JP6551670B2 - Insertion light source - Google Patents

Description

  The present invention provides a first magnet row in which a large number of magnets are arranged in a row, a first magnet support on which the first magnet row is attached and supported, a plurality of magnets in a row, A second magnet array facing the first magnet array via a gap; a second magnet support to which the second magnet array is attached and supported; and the first magnet support for changing the size of the gap. The present invention relates to an insertion light source having a gap driving mechanism for driving a body and / or the second magnet support in a vertical direction, and a drive interlocking mechanism for connecting the gap driving mechanism and the magnet support. .

  When an electron beam accelerated to near the speed of light in a vacuum is bent in a magnetic field, emitted light is emitted in the tangential direction of the movement trajectory of the electron beam, and this is called synchrotron radiation. A light source that generates synchrotron radiation is installed in the straight section of an electron storage ring (electron beam storage ring), and various technologies that utilize characteristics such as high directivity, high intensity, and high polarization are utilized. Research is underway to make it easier. Today's electron storage rings are provided with a plurality of insertion light sources (undulators), which are high-intensity light sources with a higher beam current and a smaller beam cross-sectional area.

  As such an insertion light source, for example, an insertion light source disclosed in Patent Document 1 below is known. The insertion light source has a configuration in which a first magnet row in which a large number of magnets are arranged in a row and a second magnet row in which a large number of magnets are arranged in a row face each other through a gap. The size of the gap can be changed by moving the magnet row vertically in the vertical direction by the gap drive mechanism. The gap driving mechanism, the magnet array, and the like are coupled onto a common base, and the common base is mounted on the mounting surface via a plurality of three or more pedestals.

  By the way, the ground (mounting surface) on which the insertion light source is placed has a soil piled on the bedrock. If there is a lot of earth and sand between the ground and the bedrock, the ground becomes soft. If only the place where the ground is soft is subsidized (unequal subsidence), the straightness of the beam line of the installed insertion light source is impaired, and there is a possibility that the positional relationship of the machine parts is distorted. Due to such misalignment, the magnetic field intensity distribution initially set in the magnetic field generation space formed between the opposing magnet arrays may be disturbed, and desired synchrotron radiation may not be obtained.

  In the fields other than the insertion light source, various structures corresponding to the uneven settlement as described above are disclosed. For example, the following Patent Document 2 discloses a repair method when a support portion that supports a structure (floating bridge) sinks unevenly. In this structure, the load of the floor slab is supported on the surface through the rubber shoe and the support plate. When the floor slab sinks unevenly and the straightness cannot be maintained, a jack is installed between the abutment and the floor slab, and a spacer is placed in the gap between the floor slab and the support plate to repair the uneven settlement. It is carried out.

  Patent Document 3 below relates to a maintenance device for a building structure. This apparatus also maintains a straightness by lifting the base body using a jack when it sunk unevenly over time.

JP 2001-143899 A JP 2000-1817 A JP-A-8-218409

  The structures of Patent Documents 2 and 3 require a work of lifting the base using a jack when uneven settlement occurs. Therefore, there is a problem that the work is complicated. Further, when the above structure is applied to the insertion light source, there is a problem that the insertion light source cannot be used while the work is performed.

  The present invention has been made in view of the above circumstances, and an object thereof is to provide an insertion light source that can be automatically repaired within the required accuracy even if the straightness is impaired by unequal settlement.

In order to solve the above problems, an insertion light source according to the present invention is
A first magnet row in which a large number of magnets are arranged in a row, a first magnet support body to which the first magnet row is attached and supported, a plurality of magnets are arranged in a row, and the first magnet row A second magnet row facing through a gap, a second magnet support to which the second magnet row is attached and supported, and for changing the size of the gap, the first magnet support and / or A gap drive mechanism for driving the second magnet support in the vertical direction, a drive interlocking mechanism for connecting the gap drive mechanism and the magnet support, and a support frame for supporting the gap drive mechanism; The support frame is coupled, and a common base mounted on the mounting surface via a plurality of pedestals,
The plurality of pedestals are configured by a first pedestal having a fixed height and a second pedestal having contraction in the height direction by the action of a spring.

