JP6476897B2 - Hardness distribution measuring device and hardness distribution measuring method for photocured resin - Google Patents

Description

  The technology disclosed in the present application relates to a hardness distribution measuring device and a hardness distribution measuring method for a photocured resin.

  As a device for measuring the hardness of a photo-curing resin, a light source that outputs excitation light, an optical system that guides the excitation light output from the light source to the photo-curing resin, and fluorescence generated by the photo-curing resin are detected. There is a photocuring resin hardness measurement device provided with a detector.

JP 2009-14667 A JP 2013-228270 A JP 2010-197099 A JP 2013-137199 A

  In a photo-curing resin to be measured by such a hardness measuring device, in general, the speed of curing differs between the surface irradiated with curing illumination and the inside. Therefore, when detecting the fluorescence generated on the surface of the photocurable resin using the hardness measuring device and determining the hardness of the entire photocurable resin based on the detected fluorescence, the determination accuracy of the hardness of the photocurable resin is high. May decrease. Therefore, in order to improve the determination accuracy of the hardness, it is desired that the hardness distribution in the depth direction with respect to the surface of the photo-curing resin can be measured.

  An object of the technology disclosed by the present application is to enable measurement of the hardness distribution in the depth direction with respect to the surface of the photocurable resin as one aspect.

  In order to achieve the above object, according to one aspect of the technology disclosed in the present application, a light source, a beam splitter, an objective lens, an imaging lens, a confocal pinhole member, a detector, a first scanning unit, and a second There is provided a hardness distribution measuring device for a photo-curing resin including a scanning unit.

  The light source outputs excitation light. The beam splitter reflects the excitation light output from the light source. The objective lens collects the excitation light reflected by the beam splitter onto a photo-curing resin that is a measurement target. The imaging lens condenses the fluorescence generated by the photo-curing resin by the irradiation of the excitation light collected by the objective lens and transmitted through the objective lens and the beam splitter. The confocal pinhole member has a confocal pinhole that allows the fluorescence condensed by the imaging lens to pass therethrough.

  The detector detects the intensity of the fluorescence that has passed through the confocal pinhole. The first scanning unit relatively moves the confocal pinhole in the optical axis direction of the imaging lens so that the condensing point of the imaging lens passes through the confocal pinhole. The second scanning unit is configured so that the light-curing resin is changed with respect to the light-collecting point of the objective lens so that the position of the light-converging point of the objective lens changes in a depth direction with respect to the surface of the photo-curing resin Move relative to the height direction of.

  According to the technique disclosed in the present application, the hardness distribution in the depth direction with respect to the surface of the photocurable resin can be measured.

It is a figure which shows the confocal optical system in the hardness distribution measuring apparatus of photocurable resin. It is a figure which shows the electrical component which operates a confocal optical system. It is a flowchart which shows operation | movement of a control part. It is a figure which shows a mode that the position of the condensing point of an objective lens is changed in the depth direction with respect to the surface of photocuring resin. It is a figure which shows a mode that a confocal pinhole is moved to the optical axis direction of an imaging lens so that the condensing point of an imaging lens may pass a confocal pinhole. It is a figure which shows the relationship between the scanning position of a confocal pinhole, and fluorescence intensity about each of several height position of photocuring resin. It is a figure which shows the measurement result obtained from the photocuring resin uniformly hardened in the depth direction with respect to the surface. It is a figure which shows the measurement result obtained from the photocurable resin which the site | part shallow from the surface has hardened. It is a flowchart which shows the modification of operation | movement of a control part.

  Hereinafter, an embodiment of the technology disclosed in the present application will be described.

  FIG. 1 shows a confocal optical system 12 in a photocured resin hardness distribution measuring apparatus 10 (hereinafter simply referred to as a hardness distribution measuring apparatus 10) of the present embodiment. The confocal optical system 12 includes a light source 14, a lens 16, a pinhole member 18, a lens 20, a dichroic mirror 22, an objective lens 24, a table 26, a filter stage 28, an imaging lens 30, a confocal pinhole member 32, and The detector 34 is provided.

  The light source 14 is a laser light source as an example, and outputs a laser beam as the excitation light 36. The lens 16, the pinhole member 18, the lens 20, and the dichroic mirror 22 are disposed on the optical axis of the light source 14. The lens 16, the pinhole member 18, and the lens 20 are disposed in order from the light source 14 to the dichroic mirror 22 side.

  The pinhole member 18 is formed with a pinhole 38 penetrating in the optical axis direction of the light source 14. The excitation light 36 output from the light source 14 passes through the lens 16 and passes through the pinhole 38. The excitation light 36 that has passed through the pinhole 38 passes through the lens 20 and is reflected by the dichroic mirror 22. The dichroic mirror 22 is an example of a “beam splitter”.

  The objective lens 24 is disposed between the dichroic mirror 22 and the base 26. The excitation light 36 reflected by the dichroic mirror 22 is collected by the objective lens 24. On the table 26, a photo-curing resin 40 as a measurement target is placed. The excitation light 36 condensed by the objective lens 24 is applied to the photocurable resin 40 placed on the table 26. When the photocurable resin 40 is irradiated with the excitation light 36, fluorescence 42 is generated in the photocurable resin 40, and the fluorescence 42 passes through the objective lens 24 and the dichroic mirror 22.

  In this embodiment, as an example, the photocurable resin 40 itself is placed on the table 26 as a measurement target. However, a component or product including the photocurable resin 40 is placed on the table 26, The photo-curing resin 40 such as a product may be a measurement target.

