JP6537570B2 - Heating device - Google Patents

Description

  The present invention relates to a heating apparatus used for heat treatment of various plate-like members such as glass substrates and semiconductor lead frames which are constituent members such as liquid crystal display panels and plasma display panels, and other metal plates and synthetic resin plates.

  Conventionally, as a device for heat treating a glass substrate which is a component such as a liquid crystal display panel, a clean gas circulation type clean oven has been used (see, for example, Patent Document 1). In this clean oven, an object to be heat treated such as a glass substrate is accommodated in a thermostatic chamber, and the thermal treatment of the object to be heated is performed using a heating gas circulated by a fan in the thermostatic chamber.

  However, in the case of a clean gas circulation type clean oven, it is easy to adopt a structure that accommodates objects to be heated such as glass substrates in a multistage manner, so although space efficiency is excellent, it is difficult to make the heating temperature distribution uniform. There is a high possibility that the degree of cleanliness will be deteriorated by the stirring of the heating gas. In addition, when the object to be heated is relatively lightweight, the object to be heated may move from the predetermined position due to the circulating convection of the heating gas.

  In order to solve such a problem, a thin layer of far infrared radiation ceramic is coated on both sides of a heat sink having a heat generating body inside, and a double-sided heating type far infrared ray which radiates far infrared rays from both sides by heating the heat sink. A large number of shelf-like heaters consisting of panel heaters are multi-tiered at fixed intervals in the vertical direction in the furnace body, and a heating furnace is developed in which each space part formed between these shelf-like heaters is a drying chamber. (See, for example, Patent Document 2).

  In the case of the heating furnace described in Patent Document 2, a large number of shelf-shaped heaters formed of double-sided heating type far infrared panel heaters are disposed, so each space portion (drying chamber) formed between these shelf-shaped heaters It is excellent in that it can be heated efficiently.

  However, in this heating furnace, heat generated from a large number of shelf-like heaters arranged in the vertical direction tends to ascend in the heating furnace and gather in a region near the top wall in the furnace. The temperature of the upper region is higher than the temperature of the lower region in the furnace, and it is extremely difficult to eliminate the temperature difference between the upper region in the furnace and the lower region in the furnace.

  Therefore, the applicant has proposed a heating device excellent in the uniformity of the temperature distribution and the stability of the degree of cleanness (see, for example, Patent Document 3). This heating device is a distance between a plurality of heating wall bodies disposed facing each other at a distance in a space surrounded by a heat insulating material, heating means provided on the heating wall body, and the heating wall body A plurality of heat transfer walls disposed across one another, a plurality of heat radiation members arranged in a shelf shape between the heat transfer walls, and a heat radiation member provided between the heat radiation members adjacent in the vertical direction And a storage space for the heating material.

JP 2001-56141 A Japanese Patent Laid-Open Publication No. 2001-317872 JP, 2005-352306, A

  Although the heating device described in Patent Document 3 is excellent in the uniformity of the temperature distribution and the stability of the cleanness, the size of the object to be heated which can be accommodated in the accommodation space is limited, so the device deviates from the predetermined size. In fact, it is difficult for the object to be heated to be accommodated in the accommodation space.

  That is, in the heating device described in Patent Document 3, the sizes (widths and thicknesses) of the objects to be heated which can be heat-processed are a plurality of heat transfer wall bodies disposed at a distance between a plurality of heating wall bodies. Since it is determined by the opposing spacing of the formed horizontal holding grooves and the vertical groove width, the object to be heated whose size in the width direction is less than or greater than the opposing spacing, and the groove width in the vertical direction The object to be heated can not be accommodated in the accommodation space.

  Therefore, when the size (width, thickness) of the object to be heated which is the object of the heat treatment is changed, the arrangement interval of the plurality of heat transfer wall bodies is changed to adjust the opposing interval of the holding groove, or the holding groove It is necessary to change the vertical groove width of. For this reason, it is difficult to quickly cope with the size change of the object to be heated.

  Therefore, the problem to be solved by the present invention is to provide a heating device which is excellent in uniformity of temperature distribution and stability of cleanness and can easily cope with at least a change in size in the width direction of the object to be heated. It is in.