  The operation and effect of the insertion light source with this configuration will be described. As basic components of the insertion light source, the first and second magnet arrays facing each other, the first and second magnet supports for attaching and supporting them, the gap driving mechanism for driving the magnet support, and the gap driving mechanism are supported. There are various members such as a support frame. These members are mounted on the base, and the base is further placed on the placement surface via the pedestal. This pedestal is composed of a first pedestal and a second pedestal, and the second pedestal has an appropriate contractibility in the height direction by the action of a spring. If uneven settlement occurs, a force to maintain the straightness of the base by the action of the spring acts by providing the second pedestal. Therefore, it is possible to save time and effort of repairing work using a jack, and to repair naturally by the force of a spring. As a result, it is possible to provide an insertion light source that can be automatically repaired within the required accuracy even if the straightness is impaired by uneven settlement.

  It is preferable that a total of three first pedestals according to the present invention are installed on the front side and the rear side.

  By making the plane defined by the three first pedestals coincide with the horizontal plane, the insertion light source can be easily mounted.

  In the present invention, it is preferable that one first pedestal is disposed on the front side and two on the rear side. With this arrangement, the insertion light source is supported by the first pedestal at three points, thereby simplifying the adjustment of the height of the insertion light source, other peripheral devices, and the horizontal level of the insertion light source.

  The second pedestal according to the present invention preferably includes a coil spring interposed between the lower plate and the upper plate, and an adjusting mechanism for adjusting the amount of compression of the coil spring.

  By adopting a structure in which the coil spring is sandwiched between the lower plate and the upper plate, the spring force of the coil spring can be easily adjusted. For example, by changing the distance between the lower plate and the upper plate, the pressure amount of the coil spring can be changed, and the spring force can be adjusted. As a result, an appropriate spring force can be set, and as a result, automatic restoration against uneven settlement can be performed with high accuracy.

  The second pedestal according to the present invention is preferably provided with a damper at a central portion in plan view, and the coil spring is disposed around the damper.

  By providing the damper, it is possible to suppress the influence of the vibration of the placement surface from being transmitted to the main body of the insertion light source. Further, by disposing the damper at the central portion and disposing the coil spring around it, the spring force can be configured to act evenly around the damper.

  The damper according to the present invention preferably has a base mounting surface on which the base is mounted, and preferably includes a connecting member that connects the damper and the upper plate.

  According to this configuration, the weight of the constituent member of the insertion light source acts on the base mounting surface of the damper. The damper and the upper plate are connected by a connecting member. Accordingly, a force acts in the direction in which the coil spring is compressed by the weight of the constituent member. Even if unequal sinking occurs due to this compression force, it is possible to maintain the straightness of the base by resetting the spring force.

  In the present invention, it is preferable that the straightness of the base mounting surface is adjusted by the adjusting mechanism.

  Thereby, the straightness of the mounting surface can be maintained at low cost, and the base can be mounted in an appropriate state.

The figure which shows the front view of the insertion light source which concerns on this embodiment CC sectional view of FIG. AA sectional view of FIG. A rear perspective view showing a state in which only the second support frame is removed. Front perspective view showing a state where only the second support frame is removed External perspective view of insertion light source Longitudinal sectional view showing the configuration of a gap drive mechanism for moving the magnet support up and down A longitudinal sectional view showing a spring interlocking mechanism for connecting the cancel spring mechanism and the magnet support. A perspective view showing a configuration of a cancel spring mechanism Perspective view of the insertion light source seen from the bottom side The figure which shows the structure of a 2nd base The figure which shows the structure of a 1st base Diagram explaining the principle of pedestal support Diagram explaining the principle of pedestal support