  The dichroic mirror 22, the imaging lens 30, the confocal pinhole member 32, and the detector 34 are disposed on the optical axis of the objective lens 24. The filter stage 28 is disposed between the dichroic mirror 22 and the imaging lens 30. The filter stage 28 is provided with a first wavelength filter 44 and a second wavelength filter 46 as an example of “a plurality of wavelength filters”. The first wavelength filter 44 and the second wavelength filter 46 have different transmission wavelength characteristics. The filter stage 28 is slid in a direction orthogonal to the optical axes of the objective lens 24 and the imaging lens 30.

  By switching the slide position of the filter stage 28, the filter that transmits the fluorescence 42 that has passed through the dichroic mirror 22 is switched among the first wavelength filter 44 and the second wavelength filter 46. That is, the fluorescence 42 is selectively transmitted through the first wavelength filter 44 and the second wavelength filter 46. The fluorescence 42 transmitted through one of the first wavelength filter 44 and the second wavelength filter 46 enters the imaging lens 30 and is collected by the imaging lens 30.

  The confocal pinhole member 32 is disposed between the imaging lens 30 and the detector 34. A confocal pinhole 48 penetrating in the optical axis direction of the imaging lens 30 is formed in the confocal pinhole member 32. The fluorescence 42 collected by the imaging lens 30 passes through the confocal pinhole 48.

  The detector 34 detects the intensity of the fluorescence 42 that has passed through the confocal pinhole 48, and outputs a signal according to the detected fluorescence intensity.

  FIG. 2 shows electrical components for operating the confocal optical system 12 described above. The hardness distribution measuring apparatus 10 of the present embodiment includes a first scanning unit 50, a second scanning unit 52, a switching unit 54, and an information processing unit 56 as electrical components.

  For the first scanning unit 50, the second scanning unit 52, and the switching unit 54, for example, a driving device such as an electric actuator, a hydraulic actuator, and a pneumatic actuator is used. The first scanning unit 50 moves the confocal pinhole member 32 having the confocal pinhole 48 in the optical axis direction of the imaging lens 30. The second scanning unit 52 moves the table 26 in the optical axis direction of the objective lens 24 by moving the table 26 up and down. The switching unit 54 slides the filter stage 28 in a direction orthogonal to the optical axis direction of the imaging lens 30.

  For the information processing unit 56, for example, a computer such as a personal computer is used. The information processing unit 56 includes a signal input unit 58, a control unit 60, a drive circuit 62, a control circuit 64, a storage unit 66, and the like. The signal input unit 58 is electrically connected to the detector 34. A signal (analog signal) output from the detector 34 is input to the signal input unit 58. A signal (digital signal) corresponding to the signal output from the detector 34 is output from the signal input unit 58, and the signal output from the signal input unit 58 is input to the control unit 60.

  For example, a CPU (Central Processing Unit) is used for the control unit 60. The control unit 60 is provided with a signal processing unit 68, and a signal output from the signal input unit 58 is input to the signal processing unit 68. The control unit 60 including the signal processing unit 68 executes a plurality of processes (see FIG. 3) as will be described later.

  The drive circuit 62 is electrically connected to the first scanning unit 50, the second scanning unit 52, and the switching unit 54 described above. The drive signal output from the control unit 60 is input to the first scanning unit 50, the second scanning unit 52, and the switching unit 54 via the driving circuit 62. The first scanning unit 50, the second scanning unit 52, and the switching unit 54 operate according to the drive signal output from the control unit 60 via the drive circuit 62.

  The control circuit 64 is electrically connected to the light source 14 described above. The control signal output from the control unit 60 is input to the light source 14 via the control circuit 64. The light source 14 operates according to a control signal output from the control unit 60 via the control circuit 64. For the storage unit 66, for example, a storage element such as a volatile memory is used. The storage unit 66 stores data related to the fluorescence intensity output from the control unit 60.

  Next, a method for measuring the hardness distribution of the photocured resin using the above-described hardness distribution measuring apparatus 10 will be described.

  In a hardness distribution measuring method for a photo-curing resin using the hardness distribution measuring apparatus 10 described below, the confocal optical system 12 of the hardness distribution measuring apparatus 10 and an electric for operating the confocal optical system 12 are described. Refer to FIG. 2 for the components. The processing content of the control unit 60 and its step number will be referred to the flowchart of FIG.

  When the control part 60 starts the process for performing the hardness distribution measuring method of photocuring resin, first, the light source 14 will be operated (step S1). When the light source 14 is activated, the excitation light 36 is output from the light source 14, and the excitation light 36 output from the light source 14 passes through the lens 16 and passes through the pinhole 38. The excitation light 36 that has passed through the pinhole 38 passes through the lens 20 and is reflected by the dichroic mirror 22. The excitation light 36 reflected by the dichroic mirror 22 is collected by the objective lens 24 (see FIG. 4A).

  Subsequently, the control part 60 controls the 2nd scanning part 52, and raises the stand 26 (step S2). At this time, as shown in FIG. 4B, the photocurable resin 40 is raised together with the table 26, and the condensing point 24 </ b> A of the objective lens 24 is positioned near the surface of the photocurable resin 40. When the photocurable resin 40 is irradiated with the excitation light 36, fluorescence 42 is generated in the photocurable resin 40, and the fluorescence 42 passes through the objective lens 24 and the dichroic mirror 22.

  Next, the control unit 60 controls the switching unit 54 to slide the filter stage 28 (step S11). At this time, the filter stage 28 is slid so that the first wavelength filter 44 is disposed on the optical axes of the objective lens 24 and the imaging lens 30. Thereby, the fluorescence 42 transmitted through the dichroic mirror 22 passes through the first wavelength filter 44. Further, the fluorescence 42 transmitted through the first wavelength filter 44 is collected by the imaging lens 30.