  The heating apparatus according to the present invention includes a plurality of heating walls disposed opposite to each other at a distance, heating means provided on the heating walls, and opposing regions of the plurality of heating walls vertically. A plurality of heat radiation members arranged in a shelf shape at a distance, a storage space of a heating target provided between the plurality of heat radiation members, and a heating target housed in the storage space are specified. A holding means capable of being held in a posture and capable of changing the holding range of the object to be heated; and a plurality of support members on which the object to be heated can be placed as the holding means; An expansion / contraction mechanism capable of changing the left and right support bar members and the right side disposed in a state in which the support member horizontally penetrates the left and right two regions separated in the width direction in the accommodation space respectively in the depth direction And the expansion and contraction mechanism is Front left side of the storage space, front side of the support bar member of the left side projecting from the rear side, post on the left front side attached to the rear side, post on the left rear side, and front of the right side of the accommodation space, The right front support post attached to the front and back of the right support bar member projecting from the back, the right back support, the left front support and the left back support; The moving mechanism is characterized in that it is a moving mechanism for expanding and contracting the distance between the right front support and the right rear support.

  With such a configuration, the storage space for the object to be heated is provided with the heating wall on the left and right, and the heat radiation members are disposed on the upper and lower sides. Since the heat is radiated by the heat radiated from the left and right heating walls and the heat radiated from the heat radiating member which generates heat due to the heat conduction from these heating walls, the inside of each housing space Is uniformly heated uniformly, and the uniformity of the temperature distribution is excellent.

  Since the heat generating means is provided only on the heating wall, and each storage space is divided by the heating walls positioned on the left and right and the heat radiation members positioned on the upper and lower sides, Not only the uniformity of the temperature distribution is excellent, but the heat accumulation phenomenon and the overheating phenomenon in the upper space caused by the rise of the hot air does not occur. In addition, since the heated gas is neither stirred nor circulated by the fan, the stability of the degree of cleanliness is excellent, and the object to be heated is not moved by the gas flow.

  Further, since the holding range of the object to be heated by the holding means can be changed according to the width of the object to be heated, it is possible to easily cope with at least the change of the size in the width direction of the object to be heated.

  Here, as the holding means, it is desirable to provide a plurality of support members on which the object to be heated can be placed, and an expansion / contraction mechanism capable of changing the distance between the support members. With such a configuration, the object to be heated can be held in the lower support state by the support member, so that it can be easily coped with even when the thickness of the object to be heated is changed.

  Further, in the heating device according to the present invention, the support member is a support bar on the left side and a support on the right side disposed in a state of horizontally penetrating two left and right areas separated in the width direction in the accommodation space in the depth direction. The expanding and contracting mechanism is a left front support attached to the front surface and a rear support of the left support bar protruding from the front and the rear on the left side of the storage space. And a right front support and a right back support mounted respectively on the front and back of the right support bar projecting from the right front and back of the storage space. It is a moving mechanism which expands and contracts the space between the support post and the support on the left rear side, and the support on the right front side and the support on the right rear side. With such a configuration, it is possible to change the distance between the support bar members only by expanding and contracting the distance between the plurality of columns by the moving mechanism, so that the operability and stability are achieved even with a relatively simple structure. It is possible to form an adjustment means that is superior in quality.

  Furthermore, an operation mechanism capable of changing the holding range of the holding means from outside the facing area of the plurality of heating wall bodies can also be provided. With such a configuration, it is possible to change the holding area of the holding means from the outside of the storage space of the object to be heated, so the operability is further improved.

  On the other hand, it is also possible to provide an exhaust path which can discharge the gas in the storage space, and an air supply path which can introduce the gas into the storage space. With such a configuration, the air in the storage space can be replaced with an inert gas or a specific gas, so the inert gas prevents oxidation of the object to be heated, or uses a reaction with the specific gas. Then, the object to be heated can be subjected to surface treatment.

