JP6888766B2 - Heating device - Google Patents

Description

The present invention relates to a heating device used for heat treatment of various plate-shaped members such as a glass substrate, a semiconductor lead frame, and other metal plates and synthetic resin plates, which are constituent members of a liquid crystal display panel and a plasma display panel.

Conventionally, a heated gas circulation type clean oven has been used as a device for heat-treating a glass substrate which is a constituent member of a liquid crystal display panel or the like (see, for example, Patent Document 1). In this clean oven, an object to be heat-treated such as a glass substrate is housed in a constant temperature bath, and the heat-treated object is heat-treated using a heated gas circulated by a fan in the constant temperature bath.

However, in the case of a heated gas circulation type clean oven, it is easy to adopt a structure that accommodates objects to be heated such as a glass substrate in multiple stages, so while it is excellent in space efficiency, it is difficult to make the heating temperature distribution uniform. Therefore, there is a high possibility that the cleanliness will be deteriorated by stirring the heated gas. Further, when the object to be heated is relatively lightweight, the object to be heated may move from a predetermined position due to circulating convection of the heated gas.

In order to solve such a problem, a thin layer of far-infrared radiating ceramics is coated on both sides of a heat radiating plate having a heating element inside, and the heating of this radiating plate radiates far infrared rays from both sides. A heating furnace has been developed in which a large number of shelf-shaped heaters consisting of panel heaters are arranged in multiple stages in the furnace body at regular intervals in the vertical direction, and each space formed between these shelf-shaped heaters is used as a drying chamber. (See, for example, Patent Document 2).

In the case of the heating furnace described in Patent Document 2, since a large number of shelf-shaped heaters composed of double-sided heating type far-infrared panel heaters are arranged, each space (drying chamber) formed between these shelf-shaped heaters. It is excellent in that it can heat efficiently.

However, in this heating furnace, the heat generated from a large number of shelf-shaped heaters arranged in the vertical direction tends to rise in the heating furnace and collect in the region near the top wall in the furnace. The temperature in the upper region is higher than the temperature in the lower region in the furnace, and it is extremely difficult to eliminate such a temperature difference between the upper region in the furnace and the lower region in the furnace.

Therefore, the applicant has proposed a heating device having excellent uniformity of temperature distribution and stability of cleanliness (see, for example, Patent Document 3). This heating device is a distance between a plurality of heating walls arranged to face each other in a space surrounded by a heat insulating material, a heat generating means provided on the heating wall, and a heating wall. A plurality of heat transfer walls arranged apart from each other, a plurality of heat radiation members arranged in a shelf shape between the heat transfer walls, and a cover provided between the heat radiation members adjacent to each other in the vertical direction. It has a storage space for heated materials.

Japanese Unexamined Patent Publication No. 2001-56141 Japanese Unexamined Patent Publication No. 2001-317872 Japanese Unexamined Patent Publication No. 2005-352306

The heating device described in Patent Document 3 is excellent in the uniformity of temperature distribution and the stability of cleanliness, but the size of the object to be heated that can be accommodated in the accommodation space is limited, so that the heating device deviates from the predetermined size. In reality, it is difficult to store the heated object in the storage space.

That is, the size (width, thickness) of the object to be heat-treated in the heating device described in Patent Document 3 is determined by a plurality of heat transfer walls arranged at a distance between the plurality of heating walls. Since it is determined by the facing distance of the formed horizontal holding grooves and the groove width in the vertical direction, the object to be heated whose size in the width direction is less than or larger than the facing distance, and the groove width in the vertical direction whose thickness is the vertical direction. Exceeding objects to be heated cannot be accommodated in the accommodation space.

Therefore, when the size (width, thickness) of the object to be heated, which is the target of heat treatment, is changed, the arrangement interval of a plurality of heat transfer walls can be changed to adjust the facing interval of the holding grooves, or the holding groove can be adjusted. It is necessary to change the groove width in the vertical direction of. Therefore, it is difficult to quickly respond to the size change of the object to be heated.

Therefore, the problem to be solved by the present invention is to provide a heating device which is excellent in the uniformity of temperature distribution and the stability of cleanliness and can easily cope with at least the change in the size of the object to be heated in the width direction. It is in.

