JP6609894B2 - Dicing apparatus and abnormality detection method thereof - Google Patents

Description

  The present invention relates to a dicing apparatus and an abnormality detection method thereof, and more particularly to a dicing apparatus that detects an abnormality of a blade and an abnormality detection method thereof.

  2. Description of the Related Art A dicing apparatus is known in which a workpiece such as a wafer is cut (diced) by a blade that is rotated at a high speed by a spindle. In such a dicing apparatus, an optical sensor is used to detect blade breakage during dicing.

  For example, Patent Document 1 discloses a dicing apparatus that includes a light emitting element and a light receiving element that are disposed to face each other with a cutting edge of a cutting blade interposed therebetween, and detects a damaged state of the cutting blade based on the amount of light received by the light receiving element. Has been.

JP 2010-114251 A

  However, the dicing apparatus disclosed in Patent Document 1 cannot detect blade vibration or spindle failure due to imbalance due to blade attachment mistakes, etc., which causes defective wafer products and equipment failure. was there.

  The present invention has been made in view of such circumstances, and an object of the present invention is to provide a dicing apparatus and an abnormality detection method thereof that prevent the occurrence of defective products and the failure of the apparatus by detecting the abnormality of the blade. To do.

  In order to achieve the above object, one aspect of the dicing apparatus includes a disk-shaped blade, a spindle that rotates the blade around a rotation axis parallel to the XY plane, and a workpiece that is diced by the blade in parallel to the XY plane. A work table held on a flat surface, an XY direction drive unit that relatively moves the spindle and the work table in a direction parallel to the XY plane, and a Z direction drive unit that moves the spindle in the Z direction perpendicular to the XY plane, A detection unit for detecting the position of the spindle in the Z direction, a control unit for controlling the Z direction drive unit based on the detection result of the detection unit to keep the position of the spindle in the Z direction constant, and the position of the spindle in the Z direction And an abnormality detection unit that detects vibrations associated with the rotation of the blade based on the change in.

  According to this aspect, based on the detection result of the detection unit that detects the position of the spindle in the Z direction, the Z direction drive unit that changes the Z direction position perpendicular to the XY plane of the spindle is controlled to control the Z direction of the spindle. Since the position is kept constant and the vibration accompanying the rotation of the blade is detected based on the change of the position of the spindle in the Z direction, the abnormality of the blade can be detected, the occurrence of defective products and the failure of the device Can be prevented.

  The abnormality detection unit preferably detects vibration based on a change in torque of the Z-direction drive unit. Thereby, the vibration accompanying rotation of a braid | blade can be detected appropriately.

  The abnormality detection unit preferably detects vibration based on a change in the detection result of the detection unit. Thereby, the vibration accompanying rotation of a braid | blade can be detected appropriately.

  It is preferable that the control unit controls the Z direction driving unit in a direction to cancel the detected vibration. Thereby, the vibration of the blade in the Z direction can be reduced.

  The abnormality detection unit may detect the vibration at a position in the Z direction of the spindle where the vibration at the rotation speed of the spindle is amplified. Thereby, the vibration accompanying rotation of a braid | blade can be detected appropriately.

  In order to achieve the above object, one aspect of a method for detecting an abnormality of a dicing apparatus includes a disk-shaped blade, a spindle for rotating the blade around a rotation axis parallel to the XY plane, and a work to be diced by the blade. An abnormality detection method for a dicing apparatus having a work table held on a plane parallel to an XY plane, the driving step of moving the spindle in the Z direction perpendicular to the XY plane, and detecting the position of the spindle in the Z direction A control process for controlling the driving process based on the detection result of the detection process to keep the position of the spindle in the Z direction constant, and a vibration associated with the rotation of the blade based on a change in the position of the spindle in the Z direction. And an abnormality detection step for detecting the abnormality.

