JP6660176B2 - Vacuum pump and split vane section used for it - Google Patents

Description

  The present invention relates to a semiconductor manufacturing apparatus, a flat panel display manufacturing apparatus, a process chamber in a solar panel manufacturing apparatus, a vacuum pump used as a gas exhaust means of other chambers and the like, and a divided vane portion used therefor. In particular, good exhaust performance can be obtained by effectively preventing contact failure of the divided stationary blade portion.

  A conventional vacuum pump of this type is disclosed in, for example, Patent Document 1. The vacuum pump of Patent Document 1 includes a turbo molecular unit that transfers gas between a rotating blade unit (6) and a stationary vane unit (70).

  The stationary blade portion (70) of the vacuum pump of the document 1 makes two divided stationary blade portions (70A, 70B) abut as disclosed in FIGS. 3 and 4 of the document 1 and the like. It is set in a ring by that.

  Each divided stationary blade portion (70A, 70B) includes inner and outer rims (72a, 72b, 73a, 73b), and a plurality of stator blades (71) supported by the inner and outer rims. The circumferential ends of the inner rims (72a, 72b) are in contact with each other.

  Referring to FIG. 12 of Patent Literature 1, in the vacuum pump of Patent Literature 1, as a specific divided stationary blade contact structure of the divided stationary blades (70A, 70B), FIG. As shown in b), in a state where the two divided stationary blade portions (70A, 70B) are in contact with each other, the circumferential end portions of the respective divided stationary blade portions (70A, 70B) face each other. Has adopted. Further, a notch (S) for forming an air gap between the other opposing rim is provided, and the circumferential length of the divided stationary blade portion becomes longer than the design dimension due to variation during processing. It prevents overlapping and warping of the direction ends. Further, a bent part (72b3) is provided at the other circumferential end of the opposed inner and outer rims, and the front side of the bent part (72b3) is opposed to the other circumferential end ( 72a1).

  However, since the bent portion (72b3) as described above is formed by bending with a press, the outer surface near the root of the bent portion (72b3) is as shown in FIGS. 19 (a) and (b) of the present application. As shown, the arc surface SF is obtained. Therefore, when the two divided stationary blade portions (70A, 70B) are brought into contact with each other, after one circumferential end comes into contact with the outer surface (arc surface SF) near the root of the bent portion (72b3). As shown in FIG. 19B of the present application, the user slides along the arc surface SF and sneaks under the other circumferential end. Therefore, in the configuration in which the bent portion (72b3) is simply provided as in the contact structure of Patent Document 1 described above, the contact failure of the divided stationary blade portions due to the overlap of the circumferential ends is effectively prevented. Cannot be prevented. When such overlapping of the circumferential ends occurs, the inclination angle of the stator blade (71) set in advance at an angle suitable for exhaust changes, and the exhaust performance as a vacuum pump decreases, and the favorable Exhaust performance cannot be obtained.

  Further, referring to FIG. 11 of Patent Literature 1, in Patent Literature 1, as a specific divided stationary blade contact structure, as shown in FIGS. A structure is also disclosed in which bent portions (72a3, 72b3) are provided at circumferential ends, and the front sides of these bent portions (72a3, 72b3) abut against each other.

  However, since the bent portions (72a3, 72b3) as described above are formed by bending using a press, a return of bending occurs in the bent portions (72a3, 72b3) as shown in FIG. Do not avoid things. Therefore, in the structure in which the front sides of the bent portions (72a3, 72b3) come into contact with each other as described above, the return of the bending generated in the bent portions (72a3, 72b3) causes the two portions as shown in FIG. In some cases, the contact dimension position (hereinafter referred to as “actual contact dimension position”) when the divided stationary blade portions (70A, 70B) are actually contacted exceeds the allowable error range of the contact dimension position in design. obtain. In this case, by bringing the two divided stationary blade portions (70A, 70B) into contact with each other, when the front sides of the bent portions (72a3, 72b3) come into contact with each other, an unexpected reaction force is generated at the contact portion. And a contact failure such as warpage of one or both of the divided stationary blade portions (70A, 70B) occurs, and the inclination angle of the stator blade (71) set at an angle suitable for exhaust in advance is reduced. As a result, the evacuation performance of the vacuum pump is reduced, and good evacuation performance may not be obtained.

  In addition, the code in parentheses in the above description is the code used in Patent Document 1.

JP 2014-173468 A

  The present invention has been made in order to solve the above-mentioned problems, and an object of the present invention is to effectively prevent defective contact of a divided stationary blade portion and to obtain a favorable exhaust performance. An object of the present invention is to provide a vacuum pump and a stationary blade portion used therein.

In order to achieve the above object, the present invention provides a rotating blade portion, at least one rim formed in a circumferential direction, and a plurality of divided stationary blades having a plurality of blades formed integrally with the rim. Parts having a stationary blade portion formed in an annular shape by abutting each other at circumferential ends, and a vacuum provided with a turbo-molecular pump portion that exhausts gas by the moving blade portion and the stationary blade portion. a pump, the circumferential end portion of at least one of the divided stationary blade portion, have a contact failure prevention structure that prevents contact failure between the circumferential ends of the other of the divided stationary blade portions The contact failure prevention structure includes a first bent portion at a circumferential end of the first divided stationary blade portion,
The first bent portion is bent in a direction in which a line of intersection between the front surface or the back surface and the front surface or the back surface of the rim forms a predetermined angle larger than 0 degrees with respect to the radial direction of the stationary blade portion, and The widthwise side portion of the first bent portion abuts on the circumferential end of the second divided stator vane portion .

In the present invention, the predetermined angle may be 90 degrees .

  In the present invention, the contact failure prevention structure further includes a second bent portion at a circumferential end of the second divided stationary blade portion, and at least a part of the second bent portion. However, it may be characterized in that it comes into contact with the first bent portion.

  In the present invention, the second bent portion is formed such that an intersection of a front surface or a back surface thereof and a front surface or a back surface of the rim is bent in a direction perpendicular to a radial direction of the stationary blade portion, and at least the second bent portion is provided. The widthwise side portion of the bent portion may be in contact with the first bent portion.

  In the present invention, the first bent portion and the second bent portion may be provided at positions where the width-direction side portions thereof can come into contact with each other.

  In the present invention, the contact failure prevention structure may include a shift correcting unit that corrects a position shift in a thickness direction of the divided stationary blade portion in a state where the two or more divided stationary blade portions are in contact with each other. May be a feature.

The present invention also provides a rotating blade portion, at least one rim formed in a circumferential direction, and a plurality of divided stationary blade portions having a plurality of blades formed integrally with the rim, and A vacuum pump comprising a turbo-molecular pump portion that has a stationary blade portion formed in an annular shape by abutting at a circumferential end portion and exhausts gas by the moving blade portion and the stationary blade portion, at least A circumferential end of one of the divided stator vanes having a contact failure preventing structure for preventing a contact failure with a circumferential end of the other divided stator vane; The structure includes a first bent portion at a circumferential end of the first divided stator vane portion, and the first bent portion has an intersection between a front surface or a back surface thereof and a front surface or a back surface of the rim. lines bent in a direction parallel to the radial direction of the stationary blade portions and the bending angle is less than 90 degrees It folded so as to corner, and the base near the outer surface of the first folding bends, characterized in that abuts against the circumferential ends of the second of the divided stationary blade portions.

  In the present invention, a second bent portion is provided at a circumferential end of the second divided stationary blade portion, and the second bent portion has a front surface or a back surface and a front surface or a back surface of the rim. Is bent in a direction parallel to the radial direction of the vane portion, and the outer surface near the base of the second bent portion is in contact with the outer surface near the base of the first bent portion. It may be characterized in that it has a contact structure.

  In the present invention, the second bent portion is bent so that a bending angle is an acute angle of less than 90 degrees, and at least an outer surface near the base of the second bent portion is the first bent portion. It may be characterized in that it comes into contact with the outer surface near the root of the bent portion.

  In the present invention, the outer surface near the base of the first bent portion may be formed as a flat surface.

  In the present invention, the outer surface near the base of the second bent portion may be formed as a flat surface.