The heating device of the present invention has a plurality of heating walls arranged to face each other at a distance, heat generating means provided on the heating wall, and a plurality of heating walls facing each other in the vertical direction. A plurality of heat radiating members arranged in a shelf shape at a distance, a storage space for a heated object provided between the plurality of heat radiating members, and a heated object to be accommodated in the accommodation space are predetermined. A holding means capable of holding the object to be heated and changing the holding range of the object to be heated is provided, and as the holding means, a plurality of support members on which the object to be heated can be placed and a distance between the support members. A support bar material on the left side and a support member on the right side are provided, and the support member is arranged so as to horizontally penetrate two left and right regions separated in the width direction in the accommodation space in the depth direction. The expansion / contraction mechanism is a support bar material of the left side, and the expansion / contraction mechanism is a support column on the left front side and a left back surface attached to the front part and the back part of the left side support bar material protruding from the front side and the back side of the accommodation space, respectively. The front column on the right side of the accommodation space, the front portion of the support bar material on the right side protruding from the back surface, the column on the right front side attached to the back surface, the column on the right rear side, and the left column. It is a moving mechanism that expands or contracts the distance between the front column and the left rear column, and the right front column and the right rear column.

With such a configuration, the storage space for the object to be heated has a structure in which walls for heating are arranged on the left and right and heat radiation members are arranged on the upper and lower sides, and the inside of each storage space is raised by the heat of the heat generating means. Since it is heated by the heat radiated from the left and right heating walls that have been heated and the heat that is radiated up and down from the heat radiating members that generate heat due to the heat conduction from these heating walls, it is within each accommodation space. It is heated evenly and evenly, and the temperature distribution is excellent in uniformity.

The heat generating means is provided only in the heating wall body, and each storage space is partitioned by the heating wall bodies located on the left and right sides and the heat radiating members located above and below, so that the heat generating means is provided in each storage space. Not only is the temperature distribution excellent in uniformity, but heat accumulation and overheating in the upper space due to the rise in hot air do not occur. In addition, since the heated gas is not agitated or circulated by the fan, the cleanliness is excellent and the object to be heated does not move due to the gas flow.

Further, since the holding range of the object to be heated by the holding means can be changed according to the width of the object to be heated, it is possible to easily cope with at least the change in the size of the object to be heated in the width direction.

Here, as the holding means, it is desirable to provide a plurality of support members on which the object to be heated can be placed and an expansion / contraction mechanism in which the interval between the support members can be changed. With such a configuration, the object to be heated can be held in a supported state by the support member, so that even if the thickness of the object to be heated is changed, it can be easily dealt with.

Further, in the heating device of the present invention, the support member is arranged so as to horizontally penetrate two left and right regions separated in the width direction in the accommodation space in the depth direction, respectively, and the support bar material on the left side and the support on the right side. The expansion / contraction mechanism is a bar, and the expansion / contraction mechanism is a support on the left front side and a support on the left back side, which are attached to the front portion and the back portion of the support bar material on the left side protruding from the front surface and the back surface on the left side of the accommodation space, respectively. And the front part on the right side of the accommodation space, the front part of the support bar material on the right side protruding from the back side, the support on the right front side attached to the back part, the support on the right back side, and the support on the left front side. It is a moving mechanism that expands or contracts the distance between the support column and the support column on the left back side, and the support column on the right front side and the support column on the right back side. With such a configuration, the spacing between the support bar members can be changed simply by expanding or contracting the spacing between the plurality of columns by the moving mechanism. Therefore, the structure is relatively simple, yet operability and stability. It is possible to form an adjusting means having excellent properties.

Further, it is also possible to provide an operation mechanism capable of changing the holding range of the holding means from outside the facing regions of the plurality of heating walls. With such a configuration, the holding area of the holding means can be changed from the outside of the storage space for the object to be heated, so that the operability is further improved.

