JPH0750640B2 - Polarization generator - Google Patents

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to an improvement of a polarized light generator called a wiggler or undulator for a high-intensity light source, and relates to a lifting bracket for supporting a magnet array by a coupling having a phase adjusting mechanism. The present invention relates to a polarization generation device capable of adjusting and positioning a gap between a pair of magnet rows facing each other by extremely screwing them together with a pair of screw shafts having opposite screws to each other, with extremely high precision and high parallelism. .

BACKGROUND ART When an electron beam close to the speed of light passes through a magnetic field, it generates electromagnetic waves, that is, synchrotron radiation, but magnets of different poles are alternately arranged to pass this electron beam through a magnetic field whose magnetic field direction changes alternately. , They interfere with each other to obtain light with higher brightness. (Reference, JP-A-61-19100
This type of coherent radiation light generation device is called an insertion type light source, and is used, for example, in an electron storage ring, and a type that can obtain light 2N times the frequency (N) of the magnetic field due to the difference in polarization characteristics is a wiggler. , A type with a weaker magnetic field and a very small electron orbital amplitude, but with a light intensity of N ² , is called an undulator.

The structure of the polarized light generation device is such that a pair of magnet rows in which a large number of magnet blocks of a required size are arranged in a required pattern in the horizontal direction are made to face each other by using various mechanical support mechanisms on vertical columns, Can be adjusted and positioned to a required gap size.

Problems of the prior art In the mechanical support mechanism for horizontally supporting the pair of magnet rows or a plurality of pairs of magnet rows so as to be able to move up and down, the support beam having the magnet rows is abutted on the vertical column through the linear bearing. The configuration was such that a vertical column having a required shape was inserted, or a configuration using a ball screw.

Conventionally, in any type of linear motion bearing or ball screw, the vertical positioning accuracy cannot be set to 10 μm or less due to the accuracy of the bearing or the accuracy of the ball, and the parallelism is set to 50 μm / m or less. Was difficult.

Further, as a means for changing the gap amount, one screw shaft is provided with a right-handed screw part and a left-handed screw part, and one or more of them are used depending on the size of the device to carry the screw shaft. Alternatively, it is conceivable that the gap amount can be changed by synchronizing and rotating in the reverse direction, but the work of synchronizing multiple screw shafts with a single actuator is extremely difficult even by a skilled technician. It is complicated and difficult to accurately match the phases of the right and left threaded nuts provided on the screw shaft, and the rigidity of the screw, that is, the fluctuation of the magnet attractive force due to the change of the gap amount and the self-weight of the device The diameter of the screw shaft is required because high precision is required, such as the elongation of the screw shaft per unit load and the influence of the screw shaft rotation (driving) torque on the accuracy of the screw shaft twist angle. Such as large sized commensurate with the time, there is a limit to the mechanism maintaining accuracy in handling displacement of the attenuation is increased and μm units of the screw shaft.

In view of the above situation, the present invention is directed to a polarization generation device having a configuration capable of easily raising and lowering the gap between a pair of magnet rows facing each other of the polarization generation device with an accuracy of 10 μm or less and a parallelism of 50 μm / m or less. The purpose is to provide.

SUMMARY OF THE INVENTION According to the present invention, at least a pair of beams for horizontally arranging a plurality of magnets in a required pattern to form a magnet array can be fixed to an elevating bracket and can be moved up and down on one or more upright columns. In a polarized light generator in which the upper and lower horizontal beam magnet rows face each other and can be moved closer to and away from each other, a pair of screw shafts screwed with opposite screws are coupled by a coupling having a phase adjustment mechanism. One, each screw shaft is rotatably supported by bearings provided at the beginning and end of the threaded surface, and the vertical brackets are screwed onto the upper and lower threaded surfaces. It is a polarized light generation device characterized in that beams can be opposed to each other and can be separated from each other.

