JP6715787B2 - Absolute pressure control system and absolute pressure control method - Google Patents

Description

The present invention relates to an absolute pressure control system including a pressure control chamber that is a pressure control target, and an absolute pressure control method that controls the absolute pressure of the pressure control chamber to a target set pressure.

The atmospheric pressure on the flat ground is not constant, but fluctuates within a range of 970 hPa to 1030 hPa, for example. In many fields such as the semiconductor industry, medical field, and automobile industry, which use equipment that is easily affected by fluctuations in atmospheric pressure (outside air pressure), even if the outside air pressure fluctuates, it is controlled to a fixed target set pressure. It is required to provide an absolute pressure control system to realize a pressure control room. For example, in an optical length measuring instrument used in the field of semiconductor industry, a measurement error occurs when the atmospheric pressure changes. Therefore, the pressure control chamber in which the optical length measuring device is installed needs to be controlled so as to have a constant target set pressure.

By the way, there are many requests to install the pressure control room in an existing building. From this point of view, when the pressure control room has a steel structure, there are many restrictions such as restrictions on loading into an existing building, restrictions on floor load resistance, and restrictions on fire protection by welding work during construction. Patent Document 1 discloses a technique capable of avoiding such a restriction and realizing a pressure control chamber controlled to a constant target set pressure even if the outside air pressure fluctuates.

In the technique disclosed in Patent Document 1, the pressure control chamber partitioned from the external space is configured by a panel structure in which a plurality of panels are connected. This makes it possible to avoid the restriction when the pressure control chamber has a steel structure. Then, by ventilating the pressure control chamber using the air blower and the exhaust device, the absolute pressure in the pressure control chamber is set to a constant target set pressure.

Japanese Patent No. 4418723

By the way, in the panel structure, there is a limit pressure difference that can maintain the airtightness of the pressure control chamber with respect to the pressure difference between the spaces on both sides of the panel. Therefore, when the pressure difference between the target set pressure of the pressure control chamber and the external atmospheric pressure exceeds the limit pressure difference of the panel structure, the panel is bent and the airtightness of the pressure control chamber cannot be maintained. .. That is, when the external atmospheric pressure fluctuates greatly, it may not be possible to maintain the absolute pressure of the pressure control chamber at a constant target set pressure. In addition to the panel structure, when the pressure control chamber is composed of a structure vulnerable to the pressure difference, a limit pressure difference that can maintain the airtightness of the pressure control chamber is set. Also in this case, if the external atmospheric pressure fluctuates greatly, it may not be possible to maintain the absolute pressure of the pressure control chamber at a constant target set pressure.

The present invention has been made in view of such circumstances, and an object thereof is a case where the external pressure greatly fluctuates in an absolute pressure control system including a pressure control chamber to be pressure controlled. However, it is still another object of the present invention to provide an absolute pressure control system and an absolute pressure control method capable of maintaining the absolute pressure of the pressure control chamber at a constant target set pressure.

An absolute pressure control system according to one aspect of the present invention is arranged in the first airtight space and a pressure adjustment chamber surrounded by a first wall portion that defines a first airtight space that is partitioned from an external space. A pressure control chamber that is surrounded by a second wall that defines a second airtight space that is partitioned from the first airtight space, and a ventilation mechanism that ventilates the pressure control chamber and the pressure control chamber, A control unit that controls the ventilation mechanism and executes initial pressure control for shifting the absolute pressure of the pressure control chamber to a target set pressure and pressure holding control for holding the absolute pressure of the pressure control chamber at the target set pressure. And The initial pressure control executed by the control unit sets the absolute pressure of the pressure adjustment chamber and the pressure control chamber to an adjustment pressure between the outside atmospheric pressure which is the pressure of the external space and the target set pressure. 1 initial pressure control, and 2nd initial pressure control for shifting the absolute pressure of the pressure control chamber from the adjusted pressure to the target set pressure while maintaining the absolute pressure of the pressure adjustment chamber at the adjusted pressure .. Further, the pressure holding control executed by the control unit changes the absolute pressure of the pressure adjustment chamber while changing the absolute pressure in the pressure between the external atmospheric pressure and the target set pressure in accordance with the change of the external atmospheric pressure. a first pressure hold control, the absolute pressure of the pressure control chamber is intended to include a second pressure holding control to transition constant at the target setting pressure. Each of the first wall portion and the second wall portion is configured by a panel structure in which a plurality of panels are connected, and the panel structure includes, as an eigenvalue relating to a pressure difference between spaces on both sides of the panel, A limit pressure difference capable of maintaining the airtightness of the pressure adjustment chamber and the pressure control chamber is set in advance, and the control unit sets a first pressure difference between the external space and the first airtight space. The initial pressure control and the pressure holding control are executed so that the second pressure difference between the first airtight space and the second airtight space is within the limit pressure difference.

According to this absolute pressure control system, the pressure control chamber whose absolute pressure is controlled with respect to the external atmospheric pressure of the external space is arranged in the first airtight space defined by the pressure adjusting chamber that is partitioned from the external space. That is, the pressure control chamber is arranged between the external space and the pressure control chamber, and the pressure control chamber is surrounded by the pressure control chamber. The ventilation mechanism that ventilates the pressure adjustment chamber and the pressure control chamber is controlled by the control unit. The control unit performs the initial pressure control to shift the absolute pressure in the pressure control chamber to the target set pressure, a pressure holding control to hold the absolute pressure in the pressure control chamber to the target set pressure.

Here, in the initial pressure control, the control unit first performs the first initial pressure control in which the absolute pressure of the pressure adjustment chamber and the pressure control chamber is the adjustment pressure between the outside atmospheric pressure and the target set pressure. Next, the control unit performs the second initial pressure control for shifting the absolute pressure of the pressure control chamber from the adjusted pressure to the target set pressure while maintaining the absolute pressure of the pressure adjustment chamber at the adjusted pressure. In the pressure holding control, when performing the second pressure holding control in which the absolute pressure of the pressure control chamber is kept constant at the target set pressure, the control unit changes the absolute pressure of the pressure adjustment chamber to the outside pressure according to the fluctuation of the outside air pressure. The first pressure holding control is performed in which the pressure changes between the atmospheric pressure and the target set pressure while changing. Thereby, the allowable range of the pressure difference between the target set pressure of the pressure control chamber and the outside air pressure in a state where the airtightness of the pressure adjustment chamber and the pressure control chamber is maintained is set to the outside space on both sides of the first wall portion. Value of the pressure difference between the pressure control chamber (first airtight space) and the pressure control chamber (second airtight space) on both sides of the second wall part It can be extended to Therefore, even when the external atmospheric pressure fluctuates greatly, it is possible to maintain the absolute pressure of the pressure control chamber at a constant target set pressure.

In this aspect, the first wall portion of the pressure control chamber and the second wall portion of the pressure control chamber are configured by the panel structure in which the limit pressure difference is set as an eigenvalue. In such a configuration, the control unit controls the first pressure difference between the external space on both sides of the first wall portion and the pressure adjustment chamber (first airtight space), and the first pressure difference on both sides of the second wall portion. The initial pressure control and the pressure holding control are executed so that the second pressure difference between the pressure adjustment chamber and the pressure control chamber (second airtight space) is within the limit pressure difference of the panel structure. As a result, the first pressure difference and the second pressure difference do not exceed the limit pressure difference, so that an unacceptable degree of bending or the like is prevented from occurring in the panel forming the panel structure, and the pressure adjustment chamber and the pressure control are controlled. The airtightness of the chamber can be maintained.

An absolute pressure control system according to another aspect of the present invention is arranged in the first airtight space and a pressure adjustment chamber surrounded by a first wall portion that defines a first airtight space that is partitioned from an external space. A pressure control chamber that is surrounded by a second wall that defines a second airtight space that is partitioned from the first airtight space, and a ventilation mechanism that ventilates the pressure control chamber and the pressure control chamber, A control unit that controls the ventilation mechanism and executes initial pressure control for shifting the absolute pressure of the pressure control chamber to a target set pressure and pressure holding control for holding the absolute pressure of the pressure control chamber at the target set pressure. And The initial pressure control executed by the control unit sets the absolute pressure of the pressure adjustment chamber and the pressure control chamber to an adjustment pressure between the outside atmospheric pressure which is the pressure of the external space and the target set pressure. 1 initial pressure control, and 2nd initial pressure control for shifting the absolute pressure of the pressure control chamber from the adjusted pressure to the target set pressure while maintaining the absolute pressure of the pressure adjustment chamber at the adjusted pressure .. Further, the pressure holding control executed by the control unit changes the absolute pressure of the pressure adjustment chamber while changing the absolute pressure in the pressure between the external atmospheric pressure and the target set pressure in accordance with the change of the external atmospheric pressure. The first pressure holding control and the second pressure holding control for keeping the absolute pressure of the pressure control chamber constant at the target set pressure are included. In the above absolute pressure control system, the pressure adjusting chamber has a multiple structure including an outer peripheral wall facing the outer space as the first wall portion and an inner peripheral wall facing the outer peripheral wall, and the outer peripheral wall a first control chamber defined by being defined by the inner peripheral wall, and a second adjusting chamber disposed in said first adjusting chamber. At this time, the pressure control chamber is arranged in the second adjustment chamber. In the initial pressure control executed by the control unit, the first initial pressure control is the absolute pressure of the first adjustment chamber, the second adjustment chamber, and the pressure control chamber, which are the external pressure and the target set pressure. After the first adjusted pressure between the first adjusted pressure and the target adjusted pressure, the absolute pressure of the second adjusted chamber and the pressure control chamber is set to the second adjusted pressure between the first adjusted pressure and the target set pressure. Further, in the pressure holding control executed by the control unit, the first pressure holding control controls the absolute pressure of the first adjusting chamber between the outside atmospheric pressure and the target set pressure according to the fluctuation of the outside atmospheric pressure. The absolute pressure of the second adjustment chamber is changed and changed at the first pressure, and the absolute pressure of the second adjustment chamber is changed and changed at the second pressure between the first pressure and the target set pressure in accordance with the change of the external atmospheric pressure. Control. Each of the outer peripheral wall, the inner peripheral wall, and the second wall portion is configured by a panel structure in which a plurality of panels are connected, and the panel structure includes an eigenvalue relating to a pressure difference between spaces on both sides of the panel. As a limit pressure difference capable of maintaining the airtightness of the pressure adjustment chamber and the pressure control chamber is preset, the control unit, the pressure difference between the external space and the first adjustment chamber and The pressure difference between the first adjustment chamber and the second adjustment chamber and the pressure difference between the second adjustment chamber and the pressure control chamber are within the limit pressure difference. The initial pressure control and the pressure holding control are executed.

In this aspect, the pressure control chamber surrounding the pressure control chamber has a multiple structure including the first control chamber and the second control chamber arranged in the first control chamber, and the pressure control chamber is the second control chamber. It is located in the adjustment room. Then, in the first initial pressure control, the control unit sets the absolute pressures of the first adjustment chamber, the second adjustment chamber, and the pressure control chamber to the first adjusted pressure between the external atmospheric pressure and the target set pressure, and then the second adjusted pressure. The absolute pressure of the adjustment chamber and the pressure control chamber is controlled to be the second adjustment pressure between the first adjustment pressure and the target set pressure. In the first pressure holding control, the control unit changes the absolute pressure of the first adjustment chamber while changing the absolute pressure in the first pressure between the external pressure and the target set pressure according to the change in the external pressure. the absolute pressure of the second adjusting chamber performs control to transition while varying at a second pressure between the first pressure and a target set pressure in response to variation of the external pressure. Thereby, the permissible range of the pressure difference between the target set pressure of the pressure control chamber and the external atmospheric pressure is set to be equal to the pressure difference between the external space on both sides of the outer peripheral wall and the first adjustment chamber and both sides of the inner peripheral wall. Of the pressure difference between the first adjusting chamber and the second adjusting chamber and the pressure difference between the second adjusting chamber and the pressure controlling chamber on both sides of the second wall of the pressure controlling chamber. Can be extended up to. Therefore, the allowable range of the pressure difference between the target set pressure of the pressure control chamber and the outside air pressure can be widened, and even when the outside air pressure fluctuates more, the absolute pressure of the pressure control chamber can be set to the constant target set pressure Can be held at.

The absolute pressure control system may further include an air conditioner capable of adjusting the temperature and humidity of the pressure control chamber.

In this aspect, by disposing the air conditioner, in addition to maintaining the absolute pressure of the pressure control chamber at a constant target set pressure, the temperature and humidity of the pressure control chamber can also be adjusted.

An absolute pressure control method according to another aspect of the present invention is arranged in the first airtight space in a pressure adjustment chamber surrounded by a first wall portion that defines a first airtight space that is partitioned from an external space, A method for controlling an absolute pressure of a pressure control chamber surrounded by a second wall part that defines a second airtight space partitioned from a first airtight space to a target set pressure, the first wall part and the first wall part Each of the two wall portions is configured by a panel structure in which a plurality of panels are connected to each other, and the panel structure includes the pressure adjustment chamber and the pressure control as an eigenvalue relating to a pressure difference between spaces on both sides of the panel. The limit pressure difference capable of maintaining the airtightness of the chamber is preset, the initial pressure control step of shifting the absolute pressure of the pressure control chamber to the target set pressure, and the absolute pressure of the pressure control chamber is set to the target. A pressure holding control step of holding the set pressure. In the initial pressure control step, a first initial pressure control step in which the absolute pressure of the pressure control chamber and the pressure control chamber is a regulated pressure between the external atmospheric pressure that is the pressure of the external space and the target set pressure, A second initial pressure control step of shifting the absolute pressure of the pressure control chamber from the adjusted pressure to the target set pressure while maintaining the absolute pressure of the pressure adjustment chamber at the adjusted pressure. The pressure holding control step, a first pressure holding control step of changing while changing the absolute pressure of the pressure adjusting chamber at a pressure between the external atmospheric pressure and the target set pressure in accordance with the change of the external atmospheric pressure, A second pressure holding control step of keeping the absolute pressure of the pressure control chamber constant at the target set pressure. In the initial pressure control step and the pressure holding control step, a first pressure difference between the external space and the first airtight space and a second pressure between the first airtight space and the second airtight space. The control is executed so that the difference becomes within the limit pressure difference.

The absolute pressure control method, the initial pressure control step of shifting the absolute pressure in the pressure control chamber surrounded by a pressure adjusting chamber to the target set pressure, pressure holding control to hold the absolute pressure in the pressure control chamber to a target set pressure And a process. In the initial pressure control step, first, in the first initial pressure control step, control is performed in which the absolute pressures of the pressure adjustment chamber and the pressure control chamber are adjusted pressures between the outside atmospheric pressure and the target set pressure. Next, in the second initial pressure control step, control is performed to shift the absolute pressure of the pressure control chamber from the adjusted pressure to the target set pressure while maintaining the absolute pressure of the pressure adjustment chamber at the adjusted pressure. Further, in the pressure holding control step, when performing control to make the absolute pressure of the pressure control chamber constant at the target set pressure in the second pressure holding control step, in the first pressure holding control step, the absolute pressure of the pressure adjusting chamber is changed. A control is performed in which the pressure changes between the ambient pressure and the target set pressure while varying according to the variation in the ambient pressure. Thereby, the allowable range of the pressure difference between the target set pressure of the pressure control chamber and the outside air pressure in a state where the airtightness of the pressure adjustment chamber and the pressure control chamber is maintained is set to the outside space on both sides of the first wall portion. Value of the pressure difference between the pressure control chamber (first airtight space) and the pressure control chamber (second airtight space) on both sides of the second wall part It can be extended to Therefore, even when the external atmospheric pressure fluctuates greatly, it is possible to maintain the absolute pressure of the pressure control chamber at a constant target set pressure.

According to the present invention, there is provided an absolute pressure control system and an absolute pressure control method capable of maintaining the absolute pressure of the pressure control chamber at a constant target set pressure even when the external atmospheric pressure fluctuates greatly. be able to.