On the other hand, it is also possible to provide an exhaust path capable of discharging the gas in the accommodation space and an air supply path capable of introducing the gas into the accommodation space. With such a configuration, the air in the accommodation space can be replaced with an inert gas or a specific gas, so that the inert gas can prevent oxidation of the object to be heated or utilize the reaction with the specific gas. Then, the surface treatment of the object to be heated can be applied.

INDUSTRIAL APPLICABILITY According to the present invention, it is possible to provide a heating device having excellent uniformity of temperature distribution and stability of cleanliness, and at least capable of quickly responding to a change in the size of an object to be heated in the width direction.

It is a front view which shows the heating apparatus which is an embodiment of this invention. It is a partially omitted front view of the heating apparatus shown in FIG. It is a right side view of the heating apparatus shown in FIG. It is sectional drawing in line AA in FIG. It is sectional drawing in BB line in FIG. It is a rear view of the heating device shown in FIG.

Hereinafter, the heating device 100 according to the embodiment of the present invention will be described with reference to FIGS. 1 to 6. As shown in FIGS. 1 to 6, the heating device 100 includes a plurality of heating walls 10L and 10R arranged to face each other at a distance, and a plurality of heating means provided on the heating walls 10L and 10R. The electric heater 11 of the above, a plurality of heat radiating members 12 arranged in a shelf shape with a vertical distance between the facing regions of the plurality of heating walls 10L and 10R, and the heat radiating members 12 adjacent to each other in the vertical direction. The storage space 14 of the heated object 13 provided between them and the heated object 13 housed in the storage space 14 can be held in a substantially horizontal posture, and the holding range of the heated object 13 can be changed. Means 30 and.

The upper end side and the lower end side of the heating wall bodies 10L and 10R are connected by a top plate 19 and a bottom plate 20, respectively, and leg members 21L, 21R, 22L and 22R are attached to the lower surfaces of the heating wall bodies 10L and 10R, respectively. The lower ends of these leg members 21L, 21R, 22L, 22R are fixed to the base 23. A plurality of through holes 24 are formed in the horizontal direction from the front side to the back side of the heating walls 10L and 10R, and the electric heater 11 is detachably inserted into each of these through holes 24.

In the heating device 100, the heating walls 10L and 10R are made of stainless steel, and the top plate 19, bottom plate 20, leg members 21L, 21R, 22L, 22R and the base 23 are the same as the heating walls 10L and 10R. The heat radiating member 12 is made of stainless steel as a material, and is made of an aluminum plate having a black plating on its surface. However, since it is not limited to these materials, the heating wall body 10L, 10R, the top plate 19, the bottom plate 20, the leg members 21L, 21R, 22L, 22R, the base 23, etc. are made of aluminum or an aluminum alloy (or radiant heat is dissipated). It can also be formed of (aluminum or aluminum alloy) with a matte surface treatment to suppress it. Further, since the surface treatment of the heat radiating member 12 is not limited to black plating, a surface treatment capable of suppressing the emission of radiant heat, for example, a surface treatment having no gloss can be adopted.

As the holding means 30, a plurality of support bar members 17L and 17R, which are support members on which the object to be heated 13 can be placed, and an expansion / contraction mechanism 40 capable of changing the interval between the support bar members 17L and 17R are provided. .. The expansion / contraction mechanism 40 includes a plurality of columns 15L, 15R, 16L, 16R that hold the plurality of support bar members 17L, 17R in a substantially horizontal posture, and a moving mechanism that expands / contracts the intervals between the columns 15L, 15R and the columns 16L, 16R. It has 50 and.

The support bar members 17L and 17R are strip-shaped members, and are arranged in such a state that the longitudinal direction thereof is parallel to the depth direction D and the width direction thereof is the vertical direction. That is, the plurality of support bar members 17L are attached to the columns 15L and 16L in a state where they horizontally penetrate the accommodation space 14 in the depth direction D, and similarly, the plurality of support bar members 17R each penetrate the accommodation space 14 in the depth direction. It is attached to the columns 15L and 16R in a state of horizontally penetrating D.