Further, according to the present invention, in the above-mentioned configuration, the vertical sliding surface portion of the elevating bracket grips the supporting column relative to at least two vertical sliding surface portions provided on each supporting column, and the vertical sliding surface portion of the elevating bracket is required. The tapered slider member, which has a sliding surface with a low friction coefficient and excellent wear resistance and has a taper surface and an inverse taper surface, is used as the vertical sliding surface of the column. The polarized light generating device is characterized by having an elevating and lowering supporting mechanism that is brought into contact with the vertical surface of the column and fitted between the vertical surface of the supporting column and the predetermined surface of the elevating bracket to eliminate a gap.

Constitution and Effect of the Invention In the polarization generating device of the present invention, the lifting mechanism arranges the screw shaft having the left-hand screw feed mechanism and the screw shaft having the right-hand screw feed mechanism on the same vertical axis, and each screw shaft has a load. Since it is configured to be movable in response to the above, it is rotatably supported by a pair of bearings provided at a position as close as possible to the outside of the moving range of the screw, that is, at the start end and the end side of the screw threaded surface so as to receive the thrust load. The bearing has a structure that allows the bearing distance to be kept constant, and at least the screw shaft length regulated between the bearings is supported by the bearing so that it will be constant even if the load changes on the female screw. As a connecting mechanism of the screw shaft having the left screw feed mechanism and the screw shaft having the right screw feed mechanism, the rotation angle between the screw shafts connected to the rotational force (torque) transmission mechanism is very small (about 100: 1). )
It is characterized in that a coupling having a phase adjusting mechanism that can be changed to is provided.

In the present invention, for the coupling having the phase adjusting mechanism, specifically, a phase adjusting device having a high reduction mechanism utilizing elastic deformation of the gear can be used.

Further, in the present invention, any known mechanism can be used as the vertical beam supporting mechanism for vertical movement, but, for example, a pair of upper and lower vertical beams can be used so that the magnet row fixed to the required beam can slide up and down with high accuracy. A horizontal beam consisting of an I-beam is fixed to an elevating bracket, and one or more upright columns are used as guides, and an elevating bracket horizontally supporting the beam abuts two or more vertical surfaces of the column. The slider is formed in a shape of a lifting bracket so as to embrace the pillar, and a tapered slider member having a sliding plane with a low friction coefficient and excellent wear resistance so as to eliminate a gap between the pillar and the lifting bracket. By bringing the sliding plane into contact with the vertical surface of the column, and for example, as in the embodiment, using a holder member or the like, the lifting bracket of the lifting bracket having the tapered surface and the reverse tapered surface of the slider member is formed. Configuration is fitted between the Teimen and post vertical surfaces are preferred.

Further, the slider member may have a tapered shape having a sliding surface having a low friction coefficient and excellent wear resistance and having the tapered surface and the reverse taper surface. In addition to providing a lining with excellent wear resistance, a low friction coefficient material can be used.

Since the beam is horizontally arranged on the vertical column without a gap by such a lifting support mechanism, there is an advantage that the flatness accuracy of the vertical surface of the column becomes the parallelism accuracy of the I beam for fixing the permanent magnet array.

Furthermore, due to the elevating mechanism using the above-mentioned pair of screw shafts and members that are screwed together, for example, 20 μm / m
The up-and-down positioning can be extremely easily performed with an accuracy of 1 μm while maintaining the following high parallelism.

Disclosure Based on Drawings of the Invention FIG. 1 is a front explanatory view of a polarized light generating apparatus according to the present invention. FIG. 2 is a side view of the device. Figure 3 is second
FIG. III-III line arrow view. FIG. 4 is an explanatory view of a slider interposed between a column and a lifting bracket in the polarized light generating device according to the present invention.

FIG. 5 is a side view for explaining another polarization generator according to the present invention.

Configuration The frame of the polarized light generating device has four prismatic pillars (on a common base (3) horizontally arranged on a floor (1) via a parallelism adjuster (2) composed of bolts and nut members ( 4) standing upright and having a beam member (5) at its upper end.