  A preferred embodiment of an insertion light source according to the present invention will be described with reference to the drawings. FIG. 1 is a diagram illustrating a front view of an insertion light source according to the present embodiment. FIG. 2 is a cross-sectional view taken along a line C-C in FIG. FIG. 3 is a cross-sectional view taken along the line A-A of FIG. FIG. 4 is a rear perspective view showing a state in which only the second support frame supporting the cancel spring mechanism is removed. FIG. 5A is a front perspective view showing a state in which only the second support frame is removed. FIG. 5B is a perspective view of the assembled state. 6 is a longitudinal cross-sectional view (a cross-sectional view taken along a line BB in FIG. 1 and viewed from a direction different from FIG. 2) showing a configuration of a gap driving mechanism that moves the magnet support up and down. 7 is a longitudinal sectional view showing a drive interlocking mechanism of a cancel spring mechanism and a magnet support (a sectional view taken along a line CC in FIG. 1 and viewed from a different direction from the line CC sectional view in FIG. 2). It is. FIG. 8 is a perspective view of the insertion light source as viewed from the bottom side.

  In the insertion light source, a first magnet row M1 in which a large number of magnets are arranged in a row and a second magnet row M2 in which a large number of magnets are similarly arranged in a row face each other via a gap δ. An electron beam passes through this gap space. In addition, as a magnet row | line, various structural examples, such as what is disclosed by Unexamined-Japanese-Patent No. 2014-13658 are considered in addition to what was mentioned as patent document 1, for example. Therefore, it is not limited to a specific arrangement of magnets.

  The first magnet row M 1 is supported by the first magnet support 1, and the second magnet row M 2 is supported by the second magnet support 2. For example, individual magnets constituting the first magnet array M1 are coupled to the first magnet support 1 by bolts or the like. The same applies to the second magnet array M2.

  The 1st magnet row | line | column M1 and the 2nd magnet row | line | column M2 are installed in the inside of the vacuum chamber 3 by which an inside is maintained by ultra high vacuum. The vacuum chamber 3 has a cylindrical cross-sectional shape, and has an elongated shape along the horizontal direction (the traveling direction of the electron beam) in the drawing as shown in FIGS. 1 and 3. The size of the gap δ can be changed by a gap driving mechanism described later. The common base 10 is mounted on the mounting surface by seven pedestals 4 in total, three on the front side and four on the rear side when the front view of FIG. 1 is viewed from the front side (FIGS. 1 to 4 and FIG. 8). Details regarding the base 4 will be described later.

  The vacuum chamber 3 is supported on the common base 10 by the support 60 via the first horizontal frame member 301. As shown in FIGS. 5A and 5B, the lower part of the support body 60 is installed on the first horizontal frame member 301 installed on the common base 10, and is coupled by mechanical means (not shown).

  The common base 10 includes an upper plate 100, a pair of left and right side plates 101, and a lower plate 102. A pedestal 4 is provided under the lower plate 102. On top of the top plate 100, reinforcing top plates 103 are further provided at three locations.

  The first support frame 30 is a frame for supporting a gap driving mechanism for changing the gap δ. The second support frame 20 is a frame for supporting the cancel spring mechanism. Each frame is composed of a plurality of frame members.

  As shown in FIG. 4, the second support frame 20 includes second vertical frame members 200 and 201. It comprises a second vertical frame member 200 located at both ends and three second vertical frame members 201 located between them. The second vertical frame member 200 has a rectangular cross-sectional shape cut along a horizontal plane. The second vertical frame member 201 has a cylindrical rectangular shape or a C-shaped cross section cut along a horizontal plane. The second vertical frame members 200, 201 have legs 200 a, 201 a at their lower ends, and these legs 200 a, 201 a are connected to the reinforcing upper surface plate 103 of the common base 10 by mechanical means such as bolts. The

  On the rear side of the second support frame 20, a pair of reinforcing frames 202 extending in the left-right direction are provided vertically. The reinforcing frame 202 has a cylindrical shape with a rectangular cross section, and is connected to the five second vertical frame members 200 and 201 by a method such as bolts or welding.

