromophenyl) sulfonium salt, butyrate tri (4-bromophenyl) sulfonium salt, 1-adamantanecarboxylate tri (4-bromophenyl) Rufonium salt, tri (4-bromophenyl) sulfonium salt of trifluoroacetic acid, tri (4-bromophenyl) sulfonium salt of tricosafluorododecanoic acid, tri (4-bromophenyl) sulfonium salt of salicylic acid, 10-camphorsulfonic acid tri (4 -Bromophenyl) sulfonium salt, p-toluenesulfonic acid tri (4-bromophenyl) sulfonium salt, trifluoromethanesulfonic acid tri (4-bromophenyl) sulfonium salt, nonafluorobutanesulfonic acid tri (4-bromophenyl) sulfonium salt Bis (nonafluorobutanesulfonyl) imido tri (4-bromophenyl) sulfonium salt, tri (4-iodophenyl) sulfonium acetate, tri (4-iodophenyl) sulfonium propionate, tri (4-iodophenyl) sulfuric acid butyrate Nium salt, 1-adamantanecarboxylic acid tri (4-iodophenyl) sulfonium salt, trifluoroacetic acid tri (4-iodophenyl) sulfonium salt, tricosafluorododecanoic acid tri (4-iodophenyl) sulfonium salt, salicylic acid tri (4 -Iodophenyl) sulfonium salt, 10-camphorsulfonic acid tri (4-iodophenyl) sulfonium salt, p-toluenesulfonic acid tri (4-iodophenyl) sulfonium salt, trifluoromethanesulfonic acid tri (4-iodophenyl) sulfonium salt , Nonafluorobutanesulfonic acid tri (4-iodophenyl) sulfonium salt, bis (nonafluorobutanesulfonyl) imide tri (4-iodophenyl) sulfonium salt.

[18] Diphenyl-2,4,6-trifluorophenylsulfonium salt of acetic acid, diphenyl-2,4,6-trifluorophenylsulfonium salt of propionate, diphenyl-2,4,6-trifluorophenylsulfonium salt of butyrate, 1 -Adamantanecarboxylic acid diphenyl-2,4,6-trifluorophenylsulfonium salt, trifluoroacetic acid diphenyl-2,4,6-trifluorophenylsulfonium salt, tricosafluorododecanoic acid diphenyl-2,4,6-trifluoro Phenylsulfonium salt, salicylic acid diphenyl-2,4,6-trifluorophenylsulfonium salt, 10-camphorsulfonic acid diphenyl-2,4,6-trifluorophenylsulfonium salt, p-toluenesulfonic acid diphenyl-2,4,6 -Trifluorophenylsulfonium salt, Trifluoromethanesulfonic acid diphenyl-2,4,6-trifluorophenylsulfonium salt, nonafluorobutanesulfonic acid diphenyl-2,4,6-trifluorophenylsulfonium salt, bis (nonafluorobutanesulfonyl) imidodiphenyl-2 4,6-trifluorophenylsulfonium salt, diphenyl-2,4,6-trichlorophenylsulfonium acetate, diphenyl-2,4,6-trichlorophenylsulfonium propionate, diphenyl-2,4,6-trichlorophenylbutyrate Sulfonium salt, 1-adamantanecarboxylic acid diphenyl-2,4,6-trichlorophenylsulfonium salt, trifluoroacetic acid diphenyl-2,4,6-trichlorophenylsulfonium salt, tricosafluorododecanoic acid diphenyl-2,4,6- Trichloroph Nylsulfonium salt, salicylic acid diphenyl-2,4,6-trichlorophenylsulfonium salt, 10-camphorsulfonic acid diphenyl-2,4,6-trichlorophenylsulfonium salt, p-toluenesulfonic acid diphenyl-2,4,6-tri Chlorophenylsulfonium salt, trifluoromethanesulfonic acid diphenyl-2,4,6-trichlorophenylsulfonium salt, nonafluorobutanesulfonic acid diphenyl-2,4,6-trichlorophenylsulfonium salt, bis (nonafluorobutanesulfonyl) imidodiphenyl-2 , 4,6-trichlorophenylsulfonium salt, diphenyl-2,4,6-tribromophenylsulfonium acetate, diphenyl-2,4,6-tribromophenylsulfonium propionate, diphenyl-2,4,6-butyrate Tribro Mophenylsulfonium salt, 1-adamantanecarboxylic acid diphenyl-2,4,6-tribromophenylsulfonium salt, trifluoroacetic acid diphenyl-2,4,6-tribromophenylsulfonium salt, tricosafluorododecanoic acid diphenyl-2 4,6-tribromophenylsulfonium salt, diphenyl-2,4,6-tribromophenylsulfonium salt, 10-camphorsulfonic acid diphenyl-2,4,6-tribromophenylsulfonium salt, p-toluenesulfonic acid diphenyl -2,4,6-tribromophenylsulfonium salt, diphenyl-2,4,6-tribromophenylsulfonium salt of trifluoromethanesulfonic acid, diphenyl-2,4,6-tribromophenylsulfonium salt of nonafluorobutanesulfonic acid, Bis (nonafluorobu Tansulfonyl) imidodiphenyl-2,4,6-tribromophenylsulfonium salt, diphenyl-2,4,6-triiodophenylsulfonium acetate, diphenyl-2,4,6-triiodophenylsulfonium salt propionate, butyric acid Diphenyl-2,4,6-triiodophenylsulfonium salt, 1-adamantanecarboxylic acid diphenyl-2,4,6-triiodophenylsulfonium salt, trifluoroacetic acid diphenyl-2,4,6-triiodophenylsulfonium salt, Diphenyl-2,4,6-triiodophenylsulfonium salt of tricosafluorododecanoic acid, diphenyl-2,4,6-triiodophenylsulfonium salt of salicylic acid, 10-camphorsulfonic acid diphenyl-2,4,6-triiodophenyl Sulfonium salt, p-toluenesulfonic acid diph Nyl-2,4,6-triiodophenylsulfonium salt, diphenyl-2,4,6-triiodophenylsulfonium salt of trifluoromethanesulfonic acid, diphenyl-2,4,6-triiodophenylsulfonium salt of nonafluorobutanesulfonic acid Bis (nonafluorobutanesulfonyl) imidodiphenyl-2,4,6-triiodophenylsulfonium salt, phenyl-bis (2,4,6-trifluorophenyl) sulfonium acetate, phenyl-bis (2,4 propionate) , 6-trifluorophenyl) sulfonium salt, butyric acid phenyl-bis (2,4,6-trifluorophenyl) sulfonium salt, 1-adamantanecarboxylic acid phenyl-bis (2,4,6-trifluorophenyl) sulfonium salt, Trifluoroacetic acid phenyl-bis (2,4,6-trifluoro Enyl) sulfonium salt, tricosafluorododecanoic acid phenyl-bis (2,4,6-trifluorophenyl) sulfonium salt, salicylic acid phenyl-bis (2,4,6-trifluorophenyl) sulfonium salt, 10-camphorsulfonic acid Phenyl-bis (2,4,6-trifluorophenyl) sulfonium salt, p-toluenesulfonic acid phenyl-bis (2,4,6-trifluorophenyl) sulfonium salt, trifluoromethanesulfonic acid phenyl-bis (2,4 , 6-trifluorophenyl) sulfonium salt, phenyl-bis (2,4,6-trifluorophenyl) sulfonium salt of nonafluorobutanesulfonate, bis (nonafluorobutanesulfonyl) imidophenyl-bis (2,4,6- Trifluorophenyl) sulfonium salt, phenyl-bis (acetate) 2,4,6-trichlorophenyl) sulfonium salt, phenyl-bis (2,4,6-trichlorophenyl) sulfonium propionate, phenyl-bis (2,4,6-trichlorophenyl) sulfonium butyrate, 1-adamantane Carboxylic acid phenyl-bis (2,4,6-trichlorophenyl) sulfonium salt, trifluoroacetic acid phenyl-bis (2,4,6-trichlorophenyl) sulfonium salt, tricosafluorododecanoic acid phenyl-bis (2,4,4) 6-trichlorophenyl) sulfonium salt, salicylic acid phenyl-bis (2,4,6-trichlorophenyl) sulfonium salt, 10-camphorsulfonic acid phenyl-bis (2,4,6-trichlorophenyl) sulfonium salt, p-toluenesulfone Acid phenyl-bis (2,4,6-trichlorophenyl) sulfo Um salt, phenyl-bis (2,4,6-trichlorophenyl) sulfonium salt of trifluoromethanesulfonic acid, phenyl-bis (2,4,6-trichlorophenyl) sulfonium salt of nonafluorobutanesulfonic acid, bis (nonafluorobutanesulfonyl) ) Imidophenyl-bis (2,4,6-trichlorophenyl) sulfonium salt, phenyl-bis (2,4,6-tribromophenyl) sulfonium acetate, phenyl-bis (2,4,6-tribromopropionate) Phenyl) sulfonium salt, butyric acid phenyl-bis (2,4,6-tribromophenyl) sulfonium salt, 1-adamantanecarboxylic acid phenyl-bis (2,4,6-tribromophenyl) sulfonium salt, trifluoroacetic acid phenyl- Bis (2,4,6-tribromophenyl) sulfonium salt, tricosa Phlorodecanoic acid phenyl-bis (2,4,6-tribromophenyl) sulfonium salt, salicylic acid phenyl-bis (2,4,6-tribromophenyl) sulfonium salt, 10-camphorsulfonic acid phenyl-bis (2,4,4) 6-tribromophenyl) sulfonium salt, p-toluenesulfonic acid phenyl-bis (2,4,6-tribromophenyl) sulfonium salt, trifluoromethanesulfonic acid phenyl-bis (2,4,6-tribromophenyl) sulfonium Salt, phenyl-bis (2,4,6-tribromophenyl) sulfonium salt of nonafluorobutanesulfonic acid, bis (nonafluorobutanesulfonyl) imidophenyl-bis (2,4,6-tribromophenyl) sulfonium salt, acetic acid Phenyl-bis (2,4,6-triiodophenyl) sulfonium salt, Phionic acid phenyl-bis (2,4,6-triiodophenyl) sulfonium salt, butyric acid phenyl-bis (2,4,6-triiodophenyl) sulfonium salt, 1-adamantanecarboxylic acid phenyl-bis (2,4,4) 6-triiodophenyl) sulfonium salt, trifluoroacetic acid phenyl-bis (2,4,6-triiodophenyl) sulfonium salt, tricosafluorododecanoic acid phenyl-bis (2,4,6-triiodophenyl) sulfonium salt Salicylic acid phenyl-bis (2,4,6-triiodophenyl) sulfonium salt, 10-camphorsulfonic acid phenyl-bis (2,4,6-triiodophenyl) sulfonium salt, p-toluenesulfonic acid phenyl-bis ( 2,4,6-triiodophenyl) sulfonium salt, phenyl trifluoromethanesulfonate (2,4,6-triiodophenyl) sulfonium salt, phenyl-bis (2,4,6-triiodophenyl) sulfonium salt of nonafluorobutanesulfonate, bis (nonafluorobutanesulfonyl) imidophenyl-bis (2, 4,6-triiodophenyl) sulfonium salt, tris (2,4,6-trifluorophenyl) sulfonium acetate, tris (2,4,6-trifluorophenyl) sulfonium propionate, trisbutyrate (2,4 , 6-trifluorophenyl) sulfonium salt, 1-adamantanecarboxylic acid tris (2,4,6-trifluorophenyl) sulfonium salt, trifluoroacetic acid tris (2,4,6-trifluorophenyl) sulfonium salt, tricosa Tris (2,4,6-trifluorophenyl) sulfonium fluorododecanoate Tris (2,4,6-trifluorophenyl) sulfonium salt of salicylic acid, 10-camphorsulfonic acid tris (2,4,6-trifluorophenyl) sulfonium salt, p-toluenesulfonic acid tris (2,4,6- Trifluorophenyl) sulfonium salt, trifluoromethanesulfonic acid tris (2,4,6-trifluorophenyl) sulfonium salt, nonafluorobutanesulfonic acid tris (2,4,6-trifluorophenyl) sulfonium salt, bis (nonafluoro) Butanesulfonyl) imidotris (2,4,6-trifluorophenyl) sulfonium salt, tris (2,4,6-trichlorophenyl) sulfonium acetate, tris (2,4,6-trichlorophenyl) sulfonium propionate, butyric acid Tris (2,4,6-trichlorophenyl) Phonium salt, 1-adamantanecarboxylic acid tris (2,4,6-trichlorophenyl) sulfonium salt, trifluoroacetic acid tris (2,4,6-trichlorophenyl) sulfonium salt, tricosafluorododecanoic acid tris (2,4,4) 6-trichlorophenyl) sulfonium salt, tris (2,4,6-trichlorophenyl) sulfonium salt of salicylic acid, 10-camphorsulfonic acid tris (2,4,6-trichlorophenyl) sulfonium salt, p-toluenesulfonic acid tris (2 , 4,6-trichlorophenyl) sulfonium salt, trifluoromethanesulfonic acid tris (2,4,6-trichlorophenyl) sulfonium salt, nonafluorobutanesulfonic acid tris (2,4,6-trichlorophenyl) sulfonium salt, bis ( Nonafluorobutanesulfonyl) Midotris (2,4,6-trichlorophenyl) sulfonium salt, tris (2,4,6-tribromophenyl) sulfonium acetate, tris (2,4,6-tribromophenyl) sulfonium propionate, trisbutyrate ( 2,4,6-tribromophenyl) sulfonium salt, 1-adamantanecarboxylic acid tris (2,4,6-tribromophenyl) sulfonium salt, trifluoroacetic acid tris (2,4,6-tribromophenyl) sulfonium salt Tricosafluorododecanoic acid tris (2,4,6-tribromophenyl) sulfonium salt, salicylic acid tris (2,4,6-tribromophenyl) sulfonium salt, 10-camphorsulfonic acid tris (2,4,6- Tribromophenyl) sulfonium salt, p-toluenesulfonic acid tris (2,4,6-tribromo) Phenyl) sulfonium salt, trifluoromethanesulfonic acid tris (2,4,6-tribromophenyl) sulfonium salt, nonafluorobutanesulfonic acid tris (2,4,4)
6-tribromophenyl) sulfonium salt, bis (nonafluorobutanesulfonyl) imide tris (2,4,6-tribromophenyl) sulfonium salt, tris (2,4,6-triiodophenyl) sulfonium acetate, trispropionic acid (2,4,6-triiodophenyl) sulfonium salt, butyric acid tris (2,4,6-triiodophenyl) sulfonium salt, 1-adamantanecarboxylic acid tris (2,4,6-triiodophenyl) sulfonium salt, Tris (2,4,6-triiodophenyl) sulfonium salt of trifluoroacetic acid, Tris (2,4,6-triiodophenyl) sulfonium salt of tricosafluorododecanoic acid, Tris (2,4,6-triiodophenyl) salicylate ) Sulfonium salt, 10-camphorsulfonic acid tris (2,4,6-triio) Phenyl) sulfonium salt, p-toluenesulfonic acid tris (2,4,6-triiodophenyl) sulfonium salt, trifluoromethanesulfonic acid tris (2,4,6-triiodophenyl) sulfonium salt, nonafluorobutanesulfonic acid tris (2,4,6-triiodophenyl) sulfonium salt, bis (nonafluorobutanesulfonyl) imide tris (2,4,6-triiodophenyl) sulfonium salt, and the like.

