JP6573099B2 - Ion source, support base, suspension mechanism, ion source transport system, and ion source transport method - Google Patents

Description

  The present invention relates to an ion source, a support base that supports the ion source, a suspension mechanism that suspends the ion source, an ion source transport system that transports the ion source, and an ion source transport method that transports the ion source. is there.

  This type of ion source is attached to the apparatus main body of the ion irradiation apparatus in a predetermined mounting posture to constitute the ion irradiation apparatus, and may be removed from the apparatus main body, for example, when it is replaced with a new one.

  In view of this, the ion source shown in Patent Document 1 includes a housing and a support leg that supports the housing and has a rollable roller attached thereto, and can be transported while maintaining the mounting posture. Has been.

However, in the above-described configuration, the position of the center of gravity increases as the height dimension in the mounting posture increases, and the state becomes unstable when the ion source is transported.
In particular, in recent years, the size of the substrate has been increasing, and the above-described problem becomes more conspicuous when the height of the ion source in the mounting posture is increased in order to enlarge the ion beam in accordance with the substrate.

Japanese Utility Model Publication No. 62-198649

  Therefore, the present invention has been made to solve the above-mentioned problems, and its main object is to ensure that the ion source can be transported in a stable state.

  That is, the ion source according to the present invention is an ion source that is attached to the apparatus main body of the ion irradiation apparatus in a predetermined mounting posture, and includes a casing provided with an ion extraction port, and a plurality of ions extracted from the extraction port. An electrode, an electrode holding member that is connected to the housing and holds the plurality of electrodes, and a lower roller and an upper roller that are detachably attached to the housing or the electrode holding member in the mounting posture. In the standing posture in a state of being detached from the apparatus main body, only the lower roller attached to the housing or the electrode holding member is placed on a predetermined support surface so as to be able to roll, In the lying posture that has fallen from the standing posture and has a reduced height, both the lower roller and the upper roller attached to the housing or the electrode holding member are It is characterized in that it is intended to be placed on the support surface.

With such an ion source, the support surface is supported in a lying posture that is smaller in height than the mounting posture, so by moving the support base while maintaining this lying posture, the position of the center of gravity is lowered. The ion source can be transported in a stable state.
Here, consider the case where the ion source removed from the apparatus main body is transported. In this case, since the lower roller rolls on the support surface by lowering the ion source to the support surface in the standing posture, the ion source gradually falls from the standing posture to the lying posture with this movement.
On the other hand, when the ion source is attached to the apparatus main body, the upper roller is separated from the support surface while the lower roller rolls on the support surface by lifting the ion source supported on the support surface in the lying posture. The ion source rises gradually and assumes a standing posture.
Thus, if it is an ion source mentioned above, while being able to convey an ion source in a stable state, it can be certainly made into a standing posture or a lying posture as needed.

  As a more specific embodiment, the support surface is formed on a pair of parallel horizontal rails, and the lower roller and the upper roller correspond to the horizontal rail. What is provided with each pair is mentioned.

Moreover, the support base which concerns on this invention comprised the horizontal rail in which the ion source mentioned above is mounted, It is characterized by the above-mentioned.
By using this support base, the above-described ion source can be transported in a stable state, and the ion source can be reliably brought into a standing posture or a lying posture as necessary.

  As a support base for transporting the ion source to a desired position, it is preferable that the support base is provided with wheels and configured to be movable on the floor surface.

It is preferable that the support base has a roller holding portion that holds the lower roller or the upper roller removed from the housing or the electrode holding member.
In this case, it is possible to prevent the roller from being lost by holding the roller removed from the housing or the electrode holding member in the roller holding portion.

The suspension mechanism according to the present invention suspends the ion source and conveys the ion source between the support base and the apparatus main body, and the ion source removed from the apparatus main body is in the standing posture. The ion source is moved above the support surface while maintaining the standing posture, the ion source is lowered, the lower roller is placed on the support surface, and the ion source is further lowered Thus, the lower roller is rolled on the support surface until the upper roller is placed on the support surface.
By using this suspension mechanism, the ion source can be reliably placed in a lying posture, and can be transported in a stable state.

  The ion source transport system including the support base and the suspension mechanism can achieve the above-described effects.