  According to the present invention, it is possible to provide a heating device which is excellent in uniformity of temperature distribution and stability of cleanness, and can rapidly cope with at least a change in the size in the width direction of the object to be heated.

It is a front view showing a heating device which is an embodiment of the present invention. It is a partially omitted front view of a heating device shown in FIG. It is a right view of a heating device shown in FIG. It is sectional drawing in the AA in FIG. It is sectional drawing in the BB line in FIG. It is a rear view of the heating apparatus shown in FIG.

  Hereinafter, based on Drawing 1-Drawing 6, heating device 100 which is an embodiment of the present invention is explained. As shown in FIGS. 1 to 6, the heating device 100 includes a plurality of heating wall bodies 10L and 10R disposed opposite to each other at a distance, and a plurality of heating means provided on the heating wall bodies 10L and 10R. Of the plurality of heat radiation members 12 arranged in a shelf shape at a distance in the vertical direction in the opposing region of the plurality of heating wall bodies 10L and 10R, and the heat radiation members 12 adjacent in the vertical direction A storage space 14 for the object to be heated 13 provided therebetween and the object to be heated 13 accommodated in the storage space 14 can be held in a substantially horizontal posture, and the holding range of the object to be heated 13 can be changed And 30.

  The upper end side and the lower end side of the heating walls 10L and 10R are connected by the top plate 19 and the bottom plate 20 respectively, and the leg members 21L, 21R, 22L and 22R are attached to the lower surfaces of the heating walls 10L and 10R, respectively The lower ends of the leg members 21L, 21R, 22L, 22R are fixed to the base 23. A plurality of through holes 24 are opened in the horizontal direction from the front side to the back side of the heating walls 10L and 10R, and the electric heaters 11 are detachably inserted into the through holes 24 respectively.

  In heating device 100, heating wall bodies 10L and 10R are formed of stainless steel, and top plate 19, bottom plate 20, leg members 21L, 21R, 22L and 22R and base 23 are the same as heating wall bodies 10L and 10R. The heat radiating member 12 is formed of a stainless steel material, and the heat radiating member 12 is formed of an aluminum plate whose surface is plated with black. However, since it is not limited to these materials, heating wall 10L, 10R, top plate 19, bottom plate 20, leg members 21L, 21R, 22L, 22R, base 23, etc. are made of aluminum or aluminum alloy (or radiation heat radiation). In order to suppress, it can also be formed of aluminum or an aluminum alloy which has been subjected to a non-glossy surface treatment. Further, since the surface treatment of the heat radiation member 12 is not limited to black plating, it is also possible to adopt a surface treatment capable of suppressing the radiation of radiant heat, for example, one having a surface treatment without gloss.

  As the holding means 30, a plurality of support bar members 17L and 17R which are support members capable of mounting the object 13 to be heated, and an expansion and contraction mechanism 40 capable of changing the distance between the support bar members 17L and 17R are provided. . The expansion / contraction mechanism 40 is a moving mechanism for expanding / contracting the spacing between the plurality of support columns 15L, 15R, 16L, 16R, which maintain the plurality of support bar members 17L, 17R in a substantially horizontal posture, and the intervals of the support columns 15L, 15R. And 50.

  The support bar members 17L and 17R are strip-shaped members, and the longitudinal direction thereof is parallel to the depth direction D, and the width direction thereof is disposed in the vertical direction. That is, the plurality of support bar members 17L are attached to the columns 15L and 16L in a state in which the plurality of support bar members 17L horizontally penetrate in the accommodation space 14 in the depth direction D, and similarly, the plurality of support bar members 17R are respectively in the depth direction in the accommodation space 14 It is attached to the columns 15L and 16R in a state of penetrating horizontally to D.

  Locking grooves 15Lt, 16Lt, 15Rt, which open in the depth direction D, immediately above the mounting portions of the support bar members 17L in the columns 15L, 16L and directly above the mounting portions of the support bar members 17R in the columns 15R, 16R, respectively. 16 Rt is provided. Further, on the inner side surfaces (surfaces facing the accommodation space 14) of the heating walls 10L and 10R, a plurality of locking grooves 10Lt and 10Rt are provided at the same height position as the locking grooves 15Lt, 16Lt, 15Rt and 16Rt, respectively. It is formed in the direction D.