  Specific examples of the triarylsulfonium salt compound in which the hydrogen atom on the phenyl group is substituted with a hydroxyl group (hydroxyl group-substituted) include a sulfonium salt compound represented by the following [19].

  [19] Diphenyl-4-hydroxyphenylsulfonium salt of acetic acid, diphenyl-4-hydroxyphenylsulfonium salt of propionate, diphenyl-4-hydroxyphenylsulfonium salt of butyric acid, 1-adamantanecarboxylic acid diphenyl-4-hydroxyphenylsulfonium salt, trifluoro Diphenyl-4-hydroxyphenylsulfonium acetate, diphenyl-4-hydroxyphenylsulfonium salt of tricosafluorododecanoic acid, diphenyl-4-hydroxyphenylsulfonium salt of salicylic acid, 10-camphorsulfonic acid diphenyl-4-hydroxyphenylsulfonium salt, p- Toluenesulfonic acid diphenyl-4-hydroxyphenylsulfonium salt, trifluoromethanesulfonic acid diphenyl-4-hydroxyphenylsulfonium salt, nonafluorobutene Diphenyl-4-hydroxyphenylsulfonium salt of sulfonic acid, bis (nonafluorobutanesulfonyl) imidodiphenyl-4-hydroxyphenylsulfonium salt, phenyl-di (4-hydroxyphenyl) sulfonium acetate, phenyl-di (4-hydroxypropionate) Phenyl) sulfonium salt, butyric acid phenyl-di (4-hydroxyphenyl) sulfonium salt, 1-adamantanecarboxylic acid phenyl-di (4-hydroxyphenyl) sulfonium salt, trifluoroacetic acid phenyl-di (4-hydroxyphenyl) sulfonium salt, Tricosafluorododecanoic acid phenyl-di (4-hydroxyphenyl) sulfonium salt, salicylic acid phenyl-di (4-hydroxyphenyl) sulfonium salt, 10-camphorsulfonic acid phenyl-di (4-hydroxyphenyl) Rufonium salt, p-toluenesulfonic acid phenyl-di (4-hydroxyphenyl) sulfonium salt, trifluoromethanesulfonic acid phenyl-di (4-hydroxyphenyl) sulfonium salt, nonafluorobutanesulfonic acid phenyl-di (4-hydroxyphenyl) Sulfonium salt, bis (nonafluorobutanesulfonyl) imidophenyl-di (4-hydroxyphenyl) sulfonium salt, tri (4-hydroxyphenyl) sulfonium acetate, tri (4-hydroxyphenyl) sulfonium propionate, tributyrate (4 -Hydroxyphenyl) sulfonium salt, 1-adamantanecarboxylic acid tri (4-hydroxyphenyl) sulfonium salt, trifluoroacetic acid tri (4-hydroxyphenyl) sulfonium salt, tricosafluorododecanoic acid tri (4-hydroxy) Phenyl) sulfonium salt, salicylic acid tri (4-hydroxyphenyl) sulfonium salt, 10-camphorsulfonic acid tri (4-hydroxyphenyl) sulfonium salt, p-toluenesulfonic acid tri (4-hydroxyphenyl) sulfonium salt, trifluoromethanesulfonic acid Tri (4-hydroxyphenyl) sulfonium salt, nonafluorobutanesulfonic acid tri (4-hydroxyphenyl) sulfonium salt, bis (nonafluorobutanesulfonyl) imide tri (4-hydroxyphenyl) sulfonium salt, diphenyl-2,4,6 -Trihydroxyphenylsulfonium salt, diphenyl-2,4,6-trihydroxyphenylsulfonium salt of propionate, diphenyl-2,4,6-trihydroxyphenylsulfonium salt of butyrate, 1-adamantanecarbo Diphenyl-2,4,6-trihydroxyphenylsulfonium salt, diphenyl-2,4,6-trihydroxyphenylsulfonium trifluoroacetate, diphenyl-2,4,6-trihydroxyphenylsulfonium tricosafluorododecanoate Salt, diphenyl-2,4,6-trihydroxyphenylsulfonium salt of salicylic acid, 10-camphorsulfonic acid diphenyl-2,4,6-trihydroxyphenylsulfonium salt, p-toluenesulfonic acid diphenyl-2,4,6-tri Hydroxyphenylsulfonium salt, diphenyl-2,4,6-trihydroxyphenylsulfonium salt of trifluoromethanesulfonic acid, diphenyl-2,4,6-trihydroxyphenylsulfonium salt of nonafluorobutanesulfonic acid, bis (nonafluorobutanesulfonyl) Imidodiphenyl-2,4,6-trihydroxyphenylsulfonium salt, phenyl-bis (2,4,6-trihydroxyphenyl) sulfonium acetate, phenyl-bis (2,4,6-trihydroxyphenyl) sulfonium propionate Salt, butyric acid phenyl-bis (2,4,6-trihydroxyphenyl) sulfonium salt, 1-adamantanecarboxylic acid phenyl-bis (2,4,6-trihydroxyphenyl) sulfonium salt, trifluoroacetic acid phenyl-bis (2 , 4,6-Trihydroxyphenyl) sulfonium salt, phenyl-bis (2,4,6-trihydroxyphenyl) sulfonium salt of tricosafluorododecanoic acid, phenyl-bis (2,4,6-trihydroxyphenyl) sulfonium salicylate Salt, 10-camphorsulfonic acid phenyl-bis (2,4 6-trihydroxyphenyl) sulfonium salt, p-toluenesulfonic acid phenyl-bis (2,4,6-trihydroxyphenyl) sulfonium salt, trifluoromethanesulfonic acid phenyl-bis (2,4,6-trihydroxyphenyl) sulfonium Salt, nonafluorobutanesulfonic acid phenyl-bis (2,4,6-trihydroxyphenyl) sulfonium salt, bis (nonafluorobutanesulfonyl) imidophenyl-bis (2,4,6-trihydroxyphenyl) sulfonium salt, acetic acid Tris (2,4,6-trihydroxyphenyl) sulfonium salt, tris (2,4,6-trihydroxyphenyl) sulfonium propionate, tris (2,4,6-trihydroxyphenyl) sulfonium salt of butyrate, 1- Adamantanecarboxylic acid tris (2,4,6-to Hydroxyphenyl) sulfonium salt, trifluoroacetic acid tris (2,4,6-trihydroxyphenyl) sulfonium salt, tricosafluorododecanoic acid tris (2,4,6-trihydroxyphenyl) sulfonium salt, salicylic acid tris (2,4 , 6-trihydroxyphenyl) sulfonium salt, 10-camphorsulfonic acid tris (2,4,6-trihydroxyphenyl) sulfonium salt, p-toluenesulfonic acid tris (2,4,6-trihydroxyphenyl) sulfonium salt, Trifluoromethanesulfonic acid tris (2,4,6-trihydroxyphenyl) sulfonium salt, nonafluorobutanesulfonic acid tris (2,4,6-trihydroxyphenyl) sulfonium salt, bis (nonafluorobutanesulfonyl) imide tris (2, 4,6-tri Hydroxyphenyl) sulfonium salt.