Locking grooves 15Lt, 16Lt, 15Rt, which open in the depth direction D, are located directly above the mounting portion of the support bar material 17L on the columns 15L and 16L and directly above the mounting portion of the support bar material 17R on the columns 15R and 16R, respectively. 16 Rt is provided. Further, on the inner surface of the heating walls 10L and 10R (the surface facing the accommodation space 14), a plurality of locking grooves 10Lt and 10Rt are provided at the same height positions as the locking grooves 15Lt, 16Lt, 15Rt and 16Rt, respectively. It is formed in the direction D.

The moving mechanism 50 horizontally connects the upper ends of the columns 15L and 16L and the upper ends of the columns 15R and 16R to the leading sliders 51L and 51R and the female screw holes 51La and 51Ra provided in the driving sliders 51L and 51R, respectively. It includes a male screw shaft 52 that is rotatably arranged in a state of being screwed through and screwed, and an operation handle 53 that is attached to one end of the male screw shaft 52. The lower ends of the columns 15L and 16L and the lower ends of the columns 15R and 16R are connected by the driven sliders 54L and 54R, respectively, and the support shafts are horizontally penetrated through the through holes 54La and 54Ra provided in the driven sliders 54L and 54R. 55 is arranged. The support shaft 55 is arranged parallel to the male screw shaft 52, and both ends of the support shaft 55 are locked to the leg members 21L and 21R, respectively. The driven sliders 54L and 54R can slide along the longitudinal direction of the support shaft 55.

When the operation handle 53 is rotated forward and reverse about the center of the male screw shaft 52 at the axis 52c, the main sliders 51L and 51R are separated from each other and approach each other along the direction of the axis 52c, and in conjunction with this, the support columns 15L, The intervals of 15R and the intervals of the columns 16L and 16R are separated and approached. Along with this, the intervals between the plurality of support bar members 17L and 17R are separated and approached, so that the holding range of the object to be heated 13 is expanded or contracted in the width direction W of the accommodation space 14.

Further, an exhaust path 26 capable of discharging gas in the accommodation space 14 and an air supply path 27 capable of introducing gas into the accommodation space 14 are provided in the back wall members 25 arranged on the back side of each of the plurality of accommodation spaces 14. And are provided. In the heating device 100, the air supply path 27 is arranged below the exhaust path 26 in each back wall member 25, but the present invention is not limited to this, so that the back wall member 25 can be arranged upside down.

When the heating device 100 is used, the operation handle 53 is rotated according to the width of the object to be heated 13, and the intervals between the columns 15L and 15R and the intervals between the columns 16L and 16R are adjusted to adjust the left and right side edges of the object 13 to be heated. Can be placed on the support bars 17L and 17R, respectively, and a part of the left and right side edges is set so as to be accommodated inside the locking grooves 15Lt and 16Lt and the locking grooves 15Rt and 16Rt, respectively. .. After that, in each accommodation space 14, the left and right side edges of the object to be heated 13 are placed on the support bars 17L and 17R, respectively, and a part of the left and right side edges is placed in the locking grooves 15Lt, 16Lt and the locking grooves, respectively. When the objects to be heated 13 are set inside the 15 Rt and 16 Rt, the electric heater 11 can be energized to perform the heat treatment according to a predetermined program.

In the accommodation space 14 of the object to be heated 13, heating walls 10L and 10R are arranged on the left and right, and heat radiation members 12 are arranged on the upper and lower sides. Because it is heated by the heat radiated from the heating walls 10L and 10R and the heat radiated up and down from the heat radiating member 12 that generates heat due to the heat conduction from these heating walls, each storage space The inside of 14 is heated evenly and evenly, and the uniformity of the temperature distribution in the entire heating device 100 is also good.

The electric heater 11 is provided only on the heating walls 10L and 10R, and each accommodation space 14 is partitioned by the heating walls 10L and 10R located on the left and right sides of the electric heater 11 and the heat radiating members 12 located on the upper and lower sides. Therefore, the uniformity of the temperature distribution in each accommodation space 14 is also excellent, and the heat accumulation phenomenon and the overheating phenomenon in the upper space due to the rise of hot air do not occur. Further, since the heated gas is not agitated or circulated by the fan, the stability of the cleanliness is excellent, and the object to be heated does not move due to the gas flow.

