JP6653067B2 - Ion source support - Google Patents

Description

  The present invention relates to an ion source support for supporting an ion source.

  As a conventional ion source support table, as shown in Patent Document 1, there is one for mounting and transporting an ion source detached from an apparatus body such as an ion beam irradiation apparatus. Patent Document 1 describes that in order to stably transport an ion source having a large height, the ion source in an upright posture is laid down and supported in a laid-down posture with a reduced height. I have.

Specifically, the ion source is provided with a pair of rollers provided so as to sandwich the ion extraction port, and the ion source support is provided with a pair of rails on which the pair of rollers are rollably mounted. It is.
When the ion source is detached from the apparatus main body, a wire is attached to the rear side of the center of gravity of the ion source and suspended, so that the ion source is tilted forward, and the roller is mounted on the rail in the tilted forward attitude. . Thus, after the roller is placed on the rail, the ion source is gradually lowered, whereby the ion source falls forward by its own weight and assumes a falling posture.

  However, as described above, if the roller is mounted on the rail while the ion source is suspended, for example, the ion source may swing and become unstable, and the roller and the rail may be displaced. If the roller is placed on the rail with the misalignment, the roller will come off the rail and the ion source will fall off the ion source support, damaging the ion source and the ion source support, Man-made disasters can occur around the source support base.

JP 2016-110827 A

  Therefore, the present invention has been made to solve the above problems, and has as its main object to enable an ion source mounted on an ion source support to be in a stable posture in a prone position. is there.

That is, the ion source support according to the present invention mounts an ion source including an elongated plasma generation container and a pair of rollers provided on side walls of the plasma generation container that are opposed to each other in a direction orthogonal to the longitudinal direction. In the state where the ion source is suspended, a pair of rails on which the pair of rollers are rollably mounted, and in a state where the pair of rollers are mounted on the pair of rails, A pull-in mechanism for pulling the ion source from one end of the rail toward the other end.
Note that “pulling in from one end side to the other end side” here means that the direction of retraction is from one end side of the rail to the other end side, and that the roller is not necessarily connected to one end side of the rail. It is not necessary to place the ion source or to retract the ion source until it reaches the other end of the rail.

  In the case of the ion source support base configured as described above, the pull-in mechanism pulls the ion source from one end of the rail to the other end in a state where the pair of rollers are placed on the pair of rails, so that the suspension is suspended. Even if the lowered ion source is in an unstable state, the ion source can be brought into a stable state when the ion source is pulled in. This makes it possible to bring the ion source to the lying posture in a stable state, and to transport the ion source in a stable posture.

The retraction mechanism is provided outside the pair of rails, and has a movable body that can move from one end side to the other end side of the rail, and the movable body is integrated with the plasma generation container. It is preferable to move while contacting the provided contacted member.
With such a configuration, since the moving body is located outside the pair of rails, the worker can check the work situation such as whether the moving body is in contact with the contacted member from outside the rail. Work can safely proceed without entering the inside of the rail.

If the retracting mechanism is configured to retract the ion source with a constant retracting force, if the ion source is retracted by the retracting mechanism in an unbalanced state, the roller may bite on the rail, and from that state, If an attempt is made to pull in the ion source with a constant pulling force, there is a risk that the roller will derail and the ion source will fall.
Therefore, it is preferable that the pull-in mechanism is configured to be able to manually adjust the pull-in force of the ion source.
With such a configuration, it is possible to prevent the ion source from being pulled in at the discretion of the operator when a danger is likely to occur, thereby preventing an accident.

  As a specific embodiment, the retraction mechanism further includes a pair of transport belts provided along the rails outside each of the pair of rails, and the movable body is attached to each of the pair of transport belts. Configuration.

The moving body has an accommodation recess that opens upward, and the pair of rollers is mounted on the pair of rails, so that the contacted member is accommodated in the accommodation recess through the opening. Is preferably performed.
With such a configuration, the contacted member and the moving body can be brought into contact only by placing the pair of rollers on the pair of rails.

