JP6739731B2 - Surface treatment equipment - Google Patents

Description

The present invention relates to a surface treatment device for treating a surface of a treatment object such as a film with discharge energy output from a discharge electrode.

A conventionally known surface treatment apparatus of this type includes a processing roller and a chamber having an opening facing the processing roller, and the chamber conveys a film conveyed along the processing roller. A plurality of discharge electrodes are arranged in the direction, and the processing roller and the discharge electrode are opposed to each other.

Then, the film is conveyed while rotating the processing roller in a certain direction, discharge energy is output from the discharge electrode, and the surface treatment of the film is performed by this discharge energy.

JP, 2000-007802, A

In the conventional device as described above, the discharge electrode becomes high temperature and expands, but no means for suppressing the expansion is provided. Therefore, the discharge electrode expands during the discharge process, but the expansion appears as a bending of the discharge electrode in the length direction.
Then, when the amount of bending increases, a part of the discharge electrode in the length direction approaches the processing roller, which changes the gap between the processing electrode and the processing roller.

The gap between the discharge electrode and the processing roller has a delicate influence on the surface treatment of the object to be treated such as a film passing therethrough, which causes a problem of affecting the quality of the surface treatment.
Further, when the discharge electrode further bends, that portion may come into contact with the processing target. If the discharge electrode comes into contact with the object to be processed, there is a problem that the object to be processed is damaged.

An object of the present invention is to provide a surface treatment apparatus capable of suppressing expansion of the discharge electrode and maintaining quality of surface treatment.

According to a first aspect of the invention, a processing roller for transporting a film, a chamber having an opening facing the processing roller, a discharge electrode provided in the chamber and arranged in plural in a transport direction of the film, And a suction means for sucking the staying gas in the chamber.
The "gas" includes ozone generated in the chamber, air introduced from the outside, and the like.

Then, the film flowed into the chamber on at least one of the upstream and downstream sides in the transport direction of the film, or in the vicinity of the discharge electrodes located on both sides, and on the side opposite to the processing roller with the discharge electrode interposed therebetween. Guide means for guiding the fresh air in the suction direction of the suction means is provided.

The second invention is characterized in that the guide means is a plate.

A third invention is characterized in that the guide means is a plate having one or a plurality of slits formed therein.

The fourth invention is characterized in that the guide means also serves as a side wall of the chamber.

According to this invention, since the guide means is provided in the vicinity of the discharge electrode, the fresh air flowing from the opening of the chamber is guided between the processing roller and the discharge electrode and between the discharge electrode and the guide means. The discharge electrode is cooled with fresh air. Therefore, the expansion of the discharge electrode is suppressed, and the amount of flexure of the discharge electrode can be reduced, so that the conventional problem does not occur.

It is a perspective view of the surface treatment apparatus which shows 1st Embodiment. It is explanatory drawing which shows the flow of fresh air in the chamber of 1st Embodiment. It is explanatory drawing which shows the external shape of the chamber of 2nd Embodiment.

In the first embodiment shown in FIGS. 1 and 2, a processing roller R having an axial length equal to or larger than the width of the film F to be conveyed is provided and the processing roller R is electrically grounded. I am making it.
A chamber C having the following configuration is provided near the processing roller R thus configured.

The chamber C is provided with one rectangular plate 1 whose long side is substantially equal to the axial length of the processing roller R, and side walls 2 to 5 continuous with each side of the rectangular plate 1. A box is formed by the side walls 2 to 5, and an opening 6 is formed on the side facing the rectangular plate 1.
The opening 6 maintains a length corresponding to the axial length of the processing roller R and a predetermined width corresponding to the circumferential direction of the processing roller R.