  In the present invention, the outer surface near the base of the first bent portion includes a flat surface at least in a thickness range of a circumferential end of the first divided vane portion. It may be.

  In the present invention, the outer surface near the base of the second bent portion may include a flat surface at least within the range of the outer surface near the base of the first bent portion.

  In the present invention, the contact failure prevention structure includes a shift / overlap prevention unit at a circumferential end of the divided stator vane portion for preventing a displacement or overlap with another divided stationary blade portion. It may be characterized.

  In the present invention, a cutout for forming a void portion is provided at an end of the rim in a state where two or more of the divided stationary blade portions are in contact with each other. May be a feature.

  In the present invention, as described above, the circumferential end of at least one of the divided stator vanes has a contact failure prevention structure for preventing a contact failure with the circumferential end of the other divided stator vane. Therefore, it is possible to accurately contact the two divided stationary blade portions as designed, it is possible to effectively prevent poor contact between the divided stationary blade portions, and it is preferable to obtain good exhaust performance. A vacuum pump and a stationary blade used for the same.

1 is an overall sectional view of a vacuum pump to which the present invention is applied. FIG. 2A is a plan view of a stationary vane portion constituting the vacuum pump of FIG. 1, and FIG. 2B is a plan view of two divided stationary vane portions constituting the stationary vane portion. FIG. 3A is a plan view of the (1-1) contact failure prevention structure in the vacuum pump according to the present invention (a state before forming a bent portion), and FIG. FIG. 4C is a plan view of the contact failure prevention structure (the state after forming the bent portion and the state before the contact), and FIG. 4C is a cross-sectional view taken along the line AA in FIG. ) Is a plan view of the (1-1) contact failure prevention structure (the state after forming the bent portion and the state after the contact), and FIG. 4E is the BB arrow in FIG. View sectional view. FIG. 4A is a plan view of the (1-2) contact failure prevention structure of the vacuum pump according to the present invention (state before forming a bent portion), and FIG. 4B is a plan view of the (1-2) contact prevention structure. FIG. 3C is a plan view of the contact failure prevention structure (the state after forming the bent portion and the state before the contact), and FIG. 4C is a cross-sectional view taken along the line CC in FIG. (C-2) is a sectional view taken along the line DD in FIG. (B), and FIG. (D) is a plan view of the (1-2) contact failure prevention structure (state after forming a bent portion) (E-1) is a sectional view taken along the line E-E in FIG. (D), and FIG. (E-2) is a cross-sectional view taken along the line FF in FIG. View sectional view. FIG. 5A is a plan view of the (1-3) contact failure prevention structure of the vacuum pump according to the present invention (a state before forming a bent portion), and FIG. FIG. 3C is a plan view of the contact failure prevention structure (the state after forming the bent portion and the state before the contact), and FIG. 4C is a cross-sectional view taken along line GG in FIG. (C-2) is a cross-sectional view taken along the line HH in FIG. (B), and FIG. (D) is a plan view of the (1-3) contact failure prevention structure (state after forming a bent portion) (E-1) is a cross-sectional view taken along the arrow II in FIG. (D), and FIG. (E-2) is a arrow JJ in the same figure (d). View sectional view. FIG. 6 is a plan view of the (1-4) contact failure prevention structure in the vacuum pump according to the present invention (the state after forming the bent portion and the state before the contact). FIG. 7A is a plan view of the (1-1) contact failure prevention structure in which (1-1) the contact failure prevention structure of FIG. 3 is provided with a deviation correcting means (before forming a bent portion). (B) is a plan view of the (1-5) contact failure prevention structure (the state after forming the bent portion and the state before the contact), and FIG. FIG. 2D is a cross-sectional view taken along the line KK in FIG. 2B, and FIG. FIG. 7E is a cross-sectional view taken along line LL in FIG. FIG. 8A is an explanatory view of the (2-1) contact failure prevention structure in the vacuum pump according to the present invention (state before contact), and FIG. 8B is (2-1) Contact failure prevention structure. Explanatory diagram (state after contact). FIG. 9A is an explanatory view of a (2-2) contact failure prevention structure in the vacuum pump according to the present invention (state before contact), and FIG. 9B is a (2-2) contact failure prevention structure. Explanatory diagram (state after contact). Explanatory drawing of the (2-3) contact failure prevention structure in the vacuum pump according to the present invention (state before contact). Explanatory drawing (2-4) Contact failure prevention structure in a vacuum pump according to the present invention (state before contact). Explanatory drawing of the (3-1) contact failure prevention structure in the vacuum pump which concerns on this invention (state before contact). FIG. 13A is a plan view of the (4-1) contact failure prevention structure in the vacuum pump according to the present invention (state before contact), and FIG. 13B is a view C in FIG. FIG. 3B is a cross-sectional view taken along the line D-D in FIG. 3A, and FIG. 4C is a plan view of the (4-1) contact failure prevention structure. (D. State after contact), FIG. (D-1) is a sectional view taken along the line EE in FIG. (C), and FIG. (D-2) is a sectional view taken along the line FF in FIG. Sectional view. FIG. 14A is a plan view (state before contact) of the (4-2) contact failure prevention structure in the vacuum pump according to the present invention, and FIG. 14B is a view G in FIG. -G sectional view, FIG. 2B is a sectional view taken along the line HH in FIG. 1A, and FIG. 2C is a plan view of the (4-2) contact failure prevention structure. (During contact), FIG. (D-1) is a sectional view taken along the line II in FIG. (C), and FIG. (D-2) is a sectional view taken along the line JJ in FIG. Sectional view. FIG. 15A is a plan view of the (4-3) contact failure prevention structure in the vacuum pump according to the present invention (state before contact), and FIG. 15B is a view K of FIG. FIG. 2B is a sectional view taken along the line MM in FIG. 2A, and FIG. 2C is a plan view of the (4-3) poor contact prevention structure. (A state after contact), FIG. (D-1) is a sectional view taken along the line NN in FIG. (C), and FIG. (D-2) is a sectional view taken along the line PP in FIG. Sectional view. FIG. 16A is a plan view of the (4-4) contact failure prevention structure in the vacuum pump according to the present invention (state before contact), and FIG. 16B is a view QQ in FIG. (C) is a plan view of the (4-4) contact failure prevention structure (after contact), and (d) is a view taken along the line SS in FIG. Sectional view. FIG. 17A is a plan view (state before contact) of the (4-5) contact failure prevention structure in the vacuum pump according to the present invention, and FIG. 17B is a sectional view taken along line TT in FIG. (C) is a plan view of the (4-5) contact failure prevention structure (state after contact), and (d) is a view taken along the line U-U in FIG. Sectional view. FIG. 18A is a plan view (a state before contact) of the (4-6) contact failure prevention structure in the vacuum pump according to the present invention, and FIG. 18B is a sectional view taken along line V-V in FIG. (C) is a plan view of the (4-6) contact failure prevention structure (state after contact), and (d) is a view taken along the line WW in FIG. Sectional drawing and figure (e) is explanatory drawing of other embodiment of the restraint means in the (4-6) contact failure prevention structure. FIG. 19A is an explanatory view of a conventional contact failure prevention structure disclosed in Patent Document 1 (state before contact), and FIG. 19B is an explanatory view of the contact failure prevention structure (contact state). Later state). FIG. 20A is an explanatory view of a conventional contact failure prevention structure disclosed in Patent Document 1 (state before contact), and FIG. 20B is an explanatory view of the contact failure prevention structure (contact). Later state).

  Hereinafter, the best mode for carrying out the present invention will be described in detail with reference to the accompanying drawings.

  FIG. 1 is a longitudinal sectional view of a vacuum pump to which the present invention is applied, FIG. 2A is a plan view of a stationary blade portion constituting the vacuum pump of FIG. 1, and FIG. It is a top view of two division | segmentation stationary blade parts.

  The vacuum pump P of FIG. 1 includes a turbo-molecular pump unit Pt for transferring gas between a rotating blade unit A1 and a stationary stationary blade unit A2, and a screw groove pump unit Ps for transferring gas using a screw groove B. And is used as a gas exhaust means of a process chamber in a semiconductor manufacturing apparatus, a flat panel display manufacturing apparatus, a solar panel manufacturing apparatus, and other chambers.