  A second horizontal frame member 203 is provided on the front side of the second support frame 20. The second horizontal frame member 203 is provided on each of the upper and lower sides of the vacuum chamber 3, and a C-shaped reinforcing frame 204 is provided between the upper and lower second horizontal frame members 203 (see FIGS. 4 and 5A). ). On the tip side of the second horizontal frame member 203, an arrangement space S1 for mounting the cancellation spring mechanism 40 is provided. Ten placement spaces S1 are provided corresponding to the number of cancel spring mechanisms 40. 4 and 5A are illustrated separately from the cancel spring mechanism 40 for easy understanding of the configuration of the second support frame 20. Since the cancel spring mechanisms 40 are arranged at 10 locations respectively in the vertical direction, a total of 20 cancel spring mechanisms 40 are provided. The number of cancel spring mechanisms 40 can be set as appropriate.

  In order to form the arrangement space S1, the second horizontal frame member 203 has wall surface plates 203a extending in the front-rear direction and wall surface plates 203b, 203c extending in the left-right direction. Further, a bottom plate 203d for placing the cancel spring mechanism 20 thereon is provided. The cancel spring mechanism 40 is fixed to the arrangement space S1 surrounded by the wall surface plates 203a, 203b, 203c, and 203d. Further, a hole 203e is formed in the approximate center of the bottom plate 203d. The hole 203e is a hole through which the connecting rod 420 passes, and will be described later in detail.

  As shown in FIGS. 4 and 5A, four second horizontal frame members 203 extend so as to protrude from the rear side to the front side. Two cancel spring mechanisms 40 can be mounted on the second horizontal frame members 203 on the left and right sides, and three cancel spring mechanisms 40 can be mounted on each of the two second horizontal frame members 203 in the center. The three first vertical frame members 300 are embedded between the four second horizontal frame members 203. Accordingly, the second horizontal frame member 203 is configured to be disposed on both the left and right sides or one side of the first vertical frame member 300. By providing the connection frame 205 on the front side of the four second horizontal frame members 203, the front side of the second horizontal frame member 203 is reinforced so as not to be deformed.

  The first support frame 30 is for supporting the gap drive mechanism 50, and includes three first vertical frame members 300. The first vertical frame member 300 is formed in a tubular shape, and the cross-sectional shape cut along the horizontal surface has a rectangular shape. First horizontal frame members 301 are provided above and below the first vertical frame member 300, respectively. Legs 302 are provided on the bottom surface of the first horizontal frame member 301 on the lower side, and the first support frame 30 is connected to the common base 10 through mechanical means such as bolts via the legs 302. The first horizontal frame member 301 is preferably supported by the legs 302 in order to suppress the deflection of the gap drive mechanism.

  A connecting frame member 303 for connecting the upper first horizontal frame members 301 to each other is provided on the rear side. The first horizontal frame member 301 extends in the front-rear direction, and a connecting frame member 304 for mounting the gap driving mechanism 50 is provided on the front side. The connecting frame member 304 on the front side of the first horizontal frame 301 has a C-shaped cross section with an open top. Also, the connecting frame member 304 on the front side of the first horizontal frame 301 is coupled to the upper side of the first horizontal frame member 301.

  As shown in FIGS. 4 and 5B, the upper first horizontal frame member 301 is disposed above the second horizontal frame member 203. Thereby, arrangement space can be used effectively so that mutual interference (contact) does not occur. The upper and lower positional relationship may be reversed.

<Configuration of vertical frame member>
Further, the first vertical frame member 300 and the second vertical frame member 201 are arranged at the same position and connected to the common base 10, but are arranged so as not to interfere (contact) each other. Specifically, the first vertical frame member 300 has a rectangular cross-sectional shape in the horizontal direction, and the second vertical frame member 201 is disposed so as to surround it. The horizontal cross-sectional shape of the second vertical frame member 201 is substantially C-shaped.