An elevating bracket (10) is movably arranged between two adjacent columns (4) (4) on the short side of the box-shaped frame, and as shown in FIG. Lift brackets (10) (10) that are arranged in two sets above and below
In the meantime, the I-beams (20) (20) are horizontally mounted or mounted.

Further, a magnet row (21) in which a large number of permanent magnets are arranged so that the magnetic poles are arranged in a required pattern is fixed to the I beam (20) (20), and the magnet row (21) (21) is arranged at the center of the frame.
Are opposed to each other.

More specifically, as shown in FIGS. 2 and 3, the lifting bracket (10) is substantially T-shaped in the horizontal direction, and is fitted between the two adjacent columns (4) (4). Thus, they are arranged so as to face the two vertical surfaces of each column (4).

A slider (12) and a holder (11) thereof, which will be described later, are interposed between the lifting bracket (10) and the column (4) and are in contact with each other without a gap, and the holder (11) is the third.
As shown in the figure, here, they are arranged so as to grip the four faces of the support column (4).

The plate-shaped slider (12) has a resin layer (13) having a low friction coefficient adhered to one flat surface, and the other surface is, for example, 1/100.
Holder (11) is formed with the required tapered taper surface.
Has a taper surface opposite to the above, and is fitted without any gap between the vertical surface of the column (4) and the elevating bracket (10).

Therefore, the elevating bracket (10) slidably abuts on the column (4) through the slider (12) having the resin layer (13) without a gap.

There is a coupling (30) on the outside of each column (4).
Screw shafts (7a) (7b) screwed with screws opposite to each other with a book are pivotally supported by bearings (6a ₁ ) (6a ₂ ) (6b ₂ ) (6b ₂ ), and each lifting bracket (10 ) Is the nut member (14a) (14
In b), the shafts (7a) and (7b) are inserted and screwed to each other so as to be movable in the vertical direction.

More specifically, the screw shaft (7
a) and a screw shaft (7b) with a left-hand thread,
Bearings (6) provided on the beam member (5) and the column (4) respectively
a ₁ ) (6a ₂ ), bearings (6b ₁ ) (6b ₂ ) provided on the support column (4) and the common base (3) are rotatably supported to receive a thrust load, and a coupling (30 ), The upper screw shaft (7a) is connected to the lower screw shaft (7b) so that torque can be transmitted.

The drive force of the step motor (9) mounted on the beam member (5) is gear-distributed and similarly mounted on the gear box (8).
Each screw shaft (7a) (7b) pair can be rotated in a desired direction via the
0) freely moves up and down via the nut members (14a) (14b), the magnet rows (21) supported by the I-beam (20) come into contact with and separate from each other, and the magnet rows (21) (21) are separated from each other. The required gap can be set.

Function and effect A single step motor (9) can rotate a total of eight screw shafts (7a) and (7b) vertically, and at the same time, the upper screw shaft (7a) and lower screw shaft (7b) And the rotation angle, that is, the phase of the rotation of each screw shuffle can be changed minutely, so the gap accuracy (straightness, parallelism, twist, flatness, etc.) between the magnet rows (21) (21) can be adjusted. It will be easier.

A taper-shaped slider (12) having a sliding plane of a resin layer (13) having a low friction coefficient and excellent in wear resistance is provided so as to eliminate a gap between the support column (4) and the lifting bracket (10). The abutment against the vertical surface of the column, and it is fitted between the vertical surface of the column and the predetermined surface of the holder (11) of the lifting bracket (10) that is the tapered surface and the reverse tapered surface of the slider (12). As a result, the I-beam (20) is arranged horizontally on the vertical column (4) without a gap, and the flatness accuracy of the vertical surface of the column (4) fixes the I-beam (20) that fixes the magnet array (21). ) Parallelism accuracy, which enables highly accurate vertical positioning.