  Referring to FIG. 1, an outer case 1 of a vacuum pump P shown in FIG. 1 has a bottomed cylinder in which a cylindrical pump case 1A and a bottomed cylindrical pump base 1B are integrally connected in the cylinder axis direction with fastening bolts. An upper end of the pump case 1A is opened as an intake port 2 for sucking gas, and an exhaust port 3 for exhausting gas is formed on a side surface of a lower end of the pump base 1B. Provided.

  The intake port 2 is connected to a high vacuum chamber Ch, such as a process chamber of a semiconductor manufacturing apparatus, by a fastening bolt provided on a flange at the upper edge of the pump case 1A. In addition, the exhaust port 3 is connected to an auxiliary pump via a pipe or a valve (not shown).

  A cylindrical stator column 4 is provided upright at a central portion in the pump case 1A, and a rotor shaft 5 is provided at a central portion inside the stator column 4. A magnetic bearing 6 is provided inside the stator column 4, and the rotor shaft 5 is rotatably supported by the magnetic bearing 6 around its axis.

  A rotor 7 is provided outside the stator column 4. The rotor 7 includes a cylindrical member 7B that covers the outer peripheral surface of the stator column 4 and an end member 7A that closes one end of the cylindrical member 7B. It has a structure with.

  The tip of the rotor shaft 5 protrudes from one end of the stator column 4, and the protruding tip of the rotor shaft 5 is connected to the end member 7A of the rotor 7, so that the rotor 7 is rotated. 5 and is integrated.

  Further, a drive motor 8 is provided inside the stator column 4. The drive motor 8 drives the rotor shaft 5 to rotate around its axis so that the rotor 7 rotates integrally with the rotor shaft 5. Can be.

  By the way, in the vacuum pump P of FIG. 1, a substantially upper half of the rotor 7 functions as a turbo molecular pump section Pt, and a substantially lower half of the rotor 7 functions as a thread groove pump section Ps. The turbo molecular pump section Pt and the thread groove pump section Ps are specifically configured as follows.

<< Description of structure of turbo molecular pump section Pt >>
Referring to FIG. 1, the turbo molecular pump unit Pt includes a rotating blade part A1 and a fixed stationary blade part A2 as a means for transferring gas from an intake port 2 to an exhaust port 3, and a pump shaft center ( Specifically, the structure is such that a plurality of them are alternately arranged along the rotor 7 or the axis of the rotor shaft 5;

  The moving blade portion A1 is composed of a plurality of rotating blades 9 integrally formed on the outer peripheral surface of the rotor 7, and these rotating blades 9 are provided radially in the pump radial direction with the pump axis as a center. Further, each of the plurality of rotary blades 9 has a shape inclined at an optimum angle for exhausting gas molecules.

  Referring to FIGS. 2A and 2B, the stationary blade portion A2 has at least one rim (two inner and outer rims 12, 13 in the example of FIGS. 2A and 2B) formed in the circumferential direction. A plurality of divided stationary blade portions 11 (11A, 11B) having a plurality of blades 10 formed integrally with the rim are formed in an annular shape by abutting each other at circumferential ends. The plurality of blades 10 are also arranged radially, similarly to the rotary blade 9 described above.

  Hereinafter, for convenience of explanation, the circumferential end 12a of the inner rim 12 that constitutes one of the divided stationary blade portions 11A is referred to as a "first circumferential end portion 12a", and the other divided stationary blade portion. The circumferential end 12b of the inner rim 12 that constitutes 11B is referred to as a “second circumferential end 12b”.

  As a method for positioning and fixing the divided vane portion 11 in the pump axis direction and the pump radial direction (the direction orthogonal to the pump axis; the same applies hereinafter), in the vacuum pump P of FIG. In this method, a plurality of spacers 17 are stacked and stacked, and an outer rim 13 is interposed between the stacked spacers 17.

  In a state where the plurality of divided stationary blade portions 11 are arranged and set in the vacuum pump P by the positioning and fixing method as described above, each of the plurality of blades 10 is preliminarily tilted at an optimum angle for exhausting gas molecules. Is set.

  By the way, at the time of assembling the vacuum pump P, the first circumferential end 12a and the second circumferential end 12b are overlapped with each other in the state where the two divided stationary blade portions 11 are in contact with each other, or When the contact accuracy of the divided stationary blade portion 11 is poor due to, for example, warpage of the rim 12 of the divided stationary blade portion 11 and the contact failure of the divided stationary blade portion 11 occurs, the optimal setting preset for the plurality of blades 10 is performed. The angle may not be reflected, and the exhaust performance of the vacuum pump P may be reduced. For this reason, in order to obtain good exhaust performance in the vacuum pump P, it is important to increase the contact accuracy of the divided stationary blade portions 11 and prevent poor contact.

  From the above viewpoints, in the vacuum pump P of FIG. 1, the circumferential end (the first circumferential end 12 a or the second circumferential end) of at least one of the divided stationary blade portions 11 (11 A or 11 B). Contact between the portion 12b) and the circumferential end (the first circumferential end 12a or the second circumferential end 12b) of the other divided stationary blade portion 11 (11A or 11B). (Hereinafter referred to as “contact failure prevention structure”). The details of the contact failure prevention structure will be described later.

<< Operation explanation of turbo molecular pump part Pt >>
In the vacuum pump P of FIG. 1, the activation of the drive motor 8 causes the rotor shaft 5, the rotor 7 and the plurality of rotating blades 9 to rotate integrally. At this time, in the turbo-molecular pump unit Pt, the uppermost rotor 9 imparts a downward momentum (a direction from the intake port 2 to the exhaust port 3) to the gas molecules incident from the intake port 2. The gas molecules having the momentum in the downward direction are sent by the blade 10 to the next-stage rotating blade 9 side. The above-described application of the momentum to the gas molecules and the feeding operation are repeatedly performed in multiple stages at the moving blade portion A1 and the stationary blade portion A2, so that the gas molecules on the intake port 2 side are downstream of the rotor 7 ( In FIG. 1, the air is exhausted so as to sequentially move toward the lower side of the rotor 7).

<< Structure explanation of screw groove pump part Ps >>
Referring to FIG. 1, the thread groove pump portion Ps forms a thread groove channel 15 by a substantially lower half of the rotor 7 and a thread groove stator 14 located on the outer peripheral surface side of the rotor 7. Exhaust gas through. Specifically, in the vacuum pump P of FIG. 1, a substantially lower half of the rotor 7 is surrounded by a cylindrical screw groove stator 14, and a screw groove B formed on the inner peripheral surface of the screw groove stator 14. The thread groove channel 15 is provided on the outer peripheral surface side of the rotor 7 by the outer peripheral surface of the rotor 7.

  The inlet (upstream end side) of the thread groove flow path 15 communicates with the downstream side of the turbo-molecular pump section Pt, and the outlet (downstream end side) of the thread groove flow path 15 passes through the pump exhaust passage 16 through an exhaust port. It communicates with 3.

  As another embodiment of the thread groove flow path 15, for example, a configuration in which the thread groove B of the thread groove stator 14 is omitted and such a thread groove B is formed on the outer peripheral surface of the rotor 7, Can be adopted on both the outer peripheral surface of the rotor 7 and the inner peripheral surface of the thread groove stator 14, and the thread groove B can be formed on a part of the outer peripheral surface of the rotor 7 or the inner peripheral surface of the thread groove stator 14. A configuration formed partially may also be adopted.

  In the screw groove pump portion Ps having the above-described structure, the gas is transferred while compressing the gas by the drag effect between the screw groove B and the outer peripheral surface of the rotor 7. 15 is set to be deepest on the inlet side (the flow path opening end closer to the intake port 2) and shallowest on the outlet side (the flow path opening end closer to the exhaust port 3).

<< Operation explanation of thread groove pump section >>
In the vacuum pump P of FIG. 1, gas molecules reach the inlet side of the thread groove channel 15 by the evacuation operation of the turbo-molecular pump unit Pt. The arriving gas molecules flow into the thread flow path 15 and are discharged from the pump exhaust flow while being compressed from a transition flow to a viscous flow by the effect of the rotation of the rotor 7, that is, the drag effect between the outer peripheral surface of the rotor 7 and the screw groove B. Head to Road 16. Then, the viscous flow of the gas molecules that has reached the pump exhaust passage 16 is exhausted out of the outer case 1 from the exhaust port 3 by an auxiliary pump (not shown).