  According to the present invention configured as described above, the ion source detached from the apparatus main body can be placed on the ion source support base and can be stably placed in the falling posture.

FIG. 1 is a diagram schematically illustrating an entire configuration of an ion irradiation apparatus according to an embodiment. The figure which shows the ion source of the embodiment typically. The figure which shows typically the ion source support stand of the embodiment. The figure explaining the operation | movement of the ion source conveyance system of the embodiment.

  An embodiment of the ion source support according to the present invention will be described.

  The ion source support base X of the present embodiment supports the ion source 101 included in the ion irradiation device 100, and is used for transporting the ion source 101 to a predetermined position.

First, the ion irradiation apparatus 100 will be described with reference to FIG.
The ion irradiation apparatus 100 is used, for example, in semiconductor manufacturing, and includes an apparatus main body 102 having a mass separator 103, a separation slit 104, and the like, and an ion source 101 detachable from the apparatus main body 102. The ion beam extracted from the source 101 is applied to the wafer W held by the holder 105.

  The ion source 101 generates an ion beam containing predetermined ions such as phosphorus, arsenic, and boron and emits the ion beam to the apparatus main body 102. Specifically, as shown in FIG. A plasma generating container 10 having an elongated shape, an extraction electrode system (not shown) including a plurality of electrodes for extracting an ion beam from an extraction port O formed in the plasma generating container 10, and being connected to the plasma generating container 10. An electrode holding member 20 for holding an extraction electrode system.

A filament (not shown) that emits thermoelectrons is inserted into the plasma generation container 10, and the electrons emitted from the filament ionize the ion source gas introduced into the plasma generation container 10 to generate plasma. It is configured to:
As shown in FIG. 2, the plasma generation container 10 of the present embodiment has, for example, a rectangular parallelepiped shape, and has a vertically long shape when the ion source 101 is attached to the apparatus main body 102.
On one side surface 11a (hereinafter, referred to as a front surface 11a) of the plasma generation container 10, the above-described outlet port O is formed in a long shape. On the front surface 11a, a flange portion 12 having a plurality of bolt holes 13 is provided. Is provided.

  The extraction electrode system (not shown) accelerates and extracts an ion beam from the plasma generated in the plasma generation container 10 by the action of an electric field, and includes, for example, an acceleration electrode, an extraction electrode, a suppression electrode, a ground electrode, and the like. Have been. The extraction electrode system here is arranged near the above-mentioned extraction port O, and extracts a ribbon-shaped ion beam from the extraction port O.

  The electrode holding member 20 is a cylindrical body having the above-described plurality of electrodes provided therein, and has one end surface 21a attached to the front surface 11a of the plasma generation container 10 described above and the other end surface 21b attached to the apparatus main body 102. It is attached to a surface (not shown). The mounting surface of the apparatus main body 102 is a surface on the side of the mass separator 103, and is, for example, an end surface of a vacuum vessel (not shown) constituting a transport path of the ion beam. Further, the electrode holding member 20 is not limited to a cylindrical one, and its shape may be variously changed.

More specifically, a flange portion 22 having a plurality of bolt holes 23 is provided on one end surface 21a and the other end surface 21b of the electrode holding member 20, and is provided with a bolt hole 13 on the front surface 11a of the plasma generation container 10. By passing a bolt through the bolt hole 23 of the one end surface 21a of the electrode holding member 20, the plasma generation container 10 and the electrode holding member 20 are connected. Further, by passing a bolt through a bolt hole (not shown) on the mounting surface of the device main body 102 and a bolt hole 23 on the other end surface 21b of the electrode holding member 20, the device main body 102 and the electrode holding member 20 are connected.
Thereby, the ion source 101 is attached to the apparatus main body 102 in a predetermined attachment posture.

