JP6748520B2 - Calibration tool manufacturing method and three-dimensional measuring apparatus - Google Patents

Description

The present invention relates to a method for manufacturing a calibrator and a three-dimensional measuring device, and more particularly, to a method for manufacturing a calibrator for calibrating optical parameters of an optical three-dimensional measuring device and an improvement in the three-dimensional measuring device.

A three-dimensional measuring device is a measuring instrument that three-dimensionally measures the shape and dimensions of an object to be measured, and uses the principle of triangulation etc. to make points that consist of position information of many measuring points in a three-dimensional space. Group data can be acquired. For example, the striped pattern light is projected onto the measurement target placed on the stage, and the measurement target on the stage is photographed by the camera in this state. The height information of the object to be measured is obtained from the pattern deviation and the degree of distortion by analyzing the photographed image.

In an optical three-dimensional measuring device including a projector that irradiates a measurement object on the stage with measurement light and a camera that receives the measurement light reflected by the measurement object and generates a captured image, various optical parameters are used. Based on, the position information of the measuring point is obtained. For example, the focal length and distortion of the lens, the relative position between the camera and the projector, the angle between the light receiving axis and the stage or the light projecting axis, the relative position between the lens and the image sensor, and the like are used as optical parameters. Therefore, in order to obtain accurate position information, it is necessary to measure or estimate the optical parameters with a device that is actually completed, considering variations during manufacturing or assembly, and the work is called calibration. be called.

A calibration tool having a known pattern or shape is used for the calibration of the three-dimensional measuring device. The calibrator is measured as an object to be measured by the three-dimensional measuring device to be calibrated, and the obtained dimensional value is compared with the calibrated dimensional value previously measured for the calibrator to calibrate the optical parameter. Usually, the dimension value for calibration is measured by a device having higher accuracy than the three-dimensional measuring device to be calibrated, such as an image measuring device.

In the conventional three-dimensional measuring device, the calibration tool and the dimension value for calibration are individually managed. Therefore, there is a problem that the dimensional value for calibration is mistaken or lost. For example, the dimension value for calibration is recorded and stored in a recording medium such as an optical disk. For this reason, there is a possibility that a user who uses a plurality of calibrating tools of different types may mix recording media with each other.

The present invention has been made in view of the above circumstances, and an object of the present invention is to provide a method for manufacturing a calibration tool that can calibrate optical parameters without being affected by manufacturing variations in the calibration tool. .. Moreover, it aims at providing the manufacturing method of the calibrating tool which can prevent a mistake in the dimensional value for calibration, or loss.

It is another object of the present invention to provide a three-dimensional measuring device that can calibrate optical parameters without being affected by manufacturing variations of calibrators. Moreover, it aims at providing the three-dimensional measuring device which can read the optical reading code from a calibration tool and can acquire the dimension value for calibration.

A method for manufacturing a calibration tool according to a first aspect of the present invention is a method for manufacturing a calibration tool for calibrating an optical parameter of an optical three-dimensional measuring apparatus, wherein the calibration tool is provided on a plane for measurement. A mark forming step for forming a plurality of characteristic marks on the same, a calibration information generating step for measuring dimensions of the plurality of characteristic marks and generating calibration information consisting of a plurality of dimension values, and converting the calibration information into an optical reading code. And a code arranging step for arranging the optical reading code on the calibrator.

According to such a configuration, since a plurality of characteristic marks are formed on the calibration tool and the dimension measurement is performed on these characteristic marks to generate the calibration information, the optical parameters are not affected by the manufacturing variation of the calibration tool. Can be calibrated. Further, since the calibration information is converted into an optical reading code and placed on the calibrating tool, it is possible to prevent dimensional values for calibration from being mistaken or lost.

The method for manufacturing a calibration tool according to the second aspect of the present invention is configured such that, in addition to the above configuration, the mark forming step is a step of forming the characteristic mark on the calibration tool by printing. With such a configuration, it is possible to calibrate the optical parameters without being affected by a printing error when the calibrator is manufactured. Further, the height of each feature mark can be easily made uniform.

In the calibration tool manufacturing method according to the third aspect of the present invention, in addition to the above configuration, the mark forming step is a step of forming the characteristic mark on the disc-shaped calibration tool, and the code arranging step is , The step of disposing the optical reading code outside the area where the characteristic mark is formed. With such a configuration, the optical reading code can be read by using the reading unit that reads the characteristic mark from the calibrating tool while suppressing the deterioration of the calibration accuracy.

A three-dimensional measuring apparatus according to a fourth aspect of the present invention provides a light projecting unit that irradiates a measurement object with measurement light having a pattern, and receives the measurement light reflected by the measurement object to determine a received light amount. A head unit including a light receiving unit that generates a received light signal that represents, a calibration information storage unit that holds calibration information for calibrating optical parameters, and a three-dimensional shape of the measurement target based on the received light signal and the calibration information. The point cloud data generating means for generating the point cloud data representing the point, the dimension calculation means for accepting the designation of the measurement point and calculating the dimension value of the measurement point based on the point cloud data, and the calibration tool are arranged. Code reading means for decoding the optical reading code to obtain the dimension value for calibration, the dimension value for calibration, and the calibration information based on the dimension value calculated with the calibration tool as the measurement object. And proofreading means for updating. The calibration tool is provided with a plane for measurement, a plurality of feature marks are formed on the plane, the calibration means, a plurality of dimension values calculated for the plurality of feature marks of the calibration tool The calibration information is updated based on the result of comparison with the dimension value for calibration.

According to such a configuration, since the point cloud data is generated based on the light receiving signal from the light receiving unit and the calibration information, accurate position information can be acquired without being affected by variations in manufacturing and assembly. be able to. Further, since the calibration dimension value is read from the calibration tool and the calibration information is updated, the optical parameters can be calibrated without being affected by manufacturing variations of the calibration tool. Further, since the optical reading code arranged on the calibration tool is decoded, the optical reading code can be read from the calibration tool to obtain the dimensional value for calibration.

In the three-dimensional measuring apparatus according to the fifth aspect of the present invention, in addition to the above configuration, the code reading unit is configured to decode the optical read code based on the light receiving signal from the light receiving unit. With such a configuration, the configuration of the device can be simplified as compared with the case where the light receiving unit for reading the optical reading code from the calibration tool is provided separately from the measurement light receiving unit.

In the three-dimensional measuring apparatus according to the sixth aspect of the present invention, in addition to the above configuration, the code reading unit is based on the received light signal when the measuring tool is irradiated with uniform measuring light from the light projecting unit. , Configured to decode the optical read code. With such a configuration, the configuration of the device can be simplified as compared with the case where the light projecting unit for reading the optical reading code from the calibration tool is provided separately from the light projecting unit for measurement.