  Next, the control unit 60 controls the first scanning unit 50 to move the confocal pinhole member 32 to the start position (first scanning position) (step S12). As shown in FIG. 5A, the start position of the confocal pinhole member 32 is a position closer to the detector 34 than the condensing point 30 </ b> A of the imaging lens 30. The starting position of the confocal pinhole member 32 is set in advance in consideration of various measurement conditions.

  Next, the control unit 60 resets the maximum fluorescence intensity stored in the storage unit 66 (step S13). In the first process of step S13, the fluorescence intensity detected first is set to the maximum fluorescence intensity.

  And the control part 60 inputs the signal output from the detector 34 (step S14). As shown in FIG. 5A, in the state where the confocal pinhole member 32 is positioned at the start position, the confocal pinhole 48 is displaced from the condensing point 30 </ b> A of the imaging lens 30. Accordingly, since the amount of fluorescence 42 incident on the detector 34 is small, the level of the output signal from the detector 34 is low.

  Next, the control unit 60 controls the first scanning unit 50 to move the confocal pinhole member 32 to the next scanning position (step S15). That is, the confocal pinhole member 32 shown in FIG. 5A is slightly moved in the direction approaching the condensing point 30 </ b> A of the imaging lens 30. The moving distance of the confocal pinhole member 32 at this time is set in advance in consideration of various measurement conditions, the material of the photocurable resin 40, the height dimension of the photocurable resin 40, and the like.

  Next, the control unit 60 inputs the signal output from the detector 34 (step S16). Further, the control unit 60 compares the fluorescence intensity detected this time in the process of step S <b> 16 with the past fluorescence intensity stored in the storage unit 66. Then, the control unit 60 determines whether or not the fluorescence intensity detected this time is higher than the past fluorescence intensity, that is, whether or not the fluorescence intensity detected this time is the maximum (step S17). When the level of the output signal from the detector 34 is low, the control unit 60 determines that the fluorescence intensity detected this time is not the maximum, and skips the process of step S18.

  Next, the control unit 60 determines whether or not the confocal pinhole member 32 has reached the end position (step S19). As shown in FIG. 5C, the end position of the confocal pinhole member 32 is a position closer to the imaging lens 30 than the condensing point 30 </ b> A of the imaging lens 30. The end position of the confocal pinhole member 32 is set in advance in consideration of various measurement conditions.

  Here, when the control unit 60 determines that the confocal pinhole member 32 has not reached the end position, the control unit 60 returns to the process of step S15 described above. And the control part 60 repeatedly performs the process of the above-mentioned step S15-S19 until it judges that the confocal pinhole member 32 reached | attained the end position.

When the processes of steps S15 to S19 described above are repeatedly executed in this way, the confocal pinhole member 32 is moved from the start position to the end position as shown in FIGS. 5 (a) to 5 (c). Moved. Further, the confocal pinhole member 32 is moved little by little every processing of the above-described step S15, so that the confocal pinhole 48 is moved stepwise to a plurality of scanning positions in the optical axis direction of the imaging lens 30. The In FIG. 5A to FIG. 5C, three scanning positions P _U , P _M , and P _L are shown as an example, but in this embodiment, between the scanning positions P _{U to} P _L. The confocal pinhole 48 is moved stepwise to a plurality of scanning positions.

  Further, in the present embodiment, the detector 34 responds to the fluorescence intensity for each process of step S16 out of the processes of steps S15 to S19 described above, that is, for each scanning position of the confocal pinhole 48. The output signal is input to the control unit 60.

  Here, for example, as shown in FIG. 5A, when the confocal pinhole 48 is shifted to the detector 34 side from the condensing point 30A of the imaging lens 30, the light enters the detector 34. Since the amount of fluorescence 42 is small, the level of the output signal from the detector 34 is low.

  On the other hand, for example, as shown in FIG. 5B, in a state where the position of the confocal pinhole 48 and the position of the condensing point 30A of the imaging lens 30 coincide with each other, the fluorescence 42 incident on the detector 34 is generated. Since there are many, the level of the output signal from the detector 34 becomes the highest. Even if the position of the confocal pinhole 48 and the position of the condensing point 30A of the imaging lens 30 do not coincide with each other, in the substantially coincided state, there is much fluorescence 42 incident on the detector 34. The level of the output signal from becomes high.

  When the level of the output signal from the detector 34 is high as described above, the control unit 60 detects the current time in the process of step S17 of repeatedly executing the processes of steps S15 to S19 described above. The determined fluorescence intensity is determined to be maximum. Further, when the control unit 60 determines that the fluorescence intensity detected this time is the maximum, the control unit 60 acquires the fluorescence intensity detected this time as the maximum fluorescence intensity and stores the maximum fluorescence intensity in the storage unit 66. Store (step S18).

  Next, the control unit 60 determines whether or not the confocal pinhole member 32 has reached the end position (step S19). Here, when the control unit 60 determines that the confocal pinhole member 32 has not reached the end position, the control unit 60 returns to the process of step S15 described above. And the control part 60 repeatedly performs the process of the above-mentioned step S15-S19 until it judges that the confocal pinhole member 32 reached | attained the end position (refer FIG.5 (c)).

  When the processes of steps S15 to S19 described above are repeatedly executed, the confocal pinhole member 32 is moved from the position of the condensing point 30A of the imaging lens 30 to the end position, as shown in FIG. The When the confocal pinhole member 32 is moved from the position of the condensing point 30 </ b> A of the imaging lens 30 to the end position, the confocal pinhole 48 is more than the condensing point 30 </ b> A of the imaging lens 30. It will be in the state shifted to the side. In a state in which the confocal pinhole 48 is shifted to the imaging lens 30 side from the condensing point 30A of the imaging lens 30, the level of the output signal from the detector 34 is small because the fluorescence 42 incident on the detector 34 is small. Is considered low.