  According to this aspect, based on the detection result of the detection unit that detects the position of the spindle in the Z direction, the Z direction drive unit that changes the Z direction position perpendicular to the XY plane of the spindle is controlled to control the Z direction of the spindle. Since the position is kept constant and the vibration accompanying the rotation of the blade is detected based on the change of the position of the spindle in the Z direction, it is possible to detect the abnormality of the blade, and the occurrence of defective products and equipment failure Can be prevented.

  According to the present invention, it is possible to prevent the occurrence of defective products and the failure of the apparatus.

External view of dicing machine The perspective view which shows the structure of a process part Block diagram showing the system configuration of the Z movement mechanism The figure which shows the change of the torque of the servo motor during dicing processing of the semiconductor wafer Diagram showing the stroke distance of the spindle The figure which shows the relationship between the stroke distance of the spindle and the rotation speed of the blade where the vibration is amplified Block diagram showing the system configuration of the Z movement mechanism

  Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings.

[Configuration of dicing equipment]
FIG. 1 is a perspective view showing an appearance of a dicing apparatus 1 according to the present embodiment. The dicing apparatus 1 includes a high-frequency motor built-in type spindles 22 and 22 that are arranged to face each other and have a disk-shaped blade 21 and a wheel cover (not shown) attached to the tip, and a semiconductor wafer W to be diced (an example of a workpiece). A processing unit 2 having a work table 31 for sucking and holding the wafer on a plane parallel to the XY plane, a cleaning unit 52 for spin-cleaning a processed semiconductor wafer W, and a load port for mounting a cassette containing a large number of semiconductor wafers W 51, a transport unit 53 for transporting the semiconductor wafer W, and a controller 10 incorporated in the frame of the dicing apparatus 1 to control the operation of each unit in an integrated manner.

  As shown in FIG. 2, the processing unit 2 is guided by X guides 34, 34 provided on the X base 36, and is moved in the X direction indicated by XX in the drawing by a linear motor 35 (an example of an XY direction driving unit). The X table 33 is driven, and the X table 33 is provided with a work table 31 via a rotary table 32 that rotates in the θ direction.

  On the other hand, the side surface of the Y base 44 provided so as to straddle the linear motor 35 is guided by Y guides 42, 42, and a stepping motor (an example of an XY direction drive unit) (not shown) and a ball screw Y tables 41, 41 driven in the Y direction shown are provided.

  Each Y table 41 is provided with a Z moving mechanism 50. The Z movement mechanism unit 50 includes a Z table 43 to which the spindle 22 is fixed. The Z table 43 is a Z direction (here, a vertical direction) indicated by ZZ in a diagram perpendicular to the XY plane (here, a horizontal plane). ) Is supported by the Y table 41 so as to be movable. The Z table 43 is driven in the Z direction by a servo motor 102 (see FIG. 3) and a ball screw (not shown).

  With the structure of the processed portion 2, the blade 21 is rotated at a high speed from 6000 rpm to 80000 rpm by the spindle 22 around a rotation axis parallel to the Y direction. The blade 21 is indexed in the Y direction and cut and fed in the Z direction, and the work table 31 is cut and fed in the X direction. That is, the spindle 22 and the work table 31 move relatively in the direction parallel to the XY plane, and the spindle 22 moves in the Z direction perpendicular to the XY plane. The feed amounts in the X, Y, and Z directions are adjusted by controlling the linear motor 35, a stepping motor (not shown), and the servo motor 102 by the controller 10 shown in FIG.

<First Embodiment>
[Configuration of Z moving mechanism]
FIG. 3 is a block diagram showing a system configuration of the Z moving mechanism unit 50. The Z movement mechanism unit 50 includes a driver 100, a servo motor 102, an abnormality detection unit 106, and the like in addition to the blade 21, spindle 22, and Z table 43 described above.

  The driver 100 supplies drive power to the servo motor 102 based on the command signal input from the controller 10 to drive (rotate) the servo motor 102.