It is a figure which shows roughly the structure of the absolute pressure control system which concerns on 1st Embodiment. It is a block diagram of the absolute pressure control system which concerns on 1st Embodiment. It is a perspective view which shows the structure of a panel. 3 is a graph showing a fluctuation line of the external atmospheric pressure, a pressure control characteristic line of the pressure adjustment chamber, and a pressure control characteristic line of the pressure control chamber in the absolute pressure control system according to the first embodiment. 3 is a graph showing a fluctuation line of the external atmospheric pressure, a pressure control characteristic line of the pressure adjustment chamber, and a pressure control characteristic line of the pressure control chamber in the absolute pressure control system according to the first embodiment. It is a flow chart which shows pressure control operation in the absolute pressure control system concerning a 1st embodiment. It is a figure which shows roughly the structure of the absolute pressure control system which concerns on 2nd Embodiment. It is a figure which shows roughly the structure of the absolute pressure control system which concerns on 3rd Embodiment. It is a block diagram of an absolute pressure control system concerning a 3rd embodiment. In the absolute pressure control system according to the third embodiment, a graph showing the fluctuation line of the external atmospheric pressure, the pressure control characteristic line of the first adjustment chamber, the pressure control characteristic line of the second adjustment chamber, and the pressure control characteristic line of the pressure control chamber. is there. In the absolute pressure control system according to the third embodiment, a graph showing the fluctuation line of the external atmospheric pressure, the pressure control characteristic line of the first adjustment chamber, the pressure control characteristic line of the second adjustment chamber, and the pressure control characteristic line of the pressure control chamber. is there.

Hereinafter, an absolute pressure control system according to the present embodiment and an absolute pressure control method using the absolute pressure control system will be described with reference to the drawings.

<First Embodiment>
FIG. 1 is a diagram schematically showing a configuration of an absolute pressure control system 1 according to the first embodiment. FIG. 2 is a block diagram of the absolute pressure control system 1 according to the first embodiment. The absolute pressure control system 1 includes a pressure adjustment chamber 2, a pressure control chamber 3, first ventilation mechanism 4 and second ventilation mechanism 5 that constitute a ventilation mechanism, a first pressure difference holding mechanism 7, and a second pressure difference. The holding mechanism 8, the first communication chamber 9, the second communication chamber 10, the control unit 15, and the storage unit 16 are included. The absolute pressure control system 1 controls the absolute pressure of the pressure control chamber 3 to be maintained at a constant target set pressure even if the external atmospheric pressure, which is the pressure of the external space S1 outside the pressure adjustment chamber 2, fluctuates. System. The target set pressure of the pressure control chamber 3 is preset by the administrator of the absolute pressure control system 1 and is stored in the storage unit 16.

The pressure adjustment chamber 2 is an airtight chamber surrounded by a first wall 2A that defines a first airtight space S2 that is partitioned from the external space S1. The pressure adjusting chamber 2 has a box shape surrounded by the first wall portion 2A on all sides. The pressure control chamber 3 is an airtight chamber that is the target of pressure control. The pressure control chamber 3 is disposed in the first airtight space S2 and is surrounded by a second wall 3A that defines a second airtight space S3 that is partitioned from the first airtight space S2. The pressure control chamber 3 has a box shape surrounded by the second wall portion 3A on all sides, and is formed in a size capable of accommodating a plurality of persons. The pressure control chamber 2 is arranged between the external space S1 and the pressure control chamber 3, and the pressure control chamber 3 is surrounded by the pressure control chamber 2.

In the present embodiment, the first wall portion 2A that configures the pressure adjustment chamber 2 and the second wall portion 3A that configures the pressure control chamber 3 are each configured by a panel structure. FIG. 3 is a perspective view showing an example of the panel PN that constitutes the panel structure. The panel structure forming the first wall 2A and the second wall 3A is a structure in which a plurality of panels PN shown in FIG. 3 are connected.

The panel PN is, for example, a rectangular plate-shaped heat insulating panel having a structure in which a foam material is sandwiched between thin steel plates. A fitting portion PN1 is formed on the outer peripheral edge of the panel PN. In the panel PN, the fitting portion PN1 has a structure in which convex portions PN1a and concave portions PN1b are alternately repeated. The panel structure forming the first wall portion 2A and the second wall portion 3A is assembled by fitting and connecting the fitting portions PN1 of the adjacent panels PN.

In such a panel structure in which a plurality of panels PN are connected, a limit pressure difference capable of maintaining the airtightness of the pressure adjustment chamber 2 and the pressure control chamber 3 is set as an eigenvalue regarding the pressure difference between the spaces on both sides of the panel PN. Is set in advance. Here, the limit pressure difference of the panel structure means that the panel PN does not have a bending or the like more than a degree that breaks the airtightness of the panel structure in the pressure difference between the spaces on both sides of the panel PN. Represents the limit pressure difference at which the seal breakage does not occur. In other words, if the pressure difference between the spaces on both sides of the panel PN exceeds the limit pressure difference of the panel structure, unacceptable bending of the panel PN, breakage of the panel joint seal, etc. occur, and the pressure adjustment chamber 2 and The airtightness of the pressure control chamber 3 cannot be maintained. The limit pressure difference of the panel structure has a correlation with the thickness of the panel PN, and the limit pressure difference can be increased by increasing the thickness of the panel PN. The limit pressure difference of the panel structure is stored in the storage unit 16.

Further, as shown in FIG. 1, the first wall portion 2A of the pressure adjusting chamber 2 has a first pressure gauge 13A for detecting the outside air pressure of the external space S1 and an absolute pressure inside the pressure adjusting chamber 2. The 2nd pressure gauge 13B for doing is attached. Further, a third pressure gauge 13C for detecting the absolute pressure in the pressure control chamber 3 is attached to the second wall portion 3A of the pressure control chamber 3. The detection results of the first pressure gauge 13A, the second pressure gauge 13B, and the third pressure gauge 13C are input to the control unit 15 described later.

The first ventilation mechanism 4 is a mechanism for performing ventilation between the external space S1 and the pressure adjustment chamber 2. The first ventilation mechanism 4 includes a first air blower 41 and a first exhaust device 42.

The first blower 41 includes a first blower duct D1, a first inverter 411, a first blower 412, and a first blower motor damper 413. The first blower duct D1 is a duct that defines a first blower passage that connects the external space S1 and the first airtight space S2 of the pressure adjustment chamber 2. The first inverter 411 adjusts the output of the first blower 412, receives a command signal from the control unit 15 described later, and adjusts the output of the first blower 412 based on the command signal. The first blower 412 is connected to the first blower duct D1 and blows the air existing in the external space S1 into the pressure adjustment chamber 2 via the first blower duct D1. The first blower 412 is arranged in the external space S1 and is realized by, for example, a blower fan or an air compressor. The first blower motor damper 413 is a motor damper attached to the first blower duct D1 and adjusts the amount of air passing through the first blower duct D1 per unit time. The first blower motor damper 413 receives a command signal from the control unit 15 described later, and adjusts the opening degree (flow passage cross-sectional area) of the first blower duct in the first blower duct D1 based on the command signal. , The amount of air passing through the first air duct D1 is adjusted. In the thus configured first blower 41, the output of the first blower 412 is adjusted by the first inverter 411, and the opening degree of the first blower duct D1 is adjusted by the first blower motor damper 413. Thus, the amount of air blown into the pressure adjustment chamber 2 by the first blower 412 can be arbitrarily controlled.

The first exhaust device 42 includes a first exhaust duct D2, a second inverter 421, a first exhaust device 422, and a first exhaust motor damper 423. The first exhaust duct D2 is a duct that defines a first exhaust passage that connects the external space S1 and the first airtight space S2 of the pressure adjustment chamber 2. The second inverter 421 adjusts the output of the first exhaust machine 422, receives a command signal from the control unit 15 described later, and adjusts the output of the first exhaust machine 422 based on the command signal. The first exhaust unit 422 is connected to the first exhaust duct D2 and exhausts the air existing in the pressure adjustment chamber 2 to the external space S1 via the first exhaust duct D2. The first exhaust unit 422 is disposed in the external space S1 and is realized by, for example, an exhaust fan or a vacuum pump. The first exhaust motor damper 423 is a motor damper attached to the first exhaust duct D2, and adjusts the amount of air passing through the first exhaust duct D2 per unit time. The first exhaust motor damper 423 receives a command signal from the control unit 15 described later, and adjusts the opening degree (flow passage cross-sectional area) of the first exhaust passage in the first exhaust duct D2 based on the command signal. , The amount of air passing through the first exhaust duct D2 is adjusted. In the first exhaust device 42 thus configured, the output of the first exhaust device 422 is adjusted by the second inverter 421, and the opening degree of the first exhaust duct D2 is adjusted by the first exhaust motor damper 423. Thus, the amount of air exhausted from the pressure adjustment chamber 2 by the first exhaust device 422 can be controlled arbitrarily.

The second ventilation mechanism 5 is a mechanism for performing ventilation between the pressure adjustment chamber 2 and the pressure control chamber 3. The second ventilation mechanism 5 is configured to include a second blower device 51 and a second exhaust device 52.

The second blower device 51 includes a second blower duct D3, a third inverter 511, a second blower 512, and a second blower motor damper 513. The second ventilation duct D3 is a duct that defines a second ventilation passage that connects the first airtight space S2 of the pressure adjustment chamber 2 and the second airtight space S3 of the pressure control chamber 3. The third inverter 511 adjusts the output of the second blower 512, receives a command signal from the control unit 15 described later, and adjusts the output of the second blower 512 based on the command signal. The second blower 512 is connected to the second blower duct D3, and blows the air existing in the pressure adjusting chamber 2 into the pressure control chamber 3 via the second blower duct D3. The second blower 512 is arranged in the first airtight space S2 of the pressure adjustment chamber 2, and is realized by, for example, a blower fan, an air compressor, or the like. The second blower motor damper 513 is a motor damper attached to the second blower duct D3, and adjusts the amount of air passing through the second blower duct D3 per unit time. The second air blowing motor damper 513 receives a command signal from the control unit 15 described later, and adjusts the opening degree (flow passage cross-sectional area) of the second air blowing passage in the second air blowing duct D3 based on the command signal. , The amount of air passing through the second air duct D3 is adjusted. In the second air blower 51 configured in this way, the output of the second air blower 512 is adjusted by the third inverter 511, and the opening degree of the second air blow duct D3 is adjusted by the second air blower motor damper 513. Thus, the amount of air blown into the pressure control chamber 3 by the second blower 512 can be arbitrarily controlled.

The second exhaust device 52 includes a second exhaust duct D4, a fourth inverter 521, a second exhaust machine 522, and a second exhaust motor damper 523. The second exhaust duct D4 is a duct that defines a second exhaust passage that connects the first airtight space S2 of the pressure adjustment chamber 2 and the second airtight space S3 of the pressure control chamber 3. The fourth inverter 521 adjusts the output of the second exhaust machine 522, receives a command signal from the control unit 15 described later, and adjusts the output of the second exhaust machine 522 based on the command signal. The second exhaust unit 522 is connected to the second exhaust duct D4 and exhausts the air existing in the pressure control chamber 3 into the pressure adjustment chamber 2 via the second exhaust duct D4. The second exhaust unit 522 is arranged in the first airtight space S2 of the pressure adjustment chamber 2 and is realized by, for example, an exhaust fan or a vacuum pump. The second exhaust motor damper 523 is a motor damper attached to the second exhaust duct D4, and adjusts the amount of air passing through the second exhaust duct D4 per unit time. The second exhaust motor damper 523 receives a command signal from the control unit 15 described later, and adjusts the opening degree (flow passage cross-sectional area) of the second exhaust passage in the second exhaust duct D4 based on the command signal. , The amount of air passing through the second exhaust duct D4 is adjusted. In the second exhaust device 52 thus configured, the output of the second exhaust device 522 is adjusted by the fourth inverter 521, and the opening degree of the second exhaust duct D4 is adjusted by the second exhaust motor damper 523. As a result, the amount of air exhausted from the pressure control chamber 3 can be controlled by the second exhaust unit 522.

The first pressure difference holding mechanism 7 is a mechanism that is disposed on the first wall portion 2A of the pressure adjustment chamber 2 and that operates when the first ventilation mechanism 4 is abnormal. The first pressure difference holding mechanism 7 configures the first wall portion 2A with the first pressure difference between the external space S1 and the first airtight space S2 of the pressure adjustment chamber 2 when the first ventilation mechanism 4 is abnormal. Keep within the pressure difference limit of the panel structure. As a result, when the first ventilation mechanism 4 is in an abnormal state, the first pressure difference does not exceed the limit pressure difference, so that it is possible to prevent the panel PN forming the panel structure from being bent to an unacceptable degree. The airtightness of the pressure adjustment chamber 2 can be maintained. As shown in FIG. 1, the first pressure difference holding mechanism 7 includes a first check damper 71 and a second check damper 72.

The first check damper 71 is a mechanical backflow prevention damper that operates at a differential pressure and is attached to a duct D7 that defines a flow path that connects the external space S1 and the first airtight space S2 of the pressure adjustment chamber 2. .. When the pressure of the pressure adjusting chamber 2 is higher than the external pressure of the external space S1, the first check damper 71 causes the first pressure difference between the external space S1 and the first airtight space S2 of the pressure adjusting chamber 2 to be a panel. The weight is adjusted so that the first pressure difference is maintained within the limit pressure difference without exceeding the limit pressure difference of the structure. When the first check damper 71 operates, the air in the pressure adjusting chamber 2 is exhausted to the external space S1 while the backflow of air from the external space S1 to the pressure adjusting chamber 2 is prevented, and the first pressure difference is reduced. It is kept within the limit pressure difference.

The second check damper 72 is a mechanical backflow prevention damper that operates at a differential pressure and is attached to a duct D8 that defines a flow path that connects the external space S1 and the first airtight space S2 of the pressure adjustment chamber 2. .. When the pressure of the pressure adjusting chamber 2 is lower than the external pressure of the external space S1, the second check damper 72 causes the first pressure difference between the external space S1 and the first airtight space S2 of the pressure adjusting chamber 2 to be a panel. The weight is adjusted so that the first pressure difference is maintained within the limit pressure difference without exceeding the limit pressure difference of the structure. When the second check damper 72 operates, the air in the external space S1 is supplied into the pressure adjusting chamber 2 while the backflow of air from the pressure adjusting chamber 2 to the external space S1 is prevented, and the first pressure difference is generated. Is kept within the limit pressure difference.

The second pressure difference holding mechanism 8 is a mechanism that is disposed on the second wall portion 3A of the pressure control chamber 3 and that operates when the second ventilation mechanism 5 is abnormal. The second pressure difference holding mechanism 8 determines the second pressure difference between the first airtight space S2 of the pressure adjustment chamber 2 and the second airtight space S3 of the pressure control chamber 3 when the second ventilation mechanism 5 is in an abnormal state. It is kept within the limit pressure difference of the panel structure forming the second wall portion 3A. As a result, when the second ventilation mechanism 5 is in an abnormal state, the second pressure difference does not exceed the limit pressure difference, so that the panel PN forming the panel structure is prevented from being unacceptably bent. The airtightness of the pressure control chamber 3 can be maintained. As shown in FIG. 1, the second pressure difference holding mechanism 8 is configured to include a third check damper 81 and a fourth check damper 82.

The third check damper 81 is attached to a duct D9 that defines a flow path that connects the first airtight space S2 of the pressure adjustment chamber 2 and the second airtight space S3 of the pressure control chamber 3, and operates at a differential pressure. It is a backflow prevention damper of the formula. The third check damper 81 is provided between the first airtight space S2 of the pressure control chamber 2 and the second airtight space S3 of the pressure control chamber 3 when the pressure of the pressure control chamber 3 is higher than the pressure of the pressure control chamber 2. The weight is adjusted so that the second pressure difference of 1 does not exceed the limit pressure difference of the panel structure and the second pressure difference is maintained within the limit pressure difference. When the third check damper 81 operates, the air in the pressure control chamber 3 is exhausted to the pressure control chamber 2 while the backflow of air from the pressure control chamber 2 to the pressure control chamber 3 is prevented, and the second pressure The difference is kept within the limit pressure difference.