  When the level of the output signal from the detector 34 is low in this way, the control unit 60 detects the fluorescence detected this time in the process of step S17 out of the processes of steps S15 to S19 described above. Judge strength is not maximum. When determining that the fluorescence intensity detected this time is not the maximum, the control unit 60 skips the process of step S18 and maintains the above-described maximum fluorescence intensity. When the confocal pinhole member 32 reaches the end position, the control unit 60 determines that the confocal pinhole member 32 has reached the end position, and the processes in steps S15 to S19 described above are ended.

Thus, in the present embodiment, the confocal pinhole 48 is arranged so that the condensing point 30A of the imaging lens 30 passes through the confocal pinhole 48 when the photo-curing resin 40 is at an arbitrary height position. The imaging lens 30 is moved stepwise to a plurality of scanning positions in the optical axis direction. Further, the intensity of the fluorescence 42 is detected by the detector 34 at each of the plurality of scanning positions. That is, in the present embodiment, the fluorescence intensity is intermittently detected over the movement range (scanning positions P _{U to} P _L ) of the confocal pinhole 48.

  Further, the maximum fluorescence intensity is acquired from the plurality of fluorescence intensities detected by the detector 34, and the maximum fluorescence intensity is obtained as the maximum fluorescence intensity when the photocurable resin 40 is at an arbitrary height position. Stored in the storage unit 66. Further, the maximum fluorescence intensity is stored in the storage unit 66 as the maximum fluorescence intensity when the first wavelength filter 44 is used.

  Subsequently, the control unit 60 controls the switching unit 54 and slides the filter stage 28 to the opposite side to the case of step S11 described above (step S21). That is, the filter stage 28 is slid so that the second wavelength filter 46 is disposed on the optical axes of the objective lens 24 and the imaging lens 30. Thereby, the fluorescence 42 transmitted through the dichroic mirror 22 passes through the second wavelength filter 46. Further, the fluorescence 42 transmitted through the second wavelength filter 46 is collected by the imaging lens 30.

  Next, the control unit 60 controls the first scanning unit 50 to move the confocal pinhole member 32 to the starting position (first scanning position) again as shown in FIG. 5A (step S22). And the control part 60 performs the process of step S23 to step S29. The processing from step S22 to step S29 is the same as the processing from step S12 to step S19 described above except that the second wavelength filter 46 is used.

  As a result of the processing from step S22 to step S29 being performed in this manner, when the second wavelength filter 46 is used, the maximum is the same as when the first wavelength filter 44 is used. Are stored in the storage unit 66.

  As described above, the maximum fluorescence intensity when the first wavelength filter 44 is used and the maximum fluorescence when the second wavelength filter 46 is used when the photo-curing resin 40 is at an arbitrary height position. Strength is acquired.

Next, the control unit 60 performs hardness calculation using the fluorescence 42 wavelength method (step S31). In the process of step S31, h, I _A (h), I _B (h), and H (h) are used. h is an arbitrary height position among a plurality of height positions to which the photocurable resin 40 is moved. I _A (h) is the maximum fluorescence intensity acquired for the above-described arbitrary height position when the first wavelength filter 44 is used. Further, I _B (h) is the maximum fluorescence intensity acquired for the above-described arbitrary height position when the second wavelength filter 46 is used. Further, H (h) is the hardness at the above-described arbitrary height position in the photocurable resin 40. In the control unit 60, the hardness H (h) is calculated using the following equation.

  And the control part 60 preserve | saves the data calculated by the above-mentioned step S31 in the memory | storage part 66 (step S32).

  Next, the control unit 60 determines whether or not the photo-curing resin 40 that is the measurement target has been moved to the end position (step S33). As shown in FIG. 4E, the end position of the photocurable resin 40 is a position where the condensing point 30 </ b> A of the imaging lens 30 exceeds the back surface of the photocurable resin 40. The end position of the photocurable resin 40 is set in advance in consideration of various measurement conditions, the material of the photocurable resin 40, the height dimension of the photocurable resin 40, and the like.

  When the control unit 60 determines that the photo-curing resin 40 to be measured has not been moved to the end position, the control unit 60 returns to the process of step S2 described above. And the control part 60 controls the 2nd scanning part 52, and raises the stand 26 (step S2). When the table 26 is raised, the photo-curing resin 40 moves upward (upward in the height direction of the photo-curing resin 40) with respect to the condensing point 24A of the objective lens 24, and the condensing point 24A of the objective lens 24 is moved. It is moved to a deep position in the depth direction with respect to the surface of the photocurable resin 40 (see, for example, FIG. 4C).

  And the control part 60 repeatedly performs the process of the above-mentioned step S2-S33 until it judges that the photocurable resin 40 which is measurement object was moved to the end position. The photo-curing resin 40 is moved upward every time the process of step S2 is repeatedly executed. Moreover, the light condensing point 24 </ b> A of the objective lens 24 is moved to a deep position in the depth direction with respect to the surface of the photocurable resin 40 by moving the photocurable resin 40 upward.

  As shown in FIG. 4E, when the photocurable resin 40 is moved to the end position, the control unit 60 determines that the photocurable resin 40 has been moved to the end position, and the above-described steps S2 to S33 are performed. This process is terminated.

  Thus, in this embodiment, the acquisition of the maximum fluorescence intensity when each of the first wavelength filter 44 and the second wavelength filter 46 is used, and the movement (rise) of the photocurable resin 40 in the height direction are performed. Repeatedly. And when each of the 1st wavelength filter 44 and the 2nd wavelength filter 46 is used, the maximum fluorescence intensity is acquired about each of several height position of the photocurable resin 40. FIG.