  The sulfonium salt compound represented by the general formula (2) obtained by the production method of the present invention is useful as an acid generator, a cationic polymerization initiator, an acid diffusion inhibitor and the like used in the resist field, for example. . In addition to these applications, the compounds are compounds that can be used for various applications such as an acid generator for printing materials, for example, a polymerization initiator for ink materials, and the applications are not limited thereto. In addition, when the sulfonium salt compound represented by the general formula (2) is used for the above-mentioned use, for example, other components such as a resist polymer can be used per se.

—Sulphonium bicarbonate salt represented by the general formula (1 ′) of the present invention—
The sulfonium hydrogen carbonate salt of the present invention is represented by the following general formula (1 ′). The sulfonium hydrogen carbonate salt represented by the general formula (1 ′) can be a raw material or an intermediate for synthesizing a highly versatile sulfonium salt compound.

（式中、Ｒ^１'〜Ｒ^１５'はそれぞれ独立して、水素原子、炭素数１〜１２のアルキル基、炭素数１〜１２のアルコキシ基、炭素数２〜１２のアルコキシカルボニル基、炭素数６〜１０のアリール基、炭素数６〜１０のアリールオキシ基、炭素数６〜１０のアリールチオ基、炭素数７〜１１のアリールオキシカルボニル基、ハロゲン原子またはヒドロキシル基を表し、隣接する２つのＲ'が互いに結合して環構造を形成していてもよい。ただし、Ｒ^１'〜Ｒ^１５'のすべてが水素原子である場合を除く。）

Wherein R ^{1 ′ to} R ^{15 ′} are each independently a hydrogen atom, an alkyl group having 1 to 12 carbon atoms, an alkoxy group having 1 to 12 carbon atoms, an alkoxycarbonyl group having 2 to 12 carbon atoms, or a carbon number. Represents an aryl group having 6 to 10 carbon atoms, an aryloxy group having 6 to 10 carbon atoms, an arylthio group having 6 to 10 carbon atoms, an aryloxycarbonyl group having 7 to 11 carbon atoms, a halogen atom or a hydroxyl group, and two adjacent R 'May be bonded to each other to form a ring structure, except that all of R ^{1 ′ to} R ^{15 ′} are hydrogen atoms.)

Specific examples of the alkyl group having 1 to 12 carbon atoms represented by R ^{1 ′ to} R ^{15 ′} in the general formula (1 ′) include specific examples of the alkyl represented by R ^{1 to} R ¹⁵ in the general formula (1) The same thing is mentioned, The same thing is mentioned also as a specific example of a preferable alkyl group.

Specific examples of the alkoxy group having 1 to 12 carbon atoms represented by R ^{1 ′ to} R ^{15 ′} in the general formula (1 ′) include specific examples of the alkoxy group represented by R ^{1 to} R ¹⁵ in the general formula (1). And specific examples of preferable alkoxy groups include the same.

Specific examples of the alkoxycarbonyl group having 2 to 12 carbon atoms represented by R ^{1 ′ to} R ^{15 ′} in the general formula (1 ′) include those of the alkoxycarbonyl group represented by R ^{1 to} R ¹⁵ in the general formula (1). The same thing as a specific example is mentioned, The specific example of a preferable alkoxycarbonyl group is also the same.

Specific examples of the aryl group having 6 to 10 carbon atoms represented by R ^{1 ′ to} R ^{15 ′} in the general formula (1 ′) include specific examples of the aryl group represented by R ^{1 to} R ¹⁵ in the general formula (1). And specific examples of preferred aryl groups include the same.

Specific examples of the aryloxy group having 6 to 10 carbon atoms represented by R ^{1 ′ to} R ^{15 ′} in the general formula (1 ′) include those of the aryloxy group represented by R ^{1 to} R ¹⁵ in the general formula (1). The same thing as a specific example is mentioned, A specific example of a preferable aryloxy group is also the same.

Specific examples of the arylthio group having 6 to 10 carbon atoms represented by R ^{1 ′ to} R ^{15 ′} in the general formula (1 ′) include specific examples of the arylthio group represented by R ^{1 to} R ¹⁵ in the general formula (1). And specific examples of preferred arylthio groups include the same.

Specific examples of the aryloxycarbonyl group having 7 to 11 carbon atoms represented by R ^{1 ′ to} R ^{15 ′} in general formula (1 ′) include aryloxycarbonyl represented by R ^{1 to} R ¹⁵ in general formula (1). Examples thereof are the same as specific examples of groups, and specific examples of preferable aryloxycarbonyl groups are also the same.

Specific examples of the halogen atom represented by R ^{1 ′ to} R ^{15 ′} in the general formula (1 ′) are the same as the specific examples of the halogen atom represented by R ^{1 to} R ¹⁵ in the general formula (1). Specific examples of preferable halogen atoms include the same.

In the general formula (1 ′), when two adjacent R ′ are bonded to each other to form a ring structure, the two R ′ are R ^{1 ′} and R ^{2 ′} , R ^{2 ′} and R ^{3 ′} , R ^{3 ′} and R ^{4 ′} , R ^{4 ′} and R ^{5 ′} , R ^{6 ′} and R ^{7 ′} , R ^{7 ′} and R ^{8 ′} , R ^{8 ′} and R ^{9 ′} , R ^{9 ′} and R ^{10 ′} , R ^{11 ′} And R ^{12 ′} , R ^{12 ′} and R ^{13 ′} , R ^{13 ′} and R ^{14 ′,} and R ^{14 ′} and R ^{15 ′} . That is, it means that these two adjacent R ′ form a ring structure together with the alkylene chain (two carbon atoms) constituting the benzene ring. Further, the ring structure is not limited to one, and a plurality of ring structures may be formed. The ring structure may be either an aliphatic ring or an aromatic ring. Specifically, for example, an aliphatic ring having 5 to 8 carbon atoms such as a cyclopentene ring, a cyclohexene ring, a cycloheptene ring, a cyclooctene ring, For example, C6-C10 aromatic rings, such as a benzene ring and a naphthalene ring, are mentioned.

In general formula (1 ′), R ^{1 ′} , R ^{3 ′} , R ^{5 ′} , R ^{6 ′} , R ^{8 ′} , R ^{10 ′} , R ^{11 ′} , R ^{13 ′,} and R ^{15 ′} include a hydrogen atom, carbon number A group selected from an alkyl group having 1 to 12, an alkoxy group having 1 to 12 carbon atoms, an aryl group having 6 to 10 carbon atoms, a halogen atom and a hydroxyl group is more preferable.

As R ^{2 ′} , R ^{4 ′} , R ^{7 ′} , R ^{9 ′} , R ^{12 ′} and R ^{14 ′ in the} general formula (1 ′), a hydrogen atom is more preferable.