The three-dimensional measuring apparatus according to the seventh aspect of the present invention further includes, in addition to the above configuration, a light blocking unit that blocks ambient light from entering the measurement region. With such a configuration, it is possible to prevent the measurement accuracy from decreasing due to the influence of ambient light.

The three-dimensional measuring apparatus according to an eighth aspect of the present invention, in addition to the above configuration, allows a stage having a placement surface on which the measurement object is placed and the stage to be rotatable about a vertical rotation axis. A stage holding part for holding, a connecting part for fixedly connecting the head part and the stage holding part in a state where the optical axes of the light projecting part and the light receiving part are inclined with respect to the rotation axis, Rotation driving means for switching the imaging angle by rotating the stage, and point cloud synthesizing means for synthesizing the plurality of point cloud data having different imaging angles and generating synthetic point cloud data are further provided.

With such a configuration, the head unit and the stage holding unit are fixedly connected in a state in which the optical axes of the light projecting unit and the light receiving unit are inclined with respect to the rotation axis of the stage, so that the stage is rotated. By switching the imaging angle, it is possible to photograph the side surface or the back surface of the measurement target. Further, by combining a plurality of point cloud data having different imaging angles, it is possible to obtain combined point cloud data with a smaller blind spot.

In the three-dimensional measuring apparatus according to the ninth aspect of the present invention, in addition to the above configuration, the calibration tool has a flat plate shape, and the stage includes attitude adjusting means for inclining the mounting surface with respect to the rotation axis. Configured to have. According to such a configuration, by mounting the calibration tool on the mounting surface of the stage, the calibration tool can be directly opposed to the light receiving section.

The three-dimensional measuring apparatus according to a tenth aspect of the present invention includes, in addition to the above configuration, a warp detection unit that detects a warp of the calibration tool based on the plurality of point group data having different imaging angles, The calibrating unit is configured to correct the plurality of dimension values calculated for the plurality of characteristic marks using the warpage detection result. According to such a configuration, the dimensional error due to the warp of the calibration tool is corrected, so that the calibration accuracy can be improved.

According to the present invention, optical parameters can be calibrated without being affected by manufacturing variations of calibrators. In particular, it is possible to provide a method for manufacturing a calibrating tool that can prevent dimensional values for calibration from being mixed up or lost. Further, it is possible to provide a three-dimensional measuring device capable of reading the optical reading code from the calibration tool and acquiring the dimension value for calibration.

It is a system diagram showing an example of 1 composition of three-dimensional measuring device 1 by an embodiment of the invention. It is explanatory drawing which showed typically an example of 1 structure of the measurement part 2 of FIG. 3 is a flowchart showing an example of an operation at the time of dimension measurement in the three-dimensional measuring device 1. 4 is a flowchart showing an example of detailed operation regarding step S101 (brightness adjustment of floodlight) of FIG. 3. 4 is a flowchart showing an example of detailed operation regarding step S102 (brightness adjustment of texture illumination) in FIG. 3. 4 is a flowchart showing an example of detailed operation regarding step S113 (data analysis) of FIG. 3. It is the figure which showed the light shielding covers 61 and 62 provided in the measurement part 2 of FIG. 1, and the stage plate 211 which can tilt the mounting surface 213. It is a top view showing an example of 1 composition of calibrator 7. FIG. 9 is a cross-sectional view of the calibration tool 7 of FIG. 8 taken along the line AA. It is sectional drawing which expanded and showed a part of silicon substrate 70 of FIG. 6 is a flowchart showing an example of a manufacturing process of the calibrator 7. FIG. 8 is a view showing a convex portion 214 for positioning the calibration tool, which is provided on the stage plate 211 of FIG. 7. It is the figure which showed the measuring part 2 with which the calibration tool 7 was arrange|positioned on the stage plate 211, and the case where the stage plate 211 is seen from the upper side is shown. It is the figure which showed the measuring part 2 with which the calibration tool 7 was arrange|positioned on the stage plate 211, and the case where the stage plate 211 is seen from the side is shown. FIG. 2 is a block diagram showing an example of a functional configuration in information processing terminal 5 in FIG. 1. FIG. 16 is a diagram showing an example of an operation at the time of calibration in the information processing terminal 5 of FIG. 15 , in which an operation screen 30 displayed on the display unit 51 is shown. FIG. 16 is a diagram showing an example of an operation at the time of calibration in the information processing terminal 5 of FIG. 15, in which rotational positions of the stage 21 corresponding to three different imaging angles are shown. 16 is a flowchart showing an example of an operation at the time of calibration in the information processing terminal 5 in FIG.

First, the schematic configuration of the three-dimensional measuring apparatus according to the present invention will be described below with reference to FIGS.

<3D measuring device 1>
FIG. 1 is a system diagram showing a configuration example of a three-dimensional measuring apparatus 1 according to an embodiment of the present invention. The three-dimensional measuring device 1 is a measuring device that optically measures the shape of the measuring object W, and includes a measuring unit 2, a controller 4, and an information processing terminal 5.

<Measurement unit 2>
The measurement unit 2 is a measurement unit that irradiates the measurement object W on the stage 21 with measurement light composed of visible light, receives the measurement light reflected by the measurement object W, and generates a captured image. 20, a stage 21, a stage holding unit 22, a rotation driving unit 23, and a control board 27.

The head unit 20 emits a measuring light having a pattern onto the measuring object W, and a light receiving section 25 that receives the measuring light reflected by the measuring object W and generates a light receiving signal indicating the received light amount. And the texture illumination emitting unit 26.

The stage 21 is a work table having a placement surface on which the measurement target W is placed. The stage 21 includes a disc-shaped stage plate 211 and a stage base 212 that supports the stage plate 211.

The stage plate 211 can be bent and fixed in the vicinity of the center, and can function as an inclined table for allowing the measuring object W to face the light receiving unit 25. The stage holding unit 22 holds the stage 21 rotatably in order to adjust the imaging angle of the measuring object W on the stage 21. The rotation drive unit 23 switches the imaging angle by rotating the stage 21.

The light receiving unit 25 is a fixed-magnification camera that captures an image of the measurement target W on the stage 21, and includes a light receiving lens 251 and an image sensor 252. The image pickup element 252 includes a large number of light receiving elements that receive the measurement light from the measurement target W via the light receiving lens 251 and generate a light reception signal indicating the amount of received light, and a captured image is generated from the light reception signal. As the image sensor 252, for example, an image sensor such as a CCD (Charge Coupled Devices) or a CMOS (Complementary Metal Oxide Semiconductor) is used. The image sensor 252 is, for example, a monochrome image sensor.