  The servo motor 102 moves the Z table 43 along the Z direction by rotating a ball screw (not shown). The servo motor 102 is not limited to the one that rotates the ball screw, and a linear servo motor may be used.

  The servo motor 102 also includes an encoder 104 that detects the rotation angle of the rotation shaft of the servo motor 102. The encoder 104 outputs information indicating the rotation angle associated with the rotation of the rotation shaft of the servo motor 102 to the driver 100 as a feedback signal. From the information indicating the rotation angle, the position of the spindle 22 in the Z direction (here, the height in the vertical direction) can be detected (an example of a detection unit).

  The abnormality detection unit 106 detects the vibration of the spindle 22 accompanying the rotation of the blade 21, and when the vibration is large, determines that an abnormality has occurred and notifies the controller 10 to that effect.

[Operation of Z movement mechanism (abnormality detection method)]
When the start of dicing is instructed, the blade 21 starts rotating by the spindle 22. Here, the controller 10 outputs to the driver 100 a command signal corresponding to the amount of movement that is the difference between the desired Z-direction position of the spindle 22 and the current Z-direction position. The driver 100 rotates the servo motor 102 according to the input command signal (an example of a driving process). As a result, the spindle 22 is moved to a desired position in the Z direction. As the servo motor 102 rotates, the encoder 104 outputs a feedback signal (an example of a detection process). The driver 100 (an example of a control unit) supplies drive power to the servo motor 102 so that a command signal from the controller 10 and a feedback signal (an example of a detection result) from the encoder 104 coincide with each other. Control the rotation angle. Thereby, the position of the spindle 22 in the Z direction is kept constant (an example of a control process).

  During this time, the abnormality detection unit 106 detects the vibration of the spindle 22 accompanying the rotation of the blade 21 (an example of an abnormality detection step). When an imbalance occurs in the rotation of the blade 21 due to an attachment error of the blade 21 or the like, vibration occurs in the spindle 22. In the dicing apparatus 1, since the rotation axis direction (Y direction) of the spindle 22 and the stroke direction (Z direction) of the spindle 22 are orthogonal, the vibration of the spindle 22 becomes a torque that moves the rotation axis of the spindle 22. For this reason, the driver 100 supplies drive power to vary the torque of the servo motor 102 in order to return the position of the spindle 22 in the Z direction to the original position. Therefore, vibration (change in the position of the spindle 22 in the Z direction) generated in the spindle 22 can be regarded as a change in the torque of the servo motor 102.

  FIG. 4 is a diagram showing a change in torque of the servo motor 102 while the blade 21 is rotating. The horizontal axis represents time [unit: second], and the vertical axis represents torque [unit: N · m]. FIG. 4A shows a change in torque during normal operation, and FIG. 4B shows a change in torque during abnormality. FIG. 4 shows the upper limit value and lower limit value of torque, which are threshold values for normal and abnormal torque change.

  The abnormality detection unit 106 monitors a change in torque of the servo motor 102 using a change in driving power of the driver 100. When the change in torque (change in drive power) exceeds the threshold, the abnormality detection unit 106 determines that an abnormality has occurred and notifies the controller 10 of the fact.

  In this embodiment, a change in the position of the spindle 22 in the Z direction is detected based on a change in the torque of the servo motor 102. However, the change is detected based on a change in the value of the encoder 104 (an example of a detection result of the detection unit). May be. In this case, the abnormality detection unit 106 may monitor the output signal of the encoder 104.

  Further, the abnormality detection unit 106 may input a change in the torque of the servo motor 102 or a change in the output signal of the encoder 104 to the controller 10 and control the servo motor 102 in a direction to cancel the vibration detected by the controller 10. Also in this case, if the change in the torque of the servo motor 102 or the change in the output signal of the encoder 104 exceeds the threshold value, it is determined that an abnormality has occurred, and the controller 10 is notified accordingly.