<Gap drive mechanism>
The gap driving mechanism 50 for changing the size of the gap δ will be described. The connecting frame member 304 of the first support frame 30 is provided with a motor 500 as a drive source and a conversion unit 501. The motor 500 is disposed at two locations, and the conversion unit 501 is disposed at three locations. The rotation of the motor 500 is transmitted to the converter 501 via the horizontal axis 502, which converts rotation about the horizontal axis into rotation about the vertical axis. Specifically, it is configured by a bevel gear or the like.

  As shown in FIG. 6, the rotation converted around the vertical axis is transmitted to a rotation screw 505 constituting a ball screw mechanism via a speed reducer 503 and a coupling 504. The support 506 linearly moves in the vertical direction by the rotation of the rotating screw 505. A vertical LM guide 507 for guiding the support 506 is provided. The vertical LM guide 507 is attached to a member constituting the first support frame 30. Therefore, the support body 506 can be moved up and down by driving the motor 50.

  The first magnet support 1 supporting the first magnet array M 1 is connected to the LM guide support 7 via the first connection shaft 5 and the second connection shaft 6. The plurality of members are firmly connected by mechanical means such as bolts and nuts. A horizontal LM guide 8 is coupled to the LM guide support 7. Therefore, when the support body 506 moves up and down, the LM guide support body 7, the second connection shaft 6, the first connection shaft 5, the first magnet support body 1, and the first magnet row M1 move up and down integrally therewith. As a result, the size of the gap δ can be changed. In addition, although the gap drive mechanism 50 for moving the 2nd magnet row | line | column M2 up and down is provided similarly, since the structure is the same, description is abbreviate | omitted. The first connecting shaft 5, the second connecting shaft 6, and the LM guide support 7 correspond to a drive interlocking mechanism for connecting the gap drive mechanism 50 and the magnet support.

  The horizontal LM guide 8 is provided to absorb the change when the length of the first magnet support 1 changes in the horizontal direction due to thermal expansion. Therefore, the influence of thermal expansion is prevented from affecting the gap drive mechanism 50 and the drive interlocking mechanism.

  As shown in FIG. 3, the support 506 has an inverted T shape in a front view. A ball screw mechanism is formed in the vertical portion of the support 506, and this vertical portion is guided by the vertical LM guide 507. A horizontal LM guide 8 is attached to the back surface of the horizontal portion of the support 506.

  In the above configuration, the first connecting shaft 5, the second connecting shaft 6, the LM guide support 7 and the ball screw mechanism, which are drive interlocking mechanisms, are located vertically above the gap δ. In other words, the gap drive mechanism 50 and the drive interlocking mechanism can be prevented from being deformed by being arranged vertically above the gap δ on which the suction force acts. The same applies to the gap driving mechanism 50 located below the gap δ.

<Spring interlocking mechanism of cancel spring mechanism and magnet support>
FIG. 7A shows a spring interlock mechanism that connects the cancel spring mechanism 40 and the first magnet support 1. The connecting rod 420 is integrally coupled to the second connecting shaft 6. An engagement member 421 is attached to the upper end side of the connecting rod 420. The engagement member 421 is provided with an engagement surface 421 a formed by a conical surface. The engagement surface 421a can engage with the engagement surface 409a of the engagement member 409 of the cancel spring mechanism 40.

  Note that a hole 400 a is formed in the fixed plate 400 and a hole 203 e is also formed in the bottom plate 203 in order to penetrate the connecting rod 420. Furthermore, a hole 506a and a hole 7a are also formed in the support body 506 and the LM guide support body 7, respectively. The connecting rod 420 is sized so as not to contact with the series of holes.

<Gap change operation>
The operation when changing the gap δ will be described. The gap driving mechanism 50 moves the first magnet support 1 downward. When the first magnet support 1 moves downward, the first connection shaft 5, the second connection shaft 6, and the connection rod 420 also move downward integrally. 7A and 7B, when the connecting rod 420 is lowered, the engaging surface 421a of the engaging member 421 is engaged with the engaging surface 409a of the engaging member 409 of the cancel spring mechanism 40, and the engaging surface 409a is pushed downward. As a result, the movable plate 401 is lowered downward, and the coil spring 402 acts in the compression direction via the pusher 404. Therefore, the movable plate 401 and the pusher 404 correspond to spring acting members that act in the direction in which the coil spring 402 is compressed. The connecting rod 420 and the engaging members 421 and 409 correspond to a spring interlocking mechanism that connects the spring action member and the magnet support.