The fourth check damper 82 is attached to a duct D10 that defines a flow path that connects the first airtight space S2 of the pressure adjustment chamber 2 and the second airtight space S3 of the pressure control chamber 3, and operates at a differential pressure. It is a backflow prevention damper of the formula. The fourth check damper 82 is provided between the first airtight space S2 of the pressure control chamber 2 and the second airtight space S3 of the pressure control chamber 3 when the pressure of the pressure control chamber 3 is lower than the pressure of the pressure control chamber 2. The weight is adjusted so that the second pressure difference of 1 does not exceed the limit pressure difference of the panel structure and the second pressure difference is maintained within the limit pressure difference. When the fourth check damper 82 operates, the air in the pressure control chamber 2 is supplied to the pressure control chamber 3 while the backflow of air from the pressure control chamber 3 to the pressure control chamber 2 is prevented, and The pressure difference is kept within the limit pressure difference.

The first communication chamber 9 is an airtight chamber surrounded by a third wall 9A that defines a first communication space S4 that communicates the external space S1 with the first airtight space S2 of the pressure adjustment chamber 2. The first communication chamber 9 is formed to have a size that allows a person to pass through, and serves as a passage for a person to enter and leave the pressure adjusting chamber 2. In the third wall portion 9A of the first communication chamber 9, a first opening portion 9B that opens toward the external space S1 and a second opening portion 9C that opens toward the first airtight space S2 are formed. ing. In addition, the first communication chamber 9 has a first door body 91 that can open and close the first opening 9B and a second door body 92 that can open and close the second opening 9C. In addition, in the 3rd wall part 9A of the 1st communicating chamber 9, the 1st sealing member 911 for ensuring the sealing property with the 1st door body 91 is attached to the opening periphery part of the 1st opening part 9B. A second sealing member 921 for securing a sealing property with the second door body 92 is attached to the opening peripheral edge of the second opening 9C.

Further, as shown in FIG. 1, an electric valve 12A is attached to the third wall portion 9A of the first communication chamber 9 in the vicinity of the first door body 91 so as to project toward the external space S1 side, and the first communication space 9A. The electric valve 12H is attached so as to project to the S4 side. These electric valves 12A and 12H are valves that are operated when the pressures in the external space S1 and the first communication space S4 of the first communication chamber 9 are equalized. Further, in the third wall portion 9A of the first communication chamber 9, in the vicinity of the second door body 92, the electric valve 12B is attached so as to protrude toward the first communication space S4 side and protrude toward the first airtight space S2 side. An electric valve 12G is attached. These electric valves 12B and 12G are valves that are operated when the pressures in the first communication space S4 of the first communication chamber 9 and the first airtight space S2 of the pressure adjustment chamber 2 are equalized.

The procedure for a person to enter the pressure adjusting chamber 2 from the external space S1 is as follows. First, the electric valve 12A is operated to the open side in a state where the first door body 91 and the second door body 92 are closed to equalize the pressures of the external space S1 and the first communication space S4 of the first communication chamber 9. Turn into Next, after the first door 91 is opened and a person enters the first communication chamber 9, the first door 91 is closed. When the first door body 91 is closed, the electric valve 12A automatically operates toward the closing side. Next, the electric valve 12B is operated to the open side to equalize the pressures of the first communication space S4 of the first communication chamber 9 and the first airtight space S2 of the pressure adjustment chamber 2. Next, after the second door body 92 is opened and a person enters the pressure adjusting chamber 2, the second door body 92 is closed. When the second door body 92 is closed, the electric valve 12B automatically operates toward the closing side.

On the other hand, the procedure for leaving a person from the pressure adjusting chamber 2 to the external space S1 is as follows. First, with the first door body 91 and the second door body 92 closed, the electric valve 12G is operated to the open side, and the first communication space S4 of the first communication chamber 9 and the first airtightness of the pressure adjustment chamber 2 are closed. The pressure in the space S2 is equalized. Next, after the second door body 92 is opened and a person leaves the pressure adjustment chamber 2 and enters the first communication chamber 9, the second door body 92 is closed. When the second door body 92 is closed, the electric valve 12G automatically operates toward the closing side. Next, the electric valve 12H is operated to the opening side to equalize the pressures of the external space S1 and the first communication space S4 of the first communication chamber 9. Next, after the first door body 91 is opened and the person moves to the external space S1 side, the first door body 91 is closed. When the first door body 91 is closed, the electric valve 12H automatically operates toward the closing side.

The second communication chamber 10 is surrounded by a fourth wall 10A that defines a second communication space S5 that connects the first airtight space S2 of the pressure adjustment chamber 2 and the second airtight space S3 of the pressure control chamber 3. It is a closed room. The second communication chamber 10 is formed in a size that allows a person to pass through, and serves as a passage for a person to enter and leave the pressure control chamber 3. In the fourth wall portion 10A of the second communication chamber 10, there are a third opening portion 10B that opens toward the first airtight space S2 and a fourth opening portion 10C that opens toward the second airtight space S3. Has been formed. The second communication chamber 10 has a third door body 101 that can open and close the third opening 10B and a fourth door body 102 that can open and close the fourth opening 10C. In addition, in the 4th wall part 10A of the 2nd communicating chamber 10, the 3rd sealing member 1011 for ensuring the sealing property with the 3rd door body 101 is attached to the opening periphery part of the 3rd opening part 10B. A fourth seal member 1021 for securing a sealing property with the fourth door body 102 is attached to the opening peripheral edge of the fourth opening 10C.

Further, as shown in FIG. 1, an electric valve 12C is attached to the fourth wall portion 10A of the second communication chamber 10 in the vicinity of the third door body 101 so as to project toward the first airtight space S2 side, and The electric valve 12F is attached so as to project toward the communication space S5. These electric valves 12C and 12F are valves that are operated when the pressures in the first airtight space S2 of the pressure adjustment chamber 2 and the second communication space S5 of the second communication chamber 10 are equalized. Further, in the fourth wall portion 10A of the second communication chamber 10, in the vicinity of the fourth door body 102, the electric valve 12D is attached so as to protrude toward the second communication space S5 side and protrude toward the second airtight space S3 side. The electric valve 12E is attached. These electric valves 12D and 12E are valves that are operated when the pressures in the second communication space S5 of the second communication chamber 10 and the second airtight space S3 of the pressure control chamber 3 are equalized.

The procedure for entering a person from the pressure adjusting chamber 2 to the pressure control chamber 3 is as follows. First, with the third door body 101 and the fourth door body 102 closed, the electric valve 12C is operated to the open side, and the first airtight space S2 of the pressure adjustment chamber 2 and the second communication of the second communication chamber 10 are connected. The pressure in the space S5 is equalized. Next, after the third door body 101 is opened and a person enters the second communication chamber 10, the third door body 101 is closed. When the third door body 101 is closed, the electric valve 12C automatically operates toward the closing side. Next, the electric valve 12D is operated to the opening side to equalize the pressures of the second communication space S5 of the second communication chamber 10 and the second airtight space S3 of the pressure control chamber 3. Next, after the fourth door body 102 is opened and a person enters the pressure control chamber 3, the fourth door body 102 is closed. When the fourth door body 102 is closed, the electric valve 12D automatically operates toward the closing side.

On the other hand, the procedure for leaving a person from the pressure control chamber 3 to the pressure adjustment chamber 2 is as follows. First, with the third door body 101 and the fourth door body 102 closed, the electric valve 12E is actuated to the open side, and the second communication space S5 of the second communication chamber 10 and the second airtightness of the pressure control chamber 3 are closed. The pressure in the space S3 is equalized. Next, the fourth door body 102 is closed after the fourth door body 102 is opened and a person leaves the pressure control chamber 3 to enter the second communication chamber 10. When the fourth door body 102 is closed, the electric valve 12E automatically operates toward the closing side. Next, the electric valve 12F is operated to the opening side to equalize the pressures of the first airtight space S2 of the pressure adjustment chamber 2 and the second communication space S5 of the second communication chamber 10. Next, after the third door body 101 is opened and a person moves to the pressure adjustment chamber 2 side, the third door body 101 is closed. When the third door body 101 is closed, the electric valve 12F automatically operates toward the closing side.

The control unit 15 sets the target pressure in which the absolute pressure of the pressure control chamber 3 is stored in the storage unit 16 based on the detection results input from the first pressure gauge 13A, the second pressure gauge 13B, and the third pressure gauge 13C. Each of the 1st ventilation mechanism 4 and the 2nd ventilation mechanism 5 which comprise a ventilation mechanism is controlled so that it may become pressure. The control unit 15 includes, for example, a microcomputer including a storage device such as a ROM (Read Only Memory) that stores a control program and a flash memory that temporarily stores data. Each of the 1st ventilation mechanism 4 and the 2nd ventilation mechanism 5 is controlled. As shown in FIG. 2, the control unit 15 includes a first pressure control unit 151 and a second pressure control unit 152.

The first pressure control unit 151 controls the first ventilation mechanism 4 with reference to the detection result of the external pressure by the first pressure gauge 13A and the detection result of the absolute pressure of the pressure adjustment chamber 2 by the second pressure gauge 13B. .. Further, the second pressure control unit 152 controls the second ventilation mechanism 5 with reference to the detection result of the absolute pressure of the pressure control chamber 3 by the third pressure gauge 13C. Further, in the present embodiment, each of the first pressure control unit 151 and the second pressure control unit 152 adjusts the first pressure difference between the external space S1 and the first airtight space S2 of the pressure adjustment chamber 2 and the pressure adjustment. The second pressure difference between the first airtight space S2 of the chamber 2 and the second airtight space S3 of the pressure control chamber 3 is a memory of the panel structure forming the first wall portion 2A and the second wall portion 3A. Each of the first ventilation mechanism 4 and the second ventilation mechanism 5 is controlled so as to be within the limit pressure difference stored in the section 16.

The control unit 15 executes the initial pressure control and the pressure holding control by the first pressure control unit 151 controlling the first ventilation mechanism 4 and the second pressure control unit 152 controlling the second ventilation mechanism 5. .. The initial pressure control executed by the control unit 15 is a control for shifting the absolute pressure of the pressure control chamber 3 to the target set pressure stored in the storage unit 16 at the start of the control operation. Further, the pressure holding control executed by the control unit 15 is a control for holding the absolute pressure of the pressure control chamber 3 at the target set pressure reached in the initial pressure control according to the fluctuation of the external pressure of the external space S1.

The control operation of the controller 15 will be described in detail with reference to FIGS. 4A and 4B and FIG. 4A and 4B are graphs showing a fluctuation line K1 of the external atmospheric pressure, a pressure control characteristic line K2 in the pressure adjusting chamber 2, and a pressure control characteristic line K3 in the pressure controlling chamber 3. In the graphs shown in FIGS. 4A and 4B, the horizontal axis represents time and the vertical axis represents absolute pressure (hPa). FIG. 5 is a flowchart showing the pressure control operation in the absolute pressure control system 1 according to the first embodiment.

First, in step a1, the administrator of the absolute pressure control system 1 sets the target set pressure PS (see FIGS. 4A and 4B) of the pressure control chamber 3. The target set pressure PS is stored in the storage unit 16. The storage unit 16 also stores the critical pressure difference between the panel structures forming the first wall portion 2A of the pressure adjustment chamber 2 and the second wall portion 3A of the pressure control chamber 3.

Here, the external air pressure of the external space S1 (atmospheric pressure on the flatland) is not constant, but fluctuates within a predetermined fluctuation range P0W as indicated by the fluctuation line K1 in FIGS. 4A and 4B. The external atmospheric pressure fluctuates in the range of 970 hPa to 1030 hPa, for example.

In the initial pressure control step of step a2, the first pressure control unit 151 and the second pressure control unit 152 that form the control unit 15 execute the initial pressure control. The initial pressure control process of step a2 includes the first initial pressure control process of step a21 and the second initial pressure control process of step a22.

In the first initial pressure control step of step a21, the first pressure control unit 151 and the second pressure control unit 152 which form the control unit 15 set the absolute pressures of the pressure adjustment chamber 2 and the pressure control chamber 3 to the outside atmospheric pressure and the target setting. The first initial pressure control is executed to adjust the pressure to the pressure PS. Here, the adjusted pressure is, for example, a value calculated based on the following formula (1), and is a median value between the external atmospheric pressure and the target set pressure PS.

Adjusting pressure (hPa)=Ps+ΔP×1/2 (1)
[In the formula (1), “Ps” represents the lower pressure value of the external pressure and the target setting pressure, and “ΔP” represents the absolute value of the differential pressure between the external pressure and the target setting pressure. ]

The first initial pressure control executed by the first pressure control unit 151 and the second pressure control unit 152 in the first initial pressure control process of step a21 is performed by the first pressure control chamber 2 and the pressure control chamber 3 as described above. The control is not limited to the absolute pressure being the same adjustment pressure. The first initial pressure control may be control in which the absolute pressures of the pressure adjustment chamber 2 and the pressure control chamber 3 are adjusted to different adjustment pressures. Specifically, in the first initial pressure control, the adjusted pressures of the pressure control chamber 2 and the pressure control chamber 3 are different values between the external atmospheric pressure and the target set pressure PS, and On the other hand, the control may be such that the adjusted pressure of the pressure adjusting chamber 2 becomes a pressure value close to the outside atmospheric pressure. In the present embodiment, the first initial pressure control is control in which the absolute pressures of the pressure adjustment chamber 2 and the pressure control chamber 3 are the same adjustment pressure.

In the second initial pressure control step of step a22, the first pressure control unit 151 and the second pressure control unit 152 that form the control unit 15 control the pressure while maintaining the absolute pressure of the pressure adjustment chamber 2 at the adjustment pressure. A second initial pressure control for shifting the absolute pressure of the chamber 3 from the adjusted pressure to the target set pressure PS is executed.

The initial pressure control executed by the controller 15 in the initial pressure control step of step a2 will be described in more detail below.

[Initial pressure control when the atmospheric pressure is higher than the target set pressure]
Regarding the initial pressure control executed by the control unit 15, the control when the external atmospheric pressure is higher than the target set pressure PS will be described with reference to FIG. 4A. When the outside air pressure P01 is higher than the target set pressure PS of the pressure control chamber 3, in the first initial pressure control step of step a21, the first pressure control unit 151 outputs a command signal for controlling the first ventilation mechanism 4. , While transmitting a command signal for adjusting the output of the first exhaust machine 422 to the second inverter 421, and transmitting a command signal for opening the first exhaust motor damper 423 to an opening degree corresponding to the external air pressure P01, and While transmitting a command signal for adjusting the output of the first blower 412 to the inverter 411, a command signal for setting the opening to 10% or less is transmitted to the first blower motor damper 413. In addition, the second pressure control unit 152 transmits a command signal for adjusting the output of the second exhaust unit 522 to the fourth inverter 521 as a command signal for controlling the second ventilation mechanism 5, while the second pressure control unit 152 is for second exhaust gas. While transmitting a command signal for setting the opening to 100% to the motor damper 523 and a command signal for adjusting the output of the second blower 512 to the third inverter 511, the opening to the second blower motor damper 513 is set to 10%. Send a command signal to set the percentage below. By such control operations of the first pressure control unit 151 and the second pressure control unit 152, the absolute pressures of the pressure adjustment chamber 2 and the pressure control chamber 3 at the time point T01 of FIG. It becomes the adjustment pressure P11 with the pressure PS.