<Second Embodiment>
The abnormality detection unit 106 according to the first embodiment detects an abnormality of the blade 21 during the dicing process, but the abnormality detection unit 106 according to the second embodiment detects an abnormality of the blade 21 before performing the dicing process. Detect. Here, the position of the spindle 22 in the Z direction is set to a position where vibration accompanying the rotation of the blade 21 is easily amplified, and abnormality of the blade 21 is detected.

  FIG. 5 is a side view of the Z moving mechanism unit 50 and shows the stroke distance L of the spindle 22. Here, the distance in the Z direction between the rotation axis O of the spindle 22 and the position of the upper end in the Z direction of the Z table 43 that supports the spindle 22 is a stroke distance L. FIG. 6 is a diagram showing the relationship between the stroke distance L of the spindle 22 and the number of rotations of the blade 21 at which the vibration accompanying the rotation of the blade 21 at each distance L is amplified. : M], and the vertical axis represents the rotational speed [unit: rpm].

  The controller 10 reads this relationship from a memory (not shown), and calculates a stroke distance L corresponding to the rotation speed R when the semiconductor wafer W is diced. Then, the Z movement mechanism 50 is controlled to set the position of the spindle 22 in the Z direction to the calculated stroke distance L, and the blade 21 is rotated at the rotation speed R. In this state, the abnormality detection unit 106 monitors changes in the torque of the servo motor 102 and changes in the output signal of the encoder 104 to detect the occurrence of vibration.

  As described above, the occurrence of vibration is detected by setting the stroke distance L at which vibration is likely to be amplified (resonated) according to the rotation speed R when dicing is performed, so that the blade 21 is broken or other abnormalities are generated. Can be detected appropriately.

<Third Embodiment>
The Z movement mechanism unit according to the third embodiment controls the position of the spindle in the Z direction using a pulse motor and a linear scale.

  FIG. 7 is a block diagram illustrating a configuration of the Z moving mechanism unit 50 according to the third embodiment. In addition, the same code | symbol is attached | subjected to the part which is common in the Z movement mechanism part 50 shown in FIG. 3, and the detailed description is abbreviate | omitted. The Z movement mechanism unit 50 includes a driver 110, a pulse motor 112, a scale 114, a scale detection sensor 116, an abnormality detection unit 118, and the like.

  Based on the command signal input from the controller 10, the driver 110 supplies a drive pulse to the pulse motor 112 to rotate the pulse motor 112. The pulse motor 112 moves the Z table 43 that supports the spindle 22 in the Z direction by rotating a ball screw (not shown). The pulse motor 112 is not limited to the one that rotates the ball screw, and a linear pulse motor may be used.

  The Z table 43 is provided with a scale (linear scale) 114 having a scale extending in the Z direction. The scale detection sensor 116 is a sensor for optically reading the scale of the scale 114. The scale detection sensor 116 reads the scale of the scale 114 and outputs the read value information to the driver 110 as a feedback signal. The scale 114 and the scale detection sensor 116 can detect the position of the spindle 22 in the Z direction (an example of a detection unit).

  The abnormality detection unit 118 detects the vibration of the spindle 22 accompanying the rotation of the blade 21. Specifically, a change in torque of the pulse motor 112 is monitored using an output of a driving pulse of the driver 100. The detection may be performed based on a change in the reading value of the scale detection sensor 116. Further, the abnormality detection unit 118 determines that an abnormality has occurred when the vibration is large, and notifies the controller 10 to that effect.

  When the start of dicing is instructed, the blade 21 starts rotating by the spindle 22. Here, the controller 10 outputs to the driver 100 a command signal corresponding to the amount of movement that is the difference between the desired Z-direction position of the spindle 22 and the current Z-direction position. The driver 100 rotates the pulse motor 112 according to the input command signal.

  As a result, the Z table 43 that supports the spindle 22 moves in the Z direction. In response to the movement of the Z table 43, the scale detection sensor 116 reads the scale 114, generates a feedback signal, and outputs it to the driver 100. The driver 110 controls the rotation angle of the pulse motor 112 so that the command signal from the controller 10 matches the feedback signal from the scale detection sensor 116. Thereby, the position of the spindle 22 in the Z direction is kept constant.