  The smaller the gap δ is, the lower the connecting rod 402 is, so the compression force of the coil spring 402 is also increased. As the gap δ decreases, the attraction force of the magnet also increases, but in conjunction with this, the spring force of the cancellation spring mechanism is also increased. When the attraction force increases, a force acts to deform the magnet support on which the magnet array is supported. When the magnet support is deformed, the size of the gap δ is not constant, so that a uniform magnetic field can not be formed. Therefore, a cancel spring mechanism 40 is provided to suppress deformation of the magnet support due to the attractive force.

  The mechanism for connecting the cancel spring mechanism 40 and the first magnet support 1 has been described above. However, as shown in FIG. 3, the second magnet support 2 and the cancel spring mechanism 40 are also connected. Accordingly, when the size of the gap δ is adjusted, at least one of the first magnet support 1 and the second magnet support 2 is driven up and down, and the cancel spring mechanism 40 acts even when either of them is driven up or down. become.

  A force for deforming the gap drive mechanism and the drive interlocking mechanism is applied by the action of the suction force. Even if the cancel spring mechanism 40 is deformed, the influence is not exerted on the gap drive mechanism or the drive interlocking mechanism. That is, the first support frame 30 supporting the gap drive mechanism 50 and the second support frame 20 supporting the cancel spring mechanism 40 are separately connected to the common base 10.

<Configuration of pedestal>
Next, the pedestal 4 for supporting the entire insertion light source will be described. The arrangement of the pedestals 4 is shown in a perspective view from the bottom of FIG. Seven pedestals 4 are provided in total, three on the front side and four on the rear side. The pedestal 4 is composed of a first pedestal 4A roughly divided and fixed in height, and a second pedestal 4B which contracts in the height direction. In the present embodiment, three first pedestals 4A and four second pedestals 4B are provided. One first pedestal 4A is arranged at the center of the front side, and two second pedestals 4B are arranged on both sides thereof. Two second pedestals 4B are disposed at the center of the rear side, and two first pedestals 4A are disposed on both sides thereof. Both the front pedestal 4 and the rear pedestal 4 are arranged at equal intervals. By placing the insertion light source on the common base 10 so as to support the insertion light source at three points on the first base 4A, it is possible to easily adjust the height of the insertion light source and other peripheral devices and the horizontal level of the insertion light source. Since the second pedestal 4B is disposed around the first pedestal 4A, the straightness of the base is maintained even when the ground on which the insertion light source is placed is unevenly settled, so that the first insertion light source The initially set magnetic field strength distribution between the magnet array M1 and the second magnet array M2 is not destroyed. The first pedestal 4A may be supported at least at three points, and four or more first pedestals 4A may be arranged on a common base so as not to interfere with the effect of the second pedestal 4B.

  The configuration of the second pedestal 4B is shown in FIG. 9A is a perspective view, FIG. 9B is a cross-sectional view, FIG. 9C is a side view, and FIG. 9D is a side view seen from a different direction from FIG. A placement plate 600 is disposed at the bottom and placed on the placement surface. A lower plate 601 and an upper plate 602 are provided, and a coil spring 603 is disposed therebetween. The coil spring 603 is disposed on the upper and lower plates 601 and 602 in a compressed state. The coil springs 603 are arranged at three places in total, but the number of arrangements can be set as appropriate. As the number of the coil springs 603 is increased, the coil springs 603 can cope with various types of uneven settlement. The coil spring 603 is preferably disposed at three or more locations.

  In order to adjust the amount of compression of the coil spring 603, adjustment bolts 604 are provided, and the same number as the number of the coil springs 603 is provided. A screw 601a is cut in the lower plate 601, and when the adjustment bolt 604 is rotated, the lower plate 601 moves up and down. Thereby, the amount of compression of the coil spring 603 can be changed. A counterbore is provided so that the tip of the adjustment bolt 604 does not interfere with the mounting plate 600.