  As shown in FIGS. 1 and 2, the mounting posture of the present embodiment is a posture in which the ion source 101 stands up in the vertical direction. In other words, a posture in which the longitudinal direction of the plasma generation container 10 is parallel to the vertical direction. It is.

  The ion source 101 of the present embodiment includes a lower roller 31 provided below the plasma generation container 10 and an upper roller 32 provided above the plasma generation container 10 when attached to the apparatus main body 102. Is further provided.

  Here, a pair of lower rollers 31 are arranged so as to sandwich the outlet O from a direction orthogonal to the longitudinal direction, and a pair of upper rollers 32 sandwich the outlet O from a direction orthogonal to the longitudinal direction. Are located in That is, the lower roller 31 is provided on each of the opposing side surfaces 11b orthogonal to the front surface 11a and extending along the longitudinal direction, and the upper roller 32 is also provided on each of the opposing side surfaces 11b.

  Each of the pair of lower rollers 31 has the same height from the bottom surface 11c of the plasma generation container 10 and is arranged at the same distance from the front surface 11a.

  Each of the pair of upper rollers 32 is separated from the lower roller 31 by an equal distance upward along the longitudinal direction, and the distance between the pair of upper rollers 32 is equal to the distance between the pair of lower rollers 31. Are located in

  In the present embodiment, as shown in FIG. 1, in a state where the ion source 101 is attached to the apparatus main body 102, the lower roller 31, the upper roller 32, and the center of gravity G of the ion source 101 are linearly formed along the vertical direction. Are located in

  Note that each lower roller 31 and each upper roller 32 are rotatably supported by a roller support member H, and are attached to the opposed side surface 11b of the plasma generation container 10 via the roller support member H.

  Next, the ion source support base X of the present embodiment will be described with reference to FIG.

  The ion source 101 in a posture (hereinafter, referred to as a standing posture) which is detached from the apparatus main body 102 and suspended is placed on the ion source support base X, and the ion source 101 is in a lying posture having a lower center of gravity G than the standing posture. It is to support.

  Specifically, as shown in FIG. 3, the ion source support table X includes a truck 4 and a pair of rails 5 provided on the truck 4.

  The cart 4 includes a frame 41 and a plurality of wheels 42 attached to the frame 41. Each wheel 42 is attached to the lower surface of the frame body 41 and rolls on, for example, a floor surface on which the apparatus main body 102 is arranged or a dedicated floor surface for transporting the ion source 101.

The pair of rails 5 are provided on the upper surface of the frame body 41 and are horizontal rails extending parallel to each other along the horizontal direction.
More specifically, the distance between each rail 5 is equal to the distance between a pair of lower rollers 31 and the distance between a pair of upper rollers 32, and the length of each rail 5 is equal to the distance between the lower roller 31 and the upper roller. 32 is longer than the separation distance.
Further, stoppers 51 are provided at both ends of the rails 5 to prevent the lower roller 31 and the upper roller 32 from falling off the rails 5.

  However, as shown in FIGS. 3 and 4, the ion source support base X of the present embodiment is configured such that the ion source 101 is moved from one end of the rail to the pair of rails 5 with the pair of lower rollers 31 placed thereon. It further includes a retraction mechanism 6 that pulls in from A to the other end side B.

  The pull-in mechanism 6 causes the ion source 101 to apply a pulling force below the center of gravity G of the ion source 101, and causes a pair of lower rollers 31 to move from one end A to the other end B on the rail 5. The ion source 101 is provided with a function of falling down from an upright posture to a falling posture.

  Specifically, the retraction mechanism 6 includes a moving body 61 that can move from one end A to the other end B of the rail 5 and a driving unit 62 that moves the moving body 61. The ion source 101 is drawn in by moving from the one end A to the other end B of the rail 5 while contacting the contacted member Z provided integrally with the production container 10.