  Preferable specific examples of the hydrogen carbonate sulfonium salt represented by the general formula (1 ′) include a hydrogen carbonate sulfonium salt represented by the following general formula (1A ′).

（式中、Ｒ^１ａ'、Ｒ^３ａ'、Ｒ^５ａ'、Ｒ^６ａ'、Ｒ^８ａ'、Ｒ^１０ａ'、Ｒ^１１ａ'、Ｒ^１３ａ'およびＲ^１５ａ'はそれぞれ独立して、水素原子、炭素数１〜１２のアルキル基、炭素数１〜１２のアルコキシ基、炭素数６〜１０のアリール基、ハロゲン原子またはヒドロキシル基を表す。ただし、Ｒ^１ａ'、Ｒ^３ａ'、Ｒ^５ａ'、Ｒ^６ａ'、Ｒ^８ａ'、Ｒ^１０ａ'、Ｒ^１１ａ'、Ｒ^１３ａ'およびＲ^１５ａ'のすべてが水素原子である場合を除く。）

(Wherein R ^{1a ′} , R ^{3a ′} , R ^{5a ′} , R ^{6a ′} , R ^{8a ′} , R ^{10a ′} , R ^{11a ′} , R ^{13a ′} and R ^{15a ′} each independently represent a hydrogen atom, carbon number An alkyl group having 1 to 12, an alkoxy group having 1 to 12 carbon atoms, an aryl group having 6 to 10 carbon atoms, a halogen atom or a hydroxyl group, provided that R ^{1a ′} , R ^{3a ′} , R ^{5a ′} , R ^{6a ′} are represented. , R ^{8a ′} , R ^{10a ′} , R ^{11a ′} , R ^{13a ′} and R ^{15a ′} are all hydrogen atoms.)

1 to 12 carbon atoms represented by R ^{1a ′} , R ^{3a ′} , R ^{5a ′} , R ^{6a ′} , R ^{8a ′} , R ^{10a ′} , R ^{11a ′} , R ^{13a ′} and R ^{15a ′} in the general formula (1A ′) Specific examples of the alkyl group include the same as the specific examples of the alkyl group represented by R ^{1 to} R ¹⁵ in the general formula (1), and specific examples of the preferable alkyl group include the same.

1 to 12 carbon atoms represented by R ^{1a ′} , R ^{3a ′} , R ^{5a ′} , R ^{6a ′} , R ^{8a ′} , R ^{10a ′} , R ^{11a ′} , R ^{13a ′} and R ^{15a ′} in the general formula (1A ′) Specific examples of the alkoxy group include the same as the specific examples of the alkoxy group represented by R ^{1 to} R ¹⁵ in the general formula (1), and the specific examples of the preferable alkoxy group include the same.

6 to 10 carbon atoms represented by R ^{1a ′} , R ^{3a ′} , R ^{5a ′} , R ^{6a ′} , R ^{8a ′} , R ^{10a ′} , R ^{11a ′} , R ^{13a ′} and R ^{15a ′} in the general formula (1A ′) Specific examples of the aryl group include those similar to the specific examples of the aryl group represented by R ^{1 to} R ¹⁵ in General Formula (1), and specific examples of the preferred aryl group include the same.

Specific examples of halogen atoms represented by R ^{1a ′} , R ^{3a ′} , R ^{5a ′} , R ^{6a ′} , R ^{8a ′} , R ^{10a ′} , R ^{11a ′} , R ^{13a ′} and R ^{15a ′} in the general formula (1A ′) Examples thereof include those similar to the specific examples of the halogen atom represented by R ^{1 to} R ¹⁵ in the general formula (1), and specific examples of preferable halogen atoms include the same.

As R ^{1a ′} , R ^{5a ′} , R ^{6a ′} , R ^{10a ′} , R ^{11a ′} and R ^{15a ′ in the} general formula (1A ′), a hydrogen atom is more preferable.

  More preferable specific examples of the hydrogencarbonate sulfonium salt represented by the general formula (1A ′) include, for example, a hydrogenated triphenylsulfonium salt in which a hydrogen atom on the phenyl group is substituted with an alkyl group (alkyl group-substituted), a phenyl group Triphenylsulfonium hydrogencarbonate with an alkoxy group substituted with an alkoxy group (substituted with alkoxy group), Triphenylsulfonium hydrogencarbonate with an aryl group substituted with an hydrogen atom on the phenyl group, Triphenylsulfonium hydrogencarbonate in which hydrogen atoms on the phenyl group are substituted with halogen atoms (halogen atom-substituted), Triphenylsulfonium hydrogencarbonate in which hydrogen atoms on the phenyl group are substituted with hydroxyl groups (with hydroxyl group substitution) Salt. Specific examples thereof include the same compounds as those listed as specific examples of the hydrogencarbonate sulfonium salt represented by the general formula (1A) except for the (unsubstituted) hydrogencarbonate sulfonium salt. As more preferred specific examples, for example, diphenyl-4-methylphenylsulfonium hydrogencarbonate, diphenyl-4-tert-butylphenylsulfonium hydrogencarbonate, diphenyl-4-cyclohexylphenylsulfonium hydrogencarbonate, diphenyl-2,4 hydrogencarbonate , 6-trimethylphenylsulfonium salt, hydrogen carbonate tri (4-methylphenyl) sulfonium salt, hydrogen carbonate diphenyl-4-methoxyphenylsulfonium salt, hydrogen carbonate diphenyl-4-phenylphenylsulfonium salt, hydrogen carbonate tri (4-fluorophenyl) ) Sulfonium salt, diphenyl-4-hydroxyphenylsulfonium hydrogencarbonate, and the like.

  EXAMPLES Hereinafter, although this invention is demonstrated concretely based on an Example and a comparative example, this invention is not limited at all by these examples.

Experimental Example 1 Synthesis of triphenylsulfonium hydrogen carbonate salt A solution in which 5.11 g (14.89 mmol: Wako Pure Chemical Industries, Ltd.) of triphenylsulfonium bromide was dissolved in methanol was used, and the anion portion was exchanged with hydrogen carbonate ions. The solution was passed through a basic anion exchange resin (Dowex 1 × 8 200-400: manufactured by Wako Pure Chemical Industries, Ltd.). The obtained eluate was concentrated under reduced pressure, methanol was distilled off, water was added to the concentrated residue, and the mixture was washed with cyclopentyl methyl ether. The concentration of the washing solution (aqueous solution) was adjusted appropriately to obtain 21.45 g (13.22 mmol, yield: 88.8%) of a 20% aqueous solution. Analysis by ¹ H-NMR and ¹³ C-NMR confirmed that the resulting product was a triphenylsulfonium hydrogen carbonate salt. Incidentally, analysis of the aqueous solution after 1 week at room temperature in ^{1 H-NMR,} the decomposition products of hydrogen carbonate triphenylsulfonium salt was not confirmed. The measurement results of ¹ H-NMR and ¹³ C-NMR are shown below.
¹ H-NMR (400 MHz, D ₂ O) δ (ppm): 7.76 (3H, dt), 7.66-7.58 (12H, m).
¹³ C-NMR (400 MHz, D ₂ O) δ (ppm): 161.49, 135.21, 131.92, 131.45, 124.83.

Example 1 Synthesis of diphenyl-4-methylphenylsulfonium hydrogen carbonate salt A solution of 5.00 g of diphenyl-4-methylphenylsulfonium bromide (13.99 mmol, manufactured by Wako Pure Chemical Industries, Ltd.) dissolved in methanol was added to the anion part. Was passed through a strongly basic anion exchange resin (Dowex 1 × 8 200-400: manufactured by Wako Pure Chemical Industries, Ltd.). The obtained eluate was concentrated under reduced pressure, methanol was distilled off, water was added to the concentrated residue, and the mixture was washed with cyclopentyl methyl ether. The concentration of the washing liquid (aqueous solution) was adjusted appropriately to obtain 19.90 g (11.76 mmol, yield: 84.0%) of a 20% aqueous solution. Analysis by ¹ H-NMR and ¹³ C-NMR confirmed that the resulting product was diphenyl-4-methylphenylsulfonium hydrogencarbonate. In addition, when the aqueous solution after one week passed at room temperature was analyzed by ¹ H-NMR, the decomposition product of diphenyl-4-methylphenylsulfonium hydrogencarbonate was not confirmed. The measurement results of ¹ H-NMR and ¹³ C-NMR are shown below.
¹ H-NMR (400 MHz, D ₂ O) δ (ppm): 7.76-7.72 (2H, m), 7.65-7.41 (12H, m), 2.35 (3H, s) .
¹³ C-NMR (400 MHz, D ₂ O) δ (ppm): 162.09, 147.18, 135.14, 132.59, 131.92, 131.47, 131.30, 125.20, 120. 98, 21.36.

Example 2 Synthesis of diphenyl-4-tert-butylphenylsulfonium hydrogen carbonate solution in which 5.50 g (13.77 mmol: manufactured by Wako Pure Chemical Industries, Ltd.) diphenyl-4-tert-butylphenylsulfonium bromide was dissolved in methanol Was passed through a strongly basic anion exchange resin (Dowex 1 × 8 200-400: manufactured by Wako Pure Chemical Industries, Ltd.) in which the anion portion was exchanged with hydrogen carbonate ions. The obtained eluate was concentrated under reduced pressure, methanol was distilled off, water was added to the concentrated residue, the aqueous solution was appropriately concentrated to adjust the concentration, and 24.25 g (12.75 mmol, yield: 20% aqueous solution). 92.6%). Analysis by ¹ H-NMR and ¹³ C-NMR confirmed that the resulting product was diphenyl-4-tert-butylphenylsulfonium hydrogencarbonate. In addition, when the aqueous solution after one week passed at room temperature was analyzed by ¹ H-NMR, a decomposition product of diphenyl-4-tert-butylphenylsulfonium hydrogencarbonate was not confirmed. The measurement results of ¹ H-NMR and ¹³ C-NMR are shown below.
¹ H-NMR (400 MHz, D ₂ O) δ (ppm): 7.74 (2H, t), 7.63-7.58 (6H, m), 7.54-7.50 (6H, m) , 1.15 (9H, s).
¹³ C-NMR (400 MHz, D ₂ O) δ (ppm): 162.57, 159.85, 135.16, 131.96, 131.52, 131.15, 129.24, 125.13, 121. 28, 35.41, 30.76.