  According to the present invention configured as described above, the position of the center of gravity can be lowered and the ion source can be transported in a stable state, and the standing posture or the lying posture can be reliably set as necessary.

The figure which shows typically the whole structure of the ion irradiation apparatus of this embodiment. The figure which shows the ion source of the embodiment typically. The figure which shows the support stand of the embodiment typically. The figure explaining operation | movement of the ion source conveyance system of the embodiment.

  An embodiment of an ion source according to the present invention will be described.

The ion source 101 of the present embodiment constitutes the ion irradiation apparatus 100 and is transported by the ion source transport system 200.
Below, after explaining the ion irradiation apparatus 100, the ion source transfer system 200 will be explained.

  The ion irradiation apparatus 100 is used for, for example, a semiconductor device. Here, as shown in FIG. 1, an ion beam extracted from an ion source 101 is passed through a mass separator 103 and a separation slit 104 to be desired. After the ion species are selected, the ion species are implanted into the wafer W held by the holder 105.

  Specifically, the ion irradiation apparatus 100 includes an apparatus main body 102 and an ion source 101 attached to the apparatus main body 102. Here, the apparatus main body 102 includes the mass separator 103 and the separation slit described above. In addition to 104, although not shown in the figure, the lens includes a lens for shaping the ion beam, a steering coil for correcting the traveling direction of the ion beam, and the like.

The ion source 101 is attached to an apparatus main body 102 (here, disposed on the mass separator 103 side and an end face of a vacuum vessel (not shown) that constitutes an ion beam transport path) with a predetermined mounting posture. A ribbon-like ion beam containing predetermined ions such as arsenic and boron is generated and emitted to the apparatus main body 102.
Note that the mounting posture of the present embodiment is a posture in which the ion source 101 is erected along the vertical direction.

  Specifically, as shown in FIG. 2, the ion source 101 includes a housing 10 having an extraction port O from which an ion beam generated inside is extracted, and a plurality of electrodes provided in the vicinity of the extraction port O. An unillustrated extraction electrode system, a cylindrical body 50 as an electrode holding member connected to the casing 10 and holding the extraction electrode system, a lower roller 21 detachably attached to the casing 10, and a casing 10 and an upper roller 22 positioned above the lower roller 21 in the mounting posture.

The case 10 accommodates a hot cathode (not shown) that emits thermoelectrons and has a function as a plasma generation container in which plasma is generated.
Accordingly, in the present embodiment, the plasma is generated while introducing a process gas such as phosphine (PH ₃ ), arsine (AsH ₃ ), boron trifluoride (BF ₃ ) into the housing 10, as described above. An ion beam containing predetermined ions is generated, and the ion beam is ejected from the extraction port O.

Specifically, as shown in FIG. 2, the housing 10 has an internal space and has a vertically long shape such as a rectangular parallelepiped shape in the mounting posture, and the drawer port O is formed on the side peripheral surface 11 in the mounting posture. Is formed.
In the present embodiment, the drawer port O is formed in the attachment surface 11 a attached to the apparatus main body 102 via the cylindrical body 50 in the side peripheral surface 11. A flange portion 12 having a plurality of bolt holes 13 is formed on the mounting surface 11a.

  The extraction electrode system includes, for example, an acceleration electrode, an extraction electrode, a suppression electrode, a ground electrode, and the like. By using these electrodes, an ion beam having a desired energy can be extracted by accelerating the ion beam.

The cylindrical body 50 is provided with the above-described plurality of electrodes and disposed between the apparatus main body 102 and the housing 10, one end side being connected to the apparatus main body 102, and the other end side being It is configured to be coupled to the housing 10.
More specifically, the cylinder 50 and the apparatus main body 102 are connected by a bolt (not shown) through a bolt hole 521 formed in the one end side flange portion 511 of the cylinder 50. Further, the bolt hole 522 formed in the other end side flange portion 512 of the cylindrical body 50 and the bolt hole 13 formed in the flange portion 12 of the mounting surface 11a described above are communicated, and the cylindrical body 50 is connected by a bolt (not shown). And the housing 10 are coupled.