Further, since the holding range of the object to be heated 13 in the width direction W by the support bar members 17L and 17R can be changed according to the width of the object to be heated 13, at least the size of the object to be heated 13 in the width direction can be changed. It can be easily dealt with. When the thickness of the object to be heated 13 is excessive, the left and right side edges thereof are placed on the support bars 17L and 17R without being accommodated in the locking grooves 15Lt and 16Lt and the locking grooves 15Rt and 16Rt. It is also possible to heat-treat in the state of only.

Further, a plurality of support bar members 17L, 17R are arranged in the accommodation space 14, and a plurality of columns 15L, 15R, 16L, 16R and columns 15L, which support these support bar members 17L, 17R in a substantially horizontal posture, respectively. By providing the moving mechanism 50 that expands and contracts the interval of 15R and the interval of the columns 16L and 16R, the interval of the support bar members 17L and 17R can be changed only by rotating the operation handle 53, so that the structure is simple. It is also excellent in operability and stability. As shown in FIG. 2, when the heated object 13a having a width wider than the heated object 13 is heat-treated, the intervals between the columns 15L and 15R and the intervals between the columns 16L and 16R are greatly widened, and the objects to be heated are set. The left and right side edges of 13a can be accommodated in the locking grooves 10Lt and 10Rt of the heating walls 10L and 10R, respectively.

Further, since the operation handle 53 is arranged outside the facing regions of the plurality of heating walls 10L and 10R, the holding regions of the holding bar members 17L and 17R are changed from the outside of the accommodating space 14 of the object to be heated 13. Is possible and the operability is good. As shown in FIG. 1, the heating device 100 can be used in a state of being housed in a casing 18 having a heat insulating property, but can also be used in a state without the casing 18.

On the other hand, in the heating device 100, it is possible to replace the air in the accommodation space 14 with an inert gas or a specific gas by providing the exhaust path 26 and the air supply path 27 communicating with each accommodation space 14. Therefore, it is possible to prevent the object to be heated 13 from being oxidized by introducing an inert gas, or to apply a surface treatment to the object to be heated 13 by utilizing the reaction with the introduced specific gas.

The heating device 100 described above exemplifies the heating device according to the present invention, and the present invention is not limited to the heating device 100.

The heating device according to the present invention can be widely used in the industrial field of heat-treating various plate-shaped members such as a glass substrate, a semiconductor lead frame, or another metal plate or synthetic resin plate.

10L, 10R Heating wall 10Lt, 10Rt, 15Lt, 15Rt, 16Lt, 16Rt Locking groove 11 Electric heater 12 Heat radiation member 13, 13a Heated object 14 Storage space 15L, 15R, 16L, 16R Support bar 17L, 17R Support bar Material 18 Casing 19 Top plate 20 Bottom plate 21L, 21R, 22L, 22R Leg member 23 Base 24, 54La, 54Ra Through hole 25 Back wall member 26 Exhaust path 27 Air supply path 30 Holding means 40 Expansion / contraction mechanism 50 Movement mechanism 51L, 51R Main slider 51La, 51Ra Female screw hole 52 Male screw shaft 52c Axis center 53 Operation handle 54L, 54R Driven slider 55 Spindle D Depth direction W Width direction

Claims (1)

Multiple heating walls arranged facing each other at a distance,
The heat generating means provided on the heating wall and
A plurality of metal heat radiating members , which are arranged in a shelf shape at intervals in the vertical direction in the facing regions of the plurality of heating walls and conduct heat from the heating walls, are provided.
The plurality of heating walls and the plurality of heat radiating members define a plurality of accommodating spaces for accommodating objects to be heated in the vertical direction.
Further having a supply means for supplying an inert gas or a specific gas from the back to the front of each of the plurality of accommodation spaces in the depth direction.
The front portion of each of the plurality of accommodation spaces has an opening defined by the heating wall body and the heat radiating member.
In the supply means, the discharge port of the gas to be supplied is provided on the back side and faces the opening side of the front portion, and the discharge port is arranged on the back side of each of the plurality of accommodation spaces. A heating device , which is provided on a back wall member.

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