Next, in the second initial pressure control step of step a22, the first pressure control unit 151 adjusts the output of the first exhaust unit 422 to the second inverter 421 as a command signal for controlling the first ventilation mechanism 4. To the first exhaust motor damper 423 while transmitting the command signal to the first exhaust motor damper 423 so as to maintain the pressure adjustment chamber 2 at the adjustable pressure, and to the first inverter 411 to output the output of the first blower 412. While transmitting the command signal to adjust, the command signal which makes opening degree 10% or less is transmitted to the 1st ventilation motor damper 413. In addition, the second pressure control unit 152 transmits a command signal for adjusting the output of the second exhaust unit 522 to the fourth inverter 521 as a command signal for controlling the second ventilation mechanism 5, while the second pressure control unit 152 is for second exhaust gas. While transmitting a command signal for opening the pressure control chamber 3 to the target set pressure PS to the motor damper 523 and transmitting a command signal for adjusting the output of the second blower 512 to the third inverter 511, 2 A command signal for setting the opening to 10% or less is transmitted to the air blower motor damper 513. By such control operations of the first pressure control unit 151 and the second pressure control unit 152, the absolute pressure of the pressure adjustment chamber 2 is adjusted between the external atmospheric pressure and the target set pressure PS at the time T11 of FIG. 4A. While being maintained at the pressure, the absolute pressure in the pressure control chamber 3 is set to the target set pressure PS. In the example of FIG. 4A, the time zone from the time when the initial pressure control is started before time T01 to time T01 and the time zone TW1 from time T01 to time T11 constitute the first pressure controller It is a time period in which the initial pressure control is executed by the 151 and the second pressure control unit 152.

[Initial pressure control when the atmospheric pressure is lower than the target set pressure]
Regarding the initial pressure control executed by the control unit 15, the control when the external atmospheric pressure is lower than the target set pressure PS will be described with reference to FIG. 4B. When the outside air pressure P02 is lower than the target set pressure PS of the pressure control chamber 3, in the first initial pressure control step of step a21, the first pressure control unit 151 outputs a command signal for controlling the first ventilation mechanism 4. , While sending a command signal for adjusting the output of the first blower 412 to the first inverter 411, and sending a command signal for opening the opening according to the outside air pressure P02 to the first blower motor damper 413, and the second inverter While transmitting a command signal for adjusting the output of the first exhaust machine 422 to 421, a command signal for setting the opening to 10% or less is transmitted to the first exhaust motor damper 423. In addition, the second pressure control unit 152 transmits a command signal for adjusting the output of the second blower 512 to the third inverter 511 as a command signal for controlling the second ventilation mechanism 5, while the second blower motor damper is being transmitted. A command signal for setting the opening to 100% is transmitted to 513, and a command signal for adjusting the output of the second exhaust machine 522 is transmitted to the fourth inverter 521, while the opening to the second exhaust motor damper 523 is set to 10%. Send a command signal to set the percentage below. By such control operations of the first pressure control unit 151 and the second pressure control unit 152, the absolute pressures of the pressure adjustment chamber 2 and the pressure control chamber 3 at the time T02 of FIG. It becomes the adjustment pressure P12 with the pressure PS.

Next, in the second initial pressure control step of step a22, the first pressure control unit 151 adjusts the output of the first blower 412 to the first inverter 411 as a command signal for controlling the first ventilation mechanism 4. While transmitting the command signal, the first blower motor damper 413 is transmitted with a command signal for opening the pressure adjustment chamber 2 to an adjustable pressure, and the second inverter 421 outputs the output of the first exhaust unit 422. While transmitting the command signal to adjust, the command signal which makes opening degree 10% or less is transmitted to the 1st exhaust motor damper 423. In addition, the second pressure control unit 152 transmits a command signal for adjusting the output of the second blower 512 to the third inverter 511 as a command signal for controlling the second ventilation mechanism 5, while the second blower motor damper is being transmitted. While transmitting a command signal for making the pressure control chamber 3 an opening degree capable of shifting to the target set pressure PS to 513 and transmitting a command signal for adjusting the output of the second exhaust machine 522 to the fourth inverter 521, (2) A command signal for setting the opening to 10% or less is transmitted to the exhaust motor damper 523. By such control operations of the first pressure control unit 151 and the second pressure control unit 152, the absolute pressure of the pressure adjustment chamber 2 is adjusted between the outside atmospheric pressure and the target set pressure PS at time T12 in FIG. 4B. While being maintained at the pressure, the absolute pressure in the pressure control chamber 3 is set to the target set pressure PS. In the example of FIG. 4B, the time zone from the time when the initial pressure control is started before time T02 to time T02 and the time zone TW1 from time T02 to time T12 constitute the first pressure control unit that constitutes control unit 15. It is a time period in which the initial pressure control is executed by the 151 and the second pressure control unit 152.

When the absolute pressure of the pressure control chamber 3 is set to the target set pressure PS in the initial pressure control process of step a2, the process proceeds to the pressure holding control process of step a3. In the pressure holding control step of step a3, the first pressure control unit 151 and the second pressure control unit 152 that form the control unit 15 execute pressure holding control. The pressure holding control process of step a3 includes a first pressure holding control process of step a31 and a second pressure holding control process of step a32.

In the first pressure holding control step of step a31, the first pressure control unit 151 constituting the control unit 15 sets the absolute pressure of the pressure adjustment chamber 2 to the external pressure and the target set pressure PS according to the fluctuation of the external pressure. The first pressure holding control for changing the pressure between the two is executed. Here, by the first pressure holding control by the first pressure control unit 151, the absolute pressure of the pressure adjustment chamber 2 changes at the pressure calculated based on the above equation (1) according to the fluctuation of the external atmospheric pressure.

In the second pressure holding control step of step a32, the second pressure control unit 152 that constitutes the control unit 15 keeps the absolute pressure of the pressure control chamber 3 constant at the target set pressure PS reached in the initial pressure control. The second pressure holding control is executed.

The time zone TW2 after the time T11 in the example of FIG. 4A and the time zone TW2 after the time T12 in the example of FIG. 4B are the first pressure control unit 151 and the second pressure control unit 152 that configure the control unit 15. Is the time zone in which the pressure holding control is executed.

The pressure holding control executed by the control unit 15 in the pressure holding control step of step a3 will be described in more detail below.

[Pressure holding control when the outside air pressure is higher than the target set pressure]
When the fluctuating outside air pressure is higher than the target set pressure PS, in the first pressure holding control step of step a31, the first pressure control unit 151 uses the second inverter as a command signal for controlling the first ventilation mechanism 4. A command signal for adjusting the output of the first exhaust machine 422 is transmitted to 421, a command signal for opening the first exhaust motor damper 423 according to the fluctuation of the external pressure is transmitted, and the first inverter 411 is transmitted. While transmitting a command signal for adjusting the output of the first blower 412, a command signal for setting the opening to 10% or less is transmitted to the first blower motor damper 413. By the control operation of the first pressure control unit 151 as described above, the absolute pressure of the pressure adjustment chamber 2 changes at a pressure between the external atmospheric pressure and the target set pressure PS according to the fluctuation of the external atmospheric pressure.

In the second pressure holding control step of step a32, the second pressure control unit 152 adjusts the output of the second exhaust unit 522 to the fourth inverter 521 as a command signal for controlling the second ventilation mechanism 5. While transmitting the command signal, the second exhaust motor damper 523 is transmitted with a command signal for adjusting the opening according to the fluctuation of the external atmospheric pressure, and the third inverter 511 is supplied with a command signal for adjusting the output of the second blower 512. While transmitting, a command signal for setting the opening degree to 10% or less is transmitted to the second blower motor damper 513. By such control operation of the second pressure control unit 152, the absolute pressure of the pressure control chamber 3 changes constantly at the target set pressure PS reached in the initial pressure control.

[Pressure holding control when the outside air pressure is lower than the target set pressure]
When the fluctuating outside air pressure is lower than the target set pressure PS, in the first pressure holding control step of step a31, the first pressure control unit 151 uses the first inverter as a command signal for controlling the first ventilation mechanism 4. While transmitting a command signal for adjusting the output of the first blower 412 to 411, a command signal for opening the first blower motor damper 413 to an opening degree according to the fluctuation of the outside air pressure is transmitted to the second inverter 421. While transmitting a command signal for adjusting the output of the first exhaust machine 422, a command signal for setting the opening to 10% or less is transmitted to the first exhaust motor damper 423. By the control operation of the first pressure control unit 151 as described above, the absolute pressure of the pressure adjustment chamber 2 changes at a pressure between the external atmospheric pressure and the target set pressure PS according to the fluctuation of the external atmospheric pressure.

In the second pressure holding control step of step a32, the second pressure control unit 152 issues a command to the third inverter 511 to adjust the output of the second blower 512 as a command signal for controlling the second ventilation mechanism 5. While transmitting the signal, the second blower motor damper 513 is transmitted with a command signal for setting the opening degree according to the fluctuation of the external atmospheric pressure, and the fourth inverter 521 is transmitted with a command signal for adjusting the output of the second exhaust unit 522. While transmitting, a command signal for setting the opening to 10% or less is transmitted to the second exhaust motor damper 523. By such control operation of the second pressure control unit 152, the absolute pressure of the pressure control chamber 3 changes constantly at the target set pressure PS reached in the initial pressure control.

In the absolute pressure control system 1 according to the present embodiment configured as described above, the first pressure control unit 151 and the second pressure control unit 152, which configure the control unit 15, in the initial pressure control, first, the pressure adjustment chamber. The first initial pressure control is performed in which the absolute pressure of the pressure control chamber 2 and the pressure control chamber 3 is set as a regulated pressure between the outside atmospheric pressure and the target set pressure PS. Next, the first pressure control unit 151 and the second pressure control unit 152 maintain the absolute pressure of the pressure adjustment chamber 2 at the adjustment pressure, while changing the absolute pressure of the pressure control chamber 3 from the adjustment pressure to the target set pressure PS. The second initial pressure control for shifting is performed. In the pressure holding control, the control unit 15 performs the second pressure holding control in which the second pressure control unit 152 keeps the absolute pressure of the pressure control chamber 3 constant at the target set pressure PS. 151 performs the first pressure holding control in which the absolute pressure of the pressure adjusting chamber 2 is changed at a pressure between the external atmospheric pressure and the target set pressure PS according to the fluctuation of the external atmospheric pressure. As a result, the allowable range of the pressure difference between the target set pressure PS of the pressure control chamber 3 and the outside air pressure in the state where the airtightness of the pressure adjustment chamber 2 and the pressure control chamber 3 is maintained is determined by sandwiching the first wall 2A. Up to the total value of the pressure difference between the external space S1 and the pressure control chamber 2 on both sides and the pressure difference between the pressure control chamber 2 and the pressure control chamber 3 on both sides of the second wall 3A. Can be extended. Therefore, even when the external atmospheric pressure fluctuates greatly, the absolute pressure in the pressure control chamber 3 can be maintained at the constant target set pressure PS.

In addition, the second blower 512 of the second blower 51 and the second exhauster 522 of the second exhaust device 52, which configure the second ventilation mechanism 5, are arranged in the first airtight space S2 of the pressure adjustment chamber 2. There is. As a result, even when an abnormality occurs in the second ventilation mechanism 5, it is possible to prevent the absolute pressure of the pressure control chamber 3 controlled to the target set pressure PS from returning to the atmospheric pressure all at once.

Further, the first wall portion 2A of the pressure adjustment chamber 2 and the second wall portion 3A of the pressure control chamber 3 are configured by a panel structure in which a limit pressure difference is set as an eigenvalue. In such a configuration, the first pressure control unit 151 and the second pressure control unit 152, which form the control unit 15, have the first pressure control unit 151 and the second pressure control unit 152 between the external space S1 on both sides of the first wall 2A and the pressure adjustment chamber 2. Initial pressure so that the first pressure difference and the second pressure difference between the pressure control chambers 2 and the pressure control chambers 3 on both sides of the second wall 3A are within the limit pressure difference of the panel structure. Control and pressure holding control are executed. As a result, the first pressure difference and the second pressure difference do not exceed the limit pressure difference, so that an unacceptable degree of bending or the like is prevented from occurring in the panel PN forming the panel structure, and the pressure adjustment chamber 2 and The airtightness of the pressure control chamber 3 can be maintained.

Moreover, the absolute pressure control system 1 according to the present embodiment may be configured to further include an air conditioner 14 as shown in FIG. The air conditioner 14 is arranged in the pressure control chamber 3, and the temperature and humidity of the pressure control chamber 3 can be adjusted. By disposing the air conditioner 14 in the pressure control chamber 3, in addition to maintaining the absolute pressure of the pressure control chamber 3 at a constant target set pressure PS, the temperature and humidity of the pressure control chamber 3 can also be adjusted. it can.

<Second Embodiment>
FIG. 6 is a diagram schematically showing the configuration of the absolute pressure control system 1A according to the second embodiment. In the absolute pressure control system 1A according to the second embodiment, with respect to the second blower device 51 and the second exhaust device 52 that form the second ventilation mechanism 5, the second blower 512 of the second blower device 51 and the second exhaust device. The configuration is similar to that of the absolute pressure control system 1 according to the first embodiment described above, except that the arrangement position of 52 with the second exhaust device 522 is different. As described above, the absolute pressure control system 1A according to the second embodiment has the same parts as the absolute pressure control system 1 according to the first embodiment. Therefore, in the following description and drawings, the same reference numerals will be given to corresponding similar portions, and description thereof will be omitted.

In the absolute pressure control system 1 according to the first embodiment, the second blower 512 of the second blower 51 and the second exhauster 522 of the second exhaust device 52 are provided in the first airtight space S2 of the pressure adjusting chamber 2. It is arranged. On the other hand, in the absolute pressure control system 1A according to the second embodiment shown in FIG. 6, the second blower 512 of the second blower 51 and the second exhauster 522 of the second exhaust device 52 have the external space S1. It is located in. Then, the second ventilation mechanism 5 is configured to perform ventilation between the external space S1 and the pressure control chamber 3.

In the absolute pressure control system 1A according to the second embodiment, in the control unit 15, the first pressure control unit 151 controls the first ventilation mechanism 4, and the second pressure control unit 152 controls the second ventilation mechanism 5. Thus, the initial pressure control and the pressure holding control are executed. Compared with the control operation of the control unit 15 in the absolute pressure control system 1 according to the first embodiment, the control operation of the control unit 15 in the absolute pressure control system 1A according to the second embodiment is particularly performed during initial pressure control. The control of the opening degree adjustment of the second blower motor damper 513 and the second exhaust motor damper 523 that configure the second ventilation mechanism 5 is different. The pressure holding control in the control unit 15 of the absolute pressure control system 1A is the same as that of the absolute pressure control system 1.

[Initial pressure control when the atmospheric pressure is higher than the target set pressure]
Regarding the initial pressure control executed by the control unit 15 of the absolute pressure control system 1A, the control when the external atmospheric pressure is higher than the target set pressure PS will be described with reference to FIG. 4A. When the outside air pressure P01 is higher than the target set pressure PS of the pressure control chamber 3, in the first initial pressure control step of step a21, the first pressure control unit 151 outputs a command signal for controlling the first ventilation mechanism 4. , While transmitting a command signal for adjusting the output of the first exhaust machine 422 to the second inverter 421, and transmitting a command signal for opening the first exhaust motor damper 423 to an opening degree corresponding to the external air pressure P01, and While transmitting a command signal for adjusting the output of the first blower 412 to the inverter 411, a command signal for setting the opening to 10% or less is transmitted to the first blower motor damper 413. In addition, the second pressure control unit 152 transmits a command signal for adjusting the output of the second exhaust unit 522 to the fourth inverter 521 as a command signal for controlling the second ventilation mechanism 5, while the second pressure control unit 152 is for second exhaust gas. While sending a command signal to the motor damper 523 to set the opening according to the outside air pressure P01 and a command signal to adjust the output of the second blower 512 to the third inverter 511, the second blower motor damper 513 is opened. A command signal for setting the degree to 10% or less is transmitted.

In the initial pressure control executed by the control unit 15 of the absolute pressure control system 1, in the first initial pressure control process, the second pressure control unit 152 uses the second pressure control unit 152 as a command signal for controlling the second ventilation mechanism 5. A command signal for setting the opening to 100% is transmitted to the exhaust motor damper 523. On the other hand, in the initial pressure control executed by the control unit 15 of the absolute pressure control system 1A, as described above, the second pressure control unit 152 controls the second ventilation mechanism 5 in the first initial pressure control process. As a command signal for this, a command signal for opening the second exhaust motor damper 523 to an opening degree according to the external air pressure P01 is transmitted.