Example 3 Synthesis of diphenyl-4-cyclohexylphenylsulfonium hydrogen carbonate 5.00 g (11.75 mmol, manufactured by Wako Pure Chemical Industries, Ltd.) of diphenyl-4-cyclohexylphenylsulfonium bromide was dissolved in methanol, Was passed through a strongly basic anion exchange resin (Dowex 1 × 8 200-400: manufactured by Wako Pure Chemical Industries, Ltd.). The obtained eluate was concentrated under reduced pressure to distill off methanol, and then acetone was added to the concentrated residue for crystallization. The obtained crystals were collected by filtration and dried to obtain 4.06 g (9.99 mmol, yield: 85.0%) of colorless crystals. Analysis by ¹ H-NMR and ¹³ C-NMR confirmed that the obtained crystal was diphenyl-4-cyclohexylphenylsulfonium hydrogencarbonate. Water was added to the obtained crystals to prepare a 20% aqueous solution, and the aqueous solution after 1 week at room temperature was analyzed by ¹ H-NMR. As a result, a decomposition product of diphenyl-4-cyclohexylphenylsulfonium hydrogen carbonate was confirmed. Was not. The measurement results of ¹ H-NMR and ¹³ C-NMR are shown below.
¹ H-NMR (400 MHz, CDCl ₃ ) δ (ppm): 7.75 (2H, t), 7.61 (4H, t), 7.54-7.52 (6H, m), 7.36 ( 2H, d), 2.42 (1H, br), 1.59-1.50 (5H, m), 1.21-0.99 (5H, m).
¹³ C-NMR (400 MHz, CDCl ₃ ) δ (ppm): 160.30, 154.59, 133.61, 131.21, 130.90, 130.73, 129.50, 124.83, 121.00 , 43.91, 33.33, 26.00, 25.30.

Example 4 Synthesis of diphenyl-2,4,6-trimethylphenylsulfonium hydrogen carbonate 3.49 g of diphenyl-2,4,6-trimethylphenylsulfonium bromide (9.06 mmol: manufactured by Wako Pure Chemical Industries, Ltd.) in methanol The dissolved solution was passed through a strongly basic anion exchange resin (Dowex 1 × 8 200-400: manufactured by Wako Pure Chemical Industries, Ltd.) in which the anion portion was exchanged with hydrogen carbonate ions. The obtained eluate was concentrated under reduced pressure, methanol was distilled off, water was added to the concentrated residue, the aqueous solution was concentrated appropriately to adjust the concentration, and 15.90 g (8.67 mmol, yield: 20% aqueous solution). 95.8%). Analysis by ¹ H-NMR and ¹³ C-NMR confirmed that the obtained product was diphenyl-2,4,6-trimethylphenylsulfonium hydrogencarbonate. The measurement results of ¹ H-NMR and ¹³ C-NMR are shown below.
¹ H-NMR (400 MHz, D ₂ O) δ (ppm): 7.74 (2H, t), 7.63 (4H, t), 7.54 (4H, d), 7.17 (2H, s ), 2.28 (3H, s), 2.15 (6H, s).
¹³ C-NMR (400 MHz, D ₂ O) δ (ppm): 162.75, 148.12, 144.36, 134.41, 133.24, 131.84, 129.93, 122.91, 116. 53, 21.44, 21.11.

Example 5 Synthesis of hydrogen carbonate tri (4-methylphenyl) sulfonium salt A solution of tri (4-methylphenyl) sulfonium bromide 3.40 g (8.82 mmol, manufactured by Wako Pure Chemical Industries, Ltd.) dissolved in methanol, The solution was passed through a strongly basic anion exchange resin (Dowex 1 × 8 200-400: manufactured by Wako Pure Chemical Industries, Ltd.) in which the anion portion was exchanged with hydrogen carbonate ions. The obtained eluate was concentrated under reduced pressure, methanol was distilled off, water was added to the concentrated residue, the aqueous solution was concentrated appropriately to adjust the concentration, and 16.15 g (8.81 mmol, yield: 20% aqueous solution). 99.9%). Analysis by ¹ H-NMR and ¹³ C-NMR confirmed that the resulting product was a tri (4-methylphenyl) sulfonium hydrogencarbonate salt. The measurement results of ¹ H-NMR and ¹³ C-NMR are shown below.
¹ H-NMR (400 MHz, D ₂ O) δ (ppm): 7.37 (12H, q), 2.33 (9H, s).
¹³ C-NMR (400 MHz, D ₂ O) δ (ppm): 162.62, 146.83, 132.45, 130.97, 121.75, 21.29.

Example 6 Synthesis of diphenyl-4-methoxyphenylsulfonium hydrogen carbonate 2.96 g of diphenyl-4-methoxyphenylsulfonium bromide (7.93 mmol, manufactured by Wako Pure Chemical Industries, Ltd.) was dissolved in methanol to prepare an anion moiety. Was passed through a strongly basic anion exchange resin (Dowex 1 × 8 200-400: manufactured by Wako Pure Chemical Industries, Ltd.). The obtained eluate was concentrated under reduced pressure, methanol was distilled off, water was added to the concentrated residue, the aqueous solution was appropriately concentrated to adjust the concentration, and 13.42 g (7.57 mmol, yield: 20% aqueous solution). 95.5%). Analysis by ¹ H-NMR and ¹³ C-NMR confirmed that the resulting product was diphenyl-4-methoxyphenylsulfonium hydrogencarbonate. The measurement results of ¹ H-NMR and ¹³ C-NMR are shown below.
¹ H-NMR (400 MHz, D ₂ O) δ (ppm): 7.74 (2H, t), 7.65-7.64 (10H, m), 7.12 (2H, d), 3.82 (3H, s).
¹³ C-NMR (400 MHz, D ₂ O) δ (ppm): 164.75, 162.31, 134.90, 134.03, 131.81, 130.94, 125.78, 117.50, 114. 17, 56.61.

Example 7 Synthesis of diphenyl-4-phenylphenylsulfonium hydrogen carbonate A solution in which 4.20 g (10.01 mmol: manufactured by Wako Pure Chemical Industries, Ltd.) diphenyl-4-phenylphenylsulfonium bromide was dissolved in methanol was used as an anion moiety. Was passed through a strongly basic anion exchange resin (Dowex 1 × 8 200-400: manufactured by Wako Pure Chemical Industries, Ltd.). The obtained eluate was concentrated under reduced pressure, methanol was distilled off, water was added to the concentrated residue, the aqueous solution was concentrated appropriately to adjust the concentration, and 21.00 g (9.85 mmol, yield: 20% aqueous solution). 98.3%) was obtained. Analysis by ¹ H-NMR and ¹³ C-NMR confirmed that the resulting product was diphenyl-4-phenylphenylsulfonium hydrogencarbonate. The measurement results of ¹ H-NMR and ¹³ C-NMR are shown below.
¹ H-NMR (400 MHz, D ₂ O) δ (ppm): 7.70 (2H, t), 7.55 (4H, t), 7.43-7.36 (8H, m), 7.25 -7.17 (5H, m).
¹³ C-NMR (400 MHz, D ₂ O) δ (ppm): 162.72, 146.71, 137.73, 135.28, 131.98, 131.89, 131.08, 129.92, 129. 83, 129.63, 127.51, 124.70, 123.35.

Example 8 Synthesis of tri (4-fluorophenyl) sulfonium hydrogen carbonate 3.03 g (7.63 mmol: Wako Pure Chemical Industries, Ltd.) of tri (4-fluorophenyl) sulfonium bromide was dissolved in methanol. The solution was passed through a strongly basic anion exchange resin (Dowex 1 × 8 200-400: manufactured by Wako Pure Chemical Industries, Ltd.) in which the anion portion was exchanged with hydrogen carbonate ions. The obtained eluate was concentrated under reduced pressure, methanol was distilled off, water was added to the concentrated residue, the aqueous solution was appropriately concentrated to adjust the concentration, and 12.08 g (6.38 mmol, yield: 20% aqueous solution). 83.7%). Analysis by ¹ H-NMR, ¹³ C-NMR and ¹⁹ F-NMR confirmed that the resulting product was a tri (4-fluorophenyl) sulfonium hydrogencarbonate salt. The measurement results of ¹ H-NMR, ¹³ C-NMR and ¹⁹ F-NMR are shown below.
¹ H-NMR (400 MHz, D ₂ O) δ (ppm): 7.78-7.75 (6H, m), 7.49-7.43 (6H, m).
¹³ C-NMR (400 MHz, D ₂ O) δ (ppm): 167.97, 165.41, 134.41, 134.31, 120.42, 120.39, 119.63, 119.40.
¹⁹ F-NMR (400 MHz, D ₂ O) δ (ppm): −102.30 (3F, s).