  An oil type damper 605 is provided at the central portion. Note that the specific configuration of the damper 605 is not limited to a specific configuration. It may not be oil type. A damper 605 is positioned in a recess 600 a formed in the mounting plate 600. The damper 605 has a base mounting surface 605a at the top, and is united with the main portion 605c via a small-diameter connecting shaft 605b. Three coil springs 603 are arranged at 120 ° intervals along the circumferential direction so as to surround the damper 605. The base mounting surface 605a and the connecting shaft 605b are integrally coupled, and can move up and down with respect to the main body 605c.

  The damper 605 and the upper plate 602 are connected by the connecting member 606 (nut), whereby the base mounting surface 605 a and the upper plate 602 move up and down integrally. Two connecting members 606 are arranged so as to sandwich the upper plate 602.

  The adjustment of the spring force of the coil spring 603 can be performed by rotating the adjustment bolt 604 using a jig such as a hexagonal wrench (not shown). As for the adjustment amount, an appropriate numerical value can be obtained by theoretical calculation from the weight of the insertion light source. Further, the base mounting surface 605 a is a surface on which the common base 10 is mounted, and high accuracy levelness is required. The straightness of the base can also be adjusted using the above adjustment mechanism.

  FIG. 10 is a diagram showing the configuration of the first pedestal 4A. FIG. 10A is an overall perspective view, FIG. 10B is a side view, and FIG. 10C is a side view as seen from a direction different from FIG. The first pedestal 4 </ b> A includes a placement plate 620 placed on the placement surface, an adjustment plate 621, and a support block 622. The height position of the adjustment plate 621 can be adjusted by the bolt nut 623. Once adjusted, the overall height does not change while used as a pedestal. The adjustment block 622 includes a base placement surface 622a on which the common base 10 is placed. The adjusting plate 621 and the adjusting block 622 are integrally coupled.

<Principle>
In the present invention, the insertion light source is supported by the first pedestal 4A and the second pedestal 4B, and the principle thereof will be described with reference to FIG. 11 and FIG. Each shows a schematic view in the case of supporting a beam at three points. Here, the beam corresponds to the common base of the present invention. FIG. 11 is a schematic diagram in which the beam 90 is supported at three points on the ground 92 (mounting surface) by the support portion 91. (A) is an initial state, and (b) shows a state in which the central support portion 91 is sunk due to unequal settlement. As a result, the center of the beam 90 is bent by its own weight, and the center is curved downward, and the straightness is lost. In the insertion light source of the present invention, a gap drive mechanism disposed on the common base when the common base is deflected, and a first magnet row, a first magnet support, a second magnet row coupled to the gap drive mechanism, The second magnet support is also affected, and the initially set magnetic field strength distribution between the magnet rows is disturbed.

  FIG. 12 is a configuration example in which the center of the three-point support is supported by a spring 93. (A) shows an initial state and (b) shows a state in which the central spring 93 of the three-point support has sunk due to uneven settlement. Since the spring 93 is provided in the center, the beam 90 can be supported so as not to be bent by the force of the spring 93 even if the ground sinks.

  The present invention has been made based on such a principle. When uneven settlement occurs, the mounting plate 600 of the second pedestal 4B is lowered downward. Even in this case, the position of the base mounting surface 605a that supports the common base 10 is not lowered. This is because a force for lifting the base mounting surface 605a is always applied by the spring force of the coil spring 603. Thereby, it can prevent that a magnet row | line | column and a magnet support body bend, and can maintain the magnetic field strength distribution uniformity initially set between the magnet row | line | column M1 and the magnet row | line | column M2. Further, since the damper 605 is provided at the center, vibration can be suppressed.