By the control operations of the first pressure control unit 151 and the second pressure control unit 152 as described above in the absolute pressure control system 1A, the absolute pressures of the pressure adjustment chamber 2 and the pressure control chamber 3 at the time T01 of FIG. 4A. Is the adjusted pressure P11 between the outside air pressure P01 and the target set pressure PS.

Next, in the second initial pressure control step of step a22, the first pressure control unit 151 adjusts the output of the first exhaust unit 422 to the second inverter 421 as a command signal for controlling the first ventilation mechanism 4. To the first exhaust motor damper 423 while transmitting the command signal to the first exhaust motor damper 423 so as to maintain the pressure adjustment chamber 2 at the adjustable pressure, and to the first inverter 411 to output the output of the first blower 412. While transmitting the command signal to adjust, the command signal which makes opening degree 10% or less is transmitted to the 1st ventilation motor damper 413. In addition, the second pressure control unit 152 transmits a command signal for adjusting the output of the second exhaust unit 522 to the fourth inverter 521 as a command signal for controlling the second ventilation mechanism 5, while the second pressure control unit 152 is for second exhaust gas. While transmitting a command signal for opening the pressure control chamber 3 to the target set pressure PS to the motor damper 523 and transmitting a command signal for adjusting the output of the second blower 512 to the third inverter 511, 2 A command signal for setting the opening to 10% or less is transmitted to the air blower motor damper 513. By such control operations of the first pressure control unit 151 and the second pressure control unit 152, the absolute pressure of the pressure adjustment chamber 2 is adjusted between the external atmospheric pressure and the target set pressure PS at the time T11 of FIG. 4A. While being maintained at the pressure, the absolute pressure in the pressure control chamber 3 is set to the target set pressure PS.

[Initial pressure control when the atmospheric pressure is lower than the target set pressure]
Regarding the initial pressure control executed by the control unit 15 of the absolute pressure control system 1A, the control when the external atmospheric pressure is lower than the target set pressure PS will be described with reference to FIG. 4B. When the outside air pressure P02 is lower than the target set pressure PS of the pressure control chamber 3, in the first initial pressure control step of step a21, the first pressure control unit 151 outputs a command signal for controlling the first ventilation mechanism 4. , While transmitting a command signal for adjusting the output of the first blower 412 to the first inverter 411, a command signal for opening the first blower motor damper 413 to an opening degree according to the outside air pressure P02, and the second inverter While transmitting a command signal for adjusting the output of the first exhaust machine 422 to 421, a command signal for setting the opening to 10% or less is transmitted to the first exhaust motor damper 423. In addition, the second pressure control unit 152 transmits a command signal for adjusting the output of the second blower 512 to the third inverter 511 as a command signal for controlling the second ventilation mechanism 5, while the second blower motor damper is being transmitted. A command signal to open the second exhaust motor damper 523 is transmitted to the second exhaust motor damper 523 while transmitting a command signal to 513 to set the opening degree according to the outside air pressure P02 and a command signal to adjust the output of the second exhaust machine 522 to the fourth inverter 521. A command signal for setting the degree to 10% or less is transmitted.

In the initial pressure control executed by the control unit 15 of the absolute pressure control system 1, in the first initial pressure control process, the second pressure control unit 152 uses the second pressure control unit 152 as a command signal for controlling the second ventilation mechanism 5. A command signal for setting the opening to 100% was transmitted to the blower motor damper 513. On the other hand, in the initial pressure control executed by the control unit 15 of the absolute pressure control system 1A, as described above, the second pressure control unit 152 controls the second ventilation mechanism 5 in the first initial pressure control process. As a command signal for this, a command signal for opening the second air blower motor damper 513 to open the second air blower motor damper 513 is sent.

By the control operation of the first pressure control unit 151 and the second pressure control unit 152 as described above in the absolute pressure control system 1A, the absolute pressures of the pressure adjustment chamber 2 and the pressure control chamber 3 at the time T02 of FIG. 4B. Is the adjusted pressure P12 between the outside air pressure P02 and the target set pressure PS.

Next, in the second initial pressure control step of step a22, the first pressure control unit 151 adjusts the output of the first blower 412 to the first inverter 411 as a command signal for controlling the first ventilation mechanism 4. While transmitting the command signal, the first blower motor damper 413 is transmitted with a command signal for opening the pressure adjustment chamber 2 to an adjustable pressure, and the second inverter 421 outputs the output of the first exhaust unit 422. While transmitting the command signal to adjust, the command signal which makes opening degree 10% or less is transmitted to the 1st exhaust motor damper 423. In addition, the second pressure control unit 152 transmits a command signal for adjusting the output of the second blower 512 to the third inverter 511 as a command signal for controlling the second ventilation mechanism 5, while the second blower motor damper is being transmitted. While transmitting a command signal for making the pressure control chamber 3 an opening degree capable of shifting to the target set pressure PS to 513 and transmitting a command signal for adjusting the output of the second exhaust machine 522 to the fourth inverter 521, (2) A command signal for setting the opening to 10% or less is transmitted to the exhaust motor damper 523. By such control operations of the first pressure control unit 151 and the second pressure control unit 152, the absolute pressure of the pressure adjustment chamber 2 is adjusted between the outside atmospheric pressure and the target set pressure PS at time T12 in FIG. 4B. While being maintained at the pressure, the absolute pressure in the pressure control chamber 3 is set to the target set pressure PS.

Also in the absolute pressure control system 1A according to the second embodiment configured as described above, similarly to the absolute pressure control system 1, the pressure adjustment of the pressure difference between the target set pressure PS of the pressure control chamber 3 and the outside air pressure. The allowable range in a state where the air tightness of the chamber 2 and the pressure control chamber 3 is maintained is the pressure difference between the external space S1 and the pressure adjustment chamber 2 on both sides of the first wall 2A, and the second wall portion. It is possible to extend to the total value of the pressure difference between the pressure control chamber 2 and the pressure control chamber 3 on both sides of 3A. Therefore, even when the external atmospheric pressure fluctuates greatly, the absolute pressure in the pressure control chamber 3 can be maintained at the constant target set pressure PS.

<Third Embodiment>
FIG. 7 is a diagram schematically showing the configuration of the absolute pressure control system 1B according to the third embodiment. FIG. 8 is a block diagram of an absolute pressure control system 1B according to the third embodiment. The absolute pressure control system 1B according to the third embodiment has the same configuration as the absolute pressure control system 1 according to the above-described first embodiment except that the configuration of the pressure adjustment chamber 2 surrounding the pressure control chamber 3 is different. As described above, the absolute pressure control system 1B according to the third embodiment has the same parts as the absolute pressure control system 1 according to the first embodiment. Therefore, in the following description and drawings, the same reference numerals will be given to corresponding similar portions, and description thereof will be omitted.

In the absolute pressure control system 1B according to the third embodiment, the pressure adjustment chamber 2 includes, as the first wall portion 2A, an outer peripheral wall 2A1 facing the external space S1 and an inner peripheral wall 2A2 facing the outer peripheral wall 2A1. It has a multiple structure. The pressure adjusting chamber 2 is composed of a first adjusting chamber 21 defined by the outer peripheral wall 2A1 and a second adjusting chamber 22 defined by the inner peripheral wall 2A2 and arranged in the first adjusting chamber 21. That is, the pressure adjustment chamber 2 surrounding the pressure control chamber 3 has a multiple structure including two adjustment chambers, the first adjustment chamber 21 and the second adjustment chamber 22 arranged inside the first adjustment chamber 21.

The first adjustment chamber 21 is an airtight chamber surrounded by an outer peripheral wall 2A1 that defines an airtight space S2-1 that is partitioned from the external space S1. The first adjustment chamber 21 has a box shape surrounded by an outer peripheral wall 2A1 on all sides. The second adjustment chamber 22 is an airtight chamber that is disposed in the airtight space S2-1 of the first adjustment chamber 21 and is surrounded by an inner peripheral wall 2A2 that defines an airtight space S2-2 that is partitioned from the airtight space S2-1. is there. The second adjustment chamber 22 has a box shape surrounded by the inner peripheral wall 2A2 on all sides. The pressure control chamber 3 is arranged in the second adjustment chamber 22.

Further, as shown in FIG. 7, on the outer peripheral wall 2A1 of the first adjustment chamber 21, the first pressure gauge 13A for detecting the external pressure of the external space S1 and the absolute pressure in the first adjustment chamber 21 are detected. The 2nd pressure gauge 13B for doing is attached. A third pressure gauge 13C for detecting the absolute pressure in the pressure control chamber 3 is attached to the second wall portion 3A of the pressure control chamber 3. A fourth pressure gauge 13D for detecting the absolute pressure inside the second adjustment chamber 22 is attached to the inner peripheral wall 2A2 of the second adjustment chamber 22. The detection results of the first pressure gauge 13A, the second pressure gauge 13B, the third pressure gauge 13C, and the fourth pressure gauge 13D are input to the control unit 15.

In the present embodiment, the first ventilation mechanism 4 is configured to perform ventilation between the external space S1 and the first adjustment chamber 21. As described above, the first ventilation mechanism 4 is configured to include the first blower device 41 and the first exhaust device 42. Further, the second ventilation mechanism 5 is configured to perform ventilation between the second adjustment chamber 22 and the pressure control chamber 3. The second ventilation mechanism 5 is configured to include the second blower 51 and the second exhaust 52 as described above.

The absolute pressure control system 1B according to this embodiment includes a third ventilation mechanism 6 as a mechanism for performing ventilation between the first adjustment chamber 21 and the second adjustment chamber 22. The third ventilation mechanism 6 includes a third blower 61 and a third exhaust 62.

The third blower 61 includes a third blower duct D5, a fifth inverter 611, a third blower 612, and a third blower motor damper 613. The third blower duct D5 is a duct that defines a third blower passage that connects the first adjustment chamber 21 and the second adjustment chamber 22. The fifth inverter 611 adjusts the output of the third blower 612, receives a command signal from the control unit 15, and adjusts the output of the third blower 612 based on the command signal. The third blower 612 is connected to the third blower duct D5 and blows the air existing in the first adjustment chamber 21 into the second adjustment chamber 22 via the third blower duct D5. The third blower 612 is disposed in the airtight space S2-1 of the first adjustment chamber 21, and is realized by, for example, a blower fan or an air compressor. The third blower motor damper 613 is a motor damper attached to the third blower duct D5, and adjusts the amount of air passing through the third blower duct D5 per unit time. The third blower motor damper 613 receives a command signal from the control unit 15 and adjusts the opening degree (flow passage cross-sectional area) of the third blower path in the third blower duct D5 based on the command signal. 3 Adjust the amount of air passing through the blower duct D5. In the thus configured third blower 61, the output of the third blower 612 is adjusted by the fifth inverter 611, and the opening degree of the third blower duct D5 is adjusted by the third blower motor damper 613. Thus, the amount of air blown into the second adjustment chamber 22 by the third blower 612 can be arbitrarily controlled.

The third exhaust device 62 includes a third exhaust duct D6, a sixth inverter 621, a third exhaust machine 622, and a third exhaust motor damper 623. The third exhaust duct D6 is a duct that defines a third exhaust passage that connects the first adjustment chamber 21 and the second adjustment chamber 22. The sixth inverter 621 adjusts the output of the third exhaust machine 622, receives a command signal from the control unit 15, and adjusts the output of the third exhaust machine 622 based on the command signal. The third exhaust unit 622 is connected to the third exhaust duct D6 and exhausts the air existing in the second adjustment chamber 22 into the first adjustment chamber 21 via the third exhaust duct D6. The third exhaust unit 622 is arranged in the airtight space S2-1 of the first adjustment chamber 21, and is realized by, for example, an exhaust fan or a vacuum pump. The third exhaust motor damper 623 is a motor damper attached to the third exhaust duct D6, and adjusts the amount of air passing through the third exhaust duct D6 per unit time. The third exhaust motor damper 623 receives a command signal from the control unit 15 and adjusts the opening degree (flow passage cross-sectional area) of the third exhaust passage in the third exhaust duct D6 based on the command signal. 3 Adjust the amount of air passing through the exhaust duct D6. In the thus configured third exhaust device 62, the output of the third exhaust device 622 is adjusted by the sixth inverter 621, and the opening degree of the third exhaust duct D6 is adjusted by the third exhaust motor damper 623. Thus, the amount of air exhausted from the second adjustment chamber 22 by the third exhaust device 622 can be controlled arbitrarily.

Further, in the present embodiment, the first pressure difference holding mechanism 7A is configured as a mechanism that operates when the first ventilation mechanism 4 is abnormal. The first pressure difference holding mechanism 7A keeps the pressure difference between the external space S1 and the first adjustment chamber 21 within the limit pressure difference of the panel structure constituting the outer peripheral wall 2A1 when the first ventilation mechanism 4 is abnormal. Hold on. As shown in FIG. 7, the first pressure difference holding mechanism 7A is configured to include a first check damper 71 and a second check damper 72.

The first check damper 71 is a mechanical backflow prevention damper that is attached to a duct D7 that defines a flow path that connects the external space S1 and the first adjustment chamber 21 and that operates by differential pressure. In the first check damper 71, when the pressure in the first adjustment chamber 21 is higher than the external pressure of the external space S1, the pressure difference between the external space S1 and the first adjustment chamber 21 is the limit pressure difference of the panel structure. The weight is adjusted so that the pressure difference is not exceeded and the pressure difference is kept within the limit pressure difference. When the first check damper 71 is activated, the air in the first adjustment chamber 21 is exhausted to the external space S1 while the backflow of air from the external space S1 to the first adjustment chamber 21 is prevented, and the pressure difference is It is kept within the limit pressure difference.

The second check damper 72 is a mechanical backflow prevention damper that is attached to a duct D8 that defines a flow path that connects the external space S1 and the first adjustment chamber 21 and that operates by differential pressure. In the second check damper 72, when the pressure in the first adjusting chamber 21 is lower than the external pressure in the external space S1, the pressure difference between the external space S1 and the first adjusting chamber 21 is the limit pressure difference of the panel structure. The weight is adjusted so that the pressure difference is not exceeded and the pressure difference is kept within the limit pressure difference. When the second check damper 72 operates, the air in the external space S1 is supplied into the first adjustment chamber 21 while the backflow of the air from the first adjustment chamber 21 to the external space S1 is prevented, and the pressure difference is generated. Is kept within the limit pressure difference.

Further, in the present embodiment, the second pressure difference holding mechanism 8 is configured as a mechanism that operates when the second ventilation mechanism 5 is abnormal. The second pressure difference holding mechanism 8 limits the pressure difference between the second adjustment chamber 22 and the pressure control chamber 3 when the second ventilation mechanism 5 is abnormal, to the limit of the panel structure forming the second wall 3A. Keep within pressure difference. As shown in FIG. 7, the second pressure difference holding mechanism 8 is configured to include a third check damper 81 and a fourth check damper 82.

The third check damper 81 is a mechanical backflow prevention damper that is attached to a duct D9 that defines a flow path that connects the second adjustment chamber 22 and the pressure control chamber 3 and that operates by a differential pressure. In the third check damper 81, when the pressure in the pressure control chamber 3 is higher than the pressure in the second adjustment chamber 22, the pressure difference between the second adjustment chamber 22 and the pressure control chamber 3 causes a limit pressure of the panel structure. The weight is adjusted so that the pressure difference is not exceeded and the pressure difference is kept within the limit pressure difference. When the third check damper 81 is activated, the air in the pressure control chamber 3 is exhausted to the second adjustment chamber 22 while the backflow of the air from the second adjustment chamber 22 to the pressure control chamber 3 is prevented, The difference is kept within the limit pressure difference.

The fourth check damper 82 is a mechanical backflow prevention damper that is attached to a duct D10 that defines a flow path that connects the second adjustment chamber 22 and the pressure control chamber 3 and that operates by a differential pressure. When the pressure of the pressure control chamber 3 is lower than the pressure of the second adjustment chamber 22, the fourth chuck damper 82 determines that the pressure difference between the second adjustment chamber 22 and the pressure control chamber 3 is the limit pressure of the panel structure. The weight is adjusted so that the pressure difference is not exceeded and the pressure difference is kept within the limit pressure difference. When the fourth check damper 82 operates, the air in the second adjustment chamber 22 is supplied to the pressure control chamber 3 in a state in which the backflow of air from the pressure control chamber 3 to the second adjustment chamber 22 is prevented, The pressure difference is kept within the limit pressure difference.