Example 9 Synthesis of diphenyl-4-hydroxyphenylsulfonium hydrogen carbonate A solution in which 3.34 g (9.30 mmol: manufactured by Wako Pure Chemical Industries, Ltd.) diphenyl-4-hydroxyphenylsulfonium bromide was dissolved in methanol was dissolved in an anion portion. Was passed through a strongly basic anion exchange resin (Dowex 1 × 8 200-400: manufactured by Wako Pure Chemical Industries, Ltd.). The obtained eluate was appropriately concentrated to adjust the concentration to obtain 15.31 g (8.99 mmol, yield: 96.7%) of a 20% methanol solution. Analysis by ¹ H-NMR and ¹³ C-NMR confirmed that the resulting product was diphenyl-4-hydroxyphenylsulfonium hydrogencarbonate. The measurement results of ¹ H-NMR and ¹³ C-NMR are shown below.
¹ H-NMR (400 MHz, D ₂ O) δ (ppm): 7.65-7.61 (2H, m), 7.55-7.50 (4H, m), 7.43-7.40 ( 4H, m), 7.27-7.23 (2H, m), 6.67-6.61 (2H, m).
¹³ C-NMR (400 MHz, D ₂ O) δ (ppm): 175.18, 134.40, 134.06, 131.43, 130.13, 128.10, 122.40, 100.58.

Example 10 Synthesis of triphenylsulfonium acetate salt After adding 4 mL of methanol to 5.0 g (3.08 mmol) of a 20% aqueous solution of triphenylsulfonium bicarbonate, 189 mg (3.14 mmol; 1.02 equivalent) of acetic acid was added, The reaction was allowed to stir at room temperature for 5 minutes. After completion of the reaction, the reaction solution was concentrated under reduced pressure and dried under reduced pressure to give a colorless oil quantitatively. Analysis by ¹ H-NMR and ¹³ C-NMR confirmed that the resulting colorless oil was a triphenylsulfonium acetate salt. Further, when the molar ratio was confirmed, it was triphenylsulfonium: acetic acid = 1: 1, and analysis by ¹³ C-NMR confirmed that the peak derived from hydrogen carbonate had disappeared. The measurement results of ¹ H-NMR and ¹³ C-NMR are shown below.
¹ H-NMR (400 MHz, CDCl ₃ ) δ (ppm): 7.84-7.67 (15H, m), 1.86 (3H, s).
¹³ C-NMR (400 MHz, CDCl ₃ ) δ (ppm): 177.01, 134.17, 131.30, 125.21, 25.27.

Example 11 Synthesis of trifluoroacetic acid triphenylsulfonium salt After adding 4 mL of methanol to 5.0 g (3.08 mmol) of a 20% aqueous solution of triphenylsulfonium hydrogencarbonate, 358 mg (3.14 mmol; 1.02 equivalent) of trifluoroacetic acid And stirred for 5 minutes at room temperature. After completion of the reaction, the reaction solution was concentrated under reduced pressure and dried under reduced pressure to give a colorless oil quantitatively. Analysis by ¹ H-NMR and ¹⁹ F-NMR confirmed that the resulting colorless oil was a triphenylsulfonium trifluoroacetate salt. The measurement results of ¹ H-NMR and ¹⁹ F-NMR are shown below.
¹ H-NMR (400 MHz, CDCl ₃ ) δ (ppm): 7.81-7.70 (15H, m).
¹⁹ F-NMR (400 MHz, CDCl ₃ ) δ (ppm): −74.40 (3F, s).

Example 12 Synthesis of triphenylsulfonium salt of salicylic acid 3 mL of ion-exchanged water was added to 5.0 g (3.08 mmol) of a 20% aqueous solution of triphenylsulfonium bicarbonate, and then 417 mg (3.02 mmol; 0.98 equivalent) of salicylic acid was added. In addition, the reaction was allowed to stir at room temperature for 5 minutes. After completion of the reaction, the reaction solution was extracted three times with dichloromethane, the extract was concentrated under reduced pressure, and the obtained residue was dried under reduced pressure to give 1.21 g (3.02 mmol, yield: 98.0%) of colorless crystals. ) Analysis by ¹ H-NMR confirmed that the resulting colorless crystals were salicylic acid triphenylsulfonium salt. The measurement result of ¹ H-NMR is shown below.
¹ H-NMR (400 MHz, CDCl ₃ ) δ (ppm): 7.90 (1H, dd), 7.72-7.61 (15H, m), 7.14 (1H, dt), 6.72 ( 1H, dd), 6.63 (1H, dt).

Example 13 Synthesis of 10-camphorsulfonic acid triphenylsulfonium salt After adding 3 mL of ion-exchanged water to 5.0 g (3.08 mmol) of a 20% aqueous solution of triphenylsulfonium hydrogencarbonate, 730 mg (3.14 mmol; camphorsulfonic acid; 1.02 equivalents) was added and the reaction was allowed to stir at room temperature for 5 minutes. After completion of the reaction, the reaction solution was extracted three times with dichloromethane, the extract was concentrated under reduced pressure, and the resulting residue was dried under reduced pressure to obtain 1.43 g (2.89 mmol, yield: 93.7%) of a colorless powder. ) Analysis by ¹ H-NMR confirmed that the obtained colorless powder was 10-camphorsulfonic acid triphenylsulfonium salt. The measurement result of ¹ H-NMR is shown below.
¹ H-NMR (400 MHz, CDCl ₃ ) δ (ppm): 7.86-7.83 (6H, m), 7.75-7.66 (9H, m), 3.39 (1H, d), 2.93-2.85 (1H, m), 2.81 (1H, d), 2.29 (1H, dt), 2.00-1.93 (2H, m), 1.82 (1H, d), 1.69-1.62 (1H, m), 1.33-1.26 (1H, m), 1.15 (3H, s), 0.82 (3H, s).

Example 14 Synthesis of p-toluenesulfonic acid triphenylsulfonium salt After adding 3 mL of ion-exchanged water to 5.0 g (3.08 mmol) of a 20% aqueous solution of triphenylsulfonium hydrogencarbonate, p-toluenesulfonic acid monohydrate was added. 598 mg (3.14 mmol; 1.02 equivalent) was added, and the reaction was allowed to stir at room temperature for 5 minutes. After completion of the reaction, the reaction solution was extracted three times with dichloromethane, the extract was concentrated under reduced pressure, and the resulting residue was dried under reduced pressure to obtain 1.34 g (3.08 mmol, yield: 99.9%) of colorless crystals. ) Analysis by ¹ H-NMR confirmed that the resulting colorless crystals were p-toluenesulfonic acid triphenylsulfonium salt. The measurement result of ¹ H-NMR is shown below.
¹ H-NMR (400 MHz, CDCl ₃ ) δ (ppm): 7.81-7.77 (8H, m), 7.71-7.62 (9H, m), 7.07 (2H, d), 2.30 (3H, s).

Example 15 Synthesis of trifluoromethanesulfonic acid triphenylsulfonium salt After adding 4 mL of methanol to 5.0 g (3.08 mmol) of a 20% aqueous solution of triphenylsulfonium hydrogencarbonate, 472 mg (3.14 mmol; trifluoromethanesulfonic acid; 02 equivalents) was added and the reaction was allowed to stir at room temperature for 5 minutes. After completion of the reaction, the reaction solution was concentrated under reduced pressure, and the resulting residue was dried under reduced pressure to obtain colorless crystals quantitatively. Analysis by ¹ H-NMR and ¹⁹ F-NMR confirmed that the resulting colorless crystals were triphenylsulfonium trifluoromethanesulfonate. The measurement results of ¹ H-NMR and ¹⁹ F-NMR are shown below.
¹ H-NMR (400 MHz, CDCl ₃ ) δ (ppm): 7.79-7.68 (15H, m).
¹⁹ F-NMR (400 MHz, CDCl ₃ ) δ (ppm): −78.05 (3F, s).

Example 16 Synthesis of bis (nonafluorobutanesulfonyl) imide triphenylsulfonium salt After adding 3 mL of ion-exchanged water to 2.0 g (3.08 mmol) of a 50% aqueous solution of triphenylsulfonium bicarbonate, bis (nonafluorobutanesulfonyl) was prepared. ) 1.76 g (3.02 mmol; 0.98 equivalent) of imide was added, and the reaction was allowed to stir at room temperature for 5 minutes. After completion of the reaction, sodium chloride was added to the reaction solution, followed by extraction three times with dichloromethane, the extract was concentrated under reduced pressure, and the resulting residue was dried under reduced pressure to give 2.54 g (3.00 mmol, yield of colorless oil). Rate: 97.6%). Analysis by ¹ H-NMR and ¹⁹ F-NMR confirmed that the resulting colorless oil was a bis (nonafluorobutanesulfonyl) imidotriphenylsulfonium salt. The measurement results of ¹ H-NMR and ¹⁹ F-NMR are shown below.
¹ H-NMR (400 MHz, CDCl ₃ ) δ (ppm): 7.80-7.76 (3H, m), 7.73-7.65 (12H, m).
¹⁹ F-NMR (400 MHz, CDCl ₃ ) δ (ppm): −80.73 (6F, s), −112.75 (4F, s), −120.98 (4F, s), −125.90 ( 4F, s).

Example 17 Synthesis of 10-camphorsulfonic acid diphenyl-4-methylphenylsulfonium salt After adding 3 mL of ion-exchanged water to 5.0 g (2.95 mmol) of a 20% aqueous solution of diphenyl-4-methylphenylsulfonium hydrogencarbonate, camphor 700 mg (3.01 mmol; 1.02 equivalent) of sulfonic acid was added, and the reaction was allowed to stir at room temperature for 5 minutes. After completion of the reaction, the reaction solution was extracted three times with dichloromethane, the extract was concentrated under reduced pressure, and the obtained residue was dried under reduced pressure to obtain 1.50 g (2.95 mmol, yield: 99.9) of a colorless oil. %). Analysis by ¹ H-NMR confirmed that the resulting colorless oil was 10-camphorsulfonic acid diphenyl-4-methylphenylsulfonium salt. The measurement result of ¹ H-NMR is shown below.
¹ H-NMR (400 MHz, CDCl ₃ ) δ (ppm): 7.84-7.80 (4H, m), 7.75-7.62 (8H, m), 7.47 (2H, d), 3.38 (1H, d), 2.92-2.87 (1H, m), 2.82 (1H, d), 2.45 (3H, s), 2.33-2.26 (1H, m), 2.01-1.95 (2H, m), 1.83 (1H, d), 1.71-1.64 (1H, m), 1.34-1.27 (1H, m) 1.16 (3H, s), 0.83 (3H, s).