The light projecting unit 24 is an illuminating device that irradiates the measuring object W on the stage 21 with measuring light, and includes a light source 241, a collector lens 242, a pattern generation unit 243, and a light projecting lens 244. As the light source 241 for projecting light, for example, an LED (light emitting diode) or a halogen lamp that generates monochromatic light is used. Since it is easy to correct chromatic aberration and the like, it is more advantageous to use the monochromatic light emitting light source 241 than to use a white light source. Since a shorter wavelength is more advantageous for increasing the resolution of shape measurement, it is preferable to use a blue light source, for example, a blue LED as the light projecting light source 241. However, a wavelength that allows the image sensor 252 to receive light with a good S/N is selected.

When the light source 241 for projecting light of a single color is used, if the image sensor 252 is a color image sensor, the light receiving element of RG cannot be used. Therefore, only the light receiving element of B is used, and the number of usable pixels is reduced. become. Therefore, when the pixel size and the number of pixels are made uniform, it is more advantageous to use a monochrome image sensor for the image sensor 252.

The light emitted from the light projecting light source 241 enters the pattern generation unit 243 via the collector lens 242. Then, the measurement light emitted from the pattern generation unit 243 is applied to the measurement object W on the stage 21 via the light projecting lens 244.

The pattern generation unit 243 is a device for generating pattern light for structured illumination, and can switch between uniform measurement light and measurement light having a two-dimensional pattern. For the pattern generation unit 243, for example, a DMD (Digital Micromirror Device) or a liquid crystal panel is used. The DMD is a display element in which a large number of minute mirrors are arranged two-dimensionally and the tilt state of each mirror is controlled to switch between a bright state and a dark state for each pixel.

The structured illumination method for measuring the three-dimensional shape of the measuring object W using the principle of triangulation includes a sinusoidal phase shift method, a multi-slit method, a spatial code method, and the like. The sine wave phase shift method is an illumination method in which a sine wave-shaped stripe pattern is projected on the measurement target W and a captured image is acquired every time the stripe pattern is moved at a pitch shorter than the cycle of the sine wave. The three-dimensional shape data is obtained by obtaining the phase value at each pixel from the brightness value of each captured image and converting it into height information.

The multi-slit method is an illumination method in which a thin line-shaped stripe pattern is projected on the measuring object W and a captured image is acquired each time the stripe pattern is moved at a pitch narrower than the interval between stripes. The three-dimensional shape data is obtained by obtaining the photographing timing of the maximum luminance in each pixel from the luminance value of each photographed image and converting it into height information.

The space code method is an illumination method in which a plurality of striped patterns having a black-and-white duty ratio of 50% and different striped pattern widths are sequentially projected onto a measurement target W to acquire a captured image. The three-dimensional shape data is obtained by obtaining the code value in each pixel from the brightness value of each captured image and converting the code value into height information.

The pattern generation unit 243 can generate the above-mentioned striped pattern as a two-dimensional pattern. In this three-dimensional measuring apparatus 1, by combining the multi-slit method and the spatial code method, three-dimensional shape data can be acquired with high resolution and high accuracy.

In addition, in the three-dimensional measuring apparatus 1, the two light projecting units 24 are arranged symmetrically with the light receiving unit 25 interposed therebetween. The light projecting axes J2 and J3 of each light projecting section 24 are inclined with respect to the light receiving axis J1 of the light receiving section 25 in order to use the principle of triangulation. In the light projecting section 24, the light projecting lenses J2 and J3 are tilted by offsetting the light projecting lens 244 to the light receiving axis J1 side with respect to the optical axes of the light projecting light source 241, the collector lens 242 and the pattern generating unit 243. I am letting you. By adopting such a configuration, the measuring unit 2 can be downsized as compared with the case where the entire light projecting unit 24 is tilted.

The texture illumination emitting unit 26 emits uniform illumination light, which is visible light, for detecting the color or pattern of the measurement target W as surface texture information toward the measurement target W on the stage 21. The texture illumination emitting unit 26 has a light projecting axis substantially parallel to the light receiving axis J1 of the light receiving unit 25, and is arranged so as to surround the light receiving lens 251 of the light receiving unit 25. Therefore, as compared with the illumination from the light projecting unit 24, a shadow is less likely to be formed on the measuring object W, and the blind spot at the time of photographing is reduced.

The control board 27 processes a control circuit for controlling the rotation drive unit 23, a drive circuit for driving the light source 241 for projecting light of the light projecting unit 24 and the pattern generating unit 243, and a light receiving signal from the image sensor 252 of the light receiving unit 25. A circuit board provided with a processing circuit and the like.

<Controller 4>
The controller 4 is a control device for the measurement unit 2, and includes a texture light source 41 that generates illumination light for texture illumination, a control board 42 provided with a drive circuit for the texture light source 41, and the like in the measurement unit 2. It is configured by a power supply 43 that supplies power to each device. The texture light source 41 sequentially turns on illumination light of each color of R (red), G (green), and B (blue) in order to obtain a color texture image from a captured image. Since the image sensor 252 is a monochrome image sensor, color information cannot be acquired when texture information is acquired using a white light source as the texture light source 41. Therefore, the texture light source 41 illuminates by switching RGB.

If a monochrome texture image is sufficient, a white light source such as a white LED may be used as the texture light source 41, or a light source that simultaneously emits RGB monochromatic light may be used. A color image sensor may be used as the image sensor 252 when the decrease in measurement accuracy is allowed to some extent. The illumination light is transmitted to the texture illumination emitting unit 26 of the measuring unit 2 via the light guide 3. The control board 42 and the power supply 43 are connected to the control board 27 of the measuring unit 2.

<Information processing terminal 5>
The information processing terminal 5 is a terminal device that controls the measuring unit 2 and performs screen display of a captured image, registration of setting information for dimension measurement, generation of three-dimensional shape data, dimension calculation of the measurement object W, and the like. A display unit 51, a keyboard 52 and a mouse 53 are connected. The display unit 51 is a monitor device that displays a captured image and setting information on the screen. The keyboard 52 and the mouse 53 are input devices with which the user inputs operations. This information processing terminal is, for example, a personal computer, and is connected to the control board 27 of the measuring unit 2.

FIG. 2 is an explanatory diagram schematically showing a configuration example of the measuring unit 2 in FIG. The measuring unit 2 includes a head unit 20 including two image capturing units 25a and 25b having different imaging magnifications, a stage holding unit 22 that holds a stage 21 rotatably about a vertical rotation axis J4, and a head unit. 20 and the stage holder 22.

The connecting portion 28 is arranged such that the light projecting axes J2 and J3 of the light projecting section 24 and the light receiving axes J11 and J12 of the image capturing sections 25a and 25b are inclined with respect to the rotation axis J4. And are fixedly connected. Therefore, the relative positional relationship between the stage 21 and the imaging units 25a and 25b is constant, and the point cloud data can be easily combined and combined for a plurality of imaging angles at which the rotation angle of the stage 21 is different from each other.

The imaging unit 25a is a low-magnification light receiving unit 25. The imaging unit 25b is a light receiving unit 25 having a higher magnification than the imaging unit 25a. The image capturing units 25a and 25b are arranged such that the light receiving axes J11 and J12 are inclined with respect to the rotation axis J4 of the stage 21 in order to obtain three-dimensional shape data of the entire measurement target. ..