Further, in the present embodiment, the third pressure difference holding mechanism 7B configures the inner peripheral wall 2A2 as a pressure difference between the first adjustment chamber 21 and the second adjustment chamber 22 when the third ventilation mechanism 6 is abnormal. Keep within the pressure difference limit of the panel structure. As shown in FIG. 7, the third pressure difference holding mechanism 7B includes a fifth check damper 73 and a sixth check damper 74.

The fifth check damper 73 is a mechanical backflow prevention damper that is attached to a duct D11 that defines a flow path that connects the first adjustment chamber 21 and the second adjustment chamber 22 and that operates by differential pressure. In the fifth check damper 73, when the pressure in the second adjusting chamber 22 is higher than the pressure in the first adjusting chamber 21, the pressure difference between the first adjusting chamber 21 and the second adjusting chamber 22 is equal to that of the panel structure. The weight is adjusted so that the pressure difference is not exceeded and the pressure difference is maintained within the pressure difference limit. When the fifth check damper 73 operates, the air in the second adjustment chamber 22 is exhausted to the first adjustment chamber 21 while the backflow of air from the first adjustment chamber 21 to the second adjustment chamber 22 is prevented. , The pressure difference is kept within the limit pressure difference.

The sixth check damper 74 is a mechanical backflow prevention damper that is attached to a duct D12 that defines a flow path that connects the first adjustment chamber 21 and the second adjustment chamber 22 and that operates by differential pressure. When the pressure of the second adjusting chamber 22 is lower than the pressure of the first adjusting chamber 21, the sixth check damper 74 causes the pressure difference between the first adjusting chamber 21 and the second adjusting chamber 22 to be equal to that of the panel structure. The weight is adjusted so that the pressure difference is not exceeded and the pressure difference is maintained within the pressure difference limit. When the sixth check damper 74 operates, the air in the first adjusting chamber 21 is supplied into the second adjusting chamber 22 while the backflow of air from the second adjusting chamber 22 to the first adjusting chamber 21 is prevented. The pressure difference is kept within the limit pressure difference.

Further, the absolute pressure control system 1B according to the present embodiment includes a third communication chamber 11 in addition to the first communication chamber 9 and the second communication chamber 10 as an airtight chamber that serves as a passage for a person to enter and leave the room.

The first communication chamber 9 is an airtight chamber surrounded by a third wall 9A that defines a communication space S4-1 that connects the external space S1 and the first adjustment chamber 21. The first communication chamber 9 has a size that allows a person to pass through, and serves as a passage for a person to enter and leave the first adjustment chamber 21. In the third wall portion 9A of the first communication chamber 9, a first opening portion 9B that opens toward the external space S1 and a second opening portion 9C that opens toward the airtight space S2-1 are formed. ing. In addition, the first communication chamber 9 has a first door body 91 that can open and close the first opening 9B and a second door body 92 that can open and close the second opening 9C. In addition, in the 3rd wall part 9A of the 1st communicating chamber 9, the 1st sealing member 911 for ensuring the sealing property with the 1st door body 91 is attached to the opening periphery part of the 1st opening part 9B. A second sealing member 921 for securing a sealing property with the second door body 92 is attached to the opening peripheral edge of the second opening 9C.

Further, as shown in FIG. 7, an electric valve 12A is attached to the third wall portion 9A of the first communication chamber 9 in the vicinity of the first door body 91 so as to project toward the external space S1 side, and the communication space S4-. The electric valve 12L is attached so as to project to the first side. These electric valves 12A and 12L are valves that are operated when the pressures in the external space S1 and the communication space S4-1 of the first communication chamber 9 are equalized. Further, in the third wall portion 9A of the first communication chamber 9, in the vicinity of the second door body 92, the electric valve 12B is attached so as to project toward the communication space S4-1 side and protrude toward the airtight space S2-1 side. An electric valve 12K is attached. These electric valves 12B and 12K are valves that are operated when the pressures in the communication space S4-1 of the first communication chamber 9 and the airtight space S2-1 of the first adjustment chamber 21 are equalized.

The procedure for entering a person from the external space S1 into the first adjustment chamber 21 is as follows. First, the electric valve 12A is operated to the open side in a state where the first door body 91 and the second door body 92 are closed, and the pressure in the communication space S4-1 between the external space S1 and the first communication chamber 9 is equalized. Turn into Next, after the first door 91 is opened and a person enters the first communication chamber 9, the first door 91 is closed. When the first door body 91 is closed, the electric valve 12A automatically operates toward the closing side. Next, the electric valve 12B is operated to the opening side to equalize the pressures of the communication space S4-1 of the first communication chamber 9 and the airtight space S2-1 of the first adjustment chamber 21. Next, after the second door body 92 is opened and a person enters the first adjustment chamber 21, the second door body 92 is closed. When the second door body 92 is closed, the electric valve 12B automatically operates toward the closing side.

On the other hand, the procedure for leaving a person from the first adjustment chamber 21 to the external space S1 is as follows. First, the electric valve 12K is operated to the opening side in a state where the first door body 91 and the second door body 92 are closed, and the communication space S4-1 of the first communication chamber 9 and the airtight space of the first adjustment chamber 21. The pressure of S2-1 is equalized. Next, after the second door body 92 is opened and a person leaves the first adjustment chamber 21 and enters the first communication chamber 9, the second door body 92 is closed. When the second door body 92 is closed, the electric valve 12K automatically operates toward the closing side. Next, the electric valve 12L is operated to the open side to equalize the pressure in the external space S1 and the communication space S4-1 of the first communication chamber 9. Next, after the first door body 91 is opened and the person moves to the external space S1 side, the first door body 91 is closed. When the first door body 91 is closed, the electric valve 12L automatically operates toward the closing side.

The third communication chamber 11 is an airtight chamber that is surrounded by a fifth wall 11A that defines a communication space S4-2 that connects the first adjustment chamber 21 and the second adjustment chamber 22. The third communication chamber 11 is formed to have a size that allows a person to pass through, and serves as a passage for a person to enter and leave the second adjustment chamber 22. The fifth wall portion 11A of the third communication chamber 11 has a fifth opening portion 11B that opens toward the airtight space S2-1 and a sixth opening portion 11C that opens toward the airtight space S2-2. Has been formed. In addition, the third communication chamber 11 has a fifth door body 111 that can open and close the fifth opening 11B and a sixth door body 112 that can open and close the sixth opening 11C. In addition, in the 5th wall part 11A of the 3rd communicating chamber 11, the 5th sealing member 1111 for ensuring the sealing property with the 5th door body 111 is attached to the opening periphery part of the 5th opening part 11B. A sixth sealing member 1121 for securing a sealing property with the sixth door body 112 is attached to the opening peripheral edge of the sixth opening 11C.

Further, as shown in FIG. 7, an electric valve 12C is attached to the fifth wall portion 11A of the third communication chamber 11 in the vicinity of the fifth door body 111 so as to project toward the airtight space S2-1 side and to be connected to the communication space. The electric valve 12J is attached so as to project to the S4-2 side. These electric valves 12C and 12J are valves that are operated when the pressures in the airtight space S2-1 of the first adjustment chamber 21 and the communication space S4-2 of the third communication chamber 11 are equalized. Further, in the fifth wall portion 11A of the third communication chamber 11, in the vicinity of the sixth door body 112, the electric valve 12D is attached so as to project toward the communication space S4-2 side and protrude toward the airtight space S2-2 side. The electric valve 12I is attached. These electric valves 12D and 12I are valves that are operated when the pressures in the communication space S4-2 of the third communication chamber 11 and the airtight space S2-2 of the second adjustment chamber 22 are equalized.

The procedure for entering a person from the first adjusting chamber 21 to the second adjusting chamber 22 is as follows. First, with the fifth door body 111 and the sixth door body 112 closed, the electric valve 12C is operated to the open side, and the communication space between the airtight space S2-1 of the first adjustment chamber 21 and the third communication chamber 11 is opened. The pressure of S4-2 is equalized. Next, after the fifth door body 111 is opened and a person enters the third communication chamber 11, the fifth door body 111 is closed. When the fifth door 111 is closed, the electric valve 12C automatically operates toward the closing side. Next, the electric valve 12D is operated to the opening side to equalize the pressures of the communication space S4-2 of the third communication chamber 11 and the airtight space S2-2 of the second adjustment chamber 22. Next, after the sixth door body 112 is opened and a person enters the second adjustment chamber 22, the sixth door body 112 is closed. When the sixth door body 112 is closed, the electric valve 12D automatically operates toward the closing side.

On the other hand, the procedure for leaving a person from the second adjustment chamber 22 to the first adjustment chamber 21 is as follows. First, with the fifth door body 111 and the sixth door body 112 closed, the electric valve 12I is operated to the open side, and the communication space S4-2 of the third communication chamber 11 and the airtight space of the second adjustment chamber 22. The pressure in S2-2 is equalized. Next, after the sixth door body 112 is opened and a person leaves the second adjustment chamber 22 and enters the third communication chamber 11, the sixth door body 112 is closed. When the sixth door body 112 is closed, the electric valve 12I automatically operates toward the closing side. Next, the electric valve 12J is operated to the opening side to equalize the pressures in the airtight space S2-1 of the first adjustment chamber 21 and the communication space S4-2 of the third communication chamber 11. Next, after the fifth door body 111 is opened and the person moves to the first adjustment chamber 21 side, the fifth door body 111 is closed. When the fifth door 111 is closed, the electric valve 12J automatically operates toward the closing side.

The second communication chamber 10 is an airtight chamber surrounded by a fourth wall 10A that defines a communication space S5 that communicates the second adjustment chamber 22 and the pressure control chamber 3. The second communication chamber 10 is formed in a size that allows a person to pass through, and serves as a passage for a person to enter and leave the pressure control chamber 3. The fourth wall portion 10A of the second communication chamber 10 faces the airtight space S2-2 of the second adjustment chamber 22 and the third opening portion 10B that opens, and the second airtight space S3 of the pressure control chamber 3 faces. And a fourth opening portion 10C that is opened is formed. The second communication chamber 10 has a third door body 101 that can open and close the third opening 10B and a fourth door body 102 that can open and close the fourth opening 10C. In addition, in the 4th wall part 10A of the 2nd communicating chamber 10, the 3rd sealing member 1011 for ensuring the sealing property with the 3rd door body 101 is attached to the opening periphery part of the 3rd opening part 10B. A fourth seal member 1021 for securing a sealing property with the fourth door body 102 is attached to the opening peripheral edge of the fourth opening 10C.

Further, as shown in FIG. 7, an electric valve 12E is attached to the fourth wall portion 10A of the second communication chamber 10 in the vicinity of the third door body 101 so as to project toward the airtight space S2-2 side, and the communication space. The electric valve 12H is attached so as to project to the S5 side. These electric valves 12E and 12H are valves that are operated when the pressures in the airtight space S2-2 of the second adjustment chamber 22 and the communication space S5 of the second communication chamber 10 are equalized. Further, an electric valve 12F is attached to the fourth wall portion 10A of the second communication chamber 10 in the vicinity of the fourth door body 102 so as to protrude toward the communication space S5 side, and protrudes toward the second airtight space S3 side. 12G is attached. These electric valves 12F and 12G are valves that are operated when the pressures in the communication space S5 of the second communication chamber 10 and the second airtight space S3 of the pressure control chamber 3 are equalized.

The procedure for a person to enter the pressure control chamber 3 from the second adjustment chamber 22 is as follows. First, with the third door body 101 and the fourth door body 102 closed, the electric valve 12E is operated to the open side, and the airtight space S2-2 of the second adjustment chamber 22 and the communication space of the second communication chamber 10 are connected. The pressure of S5 is equalized. Next, after the third door body 101 is opened and a person enters the second communication chamber 10, the third door body 101 is closed. When the third door body 101 is closed, the electric valve 12E automatically operates toward the closing side. Next, the electric valve 12F is operated to the open side to equalize the pressures of the communication space S5 of the second communication chamber 10 and the second airtight space S3 of the pressure control chamber 3. Next, after the fourth door body 102 is opened and a person enters the pressure control chamber 3, the fourth door body 102 is closed. When the fourth door body 102 is closed, the electric valve 12F automatically operates toward the closing side.

On the other hand, the procedure for leaving a person from the pressure control chamber 3 to the second adjustment chamber 22 is as follows. First, with the third door body 101 and the fourth door body 102 closed, the electric valve 12G is operated to the open side, and the communication space S5 of the second communication chamber 10 and the second airtight space S3 of the pressure control chamber 3 are operated. Equalize the pressure of. Next, the fourth door body 102 is closed after the fourth door body 102 is opened and a person leaves the pressure control chamber 3 to enter the second communication chamber 10. When the fourth door body 102 is closed, the electric valve 12G automatically operates toward the closing side. Next, the electric valve 12H is operated to the open side to equalize the pressures of the airtight space S2-2 of the second adjustment chamber 22 and the communication space S5 of the second communication chamber 10. Next, after the third door body 101 is opened and a person moves to the second adjustment chamber 22 side, the third door body 101 is closed. When the third door body 101 is closed, the electric valve 12H automatically operates toward the closing side.

Next, the control unit 15 in this embodiment will be described. The control unit 15 stores the absolute pressure of the pressure control chamber 3 in the storage unit 16 based on the detection results input from the first pressure gauge 13A, the second pressure gauge 13B, the third pressure gauge 13C, and the fourth pressure gauge 13D. Each of the first ventilation mechanism 4, the second ventilation mechanism 5, and the third ventilation mechanism 6 is controlled so that the target set pressure that is stored in (3) is reached. As shown in FIG. 8, the control unit 15 includes a first pressure control unit 151, a second pressure control unit 152, and a third pressure control unit 153.

The first pressure control unit 151 controls the first ventilation mechanism 4 with reference to the detection result of the external atmospheric pressure by the first pressure gauge 13A and the detection result of the absolute pressure of the first adjustment chamber 21 by the second pressure gauge 13B. To do. Further, the second pressure control unit 152 controls the second ventilation mechanism 5 with reference to the detection result of the absolute pressure of the pressure control chamber 3 by the third pressure gauge 13C. Further, the third pressure control unit 153 controls the third ventilation mechanism 6 with reference to the detection result of the absolute pressure of the second adjustment chamber 22 by the fourth pressure gauge 13D. Further, in the present embodiment, the first pressure control unit 151, the second pressure control unit 152, and the third pressure control unit 153 have a pressure difference between the external space S1 and the first adjustment chamber 21 and a first adjustment chamber. 21 and the pressure difference between the second adjustment chamber 22 and the second adjustment chamber 22 and the pressure control chamber 3 are within the limit pressure difference of the panel structure stored in the storage unit 16. Each of the 1st ventilation mechanism 4, the 2nd ventilation mechanism 5, and the 3rd ventilation mechanism 6 is controlled so that it may become.

In the control unit 15, the first pressure control unit 151 controls the first ventilation mechanism 4, the second pressure control unit 152 controls the second ventilation mechanism 5, and the third pressure control unit 153 controls the third ventilation mechanism 6. By controlling, initial pressure control and pressure holding control are performed.

The control operation of the control unit 15 in the absolute pressure control system 1B according to the third embodiment will be described below with reference to FIGS. 9A and 9B. 9A and 9B show a fluctuation line K1 of the external atmospheric pressure, a pressure control characteristic line K21 in the first adjustment chamber 21, a pressure control characteristic line K22 in the second adjustment chamber 22 and a pressure control characteristic line K3 in the pressure control chamber 3. It is a graph. In the graphs shown in FIGS. 9A and 9B, the horizontal axis represents time and the vertical axis represents absolute pressure (hPa). The flow of control operation of the control unit 15 in the absolute pressure control system 1B according to the third embodiment is the same as that of the absolute pressure control system 1 according to the first embodiment described above. Therefore, hereinafter, the control operation of the control unit 15 in the absolute pressure control system 1B will be described with reference to the flowchart shown in FIG.