Example 18 Synthesis of 1-adamantanecarboxylic acid diphenyl-4-tert-butylphenylsulfonium salt 3 mL of ion-exchanged water was added to 5.0 g (2.63 mmol) of 20% aqueous solution of diphenyl-4-tert-butylphenylsulfonium hydrogencarbonate. Thereafter, 464 mg (2.58 mmol; 0.98 equivalent) of 1-adamantanecarboxylic acid was added, and the reaction was allowed to stir at room temperature for 5 minutes. After completion of the reaction, the reaction solution was extracted three times with dichloromethane, the extract was concentrated under reduced pressure, and the obtained residue was dried under reduced pressure to obtain 1.28 g (2.57 mmol, yield: 97.7) of a colorless oil. %). Analysis by ¹ H-NMR confirmed that the resulting colorless oil was 1-adamantanecarboxylic acid diphenyl-4-tert-butylphenylsulfonium salt. The measurement result of ¹ H-NMR is shown below.
¹ H-NMR (400 MHz, CDCl ₃ ) δ (ppm): 7.82 (4H, d), 7.77-7.68 (10H, m), 2.02-1.57 (15H, m), 1.35 (9H, s).

Example 19 Synthesis of diphenyl-4-cyclohexylphenylsulfonium salt of salicylic acid 3 mL of ion-exchanged water was added to 5.0 g (2.46 mmol) of 20% aqueous solution of diphenyl-4-cyclohexylphenylsulfonium hydrogencarbonate, and then 333 mg (2. 41 mmol; 0.98 equivalent) was added, and the reaction was allowed to stir at room temperature for 5 minutes. After completion of the reaction, the reaction solution was extracted three times with dichloromethane, the extract was concentrated under reduced pressure, and the obtained residue was dried under reduced pressure to give 1.14 g (2.35 mmol, yield: 95.7) as a colorless oil. %). Analysis by ¹ H-NMR confirmed that the resulting colorless oil was salicylic acid diphenyl-4-cyclohexylphenylsulfonium salt. The measurement result of ¹ H-NMR is shown below.
¹ H-NMR (400 MHz, CDCl ₃ ) δ (ppm): 7.93 (1H, dd), 7.71-7.53 (12H, m), 7.46-7.43 (2H, m), 7.14 (1H, dt), 6.73 (1H, dd), 6.62 (1H, dd), 2.57-2.55 (1H, m), 1.86-1.74 (5H, m), 1.44-1.22 (5H, m).

Example 20 Synthesis of 10-camphorsulfonic acid diphenyl-4-cyclohexylphenylsulfonium salt After dissolving 1.0 g (2.46 mmol) of diphenyl-4-cyclohexylphenylsulfonium hydrogencarbonate in 15 mL of ion-exchanged water, camphorsulfonic acid 0 .63 g (2.71 mmol; 1.1 equivalents) was added, and the reaction was allowed to stir at room temperature for 5 minutes. After completion of the reaction, the reaction solution was extracted with dichloromethane three times. The extract was concentrated under reduced pressure, and diisopropyl ether was added to the concentrated residue for crystallization. The obtained crystals were collected by filtration and dried to obtain 1.16 g (2.01 mmol, yield: 81.8%) of white crystals. Analysis by ¹ H-NMR confirmed that the resulting white crystals were 10-camphorsulfonic acid diphenyl-4-cyclohexylphenylsulfonium salt. The measurement result of ¹ H-NMR is shown below.
¹ H-NMR (400 MHz, CDCl ₃ ) δ (ppm): 7.85 (4H, dd), 7.77 (2H, d), 7.72-7.64 (6H, m), 7.48 ( 2H, d), 3.41 (1H, d), 2.92-2.89 (1H, m), 2.84 (1H, d), 2.59 (1H, s), 2.30 (1H , Dt), 2.02-1.97 (2H, m), 1.87-1.66 (7H, m), 1.42-1.26 (6H, m), 1.18 (3H, s) ), 0.84 (3H, s).

Example 21 Synthesis of diphenyl-2,4,6-trimethylphenylsulfonium salt of tricosafluorododecanoic acid Ion exchange with 5.0 g (2.73 mmol) of 20% aqueous solution of diphenyl-2,4,6-trimethylphenylsulfonium bicarbonate After adding 3 mL of water, 1.64 g (2.67 mmol; 0.98 equivalent) of tricosafluorododecanoic acid was added, and the mixture was reacted by stirring at room temperature for 5 minutes. After completion of the reaction, the reaction solution was extracted three times with dichloromethane, the extract was concentrated under reduced pressure, and the resulting residue was dried under reduced pressure to give 2.43 g (2.64 mmol, yield: 96.8) of a colorless oil. %). Analysis by ¹ H-NMR and ¹⁹ F-NMR confirmed that the resulting colorless oil was diphenyl-2,4,6-trimethylphenylsulfonium salt of tricosafluorododecanoic acid. The measurement results of ¹ H-NMR and ¹⁹ F-NMR are shown below.
¹ H-NMR (400 MHz, CDCl ₃ ) δ (ppm): 7.78-7.70 (6H, m), 7.66-7.63 (4H, m), 7.19 (2H, s), 2.41 (3H, s), 2.32 (6H, s).
¹⁹ F-NMR (400 MHz, CDCl ₃ ) δ (ppm): −80.73 (3F, s), −115.79 (2F, s), −121.69 (14F, s), −122.64 ( 2F, s), -126.05 (2F, s).

Example 22 Synthesis of tri (4-methylphenyl) sulfonium salt of propionic acid 4 mL of methanol was added to 5.0 g (2.73 mmol) of a 20% aqueous solution of tri (4-methylphenyl) sulfonium hydrogencarbonate, and then 206 mg of propionic acid ( 2.78 mmol; 1.02 equivalent) was added and the reaction was allowed to stir at room temperature for 5 minutes. After completion of the reaction, the reaction solution was concentrated under reduced pressure, and the resulting residue was dried under reduced pressure to give a colorless oil quantitatively. Analysis by ¹ H-NMR confirmed that the resulting colorless oil was tri (4-methylphenyl) sulfonium salt of propionate. The measurement result of ¹ H-NMR is shown below.
¹ H-NMR (400 MHz, CDCl ₃ ) δ (ppm): 7.62 (6H, d), 7.48 (6H, d), 2.47 (9H, s), 2.13 (2H, q) , 1.03 (3H, t).

Example 23 Synthesis of Diphenyl-4-methoxyphenylsulfonium Butyrate Salt After adding 4 mL of methanol to 5.0 g (2.82 mmol) of 20% aqueous solution of diphenyl-4-methoxyphenylsulfonium hydrogencarbonate, 254 mg (2.88 mmol; butyric acid; 1.02 equivalents) was added and the reaction was allowed to stir at room temperature for 5 minutes. After completion of the reaction, the reaction solution was concentrated under reduced pressure, and the resulting residue was dried under reduced pressure to give a colorless oil quantitatively. Analysis by ¹ H-NMR confirmed that the resulting colorless oil was diphenyl-4-methoxyphenylsulfonium salt of butyrate. The measurement result of ¹ H-NMR is shown below.
¹ H-NMR (400 MHz, CDCl ₃ ) δ (ppm): 7.84-7.80 (2H, m), 7.76-7.66 (10H, m), 7.23-7.19 (2H M), 3.91 (3H, s), 2.07 (2H, t), 1.55 (2H, sext), 0.83 (3H, t).

Example 24 Synthesis of Diphenyl-4-phenylphenylsulfonium Acetate After adding 4 mL of methanol to 5.0 g (2.50 mmol) of a 20% aqueous solution of diphenyl-4-phenylphenylsulfonium bicarbonate, 153 mg (2.55 mmol; 1.02 equivalents) was added and the reaction was allowed to stir at room temperature for 5 minutes. After completion of the reaction, the reaction solution was concentrated under reduced pressure, and the resulting residue was dried under reduced pressure to give a colorless oil quantitatively. Analysis by ¹ H-NMR confirmed that the resulting colorless oil was diphenyl-4-phenylphenylsulfonium acetate. The measurement result of ¹ H-NMR is shown below.
¹ H-NMR (400 MHz, CDCl ₃ ) δ (ppm): 7.88 (4H, s), 7.85-7.82 (4H, m), 7.78-7.69 (6H, m), 7.62-7.59 (2H, m), 7.51-7.44 (3H, m), 1.85 (3H, s).

Example 25 Synthesis of nonafluorobutanesulfonic acid tri (4-fluorophenyl) sulfonium salt After adding 3 mL of ion-exchanged water to 5.0 g (2.64 mmol) of a 20% aqueous solution of tri (4-fluorophenyl) sulfonium hydrogencarbonate. , 777 mg (2.59 mmol; 0.98 equivalent) of nonafluorobutanesulfonic acid was added, and the reaction was allowed to stir at room temperature for 5 minutes. After completion of the reaction, sodium chloride was added to the reaction solution, followed by extraction three times with dichloromethane, the extract was concentrated under reduced pressure, and the resulting residue was dried under reduced pressure to obtain 1.58 g (2.56 mmol, yield of colorless oil). Rate: 97.0%). Analysis by ¹ H-NMR and ¹⁹ F-NMR confirmed that the resulting colorless oil was nonafluorobutanesulfonic acid tri (4-fluorophenyl) sulfonium salt. The measurement results of ¹ H-NMR and ¹⁹ F-NMR are shown below.
¹ H-NMR (400 MHz, CDCl ₃ ) δ (ppm): 7.95-7.90 (6H, m), 7.44-7.37 (6H, m).
¹⁹ F-NMR (400 MHz, CDCl ₃ ) δ (ppm): −80.85 (3F, s), −100.12 (3F, s), −114.56 (2F, s), −121.54 ( 2F, s), -125.90 (2F, s).