The contacted member Z is a part of the ion source 101 or a member attached to the ion source 101. In this embodiment, as shown in FIG. 2, a pair of contacted members Z is externally attached to the ion source 101. I have.
Specifically, the contacted member Z extends outward from the pair of lower rollers 31. Here, the contacted member Z is attached to a roller supporting member H that rotatably supports the lower roller 31, and It has a cylindrical shape extending along the axial direction.

As shown in FIG. 3, the moving body 61 has, for example, a resin block shape in which an upwardly-opening recess 61 </ b> S is formed, and the above-described contacted member Z is housed in the recess 61 </ b> S. .
The depth dimension of the housing recess 61S is set to be at least larger than the diameter of the contacted member Z, whereby the contacted member Z is housed in the housing recess 61S without protruding above the opening 61O.

  The retraction mechanism 6 of the present embodiment is configured to be able to manually pull in the ion source 101, and is configured here to be able to manually adjust the above-described retraction force. Here, the adjustment of the retraction force includes not only the adjustment of the magnitude of the retraction force but also the adjustment of the direction of the retraction force (that is, whether to pull in or push in).

  Specifically, the retraction mechanism 6 is configured so that the moving body 61 can be manually moved by the driving unit 62. More specifically, the driving unit 62 of the present embodiment includes a transport belt 621 to which the moving body 61 is attached, and a handle 622 for manually moving the transport belt 621.

Here, a pair of transport belts 621 are provided outside each rail 5, and these transport belts 621 are configured so that both are linked by a link mechanism 63 including a plurality of gears and link members.
Specifically, the transport belt 621 is a so-called timing belt in the form of an endless belt provided along each rail 5 and has a length along the rail 5 substantially equal to or slightly longer than the length of the rail 5. is there.

The handle 622 is connected to one of the conveyor belts 621 via gears or the like (not shown). Here, in view of operability and safety, the pull-in side of the ion source 101 on the upper surface of the frame body 41, that is, the rail 5 is provided on the other end side B.
Then, for example, by rotating the handle 622 in the forward direction (for example, clockwise), the moving body 61 is transported from the one end A to the other end B of the rail 5 by the transport belt 621, and the handle 622 is moved in the reverse direction (for example, By rotating the movable body 61 clockwise), the moving body 61 is transported by the transport belt 621 from the other end B of the rail 5 to the one end A.

  In the present embodiment, the handle 622 is rotated in the forward direction, and the moving body 61 is transported from one end A of the rail 5 to the other end B, whereby a positive pulling force acts on the ion source 101, and the force is applied. The value increases as the rotation speed of the handle 622 increases, and decreases as the rotation speed decreases. On the other hand, by rotating the handle 622 in the reverse direction and transporting the moving body 61 from the other end B of the rail 5 to the one end A, a negative pulling force (that is, a pushing force) acts on the ion source 101, The force increases as the rotation speed increases, and decreases as the rotation speed decreases.

  The retraction mechanism 6 is configured to be able to manually switch between a retraction state in which a retraction force acts on the ion source 101 and a stopped state in which the retraction force does not act on the ion source 101. Specifically, the pulling force acts on the ion source 101 by rotating the handle 622, and the pulling force does not act on the ion source 101 unless the handle 622 is operated.

As shown in FIG. 4, the ion source support base X configured as described above constitutes a transport system 200 for transporting the ion source 101 together with a suspending mechanism Y for suspending the ion source 101 detached from the apparatus main body 102. ing.
The suspension mechanism Y suspends the ion source 101 so as to be movable in the vertical direction and the horizontal direction, and here uses a chain block that is movable in the horizontal direction. As the suspension mechanism Y, a mechanism using an electric crane may be used.

  Next, the operation of the above-described transport system 200 will be described with reference to FIG.

  First, a case where the ion source 101 attached to the apparatus main body 102 is removed and transported to a desired place will be described.

  First, in a state where the ion source 101 is attached to the apparatus main body 102, the ion source support X is moved to the vicinity of the ion source 101.