  In this embodiment, three of the seven pedestals 4 are used as the first pedestals 4A whose height is fixed. Thereby, the insertion light source can be supported in a stable state at three points. The remaining second pedestals 4B can follow the spring force even if uneven settlement occurs. Therefore, deflection does not occur in the members constituting the insertion light source, and the initially set magnetic field strength distribution can be provided. In addition, even if uneven settlement occurs in the first pedestal, the plane determined by the three first pedestals only tilts, and the adjacent second pedestal follows the tilt, so the deflection of the support frame should be reduced. And maintain good straightness. The initially set magnetic field strength distribution between the magnet rows is not disturbed.

  In the present embodiment, one first pedestal 4A is disposed on the front side, and two first pedestals 4A are disposed on the rear side. However, the present invention is not limited to this. For example, two first pedestals 4A may be arranged on the front side. In addition, the total number of pedestals 4 can be determined as appropriate.

<Another embodiment>
The configuration of the first and second support frames 20 and 30 is not limited to this embodiment. For example, the number and shape of the vertical frame members can be changed as appropriate.

  In the present embodiment, the gap drive mechanism 50 is provided on both the first magnet support 1 and the second magnet support 2 so that both can move up and down, but the present invention is not limited to this. You may make it provide the gap drive mechanism 50 only in any one.

  In the present embodiment, the first support frame 30 and the second support frame 20 both have a vertical frame member disposed on the rear side of the vacuum chamber 3, but either one of the vertical frame members is disposed on the front side of the vacuum chamber 3. It may be arranged. The shape, number, and connection method of the frame members constituting the first and second support frames 20 and 30 can be determined as appropriate. The material is also preferably a metal from the viewpoint of strength.

S1 Arrangement space M1 1st magnet row M2 2nd magnet row δ Gap 1 1st magnet support body 2 2nd magnet support body 3 Vacuum chamber 4 Base 4A 1st base 4B 2nd base 5 1st connection shaft 6 2nd connection shaft 7 LM Guide Support 8 Horizontal LM Guide 10 Common Base 20 Second Support Frame 200, 201 Second Vertical Frame Member 202 Reinforcement Frame 203 Second Horizontal Frame Member 204 C-shaped Reinforcement Frame 30 First Support Frame 300 First Vertical Frame Member 301 First horizontal frame member 40 Cancel spring mechanism 50 Gap drive mechanism 600 Mounting plate 601 Lower plate 602 Upper plate 603 Coil spring 604 Adjustment bolt 605 Damper 605a Base mounting surface

Claims (7)

A first magnet row in which a large number of magnets are arranged in a row;
A first magnet support to which the first magnet array is attached and supported;
A plurality of magnets arranged in a row, and a second magnet row facing the first magnet row via a gap;
A second magnet support to which the second magnet array is attached and supported;
A gap driving mechanism for vertically driving the first magnet support and / or the second magnet support to change the size of the gap;
A drive interlocking mechanism for connecting the gap driving mechanism and the first magnet support and / or the second magnet support;
A support frame for supporting the gap drive mechanism;
The support frame is coupled, and includes a common base placed on the placement surface via a plurality of pedestals,
The insertion light source, wherein the plurality of pedestals includes a first pedestal having a fixed height and a second pedestal having contraction in a height direction by an action of a spring. The insertion light source according to claim 1, wherein a total of three first pedestals are installed on the front side and the back side. The insertion light source according to claim 2, wherein the first pedestals are disposed one on the front side and two on the rear side. The said 2nd base is equipped with the coil spring pinched | interposed between a lower plate and an upper plate, and the adjustment mechanism which adjusts the compression amount of this coil spring, The any one of Claims 1-3 characterized by the above-mentioned. The insertion light source described in 1. The insertion light source according to claim 4, wherein the second pedestal includes a damper at a central portion in a plan view, and the coil spring is disposed around the damper. The insertion light source according to claim 5 , wherein the damper has a base mounting surface on which the base is mounted, and includes a connecting member that connects the damper and the upper plate. The insertion light source according to claim 6, wherein the straightness of the base mounting surface can be adjusted by the adjustment mechanism.

Images