For example, the inclination angle of the light receiving axes J11 and J12 with respect to the rotation axis J4 is about 45°. Further, the image pickup unit 25b is arranged below the image pickup unit 25a so that the focus position FP is below the focus position FP of the image pickup unit 25a on the rotation axis J4 of the stage 21, and the light receiving axis J12 receives the light. It is substantially parallel to the axis J11.

By adopting such a configuration, the measurable region R1 of the imaging unit 25a and the measurable region R2 of the imaging unit 25b can be appropriately formed on the stage 21. The measurable regions R1 and R2 are both cylindrical regions centered on the rotation axis J4 of the stage 21, and the measurable region R2 is formed in the measurable region R1.

Steps S<b>101 to S<b>113 of FIG. 3 are a flowchart showing an example of the operation of the coordinate measuring apparatus 1 at the time of dimension measurement. First, the coordinate measuring apparatus 1 photographs the measuring object W placed on the stage 21 by the light receiving unit 25, displays the photographed image on the display unit 51, and adjusts the brightness of the floodlight (step). S101). This brightness adjustment is performed by emitting uniform measuring light from the light projecting unit 24 or by irradiating measuring light composed of pattern light.

Next, the three-dimensional measuring apparatus 1 switches to texture illumination, acquires a captured image, displays it on the display unit 51, and adjusts the brightness of texture illumination (step S102). This brightness adjustment is performed by sequentially irradiating the texture illumination emitting section 26 with illumination light of each color of R (red), G (green), and B (blue), or simultaneously. The order of step S101 and step S102 may be interchanged.

The three-dimensional measuring apparatus 1 repeats the processing procedure of steps S101 and S102 until the illumination condition is determined, and after the illumination condition is determined, if the user instructs to start the measurement (step S103), the light projecting unit 24 outputs Pattern light is projected (step S104), and a pattern image is acquired (step S105). This pattern image is a photographed image of the measuring object W on the stage 21. The projection of the pattern light and the acquisition of the captured image are performed by synchronizing the pattern generation unit 243 and the light receiving unit 25.

Next, the coordinate measuring apparatus 1 switches to texture illumination and acquires a texture image (steps S106 and S107). This texture image is obtained by sequentially irradiating R (red), G (green), and B (blue) illumination lights of respective colors to synthesize a plurality of captured images. At the time of connection measurement, the processing procedure from step S104 to step S107 is repeated while sequentially switching the stage 21 to a plurality of imaging angles designated in advance (step S108).

Next, the three-dimensional measuring apparatus 1 analyzes the pattern image acquired in step S105 by a predetermined measurement algorithm to generate three-dimensional shape data (step S109). In the step of generating the three-dimensional shape data, the three-dimensional shape data obtained from a plurality of photographed images having different image pickup angles are combined as necessary. Then, the three-dimensional measuring apparatus 1 maps the texture image on the generated three-dimensional shape data (step S110) and displays it on the display unit 51 as the three-dimensional shape of the measuring object W (step S111).

The three-dimensional measuring apparatus 1 repeats the processing procedure from step S101 to step S111 while changing the imaging angle, the shooting condition, and the like until the three-dimensional shape data is obtained for the desired measurement location (step S112), and the desired measurement location is obtained. When the data is obtained and the user instructs the data analysis, the dimension measurement application program analyzes the data of the three-dimensional shape data and calculates the dimension of the measurement object W (step S113).

Steps S201 to S211 in FIG. 4 are flowcharts showing an example of detailed operation regarding step S101 (brightness adjustment of the floodlight) in FIG. 3, and the operation of the coordinate measuring apparatus 1 is shown. First, the three-dimensional measuring apparatus 1 turns on the left light projecting unit 24 (step S201), and receives the brightness adjustment by the user (step S202).

Next, the coordinate measuring apparatus 1 receives the selection of the photographing magnification by the user, and if the photographing magnification is changed, switches to the corresponding imaging unit 25a or 25b (step S203). At this time, the three-dimensional measuring apparatus 1 adjusts the position and orientation of the measuring object W by rotating the stage 21 based on a user operation if the desired measurement location is not illuminated (step S204). , S205). The position and orientation may be adjusted by turning on the left and right light projecting portions 24 at the same time.

Then, the three-dimensional measuring apparatus 1 accepts the brightness adjustment by the user again if the brightness of the measurement location is not appropriate (steps S206 and S207). The three-dimensional measuring apparatus 1 repeats the processing procedure from step S203 to step S207 until the user instructs to end the setting (step S208).

Next, when the user gives an instruction to end the setting, the three-dimensional measuring apparatus 1 registers the illumination condition designated by the user as the setting information, and switches to the light projecting unit 24 on the right side (step S209). Brightness adjustment is accepted (step S210). The three-dimensional measuring apparatus 1 repeats the processing procedure of step S210 until the user gives an instruction to end the setting. When the user gives an instruction to end the setting, the lighting condition designated by the user is registered as the setting information. The process ends (step S211).

Steps S301 to S313 in FIG. 5 are flowcharts showing an example of detailed operation regarding step S102 (brightness adjustment of texture illumination) in FIG. 3, and the operation of the coordinate measuring apparatus 1 is shown. First, the three-dimensional measuring apparatus 1 turns on the texture illumination (step S301) and receives the brightness adjustment by the user (step S302). If the brightness of the measurement location is not appropriate (step S303), the three-dimensional measuring apparatus 1 repeats the processing procedure of step S302 and accepts the brightness adjustment by the user again.

Next, the coordinate measuring apparatus 1 accepts the selection of the image quality of the texture image by the user (step S304), and if the normal image quality is selected, the normal image quality is designated, and the illumination condition and the shooting condition designated by the user are set. It is registered as setting information, and this processing ends (step S313).

On the other hand, if the user selects the full focus image quality, the coordinate measuring apparatus 1 specifies the full focus image quality (steps S305 and S306). The full-focus image quality is an image quality obtained by depth combination processing, and by combining a plurality of captured images acquired while changing the focal position, an image in focus on the entire image can be obtained.

Then, the three-dimensional measuring apparatus 1 specifies the HDR image quality if the user selects the HDR (high dynamic range) image quality (steps S307 and S308). With regard to HDR image quality, an image with a wide dynamic range can be obtained by synthesizing a plurality of captured images acquired with different exposure times.

Next, when the user gives an instruction to confirm the texture image (step S309), the three-dimensional measuring apparatus 1 acquires a captured image based on the illumination condition and the capturing condition specified by the user (step S310), A texture image is created and displayed on the display unit 51 (step S311).