《Details of structure to prevent poor contact》
(1-1) Structure for Preventing Contact Failure FIG. 3A is a plan view of the structure for preventing contact failure (1-1) in the vacuum pump according to the present invention (a state before forming a bent portion), and FIG. (B) is a plan view of the (1-1) contact failure prevention structure (the state after forming the bent portion and the state before the contact), and (c) is A- in FIG. (D) is a plan view of the (1-1) contact failure prevention structure (the state after forming the bent portion and the state after the contact), and FIG. FIG. 4 is a sectional view taken along the line BB in FIG. Each of the plan views corresponds to the vicinity of the inner rim 12 in the portion A in FIG.

  In the vacuum pump P of FIG. 1, in a state where the two divided stationary blade portions 11 (11A and 11B) shown in FIG. 2B are brought into contact as shown in FIG. A circumferential end of the portion 11 (11A, 11B) (hereinafter, a circumferential end 12a of the first divided stationary blade portion 11A is referred to as a "first circumferential end 12a", and a second divided static blade 12a is referred to as a "first circumferential end 12a"). The circumferential end portion 12b of the wing portion 11B is referred to as a "second circumferential end portion 12b"), and the (1-1) contact shown in FIGS. 3B to 3E. Adopts a defect prevention structure.

  In the (1-1) contact failure prevention structure, as shown in FIGS. 3B to 3E, the first circumferential end 12a includes a first bent portion 19A, and the first bent portion 19A is provided. And a part of the width direction side portion CP of the first bent portion 19A is in contact with the second circumferential end portion 12b. In this structure, the first bent portion 19A is bent such that the intersection line between the front surface or the back surface and the front surface or the back surface of the rim 12 is orthogonal to the radial direction of the stationary blade portion A2.

  As shown in FIG. 2A, in a state where the two divided stationary blade portions 11 (11A, 11B) are in contact with each other, the circumferential end 13a of the outer rim 13 constituting each divided stationary blade portion 11 is formed. Although they are opposed to each other, since the gap Ga is set between the circumferential ends 13a, the circumferential ends 13a of the outer rim 13 do not abut each other. . The gap Ga is formed by a notch Ki provided at a circumferential end of one of the inner and outer rims 12 and 13 in a state where the divided stationary blade portions 11 (11A and 11B) are in contact with each other. .

  Even when the (1-1) contact failure prevention structure is employed, the first bent portion 19A is formed by bending using a press or the like, so that the first bent portion 19A returns to bend. That is inevitable.

  However, in the (1-1) contact failure prevention structure, as described above, in a state where the two divided stationary blade portions 11 are in contact with each other, the first circumferential end 12a is mainly connected to the second circumferential end portion 12a. Since it comes into contact with the circumferential end 12b, the return of the bending generated in the first bent portion 19A does not affect the contact dimension position L1 on the width direction side portion of the first bent portion 19A. . Due to such return of the bending, there is almost no structural problem that the contact dimension position L1 on the width direction side portion of the first bent portion 19A is different from the designed contact dimension position L0.

  Therefore, in the (1-1) contact failure prevention structure, even if bending returns to the first bent portion 19A, the two divided stationary blade portions 11 (11A, 11B) are accurately contacted as designed. As a result, it is possible to effectively prevent a decrease in the exhaust performance of the vacuum pump due to poor contact of the divided stationary vane portion 11, and obtain good exhaust performance.

  Further, in the (1-1) contact failure prevention structure, when the two divided stationary blade portions 11 are brought into contact with each other, the first circumferential end 12a is vertically moved with respect to the second circumferential end 12b. Even if the direction position is slightly shifted, if the shift amount is within the range of the height h of the first bent portion, a part of the width direction side portion CP of the first bent portion 19A is provided in the second circumferential direction. Since the ends 12b come into contact with each other, the first circumferential ends 12a are less likely to sink below the second circumferential ends 12b.

  Therefore, this (1-1) contact failure prevention structure has a divided static state due to the vertical overlapping of the first circumferential end 12a and the second circumferential end 12b due to the above-described sneaking. Poor contact of the wings can be prevented, and this is also suitable for obtaining good exhaust performance.

(1-2) Contact Failure Prevention Structure FIG. 4A is a plan view of the (1-2) contact failure prevention structure of the vacuum pump according to the present invention (a state before a bent portion is formed), and FIG. (B) is a plan view of the (1-2) contact failure prevention structure (the state after forming the bent portion and the state before the contact), and (c-1) in FIG. FIG. 3C is a cross-sectional view taken along the line CC, and FIG. 3C is a cross-sectional view taken along the line DD in FIG. FIG. 2D is a plan view of the (1-2) contact failure prevention structure (the state after forming the bent portion and the state after the contact), and FIG. FIG. 3D is a cross-sectional view taken along the line EE in FIG. 4D, and FIG. 4E is a cross-sectional view taken along the line FF in FIG. Each of the plan views corresponds to the vicinity of the inner rim 12 in the portion A in FIG.

  In the (1-1) contact failure prevention structure, the first bent portion 19A is provided at the first circumferential end 12a. In addition to this, the first bent portion 19A is further provided, as shown in FIGS. As shown in the figure, the second circumferential end 12b includes a second bent portion 19B, and the width direction side portion CP of the second circumferential end 12b and the second bent portion 19B. May be employed in which a part of the first circumferential end abuts on the first circumferential end 12a. In this structure, the intersection of the front or back surface of the second bent portion 19B and the front or back surface of the rim 12 is bent in a direction perpendicular to the radial direction of the stationary blade portion A2.

  In the (1-2) contact failure prevention structure, the same operation and effect as the (1-1) contact failure prevention structure can be obtained, and when the two divided stationary blade portions 11 are brought into contact with each other, More stable than the (1-1) contact failure prevention structure described above, the second circumferential end 12b sinks below the first circumferential end 12a, or both sinks by such sinking. Poor contact of the divided stationary blades due to the circumferential ends 12a and 12b overlapping in the vertical direction can be prevented. This is because even if the vertical position of the second circumferential end 12b is slightly shifted with respect to the first circumferential end 12a, the shift amount is within the height h of the second bent portion 19B. This is because part of the width direction side portion CP of the second bent portion 19B abuts on the first circumferential end portion 12a.

(1-3) Improper Contact Prevention Structure FIG. 5A is a plan view of the (1-3) improper contact prevention structure of the vacuum pump according to the present invention (before a bent portion is formed), and FIG. (B) is a plan view of the (1-3) contact failure prevention structure (a state after forming the bent portion and a state before the contact), and FIG. (C-1) is a view in FIG. FIG. 2C is a cross-sectional view taken along a line GG, and FIG. 2C is a cross-sectional view taken along a line HH in FIG. FIG. 4D is a plan view of the (1-3) contact failure prevention structure (the state after forming the bent portion and the state after the contact), and FIG. (d) is a cross-sectional view taken along the line II, and FIG. (e-2) is a cross-sectional view taken along the line JJ in FIG. Each of the plan views corresponds to the vicinity of the inner rim 12 in the portion A in FIG.

  In the case of the configuration including the first bent portion 19A and the second bent portion 19B as in the (1-2) contact failure prevention structure, a structure in which both bent portions 19A and 19B are bent in the same direction. 5 (b), as shown in FIG. 5 (b) to FIG. 5 (e-2), the bent portions 19A and 19B may be in opposite directions. The structure may be bent. In the case of this structure, the same operation and effect as the above (1-2) can be obtained.

(1-4) Structure for Preventing Contact Failure In addition, in the case of the structure including the first bent portion 19A and the second bent portion 19B as in the above (1-2) structure for preventing contact failure, (1-4) 1-4) As a contact failure prevention structure, as shown in FIG. 6, not only the contact by the first circumferential end 12a and the second circumferential end 12b, but also the first bending The portion 19A and the second bent portion 19B may be configured to be provided at positions where the width side portions CP can contact each other. In the case of this configuration, the same operation and effect as those of the above (1-2) contact failure prevention structure can be obtained.