  During this time, the abnormality detection unit 118 detects the vibration of the spindle 22 accompanying the rotation of the blade 21. When an abnormality occurs, the controller 10 is notified that an abnormality has occurred.

  As described above, even when the pulse motor 112 and the scale 114 are used, the vibration of the spindle 22 accompanying the rotation of the blade 21 can be detected and the abnormality of the blade 21 can be detected.

  The technical scope of the present invention is not limited to the scope described in the above embodiment. The configurations and the like in the embodiments can be appropriately combined between the embodiments without departing from the gist of the present invention.

  DESCRIPTION OF SYMBOLS 1 ... Dicing apparatus, 2 ... Processing part, 10 ... Controller, 21 ... Blade, 22 ... Spindle, 43 ... Z table, 50 ... Z moving mechanism part, 100, 110 ... Driver, 102 ... Servo motor, 104 ... Encoder, 106 118: Abnormality detection unit, 112 ... Pulse motor, 114 ... Scale, 116 ... Scale detection sensor, W ... Semiconductor wafer

Claims (12)

A disk-shaped blade,
A spindle for rotating the blade around a rotation axis parallel to the XY plane;
A work table for holding a work diced by the blade on a plane parallel to the XY plane;
An XY direction drive unit that relatively moves the spindle and the work table in a direction parallel to the XY plane;
A Z direction drive unit for moving the spindle in a Z direction perpendicular to the XY plane;
A detection unit for detecting the position of the spindle in the Z direction;
A control unit for controlling the Z-direction drive unit based on the detection result of the detection unit to keep the position of the spindle in the Z direction constant;
An anomaly detector that detects vibration associated with rotation of the blade based on a change in the position of the spindle in the Z direction;
Equipped with a,
The abnormality detection unit detects the vibration based on a change in torque of the Z-direction drive unit;
Dicing equipment. A disk-shaped blade,
A spindle for rotating the blade around a rotation axis parallel to the XY plane;
A work table for holding a work diced by the blade on a plane parallel to the XY plane;
An XY direction drive unit that relatively moves the spindle and the work table in a direction parallel to the XY plane;
A Z direction drive unit for moving the spindle in a Z direction perpendicular to the XY plane;
A detection unit for detecting the position of the spindle in the Z direction;
A control unit for controlling the Z-direction drive unit based on the detection result of the detection unit to keep the position of the spindle in the Z direction constant;
An anomaly detector that detects vibration associated with rotation of the blade based on a change in the position of the spindle in the Z direction;
Equipped with a,
The abnormality detection unit detects the vibration based on a change in a detection result of the detection unit;
Dicing equipment. The control unit controls the Z-direction drive unit in a direction to cancel the detected vibration ;
The dicing apparatus according to claim 1 or 2 . The abnormality detecting unit detects the vibration at a position in the Z direction of the spindle at which the vibration at the rotation speed of the spindle is amplified ;
The dicing apparatus according to claim 1 or 2 . A disk-shaped blade,
A spindle for rotating the blade around a rotation axis parallel to the XY plane;
A work table for holding a work diced by the blade on a plane parallel to the XY plane;
An XY direction drive unit that relatively moves the spindle and the work table in a direction parallel to the XY plane;
A Z direction drive unit for moving the spindle in a Z direction perpendicular to the XY plane;
A detection unit for detecting the position of the spindle in the Z direction;
A control unit for controlling the Z-direction drive unit based on the detection result of the detection unit to keep the position of the spindle in the Z direction constant;
An anomaly detector that detects vibration associated with rotation of the blade based on a change in the position of the spindle in the Z direction;
Equipped with a,
The control unit controls the Z-direction drive unit in a direction to cancel the detected vibration;
Dicing equipment. A disk-shaped blade,
A spindle for rotating the blade around a rotation axis parallel to the XY plane;
A work table for holding a work diced by the blade on a plane parallel to the XY plane;
An XY direction drive unit that relatively moves the spindle and the work table in a direction parallel to the XY plane;
A Z direction drive unit for moving the spindle in a Z direction perpendicular to the XY plane;