The polarized light generating device according to the present invention has a structure capable of keeping the distance between the bearings constant, so that the screw shaft can withstand the load due to the attraction force of the magnet and the weight of the component parts such as the magnet mounting beam and the cross beam. Displacement (expansion and contraction) can be greatly reduced compared to that of the conventional structure, and the accuracy of the required gap between the magnet rows (21) (21) can be greatly improved compared to conventional devices. Assembling and adjusting for achieving high accuracy becomes easy, and accuracy correction, which is difficult with the conventional structure, can be easily performed.

The polarization generating device shown in FIGS. 1 to 4 has four prismatic pillars (4) standing upright, and one step motor (9) is used to install four pairs of upper and lower screw shafts (7a) and (7b). Although the structure for synchronous rotation is shown, as shown in FIG. 5, for example, one pillar having a substantially T-shaped cross section is erected on the common base (3).
The lifting bracket (15) is overhung so as to grip the protruding portion of the column, and the lifting bracket (15) is arranged so as to be lifted up and down, and the I-beam (20) ( 20) is placed or mounted horizontally, and although not shown, the above-mentioned holder and slider are provided in the gap between the lifting brackets (15) (15) and the support to form a similar lifting support mechanism, By using a single screw shaft with a coupling that has a phase adjustment mechanism, as in the configuration of Fig. 1, ascending / descending positioning with an accuracy of 1 µm while maintaining a high parallelism of 20 µm / m or less. Will be possible.

[Brief description of drawings]

FIG. 1 is a front view of a polarized light generator according to the present invention. FIG. 2 is a side view of the device. Figure 3 is second
FIG. III-III line arrow view. FIG. 4 is an explanatory view of a slider interposed between a column and a lifting bracket in the polarized light generating device according to the present invention. FIG. 5 is a side view for explaining another polarization generator according to the present invention. 1 ... floor, 2 ... parallelism adjuster, 3 ... common base, 4 ... post, 5 ... beam member, 6a _1, 6a _2, 6b _1, 6b ₂ ... bearing, 7a, 7b ...
Screw shaft, 8 ... Gear box, 9 ... Step motor, 10, 15 ... Lifting bracket, 11 ... Holder, 12 ...
Slider, 13 ... Resin layer, 14a, 14b ... Nut member, 20 ...
I-beam, 21 ... Magnet array, 30 ... Coupling.

Front page continued (72) Inventor Yutaka Murakami 8231 Tamashima Otoshima, Kurashiki City, Okayama Sumiju Tech Co., Ltd. (56) References IEEE Transactions on Nuclear Science, NS-32 [5] (1985) P. 3412-3414

Claims (2)

[Claims] 1. At least a pair of beams for horizontally arranging a plurality of magnets in a required pattern to form a magnet array are supported by one or more erected stanchions so as to be vertically movable by an elevating bracket, and In a polarization generating device in which magnet arrays of horizontal beams are opposed to each other and can be moved toward and away from each other, a pair of screw shafts having mutually opposite screws are formed into one by a coupling having a phase adjusting mechanism. The screw shaft is rotatably supported by bearings provided at the start and end of the threaded surface, and the vertical brackets are screwed onto the upper and lower threaded surfaces, respectively. A polarized light generation device characterized by an elevating mechanism that can be separated. 2. A vertical sliding surface portion of an elevating bracket grips a strut so as to face at least two vertical sliding surfaces provided on each strut, and the vertical sliding surface portion of the elevating bracket does not have a required tapered surface. , A tapered slider member having a sliding surface having a low friction coefficient and excellent wear resistance and having the tapered surface and an inverse tapered surface is brought into contact with the sliding surface of the vertical sliding surface of the column, 2. The polarization generating device according to claim 1, further comprising an elevating and lowering support mechanism that is fitted between the vertical surface of the support column and the predetermined surface of the elevating and lowering bracket to eliminate a gap.