(1-5) Improper Contact Prevention Structure The (1-1) to (1-4) improper contact prevention structures are provided in the thickness direction of the divided stationary blade portion when the two divided stationary blade portions 11 are brought into contact with each other. 7 (a) to 7 (e) can be provided as means for correcting the positional deviation.

  FIG. 7A is a plan view of the (1-1) contact failure prevention structure in which (1-1) the contact failure prevention structure of FIG. 3 is provided with a deviation correcting means (before forming a bent portion). (B) is a plan view of the (1-5) contact failure prevention structure (the state after forming the bent portion and the state before the contact), and FIG. It is KK arrow sectional drawing in b). FIG. 4D is a plan view of the (1-5) contact failure prevention structure (the state after forming the bent portion and the state after the contact), and FIG. 4E is the same as FIG. It is an LL arrow sectional view.

  Referring to FIGS. 7A to 7E, the (1-5) misalignment correcting means 20 in the contact failure prevention structure includes a width direction side portion CP (FIG. 3B) of the first bent portion 19A. (See FIG. 2), and a taper 22 is formed on the protrusion 21. The taper 22 is formed so as to be inclined toward the base of the first bent portion 19A.

  When the two divided stationary blade portions 11 abut against each other, for example, the vertical position of the second circumferential end portion 12b is slightly shifted with respect to the first circumferential end portion 12a. When the positional deviation in the thickness direction of the divided stationary blade occurs between the two, the circumferential end 12b of the other divided stationary blade portion 11 abuts against the taper 22 of the protrusion 21 described above, and By sliding in the direction of the first circumferential end 12a of one of the divided stationary blade portions 11 along the direction 22, such a positional deviation in the divided stationary blade thickness direction is corrected.

  The deviation correcting means 20 includes the first bent portion 19A of the first circumferential end 12a and the second bent portion 19A, as in the above (1-2) to (1-4) contact failure prevention structures. May be provided on both of the second bent portions 19B of the circumferential end 12b.

  Further, in the case of a configuration including the first bent portion 19A and the second bent portion 19B, the two bent portions 19A and 19B may have a structure bent in the same direction. As shown in (b) to (e-2), the structure may be such that both bent portions 19A and 19B are bent in opposite directions.

  In the case of these configurations, the same operation and effect as the above (1-5) poor contact prevention structure can be obtained. However, when provided in a structure bent in the opposite direction, the above (1-5) poor contact prevention structure is provided. Regardless of the position of the prevention structure in which the positional deviation in the thickness direction occurs, an effect of correcting the positional deviation can be obtained.

(2-1) Structure for Preventing Contact Failure FIG. 8A is an explanatory view (state before contact) of the structure for preventing contact failure (2-1) in the vacuum pump according to the present invention, and FIG. (2-1) It is explanatory drawing (state after contact) of the contact failure prevention structure.

  Also in this (2-1) contact failure prevention structure, as shown in FIG. 8A, in a state where the two divided stationary blade portions 11 (11A and 11B) are in contact with each other, each divided stationary blade portion 11 11 has a structure in which circumferential ends (a first circumferential end 12a and a second circumferential end 12b) face each other, and a first circumferential end. The fact that the first bent portion 19A is provided in 12a is common to the above (1-1) to (1-5) contact failure prevention structures, and the other structures are different as follows.

That is, in the contact failure prevention structure of FIG. 8A, the front side S of the first bent portion 19A faces the direction of the second circumferential end 12b. That is, the first bent portion 19A is bent in a direction in which the intersection line between the front surface or the back surface and the front surface or the back surface of the rim 12 is parallel to the radial direction of the stationary blade portion 2A, and The outer surface S1 near the base of the bent portion 19A comes into contact with the second circumferential end 12b.
As means for obtaining the contact as described above, in the (2-1) contact failure prevention structure of FIG. 8A, the bending angle of the first bent portion 19A (the first bent portion 19A and Angle between the inner rims 12). For example, the bending angle is set to be an acute angle of less than 90 degrees.

  The outer surface S2 other than near the root of the first bent portion 19A is largely displaced by the return of the bending at the first bent portion 19A. On the other hand, the outer surface S1 near the base of the first bent portion 19A has a relatively small displacement due to the return of the bending.

  By the way, as described in paragraph 0008, when the outer surface S2 other than the vicinity of the root of the first bent portion 19A largely displaced by the return of the bending abuts on the second circumferential end 12b, as described in paragraph 0008. For example, the inner rim 12 is warped in the vicinity of the circumferential end 12b or the like, so that the two divided stationary blade portions 11 cannot abut with high accuracy as designed.

  On the other hand, in the case of a configuration in which the outer surface S1 near the base of the first bent portion 19A abuts on the second circumferential end 12b as an abutting portion, as in (2-1) a contact failure prevention structure. Even if the return of bending occurs in the first bent portion 19A, the displacement of the outer surface S1 near the root of the first bent portion 19A (displacement due to the return of bending) is small as described above, so the two divided stationary blades The part 11 can be accurately contacted as designed.

(2-2) Structure for Preventing Contact Failure FIG. 9 (a) is an explanatory view of the structure for preventing contact failure (2-2) of the vacuum pump according to the present invention (state before contact), and FIG. (2-2) It is explanatory drawing (state after contact) of the contact failure prevention structure.

  In the (2-1) contact failure prevention structure, the first bent portion 19A is provided at the first circumferential end portion 12a, but in addition to this, the second circumferential end portion is further provided. A configuration in which a second bent portion 19B is provided in the second rim 12b, and an intersection of the front or rear surface of the second bent portion 19B and the front or rear surface of the rim 12 is parallel to the radial direction of the stationary blade portion 2B. And the outer surface S1 near the base of the second bent portion 19B abuts on the outer surface S1 near the base of the first bent portion 19A. With such a configuration, the same operation and effect as those of the above (2-1) contact failure prevention structure can be obtained.

(2-3) Structure for Preventing Contact Failure FIG. 10 is an explanatory view (state before contact) of (2-3) the structure for preventing contact failure in the vacuum pump according to the present invention.

  When the (2-1) or (2-2) contact failure prevention structure is employed, as in the (2-3) contact failure prevention structure, the outer surface S1 near the root of the first bent portion 19A is used. May be formed as a flat contact surface. The outer surface S1 near the root of the bent first bent portion 19A is generally an arc surface as shown by a broken line in FIG. 10, but in this (2-3) poor contact prevention structure, the root is not formed. The near outer surface S1 is formed as a flat surface.

  There are various possibilities for forming such a flat surface. For example, the outer surface S1 near the root of the first bent portion 19A may be subjected to mechanical processing such as polishing or grinding to set the position after the fact, or the first bent portion 19A may be bent. In the mold used for the bending, the mold surface corresponding to the outer surface S1 near the base of the first bent portion 19A may be a flat surface, so that the first bending portion 19A may be formed simultaneously with the bending.

  As shown by the broken line in FIG. 10, when the outer surface S1 near the base of the first bent portion 19A is an arc surface, the second circumferential end 12b abuts on the arc surface. For this reason, since the second circumferential end 12b slides along the arc surface and easily gets under the first circumferential end 12b, the two circumferential ends 12a, 12b Are likely to occur due to the overlapping of the blades in the vertical direction.

  On the other hand, when the outer surface S1 near the root of the first bent portion 19A is formed as a flat surface as in this (2-3) contact failure prevention structure, the second circumferential surface is formed on the flat surface. The second circumferential end 12b slides due to the contact with the circular arc surface as described above, and thereby the second circumferential end 12b is brought into contact with the first circle. Since the phenomenon of sneaking under the circumferential end 12b is less likely to occur, it is possible to effectively prevent the contact failure of the divided stationary vane portion due to the overlapping of the circumferential ends 12a, 12b in the vertical direction.

(2-4) Structure for Preventing Contact Failure FIG. 11 is an explanatory view of the (2-4) structure for preventing contact failure in the vacuum pump according to the present invention (state before contact).