The three-dimensional measuring apparatus 1 repeats the processing procedure from step S305 to step S311 until the user instructs the end of the setting, and when the user instructs the end of the setting, the lighting condition and the photographing condition designated by the user are set. It is registered as the setting information, and this process ends (step S312).

Steps S401 to S413 in FIG. 6 are flowcharts showing an example of detailed operation regarding step S113 (data analysis) in FIG. 3, and the operation of the coordinate measuring apparatus 1 is shown. First, the three-dimensional measuring apparatus 1 reads three-dimensional shape data in a predetermined data format based on a user operation, and displays the three-dimensional shape of the measurement object W on the display unit 51 (steps S401 and S402).

Next, the three-dimensional measuring apparatus 1 performs preprocessing such as noise removal, hole filling, and unnecessary data deletion (step S403), and accepts the user's adjustment of the display magnification and posture (step S404).

Next, the three-dimensional measuring apparatus 1 accepts designation of a point group for extracting geometrical elements at measurement points on the three-dimensional shape being displayed (step S405). Then, the coordinate measuring apparatus 1 receives the designation of the shape type of the geometric element (step S406). Shape types include points, lines, circles, surfaces, spheres, cylinders, cones, and the like. The order of step S405 and step S406 may be exchanged.

The three-dimensional measuring apparatus 1 repeats the processing procedure of steps S405 and S406 until designation of the point cloud and shape type is completed for all geometric elements (step S407), and when designation of the point cloud and shape type is completed. , The selection of the geometric element by the user is accepted (step S408). Then, the coordinate measuring apparatus 1 receives the selection of the dimension type for the selected geometric element (step S409). The dimension types include distance, angle, geometrical tolerance, diameter, and the like. The order of steps S408 and S409 may be interchanged.

Next, the three-dimensional measuring apparatus 1 specifies the geometric element by fitting the basic shape to the point group for the selected geometric element, and calculates the dimension value between the geometric elements (step S410). Next, the three-dimensional measuring apparatus 1 displays the dimension values in association with the measurement points on the three-dimensional shape of the measurement object W (step S411). If there are other desired measurement points, the three-dimensional measuring apparatus 1 repeats the processing procedure from step S408 to step S411 (step S412). If there are no other desired measurement points, the measurement result is output. This process ends (step S413).

Next, a more detailed configuration of the three-dimensional measuring apparatus 1 according to the present invention will be described below with reference to FIGS.

FIG. 7 is a diagram showing the light-shielding covers 61 and 62 provided in the measurement unit 2 of FIG. 1 and the stage plate 211 whose mounting surface 213 can be tilted. In the drawing, the right side surface of the measuring unit 2 is shown.

By bending the stage plate 211 near the center, the mounting surface 213 can be inclined with respect to the rotation axis J4. Further, the stage plate 211 can be fixed to the stage base 212 while the mounting surface 213 is tilted, and the posture of the measurement object W can be adjusted.

For example, the stage plate 211 can be fixed with the mounting surface 213 inclined with respect to the horizontal plane by an inclination angle θ ₁ =45°. The light receiving axis J1 of the light receiving unit 25 is inclined with respect to the rotation axis J4 by an inclination angle θ ₂ =45°. Therefore, by rotating the stage 21 and switching the imaging angle from the state where the measurement target W is directly facing the light receiving unit 25 on the stage plate 211, the side surface of the measurement target W can be captured.

The light shielding cover 61 is a resin shade member for covering the upper surface of the measurement area, and is arranged so as to face the stage 21. The light shielding cover 61 is detachably attached to the connecting portion 28. The light blocking cover 62 is a shade member made of cloth for covering the side surface of the measurement region, and is arranged along the outer edge of the light blocking cover 61. The light shielding cover 62 is detachably attached to the light shielding cover 61, and can be folded and stored in a bellows shape.

By unfolding the light-shielding cover 62 downward, the upper surface, the left and right side surfaces, and the front surface of the measurement area on the stage 21 are covered with the light-shielding covers 61 and 62, and ambient light can be prevented from entering the measurement area. ..

<Calibration tool 7>
FIG. 8 is a plan view showing a configuration example of the calibration tool 7. In the figure, the front surface of the calibration tool 7 is shown. FIG. 9 is a cross-sectional view showing a cut surface when the calibration tool 7 of FIG. 8 is cut along an AA cutting line. FIG. 10 is a sectional view showing a part of the silicon substrate 70 of FIG. 9 in an enlarged manner.

The calibrator 7 is an inspection device for calibrating the optical parameters of the three-dimensional measuring device 1, and has a measurement plane provided on the front surface, and a plurality of characteristic marks 8 are formed on the plane. The calibrator 7 has a disk shape and is composed of a silicon substrate 70, a substrate holder 71, optical reading codes 72 and 73, a cushioning material 75, and a base member 76.

The silicon substrate 70 is a base material for forming a flat surface having high flatness, and is made of a silicon wafer. The silicon substrate 70 is a substantially circular flat plate and has a large number of characteristic marks 8 formed on one main surface. The diameter of the silicon substrate 70 is a size capable of covering the visual field of the light receiving unit 25, for example, about 300 mm. A semiconductor wafer other than a silicon wafer may be used as the base material of the calibration tool 7. Further, glass, ceramics, or metal may be used as the base material of the calibration tool 7 as long as flatness of several μm or less can be achieved by polishing the surface.

The characteristic mark 8 is a reading object for calibration that is formed on the silicon substrate 70 by printing. The characteristic mark 8 is composed of dots having different sizes, for example. In this characteristic mark 8, white dots are formed on a black base layer 9. The base layer 9 is a solid ink film over the entire main surface of the silicon substrate 70. Each dot has a circular shape and is arranged in a grid pattern. The dots are made of an ink film formed so as to overlap the base layer 9. The characteristic mark 8 and the base layer 9 are formed by high-precision printing capable of accurately controlling the thickness of the ink film. For example, the thickness of the ink film is about 1 μm.

The silicon substrate 70 is fixed to the base member 76 via the cushioning material 75. The base member 76 is made of, for example, a disc-shaped metal plate. The cushioning material 75 is a support member that supports the silicon substrate 70 so that vibration and impact are not transmitted, and is made of, for example, sponge-like resin. The peripheral edge of the back surface of the silicon substrate 70 is bonded to the cushioning material 75 using an adhesive.

The substrate holder 71 is a holding member for holding the silicon substrate 70 via the cushioning material 75 and the base member 76. The substrate holder 71 is made of an annular resin member, the inner peripheral edge of which faces the front peripheral edge of the silicon substrate 70, and the outer peripheral edge of which is fixed to the peripheral edge of the base member 76. The substrate holder 71 is screwed to the base member 76.

A gap is provided between the inner peripheral edge of the substrate holder 71 and the silicon substrate 70 to prevent stress from being applied to the silicon substrate 70 from the substrate holder 71, and the silicon substrate 70 is warped. Can be suppressed.