  Furthermore, in the present embodiment, the hardness H (h) is calculated for each of the plurality of height positions of the photo-curing resin 40 by the above formula. In addition, the process of step S11-S29 which performs acquisition of the above-mentioned maximum fluorescence intensity is an example of a "first process". Moreover, the process of step S2 which performs the movement of the photocurable resin 40 in the height direction described above is an example of “second process”.

  After calculating the hardness H (h) for each of the plurality of height positions of the photo-curing resin 40 as described above, the control unit 60 stops the light source 14 (step S34) and ends the series of processes.

  Here, FIGS. 6A to 6E show the relationship between the scanning position of the confocal pinhole 48 and the fluorescence intensity for each of a plurality of height positions of the photo-curing resin 40.

6 (A) is as shown in FIG. 4 (A), when the photocurable resin 40 in height position _{h 0,} i.e., from the surface focal point 24A of the objective lens 24 of the photocurable resin 40 The relationship between the scanning position of the confocal pinhole 48 and the fluorescence intensity when positioned above is shown. Also, FIG. 6 (B), as shown in FIG. 4 (B), when the photocurable resin 40 in height position _{h s,} that is, the surface focal point 24A of the objective lens 24 of the photocurable resin 40 The relationship between the scanning position of the confocal pinhole 48 and the fluorescence intensity when positioned at is shown.

Also, FIG. 6 (C) as shown in FIG. 4 (C), when the photocurable resin 40 in height position _{h m,} i.e., internal focal point 24A of the objective lens 24 of the photocurable resin 40 The relationship between the scanning position of the confocal pinhole 48 and the fluorescence intensity when positioned at is shown. Also, FIG. 6 (D) as shown in FIG. 4 (D), when the height position _{h e} photocurable resin 40, i.e., focal point 24A of the objective lens 24 is the back surface of the photocurable resin 40 The relationship between the scanning position of the confocal pinhole 48 and the fluorescence intensity when positioned at is shown.

6E, when the photocurable resin 40 is at the height position h _n , that is, the condensing point 24A of the objective lens 24 is the back surface of the photocurable resin 40, as shown in FIG. The relationship between the scanning position of the confocal pinhole 48 and the fluorescence intensity when positioned below is shown.

The scanning positions P _U , P _M , and P _L in FIGS. 6B to 6D are the scanning positions P _U , P _M , and P of the confocal pinhole 48 in FIGS. 5A to 5C, respectively. It shows the P _L. As described above, FIGS. 5A to 5C show three scanning positions P _U , P _M , and P _L as an example, but in this embodiment, the scanning positions P _{U to} P are shown. _The confocal pinhole 48 is moved stepwise to a plurality of scanning positions between _L. Although FIG. 6 (C) the fluorescence intensity in the scanning position P _M is the largest, FIG. 6 (B), the fluorescence intensity becomes maximum at a position shifted from the FIG 6 (D) in the scanning position P _M . This is because the position of the condensing point 30 </ b> A of the imaging lens 30 shown in FIG. 5 changes due to the refraction of the excitation light or the fluorescence 42 on the surface of the photocuring resin 40.

  In the present embodiment, the maximum fluorescence intensity among the plurality of fluorescence intensities detected at each of the plurality of scanning positions is employed.

In FIGS. 6A and 6E, detection is performed because the condensing point 24A of the objective lens 24 is out of the photo-curing resin 40 as shown in FIGS. 4A and 4E. The fluorescence intensity is low. Therefore, the above-mentioned hardness H (h) is the maximum fluorescence intensity is calculated in a range of height h _e from the height position h _s obtained is desirable.

  7A to 7C show the measurement results obtained from the photo-curing resin 40 that is uniformly cured in the depth direction with respect to the surface. FIG. 7A shows the relationship between the height position of the photocurable resin 40 and the fluorescence intensity when the first wavelength filter 44 is used. FIG. 7B shows the relationship between the height position of the photocurable resin 40 and the fluorescence intensity when the second wavelength filter 46 is used. FIG. 7C shows the relationship between the height position of the photocurable resin 40 and the hardness calculated by the above formula.

  As shown in FIGS. 7A to 7C, in the photo-curing resin 40 that is uniformly cured in the depth direction with respect to the surface, the height position he from the height position hs of the photo-curing resin 40. A uniform fluorescence intensity can be obtained over a wide range.

  On the other hand, FIGS. 8A to 8C show measurement results obtained from the photo-curing resin 40 in which a shallow portion is cured from the surface. FIG. 8A shows the relationship between the height position of the photocurable resin 40 and the fluorescence intensity when the first wavelength filter 44 is used. FIG. 8B shows the relationship between the height position of the photocurable resin 40 and the fluorescence intensity when the second wavelength filter 46 is used. FIG. 8C shows the relationship between the height position of the photo-curing resin 40 and the hardness calculated by the above formula.

  As shown in FIGS. 8 (A) to 8 (C), in the photo-curing resin 40 in which the shallow part is hardened faster than the deep part from the surface, the shallow part is hardened from the surface. The fluorescence intensity and hardness at a shallow part are higher than the fluorescence intensity and hardness at a deep part from the surface.

  Thus, in this embodiment, a hardness distribution in the depth direction with respect to the surface of the photocurable resin 40 is obtained.

  Next, the operation and effect of this embodiment will be described.