A detection unit for detecting the position of the spindle in the Z direction;
A control unit for controlling the Z-direction drive unit based on the detection result of the detection unit to keep the position of the spindle in the Z direction constant;
An anomaly detector that detects vibration associated with rotation of the blade based on a change in the position of the spindle in the Z direction;
Equipped with a,
The abnormality detecting unit detects the vibration at a position in the Z direction of the spindle at which the vibration at the rotation speed of the spindle is amplified;
Dicing equipment. A method for detecting an abnormality in a dicing apparatus comprising: a disk-shaped blade; and a spindle that rotates the blade about a rotation axis parallel to an XY plane,
A driving step of moving the spindle in a Z direction perpendicular to the XY plane by a Z direction driving unit ;
A detection step of detecting the position of the spindle in the Z direction;
A control step of controlling the driving step based on the detection result of the detection step to keep the position of the spindle in the Z direction constant;
An abnormality detection step of detecting vibration associated with rotation of the blade based on a change in the position of the spindle in the Z direction;
Equipped with a,
The abnormality detection step detects the vibration based on a change in torque of the Z-direction drive unit.
An abnormality detection method for a dicing apparatus. A method for detecting an abnormality in a dicing apparatus comprising: a disk-shaped blade; and a spindle that rotates the blade about a rotation axis parallel to an XY plane,
A driving step of moving the spindle in a Z direction perpendicular to the XY plane by a Z direction driving unit ;
A detection step of detecting the position of the spindle in the Z direction;
A control step of controlling the driving step based on the detection result of the detection step to keep the position of the spindle in the Z direction constant;
An abnormality detection step of detecting vibration associated with rotation of the blade based on a change in the position of the spindle in the Z direction;
Equipped with a,
The abnormality detection step detects the vibration based on a change in the detection result of the detection step.
An abnormality detection method for a dicing apparatus. The control step controls the Z-direction drive unit in a direction to cancel the detected vibration.
The method for detecting an abnormality of a dicing apparatus according to claim 7 or 8. The abnormality detection step detects the vibration at a position in the Z direction of the spindle at which the vibration at the rotation speed of the spindle is amplified.
The method for detecting an abnormality of a dicing apparatus according to claim 7 or 8. A method for detecting an abnormality in a dicing apparatus comprising: a disk-shaped blade; and a spindle that rotates the blade about a rotation axis parallel to an XY plane,
A driving step of moving the spindle in a Z direction perpendicular to the XY plane by a Z direction driving unit ;
A detection step of detecting the position of the spindle in the Z direction;
A control step of controlling the driving step based on the detection result of the detection step to keep the position of the spindle in the Z direction constant;
An abnormality detection step of detecting vibration associated with rotation of the blade based on a change in the position of the spindle in the Z direction;
Equipped with a,
The control step controls the Z-direction drive unit in a direction to cancel the detected vibration.
An abnormality detection method for a dicing apparatus. A method for detecting an abnormality in a dicing apparatus comprising: a disk-shaped blade; and a spindle that rotates the blade about a rotation axis parallel to an XY plane,
A driving step of moving the spindle in a Z direction perpendicular to the XY plane by a Z direction driving unit ;
A detection step of detecting the position of the spindle in the Z direction;
A control step of controlling the driving step based on the detection result of the detection step to keep the position of the spindle in the Z direction constant;
An abnormality detection step of detecting vibration associated with rotation of the blade based on a change in the position of the spindle in the Z direction;
Equipped with a,
The abnormality detection step detects the vibration at a position in the Z direction of the spindle at which the vibration at the rotation speed of the spindle is amplified.
An abnormality detection method for a dicing apparatus.

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