The optical read codes 72 and 73 are optically readable objects obtained by encoding the calibration information. The calibration information includes a plurality of dimension values measured for a plurality of characteristic marks 8 on the silicon substrate 70. The dimension values include, for example, the size of each feature mark 8, the position coordinates of the center point of the silicon substrate 70 in the main surface, and the height from the main surface.

The optical reading code 72 and 73 is a two-dimensional code such as QR codes or data matrix code, the periphery of the calibration tool 7, i.e., are disposed on the substrate holder 71. As compared with the case where the optical reading codes 72 and 73 are arranged in the central portion of the calibrator 7, it is possible to suppress a decrease in calibration accuracy.

Specifically, a sheet-shaped member on which the optical reading codes 72 and 73 are printed is attached to the front surface of the substrate holder 71. That is, the optical reading codes 72 and 73 are arranged on the same surface as the characteristic mark 8. In addition, a transparent protective sheet such as a laminated film is attached to the sheet-shaped member in order to prevent the sheet-shaped member from being soiled or scratched.

In the calibrator 7, the calibration information is divided into four pieces and converted into optical reading codes 72 and 73 having different sizes. Each of the two optical reading codes 73 has a size larger than that of the optical reading code 72, and is arranged near the engaging portion 74 so as to sandwich the engaging portion 74. The two optical reading codes 72 are arranged at positions farther from the engaging portion 74 than the optical reading code 73. The optically read codes 72 and 73 may be one-dimensional codes such as bar codes.

The engagement portion 74 is a protrusion for positioning the calibration tool 7 with respect to the stage 21 of the measurement unit 2, and is provided on the substrate holder 71. The engagement portion 74 has a shape in which a part of the outer edge of the substrate holder 71 is projected outward, and engages with a convex portion of the stage plate 211 described later.

Steps S501 to S504 of FIG. 11 are a flowchart showing an example of the manufacturing process of the calibration tool 7. First, a plurality of characteristic marks 8 are formed by printing on the measurement plane provided on the calibrator 7 (step S501). In this step S501, after the black underlayer 9 is formed on the disk-shaped silicon substrate 70, a dot pattern consisting of large and small dots is formed on the underlayer 9.

Next, the dimension measurement is performed on the plurality of characteristic marks 8 on the calibrator 7, and calibration information including a plurality of dimension values is generated (step S502). The dimension measurement is performed by using a measuring device having an accuracy higher than the printing accuracy of the dot pattern, for example, an image measuring device. Next, after converting the calibration information into the optical reading codes 72 and 73 (step S503), the optical reading codes 72 and 73 are arranged on the calibrator 7 (step S504). The optical reading codes 72 and 73 are arranged outside the area where the characteristic mark 8 is formed.

By adopting such a configuration, since a plurality of characteristic marks 8 are formed on the calibrator 7 and then dimension measurement is performed on these characteristic marks 8 to generate calibration information, manufacturing variations of the calibrator 7 are affected. The optical parameters can be calibrated without any need. Further, since the calibration information is converted into the optical reading codes 72 and 73 and placed on the calibrator 7, it is possible to prevent the dimensional values for calibration from being mistaken or lost.

Further, the optical parameters can be calibrated without being affected by the printing error in manufacturing the calibrator 7. Further, the height of each feature mark 8 can be easily made uniform. Further, by disposing the optical reading codes 72 and 73 on the peripheral portion of the calibrating tool 7, the optical reading codes 72 and 73 are read by using a reading unit that reads the characteristic mark 8 from the calibrating tool 7 while suppressing a decrease in calibration accuracy. Can be read.

FIG. 12 is a view showing a convex portion 214 for positioning the calibration tool provided on the stage plate 211 of FIG. The upper surface of the stage plate 211 is shown in the drawing. The stage plate 211 is provided with two convex portions 214 for positioning the calibration tool 7. The protrusion 214 is a columnar protrusion protruding upward from an inclined surface formed on the peripheral edge of the stage plate 211.

By arranging the calibration tool 7 in a state where the stage plate 211 is bent and inserting the engagement portion 74 between the convex portions 214, the calibration tool 7 can be positioned so as to directly face the light receiving portion 25. Further, by mounting the calibration tool 7 on the mounting surface 213 of the stage plate 211, the calibration tool 7 can be substantially directly opposed to the light receiving section 25.

13 and 14 are diagrams showing the measuring unit 2 in which the calibration tool 7 is arranged on the stage plate 211. FIG. 13 shows a case where the stage plate 211 is viewed from above. FIG. 14 shows a case where the stage plate 211 is viewed from the side.

When the optical parameters are calibrated, the calibration tool 7 shown in FIGS. 8 to 10 is placed on the stage plate 211 of the measurement unit 2. The calibrator 7 is arranged on the stage plate 211, which is fixed with the mounting surface 213 inclined with respect to the stage base 212, with the measurement plane facing upward.

By engaging the engaging portion 74 of the calibration tool 7 with the convex portion 214 of the stage plate 211, the optical reading codes 72 and 73 are arranged symmetrically with respect to the center line of the inclined surface (a plane for measurement). Further, since the calibration tool 7 is arranged on the stage plate 211 in a bent state, the rotation axis J4 of the stage 21 and the light receiving axis J1 of the light receiving unit 25 are slightly different from the right angle with respect to the measurement plane. They intersect at an angle.

<Information processing terminal 5>
FIG. 15 is a block diagram showing an example of a functional configuration in the information processing terminal 5 of FIG. The information processing terminal 5 includes a measurement control unit 10, a point cloud data generation unit 11, a calibration information storage unit 12, a point cloud storage unit 13, a display control unit 14, a size calculation unit 15, a code reading unit 16, a calibration unit 17, It is composed of a point cloud synthesis unit 18 and a warp detection unit 19.

The measurement control unit 10 controls the rotation drive unit 23 to adjust the imaging angle based on a user operation with the keyboard 52 or the mouse 53, and controls the irradiation of the measurement light by the light projecting unit 24.

The point cloud data generation unit 11 generates point cloud data representing the three-dimensional shape of the measurement object W based on the light reception signal from the light reception unit 25 and the calibration information stored in the calibration information storage unit 12, It is stored in the point cloud storage unit 13. The calibration information consists of a plurality of calibration dimension values for calibrating various optical parameters. The point cloud data includes position information of a large number of measurement points in the three-dimensional space, and is created from a plurality of pattern images acquired each time the fringe pattern projected as the measurement light on the measurement target W is moved.

The display control unit 14 controls the display unit 51 based on the point cloud data in the point cloud storage unit 13 to display the three-dimensional shape of the measuring object W. For example, a three-dimensional shape is displayed on the screen of the display unit 51 so that an object body in which a large number of measurement points are three-dimensionally arranged is viewed from a predetermined viewpoint. The position of the three-dimensional shape (object body) on the screen, the viewpoint, and the display magnification can be arbitrarily specified.