First, in step a1, the manager of the absolute pressure control system 1B sets the target set pressure PS of the pressure control chamber 3. The target set pressure PS is stored in the storage unit 16. The storage unit 16 also stores the critical pressure difference between the panel structures that form the pressure control chamber 3 and the pressure control chamber 2 including the first control chamber 21 and the second control chamber 22.

In the initial pressure control process of step a2, the first pressure control unit 151, the second pressure control unit 152, and the third pressure control unit 153 which form the control unit 15 execute the initial pressure control. The initial pressure control process of step a2 includes the first initial pressure control process of step a21 and the second initial pressure control process of step a22.

In the first initial pressure control step of step a21, the first pressure control unit 151, the second pressure control unit 152, and the third pressure control unit 153, which form the control unit 15, have the first adjustment chamber 21 and the second adjustment chamber 22. And the absolute pressure of the pressure control chamber 3 is set to the first adjusted pressure between the outside atmospheric pressure and the target set pressure PS, and then the absolute pressure of the second adjusted chamber 22 and the pressure control chamber 3 is set to the first adjusted pressure and the target set pressure. The first initial pressure control is executed as the second adjusted pressure between the PS and PS. Here, the first adjusted pressure is, for example, a value calculated based on the following equation (2), and the second adjusted pressure is, for example, a value calculated based on the following equation (3).

First adjustment pressure (hPa)=Ps+ΔP×C1 (2)
[In the formula (2), “Ps” represents the lower pressure value of the external atmospheric pressure and the target set pressure, “ΔP” represents the absolute value of the differential pressure between the external atmospheric pressure and the target set pressure, and “C1” ] Indicates a coefficient. “C1” is “2/3” when the external pressure is higher than the target set pressure, and is “1/3” when the external pressure is lower than the target set pressure. ]

Second adjustment pressure (hPa)=Ps+ΔP×C2 (3)
[In the formula (3), “Ps” represents the lower pressure value of the external pressure and the target set pressure, “ΔP” represents the absolute value of the differential pressure between the external pressure and the target set pressure, and “C2” ] Indicates a coefficient. “C2” is “1/3” when the external pressure is higher than the target set pressure, and is “2/3” when the external pressure is lower than the target set pressure. ]

In the second initial pressure control step of step a22, the first pressure control unit 151, the second pressure control unit 152, and the third pressure control unit 153, which constitute the control unit 15, set the absolute pressure of the first adjustment chamber 21 to the first pressure control unit 21. 1st adjustment pressure is maintained, while maintaining the absolute pressure of the 2nd adjustment chamber 22 at the said 2nd adjustment pressure, the 2nd initial pressure control which transfers the absolute pressure of the pressure control chamber 3 to target setting pressure PS is performed. ..

The initial pressure control executed by the controller 15 in the initial pressure control step of step a2 will be described in more detail below.

[Initial pressure control when the atmospheric pressure is higher than the target set pressure]
Regarding the initial pressure control executed by the control unit 15, control when the external atmospheric pressure is higher than the target set pressure PS will be described with reference to FIG. 9A. When the outside air pressure P01 is higher than the target set pressure PS of the pressure control chamber 3, in the first initial pressure control step of step a21, the first pressure control unit 151 outputs a command signal for controlling the first ventilation mechanism 4. , While transmitting a command signal for adjusting the output of the first exhaust machine 422 to the second inverter 421, and transmitting a command signal for opening the first exhaust motor damper 423 to an opening degree corresponding to the external air pressure P01, and While transmitting a command signal for adjusting the output of the first blower 412 to the inverter 411, a command signal for setting the opening to 10% or less is transmitted to the first blower motor damper 413.

In addition, the second pressure control unit 152 transmits a command signal for adjusting the output of the second exhaust unit 522 to the fourth inverter 521 as a command signal for controlling the second ventilation mechanism 5, while the second pressure control unit 152 is for second exhaust gas. While sending a command signal to the motor damper 523 to set the opening to 100% and sending a command signal to adjust the output of the second blower 512 to the third inverter 511, the opening to the second blower motor damper 513 is set to 10%. Send a command signal to set the percentage below. In addition, the third pressure control unit 153 transmits a command signal for adjusting the output of the third exhaust device 622 to the sixth inverter 621 as a command signal for controlling the third ventilation mechanism 6, while the third pressure control unit 153 transmits the command signal for controlling the third exhaust mechanism 622. A command signal for setting the opening to 100% is sent to the motor damper 623, and a command signal for adjusting the output of the third blower 612 is sent to the fifth inverter 611 while the opening of the third blower motor damper 613 is set to 10%. Send a command signal to set the percentage below. By the control operations of the first pressure control unit 151, the second pressure control unit 152, and the third pressure control unit 153, the first adjustment chamber 21, the second adjustment chamber 22, and the pressure at the time T01 of FIG. 9A. The absolute pressure of the control chamber 3 becomes the first adjusted pressure P11 between the outside air pressure P01 and the target set pressure PS.

Further, in the first initial pressure control step of step a21, the first pressure control unit 151 adjusts the output of the first exhaust unit 422 to the second inverter 421 as a command signal for controlling the first ventilation mechanism 4. While transmitting the command signal, the first exhaust motor damper 423 is transmitted with a command signal for opening the first adjustment chamber 21 to the first adjustment pressure, and the first inverter 411 is connected to the first blower 412. While transmitting a command signal for adjusting the output, a command signal for setting the opening to 10% or less is transmitted to the first air blowing motor damper 413. In addition, the third pressure control unit 153 transmits a command signal for adjusting the output of the third exhaust device 622 to the sixth inverter 621 as a command signal for controlling the third ventilation mechanism 6, while the third pressure control unit 153 transmits the command signal for controlling the third exhaust mechanism 622. While transmitting to the motor damper 623, a command signal for setting the opening in which the second adjustment chamber 22 can be moved to the second adjustment pressure, and transmitting a command signal for adjusting the output of the third blower 612 to the fifth inverter 611, A command signal for setting the opening to 10% or less is transmitted to the third blower motor damper 613.

In addition, the second pressure control unit 152 transmits a command signal for adjusting the output of the second exhaust unit 522 to the fourth inverter 521 as a command signal for controlling the second ventilation mechanism 5, while the second pressure control unit 152 is for second exhaust gas. While sending a command signal to the motor damper 523 to set the opening to 100% and sending a command signal to adjust the output of the second blower 512 to the third inverter 511, the opening to the second blower motor damper 513 is set to 10%. Send a command signal to set the percentage below. By the control operations of the first pressure control unit 151, the second pressure control unit 152, and the third pressure control unit 153, the absolute pressure of the first adjustment chamber 21 is equal to the ambient pressure and the target at the time T11 of FIG. 9A. The absolute pressure of the second adjustment chamber 22 and the pressure control chamber 3 is maintained at the first adjusted pressure between the set pressure PS and the second adjusted pressure P21 between the first adjusted pressure P11 and the target set pressure PS. Becomes

Next, in the second initial pressure control step of step a22, the first pressure control unit 151 adjusts the output of the first exhaust unit 422 to the second inverter 421 as a command signal for controlling the first ventilation mechanism 4. The first blower 412 to the first exhaust motor damper 423 while sending a command signal to the first exhaust chamber damper 423 to maintain the first adjustment chamber 21 at the first adjustment pressure. While transmitting the command signal for adjusting the output of the above, a command signal for setting the opening to 10% or less is transmitted to the first air blowing motor damper 413. In addition, the third pressure control unit 153 transmits a command signal for adjusting the output of the third exhaust device 622 to the sixth inverter 621 as a command signal for controlling the third ventilation mechanism 6, while the third pressure control unit 153 transmits the third exhaust gas While transmitting to the motor damper 623 a command signal for setting the second adjustment chamber 22 to an opening degree capable of maintaining the second adjustment pressure, and transmitting a command signal for adjusting the output of the third blower 612 to the fifth inverter 611, A command signal for setting the opening to 10% or less is transmitted to the third blower motor damper 613.

In addition, the second pressure control unit 152 transmits a command signal for adjusting the output of the second exhaust unit 522 to the fourth inverter 521 as a command signal for controlling the second ventilation mechanism 5, while the second pressure control unit 152 is for second exhaust gas. While transmitting a command signal for opening the pressure control chamber 3 to the target set pressure PS to the motor damper 523 and transmitting a command signal for adjusting the output of the second blower 512 to the third inverter 511, 2 A command signal for setting the opening to 10% or less is transmitted to the air blower motor damper 513. By the control operations of the first pressure control unit 151, the second pressure control unit 152, and the third pressure control unit 153, the absolute pressure of the first adjustment chamber 21 is equal to the outside atmospheric pressure at the time T21 of FIG. 9A. While maintaining the first adjusted pressure between the set pressure PS and the absolute pressure of the second adjusted chamber 22 at the second adjusted pressure between the first adjusted pressure and the target set pressure PS, the pressure control chamber 3 The absolute pressure of is the target set pressure PS. In the example of FIG. 9A, a time zone from the time when the initial pressure control is started before time T01 to time T01 and a time zone TW1 from time T01 to time T21 are included in the first pressure controller It is a time period in which the initial pressure control is executed by the 151, the second pressure control unit 152, and the third pressure control unit 153.

[Initial pressure control when the atmospheric pressure is lower than the target set pressure]
Regarding the initial pressure control executed by the control unit 15, control when the external atmospheric pressure is lower than the target set pressure PS will be described with reference to FIG. 9B. When the outside air pressure P02 is lower than the target set pressure PS of the pressure control chamber 3, in the first initial pressure control step of step a21, the first pressure control unit 151 outputs a command signal for controlling the first ventilation mechanism 4. , While sending a command signal for adjusting the output of the first blower 412 to the first inverter 411, and sending a command signal for opening the opening according to the outside air pressure P02 to the first blower motor damper 413, and the second inverter While transmitting a command signal for adjusting the output of the first exhaust machine 422 to 421, a command signal for setting the opening to 10% or less is transmitted to the first exhaust motor damper 423.

In addition, the second pressure control unit 152 transmits a command signal for adjusting the output of the second blower 512 to the third inverter 511 as a command signal for controlling the second ventilation mechanism 5, while the second blower motor damper is being transmitted. A command signal for setting the opening to 100% is transmitted to 513, and a command signal for adjusting the output of the second exhaust machine 522 is transmitted to the fourth inverter 521, while the opening to the second exhaust motor damper 523 is set to 10%. Send a command signal to set the percentage below. In addition, the third pressure control unit 153 transmits a command signal for adjusting the output of the third blower 612 to the fifth inverter 611 as a command signal for controlling the third ventilation mechanism 6, and the third blower motor damper 153. A command signal for setting the opening to 100% is sent to 613, and a command signal for adjusting the output of the third exhaust machine 622 is sent to the sixth inverter 621, while the opening to the third exhaust motor damper 623 is set to 10%. Send a command signal to set the percentage below. By the control operations of the first pressure control unit 151, the second pressure control unit 152, and the third pressure control unit 153, the first adjustment chamber 21, the second adjustment chamber 22, and the pressure at the time T02 of FIG. 9B. The absolute pressure of the control chamber 3 becomes the first adjusted pressure P12 between the outside air pressure P02 and the target set pressure PS.

Further, in the first initial pressure control step of step a21, the first pressure control unit 151 issues a command to the first inverter 411 to adjust the output of the first blower 412 as a command signal for controlling the first ventilation mechanism 4. While transmitting the signal, the first blower motor damper 413 is transmitted with a command signal for opening the first adjustment chamber 21 to maintain the first adjusted pressure at the first adjusted pressure, and the second inverter 421 is connected to the first exhaust device 422. While transmitting a command signal for adjusting the output, a command signal for setting the opening to 10% or less is transmitted to the first exhaust motor damper 423. In addition, the third pressure control unit 153 transmits a command signal for adjusting the output of the third blower 612 to the fifth inverter 611 as a command signal for controlling the third ventilation mechanism 6, and the third blower motor damper 153. While transmitting to 613 a command signal that sets the second adjustment chamber 22 to an opening degree that allows transfer to the second adjustment pressure, and while transmitting a command signal that adjusts the output of the third exhaust device 622 to the sixth inverter 621, A command signal for setting the opening to 10% or less is transmitted to the third exhaust motor damper 623.

In addition, the second pressure control unit 152 transmits a command signal for adjusting the output of the second blower 512 to the third inverter 511 as a command signal for controlling the second ventilation mechanism 5, while the second blower motor damper is being transmitted. A command signal for setting the opening to 100% is transmitted to 513, and a command signal for adjusting the output of the second exhaust machine 522 is transmitted to the fourth inverter 521, while the opening to the second exhaust motor damper 523 is set to 10%. Send a command signal to set the percentage below. By the control operations of the first pressure control unit 151, the second pressure control unit 152, and the third pressure control unit 153, the absolute pressure of the first adjustment chamber 21 is equal to the ambient pressure and the target pressure at time T12 in FIG. 9B. While being maintained at the first adjusted pressure between the set pressure PS and the absolute pressure of the second adjusted chamber 22 and the pressure control chamber 3, the absolute pressure of the second adjusted pressure P22 between the first adjusted pressure and the target set pressure PS is Become.

Next, in the second initial pressure control step of step a22, the first pressure control unit 151 adjusts the output of the first blower 412 to the first inverter 411 as a command signal for controlling the first ventilation mechanism 4. While transmitting the command signal, the first blower motor damper 413 is transmitted with a command signal for opening the first adjustment chamber 21 to maintain the first adjusted pressure at the first adjusted pressure, and the second inverter 421 is provided with the first exhaust device 422. While transmitting the command signal for adjusting the output of the above, the command signal for setting the opening to 10% or less is transmitted to the first exhaust motor damper 423. In addition, the third pressure control unit 153 transmits a command signal for adjusting the output of the third blower 612 to the fifth inverter 611 as a command signal for controlling the third ventilation mechanism 6, and the third blower motor damper 153. While transmitting to 613 a command signal that sets the second adjustment chamber 22 to an opening that can maintain the second adjustment pressure, and while transmitting a command signal that adjusts the output of the third exhaust device 622 to the sixth inverter 621, A command signal for setting the opening to 10% or less is transmitted to the third exhaust motor damper 623.

In addition, the second pressure control unit 152 transmits a command signal for adjusting the output of the second blower 512 to the third inverter 511 as a command signal for controlling the second ventilation mechanism 5, while the second blower motor damper is being transmitted. While transmitting a command signal for making the pressure control chamber 3 an opening degree capable of shifting to the target set pressure PS to 513 and transmitting a command signal for adjusting the output of the second exhaust machine 522 to the fourth inverter 521, (2) A command signal for setting the opening to 10% or less is transmitted to the exhaust motor damper 523. By the control operations of the first pressure control unit 151, the second pressure control unit 152, and the third pressure control unit 153, the absolute pressure of the first adjustment chamber 21 is equal to the ambient pressure and the target at the time T22 of FIG. 9B. While maintaining the first adjusted pressure between the set pressure PS and the absolute pressure of the second adjusted chamber 22 at the second adjusted pressure between the first adjusted pressure and the target set pressure PS, the pressure control chamber 3 The absolute pressure of is the target set pressure PS. In the example of FIG. 9B, the time zone from the time when the initial pressure control is started before the time T02 to the time T02 and the time zone TW1 from the time T02 to the time T22 constitute the first pressure control unit constituting the control unit 15. It is a time period in which the initial pressure control is executed by the 151, the second pressure control unit 152, and the third pressure control unit 153.

When the absolute pressure of the pressure control chamber 3 is set to the target set pressure PS in the initial pressure control process of step a2, the process proceeds to the pressure holding control process of step a3. In the pressure holding control step of step a3, the first pressure control unit 151, the second pressure control unit 152, and the third pressure control unit 153, which constitute the control unit 15, execute pressure holding control. The pressure holding control process of step a3 includes a first pressure holding control process of step a31 and a second pressure holding control process of step a32.