Next, in a state where the chain of the chain block is hung on the ion source 101, for example, a user removes a bolt connecting the apparatus main body 102 and the electrode holding member 20, and removes the ion source 101 from the apparatus main body 102. As a result, the plasma generation container 10 and the electrode holding member 20 are integrally removed from the apparatus main body 102, and the ion source 101 is suspended by the suspension mechanism Y to be in an upright posture (FIG. 4A).
In the present embodiment, in order to suspend the ion source 101 while maintaining the mounting posture, that is, to make the mounting posture and the standing posture the same posture, the chain is hung on each of the roller supporting members H supporting the upper roller 32, for example. The ion source 101 is suspended from directly above the center of gravity G. Note that the chain may be attached to the plasma generation container 10.

  Subsequently, the suspended ion source 101 is turned or horizontally moved as necessary, and the ion source 101 is moved above the ion source support base X. More specifically, the ion source 101 is moved so that each of the pair of lower rollers 31 is located above one end A of the pair of rails 5.

  Then, the ion source 101 is gradually lowered, and the pair of lower rollers 31 is placed on one end A of the pair of rails 5 (FIG. 4B). At this time, the moving member 61 is previously placed so that the contacted member Z extending outward from the lower roller 31 is accommodated in the accommodating concave portion 61S of the moving member 61 by mounting the lower roller 31 on the rail 5. It is arranged on one end A of the rail 5.

  After placing the pair of lower rollers 31 on one end A of the pair of rails 5, it is confirmed that the contacted member Z is accommodated in the accommodation recess 61 </ b> S of the moving body 61, and the pull-in mechanism 6 causes the ion source to move. 101 is pulled from one end side A of the rail 5 to the other end side B. In the present embodiment, the operator rotates the handle 622 in the forward direction, for example, to move the moving body 61 from one end A of the rail 5 to the other end B (FIG. 4C).

  In this manner, the moving body 61 moves from one end A to the other end B of the rail 5 while being in contact with the contacted member Z, so that the lower roller 31 moves on the rail 5 from one end A to the other end B. As the upper roller 32 approaches the rail 5, the ion source 101 gradually tilts from the standing posture.

  Then, when the pair of upper rollers 32 is placed on the rail 5, both the lower roller 31 and the upper roller 32 are placed on the rail 5, and the ion source 101 is in the lying posture. Note that, in the present embodiment, the drawer port O faces downward in the lying posture.

  By removing the hook of the crane in this lying posture and, for example, moving the cart 4 by an operator, the ion source 101 can be transported to a desired position in a stable state.

  Subsequently, a case where the ion source 101 is attached to the apparatus main body 102 will be described.

  First, the ion source 101 placed on the ion source support X is moved to the vicinity of the apparatus main body 102. At this time, the ion source 101 is in the lying posture.

Next, the chain of the chain block is hung on the ion source 101, and the ion source 101 is lifted. Thereby, the upper roller 32 separates from the rail 5 and the lower roller 31 rolls on the rail 5 from the other end B to the one end A. Then, the lower roller 31 is separated from the rail 5, and the ion source 101 is suspended and assumes an upright posture.
At this time, in order to make the standing posture and the mounting posture the same posture, that is, in order to raise the ion source 101 along the vertical direction, for example, the chain is hung on each of the roller supporting members H supporting the upper roller 32, for example. The ion source 101 is suspended from directly above the center of gravity G. Note that the chain may be attached to the plasma generation container 10.

  Subsequently, the suspended ion source 101 is rotated, moved horizontally, or moved up and down as necessary to approach the apparatus main body 102, and connects the apparatus main body 102 and the electrode holding member 20 with bolts. As a result, the ion source 101 is attached to the apparatus main body 102 while maintaining the standing posture.

With the ion source support base X according to the present embodiment configured as described above, the pull-in mechanism 6 moves the ion source 101 to the rail 5 with the pair of lower rollers 31 mounted on the pair of rails 5.
Is pulled from one end side A to the other end side B, so that even if the suspended ion source 101 is in an unstable state, the ion source 101 is brought into a stable state when the ion source 101 is pulled in. can do. Thus, the ion source 101 can be brought to the lying posture in a stable state, and the ion source 101 can be transported in a stable posture.