The chamber C thus configured is installed such that the opening 6 faces the processing roller R, and the film F, which is a processing target that contacts the processing roller R, and the opening 6 face each other with a slight gap. Has been done.
Then, three hanging rods 7 are fixed to the rectangular plate 1 in the chamber C, three holders 8 are provided at the tip of each hanging rod 7, and three holders 8 are provided in each holder 8. The discharge electrodes 9 to 11 are held.
Reference numeral 12 in the figure is an exhaust hole formed in the rectangular plate 1 and is connected to a suction means (not shown) so as to suck the gas in the chamber C.

The three discharge electrodes 9 to 11 as described above have a predetermined length in the axial direction of the processing roller R, are arranged in parallel to the transport direction of the film F, and contact the processing roller R. A discharge interval is maintained between and. Therefore, when a high voltage acts on the discharge electrodes 9 to 11, a discharge is generated between the discharge electrodes 9 to 11 and the processing roller R, and the discharge energy at this time causes the discharge electrodes 9 to 11 to be conveyed along the processing roller R. The film F is surface-treated.

Further, the side walls 2 and 3 continuous with the long side of the rectangular plate 1 are provided with guide plates 13 and 14 which are the guide means of the present invention. The guide plates 13 and 14 are located on the opposite side of the processing roller R with the discharge electrodes 9 and 11 interposed therebetween. That is, in FIGS. 1 and 2, the guide plates 13 and 14 and the discharge electrodes 9 and 11 face each other.

The operation of the first embodiment will be described below.
When a high voltage is applied to the discharge electrodes 9 to 11 while rotating the processing roller R in the direction of the arrow to convey the film F, electric discharge occurs between the discharge electrodes 9 to 11 and the processing roller R. By the discharge energy at this time, ionized electrons and ions are generated between the discharge electrodes 9 to 11 and the processing roller R, and the film F is surface-treated by the action of the ionized electrons and ions.

Then, when the ions are generated as described above, ozone is generated with it, but this ozone is also harmful to the human body. Therefore, the gas in the chamber C is exhausted by the suction force of the suction means. Exhausted from 12.

The suction force of the suction means not only exhausts the gas, but also sucks the fresh air outside into the chamber C.
Note that FIG. 2 is a printout of the result of computer simulation, and the direction of the arrow indicates the direction of fresh air flow.

Then, as shown in FIG. 2, the fresh air sucked into the chamber C as described above is located between the discharge electrode 9 located on the upstream side in the transport direction of the film F and the processing roller R, and located on the downstream side. Flows E1 and E2 flowing between the discharging electrode 11 and the processing roller R are generated.

Moreover, each of the flows E1 and E2 collides with the central discharge electrode 10 and flows between the discharge electrode 10 and the processing roller R, and flows E1b and E1b flowing along the side surface of the discharge electrode 10. , E2b.
Therefore, the discharge electrode 10 located at the center is also cooled by the flows E1a, E2a and E1b, E2b.

In addition to the flow flowing between the discharge electrodes 9 and 11 and the processing roller R in the chamber C as described above, the flow E3 directly flowing toward the exhaust hole 12 along the side walls 2 and 3 of the chamber C. E4 also occurs.
However, since the guide plates 13 and 14 are provided on the side walls 2 and 3, the fresh air flows E3 and E4 along the side walls 2 and 3 are forcibly turned by the guide plates 13 and 14. , Flows toward the facing interval between the guide plates 13 and 14 and the discharge electrodes 9 and 11.
In this way, the fresh air is evenly distributed around the discharge electrodes 9 to 11, so that the discharge electrodes 9 to 11 can be prevented from being cooled and greatly expanded.

If the guide plates 13 and 14 are not provided, the fresh air flowing into the chamber C avoids the space between the discharge electrodes 9 and 11 having a relatively large flow resistance and the processing roller R, and the side walls 2 having a small flow resistance. It becomes easy to flow in the direction along 3. Therefore, the cooling effect of the fresh air on the discharge electrodes 9 to 11 becomes weak.