  As described above in detail, in this embodiment, as shown in FIGS. 4A to 4E, the position of the condensing point 24 </ b> A of the objective lens 24 is in the depth direction with respect to the surface of the photocurable resin 40. The photo-curing resin 40 is moved to a plurality of height positions so as to change to Thereby, the fluorescence which generate | occur | produced in each of several height position of the photocurable resin 40 is obtained. The fluorescence generated at each of the plurality of height positions of the photo-curing resin 40 is selectively transmitted through the first wavelength filter 44 and the second wavelength filter 46 shown in FIG. The

  Here, the first wavelength filter 44 and the second wavelength filter 46 have different transmission wavelength characteristics, and excitation light and fluorescence 42 are refracted on the surface of the photocuring resin 40. The position of the light spot changes. Therefore, even if the position of the confocal pinhole 48 is moved according to the height position of the photocurable resin 40, the positions of the condensing points of the confocal pinhole 48 and the imaging lens 30 may not match. . In this case, it is difficult to detect the fluorescence intensity with high accuracy, and it is difficult to realize hardness distribution measurement in the depth direction with respect to the surface of the photocurable resin 40.

However, in this embodiment, the confocal pinhole 48 scans for each of a plurality of height positions of the photo-curing resin 40 (see FIG. 4), as shown in FIGS. It is moved to a plurality of scanning positions between the positions P _{U to} P _L. Of the plurality of fluorescence intensities detected by the detector 34 at each of the plurality of scanning positions, the position of the confocal pinhole 48 and the position of the condensing point 30A of the imaging lens 30 are in a state of being coincident or substantially coincident with each other. The fluorescence intensity is maximized. The maximum fluorescence intensity is adopted as the fluorescence intensity for each of the plurality of height positions of the photo-curing resin 40.

  Therefore, even when the position of the condensing point 30A of the imaging lens 30 changes due to the difference in the transmission wavelength characteristics of the first wavelength filter 44 and the second wavelength filter 46, the refraction of the excitation light, etc. The fluorescence intensity at each of a plurality of height positions can be detected with high accuracy. Thereby, it is possible to obtain a hardness distribution in the depth direction with respect to the surface of the photocurable resin 40.

  Moreover, according to this embodiment, since the hardness distribution of the depth direction with respect to the surface of the photocurable resin 40 can be obtained, for example, compared with the method of measuring the hardness distribution by shaving the photocurable resin 40 from the surface or the like. Measurement time can be shortened.

  Furthermore, from the maximum fluorescence intensity acquired at any height position when each of the first wavelength filter 44 and the second wavelength filter 46 is used, the hardness H (at any height position in the photocurable resin 40). h) is calculated by the above formula. Thereby, hardness distribution can be shown quantitatively.

  Next, a modification of this embodiment will be described.

  In the above embodiment, as shown in FIG. 4, the photocurable resin 40 is moved with respect to the condensing point 24 </ b> A of the objective lens 24 by raising and lowering the table 26. However, for example, the condensing point 24 </ b> A of the objective lens 24 may be moved with respect to the photocurable resin 40 by moving the lens 20 or the like (see FIG. 2) on the light source 14 side in the optical axis direction of the light source 14. .

  In the above embodiment, as shown in FIG. 5, the confocal pinhole member 32 is moved with respect to the condensing point 30 </ b> A of the imaging lens 30 by moving the confocal pinhole member 32. However, a variable focus lens is used for the imaging lens 30 and the focal point of the variable focus lens is changed so that the condensing point 30A of the imaging lens 30 is moved with respect to the confocal pinhole 48. good.

  Moreover, in the said embodiment, when the light source 14 shown by FIG. 1 can be used as a point light source, a single mode fiber etc. may be used instead of the pinhole member 18 provided in the light source 14 side.

  Moreover, in the said embodiment, although two types of wavelength filters, the 1st wavelength filter 44 and the 2nd wavelength filter 46, are used, three or more wavelength filters may be used.

  In the above embodiment, a plurality of wavelength filters are preferably used, but a single wavelength filter may be used. Then, the maximum fluorescence intensity may be acquired for each of the plurality of height positions of the photo-curing resin 40 when this one wavelength filter is used.

  Moreover, in the said embodiment, although the dichroic mirror 22 which reflects and permeate | transmits the light of a specific wavelength is used, a normal beam splitter may be used.

  In the above embodiment, the confocal pinhole 48 is moved stepwise to a plurality of scanning positions in the optical axis direction of the imaging lens 30. Then, the fluorescence intensity is detected at each of the plurality of scanning positions. However, the confocal pinhole 48 may be continuously moved in the optical axis direction of the imaging lens 30. Further, when the confocal pinhole 48 is continuously moved in the optical axis direction of the imaging lens 30, the fluorescence intensity may be continuously detected over the moving range of the confocal pinhole 48, and The point detected intermittently is also good.

  Moreover, in the said embodiment, although the position of the condensing point 24A of the objective lens 24 is moved from the surface side of the photocurable resin 40 to a back surface side, the position of the condensing point 24A of the objective lens 24 is the position of the photocurable resin 40. It may be moved from the back side to the front side.

  In the above embodiment, a mechanism for sliding the table 26 in the horizontal direction may be used. Then, the hardness distribution may be measured in the same horizontal plane of the photocurable resin 40 by sliding the table 26 in the horizontal direction. Further, for example, by using a galvanometer mirror, the condensing point 24A of the objective lens 24 may be scanned, and thereby the hardness distribution may be measured in the same horizontal plane of the photocurable resin 40.

  Further, in the above embodiment, a Nipkow disk having a plurality of pinholes 38 on the circumference is used as the pinhole member 18, and a two-dimensional detector such as a camera may be used as the detector 34. And hardness distribution may be measured about the same horizontal surface of the photocurable resin 40, without making the base 26 slide in a horizontal direction. In this case, it is desirable to detect the maximum fluorescence intensity and calculate the hardness for each of the plurality of pixels of the two-dimensional detector.