  In the (2-3) contact failure prevention structure, the outer surface S1 near the root of the first bent portion 19A is formed as a contact surface on a flat surface, but in addition to the above, the (2-2) In the case of a configuration including the second bent portion 19B as in the contact failure prevention structure, the outer surface S1 near the base of the second bent portion 19B is formed as in (2-4) the contact failure prevention structure. The contact surface may be formed on a flat surface. In this case, the same operation and effect as those of the above (2-3) structure for preventing poor contact can be obtained.

(3-1) Structure for Preventing Contact Failure FIGS. 12A and 12B are explanatory views (state before contact) of the structure for preventing contact failure (3-1) in the vacuum pump according to the present invention.

  (3-1) Although a detailed illustration is omitted in the contact failure prevention structure, for example, the structure shown in FIG. 8A, that is, the two divided stationary blade portions 11 (11A and 11B) are brought into contact with each other. In a state where the circumferential end portions (first circumferential end portion 12a, second circumferential end portion 12b) of each of the divided stationary vane portions 11 face each other, and the first circle The fact that the first bent portion 19A is provided at the circumferential end 12a and the front side of the first bent portion 19A faces the direction of the second circumferential end 12b will be described earlier. (2-1) to (2-4), which are common to the contact failure prevention structures described above, and the other structures are different as follows.

  Referring to FIGS. 12A and 12B, in this (3-1) poor contact prevention structure, the outer surface S1 near the root of the first bent portion 19A is formed by the thickness of the first circumferential end 12a. The arc surface RS (R1, R2) not exceeding t and a flat surface FS continuous with the arc surface RS (R1, R2), and the flat surface FS is formed as a contact surface with the second circumferential end 12b. I have.

  Various methods are conceivable for obtaining the arc surface RS not exceeding the thickness t as described above. As a specific example of such a method, in the example of FIG. 12A, the outer surface S1 near the root of the first bent portion 19A is a relatively large arc surface exceeding the thickness t of the first circumferential end 12a from the beginning. R1 (RS), and by removing a portion shown by a two-dot chain line in FIG. 12A from the arc surface R1 (RS) by machining, the arc surface R1 (RS) is removed. A method is adopted in which the arc surface R1 (RS) is interrupted halfway, and the end of the interrupted arc surface R1 (RS) is set to be equal to or less than the thickness t. In this method, the curvature of the arc surface R1 (RS) does not change before and after machining.

  As a specific example of the method of obtaining the arc surface RS not exceeding the thickness t as described above, in the example of FIG. 12B, the outer surface S1 near the root of the first bent portion 19A is the first circumferential end. An arc surface R2 (RS) having a relatively large curvature exceeding the thickness t of 12a is formed by machining a portion indicated by a two-dot chain line in FIG. 12B with respect to the arc surface R2 (RS). A method is adopted in which the arc surface R2 (RS) is formed into an arc surface having a small curvature by removing the arc surface.

  In the (3-1) contact failure prevention structure, as described above, a flat surface is formed on the outer surface S1 near the base of the first bent portion 19A within the thickness t of the first circumferential end portion 12a. The presence of the FS as an abutment surface and the contact of the second circumferential end 12b with the flat surface FS make the second circumferential end 12b a first circumferential end. Since it is difficult to dive below the portion 12a, it is possible to effectively prevent the contact failure of the divided stationary blade portion 11 due to the overlapping of the two circumferential ends 12a and 12b in the vertical direction.

  More desirably, by setting the end of the arc surface R1 (RS) to be equal to or less than half of the thickness t, both circumferential ends 12a and 12b of the divided stationary blade portion 11 are overlapped in the vertical direction. Poor contact can be more effectively prevented.

(4-1) Improper Contact Prevention Structure FIG. 13A is a plan view of the (4-1) improper contact prevention structure in the vacuum pump according to the present invention (state before abutment), and FIG. ) Is a sectional view taken along the line CC in FIG. (A), FIG. (B-2) is a sectional view taken along the line DD in FIG. (A), and (c) is (4-1). ) Plan view of the contact failure prevention structure (state after contact), FIG. (D-1) is a sectional view taken along the line EE in FIG. (C), and FIG. It is FF arrow sectional drawing in (c).

  Referring to FIGS. 13A to 13D, in the (4-1) contact failure prevention structure, like the (1-1) contact failure prevention structure and the like, the two divided stationary blade portions 11 ( 11A, 11B), the circumferential end portions (first circumferential end portion 12a, second circumferential end portion 12b) of the respective divided stationary blade portions 11 face each other. In addition to adopting the structure, a means for preventing displacement and overlapping of the divided stationary blade portions 11 (hereinafter referred to as “displacement / overlap preventing means 30”) is additionally provided at the contact portion of the divided stationary blade portion 11. Provided.

  (4-1) The misalignment / overlap prevention means 30 in the contact failure prevention structure includes a plate body 31 provided at the first circumferential end 12a, and the two divided stationary blade portions 11 (11A, 11B) are provided. The plate 31 extends obliquely upward from the first circumferential end 12a such that the plate 31 is disposed on the upper surface of the second circumferential end 12b when the contact is made. An inclined portion 31A having an inclined shape is provided.

  By the way, in the (4-1) contact failure prevention structure, when the two divided stationary blade portions 11 (11A, 11B) are brought into contact with each other, the end surface of the first circumferential end 12a and the second circle are removed. The end face of the circumferential end 12b functions as a positioning surface and comes into contact with the end face. At this time, since the plate 31 of the first circumferential end 12a is disposed on the upper surface of the second circumferential end 12b, the second circumferential end 12b and the first circumferential end 12b are brought into contact with each other after the contact. Even if a deviation occurs in the vertical direction with respect to the circumferential end 12a, the second circumferential end 12b does not overlap the first circumferential end 12a. Contact failure due to overlapping of the divided stationary blade portions 11 can be effectively prevented.

  When the two divided stationary blade portions 11 (11A, 11B) are brought into contact with each other as described above, the plate body 31 is disposed on the upper surface of the second circumferential end portion 12b as described above. When interference occurs when the inclined portion 31A of the plate body 31 contacts the second circumferential end 12b, the alignment surface (the end surface of the first circumferential end 12a and the second circumferential end 12b) As a means for avoiding such interference, a notch 31B is provided at a position corresponding to the inclined portion 31A of the plate body 31 at the second circumferential end 12b. Provided.

(4-2) Structure for Preventing Contact Failure FIG. 14A is a plan view (state before contact) of the structure for preventing contact failure (4-2) in the vacuum pump according to the present invention, and FIG. ) Is a sectional view taken along the line GG in FIG. 3A, FIG. 3B is a sectional view taken along the line HH in FIG. 3A, and FIG. ) Plan view of the contact failure prevention structure (state after contact), FIG. (D-1) is a sectional view taken along the line II in FIG. (C), and FIG. It is JJ arrow sectional drawing in (c).

  In the (4-1) contact failure prevention structure, the plate 31 is provided at the first circumferential end 12a as the displacement / overlap prevention means 30, but this plate (hereinafter referred to as the "first plate"). 31 ”), and in the (4-2) contact failure prevention structure, a second plate 32 is provided at the first circumferential end 12a as the similar displacement / overlap prevention means 30. I have.

  The second plate body 32 is arranged such that when the two divided stationary blade portions 11 (11A, 11B) are brought into contact with each other, the second plate body 32 is arranged on the lower surface of the second circumferential end 12b. 32 is provided with an inclined portion 32A having a shape extending obliquely downward from the first circumferential end 12b.

  Further, when the two divided stationary blade portions 11 (11A, 11B) are brought into contact with each other, the first plate body 31 and the second plate body 32 do not overlap each other, so that these plate bodies 31 are not overlapped with each other. , 32 are arranged at different positions that do not face each other in the width direction of the first circumferential end 12a.

  Also in this (4-2) contact failure prevention structure, when the two divided stationary blade portions 11 (11A, 11B) are brought into contact, the end surface of the first circumferential end portion 12a and the second circle are removed. The end face of the circumferential end 12b functions as a positioning surface and comes into contact with the end face. At this time, the first plate 31 is disposed on the upper surface of the second circumferential end 12b, and the second plate 32 is disposed on the lower surface of the second circumferential end 12b. For this reason, even if a vertical displacement occurs between the second circumferential end 12b and the first circumferential end 12a after the contact, the second circumferential end 12b is in the second circumferential end 12b. It does not overlap above or below the one circumferential end 12a, and it is possible to effectively prevent such poor contact due to the overlap of the divided stationary blade portions.