The lower roller 21 and the upper roller 22 are fixed to a roller support member H that supports the rollers 21 and 22 in a rollable manner, and are attached to the housing 10 via the roller support member H. It is.
The roller support member H is configured to be attached to the side peripheral surface 11 of the housing 10 in the mounting posture with a screw or the like.

The lower roller 21 is detachably attached to the side peripheral surface 11. Here, the pair of lower rollers 21 are disposed so as to sandwich the drawer opening O from both the left and right sides.
More specifically, each lower roller 21 is a surface different from the mounting surface 11a in the side peripheral surface 11, and is mounted on each of the facing surfaces 11b facing each other. Further, the mounting positions of the respective lower rollers 21 are set so as to have the same height from the bottom surface 11c of the housing 10 in the mounting posture and the same distance from the mounting surface 11a.
In the present embodiment, the opposing surfaces 11b are formed as surfaces that are orthogonal to the mounting surface 11a and are parallel to each other.

The upper roller 22 is detachably attached to the side peripheral surface 11, and here, a pair of upper rollers 22 are arranged so as to sandwich the drawer port O from both the left and right sides.
More specifically, each upper roller 22 is attached to each of the opposing surfaces 11b, and the attachment position is set at a position spaced apart from each lower roller 21 by a predetermined distance.

  More specifically, in the present embodiment, the separation distance between the lower roller 21 and the upper roller 22 on each facing surface 11b is equal, and the separation distance between each lower roller 21 and the separation distance between each upper roller 22 are equal. It is configured as follows.

  Next, an ion source transport system 200 that transports the ion source 101 described above will be described with reference to FIGS. 3 and 4.

The ion source transport system 200 supports a suspension mechanism 40 that suspends the ion source 101 in a standing posture in a state where it is detached from the apparatus main body 102 and the ion source 101 in a lying posture that is lower than the standing posture. And a support base 30.

The suspension mechanism 40 suspends the ion source 101 detached from the apparatus main body 102 in an upright posture and moves the ion source 101 in the vertical direction and the horizontal direction to move it above the support base 30 prepared in advance. Here, for example, an overhead crane is used.
The overhead crane of the present embodiment is attached to the ceiling of the ion irradiation apparatus 100 and is located inside the ion irradiation apparatus 100, and is provided above the place where the ion source 101 is disposed. Of course, an overhead crane provided outside the apparatus may be used instead of such a configuration.

  The support base 30 is for supporting the ion source 101 in the above-described lying posture where the position of the center of gravity is lower than the standing posture, and for transporting the ion source 101 to a predetermined position. Here, as shown in FIG. As described above, a carriage 31 and a pair of horizontal rails 32 provided on the carriage 31 are provided.

The carriage 31 includes a frame body 311 and a plurality of wheels 312 attached to the frame body 311. Each wheel 312 is attached to the lower surface of the frame 311 and rolls on a floor surface on which the apparatus main body 102 is arranged or a dedicated floor surface for transporting the ion source 101, for example.
The carriage 31 of the present embodiment is provided with rollers 21 and 22 removed from the housing 10 and a plurality of roller holding portions 313 that hold these rollers 21 and 22.
In the present embodiment, the same number of roller holding portions 313 as the rollers 21 and 22 provided in the housing 10 are provided, and each roller holding portion 313 is configured such that the roller support member H is screwed. Has been.

The pair of horizontal rails 32 are provided on the upper surface of the frame 311 and extend parallel to each other along the horizontal direction.
More specifically, the separation distance of each horizontal rail 32 is equal to the separation distance of the pair of lower rollers 21 and the separation distance of the pair of upper rollers 22, and the length of each horizontal rail 32 is the same as that of the lower roller 21. It is set to be longer than the separation distance from the upper roller 22.

  In this embodiment, a stopper 321 is provided at one end 32 a and the other end 32 b of the horizontal rail 32 to prevent the lower roller 21 and the upper roller 22 from falling from the horizontal rail 32.

  The stopper 321 has a stopper surface 322 that is inclined obliquely upward toward the outside at each end 32a, 32b of the horizontal rail 32. Here, the stopper surface 322 is a curved surface curved downward. Is formed.

  Next, the operation of the ion source transport system 200 described above will be described with reference to FIG.