In the first pressure holding control step of step a31, the first pressure control unit 151 that constitutes the control unit 15 sets the absolute pressure of the first adjustment chamber 21 to the external pressure and the target set pressure PS according to the fluctuation of the external pressure. The first pressure holding control for changing the first pressure between and is performed. Further, the third pressure control unit 153 constituting the control unit 15 sets the absolute pressure of the second adjustment chamber 22 to the second pressure between the first pressure and the target set pressure PS according to the fluctuation of the external atmospheric pressure. The first pressure holding control for transition is executed. Here, by the first pressure holding control by the first pressure control unit 151, the absolute pressure of the first adjustment chamber 21 changes at the pressure calculated based on the above equation (2) according to the fluctuation of the external atmospheric pressure. Further, by the first pressure holding control by the third pressure control unit 153, the absolute pressure of the second adjustment chamber 22 changes at the pressure calculated based on the above equation (3) according to the fluctuation of the external atmospheric pressure.

In the second pressure holding control step of step a32, the second pressure control unit 152 that constitutes the control unit 15 keeps the absolute pressure of the pressure control chamber 3 constant at the target set pressure PS reached in the initial pressure control. The second pressure holding control is executed.

The time zone TW2 after the time T21 in the example of FIG. 9A and the time zone TW2 after the time T22 in the example of FIG. 9B are the first pressure control unit 151 and the second pressure control unit 152 that configure the control unit 15. And the time period in which the pressure holding control is executed by the third pressure control unit 153.

The pressure holding control executed by the control unit 15 in the pressure holding control step of step a3 will be described in more detail below.

[Pressure holding control when the outside air pressure is higher than the target set pressure]
When the fluctuating outside air pressure is higher than the target set pressure PS, in the first pressure holding control step of step a31, the first pressure control unit 151 uses the second inverter as a command signal for controlling the first ventilation mechanism 4. A command signal for adjusting the output of the first exhaust machine 422 is transmitted to 421, a command signal for opening the first exhaust motor damper 423 according to the fluctuation of the external pressure is transmitted, and the first inverter 411 is transmitted. While transmitting a command signal for adjusting the output of the first blower 412, a command signal for setting the opening to 10% or less is transmitted to the first blower motor damper 413. In addition, the third pressure control unit 153 transmits a command signal for adjusting the output of the third exhaust device 622 to the sixth inverter 621 as a command signal for controlling the third ventilation mechanism 6, while the third pressure control unit 153 transmits the command signal for controlling the third exhaust mechanism 622. While transmitting a command signal to the motor damper 623 to set the opening degree according to the fluctuation of the external atmospheric pressure and a command signal to adjust the output of the third blower 612 to the fifth inverter 611, the third blower motor damper 613 is transmitted. A command signal for setting the opening to 10% or less is transmitted. By the control operations of the first pressure control unit 151 and the third pressure control unit 153, the absolute pressure of the first adjustment chamber 21 is set to a value between the external pressure and the target set pressure PS according to the fluctuation of the external pressure. The pressure is changed to 1 pressure, and the absolute pressure of the second adjustment chamber 22 is changed to a second pressure between the first pressure and the target set pressure PS.

In the second pressure holding control step of step a32, the second pressure control unit 152 adjusts the output of the second exhaust unit 522 to the fourth inverter 521 as a command signal for controlling the second ventilation mechanism 5. While transmitting the command signal, the second exhaust motor damper 523 is transmitted with a command signal for adjusting the opening according to the fluctuation of the external atmospheric pressure, and the third inverter 511 is supplied with a command signal for adjusting the output of the second blower 512. While transmitting, a command signal for setting the opening degree to 10% or less is transmitted to the second blower motor damper 513. By such control operation of the second pressure control unit 152, the absolute pressure of the pressure control chamber 3 changes constantly at the target set pressure PS reached in the initial pressure control.

[Pressure holding control when the outside air pressure is lower than the target set pressure]
When the fluctuating outside air pressure is lower than the target set pressure PS, in the first pressure holding control step of step a31, the first pressure control unit 151 uses the first inverter as a command signal for controlling the first ventilation mechanism 4. While transmitting a command signal for adjusting the output of the first blower 412 to 411, a command signal for opening the first blower motor damper 413 to an opening degree according to the fluctuation of the external air pressure is transmitted to the second inverter 421. While transmitting a command signal for adjusting the output of the first exhaust machine 422, a command signal for setting the opening to 10% or less is transmitted to the first exhaust motor damper 423. In addition, the third pressure control unit 153 transmits a command signal for adjusting the output of the third blower 612 to the fifth inverter 611 as a command signal for controlling the third ventilation mechanism 6, and the third blower motor damper 153. A command signal for setting the opening degree according to the fluctuation of the external atmospheric pressure is transmitted to 613, and a command signal for adjusting the output of the third exhaust machine 622 is transmitted to the sixth inverter 621, while being transmitted to the third exhaust motor damper 623. A command signal for setting the opening to 10% or less is transmitted. By the control operations of the first pressure control unit 151 and the third pressure control unit 153, the absolute pressure of the first adjustment chamber 21 is set to a value between the external pressure and the target set pressure PS according to the fluctuation of the external pressure. The pressure is changed to 1 pressure, and the absolute pressure of the second adjustment chamber 22 is changed to a second pressure between the first pressure and the target set pressure PS.

In the second pressure holding control step of step a32, the second pressure control unit 152 issues a command to the third inverter 511 to adjust the output of the second blower 512 as a command signal for controlling the second ventilation mechanism 5. While transmitting the signal, the second blower motor damper 513 is transmitted with a command signal for setting the opening degree according to the fluctuation of the external atmospheric pressure, and the fourth inverter 521 is transmitted with a command signal for adjusting the output of the second exhaust unit 522. While transmitting, a command signal for setting the opening to 10% or less is transmitted to the second exhaust motor damper 523. By such control operation of the second pressure control unit 152, the absolute pressure of the pressure control chamber 3 changes constantly at the target set pressure PS reached in the initial pressure control.

In the absolute pressure control system 1B according to the present embodiment configured as described above, the first pressure control unit 151, the second pressure control unit 152, and the third pressure control unit 153 that configure the control unit 15 have the first initial stage. In the pressure control, after the absolute pressures of the first adjusting chamber 21, the second adjusting chamber 22 and the pressure controlling chamber 3 are set to the first adjusting pressure between the outside atmospheric pressure and the target set pressure PS, the second adjusting chamber 22 and the pressure The absolute pressure of the control chamber 3 is controlled to be the second adjusted pressure between the first adjusted pressure and the target set pressure PS. In addition, the first pressure control unit 151, the second pressure control unit 152, and the third pressure control unit 153 that form the control unit 15 change the absolute pressure of the first adjustment chamber 21 to the fluctuation of the external atmospheric pressure in the first pressure holding control. According to the first pressure between the external pressure and the target set pressure PS, and the absolute pressure of the second adjustment chamber 22 between the first pressure and the target set pressure PS according to the fluctuation of the external pressure. The second pressure is controlled to change. Thereby, the permissible range of the pressure difference between the target set pressure of the pressure control chamber 3 and the external atmospheric pressure is set to the pressure difference between the outer space S1 on both sides of the outer peripheral wall 2A1 and the first adjustment chamber 21, and the inner peripheral wall. 2A2, the pressure difference between the first adjustment chamber 21 and the second adjustment chamber 22 on both sides, and the second adjustment chamber 22 and the pressure control chamber 3 on both sides that sandwich the second wall portion 3A of the pressure control chamber 3. It can be extended to the sum of the pressure difference between and. Therefore, the permissible range of the pressure difference between the target set pressure of the pressure control chamber 3 and the outside air pressure can be widened, and even if the outside air pressure fluctuates more, the absolute pressure of the pressure control chamber 3 can be kept constant. It is possible to maintain the set pressure.

Although the embodiment of the present invention has been described above, the present invention is not limited to this, and various modified embodiments can be adopted. For example, in the absolute pressure control system 1B according to the third embodiment, the pressure control chamber 2 surrounding the pressure control chamber 3 is two control chambers, the first control chamber 21 and the second control chamber 22 arranged inside thereof. The example is a multiple structure consisting of. The number of adjusting chambers forming the pressure adjusting chamber 2 having the multiple structure is not limited to two, and may be three or more. In this case, it suffices to provide a ventilation mechanism for performing ventilation between the adjustment chambers according to the number of adjustment chambers. Note that each room does not have to be a size that can be accommodated by a person, and does not have to be a room for a person to enter and leave. In this case, the opening and the door provided in the communication chamber that communicates between the chambers are the opening and the door for loading and unloading articles.

In the above embodiment, the first pressure difference holding mechanism 7, 7A, the second pressure difference holding mechanism 8 and the third pressure difference holding mechanism 7B have been described as having a configuration including a mechanical backflow prevention damper. These pressure difference holding mechanisms need not be mechanical.

1, 1A, 1B Absolute pressure control system 2 Pressure adjusting chamber 21 First adjusting chamber 22 Second adjusting chamber 2A First wall 2A1 Outer peripheral wall 2A2 Inner peripheral wall 3 Pressure control chamber 3A Second wall 4 First ventilation mechanism 5th 2 Ventilation mechanism 6 3rd ventilation mechanism 7, 7A 1st pressure difference holding mechanism 7B 3rd pressure difference holding mechanism 8 2nd pressure difference holding mechanism 14 Air conditioner 15 Control part 151 1st pressure control part 152 2nd pressure control part 153 Third pressure controller

Claims (4)

A pressure adjusting chamber surrounded by a first wall portion that defines a first airtight space that is partitioned from the external space;
A pressure control chamber that is disposed in the first airtight space and is surrounded by a second wall that defines a second airtight space that is partitioned from the first airtight space, and that is a pressure control target;
A ventilation mechanism for performing ventilation of the pressure adjustment chamber and the pressure control chamber,
A control unit that controls the ventilation mechanism and executes initial pressure control for shifting the absolute pressure of the pressure control chamber to a target set pressure and pressure holding control for holding the absolute pressure of the pressure control chamber at the target set pressure. And,
The initial pressure control is a first initial pressure control in which an absolute pressure of the pressure control chamber and the pressure control chamber is a regulated pressure between an external atmospheric pressure which is a pressure of the external space and the target set pressure, and the pressure. A second initial pressure control for shifting the absolute pressure of the pressure control chamber from the adjusted pressure to the target set pressure while maintaining the absolute pressure of the adjustment chamber at the adjusted pressure,
The pressure holding control is a first pressure holding control in which the absolute pressure in the pressure adjusting chamber is changed and changed by a pressure between the outside atmospheric pressure and the target set pressure according to a change in the outside atmospheric pressure, and the pressure. A second pressure holding control for keeping the absolute pressure of the control chamber constant at the target set pressure ,
Each of the first wall portion and the second wall portion is configured by a panel structure in which a plurality of panels are connected,
In the panel structure, as the eigenvalue of the pressure difference between the spaces on both sides of the panel, a limit pressure difference capable of maintaining the airtightness of the pressure adjustment chamber and the pressure control chamber is preset,
The control unit determines that the first pressure difference between the external space and the first airtight space and the second pressure difference between the first airtight space and the second airtight space are the critical pressure difference. An absolute pressure control system that executes the initial pressure control and the pressure holding control so as to be within the range . A pressure adjusting chamber surrounded by a first wall portion that defines a first airtight space that is partitioned from the external space;
A pressure control chamber that is disposed in the first airtight space and is surrounded by a second wall that defines a second airtight space that is partitioned from the first airtight space, and that is a pressure control target;
A ventilation mechanism for performing ventilation of the pressure adjustment chamber and the pressure control chamber,
A control unit that controls the ventilation mechanism and executes initial pressure control for shifting the absolute pressure of the pressure control chamber to a target set pressure and pressure holding control for holding the absolute pressure of the pressure control chamber at the target set pressure. And,
The initial pressure control is a first initial pressure control in which an absolute pressure of the pressure control chamber and the pressure control chamber is a regulated pressure between an external atmospheric pressure which is a pressure of the external space and the target set pressure, and the pressure. A second initial pressure control for shifting the absolute pressure of the pressure control chamber from the adjusted pressure to the target set pressure while maintaining the absolute pressure of the adjustment chamber at the adjusted pressure,
The pressure holding control is a first pressure holding control in which the absolute pressure in the pressure adjusting chamber is changed and changed by a pressure between the outside atmospheric pressure and the target set pressure according to a change in the outside atmospheric pressure, and the pressure. A second pressure holding control for keeping the absolute pressure of the control chamber constant at the target set pressure,
The pressure adjusting chamber has a multiple structure including an outer peripheral wall facing the outer space as the first wall portion and an inner peripheral wall facing the outer peripheral wall, and the first adjusting chamber is defined by the outer peripheral wall. And a second adjustment chamber defined by the inner peripheral wall and arranged in the first adjustment chamber,
The pressure control chamber is arranged in the second adjustment chamber,
In the initial pressure control executed by the control unit, the first initial pressure control is performed by changing an absolute pressure of the first adjustment chamber, the second adjustment chamber, and the pressure control chamber between the outside atmospheric pressure and the target set pressure. After the first adjusted pressure of, the absolute pressure of the second adjustment chamber and the pressure control chamber is a second adjusted pressure between the first adjusted pressure and the target set pressure,
In the pressure holding control executed by the control unit, the first pressure holding control is a first pressure holding control in which the absolute pressure of the first adjusting chamber is between the outside air pressure and the target set pressure in accordance with the change in the outside air pressure. A control that causes the absolute pressure in the second adjustment chamber to fluctuate while changing with the second pressure between the first pressure and the target set pressure according to the change in the external atmospheric pressure. Oh it is,
The outer peripheral wall, the inner peripheral wall, and the second wall portion are each formed of a panel structure in which a plurality of panels are connected,
In the panel structure, as the eigenvalue of the pressure difference between the spaces on both sides of the panel, a limit pressure difference capable of maintaining the airtightness of the pressure adjustment chamber and the pressure control chamber is preset,
The control unit includes a pressure difference between the external space and the first adjustment chamber, a pressure difference between the first adjustment chamber and the second adjustment chamber, the second adjustment chamber and the pressure control. and the pressure difference between the chamber, so that within the limit pressure difference, to perform the initial pressure control and the pressure hold control, absolute pressure control system. The absolute pressure control system according to claim 1, further comprising an air conditioner capable of adjusting the temperature and humidity of the pressure control chamber. A second airtight space that is arranged in the first airtight space and is partitioned from the first airtight space in a pressure adjustment chamber that is surrounded by a first wall that defines a first airtight space that is partitioned from the external space is defined. An absolute pressure control method for controlling the absolute pressure of the pressure control chamber surrounded by the second wall portion to a target set pressure,
Each of the first wall portion and the second wall portion is configured by a panel structure in which a plurality of panels are connected,
In the panel structure, as the eigenvalue of the pressure difference between the spaces on both sides of the panel, a limit pressure difference capable of maintaining the airtightness of the pressure adjustment chamber and the pressure control chamber is preset,
An initial pressure control step of shifting the absolute pressure of the pressure control chamber to the target set pressure,
A pressure holding control step of holding the absolute pressure of the pressure control chamber at the target set pressure,
The initial pressure control step,
A first initial pressure control step of setting an absolute pressure of the pressure adjustment chamber and the pressure control chamber to an adjustment pressure between the external atmospheric pressure which is the pressure of the external space and the target set pressure,
A second initial pressure control step of shifting the absolute pressure of the pressure control chamber from the adjusted pressure to the target set pressure while maintaining the absolute pressure of the pressure adjustment chamber at the adjusted pressure,
The pressure holding control step,
A first pressure holding control step of causing the absolute pressure of the pressure adjustment chamber to change while varying with a pressure between the external atmospheric pressure and the target set pressure according to the variation of the external atmospheric pressure,
Look including a second pressure holding control step of transition absolute pressure of the pressure control chamber constant at the target setting pressure,
In the initial pressure control step and the pressure holding control step, a first pressure difference between the external space and the first airtight space and a second pressure between the first airtight space and the second airtight space. The absolute pressure control method , wherein the control is executed so that the difference is within the limit pressure difference .

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