  When the two divided stationary blade portions 11 (11A, 11B) are brought into contact with each other as described above, the second plate 32 is disposed on the lower surface of the second circumferential end 12b as described above. At this time, when interference occurs due to the inclined portion 32A of the second plate body 32 coming into contact with the second circumferential end portion 12b, the alignment surface (the end surface of the first circumferential end portion 12a and the second The end face of the circumferential end portion 12b of the second circumferential end portion becomes difficult. Therefore, as a means for avoiding such interference, as in (4-1) the structure of the divided stationary vane portion, the second circumferential end portion is used. In 12b, a cutout portion 32B is provided at a position corresponding to the inclined portion 32A of the second plate body 32.

(4-3) Structure for Preventing Poor Contact FIG. 15A is a plan view of the (4-3) structure for preventing poor contact in the vacuum pump according to the present invention (state before contact), and FIG. ) Is a sectional view taken along the line KK in FIG. (A), FIG. (B-2) is a sectional view taken along the line MM in FIG. (A), and (c) is (4-3). ) A plan view of the contact failure prevention structure (state after contact), FIG. (D-1) is a sectional view taken along the line NN in FIG. (C), and FIG. It is the PP arrow sectional drawing in (c).

  In the (4-2) contact failure prevention structure, as a specific configuration of the displacement / overlap prevention means 30, the first plate body 31 and the second plate body 32 are formed at the first circumferential end. Although a configuration in which they are arranged at different positions that do not face each other in the width direction of 12a is adopted, as another specific configuration of the displacement / overlap prevention means, (4-3) a contact failure prevention structure includes two When the divided stationary blade portions are brought into contact with each other, such two plate members (the first plate member 31 and the second plate member 32) can be overlapped, and both plate members 31, 32 Of the second circumferential end 12b over the first circumferential end 12a or under the first circumferential end 12a by restricting the overlapping portion of Poor contact of the stationary blade portion 11 is effectively prevented.

  In the (4-3) contact failure prevention structure, the restraining means 40 includes a pin body 41 erected at the first circumferential end 12a and a recess 42 formed at the second circumferential end 12b. By the engagement, the overlapping portion between the first plate 31 and the second plate 32 is configured to be restrained from the vertical direction. Note that the pin body 41 may be provided upright at the second circumferential end 12b, and the recess 42 may be formed at the first circumferential end 12a.

  The restraining means 40 in this (4-3) contact failure prevention structure has only the restraining function described above, and the first circumferential end 12a and the second circumferential end 12b are positioned. There is no matching function. Also in this (4-3) contact failure prevention structure, the first circumferential end 12a and the second circumferential end when the two divided stationary blade portions 11 (11A, 11B) are brought into contact with each other. The alignment with the end surface of the first circumferential end 12a and the end surface of the second circumferential end 12b are performed in the same manner as in (4-1) or (4-2), the contact failure prevention structure. Is made to contact as an alignment surface.

(4-4) Contact Failure Prevention Structure FIG. 16A is a plan view of the (4-4) contact failure prevention structure in the vacuum pump according to the present invention (state before contact), and FIG. (A) is a cross-sectional view taken along the line QQ, (c) is a plan view of the (4-4) poor contact prevention structure (state after contact), and (d) is the same figure. It is the SS arrow sectional view in (c).

  In this (4-4) contact failure prevention structure, by adding a positioning function to the restraining means 40 described above, the positioning surface (the end face of the first circumferential end 12a and the end face of the first circumferential end 12a) is added. The alignment between the first circumferential end 12a and the second circumferential end 12b due to contact at the second circumferential end 12b) can be omitted. That is, in this (4-4) contact failure prevention structure, the outer peripheral surface of the restraining pin 41 and the inner surface of the concave portion 42 are set as alignment surfaces, and the two divided stationary blade portions 11 (11A, 11B) are formed. When they are brought into contact with each other, the set alignment surfaces come into contact with each other, whereby the two divided stationary blade portions 11 (11A and 11B) are aligned.

  Therefore, in this (4-4) contact failure prevention structure, by adding a positioning function to the restraining means 40, the second circumferential end 12b is placed above the first circumferential end 12a. The positioning of the positioning surface can be effectively performed while effectively preventing the contact failure of the divided stationary blade portions 11 due to the overlapping or the lower portion thereof.

(4-5) Structure for Preventing Contact Failure FIG. 17A is a plan view (state before contact) of the structure for preventing contact failure (4-5) in the vacuum pump according to the present invention, and FIG. FIG. 4A is a cross-sectional view taken along the line TT in FIG. 4A, FIG. 4C is a plan view of the (4-5) contact failure prevention structure (state after contact), and FIG. It is U-U arrow sectional drawing in (c).

  This (4-5) poor contact prevention structure also has a positioning function added to the restraining means 40 in the same manner as the (4-4) poor contact prevention structure, so that the positioning surface ( The end surface of the first circumferential end 12a and the end surface of the second circumferential end 12b) are brought into contact with each other, so that the first circumferential end 12a, the second circumferential end 12b, Can be omitted, but the specific configuration of the restraining means 40 is different as follows.

  That is, the restraining means 40 in this (4-5) contact failure prevention structure forms the groove 43 on the end face of the first circumferential end 12a and the protrusion on the end face of the second circumferential end 12b. When the two stationary vane portions 11 (11A, 11B) are brought into contact with each other, the projections 44 are fitted into the grooves 43.

  In this (4-4) contact failure prevention structure, the edge 43A of the groove 43 and the base peripheral portion 44A of the projection 44 are respectively set as alignment surfaces, and the two divided stationary blade portions 11 (11A, 11B), the projections 44 are fitted into the grooves 43 and their alignment surfaces come into contact with each other, whereby the two divided stationary blade portions 11 (11A, 11B) are aligned, specifically, Alignment between the first circumferential end 12a and the second circumferential end 12b is performed.

  Although not shown, the edge 43A of the groove 43 and the peripheral portion 44A of the base of the projection 44 are not set as alignment surfaces, respectively, and (4-3) the first circumferential end as in the contact failure prevention structure. Positioning may be performed at the portion 12a and the second circumferential end 12b.

(4-6) Contact Failure Prevention Structure FIG. 18A is a plan view of the (4-6) contact failure prevention structure in the vacuum pump according to the present invention (state before contact), and FIG. FIG. 5A is a cross-sectional view taken along the line V-V, FIG. 5C is a plan view of the (4-6) contact failure prevention structure (state after contact), and FIG. (C) is a cross-sectional view taken along line WW, and (e) is an explanatory view of another embodiment of the restraining means in the (4-6) contact failure prevention structure.

  This (4-6) poor contact prevention structure also has a positioning function added to the restraining means 40 in the same manner as the (4-4) poor contact prevention structure. The end surface of the first circumferential end 12a and the end surface of the second circumferential end 12b) are brought into contact with each other, so that the first circumferential end 12a, the second circumferential end 12b, Can be omitted, but the specific configuration of the restraining means 40 is different as follows.

  That is, the restraining means 40 in this (4-6) contact failure prevention structure has a structure in which the upper member 45 and the lower member 46 are integrally connected by the connecting member 47, and the two divided stationary blade portions 11 When (11A, 11B) is brought into contact, the first circumferential end 12a and the second circumferential end 12b are inserted between the upper member 45 and the lower member 46. ing.

  In this (4-6) contact failure prevention structure, the end surface of the first circumferential end 12a, the end surface of the second circumferential end 12b, and the outer surface of the connecting member 47 are aligned. The first circumferential end 12a and the second circumferential end 12b are inserted between the upper member 45 and the lower member 46, and both circumferential ends are set. By bringing the end surfaces (alignment surfaces) of 12a and 12b into contact with the outer surface (alignment surface) of the connecting member 47, the alignment between the first circumferential end 12a and the second circumferential end 12b is performed. Is performed. Since the two circumferential ends 12a and 12b inserted as described above are restrained by the upper member 45 and the lower member 46, the second circumferential end 12b is connected to the first circumferential end 12a. The contact failure of the divided stationary blade portion 11 caused by overlapping on or underneath is effectively prevented.