The dimension calculation unit 15 receives the designation of the measurement location and calculates the dimension value of the measurement location based on the point cloud data in the point cloud storage unit 13. The display control unit 14 displays the dimension values calculated by the dimension calculation unit 15 in association with the three-dimensional shape.

The point cloud synthesizing unit 18 synthesizes a plurality of point cloud data having mutually different imaging angles to generate synthetic point cloud data. By synthesizing the plurality of point cloud data obtained at the plurality of imaging angles, the synthesized point cloud data with a smaller blind spot can be obtained. An angle range and an imaging angle for such connection measurement are designated in advance.

The code reading unit 16 decodes the optical reading codes 72 and 73 arranged on the calibrator 7, and acquires the dimension value for calibration. The code reading unit 16 decodes the optical reading codes 72 and 73 based on the light receiving signal from the light receiving unit 25. Specifically, the optical reading codes 72 and 73 read the captured image obtained by irradiating the calibration tool 7 mounted on the stage 21 as the measurement target W with uniform measurement light from the light projecting unit 24. To be

By adopting such a configuration, the configuration of the device can be simplified as compared with the case where a light receiving unit for reading the optical reading codes 72 and 73 from the calibration tool 7 is provided separately from the measurement light receiving unit 25. You can Further, since the optical reading codes 72 and 73 are decoded based on the received light signal when the measuring tool 7 is irradiated with uniform measuring light, the optical reading codes 72 and 73 are read from the calibration tool 7. The configuration of the device can be simplified as compared with the case where the light projecting unit for this is provided separately from the light projecting unit 24 for measurement. The optical reading codes 72 and 73 may be read from a combined image obtained by combining a plurality of pattern images acquired by irradiating the pattern light from the light projecting unit 24.

The calibration unit 17 updates the calibration information in the calibration information storage unit 12 based on the dimension value for calibration and the dimension value calculated with the calibration tool 7 as the measurement object W. The calibration unit 17 updates the calibration information based on the comparison result obtained by comparing the dimension values calculated for the feature marks 8 of the calibration tool 7 with the dimension values for calibration. Specifically, with respect to the calibration tool 7 mounted on the stage 21 as the measurement object W, the characteristic mark 8 calculated by the dimension calculation unit 15 from a plurality of pattern images acquired by projecting a stripe pattern is described. The plurality of dimension values (actually measured values) and the dimension values for calibration acquired by the code reading unit 16 are compared.

The optical parameter calibration process is performed according to a predetermined algorithm. For example, pattern images are acquired at a plurality of imaging angles at which the rotation position of the stage 21 is different, and point cloud data representing the three-dimensional shape of the calibration tool 7 is generated. Specifically, the pattern image is acquired at five predetermined imaging angles.

It is desirable that the imaging angle at the time of calibration includes a rotational position where the optical reading code 72 or 73 is easy to read. For example, it is desirable to include a rotation position where the optical read code 72 or 73 is imaged at a maximum, a rotation position where the optical read code 72 or 73 faces directly without tilting, or a rotation position where the entire code is uniformly illuminated.

In this three-dimensional measuring apparatus 1, the calibration tool 7 has a rotational position in which it faces the light-receiving unit 25, two rotational positions rotated to the right with the rotational position sandwiched therebetween, and two rotational positions rotated to the left. Is specified. The optical reading codes 72 and 73 on the right side of the engaging portion 74 are photographed at the imaging angles corresponding to the two rotation positions rotated to the right. On the other hand, the optical reading codes 72 and 73 on the left side of the engaging portion 74 are imaged at the imaging angles corresponding to the two rotational positions rotated to the left side. The five rotational positions are approximately equidistant.

The optical parameters to be calibrated include the focal length and distortion of the light receiving lens 251, the collector lens 242 or the light projecting lens 244, the relative position between the light receiving unit 25 (camera) and the light projecting unit 24 (projector), the light receiving axis J1 and the stage. 21 or an angle between the light projecting axes J2 and J3, a relative position between the light receiving lens 251 and the image sensor 252, a relative position between the collector lens 242 or the light projecting lens 244 and the light source 241 for projecting light, and the like.

The optical parameters of the light receiving unit 25 are calibrated mainly based on the size and position of each characteristic mark 8. On the other hand, the relative positions of the light receiving section 25 and the light projecting section 24, and the angles of the light receiving axis J1 and the light projecting axes J2, J3 are calibrated mainly based on the appearance of the measuring plane of the calibrator 7.

The warp detection unit 19 detects the warp of the calibration tool 7 based on the plurality of point group data having different imaging angles, and outputs the detection result to the calibration unit 17 .

The calibration unit 17 corrects the plurality of dimension values calculated for the plurality of characteristic marks 8 using the warp detection result of the warp detection unit 19. The optical parameter calibration process is performed using the corrected dimension value. By adopting such a configuration, the dimensional error due to the warp of the calibration tool 7 is corrected, so that the calibration accuracy can be improved.

FIG. 16 is a diagram showing an example of the operation at the time of calibration in the information processing terminal 5 of FIG. 15 , and the operation screen 30 displayed on the display unit 51 is shown. The operation screen 30 is a monitor screen displayed when calibrating the optical parameters, and the image display area 31 displays a captured image captured by the light receiving unit 25.

After tilting the mounting surface 213 of the stage plate 211, installing the calibration tool 7 on this mounting surface 213, and unfolding the light-shielding cover 62 downward, operate the calibration button 32 in the operation screen 30. If so, the calibration process can be started.

FIG. 17 is a diagram showing an example of the operation at the time of calibration in the information processing terminal 5 of FIG. 15, and shows the rotational position of the stage 21 corresponding to three different imaging angles. In the figure, (a) shows a rotational position when the stage 21 is rotated to the right by about 30° from the facing position, and (b) shows the stage plate 211 substantially facing the light receiving unit 25. The rotation position when the stage 21 is rotated is shown, and the rotation position when the stage 21 is rotated leftward about 30° from the facing position is shown in (c).

By rotating the stage 21 to the right by about 30° from the front facing position, the optical reading codes 72 and 73 arranged on the right side of the center line of the measurement plane move to the front side. By imaging the calibrator 7 at an imaging angle corresponding to such a rotational position, the optical reading codes 72 and 73 arranged on the right side of the center line of the measurement plane are read. On the other hand, by rotating the stage 21 to the left by about 30° from the front facing position, the optical reading codes 72 and 73 arranged on the left side of the center line of the measurement plane move to the front side. By imaging the calibrator 7 at an imaging angle corresponding to such a rotational position, the optical reading codes 72 and 73 arranged on the left side of the center line of the measurement plane are read.

Since the stage 21 on which the calibration tool 7 is placed rotates in a state where the plane for measurement of the calibration tool 7 is non-orthogonal to the rotation axis J4, the rotational position of the stage 21 is adjusted to measure The imaging angle with respect to the plane can be switched.