First, an operation for transporting the ion source 101 removed from the apparatus main body 102 to a desired position will be described.
The ion source 101 is removed by, for example, a user pulling out a bolt connecting the apparatus main body 102 and the cylinder 50, and here, the casing 10 and the cylinder 50 are integrated into the apparatus. It is removed from the main body 102.

First, the suspension mechanism 40 suspends the ion source 101 removed from the apparatus main body 102 in an upright posture.
At this time, by suspending the ion source 101 from above the center of gravity or the vicinity thereof, the ion source 101 becomes a posture standing in the vertical direction or a posture slightly inclined from the posture.
More specifically, the suspension mechanism 40 of the present embodiment attaches a wire or the like behind the center of gravity of the ion source 101 on the upper surface of the housing 10 and suspends the ion source 101, thereby The ion source 101 has a slightly forward tilted posture rather than a posture standing in the vertical direction.

Next, the suspension mechanism 40 is swung at a predetermined angle while the ion source 101 is suspended in an upright posture, and is moved in the vertical direction and the horizontal direction as necessary, above the support base 30 prepared in advance. Move.
More specifically, the suspension mechanism 40 moves the ion source 101 so that each lower roller 21 is positioned above, for example, the one end 32a side of the horizontal rail 32 provided on the support base 30 ( FIG. 4 (a)).

Subsequently, the suspension mechanism 40 lowers the ion source 101 while maintaining the standing posture, and places each lower roller 21 on the horizontal rail 32 (FIG. 4B).
In this state, each lower roller 21 is positioned behind the center of gravity of the ion source 101 in the horizontal direction (on the side opposite to the outlet port O), and each upper roller 22 is centered on the ion source 101 in the horizontal direction. It is located in front of (drawer port O side).

After each lower roller 21 is placed on the horizontal rail 32, the suspension mechanism 40 further lowers the ion source 101. Accordingly, each lower roller 21 rolls on the horizontal rail 32 from one end portion 32a toward the other end portion 32b, and accordingly, each upper roller 22 approaches the horizontal rail 32, and the ion source 101 stands up. It begins to tilt gradually from the posture (FIG. 4C).
At this time, for example, even if a force directed from one end portion 32a of the horizontal rail 32 to the other end portion 32b is applied to the lower portion of the ion source 101 so that the drawer port O formed in the housing 10 gradually faces downward. good.
The contact surfaces between the rollers 21 and 22 and the horizontal rail 32 may be flat or curved.

When each upper roller 22 is placed on the horizontal rail 32, both the lower roller 21 and the upper roller 22 are placed on the horizontal rail 32, whereby the ion source 101 assumes a lying posture. (FIG. 4 (d)).
In the present embodiment, in the lying posture, the lower roller 21 and the upper roller 22 are positioned above the drawer port O, and the drawer port O faces downward.

  For example, when the user moves the carriage 31 in this lying posture, the ion source 101 can be transported to a desired position in a stable state.

  Next, a case where the ion source 101 is transported from a predetermined position to the vicinity of the apparatus main body 102 and attached to the apparatus main body 102 will be described.

First, the suspension mechanism 40 lifts the ion source 101 supported by the support base 30 in a lying posture.
Accordingly, each upper roller 22 is separated from the horizontal rail 32, and each lower roller 21 rolls on the horizontal rail 32 from the other end portion 32b toward the one end portion 32a.

  From this state, the suspension mechanism 40 further lifts the ion source 101. Thereby, each lower roller 21 is separated from the horizontal rail 32, and the ion source 101 is in an upright posture.

  With this standing posture, the suspension mechanism 40 moves the ion source 101 in the vertical direction and the horizontal direction, moves the ion source 101 to the vicinity of the apparatus main body 102, rotates it by a predetermined angle as necessary, and approaches the apparatus main body 102. Let

  For example, when the user connects the apparatus main body 102 and the cylinder 50 with a bolt, the ion source 101 is attached to the apparatus main body 102 in a predetermined mounting posture.

  In the case of the ion source 101 according to the present embodiment configured as described above, since the support base 30 is supported in a lying posture that is lower in height than the mounting posture, the supporting stand 30 is maintained while maintaining this lying posture. By moving it, the ion source can be transported in a stable state with a low center of gravity.