  As another embodiment of the restraining means 40 in the (4-6) contact failure prevention structure described above, for example, as shown in FIG. 18E, the inner surface of the upper member 45 and the inner surface of the lower member 46 are tapered. By forming the first member 48, the first and second circumferential ends 12 a and 12 b may be easily inserted between the upper member 45 and the lower member 46. In addition, the taper 48 may be provided in the middle of the inner surface of the upper member 45 or the lower member 46 as shown in FIG.

  Although not shown, the outer surface of the connecting member 47 is not set as an alignment surface, and the first circumferential end 12a and the second circumferential direction are not set as in the (4-3) poor contact prevention structure. Alignment may be performed at the end 12b.

  The present invention is not limited to the embodiments described above, and many modifications can be made by those having ordinary knowledge in the art within the technical spirit of the present invention.

  For example, in the above embodiment, one of the inner and outer rims 12, 13, specifically, the circumferential end of the inner rim 12 [the first circumferential end 12 a, the second circumferential end 12 a] Although the portion 12b) is used as a contact end, instead of this, although not shown, a configuration in which the other rim, specifically, the circumferential end of the outer rim 13 is used as a contact end. Alternatively, the above-described contact failure prevention structure may be applied.

  In the above-described embodiment, one of the inner and outer rims 12 and 13, specifically, the circumferential end of the inner rim 12 is used as the contact end, and the other rim, specifically, the outer rim 12 is used. Although the configuration example in which the gap is set on the circumferential end side of 13 has been described, the present invention is not limited to the presence or absence of the gap. For example, even if there is no gap, the effect of the present invention that the contact can be stably performed can be obtained.

  The embodiments described above may be used in combination.

  In the above-described embodiment, the configuration example in which the stationary blade portion A2 is set in an annular shape by bringing the two divided stationary blade portions 11 (11A, 11B) into contact with each other has been described. However, the present invention is not limited thereto. The invention can also be applied to a configuration example in which the stationary blade portion A2 is set in an annular shape by bringing two or more divided stationary blade portions into contact with each other, for example, three or four divided stationary blade portions.

  In the above-described embodiment, the composite pump including the turbo molecular pump section Pt and the thread groove pump section Ps has been described. However, the present invention may be applied to a full-wing pump including only the turbo molecular pump section Pt.

DESCRIPTION OF SYMBOLS 1 Outer case 1A Pump case 1B Pump base 2 Intake port 3 Exhaust port 4 Stator column 5 Rotor shaft 6 Magnetic bearing 7 Rotor 7A End member 7B Cylindrical member 8 Drive motor 9 Rotating blade 10 Blade 11 Split stationary blade portion 11A First split Stator blade portion 11B Second divided stator blade portion 12 Inner rim 12a Circumferential end of inner rim (first circumferential end)
12b Circumferential end of inner rim (second circumferential end)
13 outer rim 14 screw groove stator 15 screw groove flow path 16 pump exhaust flow path 17 spacer 19A first bent portion 19B second bent portion 20 misalignment correcting means 21 projecting portion 22 taper 30 misalignment / overlap prevention means 31 plate (first plate)
31A Inclined section 31B Notch section 32 Plate (second plate)
32A Inclined portion 32B Notch portion 40 Restriction means 41 Pin body 42 Recess 43 Groove 43A Groove edge 44 Protrusion 44A Peripheral portion of protrusion 45 Upper member 46 Lower member 47 Connecting member 48 Taper A1 Moving blade A2 Stator blade B Screw groove Ch Chamber CP Width direction side Ga Ga space Ki Notch P Vacuum pump Pt Turbo molecular pump Ps Screw groove pump S Front side S1 of bent part External surface L0 near root of bent part Design abutment dimension Position L1 Actual contact dimension position h Height of first bent portion

Claims (16)

A rotating blade section,
At least one rim formed in the circumferential direction and a plurality of divided stationary vanes having a plurality of blades formed integrally with the rim are formed in an annular shape by abutting each other at circumferential ends. And a stationary wing portion,
A vacuum pump including a turbo-molecular pump unit that exhausts gas by the moving blade unit and the stationary blade unit,
A circumferential end of at least one of the divided stationary vanes, a contact failure prevention structure for preventing a contact failure with a circumferential end of the other divided stationary blade,
The contact failure prevention structure includes a first bent portion at a circumferential end of the first divided stator vane portion,
The first bent portion is bent in a direction in which a line of intersection between the front surface or the back surface and the front surface or the back surface of the rim forms a predetermined angle larger than 0 degrees with respect to the radial direction of the stationary blade portion, and A widthwise side portion of the first bent portion abuts on a circumferential end of the second divided stationary blade portion. The said predetermined angle is 90 degree | times. The vacuum pump of Claim 1 characterized by the above-mentioned. The contact failure prevention structure further includes a second bent portion at a circumferential end of the second divided stationary blade portion, and at least a part of the second bent portion is the first bent portion. The vacuum pump according to claim 1, wherein the vacuum pump is in contact with a bent portion of the vacuum pump. The vacuum pump according to claim 3, wherein a side portion in a width direction of the second bent portion comes into contact with the first bent portion. 5. The vacuum according to claim 3, wherein the first bent portion and the second bent portion are provided at positions where the width-direction side portions thereof can come into contact with each other. 6. pump. The contact failure prevention structure includes a displacement correcting unit that corrects a positional displacement in the thickness direction of the divided stationary blade portion in a state where the two or more divided stationary blade portions are in contact with each other. Item 6. A vacuum pump according to any one of Items 1 to 5. A rotating blade section,
At least one rim formed in the circumferential direction and a plurality of divided stationary vanes having a plurality of blades formed integrally with the rim are formed in an annular shape by abutting each other at circumferential ends. And a stationary wing portion,
A vacuum pump including a turbo-molecular pump unit that exhausts gas by the moving blade unit and the stationary blade unit,
A circumferential end of at least one of the divided stationary vanes, a contact failure prevention structure for preventing a contact failure with a circumferential end of the other divided stationary blade,
The contact failure prevention structure includes a first bent portion at a circumferential end of the first divided stator vane portion,
The first bent portion is bent in a direction in which an intersecting line between the front surface or the back surface and the front surface or the back surface of the rim is parallel to a radial direction of the stationary blade portion, and has a bending angle of less than 90 degrees. A vacuum pump, wherein the outer surface near the base of the first bent portion abuts on the circumferential end of the second divided stationary blade portion. A second bent portion is provided at a circumferential end of the second divided stationary blade portion, and the second bent portion has an intersection line between the front surface or the back surface and the front surface or the back surface of the rim. The second blade is bent in a direction parallel to the radial direction of the stationary blade portion, and the outer surface near the base of the second bent portion abuts on the outer surface near the base of the first bent portion. The vacuum pump according to claim 7, wherein The second bent portion is bent so that the bending angle becomes an acute angle of less than 90 degrees, and at least the outer surface near the base of the second bent portion is near the base of the first bent portion. The vacuum pump according to claim 8 , wherein the vacuum pump is in contact with an outer surface. The vacuum pump according to any one of claims 7 to 9 , wherein an outer surface near the base of the first bent portion is formed as a flat surface. Wherein said root around the outer surface of the second folding bend is a vacuum pump according to claim 8 or 9, characterized in that it is formed on the flat surface. The outer surface near the base of the first bent portion includes a flat surface at least in a thickness range of a circumferential end of the second divided stator vane portion. 9. The vacuum pump according to 1. The outer surface near the base of the second bent portion includes a flat surface at least within the range of the outer surface near the base of the first bent portion. 12. The vacuum pump according to 1. The contact failure prevention structure is characterized in that a circumferential / end portion of the divided stationary blade portion is provided with a displacement / overlap preventing means for preventing displacement or overlap with another divided stationary blade portion. The vacuum pump according to claim 1. The notch for forming a gap portion at an end of the rim when the two or more divided stationary blade portions are in contact with each other, wherein the divided stationary blade portion is in contact with the two or more divided stationary blade portions. Item 15. A vacuum pump according to any one of Items 1 to 14 . The divided stator vane portion used in the vacuum pump according to any one of claims 1 to 15 .

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