When the calibration tool 7 is recognized at a plurality of imaging angles and the optical parameters are calibrated, the measurement plane of the calibration tool 7 is not orthogonal to the rotation axis J4 of the stage 21 and the optical axis J1 of the light receiving unit 25. By substantially facing with, the imaging angle of the calibration tool 7 with respect to the measurement plane can be changed with the rotation of the stage 21, and the light receiving unit 25 accurately recognizes the measurement plane of the calibration tool 7. can do.

Step in Figure 18 S601～S610 is a flowchart showing an example of operation during the calibration in the information processing terminal 5 of Figure 15. First, the information processing terminal 5 controls the light projecting unit 24 to irradiate the calibration tool 7 on the stage 21 with uniform measurement light (step S601), and acquires a captured image from the light receiving unit 25 (step S602).

Next, the information processing terminal 5 controls the light projecting unit 24 to irradiate the calibration tool 7 on the stage 21 with the pattern light (step S603), and acquires the pattern image from the light receiving unit 25 (step S604). The pattern image is acquired every time the stripe pattern is moved.

Next, the information processing terminal 5 generates point cloud data based on the acquired plurality of pattern images (step S605). The processing procedure from step S601 to step S605 is repeated while switching the imaging angle (steps S606 and S607). When the point cloud data is generated for a plurality of predetermined imaging angles, the information processing terminal 5 cuts out and decodes the optical reading codes 72 and 73 from the captured image by the uniform measurement light and decodes the dimensional values for calibration. It is acquired (step S608).

Next, the information processing terminal 5 calculates the dimension values of the plurality of characteristic marks 8 of the calibration tool 7 based on the point cloud data (step S609). The information processing terminal 5 compares the actual measurement value of the dimension value with the dimension value for calibration for the plurality of characteristic marks 8, updates the calibration information based on the comparison result, and ends this processing (step S610). ..

According to the present embodiment, since the point cloud data is generated based on the light reception signal from the light receiving unit 25 and the calibration information, accurate position information can be acquired without being affected by variations in manufacturing and assembly. can do. Further, since the calibration dimension value is read from the calibration tool 7 and the calibration information is updated, the optical parameters can be calibrated without being affected by manufacturing variations of the calibration tool 7. Further, since the optical reading codes 72 and 73 arranged on the calibrating tool 7 are decoded, the dimensional values for calibration can be obtained by reading the optical reading codes 72 and 73 from the calibrating tool 7.

In the present embodiment, an example in which the head section 20 includes one light receiving section 25 and two light projecting sections 24 has been described, but the present invention limits the configuration of the head section 20 to this. is not. For example, the present invention can be applied to a case where the head section includes one light receiving section 25 and one light projecting section 24, or the head section includes two light receiving sections 25 and one light projecting section 24. is there.

Further, in the present embodiment, an example in which the head unit 20 and the stage holding unit 22 are fixedly connected has been described, but the head unit 20 and the stage holding unit 22 may be separable.

DESCRIPTION OF SYMBOLS 1 Three-dimensional measuring device 2 Measuring part 20 Head part 21 Stage 211 Stage plate 212 Stage base 213 Mounting surface 214 Convex part 22 Stage holding part 23 Rotation drive part 24 Light emitting part 25 Light receiving parts 25a, 25b Imaging part 26 Texture illumination emission Part 27 Control board 28 Connection part 3 Light guide 4 Controller 41 Texture light source 42 Control board 43 Power supply 5 Information processing terminal 51 Display part 52 Keyboard 53 Mouse 61, 62 Light-shielding cover 7 Calibration tool 70 Silicon substrate 71 Substrate holder 72, 73 Optical reading Code 74 Engagement part 75 Buffer material 76 Base member 8 Characteristic mark 9 Underlayer 10 Measurement control part 11 Point cloud data generation part 12 Calibration information storage part 13 Point cloud storage part 14 Display control part 15 Dimension calculation part 16 Code reading part 17 Calibration unit 18 Point group synthesis unit 19 Warp detection unit J1, J11, J12 Light receiving axis J2, J3 Light emitting axis J4 Rotation axis W Measurement object

Claims (6)

A stage having a mounting surface on which the measuring object is mounted,
A stage holder for rotatably holding the stage about a rotation axis;
A light projecting unit that irradiates a measurement object with a measurement light having a pattern, and a head unit that includes a light receiving unit that receives the measurement light reflected by the measurement object and generates a light reception signal indicating a light reception amount,
Calibration information storage means for holding calibration information for optical parameters for calibrating the optical parameters of the head section ,
Point cloud data generation means for generating point cloud data representing the three-dimensional shape of the measurement object based on the received light signal and the calibration information for optical parameters ,
Accepting designation of the measurement point, based on the point cloud data, a dimension calculation means for calculating the dimension value of the measurement point,
To the point cloud data of the measurement plane, which is acquired at a plurality of imaging angles by rotating a calibration tool having a measurement plane on which a plurality of feature marks are formed, with the measurement plane being inclined with respect to the rotation axis. Based on the warp detection means for detecting the warp of the calibration tool,
Decoding the optical reading code placed on the calibration device, a code reading unit obtains calibration information for the calibration tool,
Calibration information for the calibration tool, and, on the basis of the dimension value calculated from a plurality of feature marks formed in the measurement plane of the calibration tool, Bei example and calibration means for updating the calibration information for the optical parameters,
The calibration means corrects the dimension value calculated from the plurality of characteristic marks by using the warp detection result by the warp detection means, and compares the corrected dimension value with the calibration information for the calibration tool . A three-dimensional measuring apparatus, wherein the calibration information for optical parameters is updated based on a comparison result. The three-dimensional measuring apparatus according to claim 1 , wherein the code reading unit decodes the optical read code based on the light receiving signal from the light receiving unit. Said code reading means, on the basis of the photodetection signal when illuminated in uniform measurement light the calibration tool from said light projecting portion, to claim 1 or 2, characterized in that decoding the optical reading code The three-dimensional measuring device described. The three-dimensional measuring apparatus according to any one of claims 1 to 3 , further comprising a light-shielding unit that blocks ambient light from entering the measurement region. In a state in which the optical axis of the light projecting unit and the light receiving portion is inclined with respect to the rotation axis, and a coupling portion that fixedly couples the said head portion said stage holding portion,
By rotating the stage, a rotation driving unit that switches the imaging angle,
The three-dimensional measurement according to any one of claims 1 to 4 , further comprising a point cloud synthesizing unit that synthesizes a plurality of the point cloud data having different imaging angles and generates synthetic point cloud data. apparatus. The calibration tool is a flat plate,
The three-dimensional measuring device according to any one of claims 1 to 5, wherein the stage has a posture adjusting means for inclining the mounting surface with respect to the rotation axis.

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