By the way, when the ion source 101 detached from the apparatus main body 102 is suspended, for example, in a forwardly inclined posture, the ion source 101 is inclined at the time of removal and the ion source 101 and the apparatus main body 102 are rubbed. The device main body 102 is damaged. Further, when the ion source 101 is detached from the apparatus main body 102, a load is applied to a bolt or the like for fastening the ion source 101 and the apparatus main body 102, and the bolt or the like may be damaged.
On the other hand, when the ion source 101 suspended in the forwardly inclined posture is attached to the apparatus main body 102, the ion source 101 is fastened with bolts or the like while pressing the ion source 101 against the apparatus main body 102, which requires a large amount of work, and Also, there is a possibility that the bolt may be damaged due to a load applied thereto.

  In order to avoid such a problem, when removing the ion source 101 from the apparatus main body 102, it is preferable to remove the ion source 101 in the mounting posture without tilting the ion source 101 as much as possible. When the ion source 101 is placed on the support table X, it is dangerous to know which one of the side A and the other side B of the rail 5 falls.

On the other hand, in the case of the ion source support base X of the present embodiment, with the pair of lower rollers 31 mounted on the pair of rails 5, the pull-in mechanism 6 moves the ion source 101 to one end of the rail 5. A is pulled toward the other end side B from A, so that even if the ion source 101 removed from the apparatus main body 102 is mounted on the ion source support table X in the mounting posture without tilting, the ion source 101 is securely connected to the rail. Can be laid down on one side.
Accordingly, it is not necessary to tilt the ion source 101 when removing the ion source 101 from the apparatus main body 102, so that it is possible to prevent the ion source 101 from being rubbed with the apparatus main body 102 at the time of removal and to prevent a load from being applied to bolts and the like. be able to.
Further, when the ion source 101 is attached to the apparatus main body 102, it is not necessary to force the ion source 101 to the apparatus main body 102, and it is possible to prevent the work from becoming large and a load being applied to bolts and the like.

  Further, since the moving body 61 is located outside the pair of rails 5, the worker can check the work situation such as whether the moving body 61 is in contact with the contacted member Z from outside the rail 5. The operation can be safely performed without entering the inside of the rail 5.

  In addition, since the pull-in mechanism 6 is configured to be able to adjust the force for manually pulling in the ion source 101, the operator can judge when danger is likely to occur, for example, when the ion source 101 loses balance. The ion source 101 can be stopped from being pulled in, or the handle can be rotated in the reverse direction to push back the ion source. Thus, it is possible to prevent an accident in which the lower roller 31 loses the wheel from the rail 5 or the ion source 101 falls down.

  Note that the present invention is not limited to the above embodiment.

  For example, the retraction mechanism of the embodiment is configured to convey the moving body by the conveying belt using the timing belt, but moves the moving body from one end of the rail to the other end. Any configuration is possible as appropriate, and specifically, a configuration using a spring balancer, a winch, or the like for the retraction mechanism can be given.

More specifically, a spring balancer or a winch includes a hook (attachment portion) provided at the end of a wire and a main body that pulls the hook. The hook is a moving body, and the main body is a driving unit. is there.
More specifically, by hooking the hook on, for example, a plasma generation container, the hooked portion becomes a contacted member. Thus, the hook functions as a moving body that moves from one end to the other end of the rail while being in contact with the contacted portion.
Then, the main body is fixed to the other end of the cart, for example, and the lower roller is placed on one end of the rail, and by pulling the hook by the main body, the ion source is moved from one end to the other end. Can be retracted to the side. The main body does not necessarily need to be fixed to the carriage, but may be fixed to a member located on the other end side of the rail, a floor surface, or the like.