Example 26 Synthesis of diphenyl-4-hydroxyphenylsulfonium salt of trifluoroacetic acid After adding 4 mL of methanol to 5.0 g (2.94 mmol) of 20% aqueous solution of diphenyl-4-hydroxyphenylsulfonium hydrogencarbonate, 342 mg of trifluoroacetic acid ( (3.00 mmol; 1.02 equivalent) was added, and the reaction was allowed to stir at room temperature for 5 minutes. After completion of the reaction, the reaction solution was concentrated under reduced pressure, and the resulting residue was dried under reduced pressure to give a colorless oil quantitatively. Analysis by ¹ H-NMR and ¹⁹ F-NMR confirmed that the resulting colorless oil was diphenyl-4-hydroxyphenylsulfonium trifluoroacetate. The measurement results of ¹ H-NMR and ¹⁹ F-NMR are shown below.
¹ H-NMR (400 MHz, CDCl ₃ ) δ (ppm): 7.76-7.72 (2H, m), 7.69-7.64 (4H, m), 7.54-7.51 (4H M), 7.39-7.34 (2H, m), 7.28-7.19 (2H, m).
¹⁹ F-NMR (400 MHz, CDCl ₃ ) δ (ppm): −75.07 (3F, s).

Comparative Example 1 Synthesis of Triphenylsulfonium Hydroxide A solution in which 3.00 g (8.74 mmol: manufactured by Wako Pure Chemical Industries, Ltd.) of triphenylsulfonium bromide was dissolved in methanol was used, and the anion portion was exchanged with hydroxide ions. The solution was passed through a basic anion exchange resin (Dowex 1 × 8 200-400). The obtained eluate was concentrated under reduced pressure and analyzed by ¹ H-NMR after 3 hours. As a result, the peak integrated value of δ (ppm): 7.71-7.59 (triphenylsulfonium) and 6.72-6. The ratio of the peak integral value of 41 (degraded product such as diphenyl sulfide) was 1: 16.96. From this value, the product, triphenylsulfonium hydroxide, was decomposed by 95% or more after 3 hours.

Comparative Example 2 Synthesis of Triphenylsulfonium Acetate Salt After adding 4 mL of methanol to 1.0 g of triphenylsulfonium bromide (2.91 mmol: manufactured by Wako Pure Chemical Industries, Ltd.), 178 mg (2.97 mmol; 1.02 equivalent) of acetic acid And stirred for 5 minutes at room temperature. Next, the reaction solution was concentrated under reduced pressure, and the resulting residue was dried under reduced pressure to obtain 1.01 g of a colorless solid. The obtained colorless solid was analyzed for molar ratio by ¹ H-NMR. The molar amount of sulfonium cation (sum of triphenylsulfonium bromide and triphenylsulfonium acetate): molar amount of acetic acid anion (acetic acid and triphenylsulfonium acetate) Salt sum) = 1: 0.014. From this value, it was confirmed that the yield of the product, triphenylsulfonium acetate, was 2% or less with respect to the starting material, triphenylsulfonium bromide.

  Table 1 shows the names of the products (sulfonium salt compounds) obtained in Examples 10 to 26 and Comparative Example 2, and the yields in these Examples and Comparative Examples.

  From the results of Examples 10 to 26 and Comparative Example 2, compared to the case where the sulfonium salt compound was produced from the sulfonium halide, the production of the sulfonium salt compound from the sulfonium hydrogen carbonate salt was aimed at a higher yield. It was found that a sulfonium salt compound was obtained. As described above, it has been found that the method using a sulfonium hydrogen carbonate salt is a method suitable for the production of a sulfonium salt compound having an anion derived from a weak acid, which could not be obtained in a high yield. In addition, since the sulfonium hydrogen carbonate salt has high stability compared to the sulfonium hydroxide and does not need to be prepared at the time of use, it can be prepared in large quantities at one time. It was useful as an intermediate that can be used for continuous production of the same item or multiple items, and it was found that the use of a sulfonium hydrogen carbonate salt as an intermediate is effective in reducing the production cost of the target sulfonium salt compound.

  The method for producing the sulfonium salt compound of the present invention is a method for easily and efficiently producing a sulfonium salt compound useful as an acid generator, a cationic polymerization initiator, an acid diffusion inhibitor, etc. used in the resist field, for example. It is useful and particularly useful as a method for easily and efficiently producing a sulfonium salt having a counter anion derived from a weak acid such as sulfonic acid or carboxylic acid, which has been difficult to produce by conventional methods.

  The sulfonium hydrogen carbonate salt of the present invention is useful as a raw material or an intermediate in the process for producing the sulfonium salt compound of the present invention.

Claims (8)

A sulfonium hydrogencarbonate salt represented by the general formula (1A), an alkyl carboxylic acid having 1 to 20 carbon atoms, a fluoroalkyl carboxylic acid having 2 to 20 carbon atoms, an aryl carboxylic acid having 7 to 20 carbon atoms, and 1 to 20 carbon atoms. Alkyl sulfonic acid, C 1-20 fluoroalkyl sulfonic acid, C 6-20 aryl sulfonic acid, C 6-20 fluoroaryl sulfonic acid, C 2-20 bis (alkylsulfonyl) imide, A general formula (2A) characterized by reacting an organic acid selected from the group consisting of bis (perfluoroalkylsulfonyl) imide having 2 to 20 carbon atoms and bis (arylsulfonylimide) having 12 to 20 carbon atoms The manufacturing method of the sulfonium salt compound shown by these.

(In the formula, R ^1a , R ^3a , R ^5a , R ^6a , R ^8a , R ^10a , R ^11a , R ^13a and R ^15a are each independently a hydrogen atom, an alkyl group having 1 to 12 carbon atoms, or a carbon number. 1-12 alkoxy group, C2-C12 alkoxycarbonyl group, C6-C10 aryl group, C6-C10 aryloxy group, C6-C10 arylthio group, C7-C11 Represents an aryloxycarbonyl group, a halogen atom or a hydroxyl group.)

(In the formula, Z ⁻ represents an anion derived from the organic acid, and R ^1a , R ^3a , R ^5a , R ^6a , R ^8a , R ^10a , R ^11a , R ^13a and R ^15a are the same as above). The organic acid is an alkyl carboxylic acid having 1 to 20 carbon atoms, a fluoroalkyl carboxylic acid having 2 to 20 carbon atoms, an aryl carboxylic acid having 7 to 20 carbon atoms, an alkyl sulfonic acid having 1 to 20 carbon atoms, and 1 to 1 carbon atoms. The production method according to claim 1, which is selected from the group consisting of 20 fluoroalkylsulfonic acids, arylsulfonic acids having 6 to 20 carbon atoms, and bis (perfluoroalkylsulfonyl) imide having 2 to 20 carbon atoms. The organic acid is an alkyl carboxylic acid having 1 to 20 carbon atoms, a fluoroalkyl carboxylic acid having 2 to 20 carbon atoms, an aryl carboxylic acid having 7 to 20 carbon atoms, an alkyl sulfonic acid having 1 to 20 carbon atoms, and 6 to 6 carbon atoms. The manufacturing method of Claim 1 which is chosen from the group which consists of 20 arylsulfonic acids. The organic acid is an alkyl carboxylic acid having 2 to 11 carbon atoms, a fluoroalkyl carboxylic acid having 2 to 12 carbon atoms, an aryl carboxylic acid having 7 carbon atoms, an alkyl sulfonic acid having 1 to 10 carbon atoms, and 6 to 7 carbon atoms. The manufacturing method of Claim 1 which is chosen from the group which consists of aryl sulfonic acids. The organic acid is selected from the group consisting of acetic acid, propionic acid, butyric acid, 1-adamantanecarboxylic acid, trifluoroacetic acid, tricosafluorododecanoic acid, salicylic acid, 10-camphorsulfonic acid and p-toluenesulfonic acid. The manufacturing method according to claim 1. In the general formula (1A), R ^1a , R ^3a , R ^5a , R ^6a , R ^8a , R ^10a , R ^11a , R ^13a and R ^15a are a hydrogen atom, an alkyl group having 1 to 12 carbon atoms, and 1 carbon atom. The manufacturing method of Claim 1 which is a C12 alkoxy group, a C6-C10 aryl group, a halogen atom, or a hydroxyl group. In the general formula (1A), R ^1a , R ^3a , R ^5a , R ^6a , R ^8a , R ^10a , R ^11a , R ^13a and R ^15a are a hydrogen atom, an alkyl group having 1 to 12 carbon atoms, and 1 carbon atom. The manufacturing method of Claim 2 which is a C12 alkoxy group, a C6-C10 aryl group, a halogen atom, or a hydroxyl group. In the general formula (1A), R ^1a , R ^3a , R ^5a , R ^6a , R ^8a , R ^10a , R ^11a , R ^13a and R ^15a are a hydrogen atom, an alkyl group having 1 to 6 carbon atoms, and 1 carbon atom. The production method according to claim 1, which is an alkoxy group of ˜6, an aryl group of 6 carbon atoms, a fluorine atom, a chlorine atom or a hydroxyl group.