  The moving mechanism 50 horizontally moves the drive sliders 51L and 51R connecting the upper ends of the columns 15L and 16L and the upper ends of the columns 15R and 16R, and the female screw holes 51La and 51Ra opened in the drive sliders 51L and 51R in the horizontal direction. The male screw shaft 52 is rotatably disposed in a state of being threaded through and threaded, and an operation handle 53 attached to one end of the male screw shaft 52. The lower ends of the columns 15L and 16L, and the lower ends of the columns 15R and 16R are connected by driven sliders 54L and 54R, respectively, and are horizontally penetrating through holes 54La and 54Ra provided in the driven sliders 54L and 54R. 55 are arranged. The support shaft 55 is disposed in parallel with the male screw shaft 52, and both ends of the support shaft 55 are engaged with the leg members 21L and 21R. The driven sliders 54L and 54R are slidable along the longitudinal direction of the support shaft 55.

  When the operating handle 53 is rotated forward and reverse around the axis 52c of the male screw shaft 52, the main sliders 51L and 51R move away from and approach each other along the direction of the axis 52c, and interlocked therewith, the support 15L, The intervals of 15R and the intervals of the columns 16L and 16R are spaced apart and closer. Along with this, the distance between the plurality of support bar members 17L and 17R separates and approaches, and the holding range of the object 13 to be heated is expanded and contracted in the width direction W of the accommodation space 14.

  Further, an exhaust path 26 capable of exhausting the gas in the accommodation space 14 and an air supply path 27 capable of introducing the gas in the accommodation space 14 to the back wall members 25 respectively disposed on the back side of the plurality of accommodation spaces 14 And are provided. In the heating device 100, the air supply path 27 is disposed below the exhaust path 26 in each back wall member 25. However, the present invention is not limited to this.

  When the heating device 100 is used, the operation handle 53 is rotated according to the width of the object 13 to adjust the distance between the columns 15L and 15R and the distance between the columns 16L and 16R. Can be placed on the support bars 17L and 17R, and a part of the left and right side edges can be accommodated in the locking grooves 15Lt and 16Lt and the locking grooves 15Rt and 16Rt, respectively. . After that, the left and right side edges of the object 13 to be heated are placed on the support bars 17L and 17R in each accommodation space 14, and the left and right side edges are partially engaged with the locking grooves 15Lt and 16Lt and the locking groove, respectively. Since the setting of the object to be heated 13 is completed when the heat source is accommodated in the inside of 15Rt and 16Rt, when energization of the electric heater 11 is started, heat treatment can be performed according to a predetermined program.

  The heating walls 10L and 10R are disposed on the left and right of the housing space 14 of the object to be heated 13, the heat radiation members 12 are disposed on the top and the bottom, and the temperature in the housing space 14 is increased by the heat of the electric heater 11 Since the heat is radiated by the heat radiated from the heating walls 10L and 10R and the heat radiated from the heat radiating member 12 which generates heat by the heat conduction from these heating walls, the respective housing spaces The inside of 14 is uniformly heated uniformly, and the uniformity of the temperature distribution in the entire heating apparatus 100 is also good.

  The electric heaters 11 are provided only on the heating walls 10L and 10R, and the respective housing spaces 14 are partitioned by the heating walls 10L and 10R located on the left and right of the respective heating spaces and the heat radiation members 12 located on the upper and lower sides. Therefore, the uniformity of the temperature distribution in each accommodation space 14 is also excellent, and the heat accumulation phenomenon and the overheating phenomenon in the upper space caused by the rise of the hot air do not occur. In addition, since the heated gas is neither stirred nor circulated by the fan, the stability of the degree of cleanliness is excellent, and the object to be heated is not moved by the gas flow.