  In addition, the retracting mechanism is configured to be able to move the moving body manually in the above embodiment, but may be configured to be able to automatically move the moving body using a motor or the like, Regardless, a transmission that switches the speed ratio of the moving speed of the moving body may be provided.

  Further, the pull-in mechanism may push the ion source from one end of the rail to the other end.

In the above-described embodiment, the lower roller, the upper roller, and the center of gravity of the ion source are described as being arranged along the vertical direction in a state where the ion source is attached to the apparatus main body. The lower roller and the upper roller may be displaced from the center of gravity along the vertical direction, for example.
Even with such an ion source, if the chain is mounted directly above the center of gravity of the ion source, the ion source can be removed from the apparatus main body while maintaining the mounting posture, and thereafter, by the same operation as in the above-described embodiment. In addition, the ion source can be set to the lying posture.

  In the embodiment, the case where the standing posture and the mounting posture are the same posture has been described.However, for example, the ion source detached from the apparatus main body may be suspended in a posture tilted forward from the mounting posture, or as described above. After the ion source suspended in the forwardly inclined posture is raised in the vertical direction, the ion source may be placed on the ion source support base.

In the above-described embodiment, the ion source is pulled in from the one end of the rail toward the other end with the lower roller placed on one end of the rail. However, for example, the ion source is sufficiently longer than the longitudinal direction of the ion source 101. A rail may be prepared, and the ion source may be pulled in from one end to the other end of the rail with the lower roller placed on the center or the other end of the rail.
Further, when a long rail is used, two or more ion sources may be mounted on one ion source support.

  Although the contacted member of the above-described embodiment extends outward from the lower roller, it may extend outward from the opposite side surface of the plasma generation container, or may extend outward from the side surface of the electrode holding member. It may be something.

  In the embodiment, the lower roller and the upper roller are provided on the opposing side surfaces, but may be provided on the front surface and the back surface opposite to the front surface, or may be provided on the electrode holding member. . Further, the number of rollers is not limited to the above-described embodiment, and for example, a pair of intermediate rollers may be provided between the upper roller and the lower roller.

  In the embodiment, the ion source support has been described as supporting the ion source including the plasma generation container, the extraction electrode system, and the electrode holding member. However, the ion source support has the extraction electrode system. Or an ion source that does not include an electrode holding member, that is, a source that supports a plasma generation container.

  In addition, it goes without saying that the present invention is not limited to the above-described embodiment, but can be variously modified without departing from the gist thereof.

X: ion source support table 100: ion irradiation device 101: ion source 102: apparatus main body 10: plasma generation container 31: lower roller 32: upper roller 6 · Retraction mechanism 61 ··· Moving body 62 ··· Transport belt Z ··· Contacted member

Claims (5)

An ion source support table on which an ion source including a pair of rollers provided on a side wall opposed to a long plasma generating container and a direction orthogonal to a longitudinal direction in the plasma generating container is mounted,
In a state where the ion source is suspended, a pair of rails on which the pair of rollers are rollably mounted,
An ion source support table comprising: a pull-in mechanism that pulls the ion source from one end of the rail toward the other end when the pair of rollers are placed on the pair of rails. The retraction mechanism is provided outside the pair of rails, and has a movable body that can move from one end side of the rail to the other end side,
The ion source support according to claim 1, wherein the movable body moves while contacting a contacted member provided integrally with the plasma generation container.   The ion source support according to claim 1, wherein the pull-in mechanism is configured to be able to manually adjust a force for pulling the ion source. The retraction mechanism is
Further comprising a pair of conveyor belts provided along the rails outside each of the pair of rails,
4. The ion source support according to claim 3, wherein the movable body is attached to each of the pair of transport belts. 5. The moving body has a storage recess that opens upward,
By the pair of rollers is mounted on said pair of rails, the contacted member, according to claim 3 or 4 quoting Claim 2 or Claim 2 being housed in the housing recess through the opening The ion source support according to any one of claims.