  Moreover, in the said embodiment, when the fluorescence intensity detected by the detector 34 becomes below a predetermined threshold value, it may be determined that the measurement is ended in the process of step S33.

  Moreover, in the said embodiment, step S41-S47 shown by FIG. 9 may be performed instead of above-mentioned step S31-S34.

  That is, the control unit 60 obtains the maximum fluorescence intensity when the photocurable resin 40 is at an arbitrary height position for the first wavelength filter 44 and the second wavelength filter 46, and then sets the maximum fluorescence intensity. The data is stored in the storage unit 66 (step S41). Next, the control unit 60 determines whether or not the photo-curing resin 40 that is a measurement target has been moved to the end position (step S42). If the control unit 60 determines that the photocurable resin 40 has been moved to the end position, the control unit 60 stops the light source 14 (step S43).

  Subsequently, the control unit 60 designates an arbitrary position in the depth direction of the photocurable resin 40 (step S44). The designated arbitrary position can be arbitrarily designated by an operator, for example.

  And the control part 60 calculates the hardness H (h) using the fluorescence 42 wavelength method by the above-mentioned formula about the height position h corresponding to the designated arbitrary positions (step S45). Further, the control unit 60 stores the data calculated in step S45 described above in the storage unit 66 (step S46).

  Thus, after the maximum fluorescence intensity corresponding to all the height positions is obtained, the hardness H (h) may be calculated for any designated position.

  As mentioned above, although one embodiment of the technique disclosed in the present application has been described, the technique disclosed in the present application is not limited to the above, and various modifications may be made without departing from the spirit of the present invention. Of course, it is possible.

  In addition, the following additional remark is disclosed regarding one Embodiment of the technique which the above-mentioned this application discloses.

(Appendix 1)
A light source that outputs excitation light;
A beam splitter that reflects the excitation light output from the light source;
An objective lens for condensing the excitation light reflected by the beam splitter onto a photo-curing resin to be measured;
An imaging lens that condenses the fluorescence generated by the photo-curing resin by irradiation of the excitation light collected by the objective lens and transmitted through the objective lens and the beam splitter;
A confocal pinhole member having a confocal pinhole that allows the fluorescence condensed by the imaging lens to pass through;
A detector for detecting the intensity of the fluorescence that has passed through the confocal pinhole;
A first scanning unit that relatively moves the confocal pinhole in the optical axis direction of the imaging lens so that a condensing point of the imaging lens passes through the confocal pinhole;
Relative to the light condensing point of the objective lens in the height direction of the light curable resin relative to the light condensing point of the objective lens so that the position of the light condensing point of the objective lens changes in the depth direction with respect to the surface of the light curable resin. A second scanning unit to be moved;
A hardness distribution measuring device for photo-curing resin.
(Appendix 2)
A control unit for controlling the first scanning unit and the second scanning unit;
The control unit controls the first scanning unit so that a condensing point of the imaging lens passes through the confocal pinhole, and relatively moves the confocal pinhole in the optical axis direction of the imaging lens. The intensity of the fluorescence passing through the confocal pinhole over the range of relative movement of the confocal pinhole is detected by the detector, and the maximum fluorescence intensity among the fluorescence intensities detected by the detector First process to get
The second scanning unit is controlled so that the position of the condensing point of the objective lens changes in the depth direction with respect to the surface of the photocuring resin, and the photocuring resin is moved with respect to the condensing point of the objective lens. By repeatedly performing the second process of relative movement in the height direction of the photocurable resin, the maximum fluorescence intensity is obtained for each of a plurality of height positions where the photocurable resin is relatively moved.
The hardness distribution measuring device for a photocurable resin according to Appendix 1.
(Appendix 3)
A plurality of wavelength filters disposed between the beam splitter and the imaging lens, having different transmission wavelength characteristics, and selectively transmitting the fluorescence;
The said control part repeats said 1st process at the time of using each of these wavelength filters, and said 2nd process, The said photocurable resin at the time of using each of these wavelength filters Obtaining the maximum fluorescence intensity for each of the plurality of height positions of
The hardness distribution measuring device for a photocurable resin according to Supplementary Note 2.
(Appendix 4)
The plurality of wavelength filters include a first wavelength filter and a second wavelength filter,
An arbitrary height position among the plurality of height positions is h,
I _A (h) is the maximum fluorescence intensity acquired for the arbitrary height position when the first wavelength filter is used,
When the maximum fluorescence intensity acquired for the arbitrary height position when the second wavelength filter is used is I _B (h),
The control unit calculates a hardness H (h) for the arbitrary height position in the photo-curing resin, using the following equation:

The hardness distribution measuring device for a photocurable resin according to Supplementary Note 3.
(Appendix 5)
Using a confocal optical system having an objective lens, an imaging lens, and a confocal pinhole, the photocurable resin to be measured is irradiated with excitation light through the objective lens to generate fluorescence from the photocurable resin. And condensing the fluorescence transmitted through the objective lens with the imaging lens,
The confocal pinhole is relatively moved in the optical axis direction of the imaging lens so that the condensing point of the imaging lens passes through the confocal pinhole, and over the relative movement range of the confocal pinhole. Detecting the intensity of the fluorescence passing through the confocal pinhole and obtaining the maximum fluorescence intensity of the detected fluorescence intensity;
Relative to the light condensing point of the objective lens in the height direction of the light curable resin relative to the light condensing point of the objective lens so that the position of the light condensing point of the objective lens changes in the depth direction with respect to the surface of the light curable resin. Move
Including obtaining the maximum fluorescence intensity for each of a plurality of height positions to which the photocurable resin is relatively moved by repeatedly performing acquisition of the maximum fluorescence intensity and relative movement of the photocurable resin. ,
Hardness distribution measurement method for photo-curing resin.
(Appendix 6)
By using a plurality of wavelength filters having different transmission wavelength characteristics, and repeatedly performing the acquisition of the maximum fluorescence intensity when using each of the plurality of wavelength filters and the relative movement of the photocurable resin, Including obtaining the maximum fluorescence intensity for each of the plurality of height positions of the photocurable resin when using each of the plurality of wavelength filters.
The method for measuring the hardness distribution of the photocurable resin according to Appendix 5.
(Appendix 7)
Using the first wavelength filter and the second wavelength filter as the plurality of wavelength filters,
An arbitrary height position among the plurality of height positions is h,
I _A (h) is the maximum fluorescence intensity acquired for the arbitrary height position when the first wavelength filter is used,
When the maximum fluorescence intensity acquired for the arbitrary height position when the second wavelength filter is used is I _B (h),
Using the following formula to calculate the hardness H (h) for the arbitrary height position in the photo-curing resin,

The method for measuring the hardness distribution of the photocurable resin according to Appendix 6.

DESCRIPTION OF SYMBOLS 10 Hardness distribution measuring device 12 Confocal optical system 14 Light source 22 Dichroic mirror (an example of a beam splitter)
24 objective lens 26 stage 28 filter stage 30 imaging lens 32 confocal pinhole member 34 detector 36 excitation light 40 photocurable resin 42 fluorescence 44 first wavelength filter 46 second wavelength filter 48 confocal pinhole 50 first scanning section 52 Second scanning unit 54 Switching unit 60 Control unit

Claims (5)

A light source that outputs excitation light;
A beam splitter that reflects the excitation light output from the light source;
An objective lens for condensing the excitation light reflected by the beam splitter onto a photo-curing resin to be measured;
An imaging lens that condenses the fluorescence generated by the photo-curing resin by irradiation of the excitation light collected by the objective lens and transmitted through the objective lens and the beam splitter;
A confocal pinhole member having a confocal pinhole that allows the fluorescence condensed by the imaging lens to pass through;
A detector for detecting the intensity of the fluorescence that has passed through the confocal pinhole;
A first scanning unit that relatively moves the confocal pinhole in the optical axis direction of the imaging lens so that a condensing point of the imaging lens passes through the confocal pinhole;
Relative to the light condensing point of the objective lens in the height direction of the light curable resin relative to the light condensing point of the objective lens so that the position of the light condensing point of the objective lens changes in the depth direction with respect to the surface of the light curable resin. A second scanning unit to be moved;
A hardness distribution measuring device for photo-curing resin. A control unit for controlling the first scanning unit and the second scanning unit;
The control unit controls the first scanning unit so that a condensing point of the imaging lens passes through the confocal pinhole, and relatively moves the confocal pinhole in the optical axis direction of the imaging lens. The intensity of the fluorescence passing through the confocal pinhole over the range of relative movement of the confocal pinhole is detected by the detector, and the maximum fluorescence intensity among the fluorescence intensities detected by the detector First process to get
The second scanning unit is controlled so that the position of the condensing point of the objective lens changes in the depth direction with respect to the surface of the photocuring resin, and the photocuring resin is moved with respect to the condensing point of the objective lens. By repeatedly performing the second process of relative movement in the height direction of the photocurable resin, the maximum fluorescence intensity is obtained for each of a plurality of height positions where the photocurable resin is relatively moved.
The hardness distribution measuring apparatus of the photocurable resin according to claim 1. A plurality of wavelength filters disposed between the beam splitter and the imaging lens, having different transmission wavelength characteristics, and selectively transmitting the fluorescence;
The said control part repeats said 1st process at the time of using each of these wavelength filters, and said 2nd process, The said photocurable resin at the time of using each of these wavelength filters Obtaining the maximum fluorescence intensity for each of the plurality of height positions of
The hardness distribution measuring device of the photocurable resin according to claim 2. The plurality of wavelength filters include a first wavelength filter and a second wavelength filter,
An arbitrary height position among the plurality of height positions is h,
I _A (h) is the maximum fluorescence intensity acquired for the arbitrary height position when the first wavelength filter is used,
When the maximum fluorescence intensity acquired for the arbitrary height position when the second wavelength filter is used is I _B (h),
The control unit calculates a hardness H (h) for the arbitrary height position in the photo-curing resin, using the following equation:

The hardness distribution measuring device of the photocurable resin according to claim 3. Using a confocal optical system having an objective lens, an imaging lens, and a confocal pinhole, the photocurable resin to be measured is irradiated with excitation light through the objective lens to generate fluorescence from the photocurable resin. And condensing the fluorescence transmitted through the objective lens with the imaging lens,
The confocal pinhole is relatively moved in the optical axis direction of the imaging lens so that the condensing point of the imaging lens passes through the confocal pinhole, and over the relative movement range of the confocal pinhole. Detecting the intensity of the fluorescence passing through the confocal pinhole and obtaining the maximum fluorescence intensity of the detected fluorescence intensity;
Relative to the light condensing point of the objective lens in the height direction of the light curable resin relative to the light condensing point of the objective lens so that the position of the light condensing point of the objective lens changes in the depth direction with respect to the surface of the light curable resin. Move
Including obtaining the maximum fluorescence intensity for each of a plurality of height positions to which the photocurable resin is relatively moved by repeatedly performing acquisition of the maximum fluorescence intensity and relative movement of the photocurable resin. ,
Hardness distribution measurement method for photo-curing resin.