However, if the guide plates 13 and 14 are provided, the fresh air spreads around the discharge electrodes 9 to 11 as described above, so that the desired cooling effect can be exerted.
If the discharge electrodes 9 to 11 are cooled, even if the discharge electrodes 9 to 11 expand, the amount of bending of the discharge electrodes 9 to 11 in the longitudinal direction can be reduced.

Although the guide plates are provided on the side walls 2 and 3 in the above embodiment, the guide plates may be provided on only one of the side walls.
In this case, the cooling effect of the discharge electrode 9 or 11 on the side where the guide plate is not provided is somewhat reduced, but the experimental result shows that the temperature rise of the discharge electrode is suppressed more than in the case without the guide plate. .. It is considered that when two of the three discharge electrodes 9 to 11 are cooled, the heat of the discharge electrode having a relatively high temperature is absorbed by the discharge electrode having a low temperature.

On the other hand, throttling resistance is given to the flow toward the exhaust hole 12 by the guide plates 13 and 14, so that the flow velocity passing through the narrow space between the discharge electrodes 9 to 11 and the processing roller R becomes faster.
When the flow velocity is increased in this way, ozone and the like generated between the discharge electrodes 9 to 11 and the processing roller R quickly travels to the exhaust hole 12 along with the flow.

Since ozone and the like can be quickly discharged in such a fast flow, it becomes difficult for gas to stay between the discharge electrodes 9 to 11 and the processing roller R, and ozone and a carbon component from the film may chemically react. .. Therefore, crystalline foreign substances such as oxalic acid based on these chemical reactions are not generated.

If crystalline foreign matter is generated, it adheres around the discharge electrodes 9 and 11 and deteriorates heat dissipation of the discharge electrodes 9 to 11, so that the discharge electrodes 9 to 11 are more likely to expand.
However, according to this embodiment, since the crystalline foreign matter is not generated, the crystalline foreign matter does not adhere to the discharge electrodes 9 to 11. Therefore, the discharge electrodes 9 to 11 do not increase in temperature and greatly expand.

Further, as described above, since the crystalline foreign matter is not generated, the crystalline foreign matter does not remain in the chamber, so that the problem that the crystalline foreign matter left in the chamber is scattered again does not occur.
It should be noted that slits may be formed in the guide plates 13 and 14 of the first embodiment, and fresh air may flow through the slits.

In the second embodiment shown in FIG. 3, the chamber C has the illustrated shape and the guide plates 13 and 14 are omitted. That is, in the chamber C, a portion corresponding to the position where the guide plates 13 and 14 are provided is bent inward, and the curved surface 15 is used as the guide means of the present invention. The curved surface 15 as the guiding means thus configured also serves as the side wall of the chamber C.
The operation and effect of this second embodiment are the same as those of the first embodiment, and their details are omitted.

It is most suitable for the surface treatment device that treats the surface of the film with the discharge energy output from the discharge electrode.

R... Processing roller, C... Chamber, 6... Opening, 9-11... Discharge electrode, 13, 14... Guide plate as guide means, 15... Curved surface as guide means

Claims (4)

A processing roller for transporting the film,
A chamber having an opening facing the processing roller,
A plurality of discharge electrodes provided in the chamber and arranged in the transport direction of the film,
While including a suction means for sucking the gas in the chamber,
In the vicinity of the discharge electrode located on at least one side or both sides of the film transport direction upstream or downstream, on the side opposite to the processing roller across the discharge electrode, fresh air flowing into the chamber is provided. A surface treatment apparatus which is provided with guide means for guiding, and the fresh air is guided to a facing interval between the discharge electrode and the guide means. The surface treatment apparatus according to claim 1, wherein the guide means is a plate that maintains a distance from the discharge electrode. The surface treatment apparatus according to claim 1 or 2, wherein the guide means is a plate that maintains a distance from the discharge electrode and has one or more slits formed therein. The surface treatment apparatus according to claim 1, wherein the guiding means also serves as a side wall of the chamber.

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