  Further, the ion source 101 is in a lying posture by being lowered to the horizontal rail 32 in an upright posture, and is in a standing posture by being lifted from a state supported by the support stand in the lying posture, so that the ion source is used as necessary. 101 can be set in a lying posture or a standing posture easily and reliably.

  Furthermore, since the drawer port O faces downward in the lying posture, dust or the like is less likely to enter the housing 10 from the drawer port O, and the inside of the housing 10 can be made difficult to get dirty. Further, since the lower roller 21 and the upper roller 22 are positioned above the drawing port O in the lying posture, the center of gravity of the ion source 101 supported by the support base 30 can be reliably lowered.

Here, when the roller support member H that supports the rollers 21 and 22 has conductivity, a discharge may occur in the roller support member H, which may cause a failure of the ion source 101. Therefore, when the ion source 101 is operated, the roller support member H is removed from the housing 10 together with the rollers 21 and 22.
In the state where the ion source 101 is attached to the apparatus main body 102, many members such as a permanent magnet and a coolant channel for cooling the permanent magnet are disposed around the ion source 101. For this reason as well, after the ion source 101 is attached to the apparatus main body 102, the rollers 21 and 22 are preferably removed from the housing 10 so as not to get in the way.
As described above, when the ion source 101 is in operation, the rollers 21 and 22 may be removed from the housing 10. In this embodiment, the support base 30 includes the roller holding portion 313. The rollers 21 and 22 removed from the roller 10 can be held by the roller holding portion 313, and the rollers 21 and 22 can be prevented from being lost.

In addition, since the stoppers 321 are provided at both end portions 32a and 32b of the horizontal rail 32, it is possible to prevent the ion source 101 from dropping from the horizontal rail 32 during transportation.
Further, since the stopper surface 322 of the stopper 321 has a curved shape, even if the lower roller 21 is lowered to one end portion 32a or the other end portion 32b of the horizontal rail 32, the lower roller 21 does not move to the horizontal rail. It is smoothly guided onto the horizontal rail 32 without falling off the 32.
Furthermore, even if the ion source 101 is suspended in a vertically upright posture, the lower roller 21 is mounted on the curved surface by utilizing the fact that the stopper surface 322 of the stopper 321 is a curved surface. By placing it, the ion source 101 can be laid down so that the extraction port O faces downward.

  In addition, since the cylindrical body 50 holding a plurality of electrodes constituting the extraction electrode system is connected to the casing 10, when the ion source 101 is removed from the apparatus main body 102, the casing 10 and the extraction electrode system are collectively displayed. When the ion source 101 is attached to the apparatus main body 102, the housing 10 and the extraction electrode system can be attached all at once. Thereby, workability | operativity at the time of attachment or detachment of the ion source 101 can be improved.

  The present invention is not limited to the above embodiment.

For example, in the above-described embodiment, the lower roller and the upper roller are provided on the facing surface, but may be provided on the mounting surface or the back surface opposite to the mounting surface.
Furthermore, the lower roller may be provided on the bottom surface of the housing in the standing posture, and the upper roller may be provided on the upper surface of the housing in the standing posture.
In addition, the lower roller and the upper roller may be provided in a cylindrical body that holds the extraction electrode system. For example, the roller support member may be directly attached to the cylinder, or the roller support member may be attached to a member attached to the cylinder, and the lower roller and the upper roller may be provided on the cylinder. In this case, each roller is positioned at substantially the same height as the drawer port in the yielding posture.

In the above-described embodiment, the drawer port faces downward in the lying posture, but the drawer port may face upward.
Further, in the lying posture, the drawer port may face in the left-right direction or the front-rear direction. As a specific embodiment in this case, there is a configuration in which a pair of lower rollers and a pair of upper rollers are provided on the mounting surface and the back surface.

  When removing the ion source, the casing and the cylinder are integrally removed from the apparatus main body in the above embodiment, but the casing and the cylinder may be detached separately. In this case, it is preferable that the lower roller and the upper roller are attached to each of the housing and the cylinder.

The suspension mechanism may suspend the ion source using, for example, two or more overhead cranes. Further, the wires may be divided into a plurality by a separator or the like, and these wires may be attached to the ion source.
By doing in this way, the suspended ion source can be moved more stably.