  In addition, since the holding range of the object to be heated 13 in the width direction W by the support bar members 17L and 17R can be changed according to the width of the object to be heated 13, at least the change of the size in the width direction of the object 13 to be heated. It can be easily coped with. When the thickness of the object to be heated 13 is excessive, the left and right side edges thereof are placed on the support bars 17L and 17R without being accommodated in the locking grooves 15Lt and 16Lt and the locking grooves 15Rt and 16Rt. It is also possible to carry out the heat treatment in the state of only.

  Further, a plurality of support bar members 17L and 17R are disposed in the housing space 14 and a plurality of support columns 15L, 15R, 16L and 16R for supporting the support bar members 17L and 17R in a substantially horizontal posture, and the support columns 15L, By providing the moving mechanism 50 for expanding and contracting the distance between the 15R and the columns 16L and 16R, the distance between the support bar members 17L and 17R can be changed simply by rotating the operation handle 53, so the structure is simple. Yes, it is excellent in operability and stability. In addition, as shown in FIG. 2, when heat-processing the to-be-heated material 13a whose width | variety is wider than the to-be-heated material 13, it is set as the state which expanded widely the space | interval of support | pillars 15L and 15R and the space | interval The left and right side edge portions 13a can be accommodated in the locking grooves 10Lt and 10Rt of the heating walls 10L and 10R, respectively.

  Furthermore, since the operation handle 53 is disposed outside the facing area of the plurality of heating wall bodies 10L and 10R, changing the holding area of the holding bar members 17L and 17R from the outside of the accommodation space 14 of the object 13 to be heated. Operation is also possible. As shown in FIG. 1, the heating device 100 can be used in the state of being housed in the casing 18 having the heat insulating property, but can also be used without the casing 18.

  On the other hand, in the heating device 100, the air in the storage space 14 can be replaced with the inert gas or the specific gas by providing the exhaust path 26 and the air supply path 27 communicating with the inside of each storage space 14. Therefore, oxidation of the article 13 to be heated can be prevented by the introduction of the inert gas, or the surface treatment can be applied to the article 13 to be heated utilizing the reaction with the introduced specific gas.

  In addition, the heating apparatus 100 mentioned above illustrates the heating apparatus which concerns on this invention, and this invention is not limited to the heating apparatus 100. FIG.

  The heating apparatus according to the present invention can be widely used in the industrial field where heat treatment is performed on various plate-like members such as a glass substrate, a semiconductor lead frame or other metal plates and synthetic resin plates.

10L, 10R Heating wall 10Lt, 10Rt, 15Lt, 15Rt, 16Lt, 16Rt Locking groove 11 Electric heater 12 Heat radiating member 13, 13a Heated object 14 Housing space 15L, 15R, 16L, 16R Strut 17L, 17R Support bar Material 18 casing 19 top plate 20 bottom plate 21L, 21R, 22L, 22R leg member 23 base 24, 54La, 54Ra through hole 25 back wall member 26 exhaust path 27 air supply path 30 holding means 40 expansion / contraction mechanism 50 movement mechanism 51L, 51R Drive slider 51La, 51Ra Female screw hole 52 Male screw shaft 52c Axial center 53 Operation handle 54L, 54R Follower slider 55 Main axis D Depth direction W Width direction

Claims (1)

A plurality of heating walls oppositely disposed at a distance;
Heat generating means provided on the heating wall;
A plurality of heat radiation members made of metal which are arranged in a shelf shape at a distance in the vertical direction in opposing regions of the plurality of heating walls to conduct heat from the heating walls;
The plurality of heating walls and the plurality of heat radiation members define, in the vertical direction, a plurality of accommodation spaces for respectively accommodating the objects to be heated;
It further has an exhaust means capable of exhausting the gas inside each of the plurality of storage spaces to the outside,
The plurality of heating walls facing each other have supporting surfaces extending in the depth direction of the accommodation space at corresponding positions of the respective wall surfaces on the side facing the accommodation space,
The support surface can support the object to be heated in a substantially horizontal posture by receiving the back surface of each side edge of the flat object in the width direction.
A front portion of each of the plurality of storage spaces has an opening defined by the heating wall and the heat radiation member.
The exhaust means, outlet of gas in the receiving space is provided on the back side, and the discharge port faces an opening side of the front,
A heating device characterized by

Images