In addition, in the said embodiment, although the wire was attached to the housing | casing, you may make it attach a wire to each roller support member which supports an upper side roller.
For example, by using two overhead cranes, the wire of each crane is attached to each roller support member that supports the upper roller. By doing in this way, compared with the case where a wire is attached to the upper surface of a housing | casing, it becomes possible to ensure a sufficient lifting allowance.

In addition, in the said embodiment, although the support surface said by a claim was formed on the horizontal rail, it is good also considering the support surface as the floor surface on which an apparatus main body is arrange | positioned. For example, when the housing 10 and the cylindrical body 50 are removed at once, the end of the roller support member H to which the rollers 21 and 22 are fixed projects from the flange portion 511 of the cylindrical body 50 toward the apparatus main body. It becomes. As a specific example, the roller support member H is composed of a member bent in a crank shape, and one end portion is attached to the housing 10 and the other end portion to which the rollers 21 and 22 are fixed is a cylinder. Projecting to the apparatus main body side from the flange portion 511 of the body 50.
Further, instead of providing the pair of horizontal rails 32 on the carriage 31, another member (for example, a flat plate) that forms a support surface may be provided.
Further, the support surface in the claims does not necessarily have to be horizontal, and may be a slightly inclined surface. As a result, even when the ion source is suspended in an upright posture, the ion source can be laid down so that the extraction port faces downward.

  In the above embodiment, a pair of lower rollers and a pair of upper rollers are provided, but the number of rollers is not limited thereto. For example, a pair of intermediate rollers may be provided at an intermediate position between the upper and lower rollers.

Furthermore, in the said embodiment, it was set as the structure which hold | maintains all the electrodes which comprise an extraction electrode system, but a housing | casing is good also as a structure which hold | maintains a part of electrode which comprises an extraction electrode system. Moreover, you may comprise a housing | casing and a cylinder with an integral member.
The shape of the electrode holding member that holds the electrode is not limited to the cylindrical body, and can be variously changed.

  In addition, it goes without saying that the present invention is not limited to the above-described embodiment, and various modifications can be made without departing from the spirit of the present invention.

DESCRIPTION OF SYMBOLS 100 ... Ion irradiation apparatus 101 ... Ion source 10 ... Case 11 ... Side peripheral surface O ... Drawer opening 21 ... Lower roller 22 ... Upper roller 102 ... Apparatus Main body 30 ... support base 31 ... carriage 32 ... horizontal rail 50 ... electrode holding member (cylinder)

Claims (4)

An ion source attached to the main body of the ion irradiation device in a predetermined mounting posture;
A housing provided with an ion extraction port; a plurality of electrodes for extracting ions from the extraction port; an electrode holding member connected to the housing and holding the plurality of electrodes; and a housing in the mounting posture. A lower roller and an upper roller removably attached to the body or electrode holding member,
In the standing posture in a state of being removed from the apparatus main body, only the lower roller attached to the housing or the electrode holding member is placed on a predetermined support surface in a rollable manner,
In the lying posture that has fallen from the standing posture and has a reduced height, both the lower roller and the upper roller attached to the housing or the electrode holding member are placed on the support surface. An ion source characterized by being a thing. The support surface is formed on a pair of horizontal rails provided in parallel,
The ion source according to claim 1, wherein the lower roller and the upper roller are provided in pairs so as to correspond to the horizontal rail. A method for transporting an ion source according to claim 1 or 2, comprising:
The ion source is removed from the apparatus main body and suspended in the standing posture,
Moving the ion source above the support surface while maintaining the standing posture;
Lowering the ion source and placing the lower roller on the support surface;
The ion source transport method, wherein the ion source is further lowered and the lower roller rolls on the support surface until the upper roller is placed on the support surface. An ion source attached to the main body of the ion irradiation device in a predetermined mounting posture;
A housing provided with an ion extraction port; a plurality of electrodes for extracting ions from the extraction port; an electrode holding member connected to the housing and holding the plurality of electrodes; and a housing in the mounting posture. An ion source comprising: a lower roller and an upper roller that are detachably attached to a body or an electrode holding member.